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WO2018038398A1 - Dispositif de compensation de puissance d'impulsion et système d'alimentation en puissance d'impulsion haute tension le comprenant - Google Patents

Dispositif de compensation de puissance d'impulsion et système d'alimentation en puissance d'impulsion haute tension le comprenant Download PDF

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Publication number
WO2018038398A1
WO2018038398A1 PCT/KR2017/007657 KR2017007657W WO2018038398A1 WO 2018038398 A1 WO2018038398 A1 WO 2018038398A1 KR 2017007657 W KR2017007657 W KR 2017007657W WO 2018038398 A1 WO2018038398 A1 WO 2018038398A1
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WO
WIPO (PCT)
Prior art keywords
pulse
power
voltage
compensation
input
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Ceased
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PCT/KR2017/007657
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English (en)
Korean (ko)
Inventor
장성록
김형석
유찬훈
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Korea Electrotechnology Research Institute KERI
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Korea Electrotechnology Research Institute KERI
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
    • H02M3/00—Conversion of DC power input into DC power output
    • H02M3/02—Conversion of DC power input into DC power output without intermediate conversion into AC
    • H02M3/04—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters
    • H02M3/06—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using resistors or capacitors, e.g. potential divider
    • H02M3/07—Conversion of DC power input into DC power output without intermediate conversion into AC by static converters using resistors or capacitors, e.g. potential divider using capacitors charged and discharged alternately by semiconductor devices with control electrode, e.g. charge pumps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback
    • H03K3/57—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback the switching device being a semiconductor device

Definitions

  • the present invention relates to a pulse power compensation device and a high voltage pulse power system including the same, and more particularly, to be connected to a high voltage pulse power device to compensate for a voltage drop of a pulse power so that a pulse power of a constant voltage can be provided to a load side.
  • the present invention relates to a pulse power compensation device and a high voltage pulse power supply system including the same.
  • a high voltage pulse power supply device refers to a device for supplying high voltage pulse power to a load such as various test equipments and plasma generators (PSII, etc.).
  • the high voltage pulse power supply device controls the power supply unit 10, the switching unit 20 connected between the power supply unit 10 and the load 40, and the power supply unit 10 and the switching unit 20. It is configured to include a controller (30).
  • the power supply 10 rectifies the input power and charges a high voltage DC power supply to a plurality of capacitors connected in series with each other.
  • the switching unit 20 When the switching unit 20 is turned on and energized with the load 40, the power charged in the capacitors is supplied. By discharging at a time, a high voltage pulse is supplied to the load 40 side, and when the switching unit 20 is turned off, the discharged capacitors are charged again.
  • the high voltage pulse power is supplied to the load 40 side, and by controlling the switching unit 20 to control the pulse width, repetition rate and the like of the high voltage pulse power.
  • Such a switching unit 20 is implemented using a mechanical switch, but recently, it has been implemented using semiconductor switch elements.
  • the semiconductor switch device is inexpensive and not only can implement the switching unit 20 at low cost, but also has an excellent response characteristic, thereby reducing the rise time of the pulse and minimizing energy loss.
  • This voltage loop phenomenon occurs as the voltage of the charging capacitor gradually decreases as the voltage of the charging capacitor is discharged to the load 40 while the pulse is applied with the charged energy to the charging capacitor, which is caused by the application of the pulsed power system. It may not be a big problem.
  • t denotes time
  • V pulse denotes a high voltage power pulse generated at the high voltage pulse power supply and finally applied to the load 40.
  • the voltage loop amount (voltage drop) ⁇ V droop is related to the capacitance (C storage ), the pulse current (I pulse ), the pulse width (t pw ) of the entire charging capacitor in the pulse power supply.
  • a voltage loop is generated for each pulse generated while the high voltage power pulse is applied, and at this time, the voltage drops in an application field such as an electron accelerator, a radar pulse power supply, and a klystron. That is, by applying a low reference value for the voltage drop rate, a small voltage drop rate within the reference value is required. Therefore, there is a need for a high voltage pulse power supply device capable of minimizing a voltage drop rate while having a wide pulse width.
  • a method of greatly increasing the capacity of the charging capacitor may be considered.
