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WO2018128121A1 - Actionneur - Google Patents

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Publication number
WO2018128121A1
WO2018128121A1 PCT/JP2017/046573 JP2017046573W WO2018128121A1 WO 2018128121 A1 WO2018128121 A1 WO 2018128121A1 JP 2017046573 W JP2017046573 W JP 2017046573W WO 2018128121 A1 WO2018128121 A1 WO 2018128121A1
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WO
WIPO (PCT)
Prior art keywords
rubber
dielectric
actuator
actuator according
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/046573
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English (en)
Japanese (ja)
Inventor
翔太 森本
義哲 権
達彦 入江
近藤　孝司
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Toyobo Co Ltd
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Toyobo Co Ltd
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Priority to JP2018560374A priority Critical patent/JP7056582B2/ja
Publication of WO2018128121A1 publication Critical patent/WO2018128121A1/fr
Anticipated expiration legal-status Critical
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/506—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a cylindrical shape and having stacking in the radial direction, e.g. coaxial or spiral type rolls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions

Definitions

  • the present invention relates to an actuator, more particularly to an actuator using a stretchable conductor composition as an electrode material, and more particularly to at least one actuator selected from a piezoelectric type, a dielectric type, and an electromagnetic induction type.
  • the first aspect of the present invention relates to an actuator using a piezoelectric phenomenon, and more particularly to a stacked piezoelectric actuator in which piezoelectric materials and internal electrodes are alternately stacked.
  • a piezoelectric laminated body is used in which a large number of piezoelectric ceramics having a small thickness and internal electrode layers are alternately laminated and integrally fired.
  • the ceramic layer made of piezoelectric ceramic a thin plate having a thickness of 20 to 200 ⁇ m is used, and the number of ceramic layers alternately laminated with the internal electrode layers reaches about 100 to 700.
  • Patent Document 1 discloses an example of this type of stacked piezoelectric actuator.
  • the outer invention includes a structure in which a ceramic laminate (piezo stack) having a smaller number of layers than the final number of layers is adhered by an adhesive as a countermeasure against problems caused by internal stress of the ceramic laminate, that is, a laminated type having a divided adhesion structure
  • a piezoelectric actuator is disclosed.
  • the side electrode is generally formed of a sintered conductive paste or a thermosetting conductive paste, but the cured product of such a paste is hard and brittle. There is a concern about troubles such as short circuit of an adjacent electric circuit due to poor conduction due to cracks and electrode pieces dropped from the cracks. Further, since the side electrodes are hard and brittle, the operation of the piezoelectric actuator itself is hindered, and the displacement of the actuator is limited to a small extent.
  • a second aspect of the present invention relates to an actuator that utilizes a change in volume of a dielectric when a voltage is applied to the dielectric.
  • an elastic dielectric material elastic insulating material
  • polarization occurs in the elastic dielectric material, and a positive charge accumulates on one of the opposing electrode surfaces and a negative charge on the other Accumulates.
  • This is a so-called capacitor.
  • An attractive force is generated between the positive and negative charges due to the Coulomb force. Due to the Coulomb force, the electrodes are attracted to each other to cause displacement and contraction stress in a direction in which the thickness of the elastic dielectric material is reduced. At the same time, a displacement and a force are generated in the surface direction of the dielectric material.
  • Patent Document 2 An example of a dielectric actuator using such a phenomenon is described in Patent Document 2.
  • the dielectric actuator described in Patent Document 1 shows a basic configuration of this type.
  • the Coulomb attractive force can be increased by increasing the charge accumulated in the electrode.
  • a large dielectric polarization can be generated by increasing the dielectric constant of the dielectric elastic body, and the accumulated charge can be increased.
  • the applied voltage is higher, the accumulated charge increases and the Coulomb force increases.
  • an increase in accumulated charge is directly linked to an increased risk of dielectric breakdown between the electrodes.
  • a dielectric elastic material kneaded with conductive carbon is used in a pseudo manner to increase the dielectric constant of the dielectric elastic material, and in order to cover the insulation that decreases due to the kneading of conductive carbon, a layer between layers is separately provided. A highly insulating elastic body is sandwiched.
  • the insulation is improved in this way, a low dielectric constant layer is interposed between the electrodes, and the effective dielectric constant is lowered.
  • the electrode material is a metal
  • deformation in the surface direction of the dielectric elastic body is constrained by the electrode metal, and although the internal stress in the dielectric elastic body increases, the amount of displacement is limited. The satisfactory displacement could not be obtained.
  • a third aspect of the present invention relates to an actuator that utilizes deformation of the inductor itself due to electromagnetic force generated by passing a current through the inductor.
  • An electromagnetic induction actuator is an actuator that uses a magnetic force generated by an electric current. This type of actuator has long been applied as a motor and an inductor.
  • the electromagnetic induction actuators known so far operate by moving an armature set in advance so as to be able to perform horizontal motion or rotational motion by electromagnetic force.
  • the electromagnetic force not only drives the armature, but also stresses the coil itself that can generate and stab the electromagnetic force.
