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WO2018168912A1 - Dispositif de génération de fluide de rectification, procédé de génération de fluide de rectification, dispositif de rectification et fluide de rectification - Google Patents

Dispositif de génération de fluide de rectification, procédé de génération de fluide de rectification, dispositif de rectification et fluide de rectification Download PDF

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Publication number
WO2018168912A1
WO2018168912A1 PCT/JP2018/009916 JP2018009916W WO2018168912A1 WO 2018168912 A1 WO2018168912 A1 WO 2018168912A1 JP 2018009916 W JP2018009916 W JP 2018009916W WO 2018168912 A1 WO2018168912 A1 WO 2018168912A1
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WIPO (PCT)
Prior art keywords
grinding
liquid
grinding fluid
fluid
grindstone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/009916
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English (en)
Japanese (ja)
Inventor
荻野　重人
俊作 牧
秀彰 小林
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Idec Corp
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Idec Corp
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Publication date
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Priority to JP2018514468A priority Critical patent/JP6991130B2/ja
Publication of WO2018168912A1 publication Critical patent/WO2018168912A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant

Definitions

  • the present invention relates to a grinding fluid, generation of the grinding fluid, and grinding of an object using the grinding fluid.
  • Japanese Patent Laying-Open No. 2015-98079 discloses a technique of mixing air millibubbles and microbubbles into strong alkaline water, which is a cooling medium stored in a cooling medium tank.
  • a bubble generator is provided in the vicinity of the tip of a nozzle for supplying a coolant liquid, and a bubble-containing coolant liquid containing bubbles having a size of 0.3 ⁇ m to 10 ⁇ m.
  • a technique for supplying a cutting point to a cutting point is disclosed.
  • the present invention is directed to a grinding fluid generating device that generates a grinding fluid supplied to a contact portion between a grindstone and an object in a grinding device, and provides a grinding fluid that improves production efficiency in the grinding device. It is aimed.
  • a grinding fluid generating apparatus generates ultra fine bubbles having a diameter of less than 1 ⁇ m in a liquid that is a raw material of the grinding fluid, and includes ultra fine bubbles at a concentration of 100 million / ml or more.
  • a grinding fluid generator for generating a grinding fluid and a grinding fluid delivery unit for delivering the grinding fluid are provided.
  • ADVANTAGE OF THE INVENTION According to this invention, the grinding fluid which improves the production efficiency in a grinding device can be provided.
  • a grinding liquid generating apparatus includes a mixed liquid generating section that generates a mixed liquid by mixing a gas with a liquid that is a raw material of the grinding liquid, and an ultra-small diameter less than 1 ⁇ m in the mixed liquid.
  • a liquid delivery unit that produces fine bubbles and delivers a liquid containing ultrafine bubbles at a concentration of 100 million / ml or more.
  • the grinding fluid generating apparatus further includes a circulation unit that returns the liquid sent from the liquid sending unit to the mixed solution generating unit.
  • the grinding fluid generating device further includes a reservoir for storing the liquid delivered from the fluid delivery unit before supplying the fluid to the contact portion between the grindstone of the grinding device and the object.
  • the liquid delivery part is connected to a taper part in which a flow path area gradually decreases from upstream to downstream of the nozzle flow path to which the mixed liquid is supplied, and to a downstream end of the taper part, and the taper part
  • generation nozzle provided with the throat part which ejects the fluid from a jet nozzle, and the enlarged part which connects to the said jet nozzle and expands a flow-path area.
  • the present invention is also directed to a grinding fluid generating method for generating a grinding fluid supplied to a contact portion between a grindstone portion and an object in a grinding apparatus.
  • a grinding fluid generating method includes: a) a step of mixing a gas with a raw material of a grinding fluid to generate a mixed solution; and b) a diameter of less than 1 ⁇ m in the mixed solution. Producing ultra fine bubbles and delivering a liquid containing ultra fine bubbles at a concentration of 100 million / ml or more.
  • ADVANTAGE OF THE INVENTION According to this invention, the grinding fluid which improves the production efficiency in a grinding device can be manufactured easily.
  • the liquid sent in step b) is circulated to perform step a) and step b).
  • the present invention is also directed to a grinding apparatus that performs grinding on an object.
  • a grinding apparatus includes a grindstone unit, a holding unit that holds an object, a drive unit that slides the grindstone unit relative to the object, and the grindstone unit.
  • a liquid supply unit for supplying a grinding liquid to a contact part with the object, and the grinding liquid contains ultra fine bubbles having a diameter of less than 1 ⁇ m at a concentration of 100 million / ml or more. According to the present invention, the production efficiency in the grinding apparatus can be improved.
  • a grinding apparatus includes a grindstone portion, a holding portion that holds an object, a drive portion that causes the grindstone portion to slide relative to the object, and the above-described grinding liquid.
  • the present invention is also directed to a grinding liquid supplied to a contact portion between a grindstone and an object in a grinding apparatus.
  • the grinding fluid which concerns on one preferable form of this invention contains the ultra fine bubble whose diameter is less than 1 micrometer in the density
  • FIG. 1 is a diagram showing a configuration of a grinding apparatus 8 according to an embodiment of the present invention.
  • the grinding device 8 is a device that performs grinding on an object 9 (that is, a workpiece) that is an object of grinding.
  • object 9 that is, a workpiece
  • cylindrical grinding is performed by the grinding device 8 to grind the outer peripheral surface of the substantially cylindrical object 9.
  • the grinding device 8 includes a grindstone unit 81, a holding unit 82, a drive unit 83, a liquid supply unit 84, a feeding unit 85, and the grinding fluid generation device 1.
  • the grindstone portion 81 is a substantially disk-shaped or substantially columnar member centered on a central axis J3 that faces in a direction perpendicular to the paper surface in FIG.
