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WO2018138487A1 - Ensembles pompes ayant des joints d'étanchéité de stator - Google Patents

Ensembles pompes ayant des joints d'étanchéité de stator Download PDF

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Publication number
WO2018138487A1
WO2018138487A1 PCT/GB2018/050192 GB2018050192W WO2018138487A1 WO 2018138487 A1 WO2018138487 A1 WO 2018138487A1 GB 2018050192 W GB2018050192 W GB 2018050192W WO 2018138487 A1 WO2018138487 A1 WO 2018138487A1
Authority
WO
WIPO (PCT)
Prior art keywords
seal
longitudinal
height
gasket
pump assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/GB2018/050192
Other languages
English (en)
Inventor
Alan Ernest Kinnaird Holbrook
Nigel Paul Schofield
Ikram Murtaza MIRZA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to CN201880008496.3A priority Critical patent/CN110199089A/zh
Priority to EP18702791.7A priority patent/EP3574186A1/fr
Priority to KR1020197021835A priority patent/KR20190107041A/ko
Publication of WO2018138487A1 publication Critical patent/WO2018138487A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F01C19/005—Structure and composition of sealing elements such as sealing strips, sealing rings and the like; Coating of these elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C19/00—Sealing arrangements in rotary-piston machines or engines
    • F01C19/12—Sealing arrangements in rotary-piston machines or engines for other than working fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2240/00—Components
    • F05B2240/57—Seals

