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WO2018035813A1 - Dual-frequency optical source - Google Patents

Dual-frequency optical source Download PDF

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Publication number
WO2018035813A1
WO2018035813A1 PCT/CN2016/096753 CN2016096753W WO2018035813A1 WO 2018035813 A1 WO2018035813 A1 WO 2018035813A1 CN 2016096753 W CN2016096753 W CN 2016096753W WO 2018035813 A1 WO2018035813 A1 WO 2018035813A1
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WO
WIPO (PCT)
Prior art keywords
segment
frequency
optical path
dual
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2016/096753
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French (fr)
Chinese (zh)
Inventor
文侨
梁国文
李冀
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Shenzhen University
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Shenzhen University
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Publication date
Application filed by Shenzhen University filed Critical Shenzhen University
Priority to PCT/CN2016/096753 priority Critical patent/WO2018035813A1/en
Publication of WO2018035813A1 publication Critical patent/WO2018035813A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/082Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression

Definitions

  • the present invention belongs to the field of optical technologies, and in particular, to a dual-frequency light source.
  • the laser measuring instrument used earlier is a single-frequency interferometer based on a single-frequency laser, but the interferometer is seriously affected by environmental factors, especially in the measurement environment, and the measurement distance is longer, which is more affected. Mainly because it produces a constant current signal, the attenuation of the luminescence energy, the presence of air turbulence, and the change of the background light intensity at large distances will cause the beam to shift, which inevitably causes the laser beam to The intensity changes, resulting in a drift of DC light intensity and level. Since single-frequency interferometers are largely limited by DC amplifier drift, optical receiver sensitivity, and laser power fluctuations, single-frequency laser interferometers are difficult to exploit in high-precision measurements.
  • the dual-frequency laser interferometer developed on the basis of a single-frequency laser interferometer is a heterodyne interferometer, and its most remarkable feature is the use of carrier technology to convert the measured physical quantity information into a frequency modulated or amplitude modulated signal. It overcomes the problem of DC drift of the measurement signal of ordinary single-frequency interferometer, has many advantages such as small signal noise, anti-environment interference, allowing multi-channel multiplexing of light source, etc. It is widely used in advanced manufacturing industry and nanotechnology field as distance measurement and speed measurement. , vibration measurement, shape measurement, real position measurement and control.
  • the Zeeman dual-frequency laser utilizes the Zeeman effect, which refers to the phenomenon that if the light source is placed in a magnetic field, the line from the source will split.
  • Zeeman dual-frequency laser output frequency difference is generally below 1MHz, generally not used for high-speed precision laser heterodyne interferometry.
  • the double longitudinal mode laser realizes the laser output of two longitudinal modes in one laser cavity by controlling the cavity length of the laser, etc., and the vertical mode frequency difference can reach 600MHz-lGHz (corresponding laser tube length is 150mm-250mm) .
  • the birefringence dual-frequency laser is an optical element with a birefringence effect such as quartz crystal, calcite, etc. inserted in a single longitudinal mode laser cavity, so that the laser in the cavity is split into o-light and e with different optical resonant cavity lengths.
  • these two orthogonal linearly polarized dual-frequency laser oscillating outputs have a frequency difference between 3 and 40 MHz, and the required frequency difference can be obtained by adjusting the stress of the birefringent crystal.
  • the common feature is that the laser frequency adjustment is difficult, and the frequency difference adjustment range is limited.
  • the Zeeman frequency difference can only be adjusted in a relatively small range, the double longitudinal mode.
  • the laser frequency difference can only be adjusted over a relatively large range, while the birefringence dual frequency can only be adjusted in a certain range in the middle.
  • the laser resonators of the two frequencies of these dual-frequency lasers are completely shared in the geometric optical path, and the two frequencies interact with each other. When changing one frequency of the laser, it often affects another frequency, and is difficult to adjust the frequency.
  • An object of the present invention is to provide a dual-frequency light source, which aims to solve the problem that the frequency adjustment range of the conventional dual-frequency light source is small and the frequency adjustment is difficult.
  • the present invention is achieved by a dual-frequency light source comprising a pumping unit for generating pump light, a resonant cavity unit, and a coupling unit for coupling the pumping light to the resonant cavity unit
  • the resonant cavity unit includes a common optical path segment and a non-common optical path segment, the common optical path segment is provided with a gain medium, and the non-common optical path segment includes a first segment and a first transmission that are independently transmitted and have different optical paths.
  • the coupling unit will be the pump a light beam is coupled into the gain medium to effect particle beam inversion of the gain medium, the dual frequency light source further comprising a first frequency laser and the second resonant cavity for generating the first resonant cavity An output unit that produces a second frequency laser output.
  • the dual frequency light source has the following advantages: [0009] 1.
  • the dual-frequency light source has two resonant cavities (a first resonant cavity and a second resonant cavity), and the two resonant cavities have a common part (common path optical section), and also have different parts (first sub-point) Segment and second segment), the optical paths of the first segment and the second segment are different, causing the first cavity and the second cavity to generate different frequencies, and obtaining a dual-frequency laser, the dual-frequency source is different from two independent
  • the combination of the single-frequency light source, the first resonant cavity and the second resonant cavity share the same gain medium and the same pumping unit, so that the generated dual-frequency laser can realize heterodyne interference and can be used for precise measurement of various physical quantities, and
  • the laser generated by two independent single-frequency lasers cannot interfere with heterodyne.
  • the first segment and the second segment are independent of each other, so adjusting the frequency of one of the laser resonators does not affect the frequency of the other laser cavity, so the frequency is changed conveniently. Able to achieve wideband frequency adjustment range;
  • FIG. 1 is a schematic structural diagram of a first dual-frequency light source according to a first embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of a second dual-frequency light source according to a first embodiment of the present invention
  • FIG. 3 is a schematic structural diagram of a first dual-frequency light source according to a second embodiment of the present invention.
  • FIG. 4 is a schematic structural diagram of a second dual-frequency light source according to a second embodiment of the present invention.
  • FIG. 5 is a schematic structural diagram of a third dual-frequency light source according to a second embodiment of the present invention.
  • FIG. 6 is a schematic structural diagram of a dual-frequency light source according to a third embodiment of the present invention.
  • an embodiment of the present invention provides a dual-frequency light source, which is specifically capable of generating two different frequencies.
  • the light source of the laser includes a pump unit 10, a coupling unit 20, and a cavity unit, wherein the pump unit 10 emits pump light, and the coupling unit 20 couples the pump light to the cavity unit.
  • the resonant cavity unit includes a common optical path segment and a non-common optical path segment, wherein the common optical path segment is provided with a gain medium 30, and the non-common optical path segment includes a first segment 401 and a second segment that are independently transmitted and have different optical paths.
  • the segment 402, the common optical path segment and the first segment 401 form a first resonant cavity, and the common optical path segment and the second segment 402 form a second resonant cavity, the dual-frequency light source further comprising a second resonant cavity
  • the dual-frequency light source is a dual-cavity light source, that is, a first resonant cavity and a second resonant cavity, and the two resonant cavityes have a common optical path, and there is also an independent non-shared optical path, that is, the first segment 401 and The second segment 402, because the optical paths of the first segment 401 and the second segment 402 are different, causes the first cavity and the second cavity to generate a first frequency laser and a second frequency laser having different frequencies. Also, since the two resonant cavities share the same gain medium 30 and pump unit 10, the dual-frequency source is different from the conventional combination of two single-frequency sources.
  • first segment 401 and the second segment 402 there are many means for forming the first segment 401 and the second segment 402 to form a certain optical path difference, for example, the first segment 401 and the second segment 402 have the same transmission medium and different lengths, or The first segment 401 and the second segment 402 have the same transmission medium, the same length but a crystal that changes the optical path on the first segment 401 or the second segment 402, etc., and the embodiment is not limited to the above.
  • the means produces an optical path difference.
  • the dual-frequency light source provided by the embodiment of the invention has the following advantages:
  • the dual-frequency light source has two resonant cavities (a first resonant cavity and a second resonant cavity), and the two resonant cavities have a common part (common path optical section), and also have different parts (first sub-point) Segment 401 and second segment 402), the optical paths of the first segment 401 and the second segment 402 are different to generate different frequencies, and a dual-frequency laser is obtained, which is different from the combination of two independent single-frequency sources.
  • the first resonant cavity and the second resonant cavity share the same gain medium 30 and the same pumping unit 10, so that the generated dual-frequency laser can realize heterodyne interference and can be used for precise measurement of various physical quantities, and two independent The laser generated by the single-frequency laser cannot interfere with heterodyne.
  • the first segment 401 and the second segment 402 are independent of each other, so adjusting the frequency of one of the laser resonators does not affect the frequency of the other laser cavity, so the frequency is changed conveniently. , can also achieve broadband frequency adjustment range;
  • the dual-frequency light source when the pump unit and the coupling unit are free space, the dual-frequency light source further includes a pumping unit 10 and the coupling unit 20 disposed between the pump unit 10 and the coupling unit 20 .
  • the type and structure of the coupling unit 20 can be reasonably selected according to the transmission medium (fiber or free space) of the dual-frequency source.
  • the common optical path segment includes a first common path segment on the side of the gain medium 30 and a second common path segment on the other side of the gain medium 30, that is, the gain medium 30 is located in the common
  • the first segment 401 and the second segment 402 in the non-common optical path segment are parallel optical paths, and are connected between the first common segment and the second common segment, specifically the first segment.
  • One end of the segment 401 and one end of the second segment 402 are commonly connected to one end of the first common path segment, and the other end of the first segment 401 and the other end of the second segment 402 are commonly connected to one end of the second common segment .
  • the gain medium 30 emits light to the first common section and the second common section, and forms a first frequency laser through the first resonant cavity (ie, the first common section, the second common section, and the first section 401).
  • the two resonant cavities form a second frequency laser, and the first frequency laser and the second frequency laser have different frequencies and can be used for heterodyne interference.