  • the deformation of the coil due to the electromagnetic force leads to structural deterioration of the actuator itself, and thus the coil is required to have rigidity for suppressing the deformation.
  • the present invention is an actuator that positively uses deformation of the coil itself due to electromagnetic force applied to the coil. An actuator based on such a technical idea has not been put into practical use.
  • An object of the present invention is to provide a novel actuator by applying a stretchable conductor composition to an electrode or conductor portion of an actuator.
  • the first aspect of the present invention has been made in view of such conventional problems, and an attempt is made to provide a multilayer piezoelectric actuator having a side electrode that can follow the operation of the actuator and does not hinder the operation of the actuator. To do.
  • the second aspect of the present invention has been made in view of such conventional problems, and is intended to provide a dielectric actuator having an electrode that can follow the operation of the actuator and does not hinder the operation of the actuator. .
  • the third aspect of the present invention has been made in view of such a conventional problem, and intends to provide a novel electromagnetic induction actuator that deforms the coil itself by energization by using a conductor material having a large degree of freedom of deformation. Is.
  • the present invention has the following configuration.
  • [1] In a laminated piezoelectric actuator having a structure in which piezoelectric materials that cause a volume change by application of voltage and internal electrodes are alternately stacked, and the internal electrodes are alternately arranged as a positive electrode and a negative electrode.
  • the elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile. Rubber (NBR), ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM)
  • NR natural rubber
  • IR synthetic natural rubber
  • SBR styrene-butadiene rubber
  • BR butadiene rubber
  • IIR butyl rubber
  • Rubber NBR
  • EPM ethylene / propylene rubber
  • CSM chlorosulfonated polyethylene rubber
  • ACM acrylic rubber
  • U urethane rubber
  • Q silicone rubber
  • FKM fluoro rubber
  • the conductor composition constituting the side electrode has a free volume of 3 to 35% by volume.
  • the elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile. Rubber (NBR), ethylene / propylene rubber (EPM, EPDM), chlorosulfonated polyethylene rubber (Hypalon) (CSM), acrylic rubber (ACM), urethane rubber (U), silicone rubber (Q), fluoro rubber (FKM)
  • NR natural rubber
  • IR synthetic natural rubber
  • SBR styrene-butadiene rubber
  • BR butadiene rubber
  • IIR butyl rubber
  • Rubber (NBR) ethylene / propylene rubber
  • CSM chlorosulfonated polyethylene rubber
  • ACM acrylic rubber
  • U urethane rubber
  • Q silicone rubber
  • FKM fluoro rubber
  • An electromagnetic induction actuator characterized in that the inductor itself is deformed by using an electromagnetic force generated by passing an electric current through the inductor, which is formed of a stretchable conductor material.
  • the stretchable conductor composition is a mixture of conductive particles and a binder resin containing 90% by mass or more of an elastomer.
  • the elastomer is natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene / butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber (IIR), nitrile.
  • T polysulfide rubber
  • the conductive particles include metal particles having a center diameter in a range of 0.08 ⁇ m to 25 ⁇ m.
  • the stretchable conductor composition has a free volume of 3 to 35% by volume.
  • the present invention preferably has the following configuration.
  • [18] The electromagnetic induction actuator according to any one of [13] to [17], wherein the layer made of a stretchable conductor and the layer made of a stretchable insulator are wound together in a roll shape.
  • [19] The electromagnetic induction actuator according to any one of [13] to [18], wherein the layer made of a stretchable conductor and the layer made of a stretchable insulator are wound together around an iron core. .
  • a conductive composition that is stretchable on the side electrode of the multilayer piezoelectric actuator (abbreviated as a stretchable conductor), preferably a stretchable conductor that is a composite of conductive particles and an elastomer, More preferably, by adopting a stretchable conductor having a free volume inside, the durability of the side electrode is improved, and the side electrode does not hinder the operation of the multilayer piezoelectric actuator. Improvements can be realized at the same time.
  • the stretchable conductor By having a free volume inside the stretchable conductor, it is possible to cause an apparent volume shrinkage when compressive strain is applied to the stretchable conductor, and to reduce internal stress applied to the stretchable conductor. Since the internal stress of the stretchable conductor, which is the side electrode, directly affects the operation of the multilayer piezoelectric actuator, the significance of reducing the internal stress when the side conductor contracts is large.
  • the shrinkage caused by internal compression of the free volume is realized by the side electrode being composed of a composite of conductive particles and elastomer. Since electrical conduction in such a composite conductor is realized by a contact chain of conductive particles, even when metal particles are used as the conductive particles, the specific resistance is one to two digits or more compared to bulk metal.
  • the electrode of the dielectric actuator has a stretchable conductor composition (abbreviated as a stretchable conductor), preferably a stretchable conductor that is a composite of conductive particles and an elastomer, more preferably an inner part.
  • a stretchable conductor composition abbreviated as a stretchable conductor
  • a stretchable conductor that is a composite of conductive particles and an elastomer, more preferably an inner part.
