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WO2018101802A3 - Ensemble de chauffage - Google Patents

Ensemble de chauffage Download PDF

Info

Publication number
WO2018101802A3
WO2018101802A3 PCT/KR2017/014042 KR2017014042W WO2018101802A3 WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3 KR 2017014042 W KR2017014042 W KR 2017014042W WO 2018101802 A3 WO2018101802 A3 WO 2018101802A3
Authority
WO
WIPO (PCT)
Prior art keywords
crucible
magnetic field
coil
heating assembly
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2017/014042
Other languages
English (en)
Korean (ko)
Other versions
WO2018101802A2 (fr
Inventor
김정형
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fineva Inc
Original Assignee
Fineva Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020160163084A external-priority patent/KR101888270B1/ko
Priority claimed from KR1020160163082A external-priority patent/KR101888268B1/ko
Priority claimed from KR1020160163083A external-priority patent/KR101888269B1/ko
Priority claimed from KR1020170037876A external-priority patent/KR101973255B1/ko
Application filed by Fineva Inc filed Critical Fineva Inc
Priority to US16/466,240 priority Critical patent/US20200063254A1/en
Priority to CN201780085257.3A priority patent/CN110536975A/zh
Publication of WO2018101802A2 publication Critical patent/WO2018101802A2/fr
Publication of WO2018101802A3 publication Critical patent/WO2018101802A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • General Induction Heating (AREA)

Abstract

La présente invention concerne un ensemble de chauffage. Selon un aspect de la présente invention, l'invention concerne un ensemble de chauffage destiné à un équipement de dépôt, l'ensemble de chauffage comprenant : un creuset ayant un espace formé en son sein de manière à contenir un matériau de dépôt et ayant au moins une buse mise en œuvre de sorte à guider le matériau de dépôt vers l'extérieur ; une bobine disposée à l'extérieur du creuset et conçue de telle sorte que, lorsqu'une énergie haute fréquence est appliquée à celle-ci, un courant de bobine correspondant à l'énergie haute fréquence circule à travers la bobine, formant ainsi un champ magnétique dynamique dans sa périphérie ; et une structure de concentration de champ magnétique disposée dans la périphérie de la bobine, un courant d'induction étant formé dans la paroi externe du creuset par le champ magnétique dynamique, le creuset est chauffé par la chaleur générée sur la base du courant d'induction et d'un élément de résistance électrique du creuset, et le champ magnétique dynamique formé dans la périphérie de la bobine est concentré par la structure de concentration de champ magnétique, ce qui permet d'augmenter la chaleur produite dans le creuset.
PCT/KR2017/014042 2016-12-01 2017-12-01 Ensemble de chauffage Ceased WO2018101802A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US16/466,240 US20200063254A1 (en) 2016-12-01 2017-12-01 Heating assembly
CN201780085257.3A CN110536975A (zh) 2016-12-01 2017-12-01 加热组件

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
KR1020160163084A KR101888270B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR1020160163082A KR101888268B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2016-0163084 2016-12-01
KR10-2016-0163082 2016-12-01
KR1020160163083A KR101888269B1 (ko) 2016-12-01 2016-12-01 가열 어셈블리
KR10-2016-0163083 2016-12-01
KR1020160163081 2016-12-01
KR10-2016-0163081 2016-12-01
KR1020170037876A KR101973255B1 (ko) 2016-12-01 2017-03-24 가열 어셈블리
KR10-2017-0037876 2017-03-24

Publications (2)

Publication Number Publication Date
WO2018101802A2 WO2018101802A2 (fr) 2018-06-07
WO2018101802A3 true WO2018101802A3 (fr) 2018-07-26

Family

ID=62242180

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/014042 Ceased WO2018101802A2 (fr) 2016-12-01 2017-12-01 Ensemble de chauffage

Country Status (1)

Country Link
WO (1) WO2018101802A2 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108770173B (zh) * 2018-07-27 2020-11-20 上海工程技术大学 一种等离子体射流产生装置
KR102265055B1 (ko) * 2019-06-05 2021-06-15 엘지전자 주식회사 증착 장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (ja) * 2010-06-18 2012-01-05 Nisshin Giken Kk 誘導炉
KR101213434B1 (ko) * 2012-05-22 2012-12-18 문병태 웨이퍼코팅용 가열장치
JP2013023727A (ja) * 2011-07-20 2013-02-04 Toyota Motor Corp 高周波熱処理装置及び高周波熱処理方法
KR101642452B1 (ko) * 2015-01-23 2016-07-25 주식회사 파인에바 선형 증발 증착 장치
KR20160129204A (ko) * 2015-04-29 2016-11-09 주식회사 파인에바 선형 증발 증착 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012002446A (ja) * 2010-06-18 2012-01-05 Nisshin Giken Kk 誘導炉
JP2013023727A (ja) * 2011-07-20 2013-02-04 Toyota Motor Corp 高周波熱処理装置及び高周波熱処理方法
KR101213434B1 (ko) * 2012-05-22 2012-12-18 문병태 웨이퍼코팅용 가열장치
KR101642452B1 (ko) * 2015-01-23 2016-07-25 주식회사 파인에바 선형 증발 증착 장치
KR20160129204A (ko) * 2015-04-29 2016-11-09 주식회사 파인에바 선형 증발 증착 장치

Also Published As

Publication number Publication date
WO2018101802A2 (fr) 2018-06-07

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