WO2018208040A2 - High-performance harmful substance collection filter and manufacturing method therefor - Google Patents

Abstract

The present invention relates to a harmful substance collection filter, which comprises a surface-treated nanofiber, thereby increasing chemical binding strength between a target substance and the nanofiber, and to a manufacturing method therefor, wherein collecting power can be enhanced by surface-treating the nanofiber to change physical and chemical structures of the nanofiber even without using a catalyst.

Description

High performance hazardous material collection filter and its manufacturing method

The present invention relates to a harmful substance collection filter and a method of manufacturing the same, and more particularly, to include a surface-treated nanofibers to improve chemical bonding between the target material and the nanofibers, and to reduce the flow of air according to the diameter reduction of the nanofibers. The present invention relates to a filter that improves the ability to collect harmful substances by improving.

A filter is defined as a thin film that filters foreign matter in a liquid or gas. In general, the method of removing harmful substances including fine dust from the gas can be divided into electric dust collection type and dry and wet filter type.

Electrostatic precipitating is a method of adsorbing fine dust in the air to absorb dust using a force such as static electricity, and is selectively charged with (+) and (-) to attract and attract dust to a parallel and dense metal dust collecting plate. Accordingly, the collected fine dust is agglomerated into a mass by molecular cohesion.

The electrostatic precipitating method has an advantage in that the inside is simple, so there is little noise, and when a fan having the same capacity is used, the amount of air after the dust collection is large, and thus no need to replace the filter. However, the metal dust collecting plate that collects dust should be cleaned periodically, and power must be supplied to have a dust collecting effect, and the installation space is large.

Dry filter is a method of filtering dust in the air like a filter paper using a cloth or paper containing a small hole. The filter can be classified into a prefilter, a medium filter, a HEPA (0.3 micrometer), and a ULPA (0.12 micrometer) according to how small dust can be filtered out.

HEPA and ULPA filters are very small holes through which the air passes to filter out fine dust, but the power to pass through the air must be very large, which requires a large amount of power required, and glass fiber dust is generated when the filter is manufactured.

Wet filter type sprays liquid such as water into small vapor as if spraying with sprayer to combine water droplets and dust to remove dust, or absorbs liquid such as water to filter to remove dust by contact with water and dust. That's the way it is. However, the wet filter type has the disadvantage that the efficiency is low in the place where the air speed is fast.

In order to solve the shortcomings of the conventional filter as described above, research on various methods of manufacturing nano-size fibers and applying them to the filter is being conducted. Nanofiber based filters have the advantage that the specific surface area is very large and thin compared to the filter media of the existing filter having a large diameter, so that the pressure loss of air is small and flexible. However, the nanofiber based filter has a limitation that it is difficult to control the conditions for production and performance improvement.

Accordingly, the prior art (Korean Patent Publication No. 10-2011-0049952) is formed by the first heat treatment and crushing the electrospun nanofibers in the form of chips, and forms a mixed catalyst in which the nanofibers and the particulate catalyst of the chip detector, Although a mixed catalyst filter having pores by secondary heat treatment has been described, this conventional technique has a disadvantage in that the manufacturing process is complicated and there is a limitation in that an additional catalyst is required.

In addition, the prior art (US Patent Publication No. 2016/0166959) describes an air filter for coating an organic fiber with a conductive material, but the coating of the organic fiber has no effect on the chemical bonding force between the fine dust (target material) and the air filter. There was a limit that does not have.

An object of the present invention is to surface-treated on nanofibers to increase the chemical bonding force between the harmful substances (subject material) and nanofibers including fine dust and to improve the performance of the conventional nanofiber filter and a filter for collecting harmful substances and its preparation To provide a method.

It is also an object of the present invention to provide an air purifying filter excellent in collecting power of harmful substances including fine dust, a harmful substance collecting filter capable of providing an air purifying apparatus to which the air purifying filter is applied, and a manufacturing method thereof.

In addition, an object of the present invention is to provide a harmful substance collection filter and a method for manufacturing the same that can ensure a smooth air-flow (air-flow) by reducing the diameter of the nanofiber by surface treatment on the nanofiber.

