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WO2018034363A1 - Dust collecting cleaner having interference avoidance structure - Google Patents

Dust collecting cleaner having interference avoidance structure Download PDF

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Publication number
WO2018034363A1
WO2018034363A1 PCT/KR2016/009090 KR2016009090W WO2018034363A1 WO 2018034363 A1 WO2018034363 A1 WO 2018034363A1 KR 2016009090 W KR2016009090 W KR 2016009090W WO 2018034363 A1 WO2018034363 A1 WO 2018034363A1
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WO
WIPO (PCT)
Prior art keywords
dust collecting
air
open space
cleaner
air knife
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2016/009090
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French (fr)
Korean (ko)
Other versions
WO2018034363A8 (en
Inventor
황창배
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ntk Corp Co Ltd
Original Assignee
Ntk Corp Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ntk Corp Co Ltd filed Critical Ntk Corp Co Ltd
Priority to CN201680087016.8A priority Critical patent/CN109414737B/en
Priority to PCT/KR2016/009090 priority patent/WO2018034363A1/en
Publication of WO2018034363A1 publication Critical patent/WO2018034363A1/en
Anticipated expiration legal-status Critical
Publication of WO2018034363A8 publication Critical patent/WO2018034363A8/en
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Definitions

  • the present invention relates to a dust collecting cleaner of an interference avoiding structure, and more particularly, to a dust collecting cleaner of an interference avoiding structure capable of removing various types of foreign substances generated during a surface processing of a substrate by an optical device such as a laser.
  • Various types of fine particles can be generated in the processing of a product by an optical device such as a laser and directly or indirectly affect the quality of the product.
  • Various dust collectors or cleaners for the removal of such fine particles are known in the art, and for example devices such as air knives can be applied for the removal of fine dust.
  • Korea Patent Registration No. 10-0766522 is coupled to the first block to form an air flow passage together with the first block and the first block disposed inclined with respect to the axis perpendicular to the substrate above the substrate, such as an LCD panel And a second block disposed to be inclined with respect to an axis perpendicular to the substrate to spray the air introduced into the air flow passage to the substrate, thereby removing the cleaning material remaining on the substrate. It starts.
  • Korean Patent Publication No. 2010-0019156 discloses an air knife device including a main body, a plurality of chambers, and a plurality of discharge slits for injecting air in different directions.
  • Fine dust generated during the processing of the surface of the substrate by an optical device such as a laser device may affect the quality of the product, and to prevent this, the fine dust is quickly removed and at the same time hindering the operation of the optical device. It is necessary to have a structure that does not. However, the prior art or known cleaner does not disclose a dust cleaner having such a structure.
  • the present invention is to solve the problems of the prior art has the following object.
  • An object of the present invention is to provide an anti-dusting cleaner having an interference avoiding structure which is generated by air introduced from the outside and at the same time particulates are introduced into the dust collecting path so as not to interfere with the operation of the processing apparatus.
  • a dust collecting cleaner having an interference avoiding structure includes a dust collecting housing having an open space formed in a central portion in a vertical direction with respect to a workpiece; An air knife unit disposed below the dust collecting housing; And a dust collecting path formed at the front of the air knife unit, wherein gas that is introduced and sprayed from above the open space and the air knife unit is introduced into the dust collecting path.
  • the dust collecting housing has a pair of chamber structures facing each other, and an open space is formed between the pair of chambers.
  • the dust collecting housing has an annular chamber structure, and an open space is formed inside the annular.
  • a fluid guide surface formed on the surface in contact with the dust collecting path is formed in the air knife unit.
  • a dispersion nozzle unit for directing air flow below the open space.
  • a dust collecting path in the form of an air curtain is formed to smoothly remove smoke or fine particles generated during processing of a workpiece.
  • the dust collecting cleaner according to the present invention increases the fine particle removal effect by inducing air to flow along the surface of the air knife.
  • the air knife according to the present invention is formed in a chamber or an annular structure having an open space therein, and is installed at various positions according to an arrangement structure of an associated device such as a laser marking device or a semiconductor device, thereby preventing interference between the device and the air knife. To prevent it.
  • the air knife according to the present invention to increase the dust collection efficiency by preventing the generation of the area that is not collected by the dispersion nozzle.
  • FIG. 1A and 1B illustrate an embodiment of a dust collector cleaner having a pair of opposite chamber structures according to the present invention.
  • FIGS. 2A and 2B illustrate an embodiment of a dust collecting cleaner having an annular structure according to the present invention.
  • Figure 3 illustrates an embodiment of a dispersion nozzle unit applied to the dust collecting cleaner according to the present invention.
  • Figure 4 shows an embodiment of the operation of the dust collecting cleaner of the annular structure according to the present invention.
  • FIG. 1A and 1B show an embodiment of a dust collecting cleaner 10 of a pair of opposite chamber structures according to the present invention.
  • the dust collecting cleaner 10 includes dust collecting housings 11a and 11b in which an open space 12 is formed at a center portion in a vertical direction with respect to the workpiece WP; Air knife units 15a and 15b disposed below the dust collecting housings 11a and 11b; And a dust collecting path (DP) formed in front of the air knife units (15a, 15b), wherein the gas that is introduced and sprayed from above the open space (12) and the air knife units (15a, 15b) is collected in the dust collecting path. (DP) flows in.
  • the dust collecting housings 11a and 11b may be polygonal or cylindrical in shape with a predetermined height as a whole, and may be formed of the first dust collecting housing 11a and the second dust collecting housing 11b having a chamber structure facing each other. Surfaces facing each other may form a separation gap, and the open space 12 may be formed by the separation gap.
  • the laser can reach the workpiece WP disposed below the dust collecting housings 11a and 11b from the processing device LA such as the laser marking device through the open space 12.
  • the width of the open space 12 may be adjusted by a pair of gap adjusting units 121 formed at both ends of the facing surface.
  • the gap adjusting unit 121 may have a plate shape coupled to both sides of each of the dust collecting housings 11a and 11b, and the open space 12 may be adjusted by adjusting a fixed position of the plurality of gap adjusting bolts 121a. The width of can be adjusted.
  • Air above the open space 12 flows into the surface of the workpiece WP disposed below the dust collecting housings 11a and 11b through the open space 12 and disposed inside the dust collecting housings 11a and 11b.
  • An air stream can be formed with the compressed air sprayed from the knife units 15a, 15b.
  • Each of the dust collecting housings 11a and 11b is formed on one side of the chamber body 111 and the chamber body 111 in which an accommodating space is formed, and receives air containing foreign substances introduced into the chamber body 111. It may include a discharge port 112 for discharging to the outside and the suction port 113 for supplying compressed air to the air knife unit (15a, 15b) or the dispersion nozzle unit (17a, 17b) disposed therein.
  • air knife units 15a and 15b may be disposed in the chamber body 111 to remove foreign matters generated from the surface of the workpiece WP.
  • Dispersion nozzle units 17a and 17b can be arranged to direct the flow in a defined direction.
  • the workpiece WP may be disposed below the dust collecting housings 11a and 11b and processed by a laser flowing through the open space 12 by the processing apparatus LA.
  • foreign matter such as particulates or smoke may be generated and attached to the workpiece WP or may float around the workpiece WP.
  • Such foreign matters may affect the quality of the workpiece WP, so it is advantageous to remove them at the same time as they occur.
  • such foreign matter can be removed by the fluid flow formed by the air knife units 15a and 15b or the dispersion nozzle units 17a and 17b.
  • the air knife units 15a and 15b may be disposed to face each other below each of the dust collecting housings 11a and 11b or the chamber body 111. Specifically, it may be disposed on both sides with respect to the open space 12.
  • An air gap G may be formed in the air knife units 15a and 15b to guide the flow of air from the inside to the outside, and the end portions of the air gaps G may be formed in front of the air knife units 15a and 15b.
  • the fluid guide surface 151 may be formed to guide the flow of air discharged to the outside.
  • the air gap G is formed to extend along the surface of the workpiece WP, and the fluid guide surface 151 may be formed to extend upward from the end of the air gap G in a curved structure.
  • the flow restriction surface 152 may be formed in a curved structure below the air gap G.
  • the flow restriction face 152 and the fluid guide face 151 may be made of a curved structure that extends while inclined toward the center of the open space 12 as a whole.
  • the flow restriction surface 152 or the fluid guide surface 151 may include a plurality of planes or curved surfaces.
  • the flow restriction surface 152 and the fluid guide surface 151 may generate an air flow in which compressed air sprayed from the air gap G is guided to the dust collecting path DP.
  • the foreign matter generated during the processing of the workpiece WP may be introduced into the dust collecting path DP together with the flow of air to the dust collecting path DP.
  • Compressed air supplied from the outside through the suction port 113 flows into the inlets 154a and 154b formed in the air knife units 15a and 15b. Thereafter, the compressed air is discharged through the air gap G while being made at a constant pressure inside the air knife units 15a and 15b to form a fluid flow while flowing along the fluid guide surface 151.
  • the fluid guide surface 151 or the flow restricting surface 152 formed in the air knife units 15a and 15b may generate an effect similar to the Coanda effect, and the similar structure may have an open space 12. It may be formed in the inlet portion of the open space 12 is formed.
  • Inflow guide surface 111a of a curved shape facing the center of the open space 12 in the upper portion of the chamber body 111 forming the inlet of the open space 12 as shown in an enlarged view in the upper right portion of FIG. , 111b) may be formed. 1
