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WO2019085796A1 - 一种宽带宽级联分光膜阵列波导及包括该波导的显示系统 - Google Patents

一种宽带宽级联分光膜阵列波导及包括该波导的显示系统 Download PDF

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Publication number
WO2019085796A1
WO2019085796A1 PCT/CN2018/111509 CN2018111509W WO2019085796A1 WO 2019085796 A1 WO2019085796 A1 WO 2019085796A1 CN 2018111509 W CN2018111509 W CN 2018111509W WO 2019085796 A1 WO2019085796 A1 WO 2019085796A1
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film
array
spectroscopic
cascaded
layers
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French (fr)
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李勇
吴斐
郑臻荣
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Beijing LLvision Technology Co ltd
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Beijing LLvision Technology Co ltd
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Priority to US16/761,163 priority Critical patent/US11815711B2/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0075—Arrangements of multiple light guides
    • G02B6/0076—Stacked arrangements of multiple light guides of the same or different cross-sectional area
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
    • G02B6/0033—Means for improving the coupling-out of light from the light guide
    • G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
    • G02B6/004—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles
    • G02B6/0041—Scattering dots or dot-like elements, e.g. microbeads, scattering particles, nanoparticles provided in the bulk of the light guide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0123—Head-up displays characterised by optical features comprising devices increasing the field of view

Definitions

  • the present invention relates to the field of optical display.
  • the present invention relates to a wide bandwidth cascaded split film array waveguide and a display system including the same.
  • a head-mounted display (HMD, also known as a head-mounted visual device) reflects a two-dimensional image directly into the viewer's eye, specifically by a set of optical systems (primarily precision optical lenses) that amplify the ultra-microdisplay The image on the image is projected onto the retina, and the large-screen image is presented in the viewer's eye. The image is a magnifying glass to see the object and present an enlarged virtual object image.
  • the image can be obtained directly through a light emitting diode (LED), an active matrix liquid crystal display (AMLCD), an organic light emitting diode (OLED), or a liquid crystal with silicon (LCOS), or can be indirectly obtained by conducting a fiber or the like.
  • LED light emitting diode
  • AMLCD active matrix liquid crystal display
  • OLED organic light emitting diode
  • LCOS liquid crystal with silicon
  • the augmented reality display system superimposes virtual information into a real scene, which requires not only high-intensity virtual information, but also a good realistic external scene transmittance.
  • the transmissive optical scheme of a single-layer coupler such as a free-form surface prism and an eyepiece transmission type has a large volume and is difficult to satisfy both a large field of view and a large exit pupil diameter.
  • the sum of the light energy utilization ratio n and the external transmission m of the single-layer coupler must be less than 100%.
  • the optical system has poor permeability, and the use is uncomfortable, affecting the indoor environment.
  • the external transmittance m is high, the light energy utilization rate is low, the virtual image brightness is low, and it is difficult to meet outdoor applications.
  • the main object of the present invention is to provide a cascading spectroscopic film array waveguide having a wide bandwidth and high uniformity.
  • Another object of the present invention is to provide an application of the wide bandwidth, high uniformity cascaded spectroscopic array array waveguide.
  • the present invention provides a wide bandwidth, high uniformity cascading spectroscopic film array waveguide, wherein the cascaded spectroscopic film array waveguide comprises a plurality of glass substrates and is sandwiched between two adjacent sheets A spectroscopic film array in the middle of the glass substrate, each of the prismatic film array structures is alternately arranged by a plurality of H film layers L film layers, wherein the H film layer is a high refractive index material film layer, and the L film layer is a low refractive index layer.
  • the number of film layers of each of the light-separating film arrays is an even number.
  • each of the spectroscopic film arrays of the present invention should be ⁇ 1H ⁇ 1L/ ⁇ 2H ⁇ 2L/.../ ⁇ n-1H ⁇ n-1L/ ⁇ nH ⁇ nL
  • the structure of the cascaded spectroscopic film array waveguide should be Glass substrate/ ⁇ 1H ⁇ 1L/ ⁇ 2H ⁇ 2L/.../ ⁇ n-1H ⁇ n-1L/ ⁇ nH ⁇ nL/glass substrate/ ⁇ 1H ⁇ 1L/ ⁇ 2H ⁇ 2L/.../ ⁇ n-1H ⁇ n-1L/ ⁇ nH ⁇ nL/glass substrate/.../glass substrate . 22... ⁇ n are respectively used to identify the first to nth H layers; ⁇ 1... ⁇ n are used to identify the first to nth L layers, respectively;
  • the glass substrate and the light-splitting film array of the present invention are spaced apart from each other, and both ends of the cascaded spectral film array waveguide in the light incident direction are glass substrates.
  • each of the film layers of the spectroscopic film array has an average transmittance of 50-80%.
  • the vertical distance between adjacent arrays of two spectral film systems is 2-5 mm.
  • the high refractive index material H has a refractive index n>2.0; the low refractive index material L has a refractive index n ⁇ 1.5.
