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WO2019054639A1 - Appareil, système et procédé de mesure de lumière - Google Patents

Appareil, système et procédé de mesure de lumière Download PDF

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Publication number
WO2019054639A1
WO2019054639A1 PCT/KR2018/009066 KR2018009066W WO2019054639A1 WO 2019054639 A1 WO2019054639 A1 WO 2019054639A1 KR 2018009066 W KR2018009066 W KR 2018009066W WO 2019054639 A1 WO2019054639 A1 WO 2019054639A1
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WO
WIPO (PCT)
Prior art keywords
light
measurement
measuring
optical
optical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2018/009066
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English (en)
Korean (ko)
Inventor
김대형
정치운
나선흠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Otsuka Electronics Korea Co ltd
Original Assignee
Otsuka Electronics Korea Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Otsuka Electronics Korea Co ltd filed Critical Otsuka Electronics Korea Co ltd
Priority to CN201880056684.3A priority Critical patent/CN111194399A/zh
Priority to JP2020532533A priority patent/JP6982186B2/ja
Publication of WO2019054639A1 publication Critical patent/WO2019054639A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/462—Computing operations in or between colour spaces; Colour management systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J2003/466—Coded colour; Recognition of predetermined colour; Determining proximity to predetermined colour

Definitions

  • the present invention relates to an apparatus, system and method for measuring light received from a specimen.
  • photometers and colorimeters for measuring the luminance and chromaticity of light emitted from a specimen.
  • photometers and colorimeters used to measure luminance, chromaticity and other luminescence characteristics of light emitted from a flat panel display panel such as LCD, PDP, etc. to check the performance of a panel of a display device.
  • a spectral photometer or a spectral colorimeter is used as a device capable of measuring the luminance and chromaticity of an accurate light for high performance inspection.
  • a spectrophotometer / colorimeter can divide the spectrum of light into a number of channels (e.g., 30 to 200 channels) having a predetermined band (e.g., 1 to 10 nm) and measure the energy in each band.
  • the luminance and / or chromaticity of the color space corresponding to the corresponding color matching function can be calculated by integrating the energy per band by using a predetermined color matching function.
  • a CIE tristimulus (XYZ) expressing the CIE tristimulus (XYZ) can be accurately obtained by a spectrophotometer / colorimeter.
  • a spectrophotometer / colorimeter has an advantage in that it can acquire accurate luminance and / or chromaticity in the above-described manner, but has a drawback in that it takes a long time for measurement, high complexity of the apparatus, and high cost. There is also a limit to the fact that there is usually no or small spatial resolution in the measurement.
  • a hybrid system of a spectrophotometer / colorimeter and a video camera has been devised to solve the above problems.
  • a colorimeter system such as Korean Patent Laid-Open Publication No. 10-2016-0098083.
  • the conventional meter system as shown in FIG. 1, coaxial light emitted from a specimen is branched to a beam splitter 30, the branched lights are directed to an RGB camera 20 and a spectral colorimeter 10, And transforms and corrects the RGB image obtained by the RGB camera 20 to generate a tristimulus image.
  • Such conventional techniques include an RGB camera 20 capable of acquiring a sample RGB image at a higher speed in a wider area and a spectral colorimeter 20 capable of acquiring a triple excitation value of the sample more accurately without a spatial resolution in a narrower area It is possible to acquire the map information of the tristimulus value with improved accuracy by integrating the map information.
  • optical measuring apparatus Accordingly, the optical measuring apparatus, system and method of the present invention are intended to solve the above-described problems of the related art.
  • the present invention provides a method for measuring the amount of light emitted from a specimen by using a first measuring instrument and a second measuring instrument without passing through an optical branching means for branching the light into a plurality of directions and directing them in different directions, So that it can be entered.
  • the present invention provides a method of measuring a first measuring device comprising a first optical path section extending from a point within a common measurement area of a first light path leading to a first measuring instrument, and a second light path extending from the one point of the second light path leading to a second measuring instrument
  • the first measuring device and the second measuring device are arranged such that the second optical path sections do not overlap with each other but form an angle within a range of greater than 0 DEG and smaller than 180 DEG.
  • a light measuring apparatus includes first measuring means for receiving first light from a first measurement region of a sample and generating at least one first measurement value from the received first light, Second measurement means for receiving a second light from the second light and generating a second set of measurements having a spatial resolution from the received second light, and a second measurement means for, based on the first measurement, And a correction means for performing at least one of conversion and correction for the value.
  • first measurement means and the second measurement means have a common measurement region in which the first measurement region and the second measurement region are at least partially overlapped with each other,
  • a first optical path section extending from one point in the common measurement region and a second optical path section extending from the one point of the optical path of the second light leading to the second measurement means do not overlap with each other and are larger than 0 DEG But may be arranged to form an angle within a range of less than 180 degrees.
  • the second measuring means may generate the second measured value for all regions within the second measuring region.
  • the optical measuring apparatus may further include a position measuring unit for measuring a position of the first measuring unit, an optical axis and an optical system setting, a position of the second measuring unit, an optical axis, And control means for changing at least one of the optical system setting.
  • the correcting means may also perform at least one of conversion and correction for the second measured value based on an angle between the first optical path section and the second optical path section .
  • the light incident on the optical measuring device is incident on the first measuring means and the second measuring means without passing through the optical branching means for diverging the light into a plurality of directions and directing them in different directions can do.
