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WO2019070034A1 - Three-dimensional laminate shaped article manufacturing device and three-dimensional laminate shaped article manufacturing method - Google Patents

Three-dimensional laminate shaped article manufacturing device and three-dimensional laminate shaped article manufacturing method Download PDF

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Publication number
WO2019070034A1
WO2019070034A1 PCT/JP2018/037237 JP2018037237W WO2019070034A1 WO 2019070034 A1 WO2019070034 A1 WO 2019070034A1 JP 2018037237 W JP2018037237 W JP 2018037237W WO 2019070034 A1 WO2019070034 A1 WO 2019070034A1
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WO
WIPO (PCT)
Prior art keywords
dimensional
layer
powder
coil
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/037237
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French (fr)
Japanese (ja)
Inventor
六 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Original Assignee
IHI Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp filed Critical IHI Corp
Priority to EP18865126.9A priority Critical patent/EP3693166B1/en
Priority to US16/652,868 priority patent/US11446917B2/en
Priority to JP2019547017A priority patent/JP7020491B2/en
Priority to CN201880062811.0A priority patent/CN111148588B/en
Publication of WO2019070034A1 publication Critical patent/WO2019070034A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10Processes of additive manufacturing
    • B29C64/141Processes of additive manufacturing using only solid materials
    • B29C64/153Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/36Process control of energy beam parameters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/38Process control to achieve specific product aspects, e.g. surface smoothness, density, porosity or hollow structures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/50Treatment of workpieces or articles during build-up, e.g. treatments applied to fused layers during build-up
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/002Devices involving relative movement between electronbeam and workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/0046Welding
    • B23K15/0086Welding welding for purposes other than joining, e.g. built-up welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/0046Welding
    • B23K15/0093Welding characterised by the properties of the materials to be welded
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K31/00Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups
    • B23K31/12Processes relevant to this subclass, specially adapted for particular articles or purposes, but not covered by only one of the preceding main groups relating to investigating the properties, e.g. the weldability, of materials
    • B23K31/125Weld quality monitoring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/20Apparatus for additive manufacturing; Details thereof or accessories therefor
    • B29C64/264Arrangements for irradiation
    • B29C64/268Arrangements for irradiation using laser beams; using electron beams [EB]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30Auxiliary operations or equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/30Auxiliary operations or equipment
    • B29C64/386Data acquisition or data processing for additive manufacturing
    • B29C64/393Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y10/00Processes of additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G01N27/90Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents
    • G01N27/904Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws using eddy currents with two or more sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/22Driving means
    • B22F12/222Driving means for motion along a direction orthogonal to the plane of a layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/30Platforms or substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40Radiation means
    • B22F12/41Radiation means characterised by the type, e.g. laser or electron beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/50Means for feeding of material, e.g. heads
    • B22F12/55Two or more means for feeding material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/60Planarisation devices; Compression devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2203/00Controlling
    • B22F2203/03Controlling for feed-back
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/10Aluminium or alloys thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/08Non-ferrous metals or alloys
    • B23K2103/14Titanium or alloys thereof
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/18Dissimilar materials
    • B23K2103/26Alloys of Nickel and Cobalt and Chromium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • B33Y50/02Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Definitions

