WO2018108650A1 - Dispositif de mesure et procédé de mesure des particules fines pour véhicule automobile - Google Patents
Dispositif de mesure et procédé de mesure des particules fines pour véhicule automobile Download PDFInfo
- Publication number
- WO2018108650A1 WO2018108650A1 PCT/EP2017/081613 EP2017081613W WO2018108650A1 WO 2018108650 A1 WO2018108650 A1 WO 2018108650A1 EP 2017081613 W EP2017081613 W EP 2017081613W WO 2018108650 A1 WO2018108650 A1 WO 2018108650A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- measuring
- laser light
- light source
- chambers
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4785—Standardising light scatter apparatus; Standards therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/51—Scattering, i.e. diffuse reflection within a body or fluid inside a container, e.g. in an ampoule
Definitions
- the invention relates to a measuring device for fine dust measurement for a motor vehicle with at least one laser light source, with at least one lens body associated with the laser light source, with at least one calibration device associated with the laser light source and with at least one
- Measuring devices for fine dust measurement are often used in the automotive sector.
- the ambient air of the motor vehicle can be examined for the presence of particulate matter.
- optical measuring methods are used in which an air volume to be examined is irradiated in a measuring space by a laser and the change in the laser beam is detected by means of an optical receiving device.
- a disadvantage of these devices is that for each measuring space, a laser light source, a
- a measuring device for fine dust measurement for a motor vehicle with at least one laser light source with at least one of the laser light source associated lens body, at least one of the laser light source associated calibration device, at least one measuring space and at least one optical receiving device
- the measuring device at least two measuring chambers in that at least one laser light source is associated with at least two measuring chambers, and that each measuring chamber has at least one optical receiving device for detecting laser light.
- the measuring device has exactly two measuring chambers, the measuring device has at least one, the two
- the mirror body associated with measuring chambers, the mirror body has two mirror surfaces, the mirror surfaces are arranged facing away from each other, the Mirror surfaces span an angle, the mirror surfaces together form an edge and the beam path of the laser light emitted by the laser light source is aligned with the edge.
- the measuring device has a mirror body with two reflecting surfaces.
- the mirror body is designed so that the two mirror surfaces are arranged facing away from each other and each have at least one straight edge.
- the two mirror surfaces meet at a corner formed by the straight edges of the mirror surfaces. The two mirror surfaces of the mirror body are thus arranged over the corner and span an angle.
- Beam path of the laser light emitted by the laser light source is aligned with the edge of the mirror body.
- the emitted laser light is scattered in two directions, so that it is available for examination in both measurement spaces.
- the mirror surfaces span a 90 ° angle, the mirror surfaces being directed outwards.
- the mirror surfaces of the mirror body can be arranged so that the mirror surfaces are at right angles to each other.
- the mirror body with its two mirror surfaces thus forms a right-angled edge, the mirror surfaces being directed outwards.
- a laser beam can be aligned, so that the laser beam is scattered in two spatial directions.
- the mirror body is arranged between two measuring chambers and by the leading edge of the mirror body, the laser beam can be scattered in both measuring chambers, so that a parallel measurement in both measuring chambers with a laser light source is possible.
- Each mirror surface may be associated with a lens body, so that the laser beam can be correspondingly expanded to the measurement spaces.
- the measuring chambers are arranged side by side, the mirror body is arranged between the measuring chambers, one mirror surface is assigned to one measuring chamber and the beam path of the laser light runs at least in sections between the two measuring chambers.
- the two measuring chambers can be arranged next to each other, wherein the mirror body is arranged between the two measuring chambers.
- the mirror surfaces of the mirror body are preferably each arranged facing a measuring space.
- the edge, which is formed by the two mirror surfaces, is arranged facing the laser beam, that is to say facing the laser light source.
- an angle of 135 ° between the laser beam and the beam axis of the laser beam and a mirror surface is spanned.
- the laser beam strikes the edge of the mirror body and the mirror surfaces and, due to the clamped angle between the laser beam and the mirror surfaces, a partial beam of the laser beam is scattered in each of the two measuring chambers.