  • the optical measuring device comprises a plurality of the second measuring means, the second measuring regions of the plurality of second measuring means have at least partly overlapping regions, and the common measuring region And is located within the overlapping area.
  • the optical measuring apparatus includes a plurality of the first measuring means, and the first measuring regions of the plurality of first measuring means have at least two common measuring regions in the overlapping region .
  • the first measuring means may be any one of a spectral photometer, a spectral colorimeter, a spectral radiometer, a photoelectric photometer, a photoelectric colorimeter, and a photo-electric radiation system.
  • the second measuring means may be any one of a camera having a spatial resolution, an image photometer, and an image colorimeter.
  • a method for measuring light received from a specimen in a light measuring apparatus includes the steps of receiving a first light from a first measurement region of the specimen with a first meter, Receiving a second light from a second measurement area of the specimen with a second meter and generating a second set of measurement values having a predetermined spatial resolution from the received second light, And a correction step of performing at least one of conversion and correction for the second measurement value based on the first measurement value.
  • first measuring device and the second measuring device have a common measuring area in which the first measuring area and the second measuring area are at least partially overlapped with each other and the common measuring area of the optical path of the first light reaching the first measuring device And a second optical path section extending from the one point out of the optical paths of the second light to the second measuring instrument are arranged in a range of more than 0 DEG and less than 180 DEG And an angle is formed between the first and second electrodes.
  • a light measuring system comprises a first measuring device for receiving first light from a first measurement area of a sample and generating at least one first measurement value from the received first light, A second measurer for receiving a second light from an area and generating a second set of measurements having a predetermined spatial resolution from the received second light, And a correction circuit for performing at least one of conversion and correction for the correction value.
  • a light measuring system comprises a first measuring device for receiving first light from a first measurement area of a sample and generating at least one first measurement value from the received first light, And a second measurer for receiving a second light from the first light and generating a second set of measurements having a spatial resolution from the received second light, and at least one processor, And to perform at least one of conversion and correction for the second measurement value based on the measurement value.
  • first measuring device and the second measuring device have a common measuring area in which the first measuring area and the second measuring area are at least partially overlapped with each other and the common measuring area of the optical path of the first light reaching the first measuring device And a second optical path section extending from the one point out of the optical paths of the second light to the second measuring instrument are arranged in a range of more than 0 DEG and less than 180 DEG As shown in Fig.
  • the optical measuring apparatus since the optical branching means such as the beam splitter is not used, the corrected map data of the measurement value defined in the predetermined color space, such as the three-pole value, Thus, there is an advantageous effect that the productivity of the sample inspection process can be improved.
  • the design of the optical measuring device can be simplified and the device can be miniaturized.
  • the difference in light characteristics due to the difference in viewing angles is corrected, it is possible to accurately correct even if coaxial light is not measured using the optical branching means.
  • by using a plurality of cameras it is possible to measure a specimen having a larger area, or to perform measurement with a larger resolution, thereby improving the spatial resolution of measurement.
  • the measured value can be corrected / converted on a uniform basis throughout the specimen. Further, according to the present invention, since the measurement value having the spatial resolution to be corrected is corrected / converted using the reference measurement value of each region measured locally, the correction / conversion accuracy is further improved It is effective. Also, according to the present invention, there is an advantageous effect of simultaneously correcting and / or converting measured values of various viewing angles.
  • FIG. 1 is a view showing a conventional optical measurement system.
  • FIG. 2 is a block diagram of a first measuring device and a second measuring device according to the present invention.
  • FIG. 3 is a diagram showing a first measurement area, a second measurement area and a common measurement area for a specimen.
  • FIG. 4 is a diagram illustrating an optical measuring apparatus and system according to an embodiment of the present invention.
  • 5 is a reference diagram for explaining correction according to the present invention.
  • FIGS. 6 and 7 are views showing a first measurement area, a second measurement area, and a common measurement area setting for a specimen according to an embodiment of the present invention.
  • FIG. 8 is a diagram illustrating an optical measuring apparatus and a system according to an embodiment of the present invention.
  • FIG. 9 is a block diagram of an optical measuring apparatus and system according to an embodiment of the present invention.
  • FIG. 10 is a flowchart of a light measurement method according to an embodiment of the present invention.
  • the optical measuring apparatus of the present invention includes a first measuring means, a second measuring means and a correcting means, and the correcting means corrects the second measured value of the second measuring means based on the first measured value of the first measuring means with respect to the specimen And at least one of the conversion and the correction is performed.
  • the specimen means an object to measure light received therefrom, and the specimen may be an object that actively emits light or an object that reflects incident light.
  • the specimen may be, but is not limited to, a display (e.g., OLED, LCD, PDP, etc.) or various light sources (e.g., LEDs) have.
  • the first measuring means of the present invention may be a first measuring device for receiving first light from a first measurement area of a sample and generating at least one first measurement value from the received first light.
  • the first measuring instrument according to the present invention is characterized by generating a measurement value having a relatively higher accuracy than the second measuring instrument described later.
  • the first measuring device may be any one of a known spectrophotometer, a radiometer, and a spectral colorimeter, and may be any one of a photoelectric photometer and a photoelectric colorimeter.
  • a spectral photometer or a spectral colorimeter is a device that measures the luminance and chromaticity of a light by analyzing the spectrum of light.