  • the present disclosure relates to a three-dimensional laminated three-dimensional object manufacturing apparatus and a three-dimensional laminated three-dimensional object manufacturing method.
  • Patent Document 1 does not describe how to handle a three-dimensional product having defects.
  • An object of the present disclosure is to provide a three-dimensional laminated three-dimensional object manufacturing apparatus and a three-dimensional laminated three-dimensional object manufacturing method capable of detecting a defect in a surface layer portion and repairing the detected defect.
  • a beam irradiation unit that irradiates a beam to the conductive powder arranged in a layer, and a surface layer portion of the three-dimensional laminated three-dimensional object formed by curing the conductive powder.
  • an energy control unit for controlling the energy of the beam. The energy control unit increases the energy of the beam when irradiating the beam to the repair area set according to the flaw detection result by the nondestructive inspection unit.
  • a three-dimensional laminated three-dimensional object manufacturing apparatus and a three-dimensional laminated three-dimensional object manufacturing method capable of detecting a defect in the surface layer and repairing the detected defect.
  • FIG. 1 is a block diagram which shows the three-dimensional laminated molded article manufacturing apparatus of one Embodiment.
  • FIG. 2 is a cross-sectional view showing a three-dimensional laminate-molded article in which internal defects are detected.
  • FIG. 3 is a block diagram of the three-dimensional layered object manufacturing apparatus shown in FIG.
  • FIG. 4 is a view showing the arrangement of the inspection coil in the probe in FIG. 3 from above.
  • FIG. 5 is a flowchart showing the procedure of the three-dimensional laminated three-dimensional object manufacturing method of one embodiment.
  • a beam irradiation unit that irradiates a beam to the conductive powder arranged in a layer, and a surface layer portion of the three-dimensional laminated three-dimensional object formed by curing the conductive powder.
  • an energy control unit for controlling the energy of the beam. The energy control unit increases the energy of the beam when irradiating the beam to the repair area set according to the flaw detection result by the nondestructive inspection unit.
  • this three-dimensional laminated three-dimensional object manufacturing apparatus includes the nondestructive inspection unit, defects in the surface layer portion of the three-dimensional laminated three-dimensional object can be detected by the nondestructive inspection unit. Since the three-dimensional laminate model manufacturing apparatus includes the energy control unit, it is possible to increase the energy of the beam when irradiating the beam to the repair area including the defect detected by the nondestructive inspection unit. Thereby, the three-dimensional laminated three-dimensional object manufacturing apparatus can apply energy of the beam to defects existing in the lower layer while irradiating the beam to the next layer of the conductor powder. The three-dimensional laminate model manufacturing apparatus can repair a defect.
  • the beam irradiation unit includes an electron gun for irradiating an electron beam as a beam, an acceleration power supply for supplying an acceleration voltage to the electron gun, and a coil unit for forming a magnetic field in a region in front of the irradiation port of the electron gun. It is also good.
  • the energy control unit may include an acceleration voltage control unit that controls an acceleration voltage and a coil control unit that controls a coil unit. Thereby, by irradiating an electron beam with respect to conductor powder from an electron gun, conductor powder can be fuse
  • the acceleration voltage control unit can increase the acceleration voltage when irradiating the repair area with the electron beam.
  • the energy of the electron beam can be increased, and the electron beam can be applied to the defect existing in the lower layer while irradiating the layer of the conductor powder of the next time with the electron beam.
  • the three-dimensional laminate model manufacturing apparatus can melt and repair the defect.
  • the coil control unit may lower the scanning speed of the electron beam when irradiating the repair region with the electron beam. This makes it possible to increase the energy applied to the region irradiated with the electron beam, so that while irradiating the layer of the conductor powder next time with the electron beam, the energy of the beam with respect to the defect existing in the layer thereunder Can be granted.
  • the three-dimensional laminate model manufacturing apparatus can melt and repair defects.
  • a beam is irradiated to a conductor powder arranged in a layer to melt and cure the conductor powder, thereby manufacturing a three-dimensional laminated three-dimensional object
  • a method of manufacturing the object wherein the conductor powder of the first layer held in the holder is irradiated with a beam to melt the conductor powder of the first layer, and the conductor powder of the first layer is melted
  • a nondestructive inspection process for flaw detection of the surface layer portion of the three-dimensional laminate after being cured and cured a lamination process for laminating the conductor powder of the second layer on the three-dimensional laminate, and a nondestructive inspection process
  • d) repairing the area set in accordance with the flaw detection result In the repair step, when the beam is irradiated to the conductive powder of the second layer, the energy of the beam is increased to repair the area.
  • defects in the surface layer portion of the three-dimensional layered object can be detected by performing the nondestructive inspection process.
  • the repair step of this three-dimensional layered object manufacturing method when irradiating the beam to the conductor powder of the second layer laminated on the three dimensional layered object, the energy by the beam can be increased, The area containing the detected defect can be repaired. Thereby, the conductor powder of the second layer can be melted while repairing the defects contained in the first layer to produce a three-dimensional laminated three-dimensional object.
  • a three-dimensional laminated three-dimensional object manufacturing apparatus (hereinafter referred to as "manufacturing apparatus") 1 shown in FIG. 1 is a so-called 3D printer, which applies energy partially to metal powder (conductor powder) 2 arranged in layers.
  • Metal powder 2 can be melted or sintered.
  • the manufacturing apparatus 1 repeats melting or sintering a plurality of times to manufacture a three-dimensional component (three-dimensional laminate-molded product) 3.
  • the three-dimensional component 3 is, for example, a machine component or the like, and may be another structure.
  • the metal powder include titanium-based metal powder, Inconel (registered trademark) powder, and aluminum powder.
  • the conductor powder is not limited to a metal powder, and may be, for example, a powder containing carbon fibers and a resin, such as CFRP (Carbon Fiber Reinforced Plastics), or a powder having another conductivity.
  • the manufacturing apparatus 1 includes a vacuum chamber 4, a work table (holding unit) 5, an elevating device 6, a powder supply device 7, an electron beam irradiation device (beam irradiation unit) 8, a nondestructive inspection device 9 and a controller 31.
  • the vacuum chamber 4 is a container in which the inside is in a vacuum (low pressure) state, and a vacuum pump (not shown) is connected.
  • the work table 5 shown in FIG. 2 has, for example, a plate-like shape, and is a holding portion on which the metal powder 2 which is a raw material of the three-dimensional component 3 is disposed.
  • the metal powder 2 on the work table 5 is arranged, for example, in multiple layers in layers.
  • the work table 5 has, for example, a rectangular shape in a plan view.
  • the shape of the work table 5 is not limited to a rectangle, and may be a circle or another shape.
  • the work table 5 is disposed in the vacuum chamber 4, for example, in a recess that is recessed downward at the bottom.
  • the work table 5 is movable in the Z direction (vertical direction), and descends sequentially according to the number of layers of the metal powder 2.
  • a guide unit 10 for guiding the movement of the work table 5 is provided on the outer periphery of the work table 5.
  • the guide portion 10 has a rectangular cylindrical shape (a cylindrical shape when the work table is circular) so as to correspond to the outer shape of the work table 5.
  • the guide portion 10 and the work table 5 form an accommodating portion for accommodating the metal powder 2 and the three-dimensional part 3 shaped.
  • the work table 5 is movable in the Z direction inside the guide portion 10.
  • the guide unit 10 constitutes a part of the vacuum chamber 4.
  • the lifting device 6 raises and lowers the work table 5.
  • the lifting device 6 includes, for example, a rack and pinion type drive mechanism, and moves the work table 5 in the Z direction.
  • the lifting device 6 includes a rod-like vertical member (rack) connected to the bottom surface of the work table 5 and extending downward, and a drive source for driving the vertical member.
  • a drive source for example, an electric motor can be used.
  • a pinion is provided on the output shaft of the electric motor, and a side surface of the vertical member is provided with a tooth profile that meshes with the pinion. The electric motor is driven, the pinion rotates, power is transmitted, and the vertical direction member moves in the vertical direction.
  • the vertical position adjustment mechanism is not limited to the rack and pinion type drive mechanism.
  • the vertical position adjustment mechanism may include, for example, another drive mechanism such as a ball screw or a cylinder.
  • the powder supply device 7 shown in FIG. 1 includes a raw material tank 11 which is a storage section for storing the metal powder 2 and a powder application mechanism 12 for leveling the metal powder 2.
  • the raw material tank 11 and the powder coating mechanism 12 are disposed in the vacuum chamber 4.
  • the raw material tank 11 is disposed above the work table 5 in the Z direction.
  • the raw material tanks 11 are disposed, for example, on both sides of the work table 5 in the Y direction intersecting the Z direction.
  • Below the raw material tank 11, an overhang plate 13 is provided below the raw material tank 11, an overhang plate 13 is provided.
  • the overhang plate 13 extends laterally from the upper end of the guide portion 10.
  • the overhang plate 13 forms a plane intersecting the Z direction around the work table 5.
  • the metal powder 2 stored in the raw material tank 11 flows out from the raw material tank 11 and deposits on the overhang plate 13.
  • the powder application mechanism 12 is movable in the Y direction above the work table 5 and the overhang plate 13.
  • the powder coating mechanism 12 scrapes the metal powder 2 deposited on the overhang plate 13 onto the work table 5 and smooths the surface (upper surface) 2 a of the top layer of the laminate of the metal powder 2 on the work table 5. .
  • the lower end portion of the powder application mechanism 12 abuts on the surface 2 a of the laminate of the metal powder 2 to make the height uniform.
  • the powder coating mechanism 12 has, for example, a plate shape, and has a predetermined width in the X direction.
  • the X direction is a direction intersecting the Z direction and the Y direction.
  • the length in the X direction of the powder coating mechanism 12 corresponds, for example, to the total length in the X direction of the work table 5.
  • the manufacturing apparatus 1 may be configured to include a roller unit, a rod-like member, a brush unit, and the like instead of the powder application mechanism 12.
  • the electron beam irradiation device 8 includes an electron gun 14, an acceleration power supply 15, and a coil unit 16.
  • the electron gun 14 includes a cathode 14a, an anode 14b and a filament 14c.
  • the cathode 14 a, the anode 14 b and the filament 14 c are electrically connected to an accelerating power supply 15.
  • the negative electrode of the acceleration power supply 15 is grounded.
  • the acceleration voltage is, for example, -60 kv.
  • the acceleration voltage is a potential difference between the cathode 14a and the anode 14b.
  • the cathode 14a is heated by the filament 14c. Electrons are emitted from the heated cathode 14a.
  • Electrons are accelerated according to the potential difference between the cathode 14a and the anode 14b.
  • the electron beam (electron beam) B is irradiated into the vacuum chamber 4 through the irradiation port 14 d of the electron gun 14.
  • the coil portion 16 forms a magnetic field in the front region of the irradiation port 14 d of the electron gun 14.
  • the front area is a front area in the irradiation direction of the electron beam B.
  • the coil unit 16 includes an aberration coil 17, a focus coil 18, and a deflection coil 19.
  • the aberration coil 17, the focus coil 18 and the deflection coil 19 are arranged in this order from the side of the electron gun 14 in the irradiation direction of the electron beam B, for example.
  • the aberration coil 17 is disposed around the electron beam B emitted from the electron gun 14 and focuses the electron beam B.
  • the focus coil 18 is disposed around the electron beam B emitted from the electron gun 14 and corrects the deviation of the focus position of the electron beam B.
  • the deflection coil 19 is disposed around the electron beam B emitted from the electron gun 14 and adjusts the irradiation position of the electron beam B.
  • the deflection coil 19 performs electromagnetic beam deflection, so that the scanning speed at the time of irradiation of the electron beam B can be increased as compared with mechanical beam deflection.
  • the electron gun 14 and the coil section 16 are disposed at the top of the vacuum chamber 4.
  • the electron beam B emitted from the electron gun 14 is converged by the coil unit 16 to correct the focal position.
  • the scanning speed of the electron beam B is controlled to reach the irradiation position of the metal powder 2.
  • the nondestructive inspection device 9 shown in FIG. 2 includes a probe (nondestructive inspection unit) 9a that flaws the surface layer portion 3a of the three-dimensional component 3.
  • the probe 9 a is attached to the powder application mechanism 12.
  • the probe 9 a is movable in the Y direction together with the powder coating mechanism 12.
  • the probe 9 a may be movable separately from the powder application mechanism 12.
  • the bottom surface of the probe 9 a is disposed above the lower end of the powder application mechanism 12.
  • a gap is formed between the bottom of the probe 9 a and the surface 2 a of the laminate of the metal powder 2.
  • the probe 9 a is not in contact with the metal powder 2 and the three-dimensional component 3.
  • the probe 9a extends in the X direction intersecting the Y direction which is the scanning direction of the probe 9a.
  • the probe 9a includes a plurality of inspection coils 20 arranged side by side in the X direction, as shown in FIG.
  • the probe 9a includes a row of a plurality of inspection coils 20 aligned in the X direction.
  • the plurality of rows of inspection coils 20 are arranged side by side in the Y direction.
  • the inspection coil 20 of the probe 9a is housed, for example, in a box-shaped housing.
  • the probe 9 a is disposed on the front side in the moving direction of the powder coating mechanism 12.
  • the probe 9 a may be disposed on the rear side in the moving direction of the powder coating mechanism 12. After leveling the metal powder 2 by the powder coating mechanism 12, the probe 9 a may be flawed while passing over the metal powder 2.
  • the inspection coil 20 shown in FIG. 4 includes an excitation coil 21 and a pair of detection coils 22.
  • the exciting coil 21 is supplied with an alternating current to generate a magnetic field. Thereby, the exciting coil 21 can generate an eddy current in the surface layer portion 3 a of the three-dimensional component 3.
  • the exciting coil 21 is formed, for example, around an axis extending in the Z direction.
  • the pair of detection coils 22 is disposed inside the excitation coil 21.
  • the detection coil 22 is formed, for example, around an axis extending in the Z direction.
  • a ferrite core (iron core) is disposed inside the detection coil 22.
  • the ferrite core has, for example, a rod-like shape and extends in the Z direction.
  • the ferrite core may be cylindrical or prismatic.
  • the pair of detection coils 22 detect a change in the magnetic field due to the eddy current of the surface layer portion 3a.
  • the surface layer portion 3a may include the surface of the three-dimensional component 3 and an internal portion near the surface.
  • the surface layer portion 3a may include, for example, a region from the surface to a depth of 1 mm.
  • the surface layer portion 3a may include, for example, a region up to a depth of 2 mm, or may include regions up to another depth.
  • the probe 9a can be simultaneously subjected to flaw detection to a depth of a plurality of layers (for example, five layers) of the metal powder 2 as the surface layer portion 3a of the three-dimensional component 3.
  • the flow of the eddy current is changed, which changes the magnetic field.
  • the detection coil 22 By detecting the change of the magnetic field by the detection coil 22, the presence or absence of the defect C can be detected.
  • One of the pair of detection coils 22 may detect a change in the magnetic field, and the other may not detect the change in the magnetic field. In such a case, the change in the magnetic field can be accurately detected by calculating the difference between the signals detected by the pair of detection coils 22.
  • the defects C detected by the detection coil 22 include, for example, poor penetration, cracking, fusion, porosity, and the like.
  • the controller 31 shown in FIGS. 1 and 3 is a control unit that controls the entire apparatus of the manufacturing apparatus 1.
  • the controller 31 is a computer configured from hardware such as a central processing unit (CPU), read only memory (ROM), and random access memory (RAM) and software such as a program stored in the ROM.
  • the controller 31 includes an input signal circuit, an output signal circuit, a power supply circuit, and the like.
  • the controller 31 includes an arithmetic unit 32, an acceleration voltage control unit (energy control unit) 33, a coil control unit (energy control unit) 34, and a storage unit 35.
  • the controller 31 is electrically connected to the acceleration power supply 15, the aberration coil 17, the focus coil 18, the deflection coil 19, the powder coating mechanism 12, the probe 9 a, the elevating device 6, the display unit 41 and the operation unit 42.
  • the manufacturing apparatus 1 includes an energy control unit that controls the energy of the electron beam B.
  • the controller 31 may include an acceleration voltage control unit 33 and a coil control unit 34 as an energy control unit.
  • the operation unit 32 performs an operation on the signal detected by the probe 9a.
  • the calculation unit 32 can calculate, for example, the difference between the signals detected by the pair of detection coils 22.
  • the calculation unit 32 can calculate, for example, the presence or absence of the defect C, the position of the defect C (the position in the X direction, the position in the Y direction), and the depth of the defect C (the position in the Z direction).
  • the calculation unit 32 outputs the calculated inspection result (testing result) to the display unit 41.
  • the calculation unit 32 stores the calculated inspection result in the storage unit 35.
  • the acceleration voltage control unit 33 controls the acceleration voltage applied by the acceleration power supply 15.
  • the acceleration voltage control unit 33 increases the acceleration voltage more than usual depending on the position and depth of the detected defect C.
  • the normal acceleration voltage is an acceleration voltage when there is no need to repair the defect C.
  • the acceleration voltage at the normal time is, for example, an acceleration voltage required to irradiate the electron beam B capable of melting one layer of metal powder 2.
  • the acceleration voltage control unit 33 increases the acceleration voltage to increase the velocity of electrons by the electron beam B.
  • the acceleration voltage control unit 33 performs control to increase the acceleration voltage in accordance with the timing when the electron beam B is irradiated to the defect C.
  • the acceleration voltage control unit 33 performs control to lower the acceleration voltage and return it to the normal value.
  • the coil control unit 34 controls the aberration coil 17 to converge the electron beam B.
  • the coil control unit 34 controls the focus coil 18 to control the focus position of the electron beam B.
  • the coil control unit 34 controls the deflection coil 19 to control the irradiation position of the electron beam B.
  • the coil control unit 34 controls the amount of control in the aberration coil 17, the amount of control in the focus coil 18, the deflection coil 19 Can be corrected.
  • data on the control amount of the aberration coil 17, the control amount of the focus coil 18, and the control amount of the deflection coil 19 are stored in the storage unit 35.
  • the display unit 41 is, for example, a liquid crystal display device, and can display an inspection result and the like output from the controller 31.
  • the display unit 41 displays, for example, information on the position, depth, and the like of the detected defect C.
  • the display unit 41 can display information on the electron beam B emitted from the electron gun 14.
  • the display unit 41 can display data on the acceleration voltage, the control amount of the aberration coil 17, the control amount of the focus coil 18, and the control amount of the deflection coil 19.
  • the operation unit 42 is an input unit that can be operated by the user. The user can confirm the information displayed on the display unit 41 and change various settings (control amounts).
  • FIG. 5 is a flowchart showing the procedure of a method of manufacturing a three-dimensional part.
  • the method of manufacturing a three-dimensional part is performed using, for example, the manufacturing apparatus 1.
  • the metal powder 2 is discharged from the raw material tank 11, the metal powder 2 of the first layer is supplied onto the work table 5, and the powder coating mechanism 12 is moved in the Y direction.
  • the surface 2a of the laminate is leveled (step S1).
  • an irradiation step of irradiating the metal powder 2 on the work table 5 with the electron beam B is performed (melting step: step S2).
  • the acceleration voltage control unit 33 controls the acceleration power supply 15 to control the acceleration voltage. As a result, the electrons are accelerated and the electron beam B is emitted from the electron gun 14.
  • the coil control unit 34 controls the aberration coil 17 to focus the electron beam B, controls the focus coil 18 to control the focus position of the electron beam B, and controls the deflection coil 19 to control the electron beam.
  • the irradiation position of B is controlled, and the scanning speed of the electron beam B is controlled.
  • the controller 31 sends a command signal to the lifting device 6 to lower the work table 5 (step S3). Thereby, the space for laminating the metal powder 2 of the second layer on the first layer is secured.
  • the manufacturing apparatus 1 After the metal powder 2 of the first layer (the nth layer) which has melted is cured, in the manufacturing apparatus 1, the metal powder 2 of the second layer (the n + 1th layer) is placed on the work table 5 (the metal powder 2 of the nth layer) (Layering process), the powder coating mechanism 12 is moved in the Y direction, and the surface 2a of the metal powder 2 of the second layer is leveled (step S4). At this time, when moving the powder application mechanism 12, a flaw detection process (nondestructive inspection process; step S5) is performed. For example, the surface 2a of the metal powder 2 of the second layer (the (n + 1) th layer) is leveled, and a flaw detection process is performed on the surface layer portion 3a of the first layer (the nth layer).
  • a flaw detection process nondestructive inspection process
  • an excitation process and a detection process are performed.
  • the exciting step current is supplied to the exciting coil 21 to generate a magnetic field, thereby generating an eddy current in the surface layer portion 3a.
  • the detection step the change of the magnetic field in the surface layer 3a is detected. For example, if there is a defect C, a shape discontinuity or the like in the surface layer portion 3a, the eddy current detours to change and the magnetic field changes.
  • the calculation unit 32 calculates the difference between the signals detected by the pair of detection coils 22.
  • the operation unit 32 generates image information indicating the inspection result based on the calculated result.
  • the image information indicating the inspection result is output to the display unit 41 and displayed.
  • the display unit 41 may display the position, the size, the direction, and the like of the defect C as image information indicating the inspection result.
  • operation unit 32 determines the presence or absence of defect C based on the inspection result (step S6).
  • the calculation unit 32 may determine the presence or absence of the defect C based on the difference between the signals from the pair of detection coils 22. The user looks at the image information displayed on the display unit 41 and the defect C is detected. The presence or absence may be determined. If the defect C is not detected, the process proceeds to step S8. If the defect C is detected, the process proceeds to step S7.
  • step S7 a repair preparation process is performed.
  • the controller 31 performs various settings for repairing the defect C.
  • the controller 31 sets, for example, a repair area including the defect C.
  • the controller 31 sets the control amount of the acceleration power supply when the electron beam B is irradiated to the repair area including the defect C.
  • the controller 31 sets, for example, the control amount of the acceleration power supply 15 so as to increase the acceleration voltage.
  • the controller 31 sets the control amount of the coil unit 16 when the acceleration voltage is increased.
  • the controller 31 can set, for example, the control amount of the aberration coil 17, the control amount of the focus coil 18, and the control amount of the deflection coil 19 in accordance with the increase amount of the velocity of electrons in the electron beam B.
  • the above control amount is set based on the position, size, and shape of the defect C, the control amount of the electron beam B in the past, and the like. These control amounts may be set by the user or may be set by the calculation unit 32 performing calculations.
  • the set control amount is stored in the storage unit 35.
  • the repair area including the defect C may be the defect C alone, may include the area around the defect C, or may include only a part of the defect C.
  • step S2 the electron beam irradiation apparatus 8 irradiates the electron beam B to the metal powder 2 of the second layer stacked on the first layer.
  • step S2 when the electron beam B is irradiated to the repair area including the defect C, control based on the control amount set in the repair preparation process is executed, and the acceleration voltage is increased. Control is performed. As a result, the energy of the electron beam B is increased, the electron beam B reaches the defect C, and the defect C is melted. Thereby, the repair process which repairs the defect C is implemented.
  • the electron beam B was irradiated to the metal powder 2 of the second layer in the region other than the repair region, the electron powder B was irradiated to the metal powder 2 of the previous first layer.
  • the electron beam B is irradiated as well as time. That is, when the irradiation position of the electron beam B moves and deviates from the repair position including the defect C, the acceleration voltage control unit 33 returns the acceleration voltage.
  • step S2 After the irradiation process in step S2 is performed, steps S3 to S6 are repeated. If it is determined in step S6 that there is no defect, the process proceeds to step S8.
  • step S8 the controller 31 determines whether or not the formation is completed for all the layers of the three-dimensional part 3 and the part is completed. For example, it is determined whether or not modeling has been completed for the designed layer. If shaping of the three-dimensional part is not completed, the process returns to step S2.
  • step S2 the electron beam irradiation apparatus 8 irradiates the electron beam B to the metal powder 2 formed in the previous step S4 to partially apply energy to perform melting.
  • the manufacturing apparatus 1 repeats the same process, performs modeling on all the layers of the three-dimensional part 3, and completes the manufacture of the three-dimensional part 3.
  • the defect C of the surface layer portion 3 a of the three-dimensional component 3 can be detected by the nondestructive inspection device 9. Since the manufacturing apparatus 1 includes the accelerating voltage control unit 33, when irradiating the electron beam B to the repair area including the defect C detected by the nondestructive inspection apparatus 9, the energy by the electron beam B is increased. Can. Thereby, the manufacturing apparatus 1 can apply the energy of the electron beam B to the defect C existing in the first layer under the second layer while irradiating the metal powder 2 of the second layer with the electron beam B. As a result, the defect C can be repaired.
  • the energy of the electron beam B is increased by performing control of increasing the acceleration voltage, but the control of increasing energy of the beam is not limited to this.
  • the controller 31 may reduce the moving speed of the irradiation position of the electron beam B by decreasing the scanning speed of the electron beam B, and may increase the energy applied to the conductor powder. That is, when the coil control unit 34 irradiates the repair area with the electron beam B, the coil control unit 34 may perform control to make the scanning speed of the electron beam B lower than usual.
  • the coil control unit 34 may simultaneously perform control to increase the acceleration voltage and control to decrease the scanning speed. That is, the scanning speed may be decreased while increasing the acceleration voltage.
  • the manufacturing apparatus 1 can also repair the defect C by irradiating the repair area including the defect C with the electron beam B again.
  • the electron beam B is irradiated to melt the conductor powder
  • the beam irradiated to the conductor powder is not limited to the electron beam, and may be another energy beam.
  • the three-dimensional laminated three-dimensional object manufacturing apparatus may include, for example, a laser transmitter and may be irradiated with a laser beam to melt the conductor powder.
  • the coil control unit may perform control to increase the output of the laser beam, or may control to decrease the scanning speed of the laser beam. Thereby, when the beam is irradiated to the repair area, the energy by the beam can be increased to repair the defect.
  • the nondestructive inspection unit for flaw detection of the surface layer portion 3a of the three-dimensional component 3 a case where eddy current is generated in the three-dimensional component 3 to perform flaw detection (eddy current flaw detection test) is described.
  • the nondestructive inspection part is not limited to the one that conducts the eddy current flaw detection test.
  • the nondestructive inspection unit may perform other nondestructive inspection such as, for example, a radiation transmission test.
  • the nondestructive inspection unit may include a camera (imaging unit), and may set a repair area by detecting a defect based on the imaged image.
  • the powder application mechanism is moved in the Y direction to level the surface 2a of the powder laminate (powder layer), but the powder application mechanism is moved in the other directions in the XY plane.
  • the surface 2a of the powder layer may be leveled.
  • the manufacturing apparatus may move the powder application mechanism in the circumferential direction.
  • the manufacturing apparatus may move the modeling tank including the work table relative to the powder coating mechanism in plan view to level the surface 2a.
  • the shaping tank (guide portion) may be configured to reciprocate in, for example, the X direction, or may be configured to be movable in other directions.
  • the modeling tank may be configured to be rotationally movable about an imaginary line extending in the Z direction.
  • the manufacturing apparatus includes a circular holding unit (working table) in plan view, and rotates the holding unit and the powder layer around an imaginary line (central portion of the holding unit) extending in the Z direction.
  • the application and the beam irradiation may be sequentially performed.