In addition, an object of the present invention is to provide a harmful material collection filter and a method for manufacturing the same, which can improve the collecting power by changing the physical and chemical structure of the nanofiber without using a catalyst by surface treatment on the nanofiber.

It is also an object of the present invention to provide a noxious substance collection filter and its manufacturing method which can extend the life of the filter by increasing the specific surface area due to the reduction in diameter of the surface-treated nanofibers when using the same power.

The method of manufacturing a noxious substance trap filter according to an embodiment of the present invention includes forming a nanofiber and surface treating the nanofiber to increase the chemical bonding force between the target material and the nanofiber, wherein the surface The step of treating is characterized in that by inducing changes in the physical and chemical properties of the nanofibers to improve the capture power.

In addition, the method for manufacturing a harmful substance collection filter according to an embodiment of the present invention may further include applying the surface-treated nanofibers to the filter.

The surface treatment may increase the specific surface area and minimize the pressure loss of air by reducing the diameter of the nanofibers by surface treatment.

The surface treatment may induce a change in the characteristics of the nanofibers by treating the surface of the nanofibers with reactive ion etching (RIE).

The surface treatment may be performed by surface treatment of the reactive ion etching to form an amide group (-CONH), ester group (-COOR) and carboxyl group (-COOH) on the nanofibers to increase the chemical bonding force according to the dipole moment increase Can be.

The surface treatment may improve the collection force due to an increase in the chemical bonding force between the target material and the nanofiber by adjusting the conditions of the surface treatment.

The surface treatment may induce a property change of the nanofibers by subjecting the nanofibers to the surface treatment of a thermal annealing process.

In the surface treatment, the surface treatment of the plasma coating may be induced on the nanofibers.

The surface treatment may induce a characteristic change of the nanofibers by treating the surface of a self-assembly monolayer (SAM) patterned on the nanofibers to form a plurality of lines.

The surface treatment may induce a change in the properties of the nanofibers by the surface treatment of conductive nanoparticle coating or substitution on the nanofibers.

A noxious substance trap filter according to an embodiment of the present invention is a noxious substance trap filter including nanofibers, characterized in that it comprises the nanofiber surface treated to increase the chemical bonding force between the target material and the nanofibers. .

The surface-treated nanofibers may be reduced in diameter by the surface treatment to increase specific surface area, thereby minimizing air pressure loss.

The surface-treated nanofibers may be changed in physical and chemical properties by the surface treatment of reactive ion etching (RIE).

The surface treated nanofibers may be changed in physical and chemical properties by the surface treatment of a thermal annealing process.

The surface-treated nanofibers may be changed in physical and chemical properties by the surface treatment of a plasma coating.

The surface-treated nanofibers may be patterned to change physical and chemical properties by the surface treatment of a self-assembly monolayer (SAM) forming a plurality of lines.

The surface treated nanofibers may be changed in physical and chemical properties by the surface treatment of conductive nanoparticle coating or substitution.

Hazardous substance collection filter according to another embodiment of the present invention is characterized in that it comprises a filter surface-treated to increase the chemical bonding force with the target material.

According to an embodiment of the present invention, by surface treatment on the nanofibers to increase the chemical bonding force between the harmful material (target material) and the nanofibers, including the fine dust, it is possible to improve the performance of the conventional nanofiber filter.

In addition, according to an embodiment of the present invention, it is possible to provide an air purifying filter excellent in collecting power of harmful substances including fine dust, and an air purifying device to which the air purifying filter is applied.

In addition, according to an embodiment of the present invention, by surface treatment on the nanofibers can reduce the diameter of the nanofibers to ensure a smooth air-flow (air-flow).

In addition, according to the embodiment of the present invention, by collecting the surface of the nanofibers without changing the physical and chemical structure of the nanofibers without using a catalyst, it is possible to improve the capture power.

In addition, according to an embodiment of the present invention, when using the same power, it is possible to extend the life of the filter by increasing the specific surface area due to the reduction of the diameter of the surface-treated nanofibers.

In addition, according to an embodiment of the present invention, through the surface treatment technology of the nanofibers, the chemical bonding force with the harmful substances and the physical change due to the reduction of the diameter of the nanofibers to improve the trapping of harmful substances, and to reduce the diameter of the nanofibers It provides a smooth air flow (minimizing pressure loss) and can be expected to increase the life of the filter at the same time.