  • the inflow guide surface 111a is large so that the air flowing into the open space 12 is led to the inner wall surface of the chamber body 111 forming the open space 12 while expanding the inlet of the open space 12. It can be made into a curved shape having a radius of curvature.
  • the second inflow guide surface 111b has a small radius of curvature so that the outside air introduced along the first inflow guide surface 111a flows along the wall surface of the open space 12 and is smoothly connected to the wall surface of the open space 12. Can be formed. As such, the outside air flowing into the open space 12 may flow along the wall of the open space 12 to form an air curtain. Such an air curtain can be effectively formed by the dispersion nozzle units 17a and 17b.
  • a pair of dispersion nozzle units 17a and 17b may be disposed to face each other in an upper portion of the open space 12.
  • the dispersion nozzle units 17a and 17b are fixed to the inlet block 171 through which the compressed air is introduced from the suction port 113 and the chamber body 111 to maintain the compressed air introduced at a uniform pressure.
  • a discharge path 173 connecting the interior of the fixing block 172 and the open space 12.
  • the discharge path 173 may be formed in a downwardly inclined shape, and may direct compressed air inside the fixing block 172 to flow along the wall surface of the open space 12.
  • a step guide surface 173a may be formed at an interface where the discharge path 173 and the open space 12 meet.
  • the stepped induction surface 173a may be formed such that a step is formed downward with respect to the extending direction of the discharge path 173, and the compressed air discharged through the discharge path 173 by the formation of the step surface is an open space. Flowing along the wall of (12) forms an air curtain.
  • the step guidance surface 173a may be made of various structures that can produce effects similar to the Coanda effect, and the present invention is not limited to the embodiments shown.
  • the compressed air sprayed from the air knife units 15a and 15b may be introduced into the dust collecting path DP together with the air around the workpiece WP including the foreign matter.
  • compressed air discharged from the dispersion nozzle units 17a and 17b may flow downward along the wall surface of the open space 12 to form an air curtain and then flow into the dust collecting path DP.
  • the dust collecting path DP may be formed between the air knife units 15a and 15b and the open space 12 and extend along the chamber body 111 to be connected to the discharge port 112.
  • the dust collection path DP forms a wide inlet, and the fluid guide surface 151 of the air knife unit 15a, 15b and air
  • the front faces of the knife units 15a and 15b form one wall of the dust collecting path DP, and the side wall of the open space 12 forms the other wall of the dust collecting path DP.
  • air forms an upwardly rising flow and may then be connected to the discharge port 112 through an appropriate induction path.
  • the dust collecting path DP may be formed in various structures and the present invention is not limited to the embodiments shown.
  • the dust collecting housings 11a and 11b are formed of a pair of chamber bodies 111 facing each other, but the dust collecting housings 11a and 11b may be made of a single body.
  • FIGS. 2A and 2B illustrate an embodiment of a dust collecting cleaner 20 having an annular structure according to the present invention.
  • the dust collecting cleaner 20 of the annular structure includes a dust collecting housing 21 having an open space 22 formed in a vertical direction with respect to a workpiece in a central portion thereof; An air knife unit 25 disposed below the dust collecting housing 21; And a dust collecting path (DP) formed in front of the air knife unit (25), and the gas flowing into and sprayed from the upper portion of the open space (22) and the air knife unit (25) to the dust collecting path (DP). Inflow.
  • the dust collecting cleaner 20 having an annular structure may be applied to the removal of fine particles that are generated during the processing of the workpiece and adhere to or float on the workpiece.
  • the dust collecting cleaner 20 may be used to remove fine dust generated during the laser marking process, but is not limited thereto and may be applied to various processing processes.
  • the dust collecting cleaner 20 includes a dust collecting housing 21 for spraying a fluid such as air to induce an upward air flow; And an open space 22 formed in the central portion of the dust collecting housing 21.
  • the dust collecting housing 21 may include a chamber body 211 having a ring, donut, torus, ring, or similar shape, and an air knife unit 25 disposed below the chamber body 211.
  • the dust collection hood M may be coupled to the upper portion of the chamber body 211, and the discharge port 28 may be coupled to the dust collection hood M.
  • an air suction tab AI may be disposed in the chamber body 211 or the dust collection hood M to supply compressed air to the air knife unit 25 or the dispersion nozzle unit 27.
  • the air knife unit 25 is disposed below the chamber body 211 and has an air gap G for spraying compressed air to the upper surface of the workpiece and a fluid guide surface 251 for directing the flow of air in the upward direction. It may include.
  • the air gap G may be formed, for example, between the knife body 254 and the lid 255 of the air knife unit 25 and connected to the air intake tab AI inside the knife body 254. Flow spaces can be formed.
  • the air knife unit 25 may be annular in accordance with the shape of the chamber body 211 as a whole, the curved flow restriction surface 252 is connected to the fluid guide surface 251 below the air gap (G) Can be formed. If necessary, a guide hole 29 may be selectively installed on a lower surface of the open space 22 to guide air introduced into the open space 22 to the dust collecting path DP.
  • a pair of spray nozzle units 27a and 27b facing each other in the upper portion of the open space 22 can be arranged to spray compressed air onto the surface of the workpiece.
  • the pair of spray nozzle units 27a and 27b may have a function of forming an air curtain inside the open space 22, as described above.
  • the pair of spray nozzle units 27a and 27b may have a function of injecting compressed air from the surface of the workpiece to areas where dust collection is difficult by the air knife unit 25 to separate foreign matter from the surface of the workpiece. have.
  • the pair of spray nozzle units 27a and 27b may have an auxiliary function of preventing the generation of a region in which foreign substances generated on the surface of the workpiece are not removed.
  • Each spray nozzle unit 27a, 27b may be composed of an inclined arrangement surface 272 formed in the supply block and a nozzle 271 fixed to the inclined arrangement surface 272.
  • the compressed air injected from the air knife unit 25 or the spray nozzle units 27a and 27b captures foreign matter and enters the dust collecting path DP and passes through the discharge port 28 via the interior of the chamber body 211. It can be discharged to the outside.
  • the dust collecting path DP may be formed between the air knife unit 25 and the open space 22, and specifically, the front wall 245a and the open body of the knife body 245 of the air knife unit 25. 22 may be formed by the perimeter wall 212.
  • the inlet of the dust collecting path DP having a wide width may be formed by the flow restricting surface 252, and the air flow rising upward from the dust collecting path DP may be induced by the fluid inducing surface 251. .
  • the dust collecting cleaner 20 may be fixed to the processing facility by the fixing bracket FB, and the discharge port 28 may be connected to the dust collecting reservoir through the dust collecting tube.
  • Figure 3 illustrates an embodiment of a dispersion nozzle unit applied to the dust collecting cleaner according to the present invention.
  • the injection nozzle unit 27a may include a fastening block 274 coupled to the chamber body and a nozzle 271 disposed on the fastening block 274.
  • a corresponding curved surface 274a corresponding to the circumferential surface of the open space may be formed on one surface of the fastening block 274, and an inclined arrangement surface 272 to which the nozzle 271 is coupled may be formed below the fastening block 274. Can be formed.
  • An inlet block 32 may be formed on one side of the fastening block 274, and an inlet unit 31 for inlet of compressed air may be coupled to the inlet block 32.
  • the fastening block 274 may be fixed to the upper wall surface 214a of the open space wall surface 214, and the nozzle 271 may be fixed to the inclination arrangement surface 272 of the nozzle bracket 271a and the fastening block 274.
  • the nozzle 271 may be composed of a nozzle tip (271b) for spraying the compressed air supplied to the inside.
  • the nozzle 271 may be disposed to be inclined downward to spray compressed air, and the inclination angle of the nozzle 271 may be a nozzle bracket ( 271a).
  • the nozzle 271 may be formed to spray air along the wall of the open space, similar to the embodiment shown in FIGS. 1A and 1B.
  • the spray nozzle unit 27a can be made in various structures and the present invention is not limited to the embodiments shown.
  • Figure 4 shows an embodiment of the operation of the dust collecting cleaner of the annular structure according to the present invention.
  • one air stream F41 may be introduced into the open space 22, and the first air stream F41 flows along the open space 22 to reach the upper portion of the workpiece.
  • the inner two air streams F421 may be induced together with the one air stream while the outer two air streams F422 are guided by the air knife unit 25.
  • foreign substances generated during the processing of the workpiece by the laser L of the inner 2 air stream F421 and the outer 2 air stream F422 are captured and introduced into the dust collecting path DP to generate 3 air streams F43. You can.
  • the three air streams F43 may then generate four air streams F44 outward of the discharge port 28 along a suitable path formed in the chamber body 211.
  • an auxiliary air stream F411 may be generated from the spray nozzle units 27a and 27b to be combined with the inner two air streams F421.
  • the air flow may be made in various forms and guided to the dust collecting path DP and the present invention is not limited to the embodiments shown.
  • a dust collecting path in the form of an air curtain is formed to smoothly remove smoke or fine particles generated during processing of a workpiece.
  • the dust collecting cleaner according to the present invention increases the fine particle removal effect by inducing air to flow along the surface of the air knife.
  • the air knife according to the present invention is formed in a chamber or an annular structure having an open space therein, and is installed at various positions according to an arrangement structure of an associated device such as a laser marking device or a semiconductor device, thereby preventing interference between the device and the air knife. To prevent it.
  • the air knife according to the present invention to increase the dust collection efficiency by preventing the generation of the area that is not collected by the dispersion nozzle.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Cleaning In General (AREA)
  • Prevention Of Fouling (AREA)

