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WO2018163661A1 - Détecteur de nombre de microparticules - Google Patents

Détecteur de nombre de microparticules Download PDF

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Publication number
WO2018163661A1
WO2018163661A1 PCT/JP2018/002891 JP2018002891W WO2018163661A1 WO 2018163661 A1 WO2018163661 A1 WO 2018163661A1 JP 2018002891 W JP2018002891 W JP 2018002891W WO 2018163661 A1 WO2018163661 A1 WO 2018163661A1
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WO
WIPO (PCT)
Prior art keywords
electrode
collection
fine particles
charged
collecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2018/002891
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English (en)
Japanese (ja)
Inventor
京一 菅野
和幸 水野
英正 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
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NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP2019504387A priority Critical patent/JPWO2018163661A1/ja
Publication of WO2018163661A1 publication Critical patent/WO2018163661A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing

Definitions

  • the present invention relates to a particle number detector.
  • the particle number detector adds charge to the particles in the gas, collects the charged particles with the electrode plate of the diffusion separator, and measures the number of particles based on the amount of charges of the collected particles Is known (see, for example, Patent Document 1).
  • the present invention has been made to solve such a problem, and its main object is to facilitate the maintenance of the collecting electrode.
  • the particle number detector of the present invention is A charge generation unit that adds charged charges generated by discharge to the fine particles in the gas introduced into the vent pipe to form charged fine particles; Provided on the downstream side of the gas flow with respect to the charge generation unit, and has a collecting electrode and a counter electrode facing the collecting electrode, and the distance between the collecting electrode and the counter electrode is 0.01 mm. Less than 0.2 mm, a charged particle collection unit that collects the charged particles passing through the Browning motion between the collection electrode and the counter electrode on the collection electrode; A number detection unit that detects the number of the fine particles based on a physical quantity that changes according to the number of the charged fine particles collected by the collection electrode; A heating unit for heating the collecting electrode; It is equipped with.
  • the charge generated by the discharge is added to the particles in the gas introduced into the vent tube to form charged particles.
  • the charged fine particles that pass through the Brownian motion between the collecting electrode and the counter electrode having an interval of 0.01 mm or more and less than 0.2 mm are collected by the collecting electrode.
  • the number detection unit detects the number of fine particles in the gas based on a physical quantity that changes according to the number of charged fine particles collected by the collection electrode.
  • This fine particle number detector includes a heating unit. Therefore, when fine particles or the like are deposited on the collection electrode, the collection electrode can be refreshed by heating the collection electrode in the heating unit and burning the deposit. Therefore, it is not necessary to remove the collection electrode and clean it to remove the deposit, and the maintenance of the collection electrode is facilitated.
  • charge includes positive charges and negative charges as well as ions.
  • Detecting the number of fine particles determines whether or not the number of fine particles falls within a predetermined numerical range (for example, whether or not a predetermined threshold value is exceeded) in addition to measuring the number of fine particles. Including cases.
  • the “physical quantity” may be a parameter that changes based on the number of charged fine particles (charge quantity), and examples thereof include current.
  • the interval between the collection electrode and the counter electrode is set to 0.01 mm or more in order to avoid excessive pressure loss, and the interval between the collection electrode and the counter electrode is set to less than 0.2 mm. This is to make it easier to collect the charged fine particles in Brownian motion on the collecting electrode.
  • the collection electrode and the counter electrode are arranged with a predetermined distance set in a range of 0.01 mm or more and less than 0.1 mm. If this distance is less than 0.1 mm, it becomes easier to collect charged fine particles that are in Brownian motion between the collecting electrode and the counter electrode.
  • the counter electrode is a partition electrode plate that bisects the passage
  • the collection electrode is provided to face each of the front and back surfaces of the partition electrode plate
  • the heating unit includes: ,
  • Each of the collecting electrodes may be provided.
  • the total area of the collecting electrode is increased as compared with the case where one collecting electrode is provided, so that the frequency of refreshing the collecting electrode by the heating unit can be reduced.