  • a grindstone 811 for grinding is provided on the outer peripheral surface of the grindstone portion 81.
  • the holding part 82 holds the substantially cylindrical object 9 extending in a direction perpendicular to the paper surface in FIG.
  • the grindstone 811 of the grindstone 81 is in contact with the outer peripheral surface of the object 9.
  • a portion where the grindstone 81 and the object 9 are in contact is referred to as a “contact portion 88”.
  • the driving unit 83 slides the grindstone unit 81 relative to the object 9. Specifically, the drive unit 83 rotates the grindstone unit 81 around the central axis J3. The drive unit 83 also rotates the object 9 held by the holding unit 82 around a central axis J4 perpendicular to the paper surface in FIG. In the example shown in FIG. 1, the grindstone unit 81 rotates clockwise in the figure, and the object 9 rotates counterclockwise in the figure. In addition, the drive part 83 may rotate the target object 9 hold
  • the grinding fluid generator 1 generates a grinding fluid 74 (that is, a coolant fluid) that is used for grinding the object 9.
  • the grinding fluid 74 generated by the grinding fluid generator 1 is supplied to the contact portion 88 between the grindstone 81 and the object 9 by the fluid supply unit 84.
  • the liquid supply part 84 is a grinding liquid nozzle that injects the grinding liquid 74 toward the contact part 88 between the grindstone part 81 and the object 9, for example.
  • the grinding liquid 74 supplied from the liquid supply part 84 to the contact part 88 contains ultra fine bubbles at a predetermined concentration.
  • Ultra fine bubbles are bubbles having a diameter of less than 1 ⁇ m (micrometers) and are also called nanobubbles.
  • the “concentration” of ultra fine bubbles refers to the number of ultra fine bubbles contained in a liquid per unit volume.
  • the number of ultra fine bubbles in the liquid is measured by, for example, a laser diffraction / scattering method. In the present embodiment, the number of ultrafine bubbles is measured by a laser diffraction particle size distribution analyzer SALD-7500X10 manufactured by Shimadzu Corporation.
  • the concentration of ultra fine bubbles in the grinding liquid 74 supplied from the liquid supply unit 84 is 100 million / ml (milliliter) or more, and preferably 400 million / ml or more.
  • the upper limit of the concentration of ultra fine bubbles in the grinding liquid 74 is not particularly limited, but considering the time required for generation, etc., 1 billion / ml or less is practical.
  • the diameter of the ultra fine bubble contained in the grinding liquid 74 is mainly 200 nm (nanometer) or less. For example, paying attention to the number of ultra fine bubbles contained in the grinding fluid 74 per unit volume, the number of ultra fine bubbles having a diameter of 50 nm or more and 200 nm or less is 80% or more and 100% or less of the number of all ultra fine bubbles. It is.
  • FIG. 2 is a diagram showing the configuration of the grinding fluid generator 1.
  • FIG. 3 is a diagram illustrating a flow of generation of the grinding fluid by the grinding fluid generator 1.
  • the grinding fluid generator 1 mixes a liquid (hereinafter referred to as “raw material fluid”) that is a raw material of the grinding fluid 74 and a gas, and contains the ultrafine bubbles of the gas at the above-described predetermined concentration.
  • the raw material liquid is, for example, a grinding liquid used in a conventional grinding apparatus (hereinafter referred to as “conventional grinding liquid”), and does not include the ultrafine bubbles having a predetermined concentration or more.
  • the conventional grinding fluid is generated, for example, by diluting a stock solution of grinding fluid with water.
  • the grinding fluid generating apparatus 1 includes a liquid delivery unit 2, a mixed liquid generating unit 3, a storage unit 5, and a circulation unit 6.
  • the mixed liquid generating unit 3 mixes a gas with the raw material liquid to generate a mixed liquid (step S11).
  • ultra fine bubbles are generated in the liquid mixture generated by the liquid mixture generating unit 3 by the liquid sending unit 2, and a liquid containing ultra fine bubbles at a concentration of 100 million / ml or more is sent out.
  • the liquid delivered from the liquid delivery part 2 is temporarily stored in the storage part 5 before being supplied from the liquid supply part 84 (see FIG. 1) to the contact part 88 (step S13).
  • the liquid stored in the storage unit 5 is returned to the mixed liquid generation unit 3 through the circulation path 61 of the circulation unit 6. That is, the liquid delivered from the liquid delivery unit 2 in step S12 is circulated to the mixed liquid production unit 3 by the circulation unit 6, and steps S11 to S13 are performed (steps S14 and S15).
  • the grinding fluid generator 1 by repeating steps S11 to S15, the grinding fluid 74 containing the ultrafine bubbles at the predetermined concentration is generated (step S14).
  • the grinding liquid 74 is supplied from the reservoir 5 to the contact portion 88 via the liquid supply portion 84.
  • the mixed liquid generation unit 3 includes a mixing nozzle 31, a pressurized liquid generation container 32, and a pump 33.
  • the mixing nozzle 31 mixes the liquid pressure-fed by the pump 33 and the gas flowing in from the gas inlet, and ejects the liquid into the pressurized liquid generation container 32.
  • the liquid and gas mixed by the mixing nozzle 31 are the above-mentioned raw material liquid and air.
  • another gas for example, nitrogen gas may be mixed with the raw material liquid.
  • FIG. 4 is a sectional view showing the mixing nozzle 31 in an enlarged manner.
  • the mixing nozzle 31 includes a liquid inlet 311, a gas inlet 319, and a mixed fluid outlet 312.
  • the liquid pumped by the pump 33 flows from the liquid inlet 311.
  • a gas flows from the gas inlet 319.
  • a mixed fluid 72 (see FIG. 2) in which the liquid flowing in from the liquid inlet 311 and the gas flowing in from the gas inlet 319 are mixed is ejected.
  • the liquid inlet 311, the gas inlet 319, and the mixed fluid outlet 312 are each substantially circular.