  • the high refractive index material H is Ta 2 O 5 .
  • the low refractive index material L is SiO2.
  • the number of layers of each of the spectral film arrays is 4-12; preferably 6-8.
  • the present invention controls the change of the film transmission curves at different angles and different bands by reasonably balancing them to 6-8 layers.
  • the angle between the bottom surface of the glass substrate and the array of the light-splitting film is (the angle ⁇ shown in FIGS. 1 and 7) is 20° to 45°.
  • the minimum angle between the surface of the glass substrate adjacent to the array of spectroscopic film and the sidewall of the glass substrate is 25°-35°.
  • the minimum angle between the surface of the glass substrate adjacent to the array of spectroscopic film and the sidewall of the glass substrate is 27.5°.
  • the thickness of the waveguide is thick, the volume is large, the weight is large, and the cost is high.
  • the angle is too small, the incident angle of the transmitted light in the waveguide and the array film is too large. Due to the Boucher's law, when the light of the incident image is S light, the S light component is hard to be reduced, and the design complexity of the film system is greatly increased. .
  • the array of spectroscopic films in the spectral film array waveguide is four.
  • the cascaded spectroscopic film array waveguide is composed of five glass substrates, and a total of four prismatic film arrays sandwiched between adjacent two substrates.
  • the number of film layers respectively disposed in the order of the incident direction of the light is 4, 6, 6, and 6, respectively.
  • the spectroscopic film array of the cascading spectroscopic film array waveguide is an S1 spectroscopic film array, an S2 spectroscopic film array, an S3 spectroscopic film array, and an S4, respectively, in the order of incidence of light rays.
  • a spectroscopic film array wherein the total thickness of the S1 spectroscopic film array is 392.58 nm, the total thickness of the S2 spectroscopic film array is 531.94 nm, the total thickness of the S3 spectroscopic film array is 507.48 nm, and the S4 spectroscopic film array The total thickness is 587.00 nm.
  • each layer of the S1 spectroscopic film array from top to bottom is: 16.69 nm, 51.31 nm, 85.72 nm, 41.53 nm, 115.00 nm, 62.42 nm, 9.67 nm, 10.24 nm;
  • each layer of the S2 spectroscopic film array from top to bottom is: 24.33 nm, 64.75 nm, 49.71 nm, 90.03 nm, 112.12 nm, 191.00 nm;
  • each layer of the S3 spectroscopic film array from top to bottom is: 20.62 nm, 57.20 nm, 66.11 nm, 73.20 nm, 107.25 nm, 183.10 nm;
  • the thicknesses of the S4 spectral film array from top to bottom are: 27.30 nm, 94.40 nm, 72.90 nm, 88.30 nm, 110.40 nm, and 193.70 nm, respectively.
  • the first layer of the array of the spectroscopic film array disposed along the incident direction of the light is a Ta2O5 layer.
  • the S4 mask has a reflectivity of 50%.
  • the S1 mask system has an average transmission of 80%.
  • the S2 mask system has an average transmission of 75%.
  • the S3 mask system has an average transmission of 67%.
  • the S4 mask system has an average transmission of 50%.
  • the present invention also provides the use of the wide bandwidth and high uniformity cascaded spectroscopic film array waveguide in a display system.
  • the display system is a near-eye display system.
  • the collimating optics converts each image point of the polarized micro image source into collimated light at each angle.
  • the coupling prism will collimate the parallel light to couple into the waveguide to meet the total reflection conditions.
  • the light first propagates in the waveguide based on the principle of total reflection until it encounters the polarized reflection film, which destroys the total reflection condition after reflection, and the exit waveguide enters the human eye. From right to left, S1, S2 VietnameseSN, in which the spectral reflectance is R 1 , R 2 ....R N , and the waveguide glass transmittance is T, the analysis can obtain the efficiency ⁇ of the outgoing light of each surface. :
  • the film system can be designed in accordance with polarization.
  • the P light and the S light are S-polarized light (abbreviated as S light) and P-polarized light (abbreviated as P light) indicating a polarized light source.
  • the reflectance of the entire visible spectrum cannot be guaranteed to be uniform.
  • brightness uniformity it is also necessary to consider the uniformity of color.
  • the human eye is a receiver, it is necessary to introduce a human eye visual function for the overall evaluation.
  • Km is the maximum spectral optical performance, 683ml/W
  • V( ⁇ ) is the optical function of the spectrum with wavelength ⁇
  • ⁇ e ( ⁇ ) is the radiant flux of the spectrum with wavelength ⁇
  • R( ⁇ ) is The reflectance of the spectrum of wavelength ⁇ in the reflectance spectrum of the array film.
  • the present invention provides a display system array reflective coating and its application.
  • the technical solution of the present invention has the following advantages:
  • the single-chip combiner of the conventional video transmissive augmented reality optical system is split into multiple pieces, which breaks through the mutual limitation of the virtual image light energy utilization rate and the external reality scene transmittance.
  • the external transmittance reaches 75% or more, the utilization rate of the micro image source light energy reaches 70%.
