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WO2018217419A1 - Bicouches lipidiques stables sur des réseaux de nanopores - Google Patents

Bicouches lipidiques stables sur des réseaux de nanopores Download PDF

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Publication number
WO2018217419A1
WO2018217419A1 PCT/US2018/030708 US2018030708W WO2018217419A1 WO 2018217419 A1 WO2018217419 A1 WO 2018217419A1 US 2018030708 W US2018030708 W US 2018030708W WO 2018217419 A1 WO2018217419 A1 WO 2018217419A1
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layer
array
apertures
planar support
silicon nitride
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Ossama Assad
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Quantapore Inc
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Quantapore Inc
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Priority to US16/615,092 priority Critical patent/US20200198965A1/en
Publication of WO2018217419A1 publication Critical patent/WO2018217419A1/fr
Anticipated expiration legal-status Critical
Priority to US17/443,017 priority patent/US20220106187A1/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
    • C12Q1/6869—Methods for sequencing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0128—Processes for removing material
    • B81C2201/013—Etching
    • B81C2201/0133—Wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

Definitions

  • a promising class of biosensors have been developed which employ as detection elements membrane proteins inserted into a lipid bilayer supported by a nanopore array.
  • Membrane proteins may play either functional roles, such as analyte recognition and signal transduction, and/or structural roles, such as a conduit with a precise geometry for moving ions or analytes across the bilayer in a detection process.
  • a major challenge in the application of such biosensors has been developing methods for conveniently producing lipid bilayers that are sufficiently stable and rugged to permit measurements over a useful interval of time.
  • the present invention is directed to methods for making devices and/or articles of manufacture comprising a lipid bilayer supported by a solid state nanopore array.
  • the invention further includes methods of making precursor articles wherein the solid state nanopore array includes a reflective surface.
  • methods of the invention comprise the following steps: (a) disposing a first layer of known thickness on a first side of a planar support body; (b) masking the first layer to form an array of dry etch zones; (c) dry etching the dry etch zones to form an array of apertures (or nanopores) extending into but not through the first layer; (d) masking a second side of the planar support body to form an etch region aligned with the array of apertures (or nanopores); (e) wet etching the etch region on the second side of the planar support body to expose a surface of the first layer; and (f) dry etching the exposed surface of the first layer to a depth overlapping the apertures so that apertures of the array provide fluid communication across the first layer to produce a solid state nanopore array.
  • methods of the invention include a further step of disposing a lipid bilayer on a surface of the first layer on a side opposite the planar support body.
  • FIGs. 1A-1B illustrate a problem the invention addresses.
  • FIGs. 2A-2C illustrate an embodiment of the invention.
  • Guidance for aspects of the invention is found in many available references and treatises well known to those with ordinary skill in the art, including, for example, Cao, Nanostructures & Nanomaterials (Imperial College Press, 2004); Levinson, Principles of Lithography, Second Edition (SPIE Press, 2005); Doering and Nishi, Editors, Handbook of Semiconductor Manufacturing Technology, Second Edition (CRC Press, 2007); Sawyer et al, Electrochemistry for Chemists, 2 nd edition (Wiley Interscience, 1995); Bard and Faulkner, Electrochemical Methods: Fundamentals and Applications, 2 nd edition (Wiley, 2000); Lakowicz, Principles of Fluorescence Spectroscopy, 3 rd edition (Springer, 2006); Hermanson, Bioconjugate Techniques, Second Edition (Academic Press, 2008); and the like, which relevant parts are hereby incorporated by reference.
  • the invention is directed to methods of making stable lipid bilayers supported by a solid state nanopore array.
  • the invention improves stability of lipid bilayers by providing solid state nanopore arrays without surface damage caused by exposure to wet etchants used in their manufacture.
  • the invention also includes the applications of such supported bilayers in devices for single molecule analysis, such as, nucleic acid sequencing, and the like.
  • the invention is a recognition and appreciation that the manner in which the solid state nanopore array is fabricated has a significant effect on lipid bilayer stability and blockage of solid state nanopores.
  • methods of the invention provide a fabrication method that reduces the presence of wet etching debris on the surface of the solid state membrane accepting the lipid bilayer, thereby reducing blocked nanopores and surface debris that disrupts bilayer stability.