  • the measuring device includes a spectroscope 101a for generating a spectrum of incident light as shown in Fig. 2 (a), a detector 102a such as an optical sensor for detecting a spectrum, and And a circuit or processor 103a for processing band-specific energy of light detected at the detector.
  • the spectrum of light is divided into a plurality of channels (for example, 30 to 200 channels) having a predetermined band (for example, 1 to 10 nm), energy in each band is measured,
  • the luminance and / or chromaticity of the color space corresponding to the corresponding color matching function can be obtained by integrating the color matching function using a predetermined color matching function.
  • a CIE 3 stimulus value (XYZ) can be obtained by integrating the energy of the spectrum using a CIE XYZ color matching function designed to model the color sensed by the human eye.
  • a CIE 3 stimulus value (XYZ) can be obtained using the following equation (1).
  • X, Y, and Z are CIE triad stimuli,? Is the wavelength, L is the spectral radiance, and x, y, and z are color matching functions in the CIE XYZ color space.
  • the spectrophotometer / colorimeter may obtain the value of the normalized CIE xyY color space as needed, and may also obtain the luminance and / or chromaticity of the corresponding color space using a color matching function defined in other color spaces have.
  • the apparatus for analyzing the spectrum and measuring the light reflects the energy value for each band in the color matching function to calculate the luminance and / or chromaticity defined by the corresponding color matching function, so that accurate brightness and / There is an advantage to be able to do.
  • this method of analyzing the spectrum has a disadvantage that it takes a long time to acquire the luminance and / or the chromaticity, the apparatus has a high complexity, and is expensive. There is also a limit to the fact that there is usually no or small spatial resolution in the measurement.
  • a photoelectric photometer or a photoelectric colorimeter is a device for measuring luminance and / or chromaticity using an optical filter and an optical sensor instead of directly analyzing the spectrum.
  • a photoelectric detector may include an optical filter 101b, a detector 102b such as an optical sensor, and a circuit or processor 103b that processes the output value of the detector, as shown in Fig. 2b.
  • the photoelectric photometer / colorimeter measures the luminance and / or chromaticity of the color space by measuring the energy of light passing through the optical filter with an optical sensor using an optical filter corresponding to the color matching function of the color space to be measured .
  • Such a photoelectric photometer / colorimeter has an advantage that it can acquire luminance and / or chromaticity more quickly.
  • an optical filter modeling a color matching function is used instead of directly analyzing the energy of the spectrum of light, Is low.
  • the first measuring device of the present invention may be any one of the spectrophotometer, the radiometer, the spectral colorimeter, the photoelectric photometer and the photoelectric colorimeter described above, and may be a spectrophotometer or photoelectric effect- / Colorimeter, and the like.
  • the first meter may be a spectrophotometer or a colorimeter to obtain a more accurate first measurement.
  • the first measuring instrument is not limited to this, and it may be any optical measuring instrument that measures luminance, chromaticity, or other light characteristics with a relatively higher accuracy than the second measuring instrument described below. Therefore, the first measuring device may be a photometer, a colorimeter or other optical measuring device based on another method in addition to the above-described method.
  • the first measurement value generated by the first measuring device may be a luminance and / or chromaticity or other light characteristic value defined in an arbitrary color space.
  • the first measurement value may be a three-stimulus value, at least one of CIE 3 stimulus values XYZ Lt; / RTI >
  • the first measured value is not limited thereto, and may be a luminance and / or chromaticity value defined in another color space or a characteristic value of other light if necessary.
  • the second measuring means of the present invention may be a second measuring device for receiving the second light from the second measurement area of the sample and for generating a second set of measured values having a predetermined spatial resolution from the received second light have.
  • the second set of measurements may have the form of an image, a two-dimensional array, or a map having a predetermined spatial resolution (e.g., 640 x 480, 1024 x 768, 1280 x 1024, etc.) And may have a data structure that is at least three-dimensional according to the number of channels.
  • the second measuring device of the present invention generates a measurement value having a relatively lower accuracy than the first measuring device described above, but has a higher spatial resolution.
  • having a relatively low accuracy may mean that the second measured value of the second measuring device or the converted value of the second measured value has a larger measurement error and lower accuracy than the first measured value of the first measuring device.
  • the second measuring device may be a camera having a predetermined spatial resolution, an image photometer, or an image colorimeter.
  • the second measuring device may be a camera, a photometer, a colorimeter, etc., which is composed of an optical filter and an optical sensor having a spatial resolution.
  • a well-known optical filter corresponding to the color space to be measured by the second measuring device may be used as the optical filter, and well known sensors capable of acquiring images such as CCD and CMOS may be used as the optical sensor.
  • the second measuring device may be an RGB camera or a rotary filter camera, and may generate a CIE 3 stimulus value (XYZ) image using an optical filter defined in the CIE XYZ color space, as well as an RGB color space, Or may be an imaging photometer / colorimeter that produces a measurement in the color space.
  • the second measuring device may be a measuring device that generates an image of the same color space as an image of a specific color space to be acquired by the optical measuring device of the present invention, or may be a measuring device that generates an image of a different color space. If the second measuring instrument generates the second measured value of the color space which is different from the color space of the data to be acquired by the optical measuring device of the present invention, it is necessary to convert the color space of the second measured value. Such conversion of the color space may be performed in the second measurement means or in the correction means described below. Also, the color space conversion in the correction means described below may be performed in the second measurement means, and the correction means may be integrated with the second measurement means if necessary.