  • the coating scheme is in the wide range of 420nm ⁇ 650nm, and the image brightness is more than 50% in the pupil area of 4mmx4mm, and the edge image has no obvious attenuation. It has the advantages of wide bandwidth and small influence on angular offset.
  • the film system adopts the same high refractive index and low refractive index materials, and has the advantages of simple process control and good mass production.
  • FIG. 1 is a structural diagram of an array thin film coating system that can be used in a near-eye display system
  • FIG. 2 is a partial schematic view showing the propagation of light in an arrayed waveguide
  • 3(A) to 3(C) are spectral graphs of the S1 plane at the angles of view of 0°, ⁇ °, and - ⁇ °, respectively;
  • 4(A) to 4(C) are spectral graphs of the S2 plane at the angles of view of 0°, ⁇ °, and ⁇ °, respectively;
  • 5(A) to 5(C) are spectral graphs of the S3 plane at the angles of view of 0°, ⁇ °, and ⁇ °, respectively;
  • 6(A) to 6(C) are spectral graphs of the S4 plane at the angles of view of 0°, ⁇ °, and ⁇ °, respectively;
  • Figure 7 is a schematic view of the angles of 0°, ⁇ °, and - ⁇ °;
  • Fig. 8 is a schematic view showing the uniformity of the image brightness in the pupil region of 4 mm x 4 mm.
  • FIG. 1 is a schematic structural view of an array thin film coating system that can be used in a near-eye display system, specifically including: glass substrates G1, G2, G3, G4, G5, and cascaded polarization beam splitting films S1, S2, S3 sandwiched between glass substrates, S4.
  • the angle ⁇ between the bottom surface of the glass substrate and the array of the light-splitting film system was 27.5°.
  • FIG. 2 is a partial schematic diagram of light propagation in an arrayed waveguide, specifically including: image source field of view light, ie, solid line 201, external field of view light, ie, dashed line 202.
  • image source field of view light ie, solid line 201
  • external field of view light ie, dashed line 202.
  • the image source light propagates according to the principle of total reflection.
  • the polarized reflection film is hit, part of the light is reflected, the total reflection condition is destroyed, the light exits the waveguide into the human eye, and the other part of the transmission continues to propagate to the next polarized reflection film;
  • the external field of view light can also enter the human eye through the polarized reflection film, thereby achieving a transmissive display.
  • the invention adopts different coating methods for the polarizing reflection film, so that the total light transmittance of each reflection film is basically the same, and the effect of high uniformity of image brightness is achieved.
  • the uniformity of the image brightness in the pupil region of 4 mm ⁇ 4 mm is more than 50%, and the edge image has no significant attenuation.
  • Figure 3 is a spectral curve of the S1 plane at the angles of view of 0°, ⁇ °, and - ⁇ °.
  • the S1 mask is made up of 8 layers with an overall thickness of 392.58 nm. Where ⁇ ° is 14°.
  • the specific data is as follows.
  • the abscissa represents the wavelength and the ordinate represents the transmittance.
  • ⁇ ° represents the maximum value of the field of view, ie the field of view angle ranges from - ⁇ ° to ⁇ °.
  • the transmittance ranges from 78.0% to 83.0%; when the angle of view is ⁇ °, the transmittance ranges from 76.0% to 80.0%; when the angle of view is - ⁇ °, The rate ranges from 79.0% to 84.0%.
  • the black squares in the figure indicate the average transmittance for the entire field of view, and the average transmittance for S1 is 80.0%.
  • the - ⁇ °, 0° and ⁇ ° of the present invention are the angles of the outgoing ray and the normal of the waveguide ( ⁇ ° is usually 10°-20°), as shown in Fig. 7, wherein the dotted line labeled 4 is a waveguide.
  • the normal line of the film, the angle between the outgoing light and the normal line is - ⁇ °, the angle between the outgoing light and the normal line is 0°, and the angle between the outgoing light and the normal line is ⁇ °.
  • Figure 4 is a spectral curve of the S2 plane at the angles of view of 0°, ⁇ °, and - ⁇ °. Where ⁇ ° is 14°.
  • the S2 mask is made of 6 layers and has an overall thickness of 531.93 nm.
  • the transmittance ranges from 73.0% to 78.5%; when the angle of view is ⁇ °, the transmittance ranges from 70.0% to 76.0%; when the angle of view is - ⁇ °, The over range ranges from 79.0% to 81.0%.
  • the black box in the figure indicates the average transmittance for the entire field of view, and the average transmittance for S2 is 75.0%.
  • Fig. 5 is a spectral curve of the S3 plane at the angles of view of 0°, ⁇ °, and - ⁇ °. Where ⁇ ° is 14°.
  • the S3 mask is made of 6 layers and has an overall thickness of 507.48 nm.
  • the transmittance ranges from 64.0% to 72.0%; when the angle of view is ⁇ °, the transmittance ranges from 62.0% to 70.0%; when the angle of view is - ⁇ °, The over range ranges from 68.0% to 72.0%.
