[go: up one dir, main page]

WO2018179096A1 - Transfer-type photosensitive film, method for forming cured film pattern, and touch panel - Google Patents

Transfer-type photosensitive film, method for forming cured film pattern, and touch panel Download PDF

Info

Publication number
WO2018179096A1
WO2018179096A1 PCT/JP2017/012680 JP2017012680W WO2018179096A1 WO 2018179096 A1 WO2018179096 A1 WO 2018179096A1 JP 2017012680 W JP2017012680 W JP 2017012680W WO 2018179096 A1 WO2018179096 A1 WO 2018179096A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin layer
group
type photosensitive
meth
transfer type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/012680
Other languages
French (fr)
Japanese (ja)
Inventor
和仁 渡部
匠 渡邊
向 郁夫
攻治 安部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to CN201780089039.7A priority Critical patent/CN110462559A/en
Priority to JP2019508391A priority patent/JP6943279B2/en
Priority to PCT/JP2017/012680 priority patent/WO2018179096A1/en
Priority to KR1020197028867A priority patent/KR102401215B1/en
Publication of WO2018179096A1 publication Critical patent/WO2018179096A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04Coating
    • C08J7/046Forming abrasion-resistant coatings; Forming surface-hardening coatings
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/2002Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2012Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

Definitions

  • the present invention relates to a transfer type photosensitive film, a method for forming a cured film pattern, and a touch panel.
  • a projected capacitive touch panel In general, in a projected capacitive touch panel, a plurality of X electrodes and a plurality of Y electrodes orthogonal to the X electrodes have a two-layer structure in order to express two-dimensional coordinates based on the X and Y axes. Forming. As a material for these electrodes, ITO (Indium-Tin-Oxide) is the mainstream.
  • a metal wiring such as copper is formed in the frame region in order to transmit a touch position detection signal.
  • a corrosive component such as moisture or salt may enter the sensing region from the inside when touching the fingertip.
  • the metal wiring corrodes, and there is a risk of an increase in electrical resistance between the electrode and the driving circuit, or disconnection.
  • a photosensitive resin composition layer containing a di (meth) acrylate compound having a dicyclopentanyl structure or a dicyclopentenyl structure is provided on a touch panel substrate, and this photosensitive resin composition
  • touch panels in which electrodes are provided on a flexible substrate may be used.
  • This touch panel is subjected to processing such as punching or cutting with a flat plate punching machine or a rotary cutter in order to improve productivity.
  • the cured film pattern provided on the touch panel is required to have crack resistance that does not easily cause cracks even after the above-described steps.
  • An object of the present invention is to provide a transfer type photosensitive film capable of forming a cured film pattern having both low moisture permeability and crack resistance, a cured film pattern forming method using the same, and a touch panel. .
  • the present inventors have intensively studied, and in the photosensitive resin layer containing a binder polymer, a photopolymerizable compound, and a photopolymerization initiator, as a copolymerization component, branched and / or alicyclic rings. It has been found that a cured film pattern having low moisture permeability can be formed by using a binder polymer containing a monomer having a structure and a monomer having an acidic group. On the other hand, the present inventors have also obtained the knowledge that the above-mentioned cured film pattern tends to decrease the crack resistance.
  • the compound having the functional group capable of reacting with the acidic group and the ethylenically unsaturated group is converted into an ethylenically unsaturated group equivalent of the binder polymer. It has been found that a cured film pattern that achieves both low moisture permeability and crack resistance can be formed by further reacting in such a way as to satisfy a specific range, and the present invention has been completed.
  • the present invention comprises a support film and a first resin layer provided on the support film, and the first resin layer contains a binder polymer, a photopolymerizable compound, and a photopolymerization initiator.
  • the binder polymer contains a group having a branched and / or alicyclic structure in the side chain, a group having an acidic group in the side chain, and a group having an ethylenically unsaturated group in the side chain;
  • a transfer type photosensitive film having an ethylenically unsaturated group equivalent of 50 to 3.00 (mmol / g).
  • a cured film pattern having both low moisture permeability and crack resistance can be formed by having the above configuration.
  • the cured film pattern formed on the metal wiring can function as a protective film for rust prevention of the metal wiring.
  • the reason why the above effect is obtained is that by adding a group having a branched and / or alicyclic structure in the side chain of the binder polymer, a bulky structure is added to reduce the moisture permeability of the cured film. It is considered that forming such a low moisture-permeable cured film pattern on the metal wiring makes it difficult for the moisture that causes corrosion to come into contact with the metal wiring.
  • a group having an ethylenically unsaturated group in the side chain of the binder polymer and adjusting the ethylenically unsaturated group equivalent of the binder polymer to a specific range the distance between cross-linking points in the cured film becomes longer. It is considered that flexibility was improved and crack resistance was compatible.
  • the binder polymer may further contain a group having a phenyl group in the side chain.
  • the first resin layer may further contain a phosphoric ester having an ethylenically unsaturated group.
  • a protective film capable of highly suppressing corrosion of metal wiring for example, rust of copper wiring
  • metal wiring for example, rust of copper wiring
  • the photopolymerization initiator may contain an oxime ester compound.
  • the transfer type photosensitive film has high sensitivity, and the moisture permeability of the formed cured film pattern can be further reduced.
  • the transfer type photosensitive film according to the present invention can further include a second resin layer containing metal oxide particles provided on the first resin layer.
  • the projected capacitive touch panel has a two-layer structure on a substrate by a plurality of X electrodes using a transparent electrode material and a plurality of Y electrodes using a transparent electrode material orthogonal to the X electrodes. It has a structure in which a transparent electrode pattern is formed.
  • a color difference becomes large due to a difference in optical reflection characteristics between a portion where the transparent electrode pattern is formed and a portion where the transparent electrode pattern is not formed.
  • OCA Optical Clear Adhesive
  • the transfer type photosensitive film having the second resin layer according to the present invention According to the transfer type photosensitive film having the second resin layer according to the present invention, the above problem can be suppressed.
  • the first resin layer of the transfer type photosensitive film according to the present invention is adhered to the substrate having electrodes, and the side on which the electrodes of the substrate are provided and the first resin layer are in close contact with each other. And a step of laminating the first resin layer on the substrate so as to remove a portion other than the predetermined portion and forming a cured film covering a part or all of the electrode.
  • a first method for forming a cured film pattern is provided.
  • the second resin layer and the first resin layer of the transfer type photosensitive film according to the present invention having the second resin layer are provided on the substrate having the electrode. Laminating the second side and the second resin layer in close contact with each other, and exposing the second resin layer and the predetermined portion of the first resin layer on the base material, then removing other than the predetermined portion, Forming a cured film pattern that covers a part or all of the electrode, and a second method for forming a cured film pattern.
  • the first and second methods for forming a cured film pattern according to the present invention it is possible to form a cured film pattern having both low moisture permeability and crack resistance on the electrode.
  • the cured film pattern can have a function of adjusting the refractive index, and suppress the above-described problems of bone appearance phenomenon and screen transmittance decrease. be able to.
  • the present invention also provides a cured film obtained by curing the first resin layer in the transfer type photosensitive film according to the present invention.
  • the present invention is also obtained by curing only the first resin layer or both the first resin layer and the second resin layer of the transfer type photosensitive film according to the present invention having the second resin layer. Provide a cured film.
  • the present invention also provides a cured product of the first resin layer in the transfer type photosensitive film according to the present invention or a second resin layer of the transfer type photosensitive film according to the present invention having a second resin layer.
  • a touch panel provided with a cured film pattern comprising a cured product of the above and a cured product of a first resin layer is provided.
  • the transfer type photosensitive film which can form the cured film pattern which makes low moisture permeability and crack tolerance compatible, the formation method of a cured film pattern using the same, and a touch panel can be provided. .
  • (meth) acrylic acid means acrylic acid or methacrylic acid
  • (meth) acrylate means acrylate or a corresponding methacrylate.
  • a or B only needs to include one of A and B, or may include both.
  • the term “layer” includes a structure formed in a part in addition to a structure formed in the entire surface when observed as a plan view.
  • the term “process” is not limited to an independent process, and even if it cannot be clearly distinguished from other processes, the term “process” is used as long as the intended action of the process is achieved. included.
  • the numerical range indicated by using “to” indicates a range including the numerical values described before and after “to” as the minimum value and the maximum value, respectively.
  • each component in the composition is the sum of the plurality of substances present in the composition unless there is a specific indication when there are a plurality of substances corresponding to each component in the composition. Means quantity.
  • the exemplary materials may be used alone or in combination of two or more unless otherwise specified.
  • the upper limit value or lower limit value of a numerical range of a certain step may be replaced with the upper limit value or lower limit value of the numerical range of another step.
  • the upper limit value or the lower limit value of the numerical range may be replaced with the values shown in the examples.
  • the transfer type photosensitive film of the present embodiment comprises a support film and a first resin layer provided on the support film.
  • the transfer type photosensitive film of the present embodiment may further include a second resin layer containing metal oxide particles provided on the first resin layer.
  • These transfer type photosensitive films may further include a protective film provided on the first resin layer or the second resin layer.
  • FIG. 1 is a schematic sectional view showing a transfer type photosensitive film according to an embodiment of the present invention.
  • the transfer type photosensitive film 1 shown in FIG. 1 includes a support film 10, a first resin layer 20 provided on the support film 10, and a second resin layer provided on the first resin layer. 30 and a protective film 40 provided on the second resin layer 30.
  • the transfer-type photosensitive film for example, a cured film satisfying both functions of protecting the metal wiring on the frame of the touch panel or the transparent electrode of the touch panel, and making the transparent electrode pattern invisible or improving the visibility of the touch screen. Patterns can be formed in a batch.
  • a polymer film As the support film 10, a polymer film can be used.
  • the material for the polymer film include polyethylene terephthalate, polycarbonate, polyethylene, polypropylene, polyethersulfone, and cycloolefin polymer.
  • the thickness of the support film 10 is preferably 5 to 100 ⁇ m, preferably 10 to 70 ⁇ m, from the viewpoint of ensuring coverage and suppressing the reduction in resolution when irradiated with actinic rays through the support film 10. Is more preferably 15 to 40 ⁇ m, and particularly preferably 15 to 35 ⁇ m.
  • the first resin layer 20 includes a binder polymer (hereinafter also referred to as (A) component), a photopolymerizable compound (hereinafter also referred to as (B) component), and a photopolymerization initiator (hereinafter referred to as (C) component). It is preferably formed from a photosensitive resin composition containing
  • the component (A) includes a group having a branched structure and / or an alicyclic structure in the side chain (hereinafter also referred to as (i) group), and a group having an acidic group in the side chain (hereinafter referred to as (ii) And a binder polymer (hereinafter also referred to as component (A-1)) containing a group having an ethylenically unsaturated group in the side chain (hereinafter also referred to as (iii) group).
  • the group can be introduced by a monomer containing a group having a branched structure in the side chain or a monomer containing a group having an alicyclic structure in the side chain.
  • the group can be introduced by a monomer containing a group having an acidic group in the side chain.
  • the monomer containing a group having a branched structure in the side chain include, for example, i-propyl (meth) acrylate, i-butyl (meth) acrylate, s-butyl (meth) acrylate, and (meth) acrylic.
  • acrylic acid 3- examples include octyl and (meth) acrylic acid t-octyl.
  • i-propyl (meth) acrylate, i-butyl (meth) acrylate, and t-butyl methacrylate are preferable, and i-propyl methacrylate and t-butyl methacrylate are more preferable.
  • the monomer containing a group having an alicyclic structure in the side chain include (meth) acrylate having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. More specific examples include, for example, (meth) acrylic acid (bicyclo [2.2.1] heptyl-2), (meth) acrylic acid-1-adamantyl, (meth) acrylic acid-2-adamantyl, ) -3-methyl-1-adamantyl acrylate, 3,5-dimethyl-1-adamantyl (meth) acrylate, 3-ethyladamantyl (meth) acrylate, 3-methyl-5 (meth) acrylate -Ethyl-1-adamantyl, (meth) acrylic acid-3,5,8-triethyl-1-adamantyl, (meth) acrylic acid-3,5-dimethyl-8-ethyl-1-adamantyl, (meth) acrylic acid 2-methyl-2-adamantyl, 2-ethyl
  • cyclohexyl (meth) acrylic acid, (nor) bornyl (meth) acrylic acid, isobornyl (meth) acrylic acid, (meth) acrylic acid-1-adamantyl, (meth) acrylic acid- 2-adamantyl, phentyl (meth) acrylate, 1-menthyl (meth) acrylate, and tricyclodecane (meth) acrylate are preferred, cyclohexyl (meth) acrylate, (nor) bornyl (meth) acrylate, (meth) ) Isobornyl acrylate, 2-adamantyl (meth) acrylate, and tricyclodecane (meth) acrylate are particularly preferred.
  • the moisture permeability of the formed cured film pattern can be sufficiently reduced.
  • the monomer containing a group having an acidic group in the side chain can be appropriately selected from known ones.
  • the component (A-1) contains a group having an acidic group in the side chain
  • patterning by alkali development can be performed. Further, introduction of a group having an ethylenically unsaturated group in the side chain and adjustment of the ethylenically unsaturated group equivalent in the binder polymer are facilitated.
  • the group having an ethylenically unsaturated group in the side chain is not particularly limited, and a (meth) acryloyl group is preferable.
  • the connection between the ethylenically unsaturated group and the monomer is not particularly limited as long as it is a divalent linking group such as an ester group, an amide group, or a carbamoyl group.
  • the method of introducing an ethylenically unsaturated group into the side chain can be appropriately selected from known methods.
  • a method of adding a (meth) acrylate having an epoxy group to a group having an acidic group, a hydroxy group It can be introduced into the component (A-1) by a method of adding a (meth) acrylate having an isocyanate group to a group having a group, a method of adding a (meth) acrylate having a hydroxy group to a group having an isocyanate group, or the like.
  • the method of adding a (meth) acrylate having an epoxy group to a repeating unit having an acidic group is preferred because it is the easiest to produce and is low in cost.
  • the crack resistance of the formed cured film pattern can be sufficiently improved.
  • the ratio of the monomers constituting the group having a branched structure and / or alicyclic structure in the side chain is preferably 10 to 70 mol%, It is more preferably 65 mol%, particularly preferably 20 to 60 mol%.
  • the ratio of the monomer constituting the group having an acidic group in the side chain based on the total amount of the monomer constituting the component (A-1) is preferably 5 to 70 mol%, and 10 to 60 mol%. More preferred is 20 to 50 mol%.
  • the ratio of the monomer constituting the group having an ethylenically unsaturated group in the side chain based on the total amount of the monomer constituting the component (A-1) is preferably 5 to 70 mol%. It is more preferably mol%, more preferably 20 to 50 mol%.
  • the ethylenically unsaturated group equivalent of the component (A-1) is 0.50 to 3.00 mmol / g from the viewpoint of achieving both low moisture permeability and crack resistance of the cured film pattern. Preferably, it is 1.00 to 3.00 mmol / g, more preferably 1.50 to 3.00 mmol / g.
  • the ethylenically unsaturated group equivalent can be measured by a titration method using the addition reaction (Michael addition) of an amine to the ethylenically unsaturated group of the (meth) acryloyl group of the binder polymer.
  • the specific measurement method is as follows.
  • the binder polymer solution is heated at 130 ° C. for 1 hour to remove volatile components to obtain a solid content.
  • About 1 g of a sample is precisely weighed and placed in an Erlenmeyer flask, and then about 10 ml of acetone is added and dissolved.
  • Ethylenically unsaturated group equivalent (mmol / g) f ⁇ (AB) / 2S
  • A is a titration (ml) of a 0.5 mol / L acetic acid / methanol titration solution required for titration of the sample
  • B is a 0.5 mol / L acetic acid / methanol titration solution required for a blank test.
  • f is a factor (concentration conversion factor) of 0.5 mol / L acetic acid / methanol titration solution
  • S is sampled amount (g) [if sample contains solvent, amount excluding solvent ( g)].
  • Component (A-1) is a group other than the group having a branched structure and / or alicyclic structure in the side chain, a group having an acidic group in the side chain, and a group having an ethylenically unsaturated group in the side chain. Structural units derived from other groups can be contained.
  • the component (A-1) is preferably a copolymer containing a structural unit derived from (meth) acrylic acid and (meth) acrylic acid alkyl ester. In this case, the copolymer is the above (meth)
  • the structural unit may contain other monomers that can be copolymerized with acrylic acid and (meth) acrylic acid alkyl ester.
  • Examples of the (meth) acrylic acid alkyl ester include (meth) acrylic acid methyl ester, (meth) acrylic acid ethyl ester, (meth) acrylic acid butyl ester, (meth) acrylic acid-2-ethylhexyl ester, (meth) acrylic And acid hydroxyl ethyl ester.
  • Other monomers are preferably compounds having a phenyl group.
  • the compound having a phenyl group include phenylbenzyl (meth) acrylate, phenoxybenzyl (meth) acrylate, nonylphenoxypolyethylene glycol acrylate, ethoxylated o-phenylphenol acrylate, and benzyl (meth) acrylate.
  • benzyl (meth) acrylate From the viewpoint of reducing the moisture permeability of the cured film, it is preferable to use benzyl (meth) acrylate.
  • the binder polymer contains a group having a phenyl group in the side chain, a bulky structure is added, so that the moisture permeability of the cured film is reduced.
  • Other monomers also include (meth) acrylic acid glycidyl ester, styrene and the like.
  • the component (A-1) is a (meth) acrylic acid tricyclodecane ester or (meth) acrylic acid cyclohexyl ester as a group (i) from the viewpoint of forming a cured film pattern having both low moisture permeability and crack resistance.
  • the weight average molecular weight of the component (A-1) is preferably 10,000 to 200,000, more preferably 15,000 to 150,000, and more preferably 30,000 to 150,000 from the viewpoint of resolution. 000 is more preferable, 30,000 to 100,000 is particularly preferable, and 40,000 to 100,000 is very preferable.
  • a weight average molecular weight can be measured by the gel permeation chromatography method described in the Example of this specification.
  • the acid value of the component (A-1) is preferably 75 mgKOH / g or more from the viewpoint of easily forming a cured film (cured film pattern) having a desired shape by alkali development. From the viewpoint of achieving both controllability of the cured film shape and rust prevention of the cured film, the acid value of the component (A-1) is preferably 75 to 200 mgKOH / g, and preferably 75 to 150 mgKOH / g. g is more preferable, and 75 to 120 mgKOH / g is further more preferable.
  • an acid value can be measured by the method described in the Example of this specification.
  • the first resin layer 20 may further contain a binder polymer other than the component (A-1) described above.
  • the content ratio of the component (A-1) in the component (A) is preferably 60 to 100% by mass, more preferably 70 to 100% by mass based on the total amount of the component (A). Preferably, it is 80 to 100% by mass.
  • a photopolymerizable compound having an ethylenically unsaturated group can be used as the component (B).
  • the photopolymerizable compound having an ethylenically unsaturated group include a monofunctional vinyl monomer having one polymerizable ethylenically unsaturated group in the molecule and two polymerizable ethylenically unsaturated groups in the molecule.
  • Bifunctional vinyl monomers or polyfunctional vinyl monomers having at least three polymerizable ethylenically unsaturated groups in the molecule can be mentioned.
  • Examples of the monofunctional vinyl monomer having one polymerizable ethylenically unsaturated group in the molecule include those exemplified as monomers used for the synthesis of a copolymer which is a preferred example of the component (A). Can be mentioned.
  • the bifunctional vinyl monomer having two polymerizable ethylenically unsaturated groups in the molecule includes a compound having a tricyclodecane skeleton or a tricyclodecene skeleton from the viewpoint of reducing the moisture permeability of the cured film. preferable. From the viewpoint of inhibiting corrosion of the metal wiring and transparent electrode pattern, it is preferable that the compound having a tricyclodecane skeleton or a tricyclodecene skeleton includes a di (meth) acrylate compound represented by the following general formula (B-1). .
  • R 1 and R 2 each independently represent a hydrogen atom or a methyl group
  • X represents a divalent group having a tricyclodecane skeleton or a tricyclodecene skeleton
  • R 3 and R 4 each independently represents an alkylene group having 1 to 4 carbon atoms
  • n and m each independently represents an integer of 0 to 2
  • p and q each independently represents an integer of 0 or more.
  • P + q 0 to 10 is selected.
  • R 3 and R 4 are preferably an ethylene group or a propylene group, and more preferably an ethylene group.
  • the propylene group may be either an n-isopropylene group or an isopropylene group.
  • the divalent group having a tricyclodecane skeleton or a tricyclodecene skeleton contained in X has a bulky structure, so that the cured film has a low viscosity. Moisture permeability can be realized, and the corrosion resistance of the metal wiring and the transparent electrode can be improved.
  • tricyclodecane skeleton and “tricyclodecene skeleton” in the present specification refer to the following structures (where each bond is an arbitrary position).
  • a compound having a tricyclodecane skeleton or a tricyclodecene skeleton a compound having a tricyclodecane skeleton such as tricyclodecane dimethanol di (meth) acrylate is preferable from the viewpoint of low moisture permeability of the obtained cured film pattern.
  • These are available as DCP and A-DCP (both manufactured by Shin-Nakamura Chemical Co., Ltd.).
  • the proportion of the compound having a tricyclodecane skeleton or a tricyclodecene skeleton is, among the total amount of 100 parts by mass of the photopolymerizable compound contained in the photosensitive resin composition, from the viewpoint of reducing moisture permeability. , 50 parts by mass or more, preferably 70 parts by mass or more, and more preferably 80 parts by mass or more.
  • a bifunctional vinyl monomer having two polymerizable ethylenically unsaturated groups in the molecule, other than a compound having a tricyclodecane skeleton or a tricyclodecene skeleton includes polyethylene glycol di (meth) acrylate and trimethylolpropane. Examples include di (meth) acrylate, polypropylene glycol di (meth) acrylate, 2,2-bis (4- (meth) acryloxypolyethoxypolypropoxyphenyl) propane, and bisphenol A diglycidyl ether di (meth) acrylate.
  • the polyfunctional vinyl monomer having at least three polymerizable ethylenically unsaturated groups conventionally known ones can be used without particular limitation.
  • the polyfunctional vinyl monomer includes a (meth) acrylate compound having a skeleton derived from trimethylolpropane such as trimethylolpropane tri (meth) acrylate; tetramethylolmethane (Meth) acrylate compounds having a skeleton derived from tetramethylolmethane such as tri (meth) acrylate and tetramethylolmethanetetra (meth) acrylate; derived from pentaerythritol such as pentaerythritol tri (meth) acrylate and pentaerythritol tetra (meth) acrylate (Meth) acrylate compounds having the following skeleton: bones derived from dipentaerythritol such
  • the polyfunctional vinyl monomer includes a (meth) acrylate compound having a skeleton derived from pentaerythritol, a (meth) acrylate compound having a skeleton derived from dipentaerythritol, and a (meth) acrylate having a skeleton derived from trimethylolpropane. It is more preferable to include a compound, a (meth) acrylate compound having a skeleton derived from ditrimethylolpropane, or a (meth) acrylate compound having a skeleton derived from cyanuric acid. Among these, it is preferable to use a (meth) acrylate compound having a skeleton derived from ditrimethylolpropane because the crack resistance of the cured film can be improved.
  • (meth) acrylate compound having a skeleton derived from will be described by taking a (meth) acrylate compound having a skeleton derived from ditrimethylolpropane as an example.
  • (Meth) acrylate having a skeleton derived from ditrimethylolpropane means an esterified product of ditrimethylolpropane and (meth) acrylic acid, and the esterified product includes a compound modified with an alkyleneoxy group.
  • the esterified product preferably has a maximum number of 4 ester bonds in one molecule, but a compound having 1 to 3 ester bonds may be mixed.
  • the component (B) is a compound having a tricyclodecane skeleton or a tricyclodecene skeleton, ditrimethylolpropane tetra (meth) acrylate, or the like. It is preferable to include one or more of (meth) acrylate compounds having a skeleton derived from ditrimethylolpropane.
  • the content of the component (A) and the component (B) is preferably 35 to 85 parts by mass of the component (A) with respect to 100 parts by mass of the total amount of the components (A) and (B).
  • the amount is more preferably 80 parts by mass, further preferably 50 to 70 parts by mass, and particularly preferably 55 to 65 parts by mass.
  • a conventionally known photopolymerization initiator can be used without any particular limitation, but a highly transparent photopolymerization initiator is preferably used.
  • the component (C) preferably contains an oxime ester compound and / or a phosphine oxide compound in that a cured resin film pattern can be formed with sufficient resolution even on a substrate with a thickness of 10 ⁇ m or less.
  • the phosphine oxide compound include 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide.
  • the oxime ester compound is preferably a compound represented by the following general formula (1), a compound represented by the following general formula (2), or a compound represented by the following general formula (3).
  • R 11 and R 12 each independently represents an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 4 to 10 carbon atoms, a phenyl group or a tolyl group, and having 1 to 8 carbon atoms
  • An alkyl group, a cycloalkyl group having 4 to 6 carbon atoms, a phenyl group or a tolyl group is preferable, and an alkyl group having 1 to 4 carbon atoms, a cycloalkyl group having 4 to 6 carbon atoms, a phenyl group or a tolyl group is preferable.
  • R 13 represents —H, —OH, —COOH, —O (CH 2 ) OH, —O (CH 2 ) 2 OH, —COO (CH 2 ) OH or —COO (CH 2 ) 2 OH; It is preferably H, —O (CH 2 ) OH, —O (CH 2 ) 2 OH, —COO (CH 2 ) OH, or —COO (CH 2 ) 2 OH, and —H, —O (CH 2 ) 2 OH or —COO (CH 2 ) 2 OH is more preferable.
  • R 14 each independently represents an alkyl group having 1 to 6 carbon atoms, and is preferably a propyl group.
  • R 15 represents NO 2 or ArCO (wherein Ar represents an aryl group), and Ar is preferably a tolyl group.
  • R 16 and R 17 each independently represent an alkyl group having 1 to 12 carbon atoms, a phenyl group, or a tolyl group, preferably a methyl group, a phenyl group, or a tolyl group.
  • R 18 represents an alkyl group having 1 to 6 carbon atoms, and is preferably an ethyl group.
  • R 19 is an organic group having an acetal bond, and is preferably a substituent corresponding to R 19 in a compound represented by the formula (3-1) described later.
  • R 20 and R 21 each independently represents an alkyl group having 1 to 12 carbon atoms, a phenyl group or a tolyl group, preferably a methyl group, a phenyl group or a tolyl group, and more preferably a methyl group.
  • R 22 represents a hydrogen atom or an alkyl group.
  • the compound represented by the above general formula (1) is available as IRGACURE OXE 01 (product name, manufactured by BASF Corporation).
  • the compound represented by the general formula (2) is available as DFI-091 (product name, manufactured by Daito Chemix Co., Ltd.).
  • the compound represented by the general formula (3) is available as Adekaoptomer N-1919 (product name, manufactured by ADEKA Corporation).
  • the content of the component (C) is preferably 0.1 to 10 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B) in terms of excellent photosensitivity and resolution. It is more preferably from 8 to 8 parts by mass, further preferably from 1 to 6 parts by mass, and particularly preferably from 1 to 4 parts by mass.
