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WO2018031174A2 - Procédé de correction d'erreur dans la microscopie à sonde de balayage - Google Patents

Procédé de correction d'erreur dans la microscopie à sonde de balayage Download PDF

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Publication number
WO2018031174A2
WO2018031174A2 PCT/US2017/041740 US2017041740W WO2018031174A2 WO 2018031174 A2 WO2018031174 A2 WO 2018031174A2 US 2017041740 W US2017041740 W US 2017041740W WO 2018031174 A2 WO2018031174 A2 WO 2018031174A2
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Prior art keywords
scan
scanning probe
trace
probe microscope
aligned
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WO2018031174A3 (fr
Inventor
Xiaoguang Zhang
Xianqi LI
An-Ping Li
Hao Zhang
Yunmei Chen
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University of Florida
University of Florida Research Foundation Inc
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University of Florida
University of Florida Research Foundation Inc
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Publication of WO2018031174A3 publication Critical patent/WO2018031174A3/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes

Definitions

  • the present application is generally related to the field of scanning probe microscopy (SPM) techniques such as scanning tunneling microscopy (STM).
  • SPM scanning probe microscopy
  • STM scanning tunneling microscopy
  • the invention of SPM techniques has revolutionized the study of nanoscale and atomic scale surface structures and properties.
  • SPM has been a particularly useful tool for studying surfaces and new two dimensional (2D) materials such as graphene and topological insulators.
  • a scanning probe is controlled by a SPM controller to scan across the surface of a sample material along x- and y- directions in order to produce a raster scan image.
  • the total area of the scan image corresponds to the total scan area of the scanning probe over the sample surface.
  • each pixel of the scan image comprises signal intensity that may correspond essentially to the sample height signal in the z-direction at each location along the scan path of the scanning probe tip, such that the produced scan image represent a topographical image.
  • the nature of the signal intensity recorded in each pixel of the scan image depends on the interaction model of the scanning probe tip with the atoms of the sample surface.
  • a scanning probe microscope system for forming an image of a sample surface.
  • the scanning probe microscope system comprises a scanning probe tip configured to provide an output representing a characteristic of the sample surface adjacent the scanning probe tip; a scan controller configured to control motion of the scanning probe tip along a plurality of scan paths in a scan area on the sample surface.
  • Each of the plurality of scan paths comprises a first scan path portion along a first scan direction and a respective second scan path portion along a second scan direction opposite the first scan direction such that the scan controller outputs scan traces corresponding to each of the first scan path portion and the second scan path portion in the plurality of scan paths.
  • the scanning microscope system further comprises one or more processors configured to receive scan traces from the scan controller and compute a scanning probe microscope image of the scan area.
  • the one or more processors are configured to generate the scanning probe microscope image from the scan traces by computing data representing lines of the scanning probe microscope image from data in the scan paths based on scan traces corresponding to the first scan path portion and a respective second scan path portion in respective scan paths of the plurality of scan paths.
  • a method of processing scanning probe microscope data with one or more processors comprises a plurality of scan traces representing a characteristic of a sample surface measured at locations along a plurality of scan paths in a scan area.
  • Each of the plurality of scan paths comprises a first scan path portion along a first scan direction and a second scan path portion along a second scan direction opposite the first scan direction.
  • the plurality of scan traces comprise a first scan trace along the first scan path portion and a second scan trace along the second scan path portion of at least one scan path of the plurality of scan paths.
  • the method comprises aligning the first scan trace and the second scan trace such that the location of at least one feature in the aligned first scan trace is substantially aligned with the location of at least one corresponding feature in the aligned second scan trace.
  • the method further comprises generating weighting factors based on the aligned first scan trace and the aligned second scan trace; combining the aligned first scan trace with the aligned second scan trace based, at least in part, on the generated weighting factors to produce a processed scan trace along the at least one scan path, and producing, by the one or more processors, a scanning probe microscope image, based at least in part on the processed scan trace.