  • the second measuring device when the optical measuring device of the present invention generates an image of a triple-pole value of a specimen, the second measuring device may be a photometer or a colorimeter for generating an image of a triple-pole value, or a camera for generating an RGB image . If the second measuring instrument is an RGB camera, the RGB measuring value generated by the second measuring instrument may be converted into a tristimulus value, and the conversion may be performed in the correction process as necessary.
  • the second measuring device of the present invention may be any one of the camera, the image photometer, and the image colorimeter described above, or may be an optical measuring device having other predetermined spatial resolution.
  • the second measuring device of the present invention is not limited to the above-described example, but may be any optical measuring device having a predetermined spatial resolution while measuring luminance and / or chromaticity and other light characteristics with a relatively lower accuracy than the first measuring device.
  • the second measurement value generated by the second measuring device may be a luminance and / or chromaticity value or other light characteristic value defined in an arbitrary color space, and is preferably at least one of RGB data, tristimulus value, CIE 3 stimulus value XYZ It can be a single value.
  • the first measuring device may be a spectral colorimeter
  • the second measuring device may be an image colorimeter or an RGB camera.
  • the combination of the first measuring device and the second measuring device is not limited to the above example, and may be selected in a combination satisfying the conditions of the measurement value accuracy and the spatial resolution of the first measuring device and the second measuring device.
  • the first and second measuring instruments of the present invention are not limited to separate devices or objects that are physically separated, but may be configured to measure the luminance and / or chromaticity and other light characteristics defined in a predetermined color space
  • a combination of hardware and / or software that performs the functions may be present in a form integrated with at least one device or system.
  • the first measurement area for the specimen of the first measuring instrument and the second measurement area for the specimen of the second instrument have at least partially overlapping common measurement areas.
  • the first measurement area 1 for the specimen 3 of the first measuring instrument 100 and the second specimen 3 for the specimen 3 of the second measuring instrument 200 3 and 4 the entire first measurement region 1 is the common measurement region 1.
  • the measurement region 2 has a common measurement region overlapping.
  • the first optical path section extending from one point in the common measuring region out of the optical paths of the first light to the first measuring instrument and the optical path of the second light leading to the second measuring instrument
  • the first measuring device and the second measuring device are arranged such that the extended second optical path sections do not overlap with each other but are angled within a range of greater than 0 DEG and smaller than 180 DEG.
  • the term " overlapping optical path sections " does not mean that the optical paths of light traveling in different directions cross each other at only one intersection, but the optical path overlaps at least in some sections. It means.
  • the optical paths of the light reaching the measuring devices 10 and 20 overlap each other in a section extending from the common measuring region of the specimen to the beam splitter.
  • the first optical path section may be a straight line section extending from any one point in the common measurement region of the optical path of the first light
  • the second optical path section may be a straight line section extending from the same one of the optical paths of the second light.
  • the first optical path section and the second optical path section may be angled without overlapping each other. Therefore, the first light and the second light path sections extending from all the points in the common measurement area may not overlap with each other.
  • the optical measuring apparatus of the present invention can obtain the first light having different optical paths from the starting point of the common measuring region as shown in FIG. 4 by making the angles without overlapping the first optical path section and the second optical path section, And the second light reaches the first measuring device 100 and the second measuring device 200, respectively. That is, in the conventional optical measuring apparatus as shown in FIG. 1, light travels through the same optical path and is branched by the optical branching means 30 such as a beam splitter, and is incident on each of the RGB cameras 20 and the spectral colorimeter 10 Whereas in the present invention, the light reaching the first measuring instrument and the second measuring instrument is light having a different optical path from the common measuring region 1.
  • optical branching means such as a beam splitter or an aperture mirror is used to measure coaxial light from different measuring instruments. That is, the light traveling along the same optical path is branched by a beam splitter or the like to be directed in different directions, and each measuring instrument receives a branched light.
  • at least one of the branched lights is reduced to 1/2 or less of the light before the branching in the process of branching the light, and as a result, at least one of the two measuring devices There is a problem that the optical sensitivity is reduced to 1/2 or less.
  • the productivity in the sample inspection process deteriorates.
  • the optical branching device since the optical branching device must be provided in the optical measuring device, the volume of the device becomes large and the position of the measuring device is determined by the arrangement of the optical branching device. Further, when the aperture mirror is used as the optical branching unit, the image of the portion corresponding to the hole of the mirror can not be obtained, and the amount of light reaching the measuring device through the hole decreases when the hole is small.
  • the optical measuring apparatus of the present invention is characterized in that, starting from a specimen, the light incident on the optical measuring apparatus does not pass through an optical branching means for diverging a plurality of lights and directing them in different directions, So that it can be incident on the first measuring instrument and the second measuring instrument.
  • the optical measuring apparatus of the present invention comprises a first optical path section extending from one point in the common measuring region of the optical path of the first light to the first measuring instrument, and a second optical path section
  • the first measuring device and the second measuring device are arranged such that the second optical path sections extending from the one point of the optical path do not overlap with each other but form an angle within a range of greater than 0 DEG and less than 180 DEG.
  • the first measuring device and the second measuring device may be arranged such that the optical axis of the first measuring device and the optical axis of the second measuring device form a predetermined angle, so that the first optical path section and the second optical path section Can be made larger than 0 DEG.