  • the charged particle collection unit can apply a voltage between the collection electrode and the counter electrode, and a voltage set in advance for each particle size range of the particles. You may make it apply between the said collection electrode and the said counter electrode. Even if no voltage is applied between the collecting electrode and the counter electrode, the charged fine particles passing through the two electrodes while moving in brown can be collected by the collecting electrode. On the other hand, when a voltage is applied between the collecting electrode and the counter electrode, the particle size range of the collected fine particles varies depending on the applied voltage. Therefore, the number of particles in a desired particle size range can be detected by applying a voltage preset for each particle size range between the collecting electrode and the counter electrode.
  • a plurality of the collecting electrodes may be provided at intervals from the upstream side to the downstream side of the gas flow.
  • the smaller charged fine particles are collected on the upstream collecting electrode, and the larger charged fine particles are collected on the downstream collecting electrode. Therefore, the charged fine particles can be easily classified.
  • the particle number detector of the present invention is provided between the charge generation unit and the charged particle collection unit, a removal electrode is disposed between a pair of removal electric field generation electrodes, and the pair of removal electric field generation electrodes There may be provided a surplus charge removing unit that removes surplus charges that have not been added to the fine particles when the removal voltage is applied therebetween. By so doing, excess charge is removed by the removal electrode, so that it is not collected by the collection electrode of the collection device and counted as the number of fine particles.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of the particle number detector 10. The graph showing the relationship between the particle size of fine particles and the transmittance.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of a particle number detector 110.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of a particle number detector 210. The graph showing the relationship between the particle size of fine particles and the transmittance.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of a particle number detector 310.
  • FIG. 4 is a cross-sectional view illustrating a schematic configuration of a residual particle number detection device 70. Sectional drawing at the time of dividing the hollow part 12c into n steps and providing the collection apparatus 40 in each step.
  • FIG. 1 is a cross-sectional view showing a schematic configuration of the fine particle number detector 10
  • FIG. 2 is a graph showing the relationship between the particle size and transmittance of the fine particles.
  • the fine particle number detector 10 measures the number of fine particles contained in a gas (for example, exhaust gas from an automobile). As shown in FIG. 1, the particle number detector 10 includes a vent tube 12, a charge generation element 20, a surplus charge removal device 30, a collection device 40, a number detection device 50, and a heater 60.
  • the vent pipe 12 is made of ceramic, and has a gas inlet 12a for introducing gas into the vent pipe 12 and a gas outlet 12b for discharging the gas that has passed through the vent pipe 12.
  • the charge generation element 20 includes a needle electrode 22 and a counter electrode 24 provided so as to be exposed on a wall facing the needle electrode 22, provided on the side of the vent pipe 12 close to the gas inlet 12 a. is doing.
  • the needle electrode 22 and the counter electrode 24 are connected to a discharge power source 26 that applies a voltage Vp (for example, a pulse voltage).
  • Vp for example, a pulse voltage
  • the charge generating element 20 generates an air discharge due to a potential difference between the two electrodes when a voltage Vp is applied between the needle-like electrode 22 and the counter electrode 24.
  • the fine particles 16 in the gas are added with charges 18 (here, positive charges) to become charged fine particles P.
  • the surplus charge removing device 30 includes a pair of removal electric field generating electrodes (an application electrode 32 and a ground electrode 34) and a removal electrode 36.
  • the application electrode 32 and the ground electrode 34 are embedded in positions facing each other on the wall of the vent pipe 12.
  • the application electrode 32 is a minute positive potential V2 electrode.
  • the ground electrode 34 is an electrode connected to the ground.
  • the removal electrode 36 is disposed between the application electrode 32 and the ground electrode 34, and is exposed on the wall of the hollow portion 12 c in which the ground electrode 34 is embedded. As a result, a weak electric field is generated between the application electrode 32 and the ground electrode 34 of the surplus charge removing device 30.
  • the collection device 40 is a device that collects the charged fine particles P, and is provided in the hollow portion 12 c in the vent pipe 12.