- Beam path of the laser beam can be arranged between the two measuring chambers until it hits the mirror body and is scattered from there into the two measuring chambers. This allows a compact construction of the measuring device.
- the measuring cell into which the air volume to be examined is introduced and an optical receiving device for detecting the affected by the air volume laser beam are arranged.
- lens bodies for focusing or widening of the respective partial beam to the air volume to be examined can be assigned to the two mirror surfaces.
- the measuring device on two mirror body each have a mirror surface, each mirror surface has at least one straight edge and the mirror surfaces are at least at a straight edge to each other.
- the mirror body may be formed as a mirror discs and each at least one straight
- Edge have. At this straight edge, the mirror body can be arranged adjacent to each other and thus over the corner, with the mirror surfaces facing outward. The formation of an edge allows the scattering of the laser beam into both measuring chambers.
- the measuring chambers are arranged side by side, the laser light source with its laser light exit opening is arranged facing a measuring chamber, both measuring chambers have at least one inlet opening for the entry of the laser light, the laser light source facing measuring space has an outlet opening and the beam path is passed through both measuring chambers.
- the two measuring chambers are arranged side by side and the
- Both measuring chambers have inlet openings through which the laser light can enter the measuring chambers.
- the measuring space facing the laser light source additionally has an outlet opening.
- the arrangement of the measuring chambers next to one another thus allows entry of the laser beam into the first measuring space, exit of the laser beam from the first measuring space and entry of the laser beam into the second measuring space.
- the inlet openings of the two measuring chambers, and the outlet opening of the laser light source associated measuring space are arranged so that overlap the opening areas. This makes it possible to examine both measuring chambers, that is to say both volumes of air to be examined, with a laser light source.
- the outlet opening of the measuring space facing the laser light source and the inlet opening of the measuring space facing away from the laser light source intersect at least in sections.
- At least one receiving device is arranged in at least one measuring space perpendicular to the beam axis of the laser light
- at least one beam splitting device is arranged in at least one measuring space and the beam splitting device is assigned to at least one receiving device.
- the measuring chambers are next to each other arranged.
- the laser beam first penetrates the first volume of air to be examined in the measuring space facing the laser light source and then penetrates into the second measuring space, in which the second volume of air is examined.
- the laser beam enters the measuring space facing the laser light source and impinges here on a beam splitter arranged in the beam path.
- a partial beam of the beam axis of the input beam following is passed further into the second measuring space and the other partial beam is preferably deflected at a right angle to the beam axis of the input beam.
- the deflected laser beam is directed through a first volume of air to be examined. Behind the first volume of air to be examined, an optical receiving device is arranged in the beam path of the deflected laser beam, by means of which the change in the laser beam through the air volume can be examined.
- the undeflected partial beam can penetrate into the second measuring space.
- the second air volume to be examined can be arranged in the beam axis of the incident laser beam, and accordingly an optical receiving device can be arranged behind the air volume in the beam path of the laser beam.
- a beam splitter or also a device for beam deflection, for example a mirror can be arranged in the second measuring space, which deflects the laser beam at right angles to the incident laser beam.
- the second air volume to be examined and an optical receiving device can accordingly be arranged in the deflected laser beam.
- the measuring chambers each have at least one receiving device and each receiving device is associated with a laser light attenuation device.
- the optical receiving devices which may be formed, for example, as semiconductor diodes, in particular as photodiodes or the like, are each assigned a laser light attenuation device.
- the optical receiving devices which may be formed, for example, as semiconductor diodes, in particular as photodiodes or the like, are each assigned a laser light attenuation device.
- the optical receiving devices which may be formed,
- the Laser light attenuation devices arranged in the beam path of the respective laser beam behind the receiving devices.
- the Laser light attenuation devices can be formed for example by concave mirrors or by a plurality of concave mirrors, which are hit by the laser beam and attenuated by multiple reflection, the intensity of the laser beam so far that the laser beam does not scatter back into the measuring space. As a result, a disturbance of the measurement is prevented by uncontrolled reflective or scattered laser beams.
