[go: up one dir, main page]

WO2018152268A1 - Robot de manutention ayant de multiples effecteurs terminaux - Google Patents

Robot de manutention ayant de multiples effecteurs terminaux Download PDF

Info

Publication number
WO2018152268A1
WO2018152268A1 PCT/US2018/018266 US2018018266W WO2018152268A1 WO 2018152268 A1 WO2018152268 A1 WO 2018152268A1 US 2018018266 W US2018018266 W US 2018018266W WO 2018152268 A1 WO2018152268 A1 WO 2018152268A1
Authority
WO
WIPO (PCT)
Prior art keywords
robot
drive
forearms
effector
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2018/018266
Other languages
English (en)
Inventor
Martin Hosek
Scott Wilkas
Jacob Lipcon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Persimmon Technologies Corp
Original Assignee
Persimmon Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to KR1020217033169A priority Critical patent/KR20210129240A/ko
Priority to JP2019564390A priority patent/JP7196101B2/ja
Priority to KR1020197027024A priority patent/KR102373081B1/ko
Priority to CN201880021073.5A priority patent/CN110505945B/zh
Priority to KR1020247020112A priority patent/KR20240095478A/ko
Priority to KR1020237023423A priority patent/KR102677037B1/ko
Application filed by Persimmon Technologies Corp filed Critical Persimmon Technologies Corp
Priority to CN202311806883.0A priority patent/CN117754552A/zh
Publication of WO2018152268A1 publication Critical patent/WO2018152268A1/fr
Anticipated expiration legal-status Critical
Priority to JP2022115165A priority patent/JP7628522B2/ja
Priority to JP2024191279A priority patent/JP2025016638A/ja
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B25J17/02—Wrist joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B25J9/0021—All motors in base
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0084—Programme-controlled manipulators comprising a plurality of manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/046—Revolute coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/104—Programme-controlled manipulators characterised by positioning means for manipulator elements with cables, chains or ribbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/16—Programme controls
    • B25J9/1656—Programme controls characterised by programming, planning systems for manipulators
    • B25J9/1664—Programme controls characterised by programming, planning systems for manipulators characterised by motion, path, trajectory planning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/02—Arm motion controller
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y10S901/15—Jointed arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/14—Arm movement, spatial
    • Y10S901/16—Cartesian, three degrees of freedom
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/19—Drive system for arm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/27—Arm part
    • Y10S901/28—Joint
    • Y10S901/29—Wrist
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/30—End effector