  • the flow path section of the nozzle flow path 310 from the liquid inlet 311 to the mixed fluid outlet 312 and the flow path cross section of the gas flow path 3191 from the gas inlet 319 to the nozzle flow path 310 are also substantially circular.
  • the channel cross section means a cross section perpendicular to the central axis of the flow path such as the nozzle flow path 310 and the gas flow path 3191, that is, a cross section perpendicular to the flow of fluid flowing through the flow path.
  • the area of the channel cross section is referred to as “channel area”.
  • the nozzle flow path 310 is a Venturi tube having a flow path area that becomes smaller in the middle of the flow path.
  • the mixing nozzle 31 includes an introduction portion 313, a first taper portion 314, a throat portion 315, a gas mixing portion 316, and a second portion that are continuously arranged in order from the liquid inlet 311 toward the mixed fluid outlet 312. A tapered portion 317 and a lead-out portion 318 are provided.
  • the mixing nozzle 31 also includes a gas supply unit 3192 in which a gas flow path 3191 is provided.
  • the flow path area is substantially constant at each position in the central axis J1 direction of the nozzle flow path 310.
  • the flow path area gradually decreases in the liquid flow direction (that is, toward the downstream).
  • the throat 315 the flow path area is substantially constant.
  • the channel area of the throat 315 is the smallest in the nozzle channel 310. In the nozzle channel 310, even if the channel area slightly changes in the throat 315, the entire portion having the smallest channel area is regarded as the throat 315.
  • the flow channel area is substantially constant and is slightly larger than the flow channel area of the throat 315.
  • the second taper portion 317 the flow path area gradually increases toward the downstream.
  • the flow path area is substantially constant.
  • the channel area of the gas channel 3191 is also substantially constant, and the gas channel 3191 is connected to the gas mixing unit 316 of the nozzle channel 310.
  • the liquid that has flowed into the nozzle channel 310 from the liquid inlet 311 is accelerated by the throat portion 315 and the static pressure is lowered, and the pressure in the nozzle channel 310 is reduced in the throat portion 315 and the gas mixing portion 316.
  • gas is sucked from the gas inlet 319, passes through the gas flow path 3191, flows into the gas mixing unit 316, and is mixed with the liquid to generate the mixed fluid 72.
  • the mixed fluid 72 is decelerated at the second tapered portion 317 and the outlet portion 318 to increase the static pressure, and is ejected into the pressurized liquid generating container 32 through the mixed fluid ejection port 312 as described above.
  • the inside of the pressurized liquid production container 32 shown in FIG. 2 is in a state of being pressurized and higher in pressure than the atmospheric pressure (hereinafter referred to as “pressurized environment”).
  • pressurized environment In the pressurized liquid generation container 32, while the mixed fluid 72 ejected from the mixing nozzle 31 flows in a pressurized environment, the gas is pressurized and dissolved in the liquid to generate a pressurized liquid.
  • the pressurizing liquid is the above-described mixed liquid generated by the mixed liquid generating unit 3.
  • the pressurized liquid generating container 32 includes a first flow path 321, a second flow path 322, a third flow path 323, a fourth flow path 324, and a fifth flow path 325 that are stacked in the vertical direction. .
  • the first flow path 321, the second flow path 322, the third flow path 323, the fourth flow path 324, and the fifth flow path 325 are collectively referred to as “flow paths 321 to 325”.
  • the flow paths 321 to 325 are pipe lines extending in the horizontal direction, and the cross section perpendicular to the longitudinal direction of the flow paths 321 to 325 is substantially rectangular.
  • the above-described mixing nozzle 31 is attached to the upstream end of the first flow path 321 (that is, the left end in FIG. 2), and the mixed fluid 72 ejected from the mixing nozzle 31 is In a pressurized environment, it flows toward the right side in FIG.
  • the mixed fluid 72 is ejected from the mixing nozzle 31 above the liquid level of the mixed fluid 72 in the first flow path 321.
  • the mixed fluid 72 immediately after being ejected from the mixing nozzle 31 directly collides with the liquid surface before colliding with the downstream wall surface (that is, the right wall surface in FIG. 2) of the first flow path 321.
  • a part or the whole of the mixed fluid jet 312 of the mixing nozzle 31 may be located below the liquid level of the mixed fluid 72 in the first flow path 321.
  • a substantially circular opening 321 a is provided on the lower surface of the downstream end portion of the first flow path 321, and the mixed fluid 72 flowing through the first flow path 321 is located below the first flow path 321. It falls to the two flow paths 322 through the opening 321a.
  • the mixed fluid 72 that has dropped from the first flow path 321 flows from the right side to the left side in FIG. 2 in a pressurized environment, and on the lower surface of the downstream end of the second flow path 322.
  • the liquid drops to the third flow path 323 located below the second flow path 322 through the provided substantially circular opening 322a.
  • the mixed fluid 72 that has dropped from the second flow path 322 flows from the left side to the right side in FIG.
  • the mixed fluid 72 is divided into a liquid layer containing bubbles and a gas layer located thereabove.
  • the mixed fluid 72 dropped from the third flow path 323 flows from the right side to the left side in FIG. 2 in a pressurized environment, and on the lower surface of the downstream end portion of the fourth flow path 324. It flows (i.e., falls) into the fifth flow path 325 located below the fourth flow path 324 through the provided substantially circular opening 324a.
  • the fifth flow path 325 unlike the first flow path 321 to the fourth flow path 324, there is no gas layer, and the fifth flow path 325 is in the liquid filling the fifth flow path 325. There are slight bubbles in the vicinity of the upper surface.
  • the mixed fluid 72 flowing in from the fourth channel 324 flows from the left side to the right side in FIG.
  • the flow passes through the flow paths 321 to 325 while flowing gradually down and down in stages (that is, flowing in the horizontal direction and the downward direction alternately).
