WO2019003337A1 - Dispositif d'inspection d'irrégularités de peinture et procédé d'inspection d'irrégularités de peinture - Google Patents
Dispositif d'inspection d'irrégularités de peinture et procédé d'inspection d'irrégularités de peinture Download PDFInfo
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- WO2019003337A1 WO2019003337A1 PCT/JP2017/023725 JP2017023725W WO2019003337A1 WO 2019003337 A1 WO2019003337 A1 WO 2019003337A1 JP 2017023725 W JP2017023725 W JP 2017023725W WO 2019003337 A1 WO2019003337 A1 WO 2019003337A1
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- defect
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Definitions
- the present invention relates to a coating defect inspection apparatus and a coating defect inspection method.
- the problem to be solved by the present invention is to provide a coating defect inspection apparatus and a coating defect inspection method capable of inspecting the presence or absence of a coating defect inside a coating film having no unevenness on a surface to be inspected.
- the present invention irradiates the inspection surface with a light and dark pattern in which light areas and dark parts alternately appear periodically, and moves the image of the light and dark pattern reflected on the surface to be inspected by moving it one or more cycles in the alignment direction of the light and dark pattern.
- Photographing and extracting the maximum lightness of each position from the photographed image to generate a maximum lightness image, and depending on whether the lightness of each position of the maximum lightness image is within a predetermined range, defects other than the uneven defect at that position The problem is solved by determining the presence or absence of a defect inside the coating film.
- the present invention can not inspect the presence or absence of a defect because the lightness cancels out and the difference does not become apparent even if an attempt is made to inspect a defect other than the concavo-convex defect and a defect inside the coating film using the difference image of the image of light and dark pattern.
- the maximum brightness of each position is extracted from the image of the light and dark pattern to generate a maximum brightness image, and the inspection is performed based on whether the brightness of each position of the maximum brightness image is within a predetermined range. It is possible to inspect the presence or absence of a coating defect inside the coating film without unevenness.
- FIG. 1 It is a block diagram which shows the coating defect inspection apparatus 1 which concerns on one embodiment of this invention.
- the left view is a side view showing an arrangement example of the pattern irradiator and the imaging device with respect to the surface to be inspected
- the right view is a front view showing a movement example of the light and dark pattern projected on the pattern irradiator.
- It is a perspective view which shows the example which applied the coating defect inspection apparatus of FIG. 1 as a test object to the coating surface of a motor vehicle body.
- It is a top view which shows an example of the movement trace of the pattern irradiator and imaging device by a robot with respect to the vehicle body of FIG.
- FIG. 1 It is a block diagram which shows the coating defect inspection method which concerns on other embodiment of this invention. It is a figure explaining the method to determine the defect inside a coating film from the maximum brightness image shown in FIG. It is a figure explaining the method to determine an uneven
- FIG. 1 is a block diagram showing a coating defect inspection apparatus 1 according to an embodiment of the present invention.
- the coating defect inspection apparatus 1 includes a computer 13 having functions of a pattern irradiator 11, an imaging device 12, an image processor, a determinator, and a controller for specifying the position of a defect, and a robot 14. Prepare.
- the pattern irradiator 11 is composed of a liquid crystal display, an organic EL display, etc., and according to the control signal of the controller 11a, a light and dark pattern 3 in which light and dark parts alternately appear periodically in a plane perpendicular to the irradiation direction. While irradiating the inspection surface 2, the light and dark pattern is moved in the alignment direction of the light and dark portions for one or more cycles of the pair of light and dark portions.
- the left view of FIG. 2 is a side view showing an arrangement example of the pattern irradiator 11 and the imaging device 12 with respect to the inspection surface 2
- the right view of FIG. 2 is a front view showing a movement example of bright and dark patterns projected on the pattern irradiator 11.
- a rectangular bright portion 3a extending in the vertical direction of the screen and a rectangular dark portion 3b extending in the vertical direction of the screen are paired (one cycle), and these stripes are continuous. Pattern.
- the light portion 3a and the dark portion 3b have the same shape.
- Such a bright and dark pattern 3 moves the bright and dark pattern 3 in the alignment direction of the bright portion 3a and the dark portion 3b, that is, the left and right direction in the right view of FIG.
