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WO2018146787A1 - Capteur de température de résistance et son procédé de fabrication - Google Patents

Capteur de température de résistance et son procédé de fabrication Download PDF

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Publication number
WO2018146787A1
WO2018146787A1 PCT/JP2017/004881 JP2017004881W WO2018146787A1 WO 2018146787 A1 WO2018146787 A1 WO 2018146787A1 JP 2017004881 W JP2017004881 W JP 2017004881W WO 2018146787 A1 WO2018146787 A1 WO 2018146787A1
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WO
WIPO (PCT)
Prior art keywords
frame
resistance
wire
lead wire
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/004881
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English (en)
Japanese (ja)
Inventor
勝 山名
丸山　卓也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okazaki Manufacturing Co Ltd
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Okazaki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okazaki Manufacturing Co Ltd filed Critical Okazaki Manufacturing Co Ltd
Priority to PCT/JP2017/004881 priority Critical patent/WO2018146787A1/fr
Priority to JP2017522438A priority patent/JP6150971B1/ja
Publication of WO2018146787A1 publication Critical patent/WO2018146787A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08—Protective devices, e.g. casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer

Definitions

  • the present invention relates to a resistance thermometer sensor that does not decrease the accuracy of temperature measurement in a low temperature region, among the resistance thermometer sensors that are temperature sensors using a resistance thermometer element as a temperature sensing element.
  • a resistance temperature detector element is a widely used temperature sensing element that measures the temperature by utilizing the fact that the electrical resistance of a metal changes with temperature. Inside the resistance temperature detector element, the electrical resistance changes with temperature. It contains a resistance thermometer wire made of a large metal. Most of the resistance thermometer wires used in the industry are platinum with a resistance value of 100 ⁇ . As a temperature measurement method, a constant current called a measurement current is measured from the lead wire connected to both ends of the platinum resistance thermometer wire. A method of obtaining a resistance value from the voltage drop by converting the resistance value and converting the resistance value to a temperature is exclusively employed.
  • Patent Document 1 As a shape generally used of the conventional resistance temperature detector element, as shown in FIG. 1 and FIG. 2 of Patent Document 1, an axial direction in which a coiled platinum resistance temperature sensor wire is provided on a ceramic insulator.
  • a glass bobbin type RTD element coated with a glass wire and a thin film type RTD element, generally called a thin film type RTD element, is formed by forming a meandering platinum film on a thin insulating substrate such as ceramic.
  • Patent Document 3 shows one application example of a thin film resistance thermometer element.
  • the resistance wires of these resistance temperature detector elements are covered with an insulator in order to prevent a short circuit due to contact with an external conductor, Moreover, the reason why the temperature measuring resistance wire is made of platinum is that the temperature change of the electric resistance is large and the change of the electric resistance with time is small, so that accurate temperature measurement can be continued.
  • the thin-film resistance thermometer element is the smallest and the heat capacity is small, so the response speed to the temperature change of the measurement object is the fastest.
  • these resistance temperature detector elements use ceramics and glass that are easily broken, and therefore, the resistance temperature detector is made by interposing an inorganic insulating material powder in a metal frame. In many cases, it is used as a resistance temperature sensor containing an element. In particular, a thin film type resistance thermometer element is fragile because the substrate is thin, and is usually used as a resistance thermometer sensor.
  • FIG. 1 (c) of Patent Document 4 shows a resistance temperature sensor in which a resistance temperature sensor element is accommodated by interposing an inorganic insulating material powder in a metal frame.
  • 5 and 10 of FIG. 5 and FIGS. 1, 2 and 4 of Patent Document 6 also show a similar resistance temperature sensor.
  • the glass bobbin type resistance thermometer element has a structure in which Joule heat is discharged without passing through the inorganic insulating material powder, and the decrease in heat conduction is limited even at extremely low temperatures. In the body element, there is almost no decrease in heat conduction at extremely low temperatures.
  • the inorganic insulating material powder between the frame and the resistance temperature element is used. Unless measures are taken to increase heat conduction, a plus-side temperature measurement error due to Joule heat occurs in a cryogenic temperature region as in the case of using a ceramic insulator type resistance temperature detector element.