  • the first measuring instrument and the second measuring instrument receive light directly from the specimen without passing through the optical branching means, and receive light having different optical paths because they are spaced from each other at the above-mentioned predetermined angle.
  • the angle between the first optical path section and the second optical path section may be determined based on the distance between the first and second measuring instruments and the distance between the first measuring instrument and the second measuring instrument.
  • the angle between the first light path section and the second light path section is set to be not less than a predetermined angle so that the first light from the first measurement region and the second light from the second measurement region are not the same or overlapping light, .
  • Such an angle may ideally be set at a small angle such as 0.001 DEG or 0.01 DEG, but it may be set at a small angle such as that which can be realized in the optical measuring apparatus in consideration of the physical size or mutual separation distance of the first and second measuring instruments, Can be set to an angle.
  • it may be set at an angle of 0.5 DEG or more, 1 DEG or more, or 1.5 DEG or more in consideration of the above limitations.
  • the first measuring means and the second measuring means are arranged so that the angles of the first optical path section and the second optical path section are larger than 0 DEG, whereby the present invention uses optical branching means such as a beam splitter
  • the second measuring means can generate the second measured value without any missing region for all the regions in the second measuring region.
  • the first measurement means can also produce a first measurement value without a region missing in the first measurement region.
  • a light path changing means such as a mirror is additionally provided in the optical measuring apparatus of the present invention in order to adjust the arrangement of the first measuring instrument and the second measuring instrument as necessary, instead of branching the light to be incident on the measuring instrument It is possible.
  • the arrangement of the first measuring instrument and the second measuring instrument may be determined in consideration of the arrangement of the optical path changing means. Therefore, in the present invention, the angle between the first optical path section and the second optical path section may not necessarily coincide with the angle between the optical axis of the first measuring device and the optical axis of the second measuring device, May vary depending on the arrangement of the means.
  • the optical measuring apparatus of the present invention is characterized in that the first optical path section and the second optical path section are not overlapped with each other but satisfy the condition that the angle is larger than 0 DEG and smaller than 180 DEG,
  • the positions of the first measuring instrument and the second measuring instrument, the optical axis direction, the setting of the optical system, and the like can be changed as needed within the range satisfying the condition.
  • the angle between the first optical path section and the second optical path section may be fixed, or may be changed as necessary by control means described later.
  • the angle between the first optical path section and the second optical path section may preferably be set to be 90 [deg.], 60 [deg.] Or 45 [deg.] Or 30 [deg.].
  • the inventors of the present invention have found that when the angle between the first optical path section and the second optical path section is within 15 °, preferably within 10 °, more preferably within 5 °, It is found that there is hardly a significant error due to the difference in the optical paths of the first light and the second light.
  • the inventors of the present invention have found that even if the first and second measuring instruments do not use light having the same optical path from the specimen, if the first optical path section and the second optical path section are within a predetermined angle, And no significant difference was found in the accuracy of the triple stimulus value of the sample. This is because the difference between the three stimulus values measured when the difference between the two optical paths emitted from the specimen is within a predetermined angle is negligibly small.
  • the angle between the first optical path section and the second optical path section within 15 °, preferably within 10 °, more preferably within 5 °, the correction accuracy of the second measured value . It is possible to solve the problems of the above-described conventional techniques and to increase the measurement speed, thereby achieving the advantageous effect of improving the productivity of the sample inspection process. Further, since optical branching means such as a beam splitter is not used, a complicated optical design is not required, and the design of the optical measuring apparatus is simplified and the apparatus can be advantageously miniaturized. Further, in the present invention, the difference in light characteristics according to the above-described difference in viewing angles can be further corrected according to a method described later. Therefore, even if the first measuring instrument and the second measuring instrument are arranged in the above- Can be further improved.
  • the optical measuring apparatus of the present invention may further comprise control means.
  • the control means may change at least one of the position of the first measuring instrument, the optical axis and the optical system setting, the position of the second measuring instrument, the optical axis and the optical system setting so as to change the angle between the first optical path section and the second optical path section.
  • the arrangement of the optical path changing means, such as a mirror, with the above-mentioned changes of the first and second measuring instruments may be changed to change the angle between the first optical path section and the second optical path section.
  • the control means for the above-described change may include a driving mechanism such as a known physical mechanism for fixing, moving and posture adjusting and a motor for physically controlling them, for changing the position or direction of the measuring instrument or the mirror .
  • a known fixing mechanism such as a screw for fixing a measuring instrument or a mirror, a fixing means such as a fixing means, and a known moving mechanism such as a belt adjusted to physically change the position or direction of the fixing mechanism
  • a known driving mechanism such as a motor capable of controlling the moving or rotating mechanism.
  • It may also include a control circuit or processor and a combination of hardware and / or software that functions to control the mechanisms. It may also include a circuit or processor and a combination of hardware and / or software that is operative to control optical system settings, such as the focus of the meter or the exposure settings.
  • the correction means of the present invention corrects and / or converts the second measured value of the second measuring device based on the first measured value of the first measuring device.
  • the correction means may be a correction circuit composed of hardware and / or software that performs the conversion and / or correction functions described below.
  • the correction circuit may be an electrical or electronic circuit coupled with certain elements designed to perform such a function.
  • the correction means may also be a combination of at least one processor or hardware and / or software that performs such a function.
