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WO2018101743A3 - Stratifié - Google Patents

Stratifié Download PDF

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Publication number
WO2018101743A3
WO2018101743A3 PCT/KR2017/013835 KR2017013835W WO2018101743A3 WO 2018101743 A3 WO2018101743 A3 WO 2018101743A3 KR 2017013835 W KR2017013835 W KR 2017013835W WO 2018101743 A3 WO2018101743 A3 WO 2018101743A3
Authority
WO
WIPO (PCT)
Prior art keywords
laminate
present application
block copolymer
substrate
patterned
Prior art date
Application number
PCT/KR2017/013835
Other languages
English (en)
Korean (ko)
Other versions
WO2018101743A2 (fr
Inventor
이미숙
구세진
박노진
김정근
이제권
최은영
유형주
윤성수
Original Assignee
주식회사 엘지화학
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 엘지화학 filed Critical 주식회사 엘지화학
Priority to CN201780072491.2A priority Critical patent/CN110023384B/zh
Priority to US16/463,624 priority patent/US11299596B2/en
Priority to JP2019518094A priority patent/JP6930714B2/ja
Publication of WO2018101743A2 publication Critical patent/WO2018101743A2/fr
Publication of WO2018101743A3 publication Critical patent/WO2018101743A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/20—Manufacture of shaped structures of ion-exchange resins
    • C08J5/22—Films, membranes or diaphragms
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F293/00—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule
    • C08F293/005—Macromolecular compounds obtained by polymerisation on to a macromolecule having groups capable of inducing the formation of new polymer chains bound exclusively at one or both ends of the starting macromolecule using free radical "living" or "controlled" polymerisation, e.g. using a complexing agent
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L33/00—Compositions of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides or nitriles thereof; Compositions of derivatives of such polymers
    • C08L33/04—Homopolymers or copolymers of esters
    • C08L33/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, which oxygen atoms are present only as part of the carboxyl radical
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/76—Patterning of masks by imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2438/00—Living radical polymerisation
    • C08F2438/03—Use of a di- or tri-thiocarbonylthio compound, e.g. di- or tri-thioester, di- or tri-thiocarbamate, or a xanthate as chain transfer agent, e.g . Reversible Addition Fragmentation chain Transfer [RAFT] or Macromolecular Design via Interchange of Xanthates [MADIX]
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2353/00—Characterised by the use of block copolymers containing at least one sequence of a polymer obtained by reactions only involving carbon-to-carbon unsaturated bonds; Derivatives of such polymers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Laminated Bodies (AREA)
  • Graft Or Block Polymers (AREA)

Abstract

La présente invention concerne un copolymère bloc et son utilisation. La présente invention peut fournir un stratifié qui peut former un copolymère séquencé hautement aligné sur un substrat et peut ainsi être appliqué efficacement à la fabrication de divers substrats à motifs, ainsi qu'un procédé de fabrication d'un substrat à motifs l'utilisant.
PCT/KR2017/013835 2016-11-30 2017-11-29 Stratifié Ceased WO2018101743A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201780072491.2A CN110023384B (zh) 2016-11-30 2017-11-29 层合体
US16/463,624 US11299596B2 (en) 2016-11-30 2017-11-29 Laminate
JP2019518094A JP6930714B2 (ja) 2016-11-30 2017-11-29 積層体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20160162141 2016-11-30
KR10-2016-0162141 2016-11-30

Publications (2)

Publication Number Publication Date
WO2018101743A2 WO2018101743A2 (fr) 2018-06-07
WO2018101743A3 true WO2018101743A3 (fr) 2018-11-22

Family

ID=62241613

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2017/013835 Ceased WO2018101743A2 (fr) 2016-11-30 2017-11-29 Stratifié

Country Status (6)