  • Patent Document 7 in a resistance temperature sensor in which a glass bobbin type resistance temperature detector element is housed in a protective tube, which is a frame, with an inorganic insulating material powder interposed, air in the gap of the inorganic insulating material powder is helium.
  • the gas substitution is shown.
  • the helium gas present in the gaps between the inorganic insulating material powders does not form droplets until the temperature drops below about 4K, so that a constant Joule heat discharge function is maintained up to the extremely low temperature range. .
  • this helium substitution alone cannot sufficiently discharge Joule heat, and the temperature measurement error on the plus side has not been eliminated.
  • the conventional resistance thermometer sensor in which the resistance thermometer element is housed in the frame body of metal or the like with the inorganic insulating material powder interposed, the frame body and the temperature sensor are measured in the cryogenic temperature range.
  • the heat conduction becomes low due to the formation of air or droplets in the gap of the inorganic insulating material powder between the resistance element and the discharge amount of Joule heat generated in the temperature measuring resistance line to the outside decreases.
  • the Joule heat cannot be sufficiently discharged, and there is a problem that a temperature measurement error on the plus side occurs.
  • the resistance thermometer element used in the resistance thermometer sensor is a glass bobbin type resistance thermometer element, a thin film type resistance thermometer element, or a ceramic insulator type resistance thermometer with the countermeasure of Patent Document 1. This is a problem that occurs in any body element.
  • the resistance thermometer sensor is as shown in the following first to fifth aspects, and the manufacturing method thereof is as in the sixth to seventh aspects.
  • the first aspect of the present invention is a resistance temperature sensor using a resistance temperature sensor element as a temperature sensing element, On a ceramic thin plate, a platinum film having a meandering wire shape and electrical resistance of 5000 ⁇ to 15000 ⁇ is formed as a resistance temperature measuring wire, and one platinum wire is connected to each end of the platinum film, and the end of the platinum wire Is a thin film type resistance thermometer element that protrudes outside the thin plate, A lead wire having an insulation coating, wherein one or two lead wires are connected to each end portion of the platinum wire of the thin film type resistance thermometer element, and the lead wire stripped from the insulation coating; A thin-film resistance thermometer element with a bottom made of metal made of metal and connected with lead wires is accommodated with inorganic insulating powder interposed, and the gap between the inorganic insulating powder is filled with helium gas
  • the RTD sensor In this RTD sensor, a thin film type RTD element is used as the RTD element, the gap between the inorganic insulating material powders is filled with helium, and the conventional RTD
  • the sensor is generally a resistance temperature detector element having a resistance temperature line of platinum having a resistance value of 100 ⁇ , whereas the resistance temperature sensor of the first aspect of the present invention has a resistance value of 5000 ⁇ to 15000 ⁇ .
  • a thin film type RTD element which has a platinum film as a resistance thermometer wire on a ceramic thin plate, and has almost no elements that lower the heat conduction inside the RTD element at cryogenic temperatures. And the helium filled in the gaps of the inorganic insulating material powder does not form droplets until the temperature drops to about 4K, so the function as a heat transfer medium is generally maintained up to this temperature.
  • the resistor sensor has no factor that hinders the discharge of the Joule heat generated in the temperature measuring resistance line of the temperature measuring resistance element by the measured current even in the extremely low temperature range from 90K to about 4K.
  • the Joule heat generated in the temperature measuring resistance line is proportional to the product of the square of the measured current and the resistance value. Further, as described above, a measurement current is passed through the temperature measuring resistance wire, a resistance value is obtained from the voltage drop, and this resistance value is converted into temperature. Since the voltage drop is proportional to the product of the resistance thermometer wire resistance and the measured current, if the measured current is decreased to reduce Joule heat, the voltage drop also decreases, and S / N (Signal / noisyz), that is, the voltage drop. The ratio of the signal to noise is reduced and the temperature measurement accuracy of the voltage drop is lowered.