  • the photosensitive resin composition according to this embodiment has a triazole compound having a mercapto group, a tetrazole compound having a mercapto group, a thiadiazole compound having a mercapto group, and an amino group from the viewpoint of further improving the rust prevention property of the cured film. It is preferable to further contain at least one compound selected from the group consisting of a triazole compound and a tetrazole compound having an amino group (hereinafter also referred to as component (D)).
  • the triazole compound having a mercapto group include 3-mercapto-triazole (manufactured by Wako Pure Chemical Industries, Ltd., product name: 3MT).
  • Examples of the thiadiazole compound having a mercapto group include 2-amino-5-mercapto-1,3,4-thiadiazole (product name: ATT, manufactured by Wako Pure Chemical Industries, Ltd.).
  • triazole compound having an amino group examples include benzotriazole, 1H-benzotriazole-1-acetonitrile, benzotriazole-5-carboxylic acid, 1H-benzotriazole-1-methanol, carboxybenzotriazole, etc. , 3-mercaptotriazole, 5-mercaptotriazole, and other triazole compounds containing a mercapto group are substituted with amino groups.
  • tetrazole compounds having an amino group examples include 5-amino-1H-tetrazole, 1-methyl-5-amino-tetrazole, 1-methyl-5-mercapto-1H-tetrazole, and 1-carboxymethyl-5-amino-tetrazole.
  • Etc. These tetrazole compounds may be water-soluble salts thereof. Specific examples include alkali metal salts of 1-methyl-5-amino-tetrazole such as sodium, potassium and lithium.
  • the content thereof is preferably 0.05 to 5.0 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B). 0.1 to 2.0 parts by mass is more preferable, 0.2 to 1.0 part by mass is further preferable, and 0.3 to 0.8 part by mass is particularly preferable.
  • the photosensitive resin composition according to the present embodiment has adhesiveness to a transparent electrode such as a substrate and an ITO electrode that may have an index matching layer, and good developability on a metal wiring such as a copper wiring. From the viewpoint of forming a cured film that has been achieved at a high level, and from the viewpoint of preventing the occurrence of development residue, it further contains a phosphate ester containing an ethylenically unsaturated group (hereinafter also referred to as component (E)). Is preferred.
  • Unichemical Corporation has a high level of compatibility between the adhesion to the base material and the ITO electrode and the developability on the metal wiring while ensuring sufficient rust prevention of the cured film to be formed.
  • the company's Phosmer series (Phosmer-M, Phosmer-CL, Phosmer-PE, Phosmer-MH, Phosmer-PP, etc.) or KAYAMER series (PM-21, PM-2, etc.) manufactured by Nippon Kayaku Co., Ltd. are preferred. .
  • the content is the component (A) from the viewpoint of achieving both high adhesion to the base material and the ITO electrode and developability on the metal wiring.
  • an adhesion imparting agent such as a silane coupling agent, a rust inhibitor, a leveling agent, A plasticizer, a filler, an antifoaming agent, a flame retardant, a stabilizer, an antioxidant, a fragrance, a thermal crosslinking agent, a polymerization inhibitor, etc. are each added to 100 parts by mass of the total amount of the component (A) and the component (B). About 0.01 to 20 parts by mass can be contained. These can be used alone or in combination of two or more.
  • the thickness of the first resin layer may be 1 to 15 ⁇ m, preferably 2 to 10 ⁇ m, more preferably 3 to 8 ⁇ m, still more preferably 4 to 6 ⁇ m, and 5 to 6 ⁇ m. It is particularly preferred that When the thickness is 1 to 15 ⁇ m, there are few defects at the time of coating, and film formation with excellent transparency is possible.
  • the thickness of the first resin layer after curing (that is, the thickness of the cured film pattern) is also preferably within the above range.
  • the second resin layer 30 is a layer containing metal oxide particles.
  • the second resin layer 30 can have a refractive index relatively higher than that of the first resin layer 20 by containing metal oxide particles.
  • the second resin layer 30 preferably has a refractive index in the range of 1.40 to 1.90 at 633 nm, more preferably 1.50 to 1.90, and 1.53 to 1.85. More preferably, it is particularly preferably 1.55 to 1.75.
  • the refractive index in 633 nm of the 2nd resin layer after hardening is also in the said range.
  • various members used on the cured film pattern when the cured film pattern is provided on a transparent electrode pattern such as ITO. It becomes an intermediate value of the refractive index of the cover glass and the OCA that bonds the transparent electrode pattern to the transparent electrode pattern, and is optical in the portion where the transparent electrode pattern such as ITO is formed and the portion where it is not formed. It is possible to reduce the color difference due to reflection and prevent the appearance of bone. Moreover, it becomes possible to reduce the reflected light intensity of the whole screen, and to suppress the transmittance
  • the refractive index of a transparent electrode such as ITO is preferably 1.80 to 2.10, more preferably 1.85 to 2.05, and even more preferably 1.90 to 2.00.
  • the refractive index of a member such as OCA is preferably 1.45 to 1.55, more preferably 1.47 to 1.53, and further preferably 1.48 to 1.51. .
  • the second resin layer 30 preferably has a minimum light transmittance of 80% or more in a wavelength region of 450 to 650 nm, more preferably 85% or more, and further preferably 90% or more.
  • the minimum light transmittance in the wavelength region of 450 to 650 nm of the second resin layer after curing is also within the above range.
  • the 2nd resin layer 30 can contain said (A) component, (B) component, and (C) component, and said (D) component and / or said (E) component as needed. Can further be contained.
  • the second resin layer 30 does not necessarily contain a photopolymerization component such as the component (B) or the component (C), and the second resin layer is formed by utilizing a photopolymerization component that migrates from an adjacent resin layer due to layer formation. The layer can also be photocured.
  • the second resin layer 30 contains metal oxide particles (hereinafter also referred to as “component (F)”).
  • the metal oxide particles preferably contain metal oxide particles having a refractive index of 1.50 or more at a wavelength of 633 nm.
  • the metal oxide particles include particles made of metal oxides such as zirconium oxide, titanium oxide, tin oxide, zinc oxide, indium tin oxide, indium oxide, aluminum oxide, and yttrium oxide. Among these, particles of zirconium oxide or titanium oxide are preferable from the viewpoint of suppressing the bone appearance phenomenon.
  • the zirconium oxide particles when the material of the transparent electrode is ITO, it is preferable to use zirconium oxide nanoparticles from the viewpoint of improving the refractive index and adhesion between the ITO and the transparent substrate.
  • the particle size distribution Dmax is preferably 40 nm or less.
  • Zirconium oxide nanoparticles are OZ-S30K (product name, manufactured by Nissan Chemical Industries, Ltd.), OZ-S40K-AC (product name, manufactured by Nissan Chemical Industries, Ltd.), SZR-K (dispersion of zirconium oxide methyl ethyl ketone, Sakai Chemical). Kogyo Co., Ltd., product name) and SZR-M (zirconium oxide methanol dispersion, Sakai Chemical Industry Co., Ltd., product name) are commercially available.
  • the second resin layer 30 may contain titanium oxide nanoparticles as the component (F).
  • the particle size distribution Dmax is preferably 50 nm or less, more preferably 10 to 50 nm.
  • oxide particles or sulfide particles containing atoms such as Mg, Al, Si, Ca, Cr, Cu, Zn, and Ba can be used. These can be used alone or in combination of two or more.
  • organic compounds such as a compound having a triazine ring, a compound having an isocyanuric acid skeleton, and a compound having a fluorene skeleton can also be used.
  • the refractive index in wavelength 633nm can be improved.
  • the thickness of the second resin layer 30 may be 0.01 to 1 ⁇ m, preferably 0.03 to 0.5 ⁇ m, more preferably 0.04 to 0.3 ⁇ m, The thickness is more preferably from 0.07 to 0.25 ⁇ m, particularly preferably from 0.05 to 0.2 ⁇ m. When the thickness is 0.01 to 1 ⁇ m, the reflected light intensity of the entire screen can be further reduced. Moreover, it is preferable that the thickness of the 2nd resin layer after hardening is also in the said range.
  • the refractive index of the second resin layer 30 is as follows using ETA-TCM (product name, manufactured by AudioDev GmbH). Can be requested. The following measurement is performed under the condition of 25 ° C. (1) A coating solution for forming the second resin layer is uniformly applied on a glass substrate having a thickness of 0.7 mm, a length of 10 cm and a width of 10 cm by a spin coater, and a hot air residence type dryer at 100 ° C. Dry for 3 minutes to remove the solvent and form a second resin layer. (2) Next, the sample is allowed to stand for 30 minutes in a box dryer (model number: NV50-CA, manufactured by Mitsubishi Electric Corporation) heated to 140 ° C.
  • a box dryer model number: NV50-CA, manufactured by Mitsubishi Electric Corporation
  • the refractive index in the single first resin layer can also be measured by the same method.
  • the value of the outermost surface layer on the protective film side of the second resin layer is used.
  • the transfer type photosensitive film of this embodiment may be provided with other appropriately selected layers as long as the effects of the present invention are obtained.
  • the transfer type photosensitive film may have these layers individually by 1 type, and may have 2 or more types. Moreover, you may have 2 or more of the same kind of layers.
  • Examples of the protective film 40 include polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, a polyethylene-vinyl acetate copolymer, a polyethylene-vinyl acetate copolymer film, and a laminated film of these films and polyethylene.
  • the thickness of the protective film 40 is preferably 5 to 100 ⁇ m, but from the viewpoint of storing the transfer type photosensitive film 1 in a roll shape, it is preferably 70 ⁇ m or less, more preferably 60 ⁇ m or less, and 50 ⁇ m or less. More preferably, it is particularly preferably 40 ⁇ m or less.
  • the minimum value of the light transmittance (Tt) is preferably 90.00% or more, more preferably 90.50% or more, and further preferably 90.70% or more. If the total light transmittance in a general visible light wavelength range of 400 to 700 nm is 90.00% or more, when protecting the transparent electrode in the sensing area of the touch panel (touch sensor), image display in the sensing area It can suppress sufficiently that quality, a hue, and a brightness
  • the total light transmittance (Tt) in the visible light region can be measured by the method described in the examples of this specification.
  • the first resin layer 20 and the second resin layer 30 of the transfer type photosensitive film 1 are prepared, for example, by preparing a first resin layer forming coating solution and a second resin layer forming coating solution. It can form by apply
  • the transfer type photosensitive film 1 includes a support film 10 on which the first resin layer 20 is formed and a protective film 40 on which the second resin layer 30 is formed. It can form by pasting together in the state which opposed resin layer 30 of this.
  • the transfer type photosensitive film 1 is formed by applying and drying a first resin layer forming coating solution on the support film 10, and then forming a second resin layer forming coating solution on the first resin layer 20. Can be formed by applying, drying, and attaching the protective film 40.
  • the coating liquid can be obtained by uniformly dissolving or dispersing each component constituting the photosensitive resin composition according to the present embodiment and the second resin layer in a solvent.
  • the solvent used as the coating solution is not particularly limited, and known ones can be used. Specifically, acetone, methyl ethyl ketone, methyl isobutyl ketone, toluene, methanol, ethanol, propanol, butanol, methylene glycol, ethylene glycol, propylene glycol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether , Diethylene glycol diethyl ether, propylene glycol monomethyl ether, ethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, chloroform, methylene chloride and the like.
  • Application methods include doctor blade coating method, Mayer bar coating method, roll coating method, screen coating method, spinner coating method, inkjet coating method, spray coating method, dip coating method, gravure coating method, curtain coating method, and die coating method. Etc.
  • the drying conditions are not particularly limited, but the drying temperature is preferably 60 to 130 ° C., and the drying time is preferably 0.5 to 30 minutes.
  • FIG. 2 is a schematic cross-sectional view showing a laminate comprising a cured film formed using a transfer type photosensitive film according to an embodiment of the present invention on a substrate with a transparent electrode pattern.
  • the laminated body 100 shown by FIG. 2 is provided with the base material 50 with the transparent electrode pattern which has the transparent electrode pattern 50a, and the cured film 60 provided on the transparent electrode pattern 50a of the base material 50 with a transparent electrode pattern.
  • the cured film 60 is a cured film composed of the cured first resin layer 22 and the cured second resin layer 32, and is formed using the transfer type photosensitive film 1 of the present embodiment.
  • the cured film 60 satisfies both the protective function of the transparent electrode pattern 50a and the function of making the transparent electrode pattern 50a invisible or improving the visibility of the touch screen.
  • an embodiment of a method for producing a laminate in which a cured film is formed on a substrate with a transparent electrode pattern will be described.
  • the pressing means include a pressing roll.
  • the pressure roll may be provided with a heating means so that it can be heat-pressure bonded.
  • the heating temperature is such that the components of the first resin layer 20 or the second resin layer 30 are heated from the viewpoint of adhesion between the second resin layer 30 and the substrate 50 with the transparent electrode pattern. From the viewpoint of making it hard to be cured or thermally decomposed, it is preferably 10 to 160 ° C, more preferably 20 to 150 ° C, and further preferably 30 to 150 ° C.
  • the pressing pressure at the time of thermocompression bonding is a line from the viewpoint of suppressing the deformation of the substrate 50 with the transparent electrode pattern while ensuring sufficient adhesion between the second resin layer 30 and the substrate 50 with the transparent electrode pattern.
  • the pressure is preferably 50 to 1 ⁇ 10 5 N / m, more preferably 2.5 ⁇ 10 2 to 5 ⁇ 10 4 N / m, and 5 ⁇ 10 2 to 4 ⁇ 10 4 N / m. More preferably.
  • the pre-heat treatment of the substrate 50 with a transparent electrode pattern is not necessarily required, but the second resin layer 30 and the substrate 50 with a transparent electrode pattern are in close contact with each other. From the point of further improving the property, the substrate 50 with a transparent electrode pattern may be preheated.
  • the treatment temperature at this time is preferably 30 to 150 ° C.
  • Base material As a base material which comprises the base material 50 with a transparent electrode pattern, base materials, such as a glass plate used for a touch panel (touch sensor), a plastic plate, a ceramic board, are mentioned, for example.
  • the transparent electrode can be formed using a conductive metal oxide film such as ITO and IZO (Indium Zinc Oxide).
  • the transparent electrode can also be formed using a photosensitive film having a photocurable resin layer using conductive fibers such as silver fibers and carbon nanotubes.
  • the metal wiring can be formed by a method such as screen printing or vapor deposition using a conductive material such as Au, Ag, Cu, Al, Mo, and C, for example.
  • an insulating layer or an index matching layer may be provided on the base material between the base material and the electrode.
  • the index matching layer may have the same composition as the second resin layer 30 described above.
  • actinic rays are irradiated in a pattern form to a predetermined portion of the first resin layer and the second resin layer after transfer via a photomask.
  • the support film 10 on the first resin layer and the second resin layer is transparent when irradiating with actinic light, it can be irradiated with actinic light as it is. Irradiate light.
  • a known active light source can be used as the active light source.
  • the pattern in this specification is not limited to the shape of the fine wiring that forms the circuit, but also includes the shape in which only the connection portion with the other base material is removed in a rectangular shape and the shape in which only the frame portion of the base material is removed. It is.
  • the irradiation amount of actinic rays is 1 ⁇ 10 2 to 1 ⁇ 10 4 J / m 2 , and heating can be accompanied during irradiation. If the irradiation amount of this actinic ray is 1 ⁇ 10 2 J / m 2 or more, it is possible to sufficiently proceed the photocuring of the first resin layer and the second resin layer, and 1 ⁇ 10 4 J If it is / m 2 or less, there is a tendency that the first resin layer and the second resin layer can be prevented from being discolored.
  • the unexposed portions of the first resin layer and the second resin layer after irradiation with actinic rays are removed with a developer, and a cured film (refractive index adjustment pattern) 60 covering a part or all of the transparent electrode is obtained.
  • a cured film (refractive index adjustment pattern) 60 covering a part or all of the transparent electrode is obtained.
  • the image development process is performed.
  • the development step can be performed by a known method such as spraying, showering, rocking dipping, brushing, or scrubbing using a known developer such as an aqueous alkaline solution, an aqueous developer, or an organic solvent.
  • spray development is preferably performed using an alkaline aqueous solution from the viewpoint of environment and safety.
  • the development temperature and time can be adjusted within a conventionally known range.
  • the cured film pattern is formed using the transfer type photosensitive film having the second resin layer.
  • the same method is used when using the transfer type photosensitive film not having the second resin layer.
  • a cured film pattern can be formed.
  • the cured film according to the present invention may be a cured film obtained by curing the first resin layer and the second resin layer of the transfer photosensitive film of the present embodiment. For example, when most of the second resin layer is covered with the first resin layer and is not exposed, the second resin layer does not necessarily need to be cured.
  • the cured film according to the present invention includes such a case that the first resin layer is cured and the second resin layer is not cured.
  • the cured film according to the present invention is preferably formed in a pattern.
  • the cured film according to the present invention may be a cured film obtained by curing the first resin layer when the transfer type photosensitive film does not have the second resin layer.
  • the transfer type photosensitive film according to this embodiment can be applied to the formation of a protective film in various electronic parts.
  • the electronic component according to this embodiment includes a cured film pattern formed using a transfer type photosensitive film. Examples of the electronic component include a touch sensor, a touch panel, a liquid crystal display, an organic electroluminescence, a solar cell module, a printed wiring board, and electronic paper.
  • the touch sensor can include the laminate 100 shown in FIG.
  • OCA that adheres the cover glass and the laminate 100 can be used.
  • FIG. 3 is a schematic top view showing a touch panel according to an embodiment of the present invention.
  • FIG. 3 shows an example of a capacitive touch panel.
  • the touch panel shown in FIG. 3 has a touch screen 102 for detecting a touch position coordinate on one side of a transparent substrate 101, and the transparent electrode 103 and the transparent electrode 104 for detecting a change in capacitance in this region are transparent. It is provided on the base material 101.
  • the transparent electrode 103 and the transparent electrode 104 detect the X position coordinate and the Y position coordinate of the touch position, respectively.
  • a lead-out wiring 105 for transmitting a touch position detection signal from the transparent electrode 103 and the transparent electrode 104 to an external circuit is provided.
  • the lead-out wiring 105 is connected to the transparent electrode 103 and the transparent electrode 104 by a connection electrode 106 provided on the transparent electrode 103 and the transparent electrode 104.
  • a connection terminal 107 for connecting to an external circuit is provided at the end of the lead-out wiring 105 opposite to the connection portion between the transparent electrode 103 and the transparent electrode 104.
  • a cured film pattern is formed across the portion where the transparent electrode pattern is formed and the portion where the transparent electrode pattern is not formed, using the transfer type photosensitive film of the present embodiment.
  • 123 is formed.
  • the cured film pattern 123 includes a cured first resin layer and a cured second resin layer.
  • the cured film pattern 123 consists of a hardened 1st resin layer.
  • the cured film pattern 123 the function of protecting the transparent electrode 103, the transparent electrode 104, the lead-out wiring 105, the connection electrode 106 and the connection terminal 107, and the bone of the sensing region (touch screen) 102 formed from the transparent electrode pattern A visual phenomenon prevention function can be performed at the same time.
  • the cured film pattern 123 can have a sufficiently small step on the surface.
  • Binder polymer solutions 2 to 5 and 8 (all having a solid content of 45% by mass) were obtained in the same manner as in the binder polymer solution 1 except that the blending amount was changed as shown in Table 1.
  • the weight average molecular weight (Mw) was measured by gel permeation chromatography (GPC), and was derived by conversion using a standard polystyrene calibration curve.
  • GPC gel permeation chromatography
  • the acid value was measured by a neutralization titration method based on JIS K0070 as shown below. First, the binder polymer solution was heated at 130 ° C. for 1 hour to remove volatile matter, thereby obtaining a solid content. Then, after accurately weighing 1 g of the solid binder polymer, 30 g of acetone was added to the binder polymer, and this was uniformly dissolved to obtain a resin solution. Next, an appropriate amount of an indicator, phenolphthalein, was added to the resin solution, and neutralization titration was performed using a 0.1 mol / L potassium hydroxide aqueous solution. And the acid value was computed by following Formula.
  • Acid value 0.1 ⁇ V ⁇ f 1 ⁇ 56.1 / (Wp ⁇ I / 100)
  • V is a titration amount (mL) of 0.1 mol / L potassium hydroxide aqueous solution used for titration
  • f 1 is a factor (concentration conversion factor) of 0.1 mol / L potassium hydroxide aqueous solution
  • Wp represents the mass (g) of the measured resin solution
  • I represents the proportion (mass%) of the non-volatile content in the measured resin solution.
  • the components shown in Table 3 or 4 were blended in the blending amounts (unit: parts by mass) shown in the same table and mixed for 15 minutes using a stirrer to prepare a second coating solution for forming a resin layer.
  • the blending amount of the binder polymer solution 10 indicates the blending amount of the solid content.
  • the first resin layer-forming coating solution prepared above is uniformly applied on the support film using a comma coater.
  • the solvent was removed by drying with a hot air convection dryer at 100 ° C. for 3 minutes to form a first resin layer having a thickness of 8 ⁇ m.
  • the second coating solution for forming a resin layer prepared above was used on the protective film using a die coater.
  • the solution was uniformly applied and dried for 3 minutes with a hot air retention drier at 110 ° C. to remove the solvent, thereby forming a second resin layer having a thickness of 60 nm and a refractive index of 1.4.
  • the support film having the first resin layer and the protective film having the second resin layer are bonded at 23 ° C. using a laminator (manufactured by Hitachi Chemical Co., Ltd., product name: HLM-3000 type). Then, a transfer type photosensitive film in which the support film, the first resin layer, the second resin layer, and the protective film were laminated in this order was produced.
  • a laminator manufactured by Hitachi Chemical Co., Ltd., product name: HLM-3000 type
  • A-DCP Tricyclodecane dimethanol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., product name)
  • T-1420 Ditrimethylolpropane tetraacrylate (Nippon Kayaku Co., Ltd., product name)
  • ADDITIVE 8032 Octamethylcyclotetrasiloxane (product name, manufactured by Toray Dow Corning Co., Ltd.)
  • AW500 2,2′-methylene-bis (4-ethyl-6-tert-butylphenol) (product name, manufactured by Kawaguchi Chemical Co., Ltd.)
  • B6030 5-1H-aminotetrazole (product name, manufactured by Chiyoda Chemical Co., Ltd.)
  • OZ-S30K Zirconium oxide nanoparticle dispersion (product name, manufactured by Nissan Chemical Industries, Ltd.)
  • the exposure amount is 5 ⁇ 10 2 J / m 2 (i-line) from vertically above the support film surface. (Measured value at a wavelength of 365 nm) and ultraviolet rays were irradiated imagewise.
  • stacked on the 1st resin layer is removed, and also with the exposure amount of 1 * 10 ⁇ 4 > J / m ⁇ 2 > from the upper side of the 1st resin layer side (measurement value in i line (wavelength 365nm)) Ultraviolet rays were irradiated to obtain a moisture permeability measurement sample in which a cured film made of the cured product of the second resin layer and the cured product of the first resin layer was formed.
  • a cup method was performed as a moisture permeability measurement.
  • About 20 g of dried calcium chloride is put in the measuring cup, and the lid is covered with a circular sample cut out with scissors to a size of about ⁇ 70 mm from the above test sample, and 60 ° C. and 90% RH in a constant temperature and humidity chamber. The condition was left for 24 hours.
  • the moisture permeability [g / m 2 ⁇ 24 h] was calculated from the weight change before and after being left standing. In addition, if the moisture permeability of a cured film is 250 or less, sufficient rust prevention effect will be acquired.
  • a photomask is placed on the support film, and an exposure amount of 5 is applied from above the photomask surface vertically using a parallel light exposure machine (EXM1201 manufactured by Oak Manufacturing Co., Ltd.).
  • EXM1201 manufactured by Oak Manufacturing Co., Ltd.
  • 10 J / m 2 measured value at i-line (wavelength 365 nm)
  • ultraviolet rays were imagewise irradiated.
  • stacked on the 1st resin layer is removed, and also with the exposure amount of 1 * 10 ⁇ 4 > J / m ⁇ 2 > from the upper side of the 1st resin layer side (measurement value in i line (wavelength 365nm))
  • a mandrel test was performed with reference to the JIS standard (K5400).
  • the test sample was cut with scissors to a size of 1.5 cm ⁇ 4.0 cm and set in a cylindrical mandrel bending tester (manufactured by BYK Gardner).
  • One side of the sample is fixed, a weight of 100 g is attached to one side, the protective film side is bent to 180 degrees around the cylinder with the protective film side as the upper surface, and the cured film side is observed with a microscope.
  • Crack resistance was evaluated.
  • ⁇ 0.5 Uses a cylinder of ⁇ 0.5mm, and there is no crack in the protective film.
  • ⁇ 1 A cylinder of ⁇ 1.0mm is used, and there is no crack in the protective film.
  • ⁇ 2 Uses a cylinder with a diameter of ⁇ 2.0mm, and there is no crack in the protective film.
  • ⁇ 3 Uses a cylinder with a diameter of ⁇ 3.0mm, and there is no crack in the protective film.
  • IM layer index matching layer
  • substrate with ITO were prepared. While peeling the protective film of the transfer type photosensitive film obtained in Examples and Comparative Examples on the ITO of the base material, the second resin layer is opposed to the base material, and the roll temperature is 100 ° C., the substrate feed speed. Lamination was performed under the conditions of 0.4 m / min and pressure bonding pressure (cylinder pressure) of 4 ⁇ 10 5 Pa.
  • the substrate was cooled, and when the temperature of the substrate reached 23 ° C., using an exposure machine having a high-pressure mercury lamp from the support film side (manufactured by Oak Manufacturing Co., Ltd., trade name: EXM-1201), Light irradiation was performed at an exposure amount of 80 mJ / cm 2 .
  • a sample for cross-cut adhesion test composed of a cured film of the first resin layer having a thickness of 8.0 ⁇ m and a cured product of the second resin layer was obtained.
  • a cross-cut test was performed based on ASTM D3359 for the adhesion of the cured film to the index matching layer (IM layer) and the substrate with ITO, and the ratio of the peeled portion was measured. Based on this measurement result, a case where adhesion was the best (no peeling at all) was “5”, and a case where it was the worst (all peeling) was “0”. .
  • the substrate was cooled, and when the temperature of the substrate reached 23 ° C., using an exposure machine having a high-pressure mercury lamp from the support film side (manufactured by Oak Manufacturing Co., Ltd., trade name: EXM-1201), Light irradiation was performed at an exposure amount of 80 mJ / cm 2 .
  • the support film was removed and irradiated with light at an exposure amount of 400 mJ / cm 2 .
  • sintering was performed at 140 ° C. for 30 minutes to obtain a sample for reliability test including a cured film of the first resin layer having a thickness of 8.0 ⁇ m and a cured product of the second resin layer.
  • the obtained sample was left in a high-temperature and high-humidity tank at 85 ° C. and 85% RH, and the time until the copper substrate was corroded with the naked eye was evaluated.
  • SYMBOLS 1 Transfer type photosensitive film, 10 ... Support film, 20 ... 1st resin layer, 22 ... Cured 1st resin layer, 30 ... 2nd resin layer, 32 ... 2nd cured resin layer, 40 DESCRIPTION OF SYMBOLS ... Protective film, 50 ... Base material with transparent electrode pattern, 50a ... Transparent electrode pattern, 60 ... Cured film, 100 ... Laminated body, 101 ... Transparent base material, 102 ... Sensing region, 103, 104 ... Transparent electrode, 105 ... Drawer Wiring, 106... Connection electrode, 107... Connection terminal, 123.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Human Computer Interaction (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials Engineering (AREA)
  • Materials For Photolithography (AREA)

Abstract

This transfer-type photosensitive film is provided with a support film and a first resin layer that is arranged on the support film. The first resin layer contains a binder polymer, a photopolymerizable compound and a photopolymerization initiator; and the binder polymer contains a group that has a branched and/or alicyclic structure in a side chain, a group that has an acidic group in a side chain, and a group that has an ethylenically unsaturated group in a side chain, while having an ethylenically unsaturated group equivalent of 0.50-3.00 mmol/g.

