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WO2018174915A1 - Capteur de centre des anomalies magnéto-optiques à réseau d'antennes rf vivaldi - Google Patents

Capteur de centre des anomalies magnéto-optiques à réseau d'antennes rf vivaldi Download PDF

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Publication number
WO2018174915A1
WO2018174915A1 PCT/US2017/024179 US2017024179W WO2018174915A1 WO 2018174915 A1 WO2018174915 A1 WO 2018174915A1 US 2017024179 W US2017024179 W US 2017024179W WO 2018174915 A1 WO2018174915 A1 WO 2018174915A1
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WIPO (PCT)
Prior art keywords
array
antenna elements
magnetic field
magneto
sensor assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2017/024179
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English (en)
Inventor
Joseph W. Hahn
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Lockheed Martin Corp
Original Assignee
Lockheed Corp
Lockheed Martin Corp
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Filing date
Publication date
Application filed by Lockheed Corp, Lockheed Martin Corp filed Critical Lockheed Corp
Priority to PCT/US2017/024179 priority Critical patent/WO2018174915A1/fr
Publication of WO2018174915A1 publication Critical patent/WO2018174915A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
    • G01R33/1284—Spin resolved measurements; Influencing spins during measurements, e.g. in spintronics devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect

Definitions

  • the subject matter area generally relates to magnetometers, and to a magneto- optical defect sensors that include an oversampled Vivaldi antenna array for increased uniformity at a desired magneto-defect center component location.
  • a number of industrial and scientific areas such as physics and chemistry can benefit from magnetic detection and imaging with a device that has extraordinary sensitivity, ability to capture signals that fluctuate very rapidly (bandwidth) all with a substantive package that is extraordinarily small in size, efficient in power and infinitesimal in volume.
  • Many advanced magnetic imaging systems are limited to certain restrictive operating conditions, for example, high vacuum and/or cryogenic temperatures, which can make them inapplicable for applications that require ambient conditions.
  • SWAP small size, weight and power
  • Some embodiments provide methods and systems for magneto-optical defect center sensors that utilize a Vivaldi antenna array for increasing uniformity of an RF magnetic signal at a specified location of the magneto-defect center element, such as a diamond having a nitrogen vacancy.
  • Some implementations relate to a magnetic field sensor assembly that may include an optical excitation source, a radio frequency (RF) generator, a beam former in electrical communication with the RF generator, an array of Vivaldi antenna elements in electrical communication with the beam former, and a magneto-optical defect center material positioned in a far field of the array of Vivaldi antenna elements.
  • RF radio frequency
  • the array of Vivaldi antenna elements may generate a RF magnetic field that is uniform over the magneto-optical defect center material and the optical excitation source may transmit optical light at a first wavelength to the magneto- optical defect center material to detect a magnetic field based on a measurement of optical light at a second wavelength that is different from the first wavelength.
  • the array of Vivaldi antenna elements may be configured to operate in a range from 2 gigahertz (GHz) to 50 GHz.
  • the array of Vivaldi antenna elements may include a plurality of Vivaldi antenna elements and an array lattice.
  • the beam former may be configured to operate the array of Vivaldi antenna elements at 2 GHz or 2.8-2.9 GHz.
  • the beam former may be configured to spatially oversample the array of Vivaldi antenna elements.
  • the array of Vivaldi antenna elements may be adjacent the magneto-optical defect center material.
  • the magneto-optical defect center material may be a diamond having nitrogen vacancies.
  • a magnetic field sensor assembly may include a radio frequency (RF) generator, a beam former in electrical communication with the RF generator, an array of antenna elements in electrical communication with the beam former, and a magneto-optical defect center material positioned in a far field of the array of antenna elements.
  • the array of antenna elements may generate a RF magnetic field that is uniform over the magneto-optical defect center material.
  • the array of antenna elements may be configured to operate in a range from 2 gigahertz (GHz) to 50 GHz.
  • the array of antenna elements may include a plurality of Vivaldi antenna elements and an array lattice.
  • the beam former may be configured to operate the array of antenna elements at 2 GHz or 2.8-2.9 GHz.