  • a conductive composition (abbreviated as a stretchable conductor) that is stretchable on the interlayer electrode and / or the side electrode, preferably conductive particles
  • Adopting a stretchable conductor that is a composite of elastomer, more preferably a stretchable conductor having a free volume inside improves the durability of the side electrode, and the side electrode does not hinder the operation of the multilayer dielectric actuator Therefore, the improvement of the operating range of the multilayer dielectric actuator is realized at the same time.
  • the stretchable conductor By having a free volume inside the stretchable conductor, it is possible to cause an apparent volume shrinkage when compressive strain is applied to the stretchable conductor, and to reduce internal stress applied to the stretchable conductor. Since the internal stress of the stretchable conductor that is an electrode (including the case of the interlayer electrode and / or the side electrode) directly affects the operation of the dielectric actuator, the significance of reducing the internal stress when the conductor contracts is large.
  • the third aspect of the present invention is an actuator that utilizes the fact that the coil itself is deformed by energization by constituting the coil using a conductor having a large degree of freedom of deformation.
  • the present invention preferably employs a stretchable conductor that is a composite of conductive particles and an elastomer, and more preferably a stretchable conductor having a free volume inside, thereby providing a sufficient degree of freedom of deformation when the coil is contracted by energization. .
  • the degree of freedom of compression deformation can be ensured. Since conventional conductor materials have a low degree of freedom of compression deformation, the electromagnetic contraction force of the coil itself cannot be used as a practical actuator.
  • By having a free volume inside the stretchable conductor it is possible to cause an apparent volume shrinkage when compressive strain is applied to the stretchable conductor, and to reduce internal stress applied to the stretchable conductor.
  • the actuator of the present invention uses a stretchable conductor composition for a conductor portion in which a metal member is generally often used.
  • the actuator emits vibration or operation sound when the metal part moves in accordance with the operation, but in the present invention, the elastic conductor composition has a vibration absorbing function, so that a low vibration and noiseless actuator is realized. I can do things.
  • FIG. 1 is a schematic diagram showing the configuration of a multilayer piezoelectric actuator according to the present invention. These are the schematic schematic diagrams which show the structure of the dielectric actuator (single layer) in this invention. These are the schematic schematic diagrams which show the structure of the laminated dielectric actuator in this invention.
  • FIG. 4 is a schematic diagram showing a configuration of an example (cylindrical type) of the electromagnetic induction actuator in the present invention.
  • FIG. 5 is a schematic diagram showing a configuration of an example (planar coil type) of the electromagnetic induction actuator according to the present invention.
  • the multilayer piezoelectric actuator according to the first aspect of the present invention causes a volume change by voltage application as shown in FIG. 1.
  • Piezoelectric material piezoelectric material
  • Examples of the piezoelectric material (piezoelectric material) that changes in volume when voltage is applied according to the first aspect of the present invention include berlinite (aluminum phosphate: AlPO4), sucrose, quartz (quartz) (SiO2), and Rochelle salt (potassium sodium tartrate).
  • a conductive metal electrode can be employed as the internal electrode layer in the first aspect of the present invention.
  • Usable metals include copper, aluminum, nickel, gold, silver, chromium, nickel-chromium alloy, tungsten, molybdenum, brass, bronze, white copper, platinum, rhodium, and other foils or vacuum thin film conductors, or powder sintering Thick film conductors can be used.
  • a polymer type thick film conductor made of conductive particles and a binder resin may be used.
  • FIG. 2 shows a basic configuration of the dielectric actuator according to the second embodiment of the present invention.
  • the dielectric elastic body 11 is sandwiched between the electrodes 10 and has the same structure as a so-called parallel one night capacitor.
  • FIG. 3 is a configuration diagram of a multilayer dielectric actuator having a multilayer structure of dielectric actuators in the second embodiment of the present invention.
  • Dielectric elastic bodies 11 that change in volume when voltage is applied are alternately sandwiched between internal electrodes (interlayer electrodes), and are arranged such that the internal electrodes are alternately positive and negative electrodes.
  • the electrode 13 and the side electrode 14 are connected.
  • an elastomer exhibiting rubber elasticity can be used as the dielectric substance (dielectric material) that changes in volume by voltage application in the second aspect of the present invention.
  • the elastomer in the second aspect of the present invention includes natural rubber (NR), synthetic natural rubber (isoprene rubber) (IR), styrene-butadiene rubber (SBR), butadiene rubber (BR), chloroprene rubber (CR), butyl rubber.
  • IIR nitrile rubber
  • NBR nitrile rubber
  • EPM ethylene / propylene rubber
  • CSM chlorosulfonated polyethylene rubber
  • ACM acrylic rubber
  • U urethane rubber
  • U silicone rubber
  • Q Fluorine rubber
  • FKM polysulfide rubber
  • T polysulfide rubber
  • nitrile group-containing rubber, chloroprene rubber and chlorosulfonated polyethylene rubber are preferable, and nitrile group-containing rubber is particularly preferable.
  • the preferred elastic modulus range is from 2 to 480 MPa, more preferably from 3 to 240 MPa, still more preferably from 4 to 120 MPa.
  • These rubber materials have a high relative dielectric constant because they have a large polarization due to nitrile groups or halogen groups.
  • the effective dielectric constant can be increased by further adding a ferroelectric filler to the elastomer.