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Abstract

三次元積層造形物製造装置は、層状に配置された導電体粉末に対してビームを照射するビーム照射部と、導電体粉末が硬化して形成された三次元積層造形物の表層部を探傷する非破壊検査部と、ビームのエネルギを制御するエネルギ制御部と、を備える。エネルギ制御部は、非破壊検査部による探傷結果に応じて設定された補修領域にビームを照射する際に、ビームによるエネルギを増加させる。The three-dimensional laminated three-dimensional object manufacturing apparatus flaws the surface portion of a three-dimensional laminated three-dimensional object formed by curing the conductor powder and a beam irradiation unit that irradiates a beam to the conductor powder arranged in a layer. A nondestructive inspection unit and an energy control unit for controlling the energy of the beam. The energy control unit increases the energy of the beam when irradiating the beam to the repair area set according to the flaw detection result by the nondestructive inspection unit.

Description

三次元積層造形物製造装置及び三次元積層造形物製造方法Three-dimensional laminated object manufacturing apparatus and three-dimensional laminated object manufacturing method

 本開示は、三次元積層造形物製造装置及び三次元積層造形物製造方法に関する。 The present disclosure relates to a three-dimensional laminated three-dimensional object manufacturing apparatus and a three-dimensional laminated three-dimensional object manufacturing method.

 従来、作業テーブル上に原料である粉末を層状に配置して、この粉末層の選択した部分にエネルギを付与して順次溶融し、三次元製品を製造する装置がある(例えば特許文献1参照)。このような三次元製品を製造する装置では、一つの粉末層について、部分的に溶融させ、溶融した粉末が硬化した後に、その上に別の粉末層を形成し、さらに選択した部分を溶融し硬化させて、これを繰り返して三次元製品を製造する。 Conventionally, there is an apparatus for producing a three-dimensional product by arranging powder in the form of a layer on a work table, applying energy to selected portions of the powder layer and sequentially melting them (see, for example, Patent Document 1) . In an apparatus for producing such a three-dimensional product, one powder layer is partially melted, and after the molten powder hardens, another powder layer is formed thereon, and then a selected portion is melted. Curing is repeated to produce a three-dimensional product.

特表2003-531034号公報Japanese Patent Publication No. 2003-531034

 従来、欠陥を有する三次元製品は、製品として利用されず不良品として廃棄されている。上記の特許文献1では、欠陥を有する三次元製品について、どのように対処するかについて記載されていない。本開示は、表層部の欠陥を検出し、検出された欠陥を補修することが可能な三次元積層造形物製造装置及び三次元積層造形物製造方法を提供することを目的とする。 Conventionally, defective three-dimensional products are not used as products but discarded as defective products. Patent Document 1 mentioned above does not describe how to handle a three-dimensional product having defects. An object of the present disclosure is to provide a three-dimensional laminated three-dimensional object manufacturing apparatus and a three-dimensional laminated three-dimensional object manufacturing method capable of detecting a defect in a surface layer portion and repairing the detected defect.

 本開示の三次元積層造形物製造装置は、層状に配置された導電体粉末に対してビームを照射するビーム照射部と、導電体粉末が硬化して形成された三次元積層造形物の表層部を探傷する非破壊検査部と、ビームのエネルギを制御するエネルギ制御部と、を備える。エネルギ制御部は、非破壊検査部による探傷結果に応じて設定された補修領域にビームを照射する際に、ビームによるエネルギを増加させる。 In the three-dimensional laminated three-dimensional object manufacturing apparatus of the present disclosure, a beam irradiation unit that irradiates a beam to the conductive powder arranged in a layer, and a surface layer portion of the three-dimensional laminated three-dimensional object formed by curing the conductive powder. And an energy control unit for controlling the energy of the beam. The energy control unit increases the energy of the beam when irradiating the beam to the repair area set according to the flaw detection result by the nondestructive inspection unit.

 本開示によれば、表層部の欠陥を検出し、検出された欠陥を補修することが可能な三次元積層造形物製造装置及び三次元積層造形物製造方法を提供することができる。 According to the present disclosure, it is possible to provide a three-dimensional laminated three-dimensional object manufacturing apparatus and a three-dimensional laminated three-dimensional object manufacturing method capable of detecting a defect in the surface layer and repairing the detected defect.