Abstract

The present invention relates to a dust collecting cleaner having an interference avoidance structure and, more particularly, to a dust collecting cleaner, having an interference avoidance structure, enabling removal of foreign materials in various forms generated during a surface treatment process for a substrate by means of an optical apparatus such as a laser. The dust collecting cleaner having an interference avoidance structure comprises: dust collecting housings (11a, 11b, 21) having open spaces (12, 22) formed on the central part thereof in the vertical direction with respect to an object to be treated; air knife units (15a, 15b, 25) disposed below the dust collecting housings (11a, 11b, 21); and a dust collecting path (DP) formed in front of the air knife units (15a, 15b, 25), wherein a gas flowing in and being sprayed from above the open space (12) and from the air knife units (15a, 15b, 25) flows into the dust collecting path (DP).

Description

간섭 회피 구조의 집진 클리너Dust collection cleaner of interference avoidance structure

본 발명은 간섭 회피 구조의 집진 클리너에 관한 것이고, 구체적으로 레이저와 같은 광학 기기에 의한 기판의 표면 가공 과정에서 발생되는 다양한 형태의 이물질의 제거가 가능한 간섭 회피 구조의 집진 클리너에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dust collecting cleaner of an interference avoiding structure, and more particularly, to a dust collecting cleaner of an interference avoiding structure capable of removing various types of foreign substances generated during a surface processing of a substrate by an optical device such as a laser.

다양한 형태의 미세 입자가 레이저와 같은 광학 기기에 의한 제품의 가공 과정에서 발생되어 제품의 품질에 직접적으로 또는 간접적으로 영향을 미칠 수 있다. 이러한 미세 입자의 제거를 위한 다양한 집진 장치 또는 클리너가 이 분야에 공지되어 있고, 예를 들어 에어 나이프와 같은 장치가 미세 먼지의 제거에 적용될 수 있다.Various types of fine particles can be generated in the processing of a product by an optical device such as a laser and directly or indirectly affect the quality of the product. Various dust collectors or cleaners for the removal of such fine particles are known in the art, and for example devices such as air knives can be applied for the removal of fine dust.

한국특허등록번호 제10-0766522호는 LCD 패널과 같은 기판 상측에 기판에 수직인 축을 기준으로 경사지게 배치되는 제1 블록과, 상기 제1 블록과 함께 공기 유동 통로를 형성하도록 상기 제1 블록에 결합되고, 상기 기판에 수직인 축을 기준으로 경사지게 배치되는 제2 블록을 구비하여 상기 공기 유동 통로로 유입된 공기를 상기 기판에 분사시켜 기판에 잔류된 세척 물질을 제거하는 기판 건조용 에어나이프 장치에 대하여 개시한다. 또한 한국특허공개번호 제2010-0019156호는 본체, 다수 개의 챔버 및 서로 다른 방향으로 공기를 분사하는 다수 개의 토출 슬릿으로 이루어진 에어 나이프 장치에 대하여 개시한다. Korea Patent Registration No. 10-0766522 is coupled to the first block to form an air flow passage together with the first block and the first block disposed inclined with respect to the axis perpendicular to the substrate above the substrate, such as an LCD panel And a second block disposed to be inclined with respect to an axis perpendicular to the substrate to spray the air introduced into the air flow passage to the substrate, thereby removing the cleaning material remaining on the substrate. It starts. In addition, Korean Patent Publication No. 2010-0019156 discloses an air knife device including a main body, a plurality of chambers, and a plurality of discharge slits for injecting air in different directions.

레이저 장치와 같은 광학 기기에 의하여 기판의 표면을 가공하는 과정에서 발생되는 미세 먼지는 제품의 품질에 영향을 미칠 수 있고, 이를 방지하기 위하여 미세 먼지가 신속하게 제거되면서 이와 동시에 광학 기기의 작동을 방해하지 않는 구조를 가질 필요가 있다. 그러나 상기 선행기술 또는 공지된 클리너는 이와 같은 구조를 가진 집진 클리너에 대하여 개시하지 않는다. Fine dust generated during the processing of the surface of the substrate by an optical device such as a laser device may affect the quality of the product, and to prevent this, the fine dust is quickly removed and at the same time hindering the operation of the optical device. It is necessary to have a structure that does not. However, the prior art or known cleaner does not disclose a dust cleaner having such a structure.

본 발명은 선행기술이 가진 문제점을 해결하기 위한 것으로 아래와 같은 목적을 가진다. The present invention is to solve the problems of the prior art has the following object.

본 발명의 목적은 외부로부터 유입된 공기에 의하여 발생과 동시에 미립자가 집진 경로로 유입되면서 가공 장치에 작동에 방해가 되지 않도록 하는 간섭 회피 구조의 집진 클리너를 제공하는 것이다. SUMMARY OF THE INVENTION An object of the present invention is to provide an anti-dusting cleaner having an interference avoiding structure which is generated by air introduced from the outside and at the same time particulates are introduced into the dust collecting path so as not to interfere with the operation of the processing apparatus.

본 발명의 적절한 실시 형태에 따르면, 간섭 회피 구조의 집진 클리너는 중앙 부분에 가공물에 대하여 수직 방향으로 개방 공간이 형성된 집진 하우징; 집진 하우징의 아래쪽에 배치된 에어 나이프 유닛; 및 에어 나이프 유닛의 앞쪽에 형성되는 집진 경로를 포함하고, 상기 개방 공간의 위쪽 및 에어 나이프 유닛으로부터 유입 및 분무가 되는 기체는 집진 경로로 유입된다.According to a preferred embodiment of the present invention, a dust collecting cleaner having an interference avoiding structure includes a dust collecting housing having an open space formed in a central portion in a vertical direction with respect to a workpiece; An air knife unit disposed below the dust collecting housing; And a dust collecting path formed at the front of the air knife unit, wherein gas that is introduced and sprayed from above the open space and the air knife unit is introduced into the dust collecting path.

본 발명의 다른 적절한 실시 형태에 따르면, 집진 하우징은 서로 마주보는 한 쌍의 챔버 구조가 되고, 개방 공간은 한 쌍의 챔버 사이에 형성된다.According to another suitable embodiment of the present invention, the dust collecting housing has a pair of chamber structures facing each other, and an open space is formed between the pair of chambers.

본 발명의 또 다른 적절한 실시 형태에 따르면, 집진 하우징은 환형 챔버 구조가 되고, 환형의 내부에 개방 공간이 형성된다.According to another suitable embodiment of the present invention, the dust collecting housing has an annular chamber structure, and an open space is formed inside the annular.

본 발명의 또 다른 적절한 실시 형태에 따르면, 에어 나이프 유닛에 집진 경로과 접하는 면에 형성된 유체 유도 면이 형성된다.According to another suitable embodiment of the present invention, a fluid guide surface formed on the surface in contact with the dust collecting path is formed in the air knife unit.

본 발명의 또 다른 적절한 실시 형태에 따르면, 개방 공간의 아래쪽으로 공기 흐름을 유도하는 분산 노즐 유닛을 포함한다.According to another suitable embodiment of the present invention, there is provided a dispersion nozzle unit for directing air flow below the open space.

본 발명에 따른 집진 클리너는 에어커튼 형태의 집진 경로가 형성되는 것에 의하여 가공물의 가공 과정에서 발생되는 연기 또는 미세 입자의 제거가 원활하게 이루어지도록 한다. 본 발명에 따른 집진 클리너는 공기가 에어나이프의 면을 따라 흐르도록 유도하는 것에 의하여 미세 입자 제거 효과가 높아지도록 한다. 본 발명에 따른 에어나이프는 내부에 개방 공간이 형성된 챔버 또는 환형 구조로 만들어지는 것에 의하여 레이저 마킹 장치 또는 반도체 장치와 같은 관련 장치의 배치 구조에 따라 다양한 위치에 설치되어 장치와 에어나이프 사이의 간섭이 방지되도록 한다. 또한 본 발명에 따른 에어나이프는 분산 노즐에 의하여 집진이 되지 않는 영역의 발생을 방지하는 것에 의하여 집진 효율이 높아지도록 한다. In the dust collecting cleaner according to the present invention, a dust collecting path in the form of an air curtain is formed to smoothly remove smoke or fine particles generated during processing of a workpiece. The dust collecting cleaner according to the present invention increases the fine particle removal effect by inducing air to flow along the surface of the air knife. The air knife according to the present invention is formed in a chamber or an annular structure having an open space therein, and is installed at various positions according to an arrangement structure of an associated device such as a laser marking device or a semiconductor device, thereby preventing interference between the device and the air knife. To prevent it. In addition, the air knife according to the present invention to increase the dust collection efficiency by preventing the generation of the area that is not collected by the dispersion nozzle.