  • Exemplary methods include the steps of masking a first layer, e.g. of silicon nitride, on a planar support, e.g. silicon, to form dry etch zones; dry etching the dry etch zones to form an array of apertures extending into but not through the first layer; masking a second side of the planar support body to form an etch region aligned with the array of apertures; wet etching the etch region to expose a surface of the first layer; dry etching the exposed surface of the first layer to a depth overlapping the apertures so that apertures of the array provide fluid communication across the first layer; and disposing a lipid bilayer on a surface of the first layer on a side opposite the planar support which encompasses the array of apertures.
  • a first layer e.g. of silicon nitride
  • a planar support e.g. silicon
  • the invention includes methods of making solid state nanopore arrays which may be used to support lipid bilayers and which comprise a metal layer, such as, a layer of aluminum, silver or gold, or especially, a layer of aluminum.
  • a metal layer such as, a layer of aluminum, silver or gold, or especially, a layer of aluminum.
  • the method of the invention prevents damage to the metal layer.
  • methods of the invention include the following steps: (a) disposing a first layer of known thickness on a first side of a planar support body; (b) masking the first layer to form an array of dry etch zones; (c) dry etching the dry etch zones to form an array of apertures (or nanopores) extending into but not through the first layer; (d) masking a second side of the planar support body to form an etch region aligned with the array of apertures (or nanopores); (e) wet etching the etch region on the second side of the planar support body to expose a surface of the first layer; and (f) dry etching the exposed surface of the first layer to a depth overlapping the apertures so that apertures of the array provide fluid communication across the first layer to produce a solid state nanopore array.
  • the array of apertures contains a plurality of apertures which may be arranged in a wide variety of patterns.
  • the array comprises a number of apertures in the range of from 2 to 1000; in other embodiments, an array comprises a number of apertures in the range of from 2 to 100.
  • the array of apertures is a rectilinear array; in some embodiments, the array of apertures is a square array; in some embodiments, the array of apertures is a hexagonal array.
  • methods of the invention further include the step of disposing a lipid bilayer on a surface of the first layer on a side opposite the planar support body which encompasses the array of apertures.
  • the first layer comprises a plurality of layers wherein the distal most layer (or outer most layer) of the plurality from the planar support body is a metal layer. In some embodiments, the first layer comprises two layers. In some embodiments, the first layer comprises a layer of silicon nitride on the planar support body and a layer of aluminum on the silicon nitride opposite of the planar support body. In some embodiments, the planar support layer is silicon and the steps of wet etching are carried out by silicon etchants.
  • Wet etchants for carrying out wet etching steps of the invention comprise an oxidizer, an acid or base to dissolve an oxidized surface created by the oxidizer, and a solvent or dilutent media to transport reactants and products.
  • exemplary oxidants include hydroxides, such as KOH, NaOH, CeOH, RbOH, NH40H, TMAH (tetramethylammonium hydroxide), (CH3)4NOH, and the like.
  • Exemplary solvents are water and acetic acid.
  • Fig. 1A-1B illustrate concepts related to prior art methods.
  • Solid state membrane (100) comprising silicon wafer (102) with first layer (104), such as silicon nitride, is patterned (108) with a photoresist (106) for dry etching of wells (111) using conventional masking and dry etching techniques.
  • Wells (111) may have cross-sectional dimensions in the range of 1-1000 nm diameter (for circular cross section) or 1-1000 nm widths (for square cross section); or in some embodiments, wells (111) have cross-sectional dimensions in the range of 10-100 nm diameter (for circular cross section) or 10-100 nm widths (for square cross section).
  • the dry etching produces a passage completely through layer (104) and partially into layer (102), for example, by a depth (106), after which (as illustrated in Fig. IB) the reverse side of solid state membrane (100) is masked (112) with photoresist (114) so that material from layer (102) can be removed by wet etching (116, e.g. with KOH) down to layer (104) to reveal nanopores (119).
  • first layer (104) comprises a plurality of sub-layers one of which is a metal layer, such as an aluminum layer, wet etching with an etchant like KOH will damage the aluminum layer.
  • FIGs. 2A-2C illustrate formation of a supported bilayer by a method of the invention which overcomes the above deficiency of the prior art.