  • first segment 401 and one end of the second segment 402 may be commonly connected to one end of the common optical path segment by the first beam splitting unit 701, and the other end of the first segment 401 and the first segment The other end of the two segments 402 may be commonly connected to the other end of the common optical path segment by the second optical splitting unit 702.
  • the type and structure of the first and second beam splitting units can be reasonably selected according to the transmission medium (optical fiber or free space) of the dual-frequency source.
  • Embodiment 1 is a diagrammatic representation of Embodiment 1:
  • the dual-frequency light source provided by the first embodiment of the present invention has the above-mentioned basic structure of the above-described dual-frequency light source, and the repeated description thereof will not be repeated here.
  • the transmission mediums of the common optical path segment, the first segment 401, and the second segment 402 are all optical fibers.
  • the pumping unit 10 is connected to the coupling unit 20 via an input fiber 801.
  • the coupling unit 20 can be a wavelength division multiplexer.
  • the coupling unit 20 is connected to the gain medium 30 through the first optical fiber 802.
  • the gain medium 30 is an independent gain device.
  • the first optical fiber 802 and the second optical fiber 803 may be combined with the first optical fiber 802 or the second optical fiber 803, that is, the first optical fiber 802 or the second optical fiber 803 may be included in the first optical fiber 802 or the second optical fiber 803.
  • the gain material itself is the gain fiber.
  • the first optical fiber 802 and the second optical fiber 803 are transmission media of a common optical path segment.
  • the first segment 401 and the second segment 402 respectively use the third fiber 804 and the fourth fiber 805 as a transmission medium, and the other end of the first fiber 802 is connected to the first segment 4 01 through the first beam splitting unit 701 ( One end of the third optical fiber 804) and one end of the second segment 402 (fourth optical fiber 805) are connected to the first segment 401 through the second beam splitting unit 702 at the other end of the second optical fiber 803 (the third optical fiber 804) The other end and the other end of the second segment 402 (fourth fiber 805).
  • the first beam splitting unit 701 and the second beam splitting unit 702 may adopt a coupler with a high split ratio (for example, 95:5 or more), or a circulator, and the circulator is a Multi-port device, wherein light can only be circulated in a single direction in the circulator, and the opposite direction is isolated.
  • the circulator can accurately transmit the first frequency laser through the third optical fiber 804, so that the second frequency laser passes through the fourth Optical fiber 805 transmission
  • an isolator 90 may be provided on each of the third optical fiber 804 and the fourth optical fiber 805. Further, the first frequency laser and the second frequency laser in this embodiment are reversely transmitted.
  • the first frequency laser and the second frequency laser are output by the output unit 50, specifically, the first segment 401 and the second segment 402 (ie, the third fiber 804 and the fourth fiber).
  • An output unit 50 that is, a first output unit 501 and a second output unit 502, are provided, as shown in FIG. It is also possible to provide the first output unit 501 and the second output unit 502 in the common optical path section to output the first frequency laser and the second frequency laser, respectively.
  • An output unit 503 for outputting the first frequency laser and the second frequency laser may also be disposed on the common optical path segment, as shown in FIG.
  • each of the third optical fiber 804 and the fourth optical fiber 805 may be An adjustable attenuation unit 100 is provided, or an adjustable attenuation unit 100 is provided on either one.
  • a single longitudinal mode unit 110 may be disposed on the first optical fiber 802 or the second optical fiber 803 of the common optical path segment, or in the first segment 401 and the second segment 402 (ie, A single longitudinal mode unit 110 is disposed on each of the three optical fibers 804 and the fourth optical fiber 805) for implementing a single longitudinal mode of the laser to achieve a high phase of the laser Dry, even close to an ideal coherent light source.
  • the single longitudinal mode unit 110 may be a narrow band filter, or may be a unit composed of two collimating lenses and an FP interferometer therebetween.
  • Embodiment 2 is a diagrammatic representation of Embodiment 1
  • the second embodiment of the present invention also has the basic structure of the dual-frequency light source described above, and is not repeated here.
  • the optical transmission medium of the dual-frequency light source of the embodiment is a full free space.
  • the transmission mediums of the common optical path section, the first segment 401 and the second segment 402 are free spaces.
  • the pumping unit 10 outputs the pump light to the coupling unit 20 in the air, or is further transmitted to the coupling unit 20 through the collimating focusing unit 60, and the pumping light enters the common path optical section via the coupling unit 20.
  • the gain medium 30 is located in the common optical path segment, and may be located on the first common path segment or the second common path segment.
  • One end of the first segment 401 and one end of the second segment 402 pass through the first beam splitting unit 701.
  • One end of the first common section is connected, and the other end of the first section 401 and the other end of the second section 402 are connected to one end of the second common section by the second beam splitting unit 702.
  • the transmission medium of the first common section, the second common section, the first section 401 and the second section 402 are all free spaces.
  • the gain medium 30 may be an independent gain device, or the gain medium 30 may be a gain gas, and the gain gas is sealed by a container, and the two ends of the container are directly connected to adjacent devices without gaps, or the container is The ends are sealed and there is a free space from adjacent devices.
  • a collimation focusing unit 60 may be disposed between the pump unit 10 and the coupling unit 20.
  • the coupling unit 20 can adopt a two-color mirror. As shown in FIG. 3, the pump light is incident into the common optical path segment through the dichroic mirror, and the plurality of mirrors 120 and the dichroic mirror form a closed optical path. One part of the optical path is a common optical path section, and the other part is a non-common optical path section, that is, a first segment 401 and a second segment 40 2 .
  • the common optical path segment is divided into a first common section and a second common section by a non-common optical path segment, and both ends of the first segment 401 and the second segment 402 pass through the first combined light splitting unit 701, respectively.
  • the second combined light splitting unit 702 is connected between the first common section and the second common section.
  • the first common section, the second common section and the first section 401 are first resonant cavities
  • the first common section, the second common section and the second section 402 are second resonant cavities.
  • an output unit that can output the first frequency laser and the second frequency laser may be disposed in the common optical path section. Specifically, it may be an output mirror 504 having two output directions. The first frequency laser and the second frequency laser can be directly outputted in the two output directions.
  • a prism 505 and a half reverse may be further disposed after the output mirror 504.
  • the half mirror 506 can output the first frequency laser and the second frequency laser in the same direction.
  • a prism 505 is disposed in one output direction of the output mirror 504, and a half-reverse half mirror 506 is disposed in another output direction of the output mirror 504.
  • the first frequency laser is reflected by the prism 505 to the half-reverse half mirror 506, and second
  • the frequency laser is output directly from the output mirror 504 to the half mirror half 506, and the two laser beams are output in the same direction at the half mirror half 506, and are separated by using ⁇ .
  • an output unit that is, a first output unit 501 and a second output unit 502, may be respectively disposed in the first segment 401 and the second segment 402, respectively outputting a first frequency laser and a second Frequency laser.
  • first output unit 501 and the second output unit 502 may also be disposed in the common optical path segment.
  • an isolator may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment.
  • a single longitudinal mode unit 110 may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment, or a single longitudinal mode unit 110 may be disposed in the common optical path segment.
  • adjustable attenuation unit 100 may also be disposed on the first segment 401 or the second segment 402 as in the first embodiment.
  • an adjustable attenuation unit 100 is provided on each of the first segment 401 and the second segment 402.
  • the third embodiment of the present invention also has the basic structure of the dual-frequency light source described above, and is not repeated here.
  • the optical transmission medium of the dual-frequency light source of the embodiment adopts optical fiber and free space mixing.
  • the common optical path segment adopts a free space, and a circular optical path is formed by the dichroic mirror and the plurality of mirrors 120.
  • the first segment 401 and the second segment 402 are optical fibers, specifically, the first segment 401 and The second segment 402 is transmitted using a fifth fiber 806 and a sixth fiber 807, respectively.
  • the gain medium 30 is located in the free space of the common optical path segment, and the gain medium 30 can be an independent gain device or a gain gas.
  • the gain gas is sealed by a container, and the two ends of the container are directly connected to adjacent devices without gaps, or The ends of the container are sealed and there is a free space from adjacent devices. Both ends of the fifth optical fiber 806 and the sixth optical fiber 807 are connected between the first common path section and the second common path section through the first combined light splitting unit 701 and the second combined light splitting unit 702, respectively.
  • the common optical path segment can also be set to optical fiber transmission, and the first segment 401 and the second segment 402 are set. Set to free space transfer.
  • the gain medium 30 is an independent gain device, and the gain medium 30 can also be combined with the fiber of the common optical path segment, that is, the common optical path segment adopts a gain fiber.
  • an output unit 50 capable of outputting the first frequency laser and the second frequency laser may be disposed in the common optical path section.
  • the first output unit 501 and the second output unit 502 may be disposed in the common optical path segment to output the first frequency laser and the second frequency laser respectively, and the first output may be respectively disposed on the fifth optical fiber 806 and the sixth optical fiber 807.
  • the unit 501 and the second output unit 502 output the first frequency laser and the second frequency laser, respectively.
  • the output unit 50 is disposed in the common optical path segment ⁇ , and includes an output mirror 504 , and may further include a prism 505 and a half reverse half lens 506 , specifically, the first frequency laser and the second frequency.
  • the laser can be output through the output mirror 504 in different directions. It is also possible to provide a half-reverse half mirror 506 in one output direction of the output mirror 504, and a prism 505 in the other output direction, through which the first frequency laser light is reflected to the half-reverse half mirror 506, and the second frequency laser light is outputted by the output mirror 504. Directly outputted to the half mirror half 506, the two laser beams are output in the same direction at the half mirror half 506, and are separated by using ⁇ .
  • an isolator 90 may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment.
  • a single longitudinal mode unit 110 may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment, or a single longitudinal mode unit 110 may be disposed in the common optical path segment.
  • the adjustable attenuation unit 100 may be disposed on the first segment 401 or the second segment 402 as in the first embodiment, or may be disposed on the first segment 401 and the second segment 402. The attenuation unit 100 is adjusted.
  • the dual-frequency light source provided by the embodiment of the present invention uses a special resonant cavity unit, that is, two resonant cavities share the same pumping unit 10 and the gain medium 30, that is, lasers of different frequencies can be obtained, and the dual-frequency laser can be used. Heterodyne interference. Compared with the traditional dual-frequency light source, the frequency adjustment is easy, the adjustment range is large, and the interference resistance is strong.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