  • a capacitor capacity of a level that is practically impossible is required, particularly a high voltage power supply.
  • Increasing the capacitance of a capacitor in a device not only requires a large cost, but also becomes quite bulky, and there is a limit to even longer pulse widths.
  • the problem to be solved by the present invention is to provide a pulse power compensation device capable of compensating for a voltage drop occurring during the application of a high voltage power pulse by additionally providing a simple circuit configuration without a significant increase in cost or volume.
  • Pulse power compensation device for solving the above problems is connected in series between the pulse power supply and the load, the voltage of the power supply pulse provided to the load at a predetermined time period in the pulse power supply
  • a pulse power compensation device for compensating a droop to provide a power pulse having a constant voltage magnitude to the load comprising: calculating a voltage droop amount of the power pulse and calculating a compensation pulse having a voltage value corresponding to the voltage droop amount;
  • a compensation controller for outputting a control signal for generating; And a power pulse having a constant voltage level to the load by generating a compensation pulse having a voltage value having a magnitude corresponding to a voltage droop amount by changing the magnitude of the DC voltage according to a control signal input from the compensation controller. It includes; pulse power compensation unit to be provided.
  • the compensation control unit calculates the voltage droop amount of the power pulse by using the current value measured by the current sensor for measuring the current flowing through the load, the pulse power compensation unit rectifies the input AC power, DC voltage And generate a compensation pulse having a voltage value of a magnitude corresponding to the voltage droop amount by changing the magnitude of the DC voltage according to the control signal input from the compensation controller.
  • the pulse power compensator may include: a rectifier configured to rectify and output the input AC power into DC power; A smoothing capacitor that smoothes the unsmoothed DC power input from the rectifier; A charging unit which receives the smoothed voltage from the smoothing capacitor and converts the magnitude of the voltage to correspond to the voltage droop amount according to a control signal input from the compensation controller to charge the discharge capacitor; And a discharge capacitor that smoothes the DC voltage input from the charging unit, charges to a voltage having a magnitude corresponding to the voltage droop amount, and outputs and discharges a compensation pulse of the charged voltage to the load side.
  • the charging unit may include: an inverter circuit converting DC power charged in the smoothing capacitor into AC power according to a control signal input from the compensation controller; A transformer for boosting or stepping down AC power input from the inverter circuit to output the transformer; And a rectifying circuit rectifying the AC power input from the transformer into a DC power and outputting the DC power to the discharge capacitor, thereby charging the discharge capacitor to a voltage having a magnitude corresponding to the voltage droop amount.
  • the pulse power compensation device while the power pulse is not generated, transfers the power charged in the discharge capacitor to the smoothing capacitor to transfer the energy charged in the discharge capacitor to the
  • the regenerative unit may further include a regenerative unit which prevents energy waste by transferring the regenerative unit to an input terminal.
  • the regenerative unit may include: a switching element configured to turn on when a power pulse is turned off according to a control signal of the compensation controller to output power charged in a discharge capacitor to an input terminal of the charging unit; A transformer for converting and outputting power input through the switching element; And a diode outputting the voltage output from the transformer to an input terminal of the charging unit, and blocking current from flowing from the input terminal of the charging unit to the transformer.
  • the compensation controller may include an inverter configured to receive a timing signal indicating a generation timing of the power pulse and generate an inverted timing signal inverting the timing signal; An inactive signal generator for generating an inactive signal and outputting the inactive signal to the switching signal generator while the inversion timing signal is high; The drooped voltage value of the power pulse is calculated using the current value input from the current sensor while the inactive signal is not input, and a compensation pulse having a compensation voltage equal to the drooped voltage value is generated by the compensation gate drive circuit.
  • a switching signal generator for outputting a compensation control signal to stop the generation of the compensation control signal when the inactive signal is input; And a compensation gate drive circuit configured to output a gate control signal to the charger to control turn-on and turn-off of each semiconductor switching element included in the inverter of the charger according to the compensation control signal.
  • the compensation controller may further include: a third differentiator generating a regeneration start pulse signal at a timing corresponding to a rising edge of the inversion timing signal and outputting the regeneration start pulse signal to a regeneration gate drive circuit; And a regenerative gate drive circuit configured to input a turn-on pulse V RE _GATE to turn on the semiconductor switching element included in the regenerative unit when the regenerative start pulse signal is input.