Definitions

  • the exemplary and non-limiting embodiments relate generally to a material handling robot and, more particularly, to a material-handling robot having multiple end-effectors.
  • an example is provided in an apparatus comprising a robot drive comprising motors and coaxial drive shafts connected to the motors; a robot arm connected to the robot drive, where the robot arm comprises two upper arms, a first set of forearms connected to a first one of the upper arms, a second set of forearms connected to a second one of the upper arms and end effectors connected to respective ones or tne torearms, wnere tne trrst and second upper arms are connected to respective first and second ones of the coaxial drive shafts, where the first set of the forearms is mounted on the first upper arm and connected to a third one of the coaxial drive shafts by respective first and second drive belt assemblies, where the second set of the forearms is mounted to the second upper arm and connected to a fourth one of the coaxial drive shafts by respective third and fourth drive belt assemblies.
  • an example method comprises connecting a first upper arm to a first coaxial drive shaft of a robot drive; connecting a second upper arm to a second coaxial drive shaft of the robot drive; connecting a first set of forearms to the first upper arm, where a first drive belt arrangement connects a first one of the forearms of the first set of forearms to a third coaxial drive shaft of the robot drive, and where a second drive belt arrangement connects a second one of the forearms of the first set of forearms to the third coaxial drive shaft of the robot drive; connecting a second set of forearms to the second upper arm, where a third drive belt arrangement connects a first one of the forearms of the second set of forearms to a fourth coaxial drive shaft of the robot drive, and where a fourth drive belt arrangement connects a second one of the forearms of the second set of forearms to the fourth coaxial drive shaft of the robot drive; and connecting respective end effect
  • an example method comprises rotating a first coaxial drive shaft of a robot drive about a first axis in a first direction to rotate a first upper arm of a robot arm about the first axis; rotating a second coaxial drive shaft of the robot drive about the first axis, while the first coaxial drive shaft is being rotated, to move a first drive belt arrangement and a second drive belt arrangement and thereby rotate first and second forearms on the first upper arm; rotating a third coaxial drive shaft of the robot drive about the first axis in a second direction to rotate a second upper arm of a robot arm about the first axis; and rotating a forth coaxial drive shaft of the robot drive about the first axis to move a third drive belt arrangement and a fourth drive belt arrangement and thereby rotate third and fourth forearms on the second upper arm.
  • an example method may comprises rotating a first coaxial drive shaft of a robot drive about a first axis in a first direction to rotate at least one upper arm of a robot arm about the first axis; rotating a second coaxial drive shaft of the robot drive about the first axis, while the first coaxial drive shaft is being rotated, to move at least a first drive belt arrangement to rotate a .first forearm on the at least one upper arm and extend a first end effector on the first forearm from a retracted position towards an extended position; and rotating a third coaxial drive shaft of the robot drive about the first axis in a second direction to move at least a second drive belt arrangement to rotate a second forearm on the at least one upper arm and retain a second end effector on the second forearm at a retracted position while the first end effector is moved from the retracted position towards the extended position.
  • an example method comprises, based upon a desired path of a reference point from a start position of the reference point to an end position of the reference point, where the reference point is on an end effector on a robot arm, determine an included angle that corresponds to the start position and that corresponds to the end position, where the robot arm is connected to a robot drive having motors for moving the robot arm; calculating a trajectory in radial coordinates of the reference point on the end effector at least partially based upon the included angles; calculating corresponding angular coordinates of the reference point on the end effector, based on the calculated radial coordinates, so that the reference point on the end effector follows the desired path between the start position and the end position; using a modified formulation of inverse kinematics, converting the radial and angular coordinates of the reference point on the end effector supplemented with the included angles of the trajectory and corresponding angular velocity, and acceleration of the end effector into desired joint positions, velocities,
  • an example method comprises detennining by a controller a path of a reference point on an end effector of a robot arm between a start position and an end position of the reference point, where the robot arm is connected to a robot drive having motors for moving the robot arm, and where the controller comprises at least one processor and at least one non- transitory memory having computer code; the controller selecting a movement control mode from a plurality of different movement control modes, where the different movement control modes comprise: detennining that the path between the start position and the end position intersects a kinematic singularity of the robot arm, and not executing a move of the robot arm with the path, determining that the path between the start position and the end position passes outside a predetermined threshold distance from the kinematic singularity of the robot arm, and using a Cartesian trajectory generation scheme to move the robot arm, and deterrrrining that the path between the start position and the end position passes within the predetermined threshold distance from the kinematic singular
  • an example embodiment may be provided in an apparatus comprising at least one processor; and at least one non- transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to: determine by the at least one processor and the computer program code a path of a reference point on an end effector of a robot arm between a start position of the reference point and an end position of the reference point with trajectory, where the robot arm is connected to a robot drive having motors for moving the robot arm; select by the at least one processor and the computer program code a movement control mode from a plurality of different movement control modes, where the plurality of different movement control modes comprises: determining that the path etween the start position and the end position intersects a kinematic singularity of the robot arm and not executing a move of the robot arm with the path, determining that the path between the start position and the end position passes outside a predetermined threshold distance from the kinematic singularity of the robot arm
  • FIGs. 1A-1F illustrate examples of substrate movements in a substrate processing apparatus comprising features as described herein,
  • FIG. 2A is a top view of a robot in the substrate processing apparatus shown in Figs. 1A-1F,
  • FIG. 2B is a side view of the robot illustrated in Fig. 2 A.
  • FIGs. 2C-2D are schematic views illustrating some of the components of the robot shown in Figs. 2A-2B,
  • FIG. 3A-3K illustrate examples of substrate movements in a substrate processing apparatus comprising features as described herein
  • Fig. 4A is a top view of a robot in the substrate processing apparatus shown in Figs. 3A-3G,
  • Fig. 4B is a side view of the robot illustrated in Fig. 4A,
  • FIGS. 4C-4D are schematic views illustrating some of the components of the robot shown in Figs. 4A-4B,
  • FIGs. 5A-5H illustrate examples of substrate movements in a substrate processing apparatus comprising features as described herein,
  • FIG. 6A is a top view of a robot in the substrate processing apparatus shown in Figs. 5A-5H,
  • Fig. 6B is a side view of the robot illustrated in Fig. 6A,
  • FIG. 6C-6D are schematic views illustrating some of the components of the robot shown in Figs. 6A-6B,
  • FIGs. 7A-7H and 8A-8G illustrate examples of substrate movements in a substrate processing apparatus comprising features as described herein, .
  • FIGs. 9A-9B illustrate example nomenclature for lengths and angles between links of a robot arm
  • Figs. lOA-10B show examples of belt arrangements
  • Figs. 1 1A-1 1C illustrate movements of a straight-line path of an end effector A from an initial position to a final position
  • Figs. 11D-11F illustrate joint trajectory (acceleration, velocity and position for the move illustrated in Figs. 11 A-l 1 C over time
  • Figs. 12A-12B illustrate some examples of movement of the end effectors relative to one another as an example robot arm moves with different transmission ratios, respectively, to extend one of the end effectors
  • Figs. 13A-13B are schematic illustrations similar to Figs. 6C-6D of an alternate example embodiment of a robot
  • FIGs. 14A-14B are schematic illustrations similar to Figs. 6C-6D of an alternate example embodiment of a robot
  • FIGs. 15A-15B are schematic illustrations similar to Figs. 6C-6D of an alternate example embodiment of a robot
  • FIGS. 16A-16B are schematic illustrations similar to Figs. 6C-6D of an alternate example embodiment of a robot
  • FIGs. 17A-17B are schematic illustrations similar to Figs. 6C-6D of an alternate example embodiment of a robot;
  • FIGs. 18A-18T illustrate examples of substrate movements in a substrate processing apparatus comprising the robot shown in Figs. 17A-17B, and
  • FIGs. 19A and 19B are side views illustrating examples of robots having pass-through supports.
  • FIGs. 1A-1F there is schematic views of a semiconductor wafer processing system 10 incorporating features of an example embodiment.
  • FIGs. 1A-1F there is schematic views of a semiconductor wafer processing system 10 incorporating features of an example embodiment.
  • the features will be described with reference to the example embodiments shown in the drawings, it should be understood that features can be embodied in many alternate forms of embodiments.
  • any suitable size, shape or type of elements or materials could be used.
  • the example Semiconductor wafer processing system 10 may comprise, for example, one or more radial stations 12 and one or more offset stations 14.
  • a robot 100 may be provided to move one or more substrates S between or among the stations 12, 14 or other modules/stations (not shown) connected to an environment chamber 13.
  • the environment chamber 13 may provide a vacuum environment for example, and has the robot 100 extends through a bottom wall of the chamber 13 into the environment defined, at least partially, by the chamber 13.
  • the robot 100 and stations 12, 14 are connected to at least one controller 15 comprising at least one processor 17 and at least one memory 19 comprising software 21 to control operations of the system 10.
  • the system 10 may provide, for example, the following wafer- handling operations:
  • the robot 100 may comprise two end-effectors 102, 104.
  • Fig. 2 A shows a top view of the robot 100
  • Fig. 2B depicts a side view of the robot 100.
  • the robot 100 comprises a robot drive 106 unit and a robot arm 108.
  • the end effectors 102, 104 comprise respective areas A, B for supporting one of the substrates S thereon.
  • the end effectors are sometimes referenced by the letters A, B or A-D for example corresponding to the areas for supporting the substrates thereon.
  • the robot arm 108 in this example, comprises an upper arm 110, an upper forearm 1 11a connected to the end effector 102 which forms an up er end-effector in this example, and a lower forearm 111b connected to the end effector 104 which forms with a lower end-effector in this example.
  • the robot arm 108 may be driven by the robot drive unit 106.
  • the robot drive unit 106 comprises a three-axis spindle 112 with three coaxial shafts, e.g., an outer Tl shaft 1 14, a T2 shaft 116 and an inner T3 shaft 118.
  • the upper arm 110 of the robot arm 108 may be attached directly to the Tl shaft 114.
  • the upper forearm 111a may be coupled to the upper arm 110 via a rotary joint 120 (elbow joint), and actuated by the T2 shaft 116 using a belt arrangement 126.
  • the belt arrangement may comprise a shoulder pulley 122, which may be attached to the T2 shaft 116, elbow pulley 124, which may be attached to the upper forearm 111a, and a band, belt or cable 126a, which may transmit motion between the two pulleys 122, 124.
  • the belt arrangement may feature a constant or variable transmission ratio. As an example, a variable transmission ratio may be implemented using non-circular pulleys.
  • the lower forearm 11 lb may be coupled to the upper arm 110 via a rotary joint (elbow joint) 128, and its orientation may be controlled by the T3 shaft 118 using another band, belt or cable arrangement 130.
  • the belt arrangement may comprise a shoulder pulley B 132, which may be attached to the T3 shaft, an elbow pulley B 134, which may be attached to the forearm B, and a band, belt or cable 130b, which may transmit motion between the two pulleys 132, 134.
  • the belt arrangement may feature a constant or variable transmission ratio, for example, implemented through the use of non-circular pulleys.
  • the Tl, T2 and T3 shafts of the robot drive unit 106 may be rotated so that the upper end-effector 102 and lower end-effector 104 can access individually or simultaneously various offset and radial stations 12, 14, as illustrated diagrammatically in Figs. 3A-3G. Illustrations of example phased motions are shown in Figs. 3H-3K.
  • the arm 108 moves the end effector 102 (A) from a partially unfolded retracted position, e.g., in front of a station, to an extended position, e.g., in the station 14a as shown in Fig. 3D.
  • the other end-effector 104 (B), i.e., the end-effector that is not performing a move, may conveniently remain folded on top of the upper arm 110, thus desirably limiting its motion.
  • the arm 108 moves the end effector 102 (A) from. partially unfolded retracted position, e.g., in front of a station, to an extended position, e.g., in the station 14b as shown in Fig. 3E.
  • the other end -effector 104 (B), i.e., the end-effector that is not performing a move may conveniently remain folded on top of the upper arm 110, thus desirably limiting its motion.
  • the arm 108 moves the end effector 104 (B) from a partially unfolded retracted position, e.g., in front of a station, to an extended position, e.g., in the station 14a as shown in Fig. 3F.
  • the other end-effector 102 (A) i.e., the end- effector that is not performing a move, may conveniently remain folded on top of the upper arm 110, thus desirably limiting its motion.
  • the arm 108 moves the end effector 104 (B) from a partially unfolded retracted position, e.g., in front of a station, to an extended position, e.g., in the station 14b as shown in Fig. 3G.
  • the other end-effector 102 (A) i.e., the end-effector that is not performing a move, may conveniently remain folded on top of the upper arm 110, thus desirably limiting its motion.
  • the upper forearm 111a and lower forearm 11 lb are oriented 180 degrees from the angle of the upper arm 110 as shown in Fig. 3A.
  • the swing diameter is minimized, which is ideal for rotation motions between different stations.
  • the radius of the wafer center with respect to the robot center i this folded position defines a circular region inside of which it is not physically possible to position the payload center.
  • This circular locus of payload positions represents a kinematic singularity - the inverse kinematics calculations in the vicinity of this region are poorly conditioned (see Equations (22) to (29) for example details of inverse kinematics).
  • Prior art trajectory generation would calculate a one-dimensional trajectory profile in a normalized path variable, then apply this to the line segment connecting the start and end positions, mapping the path variable to intermediate points within that segment based a Cartesian coordinate space. Applying this technique to planned paths that bring the payload away from (extend move) or back to (retract move) this singularity will generally produce commanded angular velocities and accelerations that are too high and not actually achievable by the robot.