Description

転写型感光性フィルム、硬化膜パターンの形成方法及びタッチパネルTransfer type photosensitive film, method for forming cured film pattern, and touch panel

 本発明は、転写型感光性フィルム、硬化膜パターンの形成方法及びタッチパネルに関する。 The present invention relates to a transfer type photosensitive film, a method for forming a cured film pattern, and a touch panel.

 パソコン及びテレビ等の大型電子機器、カーナビゲーション、携帯電話、スマートフォン、電子辞書等の小型電子機器、OA(Office Automation、オフィスオートメーション)・FA(Factory Automation、ファクトリーオートメーション)機器等の表示機器などには液晶表示素子及びタッチパネル(タッチセンサー)が用いられている。 For large electronic devices such as personal computers and televisions, small electronic devices such as car navigation, mobile phones, smartphones, electronic dictionaries, and display devices such as OA (Office Automation, Office Automation) and FA (Factory Automation, Factory Automation) devices Liquid crystal display elements and touch panels (touch sensors) are used.

 タッチパネルは各種の方式が実用化されているが、近年、投影型静電容量方式のタッチパネルの利用が進んでいる。一般に、投影型静電容量方式のタッチパネルでは、X軸とY軸による2次元座標を表現するために、複数のX電極と、該X電極に直交する複数のY電極とが、2層構造を形成している。これらの電極の材料として、ITO(Indium-Tin-Oxide、酸化インジウムスズ)が主流である。 Various types of touch panels have been put to practical use, but in recent years, the use of projected capacitive touch panels has progressed. In general, in a projected capacitive touch panel, a plurality of X electrodes and a plurality of Y electrodes orthogonal to the X electrodes have a two-layer structure in order to express two-dimensional coordinates based on the X and Y axes. Forming. As a material for these electrodes, ITO (Indium-Tin-Oxide) is the mainstream.

 ところで、タッチパネルの額縁領域はタッチ位置を検出できない領域であるから、その額縁領域の面積を狭くすることが製品価値を向上させるための重要な要素である。一般的に額縁領域には、タッチ位置の検出信号を伝えるために銅等の金属配線が形成されている。タッチパネルにおいては、指先に接触される際に水分又は塩分等の腐食成分がセンシング領域から内部に侵入することがある。タッチパネルの内部に腐食成分が侵入すると、上記金属配線が腐食し、電極と駆動用回路間の電気抵抗の増加、又は断線の恐れがある。 By the way, since the frame area of the touch panel is an area where the touch position cannot be detected, reducing the area of the frame area is an important factor for improving the product value. In general, a metal wiring such as copper is formed in the frame region in order to transmit a touch position detection signal. In the touch panel, a corrosive component such as moisture or salt may enter the sensing region from the inside when touching the fingertip. When a corrosive component enters the inside of the touch panel, the metal wiring corrodes, and there is a risk of an increase in electrical resistance between the electrode and the driving circuit, or disconnection.

 金属配線の腐食を防ぐために、タッチパネル用基材上に、ジシクロペンタニル構造又はジシクロペンテニル構造を有するジ(メタ)アクリレート化合物を含有する感光性樹脂組成物層を設け、この感光性樹脂組成物層の所定部分を活性光線の照射により硬化させた後に、所定部分以外を除去し、基材の一部又は全部を被覆する感光性樹脂組物の硬化膜を形成する方法が提案されている(特許文献1)。 In order to prevent corrosion of metal wiring, a photosensitive resin composition layer containing a di (meth) acrylate compound having a dicyclopentanyl structure or a dicyclopentenyl structure is provided on a touch panel substrate, and this photosensitive resin composition A method for forming a cured film of a photosensitive resin assembly, in which a predetermined part of a physical layer is cured by irradiation with actinic rays and then the part other than the predetermined part is removed to cover a part or all of the substrate, has been proposed. (Patent Document 1).

特開2015-121929号公報Japanese Patent Laying-Open No. 2015-121929

 タッチパネルの信頼性をさらに高めるために保護膜による防錆効果の向上が求められており、その実現にはより透湿度が低い硬化膜パターンの形成が重要となっている。 In order to further improve the reliability of the touch panel, improvement of the rust prevention effect by the protective film is required, and formation of a cured film pattern having a lower moisture permeability is important for its realization.

 他方で、湾曲若しくは折り曲げ可能なディスプレイが普及しつつあり、液晶表示素子及びタッチパネルには、柔軟性を有する基材上に電極を設けたタッチパネルが用いられることがある。このタッチパネルは、生産性を向上させるために平盤打抜機又はロータリーカッター等で打ち抜いたり、裁断したりするなどの加工が施される。この場合、タッチパネルに設けられる硬化膜パターンには、上記の工程を経てもクラックが生じにくいクラック耐性が要求される。 On the other hand, displays that can be bent or bent are becoming widespread, and for liquid crystal display elements and touch panels, touch panels in which electrodes are provided on a flexible substrate may be used. This touch panel is subjected to processing such as punching or cutting with a flat plate punching machine or a rotary cutter in order to improve productivity. In this case, the cured film pattern provided on the touch panel is required to have crack resistance that does not easily cause cracks even after the above-described steps.

 本発明は、低透湿性とクラック耐性とを両立する硬化膜パターンを形成することができる転写型感光性フィルム、並びに、それを用いる硬化膜パターンの形成方法及びタッチパネルを提供することを目的とする。 An object of the present invention is to provide a transfer type photosensitive film capable of forming a cured film pattern having both low moisture permeability and crack resistance, a cured film pattern forming method using the same, and a touch panel. .

 上記課題を解決するために本発明者らは鋭意検討したところ、バインダーポリマー、光重合性化合物、及び光重合開始剤を含有する感光性樹脂層において、共重合成分として、分岐及び/又は脂環構造を有するモノマーと、酸性基を有するモノマーとが含まれるバインダーポリマーを用いることにより、透湿度が低い硬化膜パターンを形成できることを見出した。その一方で、本発明者らは、上記の硬化膜パターンは、クラック耐性が低下する傾向にあるという知見も得た。そして、これらの知見に基づき本発明者らがさらに検討を行った結果、上記酸性基と反応し得る官能基と、エチレン性不飽和基とを有する化合物を、バインダーポリマーのエチレン性不飽和基当量が特定の範囲となるようにさらに反応させることにより、低透湿性とクラック耐性とを両立する硬化膜パターンを形成できることを見出し、本発明を完成するに至った。 In order to solve the above problems, the present inventors have intensively studied, and in the photosensitive resin layer containing a binder polymer, a photopolymerizable compound, and a photopolymerization initiator, as a copolymerization component, branched and / or alicyclic rings. It has been found that a cured film pattern having low moisture permeability can be formed by using a binder polymer containing a monomer having a structure and a monomer having an acidic group. On the other hand, the present inventors have also obtained the knowledge that the above-mentioned cured film pattern tends to decrease the crack resistance. As a result of further investigation by the present inventors based on these findings, the compound having the functional group capable of reacting with the acidic group and the ethylenically unsaturated group is converted into an ethylenically unsaturated group equivalent of the binder polymer. It has been found that a cured film pattern that achieves both low moisture permeability and crack resistance can be formed by further reacting in such a way as to satisfy a specific range, and the present invention has been completed.

 本発明は、支持フィルムと、該支持フィルム上に設けられた第一の樹脂層とを備え、第一の樹脂層が、バインダーポリマーと、光重合性化合物と、光重合開始剤と、を含有し、バインダーポリマーが、側鎖に分岐及び/又は脂環構造を有する基、側鎖に酸性基を有する基、並びに、側鎖にエチレン性不飽和基を有する基を含有し、且つ、0.50~3.00(mmol/g)のエチレン性不飽和基当量を有する転写型感光性フィルムを提供する。 The present invention comprises a support film and a first resin layer provided on the support film, and the first resin layer contains a binder polymer, a photopolymerizable compound, and a photopolymerization initiator. The binder polymer contains a group having a branched and / or alicyclic structure in the side chain, a group having an acidic group in the side chain, and a group having an ethylenically unsaturated group in the side chain; Provided is a transfer type photosensitive film having an ethylenically unsaturated group equivalent of 50 to 3.00 (mmol / g).

 本発明に係る転写型感光性フィルムによれば、上記構成を有することにより、低透湿性とクラック耐性とを両立する硬化膜パターンを形成することができる。金属配線上に形成される硬化膜パターンは、金属配線の防錆のための保護膜として機能させることができる。 According to the transfer type photosensitive film of the present invention, a cured film pattern having both low moisture permeability and crack resistance can be formed by having the above configuration. The cured film pattern formed on the metal wiring can function as a protective film for rust prevention of the metal wiring.

 なお、上記の効果が得られる理由としては、バインダーポリマーの側鎖に分岐及び/又は脂環構造を有する基を含有させることにより、嵩高い構造が付加されて硬化膜の透湿性を低減することができ、このような低透湿性の硬化膜パターンを金属配線上に形成することにより、腐食の原因である水分が金属配線と接触しにくくなるためと考えられる。また、バインダーポリマーの側鎖にエチレン性不飽和基を有する基を含有させ、バインダーポリマーのエチレン性不飽和基当量を特定の範囲に調整することで、硬化膜中の架橋点間距離が長くなり、柔軟性が向上し、クラック耐性も両立することができたと考えられる。 The reason why the above effect is obtained is that by adding a group having a branched and / or alicyclic structure in the side chain of the binder polymer, a bulky structure is added to reduce the moisture permeability of the cured film. It is considered that forming such a low moisture-permeable cured film pattern on the metal wiring makes it difficult for the moisture that causes corrosion to come into contact with the metal wiring. In addition, by containing a group having an ethylenically unsaturated group in the side chain of the binder polymer and adjusting the ethylenically unsaturated group equivalent of the binder polymer to a specific range, the distance between cross-linking points in the cured film becomes longer. It is considered that flexibility was improved and crack resistance was compatible.

 上記バインダーポリマーは、側鎖にフェニル基を有する基をさらに含有してもよい。 The binder polymer may further contain a group having a phenyl group in the side chain.

 上記第一の樹脂層は、エチレン性不飽和基を有するリン酸エステルをさらに含んでいてもよい。この場合、形成される硬化膜パターンの密着性をさらに向上させることができ、低透湿性との相乗効果によって金属配線の腐食(例えば、銅配線の錆など)を高度に抑制できる保護膜とすることができる。 The first resin layer may further contain a phosphoric ester having an ethylenically unsaturated group. In this case, the adhesion of the cured film pattern to be formed can be further improved, and a protective film capable of highly suppressing corrosion of metal wiring (for example, rust of copper wiring) due to a synergistic effect with low moisture permeability. be able to.

 上記光重合開始剤は、オキシムエステル化合物を含んでいてもよい。この場合、転写型感光性フィルムが高感度となり、形成される硬化膜パターンの透湿度をさらに低減することができる。 The photopolymerization initiator may contain an oxime ester compound. In this case, the transfer type photosensitive film has high sensitivity, and the moisture permeability of the formed cured film pattern can be further reduced.

 本発明に係る転写型感光性フィルムは、第一の樹脂層上に設けられた、金属酸化物粒子を含有する第二の樹脂層を更に備えることができる。 The transfer type photosensitive film according to the present invention can further include a second resin layer containing metal oxide particles provided on the first resin layer.

 上記の転写型感光性フィルムによれば、低透湿性とクラック耐性とを両立するとともに屈折率調整の機能を有する硬化膜パターンを形成することができる。 According to the above transfer type photosensitive film, it is possible to form a cured film pattern having both low moisture permeability and crack resistance and having a function of adjusting the refractive index.

 ところで、投影型静電容量方式のタッチパネルは、透明電極材料を用いた複数のX電極と、該X電極に直交する透明電極材料を用いた複数のY電極とにより基材上に2層構造の透明電極パターンが形成された構造を有している。このような構造を有する投影型静電容量方式のタッチパネルでは、透明電極パターンが形成された部分と、形成されていない部分との光学的な反射特性の違いにより色差が大きくなり、モジュール化した際に透明電極パターンが画面上に映りこむ、いわゆる「骨見え現象」の問題がある。また、基材と透明電極との間、又はモジュール化する際に使用するカバーガラスと透明電極パターンとを接着する視認性向上フィルム(OCA:Optical Clear Adhesive)と透明電極パターンとの間で、反射光強度が増加し、画面の透過率を低下させるという問題もある。 By the way, the projected capacitive touch panel has a two-layer structure on a substrate by a plurality of X electrodes using a transparent electrode material and a plurality of Y electrodes using a transparent electrode material orthogonal to the X electrodes. It has a structure in which a transparent electrode pattern is formed. In the projected capacitive touch panel having such a structure, a color difference becomes large due to a difference in optical reflection characteristics between a portion where the transparent electrode pattern is formed and a portion where the transparent electrode pattern is not formed. In addition, there is a problem of so-called “bone appearance phenomenon” in which the transparent electrode pattern is reflected on the screen. In addition, reflection between the transparent electrode pattern and the visibility improving film (OCA: Optical Clear Adhesive) that adheres the cover glass and the transparent electrode pattern used for modularization between the base material and the transparent electrode. There is also a problem that the light intensity increases and the transmittance of the screen decreases.

 上記第二の樹脂層を有する本発明に係る転写型感光性フィルムによれば、上記の問題を抑制することが可能となる。 According to the transfer type photosensitive film having the second resin layer according to the present invention, the above problem can be suppressed.

 本発明はまた、電極を有する基材上に、上記本発明に係る転写型感光性フィルムの第一の樹脂層を、基材の電極が設けられている側と第一の樹脂層とが密着するようにラミネートする工程と、基材上の第一の樹脂層の所定部分を露光後、前記所定部分以外を除去し、電極の一部又は全部を被覆する硬化膜を形成する工程と、を備える硬化膜パターンの第1の形成方法を提供する。 In the present invention, the first resin layer of the transfer type photosensitive film according to the present invention is adhered to the substrate having electrodes, and the side on which the electrodes of the substrate are provided and the first resin layer are in close contact with each other. And a step of laminating the first resin layer on the substrate so as to remove a portion other than the predetermined portion and forming a cured film covering a part or all of the electrode. A first method for forming a cured film pattern is provided.

 本発明はまた、電極を有する基材上に、第二の樹脂層を有する上記本発明に係る転写型感光性フィルムの第二の樹脂層及び第一の樹脂層を、基材の電極が設けられている側と第二の樹脂層とが密着するようにラミネートする工程と、基材上の第二の樹脂層及び第一の樹脂層の所定部分を露光後、所定部分以外を除去し、電極の一部又は全部を被覆する硬化膜パターンを形成する工程と、を備える硬化膜パターンの第2の形成方法を提供する。 In the present invention, the second resin layer and the first resin layer of the transfer type photosensitive film according to the present invention having the second resin layer are provided on the substrate having the electrode. Laminating the second side and the second resin layer in close contact with each other, and exposing the second resin layer and the predetermined portion of the first resin layer on the base material, then removing other than the predetermined portion, Forming a cured film pattern that covers a part or all of the electrode, and a second method for forming a cured film pattern.

 上記本発明に係る硬化膜パターンの第1及び第2の形成方法によれば、電極上に低透湿性とクラック耐性とを両立する硬化膜パターンを形成することができる。また、本発明に係る硬化膜パターンの第2の形成方法によれば、硬化膜パターンが屈折率調整の機能を有することができ、上述した骨見え現象、画面の透過率低下の問題を抑制することができる。 According to the first and second methods for forming a cured film pattern according to the present invention, it is possible to form a cured film pattern having both low moisture permeability and crack resistance on the electrode. In addition, according to the second method of forming a cured film pattern according to the present invention, the cured film pattern can have a function of adjusting the refractive index, and suppress the above-described problems of bone appearance phenomenon and screen transmittance decrease. be able to.

 本発明はまた、上記本発明に係る転写型感光性フィルムにおける第一の樹脂層を硬化してなる硬化膜を提供する。 The present invention also provides a cured film obtained by curing the first resin layer in the transfer type photosensitive film according to the present invention.

 本発明はまた、第二の樹脂層を有する上記本発明に係る転写型感光性フィルムの第一の樹脂層のみ、又は、第一の樹脂層及び第二の樹脂層の両方を硬化してなる硬化膜を提供する。 The present invention is also obtained by curing only the first resin layer or both the first resin layer and the second resin layer of the transfer type photosensitive film according to the present invention having the second resin layer. Provide a cured film.

 本発明はまた、上記本発明に係る転写型感光性フィルムにおける第一の樹脂層の硬化物、又は、第二の樹脂層を有する上記本発明に係る転写型感光性フィルムの第二の樹脂層の硬化物及び第一の樹脂層の硬化物からなる硬化膜パターンを備えるタッチパネルを提供する。 The present invention also provides a cured product of the first resin layer in the transfer type photosensitive film according to the present invention or a second resin layer of the transfer type photosensitive film according to the present invention having a second resin layer. A touch panel provided with a cured film pattern comprising a cured product of the above and a cured product of a first resin layer is provided.

 本発明によれば、低透湿性とクラック耐性とを両立する硬化膜パターンを形成することができる転写型感光性フィルム、並びに、それを用いる硬化膜パターンの形成方法及びタッチパネルを提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the transfer type photosensitive film which can form the cured film pattern which makes low moisture permeability and crack tolerance compatible, the formation method of a cured film pattern using the same, and a touch panel can be provided. .

本発明の一実施形態に係る転写型感光性フィルムを示す模式断面図である。It is a schematic cross section which shows the transfer type photosensitive film which concerns on one Embodiment of this invention. 本発明の一実施形態に係る転写型感光性フィルムを用いて形成した硬化膜パターンを透明電極パターン付き基材上に備える積層体を示す模式断面図である。It is a schematic cross section which shows the laminated body which equips the base material with a transparent electrode pattern with the cured film pattern formed using the transfer type photosensitive film which concerns on one Embodiment of this invention. 本発明の一実施形態に係るタッチパネルを示す模式上面図である。It is a model top view which shows the touchscreen which concerns on one Embodiment of this invention.

 以下、場合により図面を参照しつつ、本発明を実施するための形態について詳細に説明する。ただし、本発明は以下の実施形態に限定されるものではない。なお、本明細書において、「(メタ)アクリル酸」とは、アクリル酸又はメタクリル酸を意味し、「(メタ)アクリレート」とは、アクリレート又はそれに対応するメタクリレートを意味する。「A又はB」とは、AとBのどちらか一方を含んでいればよく、両方とも含んでいてもよい。 Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings as the case may be. However, the present invention is not limited to the following embodiments. In the present specification, “(meth) acrylic acid” means acrylic acid or methacrylic acid, and “(meth) acrylate” means acrylate or a corresponding methacrylate. “A or B” only needs to include one of A and B, or may include both.

 また、本明細書において「層」との語は、平面図として観察したときに、全面に形成されている形状の構造に加え、一部に形成されている形状の構造も包含される。また、本明細書において「工程」との語は、独立した工程だけではなく、他の工程と明確に区別できない場合であってもその工程の所期の作用が達成されれば、本用語に含まれる。また、「~」を用いて示された数値範囲は、「~」の前後に記載される数値をそれぞれ最小値及び最大値として含む範囲を示す。 In addition, in this specification, the term “layer” includes a structure formed in a part in addition to a structure formed in the entire surface when observed as a plan view. In addition, in this specification, the term “process” is not limited to an independent process, and even if it cannot be clearly distinguished from other processes, the term “process” is used as long as the intended action of the process is achieved. included. The numerical range indicated by using “to” indicates a range including the numerical values described before and after “to” as the minimum value and the maximum value, respectively.

 さらに、本明細書において組成物中の各成分の含有量は、組成物中に各成分に該当する物質が複数存在する場合、特に断らない限り、組成物中に存在する当該複数の物質の合計量を意味する。また、例示材料は特に断らない限り単独で用いてもよいし、2種以上を組み合わせて用いてもよい。 Furthermore, in the present specification, the content of each component in the composition is the sum of the plurality of substances present in the composition unless there is a specific indication when there are a plurality of substances corresponding to each component in the composition. Means quantity. In addition, the exemplary materials may be used alone or in combination of two or more unless otherwise specified.

 また、本明細書中に段階的に記載されている数値範囲において、ある段階の数値範囲の上限値又は下限値は、他の段階の数値範囲の上限値又は下限値に置き換えてもよい。また、本明細書中に記載されている数値範囲において、その数値範囲の上限値又は下限値は、実施例に示されている値に置き換えてもよい。 Also, in the numerical ranges described stepwise in this specification, the upper limit value or lower limit value of a numerical range of a certain step may be replaced with the upper limit value or lower limit value of the numerical range of another step. Further, in the numerical ranges described in this specification, the upper limit value or the lower limit value of the numerical range may be replaced with the values shown in the examples.

<転写型感光性フィルム>
 本実施形態の転写型感光性フィルムは、支持フィルムと、該支持フィルム上に設けられた第一の樹脂層と、を備えるものである。本実施形態の転写型感光性フィルムは、第一の樹脂層上に設けられた、金属酸化物粒子を含有する第二の樹脂層を更に備えてもよい。これらの転写型感光性フィルムは、第一の樹脂層上又は第二の樹脂層上に設けられた保護フィルムを更に備えていてもよい。
<Transfer type photosensitive film>
The transfer type photosensitive film of the present embodiment comprises a support film and a first resin layer provided on the support film. The transfer type photosensitive film of the present embodiment may further include a second resin layer containing metal oxide particles provided on the first resin layer. These transfer type photosensitive films may further include a protective film provided on the first resin layer or the second resin layer.

 図1は、本発明の一実施形態に係る転写型感光性フィルムを示す模式断面図である。図1に示される転写型感光性フィルム1は、支持フィルム10と、上記支持フィルム10上に設けられた第一の樹脂層20と、第一の樹脂層上に設けられた第二の樹脂層30と、第二の樹脂層30上に設けられた保護フィルム40とを備える。 FIG. 1 is a schematic sectional view showing a transfer type photosensitive film according to an embodiment of the present invention. The transfer type photosensitive film 1 shown in FIG. 1 includes a support film 10, a first resin layer 20 provided on the support film 10, and a second resin layer provided on the first resin layer. 30 and a protective film 40 provided on the second resin layer 30.

 上記転写型感光性フィルムを用いることで、例えばタッチパネルの額縁にある金属配線又はタッチパネルの透明電極の保護機能と、透明電極パターンの不可視化又はタッチ画面の視認性向上の両機能を満たす硬化膜を一括でパターン形成することができる。 By using the transfer-type photosensitive film, for example, a cured film satisfying both functions of protecting the metal wiring on the frame of the touch panel or the transparent electrode of the touch panel, and making the transparent electrode pattern invisible or improving the visibility of the touch screen. Patterns can be formed in a batch.