  • a high voltage pulse power supply system for solving the above technical problem, the pulse power compensation device according to a preferred embodiment of the present invention described above;
  • the current sensor for measuring a current flowing in the load;
  • a pulse power supply generating the power pulse at a predefined time period and providing the power pulse to the load.
  • the present invention installs a pulse power compensation device in series between a high voltage pulse power supply and a load, and measures the voltage of the high voltage power pulse output from the high voltage pulse power supply using a current flowing through the load, After calculating the voltage droop of the power pulses supplied to the load, the pulse power compensation device generates and outputs a compensation pulse that compensates this so that a constant voltage is supplied to the load, without increasing the capacity of the capacitor.
  • the pulse power compensation device by installing an additional pulse power compensation device with a simple circuit structure, it is possible to supply a constant voltage pulse power supply without charge droop to the load.
  • the present invention does not consume energy charged in the discharge capacitor inside the pulse power compensating device as heat, but can supply energy to the charging unit and regenerate it to prevent energy waste.
  • FIG. 1 is a view showing a schematic configuration of a general high voltage pulse power supply according to the prior art.
  • FIG. 2 is a view showing the waveform of a pulse generated in a general high voltage pulse power supply according to the prior art.
  • FIG. 3A illustrates a simplified configuration of a pulse power compensation device according to a preferred embodiment of the present invention
  • FIG. 3B is a conceptual view illustrating a method of compensating a voltage droop of a pulse power supply using the pulse power compensation device.
  • FIG. 4 is a diagram showing a detailed configuration of a pulse power compensation device according to a preferred embodiment of the present invention.
  • FIG. 5 is a diagram illustrating a detailed configuration of a compensation control unit and a power control unit according to a preferred embodiment of the present invention.
  • FIG. 6 is a timing diagram of signals output from a power controller and a compensation controller according to an exemplary embodiment of the present invention.
  • FIG. 3A illustrates a simplified configuration of a high voltage pulse power supply device and a pulse power compensation device according to a preferred embodiment of the present invention
  • FIG. 3B is a conceptual view illustrating a method of compensating a voltage droop of a pulse power supply using a pulse power compensation device. to be.
  • the pulse power compensating device 400 is connected in series between a conventional high voltage pulse power supply 300 and a load 500, and thus the high voltage pulse power supply 300. While the high-voltage power supply pulse is supplied to the load 500 side from the power supply, the power supply having a uniform voltage magnitude as a whole by supplying additional compensation pulses corresponding to the voltage drop of the high-voltage power supply pulse to the load 500 side. Allow pulses to be supplied.
  • a plurality of capacitors connected in series to each other is equivalent to one capacitor (C storage ) 313, and a plurality of semiconductor switching elements connected in series to each other are equivalent to one switch (SW) 311. Indicated by.
  • a power pulse in which a voltage droop occurs as a power pulse output from the high voltage pulse power supply 300 is represented by V pulse , t represents time, and ⁇ V droop represents a voltage drop amount.
  • V pulse represents a high voltage power pulse output from the high voltage pulse power supply 300
  • Vcomp represents a compensation pulse output from the pulse power compensation apparatus 400 according to the preferred embodiment of the present invention
  • V LOAD is a voltage drop compensated by adding the voltage values of the high voltage power pulse V pulse output from the high voltage pulse power supply device 300 connected in series with each other and the compensation pulse Vcomp output from the pulse power compensation device 400. The waveform of the pulse power supply provided to the load is shown.
  • the pulse power compensator 400 of the present invention is synchronized with the high voltage pulse power supply 300 so that the voltage drop is generated by the high voltage power pulse output from the high voltage pulse power supply 300. Since a compensation pulse having a voltage value of 0 is output in real time, and a power pulse provided to the load side is provided by combining a high voltage power pulse and a compensation pulse, the load receives a power pulse having a constant voltage magnitude. To this end, as shown in FIG. 3B, the voltage of the high voltage power supply pulse monotonically increases as time passes, and the compensation pulse increases monotonically as time passes.
  • FIG. 4 is a diagram illustrating a detailed configuration of a pulse power compensation device 400 according to a preferred embodiment of the present invention.