  • the beam former may be configured to spatially oversample the array of antenna elements.
  • the array of antenna elements may be adjacent the magneto-optical defect center material.
  • the magneto-optical defect center material may be a diamond having nitrogen vacancies.
  • a magnetic field sensor assembly may include a radio frequency (RF) generator, an array of antenna elements in electrical communication with the RF generator, and a magneto-optical defect center material positioned in a far field of the array of antenna elements.
  • the array of antenna elements may generate a RF magnetic field that is uniform over the magneto-optical defect center material.
  • the array of antenna elements may be configured to operate in a range from 2 gigahertz (GHz) to 50 GHz.
  • the magnetic field sensor assembly may include a beam former configured to operate the array of antenna elements at 2.8-2.9 GHz.
  • the array of antenna elements may include a plurality of Vivaldi antenna elements and an array lattice.
  • FIG. 1 illustrates an orientation of an NV center in a diamond lattice
  • FIG. 2 illustrates an energy level diagram showing energy levels of spin states for the NV center
  • FIG. 3 illustrates a schematic diagram of a NV center magnetic sensor system
  • FIG. 4 is a graph illustrating the fluorescence as a function of an applied RF frequency of an NV center along a given direction for a zero magnetic field, and also for a non-zero magnetic field having a component along the NV axis;
  • FIG. 5 is a graph illustrating the fluorescence as a function of an applied RF frequency for four different NV center orientations for a non-zero magnetic field
  • FIG. 6 is a schematic illustrating an NV center magnetic sensor system in accordance with some illustrative implementations
  • FIG. 7 is a graphical diagram depicting a Ramsey pulse sequence
  • FIG. 8. is a schematic illustrating some implementations of a Vivaldi antenna
  • FIG. 9 is a schematic illustrating some implementations of an array of Vivaldi antennae.
  • FIG. 10 is a block diagram of some RF systems for the magneto-defect center sensor.
  • FIG. 10 is a block diagram of some RF systems for the magneto-defect center sensor.
  • Atomic-sized magneto-optical defect centers such as nitrogen-vacancy (NV) centers in diamond lattices, can have excellent sensitivity for magnetic field measurement and enable fabrication of small magnetic sensors.
  • Magneto-optical defect center materials include but are not be limited to diamonds, Silicon Carbide (SiC), Phosphorous, and other materials with nitrogen, boron, carbon, silicon, or other defect centers.
  • Diamond nitrogen vacancy (DNV) sensors may be maintained in room temperature and atmospheric pressure and can be even used in liquid environments.
  • a green optical source e.g., a micro-LED
  • the distance between the two spin resonance frequencies is a measure of the strength of the external magnetic field.
  • a photo detector can measure the fluorescence (red light) emitted by the optically excited NV centers.
  • Magneto-optical defect center materials are those that can modify an optical wavelength of light directed at the defect center based on a magnetic field in which the magneto- defect center material is exposed.
  • the magneto-defect center material may utilize nitrogen vacancy centers.
  • Nitrogen-vacancy (NV) centers are defects in a diamond's crystal structure. Synthetic diamonds can be created that have these NV centers. NV centers generate red light when excited by a light source, such as a green light source, and microwave radiation. When an excited NV center diamond is exposed to an external magnetic field, the frequency of the microwave radiation at which the diamond generates red light and the intensity of the light change. By measuring this change and comparing the change to the microwave frequency that the diamond generates red light at when not in the presence of the external magnetic field, the external magnetic field strength can be determined. Accordingly, NV centers can be used as part of a magnetic field sensor.
  • microwave RF excitation is needed in a DNV sensor.
  • Various NV sensors respond to a microwave frequency that is not easily generated by RF antenna elements that are comparable to the small size of the NV sensor.
  • RF elements reduce the amount of light within the sensor that is blocked by the RF elements.
  • the RF element When a single RF element is used, the RF element is offset from the NV diamond when the RF element maximized the faces and edges of the diamond that light can enter or leave. Moving the RF element away from the NV diamond, however, impacts the uniformity of strength of the RF that is applied to the NV diamond.
  • each of the two microwave RF elements is contained on a circuit board.