  • the second measurement value when the first measurement value and the second measurement value are measurement values defined in the same color space, the second measurement value can be corrected based on the first measurement value. If the first measurement value and the second measurement value are measurement values defined in different color spaces, the second measurement value is converted into the color space of the first measurement value, and then, based on the first measurement value, The conversion value may be corrected. Alternatively, according to the setting of the conversion and / or correction function, even when the first measurement value and the second measurement value are defined in different color spaces, the color space of the second measurement value is converted based on the first measurement value, May be performed as an integrated transformation.
  • the first measuring device and the second measuring device do not receive coaxial light and receive the first light and the second light, respectively, in which the first optical path section and the second optical path section do not overlap each other,
  • the intensity of the light received by the measuring instrument depends on the viewing angle of the light in the real specimen, that is, the angle at which the measuring device looks at the specimen.
  • the light distribution information of the specimen is information indicating a characteristic in which the luminance and / or the chromaticity are measured differently depending on the viewing angle of the measuring device facing the specimen
  • the light distribution information on the intensity of the light by the viewing angle of the specimen can be collected through the preliminary measurement have.
  • the light distribution information may be mathematically modeled according to the Lambert cosine law. That is, when the intensity of the light in the normal direction of the specimen is defined as I 0 , the intensity I of the light at the angle ⁇ can be defined by the following equation (2) according to the angle ⁇ with the normal.
  • the first measurement value can be corrected based on the angle between the first optical path section and the second optical path section using the above-described light distribution information. For example, if the second measuring instrument is arranged in the normal direction of the specimen, and the first measuring instrument has an angle &thetas; with respect to the normal direction, if there is light distribution information for each viewing angle of the specimen collected beforehand, The magnitude of the first measured value can be corrected by reflecting the light intensity difference according to the difference. For example, in the above example, if the light having an angle?
  • the first measured value may be multiplied by 10/9 to produce a corrected first measured value to match the second measured value of the second measured value.
  • the correction means can store it in a storage device such as a memory in order to use the light distribution information collected in advance for the specimen.
  • the magnitude of the first measured value may be corrected based on the above-mentioned Lambert cosine law, and the light distribution information based on the Lambert cosine law may also be stored in the correction means.
  • the above-described correction of the first measured value magnitude may be performed integrally with the correction and / or the conversion of the second measured value.
  • the light distribution characteristic Can have the same distribution as (5).
  • the actual light distribution characteristic (5) are previously collected and stored as the light distribution information, and the magnitude of the first measured value can be corrected using this.
  • the second measured value can be corrected and / or converted based on the first measured value corrected as described above.
  • the intensity difference of the light depending on the angle difference may not be large. Therefore, correction of the first measured value using the above- , And may correct and / or convert the second measurement value based on the first measurement value generated by the first measurement device.
  • the first measurement value corrected using the above-described light distribution information is also referred to as a first measurement value.
  • the correction means of the present invention can set the transform function and / or the coefficient of the correction function to be applied to the second measurement value of the second measurement region using the first measurement value and the second measurement value obtained in the common measurement region .
  • the transform function for transforming the second measured value into the color space of the first measured value. For example, May exist.
  • There may also be a correction function for correcting the accuracy of the second measured value for example, there may be a correction matrix with a predetermined magnitude.
  • the conversion and correction of the color space may be performed in order, but the color space conversion function and the accuracy correction function may be integrated so that the conversion and correction may be performed together.
  • the correction means of the present invention may use a known color space conversion function or a color space conversion function obtained using a known prior learning method to optimize the characteristics of the sample, 2
  • the color space of the measured value can be converted.
  • various known methods such as a least squares method used for estimating the optimal function parameter using the input value and the output value sample of the function may be used.
  • the first measurement value is the triad stimulus value XYZ and the second measurement value is the RGB data
  • the RGB data having the resolution within the common measurement region is converted into the triad stimulus value color space to generate the triad stimulus value map
  • the map of the generated three-pole value can be corrected using the measured three-pole value in the measurement area.
  • the coefficients of the conversion function performing the color space conversion and the correction of the accuracy of the second measurement may be obtained.
  • the coefficient of the transform function can be directly obtained by using the second measured value and the first measured value of the common measuring region, and known coefficient estimating methods can be used here.
  • the first measurement value is the triple stimulus value XYZ and the second measurement value is the RGB data
  • the RGB data is measured between the measured three-stimulus value in the common measurement area and the RGB data having the resolution in the common measurement area.
  • An optimal transform coefficient or transform matrix for transforming into a stimulus value can be obtained.
  • a known closed loop process can be used to estimate and obtain the transform coefficients.
  • the coefficient of the correction function between the first measurement value and the second measurement value of the common measurement region can be obtained by using the above-described coefficient estimation and acquisition method.
  • the correction means applies the determined coefficients to the second measurement values of the second measurement region, and performs conversion and / or correction on the second measurement values Can be performed. Therefore, even in the first measurement area where the first measurement value is more accurately measured and in the second measurement area other than the common measurement area, the second measurement value is converted and / or corrected, so that more accurate measurement value can be obtained .
  • the common measurement region is a region in which both the first measurement value having a relatively high measurement accuracy and the second measurement value having a low measurement accuracy are obtained
  • the first and second measurement values obtained in the common measurement region are used Conversion and / or correction coefficient as described above, and applying the conversion and / or correction coefficient thus obtained to second measurement values having a spatial resolution in the second measurement region to perform conversion and / or correction
  • Conversion and / or correction coefficient as described above
  • the method of converting and / or correcting the second measured value using the first measured value is not limited to the method described above.