  • the black box in the figure indicates the average transmittance for the entire field of view, and the average transmittance for S3 is 67.0%.
  • Figure 6 is a spectral curve of the S4 plane at the angles of view of 0°, ⁇ °, and - ⁇ °. Where ⁇ ° is 14°.
  • the S4 mask is made up of 6 layers with an overall thickness of 587 nm.
  • the transmittance ranges from 47.0% to 60.0%; when the angle of view is ⁇ °, the transmittance ranges from 40.0% to 60.0%; when the angle of view is - ⁇ °, The rate ranges from 52.5% to 60.0%.
  • the red box in the figure indicates the average transmittance for the entire field of view, and the average transmittance for S4 is 50.0%.

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Abstract

一种宽带宽级联分光膜阵列波导及包括该级联分光膜阵列波导的显示系统，级联分光膜阵列波导包括多层玻璃基底（G1、G2、G3、G4、G5）以及夹在相邻两个基底中间的分光膜系阵列（S1、S2、S3、S4），每片分光膜系阵列（S1、S2、S3、S4）结构由多个H膜层L膜层依次交替排列构成，其中H膜层为高折射率材料膜层，L膜层为低折射率材料膜层，各分光膜系阵列（S1、S2、S3、S4）的膜层层数分别为偶数，分光膜系阵列（S1、S2、S3、S4）中各膜层的厚度αn、βn根据带宽和光束角度要求选择。将传统的视频透射式增强现实光学系统的单片组合器分裂成多片，突破虚拟图像光能利用率和外界现实场景透过率相互制约的桎梏，在外界透过率达到75％以上时，微型图像源光能利用率达到70％。

Description

一种宽带宽级联分光膜阵列波导及包括该波导的显示系统 技术领域
本发明涉及光学显示领域，具体的说，本发明涉及一种宽带宽级联分光膜阵列波导及包括该级联分光膜阵列波导的显示系统。
背景技术
近年来，头戴式可视设备的大量涌现，例如，联想眼镜、谷歌眼镜、虚拟现实(VR)游戏眼镜等，虚拟现实(Virtual Reality，VR)、增强现实(Augmented Reality，AR)及混合现实(Mixed Reality，MR)技术逐渐进入我们的日常生活中。头戴式显示器(HMD，也称为头戴式可视设备)是把二维图像直接反射到观看者的眼睛里，具体就是通过一组光学系统(主要是精密光学透镜)放大超微显示屏上的图像，将影像投射于视网膜上，进而将大屏幕图像呈现在观看者眼中，形象点说就是拿放大镜看物体呈现出放大的虚拟物体图像。图像可以直接通过发光二极管(LED)、主动式矩阵液晶显示器(AMLCD)、有机发光二极管(OLED)或液晶附硅(LCOS)获得，也可以通过光纤等传导方式间接获得。显示系统通过准直透镜成像在无穷远处，然后通过耦合器把图像反射进人的眼睛里同时保证外面的图像清晰可见。
增强现实显示系统将虚拟信息叠加到现实场景中，不仅需要高亮度的虚拟信息，并且需要良好的现实外界场景透过率。自由曲面棱镜、目镜透射式等单层耦合器透射式光学方案，一方面存在体积大、难以同时满足大视场和大出瞳直径。另一方面，单层耦合器的光能利用率n和外界透过m两者之和必然低于100％，当光能利用率过高时光学系统通透性差，使用不舒适、影响室内环境体验效果，当外界透过率m高时，光能利用率低，虚拟图像亮度低、难以满足室外应用场合。
因此，如何研发一种具有大视场大出瞳直径的近眼显示系统耦合 器提高透过率和虚拟图像光能利用率，成为本领域是本领域技术人员长期亟需解决的问题。
发明内容
本发明的主要目的在于提供一种宽带宽、高均匀性的级联分光膜阵列波导。
本发明的另一目的在于提供所述宽带宽、高均匀性的级联分光膜阵列波导的应用。
为达上述目的，一方面，本发明提供了一种宽带宽、高均匀性的级联分光膜阵列波导，其中，所述级联分光膜阵列波导包括多片玻璃基底以及夹在相邻两片玻璃基底中间的分光膜系阵列，每片分光膜系阵列结构均由多个H膜层L膜层依次交替排列构成，其中H膜层为高折射率材料膜层，L膜层为低折射率材料膜层，各分光膜系阵列的膜层层数分别为偶数。
其中可以理解的是，本发明的每片分光膜系阵列结构应为α1H β1L/α2H β2L/…/αn-1H βn-1L/αnH βnL，而所述的级联分光膜阵列波导的结构应为玻璃基底/α1H β1L/α2H β2L/…/αn-1H βn-1L/αnH βnL/玻璃基底/α1H β1L/α2H β2L/…/αn-1H βn-1L/αnH βnL/玻璃基底/……/玻璃基底。α2…αn分别用于标识第1到第n的H层；β1…βn分别用于标识第1到第n的L层；