(支持フィルム)
 支持フィルム10としては、重合体フィルムを用いることができる。重合体フィルムの材質としては、ポリエチレンテレフタレート、ポリカーボネート、ポリエチレン、ポリプロピレン、ポリエーテルサルフォン、シクロオレフィンポリマー等が挙げられる。
(Support film)
As the support film 10, a polymer film can be used. Examples of the material for the polymer film include polyethylene terephthalate, polycarbonate, polyethylene, polypropylene, polyethersulfone, and cycloolefin polymer.

 支持フィルム10の厚みは、被覆性の確保と、支持フィルム10を介して活性光線を照射する際の解像度の低下を抑制する観点から、5~100μmであることが好ましく、10~70μmであることがより好ましく、15~40μmであることがさらに好ましく、15~35μmであることが特に好ましい。 The thickness of the support film 10 is preferably 5 to 100 μm, preferably 10 to 70 μm, from the viewpoint of ensuring coverage and suppressing the reduction in resolution when irradiated with actinic rays through the support film 10. Is more preferably 15 to 40 μm, and particularly preferably 15 to 35 μm.

(第一の樹脂層)
 第一の樹脂層20は、バインダーポリマー(以下、(A)成分ともいう)と、光重合性化合物(以下、(B)成分ともいう)と、光重合開始剤(以下、(C)成分ともいう)と、を含有する感光性樹脂組成物から形成されることが好ましい。
(First resin layer)
The first resin layer 20 includes a binder polymer (hereinafter also referred to as (A) component), a photopolymerizable compound (hereinafter also referred to as (B) component), and a photopolymerization initiator (hereinafter referred to as (C) component). It is preferably formed from a photosensitive resin composition containing

<バインダーポリマー>
 本実施形態において、(A)成分は、側鎖に分岐構造及び/又は脂環構造を有する基(以下、(i)基ともいう)、側鎖に酸性基を有する基(以下、(ii)基ともいう)、並びに、側鎖にエチレン性不飽和基を有する基(以下、(iii)基ともいう)を含有するバインダーポリマー(以下、(A-1)成分ともいう)を含む。(i)基は、側鎖に分岐構造を有する基を含有するモノマー、又は側鎖に脂環構造を有する基を含有するモノマーによって導入することができる。(ii)基は、側鎖に酸性基を有する基を含有するモノマーによって導入することができる。
<Binder polymer>
In this embodiment, the component (A) includes a group having a branched structure and / or an alicyclic structure in the side chain (hereinafter also referred to as (i) group), and a group having an acidic group in the side chain (hereinafter referred to as (ii) And a binder polymer (hereinafter also referred to as component (A-1)) containing a group having an ethylenically unsaturated group in the side chain (hereinafter also referred to as (iii) group). (I) The group can be introduced by a monomer containing a group having a branched structure in the side chain or a monomer containing a group having an alicyclic structure in the side chain. (Ii) The group can be introduced by a monomer containing a group having an acidic group in the side chain.

 側鎖に分岐構造を有する基を含有するモノマーの具体例としては、例えば(メタ)アクリル酸i-プロピル、(メタ)アクリル酸i-ブチル、(メタ)アクリル酸s-ブチル、(メタ)アクリル酸t-ブチル、(メタ)アクリル酸i-アミル、(メタ)アクリル酸t-アミル、(メタ)アクリル酸sec-iso-アミル、(メタ)アクリル酸2-オクチル、(メタ)アクリル酸3-オクチル、(メタ)アクリル酸t-オクチル等が挙げられる。これらの中でも、(メタ)アクリル酸i-プロピル、(メタ)アクリル酸i-ブチル、メタクリル酸t-ブチルが好ましく、さらに好ましくは、メタクリル酸i-プロピル、メタクリル酸t-ブチルである。 Specific examples of the monomer containing a group having a branched structure in the side chain include, for example, i-propyl (meth) acrylate, i-butyl (meth) acrylate, s-butyl (meth) acrylate, and (meth) acrylic. T-butyl acid, i-amyl (meth) acrylate, t-amyl (meth) acrylate, sec-iso-amyl (meth) acrylate, 2-octyl (meth) acrylate, 3- (meth) acrylic acid 3- Examples include octyl and (meth) acrylic acid t-octyl. Among these, i-propyl (meth) acrylate, i-butyl (meth) acrylate, and t-butyl methacrylate are preferable, and i-propyl methacrylate and t-butyl methacrylate are more preferable.

 側鎖に脂環構造を有する基を含有するモノマーの具体例としては、例えば炭素原子数5~20個の脂環式炭化水素基を有する(メタ)アクリレートが挙げられる。より具体的な例としては、例えば(メタ)アクリル酸(ビシクロ〔2.2.1]ヘプチル-2)、(メタ)アクリル酸-1-アダマンチル、(メタ)アクリル酸-2-アダマンチル、(メタ)アクリル酸-3-メチル-1-アダマンチル、(メタ)アクリル酸-3,5-ジメチル-1-アダマンチル、(メタ)アクリル酸-3-エチルアダマンチル、(メタ)アクリル酸-3-メチル-5-エチル-1-アダマンチル、(メタ)アクリル酸-3,5,8-トリエチル-1-アダマンチル、(メタ)アクリル酸-3,5-ジメチル-8-エチル-1-アダマンチル、(メタ)アクリル酸2-メチル-2-アダマンチル、(メタ)アクリル酸2-エチル-2-アダマンチル、(メタ)アクリル酸3-ヒドロキシ-1-アダマンチル、(メタ)アクリル酸オクタヒドロ-4,7-メンタノインデン-5-イル、(メタ)アクリル酸オクタヒドロ-4,7-メンタノインデン-1-イルメチル、(メタ)アクリル酸-1-メンチル、(メタ)アクリル酸トリシクロデカン、(メタ)アクリル酸-3-ヒドロキシ-2,6,6-トリメチル-ビシクロ〔3.1.1〕ヘプチル、(メタ)アクリル酸-3,7,7-トリメチル-4-ヒドロキシ-ビシクロ〔4.1.0〕ヘプチル、(メタ)アクリル酸(ノル)ボルニル、(メタ)アクリル酸イソボルニル、(メタ)アクリル酸フェンチル、(メタ)アクリル酸-2,2,5-トリメチルシクロヘキシル、(メタ)アクリル酸シクロヘキシル等が挙げられる。これら(メタ)アクリル酸エステルの中でも、(メタ)アクリル酸シクロヘキシル、(メタ)アクリル酸(ノル)ボルニル、(メタ)アクリル酸イソボルニル、(メタ)アクリル酸-1-アダマンチル、(メタ)アクリル酸-2-アダマンチル、(メタ)アクリル酸フェンチル、(メタ)アクリル酸1-メンチル、(メタ)アクリル酸トリシクロデカンが好ましく、(メタ)アクリル酸シクロヘキシル、(メタ)アクリル酸(ノル)ボルニル、(メタ)アクリル酸イソボルニル、(メタ)アクリル酸-2-アダマンチル、(メタ)アクリル酸トリシクロデカンが特に好ましい。 Specific examples of the monomer containing a group having an alicyclic structure in the side chain include (meth) acrylate having an alicyclic hydrocarbon group having 5 to 20 carbon atoms. More specific examples include, for example, (meth) acrylic acid (bicyclo [2.2.1] heptyl-2), (meth) acrylic acid-1-adamantyl, (meth) acrylic acid-2-adamantyl, ) -3-methyl-1-adamantyl acrylate, 3,5-dimethyl-1-adamantyl (meth) acrylate, 3-ethyladamantyl (meth) acrylate, 3-methyl-5 (meth) acrylate -Ethyl-1-adamantyl, (meth) acrylic acid-3,5,8-triethyl-1-adamantyl, (meth) acrylic acid-3,5-dimethyl-8-ethyl-1-adamantyl, (meth) acrylic acid 2-methyl-2-adamantyl, 2-ethyl-2-adamantyl (meth) acrylate, 3-hydroxy-1-adamantyl (meth) acrylate, (meth) actyl Octahydro-4,7-mentanoinden-5-yl sulfate, octahydro-4,7-mentanoinden-1-ylmethyl (meth) acrylate, (meth) acrylic acid-1-menthyl, (meth) acrylic acid Tricyclodecane, (meth) acrylic acid-3-hydroxy-2,6,6-trimethyl-bicyclo [3.1.1] heptyl, (meth) acrylic acid-3,7,7-trimethyl-4-hydroxy- Bicyclo [4.1.0] heptyl, (nor) bornyl (meth) acrylate, isobornyl (meth) acrylate, phenethyl (meth) acrylate, 2,2,5-trimethylcyclohexyl (meth) acrylate, ( And methacrylic acid cyclohexyl. Among these (meth) acrylic acid esters, cyclohexyl (meth) acrylic acid, (nor) bornyl (meth) acrylic acid, isobornyl (meth) acrylic acid, (meth) acrylic acid-1-adamantyl, (meth) acrylic acid- 2-adamantyl, phentyl (meth) acrylate, 1-menthyl (meth) acrylate, and tricyclodecane (meth) acrylate are preferred, cyclohexyl (meth) acrylate, (nor) bornyl (meth) acrylate, (meth) ) Isobornyl acrylate, 2-adamantyl (meth) acrylate, and tricyclodecane (meth) acrylate are particularly preferred.

 (A-1)成分が側鎖に分岐構造及び/又は脂環構造を有する基を含有することにより、形成される硬化膜パターンの透湿度を充分に低減することができる。 When the component (A-1) contains a group having a branched structure and / or an alicyclic structure in the side chain, the moisture permeability of the formed cured film pattern can be sufficiently reduced.

 側鎖に酸性基を有する基を含有するモノマーの具体例としては、公知のものの中から適宜選択することができ、例えば、(メタ)アクリル酸、ビニル安息香酸、マレイン酸、マレイン酸モノアルキルエステル、フマル酸、イタコン酸、クロトン酸、桂皮酸、ソルビン酸、α-シアノ桂皮酸、アクリル酸ダイマー、水酸基を有するモノマーと環状酸無水物との付加反応物、ω-カルボキシ-ポリカプロラクトンモノ(メタ)アクリレート等が挙げられる。 Specific examples of the monomer containing a group having an acidic group in the side chain can be appropriately selected from known ones. For example, (meth) acrylic acid, vinylbenzoic acid, maleic acid, maleic acid monoalkyl ester , Fumaric acid, itaconic acid, crotonic acid, cinnamic acid, sorbic acid, α-cyanocinnamic acid, acrylic acid dimer, addition reaction product of hydroxyl group-containing monomer and cyclic acid anhydride, ω-carboxy-polycaprolactone mono (meta ) Acrylate and the like.

 (A-1)成分が側鎖に酸性基を有する基を含有することにより、アルカリ現像によるパターニングを可能とすることができる。また、側鎖にエチレン性不飽和基を有する基の導入及びバインダーポリマーにおけるエチレン性不飽和基当量の調整が容易となる。 When the component (A-1) contains a group having an acidic group in the side chain, patterning by alkali development can be performed. Further, introduction of a group having an ethylenically unsaturated group in the side chain and adjustment of the ethylenically unsaturated group equivalent in the binder polymer are facilitated.

 側鎖にエチレン性不飽和基を有する基としては、特に制限はなく、(メタ)アクリロイル基が好ましい。また、エチレン性不飽和基とモノマーとの連結はエステル基、アミド基、カルバモイル基などの2価の連結基であれば特に制限はない。側鎖にエチレン性不飽和基を導入する方法は公知の方法の中から適宜選択することができ、例えば、酸性基を有する基にエポキシ基を有する(メタ)アクリレートを付加する方法、ヒドロキシ基を有する基にイソシアネート基を有する(メタ)アクリレートを付加する方法、イソシアネート基を有する基にヒドロキシ基を有する(メタ)アクリレートを付加する方法等により、(A-1)成分に導入することができる。その中でも、酸性基を有する繰り返し単位にエポキシ基を有する(メタ)アクリレートを付加する方法が最も製造が容易であり、低コストである点で好ましい。 The group having an ethylenically unsaturated group in the side chain is not particularly limited, and a (meth) acryloyl group is preferable. The connection between the ethylenically unsaturated group and the monomer is not particularly limited as long as it is a divalent linking group such as an ester group, an amide group, or a carbamoyl group. The method of introducing an ethylenically unsaturated group into the side chain can be appropriately selected from known methods. For example, a method of adding a (meth) acrylate having an epoxy group to a group having an acidic group, a hydroxy group It can be introduced into the component (A-1) by a method of adding a (meth) acrylate having an isocyanate group to a group having a group, a method of adding a (meth) acrylate having a hydroxy group to a group having an isocyanate group, or the like. Among them, the method of adding a (meth) acrylate having an epoxy group to a repeating unit having an acidic group is preferred because it is the easiest to produce and is low in cost.

 (A-1)成分が側鎖にエチレン性不飽和基を有する基を含有することにより、形成される硬化膜パターンのクラック耐性を充分に向上させることができる。 When the component (A-1) contains a group having an ethylenically unsaturated group in the side chain, the crack resistance of the formed cured film pattern can be sufficiently improved.

 (A-1)成分を構成するモノマー全量を基準として、側鎖に分岐構造及び/又は脂環構造を有する基を構成するモノマーの割合は、10~70モル%であることが好ましく、15~65モル%であることがより好ましく、20~60モル%であることが特に好ましい。また、(A-1)成分を構成するモノマー全量を基準として、側鎖に酸性基を有する基を構成するモノマーの割合は、5~70モル%であることが好ましく、10~60モル%であることがより好ましく、20~50モル%がより好ましい。更に、(A-1)成分を構成するモノマー全量を基準として、側鎖にエチレン性不飽和基を有する基を構成するモノマーの割合は、5~70モル%であることが好ましく、10~60モル%であることがより好ましく、20~50モル%がより好ましい。上記モノマーの割合を満たすことで、アルカリ現像によるパターニング性、基材へのラミネート性、インデックスマッチング層を有していてもよい基材に対する良好な密着性、低透湿性及び耐クラック性をバランス良く向上させることができる。 Based on the total amount of monomers constituting the component (A-1), the ratio of the monomers constituting the group having a branched structure and / or alicyclic structure in the side chain is preferably 10 to 70 mol%, It is more preferably 65 mol%, particularly preferably 20 to 60 mol%. The ratio of the monomer constituting the group having an acidic group in the side chain based on the total amount of the monomer constituting the component (A-1) is preferably 5 to 70 mol%, and 10 to 60 mol%. More preferred is 20 to 50 mol%. Further, the ratio of the monomer constituting the group having an ethylenically unsaturated group in the side chain based on the total amount of the monomer constituting the component (A-1) is preferably 5 to 70 mol%. It is more preferably mol%, more preferably 20 to 50 mol%. By satisfying the above monomer ratio, the patterning property by alkali development, the laminate property to the base material, the good adhesion to the base material which may have an index matching layer, the low moisture permeability and the crack resistance are balanced. Can be improved.

 本実施形態において、(A-1)成分のエチレン性不飽和基当量は、硬化膜パターンの低透湿性とクラック耐性とを両立する観点から、0.50~3.00mmol/gであることが好ましく、1.00~3.00mmol/gであることがより好ましく、1.50~3.00mmol/gであることがより好ましい。例えば、メタクリル酸グリシジルを反応させた(A-1)成分のエチレン性不飽和基当量は、エチレン性不飽和基当量(mmol/g)=メタクリル酸グリシジル添加量(mol)/モノマー全添加量(g)により算出される。また、以下の方法により、測定できる。 In this embodiment, the ethylenically unsaturated group equivalent of the component (A-1) is 0.50 to 3.00 mmol / g from the viewpoint of achieving both low moisture permeability and crack resistance of the cured film pattern. Preferably, it is 1.00 to 3.00 mmol / g, more preferably 1.50 to 3.00 mmol / g. For example, the ethylenically unsaturated group equivalent of the component (A-1) reacted with glycidyl methacrylate is: ethylenically unsaturated group equivalent (mmol / g) = glycosyl methacrylate addition amount (mol) / total monomer addition amount ( g). Moreover, it can measure with the following method.

[エチレン性不飽和基当量の測定方法]
 エチレン性不飽和基当量は、バインダーポリマーの(メタ)アクリロイル基のエチレン性不飽和基へのアミンの付加反応(マイケル付加)を利用した滴定法により測定できる。具体的な測定法は以下の通りである。
[Measurement method of ethylenically unsaturated group equivalent]
The ethylenically unsaturated group equivalent can be measured by a titration method using the addition reaction (Michael addition) of an amine to the ethylenically unsaturated group of the (meth) acryloyl group of the binder polymer. The specific measurement method is as follows.

(1)まず、バインダーポリマーの溶液を130℃で1時間加熱し、揮発分を除去して、固形分を得る。
(2)試料約1gを精秤して三角フラスコに入れ、続いてアセトン約10mlを加え溶解する。
(3)モルホリン標準液[モルホリンとメタノールを1:4(容量比)で混合したもの]10mlを加え、さらに、50%酢酸標準液[酢酸とイオン交換水を1:1(容量比)で混合したもの]1.5mlを加えて5分間攪拌した後、室温で15分間放置する。
(4)アセトニトリル15ml及び無水酢酸10mlを上記三角フラスコに加え5分間攪拌する。
(5)記録式自動滴定装置を用いて、0.5mol/Lの酢酸・メタノール滴定用溶液を用いて滴定する。
(6)同時に空試験を実施し、下式にて算出する。
エチレン性不飽和基当量(mmol/g)=f×(A-B)/2S
式中、Aは試料の滴定に要した0.5mol/Lの酢酸・メタノール滴定用溶液の滴定量(ml)、Bは空試験に要した0.5mol/Lの酢酸・メタノール滴定用溶液の滴定量(ml)、fは0.5mol/Lの酢酸・メタノール滴定用溶液のファクター(濃度換算係数)、Sは試料採取量(g)[試料が溶剤を含む場合は溶剤を除いた量(g)]を表す。
(1) First, the binder polymer solution is heated at 130 ° C. for 1 hour to remove volatile components to obtain a solid content.
(2) About 1 g of a sample is precisely weighed and placed in an Erlenmeyer flask, and then about 10 ml of acetone is added and dissolved.
(3) Add 10 ml of morpholine standard solution [mixed morpholine and methanol at 1: 4 (volume ratio)] and then add 50% acetic acid standard solution [acetic acid and ion-exchanged water at 1: 1 (volume ratio)]. After adding 1.5 ml and stirring for 5 minutes, leave it at room temperature for 15 minutes.
(4) Add 15 ml of acetonitrile and 10 ml of acetic anhydride to the above Erlenmeyer flask and stir for 5 minutes.
(5) Titrate with a 0.5 mol / L acetic acid / methanol titration solution using a recording type automatic titrator.
(6) A blank test is performed at the same time, and the following formula is used.
Ethylenically unsaturated group equivalent (mmol / g) = f × (AB) / 2S
In the formula, A is a titration (ml) of a 0.5 mol / L acetic acid / methanol titration solution required for titration of the sample, and B is a 0.5 mol / L acetic acid / methanol titration solution required for a blank test. Titration volume (ml), f is a factor (concentration conversion factor) of 0.5 mol / L acetic acid / methanol titration solution, S is sampled amount (g) [if sample contains solvent, amount excluding solvent ( g)].

 (A-1)成分は、上記の、側鎖に分岐構造及び/又は脂環構造を有する基、側鎖に酸性基を有する基、並びに、側鎖にエチレン性不飽和基を有する基以外の他の基に由来する構造単位を含有することができる。(A-1)成分は、(メタ)アクリル酸、及び(メタ)アクリル酸アルキルエステルに由来する構造単位を含有する共重合体が好適であり、この場合の共重合体は、上記(メタ)アクリル酸、(メタ)アクリル酸アルキルエステルと共重合し得るその他のモノマーを構造単位に含有していてもよい。 Component (A-1) is a group other than the group having a branched structure and / or alicyclic structure in the side chain, a group having an acidic group in the side chain, and a group having an ethylenically unsaturated group in the side chain. Structural units derived from other groups can be contained. The component (A-1) is preferably a copolymer containing a structural unit derived from (meth) acrylic acid and (meth) acrylic acid alkyl ester. In this case, the copolymer is the above (meth) The structural unit may contain other monomers that can be copolymerized with acrylic acid and (meth) acrylic acid alkyl ester.

 上記(メタ)アクリル酸アルキルエステルとしては、(メタ)アクリル酸メチルエステル、(メタ)アクリル酸エチルエステル、(メタ)アクリル酸ブチルエステル、(メタ)アクリル酸-2-エチルヘキシルエステル、(メタ)アクリル酸ヒドロキシルエチルエステル等が挙げられる。 Examples of the (meth) acrylic acid alkyl ester include (meth) acrylic acid methyl ester, (meth) acrylic acid ethyl ester, (meth) acrylic acid butyl ester, (meth) acrylic acid-2-ethylhexyl ester, (meth) acrylic And acid hydroxyl ethyl ester.

 その他のモノマーとしては、フェニル基を有する化合物が好ましい。フェニル基を有する化合物としては、例えば、フェニルベンジル(メタ)アクリレート、フェノキシベンジル(メタ)アクリレート、ノニルフェノキシポリエチレングリコールアクリレート、エトキシ化o-フェニルフェノールアクリレート、ベンジル(メタ)アクリレート等が挙げられる。硬化膜の透湿性を低減する観点から、ベンジル(メタ)アクリレートを用いることが好ましい。バインダーポリマーが側鎖にフェニル基を有する基を含有することで、嵩高い構造が付加されるため硬化膜の透湿性が低減される。 Other monomers are preferably compounds having a phenyl group. Examples of the compound having a phenyl group include phenylbenzyl (meth) acrylate, phenoxybenzyl (meth) acrylate, nonylphenoxypolyethylene glycol acrylate, ethoxylated o-phenylphenol acrylate, and benzyl (meth) acrylate. From the viewpoint of reducing the moisture permeability of the cured film, it is preferable to use benzyl (meth) acrylate. When the binder polymer contains a group having a phenyl group in the side chain, a bulky structure is added, so that the moisture permeability of the cured film is reduced.

 その他のモノマーとしてはまた、(メタ)アクリル酸グリシジルエステル、スチレン等が挙げられる。 Other monomers also include (meth) acrylic acid glycidyl ester, styrene and the like.

 (A-1)成分は、低透湿性とクラック耐性とを両立する硬化膜パターンを形成する観点から、(i)基として、(メタ)アクリル酸トリシクロデカンエステル又は(メタ)アクリル酸シクロヘキシルエステルに由来する構造単位と、(ii)基として、(メタ)アクリル酸に由来する構造単位と、(iii)基として、(メタ)アクリル酸グリシジルエステル、(メタ)アクリレート酸2-イソシアネートエチルエステルからなる群より選択される少なくとも一種の化合物に由来する構造単位と、を含有することが好ましい。 The component (A-1) is a (meth) acrylic acid tricyclodecane ester or (meth) acrylic acid cyclohexyl ester as a group (i) from the viewpoint of forming a cured film pattern having both low moisture permeability and crack resistance. A structural unit derived from (ii) as a structural unit derived from (meth) acrylic acid, and (iii) as a group from (meth) acrylic acid glycidyl ester, (meth) acrylate 2-isocyanate ethyl ester And a structural unit derived from at least one compound selected from the group consisting of:

 (A-1)成分の重量平均分子量は、解像度の観点から、10,000~200,000であることが好ましく、15,000~150,000であることがより好ましく、30,000~150,000であることがさらに好ましく、30,000~100,000であることが特に好ましく、40,000~100,000であることが極めて好ましい。なお、重量平均分子量は、本明細書の実施例に記載したゲルパーミエーションクロマトグラフィー法により測定することができる。 The weight average molecular weight of the component (A-1) is preferably 10,000 to 200,000, more preferably 15,000 to 150,000, and more preferably 30,000 to 150,000 from the viewpoint of resolution. 000 is more preferable, 30,000 to 100,000 is particularly preferable, and 40,000 to 100,000 is very preferable. In addition, a weight average molecular weight can be measured by the gel permeation chromatography method described in the Example of this specification.

 (A-1)成分の酸価は、所望の形状を有する硬化膜(硬化膜パターン)をアルカリ現像で容易に形成する観点から、75mgKOH/g以上とすることが好ましい。また、硬化膜形状の制御容易性と硬化膜の防錆性との両立を図る観点から、(A-1)成分の酸価は、75~200mgKOH/gであることが好ましく、75~150mgKOH/gであることがより好ましく、75~120mgKOH/gであることがさらに好ましい。なお、酸価は、本明細書の実施例に記載した方法で測定することができる。 The acid value of the component (A-1) is preferably 75 mgKOH / g or more from the viewpoint of easily forming a cured film (cured film pattern) having a desired shape by alkali development. From the viewpoint of achieving both controllability of the cured film shape and rust prevention of the cured film, the acid value of the component (A-1) is preferably 75 to 200 mgKOH / g, and preferably 75 to 150 mgKOH / g. g is more preferable, and 75 to 120 mgKOH / g is further more preferable. In addition, an acid value can be measured by the method described in the Example of this specification.

 なお、第一の樹脂層20は、上述した(A-1)成分以外の他のバインダーポリマーを更に含有していてもよい。 The first resin layer 20 may further contain a binder polymer other than the component (A-1) described above.

 本実施形態においては、(A)成分における(A-1)成分の含有割合が、(A)成分全量基準で60~100質量%であることが好ましく、70~100質量%であることがより好ましく、80~100質量%であることがさらに好ましい。 In the present embodiment, the content ratio of the component (A-1) in the component (A) is preferably 60 to 100% by mass, more preferably 70 to 100% by mass based on the total amount of the component (A). Preferably, it is 80 to 100% by mass.