  • a joint space trajectory generation algorithm may be included. Given the start and end positions for a commanded move, the joint space trajectory generation algorithm may execute the following protocol:
  • V a P 1 -P c .
  • the joint space trajectory generation algorithm may be used.
  • the joint space trajectory may be evaluated in a selected grid of points to determine if it violates any of the motion constraints expressed in Cartesian coordinates (e.g. the maximum linear velocity and acceleration of the payload).
  • Cartesian coordinates e.g. the maximum linear velocity and acceleration of the payload.
  • This test employs direct (forward) kinematics formulae only, so it works regardless of the proximity of the singularity.
  • a direct kinematics formulae for example.
  • calculate a time scale factor to slow the motion enough to meet all constraints As an example, the following may be utilized in step (5). a.
  • the Cartesian velocity and acceleration constraints are:
  • acceleration -Jx 2 + y 2 — acceleration limir
  • the corresponding trajectory in the radial coordinate can be calculated directly.
  • the following approach may be utilized for this step. a.
  • the sign of the included angle indicates the handedness of the linkage (i.e., whether the elbow joint is to the left or right of the line connecting the shoulder joint to the payload center.)
  • the following method may be used.
  • the other end-effector i.e., the end-effector that is not performing a move, may conveniently remain folded on top of the upper arm, thus desirably limiting its motion.
  • FIGs. 11A-11C an example is shown of a move that starts at the singularity and extends to a station on a straight-line path. This description is made with reference to the robot shown in Fig. 2A-2D, but is equally applicable to at least a portion of at least some of the other robots described herein.
  • Fig. 11 A shows the initial position
  • Fig. I IB shows the final extended position
  • Fig. l lC shows the path from the initial position to the final position with some of the intermediate arm positions highlighted.
  • Fig. 11A shows a starting point where the robot arm has both the end effectors A, B are retracted
  • FIG. 11C shows a series of snap-shots in time of the motion of the robot arm and end effectors between the positions shown in Figs. 11 A and 1 IB.
  • Fig. 11C also shows the movement segment of the first end effector A from its retracted position to its extended position where the movement segment is a straight line into one of the offset stations.
  • Fig. 11C shows the movement segment of the first end effector A from its retracted position to its extended position where the movement segment is a straight line into one of the offset stations.
  • the joint of the forearms with the upper arm merely follows a circular path about the center axis of the robot drive, and the payload center of the second end effector (and a substrate on the second end effector) also merely follows a circular path about the center axis of the robot drive.
  • the trajectory calculated in terms of the included angle, in this particular example defined as 0i(t)-0 2 (t), is shown in Figure 1 ID; in this particular example, jerk and acceleration limits have been applied as seen in the acceleration plot.
  • the corresponding scaled trajectory in terms of the drive shaft angles is shown in Figs. HE, and the corresponding scaled trajectory in terms of the Cartesian coordinates is shown in Fig.
  • the acceleration plot shows that the scaling has been applied so that the total acceleration, i.e., the vector sum of the x- and y-components, does not exceed a given limit (dashed line). Consequently, the motion complies with constraints in both joint space (i.e., included angle space) and Cartesian space.
  • Move segments can be calculated and executed in sequence. Move segments may be blended together to decrease total move time by eliminating stopping at the waypoints.
  • a sequence of move segments may include some calculated using the joint space trajectory generation scheme described above and others calculated by any other method. The number of move segments, the types of the move segments, and the order of move segments types is not subject to any restriction.
  • the upper arm of the robot arm may be driven by a robot drive unit with a single-axis spindle, and the forearms may be driven by a pair of actuators attached to the upper arm.
  • one actuator may be configured to drive the upper forearm, and the other actuator may be configured to drive the lower forearm.
  • the actuators may be connected to the forearms directly, similarly to the example configuration of Figs. 15A-15B, or they may be coupled to the forearms via a band, belt or cable arrangement, similarly to the example configuration of Figs. 16A-16B.
  • FIGs. 4A-4C Another example embodiment of the robot is shown in Figs. 4A-4C.
  • the robot 200 comprises two end-effectors 202, 204.
  • Fig. 4A shows a top view of the robot 200 and
  • Fig. 4B depicts a side view of the robot 200,
  • the robot 200 comprises a robot drive unit 206 and a robot arm 208.
  • the robot arm 208 features linkages, such as a left linkage 210 and a right linkage 212 for example..
  • the left linkage 210 may consist of a left upper arm 214 and a left forearm 216 with the left end- effector 202 having the substrate support area A.
  • the right linkage 212 may consist of a right upper arm 218 and a right forearm 220 with the right end-effector 204 having the substrate support area C.
  • FIG. 4C-4D An example internal arrangement of the robot is depicted diagrammatically in Figs. 4C-4D.
  • the robot arm 208 may be driven by the robot drive unit 206,
  • the robot drive unit 206 comprises a four-axis spindle 222 with four coaxial shafts, e.g., an outer Tl shaft 224, a T2 shaft 226, a T3 shaft 228 and an inner T4 shaft 230.
  • the right upper arm 218 of the robot arm 208 may be attached directly to the Tl shaft 224.
  • the right forearm 220 may be coupled to the right upper arm 218 via a rotary joint (right elbow joint) 232, and actuated by the T2 shaft 226 using a belt arrangement 234.
  • the belt arrangement 234 may comprise a right shoulder pulley 236, which may be attached to the T2 shaft, a right elbow pulley 238, which may be attached to the right forearm 220, and a band, belt or cable, which may transmit motion between the two pulleys 236, 238.
  • the belt arrangement 234 may feature a constant or variable transmission ratio.
  • variable transmission ratio may be selected so that the orientation of the right forearm 220 with the right end- effector 204 changes in a predefined manner as a function of the relative position of the right upper arm 218 and the T2 shaft.
  • any other suitable arrangement may be used.
  • the left upper arm 214 of the robot arm 208 may be attached directly to the T3 shaft 228.
  • the left forearm 216 may be coupled to the left upper arm 214 via a rotary joint 240 (left elbow joint), and actuated by the T4 shaft using a belt arrangement 242.
  • the belt arrangement 242 may comprise a left shoulder pulley 244, which may be attached to the T4 shaft, a left elbow pulley 246, which may be attached to the left forearm 216, and a band, belt or cable, which may transmit motion between the two pulleys 244, 246.
  • the belt arrangement 242 may feature a constant or variable transmission ratio.
  • variable transmission ratio may be selected so that the orientation of the left forearm 216 with the left end-effector 202 changes in a predefined manner as a function of the relative position of the left upper arm 210 and the T4 shaft.
  • any other suitable arrangement may be used. Note that although the example embodiment of Figs. 4A-4C shows end-effectors 202 and 204 vertically offset from each other, the end-effectors may be in the same plane.
  • the Tl , T2, T3 and T4 shafts of the robot drive unit 206 may be rotated so that the left end-effector 202 and right end-effector 204 can access individually or simultaneously various offset and radial stations 12, 14, as illustrated diagrammatically in Figs. 5A-5H.
  • the robot may feature four end-effectors, which may operate in stacked and side-by-side arrangements.
  • the upper arms of the robot arm may be driven by a robot drive unit with a two-axis spindle, and the forearms may be driven by a pair of actuators, one actuator attached to each of the two upper arms of the robot arm.
  • one actuator may be attached to the left upper arm and drive the left forearm, and the other actuator may be attached to the right upper arm and drive the right forearm.
  • the actuators may be connected to the forearms directly, similarly to the example configuration of Figs. 15A-15B, or they may be coupled to the forearms via a band, belt or cable arrangement, similarly to the example configuration of Figs. 16A-16B.
  • Figs. 6A-6C another example embodiment of the robot is shown.
  • the robot 300 comprises four end-effectors 302, 304, 306, 308.
  • Fig. 6A shows a top view of the robot 300
  • Fig. 6B depicts a side view of the robot 300.
  • the robot 300 in this example, comprises a robot drive unit 310 and a robot arm 312.
  • the robot arm 312 may feature linkages such as a left linkage 314 and a right linkage 316 for example.
  • the left linkage 314 may consist of a left upper arm 318, a left upper forearm 320 with a left upper end-effector 302 having the substrate support area A and a left lower forearm 322 with a left lower end-effector 304 having the substrate support area B.
  • the right linkage 316 may consist of a right upper arm 324, a right upper forearm 326 with a right upper end-effector 306 having the substrate support area C and a right lower forearm 328 with a right lower end-effector 308 having the substrate support area D.
  • FIG. 6C-6D An example internal arrangement of the robot 300 is depicted diagrammatically in Figs. 6C-6D (note that the orientations of the end-effectors with respect to the upper arms in diagram (c) may neither correspond to the configuration shown in Fig. 6 A nor represent any practical arrangement; the orientations were selected solely to visualize the internal arrangement of the robot in a clear manner, and the end-effectors may be angularly offset from the depicted orientations as required by the application at hand).
  • the robot arm 312 may be driven by the robot drive unit 3 10 with a four-axis spindle 330 with four coaxial shafts, e.g., an outer Tl shaft 332, a T2 shaft 334, a T3 shaft 336 and an inner T4 shaft 338.
  • a four-axis spindle 330 with four coaxial shafts, e.g., an outer Tl shaft 332, a T2 shaft 334, a T3 shaft 336 and an inner T4 shaft 338.
  • the left upper arm 318 of the robot arm 312 may be attached directly to the T3 shaft.
  • the left upper forearm 320 may be coupled to the left upper arm 318 via a rotary joint (left elbow joint) 340, and actuated by the T4 shaft using a belt arrangement 342.
  • the belt arrangement 342 may comprise a left shoulder pulley 344, which may be attached to the T2 shaft, a left elbow pulley 346, which may be attached to the left upper forearm 318, and a band, belt or cable, which may transmit motion between the two pulleys 344, 346.
  • the belt arrangement 342 may feature a constant or variable transmission ratio.
  • variable transmission ratio may be selected so that the orientation of the left upper forearm 320 with the left upper end-effector 302 changes in a predefined manner as a function of the relative position of the left upper arm 318 and the T4 shaft.
  • any other suitable arrangement may be used.
  • the left lower forearm 322 may be coupled to the left upper arm 318 via a rotary joint (left elbow joint) 348, and its orientation may be controlled by the T4 shaft using another band, belt or cable arrangement 350.
  • the belt arrangement 350 may be configured in a crossover configuration, as illustrated in Fig. 6D. It may comprise a shoulder pulley 352, which may be attached to the T4 shaft, a left elbow pulley 354, which may be attached to the left lower forearm 322, and a band, belt or cable, which may transmit motion between the two pulleys 352, 354.
  • the belt arrangement 350 may feature a constant or variable transmission ratio.
  • variable transmission ratio may be selected so that the orientation of the left lower forearm 322 with the left end-effector 304 changes in a predefined manner as a function of the relative position of the left upper arm 318 and the T4 shaft.
  • any other suitable arrangement may be used.
  • the right upper arm 324 of the robot arm 312 may be attached directly to the Tl shaft.
  • the right upper forearm 326 may be coupled to the right upper arm 324 via a rotary joint (right elbow joint) 356, and actuated by the T2 shaft using a belt arrangement 358.
  • the belt arrangement 358 may comprise a shoulder pulley 360, which may be attached to the T2 shaft, a right elbow pulley 362, which may be attached to the right upper forearm 326, and a band, belt or cable, which may transmit motion between the two pulleys 360, 362.
  • the belt arrangement 358 may feature a constant or variable transmission ratio.
  • variable transmission ratio may be selected so that the orientation of the right upper forearm 326 with the right end-effector 306 changes in a predefined manner as a function of the relative position of the right upper arm 324 and the T2 shaft.
  • any other suitable arrangement may be used.
  • the right lower forearm 328 may be coupled to the right upper arm 324 via a rotary joint (right elbow joint) 364, and its orientation may be controlled by the T2 shaft using another band, belt or cable arrangement 366.
  • the belt arrangement 366 may be configured in a crossover configuration, as illustrated in Fig. 6D.
  • the belt arrangement 366 may feature a constant or variable transmission ratio.
  • the variable transmission ratio may be selected so that the orientation of the right lower forearm 328 with the right lower end-effector 308 changes in a predefined manner as a function of the relative position of the right upper arm 324 and the T2 shaft.
  • any other suitable arrangement may be used.
  • Figs. 6A-6C shows end- effectors 302 and 306 vertically offset from each other, the end- effectors may be in the same plane if the geometry of the arm, the transmission ratios of the band drives and/or the sequence of operation of the arm allow the end- effectors to clear each other. The same applies to end-effectors 304 and 308.
  • the change in orientation of end-effector i can be expressed as:
  • ns the transmission ratio associated with end-effector i
  • ⁇ 2 change in orientation of drive shaft 332 or 334 (Tl or T2).
  • the transmission ratio n* may be positive for end-effector 302 (A) and negative for end-effector 304 (B), reflecting the crossover belt configuration.
  • the change in orientation of the left upper arm 318, which is driven by drive shaft 336 (T3), and the change in orientation of drive shaft 332 or 334 (Tl or T2) can be calculated as:
  • ⁇ ,( ⁇ ) ⁇ 1 ( ⁇ ) - ⁇ ⁇
  • Equations (1) to (5) may be combined to obtain the following expression for orientation of end-effectors 302 (A) and 304 (B) as a function of orientations of drive shafts Tl and T2:
  • ⁇ 4 ( ⁇ ) ⁇ 4 ( ⁇ ) - ⁇ .
  • end-effector A may not move from the initial retracted position to the final extended position along a straight line; as explained later, drive shaft T2 will need to be rotated in coordination with drive shaft Tl in order to extend end-effector A along a straight-line path; however, the total rotation of drive shaft T2 between the initial position and the final position will remain zero.
  • end-effector C may not move from the initial retracted position to the final extended position along a straight line; as explained later, drive shaft T4 will need to be rotated in coordination with drive shaft T3 in order to extend end-effector C along a straight-line path; however, the total rotation of drive shaft T4 between the initial position and the final position will remain zero.
  • Equations (7) to (9) the direct kinematics associated with end- effectors 302, 304 (A and B) (i.e., the relationship between the positions of end- effectors 302, . 304 and angular orientations of drive shafts Tl and T2) may be summarized as follows (see Table 1 for nomenclature):
  • the direct kinematic equations (12) to (16) may be used to determine the ' coordinates of end-effectors 302, 304 (A, B) based on angular positions of drive shafts Tl and T2.
  • Equations (9) to (11) have been utilized to obtain the above expressions.