也就是说，本发明的玻璃基底和分光膜系阵列间隔设置，且在级联分光膜阵列波导沿光线入射方向的两端均为玻璃基底。
根据本发明一些具体实施方案，其中，所述分光膜系阵列各膜层的平均透过率为50-80％。
根据本发明一些具体实施方案，其中，相邻两片分光膜系阵列之间的垂直距离为2-5mm。
根据本发明一些具体实施方案，其中，所述高折射率材料H的折射率n>2.0；所述低折射率材料L的折射率n<1.5。
由上，通过尽可能拉大折射率差从而减小膜系层数、简化工艺提 高良率。
根据本发明一些具体实施方案，其中，所述高折射率材料H为Ta2O5。
根据本发明一些具体实施方案，其中，所述低折射率材料L为SiO2。
根据本发明一些具体实施方案，其中，各分光膜系阵列的膜层层数为4-12；优选为6-8。
由上，由于光束角度较大并且覆盖整个波段。薄膜层数太少透射光谱波动会很剧烈，但是薄膜层数太多，对于镀膜设备和镀膜工艺的要求随之层高。本发明通过合理的平衡各薄膜透过曲线在不同角度和不同波段的变化，将其控制在6-8层。
根据本发明一些具体实施方案，其中，玻璃基底的底面与分光膜系阵列的夹角为(图1、图7所示的角α)为20°-45°。
根据本发明一些具体实施方案，其中，玻璃基底的与分光膜系阵列相邻的表面与玻璃基底侧壁的最小夹角为25°-35°。
根据本发明一些具体实施方案，其中，玻璃基底的与分光膜系阵列相邻的表面与玻璃基底侧壁的最小夹角为27.5°。
由上，当角度过大时，波导厚度较厚，体积大重量大，成本高。而当角度过小时，波导内传输光线与阵列薄膜的入射角过大，由于布儒斯特定律，入射图像的光为S光时，S光分量很难降低，大大加大膜系设计复杂度。
根据本发明一些具体实施方案，其中，所述分光膜阵列波导中的分光膜系阵列为4片。
根据本发明一些具体实施方案，其中，所述级联分光膜阵列波导由五片玻璃基底、以及夹在相邻两个基底中间的总数为4片的分光膜系阵列组成。
根据本发明一些具体实施方案，其中，4片分光膜系阵列按照沿光线入射方向的顺序各自设置的膜层层数分别为8、6、6和6。
根据本发明一些具体实施方案，其中，级联分光膜阵列波导的分 光膜系阵列按照沿光线入射方向的顺序分别为S1分光膜系阵列、S2分光膜系阵列、S3分光膜系阵列、和S4分光膜系阵列，其中，S1分光膜系阵列的总厚度为392.58nm、S2分光膜系阵列的总厚度为531.94nm、S3分光膜系阵列的总厚度为507.48nm、和S4分光膜系阵列的总厚度为587.00nm。
根据本发明一些具体实施方案，其中，
S1分光膜系阵列从上到下各层的厚度分别为：16.69nm、51.31nm、85.72nm、41.53nm、115.00nm、62.42nm、9.67nm、10.24nm；
S2分光膜系阵列从上到下各层的厚度分别为：24.33nm、64.75nm、49.71nm、90.03nm、112.12nm、191.00nm；
S3分光膜系阵列从上到下各层的厚度分别为：20.62nm、57.20nm、66.11nm、73.20nm、107.25nm、183.10nm；
S4分光膜系阵列从上到下各层的厚度分别为：27.30nm、94.40nm、72.90nm、88.30nm、110.40nm、193.70nm。
根据本发明一些具体实施方案，其中，所述级联分光膜阵列按照沿光线入射方向所设置的分光膜系阵列的第一层均为Ta2O5层。
根据本发明一些具体实施方案，其中，S4面膜的反射率为50％。
根据本发明一些具体实施方案，其中，S1面膜系的平均透过率为80％。
根据本发明一些具体实施方案，其中，S2面膜系的平均透过率为75％。
根据本发明一些具体实施方案，其中，S3面膜系的平均透过率为67％。
根据本发明一些具体实施方案，其中，S4面膜系的平均透过率为50％。
再一方面，本发明还提供了所述的宽带宽、高均匀性的级联分光膜阵列波导在显示系统中的应用。
根据本发明一些具体实施方案，其中，所述显示系统为近眼显示系统。
准直光学系统将偏振微图像源的每个图像点，准直转化为各角度平行光。耦合棱镜将准直后的平行光，以满足全反射条件耦合进入波导。光线首先在波导内基于全反射原理传播，直到碰到偏振反射膜，反射后破坏全反射条件，出射波导进入人眼。自右至左依次为S1、S2…..SN，其分光反射率为R 1、R 2….R N，波导玻璃透过率为T，分析可以得到每个面的出射光的效率η为：
η1:R 1*T
η2:R 2*(1-R 1)*T
η3:R 3*(1-R 2)*(1-R 1)*T
ηN:R N*(1-R N-1)*...*(1-R 1)*T
为了满足图像的均一性，需要满足：
η1＝η2＝…..ηN
当最左侧阵列分光膜面反射率为1/P时，推导计算得到每个阵列分光面的反射率为：
R 1＝1/(P+N-1)
R 2＝1/(P+N-2)
……
R N-1＝1/(P+1)
R N＝1/P
可以计算得到，虚拟图像光能利用率为：N/(P+N-1)，那么外界环境透过率为：
(1-1/(P+N-1))+(1-(P+N-2))+……+(1-1/P)
当采用偏振光源时，膜系可以按照偏振设计。
