WO2018101573A1 - Light-emitting element display device and manufacturing method therefor - Google Patents

Abstract

A light-emitting element display device and a manufacturing method therefor are disclosed. According to the present invention, the light-emitting element display device comprises a light-emitting element array including a plurality of light-emitting elements mutually connected to adjacent light-emitting elements by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction that is orthogonal to the first direction. Herein, a resistance state (switch on/switch off) of each switching element or switching region can be changed and stored by forming a switching element or a switching region formed of a resistance change material between a first contact electrode and a light-emitting element or between a second contact electrode and the light-emitting element, and adjusting a voltage to be applied between the first contact electrode and the second contact electrode. Therefore, according to the present invention, the light-emitting element array can be driven through only changing of a resistance state of a switching element or a switching region, by adjusting a voltage to be applied between a first contact electrode and a second contact electrode, thereby: enabling a display to be driven at low power and at low costs; and a thermal stability problem and a misalign problem of a bump metal, which occur while bonding a conventional light-emitting array on a CMOS substrate by a flip chip scheme, to be solved.

Description

Light emitting device display device and manufacturing method thereof

The present invention relates to a display device and a method for manufacturing the same, and more particularly to a method for manufacturing a light emitting device display device.

Recently, micro LEDs are attracting attention in various fields such as visible wireless communication technology, automotive intelligent headlamps, optogenetics, medical devices, and displays. Among them, as the battery shortage problem of smart devices occurs recently, many researches are being conducted to replace the existing display by developing a micro LED-based display that can drive the existing display with high reliability and low power.

Recently, for these micro LED applications, the question of how to transfer micro LED chips to a flexible and transparent substrate, and how to drive such a micro LED has emerged as the most important issue at present.

 In the case of the driving method which is used most frequently, the research is being carried out using the flip chip method which inverts the micro LED array onto the CMOS substrate. This is a way to implement the display by driving the CMOS circuit with n contact as common. This method has many difficulties in real commercialization, such as thermal stability of bump metal used for p contact, difficulty in aligning CMOS and micro LED arrays, and a large number of defective pixels. Since the circuit is opaque, it is difficult to be applied to the transparent display which is required recently.

In addition, in order to solve the problems of flip chip package at high density, there is a method of transferring and attaching one micro LED chip to a substrate as a chip on board (COB) type and driving the display by wire bonding. This method requires a wide bonding pad for n contact, which is still difficult to achieve high-density packaging, and it is difficult to commercialize because of high price such as chip transfer technology and wire bonding.

SUMMARY OF THE INVENTION An object of the present invention is to provide a light emitting device display device and a method of manufacturing the same, which solves problems caused by alignment problems, bump metal safety problems, and wide bonding pads caused by a flip chip-based micro LED display.

The light emitting device display device according to a preferred embodiment of the present invention for solving the above problems, the substrate; And light emitting devices disposed on the substrate and adjacent to each other by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction perpendicular to the first direction. And a light emitting device array including a plurality of light emitting devices connected to each other, wherein each of the plurality of light emitting devices includes: a switching device formed of a resistance change material between the first contact electrode and the light emitting device is switched on; The light is turned on according to the potential difference between the first contact electrode and the second contact electrode connected to the self.

In addition, each of the plurality of light emitting elements may include a first semiconductor layer formed on the substrate; An active layer formed on the first semiconductor layer; A second semiconductor layer formed on the active layer; The switching element formed on the first semiconductor layer and formed of a resistance change material; The first contact electrode formed on the first switching element; A transparent electrode layer formed on the second semiconductor layer; And the second contact electrode formed on the transparent electrode layer.

In addition, the first semiconductor layer may be doped with n-type, and the second semiconductor layer may be a semiconductor layer doped with p-type.

In addition, when the switching element is applied with a voltage higher than a threshold voltage inherent to the resistance change material, a conductive filament is formed therein so that the state of the resistance change material is changed from a high resistance state to a low resistance state, thereby maintaining a switched on state.

In addition, the switching element may be switched on with the conductive filament formed therein or the conductive filament formed therein disappearing according to the voltage applied between the first contact electrode and the second contact electrode.