  • Surface (103) of first layer (104) is masked (108) with photoresist (106) as above to form dry etch zones, after which solid state membrane (100) is dry etched (130) to form wells (133) whose bottoms or floors (135) do not extend into the material of layer (102); that is, wells (133) are confined entirely to layer (104), leaving a predetermined thickness (132) between bottoms (135) and surface (137) of layer (102).
  • layer (102) is a silicon wafer having a thickness in the range of from 200- 1000 ⁇ and first layer (104) is silicon nitride having a thickness in the range of from 20 to 200 nm, which may be formed using chemical vapor deposition, atomic layer deposition, LPCVD, physical vapor deposition, or like technique.
  • layer (104) comprises two layers (or sub-layers), one sub-layer of silicon nitride adjacent to layer (102) and one sub-layer of a metal, such as aluminum, on the surface of the silicon nitride opposite to layer (102).
  • such predetermined thickness (132) may be in the range of from 2 to 30 nm, particularly when layer (104) comprises silicon nitride or a sub-layer adjacent to layer (102) comprises silicon nitride.
  • the reverse side of solid state membrane (100) is masked with photoresist (114) to form an etch region aligned with wells (133) and wet etched to surface (139) of layer (104); however, because the wet etching does not open passages to surface (103) of layer (104) no debris is deposited thereon nor can debris lodge in wells (133).
  • the etch region aligned with wells (133) defines an area whose center corresponds to the center of the collections of wells (133).
  • the center of the rectilinear array and the center of the etch region lie on the same line perpendicular to solid state membrane (100).
  • the etch region covers an area larger than and encompassing the array of wells (133) so that after wet etching creates trench (200) with angular walls (201) its floor or surface (139) still encompasses the collection or array of wells (133).
  • Photoresist mask (114) is designed so that the removal of material in the wet etching step exposes an area of surface (137) that encompasses all the nanopores (133) of the array.
  • Dry etching step (140) is then employed to remove material from bottoms of wells (133) to form nanopores (141) without production of undesirable debris.
  • lipid bilayer (152) is disposed (150) on surface (103) so that it spans nanopores (141), after which (or concurrently with) membrane proteins (155) may be inserted (154) into lipid bilayer (152) to form device (156).
  • First layer (104) may comprise a single material or it may comprise a plurality of sublayers.
  • at least one sub-layer of layer (104) is a metal oxide or a nitride, such as Si0 2 , A1 2 0 3 , SiN x , Hf0 2 , Ti0 2 , silica, and the like.
  • layer (104) is silicon nitride or silicon oxide.
  • layer (104) comprises a plurality of sub-layers, at least one of which is a metal layer.
  • Layer (102) may comprise a wide range of MEMS materials including, but not limited to, silicon, silicon nitride, silicon dioxide, and the like.
  • layer (102) is silicon.
  • Surfaces of solid state membrane (100) may be masked using conventional photoresists and masking techniques, and particular embodiments of the invention may include optional photoresist stripping or removal steps.
  • photoresist removal after dry etching may include treatment with organic solvents, piranha solution, or treatment by "ashing" remaining photoresist material.
  • Exemplary piranha solutions comprise sulfuric acid (H2S04) and hydrogen peroxide (H202) mixture.
  • the ratio of H2S04:H202 may vary, but commonly a mixture by volume of between 2: 1 and 4: 1 H2S04: (96wt%): H202 (30wt%), ratios as high as 8: 1.
  • nanopores include constraining polynucleotide analytes, such as labeled polynucleotides so that their monomers pass through a signal generation region (or equivalently, an excitation zone, or detection zone, or the like) in sequence. That is, a nanopore constrains the movement of a polynucleotide analyte, such as a polynucleotide, so that nucleotides pass through a detection zone (or excitation region) in single file.
  • polynucleotide analytes such as labeled polynucleotides so that their monomers pass through a signal generation region (or equivalently, an excitation zone, or detection zone, or the like) in sequence. That is, a nanopore constrains the movement of a polynucleotide analyte, such as a polynucleotide, so that nucleotides pass through a detection zone (or excitation region) in single file.