  • the resistance of the resistance thermometer wire of the resistance thermometer wire sensor according to the first aspect of the present invention is 50 to 150 times the resistance thermometer wire of the conventional 100 ⁇ resistance thermometer sensor generally used. Therefore, in order to obtain the same voltage drop signal as that of the conventional resistance temperature sensor, the measurement current may be 1/50 to 1/150 of the conventional one. Since the Joule heat is proportional to the product of the square of the measured current and the resistance value, the Joule heat generated in the resistance temperature sensor of the first aspect of the present invention is 1/50 of the conventional resistance temperature sensor. To 1/150.
  • the resistance temperature sensor according to the first aspect of the present invention has no factor that inhibits the discharge of the Joule heat generated on the resistance temperature sensor line of the resistance temperature detector element to the outside, and is generated. Since Joule heat can be kept low, a plus-side temperature measurement error that has occurred in a conventional resistance temperature sensor is suppressed in an extremely low temperature range of 90K or less. As will be described later, this suppression effect has been confirmed by a calibration test of a temperature measuring resistor sensor according to the present invention that has been experimentally manufactured. In addition, since less Joule heat is generated, temperature measurement can be performed with a precision equal to or higher than that of a conventional resistance temperature sensor even in a temperature range of 90K or higher.
  • the frame lid hermetically seals the upper surface opening of the frame, so that moisture does not enter the inside of the frame. For this reason, there is no temperature measurement error due to moisture absorption of the inorganic insulating material powder and a decrease in insulation resistance. Further, since the thin film type resistance thermometer element is accommodated in the frame body with the inorganic insulating material powder interposed, even if a thin film type resistance thermometer element in which the insulating coating is not applied to the platinum film or the platinum wire is used. In addition, the platinum film or the platinum wire does not come into contact with the metal frame and is short-circuited.
  • a second aspect of the present invention is the resistance temperature sensor according to the first aspect of the present invention, wherein the frame cover is made of a two-component thermosetting type of stycast that is an epoxy resin. It is desirable to do.
  • thermosetting type stycast is desirable as a material for the frame cover because it is excellent in heat resistance, cold resistance and chemical resistance, has high hardness and high insulation resistance.
  • a third aspect of the present invention is the resistance temperature sensor according to the first aspect of the present invention, wherein the lead portion of the lead wire frame cover is exposed from the insulating coating at the tip of the lead wire. It is characterized by being.
  • the lead wire of the penetrating part of the frame lid is a part exposed from the insulating coating at the tip of the conductive wire, so that even if the lead wire has insufficient adhesion between the conductive wire and the insulating coating, moisture from there Is prevented from entering the frame body, so that the seal of the upper surface opening of the frame body is reliable.
  • a fourth aspect of the present invention is the resistance temperature sensor according to the first aspect of the present invention, wherein the frame has a side surface and a bottom surface thickness of 0.3 mm to 1 mm, and an outer diameter of a substantially cylindrical portion. Is preferably 2 mm to 5 mm, and the length of the substantially cylindrical portion in the axial direction is preferably 20 mm to 30 mm.
  • the frame is unnecessarily too large, the volume of the inorganic insulating material powder inside will increase, preventing the Joule heat generated by the resistance temperature detector from being discharged to the outside, and if it is unnecessarily thick, the frame itself May be a factor that hinders the discharge of Joule heat to the outside. Conversely, if the frame is made too thin, there will be a problem with strength. Furthermore, the room for accommodation of the connecting portion between the platinum wire and the platinum wire and the lead wire is also necessary.
  • the width (length of the thin film in the short side direction) of the thin film type resistance temperature detector element having a resistance value of 5000 ⁇ to 15000 ⁇ is approximately 0.5 mm to 1.5 mm, and the length in the longitudinal direction is 10 mm to 15 mm.
  • a fifth aspect of the present invention there is provided a method of manufacturing the resistance temperature sensor according to the first aspect of the present invention, wherein the frame is preferably manufactured by deep drawing press processing.
  • the frame is made of metal and has a substantially cylindrical shape with a bottom. In that production, it is difficult to weld a thin cylindrical part and thin bottom part by welding, but in deep drawing press processing, a cylindrical part and a bottom part have the same thickness and a thin frame is compared with a single press. Can be manufactured easily.