  • the first and second measuring instruments having different degrees of accuracy
  • various known methods of transforming and / or correcting a second measurement having spatial resolution based on a more accurate first measurement may be applied.
  • the optical measuring device may comprise a plurality of second measuring devices.
  • the second measuring areas of the plurality of second measuring devices have at least partly overlapping areas and a common measuring area of the first and second measuring areas may be located in the overlapping areas.
  • a plurality of second measuring devices are used to separately photograph the specimen 3, and a part of the second measurement areas 2 photographed by each second measuring device is overlapped , And the first measurement region (1) of the first measurement device is located in a part of the overlapping region so that the common measurement region (1) is located in the overlapping region.
  • the first measurement value can be corrected and / or converted by equally applying the second measurement value of the second measurement devices that photographed the overlapping region.
  • the optical measuring device may comprise a plurality of second measuring devices and a plurality of first measuring devices.
  • the second measuring areas of the plurality of second measuring devices have at least partly overlapping areas and a common measuring area of the first and second measuring areas may be located in the overlapping areas.
  • the first measurement areas of the plurality of first measuring devices may have at least two or more of the common measurement areas in the overlapping area.
  • the second optical path section of one of the plurality of second measuring devices 200a and the second optical path section of the second measuring device 200b The path section may be set to have different angles from the light emitting surface or the light reflecting surface of the specimen. As a result, the sample can be simultaneously measured at different viewing angles.
  • the second measuring device 200a can acquire a second measured value at the front side of the specimen
  • the second measuring device 200b can acquire a second measured value at the specimen side
  • the second measurements may be converted and / or corrected in accordance with the method described above using the first measurement obtained in the first meter 100.
  • At least one electronic circuit or a computing circuit including at least one memory 400 and at least one memory 400 Can be integrated into the optical measuring device of the invention or can operate in conjunction with it.
  • the computing circuit may include a known input / output device, storage device in addition to the electronic circuit or the processor 300 and the memory 400.
  • the processor may be an ASIC, a FPGA, an equivalent logic circuit, or any combination of at least one of them, as well as a general purpose processor such as a CPU or a DSP, Other hardware, software, firmware, or any combination thereof.
  • An electronic circuit or a processor for performing the above-described correction or control function of the optical measuring apparatus of the present invention may exist separately from the first and second measuring instruments as shown in FIG. 9, but may be provided to the first measuring instrument or the second measuring instrument And may be integrated into an electronic circuit or a processor.
  • a method of measuring light includes generating a first measurement value with a first measurement device (S100), generating a second measurement value with a second measurement device (S200) And a correction step (S300) for performing at least one of conversion and correction for the second measurement value on the basis of the correction value.
  • the step of generating a first measurement value (S100) comprises receiving a first light from a first measurement area of the sample with a first meter and generating at least one first measurement value from the received first light.
  • the step of generating a second measurement value comprises receiving a second light from a second measurement area of the specimen with a second meter, and generating a second set of measurement values having a predetermined spatial resolution from the received second light .
  • the correction step S300 performs at least one of conversion and correction for the second measurement value based on the first measurement value.
  • the step of generating the first measurement value and the step of generating the second measurement value are independent of whether either step is performed first or both steps are performed at the same time.
  • first measuring device and the second measuring device have a common measuring area in which the first measuring area and the second measuring area overlap at least partially and extend from one point in the common measuring area of the optical path of the first light leading to the first measuring device
  • the first optical path section and the second optical path section extending from the one point out of the optical paths of the second optical path leading to the second measuring section are arranged so as to form an angle within a range of larger than 0 ° and smaller than 180 ° .
  • the light incident on the optical measuring device may be incident on the first measuring device and the second measuring device without passing through the optical branching device that diverges the light into a plurality of directions and directs them in different directions.
  • the method of measuring light of the present invention may further include changing an angle between the first optical path section and the second optical path section based on the distance between the optical measuring apparatus and the specimen. At this time, it is possible to change at least one of the position of the first measuring instrument, the optical axis and the optical system setting, the position of the second measuring instrument, the optical axis and the optical system setting so as to change the angle between the first optical path section and the second optical path section.
  • the setting of the optical system may be a known setting value such as a focal distance or a light exposure value in the optical system constituting the measuring instrument.
  • the optical measuring device when the optical measuring device includes a plurality of second measuring devices, the second measuring areas of the plurality of second measuring devices have at least a part of overlapping areas,
  • the first measurement device may generate the first measurement value and the second measurement device may generate the second measurement value, with the first measurement device positioned within the overlapping area.
  • the optical measuring device when the optical measuring device includes a plurality of first measuring devices, the first measuring areas of the plurality of first measuring devices are arranged to have at least two or more of the common measuring areas in the overlapping area
  • the first measurement device may generate a first measurement value and the second measurement device may generate a second measurement value.
  • the second optical path section of any one of the plurality of second measuring devices and the second optical path section of the other second measuring device are disposed on the light emitting surface or the light reflecting surface of the sample
  • the first measurement device may generate the first measurement value and the second measurement device may generate the second measurement value.
  • optical measuring system of the present invention can operate in the same manner as the optical measuring apparatus described above in detail.