  • the direct kinematic equations (17) to (21) may be used to determine the coordinates of end-effectors 306, 308 (C, D) based on angular positions of drive shafts T3 and T4.
  • equations (14) and (19) need to be replaced by relationships that represent the characteristics of the specific band arrangement(s).
  • a look-up table for ⁇ and ⁇ as a function of ( ⁇ 2 - ⁇ ) and another look-up table for ⁇ and A9D as a function of ( ⁇ 4 - ⁇ 3) may be conveniently used.
  • T s (t) atan[y i (t)/x i (t)] > j ⁇ 302 or 304 (A or B) (27)
  • ⁇ 4 ( ⁇ ) ⁇ 40 +[ ⁇ ⁇ ( - ⁇ ⁇ 0 + ( ⁇ ⁇ -1)( ⁇ 3 ( ⁇ ) - ⁇ 30 )]/ ⁇ ⁇ (37)
  • the left lower end-effector 304 may rotate out of the way as the left upper end-effector 302 extends to the station 14a.
  • the left upper end-effector 302 may be retracted by rotating the Tl and T2 shafts backward in a similar manner.
  • drive shaft Tl when end-effector 302 extends, drive shaft Tl may be actuated to rotate by 90 degrees in the clockwise direction and drive shaft T2 is actuated to rotate in a coordinated manner so that end-effector A follows the desired path; in this particular example, the total rotation of drive shaft T2 is zero, i.e., the initial and final angular positions of drive shaft T2 are the same.
  • Drive shaft Tl may be actuated to rotate by 90 degrees in the counterclockwise direction and drive shaft T2 is actuated to rotate in an opposite manner when end-effector 302 retracts.
  • shafts Tl and T2 may rotate in a coordinated manner in accordance with the inverse kinematic equations for the left lower end-effector 304 (Equations (22) to (27) and (29)).
  • the left upper end-effector 302 may swing out of the way as the left lower end-effector 304 extends to the station 14a.
  • the left lower end-effector 304 may be retracted by rotating the Tl and T2 shafts backward in a similar manner.
  • drive shaft Tl when end-effector 304 extends, drive shaft Tl may be actuated to rotate by 90 degrees in the clockwise direction and drive shaft T2 is actuated to rotate by 180 degrees in the same direction.
  • the two drive shafts may be actuated to rotate by the same . amounts in the opposite direction when end-effector 304 retracts.
  • the above operations may be utilized to pick/place a wafer or substrate from/to an offset station 14.
  • a sequence of a pick operation with one end-effector, such as 302 for example, followed by a place operation with the other end-effector, such as 304 for example, may be used to quickly exchange wafers/substrates at the offset station (rapid exchange operation).
  • the left upper end-effector 302 may be extended to a station, pick a wafer, and retract.
  • the left lower end- effector 304 which may carry another wafer, niay then extend to the same station, place the wafer, and retract.
  • shafts T3 and T4 may need to be rotated in a coordinated manner. More specifically, the inverse kinematic equations for the right upper end-effector 306 (Equations (30) to (36)) may be utilized to determine the orientation of the T3 and T4 shafts as a function of the position of the right upper end-effector 306. As illustrated in the figure, the right lower end-effector 308 may rotate out of the way as the right upper end-effector 306 extends to the station.
  • the right upper end-effector 306 may be retracted by rotating the T3 and T4 shafts backward in a similar manner.
  • ⁇ ⁇ 315
  • Giext 45
  • Oce tc 90 deg
  • Ooextc 270 deg.
  • drive shaft T3 when end-effector 306 extends, drive shaft T3 may be actuated to rotate by 90 degrees in the counterclockwise direction and drive shaft T4 is actuated to rotate in a coordinated manner so that end-effector 306 (C) follows the desired path; in this particular example, the total rotation of drive shaft T4 is zero, i.e., the initial and final angular positions of drive shaft T4 are the same..
  • Drive shaft T3 may be actuated to rotate by 90 degrees in the clockwise direction and drive shaft T4 is actuated to rotate in an opposite manner when end-effector 306 retracts.
  • shafts T3 and T4 may rotate in a coordinated manner in accordance with the inverse kinematic equations for the right lower end-effector 308 (Equations (30) to (35) and (37)).
  • the right upper end-effector 306 may swing out of the way as the right lower end-effector 308 extends to the station 14b.
  • the right lower end-effector 308 may be retracted by rotating the T3 and T4 shafts backward in a similar manner.
  • the two drive shafts may be actuated to rotate by the same amounts in the opposite direction.when end-effector 308 retracts.
  • the above operations may be utilized to pick place a wafer from/to an offset station.
  • a sequence of a pick operation with one end-effector followed by a place operation with the other end-effector may be used to quickly exchange a wafer at an offset station (rapid exchange operation).
  • the right upper end- effector 306 may be extended to a station, pick a wafer, and retract.
  • the right lower end-effector 308, which may carry another wafer, may then extend to the same station 14b, place the wafer, and retract.
  • the left upper end-effector 302 and the right upper end-effector 306 may also be extended (retracted) simultaneously to (from) the respective left and right offset stations by performing simultaneously the extension (retraction) operations described above with respect to Figs. 7E and 7F. This is illustrated in Fig. 7C.
  • the placement positions for the left upper end-effector 302 and the right upper end-effector 306 may be independently adjusted (see Fig. IF).
  • this functionality may be conveniently utilized to compensate for any misalignment of the two wafers on the robot end-effectors and deliver accurately the two wafers to the desired locations in the respective stations.
  • the left lower end-effector ' 304 and the right lower end-effector 308 may also be extended (retracted) simultaneously to (from) the respective left and right offset stations 14a, 14b by performing simultaneously the extension (retraction) operations described above with respect to Fig. 7G and 7H. This is illustrated in Fig, 7D.
  • the placement positions for the left lower end-effector 304 and the right lower end-effector 308 may be independently adjusted. As explained earlier, this functionality may be used, for instance, to compensate for any misalignment of the two wafers on the robot end-effectors and dehver accurately the two wafers to the desired locations in the respective stations.
  • a sequence of a pick operation with one pair of end-effectors, for example end-effectors 302 and 306, followed by a place operation with the other pair of end-effectors, in this particular example end-effectors 304 and 308, may be used to quickly exchange a pair of wafers at a pair of side-by-side offset stations, such as 14a and 14b for example (rapid exchange operation in a pair of side-by-side offset stations).
  • the left upper end-effector 302 and the right upper end-effector 306 may be extended to a pair of side-by-side offset stations, pick a pair of wafers, and retract from the stations.
  • the left lower end-effector 304 and the right lower end-effector 308, which may carry another pair of wafers, may then extend to the same pair of stations, place a different pair of wafers, respectively, and retract from the stations.
  • Each of the end-effectors of the robot may also access radially oriented stations (Fig. 1 A).
  • shafts Tl and T2 may rotate in a coordinated manner in accordance with the inverse kinematic equations for the left upper end-effector 302.
  • the left lower end-effector 304 may rotate out of the way as the left upper end-effector 302 extends to the station 12, The left upper end-effector 302 may be retracted by rotating the Tl and T2 shafts backward in a similar manner.
  • shafts Tl and T2 may rotate in a coordinated manner in accordance with the inverse kinematic equations for the left lower end-effector 304.
  • the left upper end-effector 302 may swing out of the way as the left lower end-effector 304 extends to the station 12.
  • the left lower end-effector 304 may be retracted by rotating the Tl and T2 shafts backward in a similar manner.
  • the above operations may be utilized to pick place a wafer from/to a radial station 12, Again, a sequence of a pick operation with one end-effector followed by a place operation with the other end-effector may be used to quickly exchange a wafer at a radial station (rapid exchange operation).
  • shafts T3 and T4 may rotate in a coordinated manner in accordance with the inverse kinematic equations for the right upper end-effector 306.
  • the right lower end-effector 308 may rotate out of the way as the right upper end-effector 306 extends to the station 12.
  • the right upper end-effector 306 may be retracted by rotating the T3 and T4 shafts backward in a similar manner.
  • shafts T3 and T4 may rotate in a coordinated manner in accordance with the inverse kinematic equations for the right lower end-effector 308.
  • the right upper end-effector 306 may swing out of the way as the right lower end-effector 308 extends to the station 12.
  • the right lower end-effector 308 may be retracted by rotating the T3 and T4 shafts backward in a similar manner.
  • the above operations may be utilized to pick/place a wafer from to a radial station 12.
  • a sequence of a pick operation with one end-effector followed by a place operation with the other end-effector may be used to quickly exchange a wafer at an offset station (rapid exchange operation).
  • the left upper end-effector 302 and the right upper end-effector 306 may also be extended (retracted) simultaneously to (from) a pair of -vertically stacked radial stations 12 by performing simultaneously the extension (retraction) operations described above with respect to Figs. 8D and 8E. This is illustrated in Fig. 8B.
  • the placement positions for the left upper end-effector 302 and the right upper end-effector 306 may be independently adjusted. As an example, this functionality may be conveniently utilized to compensate for any misalignment of the two wafers on the robot end-effectors and deliver accurately the two wafers to the desired locations in the respective radial stations.
  • the left lower end-effector 304 and the right lower end-effector 308 may also be extended (retracted) simultaneously to (from) a pair of vertically stacked radial stations by performing simultaneously the extension (retraction) operations described above with respect to Figs. 8F and 8G. This is illustrated in Fig. 8C.
  • the placement positions for the left lower end-effector 304 and the right lower end-effector 308 may be independently adjusted. As explained earlier, this functionality may be used, for instance, to compensate for any misalignment of the two wafers on the robot end-effectors and deliver accurately the two wafers to the desired locations in the respective radial stations.
  • a sequence of a pick operation with one pair of end- effectors, for example end-effectors 302 and 306, followed by a place operation with the other pair of end-effectors, in this particular example end-effectors 304 and 308, maybe used to quickly exchange a pair of wafers at a pair of vertically stacked radial stations (rapid exchange operation in a pair of stacked radial stations).
  • the left (right) lower end-effector may rotate out of the way as the left (right) upper end- effector extends to a station and, similarly, the left (right) upper end-effector may rotate out of the way as the left (right) lower end-effector extends to a station.
  • the range of the rotation may be desirably reduced by utilizing band arrangements with variable transmission ratios between the shoulder pulleys and the elbow pulleys of the robot arm.
  • any of the belt arrangement may feature a constant or variable transmission ratio, for example, implemented through the use of circular and/or non-circular pulleys. Figs.
  • 10A-10B show some examples of a circular pulley 400 and non-circular pulleys 402, 404, 406 connected by bands/belts 408. These are merely examples and should not be considered as limiting. Other suitably sized and shaped non-circular pulleys could be provided. As an example, one or two non- circular pulleys may be employed for this purpose such as described in U.S. Patent
  • variable transmission ratios may be selected to control the orientations of the left (right) end-effectors as a function of the relative position of the left (right) upper arm and the shoulder pulley that drives the left (right) end-effectors.
  • the variable transmission ratios may be selected so that the left lower end-effector 304 rotates quickly out of the way and then slows down as the left upper 302 end-effector extends out toward a station. This is illustrated in the example of Figs. 12A-12B. Fig.
  • FIG. 12A and 12B shows a series of snap-shots in time of the motion of the robot arm 108 and end effectors similar to the positions shown in Fig, l lC. This description is made with reference to the robot shown in Fig. 2A-2D, but is equally applicable to at least a portion of at least some of the other robots described herein.
  • the first end effector A is moved from its retracted position to its extended position where the movement segment is a straight line into one of the offset stations.
  • Fig. 12B shows a similar movement to Fig. 12A, but with a different transmission ratio.
  • Fig. 12A constant transmission ratio 3 ⁇ 4 of -1 is utilized, resulting in 180-degree rotation of end-effector B.
  • Fig. 12B the transmission ratio changes gradually from -1 to -0.25, reducing the rotation of end-effector B to approximately 145 degrees.
  • the upper arms of the robot arm may be driven by a robot drive unit with a two -axis spindle, and the forearms of the robot arm may be driven by actuators attached to the upper arms.
  • a robot drive unit with a two -axis spindle the forearms of the robot arm may be driven by actuators attached to the upper arms.
  • FIGs. 13A-13B An example of such an arrangement is depicted diagrammatically in Figs. 13A-13B.
  • the left upper arm 1318 of the robot arm may be connected to a shaft TIL of the robot drive unit, and the left forearms 320, 322 may be coupled to a shaft T2L driven by an actuator, for example a motor 1302, which may be attached to the left upper arm.
  • the right upper arm 1324 of the robot arm may be connected to a shaft T1R of the robot drive unit, and the right forearms 326, 328 may be coupled to a shaft T2R driven by an actuator, for example a motor 1304, which may be attached to the right upper arm.
  • an actuator for example a motor 1304, which may be attached to the right upper arm.
  • the upper arms and forearms of the robot arm may be actuated independently by a robot drive unit with a six-axis spindle featuring six independently driven shafts.
  • a robot drive unit with a six-axis spindle featuring six independently driven shafts.
  • FIGs. 14A- 14B An example of this is shown in Figs. 14A- 14B.
  • a robot drive 1410 is provided comprising a six-axis spindle featuring six independently driven shafts.
  • the robot arm 1408 has upper arms 318, 324, forearms 320, 322, 326, 328, belt arrangements 342, 350, 358, 366 and end effectors A-D similar to that shown in Figs. 6C-6D.
  • the upper arms of the robot arm may be driven by a robot drive unit with a two-axis spindle, and the forearms may be driven by two pairs of actuators, one pair attached to each of the two upper arms of the robot arm.
  • one pair of actuators may be attached to the left upper arm and drive the left forearms
  • the other pair of actuators may be attached to the right upper arm and drive the right forearms.
  • the actuators may by connected to the forearms directly, as depicted diagrammatically in Figs. 15A-15B, or they may be coupled to the forearms via a band, belt or cable arrangement, as illustrated diagrammatically in Figs. 16A-16B.
  • the actuators may be sealed, powered, cooled and communicated with utilizing the approach described in U.S. Patent Application Publication No. 2016/0064263 which is hereby incorporated by reference in its entirety. Figs.
  • 15A-15B show an example of a robot drive having a first section with two motors 1502, 1503 and two coaxial drive shafts Tl , T2 connected to two upper arms 318, 324, first and second forearms 320, 322 rotatably connected to the first upper arm 318 with motors 1506, 1508 to rotate the first and second forearms 320, 322 on the first upper arm 318, and third and fourth forearms 326, 328 rotatably connected to the second upper arm 324 with motors 1510, 1512 to rotate the third and fourth forearms 326, 328 on the second upper arm 324.