  • the gas gradually dissolves in the liquid under pressure.
  • the concentration of the gas dissolved in the liquid is approximately equal to 60% to 90% of the (saturated) solubility of the gas under a pressurized environment.
  • dissolve in the liquid exists in the 5th flow path 325 as a bubble of the magnitude
  • the pressurized liquid generation container 32 further includes a surplus gas separation unit 326 extending upward from the upper surface on the downstream side of the fifth flow path 325.
  • the surplus gas separation unit 326 is filled with the mixed fluid 72.
  • the cross section perpendicular to the vertical direction of the surplus gas separation part 326 is substantially rectangular, and the upper end of the surplus gas separation part 326 is opened to the atmosphere via a pressure adjustment throttle part 327.
  • the bubbles of the mixed fluid 72 flowing through the fifth horizontal flow path 325 rise in the surplus gas separation unit 326 and are released into the atmosphere.
  • the excess gas of the mixed fluid 72 is separated together with a part of the mixed fluid 72, thereby generating a pressurized liquid that substantially does not include bubbles of a size that can be at least easily visually recognized.
  • the liquid is supplied to the liquid delivery unit 2 that is directly connected to the downstream end of the flow path 325.
  • the pressurized liquid dissolves a gas that is about twice or more the gas (saturated) solubility under atmospheric pressure.
  • the liquid of the mixed fluid 72 flowing through the flow paths 321 to 325 in the pressurized liquid generating container 32 can also be regarded as a pressurized liquid that is being generated.
  • FIG. 5 is an enlarged sectional view showing the liquid delivery part 2.
  • the liquid delivery unit 2 is an ultra fine bubble generating nozzle that generates ultra fine bubbles.
  • the liquid delivery unit 2 is a multistage nozzle in which three nozzles 28 are connected in series.
  • the liquid delivery unit 2 includes a liquid inlet 21 and a liquid outlet 22. From the liquid inlet 21, the pressurized liquid flows from the fifth flow path 325 of the pressurized liquid generation container 32.
  • the liquid delivery port 22 is connected to the storage tank 51 of the storage part 5 through the liquid delivery path 52 (refer FIG. 2).
  • the liquid inlet 21 and the liquid outlet 22 are each substantially circular, and the cross section of the nozzle channel 20 from the liquid inlet 21 toward the liquid outlet 22 is also substantially circular.
  • the liquid delivery part 2 has three sets of taper part 24 and throat part 25 that are sequentially arranged from the liquid inlet 21 toward the liquid delivery outlet 22 (that is, from upstream to downstream of the nozzle flow path 20). And an enlarged portion 26.
  • the flow path area gradually decreases in the direction in which the pressurized liquid flows (that is, from upstream to downstream of the nozzle flow path 20).
  • the inner surface of the tapered portion 24 is a part of a substantially conical surface with the central axis J2 of the nozzle channel 20 as the center. In the cross section including the central axis J2, the angle formed by the inner surface of the tapered portion 24 is preferably 10 ° or more and 90 ° or less.
  • the throat part 25 is connected to the downstream end of the taper part 24 and connects the taper part 24 and the enlarged part 26.
  • the inner surface of the throat portion 25 is a substantially cylindrical surface, and the flow path area is substantially constant in the throat portion 25.
  • the diameter of the channel cross section in the throat 25 is the smallest in the nozzle channel 20, and the channel area of the throat 25 is the smallest in the nozzle channel 20.
  • the length of the throat 25 is preferably 1.1 to 10 times the diameter of the throat 25, and more preferably 1.5 to 2 times. In the nozzle channel 20, even if the channel area slightly changes in the throat portion 25, the entire portion having the smallest channel area is regarded as the throat portion 25.
  • the enlarged portion 26 is connected to a spout 29 that is the downstream end of the throat portion 25.
  • the enlarged portion 26 connects the upstream throat portion 25 and the downstream tapered portion 24.
  • the inner surface of the enlarged portion 26 is a substantially cylindrical surface, and in the enlarged portion 26, the flow path area is substantially constant.
  • the diameter of the enlarged portion 26 is larger than the diameter of the throat portion 25.
  • the flow path area is rapidly enlarged.
  • the angle formed between the central axis J2 and the substantially annular surface 27 between the downstream end of the throat 25 and the upstream end of the enlarged portion 26 is about 90 °.
  • the surface 27 is substantially perpendicular to the central axis J2.
  • the said angle is 45 degrees or more and 90 degrees or less, for example.
  • the pressurized liquid that has flowed into the nozzle channel 20 from the liquid inlet 21 flows to the throat 25 while being gradually accelerated in the taper part 24, and a jet outlet 29 that is the downstream end of the throat 25.
  • the flow rate of the pressurized liquid in the throat 25 is preferably 10 m to 30 m per second.
  • the gas in the pressurized liquid becomes supersaturated and precipitates in the liquid as ultrafine bubbles. Also, precipitation of ultrafine bubbles occurs while the pressurized liquid passes through the enlarged portion 26.
  • the pressurized liquid sequentially passes through the three sets of the taper part 24, the throat part 25, and the enlargement part 26, thereby producing a liquid containing a high-concentration ultrafine bubble. It is sent to the storage tank 51 through the path 52.
  • the circulation path 61 of the circulation unit 6 connects the storage tank 51 of the storage unit 5 and the liquid inlet 311 (see FIG. 4) of the mixing nozzle 31.
  • the liquid containing ultrafine bubbles sent from the liquid delivery unit 2 to the storage tank 51 is returned to the mixing nozzle 31 via the circulation path 61.
  • the liquid returned to the mixing nozzle 31 passes through the pressurized liquid generation container 32 and the liquid delivery part 2 and is delivered to the storage tank 51.