- each receiving device is associated with a laser light attenuation device.
- the invention relates to a method for measuring particulate matter in a motor vehicle with a measuring device according to the invention, wherein an air volume to be examined is introduced into at least one measuring space, wherein an air volume is irradiated with laser light of at least one laser light source and wherein the laser light after passing through the is to be examined air volume is detected, is provided in the invention essential that measurements are performed in parallel in at least two measuring chambers and that the measurements are performed with the laser light of the same laser light source.
- the air volumes can be introduced into the corresponding measurement spaces.
- a detection device in particular an optical detection device, in each measuring space, air volumes can be examined simultaneously.
- the light of the laser light source is, for example, passed through both rooms or scattered by at least one mirror body so that the laser light enters both measuring chambers.
- the air volumes introduced into the measuring chambers are irradiated by the laser light and the laser light is detected by an optical receiving device after passing through the air volumes.
- the measurement results of the optical receiving devices are evaluated.
- 1 shows a measuring device with two adjacent measuring chambers
- 2 shows a measuring device with two beam splitters
- FIG. 3 shows a measuring device with two measuring chambers and a mirror body.
- Fig. 1 is a measuring device 1 with a laser light source 2 and measuring chambers
- the laser light source 2 is arranged facing the measuring space 3.
- the measuring chamber 3 has an inlet opening 5 for the entry of the laser light and an outlet opening 6 for the exit of the laser light.
- the measuring space 4, which is arranged facing away from the laser light source 2 has an inlet opening 7, through which the laser beam, which has passed the measuring space 3, can enter the measuring space 4.
- At the inlet openings 5 and 7 are lens body 8, 9 for focusing or expansion of the laser beam to be examined air volumes 10, 1 1 arranged.
- the measuring chambers 3, 4 have receiving devices 12, 13 for the evaluation of the guided through the air volumes 10, 1 1 laser beam.
- the receiving devices 12, 13 are
- Associated laser light attenuation devices 14, 15, which may be formed for example by concave mirrors and serve that laser beams are not reflected after hitting the receiving devices 1 2, 13 in the corresponding measuring space 3, 4 back.
- the laser light source 2 is assigned a calibration device 16.
- the laser beam enters through the lens body 8 at the inlet opening 5 in the measuring chamber 3 and passes through a beam splitting device 17, through which the laser beam is divided into two partial beams.
- a partial beam continues along the beam axis of the incoming laser beam through the inlet opening 7 into the measuring space 4.
- a partial beam is deflected at right angles and passes through the air volume 10 until it hits the receiving device 12.
- the undeflected laser beam passes through the air volume 1 1 and is directed to a receiving device 13.
- FIG. 2 a measuring device according to FIG. 1 with two receiving means 14, 15, which are arranged at right angles to the beam path of the incident laser light of the laser light source 2 is shown. Due to the scattering in the air volumes 10, 1 1 in the measuring chambers 3, 4, the laser light of the
- Receiving devices 14, 15 are detected.
- FIG. 3 shows a further embodiment of the invention.