Definitions

  • the field of the invention relates to pumps and in particular to seals for a stator of a pump.
  • stator joint seals for sealing between the stator half shells and annular stator seals for sealing between the stator and head pieces.
  • the stator half shells have formations for holding the longitudinal seals in place against the annular seals, thereby improving the seal at this T-junction.
  • a first aspect of the present invention provides a vacuum pump assembly comprising: two half shell stators defining one or more vacuum pumping chambers; end pieces mounted at either end of said two half shell stators;
  • longitudinal seals for sealing between longitudinal contact faces of said two half shell stators on either side of said pumping chamber; and at least one further seal for sealing between one of said end pieces and said stator half shells; wherein said longitudinal seals have end portions that abut against said at least one further seal; and an aspect ratio of width to height of each of said longitudinal seals and said further seal is between 1 :1 and 2:1 .
  • the inventors of the present invention recognised that an interface between two different seals will be affected by the stress and compression on each seal, variations in the stress and compression on each seal causing corresponding changes in their elastomeric properties and in their distortion.
  • said further seal is an annular seal and comprises an O- ring with an aspect ratio of 1 :1 and said longitudinal seal has a rectangular cross section.
  • the seal between the end pieces and the stator half shells may have an annular form and in some cases may comprise an O-ring.
  • O-rings are effective seals and are readily available. They generally have a circular cross-section giving them an aspect ratio of 1 :1 .
  • the longitudinal seal by contrast, will have a rectangular cross-section that may be a square and will have an aspect ratio of between 1 :1 and 2:1 .
  • the longitudinal seal may be in the form of a gasket and gaskets are generally formed with a rectangular cross section having a large width to height aspect ratio. Providing the seal with an aspect ratio that is similar to the aspect ratio of the O-ring provides for effective sealing across large temperature ranges due to the similar stress experienced within the seals. Furthermore, the low width to height aspect ratio in the longitudinal seal leads to reduced stress when compared to a conventional gasket, which has a width-to-height aspect ratio of 3:1 or higher, leading to longer seal life.
  • said further seal comprises an annular rectangular seal and said longitudinal seal and said annular seal each have an aspect ratio of width to height of between 1 :1 and 2:1 .
  • a rectangular cross section seal is used as the further seal. Where a rectangular seal is used, then the cross section of the two seals may be very closely matched.
  • said longitudinal seal has an aspect ratio of width to height of between 1 .1 :1 and 1 .3:1 .
  • An aspect ratio of the longitudinal seal that is slightly greater than 1 makes it easy to manipulate and place in the groove. However, making it close to 1 provides for a closer match where the further seal is an O-ring, providing for more uniform stress across the junction. Furthermore, although having an aspect ratio of slightly greater than 1 makes it easy to manipulate, locate and keep within a groove, making it close to 1 provides for a thicker seal which provides a more uniform stress profile particularly towards the end of the seal, where the stress profile is important. A lower stress also reduces chemical susceptibility of the seal which increases with stress.
  • said further seal also has an aspect ratio of width to height of between 1 .1 :1 and 1 .3:1 .
  • said further seal and said longitudinal seal have cross sectional areas of a similar order, differing from each other by less than 50%, preferably by less than 30% and in some embodiments by less than 1 0%.
  • the maximum possible area of the interface between the seals is limited by the cross sectional area of the seal with the smallest cross-section.
  • providing similar cross-sectional areas avoids the interface area being unduly limited by one particularly low cross-sectional area.
  • this provides a balance in the pressures within each seal, allowing for the interface to maintain its shape, and where it is well matched to provide a flat sealing surface.
  • said longitudinal seal comprises a flat end surface when not compressed for abutting with said further seal.
  • the end surface of the longitudinal seal may have a contoured shape for matching with, for example, an O-ring, in some embodiments it comprises a flat surface.
  • a flat surface is easier to manufacture and easier to manipulate.
  • the end of the longitudinal seal may extend further than the ends of the stator half shells and be pushed back to align with the end surface of the stator half-shells using a tool. Where the end surface is flat then this procedure and the manufacture of the tool is made simpler.
  • said longitudinal seal is manufactured to a height of more than 2mm with a tolerance of 0.07mm and said groove is manufactured to have a depth that is 20% smaller than said height of said gasket with a tolerance of 0.05mm, said compression variation due to said tolerances being below 7%.
  • said longitudinal seal is manufactured to have a height of more than 2.5mm with a tolerance of 0.07mm and said groove is manufactured to have a depth that is 20% smaller than said height of said gasket with a tolerance of 0.05mm, said compression variation due to said tolerances being below 5.5%.
  • the minimum height of the seal is set to 2 millimetres and the tolerance is 0.07 millimetres and the groove is manufactured to have a depth that is 20% smaller than this height with a tolerance of 0.05 millimetres
  • compression variations due to the tolerances are limited to being below 7 percent.
  • the longitudinal seal is manufactured to have a height of more than 2.5 millimetres with similar tolerances then the compression variations due to the tolerances fall below 5.5 percent.
  • the height is increased still further to 3 millimetres with the same tolerances then the compression variation falls to below 4.7 percent.
  • a width of between 2.5 millimetres and 3.5 millimetres, preferably 3 millimetres provides the desired aspect ratio.
  • embodiments of this invention are particularly applicable to such vacuum pumps.
  • Figure 1 illustrates sections through gaskets of the prior art that have a width of 3mm and height of 1 mm in a free and a compressed state
  • Figure 2 illustrates sections through gaskets according to an embodiment in the free and in the compressed state
  • Figure 3 shows the effect of tolerances on gaskets of the prior art and gaskets according to embodiments