1 is a flowchart illustrating a method of manufacturing a hazardous substance collection filter according to an exemplary embodiment of the present invention.

2A and 2B illustrate examples of nanofibers included in a hazardous substance collection filter according to an exemplary embodiment of the present invention.

3 is a graph showing the performance change of the surface-treated nanofibers according to the embodiment of the present invention.

Figure 4 shows the image results for the characteristic change of the surface-treated nanofibers according to the embodiment of the present invention.

5 shows the results of surface modified XPS data of surface treated nanofibers according to an embodiment of the present invention.

6 illustrates changes in contact angles of nanofibers before and after surface treatment according to an embodiment of the present invention.

Figure 7 shows the performance change of the filter comprising a surface treated nanofiber according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited or limited by the embodiments. Also, like reference numerals in the drawings denote like elements.

Also, the terminology used herein is a term used to properly express a preferred embodiment of the present invention, which may vary depending on a viewer, an operator's intention, or customs in the field to which the present invention belongs. Therefore, the definitions of the terms should be made based on the contents throughout the specification.

1 is a flowchart illustrating a method of manufacturing a hazardous substance collection filter according to an exemplary embodiment of the present invention.

Referring to FIG. 1, in step 110, nanofibers are formed.

Nanofibers, for example, are ultrafine yarns with diameters of only tens to hundreds of nanometers (nm), and can be used as filters because of their large surface area relative to their volume. Here, the material and type of the nanofibers are not limited. According to an embodiment, the method for preparing a hazardous substance collecting filter according to an embodiment of the present invention may use a membrane or microfiber in a larger range than the nanofibers, but the present invention will focus on nanofibers.

According to an embodiment, step 110 is a method for forming nanostructured material by block segment, nanostructured material forming method by self-assembly, nanofiber forming method by polymerization using silica catalyst, melt spinning, solvent extraction spinning, nonwoven spinning, Nanofibers may be formed using at least one of a nanofiber forming method by air jet spinning, flash spinning and precursor-based gas phase growth methods, and a nanofiber forming method by electrospinning a polymer solution or a melt.

In step 120, the nanofibers are surface treated to increase the chemical bonding force between the target material and the nanofibers. In addition, step 120 induces a change in physical and chemical properties of the nanofibers to improve the capture power.

In step 120, the method for manufacturing a hazardous material filter according to an embodiment of the present invention may increase the specific surface area by minimizing the diameter of the nanofiber by surface treatment and minimize the pressure loss of air to reduce the power required.

For example, step 120 may be a step of surface treatment of reactive ion etching (RIE) on the nanofibers to induce a change in the properties of the nanofibers.

Specifically, in step 120, the surface treatment of the reactive ion etching may form an amide group (-CONH), ester group (-COOR) and carboxyl group (-COOH) on the nanofibers to increase the chemical bonding force according to the increase in the dipole moment, By controlling the surface treatment time, the collection force may be improved by increasing the chemical bonding force between the target material and the nanofibers.

The reactive ion etching (RIE) is carried out at 50 sccm, 50 W, 100 mtorr, 30 seconds to 1 cycle, 2 cycles and 3 cycles of processing conditions (type of gas and flow rate, output, process time, etc.) in an oxygen (O ₂ ) atmosphere. Can be performed accordingly.

According to an embodiment, the process sequence of reactive ion etching loads the specimen, identifies the specimen loaded in the chamber, and then sets the set reactive ion etching environmental conditions (vacuum degree, type and amount of gas, etc.). For example, the reactive ion etching environmental conditions may form conditions in the chamber by flowing 50 sccm of oxygen gas (O ₂ gas) at a predetermined vacuum degree (100 mtorr).

Subsequently, the plasma is floated at an output of 50 W and surface treated, and the specimen is recovered. From the surface treatment, the nanofiber surface is changed to hydrophilic, and the thickness (diameter) of the nanofiber is reduced.

Accordingly, the method for producing a hazardous substance collection filter according to an embodiment of the present invention may induce physical and chemical property changes of nanofibers by surface treatment of reactive ion etching on nanofibers.