  • the optical measuring system of the present invention includes a first measuring device, a second measuring device, and a correction circuit.
  • the first meter receives the first light from the first measurement area of the specimen and produces at least one first measurement from the received first light.
  • the second meter receives the second light from the second measurement area of the specimen and generates a second set of measurements from the received second light having a predetermined spatial resolution.
  • the correction circuit performs at least one of conversion and correction for the second measurement value based on the first measurement value.
  • the first measuring device and the second measuring device have a common measuring area in which the first measuring area and the second measuring area overlap at least partially and extend from one point in the common measuring area among the optical paths of the first light leading to the first measuring device
  • the first optical path section and the second optical path section extending from the one point out of the optical paths of the second optical path leading to the second measuring section are arranged so as to form an angle within a range of larger than 0 ° and smaller than 180 ° .
  • the light incident on the optical measuring system can be incident on the first measuring instrument and the second measuring instrument without passing through the optical branching means which divides the light into a plurality of directions and directs them in different directions.
  • the optical measuring system of the present invention may include the first measuring device, the second measuring device and at least one processor. And the processor may be configured to perform at least one of conversion and correction for the second measurement based on the first measurement. Here again, based on the angle between the first optical path section and the second optical path section, at least one of conversion and correction for the second measured value can be performed.
  • the optical measurement system can change the angle between the first optical path section and the second optical path section based on the distance between the optical measurement apparatus and the specimen.
  • the optical measurement system comprises a plurality of second measuring devices, wherein the second measuring areas of the plurality of second measuring devices have at least partly overlapping areas and the common measuring area is located within the overlapping area can do.
  • the optical measurement system includes a plurality of first measuring devices, and the first measuring areas of the plurality of first measuring devices may have at least two or more of the common measuring areas in the overlapping area.
  • the second optical path section of any one of the plurality of second measuring devices and the second optical path section of the other second measuring device are arranged such that the angle between the light emitting surface or the light reflecting surface of the specimen is can be different.
  • the optical measuring device, optical measuring system, and optical measuring method of the present invention can be used for evaluation of optical characteristics of flat panel displays such as OLED, LCD and PDP, evaluation of high resolution display, inspection of gamma, uniformity, moire, Can be used. It can also be used for evaluating the optical characteristics of flat panel illumination, uniformity, and evaluation of moiré in the field of lighting.
  • the sequence of operations described in the methods or processes disclosed herein is described as an example. Accordingly, the order of each step can be adjusted within the spirit of the present invention as necessary. Also, the devices and systems disclosed herein may include means capable of performing the functions described herein, and may be implemented as separate devices or systems as needed, or may be interlocked or integrated with other systems .
  • the techniques described herein may be implemented, at least in part, in hardware, software, firmware, or any combination thereof. They may be implemented, for example, in one or more processors, a DSP, an ASIC, an FPGA, or equivalent logic circuit, or any combination of at least one of these. Such hardware, software, and firmware may be implemented within one or more systems or devices to support the operations and functions disclosed herein, or may be implemented in conjunction with or integrated with other systems or devices . In addition, the components described herein may be implemented separately or separately with separate but interoperable logic devices. It is to be understood that each function and operation identified and described herein is merely intended to accentuate each function, and not necessarily each such function must be implemented in a separate hardware, firmware, or software component, Or may be integrated within separate hardware and / or software combinations.
  • the techniques described herein may be implemented or stored in a computer-readable storage medium including instructions. And the instructions stored on the computer readable medium may cause the processor to perform the method and operation associated with the instruction.
  • the computer readable storage medium may comprise RAM, ROM, PROM, EPROM, EEPROM, flash memory, hard disk, CD-ROM, magnetic media, optical media, or other storage media.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

La présente invention concerne un appareil, un système et un procédé destinés à mesurer une lumière reçue d'un échantillon. Un système hybride classique, qui acquiert une image corrigée d'une valeur de tristimulus et analogue en mesurant la lumière émise par l'échantillon, présente un problème dans lequel la photosensibilité d'un dispositif de mesure est réduite étant donné qu'un moyen de branche optique tel qu'un diviseur de faisceau est utilisé, ce qui entraîne le ralentissement de la vitesse de mesure. Afin de résoudre le problème, la présente invention permet que la lumière, qui est émise par l'échantillon et qui est incidente sur un appareil de mesure de lumière, soit incidente sur un premier dispositif de mesure et un second dispositif de mesure sans passer par le moyen de branche optique pour diviser la branche de lumière en une pluralité de lumières et orienter les lumières dans différentes directions. À cet effet, la présente invention comprend le premier dispositif de mesure et le second dispositif de mesure agencés de telle sorte qu'une première section de trajet optique, qui s'étend d'un point à l'intérieur d'une zone de mesure commune, de trajets de lumière d'une première lumière arrivant au niveau du premier dispositif de mesure et une seconde section de trajet optique, qui s'étend à partir d'un point de trajets optiques d'une seconde lumière arrivant au niveau du second dispositif de mesure, ne se chevauchent pas l'une l'autre et forment un angle entre celles-ci dans une plage supérieure à 0° et inférieure à 180°.
PCT/KR2018/009066 2017-09-15 2018-08-09 Appareil, système et procédé de mesure de lumière Ceased WO2019054639A1 (fr)

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TW201920910A (zh) 2019-06-01
KR20190030968A (ko) 2019-03-25

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