<光重合性化合物>
 (B)成分としては、エチレン性不飽和基を有する光重合性化合物を用いることができる。エチレン性不飽和基を有する光重合性化合物としては、例えば分子内に一つの重合可能なエチレン性不飽和基を有する一官能ビニルモノマー、分子内に二つの重合可能なエチレン性不飽和基を有する二官能ビニルモノマー、又は分子内に少なくとも三つの重合可能なエチレン性不飽和基を有する多官能ビニルモノマーが挙げられる。
<Photopolymerizable compound>
As the component (B), a photopolymerizable compound having an ethylenically unsaturated group can be used. Examples of the photopolymerizable compound having an ethylenically unsaturated group include a monofunctional vinyl monomer having one polymerizable ethylenically unsaturated group in the molecule and two polymerizable ethylenically unsaturated groups in the molecule. Bifunctional vinyl monomers or polyfunctional vinyl monomers having at least three polymerizable ethylenically unsaturated groups in the molecule can be mentioned.

 上記分子内に一つの重合可能なエチレン性不飽和基を有する一官能ビニルモノマーとしては、例えば、上記(A)成分の好適な例である共重合体の合成に用いられるモノマーとして例示したものが挙げられる。 Examples of the monofunctional vinyl monomer having one polymerizable ethylenically unsaturated group in the molecule include those exemplified as monomers used for the synthesis of a copolymer which is a preferred example of the component (A). Can be mentioned.

 上記分子内に二つの重合可能なエチレン性不飽和基を有する二官能ビニルモノマーとしては、硬化膜の透湿度を低減する観点から、トリシクロデカン骨格又はトリシクロデセン骨格を有する化合物を含むことが好ましい。金属配線及び透明電極パターンの腐食抑制の観点から、トリシクロデカン骨格又はトリシクロデセン骨格を有する化合物として、下記一般式(B-1)で表されるジ(メタ)アクリレート化合物を含むことが好ましい。 The bifunctional vinyl monomer having two polymerizable ethylenically unsaturated groups in the molecule includes a compound having a tricyclodecane skeleton or a tricyclodecene skeleton from the viewpoint of reducing the moisture permeability of the cured film. preferable. From the viewpoint of inhibiting corrosion of the metal wiring and transparent electrode pattern, it is preferable that the compound having a tricyclodecane skeleton or a tricyclodecene skeleton includes a di (meth) acrylate compound represented by the following general formula (B-1). .

Figure JPOXMLDOC01-appb-C000001
[一般式(B-1)中、R及びRは、それぞれ独立に水素原子又はメチル基を示し、Xは、トリシクロデカン骨格又はトリシクロデセン骨格を有する2価の基を示し、R及びRは、それぞれ独立に炭素数1~4のアルキレン基を示し、n及びmは、それぞれ独立に0~2の整数を示し、p及びqは、それぞれ独立に0以上の整数を示し、p+q=0~10となるように選択される。]
Figure JPOXMLDOC01-appb-C000001
[In General Formula (B-1), R 1 and R 2 each independently represent a hydrogen atom or a methyl group, X represents a divalent group having a tricyclodecane skeleton or a tricyclodecene skeleton, and R 3 and R 4 each independently represents an alkylene group having 1 to 4 carbon atoms, n and m each independently represents an integer of 0 to 2, and p and q each independently represents an integer of 0 or more. , P + q = 0 to 10 is selected. ]

 上記一般式(B-1)において、R及びRは、エチレン基又はプロピレン基であることが好ましく、エチレン基であることがより好ましい。また、プロピレン基はn-イソプロピレン基及びイソプロピレン基のいずれであってもよい。 In the general formula (B-1), R 3 and R 4 are preferably an ethylene group or a propylene group, and more preferably an ethylene group. The propylene group may be either an n-isopropylene group or an isopropylene group.

 上記一般式(B-1)で表される化合物によれば、Xに含まれるトリシクロデカン骨格又はトリシクロデセン骨格を有する2価の基が、嵩高い構造を有することで、硬化膜の低透湿性を実現し、金属配線及び透明電極の腐食抑制性を向上されることができる。ここで、本明細書中における「トリシクロデカン骨格」及び「トリシクロデセン骨格」とは、それぞれ以下の構造(それぞれ、結合手は任意の箇所である)をいう。 According to the compound represented by the general formula (B-1), the divalent group having a tricyclodecane skeleton or a tricyclodecene skeleton contained in X has a bulky structure, so that the cured film has a low viscosity. Moisture permeability can be realized, and the corrosion resistance of the metal wiring and the transparent electrode can be improved. Here, “tricyclodecane skeleton” and “tricyclodecene skeleton” in the present specification refer to the following structures (where each bond is an arbitrary position).

Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000002

 トリシクロデカン骨格又はトリシクロデセン骨格を有する化合物としては、得られる硬化膜パターンの低透湿性の観点から、トリシクロデカンジメタノールジ(メタ)アクリレートなどのトリシクロデカン骨格を有する化合物が好ましい。これらは、DCP及びA-DCP(いずれも新中村化学工業株式会社製)として入手可能である。 As the compound having a tricyclodecane skeleton or a tricyclodecene skeleton, a compound having a tricyclodecane skeleton such as tricyclodecane dimethanol di (meth) acrylate is preferable from the viewpoint of low moisture permeability of the obtained cured film pattern. These are available as DCP and A-DCP (both manufactured by Shin-Nakamura Chemical Co., Ltd.).

 (B)成分における、トリシクロデカン骨格又はトリシクロデセン骨格を有する化合物の割合は、透湿度を低減する観点から、感光性樹脂組成物に含まれる光重合性化合物の合計量100質量部のうち、50質量部以上であることが好ましく、70質量部以上であることがより好ましく、80質量部以上であることがさらに好ましい。 In the component (B), the proportion of the compound having a tricyclodecane skeleton or a tricyclodecene skeleton is, among the total amount of 100 parts by mass of the photopolymerizable compound contained in the photosensitive resin composition, from the viewpoint of reducing moisture permeability. , 50 parts by mass or more, preferably 70 parts by mass or more, and more preferably 80 parts by mass or more.

 トリシクロデカン骨格又はトリシクロデセン骨格を有する化合物とは別の、分子内に二つの重合可能なエチレン性不飽和基を有する二官能ビニルモノマーとしては、ポリエチレングリコールジ(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、2,2-ビス(4-(メタ)アクリロキシポリエトキシポリプロポキシフェニル)プロパン、ビスフェノールAジグリシジルエーテルジ(メタ)アクリレート等が挙げられる。 A bifunctional vinyl monomer having two polymerizable ethylenically unsaturated groups in the molecule, other than a compound having a tricyclodecane skeleton or a tricyclodecene skeleton, includes polyethylene glycol di (meth) acrylate and trimethylolpropane. Examples include di (meth) acrylate, polypropylene glycol di (meth) acrylate, 2,2-bis (4- (meth) acryloxypolyethoxypolypropoxyphenyl) propane, and bisphenol A diglycidyl ether di (meth) acrylate.

 上記少なくとも3つの重合可能なエチレン性不飽和基を有する多官能ビニルモノマーとしては、従来公知のものを特に制限無く用いることができる。金属配線又は透明電極の腐食防止及び現像性の観点から、上記多官能ビニルモノマーとしては、トリメチロールプロパントリ(メタ)アクリレート等のトリメチロールプロパン由来の骨格を有する(メタ)アクリレート化合物;テトラメチロールメタントリ(メタ)アクリレート、テトラメチロールメタンテトラ(メタ)アクリレート等のテトラメチロールメタン由来の骨格を有する(メタ)アクリレート化合物;ペンタエリスリトールトリ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート等のペンタエリスリトール由来の骨格を有する(メタ)アクリレート化合物;ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレート等のジペンタエリスリトール由来の骨格を有する(メタ)アクリレート化合物;ジトリメチロールプロパンテトラ(メタ)アクリレート等のジトリメチロールプロパン由来の骨格を有する(メタ)アクリレート化合物;又はジグリセリン由来の骨格を有する(メタ)アクリレート化合物;シアヌル酸由来の骨格を有する(メタ)アクリレート化合物を用いることが好ましい。 As the polyfunctional vinyl monomer having at least three polymerizable ethylenically unsaturated groups, conventionally known ones can be used without particular limitation. From the viewpoint of corrosion prevention and developability of metal wiring or transparent electrode, the polyfunctional vinyl monomer includes a (meth) acrylate compound having a skeleton derived from trimethylolpropane such as trimethylolpropane tri (meth) acrylate; tetramethylolmethane (Meth) acrylate compounds having a skeleton derived from tetramethylolmethane such as tri (meth) acrylate and tetramethylolmethanetetra (meth) acrylate; derived from pentaerythritol such as pentaerythritol tri (meth) acrylate and pentaerythritol tetra (meth) acrylate (Meth) acrylate compounds having the following skeleton: bones derived from dipentaerythritol such as dipentaerythritol penta (meth) acrylate and dipentaerythritol hexa (meth) acrylate A (meth) acrylate compound having a skeleton derived from ditrimethylolpropane such as ditrimethylolpropane tetra (meth) acrylate; or a (meth) acrylate compound having a skeleton derived from diglycerin; derived from cyanuric acid It is preferable to use a (meth) acrylate compound having a skeleton.

 これらの中でも、上記多官能ビニルモノマーは、ペンタエリスリトール由来の骨格を有する(メタ)アクリレート化合物、ジペンタエリスリトール由来の骨格を有する(メタ)アクリレート化合物、トリメチロールプロパン由来の骨格を有する(メタ)アクリレート化合物、ジトリメチロールプロパン由来の骨格を有する(メタ)アクリレート化合物、又は、シアヌル酸由来の骨格を有する(メタ)アクリレート化合物を含むことがさらに好ましい。これらの中でも、ジトリメチロールプロパン由来の骨格を有する(メタ)アクリレート化合物を用いた場合、硬化膜の耐クラック性を向上させることができるため好ましい。 Among these, the polyfunctional vinyl monomer includes a (meth) acrylate compound having a skeleton derived from pentaerythritol, a (meth) acrylate compound having a skeleton derived from dipentaerythritol, and a (meth) acrylate having a skeleton derived from trimethylolpropane. It is more preferable to include a compound, a (meth) acrylate compound having a skeleton derived from ditrimethylolpropane, or a (meth) acrylate compound having a skeleton derived from cyanuric acid. Among these, it is preferable to use a (meth) acrylate compound having a skeleton derived from ditrimethylolpropane because the crack resistance of the cured film can be improved.

 ここで、「~由来の骨格を有する(メタ)アクリレート化合物」について、ジトリメチロールプロパン由来の骨格を有する(メタ)アクリレート化合物を例にとり説明する。ジトリメチロールプロパン由来の骨格を有する(メタ)アクリレートとは、ジトリメチロールプロパンと、(メタ)アクリル酸とのエステル化物を意味し、当該エステル化物には、アルキレンオキシ基で変性された化合物も包含される。上記エステル化物は、一分子中におけるエステル結合数が最大数の4であることが好ましいが、エステル結合の数が1~3の化合物が混合していてもよい。 Here, the “(meth) acrylate compound having a skeleton derived from” will be described by taking a (meth) acrylate compound having a skeleton derived from ditrimethylolpropane as an example. (Meth) acrylate having a skeleton derived from ditrimethylolpropane means an esterified product of ditrimethylolpropane and (meth) acrylic acid, and the esterified product includes a compound modified with an alkyleneoxy group. The The esterified product preferably has a maximum number of 4 ester bonds in one molecule, but a compound having 1 to 3 ester bonds may be mixed.

 また、低透湿性とクラック耐性とを両立する硬化膜パターンを形成する観点から、(B)成分は、トリシクロデカン骨格又はトリシクロデセン骨格を有する化合物、ジトリメチロールプロパンテトラ(メタ)アクリレート等のジトリメチロールプロパン由来の骨格を有する(メタ)アクリレート化合物、のうちの一種又は二種以上を含むことが好ましい。 In addition, from the viewpoint of forming a cured film pattern having both low moisture permeability and crack resistance, the component (B) is a compound having a tricyclodecane skeleton or a tricyclodecene skeleton, ditrimethylolpropane tetra (meth) acrylate, or the like. It is preferable to include one or more of (meth) acrylate compounds having a skeleton derived from ditrimethylolpropane.

 (A)成分及び(B)成分の含有量は、(A)成分及び(B)成分の合計量100質量部に対し、(A)成分が35~85質量部であることが好ましく、40~80質量部であることがより好ましく、50~70質量部であることがさらに好ましく、55~65質量部であることが特に好ましい。 The content of the component (A) and the component (B) is preferably 35 to 85 parts by mass of the component (A) with respect to 100 parts by mass of the total amount of the components (A) and (B). The amount is more preferably 80 parts by mass, further preferably 50 to 70 parts by mass, and particularly preferably 55 to 65 parts by mass.

<光重合開始剤>
 (C)成分としては、従来公知の光重合開始剤を特に制限無く用いることができるが、透明性の高い光重合開始剤を用いることが好ましい。基材上に、厚みが10μm以下の薄膜であっても充分な解像度で樹脂硬化膜パターンを形成する点では、(C)成分はオキシムエステル化合物及び/又はホスフィンオキサイド化合物を含むことが好ましい。ホスフィンオキサイド化合物としては、2,4,6-トリメチルベンゾイル-ジフェニル-ホスフィンオキサイド等が挙げられる。
<Photopolymerization initiator>
As the component (C), a conventionally known photopolymerization initiator can be used without any particular limitation, but a highly transparent photopolymerization initiator is preferably used. The component (C) preferably contains an oxime ester compound and / or a phosphine oxide compound in that a cured resin film pattern can be formed with sufficient resolution even on a substrate with a thickness of 10 μm or less. Examples of the phosphine oxide compound include 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide.

 オキシムエステル化合物は、下記一般式(1)で表される化合物、下記一般式(2)で表される化合物、又は下記一般式(3)で表される化合物であることが好ましい。 The oxime ester compound is preferably a compound represented by the following general formula (1), a compound represented by the following general formula (2), or a compound represented by the following general formula (3).

Figure JPOXMLDOC01-appb-C000003
Figure JPOXMLDOC01-appb-C000003

 式(1)中、R11及びR12は、それぞれ独立に、炭素数1~12のアルキル基、炭素数4~10のシクロアルキル基、フェニル基又はトリル基を示し、炭素数1~8のアルキル基、炭素数4~6のシクロアルキル基、フェニル基又はトリル基であることが好ましく、炭素数1~4のアルキル基、炭素数4~6のシクロアルキル基、フェニル基又はトリル基であることがより好ましく、メチル基、シクロペンチル基、フェニル基又はトリル基であることがさらに好ましい。R13は、-H、-OH、-COOH、-O(CH)OH、-O(CHOH、-COO(CH)OH又は-COO(CHOHを示し、-H、-O(CH)OH、-O(CHOH、-COO(CH)OH、又は-COO(CHOHであることが好ましく、-H、-O(CHOH、又は-COO(CHOHであることがより好ましい。 In the formula (1), R 11 and R 12 each independently represents an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 4 to 10 carbon atoms, a phenyl group or a tolyl group, and having 1 to 8 carbon atoms An alkyl group, a cycloalkyl group having 4 to 6 carbon atoms, a phenyl group or a tolyl group is preferable, and an alkyl group having 1 to 4 carbon atoms, a cycloalkyl group having 4 to 6 carbon atoms, a phenyl group or a tolyl group is preferable. More preferred is a methyl group, a cyclopentyl group, a phenyl group or a tolyl group. R 13 represents —H, —OH, —COOH, —O (CH 2 ) OH, —O (CH 2 ) 2 OH, —COO (CH 2 ) OH or —COO (CH 2 ) 2 OH; It is preferably H, —O (CH 2 ) OH, —O (CH 2 ) 2 OH, —COO (CH 2 ) OH, or —COO (CH 2 ) 2 OH, and —H, —O (CH 2 ) 2 OH or —COO (CH 2 ) 2 OH is more preferable.

Figure JPOXMLDOC01-appb-C000004
Figure JPOXMLDOC01-appb-C000004

 式(2)中、2つのR14は、それぞれ独立に、炭素数1~6のアルキル基を示し、プロピル基であることが好ましい。R15は、NO又はArCO(ここで、Arはアリール基を示す。)を示し、Arとしては、トリル基が好ましい。R16及びR17は、それぞれ独立に、炭素数1~12のアルキル基、フェニル基、又はトリル基を示し、メチル基、フェニル基又はトリル基であることが好ましい。 In the formula (2), two R 14 each independently represents an alkyl group having 1 to 6 carbon atoms, and is preferably a propyl group. R 15 represents NO 2 or ArCO (wherein Ar represents an aryl group), and Ar is preferably a tolyl group. R 16 and R 17 each independently represent an alkyl group having 1 to 12 carbon atoms, a phenyl group, or a tolyl group, preferably a methyl group, a phenyl group, or a tolyl group.

Figure JPOXMLDOC01-appb-C000005
Figure JPOXMLDOC01-appb-C000005

 式(3)中、R18は、炭素数1~6のアルキル基を示し、エチル基であることが好ましい。R19はアセタール結合を有する有機基であり、後述する式(3-1)に示す化合物が有するR19に対応する置換基であることが好ましい。R20及びR21は、それぞれ独立に、炭素数1~12のアルキル基、フェニル基又はトリル基を示し、メチル基、フェニル基又はトリル基であることが好ましく、メチル基であることがより好ましい。R22は、水素原子又はアルキル基を示す。 In the formula (3), R 18 represents an alkyl group having 1 to 6 carbon atoms, and is preferably an ethyl group. R 19 is an organic group having an acetal bond, and is preferably a substituent corresponding to R 19 in a compound represented by the formula (3-1) described later. R 20 and R 21 each independently represents an alkyl group having 1 to 12 carbon atoms, a phenyl group or a tolyl group, preferably a methyl group, a phenyl group or a tolyl group, and more preferably a methyl group. . R 22 represents a hydrogen atom or an alkyl group.

 上記一般式(1)で表される化合物としては、IRGACURE OXE 01(BASF株式会社製、製品名)として入手可能である。 The compound represented by the above general formula (1) is available as IRGACURE OXE 01 (product name, manufactured by BASF Corporation).

 上記一般式(2)で表される化合物としては、DFI-091(ダイトーケミックス株式会社製、製品名)として入手可能である。 The compound represented by the general formula (2) is available as DFI-091 (product name, manufactured by Daito Chemix Co., Ltd.).

 上記一般式(3)で表される化合物としては、アデカオプトマーN-1919(株式会社ADEKA製、製品名)として入手可能である。 The compound represented by the general formula (3) is available as Adekaoptomer N-1919 (product name, manufactured by ADEKA Corporation).

 (C)成分の含有量は、光感度及び解像度に優れる点では、(A)成分及び(B)成分の合計量100質量部に対し、0.1~10質量部であることが好ましく、1~8質量部であることがより好ましく、1~6質量部であることがさらに好ましく、1~4質量部であることが特に好ましい。 The content of the component (C) is preferably 0.1 to 10 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B) in terms of excellent photosensitivity and resolution. It is more preferably from 8 to 8 parts by mass, further preferably from 1 to 6 parts by mass, and particularly preferably from 1 to 4 parts by mass.

 本実施形態に係る感光性樹脂組成物は、硬化膜の防錆性をより向上させる観点から、メルカプト基を有するトリアゾール化合物、メルカプト基を有するテトラゾール化合物、メルカプト基を有するチアジアゾール化合物、アミノ基を有するトリアゾール化合物及びアミノ基を有するテトラゾール化合物からなる群より選択される少なくとも一種の化合物(以下、(D)成分ともいう)をさらに含有することが好ましい。メルカプト基を有するトリアゾール化合物としては、例えば、3-メルカプト-トリアゾール(和光純薬株式会社製、製品名:3MT)が挙げられる。また、メルカプト基を有するチアジアゾール化合物としては、例えば、2-アミノ-5-メルカプト-1,3,4-チアジアゾール(和光純薬株式会社製、製品名:ATT)が挙げられる。 The photosensitive resin composition according to this embodiment has a triazole compound having a mercapto group, a tetrazole compound having a mercapto group, a thiadiazole compound having a mercapto group, and an amino group from the viewpoint of further improving the rust prevention property of the cured film. It is preferable to further contain at least one compound selected from the group consisting of a triazole compound and a tetrazole compound having an amino group (hereinafter also referred to as component (D)). Examples of the triazole compound having a mercapto group include 3-mercapto-triazole (manufactured by Wako Pure Chemical Industries, Ltd., product name: 3MT). Examples of the thiadiazole compound having a mercapto group include 2-amino-5-mercapto-1,3,4-thiadiazole (product name: ATT, manufactured by Wako Pure Chemical Industries, Ltd.).

 上記アミノ基を有するトリアゾール化合物としては、ベンゾトリアゾール、1H-ベンゾトリアゾール-1-アセトニトリル、ベンゾトリアゾール-5-カルボン酸、1H-ベンゾトリアゾール-1-メタノール、カルボキシベンゾトリアゾール等にアミノ基が置換した化合物、3-メルカプトトリアゾール、5-メルカプトトリアゾール等のメルカプト基を含むトリアゾール化合物にアミノ基が置換した化合物などが挙げられる。 Examples of the triazole compound having an amino group include benzotriazole, 1H-benzotriazole-1-acetonitrile, benzotriazole-5-carboxylic acid, 1H-benzotriazole-1-methanol, carboxybenzotriazole, etc. , 3-mercaptotriazole, 5-mercaptotriazole, and other triazole compounds containing a mercapto group are substituted with amino groups.

 上記アミノ基を有するテトラゾール化合物としては、5-アミノ-1H-テトラゾール、1-メチル-5-アミノ-テトラゾール、1-メチル-5-メルカプト-1H-テトラゾール、1-カルボキシメチル-5-アミノ-テトラゾール等が挙げられる。これらのテトラゾール化合物は、その水溶性塩であってもよい。具体例としては、1-メチル-5-アミノ-テトラゾールのナトリウム、カリウム、リチウム等のアルカリ金属塩などが挙げられる。 Examples of the tetrazole compounds having an amino group include 5-amino-1H-tetrazole, 1-methyl-5-amino-tetrazole, 1-methyl-5-mercapto-1H-tetrazole, and 1-carboxymethyl-5-amino-tetrazole. Etc. These tetrazole compounds may be water-soluble salts thereof. Specific examples include alkali metal salts of 1-methyl-5-amino-tetrazole such as sodium, potassium and lithium.

 感光性樹脂組成物が(D)成分を含有する場合、その含有量は、(A)成分及び(B)成分の合計量100質量部に対し、0.05~5.0質量部が好ましく、0.1~2.0質量部がより好ましく、0.2~1.0質量部がさらに好ましく、0.3~0.8質量部が特に好ましい。 When the photosensitive resin composition contains the component (D), the content thereof is preferably 0.05 to 5.0 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B). 0.1 to 2.0 parts by mass is more preferable, 0.2 to 1.0 part by mass is further preferable, and 0.3 to 0.8 part by mass is particularly preferable.

 本実施形態に係る感光性樹脂組成物は、インデックスマッチング層を有していてもよい基材及びITO電極等の透明電極に対する密着性と、銅配線等の金属配線上での良好な現像性とが高水準で達成された硬化膜を形成する観点、並びに、現像残りの発生を防ぐ観点から、エチレン性不飽和基を含むリン酸エステル(以下、(E)成分ともいう)をさらに含有することが好ましい。 The photosensitive resin composition according to the present embodiment has adhesiveness to a transparent electrode such as a substrate and an ITO electrode that may have an index matching layer, and good developability on a metal wiring such as a copper wiring. From the viewpoint of forming a cured film that has been achieved at a high level, and from the viewpoint of preventing the occurrence of development residue, it further contains a phosphate ester containing an ethylenically unsaturated group (hereinafter also referred to as component (E)). Is preferred.

 (E)成分としては、形成する硬化膜の防錆性を充分確保しつつ、基材及びITO電極に対する密着性と金属配線上での現像性とを高水準で両立する観点から、ユニケミカル株式会社製のPhosmerシリーズ(Phosmer-M、Phosmer-CL、Phosmer-PE、Phosmer-MH、Phosmer-PP等)、又は日本化薬株式会社製のKAYAMERシリーズ(PM-21、PM-2等)が好ましい。 As the component (E), Unichemical Corporation has a high level of compatibility between the adhesion to the base material and the ITO electrode and the developability on the metal wiring while ensuring sufficient rust prevention of the cured film to be formed. The company's Phosmer series (Phosmer-M, Phosmer-CL, Phosmer-PE, Phosmer-MH, Phosmer-PP, etc.) or KAYAMER series (PM-21, PM-2, etc.) manufactured by Nippon Kayaku Co., Ltd. are preferred. .

 感光性樹脂組成物が(E)成分を含有する場合、その含有量は、基材及びITO電極に対する密着性と金属配線上での現像性とを高水準で両立する観点から、(A)成分及び(B)成分の合計量100質量部に対し、0.1~4.0質量部が好ましく、0.2~3.0質量部がより好ましく、0.2~2.5質量部がさらに好ましく、0.2~2.0質量部が特に好ましい。 In the case where the photosensitive resin composition contains the component (E), the content is the component (A) from the viewpoint of achieving both high adhesion to the base material and the ITO electrode and developability on the metal wiring. And 0.1 to 4.0 parts by weight, more preferably 0.2 to 3.0 parts by weight, and further 0.2 to 2.5 parts by weight with respect to 100 parts by weight of the total amount of component (B). 0.2 to 2.0 parts by mass is preferable.

 本実施形態に係る第一の樹脂層を形成する感光性樹脂組成物には、その他の添加剤として、必要に応じて、シランカップリング剤等の密着性付与剤、防錆剤、レベリング剤、可塑剤、充填剤、消泡剤、難燃剤、安定剤、酸化防止剤、香料、熱架橋剤、重合禁止剤などを(A)成分及び(B)成分の合計量100質量部に対し、各々0.01~20質量部程度含有させることができる。これらは、単独で又は2種類以上を組み合わせて使用できる。 In the photosensitive resin composition forming the first resin layer according to the present embodiment, as other additives, if necessary, an adhesion imparting agent such as a silane coupling agent, a rust inhibitor, a leveling agent, A plasticizer, a filler, an antifoaming agent, a flame retardant, a stabilizer, an antioxidant, a fragrance, a thermal crosslinking agent, a polymerization inhibitor, etc. are each added to 100 parts by mass of the total amount of the component (A) and the component (B). About 0.01 to 20 parts by mass can be contained. These can be used alone or in combination of two or more.