  • additional functions of nanopores include (i) passing single stranded nucleic acids while not passing double stranded nucleic acids, or equivalently bulky molecules and/or (ii) constraining fluorescent labels on nucleotides so that fluorescent signal generation is suppressed or directed so that it is not collected.
  • nanopores used in connection with the methods and devices of the invention are provided in the form of arrays, such as an array of clusters of nanopores, which may be disposed regularly on a planar surface.
  • clusters are each in a separate resolution limited area so that optical signals from nanopores of different clusters are
  • optical signals from nanopores within the same cluster cannot necessarily be assigned to a specific nanopore within such cluster by the optical detection system employed.
  • Solid state membranes with apertures may be fabricated in a variety of materials including but not limited to, silicon, amorphous silicon, and metal oxide and nitrides, including Si0 2 , A1 2 0 3 , SiN x , Hf0 2 , Ti0 2 , silica, and the like.
  • the fabrication and operation of solid state nanopores for analytical applications, such as DNA sequencing, are disclosed in the following exemplary references that are incorporated by reference: Ling, U.S. patent 7,678,562; Hu et al, U.S. patent 7,397,232; Golovchenko et al, U.S.
  • patent 6,464,842 Chu et al, U.S. patent 5,798,042; Sauer et al, U.S. patent 7,001,792; Su et al, U.S. patent 7,744,816; Church et al, U.S. patent 5,795,782; Bayley et al, U.S. patent 6,426,231; Akeson et al, U.S. patent 7,189,503; Bayley et al, U.S. patent 6,916,665; Akeson et al, U.S. patent 6,267,872; Meller et al, U.S.
  • patent publication 2009/0029477 Howorka et al, International patent publication WO2009/007743; Brown et al, International patent publication WO2011/067559; Meller et al, International patent publication WO2009/020682; Polonsky et al, International patent publication WO2008/092760; Van der Zaag et al, International patent publication
  • solid state membranes with apertures or nanopores are fabricated with conventional wet etching and/or dry etching processes.
  • Wet etching includes immersion or spray etching.
  • Dry etching includes plasma etching, reactive ion etching or sputter etching.
  • the invention comprises nanopore arrays with one or more light-blocking layers, that is, one or more opaque layers.
  • nanopore arrays are fabricated in thin sheets of material, such as, silicon, silicon nitride, silicon oxide, aluminum oxide, or the like, which readily transmit light, particularly at the thicknesses used, e.g. less than 50-100 nm. For electrical detection of analytes this is not a problem.
  • the invention addresses this problem by providing nanopore arrays with one or more light-blocking layers that reflect and/or absorb light from an excitation beam, thereby reducing background noise for optical signals generated at intended reaction sites associated with nanopores of an array. In some embodiments, this permits optical labels in intended reaction sites to be excited by direct illumination.
  • an opaque layer may be a metal layer.
  • Such metal layer may comprise Sn, Al, V, Ti, Ni, Mo, Ta, W, Au, Ag or Cu, or a plurality of sub-layers of different selections such metals.
  • such metal layer may comprise Al, Au, Ag or Cu, or a plurality of sub-layers of different selections of such metals.
  • such metal layer may comprise aluminum or gold, or may comprise solely aluminum.
  • the thickness of an opaque layer may vary widely and depends on the physical and chemical properties of material composing the layer. In some embodiments, the thickness of an opaque layer may be at least 5 nm, or at least 10 nm, or at least 40 nm.
  • the thickness of an opaque layer may be in the range of from 5-100 nm; in other embodiments, the thickness of an opaque layer may be in the range of from 10-80 nm.
  • An opaque layer need not block (i.e. reflect or absorb) 100 percent of the light from an excitation beam. In some embodiments, an opaque layer may block at least 10 percent of incident light from an excitation beam; in other embodiments, an opaque layer may block at least 50 percent of incident light from an excitation beam.
  • Opaque layers or coatings may be fabricated on solid state membranes by a variety of techniques known in the art. Material deposition techniques may be used including chemical vapor deposition, electrodeposition, epitaxy, thermal oxidation, physical vapor deposition, including evaporation and sputtering, casting, and the like. In some embodiments, atomic layer deposition may be used, e.g. U.S. patent 6,464,842; Wei et al, Small, 6(13): 1406-1414 (2010), which are incorporated by reference.