A dual-frequency optical source, comprising a pump unit (10), a coupling unit (20), and a resonant cavity unit disposed on an output optical path of the coupling unit (20). The resonant cavity unit comprises a common optical path section and a non-common optical path section. A gain medium (30) is provided at the common optical path section. The non-common optical path section comprises a first section (401) and a second section (402) configured for independent transmission and having different optical path lengths. The common optical path section and the first section (401) form a first resonant cavity. The common optical path section and the second section (402) form a second resonant cavity. The dual-frequency optical source further comprises an output unit (50) used to output a laser beam of a first frequency generated by the first resonant cavity and a laser beam of a second frequency generated by the second resonant cavity. By employing the special resonant cavity unit, and sharing the pump unit and gain medium between the two resonant cavities, the dual-frequency optical source of the present invention generates laser beams of different frequencies, and enables heterodyne interference with laser beams of two frequencies. The present invention facilitates frequency adjustment, provides a large frequency range for adjustment, and has excellent resistance to interference.

Description

一种双频光源 技术领域  Dual frequency light source

[0001] 本发明属于光学技术领域, 特别涉及一种双频光源。  [0001] The present invention belongs to the field of optical technologies, and in particular, to a dual-frequency light source.

背景技术  Background technique

[0002] 激光技术的发展有力的推动了光通信、 非线性光学、 高分辨光学等领域的发展 , 尤其在精密干涉测量方面占据了很大优势。 精密干涉测量主要以激光波长作 为"尺子", 利用干涉原理来测定各种参量, 如加速度、 位移、 角位移等等。 由于 光波长为 nm数量级, 因此其分辨精度是电学、 磁学元件无法比拟的。 激光干涉 仪以其特有的大测量范围、 高分辨率和高测量精度等优点, 在精密和超精密测 长领域获得了广泛的应用。 激光干涉主要使用的激光器为单频激光器和双频激 光器。 较早使用的激光测量仪器是以单频激光为基础的单频干涉仪, 但该干涉 仪受环境因素的影响比较严重,尤其是在测量环境恶劣,测量距离较长吋受影响更 为突出。 主要是因为它产生的是一直流信号,在大距离测量吋光能的衰减、 空气 湍流的存在、 背景光强的变化等对激光束的干扰都会使光束发生偏移, 不可避 免的使激光束强度发生变化, 从而导致直流光强和电平的漂移。 由于单频干涉 仪在测量吋很大程度上受直流放大器的漂移、 光接收器灵敏度和激光功率起伏 的限制, 因此单频激光干涉仪在高精度测量中是很难利用的。  [0002] The development of laser technology has strongly promoted the development of optical communication, nonlinear optics, high-resolution optics, etc., especially in precision interferometry. Precision interferometry mainly uses the laser wavelength as the "ruler" and uses the interference principle to measure various parameters such as acceleration, displacement, angular displacement and so on. Since the wavelength of light is on the order of nm, its resolution is unmatched by electrical and magnetic components. Laser interferometers are widely used in precision and ultra-precision length measurement due to their unique large measurement range, high resolution and high measurement accuracy. The lasers used primarily for laser interference are single-frequency lasers and dual-frequency lasers. The laser measuring instrument used earlier is a single-frequency interferometer based on a single-frequency laser, but the interferometer is seriously affected by environmental factors, especially in the measurement environment, and the measurement distance is longer, which is more affected. Mainly because it produces a constant current signal, the attenuation of the luminescence energy, the presence of air turbulence, and the change of the background light intensity at large distances will cause the beam to shift, which inevitably causes the laser beam to The intensity changes, resulting in a drift of DC light intensity and level. Since single-frequency interferometers are largely limited by DC amplifier drift, optical receiver sensitivity, and laser power fluctuations, single-frequency laser interferometers are difficult to exploit in high-precision measurements.

[0003] 在单频激光干涉仪的基础上发展起来的双频激光干涉仪是一种外差干涉仪, 其 最显著的特点是利用载波技术将被测物理量信息转换成调频或调幅信号, 它克 服了普通单频干涉仪测量信号直流漂移的问题, 具有信号噪声小、 抗环境干扰 、 允许光源多通道复用等诸多优点, 被广泛应用于先进制造行业和纳米技术领 域作为距离测量、 速度测量、 振动测量、 形貌测量, 实吋位置测控等。  [0003] The dual-frequency laser interferometer developed on the basis of a single-frequency laser interferometer is a heterodyne interferometer, and its most remarkable feature is the use of carrier technology to convert the measured physical quantity information into a frequency modulated or amplitude modulated signal. It overcomes the problem of DC drift of the measurement signal of ordinary single-frequency interferometer, has many advantages such as small signal noise, anti-environment interference, allowing multi-channel multiplexing of light source, etc. It is widely used in advanced manufacturing industry and nanotechnology field as distance measurement and speed measurement. , vibration measurement, shape measurement, real position measurement and control.

[0004] 目前使用的双频激光器主要有塞曼双频激光、 双纵模双频激光以及清华大学张 书练教授课题组提出的双折射率双频激光。 塞曼双频激光利用塞曼效应, 该效 应是指若把光源放在磁场中, 光源发出的谱线将发生分裂的这种现象。 塞曼双 频激光器输出频差一般在 1MHz以下, 一般不用于高速精密激光外差干涉测量。 双纵模激光器是通过控制激光器的腔长等, 实现在一个激光谐振腔中输出两个 纵模频率的激光, 纵模频差可达 600MHz-lGHz (对应的激光管长度为 150mm-250 mm)。 双折射双频激光为在单纵模激光谐振腔内, 插入一块具有双折射效应的光 学元件如石英晶体、 方解石等等, 使得腔内的激光分裂成具有不同光学谐振腔 长的 o光和 e光, 这两束正交线偏振的双频激光振荡输出, 其频差为 3-40MHZ之间 , 可通过调节双折射晶体的应力得到所需的频差。 [0004] Currently used dual-frequency lasers mainly include Zeeman dual-frequency laser, dual longitudinal mode dual-frequency laser, and birefringence dual-frequency laser proposed by Professor Zhang Shulian of Tsinghua University. The Zeeman dual-frequency laser utilizes the Zeeman effect, which refers to the phenomenon that if the light source is placed in a magnetic field, the line from the source will split. Zeeman dual-frequency laser output frequency difference is generally below 1MHz, generally not used for high-speed precision laser heterodyne interferometry. The double longitudinal mode laser realizes the laser output of two longitudinal modes in one laser cavity by controlling the cavity length of the laser, etc., and the vertical mode frequency difference can reach 600MHz-lGHz (corresponding laser tube length is 150mm-250mm) . The birefringence dual-frequency laser is an optical element with a birefringence effect such as quartz crystal, calcite, etc. inserted in a single longitudinal mode laser cavity, so that the laser in the cavity is split into o-light and e with different optical resonant cavity lengths. Light, these two orthogonal linearly polarized dual-frequency laser oscillating outputs have a frequency difference between 3 and 40 MHz, and the required frequency difference can be obtained by adjusting the stress of the birefringent crystal.