  • a sixth aspect of the present invention is a method of manufacturing a resistance temperature sensor according to the first aspect of the present invention, Connect the tip of the lead wire lead to the end of the platinum wire of the thin film type RTD element, and the thin film type RTD element to which the lead wire is connected in the frame.
  • Thin film type that creates a space in the upper surface of the frame by removing the inorganic insulating powder from the upper surface opening of the frame body to a predetermined depth after containing the inorganic insulating material powder while it is outside the body
  • a RTD element housing process and a glove box with a thin film type RTD element, lead wires excluding the end, and a frame containing inorganic insulating material powder are placed in a vacuum chamber, and the vacuum chamber is evacuated. The operation of pulling and injecting helium gas into the vacuum chamber is repeated until the vacuum chamber is filled with helium gas at approximately atmospheric pressure, so that the air in the gaps of the inorganic insulating powder is replaced with helium gas.
  • a seventh aspect of the present invention is a method of manufacturing a resistance temperature sensor according to the second aspect of the present invention, Connect the tip of the lead wire lead to the end of the platinum wire of the thin film type RTD element, and the thin film type RTD element to which the lead wire is connected in the frame.
  • Thin film type that creates a space in the upper surface of the frame by removing the inorganic insulating powder from the upper surface opening of the frame body to a predetermined depth after containing the inorganic insulating material powder while it is outside the body
  • a resistance thermometer element housing step Place the thin film type RTD element, lead wire excluding the end, and the frame containing the inorganic insulating material powder in the vacuum chamber with the glove box, and vacuuming the vacuum chamber and entering the vacuum chamber
  • a helium gas replacement step of replacing the air in the gap of the inorganic insulating material powder with helium gas by repeating the operation of injecting helium gas and filling the vacuum chamber with helium gas at approximately atmospheric pressure,
  • the upper surface part is inserted into a substantially cylindrical electric heater to heat the stycast.
  • a frame lid forming step of forming a frame lid by curing with
  • the temperature measurement error on the positive side is caused by Joule heat generated by the measurement current in the resistance temperature measurement line.
  • the resistance temperature sensor wire sensor by the structure and manufacturing method of the present invention does not hinder the release of Joule heat to the outside, and can reduce the measurement current to suppress the generation of Joule heat. Temperature measurement with higher accuracy than the resistance temperature sensor can be performed. Further, since less Joule heat is generated, temperature measurement can be performed with a precision equal to or higher than that of a conventional resistance temperature sensor even in a temperature range of 90K or higher.
  • FIG. 1 is a cross-sectional view of the resistance temperature sensor 1, and the thin film type resistance temperature detector element 3 is shown in an outline view for easy understanding.
  • all three lead wires 7 are drawn for easy understanding, but the paths do not have to be on the same cross section.
  • a first embodiment of a resistance temperature sensor 1 includes a frame 2, a thin film temperature resistance element 3, three lead wires 7, an inorganic insulating material powder 11, And a frame lid 10.
  • the thin film type resistance thermometer element 3 includes a platinum film 5 having a meandering wire shape and an electric resistance of 10,000 ⁇ formed as a temperature measuring resistance line on a ceramic thin plate 4.
  • the platinum wire 6 of the book is connected and the terminal part has come out outside the thin plate 4.
  • the thin plate 4 an insulating ceramic made mainly of alumina, magnesia, zirconia or the like can be used.
  • the platinum film 5 is formed by forming platinum on the thin plate 4 by CVD (chemical vapor deposition).
  • the platinum film 5 may be formed on the thin plate 4 by another method such as PVD (physical vapor deposition).
  • the temperature measuring resistance wire is made of an alloy of platinum and cobalt rather than platinum.
  • a thin film type resistance thermometer element in which an alloy film of platinum and cobalt is formed as a resistance temperature sensor has been established, and a thin film type resistance thermometer having a resistance value of 10,000 ⁇ . Since the body element is very expensive even if it is obtained, the platinum film is used as a resistance temperature measuring wire in this embodiment.