Here, the physical property change is that the thickness (diameter) of the nanofibers is reduced, and the thickness (diameter) of the nanofibers is reduced to ensure a smooth air flow to the filter. In addition, when the same power is used, the collection efficiency can be improved, and the specific surface area can be increased to extend the life of the filter.

In addition, the chemical property change is to increase the attraction and hydrophilicity with the target material, it is provided with the effect of improving the trapping ability (capturing force or adsorption force) of the target material.

The target material may refer to a harmful substance in the air such as fine dust, and is not limited to the concentration of fine dust, suspended dust (fine dust, PM10) or ultrafine dust (PM2.5).

Step 120 may be a step of surface treatment of the thermal processing (thermal annealing process) to the nanofibers to induce a change in the properties of the nanofibers.

According to an embodiment, the heat treatment process is performed under an inert atmosphere such as nitrogen and argon, and may be performed at a temperature of 275 ° C to 750 ° C. In addition, the heat treatment process may be performed for 1 to 2 hours at a heating rate of 7 ° C / min to 20 ° C / min and 5 ° C / min to 20 ° C / min heat treatment under a pressure condition of the atmosphere. However, since the time and temperature of the heat treatment process may vary according to various embodiments, the present invention is not limited thereto.

Accordingly, step 120 is a surface treatment of the nanofiber heat treatment process, the nanofiber may be significantly reduced in diameter and length than before heat treatment by the carbonization of the polymer after the heat treatment.

Step 120 may be a step of inducing a characteristic change of the nanofibers by surface treatment of a plasma coating for plasma vapor deposition of the mixed gas on the nanofibers.

For example, the plasma coating may use any one or a mixture of carbon fluoride (CF ₄ ), argon (Ar), xenon (Ze), helium (He), nitrogen (N ₂ ), and oxygen (O ₂ ). Plasma vapor deposition on the nanofibers.

Accordingly, the surface-treated nanofibers of the plasma coating may activate the surface to induce chemical property changes, and the hydrophilicity may be improved by the oxygen plasma coating.

Step 120 may be a step of inducing a characteristic change of the nanofibers by surface treatment of a self-assembly monolayer (SAM) patterned on the nanofibers to form a plurality of lines.

The surface treatment of the self-assembled monomolecular film is an organic monomolecular film formed spontaneously, for example, by using a spontaneous reaction of a silane with a surface having a hydroxy functional group to fix a portion bonded to the silane to the surface.

Step 120 may be a step of inducing a property change of the nanofibers by coating or replacing the surface of the nanofibers with conductive nanoparticles.

In the method of manufacturing a harmful material collection filter according to an embodiment of the present invention, the surface treatment of nanofibers is intended to increase the chemical bonding strength with a target material according to physical and chemical property changes.

Accordingly, the surface treatment method using at least one of the above-described reactive ion etching, heat treatment process, plasma coating, self-assembled monolayer and conductive nanoparticles is preferably used in the market, but the physical process of the nanofibers And other processes or methods for changing chemical properties may be applied, but are not limited thereto.

The method for preparing a hazardous substance collection filter according to an embodiment of the present invention may include applying the surface treated nanofibers to the filter (step 130).

For example, step 130 may be a step of coating and applying the surface-treated nanofibers to the filter support.

2A and 2B illustrate examples of nanofibers included in a hazardous substance collection filter according to an exemplary embodiment of the present invention.

More specifically, Figure 2a shows an example of the surface treatment process for the nanofibers included in the harmful substance collection filter according to an embodiment of the present invention, Figure 2b shows a single nanofiber in the process performed in Figure 2a It is shown enlarged.

Hazardous substance trap filter 200 according to an embodiment of the present invention includes a nanofiber surface treated to increase the chemical bonding force between the target material and the nanofiber.

2A and 2B, the nanofibers 210 in the harmful substance collection filter 200 according to the embodiment of the present invention are ultra-fine yarns having diameters of only tens to hundreds of nanometers (nm), compared to volume. Its large surface area can be used as a filter. Here, the material and type of the nanofibers are not limited.

The nanofibers 210 are surface treated (A) to increase the chemical bonding strength with the target material, and the harmful substance collecting filter 200 according to the embodiment of the present invention includes the nanofibers 220 treated with the surface.