  • the collection device 40 includes a collection electrode 42 and a counter electrode 44 that faces the collection electrode 42.
  • the collecting electrode 42 and the counter electrode 44 are exposed at positions facing each other on the wall of the vent pipe 12.
  • Both electrodes 42 and 44 are arranged with a predetermined distance set within a range of 0.01 mm or more and less than 0.2 mm (preferably 0.01 mm or more and 0.1 mm or less).
  • the distance between the electrodes 42 and 44 is also referred to as a channel thickness.
  • the counter electrode 44 is an electrode to which the voltage V1 can be applied. In the present embodiment, the voltage V1 is zero.
  • the collecting electrode 42 is connected to the ground via an ammeter 52.
  • the charged fine particles P (positively charged) enter the hollow portion 12 c while performing the Brownian motion, and pass between the collection electrode 42 and the counter electrode 44 after passing through the surplus charge removing device 30.
  • the channel thickness is the above-mentioned predetermined distance (minute distance). For this reason, the charged fine particles P having a small particle size with a sharp Brownian motion collide with the collecting electrode 42 and are collected even if no electric field is generated in both the electrodes 42 and 44.
  • the electrical wiring connecting the collecting electrode 42 and the ammeter 52 penetrates the heater 60 in a state where it is electrically insulated from the heater 60.
  • the relationship between the particle size of the fine particles and the transmittance is shown in the graph of FIG.
  • the voltage application to the counter electrode 44 is zero, when the channel thickness is 4 mm, almost all the fine particles having a particle diameter of 10 to 100 nm are transmitted without being collected by the collecting electrode.
  • the channel thickness is 0.1 mm, the smaller the particle size, the lower the transmittance and the easier it is to be collected by the collecting electrode 42.
  • There are two peaks in the particle size distribution of the fine particles one is a peak of 10 to 20 nm (condensed nucleus mode) and the other is a peak of 50 to 100 nm (accumulation mode). Therefore, when the voltage application to the counter electrode 44 is zero and the channel thickness is 0.1 mm, the charged fine particles P collected by the collecting electrode 42 are estimated to have a particle diameter of 10 to 20 nm.
  • the number detection device 50 includes an ammeter 52 and a number measurement device 54.
  • the ammeter 52 has one terminal connected to the collecting electrode 42 and the other terminal connected to the ground.
  • the ammeter 52 measures the current based on the charge 18 of the charged fine particles P collected by the collecting electrode 42.
  • the number measuring device 54 calculates the number of fine particles 16 based on the current of the ammeter 52.
  • the heater 60 is embedded in the wall of the vent pipe 12 at a position in the vicinity of the collecting electrode 42.
  • the heater 60 is connected to a power supply device (not shown), and generates heat when the power supply device is energized to heat the collecting electrode 42.
  • the particulate number detector 10 When measuring particulates contained in the exhaust gas of an automobile, the particulate number detector 10 is attached in the exhaust pipe of the engine. At this time, the particulate matter detector 10 is attached so that the exhaust gas is introduced into the vent pipe 12 from the gas inlet 12a of the particulate detector 10 and discharged from the gas outlet 12b.
  • the fine particles 16 contained in the exhaust gas introduced into the ventilation pipe 12 from the gas introduction port 12a are charged with the charge 18 (positive charge in this case) generated by the discharge of the charge generation element 20 and become the charged fine particles P and then the hollow portion. Enter 12c.
  • the charged fine particles P entering the hollow portion 12c those having a particle diameter of 10 to 20 nm have a low transmittance as shown in FIG. 2, and therefore when passing between the collecting electrode 42 and the counter electrode 44, both electrodes Even if no electric field is generated at 42 and 44, they are collected by the collecting electrode 42.
  • the charged fine particles P having a particle diameter of 50 to 100 nm pass through without being collected by the collecting electrode 42 because the transmittance exceeds 0.9 as shown in FIG.
  • the current based on the charge 18 of the charged fine particles P attached to the collecting electrode 42 is measured by an ammeter 52, and the number measuring device 54 calculates the number of the fine particles 16 based on the current.
  • the number measuring device 54 integrates (accumulates) the current value over a predetermined period to obtain the integrated value (accumulated charge amount), and divides the accumulated charge amount by the elementary charge to obtain the total number of charges (collected charge number).
  • the number Nt of fine particles 16 having a particle diameter of 10 to 20 nm attached to the collecting electrode 42 is obtained by dividing the number of collected charges by the average value of the number of charges added to one fine particle 16.