On the other hand, the light emitting device display device according to another embodiment of the present invention for solving the above problems is a substrate; And light emitting devices disposed on the substrate and adjacent to each other by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction perpendicular to the first direction. And a light emitting device array including a plurality of light emitting devices connected to each other, wherein the plurality of light emitting devices are passivated with a resistance change material, and the second contact electrode is formed on the passivation material. And a switching region formed between the light emitting element and the light emitting element are turned on in accordance with a potential difference between the first contact electrode and the second contact electrode connected to the light emitting element to generate light.

In addition, each of the plurality of light emitting elements may include a first semiconductor layer formed on the substrate; An active layer formed on the first semiconductor layer; A second semiconductor layer formed on the active layer; The first contact electrode formed on the first semiconductor layer; A transparent electrode layer formed on the second semiconductor layer; And the second contact electrode formed on the switching region formed of a passivation material on the transparent electrode layer.

In addition, the first semiconductor layer may be doped with n-type, and the second semiconductor layer may be a semiconductor layer doped with p-type.

In addition, when the switching region is applied with a voltage higher than a threshold voltage inherent to the resistance change material, a conductive filament is formed therein so that the state of the resistance change material is changed from a high resistance state to a low resistance state to maintain a switched on state. have.

In addition, the switching element may be switched on with the conductive filament formed therein or the conductive filament formed therein disappearing according to the voltage applied between the first contact electrode and the second contact electrode.

On the other hand, the light emitting device display device according to another embodiment of the present invention for solving the above problems is a substrate; And light emitting devices disposed on the substrate and adjacent to each other by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction perpendicular to the first direction. And a light emitting device array including a plurality of light emitting devices connected to each other, wherein each of the plurality of light emitting devices includes: a switching device formed of a resistance change material between the second contact electrode and the light emitting device is switched on; The light is turned on according to the potential difference between the first contact electrode and the second contact electrode connected to the self.

In addition, each of the plurality of light emitting elements may include a first semiconductor layer formed on the substrate; An active layer formed on the first semiconductor layer; A second semiconductor layer formed on the active layer; The first contact electrode formed on the first semiconductor layer; A transparent electrode layer formed on the second semiconductor layer; A switching element formed of a resistance change material on the transparent electrode layer; And the second contact electrode formed on the switching element.

In addition, the first semiconductor layer may be doped with n-type, and the second semiconductor layer may be a semiconductor layer doped with p-type.

In addition, when the switching element is applied with a voltage higher than a threshold voltage inherent to the resistance change material, a conductive filament is formed therein so that the state of the resistance change material is changed from a high resistance state to a low resistance state, thereby maintaining a switched on state. have.

In addition, the switching element may be switched on with the conductive filament formed therein or the conductive filament formed therein disappearing according to the voltage applied between the first contact electrode and the second contact electrode.

Meanwhile, a method of manufacturing a light emitting device display device according to a preferred embodiment of the present invention for solving the above technical problem includes the steps of: sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on a substrate; (b) etching the first semiconductor layer, the active layer, and the second semiconductor layer so that a plurality of light emitting devices are separated and a portion of the first semiconductor layer of each light emitting device is exposed to the outside; (c) forming a switching element with a resistance change material on each of the first semiconductor layers exposed to the outside of the plurality of light emitting elements, and performing an electro-forming process on the switching element; (d) forming a first contact electrode on the switching element and forming a transparent electrode layer on the second semiconductor layer; And (e) forming a second contact electrode on the transparent electrode.

In addition, in step (c), an electro-forming process may be performed on the switching device by applying a voltage between the first semiconductor layer and the switching device.

In addition, the first contact electrode is formed to be connected to the first contact electrode of the light emitting element adjacent in the first direction, the second contact electrode formed in the second direction orthogonal to the first direction is the light emitting element adjacent in the second direction It may be formed to be connected to the second contact electrode of the.

In addition, when the switching element is applied with a voltage higher than a threshold voltage inherent to the resistance change material, a conductive filament is formed therein so that the state of the resistance change material is changed from a high resistance state to a low resistance state so that the switched on state can be maintained. have.

In addition, the switching element may be switched on with the conductive filament formed therein or the conductive filament formed therein disappearing according to the voltage applied between the first contact electrode and the second contact electrode.