[0005] 在上述的三种双频激光器中, 其共同特点为激光频率调整难度较大, 且频率差 调整范围较有限, 比如塞曼的频差只能在比较小的范围调节, 双纵模激光频差 只能在比较大的范围调节, 而双折射双频只能在中间某个范围调节。 另外, 这 些双频激光器的两个频率的激光谐振腔在几何光路上完全共程, 两个频率相互 影响, 在改变激光器的一个频率吋, 往往对另外一个频率造成影响, 不易调频 技术问题 [0005] Among the above three dual-frequency lasers, the common feature is that the laser frequency adjustment is difficult, and the frequency difference adjustment range is limited. For example, the Zeeman frequency difference can only be adjusted in a relatively small range, the double longitudinal mode. The laser frequency difference can only be adjusted over a relatively large range, while the birefringence dual frequency can only be adjusted in a certain range in the middle. In addition, the laser resonators of the two frequencies of these dual-frequency lasers are completely shared in the geometric optical path, and the two frequencies interact with each other. When changing one frequency of the laser, it often affects another frequency, and is difficult to adjust the frequency.

[0006] 本发明的目的在于提供一种双频光源, 旨在解决传统双频光源频率调节范围小 、 频率调节困难的问题。  [0006] An object of the present invention is to provide a dual-frequency light source, which aims to solve the problem that the frequency adjustment range of the conventional dual-frequency light source is small and the frequency adjustment is difficult.

问题的解决方案  Problem solution

技术解决方案  Technical solution

[0007] 本发明是这样实现的, 一种双频光源, 包括用于产生泵浦光的泵浦单元、 谐振 腔单元以及用于将所述泵浦光耦合至所述谐振腔单元的耦合单元; 所述谐振腔 单元包括共程光路段和非共程光路段, 所述共程光路段设有增益介质, 所述非 共程光路段包括独立传输且光程不同的第一分段和第二分段, 所述共程光路段 和所述第一分段构成第一谐振腔, 所述共程光路段和所述第二分段构成第二谐 振腔, 所述耦合单元将所述泵浦光耦合到所述增益介质内, 实现所述增益介质 的粒子束反转, 所述双频光源还包括用于将所述第一谐振腔产生的第一频率激 光和所述第二谐振腔产生的第二频率激光输出的输出单元。  The present invention is achieved by a dual-frequency light source comprising a pumping unit for generating pump light, a resonant cavity unit, and a coupling unit for coupling the pumping light to the resonant cavity unit The resonant cavity unit includes a common optical path segment and a non-common optical path segment, the common optical path segment is provided with a gain medium, and the non-common optical path segment includes a first segment and a first transmission that are independently transmitted and have different optical paths. a second segment, the common optical path segment and the first segment form a first resonant cavity, the common optical path segment and the second segment form a second resonant cavity, and the coupling unit will be the pump a light beam is coupled into the gain medium to effect particle beam inversion of the gain medium, the dual frequency light source further comprising a first frequency laser and the second resonant cavity for generating the first resonant cavity An output unit that produces a second frequency laser output.

发明的有益效果  Advantageous effects of the invention

有益效果  Beneficial effect

[0008] 本发明提供的双频光源具有如下优点: [0009] 1、 该双频光源存在两个谐振腔 (第一谐振腔和第二谐振腔) , 这两个谐振腔 有共同的部分 (共程光路段) , 也有不同的部分 (第一分段和第二分段) , 第 一分段和第二分段的光程不同导致第一谐振腔和第二谐振腔产生不同的频率, 获得双频激光, 该双频光源不同于两个独立的单频光源的组合, 第一谐振腔和 第二谐振腔共用相同的增益介质、 相同的泵浦单元, 因此产生的双频激光能够 实现外差干涉, 可用于多种物理量的精密测量, 而两个独立的单频激光产生的 激光不能发生外差干涉。 The dual frequency light source provided by the present invention has the following advantages: [0009] 1. The dual-frequency light source has two resonant cavities (a first resonant cavity and a second resonant cavity), and the two resonant cavities have a common part (common path optical section), and also have different parts (first sub-point) Segment and second segment), the optical paths of the first segment and the second segment are different, causing the first cavity and the second cavity to generate different frequencies, and obtaining a dual-frequency laser, the dual-frequency source is different from two independent The combination of the single-frequency light source, the first resonant cavity and the second resonant cavity share the same gain medium and the same pumping unit, so that the generated dual-frequency laser can realize heterodyne interference and can be used for precise measurement of various physical quantities, and The laser generated by two independent single-frequency lasers cannot interfere with heterodyne.

[0010] 2、 由于存在非共程光路, 第一分段和第二分段相互独立, 因此调整其中一个 激光谐振腔的频率不会影响另外一个激光谐振腔的频率, 因此改变频率便捷, 还能实现宽带的频率调节范围;  [0010] 2. Since the non-common optical path is present, the first segment and the second segment are independent of each other, so adjusting the frequency of one of the laser resonators does not affect the frequency of the other laser cavity, so the frequency is changed conveniently. Able to achieve wideband frequency adjustment range;

[0011] 3、 由于存在共程光路段, 使得温度等外界环境变化对两个谐振腔的频率影响 基本相同, 在利用第一频率激光和第二频率激光进行外差干涉吋, 其频率差值 可以抵消这种影响, 因此该双频光源具有较强的抗干扰性。  [0011] 3. Due to the existence of the common optical path segment, the external environment change such as temperature has substantially the same influence on the frequency of the two resonant cavities, and the heterodyne interference is performed by using the first frequency laser and the second frequency laser, and the frequency difference is This effect can be counteracted, so the dual-frequency source has a strong anti-interference.

对附图的简要说明  Brief description of the drawing

附图说明  DRAWINGS

[0012] 图 1是本发明第一实施例提供的第一种双频光源结构示意图;  1 is a schematic structural diagram of a first dual-frequency light source according to a first embodiment of the present invention;

[0013] 图 2是本发明第一实施例提供的第二种双频光源结构示意图; 2 is a schematic structural diagram of a second dual-frequency light source according to a first embodiment of the present invention;

[0014] 图 3是本发明第二实施例提供的第一种双频光源结构示意图; 3 is a schematic structural diagram of a first dual-frequency light source according to a second embodiment of the present invention;

[0015] 图 4是本发明第二实施例提供的第二种双频光源结构示意图; 4 is a schematic structural diagram of a second dual-frequency light source according to a second embodiment of the present invention;

[0016] 图 5是本发明第二实施例提供的第三种双频光源结构示意图; 5 is a schematic structural diagram of a third dual-frequency light source according to a second embodiment of the present invention;

[0017] 图 6是本发明第三实施例提供的双频光源结构示意图。 6 is a schematic structural diagram of a dual-frequency light source according to a third embodiment of the present invention.

本发明的实施方式 Embodiments of the invention

[0018] 为了使本发明的目的、 技术方案及优点更加清楚明白, 以下结合附图及实施例 , 对本发明进行进一步详细说明。 应当理解, 此处所描述的具体实施例仅仅用 以解释本发明, 并不用于限定本发明。  The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0019] 以下结合具体实施例对本发明的具体实现进行详细描述:  [0019] The specific implementation of the present invention is described in detail below with reference to specific embodiments:

[0020] 请参考图 1, 本发明实施例提供一种双频光源, 具体是一种可产生两种不同频 率激光的光源, 包括泵浦单元 10、 耦合单元 20, 以及谐振腔单元, 其中, 泵浦 单元 10发出泵浦光, 耦合单元 20将泵浦光耦合至谐振腔单元。 该谐振腔单元包 括共程光路段和非共程光路段, 其中, 共程光路段设有增益介质 30, 非共程光 路段包括独立传输且光程不同的第一分段 401和第二分段 402, 共程光路段和第 一分段 401构成第一谐振腔, 共程光路段和第二分段 402构成第二谐振腔, 该双 频光源还包括用于将第一谐振腔产生的第一频率激光和第二谐振腔产生的第二 频率激光输出的输出单元 50。 该双频光源是一种双谐振腔光源, 即第一谐振腔 和第二谐振腔, 而这两个谐振腔存在一段共用光路, 还存在一段独立的非共用 光路, 即第一分段 401和第二分段 402, 由于第一分段 401和第二分段 402的光程 不同, 使第一谐振腔和第二谐振腔产生频率不同的第一频率激光和第二频率激 光。 又由于这两个谐振腔共用同一增益介质 30和泵浦单元 10, 使得该双频光源 不同于传统的两个单频光源的组合。 Referring to FIG. 1 , an embodiment of the present invention provides a dual-frequency light source, which is specifically capable of generating two different frequencies. The light source of the laser includes a pump unit 10, a coupling unit 20, and a cavity unit, wherein the pump unit 10 emits pump light, and the coupling unit 20 couples the pump light to the cavity unit. The resonant cavity unit includes a common optical path segment and a non-common optical path segment, wherein the common optical path segment is provided with a gain medium 30, and the non-common optical path segment includes a first segment 401 and a second segment that are independently transmitted and have different optical paths. The segment 402, the common optical path segment and the first segment 401 form a first resonant cavity, and the common optical path segment and the second segment 402 form a second resonant cavity, the dual-frequency light source further comprising a second resonant cavity The first frequency laser and the output unit 50 of the second frequency laser output generated by the second cavity. The dual-frequency light source is a dual-cavity light source, that is, a first resonant cavity and a second resonant cavity, and the two resonant cavityes have a common optical path, and there is also an independent non-shared optical path, that is, the first segment 401 and The second segment 402, because the optical paths of the first segment 401 and the second segment 402 are different, causes the first cavity and the second cavity to generate a first frequency laser and a second frequency laser having different frequencies. Also, since the two resonant cavities share the same gain medium 30 and pump unit 10, the dual-frequency source is different from the conventional combination of two single-frequency sources.