- the measuring chambers 3, 4 are arranged side by side, wherein the beam path of the laser beam of the laser light source 2 at least partially between the
- Measuring chambers 3, 4 runs. Between the measuring chambers 3, 4 mirror body 18, 19 are arranged with mirror surfaces 20, 21. The mirror surfaces 20, 21 span a right angle. The laser beam of the laser light source 2 is focused on the edge 22 which is formed by the mirror surfaces 20, 21. The arrangement of the mirror surfaces 20, 21, the laser beam is introduced into the measuring chambers 3, 4. In the measuring chambers 3, 4, the air volumes to be examined 10, 1 1 and optical receiving devices 12, 13 and laser light attenuation devices 14, 15 are arranged in the beam path of the laser beam. In addition, the laser light source 2 is assigned a calibration device 16. Due to the arrangement of the mirror body 18, 19 and through the
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
L'invention concerne un dispositif de mesure des particules fines pour véhicule automobile, comprenant au moins une source de lumière laser, au moins une lentille associée à la source de lumière laser, au moins un dispositif d'étalonnage associé à la source de lumière laser, au moins une chambre de mesure et au moins un dispositif de réception optique. L'invention est caractérisée en ce que le dispositif de mesure comprend au moins deux chambres de mesure, en ce qu'au moins deux chambres de mesure sont associées à au moins une source de lumière laser et en ce que chaque chambre de mesure comprend au moins un dispositif de réception optique destiné à la détection de la lumière laser. L'invention concerne en outre un procédé de mesure des particules fines dans un véhicule automobile équipé d'un dispositif de mesure selon l'invention.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201780076868.1A CN110036278B (zh) | 2016-12-12 | 2017-12-06 | 用于机动车的用于微尘测量的测量装置和方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102016124068.0 | 2016-12-12 | ||
| DE102016124068.0A DE102016124068A1 (de) | 2016-12-12 | 2016-12-12 | Messeinrichtung und Verfahren zur Feinstaubmessung für ein Kraftfahrzeug |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2018108650A1 true WO2018108650A1 (fr) | 2018-06-21 |
Family
ID=61148160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2017/081613 Ceased WO2018108650A1 (fr) | 2016-12-12 | 2017-12-06 | Dispositif de mesure et procédé de mesure des particules fines pour véhicule automobile |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN110036278B (fr) |
| DE (1) | DE102016124068A1 (fr) |
| WO (1) | WO2018108650A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10776643B1 (en) * | 2019-08-28 | 2020-09-15 | Robert Bosch Gmbh | Vehicular airborne particulate matter detection system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6181419B1 (en) * | 1998-05-22 | 2001-01-30 | National Research Council Of Canada | Method and apparatus for applying laser induced incandescence for the determination of particulate measurements |
| WO2003019160A2 (fr) * | 2001-08-21 | 2003-03-06 | Spx Corporation | Structure a chemin optique pour detection d'emissions dans un chemin ouvert |
| US6542831B1 (en) * | 2001-04-18 | 2003-04-01 | Desert Research Institute | Vehicle particulate sensor system |
| US7797983B2 (en) * | 2004-03-29 | 2010-09-21 | Gasera Ltd. | Method and system for detecting one or more gases or gas mixtures and/or for measuring the concentration of one or more gases or gas mixtures |
| DE102010027849A1 (de) * | 2010-04-16 | 2011-10-20 | Robert Bosch Gmbh | Anordnung sowie Verfahren zur Bestimmung der Partikelkonzentration eines Partikel mitführenden Gases |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4917494A (en) * | 1987-07-28 | 1990-04-17 | Amherst Process Instruments, Inc. | Beam forming apparatus for aerodynamic particle sizing system |
| IL121793A (en) * | 1997-09-17 | 2008-06-05 | Lewis Coleman | Isotopic gas analyzer |