  • 16A-16B show an example of a robot drive having a first section with two motors 1502, 1503 and two coaxial drive shafts Tl , T2 connected to two upper arms 318, 324, first and second forearms 320, 322 rotatably connected to the first upper arm 318 with motors 1506, 1508 connected to the band drive arrangements 1602, 1604 to rotate the first and second forearms 320, 322 on the first upper arm 318, and third and fourth forearms 326, 328 rotatably connected to the second upper arm 324 with motors 1510, 1512 connected to the band drive arrangements 1606, 1608 to rotate the third and fourth forearms 326, 328 on the second upper arm 324.
  • the upper arms 318a, 324a may have different joint-to-joint lengths 318b, 324b, as depicted diagrammatically in the example of Figs. 17A-17B.
  • the joint-to-joint lengths of the upper arms may be selected so that one upper arm can cross over the other upper arm, e.g., from the left- hand side to the right-hand- side or from the right-hand side to the left-hand side. This may allow the robot to pick/place wafers from/to left and right stations, as depicted diagrammatically in Figs.
  • the two pairs of end-effectors may have different vertical spacing, which may allow the robot to extend two end-effectors simultaneously in the same plane (at the same vertical elevation) while the other two end- effectors may rotate out of the way, clearing each other in different planes (at different vertical elevations).
  • the upper arms may feature the same joint-to-joint length and the end-effector(s) carried by one upper arm may be elevated on a structural support configured so that the other upper arm and the end-effector(s) associated with it may pass through.
  • Figs. 19A- 19B An example of such an embodiment is illustrated in Figs. 19A- 19B where Fig. 19A shows a robot with two end-effectors and a pass-through support 1902 and Fig. 19B depicts a robot with four end-effectors and pass-through supports 1904, 1906.
  • the robot drive unit may include one or more vertical lift mechanisms to control the vertical elevation of the robot arm, which may be used to access stations at different elevations, compensate for the vertical distance between the end-effectors of the robot arm, and facilitate material pick/place operations.
  • the robot drive unit 206, 310 may include a single vertical lift mechanism to control the elevation of the Tl, T2, T3 and T4 shafts.
  • the robot drive unit may include one vertical mechanism to control the elevation of the Tl and T2 shafts, thus controlling independently the elevation of the left linkage of the robot arm, and another vertical mechanism to control the elevation of the T3 and T4 shafts at least partially separately from the elevation of the Tl and T2 shafts, thus controlling independently the elevation of the right linkage of the robot arm.
  • One vertical mechanism to control the elevation of the Tl and T2 shafts thus controlling independently the elevation of the left linkage of the robot arm
  • another vertical mechanism to control the elevation of the T3 and T4 shafts at least partially separately from the elevation of the Tl and T2 shafts, thus controlling independently the elevation of the right linkage of the robot arm.
  • the vertical mechanisms may be implemented using two motors, each driving a ball-screw, as illustrated in the example of Fig. 17B.
  • a single stationary ball screw may be attached to the frame of the robot drive unit and two motors, one attached to the Tl and T2 shaft spindle and the other attached to the T3 and T4 shaft spindle, may drive ball screw nuts riding on the stationary ball screw.
  • one of the two spindles may be driven with respect to the frame of the robot drive unit, and the other spindle may be driven with respect to the first spindle; for instance, the Tl and T2 shaft spindle may be driven with respect to the T3 and T4 shaft spindle, and the T3 and T4 shaft spindle may be driven with respect to the robot frame.
  • any other suitable actuation mechanism may be used, including, but not limited to, lead screws, linear motors, linkage mechanisms, scissor mechanisms, hydraulic actuators, pneumatic actuators and their combinations.
  • the robot may feature the following example configurations and their combinations: -
  • the left upper arm may be located below the right upper arm.
  • the left upper end-effector may be located above the left upper arm while the left lower end-effector may be located below the left upper arm.
  • the left upper end-effector and the left lower end-effector may be located below the left upper arm.
  • the right upper end-effector may be located above the right upper arm while the right lower end-effector may be located below the right upper arm.
  • the right upper end-effector and the right lower end-effector may be located below the left upper arm.
  • the left upper end-effector may be located in a substantially the same plane as the right upper end-effector.
  • the left upper end-effector may be located below the right upper end-effector.
  • the left lower end-effector may be located in a substantially the same plane as the right lower end-effector.
  • the left lower end-effector may be located below the right lower end-effector.
  • any suitable configuration of the upper arms and end-effectors may be used.
  • An example embodiment may be provided in an apparatus comprising: a robot drive comprising motors and coaxial drive shafts connected to the motors; a robot arm connected to the robot drive, where the robot arm comprises two upper arms, a first set of forearms connected to a first one of the upper arms, a second set of forearms connected to a second one of the upper arms and end effectors connected to respective ones of the forearms, where the first and second upper arms are connected to respective first and second ones of the coaxial drive shafts, where the first set of the forearms is mounted on the first upper arm and connected to a third one of the coaxial drive shafts by respective first and second drive belt assemblies, where the second set of the forearms is mounted to the second upper arm and connected to a fourth one of the coaxial drive shafts by respective third and fourth drive belt assemblies.
  • the first set of forearms may be connected to the first ' upper arm at a common axis or rotation.
  • the first and second drive belt assemblies may each comprise at least one set of pulleys and a drive belt between the pulleys, and where at least one of the pulleys is a non-circular pulley.
  • the first and second drive belt assemblies maybe configured to move the first set of forearms without relative rotation therebetween when the first upper arm is rotated in a first direction, and where the first and second drive belt assemblies, including the at least one non-circular pulley, are configured to move the first set of forearms with relative rotation therebetween when the first upper arm is rotated in a second direction opposite the first direction.
  • the apparatus may further comprise a controller connected to the robot drive, where the controller comprises at least one processor and at least one memory comprising computer code for controlling the motors.
  • the apparatus may further comprise a substrate transport chamber having the robot drive connected thereto, where the robot arm is located inside the substrate transport chamber, and a plurality of substrate stations connected to the substrate transport chamber, where the plurality of substrate stations comprise stations offset relative to a radial direction from an axis of connection of the robot drive to the substrate transport chamber and at least one station which is not offset relative to the radial direction from the axis of connection of the robot drive to the substrate transport chamber, where the robot drive and the robot arm are configured to move the end effectors to insert and remove substrates with the stations.
  • the robot drive and the robot arm may be configured to move a first one of the end effector on the first set of forearms and a second one of the end effectors on the second set of forearms at a same time into the at least one station which is not offset relative to the radial direction from the axis of connection of the robot drive to the substrate transport chamber.
  • the apparatus may comprise two of the offset substrate stations on a same side of the substrate transport chamber, the robot drive and the robot arm are configured to respectively move a first one of the end effector on the first set of forearms and a second one of the end effectors on the second set of forearms at a same time into the two offset station.
  • the apparatus may comprise two of the offset substrate stations on a same side of the substrate transport chamber, where the robot drive and the robot arm are configured to move the first end effector into a first one of the two offset substrate stations while the second upper arm and second set of forearms do not move, and where the robot drive and the robot arm are configured to move the second end effector into a second one of the two offset substrate stations while the first upper arm and first set of forearms do not move.
  • An example method may comprise connecting a first upper arm to a first coaxial drive shaft of a robot drive; connecting a second upper arm to a second coaxial drive shaft of the robot drive; connecting a first set of forearms to the first upper arm, where a first drive belt arrangement connects a first one of the forearms of the first set of forearms to a third coaxial drive shaft of the robot drive, and where a second drive belt arrangement connects a second one of the forearms of the first set of forearms to the third coaxial drive shaft of the robot drive; connecting a second set of forearms to the second upper arm, where a third drive belt arrangement connects a first one of the forearms of the second set of forearms to a fourth coaxial drive shaft of the robot drive, and where a fourth drive belt arrangement connects a second one of the forearms of the second set of forearms to the fourth coaxial drive shaft of the robot drive; and connecting respective end effectors to the fore
  • the first set of forearms may be connected to the first upper arm at a common axis or rotation.
  • the first drive belt arrangement may comprise at least one non-circular pulley to move a drive belt of the first drive belt arrangement at a variable rate relative to rotation of the third coaxial drive shaft.
  • the first and second drive belt assemblies including at least one non-circular pulley of the first and second drive belt assemblies, may be connected to be able to move the first set of forearms without relative rotation therebetween when the first upper arm is rotated in a first direction, and to move the first set of forearms with relative rotation therebetween when the first upper arm is rotated in. a second direction opposite the first direction.
  • the method may further comprise coupling a controller to the robot drive, where the controller comprises at least one processor and at least one memory comprising computer code for controlling motors of the robot drive.
  • the method may further comprise connecting the robot drive to a substrate transport chamber, where the robot arm is located inside the substrate transport chamber, and connecting a plurality of substrate stations to the substrate transport chamber, where the plurality of substrate stations comprise stations offset relative to a radial direction from an axis of connection of the robot drive to the substrate transport chamber and at least one station which is not offset relative to the radial direction from the axis of connection of the robot drive to the substrate transport chamber, where the robot drive and the robot arm are configured to move the end effectors to insert and remove substrates with the stations.
  • the robot drive and the robot arm may be assembled to be able to move a first one of the end effector on the first set of forearms and a second one of the end effectors on the second set of forearms at a same time into the at least one station which is not offset relative to the radial direction from the axis of connection of the robot drive to the substrate transport chamber.
  • the apparatus may comprise two of the offset substrate stations on a same side of the substrate transport chamber, where the robot drive and the robot arm are assembled to be able to respectively move a first one of the end effector on the first set of forearms and a second one of the end effectors on the second set of forearms at a same time into the two offset station.
  • the method may further comprise the apparatus comprising two of the offset substrate stations on a same side of the substrate transport chamber, where the robot drive and the robot arm are assembled to be able to move the first end effector into a first one of the two offset substrate stations while the second upper arm and second set of forearms do not move, and where the robot drive and the robot arm are configured to move the second end effector into a second one of the two offset substrate stations while the first upper arm and first set of forearms do not move.
  • An example method may comprise rotating a first coaxial drive shaft of a robot drive about a first axis in a first direction to rotate a first upper arm of a robot arm about the first axis; rotating a second coaxial drive shaft of the robot drive about the first axis, while the first coaxial drive shaft is being rotated, to move a first drive belt arrangement and a second drive belt arrangement and thereby rotate first and second forearms on the first upper arm; rotating a third coaxial drive shaft of the robot drive about the first axis in a second direction to rotate a second upper arm of a robot arm about the first axis; and rotating a forth coaxial drive shaft of the robot drive about the first axis to move a third drive belt arrangement and a fourth drive belt arrangement and thereby rotate third and fourth forearms on the second upper arm.
  • the rotating of the forth coaxial drive shaft of the robot drive about the first axis may occur while the first and second coaxial drive shafts are being rotated.
  • An example method may comprise rotating a first coaxial drive shaft of a robot drive about a first axis in a first direction to rotate at least one upper arm of a robot arm about the first axis; rotating a second coaxial drive shaft of the robot drive about the first axis, while the first coaxial drive shaft is being rotated, to move at least a first drive belt arrangement to rotate a first forearm on the at least one upper arm and extend a first end effector on the first forearm from a retracted position towards an extended position; and rotating a third coaxial drive shaft of the robot drive about the first axis in a second direction to move at least a second drive belt arrangement to rotate a second forearm on the at least one upper arm and retain a second end effector on the second forearm at a retracted position while the first end effector is moved from the retracted position towards the extended position.
  • An example apparatus may comprise a robot drive comprising motors and coaxial drive shafts connected to the motors; a robot arm connected to the robot drive, where the robot arm comprises a first upper arm, a first forearm connected to the first upper arm, a second forearm connected to the first upper arm and end effectors connected to respective ones of the forearms, where the first upper arm is connected to a first one of the coaxial drive shafts, where the first forearm is mounted on the first upper arm and connected to a second one of the coaxial drive shafts by a first drive belt assembly, where the second forearm is mounted to the first upper arm and connected to the second coaxial drive shaft by a second drive belt assembly, and where the first drive belt assembly comprises a straight belt drive connected to the first forearm and the second drive belt assembly comprises a crossover belt drive connected to the second forearm.