[0021] 具体地, 使第一分段 401和第二分段 402形成一定的光程差的手段有很多, 例如 第一分段 401和第二分段 402的传输介质相同而长度不同, 或者第一分段 401和第 二分段 402的传输介质相同, 长度相同但是在第一分段 401或第二分段 402上设置 一改变光程的晶体等等, 本实施例不局限于通过上述手段产生光程差。  [0021] Specifically, there are many means for forming the first segment 401 and the second segment 402 to form a certain optical path difference, for example, the first segment 401 and the second segment 402 have the same transmission medium and different lengths, or The first segment 401 and the second segment 402 have the same transmission medium, the same length but a crystal that changes the optical path on the first segment 401 or the second segment 402, etc., and the embodiment is not limited to the above. The means produces an optical path difference.

[0022] 本发明实施例提供的双频光源具有如下优点:  [0022] The dual-frequency light source provided by the embodiment of the invention has the following advantages:

[0023] 1.该双频光源存在两个谐振腔 (第一谐振腔和第二谐振腔) , 这两个谐振腔 有共同的部分 (共程光路段) , 也有不同的部分 (第一分段 401和第二分段 402 ) , 第一分段 401和第二分段 402的光程不同产生不同的频率, 获得双频激光, 该双频光源不同于两个独立的单频光源的组合, 第一谐振腔和第二谐振腔共用 相同的增益介质 30、 相同的泵浦单元 10, 因此产生的双频激光能够实现外差干 涉, 可用于多种物理量的精密测量, 而两个独立的单频激光产生的激光不能发 生外差干涉。  [0023] 1. The dual-frequency light source has two resonant cavities (a first resonant cavity and a second resonant cavity), and the two resonant cavities have a common part (common path optical section), and also have different parts (first sub-point) Segment 401 and second segment 402), the optical paths of the first segment 401 and the second segment 402 are different to generate different frequencies, and a dual-frequency laser is obtained, which is different from the combination of two independent single-frequency sources. The first resonant cavity and the second resonant cavity share the same gain medium 30 and the same pumping unit 10, so that the generated dual-frequency laser can realize heterodyne interference and can be used for precise measurement of various physical quantities, and two independent The laser generated by the single-frequency laser cannot interfere with heterodyne.

[0024] 2.由于存在非共程光路, 第一分段 401和第二分段 402相互独立, 因此调整其 中一个激光谐振腔的频率不会影响另外一个激光谐振腔的频率, 因此改变频率 便捷, 还能实现宽带的频率调节范围;  [0024] 2. Since there is a non-common optical path, the first segment 401 and the second segment 402 are independent of each other, so adjusting the frequency of one of the laser resonators does not affect the frequency of the other laser cavity, so the frequency is changed conveniently. , can also achieve broadband frequency adjustment range;

[0025] 3.由于存在共程光路段, 使得温度等外界环境变化对两个谐振腔的频率影响 基本相同, 在利用第一频率激光和第二频率激光进行外差干涉吋, 其频率差值 可以抵消这种影响, 因此该双频光源具有较强的抗干扰性。 [0025] 3. Due to the existence of a common optical path segment, the influence of external environment changes such as temperature on the frequency of the two resonant cavities Basically the same, in the heterodyne interference using the first frequency laser and the second frequency laser, the frequency difference can offset this effect, so the dual-frequency source has strong anti-interference.

[0026] 作为本发明实施例的一种改进方案, 如图 3, 当泵浦单元和耦合单元之间为自 由空间吋, 双频光源还包括设置于泵浦单元 10和耦合单元 20之间的准直聚焦单 元 60, 用于将泵浦光准直并聚焦到耦合单元 20中。 具体地, 该耦合单元 20的类 型和结构可以根据该双频光源的传输介质 (光纤或自由空间) 合理选择。  As a modification of the embodiment of the present invention, as shown in FIG. 3, when the pump unit and the coupling unit are free space, the dual-frequency light source further includes a pumping unit 10 and the coupling unit 20 disposed between the pump unit 10 and the coupling unit 20 . A collimating focusing unit 60 for collimating and focusing the pumping light into the coupling unit 20. Specifically, the type and structure of the coupling unit 20 can be reasonably selected according to the transmission medium (fiber or free space) of the dual-frequency source.

[0027] 在本发明实施例中, 共程光路段包括位于增益介质 30—侧的第一共程段和位于 增益介质 30另一侧的第二共程段, 也就是说增益介质 30位于共程光路段上, 而 非共程光路段中的第一分段 401和第二分段 402是并列光路, 且连接于第一共程 段和第二共程段之间, 具体是第一分段 401的一端和第二分段 402的一端共同连 接于第一共程段的一端, 第一分段 401的另一端和第二分段 402的另一端共同连 接于第二共程段的一端。 增益介质 30向第一共程段和第二共程段发光, 经第一 谐振腔 (即第一共程段、 第二共程段和第一分段 401) 形成第一频率激光, 经第 二谐振腔 (第一共程段、 第二共程段和第二分段 402) 形成第二频率激光, 第一 频率激光和第二频率激光具有不同的频率, 可用于外差干涉。  In the embodiment of the present invention, the common optical path segment includes a first common path segment on the side of the gain medium 30 and a second common path segment on the other side of the gain medium 30, that is, the gain medium 30 is located in the common On the Chengguang section, the first segment 401 and the second segment 402 in the non-common optical path segment are parallel optical paths, and are connected between the first common segment and the second common segment, specifically the first segment. One end of the segment 401 and one end of the second segment 402 are commonly connected to one end of the first common path segment, and the other end of the first segment 401 and the other end of the second segment 402 are commonly connected to one end of the second common segment . The gain medium 30 emits light to the first common section and the second common section, and forms a first frequency laser through the first resonant cavity (ie, the first common section, the second common section, and the first section 401). The two resonant cavities (the first common section, the second common section, and the second section 402) form a second frequency laser, and the first frequency laser and the second frequency laser have different frequencies and can be used for heterodyne interference.

[0028] 进一步地, 第一分段 401的一端和第二分段 402的一端可以通过第一分光合光单 元 701共同连接于共程光路段的一端, 第一分段 401的另一端和第二分段 402的另 一端可以通过第二分光合光单元 702共同连接于共程光路段的另一端。 具体地, 该第一、 第二分光合光单元的类型和结构可以根据该双频光源的传输介质 (光 纤或自由空间) 合理选择。  [0028] Further, one end of the first segment 401 and one end of the second segment 402 may be commonly connected to one end of the common optical path segment by the first beam splitting unit 701, and the other end of the first segment 401 and the first segment The other end of the two segments 402 may be commonly connected to the other end of the common optical path segment by the second optical splitting unit 702. Specifically, the type and structure of the first and second beam splitting units can be reasonably selected according to the transmission medium (optical fiber or free space) of the dual-frequency source.