  • Figures 4a and 4b shows a cross sectional view of the interface between the gasket and the O-ring for longitudinal seals of different aspect ratios
  • Figure 5 shows a pump assembly with a horizontal split line
  • Figure 6 shows an isometric view of a pump assembly having seals according to an embodiment
  • Figure 7 shows the profile of a longitudinal seal according to an embodiment.
  • Embodiments propose longitudinal seals or gaskets that are suitable for use across a large temperature range and have a low width to height aspect ratio providing low seal distortion and low seal stress.
  • This low aspect ratio is provided by providing a longitudinal seal with an increased height or thickness compared to conventional stator shell gaskets, and not only does this decrease the stress within the gasket but it requires a deeper groove and this leads to easier placement of the seal within the groove.
  • the reduced compression variation leads to more predictable surface pressure on the end surfaces which abut, or mate, with the end piece seal, allowing better stress matching and a seal interface geometry which varies less with variations in operational condition variations such as variations in temperature.
  • the reduction in internal stress due to the reduced width to height aspect ratio also reduces chemical susceptibility and increases the lifetime of the seal in that permanent set, i.e. irreversible deformation, occurs more quickly as stress increases.
  • cross sectional area of the two seals is similar this also provides improved stress matching and reduced variations in interface geometry leading to improved seal effectiveness over a greater temperature range. Furthermore, a similar sized cross sectional area of the two seals also provides for an increased interface area as the maximum size of this is limited by the cross sectional area of the seal with the smaller cross sectional area.
  • a seal with a low width to height aspect ratio leads to an increase in height of the longitudinal seal compared to many conventional seals.
  • An increase in height in the seal leads to a corresponding increase in groove depth, and not only does this make the seal easier to place and retain in the groove but it reduces variations that arise due to manufacturing tolerances.
  • Figure 1 diagrammatically shows a cross section through gaskets having an uncompressed height of 1 mm and width of 3mm according to the prior art.
  • longitudinal gaskets are compressed as occurs when mounted between two stator shells of a pump assembly, then they expand within the width of the groove and experience relatively high distortion and stress.
  • the edge portions of the seal have a relatively sharp cross section.
  • the end portions of the seal that abuts with the annular seal will be distorted in a similar way and this sharp cross section may dig into the corresponding annular end piece seal particularly, where the end piece seal is not experiencing similar compression and stress, and this leads to distortions in the interface which in turn can lead to seal leakage.
  • Figure 2 shows cross sections through a gasket for a pump assembly according to an embodiment of the present invention.
  • the width of the gasket is 3mm while the height is 2.5mm.
  • This shape provides a much lower width to height aspect ratio when compared to the gasket of Figure 1 , and this leads to considerably lower distortion and stress when the gasket is compressed. Furthermore, the stress is more uniform across the gasket leading to edge and end surfaces that are flatter and not so sharp.
  • Figure 3 provides a table showing the effect of manufacturing tolerances on variations in the compression ratio as the thicknesses of the gasket increases.
  • a prior art gasket of width 3mm and thickness 1 mm within a gasket groove of depth 0.8 mm is shown to have variations in the compression ratio, that is the percentage that the gasket is compressed by when the stator is assembled, of between 7.5% and 34.4% due to manufacturing tolerances of 0.07mm in the gasket thickness and 0.05mm in the groove depth.
  • gaskets have the same 3mm width but an increased height or thickness.
  • the manufacturing tolerances for the gaskets and grooves are considered to be the same as for the prior art, that is 0.07mm in the gasket thickness and 0.05mm in the groove depth.
  • a gasket that is 2mm thick and within a groove of 1 .60 mm is considered. In this instance the tolerances produce variations in the compression ratio of between 6.9 and 6.5, that is below 7%.
  • the gaskets are 3mm wide and 2.5 mm high and have substantially the same cross sectional area as the annular seal.
  • the low aspect ratio 1 .2:1 results in low seal distortion and low seal stress.
  • the 2.5 mm thickness results in a narrow compression range and the lower compression ratio at the upper end of this range reduces the onset of compression set in the gasket which extends the seal life.
  • Finite element analysis has been used to optimise the balance between compression on the O-ring and the gasket such that the extremes of compression and temperature do not cause a loss of interface pressure or damage to the O-ring.
  • the 2.5mm thick gasket engages much more positively in a housing than a 1 mm thick gasket and is very unlikely to come out of the groove. This helps to avoid pinching of the gasket when it is compressed by the securing screws which has been observed on occasion in a 1 mm thick gasket.
  • FIGs 4a and 4b schematically shows how the interface between the annular seal 40 and the end pieces in the longitudinal gasket 20 between the stator half shells changes in shape with an increased thickness gasket.
  • Figure 4a shows the interface between an increased thickness gasket 20 according to an embodiment and an O-ring 40 when under compression.
  • the gasket 20 and the O-ring exert fairly equal pressure on each other leading to a substantially flat surface for much of the area of the interface.
  • the substantially equal pressure from each side is due to the substantially equal stress experienced by each seal. Furthermore, this matching is maintained across a large temperature range.
  • Figure 4b shows a thinner gasket and in this case the stress and strain
  • the contact pressure between the gasket and the O-ring should be maintained across operating temperatures.
  • the interface between the gasket and the O-ring will be shaped according to the relative compressions on the gasket and O-ring. With balanced compression on the gasket and O-ring, the interface is a substantially straight line (as shown in Figure 4a). Providing there are sufficient compressions on the gasket and O-ring, there will be no issues with sealing in the balanced case shown here.
  • Figures 5 to 7 show specific examples of the longitudinal seal and annular seal and the vacuum pump assemblies that they are used in. These seals benefit from the low width to height aspect ratio of embodiments of the invention.