  • the average value of the collection rate of the fine particles 16 having a particle size of 10 to 20 nm is obtained by subtracting the average value of the transmittance of the fine particles 16 having a particle size of 10 to 20 nm from 1, and the number Nt is the average value of the collection rates.
  • the value divided by may be the total number Na.
  • the collection electrode 42 is heated and incinerated by heating the collection electrode 42 with the heater 60 periodically or at the timing when the accumulation amount reaches a predetermined amount. Refresh the face.
  • the charge generation element 20 of the present embodiment corresponds to a charge generation unit of the present invention
  • the collection device 40 corresponds to a charged particle collection unit
  • the number detection device 50 corresponds to a number detection unit
  • the heater 60 serves as a heating unit. It corresponds to.
  • the charged fine particles P having a predetermined particle size range (particle size of 10 to 20 nm) passing between the collecting electrode 42 and the counter electrode 44 while performing Brownian motion are as follows. And collected by the collecting electrode 42. Then, the number of fine particles 16 in the gas is detected based on a current that changes according to the number of charged fine particles P collected by the collecting electrode 42.
  • the particle number detector 10 includes a heater 60. Therefore, when the fine particles 16 or the like are deposited on the collecting electrode 42, the collecting electrode 42 can be refreshed by heating the collecting electrode 42 with the heater 60 and burning the deposit. Therefore, it is not necessary to remove the collection electrode 42 and clean it to remove the deposit, and the maintenance of the collection electrode 42 is facilitated.
  • the collection electrode 42 and the counter electrode 44 are arranged with a predetermined distance set within a range of 0.01 mm or more and less than 0.2 mm, the collection electrode 42 and the counter electrode 44 are disposed between the collection electrode 42 and the counter electrode 44. It is easy to collect the charged fine particles P that are in a Brownian motion, and the pressure loss does not become too high. In addition, if this distance is 0.1 mm or less, it becomes easier to collect.
  • the heater 60 is embedded in the wall of the vent pipe 12, but the heater 160 may be provided on the outer peripheral surface of the vent pipe 12 as in the particle number detector 110 shown in FIG.
  • the same components as those in the above-described embodiment are denoted by the same reference numerals. Also in this case, the same effect as the above-described embodiment can be obtained.
  • the heater 60 of the embodiment described above can be installed near the collecting electrode 42, the collecting electrode 42 can be efficiently heated.
  • the collection device 40 including the collection electrode 42 and the counter electrode 44 is employed.
  • the collection electrodes 241 and 242 and the counter electrode 244 are used. You may employ
  • the same components as those in the above-described embodiment are denoted by the same reference numerals.
  • the counter electrode 244 is a partition electrode plate that divides the hollow portion 12 c into two, and the collection electrodes 241 and 242 are provided to face the front and back of the counter electrode 244, respectively.
  • the heaters 261 and 262 are provided in the vicinity of the collecting electrodes 241 and 242.
  • the number detection devices 251 and 252 are also connected to the respective collecting electrodes 241 and 242.
  • the frequency with which the collection electrodes 241 and 242 are refreshed by the heaters 261 and 262 can be reduced.
  • members supporting the counter electrode may be arranged on both the upper and lower surfaces of the ceramic plate so that the voltage V1 can be applied to both counter substrates.
  • the counter electrode on the lower surface of the ceramic plate faces the collecting electrode 241
  • the counter electrode on the upper surface of the ceramic plate faces the collecting electrode 242.
  • the voltage V1 applied to the counter electrode 44 is zero, but a voltage set in advance for each particle size range of the charged fine particles P may be applied to the counter electrode 44.
  • FIG. 5 is a graph showing the relationship between the particle size of the fine particles and the transmittance when the voltage is changed with a flow channel thickness of 0.1 mm.
  • the voltage V1 is zero, the fine particles 16 having a particle diameter of 10 to 20 nm hardly pass through the flow path (that is, are easily collected).
  • the voltage V1 is the predetermined voltage Va (> 0)
  • fine particles having a particle size of 10 to 50 nm are unlikely to pass through the flow path (that is, are easily collected), and the voltage V1 is equal to the predetermined voltage Vb (> 0).
  • Va fine particles having a particle size of 10 to 100 nm hardly pass through the flow path (that is, are easily collected). Therefore, when it is desired to detect the number of fine particles having a particle size of 10 to 20 nm, the voltage V1 is set to zero, and when it is desired to detect the number of fine particles having a particle size of 10 to 50 nm, the voltage V1 is set to a predetermined voltage Va.