도 1a 및 도 1b는 본 발명에 따른 한 쌍의 마주보는 챔버 구조의 집진 클리너의 실시 예를 도시한 것이다. 1A and 1B illustrate an embodiment of a dust collector cleaner having a pair of opposite chamber structures according to the present invention.

도 2a 및 도 2b는 본 발명에 따른 환형 구조의 집진 클리너의 실시 예를 도시한 것이다. 2A and 2B illustrate an embodiment of a dust collecting cleaner having an annular structure according to the present invention.

도 3은 본 발명에 따른 집진 클리너에 적용되는 분산 노즐 유닛의 실시 예를 도시한 것이다. Figure 3 illustrates an embodiment of a dispersion nozzle unit applied to the dust collecting cleaner according to the present invention.

도 4는 본 발명에 따른 환형 구조의 집진 클리너의 작동 과정의 실시 예를 도시한 것이다. Figure 4 shows an embodiment of the operation of the dust collecting cleaner of the annular structure according to the present invention.

아래에서 본 발명은 첨부된 도면에 제시된 실시 예를 참조하여 상세하게 설명이 되지만 실시 예는 본 발명의 명확한 이해를 위한 것으로 본 발명은 이에 제한되지 않는다. 아래의 설명에서 서로 다른 도면에서 동일한 도면 부호를 가지는 구성요소는 유사한 기능을 가지므로 발명의 이해를 위하여 필요하지 않는다면 반복하여 설명이 되지 않으며 공지의 구성요소는 간략하게 설명이 되거나 생략이 되지만 본 발명의 실시 예에서 제외되는 것으로 이해되지 않아야 한다. Hereinafter, the present invention will be described in detail with reference to the embodiments set forth in the accompanying drawings, but the embodiments are provided for clarity of understanding and the present invention is not limited thereto. In the following description, components having the same reference numerals in different drawings have similar functions, and thus are not repeatedly described unless necessary for understanding of the invention, and well-known components are briefly described or omitted. It should not be understood to be excluded from the embodiment of.

도 1a 및 도 1b는 본 발명에 따른 한 쌍의 마주보는 챔버 구조의 집진 클리너(10)의 실시 예를 도시한 것이다. 1A and 1B show an embodiment of a dust collecting cleaner 10 of a pair of opposite chamber structures according to the present invention.

도 1a 및 도 1b를 참조하면, 집진 클리너(10)는 중앙 부분에 가공물(WP)에 대하여 수직 방향으로 개방 공간(12)이 형성된 집진 하우징(11a, 11b); 집진 하우징(11a, 11b)의 아래쪽에 배치된 에어 나이프 유닛(15a, 15b); 및 에어 나이프 유닛(15a, 15b)의 앞쪽에 형성되는 집진 경로(DP)를 포함하고, 상기 개방 공간(12)의 위쪽 및 에어 나이프 유닛(15a, 15b)으로부터 유입 및 분무가 되는 기체는 집진 경로(DP)로 유입된다. 1A and 1B, the dust collecting cleaner 10 includes dust collecting housings 11a and 11b in which an open space 12 is formed at a center portion in a vertical direction with respect to the workpiece WP; Air knife units 15a and 15b disposed below the dust collecting housings 11a and 11b; And a dust collecting path (DP) formed in front of the air knife units (15a, 15b), wherein the gas that is introduced and sprayed from above the open space (12) and the air knife units (15a, 15b) is collected in the dust collecting path. (DP) flows in.

집진 하우징(11a, 11b)은 전체적으로 일정한 높이를 가지는 다각면체 또는 원통형상이 될 수 있고, 서로 마주보는 면을 가지는 챔버 구조의 1 집진 하우징(11a) 및 2 집진 하우징(11b)으로 이루어질 수 있다. 서로 마주보는 면은 분리 간격을 형성할 수 있고, 분리 간격에 의하여 개방 공간(12)이 형성될 수 있다. 그리고 개방 공간(12)을 통하여 레이저 마킹 장치와 같은 가공 장치(LA)로부터 레이저가 집진 하우징(11a, 11b)의 아래쪽에 배치된 가공물(WP)에 도달될 수 있다. 개방 공간(12)의 폭은 마주보는 면의 양쪽 끝에 형성된 한 쌍의 간격 조절 유닛(121)에 의하여 조절될 수 있다. 간격 조절 유닛(121)은 각각의 집진 하우징(11a, 11b)의 양쪽 측면에 결합되는 플레이트 형상이 될 수 있고, 다수 개의 간격 조절 볼트(121a)의 고정 위치를 조절하는 것에 의하여 개방 공간(12)의 폭이 조절될 수 있다. The dust collecting housings 11a and 11b may be polygonal or cylindrical in shape with a predetermined height as a whole, and may be formed of the first dust collecting housing 11a and the second dust collecting housing 11b having a chamber structure facing each other. Surfaces facing each other may form a separation gap, and the open space 12 may be formed by the separation gap. The laser can reach the workpiece WP disposed below the dust collecting housings 11a and 11b from the processing device LA such as the laser marking device through the open space 12. The width of the open space 12 may be adjusted by a pair of gap adjusting units 121 formed at both ends of the facing surface. The gap adjusting unit 121 may have a plate shape coupled to both sides of each of the dust collecting housings 11a and 11b, and the open space 12 may be adjusted by adjusting a fixed position of the plurality of gap adjusting bolts 121a. The width of can be adjusted.

개방 공간(12) 위쪽의 공기가 개방 공간(12)을 통하여 집진 하우징(11a, 11b)의 아래쪽에 배치된 가공물(WP)의 표면으로 유입되어 집진 하우징(11a, 11b)의 내부에 배치된 에어 나이프 유닛(15a, 15b)으로부터 분무되는 압축 공기와 함께 공기 흐름을 형성할 수 있다. Air above the open space 12 flows into the surface of the workpiece WP disposed below the dust collecting housings 11a and 11b through the open space 12 and disposed inside the dust collecting housings 11a and 11b. An air stream can be formed with the compressed air sprayed from the knife units 15a, 15b.

각각의 집진 하우징(11a, 11b)은 내부에 수용 공간이 형성되는 챔버 몸체(111), 챔버 몸체(111)의 한쪽 측면에 형성되어 챔버 몸체(111)의 내부로 유입되는 이물질을 포함하는 공기를 외부로 배출하는 배출 포트(112) 및 내부에 배치되는 에어 나이프 유닛(15a, 15b) 또는 분산 노즐 유닛(17a, 17b)으로 압축 공기를 공급하는 흡입 포트(113)를 포함할 수 있다. 그리고 챔버 몸체(111)의 내부에 가공물(WP)의 표면으로부터 발생되는 이물질의 제거를 위한 에어 나이프 유닛(15a, 15b)이 배치될 수 있고, 필요에 따라 가공물(WP)의 표면을 따른 기체의 흐름을 정해진 방향을 유도하는 분산 노즐 유닛(17a, 17b)이 배치될 수 있다. Each of the dust collecting housings 11a and 11b is formed on one side of the chamber body 111 and the chamber body 111 in which an accommodating space is formed, and receives air containing foreign substances introduced into the chamber body 111. It may include a discharge port 112 for discharging to the outside and the suction port 113 for supplying compressed air to the air knife unit (15a, 15b) or the dispersion nozzle unit (17a, 17b) disposed therein. In addition, air knife units 15a and 15b may be disposed in the chamber body 111 to remove foreign matters generated from the surface of the workpiece WP. Dispersion nozzle units 17a and 17b can be arranged to direct the flow in a defined direction.

도 1b를 참조하면, 가공물(WP)은 집진 하우징(11a, 11b)의 아래쪽에 배치되어 가공 장치(LA)에 의하여 개방 공간(12)을 통하여 유입되는 레이저에 의하여 가공될 수 있다. 가공물(WP)의 가공 과정에서 미립자 또는 연기와 같은 이물질이 발생되어 가공물(WP)에 부착되거나 가공물(WP)의 주위를 부유할 수 있다. 이러한 이물질은 가공물(WP)의 품질에 영향을 미칠 수 있으므로 발생과 동시에 제거되는 것이 유리하다. 본 발명에 따르면 이와 같은 이물질은 에어 나이프 유닛(15a, 15b) 또는 분산 노즐 유닛(17a, 17b)에 의하여 형성되는 유체 흐름에 의하여 제거될 수 있다. Referring to FIG. 1B, the workpiece WP may be disposed below the dust collecting housings 11a and 11b and processed by a laser flowing through the open space 12 by the processing apparatus LA. During the processing of the workpiece WP, foreign matter such as particulates or smoke may be generated and attached to the workpiece WP or may float around the workpiece WP. Such foreign matters may affect the quality of the workpiece WP, so it is advantageous to remove them at the same time as they occur. According to the present invention, such foreign matter can be removed by the fluid flow formed by the air knife units 15a and 15b or the dispersion nozzle units 17a and 17b.