  • a 1-100 nm channel or aperture may be formed through a solid substrate, usually a planar substrate, such as a membrane, through which an analyte, such as single stranded DNA, is induced to translocate.
  • a 2-50 nm channel or aperture is formed through a substrate; and in still other embodiments, a 2-30 nm, or a 2-20 nm, or a 3-30 nm, or a 3-20 nm, or a 3-10 nm channel or aperture if formed through a substrate.
  • methods and devices of the invention comprise a solid phase membrane, such as a silicon nitride membrane, having an array of apertures therethrough providing communication between a first chamber and a second chamber (also sometimes referred to as a "cis chamber” and a "trans chamber”).
  • devices of the invention comprise such solid phase membranes and a lipid bilayer disposed on a surface of the solid phase membrane.
  • diameters of the aperture in such a solid phase membrane may be in the range of 10 to 200 nm, or in the range of 20 to 100 nm.
  • such solid phase membranes further include protein nanopores inserted into the lipid bilayer in regions where such bilayer spans the apertures on the surface facing the trans chamber.
  • protein nanopores are inserted from the cis side of the solid phase membrane using techniques described herein. Bilaver Deposition
  • the step of disposing a lipid bilayer on a surface of a solid state membrane prepared in accordance with the invention can be carried out in a variety of ways including, but not limited to painting, Muller-Montal method or by way of unilamellar vesicles, e.g. Studer, Doctoral Thesis ETH No. 18473 (ETH Zurich, 2009).
  • lipid bilayers by unilamellar vesicles, for example as disclosed by the following references: Urban et al, Nano Letters, 14: 1674-1680 (2014); Im et al, Chemical Science, 1 : 688-696 (2010); Kleefen et al, Nano Letters, 10: 5080-5087 (2010); Kumar et al, Langmuir, 27: 10920-10928 (2011); and the like.
  • Stability of a lipid bilayer on a solid state nanopore array depends on several factors including the chemical nature of the support surface, the nature of the lipids, presence or absence of surface defects and/or debris, the size and number of nanopores, and the like. Stability may be determined using a variety of techniques including measurement of resistance across the array, measurement of impedance across the array (e.g. by impedance spectroscopy), measurement of capacitance across the array, as well as by characterization of the surface of an array by atomic force microscopy, and other imaging techniques, such as confocal microscopy, STED, or the like.
  • impedance across an array is at least 1 Giga-ohm and such an initially measured value is maintained on average for at least 1 hour from the time a bilayer is deposited on a surface of the solid state nanopore array, particularly whenever such surface is silicon nitride or aluminum.
  • supported lipid bilayers of the invention are at least twice as likely to maintain at least 1 Giga- ohm resistance after 1 hour than those made using a single dry etch method, wherein the surface of the first layer is exposed to wet etchant compounds.
  • impedance across an array is at least 1 Giga-ohm and such an initially measured value is maintained on average for at least 4 hours from the time a bilayer is deposited on a surface of the solid state nanopore array, particularly whenever such surface is silicon nitride or aluminum.
  • supported lipid bilayers of the invention are at least twice as likely to maintain at least 1 Giga-ohm resistance after 4 hours than those made using a single dry etch method, wherein the surface of the first layer is exposed to wet etchant compounds.
  • impedance across an array is at least 1 Giga-ohm and such an initially measured value is maintained on average for at least 8 hours from the time a bilayer is deposited on a surface of the solid state nanopore array, particularly whenever such surface is silicon nitride or aluminum.
  • supported lipid bilayers of the invention are at least twice as likely to maintain at least 1 Giga-ohm resistance after 8 hours than those made using a single dry etch method, wherein the surface of the first layer is exposed to wet etchant compounds.
  • impedance across an array is at least 1 Giga- ohm and such an initially measured value is maintained on average for at least 24 hours from the time a bilayer is deposited on a surface of the solid state nanopore array, particularly whenever such surface is silicon nitride or aluminum.
  • supported lipid bilayers of the invention are at least twice as likely to maintain at least 1 Giga-ohm resistance after 24 hours than those made using a single dry etch method, wherein the surface of the first layer is exposed to wet etchant compounds.