- the moving speed at this time is set in accordance with the photographing speed of the photographing device 12 described later (the number of photographing frames per unit time, fps).
- at the time of inspecting a coating defect at least the bright portion 3a and the dark portion 3b are moved with respect to one inspection surface 2 by one cycle, preferably two cycles or more.
- the reason for moving by 2 cycles or more is that the boundary between the light part 3a and the dark part 3b does not appear sharp in the light and dark pattern 4 reflected on the inspection surface 2, that is, the image of the light and dark pattern 4 photographed by the photographing device 12 This is to improve inspection accuracy by acquiring images of light and dark patterns 4 of multiple cycles.
- the light and dark pattern 4 reflected on the inspection surface 2, that is, the light and dark pattern 4 photographed by the photographing device 12 is different from the light and dark pattern 3 reflected on the pattern irradiator 11.
- the shape of the light and dark pattern 3 shown in the pattern irradiator 11 may be a horizontal stripe shape or an oblique stripe shape in addition to the vertical stripe shape shown in FIG. Further, other than the stripe shape, any shape may be used as long as the light portion 3a and the dark portion 3b are alternately repeated periodically at an arbitrary inspection position. Furthermore, the light portion 3a and the dark portion 3b are not limited to only white and black, and may have other colors as long as they have contrast of light and dark.
- the photographing device 12 is configured by a CCD camera or the like, and as shown in FIG. 2, the pattern light reflected from the inspection surface 2 of the light and dark pattern 3 irradiated from the pattern irradiator 11 is incident at a predetermined angle It is assembled with the irradiator 11. Then, the imaging device 12 captures a plurality of images of the light and dark pattern 4 reflected on the inspection surface 2 by the pattern irradiator 11 in accordance with the movement of the light and dark pattern 3 of the pattern irradiator 11. As described above, in the image of the light and dark pattern 4 reflected on the inspection surface 2, the boundary between the light portion 3a and the dark portion 3b does not appear sharp. It is preferable to acquire an image of The image of the light and dark pattern 4 photographed by the photographing unit 12 is output to the computer 13 having the functions of an image processor, a judgment unit, and a controller for specifying the position of the defect.
- the computer 13 extracts the maximum brightness of each position from the plurality of images captured by the imaging device 12 and generates an image processor with the maximum brightness, and does the brightness of each position of the maximum brightness image fall within a predetermined range? It functions as a determinator that determines whether or not it is a controller and a controller that specifies the position of a defect. Specifically, image processing software, determination software, and position specifying software are installed, and predetermined processing is executed according to the procedure of the software by a computing unit such as a CPU, a ROM, and a RAM. Details of these specific processes will be described later.
- the robot 14 mounts the pattern irradiator 11 and the imaging device 12 at the tip of the hand, and carries the controller such that the pattern irradiator 11 and the imaging device 12 are transported to the inspection surface 2 in a predetermined posture.
- the teaching program is installed in 14a.
- FIG. 3 is a perspective view showing an example in which the painted surface of the car body 5 is to be inspected, and shows one robot 14 having the pattern irradiator 11 and the photographing device 12 attached to the tip of the hand.
- FIG. 3 is a perspective view showing an example in which the painted surface of the car body 5 is to be inspected, and shows one robot 14 having the pattern irradiator 11 and the photographing device 12 attached to the tip of the hand.
- FIG. 8 is a plan view showing an example of a movement trajectory when inspecting the painted surfaces of the hood 51 and the roof 52 of the car body 5 by a total of four robots 14 arranged two each on the left and right of the car body 5;
- the painted surfaces of the front fender, the side door, the rear fender and the back door are also inspected by these four robots 15, but illustration thereof is omitted.
- the robot 14 at the lower left of the figure moves in the order of point P1 ⁇ point P2 ⁇ point P3 ⁇ point P4 ⁇ point P5 ⁇ point P6, It stops at each point, and an image of the light and dark pattern 4 reflected on the inspection surface 2 is acquired. As a result, an image of the light and dark patterns 4 of the six inspection surfaces 2 in the left half of the hood 51 is obtained.