  • Ferroelectric materials used in the second embodiment of the present invention include berlinite (aluminum phosphate: AlPO4), sucrose, quartz (quartz) (SiO2), Rochelle salt (potassium sodium tartrate) (KNaC4H4O6), topaz (yellow jade, (Silicate) (Al2SiO4 (F, OH) 2), tourmaline group mineral, ortho (positive) gallium phosphate (GaPO4), langasite (La3Ga5SiO14), perovskite (perovskite calcium titanate: CaTiO3), tungsten- Ceramics with bronze structure, barium titanate (BaTiO3), lead titanate (PbTiO3), PZT: lead zirconate titanate (zirconate-lead titanate) (Pb [ZrxTi1-
  • dielectric materials piezo materials
  • dielectric ceramics such as barium titanate and PZT (lead zirconate titanate) are preferably used.
  • these ferroelectric materials are powder fillers having a center diameter of about 0.1 to 10 ⁇ m, and the ratio of the elastomer resin to the ferroelectric material is 3 to 70 parts by mass / 97 to 30 parts by mass. It can be kneaded and mixed so that it can be used as a hybrid.
  • the elastic modulus of the dielectric elastic body according to the second aspect of the present invention is preferably 1 MPa or more and 1000 MPa or less.
  • the dielectric elastic body used in the second aspect of the present invention is preferably a paste obtained by kneading and mixing ferroelectric particles and a flexible resin, preferably a binder resin containing 90% by mass or more of an elastomer, and a solvent added as necessary. It can be obtained by applying a predetermined shape by printing, dip coating, dispensing or the like, followed by drying and curing. Alternatively, it can be obtained by a method of pasting into a film or sheet after pasting in advance, and applying a predetermined shape to the obtained film or sheet.
  • a conductive metal electrode in the case of an actuator mainly using displacement in the thickness direction of the dielectric elastic body, a conductive metal electrode can be employed as the electrode or the internal electrode.
  • Usable metals include copper, aluminum, nickel, gold, silver, chromium, nickel-chromium alloy, tungsten, molybdenum, brass, bronze, white copper, platinum, rhodium, and other foils or vacuum thin film conductors, or powder sintering Thick film conductors can be used.
  • a polymer type thick film conductor made of conductive particles and a binder resin may be used.
  • FIG. 4 is an example of a cylindrical electromagnetic induction actuator configured by co-winding a layer made of a stretchable conductor and a layer made of a stretchable insulator in a roll shape.
  • contraction in the diameter direction of the cylinder and contraction in the height direction occur by energization. Therefore, for example, if a hose-like space is provided inside the cylinder and passes through the tube, the tube can be compressed during energization to create a pulsatile flow.
  • the inner space is made into a bag shape and filled with an incompressible liquid, it can be applied as a pump that discharges the liquid in the bag when energized.
  • the contraction of the actuator itself in the diametrical direction or the height direction can be directly used for mechanical driving.
  • FIG. 5 shows a planar coil electromagnetic induction actuator in which a coil is formed on a flat surface with a stretchable conductor on a stretchable base material.
  • contraction in the surface direction of the coil is significantly caused by energization.
  • the planar coil type since the actuator itself can be regarded as a sheet, it is possible to apply deformation such as tightening or compression by winding the actuator regarded as a sheet around an object. Both the cylindrical type and the planar coil type are close to each other, and preferably the amount of deformation can be increased by placing an iron core in the center of the coil.
  • a feature of the present invention resides in the use of stretchable conductor Seo organisms for electrodes, coils, and wiring.
  • the feature of the multilayer piezoelectric actuator in the first aspect of the present invention is that a stretchable conductor is used for the side electrode.
  • the dielectric actuator according to the second aspect of the present invention is characterized in that a stretchable conductor is used as the electrode of the dielectric actuator, and that the side electrode is preferably a stretchable conductor as well as the interlayer electrode in the case of the laminated dielectric actuator. Is to use.
  • a feature of the electromagnetic induction actuator in the present invention is that a stretchable conductor is used as a conductor material, particularly as a conductor material of a coil.
  • the stretchable conductor in the present invention refers to a conductor that maintains conductivity even when stretched by 10% or more or compressed by 3% or more.
  • the stretchable conductor of the present invention is preferably composed of at least metal particles and a flexible resin having a tensile elastic modulus of 1 MPa to 1000 MPa.
  • the stretchable conductor used in the present invention comprises conductive particles and a flexible resin, preferably a binder resin containing 90% by mass or more of an elastomer, and kneaded and mixed with a solvent to be added as necessary, followed by printing, dip coating, It can be obtained by applying a predetermined shape by dispensing or the like and drying and curing.
  • a binder resin preferably containing 90% by mass or more of an elastomer can be used as the flexible resin.
  • Elastomer is a general term for polymer materials exhibiting rubber elasticity.
  • the conductive particles of the present invention are particles having a specific resistance of 1 ⁇ 10 ⁇ 1 ⁇ cm or less and a particle diameter of 100 ⁇ m or less.