For example, the surface-treated nanofibers 220 may include reactive ion etching (RIE), a thermal annealing process, a plasma coating for plasma vapor deposition of a mixed gas, and a plurality of patterned nanofibers. The physical and chemical properties may be changed by surface treatment (A) of at least one of a self-assembly monolayer (SAM) forming a line, and coating or substitution of conductive nanoparticles.

 Accordingly, the harmful substance collection filter 200 according to the embodiment of the present invention by surface treatment (A) to the nanofibers 210, the physical and chemical properties of the surface-treated nanofibers 220 can be induced. .

Here, the physical property change is to reduce the thickness (diameter) of the surface-treated nanofibers 220, the thickness (diameter) of the surface-treated nanofibers 220 is reduced to ensure a smooth air flow to the filter. Can be. In addition, when the same power is used at the same time, the collection efficiency can be improved, and the specific surface area can be increased to extend the life of the filter.

In addition, the chemical property change is to increase the attraction and hydrophilicity between the target material and the surface-treated nanofibers 220, it is provided with the effect of improving the trapping ability (capture or adsorption) of the target material.

However, the surface treatment method (A) using at least one of the above-described reactive ion etching, heat treatment process, plasma coating, self-assembled monolayer and conductive nanoparticles is preferably used in the market. Other processes or methods for changing the physical and chemical properties of the nanofibers 220 may be applied, but are not limited thereto.

3 is a graph showing the performance change of the surface-treated nanofibers according to the embodiment of the present invention.

More specifically, FIG. 3 measures the change in performance for nanofibers without surface treatment (without RIE treatment), and changes in performance for 30s RIE treatment for surface treatment of reactive ion etching (RIE) for 30 seconds. Was measured. In addition, the change in performance for the 60s RIE treatment of the surface treatment of the reactive ion etching (RIE) for 60 seconds was measured, and the nanofibers (90s RIE treatment) of the surface treatment of the reactive ion etching (RIE) for 90 seconds. The change in performance for was measured.

Here, 30 second of surface treatment was made into 1 cycle, 60 second was 2 cycles, and 90 second was 3 cycles.

Referring to FIG. 3, the x-axis (Operational time) of the graph represents time, and the y-axis (Residual PM _2.5 concentration in chamber) represents the value of the fine dust (target material) residual concentration in the closed chamber.

As shown in FIG. 3, it can be seen that the value of fine dust residual concentration in the closed chamber decreases with time of surface treatment of 0 seconds, 30 seconds, 60 seconds and 90 seconds, thereby improving the fine dust collection performance of the nanofibers. have. In addition, it can be seen that the collection time of the fine dust is also shortened (collecting the fine dust faster and faster) according to the surface treatment time.

Accordingly, the method for manufacturing a hazardous substance collection filter according to an embodiment of the present invention may produce nanofibers having improved collection power in proportion to an increase in time of surface treatment of reactive ion etching (RIE).

Figure 4 shows the image results for the characteristic change of the surface-treated nanofibers according to the embodiment of the present invention.

More specifically, FIG. 4 shows image results for nanofibers whose physical and chemical properties are changed by surface treatment.

FIG. 4A is an image of nanofibers without surface treatment (without RIE treatment), and FIG. 4B is an image of 30s RIE treatment of surface treatment of reactive ion etching (RIE) for 30 seconds. It is. In addition, FIG. 4C shows an image of a nanofiber (60s RIE treatment) surface-treated with reactive ion etching (RIE) for 60 seconds, and FIG. 4D shows nano-surface treatment of reactive ion etching (RIE) for 90 seconds. Images of fibers (90s RIE treatment) were obtained.

Here, 30 second of surface treatment was made into 1 cycle, 60 second was 2 cycles, and 90 second was 3 cycles.

The mean diameter of the unfinished nanofibers in FIG. 4A represents 449 ± 43 nm, and the average diameter of the surface treated nanofibers of reactive ion etching (RIE) for 30 seconds in FIG. 4B is 410 ± 39 nm. Indicates.

In addition, the average diameter of the surface-treated nanofibers of reactive ion etching (RIE) for 60 seconds in FIG. 4C represents 347 ± 43 nm, and the surface-treated nanofibers of reactive ion etching (RIE) for 90 seconds in FIG. 4D. The average diameter of 305 represents 305 ± 37 nm.