- the robot 14 on the upper left moves in the order of point P7 ⁇ point P8 ⁇ point P9 ⁇ point P10 ⁇ point P11 ⁇ point P12, stops at each point, and displays the light and dark pattern 4 image on the inspection surface 2 get.
- an image of the light and dark patterns 4 of the six inspection surfaces 2 in the right half of the hood 51 is obtained.
- the robot 14 at the lower right and the robot 14 at the upper right share the inspection surfaces of the right half and the left half of the roof 52, respectively, Get 4 images.
- the pattern irradiator 11 and the photographing device 12 are shown in FIG. 4 by the four robots 14 also for inspection of the painted surface of the front fender, the side door, the rear fender and the back door other than the hood 51 and the roof 52. The movement is performed as described above, and an image of light and dark pattern 4 is acquired.
- FIG. 5 is a side view showing an example of an inspection line to which the coating defect inspection device 1 of the present embodiment is applied
- FIG. 6 is a flowchart showing processing executed in the inspection line.
- the car type specification of the car body 5 arriving at the car type specification detection process from the car type specification data memory attached to each of the car body 5 completed the top coating It receives the vehicle type and information on the basking shown in the data, and outputs this vehicle type specification data to the coating defect inspection apparatus 1 of the present embodiment (step S1 in FIG. 6).
- next car type detection process a plurality of photoelectric tube detectors are used to detect the car type (such as the shape of the car) of the car body 5 arriving at the car type detection process, and this detection data is arranged in the next defect inspection process Output to the robot 14.
- the car type information of the car body 5 is mainly used for selecting the movement trajectory of the robot 14, and the paint color information is mainly used for selecting the photographing conditions of the photographing device 12.
- the coating defect inspection apparatus 1 of the present embodiment is provided, and the teaching program of the robot 14 and the imaging condition of the imaging device 12 are selected according to the type of vehicle detected in the previous process (FIG. Step S2)
- the robot 14 moves the pattern irradiator 11 and the imaging device 12 in accordance with the movement trajectory.
- the pattern irradiator 11 and the photographing device 12 are moved to the respective photographing points P1 to P12, stopped at the respective photographing points P1 to P12, and the light and dark pattern 4 of the inspection surface 2 is photographed ( Step S3 of FIG. From the image of the bright and dark pattern 4 obtained by this, the presence or absence of a coating defect is determined by processing described later (step S4 in FIG.
- step S5 in FIG. 6 The inspection result (the presence or absence of a defect, the type of defect, the position of the defect, which will be described in detail later) thus obtained is output to the display 6 of the next step.
- the inspection result sent from the previous step is displayed on the display 6 (step S6 in FIG. 6), and the inspection operator uses the displayed type and position of the coating defect as the actual vehicle Compare and fix.
- FIG. 7 is a view showing the main coating defects that occur in the top coating of the automobile body 5.
- the main coating defects generated in the top coating of the automobile body 5 can be classified into defects having irregularities on the surface of the coating film and defects having no irregularities on the surface of the coating film.
- dust attached to the automobile body 5 before the top coating is applied or dust attached to the automobile body 5 at the time of coating the top coating is left on the wet coating, and it is convexly formed.
- a thinner or water such as a solvent for the top coating
- a stain appears as a stain.
- water stain There is a defect called “water stain”.
- defects such as "metal spots” or flaws or the like in which the bright pigment is locally concentrated or the bright pigment orientation is uneven are caused.
- the defect called “penetration defect” in which the coating film is scraped to expose the metal surface of the automobile body 5 is also a defect having no unevenness on the surface of the coating film.
- FIG. 8 is a view for explaining a method of determining a concavo-convex defect based on a difference between luminance values of an image of light and dark pattern 4. In this inspection method, as shown in the upper left drawing of FIG.
- the luminance of the image obtained by photographing the pattern of the bright portion 3a shows a white value (for example, 255)
- the luminance of the image obtained by photographing the pattern of the dark portion 3b indicates a black value (for example, 0), so the luminance value of the difference is a white value (for example, 255).
- the light of the bright and dark pattern 3 is irregularly reflected due to the concavo-convex defect.
- the brightness of the gray indicates a gray value (for example 128) between white and black, and the brightness of the image photographed the pattern of the dark part 3b also shows a gray value (for example 128) between black and white
- the luminance value of the difference is zero, that is, a black value (for example, 0).