  • a liquid containing ultrafine bubbles circulates through the mixed liquid generating unit 3, the liquid delivery unit 2, the storage tank 51 and the circulation unit 6. Thereby, the density
  • the grinding fluid 74 containing the ultrafine bubbles at the above-described predetermined concentration is stored in the storage tank 51.
  • the pump 33 is stopped and the above-described liquid circulation (that is, generation of the grinding fluid 74). Is stopped. Since the ultra fine bubble can exist in the liquid for a long time, it continues to exist in the grinding liquid 74 even after the generation of the grinding liquid 74 is stopped.
  • the concentration of the ultra fine bubbles in the liquid sent out from the liquid sending unit 2 is set to the above-mentioned predetermined concentration by the raw material liquid passing through the mixed solution generating unit 3 and the liquid sending unit 2 only once. The above circulation through the circulation unit 6 may not be performed.
  • the raw material liquid supplied from the liquid inlet 311 of the mixing nozzle 31 passes through the mixing nozzle 31, the pressurized liquid generation container 32, and the liquid delivery unit 2, and includes the ultrafine bubbles at the above-described predetermined concentration.
  • the liquid 74 is delivered from the liquid delivery port 22 of the liquid delivery unit 2.
  • the circulation unit 6 may be omitted from the grinding fluid generator 1.
  • the grinding liquid 74 stored in the storage tank 51 of the grinding liquid generating apparatus 1 passes through the liquid supply section 84 with respect to the contact section 88 between the grindstone section 81 and the object 9. In this state, the grindstone 81 and the object 9 are rotated by the drive unit 83, and the object 9 is ground.
  • generation apparatus 1 may be continued in parallel with the grinding process with respect to the target object 9.
  • the grinding fluid 74 supplied to the contact portion 88 between the grinding wheel portion 81 and the object 9 contains ultrafine bubbles at a concentration of 100 million / ml or more, the surface tension is higher than that of the conventional grinding fluid. Is low. For this reason, the grinding liquid 74 is likely to penetrate between the grindstone 811 of the grindstone 81 and the surface of the object 9. As a result, the contact portion 88 between the grindstone portion 81 and the object 9 is efficiently cooled. Moreover, the lubricity in the contact part 88 of the grindstone part 81 and the target object 9 is improved.
  • the polishing liquid 74 containing ultrafine bubbles at a concentration of 100 million pieces / ml or more is supplied to the contact portion 88, whereby polishing scraps adhering to the pores of the grindstone 811 (that is, polishing powder, Abrasive grains, crushed abrasive grains, and the like) are physically removed by the ultra fine bubbles and removed from the grindstone 811. Further, since negative charges are present on the surface of the ultra fine bubble, the polishing dust adhering to the grindstone 811 is adsorbed by the electric potential and removed from the grindstone 811. Thereby, clogging of the grindstone 811 in the grindstone portion 81 is suitably suppressed.
  • processing accuracy As a result, it is possible to improve the accuracy of grinding by the grinding device 8 (hereinafter simply referred to as “processing accuracy”). Moreover, the fall of the processing precision at the time of performing the grinding process continuously in the grinding device 8 can be suppressed, and the dressing interval of the grindstone part 81 (that is, the interval of the adjustment of the grindstone 811) can be lengthened.
  • FIG. 6 and 7 are diagrams showing the results of grinding in the grinding apparatus 8 for Examples 1 and 2 and Comparative Examples 1 and 2.
  • FIG. 1 the grinding fluid 74 containing ultrafine bubbles at a concentration of about 100 million / ml was supplied to the contact portion 88 between the grinding stone portion 81 and the subject 9 to perform grinding of the subject 9. .
  • Example 2 the grinding fluid 74 containing ultrafine bubbles at a concentration of about 400 million / ml was supplied to the contact portion 88 between the grinding wheel portion 81 and the subject 9 to perform grinding of the subject 9. .
  • Noritake Cool SEC-Z which is a water-soluble grinding oil for grinding machines (Type A2: Soluble Type) manufactured by Noritake Company Limited, was used as a raw material liquid for the grinding liquid 74. Specifically, 700 ml (that is, 3.5%) of Noritake Cool SEC-Z was dissolved in 20 l (liter) of tap water as raw water to prepare a raw material solution.
  • the grinding liquid 74 of the first embodiment is generated when the raw material liquid passes through the mixed liquid generation section 3 and the liquid delivery section 2 only once without being circulated by the circulation section 6 in the grinding liquid generation apparatus 1.
  • the grinding liquid 74 of the second embodiment is generated when the liquid in the storage tank 51 circulates the mixed liquid generation unit 3 and the liquid delivery unit 2 about 10 times by the circulation unit 6.
  • Comparative Example 1 the grinding of the object 9 was performed by supplying the conventional grinding fluid to the contact part 88 between the grindstone part 81 and the object 9.
  • the conventional grinding liquid Noritake Cool SEC-Z, which is a raw material liquid of the above-mentioned grinding liquid 74, was used.
  • FIG. 8 is a graph showing the relationship between the diameter and concentration of ultrafine bubbles contained in the grinding fluid 74 of Examples 1 and 2 and the conventional grinding fluid of Comparative Example 1.
  • the horizontal axis in FIG. 8 indicates the diameter of the ultra fine bubble, and the vertical axis indicates the concentration of the ultra fine bubble.
  • Example 1 is indicated by a thin solid line 96
  • Example 2 is indicated by a thick solid line 97
  • Comparative Example 1 is indicated by a broken line 98.
  • the conventional grinding fluid contains almost no ultrafine bubbles.
  • the diameter of the ultra fine bubble contained in the grinding fluid 74 of Examples 1 and 2 is mainly 50 nm or more and 200 nm or less as described above.
  • Comparative Example 2 microbubbles having a diameter of 1 ⁇ m or more in the same conventional grinding fluid as in Comparative Example 1 were generated at a concentration of about 1 million / ml and supplied to the contact portion 88. The object 9 was ground.