[0029] 以下按照不同的传输介质进行划分, 通过几个具体实施例对本发明进行进一步 说明:  [0029] The following is divided according to different transmission media, and the present invention is further illustrated by several specific embodiments:

[0030] 实施例一:  [0030] Embodiment 1:

[0031] 如图 1, 本发明第一实施例提供的双频光源, 其具有上述双频光源的上述基本 结构, 此处不进行重复说明。 进一步地, 在本实施例中, 上述共程光路段、 第 一分段 401及第二分段 402的传输媒介均为光纤。 泵浦单元 10通过输入光纤 801连 接耦合单元 20, 该耦合单元 20可以采用波分复用器, 耦合单元 20通过第一光纤 8 02连接增益介质 30, 该增益介质 30为独立的增益器件, 非共程光路段的两侧分 别连接第一光纤 802和第二光纤 803, 在其他实施例中, 增益介质 30也可以和第 一光纤 802或者第二光纤 803合二为一, 即第一光纤 802或者第二光纤 803中含有 增益物质, 本身即为增益光纤。 该第一光纤 802和第二光纤 803为共程光路段的 传输媒介。 第一分段 401和第二分段 402分别采用第三光纤 804和第四光纤 805作 为传输媒介, 第一光纤 802的另一端通过第一分光合光单元 701连接着第一分段 4 01 (第三光纤 804) 的一端和第二分段 402 (第四光纤 805) 的一端, 在第二光纤 803的另一端通过第二分光合光单元 702连接着第一分段 401 (第三光纤 804) 的 另一端和第二分段 402 (第四光纤 805) 的另一端。 [0031] As shown in FIG. 1, the dual-frequency light source provided by the first embodiment of the present invention has the above-mentioned basic structure of the above-described dual-frequency light source, and the repeated description thereof will not be repeated here. Further, in this embodiment, the transmission mediums of the common optical path segment, the first segment 401, and the second segment 402 are all optical fibers. The pumping unit 10 is connected to the coupling unit 20 via an input fiber 801. The coupling unit 20 can be a wavelength division multiplexer. The coupling unit 20 is connected to the gain medium 30 through the first optical fiber 802. The gain medium 30 is an independent gain device. Both sides of the common optical path The first optical fiber 802 and the second optical fiber 803 may be combined with the first optical fiber 802 or the second optical fiber 803, that is, the first optical fiber 802 or the second optical fiber 803 may be included in the first optical fiber 802 or the second optical fiber 803. The gain material itself is the gain fiber. The first optical fiber 802 and the second optical fiber 803 are transmission media of a common optical path segment. The first segment 401 and the second segment 402 respectively use the third fiber 804 and the fourth fiber 805 as a transmission medium, and the other end of the first fiber 802 is connected to the first segment 4 01 through the first beam splitting unit 701 ( One end of the third optical fiber 804) and one end of the second segment 402 (fourth optical fiber 805) are connected to the first segment 401 through the second beam splitting unit 702 at the other end of the second optical fiber 803 (the third optical fiber 804) The other end and the other end of the second segment 402 (fourth fiber 805).

[0032] 在本实施例中, 该第一分光合光单元 701、 第二分光合光单元 702可以采用高分 光比 (如 95:5以上) 的耦合器, 或者采用环形器, 环形器是一个多端口器件, 其 中光在环形器内传输只能沿单方向环行, 反方向是隔离的, 采用环形器可以准 确的使第一频率激光经第三光纤 804传输, 使第二频率激光经第四光纤 805传输 [0032] In this embodiment, the first beam splitting unit 701 and the second beam splitting unit 702 may adopt a coupler with a high split ratio (for example, 95:5 or more), or a circulator, and the circulator is a Multi-port device, wherein light can only be circulated in a single direction in the circulator, and the opposite direction is isolated. The circulator can accurately transmit the first frequency laser through the third optical fiber 804, so that the second frequency laser passes through the fourth Optical fiber 805 transmission

[0033] 为了进一步防止第一频率激光和第二频率激光受到逆向激光的干扰, 可以在第 三光纤 804和第四光纤 805上各设一个隔离器 90。 另外, 本实施例中的第一频率 激光和第二频率激光是反向传输的。 [0033] In order to further prevent the first frequency laser and the second frequency laser from being disturbed by the reverse laser, an isolator 90 may be provided on each of the third optical fiber 804 and the fourth optical fiber 805. Further, the first frequency laser and the second frequency laser in this embodiment are reversely transmitted.

[0034] 在本实施例中, 第一频率激光和第二频率激光由输出单元 50输出, 具体地, 可 以在第一分段 401和第二分段 402 (即第三光纤 804和第四光纤 805) 各设置一输 出单元 50, 即第一输出单元 501和第二输出单元 502, 如图 2。 也可以在共程光路 段设置第一输出单元 501和第二输出单元 502, 分别输出第一频率激光和第二频 率激光。 还可以在共程光路段上设置一个可输出第一频率激光和第二频率激光 的输出单元 503, 如图 1。  [0034] In the present embodiment, the first frequency laser and the second frequency laser are output by the output unit 50, specifically, the first segment 401 and the second segment 402 (ie, the third fiber 804 and the fourth fiber). 805) An output unit 50, that is, a first output unit 501 and a second output unit 502, are provided, as shown in FIG. It is also possible to provide the first output unit 501 and the second output unit 502 in the common optical path section to output the first frequency laser and the second frequency laser, respectively. An output unit 503 for outputting the first frequency laser and the second frequency laser may also be disposed on the common optical path segment, as shown in FIG.

[0035] 在本实施例中, 激光在谐振腔中传输会有损耗, 为了避免第一谐振腔和第二谐 振腔的光功率相差过大, 可以在第三光纤 804和第四光纤 805上各设置一个可调 衰减单元 100, 或者在二者之一上设置一个可调衰减单元 100。  [0035] In this embodiment, the laser is transmitted in the resonant cavity with loss. In order to avoid the optical power difference between the first resonant cavity and the second resonant cavity being too large, each of the third optical fiber 804 and the fourth optical fiber 805 may be An adjustable attenuation unit 100 is provided, or an adjustable attenuation unit 100 is provided on either one.

[0036] 在本实施例中, 还可以在共程光路段的第一光纤 802或第二光纤 803上设置单纵 模单元 110, 或者在第一分段 401和第二分段 402 (即第三光纤 804和第四光纤 805 ) 上各设置一单纵模单元 110, 用于实现激光器的单纵模, 以便实现激光的高相 干性, 甚至接近于理想相干光源。 具体地, 该单纵模单元 110可以是窄带滤波器 , 也可以是由两个准直透镜和二者之间的 F-P干涉仪构成的单元。 [0036] In this embodiment, a single longitudinal mode unit 110 may be disposed on the first optical fiber 802 or the second optical fiber 803 of the common optical path segment, or in the first segment 401 and the second segment 402 (ie, A single longitudinal mode unit 110 is disposed on each of the three optical fibers 804 and the fourth optical fiber 805) for implementing a single longitudinal mode of the laser to achieve a high phase of the laser Dry, even close to an ideal coherent light source. Specifically, the single longitudinal mode unit 110 may be a narrow band filter, or may be a unit composed of two collimating lenses and an FP interferometer therebetween.

[0037] 实施例二: [0037] Embodiment 2:

[0038] 本发明第二实施例也具有上述双频光源的基本结构, 此处不再重复, 与实施例 一不同的是, 本实施例的双频光源的光传输媒介为全自由空间。 如图 3, 上述共 程光路段、 第一分段 401及第二分段 402的传输媒介均为自由空间。 泵浦单元 10 输出泵浦光在空气中传输至耦合单元 20, 或者通过准直聚焦单元 60进一步传输 至耦合单元 20, 泵浦光经耦合单元 20进入共程光路段。 增益介质 30位于共程光 路段中, 具体可以位于第一共程段或者第二共程段上, 第一分段 401的一端和第 二分段 402的一端通过第一分光合光单元 701共同连接第一共程段的一端, 第一 分段 401的另一端和第二分段 402的另一端通过第二分光合光单元 702共同连接第 二共程段的一端。 该第一共程段、 第二共程段、 第一分段 401和第二分段 402的 传输媒介均为自由空间。  The second embodiment of the present invention also has the basic structure of the dual-frequency light source described above, and is not repeated here. Different from the first embodiment, the optical transmission medium of the dual-frequency light source of the embodiment is a full free space. As shown in Fig. 3, the transmission mediums of the common optical path section, the first segment 401 and the second segment 402 are free spaces. The pumping unit 10 outputs the pump light to the coupling unit 20 in the air, or is further transmitted to the coupling unit 20 through the collimating focusing unit 60, and the pumping light enters the common path optical section via the coupling unit 20. The gain medium 30 is located in the common optical path segment, and may be located on the first common path segment or the second common path segment. One end of the first segment 401 and one end of the second segment 402 pass through the first beam splitting unit 701. One end of the first common section is connected, and the other end of the first section 401 and the other end of the second section 402 are connected to one end of the second common section by the second beam splitting unit 702. The transmission medium of the first common section, the second common section, the first section 401 and the second section 402 are all free spaces.

[0039] 上述增益介质 30可以为独立的增益器件, 或者, 增益介质 30采用增益气体, 该 增益气体由一容器密封, 该容器的两端直接无间隙对接于相邻器件, 或者, 该 容器的两端密封且距离相邻器件还有一段自由空间。  [0039] The gain medium 30 may be an independent gain device, or the gain medium 30 may be a gain gas, and the gain gas is sealed by a container, and the two ends of the container are directly connected to adjacent devices without gaps, or the container is The ends are sealed and there is a free space from adjacent devices.

[0040] 进一步地, 还可以在泵浦单元 10和耦合单元 20之间设置准直聚焦单元 60。  Further, a collimation focusing unit 60 may be disposed between the pump unit 10 and the coupling unit 20.