On the other hand, the light emitting device display device manufacturing method according to another embodiment of the present invention for solving the above technical problem, (a) sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on a substrate ; (b) etching the first semiconductor layer, the active layer, and the second semiconductor layer so that a plurality of light emitting devices are separated and a portion of the first semiconductor layer of each light emitting device is exposed to the outside; (c) forming a first contact electrode on a first semiconductor layer exposed to the outside of the plurality of light emitting devices, and forming a transparent electrode layer on the second semiconductor layer; (d) forming a passivation layer on the light emitting device to cover the transparent electrode layer with a resistance change material; (e) performing an electro-forming process on the switching region formed on the transparent electrode layer during the passivation; And (f) forming a second contact electrode over the switching region.

In addition, passivation is performed to form a hole in which a portion of the transparent electrode layer is exposed in step (d), and a voltage is applied to the transparent electrode layer and the switching region exposed through the hole in step (e). An electro-forming process may be performed in the switching region.

In addition, the first contact electrode is formed to be connected to the first contact electrode of the light emitting element adjacent in the first direction, the second contact electrode formed in the second direction orthogonal to the first direction is the light emitting element adjacent in the second direction It may be formed to be connected to the second contact electrode of the.

In addition, when the switching element is applied with a voltage higher than a threshold voltage inherent to the resistance change material, a conductive filament is formed therein so that the state of the resistance change material is changed from a high resistance state to a low resistance state so that the switched on state can be maintained. have.

In addition, the switching element may be switched on with the conductive filament formed therein or the conductive filament formed therein disappearing according to the voltage applied between the first contact electrode and the second contact electrode.

On the other hand, a light emitting device display device manufacturing method according to another embodiment of the present invention for solving the above problems, (a) sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on the substrate; (b) etching the first semiconductor layer, the active layer, and the second semiconductor layer so that a plurality of light emitting devices are separated and a portion of the first semiconductor layer of each light emitting device is exposed to the outside; (c) forming a first contact electrode on a first semiconductor layer exposed to the outside of the plurality of light emitting devices, and forming a transparent electrode layer on the second semiconductor layer; (d) forming a switching device on the transparent electrode layer with a resistance change material and performing an electro-forming process on the switching device; And (f) forming a second contact electrode over the switching element.

In the step (d), an electro-forming process may be performed on the switching device by applying a voltage between the transparent electrode layer and the switching device.

In addition, the first contact electrode is formed to be connected to the first contact electrode of the light emitting element adjacent in the first direction, the second contact electrode formed in the second direction orthogonal to the first direction is the light emitting element adjacent in the second direction It may be formed to be connected to the second contact electrode of the.

In addition, when the switching element is applied with a voltage higher than a threshold voltage inherent to the resistance change material, a conductive filament is formed therein so that the state of the resistance change material is changed from a high resistance state to a low resistance state so that the switched on state can be maintained. have.

In addition, the switching element may be switched on with the conductive filament formed therein or the conductive filament formed therein disappearing according to the voltage applied between the first contact electrode and the second contact electrode.

The light emitting element display device of the present invention is a light emitting element adjacent by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction perpendicular to the first direction. And a light emitting device array including a plurality of light emitting devices connected to each other.

At this time, a switching element or switching region made of a resistance change material is formed between the first contact electrode and the light emitting element or between the second contact electrode and the light emitting element, and is placed between the first contact electrode and the second contact electrode. By controlling the voltage to be changed, the resistance state (switch on / switch off) of each switching element or switch region can be changed and stored.

Therefore, the present invention can drive the light emitting device array only by changing the resistance state of the switching element or the switching region by adjusting the voltage applied between the first contact electrode and the second contact electrode, thereby driving the display at low power and low cost. This solves the problem of thermal stability and misalignment of the bump metal generated by bonding the conventional light emitting device array onto the CMOS substrate in a flip chip method.

1 is a view showing the overall structure of a light emitting device display device according to a first embodiment of the present invention.

FIG. 2 is a plan view showing the entire structure of a light emitting device display device according to a first embodiment of the present invention together with a drive circuit.

3 is a view for explaining a method of changing the state of the switching element and the switch region in accordance with a preferred embodiment of the present invention.

4A and 4B are views illustrating a manufacturing process of a light emitting device display device according to a first embodiment of the present invention.

5A and 5B illustrate a manufacturing process of a light emitting device display apparatus according to a second exemplary embodiment of the present invention.