当入射图像的光为P光时，仅有P光被部分反射分光，S光全部通过。当入射图像的光为S光时，此时，整体的图像光能利用率仍为：N/(P+N-1)，但是，外界环境透过率提高一倍以上，达到
2*[(1-1/(P+N-1))+(1-(P+N-2))+……+(1-1/P)]
为了实现较好的外界透过率，通常选择1/P>50％，综合考虑工艺的可行性和实际效果，一般选择3≤N≤7。
上述P光、S光是指：表示偏振光源的S偏振光(简称S光)和P偏振光(简称P光)。
实际的膜系设计中，无法保证整个可见光谱的反射率一致。在亮度均一性的基础上，还需要考虑色彩的均一性。考虑到近眼显示系统中，人眼是接收器，因此需要引入人眼视觉函数对于整体的评价。
阵列膜面实际的有效反射率：
Figure PCTCN2018111509-appb-000001
其中Km为最大光谱光视效能，为683ml/W，V(λ)为波长为λ的光谱的光视函数，Φ e(λ)为波长为λ的光谱的辐射通量，R(λ)为阵列薄膜反射光谱中波长为λ的光谱的反射率。
本方案，实施一种4片式阵列薄膜镀膜方案，其最大反射率1/P＝50％。
综上所述，本发明提供了一种显示系统阵列反射镀膜及其应用。本发明的技术方案具有如下优点：
1、采用偏振薄膜阵列反射方案，将传统的视频透射式增强现实光学系统的单片组合器分裂成多片，突破虚拟图像光能利用率和外界现实场景透过率相互制约的桎梏。在外界透过率达到75％以上时，微型图像源光能利用率达到70％。
2、本镀膜方案在420nm～650nm宽带范围，实现图像亮度在4mmx4mm瞳孔区域均一性达到50％以上，边缘图像无明显衰减。具有带宽宽，受角度偏移影响小的优点。
3、重量轻、厚度薄仅为单片式的1/4，无突出妥余结构。
4、膜系均采用相同的高折射率和低折射率材料，具有工艺控制简单、量产性好的优点。
附图说明
图1为可用于近眼显示系统的阵列薄膜镀膜系统结构图；
图2为光线在阵列波导中传播的局部示意图；
图3(A)～图3(C)分别为S1面在0°、ω°、-ω°视场角处 的光谱曲线图；
图4(A)～图4(C)分别为S2面在0°、ω°、-ω°视场角处的光谱曲线图；
图5(A)～图5(C)分别为S3面在0°、ω°、-ω°视场角处的光谱曲线图；
图6(A)～图6(C)分别为S4面在0°、ω°、-ω°视场角处的光谱曲线图；
图7为0°、ω°、-ω°角度示意图；
图8为图像亮度在4mmx4mm瞳孔区域均一性示意图。
具体实施方式
以下通过具体实施例详细说明本发明的实施过程和产生的有益效果，旨在帮助阅读者更好地理解本发明的实质和特点，不作为对本案可实施范围的限定。
实施例1
图1为可用于近眼显示系统的阵列薄膜镀膜系统的结构示意图，具体包括：玻璃基底G1、G2、G3、G4、G5，以及夹在玻璃基底中间的级联偏振分光膜S1、S2、S3、S4。玻璃基底的底面与分光膜系阵列的夹角α为27.5°。
图2为光线在阵列波导中传播的局部示意图，具体包括：图像源视场光线，即实线201，外部视场光线，即虚线202。在平板波导中，图像源光线依据全反射原理传播，碰到偏振反射膜时，一部分发生反射，全反射条件被破坏，光线出射波导进入人眼，另一部分透射继续传播至下一片偏振反射膜；同时外部视场光线也可以透过偏振反射膜进入人眼，从而实现穿透式显示。本发明通过对偏振反射膜采用不同的镀膜方式，实现每一片反射膜的总通光亮基本相同，达到图像亮度均一性高的效果。如图8所示，本实施例镀膜方案在420nm～650nm宽带范围，实现图像亮度在4mmx4mm瞳孔区域均一性达到50％以上，边缘图像无明显衰减。
图3为S1面在0°、ω°、-ω°视场角处的光谱曲线。S1面膜系采用8层，整体厚度392.58nm。其中ω°为14°。具体数据如下。
  1 2 3 4 5 6 7 8
材料 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2
膜厚 16.69 51.31 85.72 41.53 115.00 62.42 9.67 10.24
坐标系中横坐标代表波长，纵坐标代表透过率。其中ω°表示视场角的最大值，即视场角的范围是从-ω°到ω°。当视场角为0°时，透过率范围从78.0％到83.0％；视场角为ω°时，透过率范围从76.0％到80.0％；当视场角为-ω°时，透过率范围从79.0％到84.0％。图中的黑色方框表示对于整个视场范围内平均透过率，对于S1平均透过率为80.0％。
本发明所述的-ω°、0°和ω°为出射光线和波导片法线的角度(ω°通常为10°-20°)，如图7所示，其中标号为4的虚线为波导片法线，标号为1的出射光线与法线夹角为-ω°，标号为2的出射光与法线夹角为0°，标号为3的出射光与法线夹角为ω°。
图4为S2面在0°、ω°、-ω°视场角处的光谱曲线。其中ω°为14°。S2面膜系采用6层，整体厚度531.93nm。
  1 2 3 4 5 6
材料 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2
厚度 24.33 64.75 49.71 90.03 112.12 191.00
当视场角为0°时，透过率范围从73.0％到78.5％；视场角为ω°时，透过率范围从70.0％到76.0％；当视场角为-ω°时，透过率范围从79.0％到81.0％。图中的黑色方框表示对于整个视场范围内平均透过率，对于S2平均透过率为75.0％。