  • the three lead wires 7 are obtained by applying an insulating coating 9 to the conducting wire 8, and the leading end portion of the conducting wire 8 is exposed from the insulating coating 9, and is one platinum wire of the thin film type resistance thermometer element 3.
  • the leading end of the lead wire 8 of one lead wire 7 is connected to the end portion of the lead wire 6, and the leading end of the lead wire 8 of the two lead wires 7 is connected to the end portion of the other platinum wire 6.
  • the present embodiment is a resistance temperature sensor 1 that performs three-wire measurement with three lead wires 7, it may be a resistance temperature sensor that performs two-wire measurement or four-wire measurement. If two lead wires 7 are used, a resistance thermometer sensor that performs two-wire measurement is obtained, and if four lead wires 7 are provided, a resistance temperature sensor that performs four-wire measurement is obtained.
  • the frame body 2 has a substantially cylindrical shape with a bottom made of SUS304 and contains a thin film type resistance thermometer element 3 to which a lead wire 7 is connected, with an inorganic insulating material powder 11 interposed therebetween, and is inorganic.
  • the gap between the insulating material powders 11 is filled with helium gas.
  • the material of the frame 2 may be a metal other than SUS304 depending on the use conditions.
  • the material of the inorganic insulating material powder 11 is magnesia. This material may be an inorganic insulating material powder 11 of another material such as alumina or silica.
  • the frame lid 10 hermetically seals the upper opening of the frame 2 in a state where the portion of the lead wire 7 of the lead wire 7 exposed from the insulating coating 9 penetrates.
  • the material of the frame lid 10 in this embodiment is a two-component thermosetting type of stycast which is one of epoxy resins. This is selected because it is excellent in heat resistance, cold resistance, chemical resistance, high hardness and high insulation resistance, and is therefore suitable as a material for the frame cover 10.
  • the frame lid 10 hermetically seals the upper surface opening of the frame 2, moisture does not enter the inside of the frame 2. Therefore, there is no measurement error due to moisture absorption by the inorganic insulating material powder 11 and a decrease in its insulation resistance. Further, since the thin film type resistance thermometer element 3 is accommodated in the frame body 2 with the inorganic insulating material powder 11 interposed, an insulating coating is applied to the platinum film 5 or the platinum wire 6 of the thin film type resistance thermometer element 3 to be used. Even if not, they do not contact the metal frame 2 to cause a short circuit accident.
  • this resistance temperature sensor 1 a thin film type temperature measurement device in which a platinum film 5 is formed on a ceramic thin plate 4 as a resistance temperature sensor element, and there are almost no elements that reduce heat conduction at extremely low temperatures. Since the resistor element 3 is used and the helium filled in the gap between the inorganic insulating material powders 11 does not form droplets until the temperature drops to about 4K, the function as a heat transfer medium up to this temperature is generally achieved. Therefore, there is no factor that hinders the discharge of Joule heat generated in the temperature measuring resistance line of the thin-film resistance thermometer element 3 by the measured current in the extremely low temperature range of 90K or less to about 4K.
  • the resistance thermometer sensor 1 of the present embodiment is A thin film type resistance thermometer element 3 having a platinum resistance temperature sensor wire of 10,000 ⁇ is used.
  • the voltage drop is proportional to the product of the resistance of the resistance thermometer wire and the measured current. Since the resistance of the resistance temperature sensor wire sensor 1 of the present embodiment has a resistance of 100 times that of a resistance temperature sensor wire of a conventional resistance temperature sensor that is generally used, In order to obtain the same voltage drop signal as the sensor, the measurement current may be 1/100 of the conventional one. Since the Joule heat is proportional to the product of the square of the measured current and the resistance value, the Joule heat generated in the resistance temperature sensor 1 of this embodiment is suppressed to 1/100 of the conventional resistance temperature sensor. Can do.