6 is a diagram illustrating a manufacturing process of a light emitting device display device according to a modified embodiment of the second embodiment of the present invention.

7 is a view showing a manufacturing process of a light emitting device display device according to a third embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

1 is a view showing the overall structure of a light emitting device display device according to a first embodiment of the present invention, Figure 2 is a drive circuit of the overall structure of the light emitting device display device according to a first embodiment of the present invention 3 is a plan view illustrating a method of changing the states of the switching element 170 and the switching region according to an exemplary embodiment of the present invention.

1 to 3, in the light emitting device display according to the first exemplary embodiment of the present invention, a plurality of horizontal semiconductor light emitting devices are formed on a sapphire substrate 190 in a matrix form.

Each of the plurality of horizontal semiconductor light emitting devices shares an n-contact electrode (first contact electrode) 110a and a p-contact electrode (second contact electrode) 120a with adjacent semiconductor light emitting devices. Specifically, as shown in FIG. 1, a plurality of first contact electrodes 110a formed in parallel to each other in a first direction are disposed, and a plurality of second formed in parallel to each other in a direction orthogonal to the first direction. Contact electrodes 120a are disposed. Each of the semiconductor light emitting devices included in the matrix may include light emitting devices arranged in a row in a first direction and share the first contact electrode 110a, and light emitting devices arranged in a row in a second direction may include a second contact electrode ( 120a).

Therefore, when a voltage is applied to any one of the plurality of first contact electrodes 110a, a voltage is applied to the n-contact electrodes of all the semiconductor light emitting devices that share the first contact electrode 110a. Similarly, when a voltage is applied to any one of the plurality of second contact electrodes 120a, a voltage is applied to the p-contact electrodes of all the semiconductor light emitting devices that share the second contact electrode 120a.

Meanwhile, each of the plurality of semiconductor light emitting devices according to the exemplary embodiment of the present invention may emit light according to a voltage applied to the first semiconductor layer 130 formed on the substrate 190 and a portion of the first semiconductor layer 130. The active layer 140, the second semiconductor layer 150 formed on the active layer 140, and the transparent electrode layer 160 formed on the second semiconductor layer 150, the transparent electrode layer 160 on the As described above, the second contact electrode 120a shared with the semiconductor light emitting devices adjacent in the second direction is formed. Here, the first semiconductor layer 130 may be formed of an n-GaN layer doped with an n-type, the second semiconductor layer 150 may be formed of a p-GaN layer doped with a p-type, and the active layer 140. Is formed of a multi-quantum well layer, and the transparent electrode layer 160 may be formed of a transparent electrode material that can be generally used in semiconductor light emitting devices such as ITO and CNT.

In addition, the switching element 170 is formed of a resistance change material in a portion of the first semiconductor layer 130 where the active layer 140 is not formed, and the semiconductor light emitting elements adjacent to each other in the first direction on the switching element 170. The shared first contact electrode 110a is formed.

Resistance change material is mainly used in the field of resistive RAM (ReRAM). When a voltage higher than the threshold value inherent to the material is applied, electro-forming is performed while an electrical break down phenomenon occurs. The conductivity is changed from the high resistance state to the low resistance state.

Specifically, when a voltage above a threshold is applied to the resistive change material, which is an insulator, a defect structure in the thin film is generated by an electrical stress (forming process), whereby the conductive filament 173 is formed inside the resistive change material, thereby lowering the resistance. It becomes a state. Thereafter, even when the voltage applied to the material is removed, the conductive filament 173 is maintained, and current flows through the conductive filament 173, so that the resistance state of the material is maintained in the low resistance state.

When the voltage for forming the conductive filament 173 is defined as the SET voltage, and the voltage for extinguishing the conductive filament 173 formed therein is defined as the RESET voltage, ReRAM applies the SET voltage to the conductive filament 173. Program 1 by forming a and remove the programmed data by applying a RESET voltage to dissipate the conductive filaments 173.

In the first preferred embodiment of the present invention, the first drive circuit 210 controls switching to the plurality of first contact electrodes 110a and the second drive circuit 220 controls the plurality of second contact electrodes 120a, respectively. The voltage and the light emitting device turn-on voltage are supplied.