  • the conventional grinding fluid containing microbubbles used in Comparative Example 2 is referred to as “MB grinding fluid”.
  • the object 9 is a cylindrical member having a diameter of 25 mm and a length of 50 mm.
  • the material of the object 9 is S45C of carbon steel for machine structure, and the quenching hardness (HRC) is 32.
  • the grindstone 811 of the grindstone 81 is a TA grindstone manufactured by Noritake Co., Ltd. and has a particle size of 80.
  • the feed speed of the object 9 is 2 ⁇ m / sec, and the grinding amount is 0.1 mm.
  • the processing time is about 40 seconds per object 9.
  • Comparative Example 1 the temperature of the conventional grinding liquid supplied from the liquid supply part 84 to the contact part 88 between the grindstone part 81 and the object 9 was about 17 ° C. In Examples 1 and 2, the temperature of the grinding liquid 74 supplied from the liquid supply part 84 to the contact part 88 was about 19 ° C. In Comparative Example 2, since the temperature of the MB grinding fluid rose during the grinding of 80 objects 9, the MB grinding fluid was used while being cooled. The average temperature of the MB grinding liquid in the grinding process for 80 objects 9 is about 22 ° C.
  • the cause of the temperature rise of the MB grinding liquid is that it is necessary to continuously generate a large amount of microbubbles so that the concentration of the microbubbles disappearing in a short time in the MB grinding liquid is maintained substantially constant. .
  • cooling of the grinding fluid 74 and the conventional grinding fluid is not performed during grinding of the 80 objects 9.
  • FIG. 6 is a diagram showing the relationship between the number of objects 9 processed and the processing accuracy.
  • the horizontal axis in FIG. 6 indicates the number of objects 9 processed (that is, the number of objects 9 subjected to grinding).
  • the vertical axis in FIG. 6 represents the difference between the dimension of the number of objects 9 ground by the number indicated by the horizontal axis and the dimension of the object 9 ground first (ie, the first one) out of 80 pieces. (Hereinafter referred to as “dimensional displacement”).
  • the dimensional displacement of Examples 1 and 2 is indicated by solid lines 91 and 92
  • the dimensional displacement of Comparative Example 1 is indicated by a broken line 93
  • the dimensional displacement of Comparative Example 2 is indicated by a two-dot chain line 94.
  • the dimensional displacement of the 80th object 9 in Example 1 is reduced by about 25% from the dimensional displacement of the 80th object 9 of Comparative Example 1.
  • the dimensional displacement of the 80th object 9 of Example 2 is reduced by about 50% from the dimensional displacement of the 80th object 9 of Comparative Example 1.
  • FIG. 7 shows a surface photograph of the object 9 ground in the first (ie, first) out of 80 pieces and a surface photograph of the object 9 ground in the last (ie, 80th). Show.
  • the surface of the object 9 that is ground first shows substantially the same grinding result in any of Examples 1 and 2 and Comparative Examples 1 and 2.
  • Comparative Example 1 it is caused by clogging of the grindstone 81 in the lower half of the photograph. Possible grinding burn is seen.
  • the grinding fluid 74 containing ultrafine bubbles at a concentration of 100 million / ml or more is supplied to the contact portion 88 between the grindstone 81 and the object 9.
  • a reduction in processing accuracy is suppressed.
  • cavitation due to ultrafine bubbles is likely to occur at the contact portion 88 between the grindstone portion 81 and the object 9 as compared with the case where the conventional grinding fluid as in Comparative Example 1 is supplied.
  • the clogging of the grinding fluid is suitably suppressed, and when the grinding fluid 74 is generated (that is, when the ultra fine bubble is generated), the temperature rise of the grinding fluid is suppressed.
  • the grinding fluid generating apparatus 1 includes the mixed liquid generating unit 3 and the liquid delivery unit 2.
  • the mixed liquid generating unit 3 generates a mixed liquid by mixing a gas with a liquid that is a raw material of the grinding liquid 74.
  • the liquid delivery part 2 produces
  • the grinding fluid 74 which suppresses suitably the clogging of the grindstone part 81 (namely, clogging of the grindstone 811) can be provided.
  • the grinding fluid generating apparatus 1 further includes a circulation unit 6 that returns the liquid sent from the liquid sending unit 2 to the mixed solution generating unit 3. Thereby, the grinding fluid 74 containing ultra fine bubbles at a high concentration can be generated.
  • the grinding fluid generator 1 further includes a reservoir 5 that stores the liquid delivered from the fluid delivery part 2 before supplying the liquid to the contact part 88 between the grindstone part 81 and the object 9.
  • the grinding liquid 74 can be generated independently of the grinding process in the grinding device 8.
  • a required amount of the grinding fluid 74 can be generated and stored in advance before the start of grinding in the grinding device 8.
  • the concentration of the ultra fine bubble in the grinding liquid 74 in the reservoir 5 hardly decreases.
  • the temperature adjustment of the grinding fluid 74 before supply to the contact part 88 can also be performed as needed.
  • the grinding liquid 74 is sent directly from the liquid delivery part 2 to the liquid supply part 84, it is matched with the flow rate and pressure of the liquid in the liquid delivery part 2 (that is, the ultrafine bubble generation conditions). It is necessary to adjust the supply amount and supply pressure of the grinding fluid 74 from the liquid supply part 84 to the contact part 88. For this reason, the adjustment of the grinding device 8 may be complicated.
  • the ultra fine bubble in the grinding fluid generator 1 is independent of the supply amount and supply pressure of the grinding fluid 74 from the fluid supply portion 84 to the contact portion 88. Can be generated. As a result, the grinding fluid 74 containing ultra fine bubbles at a desired concentration can be generated stably and easily. Further, the adjustment in the grinding device 8 can be simplified.