  • the voltage V1 may be set to the predetermined voltage Vb. That is, by applying a preset voltage between the collection electrode 42 and the counter electrode 44 for each particle size range of the charged fine particles P, the number of particles in a desired particle size range can be detected. Further, by switching the set value of the voltage V1 stepwise with time, the number of particles in different particle size ranges can be grasped, and the particle size distribution can be obtained.
  • the collecting electrode 42 is provided as a single electrode, but a plurality of gaps may be provided from the upstream side to the downstream side of the gas flow.
  • An example is shown in FIG.
  • the fine particle number detector 310 of FIG. 6 includes three collection electrodes 421, 422, and 423.
  • the collection electrodes 421, 422, and 423 are connected to ammeters 521, 522, and 523, respectively, and the ammeters 521, 522, and 523 are connected to the number measuring devices 541, 542, and 543, respectively.
  • FIG. 6 the same components as those in the above-described embodiment are denoted by the same reference numerals.
  • the smaller charged fine particle P is collected by the upstream collecting electrode 421, and the larger charged fine particle P is collected by the downstream collecting electrode 423. Therefore, the charged fine particles P can be classified. Further, since the collection electrodes 421, 422, and 423 are provided with the number measuring devices 541, 542, and 543, the number of the small-sized fine particles 16, the number of the medium-sized fine particles 16, and the large-sized fine particles 16, respectively. Each number can be measured.
  • the number of charged fine particles P that have not been collected by the collection device 40 are collected before the gas discharge port 12b (upstream side of the gas flow).
  • the residual particle number detection device 70 has a pair of electric field generating electrodes 72 and 74 and a recovery electrode 76.
  • the pair of electric field generating electrodes 72 and 74 are embedded at positions facing each other on the wall of the vent pipe 12, and a voltage is applied so that a potential difference is generated between the electrodes 72 and 74. As a result, an electric field is generated between the electrodes 72 and 74.
  • the collection electrode 76 is disposed between the electrodes 72 and 74 and is exposed to the wall of the vent pipe 12.
  • the charged fine particles P that have passed through the collecting device 40 (see FIG. 1) and have reached between the electrodes 72 and 74 are attracted to the electrode 74 by the electric field generated between the electrodes 72 and 74, and in the middle It is recovered by a recovery electrode 76 installed in A number detection device 78 similar to the number detection device 50 (see FIG. 1) is connected to the collection electrode 76.
  • the number detection device 78 detects the number of charged fine particles P that have not been collected by the collection device 40. Therefore, the total number of particles contained in the gas can be known by adding the number of particles calculated by the two number detection devices 50 and 78. Further, the ratio of the number of fine particles having a particle diameter of 10 to 20 nm detected by the number detection device 50 to the total number of fine particles can be obtained.
  • the residual particle number detection device 70 may be configured by a mesh having an opening smaller than the interval between the collection electrode 42 and the counter electrode 44. In this case, since the charged fine particles P reach the mesh by Brownian motion, the particles can be collected without applying a voltage. Furthermore, if a voltage having a polarity opposite to that of the charged fine particles P is applied to the mesh, the charged fine particles P can be collected more reliably.
  • one collecting device 40 is provided in the hollow portion 12c.
  • n is an integer equal to or larger than 2
  • n in FIG. 3
  • a collecting device 40 collecting electrode 42 and counter electrode 44
  • the length of the hollow portion 12c in the gas flow direction can be reduced to 1 / n that of the above-described embodiment in order to obtain the same effect as that of the above-described embodiment, so that the particle number detector can be made compact.
  • the present invention can be used to detect the number of fine particles in exhaust gas from a power machine such as an automobile.
  • Fine particle number detector 12 vent tube, 12a gas inlet, 12b gas outlet, 12c hollow part, 16 fine particles, 18 charges, 22 needle electrodes, 24 counter electrode, 26 discharge power supply, 30 surplus charge removal device, 32 applied electrode, 34 ground electrode, 36 removal electrode, 40,240 collection device, 42,242,421-423 collection electrode, 44,244 counter electrode, 50,251,252 number detection device 52, 521 to 523 ammeter, 54, 541 to 543 number measuring device, 60, 160, 261, 262 heater, 70 remaining particle number detecting device, 72, 74 electric field generating electrode, 76 collecting electrode, 78 number detecting device, P Charged fine particles.