에어 나이프 유닛(15a, 15b)은 각각의 집진 하우징(11a, 11b) 또는 챔버 몸체(111)의 아래쪽에 서로 마주보도록 배치될 수 있다. 구체적으로 개방 공간(12)을 기준으로 양쪽으로 배치될 수 있다. 에어 나이프 유닛(15a, 15b)에 내부로부터 외부로 공기의 흐름을 유도하는 에어 갭(G)이 형성될 수 있고, 에어 나이프 유닛(15a, 15b)의 앞쪽에 에어 갭(G)의 끝 부분을 통하여 외부로 배출되는 공기의 흐름을 유도하는 유체 유도 면(151)이 형성될 수 있다. 에어 갭(G)은 가공물(WP)의 표면을 따라 연장되는 형태로 만들어지고, 유체 유도 면(151)은 에어 갭(G)의 끝 부분으로부터 위쪽으로 곡면 구조로 연장되도록 형성될 수 있다. 또한 에어 갭(G)의 아래쪽으로 곡면 구조로 유동 제한 면(152)이 형성될 수 있다. 유동 제한 면(152)과 유체 유도 면(151)은 전체적으로 개방 공간(12)의 중심 방향으로 경사지면서 연장되는 곡면 구조로 만들어질 수 있다. 그리고 유동 제한 면(152) 또는 유체 유도 면(151)은 다수 개의 평면 또는 곡면을 포함할 수 있다. 이와 같은 유동 제한 면(152)과 유체 유도 면(151)에 의하여 에어 갭(G)으로부터 분무되는 압축 공기가 집진 경로(DP)로 유도되는 공기 흐름을 발생시킬 수 있다. 그리고 이와 같은 공기 흐름에 의하여 가공물(WP)이 가공 과정에서 발생되는 이물질이 집진 경로(DP)로 공기의 흐름과 함께 집진 경로(DP)로 유입될 수 있다. The air knife units 15a and 15b may be disposed to face each other below each of the dust collecting housings 11a and 11b or the chamber body 111. Specifically, it may be disposed on both sides with respect to the open space 12. An air gap G may be formed in the air knife units 15a and 15b to guide the flow of air from the inside to the outside, and the end portions of the air gaps G may be formed in front of the air knife units 15a and 15b. The fluid guide surface 151 may be formed to guide the flow of air discharged to the outside. The air gap G is formed to extend along the surface of the workpiece WP, and the fluid guide surface 151 may be formed to extend upward from the end of the air gap G in a curved structure. In addition, the flow restriction surface 152 may be formed in a curved structure below the air gap G. The flow restriction face 152 and the fluid guide face 151 may be made of a curved structure that extends while inclined toward the center of the open space 12 as a whole. In addition, the flow restriction surface 152 or the fluid guide surface 151 may include a plurality of planes or curved surfaces. The flow restriction surface 152 and the fluid guide surface 151 may generate an air flow in which compressed air sprayed from the air gap G is guided to the dust collecting path DP. In addition, the foreign matter generated during the processing of the workpiece WP may be introduced into the dust collecting path DP together with the flow of air to the dust collecting path DP.

흡입 포트(113)를 통하여 외부로부터 공급되는 압축 공기가 에어 나이프 유닛(15a, 15b)에 형성된 입구(154a, 154b)로 유입된다. 이후 에어 나이프 유닛(15a, 15b)의 내부에서 일정한 압력 상태로 만들어지면서 에어 갭(G)을 통하여 압축 공기가 배출되어 유체 유도 면(151)을 따라 흐르면서 유체 흐름을 형성하게 된다. 이러한 유체 흐름에 의하여 가공물(WP)의 가공 과정에서 발생하는 이물질이 집진 경로(DP)를 통하여 챔버 몸체(111)의 내부로 유입되어 배출 포트(112)를 통하여 외부로 배출될 수 있다. 에어 나이프 유닛(15a, 15b)에 형성되는 유체 유도 면(151) 또는 유동 제한 면(152)은 코안다 효과(Coanda effect)와 유사한 효과를 발생시킬 수 있고, 이와 유사한 구조는 개방 공간(12)이 형성되는 개방 공간(12)의 입구 부분에 형성될 수 있다. Compressed air supplied from the outside through the suction port 113 flows into the inlets 154a and 154b formed in the air knife units 15a and 15b. Thereafter, the compressed air is discharged through the air gap G while being made at a constant pressure inside the air knife units 15a and 15b to form a fluid flow while flowing along the fluid guide surface 151. By the fluid flow, foreign substances generated during the processing of the workpiece WP may be introduced into the chamber body 111 through the dust collecting path DP and discharged to the outside through the discharge port 112. The fluid guide surface 151 or the flow restricting surface 152 formed in the air knife units 15a and 15b may generate an effect similar to the Coanda effect, and the similar structure may have an open space 12. It may be formed in the inlet portion of the open space 12 is formed.

도 1b의 오른쪽 위쪽 부분에 확대된 도면으로 제시된 것처럼 개방 공간(12)의 입구를 형성하는 챔버 몸체(111)의 위쪽 부분에 개방 공간(12)의 중심을 향하도록 곡면 형상의 유입 유도 면(111a, 111b)이 형성될 수 있다. 1 유입 유도 면(111a)은 개방 공간(12)의 입구를 확장시키면서 개방 공간(12)의 내부로 유입되는 공기가 개방 공간(12)을 형성하는 챔버 몸체(111)의 내부 벽면으로 유도되도록 큰 곡률 반지름을 가지는 곡면 형상으로 만들어질 수 있다. 그리고 2 유입 유도 면(111b)은 1 유입 유도 면(111a)을 따라 유입된 외부 공기가 개방 공간(12)의 벽면을 따라 흐르도록 작은 곡률 반지름을 가지면서 개방 공간(12)의 벽면과 부드럽게 이어지도록 형성될 수 있다. 이와 같이 개방 공간(12)으로 유입되는 외부 공기는 개방 공간(12)의 벽면을 따라 흐르면서 에어 커튼을 형성할 수 있다. 이와 같은 에어 커튼은 분산 노즐 유닛(17a, 17b)에 의하여 효과적으로 형성될 수 있다. Inflow guide surface 111a of a curved shape facing the center of the open space 12 in the upper portion of the chamber body 111 forming the inlet of the open space 12 as shown in an enlarged view in the upper right portion of FIG. , 111b) may be formed. 1 The inflow guide surface 111a is large so that the air flowing into the open space 12 is led to the inner wall surface of the chamber body 111 forming the open space 12 while expanding the inlet of the open space 12. It can be made into a curved shape having a radius of curvature. In addition, the second inflow guide surface 111b has a small radius of curvature so that the outside air introduced along the first inflow guide surface 111a flows along the wall surface of the open space 12 and is smoothly connected to the wall surface of the open space 12. Can be formed. As such, the outside air flowing into the open space 12 may flow along the wall of the open space 12 to form an air curtain. Such an air curtain can be effectively formed by the dispersion nozzle units 17a and 17b.

도 1b를 참조하면, 개방 공간(12)의 위쪽 부분에 서로 마주보도록 한 쌍의 분산 노즐 유닛(17a, 17b)이 배치될 수 있다. 분산 노즐 유닛(17a, 17b)은 흡입 포트(113)로부터 압축 공기가 유입되는 유입 블록(171), 챔버 몸체(111)에 고정되면서 유입된 압축 공기가 균일한 압력으로 유지되도록 하는 고정 블록(172) 및 고정 블록(172)의 내부와 개방 공간(12)을 연결시키는 배출 경로(173)로 이루어질 수 있다. 배출 경로(173)는 아래쪽으로 경사진 형상으로 이루어질 수 있고, 고정 블록(172)의 내부의 압축 공기가 개방 공간(12)의 벽면을 따라 흐르도록 유도할 수 있다. 배출 경로(173)와 개방 공간(12)이 만나는 경계 면에 단차 유도 면(173a)이 형성될 수 있다. 단차 유도 면(173a)은 배출 경로(173)의 연장 방향에 대하여 아래쪽으로 단차가 형성되도록 만들어질 수 있고, 이와 같은 단차 면의 형성에 의하여 배출 경로(173)를 통하여 배출되는 압축 공기가 개방 공간(12)의 벽면을 따라 흐르면서 에어 커튼을 형성하게 된다. 단차 유도 면(173a)은 코안다 효과와 유사한 효과를 발생시킬 수 있는 다양한 구조로 만들어질 수 있고 본 발명은 제시된 실시 예에 제한되지 않는다. Referring to FIG. 1B, a pair of dispersion nozzle units 17a and 17b may be disposed to face each other in an upper portion of the open space 12. The dispersion nozzle units 17a and 17b are fixed to the inlet block 171 through which the compressed air is introduced from the suction port 113 and the chamber body 111 to maintain the compressed air introduced at a uniform pressure. ) And a discharge path 173 connecting the interior of the fixing block 172 and the open space 12. The discharge path 173 may be formed in a downwardly inclined shape, and may direct compressed air inside the fixing block 172 to flow along the wall surface of the open space 12. A step guide surface 173a may be formed at an interface where the discharge path 173 and the open space 12 meet. The stepped induction surface 173a may be formed such that a step is formed downward with respect to the extending direction of the discharge path 173, and the compressed air discharged through the discharge path 173 by the formation of the step surface is an open space. Flowing along the wall of (12) forms an air curtain. The step guidance surface 173a may be made of various structures that can produce effects similar to the Coanda effect, and the present invention is not limited to the embodiments shown.