  • the RF elements can include multiple stacked spiral antenna coils. These stacked coils can occupy a small footprint and can provide the needed microwave RF field in such that the RF field is uniform over the NV diamond.
  • edges and faces of the diamond can be used for light input and egress.
  • the more light captured by photo-sensing elements of a DNV senor results in an increased efficiency of the sensor.
  • Various implementations use the dual RF elements to increase the amount of light collected by the DNV sensor.
  • the dual RF elements can be fed by a single RF feed or by two separate RF feeds. If there are two RF feeds, the feeds can be individual controlled creating a mini-phased array antenna effect, which be enhance the operation of the DNV sensor.
  • NV center its electronic structure, and optical and RF interaction
  • the nitrogen vacancy (NV) center in diamond comprises a substitutional nitrogen atom in a lattice site adjacent a carbon vacancy as shown in FIG. 1.
  • the NV center may have four orientations, each corresponding to a different crystallographic orientation of the diamond lattice.
  • the NV center may exist in a neutral charge state or a negative charge state.
  • the neutral charge state uses the nomenclature NV°, while the negative charge state uses the nomenclature NV, which is adopted in this description.
  • the NV center has a number of electrons including three unpaired electrons, each one from the vacancy to a respective of the three carbon atoms adjacent to the vacancy, and a pair of electrons between the nitrogen and the vacancy.
  • the NV center which is in the negatively charged state, also includes an extra electron.
  • the optical transitions between the ground state 3 A 2 and the excited triplet 3 E are predominantly spin conserving, meaning that the optical transitions are between initial and final states which have the same spin.
  • a photon of red light is emitted with a photon energy corresponding to the energy difference between the energy levels of the transitions.
  • the system 300 includes an optical excitation source 310, which directs optical excitation to an NV diamond material 320 with NV centers.
  • the system 300 further includes an RF excitation source 330 which provides RF radiation to the NV diamond material 320. Light from the NV diamond may be directed through an optical filter 350 to an optical detector 340.
  • the RF excitation source 330 may be a microwave coil, for example.
  • the optical excitation source 310 may be a laser or a light emitting diode, for example, which emits light in the green, for example.
  • the optical excitation source 310 induces fluorescence in the red, which corresponds to an electronic transition from the excited state to the ground state.
  • Light from the NV diamond material 320 is directed through the optical filter 350 to filter out light in the excitation band (in the green for example), and to pass light in the red fluorescence band, which in turn is detected by the detector 340.
  • the component Bz may be determined.
  • Optical excitation schemes other than continuous wave excitation are contemplated, such as excitation schemes involving pulsed optical excitation, and pulsed RF excitation. Examples, of pulsed excitation schemes include Ramsey pulse sequence and spin echo pulse sequence.
  • the diamond material 320 will have NV centers aligned along directions of four different orientation classes.
  • FIG. 5 illustrates fluorescence as a function of RF frequency for the case where the diamond material 320 has NV centers aligned along directions of four different orientation classes.
  • the component Bz along each of the different orientations may be determined.
  • FIG. 3 illustrates an NV center magnetic sensor system 300 with NV diamond material 320 with a plurality of NV centers
  • the magnetic sensor system may instead employ a different magneto-optical defect center material, with a plurality of magneto-optical defect centers.
  • the electronic spin state energies of the magneto-optical defect centers shift with magnetic field, and the optical response, such as fluorescence, for the different spin states is not the same for all of the different spin states.
  • the magnetic field may be determined based on optical excitation, and possibly RF excitation, in a corresponding way to that described above with NV diamond material.
  • FIG. 6 is a schematic of an NV center magnetic sensor 600, according to an embodiment.
  • the sensor 600 includes an optical excitation source 610, which directs optical excitation to an NV diamond material 620 with NV centers, or another magneto-optical defect center material with magneto-optical defect centers.
  • An RF excitation source 630 provides RF radiation to the NV diamond material 620.
  • the NV center magnetic sensor 600 may include a bias magnet 670 applying a bias magnetic field to the NV diamond material 620.