 第一の樹脂層の厚みは、1~15μmであってもよく、2~10μmであることが好ましく、3~8μmであることがより好ましく、4~6μmであることがさらに好ましく、5~6μmであることが特に好ましい。厚みが1~15μmであることにより、塗布時の欠陥が少なく、透明性に優れた成膜が可能となる。また、硬化後における第一の樹脂層の厚み(即ち、硬化膜パターンの厚み)も上記範囲内であることが好ましい。 The thickness of the first resin layer may be 1 to 15 μm, preferably 2 to 10 μm, more preferably 3 to 8 μm, still more preferably 4 to 6 μm, and 5 to 6 μm. It is particularly preferred that When the thickness is 1 to 15 μm, there are few defects at the time of coating, and film formation with excellent transparency is possible. The thickness of the first resin layer after curing (that is, the thickness of the cured film pattern) is also preferably within the above range.

(第二の樹脂層)
 第二の樹脂層30は、金属酸化物粒子を含有する層である。第二の樹脂層30は、金属酸化物粒子を含有することにより、第一の樹脂層20よりも相対的に高い屈折率を有することができる。第二の樹脂層30は、633nmにおける屈折率が1.40~1.90の範囲内であることが好ましく、1.50~1.90であることがより好ましく、1.53~1.85であることが更に好ましく、1.55~1.75であることが特に好ましい。また、第二の樹脂層が硬化性成分を含む場合、硬化後における第二の樹脂層の633nmにおける屈折率も上記範囲内であることが好ましい。
(Second resin layer)
The second resin layer 30 is a layer containing metal oxide particles. The second resin layer 30 can have a refractive index relatively higher than that of the first resin layer 20 by containing metal oxide particles. The second resin layer 30 preferably has a refractive index in the range of 1.40 to 1.90 at 633 nm, more preferably 1.50 to 1.90, and 1.53 to 1.85. More preferably, it is particularly preferably 1.55 to 1.75. Moreover, when the 2nd resin layer contains a sclerosing | hardenable component, it is preferable that the refractive index in 633 nm of the 2nd resin layer after hardening is also in the said range.

 第二の樹脂層30の633nmにおける屈折率が上記範囲内であると、硬化膜パターンをITO等の透明電極パターン上に設けた場合に、硬化膜パターン上に使用される各種部材(例えば、モジュール化する際に使用するカバーガラスと透明電極パターンとを接着するOCA)との屈折率の中間値となり、ITO等の透明電極パターンが形成されている部分と形成されていない部分での光学的な反射による色差を小さくすることが可能となり、骨見え現象を防止できる。また、画面全体の反射光強度を低減することが可能となり、画面上の透過率低下を抑制することが可能となる。 When the refractive index at 633 nm of the second resin layer 30 is within the above range, various members (for example, modules) used on the cured film pattern when the cured film pattern is provided on a transparent electrode pattern such as ITO. It becomes an intermediate value of the refractive index of the cover glass and the OCA that bonds the transparent electrode pattern to the transparent electrode pattern, and is optical in the portion where the transparent electrode pattern such as ITO is formed and the portion where it is not formed. It is possible to reduce the color difference due to reflection and prevent the appearance of bone. Moreover, it becomes possible to reduce the reflected light intensity of the whole screen, and to suppress the transmittance | permeability fall on a screen.

 ITO等の透明電極の屈折率は、1.80~2.10であることが好ましく、1.85~2.05であることがより好ましく、1.90~2.00であることがさらに好ましい。また、OCA等の部材の屈折率は1.45~1.55であることが好ましく、1.47~1.53であることがより好ましく、1.48~1.51であることがさらに好ましい。 The refractive index of a transparent electrode such as ITO is preferably 1.80 to 2.10, more preferably 1.85 to 2.05, and even more preferably 1.90 to 2.00. . Further, the refractive index of a member such as OCA is preferably 1.45 to 1.55, more preferably 1.47 to 1.53, and further preferably 1.48 to 1.51. .

 第二の樹脂層30は、450~650nmの波長域における最小光透過率が80%以上であることが好ましく、85%以上であることがより好ましく、90%以上であることがさらに好ましい。また、第二の樹脂層が硬化性成分を含む場合、硬化後における第二の樹脂層の450~650nmの波長域における最小光透過率も上記範囲内であることが好ましい。 The second resin layer 30 preferably has a minimum light transmittance of 80% or more in a wavelength region of 450 to 650 nm, more preferably 85% or more, and further preferably 90% or more. When the second resin layer contains a curable component, it is preferable that the minimum light transmittance in the wavelength region of 450 to 650 nm of the second resin layer after curing is also within the above range.

 第二の樹脂層30は、上記の(A)成分、(B)成分及び(C)成分を含有することができ、必要に応じて、上記の(D)成分及び/又は上記(E)成分を更に含有することができる。第二の樹脂層30は(B)成分、(C)成分等の光重合成分を必ずしも含有する必要はなく、層形成により隣接する樹脂層から移行する光重合成分を利用して第二の樹脂層を光硬化させることもできる。 The 2nd resin layer 30 can contain said (A) component, (B) component, and (C) component, and said (D) component and / or said (E) component as needed. Can further be contained. The second resin layer 30 does not necessarily contain a photopolymerization component such as the component (B) or the component (C), and the second resin layer is formed by utilizing a photopolymerization component that migrates from an adjacent resin layer due to layer formation. The layer can also be photocured.

 第二の樹脂層30は、金属酸化物粒子(以下、(F)成分ともいう)を含有する。金属酸化物粒子としては、特に波長633nmにおける屈折率が1.50以上である、金属酸化物粒子を含有することが好ましい。これにより、転写型感光性フィルムを調製した際、第二の樹脂層の透明性及び波長633nmにおける屈折率を向上させることが可能となる。また基材への吸着を抑制しつつ、現像性を向上させることができる。 The second resin layer 30 contains metal oxide particles (hereinafter also referred to as “component (F)”). The metal oxide particles preferably contain metal oxide particles having a refractive index of 1.50 or more at a wavelength of 633 nm. Thereby, when a transfer type photosensitive film is prepared, it becomes possible to improve the transparency of the second resin layer and the refractive index at a wavelength of 633 nm. Moreover, developability can be improved, suppressing adsorption | suction to a base material.

 金属酸化物粒子としては、酸化ジルコニウム、酸化チタン、酸化スズ、酸化亜鉛、酸化インジウムスズ、酸化インジウム、酸化アルミウム、酸化イットリウム等の金属酸化物からなる粒子が挙げられる。これらの中でも、骨見え現象抑制の観点から、酸化ジルコニウム又は酸化チタンの粒子が好ましい。 Examples of the metal oxide particles include particles made of metal oxides such as zirconium oxide, titanium oxide, tin oxide, zinc oxide, indium tin oxide, indium oxide, aluminum oxide, and yttrium oxide. Among these, particles of zirconium oxide or titanium oxide are preferable from the viewpoint of suppressing the bone appearance phenomenon.

 酸化ジルコニウム粒子としては、透明電極の材料がITOの場合、屈折率向上と、ITO及び透明基材との密着性の観点から、酸化ジルコニウムナノ粒子を用いることが好ましい。酸化ジルコニウムナノ粒子の中でも、粒度分布Dmaxが40nm以下であることが好ましい。 As the zirconium oxide particles, when the material of the transparent electrode is ITO, it is preferable to use zirconium oxide nanoparticles from the viewpoint of improving the refractive index and adhesion between the ITO and the transparent substrate. Among the zirconium oxide nanoparticles, the particle size distribution Dmax is preferably 40 nm or less.

 酸化ジルコニウムナノ粒子は、OZ-S30K(日産化学工業株式会社製、製品名)、OZ-S40K-AC(日産化学工業株式会社製、製品名)、SZR-K(酸化ジルコニウムメチルエチルケトン分散液、堺化学工業株式会社製、製品名)、SZR-M(酸化ジルコニウムメタノール分散液、堺化学工業株式会社製、製品名)として商業的に入手可能である。 Zirconium oxide nanoparticles are OZ-S30K (product name, manufactured by Nissan Chemical Industries, Ltd.), OZ-S40K-AC (product name, manufactured by Nissan Chemical Industries, Ltd.), SZR-K (dispersion of zirconium oxide methyl ethyl ketone, Sakai Chemical). Kogyo Co., Ltd., product name) and SZR-M (zirconium oxide methanol dispersion, Sakai Chemical Industry Co., Ltd., product name) are commercially available.

 第二の樹脂層30には、(F)成分として酸化チタンナノ粒子を含有させることも可能である。また、酸化チタンナノ粒子の中でも、粒度分布Dmaxが50nm以下であることが好ましく、10~50nmがより好ましい。 It is also possible for the second resin layer 30 to contain titanium oxide nanoparticles as the component (F). Of the titanium oxide nanoparticles, the particle size distribution Dmax is preferably 50 nm or less, more preferably 10 to 50 nm.

 (F)成分として、上記金属酸化物粒子のほかに、例えばMg、Al、Si、Ca、Cr、Cu、Zn、Ba等の原子を含む酸化物粒子または硫化物粒子を用いることもできる。これらは、単独で又は二種類以上を組み合わせて使用できる。 As the component (F), in addition to the metal oxide particles, oxide particles or sulfide particles containing atoms such as Mg, Al, Si, Ca, Cr, Cu, Zn, and Ba can be used. These can be used alone or in combination of two or more.

 また上記金属酸化物粒子の他に、例えばトリアジン環を有する化合物、イソシアヌル酸骨格を有する化合物、フルオレン骨格を有する化合物等の有機化合物を用いることも可能である。これにより波長633nmにおける屈折率を向上させることができる。 In addition to the metal oxide particles, organic compounds such as a compound having a triazine ring, a compound having an isocyanuric acid skeleton, and a compound having a fluorene skeleton can also be used. Thereby, the refractive index in wavelength 633nm can be improved.

 上記第二の樹脂層30の厚みは、0.01~1μmであってもよく、0.03~0.5μmであることが好ましく、0.04~0.3μmであることがより好ましく、0.07~0.25μmであることがさらに好ましく、0.05~0.2μmであることが特に好ましい。厚みが0.01~1μmであることにより、上述の画面全体の反射光強度をより低減することが可能となる。また、硬化後における第二の樹脂層の厚みも上記範囲内であることが好ましい。 The thickness of the second resin layer 30 may be 0.01 to 1 μm, preferably 0.03 to 0.5 μm, more preferably 0.04 to 0.3 μm, The thickness is more preferably from 0.07 to 0.25 μm, particularly preferably from 0.05 to 0.2 μm. When the thickness is 0.01 to 1 μm, the reflected light intensity of the entire screen can be further reduced. Moreover, it is preferable that the thickness of the 2nd resin layer after hardening is also in the said range.

 第二の樹脂層30の屈折率は、第二の樹脂層が単層で、膜厚が膜厚方向で均一な場合、ETA-TCM(AudioDevGmbH株式会社製、製品名)を用いて以下のように求めることができる。また、以下の測定は、25℃の条件下で行う。
(1)第二の樹脂層を形成するための塗布液を、厚み0.7mm、縦10cm×横10cmのガラス基材上にスピンコーターで均一に塗布し、100℃の熱風滞留式乾燥機で3分間乾燥して溶剤を除去し、第二の樹脂層を形成する。
(2)次いで、140℃に加熱した箱型乾燥機(三菱電機株式会社製、型番:NV50-CA)内に30分間静置し、第二の樹脂層を有する屈折率測定用試料を得る。
(3)次いで、得られた屈折率測定用試料について、ETA-TCM(AudioDevGmbH株式会社製、製品名)にて波長633nmにおける屈折率を測定する。
When the second resin layer is a single layer and the film thickness is uniform in the film thickness direction, the refractive index of the second resin layer 30 is as follows using ETA-TCM (product name, manufactured by AudioDev GmbH). Can be requested. The following measurement is performed under the condition of 25 ° C.
(1) A coating solution for forming the second resin layer is uniformly applied on a glass substrate having a thickness of 0.7 mm, a length of 10 cm and a width of 10 cm by a spin coater, and a hot air residence type dryer at 100 ° C. Dry for 3 minutes to remove the solvent and form a second resin layer.
(2) Next, the sample is allowed to stand for 30 minutes in a box dryer (model number: NV50-CA, manufactured by Mitsubishi Electric Corporation) heated to 140 ° C. to obtain a refractive index measurement sample having a second resin layer.
(3) Next, the refractive index at a wavelength of 633 nm is measured for the obtained sample for refractive index measurement using ETA-TCM (product name, manufactured by AudioDev GmbH).

 単層の第一の樹脂層における屈折率も同様の方法で測定することができる。なお、転写型感光性フィルムの形態では、第二の樹脂層単層の屈折率を測定することは難しいため、第二の樹脂層の保護フィルム側の最表面層の値とする。 The refractive index in the single first resin layer can also be measured by the same method. In addition, since it is difficult to measure the refractive index of the second resin layer single layer in the form of the transfer type photosensitive film, the value of the outermost surface layer on the protective film side of the second resin layer is used.

(他の層)
 本実施形態の転写型感光性フィルムは、本発明の効果が得られる範囲で、適宜選択した他の層を設けてもよい。他の層としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、クッション層、酸素遮蔽層、剥離層、接着層等が挙げられる。転写型感光性フィルムは、これらの層を1種単独で有していてもよく、2種以上を有してもよい。また、同種の層を2以上有していてもよい。
(Other layers)
The transfer type photosensitive film of this embodiment may be provided with other appropriately selected layers as long as the effects of the present invention are obtained. There is no restriction | limiting in particular as another layer, According to the objective, it can select suitably, For example, a cushion layer, an oxygen shielding layer, a peeling layer, an adhesive layer etc. are mentioned. The transfer type photosensitive film may have these layers individually by 1 type, and may have 2 or more types. Moreover, you may have 2 or more of the same kind of layers.

(保護フィルム)
 保護フィルム40としては、例えば、ポリエチレン、ポリプロピレン、ポリエチレンテレフタレート、ポリカーボネート、ポリエチレン-酢酸ビニル共重合体、ポリエチレン-酢酸ビニル共重合体のフィルム、及び、これらのフィルムとポリエチレンの積層フィルム等が挙げられる。
(Protective film)
Examples of the protective film 40 include polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, a polyethylene-vinyl acetate copolymer, a polyethylene-vinyl acetate copolymer film, and a laminated film of these films and polyethylene.

 保護フィルム40の厚みは、5~100μmが好ましいが、転写型感光性フィルム1をロール状に巻いて保管する観点から、70μm以下であることが好ましく、60μm以下であることがより好ましく、50μm以下であることがさらに好ましく、40μm以下であることが特に好ましい。 The thickness of the protective film 40 is preferably 5 to 100 μm, but from the viewpoint of storing the transfer type photosensitive film 1 in a roll shape, it is preferably 70 μm or less, more preferably 60 μm or less, and 50 μm or less. More preferably, it is particularly preferably 40 μm or less.

 転写型感光性フィルム1における第一の樹脂層20及び第二の樹脂層30を硬化させた硬化膜部分(支持フィルム10及び保護フィルム40を除く)の、波長400~700nmの可視光領域における全光線透過率(Tt)の最小値は、90.00%以上であることが好ましく、90.50%以上であることがより好ましく、90.70%以上であることがさらに好ましい。一般的な可視光波長域である400~700nmにおける全光線透過率が90.00%以上であれば、タッチパネル(タッチセンサー)のセンシング領域の透明電極を保護する場合において、センシング領域での画像表示品質、色合い、輝度が低下することを充分抑制することができる。なお、可視光領域における全光線透過率(Tt)は、本明細書の実施例に記載した方法で測定することができる。 The entire cured film portion (excluding the support film 10 and the protective film 40) obtained by curing the first resin layer 20 and the second resin layer 30 in the transfer type photosensitive film 1 in the visible light region having a wavelength of 400 to 700 nm. The minimum value of the light transmittance (Tt) is preferably 90.00% or more, more preferably 90.50% or more, and further preferably 90.70% or more. If the total light transmittance in a general visible light wavelength range of 400 to 700 nm is 90.00% or more, when protecting the transparent electrode in the sensing area of the touch panel (touch sensor), image display in the sensing area It can suppress sufficiently that quality, a hue, and a brightness | luminance fall. The total light transmittance (Tt) in the visible light region can be measured by the method described in the examples of this specification.

 転写型感光性フィルム1の第一の樹脂層20、第二の樹脂層30は、例えば、第一の樹脂層形成用塗布液、及び第二の樹脂層形成用塗布液を調製し、これを各々支持フィルム10、保護フィルム40上に塗布、乾燥することで形成できる。そして、転写型感光性フィルム1は、第一の樹脂層20が形成された支持フィルム10と、第二の樹脂層30が形成された保護フィルム40とを、第一の樹脂層20と第二の樹脂層30とが対向した状態で貼り合わせることにより形成できる。また、転写型感光性フィルム1は、支持フィルム10上に第一の樹脂層形成用塗布液を塗布、乾燥し、その後、第一の樹脂層20上に、第二の樹脂層形成用塗布液を塗布、乾燥し、保護フィルム40を貼り付けることにより形成することもできる。 The first resin layer 20 and the second resin layer 30 of the transfer type photosensitive film 1 are prepared, for example, by preparing a first resin layer forming coating solution and a second resin layer forming coating solution. It can form by apply | coating and drying on the support film 10 and the protective film 40, respectively. The transfer type photosensitive film 1 includes a support film 10 on which the first resin layer 20 is formed and a protective film 40 on which the second resin layer 30 is formed. It can form by pasting together in the state which opposed resin layer 30 of this. In addition, the transfer type photosensitive film 1 is formed by applying and drying a first resin layer forming coating solution on the support film 10, and then forming a second resin layer forming coating solution on the first resin layer 20. Can be formed by applying, drying, and attaching the protective film 40.

 塗布液は、上述した本実施形態に係る感光性樹脂組成物、第二の樹脂層を構成する各成分を溶剤に均一に溶解又は分散することにより得ることができる。 The coating liquid can be obtained by uniformly dissolving or dispersing each component constituting the photosensitive resin composition according to the present embodiment and the second resin layer in a solvent.

 塗布液として用いる溶剤は、特に制限は無く、公知のものが使用できる。具体的には、アセトン、メチルエチルケトン、メチルイソブチルケトン、トルエン、メタノール、エタノール、プロパノール、ブタノール、メチレングリコール、エチレングリコール、プロピレングリコール、エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテル、ジエチレングリコールジメチルエーテル、ジエチレングリコールエチルメチルエーテル、ジエチレングリコールジエチルエーテル、プロピレングリコールモノメチルエーテル、エチレングリコールモノブチルエーテルアセテート、ジエチレングリコールモノエチルエーテルアセテート、プロピレングリコールモノメチルエーテルアセテート、クロロホルム、塩化メチレン等が挙げられる。 The solvent used as the coating solution is not particularly limited, and known ones can be used. Specifically, acetone, methyl ethyl ketone, methyl isobutyl ketone, toluene, methanol, ethanol, propanol, butanol, methylene glycol, ethylene glycol, propylene glycol, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether , Diethylene glycol diethyl ether, propylene glycol monomethyl ether, ethylene glycol monobutyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether acetate, chloroform, methylene chloride and the like.

 塗布方法としては、ドクターブレードコーティング法、マイヤーバーコーティング法、ロールコーティング法、スクリーンコーティング法、スピナーコーティング法、インクジェットコーティング法、スプレーコーティング法、ディップコーティング法、グラビアコーティング法、カーテンコーティング法、ダイコーティング法等が挙げられる。 Application methods include doctor blade coating method, Mayer bar coating method, roll coating method, screen coating method, spinner coating method, inkjet coating method, spray coating method, dip coating method, gravure coating method, curtain coating method, and die coating method. Etc.

 乾燥条件に特に制限は無いが、乾燥温度は、60~130℃とすることが好ましく、乾燥時間は、0.5~30分とすることが好ましい。 The drying conditions are not particularly limited, but the drying temperature is preferably 60 to 130 ° C., and the drying time is preferably 0.5 to 30 minutes.

[硬化膜パターンの形成方法]
 図2は、本発明の一実施形態に係る転写型感光性フィルムを用いて形成した硬化膜を透明電極パターン付き基材上に備える積層体を示す模式断面図である。図2に示される積層体100は、透明電極パターン50aを有する透明電極パターン付き基材50と、透明電極パターン付き基材50の透明電極パターン50a上に設けられた硬化膜60とを備える。硬化膜60は、硬化した第一の樹脂層22及び硬化した第二の樹脂層32からなる硬化膜であり、本実施形態の転写型感光性フィルム1を用いて形成されている。硬化膜60は、透明電極パターン50aの保護機能と、透明電極パターン50aの不可視化又はタッチ画面の視認性向上の両機能を満たす。以下、透明電極パターン付き基材上に硬化膜が形成された積層体の製造方法の一実施形態について説明する。
[Method of forming cured film pattern]
FIG. 2 is a schematic cross-sectional view showing a laminate comprising a cured film formed using a transfer type photosensitive film according to an embodiment of the present invention on a substrate with a transparent electrode pattern. The laminated body 100 shown by FIG. 2 is provided with the base material 50 with the transparent electrode pattern which has the transparent electrode pattern 50a, and the cured film 60 provided on the transparent electrode pattern 50a of the base material 50 with a transparent electrode pattern. The cured film 60 is a cured film composed of the cured first resin layer 22 and the cured second resin layer 32, and is formed using the transfer type photosensitive film 1 of the present embodiment. The cured film 60 satisfies both the protective function of the transparent electrode pattern 50a and the function of making the transparent electrode pattern 50a invisible or improving the visibility of the touch screen. Hereinafter, an embodiment of a method for producing a laminate in which a cured film is formed on a substrate with a transparent electrode pattern will be described.

-ラミネート工程-
 まず、転写型感光性フィルム1の保護フィルム40を除去した後、第二の樹脂層30、第一の樹脂層20及び支持フィルム10を、透明電極パターン付き基材50表面に第二の樹脂層30側から圧着することによりラミネート(転写)する。圧着手段としては、圧着ロールが挙げられる。圧着ロールは、加熱圧着できるように加熱手段を備えたものであってもよい。
-Lamination process-
First, after removing the protective film 40 of the transfer type photosensitive film 1, the second resin layer 30, the first resin layer 20, and the support film 10 are placed on the surface of the substrate 50 with a transparent electrode pattern. Lamination (transfer) is performed by pressure bonding from the 30 side. Examples of the pressing means include a pressing roll. The pressure roll may be provided with a heating means so that it can be heat-pressure bonded.

 加熱圧着する場合の加熱温度は、第二の樹脂層30と透明電極パターン付き基材50との密着性の観点、及び、第一の樹脂層20又は第二の樹脂層30の構成成分が熱硬化又は熱分解されにくいようにする観点から、10~160℃とすることが好ましく、20~150℃とすることがより好ましく、30~150℃とすることがさらに好ましい。 In the case of thermocompression bonding, the heating temperature is such that the components of the first resin layer 20 or the second resin layer 30 are heated from the viewpoint of adhesion between the second resin layer 30 and the substrate 50 with the transparent electrode pattern. From the viewpoint of making it hard to be cured or thermally decomposed, it is preferably 10 to 160 ° C, more preferably 20 to 150 ° C, and further preferably 30 to 150 ° C.

 また、加熱圧着時の圧着圧力は、第二の樹脂層30と透明電極パターン付き基材50との密着性を充分確保しながら、透明電極パターン付き基材50の変形を抑制する観点から、線圧で50~1×10N/mとすることが好ましく、2.5×10~5×10N/mとすることがより好ましく、5×10~4×10N/mとすることがさらに好ましい。 In addition, the pressing pressure at the time of thermocompression bonding is a line from the viewpoint of suppressing the deformation of the substrate 50 with the transparent electrode pattern while ensuring sufficient adhesion between the second resin layer 30 and the substrate 50 with the transparent electrode pattern. The pressure is preferably 50 to 1 × 10 5 N / m, more preferably 2.5 × 10 2 to 5 × 10 4 N / m, and 5 × 10 2 to 4 × 10 4 N / m. More preferably.

 転写型感光性フィルム1を上記のように加熱圧着すれば、透明電極パターン付き基材50の予熱処理は必ずしも必要ではないが、第二の樹脂層30と透明電極パターン付き基材50との密着性をさらに向上させる点から、透明電極パターン付き基材50を予熱処理してもよい。このときの処理温度は、30~150℃とすることが好ましい。 If the transfer type photosensitive film 1 is thermocompression bonded as described above, the pre-heat treatment of the substrate 50 with a transparent electrode pattern is not necessarily required, but the second resin layer 30 and the substrate 50 with a transparent electrode pattern are in close contact with each other. From the point of further improving the property, the substrate 50 with a transparent electrode pattern may be preheated. The treatment temperature at this time is preferably 30 to 150 ° C.

(基材)
 透明電極パターン付き基材50を構成する基材としては、例えばタッチパネル(タッチセンサー)に用いられる、ガラス板、プラスチック板、セラミック板等の基材が挙げられる。
(Base material)
As a base material which comprises the base material 50 with a transparent electrode pattern, base materials, such as a glass plate used for a touch panel (touch sensor), a plastic plate, a ceramic board, are mentioned, for example.