Country Link
US (1) US11299596B2 (fr)
JP (1) JP6930714B2 (fr)
KR (1) KR102191606B1 (fr)
CN (1) CN110023384B (fr)
TW (1) TWI656969B (fr)
WO (1) WO2018101743A2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110869442B (zh) * 2017-07-14 2022-11-22 株式会社Lg化学 中性层组合物
WO2019093748A1 (fr) * 2017-11-07 2019-05-16 주식회사 엘지화학 Composition polymère
KR102484630B1 (ko) * 2018-08-16 2023-01-04 주식회사 엘지화학 패턴화 기판의 제조 방법
KR102498631B1 (ko) * 2018-08-16 2023-02-10 주식회사 엘지화학 패턴화 기판의 제조 방법
KR102522182B1 (ko) * 2018-08-31 2023-04-14 주식회사 엘지화학 패턴화 기판의 제조 방법
KR102534530B1 (ko) * 2018-08-31 2023-05-19 주식회사 엘지화학 패턴화 기판의 제조 방법
JP7209569B2 (ja) * 2019-03-28 2023-01-20 信越化学工業株式会社 Ｉｉｉ族窒化物基板の製造装置及び製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5391626A (en) * 1992-05-21 1995-02-21 Idemitsu Kosan Co., Ltd. Styrenic block copolymer and process for producing same
JP2002145973A (ja) * 2000-11-08 2002-05-22 National Institute Of Advanced Industrial & Technology シンジオタクチック芳香族ビニル系ブロック共重合体およびその製造方法
KR20140063790A (ko) * 2011-09-23 2014-05-27 에이제트 일렉트로닉 머트리얼즈 유에스에이 코프. 블록 공중합체의 유도 자기조립을 위한 중성층의 조성물 및 이의 방법
KR20140103570A (ko) * 2013-02-18 2014-08-27 삼성전자주식회사 블록 코폴리머 층의 패턴 형성 방법 및 패턴화된 폴리머 구조물
US9181449B2 (en) * 2013-12-16 2015-11-10 Az Electronic Materials (Luxembourg) S.A.R.L. Underlayer composition for promoting self assembly and method of making and using
KR20160038705A (ko) * 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7347953B2 (en) * 2006-02-02 2008-03-25 International Business Machines Corporation Methods for forming improved self-assembled patterns of block copolymers
JP4673266B2 (ja) * 2006-08-03 2011-04-20 日本電信電話株式会社 パターン形成方法及びモールド
KR101005300B1 (ko) 2007-06-08 2011-01-04 고려대학교 산학협력단 광가교 및 열가교성 표면개질용 랜덤공중합체를 이용한태양전지의 제조방법
US8426313B2 (en) 2008-03-21 2013-04-23 Micron Technology, Inc. Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference
FR2975823B1 (fr) * 2011-05-27 2014-11-21 Commissariat Energie Atomique Procede de realisation d'un motif a la surface d'un bloc d'un substrat utilisant des copolymeres a bloc
KR101412228B1 (ko) 2012-06-11 2014-07-02 한국과학기술원 혼합 블록공중합체 박막 제조방법, 혼합 블록공중합체 주형 제조방법 및 이에 의하여 제조된 혼합 블록공중합체 박막 및 주형
EP2733533B1 (fr) * 2012-11-14 2018-02-28 IMEC vzw Procédé de gravure utilisant des copolymères séquencés
CN105899556B (zh) * 2013-12-06 2019-04-19 株式会社Lg化学 嵌段共聚物
KR101780099B1 (ko) 2013-12-06 2017-09-19 주식회사 엘지화학 블록 공중합체
CN105934456B (zh) 2013-12-06 2018-09-28 株式会社Lg化学 嵌段共聚物
CN105916904B (zh) * 2013-12-06 2018-11-09 株式会社Lg化学 嵌段共聚物
EP3078690B1 (fr) * 2013-12-06 2021-01-27 LG Chem, Ltd. Copolymère bloc
WO2015084120A1 (fr) * 2013-12-06 2015-06-11 주식회사 엘지화학 Monomère et copolymère bloc
WO2016053010A1 (fr) * 2014-09-30 2016-04-07 주식회사 엘지화학 Copolymère séquencé
JP6637495B2 (ja) 2014-09-30 2020-01-29 エルジー・ケム・リミテッド パターン化基板の製造方法

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5391626A (en) * 1992-05-21 1995-02-21 Idemitsu Kosan Co., Ltd. Styrenic block copolymer and process for producing same
JP2002145973A (ja) * 2000-11-08 2002-05-22 National Institute Of Advanced Industrial & Technology シンジオタクチック芳香族ビニル系ブロック共重合体およびその製造方法
KR20140063790A (ko) * 2011-09-23 2014-05-27 에이제트 일렉트로닉 머트리얼즈 유에스에이 코프. 블록 공중합체의 유도 자기조립을 위한 중성층의 조성물 및 이의 방법
KR20140103570A (ko) * 2013-02-18 2014-08-27 삼성전자주식회사 블록 코폴리머 층의 패턴 형성 방법 및 패턴화된 폴리머 구조물
US9181449B2 (en) * 2013-12-16 2015-11-10 Az Electronic Materials (Luxembourg) S.A.R.L. Underlayer composition for promoting self assembly and method of making and using
KR20160038705A (ko) * 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
KR20160038700A (ko) * 2014-09-30 2016-04-07 주식회사 엘지화학 중성층 조성물
KR20160038710A (ko) * 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체
KR20160038704A (ko) * 2014-09-30 2016-04-07 주식회사 엘지화학 블록 공중합체

Also Published As

Publication number Publication date
JP2019534810A (ja) 2019-12-05
CN110023384B (zh) 2022-06-07
JP6930714B2 (ja) 2021-09-01
US11299596B2 (en) 2022-04-12
KR102191606B1 (ko) 2020-12-15
KR20180062415A (ko) 2018-06-08
CN110023384A (zh) 2019-07-16
US20190375904A1 (en) 2019-12-12
TWI656969B (zh) 2019-04-21
WO2018101743A2 (fr) 2018-06-07
TW201829188A (zh) 2018-08-16

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