  • Examples of the material having a specific resistance of 1 ⁇ 10 ⁇ 1 ⁇ cm or less include metals, alloys, carbon, graphite, graphite, carbon nanoparticles, fullerenes, carbon nanotubes, graphene pieces, doped semiconductors, conductive polymers, and the like. be able to.
  • the conductive particles preferably used in the present invention are metals such as silver, gold, platinum, palladium, copper, nickel, aluminum, zinc, lead and tin, alloy particles such as brass, bronze, white copper and solder, and silver-coated copper. Hybrid particles, metal-plated polymer particles, metal-plated glass particles, metal-coated ceramic particles, and the like can be used.
  • the main use is to use 90% by mass or more of the conductive particles.
  • the amorphous aggregated powder is a three-dimensional aggregate of spherical or irregularly shaped primary particles.
  • Amorphous agglomerated powders and flaky powders are preferable because they have a specific surface area larger than that of spherical powders and the like and can form a conductive nitrate work even with a low filling amount. Since the amorphous agglomerated powder is not in a monodispersed form, the particles are in physical contact with each other, so that it is easy to form a conductive nitrate work.
  • the particle size of the flaky powder is not particularly limited, but those having an average particle size (50% D) measured by a dynamic light scattering method of 0.5 to 20 ⁇ m are preferable. More preferably, it is 3 to 12 ⁇ m. When the average particle diameter exceeds 15 ⁇ m, it becomes difficult to form fine wiring, and clogging occurs in the case of screen printing. When the average particle size is less than 0.5 ⁇ m, it is impossible to make contact between particles at low filling, and the conductivity may deteriorate.
  • the particle size of the amorphous aggregated powder is not particularly limited, but those having an average particle size (50% D) measured by a light scattering method of 1 to 20 ⁇ m are preferable. More preferably, it is 3 to 12 ⁇ m. When the average particle diameter exceeds 20 ⁇ m, the dispersibility is lowered and it becomes difficult to form a paste. When the average particle size is less than 1 ⁇ m, the effect as an agglomerated powder is lost, and good conductivity may not be maintained with low filling.
  • the non-conductive particles in the present invention are particles made of an organic or inorganic insulating material.
  • the inorganic particles of the present invention are added for the purpose of improving printing properties, stretching properties, and coating surface properties, and include inorganic particles such as silica, titanium oxide, talc, alumina, barium sulfate, and microgels made of resin materials. Etc. can be used.
  • natural rubber NR
  • synthetic natural rubber isoprene rubber
  • SBR styrene / butadiene rubber
  • BR butadiene rubber
  • IIR chloroprene rubber
  • NBR butyl rubber
  • EPM ethylene / propylene rubber
  • CSM chlorosulfonated polyethylene rubber
  • ACM acrylic rubber
  • U urethane rubber
  • U silicone rubber
  • Q fluoro rubber
  • FKM fluoro rubber
  • Polysulfide rubber T
  • nitrile group-containing rubber nitrile group-containing rubber, chloroprene rubber and chlorosulfonated polyethylene rubber are preferable, and nitrile group-containing rubber is particularly preferable.
  • the range of elastic modulus is preferably 2 to 480 MPa, more preferably 3 to 240 MPa, and still more preferably 4 to 120 MPa.
  • the rubber containing a nitrile group is not particularly limited as long as it is a rubber or elastomer containing a nitrile group, but nitrile rubber and hydrogenated nitrile rubber are preferable.
  • Nitrile rubber is a copolymer of butadiene and acrylonitrile. If the amount of bound acrylonitrile is large, the affinity with metal increases, but the rubber elasticity contributing to stretchability decreases conversely. Accordingly, the amount of bound acrylonitrile in the acrylonitrile butadiene copolymer rubber is preferably 18 to 50% by mass, and particularly preferably 40 to 50% by mass.
  • a side electrode after kneading and mixing a binder resin containing 90% by mass or more of conductive particles and an elastomer, and a solvent to be added as necessary to obtain a paste for forming a stretchable conductor.
  • the percentage of elastomer is determined from the mass of the elastomer relative to the mass of the binder resin.
  • An epoxy resin can be blended with the binder resin of the present invention.
  • the epoxy resin is an organic compound having an epoxy phase, and preferably a bisphenol A type resin or a phenol novolac type resin can be used.
  • a curing agent can be blended in the epoxy compound.
  • a known amine compound, polyamine compound, or the like may be used as the curing agent.
  • the epoxy resin is the total amount of the epoxy group-containing compound and the curing agent.
  • the binder resin of the present invention can be blended with a polyester resin, a non-crosslinked polyester urethane resin, a phenoxy resin, an acrylic resin having a glass transition temperature of 20 ° C. or less, and the like. Resin components other than these elastomers are preferably limited to less than 10% by weight, more preferably less than 5% by weight, based on the binder resin.
  • the stretchable conductor forming paste used in the present invention contains a solvent as necessary.
  • the solvent in the present invention is water or an organic solvent. Since the content of the solvent should be appropriately investigated depending on the viscosity required for the paste, it is not particularly limited, but is generally preferably 30 to 80 mass ratio when the total mass of the conductive particles and the flexible resin is 100.