  • the mixed liquid generating unit 3 is a pressurized liquid generating unit that generates a pressurized liquid by pressurizing and dissolving a gas in a liquid that is a raw material of the grinding liquid 74.
  • the liquid delivery part 2 produces
  • concentration of 100 million piece / ml or more to do.
  • the liquid delivery part 2 is an ultra fine bubble generating nozzle including a taper part 24, a throat part 25, and an enlarged part 26.
  • the flow path area gradually decreases from the upstream side to the downstream side of the nozzle flow path 20 to which the mixed liquid is supplied.
  • the throat portion 25 is connected to the downstream end of the taper portion 24 and ejects the liquid from the taper portion 24 from the ejection port 29.
  • the enlarged portion 26 is connected to the jet outlet 29 and enlarges the flow path area. Thereby, it is possible to easily generate the grinding fluid 74 containing ultrafine bubbles at a high concentration while suppressing the temperature rise of the grinding fluid 74.
  • the grinding device 8 includes a grindstone unit 81, a holding unit 82, a drive unit 83, a liquid supply unit 84, and the grinding fluid generator 1.
  • the holding unit 82 holds the object 9.
  • the drive unit 83 slides the grindstone unit 81 relative to the object 9.
  • the liquid supply part 84 supplies the grinding liquid 74 generated by the grinding liquid generating apparatus 1 to the contact part 88 between the grindstone part 81 and the object 9.
  • clogging of the grindstone portion 81 is suitably suppressed by supplying the grinding fluid 74 containing ultrafine bubbles having a diameter of less than 1 ⁇ m at a concentration of 100 million / ml or more to the contact portion 88. Can do.
  • the grinding device 8 Even when grinding is continuously performed in the grinding device 8, it is possible to suppress a decrease in processing accuracy and to increase the dress interval. Moreover, the depth which can be processed by one grinding process can also be enlarged. As a result, the production efficiency of the grinding device 8 can be improved.
  • the grinding device 8 is not necessarily provided with the above-described grinding fluid generating device 1, and may be ground using the above-described grinding fluid 74 prepared outside the grinding device 8.
  • the grinding device 8 includes a grindstone unit 81, a holding unit 82, a drive unit 83, and a liquid supply unit 84.
  • the holding unit 82 holds the object 9.
  • the drive unit 83 slides the grindstone unit 81 relative to the object 9.
  • the liquid supply part 84 supplies the grinding liquid 74 to the contact part 88 between the grindstone part 81 and the object 9.
  • the grinding fluid 74 contains ultrafine bubbles having a diameter of less than 1 ⁇ m at a concentration of 100 million / ml or more. For this reason, clogging of the grindstone 81 can be suitably suppressed. As a result, the production efficiency of the grinding apparatus 8 can be improved as described above.
  • Example 3 the effect of the addition of the emulsifier on the grinding fluid 74 was verified by Example 3.
  • Some grinding fluids currently in use contain emulsifiers depending on the properties of the grinding fluid.
  • an emulsifier such as a surfactant is added to the stock solution in advance so that the stock water and the stock solution of the grinding fluid can be easily mixed when preparing the grinding fluid.
  • a small amount of an emulsifier may be added during mixing of the raw water and the grinding liquid.
  • Example 3 700 ml of Noritake Cool SEC-Z (raw solution) and a very small amount of surfactant were dissolved in 20 l of tap water as raw water to prepare a raw material solution.
  • generation apparatus 1 the grinding fluid 74 was produced
  • Example 4 and Example 5 verified the influence of the type of stock solution when generating the grinding fluid 74.
  • the grinding liquid 74 was produced
  • the concentration of ultra fine bubbles in the grinding fluid 74 of Example 4 was about 100 million / ml, as in Example 1. That is, even when the grinding liquid 74 was generated using an emulsion type stock solution, the generation of ultra fine bubbles in the grinding liquid 74 was suitably performed. Therefore, even when the grinding fluid 74 generated using the emulsion type stock solution is used in the grinding device 8, clogging of the grindstone portion 81 is suitably suppressed similarly to the above, and the grinding device 8 is used. It is thought that the production efficiency can be improved.
  • Example 5 a raw material solution was prepared by dissolving 700 ml of an emulsion-type stock solution and an extremely small amount of a surfactant in 20 liters of tap water as raw water. And in the grinding fluid production
  • the production efficiency of the grinding device 8 can be improved.
  • the liquid delivery unit 2 is not necessarily connected directly to the pressurized liquid generating container 32.
  • the liquid delivery part 2 may be provided on a liquid delivery path 52 that connects the pressurized liquid production container 32 and the storage tank 51.
  • the liquid delivery part 2 may be arrange
  • liquid delivery part 2 two sets or four or more sets of the tapered part 24, the throat part 25, and the enlarged part 26 that are continuous from upstream to downstream may be provided. Or in the liquid delivery part 2, only one set of the taper part 24, the throat part 25, and the expansion part 26 which are continuous toward the downstream from upstream may be provided.
  • the liquid delivery part 2 does not necessarily need to be equipped with the taper part 24, the throat part 25, and the expansion part 26, and may be an ultra fine bubble generating nozzle having another structure.
  • the reservoir 5 is omitted, and the grinding fluid 74 delivered from the fluid delivery part 2 may be supplied to the fluid supply part 84 of the grinding device 8 without being temporarily stored. .
  • the raw material fluid used for generating the grinding fluid 74 is not limited to the conventional grinding fluid.
  • the raw material liquid may be water used for diluting the above-mentioned stock solution when producing a conventional grinding fluid, or the stock solution.
  • the liquid delivered from the liquid delivery unit 2 of the grinding fluid generating apparatus 1 is not the grinding fluid 74 itself, but ultrafine bubbles at a concentration of 100 million / ml or more.