  • the high voltage pulse power supply device 300 of the present invention includes a pulse power supply 310 for generating high voltage pulse power and supplying it to a load side, and a power controller 320 for controlling the pulse power supply 310.
  • the pulse power compensation device 400 of the present invention includes a pulse power compensation unit 410 for generating a compensation pulse and supplying it to a load side, and a compensation control unit 420 for controlling the pulse power compensation unit 410. .
  • the pulse power compensator 410 includes a rectifier 411, a smoothing capacitor 412, a charging unit 413, a discharge capacitor 414, and a regenerative unit 415.
  • a rectifier 411 rectifier 411
  • a smoothing capacitor 412 charging unit 413
  • a discharge capacitor 414 discharge capacitor 414
  • a regenerative unit 415 regenerative unit 415
  • the rectifier 411 rectifies the input AC power to a DC power and outputs the same to the smoothing capacitor 412.
  • the smoothing capacitor 412 smoothes and smoothes the unsmoothened DC power input from the rectifying part 411.
  • voltage (V Link) is input to the charging section 413.
  • the charging unit 413 includes an inverter circuit 413a, a transformer 413b, and a rectifier circuit 413c, and the smoothed voltage V Link is input to the inverter circuit 413a.
  • the inverter circuit 413a converts the DC power charged in the smoothing capacitor 412 into an AC power having a frequency and a voltage magnitude necessary to compensate for the voltage drop of the power pulse in accordance with a control signal input from the compensation controller 420.
  • 413b outputs the transformer 413b to the rectifier circuit 413c by stepping up or down the input AC power.
  • the rectifier circuit 413c rectifies the AC power input from the transformer 413b into DC power. By outputting to the discharge capacitor 414, the discharge capacitor 414 is charged to a voltage having a magnitude corresponding to the voltage droop amount.
  • the discharge capacitor 414 smoothes the DC power input from the charging unit 413 to charge the voltage having a magnitude corresponding to the voltage droop amount, and outputs a compensation pulse Vcomp of the charged voltage to the load side, thereby lowering the voltage of the pulse power supply. To compensate.
  • the regenerative unit 415 is connected to the discharge capacitor 414 so that the residual voltage charged in the discharge capacitor 414 after the compensation pulse is output, that is, while the power supply pulse is terminated and no power supply pulse is generated. It is delivered to the input terminal of the charging unit 413 and regenerated to prevent waste of energy.
  • the regenerative unit 415 outputs the remaining power of the discharge capacitor 414 to the smoothing capacitor 412, which is an input terminal of the charging unit 413, from the time when the power supply pulse ends.
  • the remaining power is charged to the smoothing capacitor 412 to be used for generating a compensation pulse when the next power supply pulse is output, thereby preventing energy waste.
  • the regenerative unit 415 is turned on when the power supply pulse is turned off according to the control signal of the compensation controller 420 so as to output the power charged in the discharge capacitor 414 to the input terminal of the charging unit 413,
  • the transformer 415b for converting and outputting the power input through the switching element 415a, and the voltage output from the transformer 415b are output to the input terminal of the charging unit 413, and the regenerative unit (from the input terminal of the charging unit 413).
  • 415c is configured to include a diode (415c) to block the flow of current.
  • the compensation control unit 420 senses the current flowing through the load to measure the voltage drop of the pulse power supply in real time, and controls the charging unit 413 to generate a compensation power pulse of the corresponding size.
  • the pulse power supply 310 discharges the capacitor (C_storage) so that the output current flows to the load This generates a pulse power supply. Therefore, when a large output current flows, the size of the voltage droop of the pulse power supply increases, and when the current decreases, the size of the voltage droop also decreases.
  • the compensation control unit 420 may calculate the magnitude of the voltage droop when the output current is sensed, and the pulse power compensation device 400 generates a constant current corresponding to the magnitude of the droop to charge the discharge capacitor 414.
  • a compensating voltage having a larger voltage must be generated, and in order to generate a larger compensating voltage, a larger constant current flows to the discharge capacitor 414 to discharge the discharge capacitor 414. ) Should be charged.
  • the compensation controller 420 predicts the magnitude of the final droop of the pulse output voltage based on the current sensed by the current sensor 600, and generates a current suitable for the magnitude of the final droop based on the current.