[0041] 进一步地, 该耦合单元 20可以采用双色镜, 如图 3, 泵浦光经双色镜入射进入 共程光路段, 由若干个反射镜 120与该双色镜形成了闭合的光路, 该闭合光路的 一部分是共程光路段, 另一部分是非共程光路段, 即第一分段 401和第二分段 40 2。 共程光路段以非共程光路段为界划分为第一共程段和第二共程段, 而第一分 段 401和第二分段 402的两端分别通过第一合光分光单元 701和第二合光分光单元 702连接于第一共程段和第二共程段之间。 第一共程段、 第二共程段和第一分段 401为第一谐振腔, 第一共程段、 第二共程段和第二分段 402为第二谐振腔。  [0041] Further, the coupling unit 20 can adopt a two-color mirror. As shown in FIG. 3, the pump light is incident into the common optical path segment through the dichroic mirror, and the plurality of mirrors 120 and the dichroic mirror form a closed optical path. One part of the optical path is a common optical path section, and the other part is a non-common optical path section, that is, a first segment 401 and a second segment 40 2 . The common optical path segment is divided into a first common section and a second common section by a non-common optical path segment, and both ends of the first segment 401 and the second segment 402 pass through the first combined light splitting unit 701, respectively. And the second combined light splitting unit 702 is connected between the first common section and the second common section. The first common section, the second common section and the first section 401 are first resonant cavities, and the first common section, the second common section and the second section 402 are second resonant cavities.

[0042] 参考图 3, 关于激光输出, 可以在共程光路段设置一个可输出第一频率激光和 第二频率激光的输出单元。 具体可以是一输出镜 504, 其具有两个输出方向。 可 以直接将第一频率激光和第二频率激光沿着这两个输出方向分别输出。  Referring to FIG. 3, regarding the laser output, an output unit that can output the first frequency laser and the second frequency laser may be disposed in the common optical path section. Specifically, it may be an output mirror 504 having two output directions. The first frequency laser and the second frequency laser can be directly outputted in the two output directions.

[0043] 进一步参考图 4, 还可以在上述输出镜 504之后进一步设置一棱镜 505和一半反 半透镜 506, 此吋可以将第一频率激光和第二频率激光同向输出。 具体地, 在输 出镜 504的一个输出方向设置棱镜 505, 在该输出镜 504的另一输出方向设置半反 半透镜 506, 第一频率激光经过该棱镜 505反射至半反半透镜 506, 第二频率激光 由输出镜 504直接向半反半透镜 506输出, 两束激光于半反半透镜 506处同方向输 出, 待使用吋进行分离。 [0043] Further referring to FIG. 4, a prism 505 and a half reverse may be further disposed after the output mirror 504. The half mirror 506 can output the first frequency laser and the second frequency laser in the same direction. Specifically, a prism 505 is disposed in one output direction of the output mirror 504, and a half-reverse half mirror 506 is disposed in another output direction of the output mirror 504. The first frequency laser is reflected by the prism 505 to the half-reverse half mirror 506, and second The frequency laser is output directly from the output mirror 504 to the half mirror half 506, and the two laser beams are output in the same direction at the half mirror half 506, and are separated by using 吋.

[0044] 进一步参考图 5, 还可以在第一分段 401和第二分段 402分别设置一输出单元, 即第一输出单元 501和第二输出单元 502, 分别输出第一频率激光和第二频率激 光。 [0044] Further referring to FIG. 5, an output unit, that is, a first output unit 501 and a second output unit 502, may be respectively disposed in the first segment 401 and the second segment 402, respectively outputting a first frequency laser and a second Frequency laser.

[0045] 在本实施例中, 也可以在共程光路段设置第一输出单元 501和第二输出单元 502 [0045] In this embodiment, the first output unit 501 and the second output unit 502 may also be disposed in the common optical path segment.

, 分别输出第一频率激光和第二频率激光, 图中未示。 , respectively outputting the first frequency laser and the second frequency laser, which are not shown in the figure.

[0046] 进一步地, 还可以如实施例一在第一分段 401和第二分段 402上各设置一隔离器[0046] Further, an isolator may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment.

90。 90.

[0047] 进一步地, 还可以如实施例一在第一分段 401和第二分段 402上各设置一单纵模 单元 110, 或者在共程光路段设置一单纵模单元 110。  Further, a single longitudinal mode unit 110 may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment, or a single longitudinal mode unit 110 may be disposed in the common optical path segment.

[0048] 进一步地, 还可以如实施例一在第一分段 401或者第二分段 402上设置可调衰减 单元 100。 或者在第一分段 401和第二分段 402上各设置一可调衰减单元 100。 Further, the adjustable attenuation unit 100 may also be disposed on the first segment 401 or the second segment 402 as in the first embodiment. Alternatively, an adjustable attenuation unit 100 is provided on each of the first segment 401 and the second segment 402.

[0049] 实施例三: [0049] Embodiment 3:

[0050] 本发明第三实施例也具有上述双频光源的基本结构, 此处不再重复, 与实施例 一不同的是, 本实施例的双频光源的光传输介质采用光纤和自由空间混合。 如 图 6, 上述共程光路段采用自由空间, 由双色镜和若干个反射镜 120形成环形的 光路, 第一分段 401及第二分段 402采用光纤, 具体地, 第一分段 401和第二分段 402分别采用第五光纤 806和第六光纤 807传输。 增益介质 30位于共程光路段的自 由空间, 增益介质 30可以为独立的增益器件或者采用增益气体, 该增益气体由 一容器密封, 该容器的两端直接无间隙对接于相邻器件, 或者, 该容器的两端 密封且距离相邻器件还有一段自由空间。 第五光纤 806和第六光纤 807的两端分 别通过第一合光分光单元 701和第二合光分光单元 702连接至第一共程段和第二 共程段之间。  [0050] The third embodiment of the present invention also has the basic structure of the dual-frequency light source described above, and is not repeated here. Different from the first embodiment, the optical transmission medium of the dual-frequency light source of the embodiment adopts optical fiber and free space mixing. . As shown in FIG. 6, the common optical path segment adopts a free space, and a circular optical path is formed by the dichroic mirror and the plurality of mirrors 120. The first segment 401 and the second segment 402 are optical fibers, specifically, the first segment 401 and The second segment 402 is transmitted using a fifth fiber 806 and a sixth fiber 807, respectively. The gain medium 30 is located in the free space of the common optical path segment, and the gain medium 30 can be an independent gain device or a gain gas. The gain gas is sealed by a container, and the two ends of the container are directly connected to adjacent devices without gaps, or The ends of the container are sealed and there is a free space from adjacent devices. Both ends of the fifth optical fiber 806 and the sixth optical fiber 807 are connected between the first common path section and the second common path section through the first combined light splitting unit 701 and the second combined light splitting unit 702, respectively.

[0051] 当然, 也可以将共程光路段设置为光纤传输, 将第一分段 401和第二分段 402设 置为自由空间传输。 此吋, 增益介质 30为独立的增益器件, 增益介质 30也可以 和共程光路段的光纤合二为一, 即共程光路段采用增益光纤。 [0051] Of course, the common optical path segment can also be set to optical fiber transmission, and the first segment 401 and the second segment 402 are set. Set to free space transfer. In this case, the gain medium 30 is an independent gain device, and the gain medium 30 can also be combined with the fiber of the common optical path segment, that is, the common optical path segment adopts a gain fiber.

[0052] 进一步地, 关于双频激光的输出, 可以在共程光路段设置一个可输出第一频率 激光和第二频率激光的输出单元 50。 也可以在共程光路段设置第一输出单元 501 和第二输出单元 502, 分别输出第一频率激光和第二频率激光, 还可以在第五光 纤 806和第六光纤 807上分别设置第一输出单元 501和第二输出单元 502, 分别输 出第一频率激光和第二频率激光。 Further, regarding the output of the dual-frequency laser, an output unit 50 capable of outputting the first frequency laser and the second frequency laser may be disposed in the common optical path section. The first output unit 501 and the second output unit 502 may be disposed in the common optical path segment to output the first frequency laser and the second frequency laser respectively, and the first output may be respectively disposed on the fifth optical fiber 806 and the sixth optical fiber 807. The unit 501 and the second output unit 502 output the first frequency laser and the second frequency laser, respectively.

[0053] 具体参考图 6, 输出单元 50设置于共程光路段吋, 包括一输出镜 504、 还可以进 一步包括一棱镜 505和一半反半透镜 506, 具体地, 第一频率激光和第二频率激 光可以沿着不同的方向通过输出镜 504输出。 还可以在输出镜 504的一个输出方 向设置半反半透镜 506, 在另一输出方向设置棱镜 505, 第一频率激光经过该棱 镜 505反射至半反半透镜 506, 第二频率激光由输出镜 504直接向半反半透镜 506 输出, 两束激光于半反半透镜 506处同方向输出, 待使用吋进行分离。  Referring to FIG. 6 , the output unit 50 is disposed in the common optical path segment 吋, and includes an output mirror 504 , and may further include a prism 505 and a half reverse half lens 506 , specifically, the first frequency laser and the second frequency. The laser can be output through the output mirror 504 in different directions. It is also possible to provide a half-reverse half mirror 506 in one output direction of the output mirror 504, and a prism 505 in the other output direction, through which the first frequency laser light is reflected to the half-reverse half mirror 506, and the second frequency laser light is outputted by the output mirror 504. Directly outputted to the half mirror half 506, the two laser beams are output in the same direction at the half mirror half 506, and are separated by using 吋.