  • nanopore arrays comprise from 9 to 10,000 nanopores each having a cross-sectional area (usually with circular geometry) of from 3 to 1.2 x 10 4 nm 2 and spaced regularly within an area less than 2 cm 2 . In some embodiments of the foregoing, nanopore arrays comprise from 9 to 1000 nanopores each having a cross-sectional area (usually with circular geometry) of from 3 to 1.2 x 10 4 nm 2 and spaced regularly within an area less than 1 cm 2 .
  • nanopore arrays comprise from 9 to 1000 nanopores each having cross-sectional areas (usually with circular geometry) of from 3 to 1.2 x 10 4 nm 2 and spaced regularly within an area less than 0.25 cm 2 . In some embodiments of the foregoing, nanopore arrays comprise from 9 to 1000 nanopores each having cross-sectional area (usually with circular geometry) of from 3 to 1.2 x 10 4 nm 2 and spaced regularly within an area
  • lipids may be used to form lipid bilayers on nanopore arrays.
  • lipid mixtures containing phosphatidylcholine (PC) may be used to form lipid bilayers on nanopore arrays.
  • PC phosphatidylcholine
  • phosphatidylethanolamine PE
  • PG phosphatidylglycerol
  • cholesterol phosphatidylglycerol
  • lipid membranes and their formation process on a nanopore array may be characterized by impedance spectroscopy using commercially available instruments, such as the gain/phase analyzer SI 1260 and the 1296 Dielectric Interface (Solartron Instruments, Farnborough, UK).
  • devices made by methods of the invention may be used to analyze molecules by a variety of approaches including, but not limited to, electrical or optical signatures generated as a molecule of interest passes through the bore of a protein nanopore imbedded in a lipid bilayers of a device.
  • optical signatures generated as they pass, or translocate, through the bore of a protein nanopore of the device.
  • Such optical signatures may come from an analyte directly or from an optical label attached to the analyte, or both.
  • analytes detected by devices using a device of the invention include polynucleotides labeled with one of more optical labels, particularly two or more optical labels that generate distinguishable signals that permit nucleotides to which they are attached to be identified. That is, in some embodiments, articles of the invention are used in a device from determining a nucleotide sequence of a polynucleotide. Guidance for such applications is disclosed in the following references including, but not limited to, U.S. provisional patent application Ser. Nos. 62/308145; 62/372928; 62/322343; 62/421804; U.S. patent publications US2016/0076091; US2016/0122812; and the like, which references are incorporated herein by reference.
  • a device for implementing the above methods for analyzing polynucleotides typically includes a set of electrodes for establishing an electric field across the layered membrane and nanopores.
  • Single stranded nucleic acids are exposed to nanopores by placing them in an electrolyte in a first chamber, which is configured as the "cis" side of the layered membrane by placement of a negative electrode in the chamber.
  • the negatively single stranded nucleic acids are captured by nanopores and translocated to a second chamber on the other side of the layered membrane, which is configured as the "trans" side of membrane by placement of a positive electrode in the chamber.
  • such calibrations may be made using nucleic acids from the sample of templates being analyzed (instead of, or in addition to, predetermined standard sequences). In some embodiments, such calibrations may be carried out in real time during a sequencing run and the applied voltage may be modified in real time based on such

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Abstract

L'invention concerne des procédés de fabrication de bicouches lipidiques stables soutenues par un réseau de nanopores à l'état solide. Des procédés donnés à titre d'exemple consistent à masquer une première couche sur un support plan afin de former des zones de gravure à sec ; à graver à sec les zones de gravure à sec afin de former un réseau d'ouvertures s'étendant à l'intérieur de, mais pas à travers, la première couche ; à masquer un second côté du corps de support plan afin de former une zone de gravure alignée avec le réseau d'ouvertures ; à effectuer une gravure humide de la zone de gravure afin d'exposer une surface de la première couche ; à graver à sec la surface exposée de la première couche à une profondeur chevauchant les ouvertures de telle sorte que des ouvertures du réseau fournissent une communication fluidique à travers la première couche ; et à disposer une bicouche lipidique sur une surface de la première couche sur un côté opposé au support plan qui englobe le réseau d'ouvertures.
PCT/US2018/030708 2017-05-26 2018-05-02 Bicouches lipidiques stables sur des réseaux de nanopores Ceased WO2018217419A1 (fr)

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