  • the inverter 413a of the charging unit 413 adjusts the switching frequency of operation.
  • the current value output from the transformer 413b to the rectifier 413c is adjusted, and accordingly, the current value charged in the discharge capacitor 414 is adjusted so that the voltage charged is adjusted to the pulse droop amount. It is adjusted to correspond.
  • the current supplied to the discharge capacitor 414 through the transformer 413b and the rectifier circuit 413c flows a larger current than the current flowing to the load by the power pulse, so that the discharge capacitor ( The voltage charged to 414 becomes a triangular wave shape gradually increasing as shown in FIG. 3B.
  • FIG. 5 is a diagram illustrating a detailed configuration of the compensation controller 420 and the power controller 320 according to an exemplary embodiment of the present invention
  • FIG. 6 is a diagram illustrating signals output from the power controller 320 and the compensation controller 420. Timing diagram.
  • the power controller 320 generates and outputs a pulse width reference value Vref1 that determines a pulse width of a preset power pulse, and outputs the pulse width reference value setting unit 321.
  • Frequency reference value setting unit 322 for generating and outputting a frequency reference value for determining the frequency of the pulse
  • frequency conversion unit 323 for outputting a square pulse having a frequency corresponding to the voltage value input from the frequency reference value setting unit 322
  • a triangular wave generator 324 for generating and outputting a triangular wave Vsaw corresponding to the corresponding frequency by using a square pulse input from the frequency converter 323, and a pulse width reference value V ref1 and a triangular wave Vsaw.
  • a comparator 325 for generating and outputting the timing signal V T of the power supply pulse (see FIGS. 6A and 6B).
  • the timing signal V T output from the comparator 325 is inputted to the current booster 326 and the current value is amplified, and then the signal V T2 of the same timing is inputted to the first differentiator 327 and inverted.
  • the timing signal V T1 is input to the second differentiator 328, and the first differentiator 327 and the second differentiator 328 are signals V ON corresponding to the rising edges of the timing signal V T , respectively.
  • a signal V OFF corresponding to the falling edge is output to the power supply gate drive circuit 329 (see FIGS. 6C and 6D).
  • the compensation controller 420 may include a compensation gate drive circuit 426, an inverter 421, a third differentiator 422, a regenerative gate drive circuit 423, a switching signal generator 425, and an inactive signal generator. And 424.
  • the timing signal V T output from the comparator 325 of the power controller 320 is input to the current booster 326 and to the inverter 421.
  • the inverting unit 421 inverts the input timing signal V T (High-> Low, Low-> High, respectively), and inverts the inverted timing signal V inv by the third differentiator 422. (See (f) of FIG. 6) Therefore, while the timing signal V T of the power supply pulse is High (that is, while the high voltage power supply pulse is generated), the inversion timing signal ( V inv ) is a low state, and while the timing signal V T of the power supply pulse is Low (that is, while no high voltage power supply pulse is generated), the inversion timing signal V inv is High.
  • the inverted timing signal (V inv) inactive signal generator 424 While the inverted timing signal (V inv) inactive signal generator 424, the input to the inverted timing signal (V inv) is High (i.e., while the high-voltage power supply pulse is not generated), the instruction to stop the output of the compensation pulse The inactive signal V fault is generated and output to the switching signal generator 425 (see FIG. 6 (i)).
  • the inverted timing signal (V inv) (during the generation that is, the high voltage power pulse) inactive signal generator 424 receives input the is as long as the inverted timing signal (V inv) Low, the switch signal generation unit 425 Does not generate an inactive signal V fault to control the charging unit 413 to generate a compensation pulse.
  • the switching signal generator 425 While the inactive signal is not input, the switching signal generator 425 measures the voltage value of the current high voltage power pulse using the current value input from the current sensor 600, and the voltage value drooped from the measured high voltage power pulse. , And outputs a compensation control signal to generate a compensation pulse having a compensation voltage equal to the voltage value drooped to the compensation gate drive circuit 426, and the compensation gate drive circuit 426 is charged according to the compensation control signal. Outputs a gate control signal (V CO_GATE ) that controls the turn on / turn off of each semiconductor switching element included in the inverter of the inverter to provide a compensation pulse to the load side to provide a high voltage power pulse having a constant voltage value to the load. On the other hand, the switching signal generator 425 outputs the compensation gate drive circuit 426 when the inactive signal V fault is input. Stops the compensation control signal.