  • Light from the NV diamond material 620 may be directed through an optical filter 650 and an electromagnetic interference (EMI) filter 660, which suppresses conducted interference, to an optical detector 640.
  • the sensor 600 further includes a controller 680 arranged to receive a light detection signal from the optical detector 640 and to control the optical excitation source 610 and the RF excitation source 630.
  • EMI electromagnetic interference
  • the RF excitation source 630 may be a microwave coil, for example.
  • the optical excitation source 610 may be a laser or a light emitting diode, for example, which emits light in the green, for example.
  • the optical excitation source 610 induces fluorescence in the red, which corresponds to an electronic transition from the excited state to the ground state.
  • Light from the NV diamond material 620 is directed through the optical filter 650 to filter out light in the excitation band (in the green for example), and to pass light in the red fluorescence band, which in turn is detected by the optical detector 640.
  • the EMI filter 660 is arranged between the optical filter 650 and the optical detector 640 and suppresses conducted interference.
  • the controller 680 is arranged to receive a light detection signal from the optical detector 640 and to control the optical excitation source 610 and the RF excitation source 630.
  • the controller may include a processor 682 and a memory 684, in order to control the operation of the optical excitation source 610 and the RF excitation source 630.
  • the memory 684 which may include a nontransitory computer readable medium, may store instructions to allow the operation of the optical excitation source 610 and the RF excitation source 630 to be controlled.
  • the controller 680 controls the operation such that the optical excitation source 610 continuously pumps the NV centers of the NV diamond material 620.
  • the bias magnet 670 provides a magnetic field, which is preferably uniform on the NV diamond material 620, to separate the energies for the different orientation classes, so that they may be more easily identified.
  • a Ramsey pulse sequence is a pulsed RF-pulsed laser scheme that measures the free precession of the magnetic moment in the diamond material 320, 620 with NV centers, and is a technique that quantum mechanically prepares and samples the electron spin state.
  • a first RF excitation pulse 720 (in the form of, for example, a microwave (MW) ⁇ /2 pulse) during a period 1.
  • the system is allowed to freely precess (and dephase) over a time period referred to as tau ( ⁇ ).
  • tau ( ⁇ ) During this free precession time period, the system measures the local magnetic field and serves as a coherent integration.
  • a second optical pulse 740 is applied to optically sample the system and a measurement basis is obtained by detecting the fluorescence intensity of the system.
  • the RF excitation pulses applied are provided at a given RF frequency, which correspond to a given NV center orientation.
  • FIG. 8 depicts an implementation of a Vivaldi or tapered slot antenna element 800.
  • a conductive layer 820 is positioned on a substrate for the Vivaldi antenna element 800.
  • a slot 802 is formed in the conductive layer 820 that widens from a minimum distance 804 at a first end 806 of the slot 802 to a maximum distance 808 at a second end 810.
  • the opening of the slot 802 is symmetrical in the implementation shown about an axis 812 along the length of the slot 802 and each side 822, 824 of the conductive layer 820 widens outwardly as the slot 802 approaches the second end 810.
  • the Vivaldi antenna element 800 can be constructed from a pair of symmetrical conductive layers 820 on opposing sides of a thin substrate layer.
  • the conductive layers 820 are preferably substantially identical with the slot 802 formed in each conductive layer 820 pair being parallel.
  • the Vivaldi antenna element 800 is fed by a transmission line (not shown) at the first end 806 and radiates from the second end 810.
  • the size, shape, configuration, and/or positioning of the transmission line of the Vivaldi antenna element 800 may be modified for different bandwidths for the Vivaldi antenna element 800.
  • a plurality of Vivaldi antenna elements 800 may be arranged in an array 900.
  • the array 900 may include Vivaldi antenna elements 800 in a two-dimensional configuration with Vivaldi antenna elements 800 arranged horizontally 910 and vertically 920 in a plane 802 of the array 900.
  • the Vivaldi antenna elements 800 may be uniform in size and configuration.
  • the Vivaldi antenna elements 800 may have different sizes and/or configurations based on a position of the corresponding Vivaldi antenna element 800 in the array 900 and/or based on a target far-field uniformity for a magneto- optical defect center element positioned relative to the array 900.