- FIG. 9 is a view for explaining the reason why it is not possible to determine a defect in the coating film which is not a concavo-convex defect based on the difference in luminance value of the image of light and dark pattern 4. That is, as shown in the upper left figure of FIG.
- the brightness of the image obtained by photographing the pattern of the bright portion 3a is a white value (for example, Since the luminance of the image obtained by photographing the pattern of the dark portion 3b indicates a black value (for example, 0), the luminance value of the difference is a white value (for example, 255).
- the light of the light and dark pattern 3 is similarly on the surface 2 to be inspected.
- the brightness of the image obtained by capturing the pattern of the light portion 3a indicates a white value (for example, 255), and the brightness of the image obtained by capturing the pattern of the dark portion 3b is a black value (for example, 0).
- the luminance value of is a white value (for example, 255). Therefore, these differences are equal, and it is impossible to determine a defect inside the coating film from the difference in luminance value.
- the coating defect inspection apparatus 1 of the present embodiment by performing the following process, although there are no uneven defects, defects existing inside the coating film and uneven defects are detected. That is, as shown in FIG. 2, with the pattern irradiator 11 and the photographing device 12 mounted on the robot 14 being stopped at a desired inspection position, the bright and dark pattern 3 imaged on the pattern irradiator 11 is inspected While irradiating the surface 2, the light and dark pattern 3 is moved by one or more cycles in the alignment direction of the light portion 3a and the dark portion 3b, and the image of the light and dark pattern 4 reflected on the inspection surface 2 is adjusted to the movement of the light and dark patterns 3, 4
- the camera 12 takes a plurality of pictures.
- FIG. 10 is a block diagram showing a coating defect inspection method according to an embodiment of the present invention.
- the computer in which the image processing program is installed takes in these captured images IM1, extracts the maximum brightness of each position from the plurality of captured images IM1, and generates a maximum brightness image IM2.
- the maximum lightness of each position from the photographed image IM1 the lightness of each pixel (or a pixel group which is a set of a predetermined number of pixels) of each photographed image IM1 is detected, and the maximum lightness is determined for each pixel Are combined into one image.
- the inspected surface 2 without using the luminance indicating the brightness per unit area of the light emitter, using the lightness that is the attribute of the color sensation related to the relative brightness of the object surface, the inspected surface 2 has unevenness.
- FIG. 12 is a diagram for explaining a method of determining a defect in a coating film from the maximum brightness image IM2 shown in FIG.
- the left figure of FIG. 12 shows a part of the scanning line
- the central figure of FIG. 12 is a graph showing the measured value of the lightness with respect to the scanning line
- Scanning is sequentially performed in the horizontal direction from the upper left pixel to the lower right pixel of the maximum brightness image IM2 shown in the left diagram of FIG. 12, and the brightness measured as shown in the center diagram of FIG. Determine if there is. Since the brightness of the coating film differs depending on the paint color acquired in the vehicle type specification detection step of FIG. 5, a predetermined range corresponding to the paint color is selected.
- the lightness at each position of the maximum lightness image IM2 is not within the predetermined range, it is determined that there is a defect other than the concave and convex defect of the inspection surface 2 at that position and a defect inside the coating film.
- a stain defect is present at that position. Thinner spots and water stains appear black around their surroundings.
- the measured brightness is larger than the predetermined range, it is determined that there is a metal spot defect or a penetration defect to the metal surface at that position. It is because metal spots locally contain white parts.
- the penetration defect to the metal surface is because the metal color appears white, but since the local penetration defect is also a concavo-convex defect, it can also be detected by a difference image IM4 described later.
- the position is stored and a defect position is specified as shown in the right drawing of FIG.
- the defect inspection result is collected as defect data for one car body when the inspection of the whole car body 5 is finished, and is output to the display 6 installed in the next process of FIG.
- the position of the defect the position of the surface 2 to be inspected moved by the robot 14 is fetched from the controller 14a of the robot 14, and the position in the defect determined by the computer 13 is collated with this position. The position of can be identified.
- the computer in which the image processing program is installed extracts the minimum lightness of each position from the plurality of captured images IM1 captured, and generates the minimum lightness image IM3.