Accordingly, the method for manufacturing a harmful substance collection filter according to an embodiment of the present invention may produce nanofibers whose diameter (thickness) decreases in proportion to an increase in time of surface treatment of reactive ion etching (RIE).

5 shows the results of surface modified XPS data of surface treated nanofibers according to an embodiment of the present invention.

More specifically, FIG. 5A shows the results of surface modified X-ray Photoelectron Spectroscopy (XPS) data of unfinished nanofibers, and FIG. 5B shows surface treated nanoparticles of reactive ion etching (RIE) for 30 seconds. The results of the surface modified XPS data of the fibers are shown, and FIG. 5C shows the results of the surface modified XPS data of the nanofibers surface treated with reactive ion etching (RIE) for 90 seconds.

Here, 30 second surface treatment was used as 1 cycle, and FIG. 5C performed 3 cycles of 30 second surface treatment.

Referring to FIG. 5, the x-axis (Binding energy) of the graph represents the binding energy, and the y-axis (Intensity) represents the intensity.

As shown in FIG. 5, the graphs of the amide group (-CONH), ester group (-COOR) and carboxyl group (-COOH) formed on the nanofibers vary depending on the surface treatment time of 0, 30, and 90 seconds. You can check it. It can be seen from this that a chemical change of the surface-treated nanofibers of reactive ion etching (RIE) was induced.

The prior art of coating existing organic fibers with a conductive material has no chemical change on the surface of the nanofibers, so there is no change in the graph as shown in FIG.

On the other hand, the manufacturing method of the harmful substance collection filter according to the embodiment of the present invention is a chemical change (increase in the chemical bonding force with the target material) and physical change (on the nanofiber surface with time of surface treatment of reactive ion etching (RIE) ( Reduced air pressure loss, longer life), thereby improving the performance of the filter.

6 illustrates changes in contact angles of nanofibers before and after surface treatment according to an embodiment of the present invention.

More specifically, FIG. 6A shows the contact angle for the nanofibers without surface treatment, and FIG. 6B shows the contact angle for the nanofibers with surface treatment of reactive ion etching (RIE).

The average contact angle with respect to water of the unfinished nanofibers in FIG. 6A represents 82 or more, and the average contact angle with respect to water of the surface treated nanofibers of reactive ion etching (RIE) in FIG. 6B shows less than 10. FIG.

As shown in FIG. 6, it can be seen that the nanofibers without surface treatment have higher hydrophobicity than the nanofibers with surface treatment of reactive ion etching (RIE).

Accordingly, the method for manufacturing a hazardous substance collection filter according to an embodiment of the present invention can produce nanofibers having improved hydrophilicity by surface treatment of reactive ion etching (RIE), and the target material by nanofibers having improved hydrophilicity. Collection power can be improved.

Figure 7 shows the performance change of the filter comprising a surface treated nanofiber according to an embodiment of the present invention.

More specifically, FIG. 7 shows the surface of nanofibers (0 seconds) untreated, the surface of nanofibers (30s surface treated) with reactive ion etching (RIE) for 30 seconds, and the surface of reactive ion etching (RIE) for 60 seconds. Fine dust collection efficiency, pressure loss, reference value, contact value and performance index for the treated nanofibers (60s surface treatment) and the nanofibers treated with reactive ion etching (RIE) for 90 seconds. The experimental results are shown in a table.

Referring to Figure 7, according to the surface treatment time of 0 seconds, 30 seconds, 60 seconds and 90 seconds, the fine dust collection efficiency of the nanofibers increases, the pressure loss is reduced, and WHO ( It can be seen that the time to reach the standard value (25 ug / m3 or less) of the WHO decreases.

In addition, it indicates that the contact angle is greatly reduced to an unmeasurable level (hydrophilicity) at 83 °, which is calculated from the QF value of the air filter, and is represented by 0.1264 to 30 seconds, 60 seconds and 90 seconds before surface treatment (0 seconds). It can be seen that it increases to 0.1564 with the time of the surface treatment of the second.