As shown in (a) of FIG. 3, the switching element 170 is formed of a resistance change material, and the first drive circuit 210 and the first contact circuit 110a and the second contact electrode 120a are formed. The second drive circuit 220 forms a conductive filament 173 inside the switching element 170 by applying a SET voltage equal to or higher than a threshold voltage inherent to the resistance change material, thereby forming a “switched on” state, and the first contact electrode ( A RESET voltage is applied between 110a and the second contact electrode 120a to form a "switched off" state by removing the conductive filament 173 formed in the switching element 170.

The switching device 170 controls the turning on and off of the semiconductor light emitting device. Even when a light emitting device turn-on voltage is applied between the first contact electrode 110a and the second contact electrode 120a, the switching device 170 Is not turned on when is switched off, the light emitting device according to the voltage applied between the first contact electrode 110a and the second contact electrode 120a only when the switching device 170 is switched on. Is turned on.

As a result, the light emitting device display of the present invention can perform a function of storing an image. That is, the state of the switching element 170 is set to the switched on state or the switched off state for each of the plurality of light emitting elements, and light is emitted to the entirety of the plurality of first contact electrodes 110a and the plurality of second contact electrodes 120a. When the turn-on voltage of the device is applied, the light emitting device in which the switching device 170 is switched on is turned on to emit light, and the light emitting device in which the switching device 170 is switched off is maintained in the turned off state to emit light. Since a specific image is output, and the state of the switching element 170 is maintained until a new RESET voltage / SET voltage is applied, the output image is stored in the display device to store the plurality of first contact electrodes 110a and the plurality of images. Each time the voltage is applied to the entire second contact electrode 120a of the output. Therefore, such a light emitting device display is suitable for an advertisement image display that continuously displays the same advertisement image.

In addition, since the resistance change material constituting the switching element 170 can be switched at a high speed in the same manner as the ReRAM, it is also possible to change the state of the switching element 170 to a high speed to display a video.

4A and 4B are views illustrating a manufacturing process of a light emitting device display device according to a first embodiment of the present invention.

Referring to FIGS. 4A and 4B, the manufacturing process of the light emitting device display device according to the first exemplary embodiment of the present invention will be described. First, the same process as the general light emitting device manufacturing process is applied to FIG. 4A (a). As illustrated, the first semiconductor layer (n-GaN) 130, the active layer 140, and the second semiconductor layer (p-GaN) 150 are sequentially formed on the substrate 190.

Thereafter, as shown in (b) of FIG. 4A, a plurality of light emitting devices are separated from each other, and mesa etching is performed to expose the first semiconductor layer 130 of each separated light emitting device to the outside.

When the plurality of light emitting devices are separated and a portion of the first semiconductor layer 130 is exposed to the outside, the switching element 170 is formed by depositing a resistance change material on the exposed first semiconductor layer 130 ( Referring to FIG. 4A (c)), for each semiconductor light emitting device, an electro-forming process is performed by applying a voltage by contacting two electrodes of the IV meter to the switching device 170 and the first semiconductor layer 130, respectively. When the electrical break down occurs, a defect structure is formed inside the switching element 170, and the defect structures are interconnected to form conductive filaments 173 (see (d) of FIG. 4A).

Thereafter, as illustrated in (e) of FIG. 4B, the first contact electrode 110a is formed on the switching element 170, and the transparent electrode layer 160 is formed on the second semiconductor layer 150. In this case, the first contact electrode 110a may be formed of a general n-contact electrode, and the transparent electrode layer 160 may be formed of ITO, CNT, etc., which are commonly used as transparent electrodes in semiconductor light emitting devices. In this case, the first contact electrodes 110a are connected to and shared with the first contact electrodes 110a of adjacent light emitting devices in the same column in the first direction, as described above.

Thereafter, passivation materials 180a are filled between the plurality of semiconductor light emitting devices to the height of the transparent electrode layer 160 to protect each semiconductor light emitting device from the outside (see (f) of FIG. 4B), Finally, the second contact electrode 120a is formed on the transparent electrode layer 160 (see (g) of FIG. 4B). As described above, the second contact electrodes 120a are connected to and shared with the second contact electrodes 120a of adjacent light emitting devices in the same row in the second direction.

The light emitting device display device according to the first embodiment of the present invention has been described so far.

In the light emitting device display device according to the second preferred embodiment of the present invention, the switching portion of each semiconductor light emitting device is formed on the second semiconductor layer 150 instead of the first semiconductor layer 130. Except for the basic functions, the same as in the first embodiment.