图5为S3面在0°、ω°、-ω°视场角处的光谱曲线。其中ω°为14°。S3面膜系采用6层，整体厚度507.48nm。
  1 2 3 4 5 6
材料 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2
厚度 20.62 57.20 66.11 73.20 107.25 183.10
当视场角为0°时，透过率范围从64.0％到72.0％；视场角为ω °时，透过率范围从62.0％到70.0％；当视场角为-ω°时，透过率范围从68.0％到72.0％。图中的黑色方框表示对于整个视场范围内平均透过率，对于S3平均透过率为67.0％。
图6为S4面在0°、ω°、-ω°视场角处的光谱曲线。其中ω°为14°。S4面膜系采用6层，整体厚度587nm。
  1 2 3 4 5 6
材料 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2 Ta 2O 5 SiO 2
厚度 27.30 94.40 72.90 88.30 110.40 193.70
当视场角为0°时，透过率范围从47.0％到60.0％；视场角为ω°时，透过率范围从40.0％到60.0％；当视场角为-ω°时，透过率范围从52.5％到60.0％。图中的红色方框表示对于整个视场范围内平均透过率，对于S4平均透过率为50.0％。
等效计算损失的能量为0.5×0.67×0.75×0.8＝0.201,考虑实际的损失后损失率不大于30％，微型图像源光能利用率高于70％。
以上所述仅为本发明的较佳实施例，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种宽带宽级联分光膜阵列波导，其特征在于，所述级联分光膜阵列波导包括多片玻璃基底以及夹在相邻两片玻璃基底中间的分光膜系阵列，每片分光膜系阵列结构由多个H膜层L膜层依次交替排列构成，各层基底材料相同；
    其中H膜层为高折射率材料膜层，L膜层为低折射率材料膜层，各分光膜系阵列的膜层层数分别为偶数。
  2. 根据权利要求1所述的级联分光膜阵列波导，其特征在于，所述分光膜系阵列各膜层的平均透过率为50-80％。
  3. 根据权利要求1所述的级联分光膜阵列波导，其特征在于，相邻两片分光膜系阵列之间的垂直距离为2-5mm。
  4. 根据权利要求1所述的级联分光膜阵列波导，其特征在于，所述高折射率材料膜层H的折射率>2.0；所述低折射率材料膜层L的折射率<1.5；
    所述高折射率材料膜层H为Ta2O5膜层；所述低折射率材料膜层L为SiO2膜层。
  5. 根据权利要求1所述的级联分光膜阵列波导，其特征在于，各分光膜系阵列的膜层层数为4-12；或
    各分光膜系阵列的膜层层数为6-8。
  6. 根据权利要求1所述的级联分光膜阵列波导，其特征在于，玻璃基底的底面与分光膜系阵列的夹角为20°-45°；或
    玻璃基底的底面与分光膜系阵列的夹角为25°-35°或
    玻璃基底的底面与分光膜系阵列的夹角为27.5°。
  7. 根据权利要求1所述的级联分光膜阵列波导，其特征在于，所述级联分光膜阵列波导由五片玻璃基底、以及夹在相邻两个基底中间的总数为4片的分光膜系阵列组成；
    所述4片的分光膜系阵列按照沿光线入射方向的顺序各自设置的膜层层数分别为8、6、6和6。
  8. 根据权利要求7所述的级联分光膜阵列波导，其特征在于，所述级联分光膜阵列波导的分光膜系阵列按照沿光线入射方向的顺序依次为S1～S4分光膜系阵列；
    所述级联分光膜阵列按照沿光线入射方向设置的S1～S4各分光膜系阵列的第一层均为Ta2O5层；
    S1分光膜系阵列从上到下各膜层的厚度分别为：16.69nm、51.31nm、85.72nm、41.53nm、115.00nm、62.42nm、9.67nm、10.24nm；
    S2分光膜系阵列从上到下各膜层的厚度分别为：24.33nm、64.75nm、49.71nm、90.03nm、112.12nm、191.00nm；
    S3分光膜系阵列从上到下各膜层的厚度分别为：20.62nm、57.20nm、66.11nm、73.20nm、107.25nm、183.10nm；
    S4分光膜系阵列从上到下各膜层的厚度分别为：27.30nm、94.40nm、72.90nm、88.30nm、110.40nm、193.70nm。
  9. 一种显示系统，其特征在于，包括权利要求1～8任意一项所述的级联分光膜阵列波导。
  10. 根据权利要求9所述的显示系统，其中，所述显示系统为近眼显示系统。
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US10317679B2 (en) 2016-04-04 2019-06-11 Akonia Holographics, Llc Light homogenization
CN107728253B (zh) * 2017-11-02 2021-03-12 北京亮亮视野科技有限公司 宽带宽、高均匀性的级联分光膜阵列波导及其应用