Accordingly, in the method of manufacturing the hazardous material collection filter according to the embodiment of the present invention, as the time of surface treatment of reactive ion etching (RIE) increases, the fine dust collection efficiency increases, the pressure loss decreases, and the WHO reference value Nanofibers can be produced in which time to reach is reduced and figure of merit increases.

Therefore, the surface-treated nanofibers can be used to manufacture a filter having improved collection power by increasing the chemical bonding strength with the target material, and can be utilized as a more efficient air cleaning filter and application to an air cleaning device.

Although the embodiments have been described by the limited embodiments and the drawings as described above, various modifications and variations are possible to those skilled in the art from the above description. For example, the described techniques may be performed in a different order than the described method, and / or components of the described systems, structures, devices, circuits, etc. may be combined or combined in a different form than the described method, or other components. Or even if replaced or substituted by equivalents, an appropriate result can be achieved.

Therefore, other implementations, other embodiments, and equivalents to the claims are within the scope of the claims that follow.

Claims (18)

Forming nanofibers; And Surface treating the nanofibers to increase the chemical bonding force between the material and the nanofibers, The surface treatment step Method of producing a hazardous substance collecting filter, characterized in that to improve the capture power by inducing changes in the physical and chemical properties of the nanofibers. The method of claim 1, Applying the surface treated nanofibers to a filter Method for producing a hazardous substance collection filter further comprising. The method of claim 1, The surface treatment step The surface treatment increases the specific surface area by reducing the diameter of the nanofibers, and minimizes the pressure loss of the air manufacturing method of the harmful substance collection filter. The method of claim 1, The surface treatment step The surface treatment of the reactive ion etching (RIE) to the nanofibers, the method of producing a hazardous substance collecting filter, characterized in that to induce a change in the properties of the nanofibers. The method of claim 4, wherein The surface treatment step Surface treatment of the reactive ion etching to form an amide group (-CONH), ester group (-COOR) and carboxyl group (-COOH) on the nanofiber to produce a harmful substance collecting filter to increase the chemical bonding force according to the increase of the dipole moment Way. The method of claim 5, The surface treatment step By adjusting the conditions of the surface treatment, the method for producing a harmful substance collecting filter, characterized in that to improve the collection force according to the increase in the chemical bonding force between the target material and the nanofibers. The method of claim 1, The surface treatment step The surface treatment of the nanofibers in the thermal annealing process (thermal annealing process) to produce a harmful substance collection filter, characterized in that to induce a change in the properties of the nanofibers. The method of claim 1, The surface treatment step The surface treatment of the plasma coating (plasma coating) on the nanofibers to induce a change in the characteristics of the nanofibers manufacturing method of the toxic substance collection filter. The method of claim 1, The surface treatment step And a surface treatment of a self-assembly monolayer (SAM) patterning the nanofibers to form a plurality of lines, thereby inducing a change in the properties of the nanofibers. The method of claim 1, The surface treatment step The surface treatment of the conductive nanoparticle coating or substitution of the nanofibers to induce a change in the properties of the nanofibers, characterized in that the manufacturing method of the harmful substance collection filter. In the harmful substance collection filter containing nanofibers, And the nanofibers surface-treated to increase the chemical bonding force between the target material and the nanofibers. The method of claim 11, The surface-treated nanofibers The diameter reduction by the surface treatment to increase the specific surface area to minimize the pressure loss of air filter. The method of claim 12, The surface-treated nanofibers A hazardous substance collection filter, characterized in that physical and chemical properties are changed by the surface treatment of reactive ion etching (RIE). The method of claim 12, The surface-treated nanofibers A hazardous substance collection filter, characterized in that physical and chemical properties are changed by the surface treatment of a thermal annealing process. The method of claim 12, The surface-treated nanofibers A hazardous substance collection filter, characterized in that physical and chemical properties are changed by the surface treatment of a plasma coating. The method of claim 12, The surface-treated nanofibers And a physical and chemical property change by the surface treatment of a self-assembly monolayer (SAM) patterned to form a plurality of lines. The method of claim 12, The surface-treated nanofibers The hazardous material collection filter, characterized in that physical and chemical properties are changed by the surface treatment of conductive nanoparticle coating or substitution. A hazardous substance collection filter, characterized in that it comprises a filter surface-treated to increase the chemical bonding force with the target material.

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