  • An example method may comprise calculating a one dimensional joint space trajectory profile in a normalized path variable for a robot arm and applying the joint space trajectory profile to a desired path expressed in terms of included angle from a start point of an end effector (or substrate on the end effector) on the robot arm to an end point of the end effector (or substrate on the end effector); calculating a corresponding trajectory in radial coordinate based upon the joint space trajectory profile in the included angle;, calculating a corresponding angular coordinate of the payload center, based on the calculated radial coordinate, so that a path of a payload center follows a straight line in Cartesian space between the start point and end point; and using a modified formulation of inverse kinematics, converting the desired payload center expressed in cylindrical coordinates supplemented with the desired included angle and its corresponding angular velocity and acceleration into the desired joint positions, velocities, and accelerations to form motion setpoints for the robot arm, and then controlling motors of the robot drive to move the robot
  • the method may check that the straight line path between the end points does not intersect the singularity. If an intersection is predicted, then the method may abort or not execute the move. The method may check if the straight line path between the end points passes within some threshold distance from the singularity. If the move does not approach near the singularity at any point, then the method may employ a standard Cartesian trajectory generation scheme. If the planned path is close to the singularity, the method may calculate the start and end positions of the move in terms of joint coordinates as noted above, specifically the included angle ⁇ ( ⁇ )- ⁇ 2 ( ⁇ ) depending on which end effector is being commanded.
  • the joint space trajectory may be evaluated in a selected grid of points to determine if it violates any of the motion constraints expressed in Cartesian coordinates (i.e. the maximum linear velocity and acceleration of the payload). This test may employ direct (forward) kinematics formulae only, so it works regardless of the proximity of the singularity. In the case where a Cartesian motion constraint is violated, the method may calculate a time scale factor to slow the motion enough to meet all constraints.
  • an apparatus comprising at least one processor and at least one non-transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to: calculate a one dimensional joint space trajectory profile in a normalized path variable for a robot arm and applying the joint space trajectory profile to a desired path expressed in terms of included angle from a start point of an end effector (or substrate on the end effector) on the robot arm to an end point of the end effector (or substrate on the end effector); calculate a corresponding trajectory in radial coordinate based upon the joint space trajectory profile in the included angle; calculate a corresponding angular coordinate of the payload center, based on the calculated radial coordinate, so that a path of a payload center follows a straight line in Cartesian space between the start point and end point; and using a modified formulation of inverse kinematics, convert the desired payload center expressed in cylindrical coordinates supplemented with the desired included
  • a non-transitory program storage device readable by a machine may be provided, such as memory 19 shown in Fig. 1A for example, tangibly embodying a program of instructions executable by the machine for performing operations, the operations comprising: calculating a one dimensional joint space trajectory profile in a normalized path variable for a robot arm and applying the joint space trajectory profile to a desired ath expressed in terms of included angle from a start point of an end effector (or substrate on the end effector) on the robot arm to an end point of the end effector (or substrate on the end effector); calculating a corresponding trajectory in radial coordinate based upon the joint space trajectory profile in the included angle;, calculating a corresponding angular coordinate of the payload center, based on the calculated radial coordinate, so that a path of a payload center follows a straight line in Cartesian space between the start point and end point; and using a modified formulation of inverse kinematics, converting the desired payload center
  • the computer readable medium may be a computer readable signal medium or a non-transitory computer readable storage medium.
  • a non- transitory computer readable storage medium does not include propagating signals and may be, for example, but not limited to, an electronic, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any suitable combination of the foregoing.
  • the computer readable storage medium would include the following: an electrical connection having one or more wires, a portable computer diskette, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or Flash memory), an optical fiber, a portable compact disc read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.
  • Another example method may comprise rotating a first coaxial drive shaft of a robot drive about a first axis in a first direction to rotate at least one upper arm of a robot arm about the first axis; rotating a second coaxial drive shaft of the robot drive about the first axis, while the first coaxial drive shaft is being rotated, to move at least a first drive belt arrangement to rotate a first forearm on the at least one upper arm and extend a first end effector on the first forearm from a retracted position towards an extended position; and rotating a third coaxial drive shaft of the robot drive about the first axis in a second direction to move at least a second drive belt arrangement to rotate a second forearm on the at least one upper arm and retain a second end effector on the second forearm at a retracted position while the first end effector is moved from the retracted position towards the extended position.
  • An example method may comprise, based upon a desired path of a reference point from a start position of the reference point to an end position of the reference point, where the reference point is on an end effector on a robot arm, determine an included angle that corresponds to the start position and that corresponds to the end position, where the robot arm is connected to a robot drive having motors for moving the robot arm; calculating a trajectory in radial coordinates of the reference point on the end effector at least partially based upon the included angles; calculating corresponding angular coordinates of the reference point on the end effector, based on the calculated radial coordinates, so that the reference point on the end effector follows the desired path between the start position and the end position; using a modified formulation of inverse kinematics, converting the radial and angular coordinates of the reference point on the end effector supplemented with the included angles of the trajectory and corresponding angular velocity and acceleration of the end effector into desired joint positions, velocities, and accelerations to form motion set
  • the method may further comprise determining that the desired path between the start position and the end position intersects a kinematic singularity of the robot arm, and not executing the move of the robot arm.
  • the method may further comprise determining if the desired path between the start position and the end position passes within a predetermined threshold distance from a kinematic singularity of the robot arm and: when the move does not pass within the predetermined threshold distance from the kinematic singularity, using a Cartesian trajectory generation scheme to move the robot arm, and when the move does pass within the predetermined threshold distance from the kinematic singularity, not using the Cartesian trajectory generation scheme to move the robot arm.
  • the method may further comprise evaluating the trajectory in a selected grid of points to determine if the trajectory violates at least one motion constraint expressed in Cartesian coordinates.
  • the at least one motion constraint may comprise a maximum linear velocity and a maximum acceleration of the end effector.
  • the method may further comprise calculating a time scale factor for moving at least one of the motors and slowing down the move of the robot arm to meet the at least one motion constraint.
  • the reference point on the end effector may comprise a payload center of a substrate payload on the end effector.
  • the method may further comprise calculating a one-dimensional trajectory profile in a normalized path variable for the end effector, and applying the one-dimensional trajectory profile to the desired path expressed in terms of the included angles from the start position of the reference point to the end position of the reference point on the end effector.
  • a non-transitory program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine for performing operations, the operations comprising the method as described above.
  • An example method may comprise determining by a controller a path of a reference point on an end effector of a robot arm between a start position and an end position of the reference point, where the robot arm is connected to a robot drive having motors for moving the robot arm, and where the controller comprises at least one processor and at least one non-transitory memory having computer code; the controller selecting a movement control mode from a plurality of different movement control modes, where the different movement control modes comprise: deterriining that the path between the start position and the end position intersects a kinematic singularity of the robot arm, and not executing a move of the robot arm with the path, detemining that the path between the start position and the end position passes outside a predetermined threshold distance from the kinematic singularity of the robot arm, and using a Cartesian trajectory generation scheme to move the robot arm; and determining that the path between the start position and the end position passes within the predetermined threshold distance from the kinematic singularity of the robot arm, determine an included angle that correspond
  • the method may further comprise using a modified formulation of inverse kinematics, converting the radial and angular coordinates of the reference point, supplemented with the included angles and corresponding angular velocity and acceleration of the reference point, into the joint coordinates, the angular velocities, and the accelerations to form motion setpoints for the robot arm; and controlling the motors of the robot drive to move the robot arm based upon the motion setpoints.
  • the method may further comprise evaluating the trajectory in a selected grid of points to determine if the trajectory violates at least one motion constraint expressed in Cartesian coordinates.
  • the at least one motion constraint may comprise a maximum linear velocity and a maximum acceleration of the reference point.
  • the method may further comprise calculating a time scale factor for moving at least one of the motors and slowing down the movement of the robot arm to meet the at least one motion constraint.
  • a non- transitory program storage device readable by a machine, tangibly embodying a program of instructions executable by the machine for perforating operations, the operations comprising the method as described above.
  • An example embodiment may be provided in an apparatus comprising at least one processor; and at least one non- transitory memory including computer program code, the at least one memory and the computer program code configured to, with the at least one processor, cause the apparatus to: determine by the at least one processor and the computer program code a path of a reference point on an end effector of a robot arm between a start position of the reference point and an end position of the reference point with trajectory, where the robot arm is connected to a robot drive having motors for moving the robot arm; select by the at least one processor and the computer program code a movement control mode from a plurality of different movement control modes, where the plurality of different movement control modes comprises: determining that the path between the start position and the end position intersects a kinematic singularity of the robot arm and not executing a move of the robot arm with the path, determining that the path between the start position and the end position passes outside a predetermined threshold distance from the kinematic singularity of the robot arm, and using a Cartesian trajectory generation scheme
  • the at least one processor and the computer program code may be configured to evaluate the trajectory in a selected grid of points to determine if the trajectory violates at least one motion constraint expressed in Cartesian coordinates.
  • the at least one motion constraint may comprise a maximum linear velocity and a maximum acceleration of the reference point.
  • the at least one processor and the computer program code maybe configured to calculate a time scale factor for moving at least one of the motors and slowing down the movement of the robot arm to meet the at least one motion constraint.
  • a straight line path is mentioned between the start position and the end position.
  • the path may not be a straight line, or may only partially be a straight line.
  • the above description mentions calculating a one-dimensional trajectory profile in a normalized path variable for an end effector on a robot arm.
  • the one-dimensional motion profile calculated in terms of the included angle from the included angle that corresponds to the start position to the included angle that corresponds to the end position, may be calculated using any suitable type of method; not limited to calculating a one-dimensional trajectory profile in a normalized path variable.
  • the method may comprises the following steps: This is what is given: the start position of the reference point on the robot end- effector, and the end position of the reference point on the robot end-effector. This defines where the robot starts (from a retracted position) and where the robot ends (for a substrate place/pick operation).
  • the start position of the reference point on the robot end-effector and the end position of the reference point on the robot end-effector.
  • constraints that limit the speed, acceleration and jerk of the motion of the reference point on the robot end-effector and constraints that limit the s eed, acceleration and jerk of the included angle. Connect the start position of the reference point on the robot end-effector and the end position of the reference point on the robot end-effector in a path, such as by a straight line for example.
  • step 3 If the straight line calculated in step 3 goes through a cylinder of kinematic singularity, do not execute the move, and stop here. If the straight line calculated in step 3 is outside of the cylinder of kinematic singularity, and does not get closer to the cylinder of kinematic singularity than a predefined distance, calculate the trajectory of the reference point in Cartesian space, and ignore the steps below. If the conditions described in steps 4 and 5 are not met, proceed along the following steps: Using inverse kinematic equations, determine the included angle that corresponds to the starting position and the included angle that corresponds to the end position. Calculate one-dimensional motion profile in terms of the included angle from the included angle that corresponds to the start position to the included angle that corresponds to the end position, which were determined in step 3.
  • This calculation utilizes the constraints on the speed, acceleration and jerk of the included angle introduced in step 2.
  • 9. Convert the pro file expressed in terms of the included angle from step 8 to motion profile in terms of the radial coordinate (this is the radial distance to the reference point on the robot end-effector as typically used in a polar or cylindrical coordinate system).
  • step 9 calculate motion profile in terms of the angular coordinate (this is the angle of a radial line to the reference point on the robot end-effector as typically used in a polar or cylindrical coordinate system).
  • step 11 Check whether the motion profile calculated in step 11 violates any constraints that limit the speed, acceleration and jerk of the motion of the reference point on the robot end-effector, which were introduced in step 2. If it does not, execute the move and ignore step 13.
  • step 12 If the check in step 12 indicates violation, scale the motion profile in terms of Cartesian coordinates so that none of the constraints that limit the speed, acceleration and jerk of the motion of the reference point on the robot end- effector are violated. This can be conveniently done by stretching the time of the robot movement/move.