Hereinafter, a light emitting device display device and a manufacturing process thereof according to a second exemplary embodiment of the present invention will be described with reference to FIGS. 5A and 5B.

Referring to FIGS. 5A and 5B, first, as in the first embodiment, a first semiconductor layer is formed on a substrate 190 as shown in FIG. The (n-GaN) 130, the active layer 140, and the second semiconductor layer (p-GaN) 150 are sequentially formed.

Thereafter, as illustrated in (b) of FIG. 5A, a plurality of light emitting devices are separated from each other, and a mesa etching is performed to expose the first semiconductor layer 130 of each of the separated light emitting devices to the outside.

When the plurality of light emitting devices are separated and the first semiconductor layer 130 is exposed to the outside, the first contact electrode 110b is formed on the exposed first semiconductor layer 130 (see (c) of FIG. 5A). ) And the transparent electrode layer 160 is formed on the second semiconductor layer 150 (see (d) of FIG. 5A). In this case, the first contact electrode 110b is formed as a general n-contact electrode, and is connected to and shared with the first contact electrode 110b of adjacent light emitting devices in the same column in the first direction as described above.

Thereafter, using the resistance change material as the passivation material 180b, passivation is performed until the transparent electrode layer 160 of the semiconductor light emitting device is covered (see FIG. 5B (e)).

Then, as shown in (f) of FIG. 5B, for each semiconductor light emitting device, if the electro-forming process is performed by applying a voltage by contacting two electrodes of the IV meter with the passivation layer 180b, respectively, the passivation is performed. In the switching region 181b below the layer 180b, an electrical break down phenomenon occurs to form a defect structure inside the resistance change material formed directly on the transparent electrode layer 160, and the defect structure is interconnected to form conductive filaments. 183b is formed. The passivation region formed directly on the transparent electrode layer 160 is a switching region in which a conductive filament 183b is generated according to a voltage applied thereto so that the resistance state is changed to a low resistance state or the conductive filament 183b is extinguished to a high resistance state. (181b).

After the electro-forming process is performed in the switching region 181b, a second contact electrode 120b is finally formed on the switching region 181b (see (g) of FIG. 4B). As described above, the second contact electrodes 120b are connected to and shared with the second contact electrodes 120b of adjacent light emitting devices in the same row in the second direction.

In the semiconductor light emitting device manufactured through the process described above with reference to FIGS. 5A and 5B, as shown in FIG. 3B, between the first contact electrode 110b and the second contact electrode 120b, Applying a SET voltage equal to or higher than a threshold voltage inherent to the resistance change material forming the switching region 181b forms a conductive filament 183b in the switching region 181b to set a low resistance state (switched on state). When the turn-on voltage is applied between the first contact electrode 110b and the second contact electrode 120b, the light emitting device is turned on.

When the RESET voltage is applied between the first contact electrode 110b and the second contact electrode 120b, the conductive filament 183b formed in the switching region 181b disappears and the switching region 181b is in a high resistance state. After that, after the turn-on voltage is applied between the first contact electrode 110b and the second contact electrode 120b, the light emitting device is not turned on.

6 is a diagram illustrating a manufacturing process of a light emitting device display device according to a modified embodiment of the second embodiment of the present invention.

The variant embodiment shown in FIG. 6 differs only from the second embodiment shown in FIGS. 5A and 5B in the method of forming the conductive filaments in the switching region. Therefore, when explaining the difference, the transparent electrode layer 160 is formed on each of the plurality of light emitting devices by performing steps (a) to (d) of FIG. 5A, and as shown in FIG. 6H. The passivation layer is formed of a resistance change material, but a hole for performing an electro-forming process is formed in a portion of the switching region 181b formed on the transparent electrode layer 160, and one electrode of the IV meter corresponds to the hole. And the other electrode contacts the surface of the switching region 181b, and then conducts an electro-forming process on the switching region 181b by applying a voltage to the conductive filament 183b. ) Can be formed.

After the electro-forming process is performed on the switching region 181b, as shown in FIG. 6I, the second contact electrode 120b may be formed on the passivation layer to complete the light emitting device display.

7 is a view showing a manufacturing process of a light emitting device display device according to a third embodiment of the present invention.