(透明電極及び金属配線)
 透明電極は、例えばITO及びIZO(Indium Zinc Oxide、酸化インジウム-酸化亜鉛)等の導電性金属酸化膜を用いて、形成することができる。また透明電極は、銀繊維及びカーボンナノチューブなどの導電性繊維を用いた光硬化性樹脂層を有する感光性フィルムを用いて、形成することもできる。金属配線は、例えば、Au、Ag、Cu、Al、Mo、Cなどの導電性材料を用いて、スクリーン印刷、蒸着などの方法により形成することができる。また、基材上には、基材と電極との間に絶縁層又はインデックスマッチング層が設けられていてもよい。インデックスマッチング層は、上述した第二の樹脂層30と同様の組成を有していてもよい。
(Transparent electrode and metal wiring)
The transparent electrode can be formed using a conductive metal oxide film such as ITO and IZO (Indium Zinc Oxide). The transparent electrode can also be formed using a photosensitive film having a photocurable resin layer using conductive fibers such as silver fibers and carbon nanotubes. The metal wiring can be formed by a method such as screen printing or vapor deposition using a conductive material such as Au, Ag, Cu, Al, Mo, and C, for example. In addition, an insulating layer or an index matching layer may be provided on the base material between the base material and the electrode. The index matching layer may have the same composition as the second resin layer 30 described above.

-露光工程-
 次に、転写後の第一の樹脂層及び第二の樹脂層の所定部分に、フォトマスクを介して、活性光線をパターン状に照射する。活性光線を照射する際、第一の樹脂層及び第二の樹脂層上の支持フィルム10が透明の場合には、そのまま活性光線を照射することができ、不透明の場合には除去してから活性光線を照射する。活性光線の光源としては、公知の活性光源を用いることができる。なお、本明細書においてパターンとは、回路を形成する微細配線の形状にとどまらず、他基材との接続部のみを矩形に除去した形状及び基材の額縁部のみを除去した形状等も含まれる。
-Exposure process-
Next, actinic rays are irradiated in a pattern form to a predetermined portion of the first resin layer and the second resin layer after transfer via a photomask. When the support film 10 on the first resin layer and the second resin layer is transparent when irradiating with actinic light, it can be irradiated with actinic light as it is. Irradiate light. A known active light source can be used as the active light source. The pattern in this specification is not limited to the shape of the fine wiring that forms the circuit, but also includes the shape in which only the connection portion with the other base material is removed in a rectangular shape and the shape in which only the frame portion of the base material is removed. It is.

 活性光線の照射量は、1×10~1×10J/mであり、照射の際に、加熱を伴うこともできる。この活性光線の照射量が、1×10J/m以上であれば、第一の樹脂層及び第二の樹脂層の光硬化を充分に進行させることが可能となり、1×10J/m以下であれば第一の樹脂層及び第二の樹脂層が変色することを抑制できる傾向がある。 The irradiation amount of actinic rays is 1 × 10 2 to 1 × 10 4 J / m 2 , and heating can be accompanied during irradiation. If the irradiation amount of this actinic ray is 1 × 10 2 J / m 2 or more, it is possible to sufficiently proceed the photocuring of the first resin layer and the second resin layer, and 1 × 10 4 J If it is / m 2 or less, there is a tendency that the first resin layer and the second resin layer can be prevented from being discolored.

 続いて、活性光線照射後の第一の樹脂層及び第二の樹脂層の未露光部を現像液で除去して、透明電極の一部又は全部を被覆する硬化膜(屈折率調整パターン)60を形成する。なお、活性光線の照射後、第一の樹脂層及び第二の樹脂層に支持フィルム10が積層されている場合にはそれを除去した後、現像工程が行われる。 Subsequently, the unexposed portions of the first resin layer and the second resin layer after irradiation with actinic rays are removed with a developer, and a cured film (refractive index adjustment pattern) 60 covering a part or all of the transparent electrode is obtained. Form. In addition, after irradiation of actinic rays, when the support film 10 is laminated | stacked on the 1st resin layer and the 2nd resin layer, after developing it, the image development process is performed.

-現像工程-
 現像工程は、アルカリ水溶液、水系現像液、有機溶剤等の公知の現像液を用いて、スプレー、シャワー、揺動浸漬、ブラッシング、スクラッビング等の公知の方法により行うことができる。中でも、環境、安全性の観点からアルカリ水溶液を用いて、スプレー現像することが好ましい。なお、現像温度及び時間は従来公知の範囲で調整することができる。
-Development process-
The development step can be performed by a known method such as spraying, showering, rocking dipping, brushing, or scrubbing using a known developer such as an aqueous alkaline solution, an aqueous developer, or an organic solvent. Of these, spray development is preferably performed using an alkaline aqueous solution from the viewpoint of environment and safety. The development temperature and time can be adjusted within a conventionally known range.

 本実施形態では、第二の樹脂層を有する転写型感光性フィルムを用いて硬化膜パターンを形成したが、第二の樹脂層を有していない転写型感光性フィルムを用いる場合も同様の方法で硬化膜パターンを形成することができる。 In this embodiment, the cured film pattern is formed using the transfer type photosensitive film having the second resin layer. However, the same method is used when using the transfer type photosensitive film not having the second resin layer. A cured film pattern can be formed.

(硬化膜)
 本発明に係る硬化膜は、本実施形態の転写型感光性フィルムの、第一の樹脂層及び第二の樹脂層を硬化して得られた硬化膜であってもよい。なお、例えば第二の樹脂層の大部分が第一の樹脂層に被覆され、露出されない場合、第二の樹脂層は必ずしも硬化される必要はない。本発明に係る硬化膜は、このような第一の樹脂層が硬化し、第二の樹脂層が硬化していない場合も含む。本発明に係る硬化膜はパターン状に形成されていることが好ましい。
(Cured film)
The cured film according to the present invention may be a cured film obtained by curing the first resin layer and the second resin layer of the transfer photosensitive film of the present embodiment. For example, when most of the second resin layer is covered with the first resin layer and is not exposed, the second resin layer does not necessarily need to be cured. The cured film according to the present invention includes such a case that the first resin layer is cured and the second resin layer is not cured. The cured film according to the present invention is preferably formed in a pattern.

 本発明に係る硬化膜は、転写型感光性フィルムが第二の樹脂層を有していない場合は、第一の樹脂層を硬化して得られた硬化膜であってもよい。 The cured film according to the present invention may be a cured film obtained by curing the first resin layer when the transfer type photosensitive film does not have the second resin layer.

 本実施形態に係る転写型感光性フィルムは、各種電子部品における保護膜の形成に適用することができる。本実施形態に係る電子部品は、転写型感光性フィルムを用いて形成した硬化膜パターンを備えている。電子部品としては、タッチセンサー、タッチパネル、液晶ディスプレイ、有機エレクトロルミネッサンス、太陽電池モジュール、プリント配線板、電子ペーパ等が挙げられる。 The transfer type photosensitive film according to this embodiment can be applied to the formation of a protective film in various electronic parts. The electronic component according to this embodiment includes a cured film pattern formed using a transfer type photosensitive film. Examples of the electronic component include a touch sensor, a touch panel, a liquid crystal display, an organic electroluminescence, a solar cell module, a printed wiring board, and electronic paper.

 例えば、タッチセンサーは、図2に示される積層体100を備えることができる。タッチセンサーをタッチパネル等のモジュールにする際には、カバーガラスと積層体100を接着するOCAを用いることができる。 For example, the touch sensor can include the laminate 100 shown in FIG. When the touch sensor is a module such as a touch panel, OCA that adheres the cover glass and the laminate 100 can be used.

 図3は、本発明の一実施形態に係るタッチパネルを示す模式上面図である。図3には、静電容量式のタッチパネルの一例を示す。図3に示されるタッチパネルは、透明基材101の片面にタッチ位置座標を検出するためのタッチ画面102があり、この領域の静電容量変化を検出するための透明電極103及び透明電極104が透明基材101上に設けられている。 FIG. 3 is a schematic top view showing a touch panel according to an embodiment of the present invention. FIG. 3 shows an example of a capacitive touch panel. The touch panel shown in FIG. 3 has a touch screen 102 for detecting a touch position coordinate on one side of a transparent substrate 101, and the transparent electrode 103 and the transparent electrode 104 for detecting a change in capacitance in this region are transparent. It is provided on the base material 101.

 透明電極103及び透明電極104はそれぞれタッチ位置のX位置座標及びY位置座標を検出する。 The transparent electrode 103 and the transparent electrode 104 detect the X position coordinate and the Y position coordinate of the touch position, respectively.

 透明基材101上には、透明電極103及び透明電極104からタッチ位置の検出信号を外部回路に伝えるための引き出し配線105が設けられている。また、引き出し配線105と、透明電極103及び透明電極104とは、透明電極103及び透明電極104上に設けられた接続電極106により接続されている。また、引き出し配線105の透明電極103及び透明電極104との接続部と反対側の端部には、外部回路との接続端子107が設けられている。 On the transparent base material 101, a lead-out wiring 105 for transmitting a touch position detection signal from the transparent electrode 103 and the transparent electrode 104 to an external circuit is provided. The lead-out wiring 105 is connected to the transparent electrode 103 and the transparent electrode 104 by a connection electrode 106 provided on the transparent electrode 103 and the transparent electrode 104. A connection terminal 107 for connecting to an external circuit is provided at the end of the lead-out wiring 105 opposite to the connection portion between the transparent electrode 103 and the transparent electrode 104.

 図3に示すように、本実施形態に係るタッチパネルにおいては、本実施形態の転写型感光性フィルムを用いて、透明電極パターンが形成された部分と、形成されていない部分にまたがって硬化膜パターン123が形成されている。硬化膜パターン123は、硬化した第一の樹脂層及び硬化した第二の樹脂層からなる。なお、第二の樹脂層を有していない転写型感光性フィルムを用いた場合は、硬化膜パターン123は、硬化した第一の樹脂層からなる。この硬化膜パターン123によれば、透明電極103、透明電極104、引き出し配線105、接続電極106及び接続端子107を保護する機能と、透明電極パターンから形成されるセンシング領域(タッチ画面)102の骨見え現象防止機能とを同時に奏することができる。また、本実施形態の転写型感光性フィルムが用いられることにより、硬化膜パターン123は、表面の段差が充分に小さいものになり得る。 As shown in FIG. 3, in the touch panel according to the present embodiment, a cured film pattern is formed across the portion where the transparent electrode pattern is formed and the portion where the transparent electrode pattern is not formed, using the transfer type photosensitive film of the present embodiment. 123 is formed. The cured film pattern 123 includes a cured first resin layer and a cured second resin layer. In addition, when the transfer type photosensitive film which does not have a 2nd resin layer is used, the cured film pattern 123 consists of a hardened 1st resin layer. According to this cured film pattern 123, the function of protecting the transparent electrode 103, the transparent electrode 104, the lead-out wiring 105, the connection electrode 106 and the connection terminal 107, and the bone of the sensing region (touch screen) 102 formed from the transparent electrode pattern A visual phenomenon prevention function can be performed at the same time. In addition, by using the transfer type photosensitive film of the present embodiment, the cured film pattern 123 can have a sufficiently small step on the surface.

 以下、実施例及び比較例によって、本発明をさらに具体的に説明するが、本発明は以下の実施例に限定されるものではない。 Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples, but the present invention is not limited to the following examples.

[バインダーポリマー溶液の作製]
(ポリマー溶液1)
 反応容器中に1-メトキシ-2-プロパノール(ダイセル化学工業(株)製)85.7質量部をあらかじめ加えて80℃に昇温した。他方で、メタクリル酸48.5質量部、メタクリル酸ベンジル11.5質量部、メタクリル酸トリシクロデカン40.0質量部、及びアゾ系重合開始剤(和光純薬社製、V-601)10質量部を混合し、混合溶液を得た。この混合溶液を、窒素ガス雰囲気下、80℃の上記反応容器中に2時間かけて滴下した。滴下後4時間反応させて、アクリル樹脂溶液を得た。
[Preparation of binder polymer solution]
(Polymer solution 1)
85.7 parts by mass of 1-methoxy-2-propanol (manufactured by Daicel Chemical Industries) was added in advance to the reaction vessel, and the temperature was raised to 80 ° C. On the other hand, 48.5 parts by weight of methacrylic acid, 11.5 parts by weight of benzyl methacrylate, 40.0 parts by weight of tricyclodecane methacrylate, and 10 parts by weight of an azo polymerization initiator (V-601, manufactured by Wako Pure Chemical Industries, Ltd.) Parts were mixed to obtain a mixed solution. This mixed solution was dropped into the reaction vessel at 80 ° C. over 2 hours under a nitrogen gas atmosphere. Reaction was performed for 4 hours after the dropwise addition to obtain an acrylic resin solution.

 次いで、上記アクリル樹脂溶液に、ハイドロキノンモノメチルエーテル2.5質量部、及びテトエチルアンモニウムブロマイド8.4質量部を加えた後、グリシジルメタクリレート38.1質量部を2時間かけて滴下した。滴下後、空気を吹き込みながら80℃で4時間反応させ後、固形分濃度が45質量%になるように溶媒としてプロピレングリコールモノメチルエーテルアセテートを添加し、バインダーポリマー溶液1を得た。 Next, 2.5 parts by mass of hydroquinone monomethyl ether and 8.4 parts by mass of tetoethylammonium bromide were added to the acrylic resin solution, and then 38.1 parts by mass of glycidyl methacrylate was added dropwise over 2 hours. After dripping, after reacting at 80 ° C. for 4 hours while blowing air, propylene glycol monomethyl ether acetate was added as a solvent so that the solid content concentration was 45% by mass, and a binder polymer solution 1 was obtained.

(ポリマー溶液2~5、及び8)
 配合量を表1の通りに変えた以外はバインダーポリマー溶液1と同様にして、バインダーポリマー溶液2~5、及び8(いずれも固形分45質量%)を得た。
(Polymer solutions 2-5 and 8)
Binder polymer solutions 2 to 5 and 8 (all having a solid content of 45% by mass) were obtained in the same manner as in the binder polymer solution 1 except that the blending amount was changed as shown in Table 1.

(ポリマー溶液6、7及び9)
 撹拌機、還流冷却機、不活性ガス導入口及び温度計を備えたフラスコに、溶媒としてプロピレングリコールモノメチルエーテルを62重量部とトルエン62質量部とを仕込み、窒素ガス雰囲気下で80℃に昇温し、反応温度を80℃±2℃に保ちながら、表1に示す化合物と2,2’-アゾビス(イソブチロニトリル)1.5質量部を混合した溶液を4時間かけて均一に滴下した。滴下後、80℃±2℃で6時間撹拌を続け、固形分45質量%のバインダーポリマーの溶液6、7及び9(いずれも固形分45質量%)をそれぞれ得た。
(Polymer solutions 6, 7 and 9)
A flask equipped with a stirrer, reflux condenser, inert gas inlet and thermometer was charged with 62 parts by weight of propylene glycol monomethyl ether and 62 parts by weight of toluene as a solvent, and the temperature was raised to 80 ° C. in a nitrogen gas atmosphere. Then, while maintaining the reaction temperature at 80 ° C. ± 2 ° C., a solution in which the compound shown in Table 1 and 1.5 parts by mass of 2,2′-azobis (isobutyronitrile) were mixed was uniformly added dropwise over 4 hours. . After the dropping, stirring was continued at 80 ° C. ± 2 ° C. for 6 hours to obtain binder polymer solutions 6, 7 and 9 having a solid content of 45% by mass (all of which had a solid content of 45% by mass).

 上述したバインダーポリマーのエチレン性不飽和基当量、重量平均分子量、及び酸価を以下の方法で求めた。結果を表1に示す。 The ethylenically unsaturated group equivalent, the weight average molecular weight, and the acid value of the binder polymer described above were determined by the following methods. The results are shown in Table 1.

[エチレン性不飽和基当量の算出方法]
 バインダーポリマーの二重結合当量は、仕込み量から以下の式にしたがって算出した。
 エチレン性不飽和基当量(mmol/g)=メタクリル酸グリシジル添加量(mmol)/モノマー全添加量(g)
[Calculation method of ethylenically unsaturated group equivalent]
The double bond equivalent of the binder polymer was calculated from the charged amount according to the following formula.
Ethylenically unsaturated group equivalent (mmol / g) = Glycidyl methacrylate addition amount (mmol) / Total monomer addition amount (g)

[重量平均分子量の測定方法]
 重量平均分子量(Mw)は、ゲルパーミエーションクロマトグラフィー法(GPC)によって測定し、標準ポリスチレンの検量線を用いて換算することにより導出した。GPCの測定条件を以下に示す。
<GPC測定条件>
ポンプ:日立 L-6000型(株式会社日立製作所製、製品名)
カラム:Gelpack GL-R420、Gelpack GL-R430、Gelpack GL-R440(以上、日立化成株式会社製、製品名)
溶離液:テトラヒドロフラン
測定温度:40℃
流量:2.05mL/分
検出器:日立 L-3300型RI(株式会社日立製作所製、製品名)
[Method for measuring weight average molecular weight]
The weight average molecular weight (Mw) was measured by gel permeation chromatography (GPC), and was derived by conversion using a standard polystyrene calibration curve. The measurement conditions for GPC are shown below.
<GPC measurement conditions>
Pump: Hitachi L-6000 (manufactured by Hitachi, Ltd., product name)
Column: Gelpack GL-R420, Gelpack GL-R430, Gelpack GL-R440 (product name, manufactured by Hitachi Chemical Co., Ltd.)
Eluent: Tetrahydrofuran Measurement temperature: 40 ° C
Flow rate: 2.05 mL / min Detector: Hitachi L-3300 type RI (manufactured by Hitachi, Ltd., product name)

[酸価の測定方法]
 酸価は下記に示すような、JIS K0070に基づいた中和滴定法により測定した。まず、バインダーポリマーの溶液を130℃で1時間加熱し、揮発分を除去して、固形分を得た。そして、上記固形分のバインダーポリマー1gを精秤した後、このバインダーポリマーにアセトンを30g添加し、これを均一に溶解し、樹脂溶液を得た。次いで、指示薬であるフェノールフタレインをその樹脂溶液に適量添加して、0.1mol/Lの水酸化カリウム水溶液を用いて中和滴定を行った。そして、次式により酸価を算出した。
酸価=0.1×V×f×56.1/(Wp×I/100)
 式中、Vは滴定に用いた0.1mol/L水酸化カリウム水溶液の滴定量(mL)、fは0.1mol/L水酸化カリウム水溶液のファクター(濃度換算係数)、
Wpは測定した樹脂溶液の質量(g)、Iは測定した上記樹脂溶液中の不揮発分の割合(質量%)を示す。
[Measurement method of acid value]
The acid value was measured by a neutralization titration method based on JIS K0070 as shown below. First, the binder polymer solution was heated at 130 ° C. for 1 hour to remove volatile matter, thereby obtaining a solid content. Then, after accurately weighing 1 g of the solid binder polymer, 30 g of acetone was added to the binder polymer, and this was uniformly dissolved to obtain a resin solution. Next, an appropriate amount of an indicator, phenolphthalein, was added to the resin solution, and neutralization titration was performed using a 0.1 mol / L potassium hydroxide aqueous solution. And the acid value was computed by following Formula.
Acid value = 0.1 × V × f 1 × 56.1 / (Wp × I / 100)
In the formula, V is a titration amount (mL) of 0.1 mol / L potassium hydroxide aqueous solution used for titration, f 1 is a factor (concentration conversion factor) of 0.1 mol / L potassium hydroxide aqueous solution,
Wp represents the mass (g) of the measured resin solution, and I represents the proportion (mass%) of the non-volatile content in the measured resin solution.

Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000006

(ポリマー溶液10)
 撹拌機、還流冷却機、不活性ガス導入口及び温度計を備えたフラスコに、プロピレングリコールモノメチルエーテル62質量部及びトルエン62質量部を仕込み、窒素ガス雰囲気下で80℃に昇温し、反応温度を80℃±2℃に保ちながら、表2に示す化合物と2,2’-アゾビス(イソブチロニトリル)1.5質量部を4時間かけて均一に滴下した。滴下後、80℃±2℃で6時間撹拌を続け、重量平均分子量が30000、酸価が156.6mgKOH/gのバインダーポリマー溶液10(固形分45質量%)を得た。
(Polymer solution 10)
A flask equipped with a stirrer, reflux condenser, inert gas inlet and thermometer was charged with 62 parts by mass of propylene glycol monomethyl ether and 62 parts by mass of toluene, and the temperature was raised to 80 ° C. in a nitrogen gas atmosphere, and the reaction temperature was increased. Was maintained at 80 ° C. ± 2 ° C., and the compounds shown in Table 2 and 1.5 parts by mass of 2,2′-azobis (isobutyronitrile) were uniformly added dropwise over 4 hours. After dropping, stirring was continued at 80 ° C. ± 2 ° C. for 6 hours to obtain a binder polymer solution 10 (solid content: 45 mass%) having a weight average molecular weight of 30000 and an acid value of 156.6 mgKOH / g.

Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000007

(実施例1~7及び比較例1~4)
[第一の樹脂層形成用塗布液の作製]
 溶剤としてメチルエチルケトンを用意し、表3又は4に示す成分を、同表に示す配合量(単位:質量部)で配合し、攪拌機を用いて15分間混合して第一の樹脂層形成用塗布液を作製した。表3及び4中、(A)成分の配合量は固形分の配合量を示す。
[第二の樹脂層形成用塗布液の作製]
(Examples 1 to 7 and Comparative Examples 1 to 4)
[Preparation of first resin layer forming coating solution]
Methyl ethyl ketone is prepared as a solvent, the components shown in Table 3 or 4 are blended in the blending amounts (unit: parts by mass) shown in the same table, and mixed for 15 minutes using a stirrer to form a first resin layer forming coating solution Was made. In Tables 3 and 4, the amount of component (A) indicates the amount of solids.
[Preparation of second resin layer forming coating solution]

 表3又は4に示す成分を、同表に示す配合量(単位:質量部)で配合し、攪拌機を用いて15分間混合して第二の樹脂層形成用塗布液を作製した。表3及び4中、バインダーポリマー溶液10の配合量は固形分の配合量を示す。 The components shown in Table 3 or 4 were blended in the blending amounts (unit: parts by mass) shown in the same table and mixed for 15 minutes using a stirrer to prepare a second coating solution for forming a resin layer. In Tables 3 and 4, the blending amount of the binder polymer solution 10 indicates the blending amount of the solid content.

[転写型感光性フィルムの作製] [Production of transfer-type photosensitive film]

 支持フィルムとして厚み16μmのポリエチレンテレフタレートフィルム(東レ株式会社製、製品名:FB40)を使用し、上記で作製した第一の樹脂層形成用塗布液を支持フィルム上にコンマコーターを用いて均一に塗布し、100℃の熱風対流式乾燥機で3分間乾燥して溶剤を除去し、厚み8μmの第一の樹脂層を形成した。 Using a polyethylene terephthalate film (product name: FB40, manufactured by Toray Industries, Inc.) having a thickness of 16 μm as a support film, the first resin layer-forming coating solution prepared above is uniformly applied on the support film using a comma coater. The solvent was removed by drying with a hot air convection dryer at 100 ° C. for 3 minutes to form a first resin layer having a thickness of 8 μm.

 保護フィルムとして厚み30μmのポリプロピレンフィルム(王子エフテックス株式会社製、製品名:ES-201)を使用し、上記で作製した第二の樹脂層形成用塗布液を保護フィルム上にダイコーターを用いて均一に塗布し、110℃の熱風滞留式乾燥機で3分間乾燥して溶剤を除去し、厚み60nm、屈折率1.4の第二の樹脂層を形成した。 Using a polypropylene film having a thickness of 30 μm (product name: ES-201, manufactured by Oji F-Tex Co., Ltd.) as the protective film, the second coating solution for forming a resin layer prepared above was used on the protective film using a die coater. The solution was uniformly applied and dried for 3 minutes with a hot air retention drier at 110 ° C. to remove the solvent, thereby forming a second resin layer having a thickness of 60 nm and a refractive index of 1.4.

 次いで、第一の樹脂層を有する支持フィルムと、第二の樹脂層を有する保護フィルムとを、ラミネータ(日立化成株式会社製、製品名:HLM-3000型)を用いて、23℃で貼り合わせて、支持フィルム、第一の樹脂層、第二の樹脂層、及び保護フィルムがこの順で積層された転写型感光性フィルムを作製した。 Next, the support film having the first resin layer and the protective film having the second resin layer are bonded at 23 ° C. using a laminator (manufactured by Hitachi Chemical Co., Ltd., product name: HLM-3000 type). Then, a transfer type photosensitive film in which the support film, the first resin layer, the second resin layer, and the protective film were laminated in this order was produced.

Figure JPOXMLDOC01-appb-T000008
Figure JPOXMLDOC01-appb-T000008

Figure JPOXMLDOC01-appb-T000009
Figure JPOXMLDOC01-appb-T000009

 表3~4中の成分の記号は以下の意味を示す。
〔(A)成分〕
ポリマー溶液1~9:上述した方法で作製したバインダーポリマー溶液
ポリマー溶液10:上述した方法で作製したバインダーポリマー溶液
The symbols of the components in Tables 3 to 4 have the following meanings.
[Component (A)]
Polymer solutions 1 to 9: Binder polymer solution prepared by the method described above Polymer solution 10: Binder polymer solution prepared by the method described above

〔(B)成分〕
A-DCP:トリシクロデカンジメタノールジアクリレート(新中村化学株式会社製、製品名)
T-1420:ジトリメチロールプロパンテトラアクリレート(日本化薬株式会社製、製品名)
[(B) component]
A-DCP: Tricyclodecane dimethanol diacrylate (manufactured by Shin-Nakamura Chemical Co., Ltd., product name)
T-1420: Ditrimethylolpropane tetraacrylate (Nippon Kayaku Co., Ltd., product name)

〔(C)成分〕
OXE01:1,2-オクタンジオン,1-[4-(フェニルチオ)フェニル-,2-(O-ベンゾイルオキシム)](BASF株式会社製、製品名「IRGACURE OXE 01」)
[Component (C)]
OXE01: 1,2-octanedione, 1- [4- (phenylthio) phenyl-, 2- (O-benzoyloxime)] (product name “IRGACURE OXE 01” manufactured by BASF Corporation)

〔(その他)成分〕
ADDITIVE8032:オクタメチルシクロテトラシロキサン(東レ・ダウコーニング株式会社製、製品名)
AW500:2,2’-メチレン-ビス(4-エチル-6-tert-ブチルフェノール)(川口化学株式会社製、製品名)
B6030:5-1H-アミノテトラゾール(千代田ケミカル株式会社製、製品名)
[(Other) ingredients]
ADDITIVE 8032: Octamethylcyclotetrasiloxane (product name, manufactured by Toray Dow Corning Co., Ltd.)
AW500: 2,2′-methylene-bis (4-ethyl-6-tert-butylphenol) (product name, manufactured by Kawaguchi Chemical Co., Ltd.)
B6030: 5-1H-aminotetrazole (product name, manufactured by Chiyoda Chemical Co., Ltd.)