에어 나이프 유닛(15a, 15b)으로부터 분무된 압축 공기는 이물질을 포함하는 가공물(WP) 주위의 공기와 함께 집진 경로(DP)로 유입될 수 있다. 또한 분산 노즐 유닛(17a, 17b)으로부터 배출되는 압축 공기는 개방 공간(12)의 벽면을 따라 아래쪽으로 흐르면서 에어 커튼을 형성하고 이후 집진 경로(DP)로 유입될 수 있다. The compressed air sprayed from the air knife units 15a and 15b may be introduced into the dust collecting path DP together with the air around the workpiece WP including the foreign matter. In addition, compressed air discharged from the dispersion nozzle units 17a and 17b may flow downward along the wall surface of the open space 12 to form an air curtain and then flow into the dust collecting path DP.

집진 경로(DP)는 에어 나이프 유닛(15a, 15b)과 개방 공간(12)의 사이에 형성되면서 챔버 몸체(111)를 따라 연장되어 배출 포트(112)로 연결될 수 있다. 에어 나이프 유닛(15a, 15b)의 앞쪽에 형성되는 유동 제한 면(152)에 의하여 집진 경로(DP)는 넓은 입구를 형성하고, 에어 나이프 유닛(15a, 15b)의 유체 유도 면(151)과 에어 나이프 유닛(15a, 15b)의 앞쪽 면은 집진 경로(DP)의 한쪽 벽을 형성하고, 개방 공간(12)의 측면 벽이 집진 경로(DP)의 다른 벽을 형성하게 된다. 집진 경로(DP)에서 공기는 위쪽으로 상승하는 흐름을 형성하고 이후 적절한 유도 경로를 통하여 배출 포트(112)와 연결될 수 있다. 집진 경로(DP)는 다양한 구조로 형성될 수 있고 본 발명은 제시된 실시 예에 제한되지 않는다. The dust collecting path DP may be formed between the air knife units 15a and 15b and the open space 12 and extend along the chamber body 111 to be connected to the discharge port 112. By the flow restriction surface 152 formed in front of the air knife unit 15a, 15b, the dust collection path DP forms a wide inlet, and the fluid guide surface 151 of the air knife unit 15a, 15b and air The front faces of the knife units 15a and 15b form one wall of the dust collecting path DP, and the side wall of the open space 12 forms the other wall of the dust collecting path DP. In the dust collection path DP, air forms an upwardly rising flow and may then be connected to the discharge port 112 through an appropriate induction path. The dust collecting path DP may be formed in various structures and the present invention is not limited to the embodiments shown.

위에서 설명된 실시 예에서 집진 하우징(11a, 11b)은 서로 마주보는 한 쌍의 챔버 몸체(111)로 형성되지만 집진 하우징(11a, 11b)은 단일 몸체로 만들어질 수 있다. In the above-described embodiment, the dust collecting housings 11a and 11b are formed of a pair of chamber bodies 111 facing each other, but the dust collecting housings 11a and 11b may be made of a single body.

도 2a 및 도 2b는 본 발명에 따른 환형 구조의 집진 클리너(20)의 실시 예를 도시한 것이다. 2A and 2B illustrate an embodiment of a dust collecting cleaner 20 having an annular structure according to the present invention.

도 2a 및 도 2b를 참조하면, 환형 구조의 집진 클리너(20)는 중앙 부분에 가공물에 대하여 수직 방향으로 개방 공간(22)이 형성된 집진 하우징(21); 집진 하우징(21)의 아래쪽에 배치된 에어 나이프 유닛(25); 및 에어 나이프 유닛(25)의 앞쪽에 형성되는 집진 경로(DP)를 포함하고, 상기 개방 공간(22)의 위쪽 및 에어 나이프 유닛(25)으로부터 유입 및 분무가 되는 기체는 집진 경로(DP)로 유입된다. 2A and 2B, the dust collecting cleaner 20 of the annular structure includes a dust collecting housing 21 having an open space 22 formed in a vertical direction with respect to a workpiece in a central portion thereof; An air knife unit 25 disposed below the dust collecting housing 21; And a dust collecting path (DP) formed in front of the air knife unit (25), and the gas flowing into and sprayed from the upper portion of the open space (22) and the air knife unit (25) to the dust collecting path (DP). Inflow.

환형 구조의 집진 클리너(20)는 가공물의 공정 과정에서 발생되어 가공물에 부착되거나 부유하는 미립자의 제거에 적용될 수 있다. 예를 들어 집진 클리너(20)는 레이저 마킹 과정에서 발생되는 미세 먼지를 가공 과정에서 제거하기 위하여 사용될 수 있지만 이에 제한되지 않고 다양한 가공 공정에 적용될 수 있다. The dust collecting cleaner 20 having an annular structure may be applied to the removal of fine particles that are generated during the processing of the workpiece and adhere to or float on the workpiece. For example, the dust collecting cleaner 20 may be used to remove fine dust generated during the laser marking process, but is not limited thereto and may be applied to various processing processes.

집진 클리너(20)는 공기와 같은 유체를 분무시켜 위쪽으로 향하는 공기 흐름을 유도시키는 집진 하우징(21); 및 집진 하우징(21)의 중앙 부분에 형성되는 개방 공간(22)으로 이루어질 수 있다. 집진 하우징(21)은 고리, 도넛, 토러스, 반지 또는 이와 유사한 형상이 되는 챔버 몸체(211) 및 챔버 몸체(211)의 아래쪽에 배치되는 에어 나이프 유닛(25)으로 이루어질 수 있다. 챔버 몸체(211)의 위쪽에 집진 후드(M)가 결합될 수 있고, 집진 후드(M)에 배출 포트(28)가 결합될 수 있다. 또한 챔버 몸체(211) 또는 집진 후드(M)에 압축 공기를 에어 나이프 유닛(25) 또는 분산 노즐 유닛(27)으로 공급하기 위한 공기 흡입 탭(AI)이 배치될 수 있다. The dust collecting cleaner 20 includes a dust collecting housing 21 for spraying a fluid such as air to induce an upward air flow; And an open space 22 formed in the central portion of the dust collecting housing 21. The dust collecting housing 21 may include a chamber body 211 having a ring, donut, torus, ring, or similar shape, and an air knife unit 25 disposed below the chamber body 211. The dust collection hood M may be coupled to the upper portion of the chamber body 211, and the discharge port 28 may be coupled to the dust collection hood M. FIG. In addition, an air suction tab AI may be disposed in the chamber body 211 or the dust collection hood M to supply compressed air to the air knife unit 25 or the dispersion nozzle unit 27.

에어 나이프 유닛(25)은 챔버 몸체(211)의 아래쪽에 배치되고, 가공물의 위쪽 표면으로 압축 공기를 분무시키는 에어 갭(G) 및 위쪽 방향으로 공기의 흐름을 유도하기 위한 유체 유도 면(251)을 포함할 수 있다. 에어 갭(G)은 예를 들어 에어 나이프 유닛(25)의 나이프 몸체(254)와 덮개(255) 사이에 형성될 수 있고, 나이프 몸체(254)의 내부에 공기 흡입 탭(AI)과 연결되는 유동 공간이 형성될 수 있다. 에어 나이프 유닛(25)은 전체적으로 챔버 몸체(211)의 형상에 따라 환형이 될 수 있고, 에어 갭(G)의 아래쪽으로 유체 유도 면(251)과 연결되는 곡면 형상의 유동 제한 면(252)이 형성될 수 있다. 필요에 따라 개방 공간(22)의 아래쪽 면에 개방 공간(22)으로 유입되는 공기를 집진 경로(DP)로 유도하기 위한 가이드 홀(29)이 선택적으로 설치될 수 있다. The air knife unit 25 is disposed below the chamber body 211 and has an air gap G for spraying compressed air to the upper surface of the workpiece and a fluid guide surface 251 for directing the flow of air in the upward direction. It may include. The air gap G may be formed, for example, between the knife body 254 and the lid 255 of the air knife unit 25 and connected to the air intake tab AI inside the knife body 254. Flow spaces can be formed. The air knife unit 25 may be annular in accordance with the shape of the chamber body 211 as a whole, the curved flow restriction surface 252 is connected to the fluid guide surface 251 below the air gap (G) Can be formed. If necessary, a guide hole 29 may be selectively installed on a lower surface of the open space 22 to guide air introduced into the open space 22 to the dust collecting path DP.