| US5896088A (en) * | 1997-04-16 | 1999-04-20 | Southeastern Univ. Research Assn. | Incipient fire detection system |
| CN1384361A (zh) * | 2001-04-27 | 2002-12-11 | 刘岩 | 分立式多通道生化分析仪 |
| US6741348B2 (en) * | 2002-04-29 | 2004-05-25 | The Curators Of The University Of Missouri | Ultrasensitive spectrophotometer |
| CN2562181Y (zh) * | 2002-05-08 | 2003-07-23 | 北京宾达绿创科技有限公司 | 激光粉尘仪 |
| CN1216283C (zh) * | 2003-01-10 | 2005-08-24 | 东南大学 | 激光散射式粉尘浓度在线测量方法 |
| US7142299B2 (en) * | 2004-11-18 | 2006-11-28 | Apprise Technologies, Inc. | Turbidity sensor |
| DE102005025675A1 (de) * | 2005-06-03 | 2006-11-16 | Siemens Ag | Strahleranordnung für einen nichtdispersiven Infrarot-Gasanalysator |
| CN2886556Y (zh) * | 2005-08-02 | 2007-04-04 | 德菲电气(北京)有限公司 | 一种新型的红外线在线气体分析仪 |
| US8242476B2 (en) * | 2005-12-19 | 2012-08-14 | Leddartech Inc. | LED object detection system and method combining complete reflection traces from individual narrow field-of-view channels |
| CN201016927Y (zh) * | 2006-05-26 | 2008-02-06 | 戴庆超 | 量子激光烟气连续分析传感器 |
| WO2009073259A2 (fr) * | 2007-09-14 | 2009-06-11 | University Of Rochester | Intérféromètre à trajet commun de rendu d'amplitude et de phase de lumière diffusée |
| US8373860B2 (en) * | 2008-02-01 | 2013-02-12 | Palo Alto Research Center Incorporated | Transmitting/reflecting emanating light with time variation |
| CN201262612Y (zh) * | 2008-08-27 | 2009-06-24 | 索纪文 | 一种超高稳定性红外气体分析仪 |
| EP2338044A2 (fr) * | 2008-09-02 | 2011-06-29 | Technion Research and Development Foundation, Ltd. | Procédé et appareil pour détecter la nature d'une composition gazeuse, particulièrement des émissions de véhicule |
| CN102004079B (zh) * | 2010-09-16 | 2013-04-10 | 华南理工大学 | 一种基于光学传感的在线油液颗粒污染度检测传感器 |
| CN102103071A (zh) * | 2010-12-16 | 2011-06-22 | 聚光科技(杭州)股份有限公司 | 一种在位式吸收光谱气体分析系统 |
| CN103063614A (zh) * | 2013-01-04 | 2013-04-24 | 吉林大学 | 用于柴油机尾气烟度测量的激光式消光烟度计系统 |
| CN203287312U (zh) * | 2013-04-16 | 2013-11-13 | 比亚迪股份有限公司 | 车辆及其pm2.5颗粒检测装置组件 |
| CN203337547U (zh) * | 2013-06-27 | 2013-12-11 | 中国科学院苏州生物医学工程技术研究所 | 一种紧凑型单光源多通道流式分析仪 |
| GB2524836A (en) * | 2014-04-04 | 2015-10-07 | Servomex Group Ltd | Attachment and alignment device for optical sources, detectors and analysers, and modular analysis system |
| CN103983544B (zh) * | 2014-05-28 | 2015-12-30 | 南京大学 | 多通道气溶胶散射吸收测量仪 |
-
2016
- 2016-12-12 DE DE102016124068.0A patent/DE102016124068A1/de active Pending
-
2017
- 2017-12-06 CN CN201780076868.1A patent/CN110036278B/zh active Active
- 2017-12-06 WO PCT/EP2017/081613 patent/WO2018108650A1/fr not_active Ceased
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6181419B1 (en) * | 1998-05-22 | 2001-01-30 | National Research Council Of Canada | Method and apparatus for applying laser induced incandescence for the determination of particulate measurements |
| US6542831B1 (en) * | 2001-04-18 | 2003-04-01 | Desert Research Institute | Vehicle particulate sensor system |
| WO2003019160A2 (fr) * | 2001-08-21 | 2003-03-06 | Spx Corporation | Structure a chemin optique pour detection d'emissions dans un chemin ouvert |
| US7797983B2 (en) * | 2004-03-29 | 2010-09-21 | Gasera Ltd. | Method and system for detecting one or more gases or gas mixtures and/or for measuring the concentration of one or more gases or gas mixtures |
| DE102010027849A1 (de) * | 2010-04-16 | 2011-10-20 | Robert Bosch Gmbh | Anordnung sowie Verfahren zur Bestimmung der Partikelkonzentration eines Partikel mitführenden Gases |
Non-Patent Citations (1)
| Title |
|---|
| SIMONE AMARAL ET AL: "An Overview of Particulate Matter Measurement Instruments", ATMOSPHERE, vol. 6, no. 9, 9 September 2015 (2015-09-09), pages 1327 - 1345, XP055373324, DOI: 10.3390/atmos6091327 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110036278B (zh) | 2022-05-03 |
| CN110036278A (zh) | 2019-07-19 |
| DE102016124068A1 (de) | 2018-06-14 |
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