  • the resistance thermometer sensor 1 of the present embodiment has no factor that inhibits the discharge of Joule heat generated on the resistance thermometer wire of the thin-film resistance thermometer element 3 to the outside, and is generated. Since the Joule heat can be kept low, the temperature measurement error on the plus side unlike the conventional resistance temperature sensor does not occur in the extremely low temperature range from 90K to about 4K. In addition, since less Joule heat is generated, measurement can be performed with a precision equal to or higher than that of a conventional resistance temperature sensor even in a temperature range of 90K or higher.
  • the resistance value of the resistance temperature measuring wire is 10,000 ⁇ , but even if the resistance value is 5000 ⁇ , the Joule heat can be suppressed to 1/50 of the conventional value. / 150. Therefore, the resistance of the resistance temperature sensor wire of the resistance temperature sensor 1 is preferably 5000 ⁇ to 15000 ⁇ .
  • the dimensions of the frame body 2 in this embodiment are such that the thickness of the side surface and the bottom surface is 0.4 mm, the outer diameter of the substantially cylindrical portion is 3.2 mm, and the length of the substantially cylindrical portion in the axial direction is 25 mm.
  • the frame body 2 is unnecessarily too large, the volume of the inorganic insulating material powder 11 in the inside increases, causing the Joule heat generated in the resistance temperature measurement wire to be discharged outside. If the frame body 2 is unnecessarily thick, The body 2 itself may be a factor that prevents the Joule heat from being discharged to the outside. On the contrary, if the frame 2 is made too thin, a problem of strength occurs. Furthermore, the room for accommodating the platinum wire 6 and the connecting portion between the platinum wire 6 and the lead wire 7 is also necessary.
  • the width of the thin film type resistance thermometer element 3 having a resistance value of 5000 ⁇ to 15000 ⁇ (the length in the short side direction of the thin plate 4) is 0.5 mm to 1.5 mm, and the length in the longitudinal direction is 10 mm to In consideration of 15 mm, the thickness of the side surface and the bottom surface of the frame 2 is 0.3 mm to 1 mm, the outer diameter of the substantially cylindrical portion is 2 mm to 5 mm, and the axial length of the substantially cylindrical portion is 20 mm to 30 mm is desirable.
  • the manufacturing procedure will be described with reference to FIG. 2 schematically showing the manufacturing procedure of the resistance temperature sensor 1 of the present embodiment.
  • the vacuum chamber 12 in FIG. 2 has a glove box, but the glove box is not shown.
  • the frame 2 was manufactured by deep drawing press processing.
  • the frame 2 is made of metal and has a substantially cylindrical shape with a bottom.
  • the cylindrical portion and the bottom portion have the same thickness and the thin frame body 2 is pressed by one press. It can be manufactured relatively easily. Further, increasing the thickness of the cylindrical part or the bottom part for joining by welding prevents the Joule heat from being released, thereby reducing the temperature measurement accuracy.
  • the manufacturing procedure of the resistance temperature sensor 1 of the present embodiment includes a thin film resistance temperature sensor element accommodation step, a helium gas replacement step, a frame lid formation step, and a removal step.
  • the tip of the lead wire 8 of the lead wire 7 is connected to the end of the platinum wire 6 of the thin film type resistance thermometer element 3, and the lead wire 7 is placed in the frame 2.
  • the connected thin film type resistance thermometer element 3 is accommodated with the inorganic insulating material powder 11 interposed in a state where the end portion of the lead wire 7 is outside the frame body 2, the upper surface opening of the frame body 2 is opened.
  • the inorganic insulating material powder 11 is removed to a predetermined depth to create a space 19 in the upper surface of the frame body 2.
  • a film type temperature measuring device is placed in the vacuum chamber 12 with a glove box (not shown) in the frame 2 in the thin film type resistance temperature detector element housing step.
  • An operation for putting the resistor element 3, the lead wire 7 excluding the end portion and the inorganic insulating material powder 11 (indicated by reference numeral 18 in FIG. 2 (a)), and evacuating the vacuum chamber 12 from the exhaust pipe 13 The operation of injecting helium gas into the vacuum chamber 12 from the injection tube 14 is repeated to fill the vacuum chamber 12 with helium gas at substantially atmospheric pressure, so that the air in the gap between the inorganic insulating material powders 11 Replace with helium gas.