  • the organic solvent used in the present invention preferably has a boiling point of 100 ° C. or higher and lower than 300 ° C., more preferably 130 ° C. or higher and lower than 280 ° C. If the boiling point of the organic solvent is too low, the solvent volatilizes during the paste manufacturing process or use of the paste, and there is a concern that the component ratio of the conductive paste is likely to change. On the other hand, if the boiling point of the organic solvent is too high, the amount of residual solvent in the dry cured coating film increases, and there is a concern that the reliability of the coating film is reduced.
  • organic solvent in the present invention examples include cyclohexanone, toluene, xylene, isophorone, ⁇ -butyrolactone, benzyl alcohol, Exxon Chemical Solvesso 100, 150, 200, propylene glycol monomethyl ether acetate, terpionol, butyl glycol acetate, diamylbenzene.
  • Triamylbenzene, n-dodecanol diethylene glycol, ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monobutyl ether acetate, diethylene glycol dibutyl ether, diethylene glycol monoacetate, triethylene glycol diacetate, triethylene glycol, triethylene glycol Monomethylether , Triethylene glycol monoethyl ether, triethylene glycol monobutyl ether, tetraethylene glycol, tetraethylene glycol monobutyl ether, tripropylene glycol, tripropylene glycol monomethyl ether, 2,2,4-trimethyl-1,3-pentanediol monoiso Examples include butyrate.
  • AF Solvent No. 4 (boiling point: 240 to 265 ° C.), No. 5 (boiling point: 275 to 306 ° C.), No. 6 (boiling point: 296 to 317 ° C.) manufactured by Nippon Oil Corporation No. 7, (boiling point: 259-282 ° C.), and No. 0 solvent H (boiling point: 245-265 ° C.), etc., and two or more of them may be included if necessary.
  • Such an organic solvent is appropriately contained so that the stretchable conductor-forming paste has a viscosity suitable for printing or the like.
  • the paste for forming an elastic conductor used in the present invention is composed of conductive particles, barium sulfate particles, an elastic resin, a solvent, a dissolver, a three-roll mill, a self-revolving mixer, an attritor, a ball mill, a sand mill, and the like. It can be obtained by mixing and dispersing with a disperser.
  • the paste for forming a stretchable conductor used in the present invention includes known organic and inorganic additives such as imparting printability, color tone adjustment, leveling, antioxidant, ultraviolet absorber, etc., within a range that does not impair the contents of the invention.
  • An agent can be blended.
  • the stretchable conductor composition in the present invention preferably has a free volume of 3 to 35% by volume.
  • the free volume is a volume% assuming that the void area% of the total cross-sectional area obtained from the area of the void part and the non-void part is expanded three-dimensionally from the cross-sectional image of the stretchable conductor layer, and the thickness is assumed to be a unit length. Convert to. That is, it can be obtained by replacing the numerical value of area% with volume% as it is.
  • the free volume is preferably 10 to 35% by volume, more preferably 15 to 35% by volume. Such free volume can cause an apparent volume shrinkage particularly when compressive strain is applied to the stretchable conductor, and has an effect of reducing internal stress applied to the stretchable conductor.
  • the amount of the elastomer used in the present invention is 7 to 35% by mass, preferably 9 to 28% by mass, more preferably 12%, based on the total of conductive particles, preferably non-conductive particles and flexible resin added. ⁇ 20% by weight.
  • a laminated piezoelectric actuator which is the first aspect of the present invention, also known as a piezo actuator, a dielectric actuator which is the second aspect of the present invention, and an electromagnetic induction actuator which is the third aspect of the present invention is a semiconductor. It is mainly used in industrial equipment that requires precise position control, such as moving stage, precision positioning probe, probe drive for scanning tunneling microscope (STM) and atomic force microscope (AFM). Recently, mobile phone and digital camera camera modules (autofocus mechanism, zoom mechanism, camera shake correction mechanism), hard disk drive (head position control), optical equipment (optical axis adjustment, focus adjustment), motor (impact linear motor, super It is also used as a sonic linear motor).
  • ultra-precision fine polishing tool small type mechanical transformer, high-speed angle adjustment mechanism, minute load loading / detection device, pressurization mechanism, pump, positioning stage mechanism, punching machine, inkjet head, ejector of liquid such as fuel It is also used as such.
  • the actuator of the present invention can be applied not only to these uses but also to uses that require a larger displacement.
  • the stretchable conductor was made into a sheet and cut into a width of 10 mm and a length of 140 mm to prepare a test piece.
  • the sheet resistance and film thickness of the stretchable conductor sheet test piece in the natural state were measured, and the specific resistance was calculated.
  • Thickness gauge SMD-565L manufactured by TECLOCK
  • sheet resistance was measured for four test pieces using Loresta-GP MCP-T610 (manufactured by Mitsubishi Chemical Analytech), and the average value was used. .
  • the specific resistance was calculated by the following formula.
  • ⁇ Displacement> The action of the actuator when voltage was applied was photographed with a high-speed camera, the maximum change with respect to the initial dimension was measured, and displayed as a percentage of the initial dimension.