- the minimum lightness of each position from the photographed image IM1 the lightness of each pixel (or a pixel group which is an aggregation of a predetermined number of pixels) of each photographed image IM1 is detected, and the minimum lightness of each pixel Are combined into one image.
- FIG. 13 is a diagram for explaining a method of determining a concavo-convex defect from the difference image IM4 shown in FIG.
- Scanning is sequentially performed in the horizontal direction from the upper left pixel to the lower right pixel of the difference image IM4 shown in the left diagram of FIG. 13, and the lightness measured as shown in the center diagram of FIG. It is determined whether or not.
- the lightness of the coating film differs depending on the paint color acquired in the vehicle type specification detection step of FIG. 5, it is not necessary to select the threshold value according to the paint color since the difference lightness of the maximum lightness and the minimum lightness is used.
- the determination principle is the same as that due to the irregular reflection of the unevenness shown in the upper right of FIG. That is, the lightness of the image obtained by photographing the pattern of the bright portion 3a by the irregular reflection of the unevenness shows the gray value between white and black, and the lightness of the image obtained by photographing the pattern of the dark portion 3b is also between black and white Since the gray value is shown, the difference in lightness becomes smaller toward zero.
- FIG. 11 is a block diagram showing a coating defect inspection method according to another embodiment of the present invention.
- a maximum brightness image IM2 and a minimum brightness image IM3 are respectively synthesized from a plurality of photographed images IM1, and the maximum brightness image IM2 and the minimum brightness image IM3 are differentially processed to generate a difference image IM4, It is the same as the embodiment shown in FIG. 10 described above.
- the maximum lightness image IM2 and the difference image IM4 are further combined for each pixel (each position) to generate a combined image IM5.
- each pixel or a group of pixels which is a set of a predetermined number of pixels is scanned in the vertical and horizontal directions to measure the brightness of each pixel (corresponding to the position of the inspection surface) Do.
- the measured lightness measured as shown in the central view of FIG. 12 is within the predetermined range indicated by the alternate long and short dash line, the measured lightness as shown in the central view of FIG. It is judged whether it is more than the threshold value shown by. If the measured lightness is not within the predetermined range, it is determined that there is a defect other than the concave and convex defect of the surface 2 to be inspected and a defect inside the coating film at that position. In addition, when the measured lightness is less than the threshold value, it is determined that the uneven defect of the surface 2 to be inspected is present at that position.
- the inspection is performed based on whether the brightness of each position of the maximum brightness image IM2 is within the predetermined range. It is possible to inspect for the presence of coating defects inside the coating film, such as thinner stains, water stains, metal spots, and penetration defects to metal surfaces.
- defects such as thin stains and water stains and defects such as metal spots and penetration defects to metal surfaces It can be identified.
- the coating defect inspection apparatus 1 and the coating defect inspection method of the present embodiment it is determined whether the brightness of each position of the difference image IM4 between the maximum brightness image IM2 and the minimum brightness image IM3 is less than a predetermined threshold. If it is less than the predetermined threshold value, it is determined that there is an uneven defect at that position, so it is possible to inspect also the uneven defect of the inspection surface 2 in addition to the inspection of the coating defect inside the coating film.
- the coating defect inspection apparatus 1 and the coating defect inspection method of the present embodiment it is determined whether the brightness of each position of the composite image IM5 obtained by combining the maximum brightness image IM2 and the difference image IM4 is within a predetermined range. Therefore, the uneven defects or defects other than the uneven defects can be inspected together in one scan.
- the robot 14 has a pattern for the automobile body 5 or the like having the inspection surface 2 which can not be processed by one inspection process.
- Irradiator 11 and imaging device 12 are moved to the position of each inspection surface, and the position of inspection surface 2 moved by robot 14 and the position of the defect determined by computer 13 are input to detect defects in car body 5 Since the position of the identified defect is indicated on the display 6, the position of the identified defect can be immediately identified.
- the computer 13 corresponds to an image processor, a determiner, and a controller according to the present invention, and the vehicle body 5 corresponds to an object to be inspected according to the present invention.