개방 공간(22)의 위쪽 부분에 서로 마주보는 한 쌍의 분사 노즐 유닛(27a, 27b)이 배치되어 압축 공기를 가공물의 표면으로 분무할 수 있다. 한 쌍의 분사 노즐 유닛(27a, 27b)은 위에서 설명된 것처럼, 개방 공간(22)의 내부에 에어 커튼을 형성하는 기능을 가질 수 있다. 다른 한편으로 한 쌍의 분사 노즐 유닛(27a, 27b)은 가공물의 표면에서 에어 나이프 유닛(25)에 의하여 집진이 어려운 영역에 압축 공기를 분사시켜 이물질이 가공물의 표면으로부터 분리되도록 하는 기능을 가질 수 있다. 이와 같이 한 쌍의 분사 노즐 유닛(27a, 27b)은 가공물의 표면에서 발생되는 이물질이 제거되지 않는 영역이 생기는 것을 방지하는 보조 기능을 가질 수 있다. 각각의 분사 노즐 유닛(27a, 27b)은 공급 블록에 형성된 경사 배치 면(272) 및 경사 배치 면(272)에 고정되는 노즐(271)로 이루어질 수 있다. A pair of spray nozzle units 27a and 27b facing each other in the upper portion of the open space 22 can be arranged to spray compressed air onto the surface of the workpiece. The pair of spray nozzle units 27a and 27b may have a function of forming an air curtain inside the open space 22, as described above. On the other hand, the pair of spray nozzle units 27a and 27b may have a function of injecting compressed air from the surface of the workpiece to areas where dust collection is difficult by the air knife unit 25 to separate foreign matter from the surface of the workpiece. have. As described above, the pair of spray nozzle units 27a and 27b may have an auxiliary function of preventing the generation of a region in which foreign substances generated on the surface of the workpiece are not removed. Each spray nozzle unit 27a, 27b may be composed of an inclined arrangement surface 272 formed in the supply block and a nozzle 271 fixed to the inclined arrangement surface 272.

에어 나이프 유닛(25) 또는 분사 노즐 유닛(27a, 27b)으로부터 분사된 압축 공기는 이물질을 포획하여 집진 경로(DP)로 유입되어 챔버 몸체(211)의 내부를 경유하여 배출 포트(28)를 통하여 외부로 배출될 수 있다. 집진 경로(DP)는 에어 나이프 유닛(25)과 개방 공간(22)의 사이에 형성될 수 있고, 구체적으로 에어나이프 유닛(25)의 나이프 몸체(245)의 전면 벽(245a)과 개방 몸체(22)의 둘레 벽(212)에 의하여 형성될 수 있다. 유동 제한 면(252)에 의하여 넓은 폭을 가지는 집진 경로(DP)의 입구가 형성될 수 있고, 유체 유도 면(251)에 의하여 집진 경로(DP)에서 위쪽으로 상승하는 공기 흐름이 유도될 수 있다. The compressed air injected from the air knife unit 25 or the spray nozzle units 27a and 27b captures foreign matter and enters the dust collecting path DP and passes through the discharge port 28 via the interior of the chamber body 211. It can be discharged to the outside. The dust collecting path DP may be formed between the air knife unit 25 and the open space 22, and specifically, the front wall 245a and the open body of the knife body 245 of the air knife unit 25. 22 may be formed by the perimeter wall 212. The inlet of the dust collecting path DP having a wide width may be formed by the flow restricting surface 252, and the air flow rising upward from the dust collecting path DP may be induced by the fluid inducing surface 251. .

집진 클리너(20)는 고정 브래킷(FB)에 의하여 가공 설비에 고정될 수 있고, 배출 포트(28)는 집진 튜브를 통하여 집진 저장소와 연결될 수 있다. The dust collecting cleaner 20 may be fixed to the processing facility by the fixing bracket FB, and the discharge port 28 may be connected to the dust collecting reservoir through the dust collecting tube.

도 3은 본 발명에 따른 집진 클리너에 적용되는 분산 노즐 유닛의 실시 예를 도시한 것이다. Figure 3 illustrates an embodiment of a dispersion nozzle unit applied to the dust collecting cleaner according to the present invention.

도 3을 참조하면, 분사 노즐 유닛(27a)은 챔버 몸체에 결합되는 체결 블록(274) 및 체결 블록(274)에 배치되는 노즐(271)로 이루어질 수 있다. Referring to FIG. 3, the injection nozzle unit 27a may include a fastening block 274 coupled to the chamber body and a nozzle 271 disposed on the fastening block 274.

체결 블록(274)의 한쪽 면에 개방 공간의 둘레 면과 대응되는 대응 곡면(274a)이 형성될 수 있고, 체결 블록(274)의 아래쪽에 노즐(271)이 결합되는 경사 배치 면(272)이 형성될 수 있다. 체결 블록(274)의 한쪽에 유입 블록(32)이 형성될 수 있고, 유입 블록(32)에 압축 공기의 유입을 위한 유입 유닛(31)이 결합될 수 있다. 체결 블록(274)은 개방 공간 벽면(214)의 상부 벽면(214a)에 고정될 수 있고, 노즐(271)은 경사 배치 면(272)에 고정되는 노즐 브래킷(271a) 및 체결 블록(274)의 내부로 공급되는 압축 공기를 분무시키는 노즐 팁(271b)으로 이루어질 수 있다. 경사 배치 면(272) 및 이에 결합되는 평면 형상의 노즐 브래킷(271a)에 의하여 노즐(271)은 아래쪽 방향으로 경사지도록 배치되어 압축 공기를 분무할 수 있고, 노즐(271)의 경사각이 노즐 브래킷(271a)에 의하여 조절될 수 있다. 대안으로 노즐(271)은 도 1a 및 도 1b에 제시된 실시 예와 유사하게 개방 공간의 벽면을 따라 공기를 분무하도록 형성될 수 있다. A corresponding curved surface 274a corresponding to the circumferential surface of the open space may be formed on one surface of the fastening block 274, and an inclined arrangement surface 272 to which the nozzle 271 is coupled may be formed below the fastening block 274. Can be formed. An inlet block 32 may be formed on one side of the fastening block 274, and an inlet unit 31 for inlet of compressed air may be coupled to the inlet block 32. The fastening block 274 may be fixed to the upper wall surface 214a of the open space wall surface 214, and the nozzle 271 may be fixed to the inclination arrangement surface 272 of the nozzle bracket 271a and the fastening block 274. It may be composed of a nozzle tip (271b) for spraying the compressed air supplied to the inside. By the inclined arrangement surface 272 and the planar nozzle bracket 271a coupled thereto, the nozzle 271 may be disposed to be inclined downward to spray compressed air, and the inclination angle of the nozzle 271 may be a nozzle bracket ( 271a). Alternatively, the nozzle 271 may be formed to spray air along the wall of the open space, similar to the embodiment shown in FIGS. 1A and 1B.

분사 노즐 유닛(27a)은 다양한 구조로 만들어질 수 있고 본 발명은 제시된 실시 예에 제한되지 않는다. The spray nozzle unit 27a can be made in various structures and the present invention is not limited to the embodiments shown.

도 4는 본 발명에 따른 환형 구조의 집진 클리너의 작동 과정의 실시 예를 도시한 것이다. Figure 4 shows an embodiment of the operation of the dust collecting cleaner of the annular structure according to the present invention.

도 4를 참조하면, 개방 공간(22)의 내부로 1 공기 흐름(F41)이 유도될 수 있고, 1 공기 흐름(F41)은 개방 공간(22)을 따라 유입되어 가공물의 위쪽에 도달하게 된다. 에어 나이프 유닛(25)에 의하여 외부 2 공기 흐름(F422)이 유도되면서 1 공기 흐름과 함께 내부 2 공기 흐름(F421)이 유도될 수 있다. 그리고 내부 2 공기 흐름(F421)과 외부 2 공기 흐름(F422)의 레이저(L)에 의한 가공물의 가공 과정에서 발생하는 이물질을 포획하여 집진 경로(DP)로 유입되어 3 공기 흐름(F43)을 발생시킬 수 있다. 이후 3 공기 흐름(F43)은 챔버 몸체(211)에 형성된 적절한 경로를 따라 배출 포트(28)의 외부를 향하는 4 공기 흐름(F44)을 발생시킬 수 있다. 필요에 따라 분사 노즐 유닛(27a, 27b)으로부터 보조 공기 흐름(F411)이 발생되어 내부 2 공기 흐름(F421)과 합쳐질 수 있다. Referring to FIG. 4, one air stream F41 may be introduced into the open space 22, and the first air stream F41 flows along the open space 22 to reach the upper portion of the workpiece. The inner two air streams F421 may be induced together with the one air stream while the outer two air streams F422 are guided by the air knife unit 25. In addition, foreign substances generated during the processing of the workpiece by the laser L of the inner 2 air stream F421 and the outer 2 air stream F422 are captured and introduced into the dust collecting path DP to generate 3 air streams F43. You can. The three air streams F43 may then generate four air streams F44 outward of the discharge port 28 along a suitable path formed in the chamber body 211. If necessary, an auxiliary air stream F411 may be generated from the spray nozzle units 27a and 27b to be combined with the inner two air streams F421.