US11803056B2 (en) 2018-09-14 2023-10-31 Apple Inc. Waveguided display systems
CN109239926A (zh) * 2018-10-29 2019-01-18 京东方科技集团股份有限公司 显示装置及其显示方法、显示设备
KR102816729B1 (ko) 2019-01-15 2025-06-04 루머스 리미티드 대칭 광 가이드 광학 요소를 제작하는 방법
CN111025661A (zh) * 2020-01-10 2020-04-17 深圳珑璟光电技术有限公司 一种光纤耦合波导近眼显示光学装置
US11630325B1 (en) * 2020-07-23 2023-04-18 Amazon Technologies, Inc. Augmented reality devices with prescription lenses
CN113481483B (zh) * 2021-07-12 2023-04-28 杭州科汀光学技术有限公司 一种用于阵列波导的镀膜方法
CN116643410B (zh) * 2023-07-24 2023-09-26 北京灵犀微光科技有限公司 一种阵列光波导及近眼显示设备

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1632643A (zh) * 2005-01-10 2005-06-29 中国科学院上海光学精密机械研究所 宽角度宽光谱偏振分束膜的制作方法
CN1834694A (zh) * 2005-03-18 2006-09-20 亚洲光学股份有限公司 分光镜的膜层结构
CN103837988A (zh) * 2014-03-05 2014-06-04 杭州科汀光学技术有限公司 一种微型近眼显示光学系统
CN104062769A (zh) * 2014-06-30 2014-09-24 张鹏 一种光学装置
US20160077335A1 (en) * 2014-09-16 2016-03-17 Samsung Electronics Co., Ltd. Optical device for augmented reality
CN107193078A (zh) * 2017-08-01 2017-09-22 京东方科技集团股份有限公司 一种光波导及其制备方法、增强现实设备
CN107728253A (zh) * 2017-11-02 2018-02-23 北京亮亮视野科技有限公司 宽带宽、高均匀性的级联分光膜阵列波导及其应用

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10048499B2 (en) * 2005-11-08 2018-08-14 Lumus Ltd. Polarizing optical system
CN202256725U (zh) * 2011-07-11 2012-05-30 平湖中天合波通信科技有限公司 一种高光谱指标的膜系结构
CN103941398B (zh) * 2014-04-09 2016-10-19 北京理工大学 透过式眼镜显示器
CN104216042B (zh) * 2014-09-03 2017-05-10 京东方科技集团股份有限公司 一种导光结构及头戴式显示设备
CN205787362U (zh) * 2016-02-26 2016-12-07 中国航空工业集团公司洛阳电光设备研究所 光波导元件、二维扩展光波导器件、平视显示装置及照明装置
CN106226902A (zh) * 2016-07-18 2016-12-14 深圳珑璟光电技术有限公司 用于增强现实显示的交互头戴显示设备

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1632643A (zh) * 2005-01-10 2005-06-29 中国科学院上海光学精密机械研究所 宽角度宽光谱偏振分束膜的制作方法
CN1834694A (zh) * 2005-03-18 2006-09-20 亚洲光学股份有限公司 分光镜的膜层结构
CN103837988A (zh) * 2014-03-05 2014-06-04 杭州科汀光学技术有限公司 一种微型近眼显示光学系统
CN104062769A (zh) * 2014-06-30 2014-09-24 张鹏 一种光学装置
US20160077335A1 (en) * 2014-09-16 2016-03-17 Samsung Electronics Co., Ltd. Optical device for augmented reality
CN107193078A (zh) * 2017-08-01 2017-09-22 京东方科技集团股份有限公司 一种光波导及其制备方法、增强现实设备
CN107728253A (zh) * 2017-11-02 2018-02-23 北京亮亮视野科技有限公司 宽带宽、高均匀性的级联分光膜阵列波导及其应用

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