[0054] 进一步地, 还可以如实施例一在第一分段 401和第二分段 402上各设置一隔离器 90。  Further, an isolator 90 may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment.

[0055] 进一步地, 还可以如实施例一在第一分段 401和第二分段 402上各设置一单纵模 单元 110, 或者在共程光路段设置一单纵模单元 110。  [0055] Further, a single longitudinal mode unit 110 may be disposed on each of the first segment 401 and the second segment 402 as in the first embodiment, or a single longitudinal mode unit 110 may be disposed in the common optical path segment.

[0056] 进一步地, 还可以如实施例一在第一分段 401或者第二分段 402上设置可调衰减 单元 100, 或者在第一分段 401和第二分段 402上均设置一可调衰减单元 100。 [0056] Further, the adjustable attenuation unit 100 may be disposed on the first segment 401 or the second segment 402 as in the first embodiment, or may be disposed on the first segment 401 and the second segment 402. The attenuation unit 100 is adjusted.

[0057] 本发明实施例提供的双频光源采用特殊的谐振腔单元, 即两个谐振腔共用相同 泵浦单元 10和增益介质 30, 即能够获得不同频率激光, 又可采用该双频激光进 行外差干涉。 与传统的双频光源相比, 其频率调节容易, 调节范围大, 且抗干 扰性强。 [0057] The dual-frequency light source provided by the embodiment of the present invention uses a special resonant cavity unit, that is, two resonant cavities share the same pumping unit 10 and the gain medium 30, that is, lasers of different frequencies can be obtained, and the dual-frequency laser can be used. Heterodyne interference. Compared with the traditional dual-frequency light source, the frequency adjustment is easy, the adjustment range is large, and the interference resistance is strong.

[0058] 如上所述仅为本发明的较佳实施例而已, 并不用以限制本发明, 凡在本发明的 精神和原则之内所作的任何修改、 等同替换和改进等, 均应包含在本发明的保 护范围之内。  The above description is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the present invention. Within the scope of protection of the invention.

Claims

权利要求书  Claim 一种双频光源, 其特征在于, 包括用于产生泵浦光的泵浦单元、 谐振 腔单元以及用于将所述泵浦光耦合至所述谐振腔单元的耦合单元; 所 述谐振腔单元包括共程光路段和非共程光路段, 所述共程光路段设有 增益介质, 所述非共程光路段包括独立传输且光程不同的第一分段和 第二分段, 所述共程光路段和所述第一分段构成第一谐振腔, 所述共 程光路段和所述第二分段构成第二谐振腔, 所述耦合单元将所述泵浦 光耦合到所述增益介质内, 实现所述增益介质的粒子束反转, 所述双 频光源还包括用于将所述第一谐振腔产生的第一频率激光和所述第二 谐振腔产生的第二频率激光输出的输出单元。 A dual frequency light source, comprising: a pumping unit for generating pump light, a resonant cavity unit, and a coupling unit for coupling the pumping light to the resonant cavity unit; the resonant cavity unit a common optical path segment and a non-common optical path segment, wherein the common optical path segment is provided with a gain medium, and the non-common optical path segment includes a first segment and a second segment that are independently transmitted and have different optical paths. The common optical path segment and the first segment form a first resonant cavity, the common optical path segment and the second segment form a second resonant cavity, and the coupling unit couples the pump light to the a particle beam inversion of the gain medium is implemented in the gain medium, the dual-frequency light source further comprising a first frequency laser for generating the first cavity and a second frequency laser generated by the second cavity Output unit for output. 如权利要求 1所述的双频光源, 其特征在于, 还包括设置于所述泵浦 单元和所述耦合单元之间的准直聚焦单元。 A dual-frequency light source according to claim 1, further comprising a collimating focusing unit disposed between said pumping unit and said coupling unit. 如权利要求 1所述的双频光源, 其特征在于, 所述共程光路段包括位 于所述非共程光路段一侧的第一共程段和位于所述非共程光路段另一 侧的第二共程段, 所述第一分段和第二分段并列连接于所述第一共程 段和第二共程段之间, 所述增益介质发出的光经所述第一谐振腔形成 所述第一频率激光, 所述增益介质发出的光经所述第二谐振腔形成所 述第二频率激光。 The dual-frequency light source according to claim 1, wherein the common optical path segment comprises a first common path segment on one side of the non-common optical path segment and another side of the non-common optical path segment a second common section, the first segment and the second segment are connected in parallel between the first common segment and the second common segment, and the light emitted by the gain medium passes through the first resonance The cavity forms the first frequency laser, and the light emitted by the gain medium forms the second frequency laser through the second cavity. 如权利要求 1所述的双频光源, 其特征在于, 所述输出单元设置于所 述共程光路段。 The dual-frequency light source according to claim 1, wherein said output unit is disposed in said common path optical path. 如权利要求 4所述的双频光源, 其特征在于, 所述输出单元为可同吋 输出所述第一频率激光和第二频率激光的输出单元。 The dual-frequency light source according to claim 4, wherein said output unit is an output unit that can simultaneously output said first frequency laser and said second frequency laser. 如权利要求 4所述的双频光源, 其特征在于, 所述输出单元包括用于 输出第一频率激光的第一输出单元和用于输出第二频率激光的第二输 出单元。 A dual-frequency light source according to claim 4, wherein said output unit comprises a first output unit for outputting a first frequency laser and a second output unit for outputting a second frequency laser. 如权利要求 1所述的双频光源, 其特征在于, 所述第一分段和第二分 段各设有一所述输出单元。 A dual-frequency light source according to claim 1, wherein said first segment and said second segment are each provided with said output unit. 如权利要求 1所述的双频光源, 其特征在于, 所述第一分段的一端和 第二分段的一端通过第一分光合光单元共同连接于所述共程光路段的 一端, 所述第一分段的另一端和第二分段的另一端通过第二分光合光 单元共同连接于所述共程光路段的另一端。 A dual-frequency light source according to claim 1, wherein: one end of said first segment and One end of the second segment is commonly connected to one end of the common optical path segment by a first beam splitting unit, and the other end of the first segment and the other end of the second segment are shared by a second beam splitting unit Connected to the other end of the common optical path segment. [权利要求 9] 如权利要求 1所述的双频光源, 其特征在于, 在所述第一分段和第二 分段上各设有一隔离器。  [Claim 9] The dual-frequency light source according to claim 1, wherein an isolator is provided on each of the first segment and the second segment. [权利要求 10] 如权利要求 1所述的双频光源, 其特征在于, 在所述共程光路段设有 一单纵模单元, 或者在所述第一分段和第二分段各设有一单纵模单元 [Claim 10] The dual-frequency light source according to claim 1, wherein a single longitudinal mode unit is disposed in the common optical path section, or one of the first segment and the second segment is disposed in each Single longitudinal mode unit [权利要求 11] 如权利要求 1所述的双频光源, 其特征在于, 在所述第一分段和 /或第 二分段设有可调衰减单元。 [Claim 11] The dual-frequency light source according to claim 1, wherein an adjustable attenuation unit is provided in the first segment and/or the second segment. [权利要求 12] 如权利要求 1~11任一项所述的双频光源, 其特征在于, 所述共程光路 段、 第一分段及第二分段的传输媒介均为光纤。 The dual-frequency light source according to any one of claims 1 to 11, wherein the transmission medium of the common optical path segment, the first segment and the second segment is an optical fiber. [权利要求 13] 如权利要求 1~11任一项所述的双频光源, 其特征在于, 所述共程光路 段、 第一分段及第二分段的传输媒介均为自由空间。 The dual-frequency light source according to any one of claims 1 to 11, wherein the transmission medium of the common optical path segment, the first segment and the second segment is a free space. [权利要求 14] 如权利要求 1~11任一项所述的双频光源, 其特征在于, 所述共程光路 段的传输媒介为自由空间, 所述第一分段及第二分段的传输媒介为光 纤; 或者, 所述共程光路段的传输媒介为光纤, 所述第一分段及第二 分段的传输媒介为自由空间。 The dual-frequency light source according to any one of claims 1 to 11, wherein the transmission medium of the common optical path segment is a free space, and the first segment and the second segment are The transmission medium is an optical fiber; or the transmission medium of the common optical path segment is an optical fiber, and the transmission medium of the first segment and the second segment is a free space.
PCT/CN2016/096753 2016-08-25 2016-08-25 Dual-frequency optical source Ceased WO2018035813A1 (en)

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