  • the seals have additional features for centring the longitudinal seal to improve the interface with the annular seal, and for providing axial flexibility of the longitudinal seal. Some embodiments also comprise features for biasing of the longitudinal seal against the inner surface of the groove closest to the pumping chamber to inhibit leakage of fluid along the groove.
  • Figure 5 schematically shows a multiple chamber rotary vacuum pump assembly, with two stator half shells and end pieces, which assembly may be
  • the pump assembly is formed of two stator half shells 1 04 and 102 between which a rotor (not shown) is mounted. The two shells are fixed together to form the pump chambers. Each of the chambers 1 06, 1 08, 1 1 0, 1 1 2, 1 14 & 1 1 6 are separated by pump chamber walls 1 34. End pieces 1 22 and 1 24 are mounted on the half shells of the stators to complete the pump assembly.
  • Figure 6 shows an isometric view of the seals that are arranged between the stator half shells and between the end faces.
  • the annular seal 40, 42 is a standard O-ring and is mounted in a rectangular groove of a constant cross section that can be machined using a plain cylindrical tool.
  • An effective seal between the longitudinal seal 20, 22 and the O-rings 40, 42 can be difficult to maintain.
  • longitudinal seals 20, 22 are mounted within a groove that is wider that the seal to provide freedom for some lateral movement and the ability for the gasket to expand under
  • the gasket 20 comprises an end loop 25 which is within groove 50 and has curved longitudinal arms that form a bow shape. Owing to the symmetrical nature of the loop the bow shape acts against the outer surface of the groove on either side of the loop, each side generating a force of substantially the same magnitude but in opposite directions, thereby centring the seal and in particular centring the end portion 29 of the seal that extends from the loop and mates with the O-ring.
  • the bow shape of the loop preserves axial rigidity but allows lateral flexibility to ensure an interference fit is possible.
  • the section/width of the gasket is
  • the loop also provides some axial stability and axial flexibility.
  • the axial stability is provided by the axial alignment faces 52 of the groove which form the outer surfaces of the arms extending from the longitudinal groove in either direction.
  • the loop portion of the seal contact the axial alignment faces and this holds the longitudinal seal axially in position.
  • the length of the groove between the axial alignment faces at each end of the stator is configured so that the longitudinal seal is mounted under a slight tension and is thus, held more securely in the groove.
  • Axial flexibility is provided by the flexing of the lateral arms that allow some axial movement of the seal thereby inhibiting it becoming over tensioned with the corresponding thinning in the seal that this might trigger.
  • the loop 25 has pips 23 on the outer surface which abut the axial alignment surface 52 of stator half shell. These pips 23 provide a known contact position for the loop with the axial alignment faces 52 which locate the gasket for axial tension. They are located towards an outer side of loop allowing for increased axial flexion to occur due to the bending of the portion of the loop between the pips 23. Further axial flexion is provided in this embodiment by the longitudinal deviation or bump 27 which also provides biasing of the gasket against the inner surface of the groove. This bump can contract and expand to allow for the axial flexion.
  • Each end of the gasket comprises an end portion 29 extending from loop 25.
  • This end portion 29 is aligned with the end of the stator half shells and contacts the O-ring. It is centred by the bow shape of the loop in this embodiment.
  • the lower stator has two gaskets mounted on either side of the pump within grooves 50. They are mounted under tension against the axial alignment faces 52 at either end of the stator.
  • the protruding end 29 is then held against the end of the stator half shell by a flat ended tool and the upper stator half shell is lowered on to the lower stator half shell and they are fixed together such that the gasket is held in place under compression.
  • the end pieces 1 22, 1 24 which contain the O-ring seals 40, 42 can then be mounted against the stator end faces.
  • the groove 50 is of a constant width and thus can be machined in one pass with one tool. This provides an advantage over grooves which contain pips to maintain the seal in place. Furthermore, the absence of these pips reduces the chances of there being pinch points for the gasket as it expands under compression and temperature changes.
  • the protrusion 29 is pushed back flush with the end faces of the stator during assembly. This is possible due to the flexibility of loop 25 and in particular to the lateral arms of the loop which can flex in and out and provide this axial flexibility.
  • the groove 50 deviates towards the pumping chamber as it nears the axial alignment faces 52. This deviation is provided so that the biasing of the gasket towards the pumping chamber(s) does not bias the gasket against the inner side of the groove close to its ends. Centring of the gasket within the groove allows for lateral movement of the gasket 20 towards the loop 25 in response to lateral forces. This helps in the centring of the end protrusion 29 when opposing lateral forces are applied from either side.
  • the above gasket design uses a simplified geometry.
  • the end regions have a One box' form that provides the required functions.
  • the flat ended gasket is formed with the width to height aspect ratio set out above to interface to a end seal, in this case standard round section O-ring, according to the present invention.
  • Axial alignment of the gasket with the O-ring grooves is important for a good quality seal. This centring is achieved by ensuring that when the gaskets are placed in the housing they protrude beyond the O-ring grooves and then by pushing the gaskets back to the O-ring grooves with bespoke tooling.
  • Axial flexibility is required in the ends of the gasket to provide a protruding end that can be pushed back. This flexibility is provided by the transverse or lateral member that supports the end sealing surface, see Figure 7.
  • Axial flexibility in the centre of the gasket helps ensure it is in tension and does not buckle.
  • the gasket is stretched and located against the alignment faces 52, in some embodiments on the alignment pips 23.
  • the flexibility is provided by the transverse flexible members that supports the alignment pips.
  • the bumps 27 in the central region of the gasket provide additional axial flexibility.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Gasket Seals (AREA)