  • the array 900 of Vivaldi antenna elements 800 is configured to be oversampled to operate over a frequency band centered at 2.87GHz.
  • Each individual Vivaldi antenna element 800 may be designed to operate from approximately 2 GHz to 40 GHz.
  • the array 900 may include 64 to 196 individual Vivaldi antenna elements 800.
  • FIG. 10 depicts an RF system 1000 for a magneto-optical defect center sensor, such as the NV center magnetic sensor 600 of FIG. 6.
  • a magneto-optical defect center sensor may use an RF excitation method that has substantial uniformity over a portion of the magneto-optical defect center material 1010 that is illuminated by the optical excitation source, such as the optical excitation source 610 of FIG. 6.
  • a spatially oversampled Vivaldi antenna array such as the array 900 of FIG.
  • the RF system includes an RF generator 1002, a beam former system 1004, and the Vivaldi antenna element array 900.
  • the RF generator 1002 is configured to generate an RF signal for generating an RF magnetic field for the magneto-optical defect center sensor based on an output from the controller 680.
  • Each Vivaldi antenna element 800 of the array 900 can be designed to work from 2 gigahertz (GHz) to 40 GHz. In some implementations, each Vivaldi antenna element 800 of the array 900 can be designed to work at other frequencies, such as 50 GHz.
  • the Vivaldi antenna elements 800 are positioned on an array lattice or other substructure correlating to 40 GHz.
  • the array lattice may be a small size, such as 0.1 inches by 0.1 inches.
  • Each Vivaldi antenna element 800 of the array 900 is electrically coupled to the beam former system 1004.
  • the combination of the Vivaldi antenna elements 800 permits the array 900 to operate at lower frequencies than each Vivaldi antenna element 800 making up the array 900.
  • the beam former system 1004 is configured to spatially oversample the Vivaldi antenna elements 800 of the array 900 such that the array 900 of Vivaldi antenna elements 800 effectively operates like a single element at 2 GHz.
  • the beam former system 1004 may include a circuit of several Wilkinson power splitters.
  • the beam former system 1004 may be configured to spatially oversample the Vivaldi antenna elements 800 of the array 900 such that the array 900 of Vivaldi antenna elements 800 perform like a single element at other frequencies, such as 2.8-2.9 GHz.
  • a single 2 GHz antenna would typically require an increased distance for the magneto-optical defect center material 1010 to be located in the far field. If the magneto-optical defect center material 1010 is moved into the near field, decreased uniformity occurs. However, since the array 900 is composed of much smaller Vivaldi antenna elements 800, the far field of each element 800 is much closer than a single 2 GHz antenna.
  • the magneto-optical defect center material 1010 is able to be positioned much closer to still be in the far field of the array 900. Due to oversampling provided by the beam former system 1004 of the array 900 of very small Vivaldi antenna elements 800 the magneto-optical defect center material 1010 is able to be positioned in the far field of the array 900 and achieve a high uniformity.
  • the magneto-optical defect center material 1010 can be at multiple different orientations, thereby providing additional adaptability for designing the magneto-optical defect center sensor. That is, the magneto-optical defect center material 1010 may be mounted to a light pipe for collected red wavelength light emitted from the magneto-optical defect center material 1010 when excited by a green wavelength optical excitation source, and the array 900 can be maneuvered to a number of different positions to accommodate any preferred configurations for the positioning of the light pipe and/or optical excitation source. By providing the array 900 of Vivaldi antenna elements 800, the magneto-optical defect center sensor can have a more customized and smaller configuration compared to other magneto-optical defect center sensors.
  • the array 900 may be able to control the directionality of the generated RF magnetic field. That is, because of the several Vivaldi antenna elements 800 making up the array 900, the directionality of the resulting RF magnetic field can be modified based on which of the Vivaldi antenna elements 800 are active and/or the magnitude of the transmission from each of the Vivaldi antenna elements 800.
  • one or more phase shifters may be positioned between a corresponding output of a beam former of the beam former system 1004 for a Vivaldi antenna element 800.
  • the one or more phase shifters may be selectively activated or deactivated to provide constructive or destructive interference so as to "steer” each RF magnetic field generated from each Vivaldi antenna element 800 in a desired direction.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