  • V CO_GATE gate control signal
  • the third differentiator 422 generates a regeneration start pulse signal V RE at a timing corresponding to the rising edge of the inversion timing signal V inv (a timing corresponding to the falling edge of the timing signal VT) and regenerates it.
  • the regenerative gate drive circuit 423 is a semiconductor switching element included in the regenerative unit 415 when the regenerative start pulse signal V RE is inputted.
  • the turn-on pulse V RE _GATE to turn on is input to the regenerative unit 415 (see FIG. 6H ).
  • the semiconductor switching element 415a of the regenerative unit 415 is turned on by the turn-on pulse V RE _GATE to convert energy stored in the discharge capacitor 414 of FIG. 4 through the transformer 415b, and a diode Output energy to the smoothing capacitor 412 which is an input terminal of the charging unit 413 through 415c to recycle energy.

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Generation Of Surge Voltage And Current (AREA)

Abstract

La présente invention concerne un dispositif de compensation de puissance d'impulsion. La présente invention peut fournir une puissance d'impulsion ayant une tension constante sans chute de charge à une charge par l'installation supplémentaire d'un dispositif de compensation de puissance d'impulsion d'une structure de circuit simple sans augmenter considérablement la capacité d'un condensateur de telle sorte que le dispositif de compensation de puissance d'impulsion est installé en série entre une alimentation en puissance d'impulsion haute tension et la charge ; la tension de l'impulsion de puissance haute tension délivrée par l'alimentation en puissance d'impulsion haute tension est mesurée à l'aide du courant circulant dans la charge ; une quantité de chute de tension d'une impulsion de puissance fournie à la charge actuelle est calculée à partir de la valeur de courant mesurée, puis la quantité de chute de tension est compensée, générant ainsi, au niveau du dispositif de compensation de puissance d'impulsion, une impulsion de compensation conçue pour fournir une tension constante à la charge et délivrer l'impulsion de compensation à la charge. En outre, la présente invention peut empêcher un gaspillage d'énergie par fourniture d'énergie chargée dans un condensateur de décharge à l'intérieur du dispositif de compensation de puissance d'impulsion en retour à une unité de charge devant être régénérée sans être consommée sous forme de chaleur.
PCT/KR2017/007657 2016-08-25 2017-07-17 Dispositif de compensation de puissance d'impulsion et système d'alimentation en puissance d'impulsion haute tension le comprenant Ceased WO2018038398A1 (fr)

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CN111052874A (zh) * 2018-06-22 2020-04-21 东京毅力科创株式会社 等离子体处理装置和生成等离子体的方法
CN112823405A (zh) * 2018-07-27 2021-05-18 鹰港科技有限公司 纳秒脉冲发生器偏置补偿
CN115494420A (zh) * 2022-10-21 2022-12-20 哈尔滨工业大学 一种用于测试高功率脉冲电源输出性能的方法
TWI852119B (zh) * 2019-01-08 2024-08-11 美商鷹港科技股份有限公司 產生高壓脈波之方法

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KR20130042196A (ko) * 2011-10-18 2013-04-26 한국전기연구원 펄스전원장치의 보호회로 및 그 보호방법
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KR20160018423A (ko) * 2014-08-06 2016-02-17 주식회사 다원시스 펄스 모듈레이터
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08182349A (ja) * 1994-12-27 1996-07-12 Mitsubishi Electric Corp パルス電源装置
KR20130042196A (ko) * 2011-10-18 2013-04-26 한국전기연구원 펄스전원장치의 보호회로 및 그 보호방법
KR20140067260A (ko) * 2012-11-26 2014-06-05 한국전기연구원 능동 전압 드룹 제어형 펄스 전원 시스템
KR20160018423A (ko) * 2014-08-06 2016-02-17 주식회사 다원시스 펄스 모듈레이터
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CN115494420A (zh) * 2022-10-21 2022-12-20 哈尔滨工业大学 一种用于测试高功率脉冲电源输出性能的方法
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