  • the space 19 on the upper surface of the frame 2 was filled with the stycast 17 before curing mixed with two liquids, as shown in FIG. 2 (b).
  • the upper surface of the frame body 2 is inserted into an electric heater 15 having a substantially cylindrical coil-shaped heating wire 16, and the stycast 17 is heated to be cured and the frame.
  • an electric heater 15 having a substantially cylindrical coil-shaped heating wire 16
  • the stycast 17 is heated to be cured and the frame.
  • the resistance temperature sensor 1 is completed.
  • the shape of the electric heater 15 should just be a substantially cylindrical shape, and is not limited to the shape shown by FIG.2 (c).
  • the vacuum chamber 12 is opened to the atmosphere, and the completed resistance thermometer sensor 1 is extracted from the vacuum chamber 12.
  • the material of the frame lid 10 is a two-component thermosetting type stycast
  • heating by the electric heater 15 for mixing and thermosetting the two components is necessary.
  • a one-component resin is used as a material, mixing of the two components is not required, and when a room temperature curing type resin is used as a material, heating by the electric heater 15 is not required.
  • the resin that is the material of the frame lid 10 may be cured.
  • FIG. 3 is a cross-sectional view of the resistance temperature sensor 20, and the thin film resistance temperature detector element 3 is shown in an outline view for the sake of clarity as in FIG. 1. Also, in FIG. 3, all four lead wires 7 are drawn for easy understanding, but the paths do not have to be on the same cross section as in FIG.
  • the difference between the resistance temperature sensor 20 of the second embodiment and the resistance temperature sensor 1 of the first embodiment is that the penetration part of the frame lid 10 of the lead wire 7 is the resistance temperature sensor of the first embodiment.
  • the body sensor 1 is a portion that is exposed from the insulating coating 9 at the tip of the conductor 8, whereas the resistance temperature sensor 20 according to the second embodiment is a portion having the insulating coating 9 and leads.
  • the number of the wires 7 is three in the resistance temperature sensor 1 of the first embodiment, whereas the number of the wires 7 is four in the resistance temperature sensor 20 of the second embodiment. Since other structures, materials, dimensions, functions, features, and the like are the same as those in the first embodiment, description thereof is omitted.
  • the manufacturing method is also the same except that the portion of the lead wire 2 penetrating the frame lid 10 is a portion having the insulating coating 9.
  • the portion of the lead wire 7 that penetrates the frame lid 10 is the insulating coating 9 as in the resistance temperature sensor 20 of the present embodiment in FIG. Even in such a portion, since external moisture does not enter the frame 2, the insulation resistance of the inorganic insulating material powder 11 does not decrease due to moisture absorption.
  • this embodiment is a resistance temperature sensor 20 that can be used for four-wire measurement because there are four lead wires 7, but as in the first embodiment, 2 It may be a resistance temperature sensor that can be used for linear measurement and four-wire measurement. If there are two lead wires 7, a resistance temperature sensor that performs a two-wire measurement is obtained, and if there are three lead wires 7, a resistance temperature sensor that performs a three-wire measurement is obtained.
  • the temperature measurement can be performed more accurately than the 2-wire measurement or the 3-wire measurement.
  • the resistance temperature is not affected by the length or thickness of the lead wire.
  • the accuracy of the body sensor itself can be tested.
  • the accuracy was 0.2 ° C. in the temperature range of 20K to 373K, and 4K In the range of 20 to 20K, the accuracy is worse than this, but it has been confirmed that the accuracy is acceptable for normal industrial use.
  • the resistance thermometer sensor according to the present invention maintains the temperature measurement accuracy even in the extremely low temperature range, so it is used for monitoring the temperature of low temperature materials such as monitoring the liquid hydrogen temperature in the automotive hydrogen station and the temperature of the liquid fuel of the space rocket. There is a possibility that it can be effectively applied to sensors. In addition, it can be effectively used as a temperature monitoring sensor for low-temperature liquids in facilities for producing liquefied gases such as liquid oxygen, liquid nitrogen, and liquid hydrogen, and tank trucks that carry these liquids.