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Abstract

L'invention concerne un détecteur de nombre de microparticules 10 qui est pourvu d'un élément de génération de charge électrique 20, d'un dispositif de collecte 40, et d'un dispositif de détection de nombre 50. L'élément de génération de charge électrique 20 ajoute, à des microparticules 16 dans un gaz, des charges électriques générées par une décharge électrique pour convertir ainsi les microparticules en microparticules chargées P. Le dispositif de collecte 40 collecte, dans une électrode de précipitation 42, les microparticules chargées P qui passent entre l'électrode de précipitation 42 et une contre-électrode 44 tout en effectuant un mouvement brownien. Le dispositif de détection de nombre 50 détecte le nombre des microparticules 16 sur la base d'un courant variant en fonction du nombre de microparticules chargées P collectées par l'électrode de précipitation 42. Lorsque les microparticules 16 ou similaires sont déposées sur l'électrode de précipitation 42, un élément chauffant 60 brûle et élimine les dépôts par chauffage de l'électrode de précipitation 42.
PCT/JP2018/002891 2017-03-10 2018-01-30 Détecteur de nombre de microparticules Ceased WO2018163661A1 (fr)

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JP2019504387A JPWO2018163661A1 (ja) 2017-03-10 2018-01-30 微粒子数検出器

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JP2017045632 2017-03-10
JP2017-045632 2017-03-10

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WO2018163661A1 true WO2018163661A1 (fr) 2018-09-13

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119094A (en) * 1977-03-28 1978-10-18 Hitachi Ltd Particle size distribution measuring instrument
JP2006194882A (ja) * 2005-01-13 2006-07-27 Matter Engineering Ag エアゾール粒子の数濃度と平均直径を測定する方法と装置
JP2015108578A (ja) * 2013-12-05 2015-06-11 株式会社島津製作所 微粒子分級装置における分級部故障診断装置及び方法
WO2015146456A1 (fr) * 2014-03-26 2015-10-01 日本碍子株式会社 Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines
JP5906087B2 (ja) * 2008-11-25 2016-04-20 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 浮遊粒子を感知するセンサ
JP2016169707A (ja) * 2015-03-13 2016-09-23 トヨタ自動車株式会社 排気浄化システムの故障診断装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53119094A (en) * 1977-03-28 1978-10-18 Hitachi Ltd Particle size distribution measuring instrument
JP2006194882A (ja) * 2005-01-13 2006-07-27 Matter Engineering Ag エアゾール粒子の数濃度と平均直径を測定する方法と装置
JP5906087B2 (ja) * 2008-11-25 2016-04-20 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 浮遊粒子を感知するセンサ
JP2015108578A (ja) * 2013-12-05 2015-06-11 株式会社島津製作所 微粒子分級装置における分級部故障診断装置及び方法
WO2015146456A1 (fr) * 2014-03-26 2015-10-01 日本碍子株式会社 Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines
JP2016169707A (ja) * 2015-03-13 2016-09-23 トヨタ自動車株式会社 排気浄化システムの故障診断装置

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