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un appareil qui comprend un entraînement de robot ayant des moteurs et des arbres d'entraînement coaxiaux reliés aux moteurs ; un bras de robot relié à l'entraînement de robot. Le bras de robot comprend deux bras supérieurs, un premier groupe d'avant-bras relié à un premier bras supérieur des bras supérieurs, un second groupe d'avant-bras relié à un second bras supérieur des bras supérieurs et des effecteurs terminaux reliés à chacun des avant-bras. Les premier et second bras supérieurs sont reliés à des premier et deuxième arbres d'entraînement coaxiaux respectifs. Le premier groupe des avant-bras est monté sur le premier bras supérieur et relié à un troisième arbre d'entraînement coaxial par des premier et deuxième ensembles courroies d'entraînement respectifs. Le second groupe des avant-bras est monté sur le second bras supérieur et relié à un quatrième arbre d'entraînement coaxial par des troisième et quatrième ensembles courroies d'entraînement respectifs.
PCT/US2018/018266 2017-02-15 2018-02-15 Robot de manutention ayant de multiples effecteurs terminaux Ceased WO2018152268A1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2019564390A JP7196101B2 (ja) 2017-02-15 2018-02-15 複数のエンドエフェクタを備えた材料取り扱いロボット
KR1020197027024A KR102373081B1 (ko) 2017-02-15 2018-02-15 다수의 엔드-이펙터들을 가진 재료-핸들링 로봇
CN201880021073.5A CN110505945B (zh) 2017-02-15 2018-02-15 具有多个末端执行器的物料操纵机器人
KR1020247020112A KR20240095478A (ko) 2017-02-15 2018-02-15 다수의 엔드-이펙터로써 재료를 핸들링하는 장치
KR1020237023423A KR102677037B1 (ko) 2017-02-15 2018-02-15 다수의 엔드-이펙터로써 재료를 핸들링하는 방법 및 장치
KR1020217033169A KR20210129240A (ko) 2017-02-15 2018-02-15 다수의 엔드-이펙터로써 재료를 핸들링하는 방법 및 장치
CN202311806883.0A CN117754552A (zh) 2017-02-15 2018-02-15 具有多个末端执行器的物料操纵机器人
JP2022115165A JP7628522B2 (ja) 2017-02-15 2022-07-20 複数のエンドエフェクタを備えた材料取り扱いロボット
JP2024191279A JP2025016638A (ja) 2017-02-15 2024-10-31 装置及び方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762459135P 2017-02-15 2017-02-15
US62/459,135 2017-02-15