Abstract

L'invention concerne un ensemble pompe comprenant: deux stators demi-coques définissant une ou plusieurs chambres de pompage; des pièces d'extrémité montées à chaque extrémité des deux stators demi-coques; des joints d'étanchéité longitudinaux pour assurer l'étanchéité entre des faces de contact longitudinales des deux stators demi-coques de chaque côté de la chambre de pompage; et au moins un autre joint d'étanchéité pour assurer l'étanchéité entre l'une des pièces d'extrémité et les demi-coques de stator. Les joints d'étanchéité longitudinaux ont des parties d'extrémité qui viennent en butée contre au moins un joint d'étanchéité annulaire et un rapport d'aspect de largeur sur hauteur des joints d'étanchéité longitudinaux et du joint d'étanchéité supplémentaire est compris entre 1:1 et 2:1.
PCT/GB2018/050192 2017-01-25 2018-01-23 Ensembles pompes ayant des joints d'étanchéité de stator Ceased WO2018138487A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201880008496.3A CN110199089A (zh) 2017-01-25 2018-01-23 带有定子接头密封件的泵组件
EP18702791.7A EP3574186A1 (fr) 2017-01-25 2018-01-23 Ensembles pompes ayant des joints d'étanchéité de stator
KR1020197021835A KR20190107041A (ko) 2017-01-25 2018-01-23 스테이터 조인트 시일을 갖는 펌프 조립체

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1701266.7A GB2559134B (en) 2017-01-25 2017-01-25 Pump assemblies with stator joint seals
GB1701266.7 2017-01-25

Publications (1)

Publication Number Publication Date
WO2018138487A1 true WO2018138487A1 (fr) 2018-08-02

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ID=58463017

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2018/050192 Ceased WO2018138487A1 (fr) 2017-01-25 2018-01-23 Ensembles pompes ayant des joints d'étanchéité de stator

Country Status (6)

Country Link
EP (1) EP3574186A1 (fr)
KR (1) KR20190107041A (fr)
CN (1) CN110199089A (fr)
GB (1) GB2559134B (fr)
TW (1) TWI750305B (fr)
WO (1) WO2018138487A1 (fr)

Cited By (3)

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Publication number Priority date Publication date Assignee Title
JP2023511718A (ja) * 2020-01-30 2023-03-22 エドワーズ リミテッド ポンプ及びそのようなポンプのステータ構成要素を密封するシールセット
WO2023118819A1 (fr) 2021-12-23 2023-06-29 Edwards Limited Pompe à vide à exigences réduites d'étanchéité
WO2025021348A1 (fr) * 2023-07-26 2025-01-30 Pfeiffer Vacuum Pompe à vide et joint d'étanchéité

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GB2575987A (en) * 2018-07-30 2020-02-05 Edwards Ltd Seal assembly
FR3124235B1 (fr) * 2021-07-20 2023-06-09 Pfeiffer Vacuum Pompe à vide

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EP3574186A1 (fr) 2019-12-04
TWI750305B (zh) 2021-12-21
GB2559134B (en) 2020-07-29
KR20190107041A (ko) 2019-09-18
GB2559134A (en) 2018-08-01
CN110199089A (zh) 2019-09-03
TW201833442A (zh) 2018-09-16

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