図1は、一実施形態の三次元積層造形物製造装置を示す構成図である。FIG. 1: is a block diagram which shows the three-dimensional laminated molded article manufacturing apparatus of one Embodiment. 図2は、内部欠陥が検出された三次元積層造形物を示す断面図である。FIG. 2 is a cross-sectional view showing a three-dimensional laminate-molded article in which internal defects are detected. 図3は、図1に示す三次元積層造形物製造装置のブロック構成図である。FIG. 3 is a block diagram of the three-dimensional layered object manufacturing apparatus shown in FIG. 図4は、図3中のプローブにおける検査コイルの配置を上方から示す図である。FIG. 4 is a view showing the arrangement of the inspection coil in the probe in FIG. 3 from above. 図5は、一実施形態の三次元積層造形物製造方法の手順を示すフローチャートである。FIG. 5 is a flowchart showing the procedure of the three-dimensional laminated three-dimensional object manufacturing method of one embodiment.

 本開示の三次元積層造形物製造装置は、層状に配置された導電体粉末に対してビームを照射するビーム照射部と、導電体粉末が硬化して形成された三次元積層造形物の表層部を探傷する非破壊検査部と、ビームのエネルギを制御するエネルギ制御部と、を備える。エネルギ制御部は、非破壊検査部による探傷結果に応じて設定された補修領域にビームを照射する際に、ビームによるエネルギを増加させる。 In the three-dimensional laminated three-dimensional object manufacturing apparatus of the present disclosure, a beam irradiation unit that irradiates a beam to the conductive powder arranged in a layer, and a surface layer portion of the three-dimensional laminated three-dimensional object formed by curing the conductive powder. And an energy control unit for controlling the energy of the beam. The energy control unit increases the energy of the beam when irradiating the beam to the repair area set according to the flaw detection result by the nondestructive inspection unit.

 この三次元積層造形物製造装置は、非破壊検査部を備えているので、この非破壊検査部によって三次元積層造形物の表層部の欠陥を検出することができる。三次元積層造形物製造装置は、エネルギ制御部を備えているので、非破壊検査部によって検出された欠陥を含む補修領域にビームを照射する際に、ビームによるエネルギを増加させることができる。これにより、三次元積層造形物製造装置は、次回の導電体粉末の層にビームを照射しながら、その下層に存在する欠陥に対してビームのエネルギを付与することができる。三次元積層造形物製造装置は、欠陥を補修することができる。 Since this three-dimensional laminated three-dimensional object manufacturing apparatus includes the nondestructive inspection unit, defects in the surface layer portion of the three-dimensional laminated three-dimensional object can be detected by the nondestructive inspection unit. Since the three-dimensional laminate model manufacturing apparatus includes the energy control unit, it is possible to increase the energy of the beam when irradiating the beam to the repair area including the defect detected by the nondestructive inspection unit. Thereby, the three-dimensional laminated three-dimensional object manufacturing apparatus can apply energy of the beam to defects existing in the lower layer while irradiating the beam to the next layer of the conductor powder. The three-dimensional laminate model manufacturing apparatus can repair a defect.

 ビーム照射部は、ビームである電子線を照射する電子銃と、電子銃に加速電圧を供給する加速電源と、電子銃の照射口の前方領域に磁場を形成するコイル部と、を備えていてもよい。エネルギ制御部は、加速電圧を制御する加速電圧制御部と、コイル部を制御するコイル制御部と、を含んでもよい。これにより、電子銃から導電体粉末に対して電子線を照射することで、導電体粉末を溶融して、硬化させて三次元積層造形物を製造することができる。加速電圧制御部は、補修領域に対して電子線を照射する際に、加速電圧を増加させることができる。これにより、電子線によるエネルギを増加させて、次回の導電体粉末の層に電子線を照射しながら、その下層に存在する欠陥に対して電子線のエネルギを付与することができる。その結果、三次元積層造形物製造装置は、欠陥を溶融して補修することができる。 The beam irradiation unit includes an electron gun for irradiating an electron beam as a beam, an acceleration power supply for supplying an acceleration voltage to the electron gun, and a coil unit for forming a magnetic field in a region in front of the irradiation port of the electron gun. It is also good. The energy control unit may include an acceleration voltage control unit that controls an acceleration voltage and a coil control unit that controls a coil unit. Thereby, by irradiating an electron beam with respect to conductor powder from an electron gun, conductor powder can be fuse | melted and it can be hardened and a three-dimensional laminate-molded article can be manufactured. The acceleration voltage control unit can increase the acceleration voltage when irradiating the repair area with the electron beam. As a result, the energy of the electron beam can be increased, and the electron beam can be applied to the defect existing in the lower layer while irradiating the layer of the conductor powder of the next time with the electron beam. As a result, the three-dimensional laminate model manufacturing apparatus can melt and repair the defect.

 コイル制御部は、補修領域に対して電子線を照射する際に、電子線の走査速度を低下させてもよい。これにより、電子線が照射された領域に付与されるエネルギを増加させることができるので、次回の導電体粉末の層に電子線を照射しながら、その下層に存在する欠陥に対してビームのエネルギを付与することができる。三次元積層造形物製造装置は、欠陥を溶融して補修することができる。 The coil control unit may lower the scanning speed of the electron beam when irradiating the repair region with the electron beam. This makes it possible to increase the energy applied to the region irradiated with the electron beam, so that while irradiating the layer of the conductor powder next time with the electron beam, the energy of the beam with respect to the defect existing in the layer thereunder Can be granted. The three-dimensional laminate model manufacturing apparatus can melt and repair defects.

 本開示の三次元積層造形物製造方法は、層状に配置された導電体粉末に対してビームを照射して、導電体粉末を溶融し硬化させ、三次元積層造形物を製造する三次元積層造形物製造方法であって、保持部に保持された第1層の導電体粉末にビームを照射して、第1層の導電体粉末を溶融させる溶融工程と、第1層の導電体粉末が溶融されて硬化した後の三次元積層造形物の表層部を探傷する非破壊検査工程と、三次元積層造形物の上に第2層の導電体粉末を積層する積層工程と、非破壊検査工程による探傷結果に応じて設定された領域を補修する補修工程と、を含む。補修工程では、第2層の導電体粉末にビームを照射する際に、ビームによるエネルギを増加させて、領域を補修する。 In the three-dimensional laminated three-dimensional object manufacturing method of the present disclosure, a beam is irradiated to a conductor powder arranged in a layer to melt and cure the conductor powder, thereby manufacturing a three-dimensional laminated three-dimensional object A method of manufacturing the object, wherein the conductor powder of the first layer held in the holder is irradiated with a beam to melt the conductor powder of the first layer, and the conductor powder of the first layer is melted By a nondestructive inspection process for flaw detection of the surface layer portion of the three-dimensional laminate after being cured and cured, a lamination process for laminating the conductor powder of the second layer on the three-dimensional laminate, and a nondestructive inspection process And d) repairing the area set in accordance with the flaw detection result. In the repair step, when the beam is irradiated to the conductive powder of the second layer, the energy of the beam is increased to repair the area.

 この三次元積層造形製造方法では、非破壊検査工程を行うことによって三次元積層造形物の表層部の欠陥を検出することができる。この三次元積層造形物製造方法の補修工程では、三次元積層造形物の上に積層された第2層の導電体粉末にビームを照射する際に、ビームによるエネルギを増加させることができるので、検出された欠陥を含む領域を補修することができる。これにより、第1層に含まれる欠陥を補修しながら、第2層の導電体粉末を溶融させて、三次元積層造形物を製造することができる。 In this three-dimensional layered manufacturing method, defects in the surface layer portion of the three-dimensional layered object can be detected by performing the nondestructive inspection process. In the repair step of this three-dimensional layered object manufacturing method, when irradiating the beam to the conductor powder of the second layer laminated on the three dimensional layered object, the energy by the beam can be increased, The area containing the detected defect can be repaired. Thereby, the conductor powder of the second layer can be melted while repairing the defects contained in the first layer to produce a three-dimensional laminated three-dimensional object.

 以下、本開示の好適な実施形態について、図面を参照しながら詳細に説明する。なお、各図において同一部分又は相当部分には同一の符号を付し、重複する説明は省略する。 Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the drawings. In the drawings, the same parts or corresponding parts are denoted by the same reference numerals, and redundant description will be omitted.

 図1に示される三次元積層造形物製造装置(以下「製造装置」という)1は、いわゆる3Dプリンタであり、層状に配置した金属粉末(導電体粉末)2に部分的にエネルギを付与して、金属粉末2を溶融又は焼結させることができる。製造装置1は、溶融又は焼結を複数回繰り返して三次元部品(三次元積層造形物)3を製造する。三次元部品3は、例えば機械部品などであり、その他の構造物であってもよい。金属粉末としては例えばチタン系金属粉末、インコネル(登録商標)粉末、アルミニウム粉末等が挙げられる。導電体粉末は、金属粉末に限定されず、例えばCFRP(Carbon Fiber Reinforced Plastics)など、炭素繊維と樹脂を含む粉末でもよく、その他の導電性を有する粉末でもよい。 A three-dimensional laminated three-dimensional object manufacturing apparatus (hereinafter referred to as "manufacturing apparatus") 1 shown in FIG. 1 is a so-called 3D printer, which applies energy partially to metal powder (conductor powder) 2 arranged in layers. , Metal powder 2 can be melted or sintered. The manufacturing apparatus 1 repeats melting or sintering a plurality of times to manufacture a three-dimensional component (three-dimensional laminate-molded product) 3. The three-dimensional component 3 is, for example, a machine component or the like, and may be another structure. Examples of the metal powder include titanium-based metal powder, Inconel (registered trademark) powder, and aluminum powder. The conductor powder is not limited to a metal powder, and may be, for example, a powder containing carbon fibers and a resin, such as CFRP (Carbon Fiber Reinforced Plastics), or a powder having another conductivity.

 製造装置1は、真空チャンバ4、作業テーブル(保持部)5、昇降装置6、粉末供給装置7、電子線照射装置(ビーム照射部)8、非破壊検査装置9及びコントローラ31を備える。真空チャンバ4は、内部を真空(低圧)状態とする容器であり、図示しない真空ポンプが接続されている。図2に示される作業テーブル5は、例えば板状を成し、三次元部品3の原料である金属粉末2が配置される保持部である。作業テーブル5上の金属粉末2は例えば層状に複数回に分けて配置される。作業テーブル5は、平面視において、例えば矩形状を成している。作業テーブル5の形状は、矩形に限定されず、円形でもよく、その他の形状でもよい。作業テーブル5は、真空チャンバ4内において、例えば底部で下方に窪む凹部に配置されている。作業テーブル5は、Z方向(上下方向)に移動可能であり、金属粉末2の層数に応じて順次降下する。作業テーブル5の外周には、作業テーブル5の移動を案内するガイド部10が設けられている。ガイド部10は、作業テーブル5の外形に対応するように角筒状(作業テーブルが円形の場合は円筒状)を成している。ガイド部10及び作業テーブル5は、金属粉末2及び造形された三次元部品3を収容する収容部を形成する。作業テーブル5はガイド部10の内側でZ方向に移動可能である。例えばガイド部10は、真空チャンバ4の一部を構成している。 The manufacturing apparatus 1 includes a vacuum chamber 4, a work table (holding unit) 5, an elevating device 6, a powder supply device 7, an electron beam irradiation device (beam irradiation unit) 8, a nondestructive inspection device 9 and a controller 31. The vacuum chamber 4 is a container in which the inside is in a vacuum (low pressure) state, and a vacuum pump (not shown) is connected. The work table 5 shown in FIG. 2 has, for example, a plate-like shape, and is a holding portion on which the metal powder 2 which is a raw material of the three-dimensional component 3 is disposed. The metal powder 2 on the work table 5 is arranged, for example, in multiple layers in layers. The work table 5 has, for example, a rectangular shape in a plan view. The shape of the work table 5 is not limited to a rectangle, and may be a circle or another shape. The work table 5 is disposed in the vacuum chamber 4, for example, in a recess that is recessed downward at the bottom. The work table 5 is movable in the Z direction (vertical direction), and descends sequentially according to the number of layers of the metal powder 2. A guide unit 10 for guiding the movement of the work table 5 is provided on the outer periphery of the work table 5. The guide portion 10 has a rectangular cylindrical shape (a cylindrical shape when the work table is circular) so as to correspond to the outer shape of the work table 5. The guide portion 10 and the work table 5 form an accommodating portion for accommodating the metal powder 2 and the three-dimensional part 3 shaped. The work table 5 is movable in the Z direction inside the guide portion 10. For example, the guide unit 10 constitutes a part of the vacuum chamber 4.