  • a grinding liquid 74 containing ultra fine bubbles at a concentration of 100 million / ml or more is generated.
  • the characteristics of the stock solution vary depending on the manufacturer and application.
  • the grinding fluid generator 1 may be used for generating the grinding fluid 74 as a device independent of the grinding device 8.
  • the grinding fluid 74 is not necessarily generated by the above-described grinding fluid generator 1.
  • the mixed liquid generation unit 3 it is not always necessary to pressurize and dissolve the gas in the raw material liquid to generate the pressurized liquid, and it is sufficient that the mixed liquid is generated by mixing the gas in the raw material liquid.
  • the liquid delivery part 2 it is not always necessary to generate ultrafine bubbles in the pressurized liquid by ejecting the pressurized liquid, and ultrafine bubbles may be generated by various known generation methods.
  • an ultra fine bubble is generated by applying an ultrasonic wave to the liquid mixture generated by the liquid mixture generating unit 3 in the liquid sending unit 2 or applying a shearing force by the internal structure of the liquid sending unit 2. May be.
  • the grinding fluid 74 does not necessarily have to be generated by the grinding fluid generating device 1 including the mixed liquid generating unit 3 and the liquid delivery unit 2, and may be generated by various grinding fluid generating devices having other structures.
  • the grinding fluid generating apparatus for example, produces a grinding fluid that generates ultra fine bubbles having a diameter of less than 1 ⁇ m in a liquid that is a raw material of the grinding fluid, and includes ultra fine bubbles at a concentration of 100 million / ml or more.
  • a liquid generation unit and a grinding liquid delivery unit for delivering the grinding liquid are provided.
  • ultra fine bubbles may be generated by various known generation methods.
  • generation part an ultra fine bubble is produced
  • the grinding liquid 74 may be used for grinding the object 9 having various shapes in various types of grinding devices (for example, a planar grinding device) other than the cylindrical grinding device 8.
  • the grinding fluid generating device 1 may also be provided in various types of grinding devices.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

L'invention concerne un dispositif de génération de fluide de rectification (1) pourvu d'une unité de génération de solution mélangée (3) et d'une unité de distribution de liquide (2). L'unité de génération de solution mélangée (3) mélange le gaz dans un liquide, qui est un matériau de départ pour le fluide de rectification (74), afin de générer une solution mélangée. L'unité de distribution de liquide (2) génère des bulles ultra-fines ayant un diamètre inférieur à 1 µm dans la solution mélangée, et délivre le fluide de rectification (74) contenant les bulles ultra-fines à une concentration au moins égale à 100 millions/ml. Il est possible ainsi de fournir un fluide de rectification (74) qui supprime de manière appropriée le colmatage d'une meule.
PCT/JP2018/009916 2017-03-16 2018-03-14 Dispositif de génération de fluide de rectification, procédé de génération de fluide de rectification, dispositif de rectification et fluide de rectification Ceased WO2018168912A1 (fr)

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JP2020099862A (ja) * 2018-12-21 2020-07-02 Idec株式会社 ウルトラファインバブル液生成装置
JP2020104230A (ja) * 2018-12-28 2020-07-09 株式会社ナガセインテグレックス ワーク切削方法
JP2020124784A (ja) * 2019-02-06 2020-08-20 株式会社ディスコ 金属板加工方法
JP2020146786A (ja) * 2019-03-12 2020-09-17 日本タングステン株式会社 加工用クーラント供給機構、および、加工用クーラントの供給方法
WO2021085579A1 (fr) * 2019-10-31 2021-05-06 キヤノン株式会社 Procédé de génération pour générer une solution contenant des bulles ultrafines qui contient des bulles ultrafines, et dispositif de production de liquide contenant des bulles ultrafines
JP2022140179A (ja) * 2021-03-10 2022-09-26 伊藤 憲秀 微細気泡の噴射作用によるゴム砥石又は研削砥石の常時研削面再生方法とその装置、被削材の表面研削層を性状向上する研削・研磨する研削装置、研削砥石用のキャビテーション噴射ノズル、自動研削運転方法。
JP2023087959A (ja) * 2021-12-14 2023-06-26 清水建設株式会社 研削除去システムおよび研削除去方法

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JP2020099862A (ja) * 2018-12-21 2020-07-02 Idec株式会社 ウルトラファインバブル液生成装置
JP7287777B2 (ja) 2018-12-21 2023-06-06 Idec株式会社 ウルトラファインバブル生成方法
JP2020104230A (ja) * 2018-12-28 2020-07-09 株式会社ナガセインテグレックス ワーク切削方法
JP2020124784A (ja) * 2019-02-06 2020-08-20 株式会社ディスコ 金属板加工方法
JP2020146786A (ja) * 2019-03-12 2020-09-17 日本タングステン株式会社 加工用クーラント供給機構、および、加工用クーラントの供給方法
JP7165079B2 (ja) 2019-03-12 2022-11-02 日本タングステン株式会社 加工用クーラント供給機構、および、加工用クーラントの供給方法
WO2021085579A1 (fr) * 2019-10-31 2021-05-06 キヤノン株式会社 Procédé de génération pour générer une solution contenant des bulles ultrafines qui contient des bulles ultrafines, et dispositif de production de liquide contenant des bulles ultrafines
JP2022140179A (ja) * 2021-03-10 2022-09-26 伊藤 憲秀 微細気泡の噴射作用によるゴム砥石又は研削砥石の常時研削面再生方法とその装置、被削材の表面研削層を性状向上する研削・研磨する研削装置、研削砥石用のキャビテーション噴射ノズル、自動研削運転方法。
JP7317279B2 (ja) 2021-03-10 2023-07-31 伊藤 憲秀 微細気泡によるタービンブレードの自動研削運転方法
JP2023087959A (ja) * 2021-12-14 2023-06-26 清水建設株式会社 研削除去システムおよび研削除去方法

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