  • RTD sensor (first embodiment) 2 Frame 3 Thin-film resistance thermometer element 4 Thin plate 5 Platinum film 6 Platinum wire 7 Lead wire 8 Conductor 9 Insulation coating 10 Frame lid 11 Inorganic insulating material powder 20 Resistance thermometer sensor (second embodiment)

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Abstract

La présente invention concerne un capteur de température de résistance (1) comprenant un élément de température de résistance à film mince (3) qui a une valeur de résistance de 5 000 Ω à 15 000 Ω et qui est logé à l'intérieur d'un corps de cadre métallique (2) avec une poudre isolante inorganique (11) interposée entre ceux-ci, des vides de la poudre isolante inorganique (11) étant remplis d'hélium gazeux. Dans ce capteur de température de résistance (1), la chaleur générée par l'effet Joule générée dans un fil de résistance de mesure de température (5) due à un courant de mesure est réduite et le rejet de la chaleur générée par l'effet Joule vers l'extérieur est favorisé, moyennant quoi une erreur de mesure de température côté plus provoquée par la chaleur générée par l'effet Joule est supprimée dans une région de température ultra-basse.
PCT/JP2017/004881 2017-02-10 2017-02-10 Capteur de température de résistance et son procédé de fabrication Ceased WO2018146787A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2017/004881 WO2018146787A1 (fr) 2017-02-10 2017-02-10 Capteur de température de résistance et son procédé de fabrication
JP2017522438A JP6150971B1 (ja) 2017-02-10 2017-02-10 測温抵抗体センサ及びその製作方法

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Application Number Priority Date Filing Date Title
PCT/JP2017/004881 WO2018146787A1 (fr) 2017-02-10 2017-02-10 Capteur de température de résistance et son procédé de fabrication

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CN109186792A (zh) * 2018-08-17 2019-01-11 中国空气动力研究与发展中心超高速空气动力研究所 一种预置引线式薄膜传感器的制作方法
CN113984238A (zh) * 2021-09-23 2022-01-28 北京遥测技术研究所 一种适用于深空探测的高精度快速响应空气温度传感器
US12096802B2 (en) 2018-05-31 2024-09-24 Japan Tobacco Inc. Flavor generation device with temperature sensor

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DE102017113768A1 (de) * 2017-06-21 2018-12-27 Endress + Hauser Wetzer Gmbh + Co. Kg Thermometer mit verbesserter Ansprechzeit
DE102018102709A1 (de) * 2018-02-07 2019-08-08 Tdk Electronics Ag Temperatursensor und ein Verfahren zur Herstellung des Temperatursensors
JP6934252B2 (ja) * 2018-08-01 2021-09-15 林電工株式会社 極低温用温度センサー
JP6786737B2 (ja) * 2020-05-15 2020-11-18 日本たばこ産業株式会社 香味生成装置
JP2020146048A (ja) * 2020-05-15 2020-09-17 日本たばこ産業株式会社 香味生成装置
JP6781856B2 (ja) * 2020-05-15 2020-11-04 日本たばこ産業株式会社 香味生成装置
CN112082667B (zh) * 2020-09-02 2022-08-16 苏州热工研究院有限公司 一种薄膜铂电阻温度传感器及其制造方法
EP4198475B1 (fr) * 2021-12-16 2025-02-05 Endress+Hauser Wetzer GmbH+CO. KG Sonde de température et procédé de fabrication d'une sonde de température

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US12096802B2 (en) 2018-05-31 2024-09-24 Japan Tobacco Inc. Flavor generation device with temperature sensor
CN109186792A (zh) * 2018-08-17 2019-01-11 中国空气动力研究与发展中心超高速空气动力研究所 一种预置引线式薄膜传感器的制作方法
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CN113984238A (zh) * 2021-09-23 2022-01-28 北京遥测技术研究所 一种适用于深空探测的高精度快速响应空气温度传感器
CN113984238B (zh) * 2021-09-23 2023-11-07 北京遥测技术研究所 一种适用于深空探测的高精度快速响应空气温度传感器

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