  • ⁇ Aggregated silver particles As the aggregated silver particles (A), amorphous aggregated silver powder (G-35 manufactured by DOWA Electronics Co., Ltd., average particle diameter of 6.0 ⁇ m) was used. As the flake silver particles (B), AGC-A (manufactured by Fukuda Metal Foil Powder Industry Co., Ltd., average particle size 3.1 ⁇ m) was used.
  • AGC-A manufactured by Fukuda Metal Foil Powder Industry Co., Ltd., average particle size 3.1 ⁇ m
  • the obtained pastes [P1] to [P8] for forming a stretchable conductor are coated on a polytetrafluoroethylene resin sheet with an applicator to form a film, dried at 120 ° C. for 20 minutes, and a stretchable conductor having a thickness of 50 ⁇ m. A sheet was formed. The specific resistance was calculated
  • a multilayer piezoelectric actuator having the configuration shown in FIG. 1 was manufactured by the following process. First, powders of lead oxide, zirconium oxide, titanium oxide, niobium oxide, strontium carbonate, etc., which are the main raw materials of the piezoelectric material (piezoelectric material), are weighed to have a desired composition, and the final composition is PZT (zirconic acid). (Lead titanate). In preparation, the lead component was blended by 1 to 2% in excess of the stoichiometric ratio of the above mixture ratio composition in consideration of lead evaporation. The blended raw materials were dry-mixed in a mixer and then calcined at 800 to 950 ° C. to obtain calcined powder.
  • ion-exchanged water and a dispersant are added to the calcined powder and premixed, and then wet pulverized by a planetary ball mill to obtain a pulverized powder.
  • a solvent, a binder, a plasticizer, a dispersant, and the like were added, mixed by a ball mill to form a slurry, and the slurry was further subjected to vacuum defoaming and viscosity adjustment while stirring with a stirrer in a vacuum apparatus. .
  • the slurry after vacuum defoaming and viscosity adjustment is formed into a green sheet with a certain thickness using a doctor blade device, and then a silver / radium firing paste that becomes an internal electrode (interlayer electrode) by firing is screened in a predetermined pattern on the green sheet.
  • Printing and punching with a press machine were performed to a predetermined size and shape to obtain a green sheet with an electrode layer.
  • a predetermined number of the obtained green sheets with electrode layers are laminated in the configuration shown in FIG. 1, and after thermocompression bonding, degreased, baked at a temperature of 900 to 1200 ° C., polished to a desired shape, and polished in the thickness direction.
  • a stacked piezoelectric electron whose polarization was controlled was obtained.
  • the obtained stacked piezoelectricity is shown in FIG.
  • the stretchable conductor-forming paste [P1] was applied and dried and cured at 120 ° C. for 30 minutes to form side electrodes to obtain a multilayer piezoelectric actuator [A1].
  • 30 actuators were manufactured under the same conditions (same lot).
  • the obtained actuator [A1] was embedded in an epoxy resin, and the cross section of the side electrode portion was observed to determine the porosity. Table 3 shows the results. Shown in The obtained multilayer piezoelectric actuator [A1] was applied with a sinusoidal electric field having an amplitude of 50 V and a frequency of 20 kHz, and a continuous operation test of the actuator was performed for 12 hours. Table 3. Shown in
  • a single-layer dielectric actuator having the configuration shown in FIG. 2 was manufactured by the following process. First, a polyester film subjected to a release treatment was used as a temporary base material, and a predetermined pattern was printed by screen printing and dried and cured using the stretchable conductor-forming paste P5 obtained in the previous production example. Next, a dielectric elastic body layer is formed on the obtained stretchable conductor layer using the dielectric elastic body forming paste D1 to form a dielectric elastic body layer, and further, the printable conductor film is dried and cured using the stretchable conductor forming paste P5. An electrode layer was formed to form a three-layer capacitor.
  • the obtained capacitor was peeled off from the release polyester film and cut into a predetermined shape to obtain a single-layer dielectric actuator X0.
  • the first formed elastic conductor layer had a thickness of 15 ⁇ m
  • the dielectric elastic layer had a thickness of 22 ⁇ m
  • the last formed elastic conductor layer had a thickness of 13 ⁇ m.
  • the insulation resistance between the front and back electrodes of the dielectric actuator A0 was> 1 ⁇ 10 12 .
  • a voltage of 0 to 1000 V was applied to the dielectric actuator, and the operation was confirmed.
  • the multilayer dielectric actuator shown in FIG. 3 was prototyped by the following process.
  • the dielectric elastic body forming paste obtained in the production example was coated on the polyester film subjected to the release treatment so as to have a constant thickness by a doctor blade device, and a dielectric elastic body green sheet was obtained through a drying process.
  • the paste P1 for forming a stretchable conductor to be an internal electrode is screen printed on a green sheet in a predetermined pattern, punched out by a press machine, and formed into a predetermined size and shape. A green sheet with an electrode layer was obtained.
  • a predetermined number of the obtained green sheets with electrode layers are laminated in the configuration shown in FIG. 3, and after thermocompression bonding, degreased, subjected to additional drying and heat treatment at a temperature of 120 ° C., and molded into a desired shape.
  • a multilayer capacitor was obtained.