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Abstract
La présente invention comprend : un appareil d'irradiation de motif (11) qui, à l'intérieur d'une surface perpendiculaire à la direction d'irradiation, irradie une surface (2) à inspecter avec un motif clair et sombre (3) dans lequel des parties claires (3a) et des parties sombres (3b) apparaissent en alternance, et qui déplace le motif clair et sombre par au moins un pas d'une paire des parties claires et sombres dans la direction d'agencement des parties claires et des parties sombres; un appareil de capture d'image qui capture une pluralité d'images du motif clair et sombre (4), projetées par l'appareil d'irradiation de motif sur la surface à inspecter, selon le mouvement du motif clair et sombre; un appareil de traitement d'image (13) qui extrait, à partir de la pluralité d'images (IM1) capturées par l'appareil de capture d'image, la luminosité maximale à chaque position et génère une image de luminosité maximale (IM2); et une unité de détermination (13) qui détermine si la luminosité à chaque position dans l'image de luminosité maximale est dans une plage prédéfinie.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2017/023725 WO2019003337A1 (fr) | 2017-06-28 | 2017-06-28 | Dispositif d'inspection d'irrégularités de peinture et procédé d'inspection d'irrégularités de peinture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2017/023725 WO2019003337A1 (fr) | 2017-06-28 | 2017-06-28 | Dispositif d'inspection d'irrégularités de peinture et procédé d'inspection d'irrégularités de peinture |
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| Publication Number | Publication Date |
|---|---|
| WO2019003337A1 true WO2019003337A1 (fr) | 2019-01-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| PCT/JP2017/023725 Ceased WO2019003337A1 (fr) | 2017-06-28 | 2017-06-28 | Dispositif d'inspection d'irrégularités de peinture et procédé d'inspection d'irrégularités de peinture |
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| WO (1) | WO2019003337A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023031975A (ja) * | 2021-08-26 | 2023-03-09 | 日産自動車株式会社 | 画像処理装置及び画像処理方法 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH109838A (ja) * | 1996-06-25 | 1998-01-16 | Matsushita Electric Works Ltd | 画像処理方法及び物体表面の欠陥検出方法 |
| JP2000241360A (ja) * | 1999-02-25 | 2000-09-08 | Nisshin Steel Co Ltd | 金属帯板の表面検査方法及び装置 |
| JP2001266121A (ja) * | 2000-03-16 | 2001-09-28 | Tomoe Corp | 塗装された鋼材の塗装劣化の診断方法 |
| JP2011226814A (ja) * | 2010-04-15 | 2011-11-10 | Fujitsu Ltd | 表面欠陥検査装置及び表面欠陥検査方法 |
| JP2014002125A (ja) * | 2012-06-21 | 2014-01-09 | Fujitsu Ltd | 検査方法及び検査装置 |
| JP3197766U (ja) * | 2015-03-17 | 2015-06-04 | バイスリープロジェクツ株式会社 | 表面検査装置 |
-
2017
- 2017-06-28 WO PCT/JP2017/023725 patent/WO2019003337A1/fr not_active Ceased
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH109838A (ja) * | 1996-06-25 | 1998-01-16 | Matsushita Electric Works Ltd | 画像処理方法及び物体表面の欠陥検出方法 |
| JP2000241360A (ja) * | 1999-02-25 | 2000-09-08 | Nisshin Steel Co Ltd | 金属帯板の表面検査方法及び装置 |
| JP2001266121A (ja) * | 2000-03-16 | 2001-09-28 | Tomoe Corp | 塗装された鋼材の塗装劣化の診断方法 |
| JP2011226814A (ja) * | 2010-04-15 | 2011-11-10 | Fujitsu Ltd | 表面欠陥検査装置及び表面欠陥検査方法 |
| JP2014002125A (ja) * | 2012-06-21 | 2014-01-09 | Fujitsu Ltd | 検査方法及び検査装置 |
| JP3197766U (ja) * | 2015-03-17 | 2015-06-04 | バイスリープロジェクツ株式会社 | 表面検査装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023031975A (ja) * | 2021-08-26 | 2023-03-09 | 日産自動車株式会社 | 画像処理装置及び画像処理方法 |
| JP7687140B2 (ja) | 2021-08-26 | 2025-06-03 | 日産自動車株式会社 | 画像処理装置及び画像処理方法 |
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