〔(E)成分〕
PM-21:エチレン性不飽和基を含むリン酸エステル(日本化薬株式会社製、製品名)
[(E) component]
PM-21: Phosphate ester containing ethylenically unsaturated group (product name) manufactured by Nippon Kayaku Co., Ltd.

〔(F)成分〕
OZ-S30K:酸化ジルコニウムナノ粒子分散液(日産化学工業株式会社製、製品名)
[(F) component]
OZ-S30K: Zirconium oxide nanoparticle dispersion (product name, manufactured by Nissan Chemical Industries, Ltd.)

[透湿度の測定]
 実施例及び比較例で得られた転写型感光性フィルムの保護フィルムをはがしながら、No.5Cろ紙(アドバンテック製)上に第二の樹脂層が接するようにロール温度80℃、基板送り速度0.6m/分、圧着圧力(シリンダ圧力)0.5MPaの条件でラミネートし、No.5Cろ紙上に第二の樹脂層、第一の樹脂層および支持フィルムが積層した積層体を作製した。
[Measurement of moisture permeability]
While peeling off the protective film of the transfer type photosensitive film obtained in Examples and Comparative Examples, Lamination was performed under conditions of a roll temperature of 80 ° C., a substrate feed rate of 0.6 m / min, and a pressure of pressure (cylinder pressure) of 0.5 MPa so that the second resin layer was in contact with 5C filter paper (manufactured by Advantech). A laminate in which the second resin layer, the first resin layer, and the support film were laminated on 5C filter paper was produced.

 上記で得られた積層体を作製後、平行光線露光機(オーク製作所(株)製、EXM1201)を使用して、支持フィルム面垂直上方より露光量5×10J/mで(i線(波長365nm)における測定値)、紫外線を像的に照射した。次いで、第一の樹脂層上に積層されている支持フィルムを除去し、さらに第一の樹脂層側上方より露光量1×10J/mで(i線(波長365nm)における測定値)紫外線を照射し、第二の樹脂層の硬化物及び第一の樹脂層の硬化物からなる硬化膜が形成された透湿度測定用試料を得た。 After producing the laminated body obtained above, using a parallel light exposure machine (EXM1201 manufactured by Oak Manufacturing Co., Ltd.), the exposure amount is 5 × 10 2 J / m 2 (i-line) from vertically above the support film surface. (Measured value at a wavelength of 365 nm) and ultraviolet rays were irradiated imagewise. Subsequently, the support film laminated | stacked on the 1st resin layer is removed, and also with the exposure amount of 1 * 10 < 4 > J / m < 2 > from the upper side of the 1st resin layer side (measurement value in i line (wavelength 365nm)) Ultraviolet rays were irradiated to obtain a moisture permeability measurement sample in which a cured film made of the cured product of the second resin layer and the cured product of the first resin layer was formed.

 次いで、JIS規格(Z0208)を参考に、透湿度測定としてカップ法を実施した。測定カップ内に乾燥させた約20gの塩化カルシウムを入れ、上記試験用試料から約φ70mmの大きさにはさみで切り取った円形試料で蓋をし、恒温恒湿槽内にて60℃90%RHの条件で24時間放置した。放置前後の重量変化から透湿度[g/m・24h]を算出した。なお、硬化膜の透湿度が250以下であれば、充分な防錆効果が得られる。 Next, with reference to JIS standard (Z0208), a cup method was performed as a moisture permeability measurement. About 20 g of dried calcium chloride is put in the measuring cup, and the lid is covered with a circular sample cut out with scissors to a size of about φ70 mm from the above test sample, and 60 ° C. and 90% RH in a constant temperature and humidity chamber. The condition was left for 24 hours. The moisture permeability [g / m 2 · 24 h] was calculated from the weight change before and after being left standing. In addition, if the moisture permeability of a cured film is 250 or less, sufficient rust prevention effect will be acquired.

[クラック耐性の評価]
 実施例及び比較例で得られた転写型感光性フィルムの保護フィルムをはがしながら、厚み50μmのポリエチレンテレフタレートフィルム上に、第二の樹脂層が接するようにロール温度100℃、基板送り速度0.6m/分、圧着圧力(シリンダ圧力)0.5MPaの条件でラミネートし、ポリエチレンテレフタレートフィルム上に第二の樹脂層、第一の樹脂層および支持フィルムが積層された積層体を作製した。
[Evaluation of crack resistance]
While peeling off the protective film of the transfer type photosensitive film obtained in the examples and comparative examples, a roll temperature of 100 ° C. and a substrate feed rate of 0.6 m are provided so that the second resin layer is in contact with the polyethylene terephthalate film having a thickness of 50 μm. / Min. And a pressure bonding pressure (cylinder pressure) of 0.5 MPa, and a laminate in which a second resin layer, a first resin layer, and a support film were laminated on a polyethylene terephthalate film was produced.

 上記で得られた積層体を作製後、支持フィルム上にフォトマスクを載置し、平行光線露光機(オーク製作所(株)製、EXM1201)を使用して、フォトマスク面垂直上方より露光量5×10J/mで(i線(波長365nm)における測定値)、紫外線を像的に照射した。次いで、第一の樹脂層上に積層されている支持フィルムを除去し、さらに第一の樹脂層側上方より露光量1×10J/mで(i線(波長365nm)における測定値)紫外線を照射し、第二の樹脂層の硬化物及び第一の樹脂層の硬化物からなる硬化膜が形成されたマンドレル試験用試料を得た。 After producing the laminated body obtained above, a photomask is placed on the support film, and an exposure amount of 5 is applied from above the photomask surface vertically using a parallel light exposure machine (EXM1201 manufactured by Oak Manufacturing Co., Ltd.). At 10 2 J / m 2 (measured value at i-line (wavelength 365 nm)), ultraviolet rays were imagewise irradiated. Subsequently, the support film laminated | stacked on the 1st resin layer is removed, and also with the exposure amount of 1 * 10 < 4 > J / m < 2 > from the upper side of the 1st resin layer side (measurement value in i line (wavelength 365nm)) The sample for a mandrel test in which a cured film composed of the cured product of the second resin layer and the cured product of the first resin layer was formed by irradiation with ultraviolet rays was obtained.

 次いで、JIS規格(K5400)を参考に、マンドレル試験を実施した。上記試験用試料から1.5cm×4.0cmの大きさにはさみで切り取り、円筒形マンドレル屈曲試験器(BYKガードナー製)にセットした。試料の片方を固定し、片方には100gの重りを付けて、保護膜側を上面として円筒を中心に180度屈曲させてから元に戻し、硬化膜側を顕微鏡で観察し、以下の評点に従って耐クラック性を評価した。
φ0.5: φ0.5mmの円筒を用い、保護膜にクラックなし。
φ1  : φ1.0mmの円筒を用い、保護膜にクラックなし。
φ2  : φ2.0mmの円筒を用い、保護膜にクラックなし。
φ3  : φ3.0mmの円筒を用い、保護膜にクラックなし。
Next, a mandrel test was performed with reference to the JIS standard (K5400). The test sample was cut with scissors to a size of 1.5 cm × 4.0 cm and set in a cylindrical mandrel bending tester (manufactured by BYK Gardner). One side of the sample is fixed, a weight of 100 g is attached to one side, the protective film side is bent to 180 degrees around the cylinder with the protective film side as the upper surface, and the cured film side is observed with a microscope. According to the following rating Crack resistance was evaluated.
φ0.5: Uses a cylinder of φ0.5mm, and there is no crack in the protective film.
φ1: A cylinder of φ1.0mm is used, and there is no crack in the protective film.
φ2: Uses a cylinder with a diameter of φ2.0mm, and there is no crack in the protective film.
φ3: Uses a cylinder with a diameter of φ3.0mm, and there is no crack in the protective film.

[密着性の評価]
 インデックスマッチング層(IM層)及びITO付きの基材を用意した。この基材のITO上に、実施例及び比較例で得られた転写型感光性フィルムの保護フィルムを剥離しながら、第二の樹脂層を基材に対向させ、ロール温度100℃、基板送り速度0.4m/分、圧着圧力(シリンダ圧力)4×10Paの条件でラミネートした。ラミネート後、基材を冷却し、基材の温度が23℃になった時点で、支持フィルム側から高圧水銀灯を有する露光機(株式会社オーク製作所製、商品名:EXM-1201)を用いて、80mJ/cmの露光量で光照射した。次に、厚み8.0μmの第一の樹脂層の硬化膜及び第二の樹脂層の硬化物からなるクロスカット密着性試験用試料を得た。
[Evaluation of adhesion]
An index matching layer (IM layer) and a substrate with ITO were prepared. While peeling the protective film of the transfer type photosensitive film obtained in Examples and Comparative Examples on the ITO of the base material, the second resin layer is opposed to the base material, and the roll temperature is 100 ° C., the substrate feed speed. Lamination was performed under the conditions of 0.4 m / min and pressure bonding pressure (cylinder pressure) of 4 × 10 5 Pa. After laminating, the substrate was cooled, and when the temperature of the substrate reached 23 ° C., using an exposure machine having a high-pressure mercury lamp from the support film side (manufactured by Oak Manufacturing Co., Ltd., trade name: EXM-1201), Light irradiation was performed at an exposure amount of 80 mJ / cm 2 . Next, a sample for cross-cut adhesion test composed of a cured film of the first resin layer having a thickness of 8.0 μm and a cured product of the second resin layer was obtained.

 インデックスマッチング層(IM層)及びITO付き基材に対する硬化膜の密着性について、ASTM D3359に準拠してクロスカット試験を行い、剥がれた部分の割合を測定した。この測定結果に基づき、密着性が最も良かった(剥がれが全く無かった)場合を「5」、最も悪かった(全て剥がれた)場合を「0」とし、0~5の6段階評価を行った。 A cross-cut test was performed based on ASTM D3359 for the adhesion of the cured film to the index matching layer (IM layer) and the substrate with ITO, and the ratio of the peeled portion was measured. Based on this measurement result, a case where adhesion was the best (no peeling at all) was “5”, and a case where it was the worst (all peeling) was “0”. .

[信頼性(85℃、85%RH)の評価]
 銅基材(縦12cm×横5cm)上に、実施例及び比較例で得られた転写型感光性フィルムの保護フィルムを剥離しながら、第二の樹脂層を基材に対向させ、ロール温度100℃、基板送り速度0.4m/分、圧着圧力(シリンダ圧力)4×10Paの条件でラミネートした。ラミネート後、基材を冷却し、基材の温度が23℃になった時点で、支持フィルム側から高圧水銀灯を有する露光機(株式会社オーク製作所製、商品名:EXM-1201)を用いて、80mJ/cmの露光量で光照射した。次に、支持フィルムを除去し、400mJ/cmの露光量で光照射した。次に、乾燥機を用いて140℃で30分間焼結させ、厚み8.0μmの第一の樹脂層の硬化膜及び第二の樹脂層の硬化物からなる信頼性試験用試料を得た。得られた試料を85℃および85%RHの高温高湿槽内にて放置し、肉眼で銅基材が腐食するまでの時間を評価した。
[Evaluation of reliability (85 ° C., 85% RH)]
While peeling the protective film of the transfer type photosensitive film obtained in Examples and Comparative Examples on a copper substrate (length 12 cm × width 5 cm), the second resin layer was opposed to the substrate, and the roll temperature 100 Lamination was performed at a temperature of 0 ° C., a substrate feed rate of 0.4 m / min, and a pressure bonding pressure (cylinder pressure) of 4 × 10 5 Pa. After laminating, the substrate was cooled, and when the temperature of the substrate reached 23 ° C., using an exposure machine having a high-pressure mercury lamp from the support film side (manufactured by Oak Manufacturing Co., Ltd., trade name: EXM-1201), Light irradiation was performed at an exposure amount of 80 mJ / cm 2 . Next, the support film was removed and irradiated with light at an exposure amount of 400 mJ / cm 2 . Next, using a dryer, sintering was performed at 140 ° C. for 30 minutes to obtain a sample for reliability test including a cured film of the first resin layer having a thickness of 8.0 μm and a cured product of the second resin layer. The obtained sample was left in a high-temperature and high-humidity tank at 85 ° C. and 85% RH, and the time until the copper substrate was corroded with the naked eye was evaluated.

1…転写型感光性フィルム、10…支持フィルム、20…第一の樹脂層、22…硬化した第一の樹脂層、30…第二の樹脂層、32…硬化した第二の樹脂層、40…保護フィルム、50…透明電極パターン付き基材、50a…透明電極パターン、60…硬化膜、100…積層体、101…透明基材、102…センシング領域、103,104…透明電極、105…引き出し配線、106…接続電極、107…接続端子、123…硬化膜パターン。
 
DESCRIPTION OF SYMBOLS 1 ... Transfer type photosensitive film, 10 ... Support film, 20 ... 1st resin layer, 22 ... Cured 1st resin layer, 30 ... 2nd resin layer, 32 ... 2nd cured resin layer, 40 DESCRIPTION OF SYMBOLS ... Protective film, 50 ... Base material with transparent electrode pattern, 50a ... Transparent electrode pattern, 60 ... Cured film, 100 ... Laminated body, 101 ... Transparent base material, 102 ... Sensing region, 103, 104 ... Transparent electrode, 105 ... Drawer Wiring, 106... Connection electrode, 107... Connection terminal, 123.

Claims (10)

 支持フィルムと、該支持フィルム上に設けられた第一の樹脂層と、を備え、
 前記第一の樹脂層が、バインダーポリマーと、光重合性化合物と、光重合開始剤と、を含有し、
 前記バインダーポリマーが、側鎖に分岐及び/又は脂環構造を有する基、側鎖に酸性基を有する基、並びに、側鎖にエチレン性不飽和基を有する基を含有し、且つ、0.50~3.00mmol/gのエチレン性不飽和基当量を有する、転写型感光性フィルム。
A support film, and a first resin layer provided on the support film,
The first resin layer contains a binder polymer, a photopolymerizable compound, and a photopolymerization initiator,
The binder polymer contains a group having a branched and / or alicyclic structure in the side chain, a group having an acidic group in the side chain, and a group having an ethylenically unsaturated group in the side chain, and 0.50 A transfer type photosensitive film having an ethylenically unsaturated group equivalent of ˜3.00 mmol / g.
 前記バインダーポリマーが、側鎖にフェニル基を有する基をさらに含有する、請求項1に記載の転写型感光性フィルム。 The transfer type photosensitive film according to claim 1, wherein the binder polymer further contains a group having a phenyl group in a side chain.  前記第一の樹脂層が、エチレン性不飽和基を有するリン酸エステルをさらに含む、請求項1又は2に記載の転写型感光性フィルム。 The transfer type photosensitive film according to claim 1 or 2, wherein the first resin layer further comprises a phosphate ester having an ethylenically unsaturated group.  前記光重合開始剤が、オキシムエステル化合物を含む、請求項1~3のいずれか一項に記載の転写型感光性フィルム。 The transfer type photosensitive film according to any one of claims 1 to 3, wherein the photopolymerization initiator contains an oxime ester compound.  前記第一の樹脂層上に設けられた、金属酸化物粒子を含有する第二の樹脂層を備える、請求項1~4のいずれか一項に記載の転写型感光性フィルム。 5. The transfer type photosensitive film according to claim 1, further comprising a second resin layer containing metal oxide particles provided on the first resin layer.  電極を有する基材上に、請求項1~4のいずれか一項に記載の転写型感光性フィルムの前記第一の樹脂層を、前記基材の前記電極が設けられている側と前記第一の樹脂層とが密着するようにラミネートする工程と、
 前記基材上の前記第一の樹脂層の所定部分を露光後、前記所定部分以外を除去し、前記電極の一部又は全部を被覆する硬化膜パターンを形成する工程と、
を備える、硬化膜パターンの形成方法。
The first resin layer of the transfer type photosensitive film according to any one of claims 1 to 4 is formed on a substrate having an electrode, the side of the substrate on which the electrode is provided, and the first resin layer. Laminating so that one resin layer is in close contact,
After exposing a predetermined portion of the first resin layer on the substrate, removing the portion other than the predetermined portion, forming a cured film pattern that covers a part or all of the electrode;
A method for forming a cured film pattern.
 電極を有する基材上に、請求項5に記載の転写型感光性フィルムの前記第二の樹脂層及び前記第一の樹脂層を、前記基材の前記電極が設けられている側と前記第二の樹脂層とが密着するようにラミネートする工程と、
 前記基材上の前記第二の樹脂層及び前記第一の樹脂層の所定部分を露光後、前記所定部分以外を除去し、前記電極の一部又は全部を被覆する硬化膜パターンを形成する工程と、
を備える、硬化膜パターンの形成方法。
The second resin layer and the first resin layer of the transfer type photosensitive film according to claim 5 on the substrate having an electrode, the side of the substrate on which the electrode is provided and the first resin layer. Laminating so that the two resin layers are in close contact with each other;
A step of forming a cured film pattern that covers a part or all of the electrode by removing a part other than the predetermined part after exposing the predetermined part of the second resin layer and the first resin layer on the substrate. When,
A method for forming a cured film pattern.
 請求項1~4のいずれか一項に記載の転写型感光性フィルムにおける前記第一の樹脂層を硬化してなる、硬化膜。 A cured film obtained by curing the first resin layer in the transfer type photosensitive film according to any one of claims 1 to 4.  請求項5に記載の転写型感光性フィルムの前記第一の樹脂層のみ、又は、前記第一の樹脂層及び前記第二の樹脂層の両方を硬化してなる、硬化膜。 6. A cured film obtained by curing only the first resin layer of the transfer type photosensitive film according to claim 5, or both the first resin layer and the second resin layer.  請求項1~4のいずれか一項に記載の転写型感光性フィルムにおける前記第一の樹脂層の硬化物、又は、請求項5に記載の転写型感光性フィルムの前記第二の樹脂層の硬化物及び前記第一の樹脂層の硬化物、からなる硬化膜パターンを備える、タッチパネル。 The cured product of the first resin layer in the transfer type photosensitive film according to any one of claims 1 to 4, or the second resin layer of the transfer type photosensitive film according to claim 5. A touch panel comprising a cured film pattern comprising a cured product and a cured product of the first resin layer.
PCT/JP2017/012680 2017-03-28 2017-03-28 Transfer-type photosensitive film, method for forming cured film pattern, and touch panel Ceased WO2018179096A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201780089039.7A CN110462559A (en) 2017-03-28 2017-03-28 Transfer-type photosensitive film, method for forming cured film pattern, and touch panel
JP2019508391A JP6943279B2 (en) 2017-03-28 2017-03-28 Transfer-type photosensitive film, cured film pattern forming method and touch panel
PCT/JP2017/012680 WO2018179096A1 (en) 2017-03-28 2017-03-28 Transfer-type photosensitive film, method for forming cured film pattern, and touch panel
KR1020197028867A KR102401215B1 (en) 2017-03-28 2017-03-28 Transfer-type photosensitive film, cured film pattern formation method and touch panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2017/012680 WO2018179096A1 (en) 2017-03-28 2017-03-28 Transfer-type photosensitive film, method for forming cured film pattern, and touch panel

Publications (1)

Publication Number Publication Date
WO2018179096A1 true WO2018179096A1 (en) 2018-10-04

Family

ID=63674575

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/012680 Ceased WO2018179096A1 (en) 2017-03-28 2017-03-28 Transfer-type photosensitive film, method for forming cured film pattern, and touch panel

Country Status (4)

Country Link
JP (1) JP6943279B2 (en)
KR (1) KR102401215B1 (en)
CN (1) CN110462559A (en)
WO (1) WO2018179096A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022037025A (en) * 2018-10-18 2022-03-08 富士フイルム株式会社 Transfer film, cured film manufacturing method, laminate manufacturing method, and touch panel manufacturing method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012078528A (en) * 2010-09-30 2012-04-19 Fujifilm Corp Photosensitive composition, photosensitive resin transfer film, resin pattern and production method of resin pattern, substrate for liquid crystal display device, and liquid crystal display device
JP2014108541A (en) * 2012-11-30 2014-06-12 Fujifilm Corp Transfer film and transparent laminate, method for manufacturing the same, electrostatic capacitive input device and image display device
JP2015121929A (en) * 2013-12-24 2015-07-02 日立化成株式会社 Method for producing substrate for touch panel with cured film, photosensitive resin composition used therefor, photosensitive element and touch panel

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994136B2 (en) * 2006-07-26 2012-08-08 富士フイルム株式会社 Photosensitive composition, photosensitive resin transfer film, photospacer production method, liquid crystal display substrate, and liquid crystal display device
JP2012073589A (en) * 2010-08-31 2012-04-12 Fujifilm Corp Photosensitive composition, photosensitive film, photosensitive laminate, method for forming permanent pattern, and printed board
WO2013084283A1 (en) * 2011-12-05 2013-06-13 日立化成株式会社 Method for forming protective film for touch panel electrodes, photosensitive resin composition, and photosensitive element
KR101737963B1 (en) * 2012-03-15 2017-05-19 후지필름 가부시키가이샤 Photosensitive film, method for producing capacitance type input device, capacitance type input device, and image display apparatus using the same
CN106794679B (en) * 2014-10-24 2019-06-11 富士胶片株式会社 Transfer film, method for producing the same, and method for producing a laminate, an electrostatic capacitance type input device, and an image display device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012078528A (en) * 2010-09-30 2012-04-19 Fujifilm Corp Photosensitive composition, photosensitive resin transfer film, resin pattern and production method of resin pattern, substrate for liquid crystal display device, and liquid crystal display device
JP2014108541A (en) * 2012-11-30 2014-06-12 Fujifilm Corp Transfer film and transparent laminate, method for manufacturing the same, electrostatic capacitive input device and image display device
JP2015121929A (en) * 2013-12-24 2015-07-02 日立化成株式会社 Method for producing substrate for touch panel with cured film, photosensitive resin composition used therefor, photosensitive element and touch panel

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022037025A (en) * 2018-10-18 2022-03-08 富士フイルム株式会社 Transfer film, cured film manufacturing method, laminate manufacturing method, and touch panel manufacturing method

Also Published As

Publication number Publication date
KR102401215B1 (en) 2022-05-24
KR20190128187A (en) 2019-11-15
JPWO2018179096A1 (en) 2020-01-30
CN110462559A (en) 2019-11-15
JP6943279B2 (en) 2021-09-29

Similar Documents

Publication Publication Date Title
JP6212970B2 (en) Protective film for touch panel electrode and touch panel
JP6400289B2 (en) Base material for touch panel with cured film and method for producing the same, photosensitive element and touch panel
WO2016181422A1 (en) Transfer-type photosensitive refractive index adjustment film, method for forming refractive index adjustment pattern, and electronic component
JP6551277B2 (en) Method for producing cured substrate with touch panel, photosensitive resin composition used therefor, photosensitive element and touch panel
WO2016001955A1 (en) Transfer type photosensitive refractive index-regulating film
JP2019175226A (en) Photosensitive film for forming protective film for touch sensor, photosensitive refractive index adjusting film for forming protective film for touch sensor, method for forming protective film for touch sensor, and touch panel
JP2017201352A (en) Transfer type photosensitive refractive index adjusting film, method for forming refractive index adjusting pattern, and electronic component
JP2017181541A (en) Photosensitive film, photosensitive refractive index adjusting film, method for forming refractive index adjusting pattern, cured film and electronic component
JP2018165788A (en) Transfer photosensitive film, curable resin patterning method, and touch panel
JPWO2017056131A1 (en) Transfer type photosensitive refractive index adjustment film
JP6943279B2 (en) Transfer-type photosensitive film, cured film pattern forming method and touch panel
WO2017175642A1 (en) Photosensitive refractive index modulation film, method for forming cured film pattern, cured film and electronic component
JP2019035801A (en) Transfer photosensitive film, method of forming cured film pattern, cured film and electronic component
JP7614139B2 (en) Transfer type photosensitive film, method for forming cured film pattern, cured film and touch panel
JP2019215395A (en) Transfer type photosensitive film, method for forming cured film pattern, laminate and touch panel
WO2019224887A1 (en) Transfer type photosensitive film, electrode substrate with resin cured film, and touch panel
JP2019174604A (en) Transfer film, cured film and method for forming the same, and electronic component
WO2019186802A1 (en) Transfer film, cured film and method for forming same, and electronic component
WO2019207648A1 (en) Photosensitive resin composition, transfer-type photosensitive film, substrate having cured film attached thereto, and sensing device
JP2019152750A (en) Photosensitive film, and manufacturing method of cured article
WO2018179102A1 (en) Transfer-type photosensitive refractive index adjustment film, method for forming refractive index adjustment pattern, cured film, and touch panel
JP5790783B2 (en) Method for forming resin cured film pattern, photosensitive resin composition, photosensitive element, touch panel manufacturing method, and resin cured film
WO2019207677A1 (en) Photosensitive film and photosensitive refractive-index adjustment film
WO2019186781A1 (en) Transfer film, cured film and method for forming same, and electrical component
WO2018181722A1 (en) Protective film for touch panel electrode and touch panel

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17903865

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2019508391

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20197028867

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17903865

Country of ref document: EP

Kind code of ref document: A1