  • the obtained multilayer capacitor is shown in FIG.
  • the stretchable conductor-forming paste [P1] was applied and dried and cured at 120 ° C. for 30 minutes to form a side electrode to obtain a multilayer dielectric actuator [X1].
  • 30 actuators were manufactured under the same conditions (same lot).
  • the obtained actuator [X1] was embedded in an epoxy resin, the cross section of the electrode part was observed, and the porosity was determined. The results are shown in Table 4. Shown in The obtained laminated dielectric actuator [X1] was applied with a sinusoidal electric field having an amplitude of 500 V and a frequency of 5 kHz, and a continuous operation test of the actuator was performed for 5 hours. Table 4. Shown in
  • Example 21 A cylindrical electromagnetic induction actuator having the configuration shown in FIG. 4 was manufactured by the following process. First, a polyester film subjected to the release treatment was used as a temporary base material, and a predetermined pattern was printed by screen printing and dried and cured using the stretchable conductor-forming paste P1 obtained in the previous production example. Next, the stretchable conductor layer is subjected to print drying and curing using the stretchable insulator-forming paste E1 to form a stretchable insulator, and a sheet having a two-layer structure of the stretchable conductor and the stretchable insulator is formed. Formed.
  • the obtained sheet was peeled from the release polyester film, slit-formed to a predetermined width, and then a lead wire was attached to a predetermined portion and wound into a cylindrical shape to obtain an electromagnetic induction actuator [Z1].
  • the thickness of the stretchable conductor layer is 18 ⁇ m
  • the thickness of the stretchable insulator layer is 12 ⁇ m.
  • the insulation resistance of the stretchable insulator was 1 ⁇ 10 12 ⁇ or more.
  • a voltage of 0 to 1000 V was applied to the electromagnetic induction actuator, and the operation was confirmed.
  • Example 29> The planar coil type electromagnetic induction actuator shown in FIG. 5 was prototyped by the following process.
  • the stretchable insulator-forming paste E1 obtained in the production example was coated on the polyester film subjected to the release treatment so as to have a constant thickness by a doctor blade device, and a stretchable base material was obtained through a drying process. .
  • a predetermined planar coil is printed by screen printing using the stretchable conductor-forming paste P5, dried and cured, and peeled off from the stretchable substrate release PET film.
  • An electromagnetic induction actuator [Z10] having the following structure was obtained. Table 3 shows the results of evaluation of the obtained electromagnetic induction actuator “Z10”.
  • the actuator according to the present invention is extremely quiet and withstands continuous use for a long time, and is used for semiconductors, micro-stages for exposure equipment, precision positioning probes, scanning, tunnel microscopes (STM) and atomic microscopes. It is mainly used in industrial equipment that requires precise position control, such as probe driving of an atomic force microscope (AFM).
  • FAM atomic force microscope
  • the camera modules for mobile phones and digital cameras autofocus mechanism, zoom mechanism, camera shake correction mechanism), hard disk drive (head position control), optical equipment (optical axis adjustment, focus adjustment), motor (impact linear motor, super It is also used as a sonic linear motor).
  • ultra-precision fine polishing tool small type mechanical transformer, high-speed angle adjustment mechanism, minute load loading / detection device, pressurization mechanism, pump, positioning stage mechanism, punching machine, inkjet head, ejector of liquid such as fuel It can also be used as such.
  • the multilayer piezoelectric actuator of the present invention can be sufficiently adapted as a speaker used for a long time.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

Le problème décrit par la présente invention est de fournir un actionneur qui résiste à une utilisation continue à long terme et qui est remarquablement silencieux. A cet effet, la solution selon la présente invention, est une composition conductrice élastique qui est utilisée dans une partie conductrice, et un actionneur piézoélectrique, de préférence, un actionneur piézoélectrique stratifié, un actionneur diélectrique, ou un actionneur de type à induction électromagnétique est conçu. Une composition conductrice ayant une élasticité est utilisée en tant que composition conductrice élastique, de préférence un conducteur élastique constitué de particules conductrices et un élastomère en tant que résine liante principale. L'actionneur résultant est remarquablement silencieux et résiste à une utilisation continue à long terme.
PCT/JP2017/046573 2017-01-04 2017-12-26 Actionneur Ceased WO2018128121A1 (fr)

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CN114269822A (zh) * 2019-08-29 2022-04-01 引能仕株式会社 致动器用弹性体组合物、致动器部件和致动器元件

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CN110932595A (zh) * 2019-12-06 2020-03-27 浙江清华柔性电子技术研究院 基于介电弹性体的柔性径向驱动器及柔性径向驱动系统

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JP2010226949A (ja) * 2003-03-03 2010-10-07 Sri Internatl 巻かれた電気活性ポリマー
JP2011507221A (ja) * 2007-12-06 2011-03-03 シーメンス アクチエンゲゼルシヤフト 気相堆積層を有する外部電極を備えた圧電コンポーネント及び該コンポーネントの製造方法及び適用方法
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CN114269822A (zh) * 2019-08-29 2022-04-01 引能仕株式会社 致动器用弹性体组合物、致动器部件和致动器元件

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