 昇降装置6は、作業テーブル5を昇降させる。昇降装置6は、例えばラックアンドピニオン方式の駆動機構を含み、作業テーブル5をZ方向に移動させる。昇降装置6は、作業テーブル5の底面に連結されて下方に伸びる棒状の上下方向部材(ラック)と、この上下方向部材を駆動するための駆動源と、を含む。駆動源としては、例えば電動モータを用いることができる。電動モータの出力軸にはピニオンが設けられ、上下方向部材の側面にはピニオンと噛み合う歯形が設けられている。電動モータが駆動され、ピニオンが回転して動力が伝達されて、上下方向部材が上下方向に移動する。電動モータの回転を停止することで、上下方向部材が位置決めされて、作業テーブル5のZ方向の位置が決まり、その位置が保持される。上下方向位置調整機構は、ラックアンドピニオン方式の駆動機構に限定されない。上下方向位置調整機構は、例えば、ボールねじ、シリンダなどその他の駆動機構を備えるものでもよい。 The lifting device 6 raises and lowers the work table 5. The lifting device 6 includes, for example, a rack and pinion type drive mechanism, and moves the work table 5 in the Z direction. The lifting device 6 includes a rod-like vertical member (rack) connected to the bottom surface of the work table 5 and extending downward, and a drive source for driving the vertical member. As a drive source, for example, an electric motor can be used. A pinion is provided on the output shaft of the electric motor, and a side surface of the vertical member is provided with a tooth profile that meshes with the pinion. The electric motor is driven, the pinion rotates, power is transmitted, and the vertical direction member moves in the vertical direction. By stopping the rotation of the electric motor, the vertical member is positioned, the position of the work table 5 in the Z direction is determined, and the position is held. The vertical position adjustment mechanism is not limited to the rack and pinion type drive mechanism. The vertical position adjustment mechanism may include, for example, another drive mechanism such as a ball screw or a cylinder.

 図1に示す粉末供給装置7は、金属粉末2を貯留する貯留部である原料タンク11と、金属粉末2を均す粉末塗布機構12とを備える。原料タンク11及び粉末塗布機構12は、真空チャンバ4内に配置されている。原料タンク11は、Z方向において作業テーブル5より上方に配置されている。原料タンク11は、例えば、Z方向と交差するY方向において、作業テーブル5の両側に配置されている。原料タンク11の下方には、張出板13が設けられている。張出板13はガイド部10の上端部から側方に延びている。張出板13は、作業テーブル5の周囲において、Z方向に交差する平面を形成している。原料タンク11に貯留されている金属粉末2は、原料タンク11から流出して張出板13上に堆積する。 The powder supply device 7 shown in FIG. 1 includes a raw material tank 11 which is a storage section for storing the metal powder 2 and a powder application mechanism 12 for leveling the metal powder 2. The raw material tank 11 and the powder coating mechanism 12 are disposed in the vacuum chamber 4. The raw material tank 11 is disposed above the work table 5 in the Z direction. The raw material tanks 11 are disposed, for example, on both sides of the work table 5 in the Y direction intersecting the Z direction. Below the raw material tank 11, an overhang plate 13 is provided. The overhang plate 13 extends laterally from the upper end of the guide portion 10. The overhang plate 13 forms a plane intersecting the Z direction around the work table 5. The metal powder 2 stored in the raw material tank 11 flows out from the raw material tank 11 and deposits on the overhang plate 13.

 粉末塗布機構12は、作業テーブル5及び張出板13の上方で、Y方向に移動可能である。粉末塗布機構12は、張出板13上に堆積する金属粉末2を作業テーブル5上に掻き寄せると共に、作業テーブル5上の金属粉末2の積層物の最上層の表面(上面)2aを均す。粉末塗布機構12の下端部は、金属粉末2の積層物の表面2aに当接して高さを均一にする。粉末塗布機構12は、例えば板状を成し、X方向に所定の幅を有する。X方向は、Z方向及びY方向に交差する方向である。粉末塗布機構12のX方向の長さは、例えば作業テーブル5のX方向の全長に対応している。製造装置1は、粉末塗布機構12に替えて、ローラー部、棒状部材、刷毛部などを備える構成でもよい。 The powder application mechanism 12 is movable in the Y direction above the work table 5 and the overhang plate 13. The powder coating mechanism 12 scrapes the metal powder 2 deposited on the overhang plate 13 onto the work table 5 and smooths the surface (upper surface) 2 a of the top layer of the laminate of the metal powder 2 on the work table 5. . The lower end portion of the powder application mechanism 12 abuts on the surface 2 a of the laminate of the metal powder 2 to make the height uniform. The powder coating mechanism 12 has, for example, a plate shape, and has a predetermined width in the X direction. The X direction is a direction intersecting the Z direction and the Y direction. The length in the X direction of the powder coating mechanism 12 corresponds, for example, to the total length in the X direction of the work table 5. The manufacturing apparatus 1 may be configured to include a roller unit, a rod-like member, a brush unit, and the like instead of the powder application mechanism 12.

 電子線照射装置8は、電子銃14、加速電源15及びコイル部16を備える。電子銃14は、カソード14a、アノード14b及びフィラメント14cを含む。これらのカソード14a、アノード14b及びフィラメント14cは、加速電源15に電気的に接続されている。加速電源15の負極は接地されている。加速電圧は、例えば-60kvである。加速電圧は、カソード14aとアノード14bとの間の電位差である。カソード14aは、フィラメント14cによって加熱される。加熱されたカソード14aから電子が放出される。電子は、カソード14a及びアノード14b間の電位差に応じて加速される。電子ビーム(電子線)Bは、電子銃14の照射口14dを通じて、真空チャンバ4内に照射される。 The electron beam irradiation device 8 includes an electron gun 14, an acceleration power supply 15, and a coil unit 16. The electron gun 14 includes a cathode 14a, an anode 14b and a filament 14c. The cathode 14 a, the anode 14 b and the filament 14 c are electrically connected to an accelerating power supply 15. The negative electrode of the acceleration power supply 15 is grounded. The acceleration voltage is, for example, -60 kv. The acceleration voltage is a potential difference between the cathode 14a and the anode 14b. The cathode 14a is heated by the filament 14c. Electrons are emitted from the heated cathode 14a. Electrons are accelerated according to the potential difference between the cathode 14a and the anode 14b. The electron beam (electron beam) B is irradiated into the vacuum chamber 4 through the irradiation port 14 d of the electron gun 14.

 コイル部16は、電子銃14の照射口14dの前方領域に磁場を形成する。前方領域とは、電子ビームBの照射方向における前方の領域である。コイル部16は、収差コイル17、フォーカスコイル18及び偏向コイル19を備える。収差コイル17、フォーカスコイル18及び偏向コイル19は、電子ビームBの照射方向において、例えば電子銃14側からこの順番で配置されている。収差コイル17は、電子銃14から出射される電子ビームBの周囲に設置され、電子ビームBを収束させる。フォーカスコイル18は、電子銃14から出射される電子ビームBの周囲に設置され、電子ビームBのフォーカス位置のずれを補正する。偏向コイル19は、電子銃14から出射される電子ビームBの周囲に設置され、電子ビームBの照射位置を調整する。偏向コイル19は、電磁的なビーム偏向を行うため、機械的なビーム偏向と比べて、電子ビームBの照射時における走査速度を高速にすることができる。電子銃14及びコイル部16は、真空チャンバ4の上部に配置されている。電子銃14から出射された電子ビームBは、コイル部16によって収束されて焦点位置が補正される。電子ビームBは、走査速度が制御され、金属粉末2の照射位置に到達する。 The coil portion 16 forms a magnetic field in the front region of the irradiation port 14 d of the electron gun 14. The front area is a front area in the irradiation direction of the electron beam B. The coil unit 16 includes an aberration coil 17, a focus coil 18, and a deflection coil 19. The aberration coil 17, the focus coil 18 and the deflection coil 19 are arranged in this order from the side of the electron gun 14 in the irradiation direction of the electron beam B, for example. The aberration coil 17 is disposed around the electron beam B emitted from the electron gun 14 and focuses the electron beam B. The focus coil 18 is disposed around the electron beam B emitted from the electron gun 14 and corrects the deviation of the focus position of the electron beam B. The deflection coil 19 is disposed around the electron beam B emitted from the electron gun 14 and adjusts the irradiation position of the electron beam B. The deflection coil 19 performs electromagnetic beam deflection, so that the scanning speed at the time of irradiation of the electron beam B can be increased as compared with mechanical beam deflection. The electron gun 14 and the coil section 16 are disposed at the top of the vacuum chamber 4. The electron beam B emitted from the electron gun 14 is converged by the coil unit 16 to correct the focal position. The scanning speed of the electron beam B is controlled to reach the irradiation position of the metal powder 2.

 図2に示される非破壊検査装置9は、三次元部品3の表層部3aを探傷するプローブ(非破壊検査部)9aを備える。プローブ9aは、粉末塗布機構12に取り付けられている。プローブ9aは、粉末塗布機構12と共にY方向に移動可能である。プローブ9aは、粉末塗布機構12とは別に移動可能な構成でもよい。プローブ9aの底面は、粉末塗布機構12の下端より上方に配置されている。プローブ9aの底面と金属粉末2の積層物の表面2aとの間には隙間が形成されている。プローブ9aは、金属粉末2及び三次元部品3に対して接触していない。プローブ9aは、プローブ9aの走査方向であるY方向と交差するX方向に延在している。プローブ9aは、図4に示されるように、X方向に並んで配置された複数の検査コイル20を含む。プローブ9aは、X方向に並ぶ複数個の検査コイル20の列を含む。この検査コイル20の複数の列は、Y方向に並んで配置されている。プローブ9aの検査コイル20は、例えば箱形を成す筐体内に収容されている。図示の例では、プローブ9aは粉末塗布機構12の移動方向において前側に配置されている。プローブ9aは粉末塗布機構12の移動方向において後側に配置されていてもよい。粉末塗布機構12によって金属粉末2を均した後に、プローブ9aが金属粉末2の上を通過しながら探傷してもよい。 The nondestructive inspection device 9 shown in FIG. 2 includes a probe (nondestructive inspection unit) 9a that flaws the surface layer portion 3a of the three-dimensional component 3. The probe 9 a is attached to the powder application mechanism 12. The probe 9 a is movable in the Y direction together with the powder coating mechanism 12. The probe 9 a may be movable separately from the powder application mechanism 12. The bottom surface of the probe 9 a is disposed above the lower end of the powder application mechanism 12. A gap is formed between the bottom of the probe 9 a and the surface 2 a of the laminate of the metal powder 2. The probe 9 a is not in contact with the metal powder 2 and the three-dimensional component 3. The probe 9a extends in the X direction intersecting the Y direction which is the scanning direction of the probe 9a. The probe 9a includes a plurality of inspection coils 20 arranged side by side in the X direction, as shown in FIG. The probe 9a includes a row of a plurality of inspection coils 20 aligned in the X direction. The plurality of rows of inspection coils 20 are arranged side by side in the Y direction. The inspection coil 20 of the probe 9a is housed, for example, in a box-shaped housing. In the illustrated example, the probe 9 a is disposed on the front side in the moving direction of the powder coating mechanism 12. The probe 9 a may be disposed on the rear side in the moving direction of the powder coating mechanism 12. After leveling the metal powder 2 by the powder coating mechanism 12, the probe 9 a may be flawed while passing over the metal powder 2.