Similar to the first embodiment, the third embodiment of the present invention forms a separate switching element between the light emitting element and the second contact electrode.

Referring to FIG. 7, after the steps (a) to (d) of FIG. 5A are performed to form the transparent electrode layer 160 on each of the plurality of light emitting devices, as shown in FIG. 7J, the transparent electrode layer A switching element 170b is formed of a resistance change material over the 160, one electrode of the IV meter 400 contacts the switching element 170b, and the other electrode contacts the transparent electrode layer 160 to electro-forming. By performing the process, the conductive filament 183d is formed in the switching element 170b.

Thereafter, after passivation is performed on the plurality of light emitting devices using general passivation materials, the second contact electrode 120b is formed on the upper surface of the second contact electrode 120b to contact the switching device 170b.

Also in the light emitting device display according to the third embodiment, the switch of the switching device 170b by applying a SET voltage or a RESET voltage between the first contact electrode 110b and the second contact electrode 120b for each light emitting device. When the state (switch on / switch off) is changed and the turn-on voltage is applied when the switching element 170b is in the switched-on state, the corresponding light emitting element is turned on to generate light.

So far I looked at the center of the preferred embodiment for the present invention. Those skilled in the art will appreciate that the present invention can be implemented in a modified form without departing from the essential features of the present invention. Therefore, the disclosed embodiments should be considered in descriptive sense only and not for purposes of limitation. The scope of the present invention is shown in the claims rather than the foregoing description, and all differences within the scope will be construed as being included in the present invention.

Claims (21)