Un capteur de centre des anomalies magnéto-optiques peut utiliser un réseau d'antennes Vivaldi pour augmenter l'uniformité d'un signal magnétique RF à un emplacement spécifié de l'élément de centre d'anomalies magnéto-optiques, tel qu'un diamant présentant une lacune d'azote.
PCT/US2017/024179 2017-03-24 2017-03-24 Capteur de centre des anomalies magnéto-optiques à réseau d'antennes rf vivaldi Ceased WO2018174915A1 (fr)

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PCT/US2017/024179 WO2018174915A1 (fr) 2017-03-24 2017-03-24 Capteur de centre des anomalies magnéto-optiques à réseau d'antennes rf vivaldi

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Application Number Priority Date Filing Date Title
PCT/US2017/024179 WO2018174915A1 (fr) 2017-03-24 2017-03-24 Capteur de centre des anomalies magnéto-optiques à réseau d'antennes rf vivaldi

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114047556A (zh) * 2021-11-15 2022-02-15 中国电子科技集团公司第十三研究所 基于金刚石nv色心的磁力探测头及磁力探测系统

Citations (5)

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Publication number Priority date Publication date Assignee Title
US20050068249A1 (en) * 2003-09-27 2005-03-31 Frederick Du Toit Cornelis High gain, steerable multiple beam antenna system
US20080266050A1 (en) * 2005-11-16 2008-10-30 Koninklijke Philips Electronics, N.V. Universal Rf Wireless Sensor Interface
US20140044208A1 (en) * 2008-02-20 2014-02-13 Hobbit Wave Beamforming devices and methods
US20160036529A1 (en) * 2013-03-15 2016-02-04 Bae Systems Plc Directional multiband antenna
US9551763B1 (en) * 2016-01-21 2017-01-24 Lockheed Martin Corporation Diamond nitrogen vacancy sensor with common RF and magnetic fields generator

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050068249A1 (en) * 2003-09-27 2005-03-31 Frederick Du Toit Cornelis High gain, steerable multiple beam antenna system
US20080266050A1 (en) * 2005-11-16 2008-10-30 Koninklijke Philips Electronics, N.V. Universal Rf Wireless Sensor Interface
US20140044208A1 (en) * 2008-02-20 2014-02-13 Hobbit Wave Beamforming devices and methods
US20160036529A1 (en) * 2013-03-15 2016-02-04 Bae Systems Plc Directional multiband antenna
US9551763B1 (en) * 2016-01-21 2017-01-24 Lockheed Martin Corporation Diamond nitrogen vacancy sensor with common RF and magnetic fields generator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114047556A (zh) * 2021-11-15 2022-02-15 中国电子科技集团公司第十三研究所 基于金刚石nv色心的磁力探测头及磁力探测系统
CN114047556B (zh) * 2021-11-15 2024-01-30 中国电子科技集团公司第十三研究所 基于金刚石nv色心的磁力探测头及磁力探测系统

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