 図4に示される検査コイル20は、励磁コイル21と、一対の検出コイル22と、を備える。励磁コイル21は、交流電流が供給されて磁界を発生させる。これにより、励磁コイル21は、三次元部品3の表層部3aに渦電流を発生させることができる。励磁コイル21は、例えばZ方向に延在する軸線周りに形成されている。一対の検出コイル22は、励磁コイル21の内側に配置されている。検出コイル22は、例えばZ方向に延在する軸線周りに形成されている。検出コイル22の内側にはフェライトコア(鉄心)が配置されている。フェライトコアは、例えば棒状を成しZ方向に延在している。フェライトコアは、円柱状でもよく、角柱状でもよい。一対の検出コイル22は、表層部3aの渦電流による磁界の変化を検出する。表層部3aは、三次元部品3の表面及び表面近傍の内部の部分を含んでもよい。表層部3aは、例えば表面から深さ1mmまでの領域を含んでもよい。表層部3aは、例えば深さ2mmまでの領域を含むものでもよく、その他の深さまでの領域を含むものでもよい。プローブ9aは、三次元部品3の表層部3aとして、金属粉末2の複数層分(例えば5層分)の深さまで、同時に探傷可能である。 The inspection coil 20 shown in FIG. 4 includes an excitation coil 21 and a pair of detection coils 22. The exciting coil 21 is supplied with an alternating current to generate a magnetic field. Thereby, the exciting coil 21 can generate an eddy current in the surface layer portion 3 a of the three-dimensional component 3. The exciting coil 21 is formed, for example, around an axis extending in the Z direction. The pair of detection coils 22 is disposed inside the excitation coil 21. The detection coil 22 is formed, for example, around an axis extending in the Z direction. A ferrite core (iron core) is disposed inside the detection coil 22. The ferrite core has, for example, a rod-like shape and extends in the Z direction. The ferrite core may be cylindrical or prismatic. The pair of detection coils 22 detect a change in the magnetic field due to the eddy current of the surface layer portion 3a. The surface layer portion 3a may include the surface of the three-dimensional component 3 and an internal portion near the surface. The surface layer portion 3a may include, for example, a region from the surface to a depth of 1 mm. The surface layer portion 3a may include, for example, a region up to a depth of 2 mm, or may include regions up to another depth. The probe 9a can be simultaneously subjected to flaw detection to a depth of a plurality of layers (for example, five layers) of the metal powder 2 as the surface layer portion 3a of the three-dimensional component 3.

 表層部3aに欠陥Cがある場合には、渦電流の流れに変化が生じこれにより磁界が変化する。検出コイル22により磁界の変化を検出することで、欠陥Cの有無を検出することができる。一対の検出コイル22のうち一方が磁界の変化を検出し、他方が磁界の変化を検出しない場合がある。このような場合には、一対の検出コイル22によって検出された信号の差分を算出することで、磁界の変化を精度良く検出することができる。このように複数の検出コイル22で検出された信号の差分を算出することで、プローブ9aが欠陥Cの上を通過したときに信号の差分が最も大きくなる。そのため、電気的ノイズを抑えることができ精度良く欠陥Cを検出することができる。検出コイル22によって検出される欠陥Cとしては、例えば溶け込み不良、割れ、融着、ポロシティ(空隙)などがある。 When there is a defect C in the surface layer portion 3a, the flow of the eddy current is changed, which changes the magnetic field. By detecting the change of the magnetic field by the detection coil 22, the presence or absence of the defect C can be detected. One of the pair of detection coils 22 may detect a change in the magnetic field, and the other may not detect the change in the magnetic field. In such a case, the change in the magnetic field can be accurately detected by calculating the difference between the signals detected by the pair of detection coils 22. By calculating the difference between the signals detected by the plurality of detection coils 22 in this manner, the difference between the signals becomes the largest when the probe 9a passes over the defect C. Therefore, the electrical noise can be suppressed and the defect C can be detected accurately. The defects C detected by the detection coil 22 include, for example, poor penetration, cracking, fusion, porosity, and the like.

 図1及び図3に示されるコントローラ31は、製造装置1の装置全体の制御を司る制御部である。コントローラ31は、CPU(Central Processing Unit)、ROM(Read Only Memory)、およびRAM(Random Access Memory)等のハードウェアと、ROMに記憶されたプログラム等のソフトウェアとから構成されたコンピュータである。コントローラ31は、入力信号回路、出力信号回路、電源回路などを含む。コントローラ31は、演算部32、加速電圧制御部(エネルギ制御部)33、コイル制御部(エネルギ制御部)34及び記憶部35を含む。コントローラ31は、加速電源15、収差コイル17、フォーカスコイル18、偏向コイル19、粉末塗布機構12、プローブ9a、昇降装置6、表示部41及び操作部42と電気的に接続されている。 The controller 31 shown in FIGS. 1 and 3 is a control unit that controls the entire apparatus of the manufacturing apparatus 1. The controller 31 is a computer configured from hardware such as a central processing unit (CPU), read only memory (ROM), and random access memory (RAM) and software such as a program stored in the ROM. The controller 31 includes an input signal circuit, an output signal circuit, a power supply circuit, and the like. The controller 31 includes an arithmetic unit 32, an acceleration voltage control unit (energy control unit) 33, a coil control unit (energy control unit) 34, and a storage unit 35. The controller 31 is electrically connected to the acceleration power supply 15, the aberration coil 17, the focus coil 18, the deflection coil 19, the powder coating mechanism 12, the probe 9 a, the elevating device 6, the display unit 41 and the operation unit 42.

 製造装置1は、電子ビームBのエネルギを制御するエネルギ制御部を備えている。コントローラ31は、エネルギ制御部として、加速電圧制御部33及び、コイル制御部34を含んでもよい。 The manufacturing apparatus 1 includes an energy control unit that controls the energy of the electron beam B. The controller 31 may include an acceleration voltage control unit 33 and a coil control unit 34 as an energy control unit.

 演算部32は、プローブ9aで検出された信号について演算を行う。演算部32は例えば一対の検出コイル22で検出された信号の差分を算出することができる。演算部32は、例えば、欠陥Cの有無、欠陥Cの位置(X方向の位置、Y方向の位置)、欠陥Cの深さ(Z方向の位置)を算出することができる。演算部32は、算出された検査結果(探傷結果)を表示部41に出力する。演算部32は、算出された検査結果を記憶部35に記憶する。 The operation unit 32 performs an operation on the signal detected by the probe 9a. The calculation unit 32 can calculate, for example, the difference between the signals detected by the pair of detection coils 22. The calculation unit 32 can calculate, for example, the presence or absence of the defect C, the position of the defect C (the position in the X direction, the position in the Y direction), and the depth of the defect C (the position in the Z direction). The calculation unit 32 outputs the calculated inspection result (testing result) to the display unit 41. The calculation unit 32 stores the calculated inspection result in the storage unit 35.

 加速電圧制御部33は、加速電源15によって印加される加速電圧を制御する。加速電圧制御部33は、検出された欠陥Cの位置及び深さに応じて、加速電圧を通常時より増加させる。通常時の加速電圧とは、欠陥Cを補修する必要がないときの加速電圧である。通常時の加速電圧は、例えば1層分の金属粉末2を溶融させることが可能な電子ビームBを照射するために必要な加速電圧である。加速電圧制御部33は、加速電圧を増加させて、電子ビームBによる電子の速度を上昇させる。加速電圧制御部33は、三次元部品3上に堆積する金属粉末2を溶融させる際に、電子ビームBが欠陥Cに照射されるタイミングに合わせて、加速電圧を増加させる制御を行う。加速電圧制御部33は、加速電圧を増加させた後に、電子ビームBが欠陥Cから外れた位置に照射されるときに、加速電圧を低下させて通常時の値に戻す制御を行う。 The acceleration voltage control unit 33 controls the acceleration voltage applied by the acceleration power supply 15. The acceleration voltage control unit 33 increases the acceleration voltage more than usual depending on the position and depth of the detected defect C. The normal acceleration voltage is an acceleration voltage when there is no need to repair the defect C. The acceleration voltage at the normal time is, for example, an acceleration voltage required to irradiate the electron beam B capable of melting one layer of metal powder 2. The acceleration voltage control unit 33 increases the acceleration voltage to increase the velocity of electrons by the electron beam B. When melting the metal powder 2 deposited on the three-dimensional component 3, the acceleration voltage control unit 33 performs control to increase the acceleration voltage in accordance with the timing when the electron beam B is irradiated to the defect C. When the electron beam B is irradiated to a position away from the defect C after increasing the acceleration voltage, the acceleration voltage control unit 33 performs control to lower the acceleration voltage and return it to the normal value.

 コイル制御部34は、収差コイル17を制御して、電子ビームBを収束させる。コイル制御部34は、フォーカスコイル18を制御して、電子ビームBのフォーカス位置を制御する。コイル制御部34は、偏向コイル19を制御して、電子ビームBの照射位置を制御する。例えば、通常時と比較して加速電圧を増加させた場合には、電子ビームBの挙動が変わるので、コイル制御部34は、収差コイル17における制御量、フォーカスコイル18における制御量、偏向コイル19における制御量を補正することができる。例えば、これらの収差コイル17における制御量、フォーカスコイル18における制御量、及び偏向コイル19における制御量に関するデータは、記憶部35に記憶されている。 The coil control unit 34 controls the aberration coil 17 to converge the electron beam B. The coil control unit 34 controls the focus coil 18 to control the focus position of the electron beam B. The coil control unit 34 controls the deflection coil 19 to control the irradiation position of the electron beam B. For example, since the behavior of the electron beam B changes when the acceleration voltage is increased as compared with that in the normal state, the coil control unit 34 controls the amount of control in the aberration coil 17, the amount of control in the focus coil 18, the deflection coil 19 Can be corrected. For example, data on the control amount of the aberration coil 17, the control amount of the focus coil 18, and the control amount of the deflection coil 19 are stored in the storage unit 35.

 表示部41は、例えば、液晶表示装置であり、コントローラ31から出力された検査結果等を表示することができる。表示部41は、例えば、検出された欠陥Cの位置、深さ等に関する情報を表示する。表示部41は、電子銃14から照射される電子ビームBに関する情報を表示することができる。表示部41は、加速電圧、収差コイル17の制御量、フォーカスコイル18の制御量、及び偏向コイル19の制御量に関するデータを表示することができる。操作部42は、使用者が操作可能な入力手段である。使用者は、表示部41に表示された情報を確認し、各種設定(制御量)を変更することができる。 The display unit 41 is, for example, a liquid crystal display device, and can display an inspection result and the like output from the controller 31. The display unit 41 displays, for example, information on the position, depth, and the like of the detected defect C. The display unit 41 can display information on the electron beam B emitted from the electron gun 14. The display unit 41 can display data on the acceleration voltage, the control amount of the aberration coil 17, the control amount of the focus coil 18, and the control amount of the deflection coil 19. The operation unit 42 is an input unit that can be operated by the user. The user can confirm the information displayed on the display unit 41 and change various settings (control amounts).

 次に、三次元部品の製造方法(三次元積層造形物製造方法)について説明する。図5は、三次元部品の製造方法の手順を示すフローチャートである。三次元部品の製造方法は、例えば製造装置1を用いて実行される。 Next, a method of manufacturing a three-dimensional part (a method of manufacturing a three-dimensional laminated object) will be described. FIG. 5 is a flowchart showing the procedure of a method of manufacturing a three-dimensional part. The method of manufacturing a three-dimensional part is performed using, for example, the manufacturing apparatus 1.