Board; And Adjacent light emitting devices formed by the substrate and adjacent to each other by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction perpendicular to the first direction; And a light emitting device array including a plurality of light emitting devices connected to each other. Each of the plurality of light emitting elements A switching element formed of a resistance change material between the first contact electrode and the light emitting element is turned on according to a potential difference between the first contact electrode and the second contact electrode connected thereto to emit light Device display device. The method of claim 1, wherein each of the plurality of light emitting elements A first semiconductor layer formed on the substrate; An active layer formed on the first semiconductor layer; A second semiconductor layer formed on the active layer; The switching element formed on the first semiconductor layer and formed of a resistance change material; The first contact electrode formed on the first switching element; A transparent electrode layer formed on the second semiconductor layer; And And the second contact electrode formed on the transparent electrode layer. The method of claim 2, The switching element is a conductive filament is formed therein when a voltage above a threshold voltage inherent to the resistance change material is applied, the state of the resistance change material is changed from a high resistance state to a low resistance state to maintain a switched on state Light emitting element display device. The method of claim 3, wherein The switching device is a light emitting device characterized in that the switching element is switched on by forming a conductive filament therein, or the conductive filament formed therein is extinguished according to the voltage applied between the first contact electrode and the second contact electrode Display device. Board; And Adjacent light emitting devices formed by the substrate and adjacent to each other by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction perpendicular to the first direction; And a light emitting device array including a plurality of light emitting devices connected to each other. The plurality of light emitting devices are passivated with a resistance change material, the second contact electrode is formed on the passivation material, and a switching region formed between the second contact electrode and the light emitting device is connected to the switch. A light emitting device display device, characterized in that turned on in accordance with the potential difference between the first contact electrode and the second contact electrode to generate light. The method of claim 5, wherein each of the plurality of light emitting elements A first semiconductor layer formed on the substrate; An active layer formed on the first semiconductor layer; A second semiconductor layer formed on the active layer; The first contact electrode formed on the first semiconductor layer; A transparent electrode layer formed on the second semiconductor layer; And And the second contact electrode formed on the switching region formed of a passivation material on the transparent electrode layer. The method of claim 6, The switching region is characterized in that the conductive filament is formed when a voltage higher than a threshold voltage inherent to the resistance change material is applied, so that the state of the resistance change material is changed from a high resistance state to a low resistance state so that the switched on state is maintained. Light emitting element display device. The method of claim 7, wherein The switching device is a light emitting device characterized in that the switching element is switched on by forming a conductive filament therein, or the conductive filament formed therein is extinguished according to the voltage applied between the first contact electrode and the second contact electrode Display device. Board; And Adjacent light emitting devices formed by the substrate and adjacent to each other by a plurality of first contact electrodes formed in parallel to each other in a first direction and a plurality of second contact electrodes formed in parallel to each other in a second direction perpendicular to the first direction; And a light emitting device array including a plurality of light emitting devices connected to each other. Each of the plurality of light emitting elements Wherein the switching element formed of the resistance change material between the second contact electrode and the light emitting element is turned on according to a potential difference between the first contact electrode and the second contact electrode connected thereto to emit light Device display device. The method of claim 9, wherein each of the plurality of light emitting elements A first semiconductor layer formed on the substrate; An active layer formed on the first semiconductor layer; A second semiconductor layer formed on the active layer; The first contact electrode formed on the first semiconductor layer; A transparent electrode layer formed on the second semiconductor layer; A switching element formed of a resistance change material on the transparent electrode layer; And And the second contact electrode formed on the switching element. The method of claim 10, The switching element is a conductive filament is formed therein when a voltage above a threshold voltage inherent to the resistance change material is applied, the state of the resistance change material is changed from a high resistance state to a low resistance state to maintain a switched on state Light emitting element display device. The method of claim 11, The switching device is a light emitting device characterized in that the switching element is switched on by forming a conductive filament therein, or the conductive filament formed therein is extinguished according to the voltage applied between the first contact electrode and the second contact electrode Display device. (a) sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on the substrate; (b) etching the first semiconductor layer, the active layer, and the second semiconductor layer so that a plurality of light emitting devices are separated and a portion of the first semiconductor layer of each light emitting device is exposed to the outside; (c) forming a switching element with a resistance change material on each of the first semiconductor layers exposed to the outside of the plurality of light emitting elements, and performing an electro-forming process on the switching element; (d) forming a first contact electrode on the switching element and forming a transparent electrode layer on the second semiconductor layer; And (e) forming a second contact electrode on the transparent electrode. The method of claim 13, wherein in step (c) And applying a voltage between the first semiconductor layer and the switching element to perform an electro-forming process on the switching element. The method of claim 13, The first contact electrode is formed to be connected to the first contact electrode of the light emitting element adjacent in the first direction, And a second contact electrode formed in a second direction orthogonal to the first direction is connected to a second contact electrode of a light emitting element adjacent in a second direction. (a) sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on the substrate; (b) etching the first semiconductor layer, the active layer, and the second semiconductor layer so that a plurality of light emitting devices are separated and a portion of the first semiconductor layer of each light emitting device is exposed to the outside; (c) forming a first contact electrode on a first semiconductor layer exposed to the outside of the plurality of light emitting devices, and forming a transparent electrode layer on the second semiconductor layer; (d) forming a passivation layer on the light emitting device to cover the transparent electrode layer with a resistance change material; (e) performing an electro-forming process on the switching region formed on the transparent electrode layer during the passivation; And and (f) forming a second contact electrode over the switching region. The method of claim 16, In the step (d), passivation is performed to form a hole to expose a portion of the transparent electrode layer, In the step (e), a method of manufacturing a light emitting device display device, characterized in that the electro-forming process for the switching region by applying a voltage to the transparent electrode layer and the switching region exposed through the hole. The method of claim 16, The first contact electrode is formed to be connected to the first contact electrode of the light emitting element adjacent in the first direction, And a second contact electrode formed in a second direction orthogonal to the first direction is connected to a second contact electrode of a light emitting element adjacent in a second direction. (a) sequentially forming a first semiconductor layer, an active layer, and a second semiconductor layer on the substrate; (b) etching the first semiconductor layer, the active layer, and the second semiconductor layer so that a plurality of light emitting devices are separated and a portion of the first semiconductor layer of each light emitting device is exposed to the outside; (c) forming a first contact electrode on a first semiconductor layer exposed to the outside of the plurality of light emitting devices, and forming a transparent electrode layer on the second semiconductor layer; (d) forming a switching device on the transparent electrode layer with a resistance change material and performing an electro-forming process on the switching device; And (f) forming a second contact electrode on the switching element. 20. The method of claim 19, wherein in step (d) And applying a voltage between the transparent electrode layer and the switching element to perform an electro-forming process on the switching element. The method of claim 19, The first contact electrode is formed to be connected to the first contact electrode of the light emitting element adjacent in the first direction, And a second contact electrode formed in a second direction orthogonal to the first direction is connected to a second contact electrode of a light emitting element adjacent in a second direction.

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