Publications (1)

Publication Number Publication Date
WO2018152268A1 true WO2018152268A1 (fr) 2018-08-23

Family

ID=63104811

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2018/018266 Ceased WO2018152268A1 (fr) 2017-02-15 2018-02-15 Robot de manutention ayant de multiples effecteurs terminaux

Country Status (5)

Country Link
US (2) US20180229361A1 (fr)
JP (3) JP7196101B2 (fr)
KR (4) KR102677037B1 (fr)
CN (2) CN117754552A (fr)
WO (1) WO2018152268A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020061711A1 (fr) * 2018-09-28 2020-04-02 Advanced Intelligent Systems Inc. Appareil, procédés et systèmes de manipulation
US10751888B2 (en) 2018-10-04 2020-08-25 Advanced Intelligent Systems Inc. Manipulator apparatus for operating on articles

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10183684B2 (en) * 2016-03-31 2019-01-22 General Electric Company Multiple vehicle control system
JP7258850B2 (ja) * 2018-03-23 2023-04-17 株式会社 資生堂 コア－コロナ型ポリマー粒子を用いた化粧料用原料および水中油型乳化化粧料
JP7287949B2 (ja) * 2018-03-23 2023-06-06 株式会社 資生堂 コア－コロナ型ポリマー粒子
WO2019182127A1 (fr) * 2018-03-23 2019-09-26 株式会社 資生堂 Matière première pour produit cosmétique mettant en oeuvre des particules polymères de type coeur-couronne ainsi que produit cosmétique en émulsion de type huile dans l'eau
JP7067289B2 (ja) * 2018-06-08 2022-05-16 トヨタ自動車株式会社 動作計画装置及び動作計画方法
JP7183635B2 (ja) * 2018-08-31 2022-12-06 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
US11241800B2 (en) 2019-03-11 2022-02-08 Persimmon Technologies Corporation Asymmetric dual end effector robot arm
JP7638906B2 (ja) 2019-05-21 2025-03-04 パーシモン テクノロジーズ コーポレイション 非対称のデュアルエンドエフェクタロボットアーム
US11667035B2 (en) * 2019-07-01 2023-06-06 Wisconsin Alumni Research Foundation Path-modifying control system managing robot singularities
JP2023518164A (ja) * 2020-03-02 2023-04-28 パーシモン テクノロジーズ コーポレイション コンパクトなトラバースロボット
KR20220165750A (ko) * 2020-04-03 2022-12-15 보이머 그룹 에이/에스 픽 앤 플레이스 로봇용 조작가능한 그리퍼
WO2021198053A1 (fr) 2020-04-03 2021-10-07 Beumer Group A/S Système de robot de prélèvement et placement, procédé, utilisation et système de trieur
JP2023535881A (ja) * 2020-07-07 2023-08-22 パーシモン テクノロジーズ コーポレイション 複数の半独立型アームを有するマテリアルハンドリングロボット
CN115943019B (zh) * 2020-08-21 2025-10-31 发那科株式会社 机器人控制装置
US12269160B2 (en) 2020-09-01 2025-04-08 Persimmon Technologies Corporation Material-handling robot with magnetically guided end-effectors
CN116457157A (zh) * 2020-09-01 2023-07-18 柿子技术公司 具有受磁性引导的末端执行器的材料搬运机器人
JP7433179B2 (ja) * 2020-09-17 2024-02-19 東京エレクトロン株式会社 制御方法及び基板搬送システム
JP7687016B2 (ja) * 2021-03-25 2025-06-03 セイコーエプソン株式会社 立体物印刷方法
JP7542262B2 (ja) * 2021-08-31 2024-08-30 ＴｅｃｈＭａｇｉｃ株式会社 ロボット装置
WO2023188181A1 (fr) * 2022-03-30 2023-10-05 平田機工株式会社 Système de transport de substrat et robot de transfert
CN115309003A (zh) * 2022-08-04 2022-11-08 无锡易晟半导体有限公司 曝光装置及涂胶显影设备
US20240075617A1 (en) * 2022-09-06 2024-03-07 Applied Materials, Inc. Robot arm trajectory control
DE102022125564B3 (de) * 2022-10-04 2023-10-12 J.Schmalz Gmbh Verfahren zum Handhaben von Gegenständen und Handhabungsanlage
CN116551700B (zh) * 2023-07-10 2023-09-12 泓浒(苏州)半导体科技有限公司 一种超高真空环境的晶圆传送机械臂控制系统及方法
US20250033156A1 (en) * 2023-07-28 2025-01-30 Applied Materials, Inc. Swapper for a cluster tool
WO2025054550A1 (fr) * 2023-09-08 2025-03-13 Brooks Automation Us, Llc Appareil de transport de substrat
TWI890478B (zh) * 2024-06-11 2025-07-11 家碩科技股份有限公司 夾爪結構
CN119458304B (zh) * 2024-10-31 2025-09-23 华中科技大学 一种张拉整体机器人的移动控制信号生成方法和装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
US6547510B1 (en) * 1998-05-04 2003-04-15 Brooks Automation Inc. Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
US20030223853A1 (en) * 2002-05-29 2003-12-04 Caveney Robert T. Dual arm substrate transport apparatus
US20160167229A1 (en) * 2013-01-18 2016-06-16 Persimmon Technologies, Corp. Robot Having Arm With Unequal Link Lengths
WO2016127160A1 (fr) * 2015-02-06 2016-08-11 Persimmon Technologies, Corp. Robot ayant un bras présentant des longueurs de liaison inégales

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6121743A (en) 1996-03-22 2000-09-19 Genmark Automation, Inc. Dual robotic arm end effectors having independent yaw motion
JPH10217167A (ja) * 1997-02-03 1998-08-18 Hitachi Ltd スカラ形ロボット
JPH1133948A (ja) * 1997-07-23 1999-02-09 Nikon Corp 搬送ロボット及びその使用方法
JPH11277467A (ja) * 1998-03-25 1999-10-12 Mecs Corp 薄型基板搬送ロボット
JP3725355B2 (ja) 1999-02-17 2005-12-07 三菱電機株式会社 ロボット装置のアーム駆動機構
JP4483047B2 (ja) * 2000-08-14 2010-06-16 株式会社安川電機 ロボットの制御装置
AU2002322504A1 (en) 2001-07-13 2003-01-29 Broks Automation, Inc. Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
US7180253B2 (en) 2003-09-30 2007-02-20 Rockwell Automation Technologies, Inc. Method and system for generating multi-dimensional motion profiles
JP5264171B2 (ja) * 2004-06-09 2013-08-14 ブルックス オートメーション インコーポレイテッド 基板搬送装置
JP4841183B2 (ja) * 2005-06-28 2011-12-21 東京エレクトロン株式会社 基板処理装置，搬送装置，搬送装置の制御方法
JP2008135630A (ja) 2006-11-29 2008-06-12 Jel:Kk 基板搬送装置
JP5021397B2 (ja) 2007-08-29 2012-09-05 株式会社ダイヘン 搬送装置
JP2009166164A (ja) 2008-01-15 2009-07-30 Kobe Steel Ltd 工業用ロボット
KR100968869B1 (ko) * 2008-07-09 2010-07-09 주식회사 로보스타 기판 반송 로봇
CN103069559B (zh) * 2010-08-17 2016-08-24 佳能安内华股份有限公司 基片输送设备以及用于制造电子装置的系统和方法
JP5618068B2 (ja) * 2010-08-24 2014-11-05 シンフォニアテクノロジー株式会社 移動装置の軌道情報生成装置
JP2013544034A (ja) * 2010-11-10 2013-12-09 ブルックス オートメーション インコーポレイテッド 双腕ロボット
CN201881384U (zh) * 2010-11-30 2011-06-29 沈阳新松机器人自动化股份有限公司 一种平面多关节型机器人手臂机构
KR102436038B1 (ko) 2011-03-11 2022-08-24 브룩스 오토메이션 인코퍼레이티드 기판 처리 툴
KR101829397B1 (ko) 2011-09-16 2018-02-19 퍼시몬 테크놀로지스 코포레이션 낮은 가변성을 가진 로봇
JP5472283B2 (ja) * 2011-12-21 2014-04-16 株式会社安川電機 ロボットのアーム構造およびロボット
CN103208447A (zh) * 2012-01-13 2013-07-17 诺发系统公司 双臂真空机械手
KR102214943B1 (ko) * 2013-01-18 2021-02-10 퍼시몬 테크놀로지스 코포레이션 상이한 링크 길이를 가지는 아암이 구비되는 로봇
US9149936B2 (en) * 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
KR102308221B1 (ko) 2013-06-05 2021-10-01 퍼시몬 테크놀로지스 코포레이션 로봇 및 적응형 배치 시스템 및 방법
JP6238628B2 (ja) * 2013-08-06 2017-11-29 キヤノン株式会社 ロボット装置、ロボット制御方法、ロボット制御プログラム及びロボット装置を用いた部品の製造方法
JP2015066668A (ja) * 2013-10-01 2015-04-13 キヤノン株式会社 ロボットの教示点調整方法、ロボットの設置位置算出方法、ロボットシステム、プログラム及び記録媒体
JP6705750B2 (ja) * 2014-01-28 2020-06-03 ブルックス オートメーション インコーポレイテッド 基板搬送装置
JP2015174185A (ja) 2014-03-14 2015-10-05 三菱重工業株式会社 ロボットのシミュレーション装置及び方法、制御装置、及びロボットシステム
KR102567510B1 (ko) * 2015-03-12 2023-08-17 퍼시몬 테크놀로지스 코포레이션 종속화된 엔드 이펙터 움직임을 가진 로봇
US11584000B2 (en) 2015-07-16 2023-02-21 Persimmon Technologies Corporation Robot arm with unequal link lengths and variable non-linear wrist orientation
JP6390669B2 (ja) 2016-06-28 2018-09-19 セイコーエプソン株式会社 ロボット制御システム、ロボットシステム

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6547510B1 (en) * 1998-05-04 2003-04-15 Brooks Automation Inc. Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
US20010033788A1 (en) * 1998-09-03 2001-10-25 Pietrantonio Antonio F. Dual multitran robot arm
US20030223853A1 (en) * 2002-05-29 2003-12-04 Caveney Robert T. Dual arm substrate transport apparatus
US20160167229A1 (en) * 2013-01-18 2016-06-16 Persimmon Technologies, Corp. Robot Having Arm With Unequal Link Lengths
WO2016127160A1 (fr) * 2015-02-06 2016-08-11 Persimmon Technologies, Corp. Robot ayant un bras présentant des longueurs de liaison inégales

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020061711A1 (fr) * 2018-09-28 2020-04-02 Advanced Intelligent Systems Inc. Appareil, procédés et systèmes de manipulation
US10745219B2 (en) 2018-09-28 2020-08-18 Advanced Intelligent Systems Inc. Manipulator apparatus, methods, and systems with at least one cable
US10751888B2 (en) 2018-10-04 2020-08-25 Advanced Intelligent Systems Inc. Manipulator apparatus for operating on articles

Also Published As

Publication number Publication date
JP2022163048A (ja) 2022-10-25
CN117754552A (zh) 2024-03-26
US20180229361A1 (en) 2018-08-16
US10580682B2 (en) 2020-03-03
KR102373081B1 (ko) 2022-03-11
KR102677037B1 (ko) 2024-06-24
KR20240095478A (ko) 2024-06-25
KR20230110657A (ko) 2023-07-24
KR20210129240A (ko) 2021-10-27
JP2025016638A (ja) 2025-02-04
CN110505945B (zh) 2024-01-19
JP2020507938A (ja) 2020-03-12
JP7196101B2 (ja) 2022-12-26
KR20190117665A (ko) 2019-10-16
US20180233397A1 (en) 2018-08-16
JP7628522B2 (ja) 2025-02-10
CN110505945A (zh) 2019-11-26

Similar Documents

Publication Publication Date Title
WO2018152268A1 (fr) Robot de manutention ayant de multiples effecteurs terminaux
US20250326110A1 (en) Robot Having Arm with Unequal Link Lengths
US5789890A (en) Robot having multiple degrees of freedom
US6121743A (en) Dual robotic arm end effectors having independent yaw motion
US20210086349A1 (en) Robot Having Arm with Unequal Link Lengths
US10737381B2 (en) Dual arm robot
CN101873910B (zh) 一种用于对物体进行处理和/或执行加工操作的装置
JP6630727B2 (ja) 水平多関節ロボット
CN106002987B (zh) 机器人
JP2020536761A5 (fr)
JP2020536761A (ja) ロボット装置
US11887880B2 (en) Material handling robot
JP2018187749A (ja) ロボット
EP2207648A1 (fr) Robot
US11735466B2 (en) Asymmetric dual end effector robot arm
JP2025020984A (ja) 搬送ロボットの制御方法
JP6648491B2 (ja) 制御装置、ロボットおよびロボットシステム

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18754339

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2019564390

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20197027024

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 18754339

Country of ref document: EP

Kind code of ref document: A1