 まず、製造装置1では、原料タンク11から金属粉末2を排出し、第1層の金属粉末2を作業テーブル5上に供給し、粉末塗布機構12をY方向に移動させて、金属粉末2の積層物の表面2aを均す(ステップS1)。次に、作業テーブル5上の金属粉末2に電子ビームBを照射する照射工程を行う(溶融工程;ステップS2)。この照射工程では、加速電圧制御部33は、加速電源15を制御して、加速電圧を制御する。これにより、電子が加速されて電子銃14から電子ビームBが照射される。照射工程では、コイル制御部34は、収差コイル17を制御して電子ビームBを収束させ、フォーカスコイル18を制御して電子ビームBのフォーカス位置を制御し、偏向コイル19を制御して電子ビームBの照射位置を制御し、電子ビームBの走査速度を制御する。 First, in the manufacturing apparatus 1, the metal powder 2 is discharged from the raw material tank 11, the metal powder 2 of the first layer is supplied onto the work table 5, and the powder coating mechanism 12 is moved in the Y direction. The surface 2a of the laminate is leveled (step S1). Next, an irradiation step of irradiating the metal powder 2 on the work table 5 with the electron beam B is performed (melting step: step S2). In this irradiation step, the acceleration voltage control unit 33 controls the acceleration power supply 15 to control the acceleration voltage. As a result, the electrons are accelerated and the electron beam B is emitted from the electron gun 14. In the irradiation step, the coil control unit 34 controls the aberration coil 17 to focus the electron beam B, controls the focus coil 18 to control the focus position of the electron beam B, and controls the deflection coil 19 to control the electron beam. The irradiation position of B is controlled, and the scanning speed of the electron beam B is controlled.

 次に、コントローラ31は、昇降装置6に指令信号を送信して、作業テーブル5を降下させる(ステップS3)。これにより、第1層の上に第2層の金属粉末2を積層するためのスペースが確保される。 Next, the controller 31 sends a command signal to the lifting device 6 to lower the work table 5 (step S3). Thereby, the space for laminating the metal powder 2 of the second layer on the first layer is secured.

 溶融した第1層(第n層)の金属粉末2が硬化した後に、製造装置1では、第2層(第n+1層)の金属粉末2を作業テーブル5上(第n層の金属粉末2の上)に供給し(積層工程)、粉末塗布機構12をY方向に移動させて、第2層の金属粉末2の表面2aを均す(ステップS4)。このとき、粉末塗布機構12を移動させる際に探傷工程(非破壊検査工程;ステップS5)が実行される。例えば第2層(第n+1層)の金属粉末2の表面2aを均すと共に、第1層(第n層)の表層部3aに対する探傷工程が実行される。 After the metal powder 2 of the first layer (the nth layer) which has melted is cured, in the manufacturing apparatus 1, the metal powder 2 of the second layer (the n + 1th layer) is placed on the work table 5 (the metal powder 2 of the nth layer) (Layering process), the powder coating mechanism 12 is moved in the Y direction, and the surface 2a of the metal powder 2 of the second layer is leveled (step S4). At this time, when moving the powder application mechanism 12, a flaw detection process (nondestructive inspection process; step S5) is performed. For example, the surface 2a of the metal powder 2 of the second layer (the (n + 1) th layer) is leveled, and a flaw detection process is performed on the surface layer portion 3a of the first layer (the nth layer).

 探傷工程では、励磁工程及び検出工程が行われる。励磁工程では、励磁コイル21に電流を供給して磁界を発生させて、表層部3aに渦電流を生じさせる。検出工程では、表層部3aにおける磁界の変化を検出する。例えば表層部3aに欠陥C、形状不連続部などがある場合には、渦電流が迂回して変化し磁界が変化する。検出工程では、演算部32は一対の検出コイル22で検出された信号の差分を算出する。演算部32は、この算出した結果に基づいて検査結果を示す画像情報を生成する。検査結果を示す画像情報は、表示部41に出力されて表示される。表示部41は、検査結果を示す画像情報として、欠陥Cの位置、大きさ、向きなどを表示してもよい。 In the flaw detection process, an excitation process and a detection process are performed. In the exciting step, current is supplied to the exciting coil 21 to generate a magnetic field, thereby generating an eddy current in the surface layer portion 3a. In the detection step, the change of the magnetic field in the surface layer 3a is detected. For example, if there is a defect C, a shape discontinuity or the like in the surface layer portion 3a, the eddy current detours to change and the magnetic field changes. In the detection step, the calculation unit 32 calculates the difference between the signals detected by the pair of detection coils 22. The operation unit 32 generates image information indicating the inspection result based on the calculated result. The image information indicating the inspection result is output to the display unit 41 and displayed. The display unit 41 may display the position, the size, the direction, and the like of the defect C as image information indicating the inspection result.

 次に、演算部32は、検査結果に基づいて欠陥Cの有無を判定する(ステップS6)。ここでは、演算部32は、一対の検出コイル22による信号の差分に基づいて、欠陥Cの有無を判定してもよく、使用者が表示部41に表示された画像情報を見て欠陥Cの有無を判定してもよい。欠陥Cが検出されなかった場合には、ステップS8に進み、欠陥Cが検出された場合には、ステップS7に進む。 Next, operation unit 32 determines the presence or absence of defect C based on the inspection result (step S6). Here, the calculation unit 32 may determine the presence or absence of the defect C based on the difference between the signals from the pair of detection coils 22. The user looks at the image information displayed on the display unit 41 and the defect C is detected. The presence or absence may be determined. If the defect C is not detected, the process proceeds to step S8. If the defect C is detected, the process proceeds to step S7.

 ステップS7では、補修準備工程を行う。補修準備工程では、コントローラ31は、欠陥Cを補修するための各種設定を行う。補修準備工程では、コントローラ31は、例えば、欠陥Cを含む補修領域を設定する。補修準備工程では、コントローラ31は、欠陥Cを含む補修領域に電子ビームBを照射する際の加速電源の制御量を設定する。コントローラ31は、例えば、加速電圧を増加させるように加速電源15の制御量を設定する。補修準備工程では、コントローラ31は、加速電圧を増加させた場合のコイル部16の制御量を設定する。コントローラ31は、例えば、電子ビームBにおける電子の速度の増加量に応じて、収差コイル17の制御量、フォーカスコイル18の制御量、偏向コイル19の制御量を設定することができる。補修準備工程では、欠陥Cの位置、大きさ、形状、及び電子ビームBの過去の制御量等に基づいて、上記の制御量が設定される。これらの制御量は、使用者が設定してもよく、演算部32が演算することで設定してもよい。設定された制御量は、記憶部35に記憶される。なお、欠陥Cを含む補修領域は、欠陥Cのみでもよく、欠陥Cの周囲の領域を含むものでもよく、欠陥Cの一部のみを含むものでもよい。 In step S7, a repair preparation process is performed. In the repair preparation process, the controller 31 performs various settings for repairing the defect C. In the repair preparation process, the controller 31 sets, for example, a repair area including the defect C. In the repair preparation step, the controller 31 sets the control amount of the acceleration power supply when the electron beam B is irradiated to the repair area including the defect C. The controller 31 sets, for example, the control amount of the acceleration power supply 15 so as to increase the acceleration voltage. In the repair preparation process, the controller 31 sets the control amount of the coil unit 16 when the acceleration voltage is increased. The controller 31 can set, for example, the control amount of the aberration coil 17, the control amount of the focus coil 18, and the control amount of the deflection coil 19 in accordance with the increase amount of the velocity of electrons in the electron beam B. In the repair preparation step, the above control amount is set based on the position, size, and shape of the defect C, the control amount of the electron beam B in the past, and the like. These control amounts may be set by the user or may be set by the calculation unit 32 performing calculations. The set control amount is stored in the storage unit 35. The repair area including the defect C may be the defect C alone, may include the area around the defect C, or may include only a part of the defect C.

 ステップS7の補修準備工程を実施した後、ステップS2に戻る。このステップS2照射工程では、電子線照射装置8は、第1層の上に積層された第2層の金属粉末2に対して、電子ビームBを照射する。このステップS2では、欠陥Cを含む補修領域に、電子ビームBが照射される際に、補修準備工程で設定された制御量に基づく制御が実行され、加速電圧が増加されると共にコイル部16について制御が行われる。これにより、電子ビームBによるエネルギが増加されて、電子ビームBが欠陥Cまで到達し、欠陥Cが溶融される。これにより、欠陥Cを補修する補修工程が実施される。なお、照射工程において、第2層の金属粉末2に対して補修領域以外の領域について電子ビームBを照射する際には、前回の第1層の金属粉末2に対して電子ビームBを照射したときと同様に、電子ビームBを照射する。すなわち、電子ビームBの照射位置が移動して欠陥Cを含む補修位置から外れたら、加速電圧制御部33は、加速電圧を戻す。 After the repair preparation process of step S7 is performed, the process returns to step S2. In this step S2 irradiation process, the electron beam irradiation apparatus 8 irradiates the electron beam B to the metal powder 2 of the second layer stacked on the first layer. In step S2, when the electron beam B is irradiated to the repair area including the defect C, control based on the control amount set in the repair preparation process is executed, and the acceleration voltage is increased. Control is performed. As a result, the energy of the electron beam B is increased, the electron beam B reaches the defect C, and the defect C is melted. Thereby, the repair process which repairs the defect C is implemented. In the irradiation step, when the electron beam B was irradiated to the metal powder 2 of the second layer in the region other than the repair region, the electron powder B was irradiated to the metal powder 2 of the previous first layer. The electron beam B is irradiated as well as time. That is, when the irradiation position of the electron beam B moves and deviates from the repair position including the defect C, the acceleration voltage control unit 33 returns the acceleration voltage.

 このステップS2における照射工程を実施したら、ステップS3~S6を繰り返す。ステップS6で、欠陥なしと判定されたら、ステップS8に進む。ステップS8では、コントローラ31は、三次元部品3の全層について造形が終了して、部品が完成しているか否かを判定する。例えば、設計通りの層分について造形が終了しているか否かを判定する。三次元部品の造形が終了していない場合には、ステップS2に戻る。このステップS2では、電子線照射装置8は、前回のステップS4において形成された金属粉末2に対して、電子ビームBを照射して部分的にエネルギを付与して、溶融を行う。以下、製造装置1は、同様の工程を繰り返し、三次元部品3の全層について造形を行い、三次元部品3の製造を完了する。 After the irradiation process in step S2 is performed, steps S3 to S6 are repeated. If it is determined in step S6 that there is no defect, the process proceeds to step S8. In step S8, the controller 31 determines whether or not the formation is completed for all the layers of the three-dimensional part 3 and the part is completed. For example, it is determined whether or not modeling has been completed for the designed layer. If shaping of the three-dimensional part is not completed, the process returns to step S2. In this step S2, the electron beam irradiation apparatus 8 irradiates the electron beam B to the metal powder 2 formed in the previous step S4 to partially apply energy to perform melting. Hereinafter, the manufacturing apparatus 1 repeats the same process, performs modeling on all the layers of the three-dimensional part 3, and completes the manufacture of the three-dimensional part 3.

 本実施形態の製造装置1では、非破壊検査装置9を備えているので、この非破壊検査装置9によって、三次元部品3の表層部3aの欠陥Cを検出することができる。製造装置1は、加速電圧制御部33を備えているので、非破壊検査装置9によって検出された欠陥Cを含む補修領域に電子ビームBを照射する際に、電子ビームBによるエネルギを増加させることができる。これにより、製造装置1は、第2層の金属粉末2に電子ビームBを照射しながら、その下層の第1層に存在する欠陥Cに対して電子ビームBのエネルギを付与することができる。その結果、欠陥Cを補修することができる。 In the manufacturing apparatus 1 of the present embodiment, since the nondestructive inspection device 9 is provided, the defect C of the surface layer portion 3 a of the three-dimensional component 3 can be detected by the nondestructive inspection device 9. Since the manufacturing apparatus 1 includes the accelerating voltage control unit 33, when irradiating the electron beam B to the repair area including the defect C detected by the nondestructive inspection apparatus 9, the energy by the electron beam B is increased. Can. Thereby, the manufacturing apparatus 1 can apply the energy of the electron beam B to the defect C existing in the first layer under the second layer while irradiating the metal powder 2 of the second layer with the electron beam B. As a result, the defect C can be repaired.