공기 흐름은 다양한 형태로 만들어져 집진 경로(DP)로 유도될 수 있고 본 발명은 제시된 실시 예에 제한되지 않는다. The air flow may be made in various forms and guided to the dust collecting path DP and the present invention is not limited to the embodiments shown.

본 발명에 따른 집진 클리너는 에어커튼 형태의 집진 경로가 형성되는 것에 의하여 가공물의 가공 과정에서 발생되는 연기 또는 미세 입자의 제거가 원활하게 이루어지도록 한다. 본 발명에 따른 집진 클리너는 공기가 에어나이프의 면을 따라 흐르도록 유도하는 것에 의하여 미세 입자 제거 효과가 높아지도록 한다. 본 발명에 따른 에어나이프는 내부에 개방 공간이 형성된 챔버 또는 환형 구조로 만들어지는 것에 의하여 레이저 마킹 장치 또는 반도체 장치와 같은 관련 장치의 배치 구조에 따라 다양한 위치에 설치되어 장치와 에어나이프 사이의 간섭이 방지되도록 한다. 또한 본 발명에 따른 에어나이프는 분산 노즐에 의하여 집진이 되지 않는 영역의 발생을 방지하는 것에 의하여 집진 효율이 높아지도록 한다. In the dust collecting cleaner according to the present invention, a dust collecting path in the form of an air curtain is formed to smoothly remove smoke or fine particles generated during processing of a workpiece. The dust collecting cleaner according to the present invention increases the fine particle removal effect by inducing air to flow along the surface of the air knife. The air knife according to the present invention is formed in a chamber or an annular structure having an open space therein, and is installed at various positions according to an arrangement structure of an associated device such as a laser marking device or a semiconductor device, thereby preventing interference between the device and the air knife. To prevent it. In addition, the air knife according to the present invention to increase the dust collection efficiency by preventing the generation of the area that is not collected by the dispersion nozzle.

위에서 본 발명은 제시된 실시 예를 참조하여 상세하게 설명이 되었지만 이 분야에서 통상의 지식을 가진 자는 제시된 실시 예로부터 본 발명의 기술적 사상을 벗어나지 않는 범위에서 다양한 변형 및 수정 발명은 만들 수 있을 것이다. 본 발명은 이와 같은 변형 및 수정 발명에 의하여 제한되지 않으며 다만 아래에 첨부된 청구범위에 의하여 제한된다. Although the invention has been described in detail above with reference to the presented embodiments, those skilled in the art may make various modifications and modifications within the scope of the present invention without departing from the spirit of the present invention. The invention is not limited by the invention as such variations and modifications but only by the claims appended hereto.

Claims (5)

중앙 부분에 가공물에 대하여 수직 방향으로 개방 공간(12, 22)이 형성된 집진 하우징(11a, 11b, 21); Dust collecting housings 11a, 11b, 21 in which open spaces 12, 22 are formed in the center portion in a direction perpendicular to the workpiece; 집진 하우징(11a, 11b, 21)의 아래쪽에 배치된 에어 나이프 유닛(15a, 15b, 25); 및 Air knife units 15a, 15b, 25 disposed below the dust collecting housings 11a, 11b, 21; And 에어 나이프 유닛(15a, 15b, 25)의 앞쪽에 형성되는 집진 경로(DP)를 포함하고, A dust collecting path DP formed in front of the air knife units 15a, 15b, 25, 상기 개방 공간(12)의 위쪽 및 에어 나이프 유닛(15a, 15b, 25)으로부터 유입 및 분무가 되는 기체는 집진 경로(DP)로 유입되는 것을 특징으로 하는 간섭 회피 구조의 집진 클리너. Dust collecting cleaner having an interference avoiding structure, characterized in that the gas that is introduced and sprayed from the upper portion of the open space (12) and the air knife unit (15a, 15b, 25) is introduced into the dust collecting path (DP). 청구항 1에 있어서, 집진 하우징(11a, 11b)은 서로 마주보는 한 쌍의 챔버 구조가 되고, 개방 공간(12, 22)은 한 쌍의 챔버 사이에 형성되는 것을 특징으로 하는 간섭 회피 구조의 집진 클리너.The dust collecting cleaner of claim 1, wherein the dust collecting housings 11a and 11b have a pair of chamber structures facing each other, and the open spaces 12, 22 are formed between the pair of chambers. . 청구항 1에 있어서, 집진 하우징(21)은 환형 챔버 구조가 되고, 환형의 내부에 개방 공간(12)이 형성되는 것을 특징으로 하는 간섭 회피 구조의 집진 클리너.The dust collecting cleaner according to claim 1, wherein the dust collecting housing (21) has an annular chamber structure, and an open space (12) is formed inside the annular shape. 청구항 1에 있어서, 에어 나이프 유닛(15a, 15b, 25)에 집진 경로(DP)과 접하는 면에 형성된 유체 유도 면(151, 251)이 형성되는 것을 특징으로 하는 간섭 회피 구조의 집진 클리너.The dust cleaner of claim 1, wherein the air knife unit (15a, 15b, 25) is provided with a fluid guide surface (151, 251) formed on a surface in contact with the dust collection path (DP). 청구항 1에 있어서, 개방 공간(12, 22)의 아래쪽으로 공기 흐름을 유도하는 분산 노즐 유닛(17a, 17b, 27)을 포함하는 간섭 회피 구조의 집진 클리너.The dust collecting cleaner of claim 1, comprising a dispersion nozzle unit (17a, 17b, 27) for directing an air flow below the open space (12, 22).
PCT/KR2016/009090 2016-08-18 2016-08-18 Dust collecting cleaner having interference avoidance structure Ceased WO2018034363A1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111299822A (en) * 2020-04-03 2020-06-19 苏州科韵激光科技有限公司 Smoke dust collecting mechanism
CN114765926A (en) * 2021-01-14 2022-07-19 重庆方正高密电子有限公司 PCB cleaning equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11121435A (en) * 1997-10-08 1999-04-30 Fujitsu Ltd Substrate processing apparatus and substrate processing method
JP2007300129A (en) * 2001-11-12 2007-11-15 Tokyo Electron Ltd Substrate processing device
JP2008174246A (en) * 2007-01-16 2008-07-31 Shintaku Kogyo Kk Waterdrop removing apparatus for container, and ring-shaped air nozzle for waterdrop removing apparatus
KR100965914B1 (en) * 2008-12-30 2010-06-24 (주)브이엘시스템 Fan module which can separate dust and dust separating device for the same
KR20160068607A (en) * 2014-12-07 2016-06-15 (주)엔티케이코퍼레이션 A Ring Type of an Air Knife Capable of Extending an Area of Dust Collection

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5347677A (en) * 1993-02-12 1994-09-20 Prentice William H Apparatus for cleaning isolated surfaces
CN2577998Y (en) * 2002-10-17 2003-10-08 逢开有限公司 Air knife dust collector
CN104343096B (en) * 2014-10-10 2016-04-20 西安工程大学 Sanitation truck drags suction road surface cleaning device
CN106340473B (en) * 2015-07-06 2020-03-06 芝浦机械电子株式会社 Substrate processing apparatus and substrate processing method
CN207328401U (en) * 2017-08-28 2018-05-08 广东华能机电有限公司 A kind of train purger
CN207929684U (en) * 2017-11-15 2018-10-02 太仓市意欣塑胶有限公司 A kind of high-effective dust-removing platform using electrostatic precipitation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11121435A (en) * 1997-10-08 1999-04-30 Fujitsu Ltd Substrate processing apparatus and substrate processing method
JP2007300129A (en) * 2001-11-12 2007-11-15 Tokyo Electron Ltd Substrate processing device
JP2008174246A (en) * 2007-01-16 2008-07-31 Shintaku Kogyo Kk Waterdrop removing apparatus for container, and ring-shaped air nozzle for waterdrop removing apparatus
KR100965914B1 (en) * 2008-12-30 2010-06-24 (주)브이엘시스템 Fan module which can separate dust and dust separating device for the same
KR20160068607A (en) * 2014-12-07 2016-06-15 (주)엔티케이코퍼레이션 A Ring Type of an Air Knife Capable of Extending an Area of Dust Collection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111299822A (en) * 2020-04-03 2020-06-19 苏州科韵激光科技有限公司 Smoke dust collecting mechanism
CN114765926A (en) * 2021-01-14 2022-07-19 重庆方正高密电子有限公司 PCB cleaning equipment

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CN109414737A (en) 2019-03-01
CN109414737B (en) 2021-08-27

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