 本開示は、前述した実施形態に限定されず、本発明の要旨を逸脱しない範囲で下記のような種々の変形が可能である。上記の実施形態では、加速電圧を増加させる制御を行うことで、電子ビームBによるエネルギを増加させているが、ビームによるエネルギを増加させる制御は、これに限定されない。例えば、コントローラ31は、電子ビームBの走査速度を低下させることで、電子ビームBの照射位置の移動速度を低下させて、導電体粉末に付与されるエネルギを増加させてもよい。すなわち、コイル制御部34は、補修領域に対して電子ビームBを照射する際に、電子ビームBの走査速度を通常時よりも低下させる制御をしてもよい。コイル制御部34は、加速電圧を増加させる制御と走査速度を低下させる制御とを同時に行ってもよい。すなわち、加速電圧を増加させながら走査速度を低下させてもよい。上記の実施形態において、製造装置1は、欠陥Cが検出された場合に、欠陥Cを含む補修領域に対して、電子ビームBを再照射することで、欠陥Cを補修することもできる。 The present disclosure is not limited to the embodiments described above, and various modifications can be made as described below without departing from the scope of the present invention. In the above embodiment, the energy of the electron beam B is increased by performing control of increasing the acceleration voltage, but the control of increasing energy of the beam is not limited to this. For example, the controller 31 may reduce the moving speed of the irradiation position of the electron beam B by decreasing the scanning speed of the electron beam B, and may increase the energy applied to the conductor powder. That is, when the coil control unit 34 irradiates the repair area with the electron beam B, the coil control unit 34 may perform control to make the scanning speed of the electron beam B lower than usual. The coil control unit 34 may simultaneously perform control to increase the acceleration voltage and control to decrease the scanning speed. That is, the scanning speed may be decreased while increasing the acceleration voltage. In the above embodiment, when the defect C is detected, the manufacturing apparatus 1 can also repair the defect C by irradiating the repair area including the defect C with the electron beam B again.

 上記の実施形態では、電子ビームBを照射して、導電体粉末を溶融しているが、導電体粉末に照射されるビームは、電子ビームに限定されず、その他のエネルギービームでもよい。三次元積層造形物製造装置は、例えば、レーザ発信器を備え、レーザビームを照射して、導電体粉末を溶融するものでもよい。このように、レーザビームを照射する場合には、コイル制御部は、レーザビームの出力を上げる制御を行ってもよく、レーザビームの走査速度を低下させる制御を行ってもよい。これにより、補修領域にビームを照射する際に、ビームによるエネルギを増加させて、欠陥を補修することができる。 In the above embodiment, the electron beam B is irradiated to melt the conductor powder, but the beam irradiated to the conductor powder is not limited to the electron beam, and may be another energy beam. The three-dimensional laminated three-dimensional object manufacturing apparatus may include, for example, a laser transmitter and may be irradiated with a laser beam to melt the conductor powder. As described above, in the case of irradiating a laser beam, the coil control unit may perform control to increase the output of the laser beam, or may control to decrease the scanning speed of the laser beam. Thereby, when the beam is irradiated to the repair area, the energy by the beam can be increased to repair the defect.

 上記の実施形態では、三次元部品3の表層部3aを探傷する非破壊検査部として、三次元部品3に渦電流を発生させて、探傷を行う場合(渦流探傷試験)について説明しているが、非破壊検査部は、渦流探傷試験を行うものに限定されない。非破壊検査部は、例えば、放射線透過試験など、その他の非破壊検査を行うものでもよい。非破壊検査部は、カメラ(撮像部)を含んでもよく、撮像された画像に基づいて欠陥を検出して補修領域を設定してもよい。 In the above embodiment, as the nondestructive inspection unit for flaw detection of the surface layer portion 3a of the three-dimensional component 3, a case where eddy current is generated in the three-dimensional component 3 to perform flaw detection (eddy current flaw detection test) is described. The nondestructive inspection part is not limited to the one that conducts the eddy current flaw detection test. The nondestructive inspection unit may perform other nondestructive inspection such as, for example, a radiation transmission test. The nondestructive inspection unit may include a camera (imaging unit), and may set a repair area by detecting a defect based on the imaged image.

 上記の実施形態では、粉末塗布機構をY方向に移動させて、粉末の積層物(粉末層)の表面2aを均しているが、粉末塗布機構をその他のX-Y面内の方向に移動させて、粉末層の表面2aを均してもよい。製造装置は、円周方向に粉末塗布機構を移動させてもよい。製造装置は、平面視において、粉末塗布機構に対して作業テーブルを含む造形タンクを相対的に移動させて表面2aを均してもよい。造形タンク(ガイド部)は、例えばX方向に往復運動する構成でもよく、その他の方向に移動可能な構成でもよい。造形タンクは、Z方向に延在する仮想線を中心として回転移動可能な構成でもよい。例えば、製造装置は、平面視において円形の保持部(作業テーブル)を備え、Z方向に延在する仮想線(保持部の中央部)を中心として保持部及び粉末層を回転移動させながら、粉末の塗布及びビーム照射を順次行う構成でもよい。 In the above embodiment, the powder application mechanism is moved in the Y direction to level the surface 2a of the powder laminate (powder layer), but the powder application mechanism is moved in the other directions in the XY plane. The surface 2a of the powder layer may be leveled. The manufacturing apparatus may move the powder application mechanism in the circumferential direction. The manufacturing apparatus may move the modeling tank including the work table relative to the powder coating mechanism in plan view to level the surface 2a. The shaping tank (guide portion) may be configured to reciprocate in, for example, the X direction, or may be configured to be movable in other directions. The modeling tank may be configured to be rotationally movable about an imaginary line extending in the Z direction. For example, the manufacturing apparatus includes a circular holding unit (working table) in plan view, and rotates the holding unit and the powder layer around an imaginary line (central portion of the holding unit) extending in the Z direction. Alternatively, the application and the beam irradiation may be sequentially performed.

1 製造装置(三次元積層造形物製造装置)
2 金属粉末(導電体粉末)
3 三次元部品(三次元積層造形物)
3a 表層部
5 作業テーブル(保持部)
8 電子線照射装置(ビーム照射部)
9 非破壊検査装置(非破壊検査部)
9a プローブ
14 電子銃
15 加速電源
16 コイル部
33 加速電圧制御部(エネルギ制御部)
34 コイル制御部(エネルギ制御部)
B 電子ビーム(電子線)
C 欠陥
1 Manufacturing device (three-dimensional laminated object manufacturing device)
2 Metal powder (conductor powder)
3 Three-dimensional parts (three-dimensional laminated object)
3a surface part 5 work table (holding part)
8 Electron Beam Irradiator (Beam Irradiator)
9 Nondestructive inspection device (nondestructive inspection part)
9a Probe 14 Electron gun 15 Acceleration power supply 16 Coil unit 33 Acceleration voltage control unit (energy control unit)
34 Coil control unit (energy control unit)
B Electron beam (electron beam)
C defect

Claims (5)

 層状に配置された導電体粉末に対してビームを照射するビーム照射部と、
 前記導電体粉末が硬化して形成された三次元積層造形物の表層部を探傷する非破壊検査部と、
 前記ビームのエネルギを制御するエネルギ制御部と、を備え、
 前記エネルギ制御部は、前記非破壊検査部による探傷結果に応じて設定された補修領域にビームを照射する際に、前記ビームによるエネルギを増加させる三次元積層造形物製造装置。
A beam irradiation unit which irradiates a beam to the conductor powder arranged in a layer;
A nondestructive inspection unit for detecting a surface layer portion of a three-dimensional laminated object formed by curing the conductive powder;
An energy control unit for controlling the energy of the beam;
The said energy control part is a three-dimensional laminated molded article manufacturing apparatus which increases the energy by the said beam, when irradiating a beam to the repair area | region set according to the flaw detection result by the said nondestructive inspection part.
 前記ビーム照射部は、
  前記ビームである電子線を照射する電子銃と、
  前記電子銃に加速電圧を供給する加速電源と、
  前記電子銃の照射口の前方領域に磁場を形成するコイル部と、を備え、
 前記エネルギ制御部は、
  前記加速電圧を制御する加速電圧制御部と、
  前記コイル部を制御するコイル制御部と、を含む請求項1に記載の三次元積層造形物製造装置。
The beam irradiation unit
An electron gun for irradiating an electron beam which is the beam;
An acceleration power supply for supplying an acceleration voltage to the electron gun;
A coil unit for forming a magnetic field in a region in front of the irradiation port of the electron gun;
The energy control unit
An acceleration voltage control unit that controls the acceleration voltage;
The coil control part which controls the said coil part, The three-dimensional laminated molded article manufacturing apparatus of Claim 1 characterized by the above-mentioned.
 前記加速電圧制御部は、前記補修領域に対して前記電子線を照射する際に、前記加速電圧を増加させる請求項2に記載の三次元積層造形物製造装置。 The three-dimensional stacked object manufacturing apparatus according to claim 2, wherein the acceleration voltage control unit increases the acceleration voltage when irradiating the electron beam to the repair area.  前記コイル制御部は、前記補修領域に対して前記電子線を照射する際に、前記電子線の走査速度を低下させる請求項2または3に記載の三次元積層造形物製造装置。 The three-dimensional laminate model manufacturing apparatus according to claim 2 or 3, wherein the coil control unit reduces the scanning speed of the electron beam when irradiating the electron beam to the repair area.  層状に配置された導電体粉末に対してビームを照射して、前記導電体粉末を溶融し硬化させ、三次元積層造形物を製造する三次元積層造形物製造方法であって、
 保持部に保持された第1層の前記導電体粉末に前記ビームを照射して、前記第1層の前記導電体粉末を溶融させる溶融工程と、
 前記第1層の導電体粉末が溶融されて硬化した後の前記三次元積層造形物の表層部を探傷する非破壊検査工程と、
 前記三次元積層造形物の上に第2層の前記導電体粉末を積層する積層工程と、
 前記非破壊検査工程による探傷結果に応じて設定された領域を補修する補修工程と、を含み、
 前記補修工程では、前記第2層の前記導電体粉末に前記ビームを照射する際に、前記ビームによるエネルギを増加させて、前記領域を補修する三次元積層造形物製造方法。
It is a three-dimensional laminated three-dimensional object manufacturing method which irradiates a beam to the conductor powder arranged in a layer, melts and hardens the said conductor powder, and manufactures a three-dimensional laminated three-dimensional object,
A step of irradiating the conductive powder of the first layer held by the holding portion with the beam to melt the conductive powder of the first layer;
A nondestructive inspection step of flawless surface layer portions of the three-dimensional laminate formed article after the conductor powder of the first layer is melted and cured;
Laminating the conductor powder of the second layer on the three-dimensional laminate;
And a repair process for repairing an area set according to the flaw detection result by the nondestructive inspection process.
In the said repair process, when irradiating the said beam to the said conductor powder of the said 2nd layer, the energy by the said beam is made to increase and the three-dimensional laminated molded article manufacturing method which repairs the said area | region.
PCT/JP2018/037237 2017-10-06 2018-10-04 Three-dimensional laminate shaped article manufacturing device and three-dimensional laminate shaped article manufacturing method Ceased WO2019070034A1 (en)

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