  • a non-transitory computer-readable storage medium is disclosed.
  • the non-transitory computer-readable storage medium is encoded with a plurality of instructions that, when executed by one or more processors in a scanning probe microscope system comprising a scan controller and a scanning probe tip perform a method.
  • the method comprises receiving, scan traces representing a characteristic of the sample surface measured at scanning probe tip locations along a plurality of scan paths in a scan area.
  • Each of the plurality of scan paths comprises a first scan path portion along a first scan direction and a second scan path portion along a second scan direction opposite the first scan direction.
  • the method further comprises aligning a first scan trace along the first scan path portion and a second scan trace along the second scan path portion of at least one scan path of the plurality of scan paths such that the location of at least one feature in the aligned first scan trace is substantially aligned with the location of at least one corresponding feature in the aligned second scan trace; combining the aligned first scan trace with the aligned second scan trace based, at least in part, on the generated weighting factors to produce a processed scan trace along the at least one scan path and producing, the scanning probe microscope image based at least in part on the processed scan trace.
  • FIG. 1 is a schematic diagram showing components of an exemplary scanning tunneling microscope system and illustrative examples of scan traces;
  • FIG. 2a is a graph showing an exemplary scanning tunneling microscope (STM) image with lines captured during forward scans;
  • STM scanning tunneling microscope
  • FIG. 2b is a graph showing an exemplary STM image with lines captured during backward scans
  • FIG. 3a is a graph showing an average of the forward and backward scans in the example in FIGs. 2a and 2b;
  • FIG. 3b is a graph showing an average of an aligned forward and aligned backward scans based on the example in FIGs. 2a and 2b, according to an embodiment
  • FIG. 4a is a graph showing the difference between the forward and backward scans in the example in FIGs. 2a and 2b;
  • FIG. 4b is a graph showing the difference between aligned forward scans and aligned backward scans based on the example in FIGs. 2a and 2b, according to an embodiment
  • FIGs. 5a-c are data plots showing line traces along rows 46, 80 and 100, respectively, of the exemplary STM image in FIGs. 2a and 2b.
  • FIG. 6a is a graph showing an exemplary STM image with lines captured during a slow scan speed
  • FIG. 6b is a graph showing an exemplary STM image of the same sample surface with the example in FIG. 6a, with lines captured during a fast scan speed and processed with the data processing method according to an embodiment;
  • FIG. 7a is a graph showing an exemplary scanning tunneling potentiometry (STP) image with lines captured during forward scans;
  • FIG. 7b is a graph showing an exemplary STP image with lines captured during backward scans
  • FIG. 8a is a graph showing an average of the forward and backward scans in the example STP images in FIGs. 7a and 7b;
  • FIG. 8b is a graph showing an average of an aligned forward and aligned backward scans based on the example STP images in FIGs. 7a and 7b, according to an embodiment;
  • FIG. 9a is a graph showing the difference between the forward and backward scans in the example in FIGs. 7a and 7b;
  • FIG. 9b is a graph showing the difference between aligned forward scans and aligned backward scans based on the example STP image in FIGs. 7a and 7b, according to an embodiment
  • FIG. 10 is a data plot showing objective function value versus the CPU time between the algorism ALP-ADMM and the gradient descent method, respectively, according to an embodiment.
  • FIG. 11a is a graph showing a map of extracted conductivity value for ⁇ ⁇ processed based on the forward scans in the example in FIG. 7a according to an embodiment
  • FIG. l ib is a graph showing a map of extracted conductivity value for ⁇ ⁇ processed based on the backward scans in the example in FIG. 7b according to an embodiment
  • FIG. 1 lc is a graph showing a map of preprocessed data based on the extracted conductivity values in the examples in FIGs. 11a and l ib according to an embodiment
  • FIG. 12a is a graph showing a map of extracted conductivity value for o y processed based on the forward scans in the example in FIG. 7a according to an embodiment
  • FIG. 12b is a graph showing a map of extracted conductivity value for o y processed based on the backward scans in the example in FIG. 7b according to an embodiment
  • FIG. 12c is a graph showing a map of preprocessed data based on the extracted conductivity values in the examples in FIGs. 12a and 12b according to an embodiment
  • FIG. 13 is a histogram plot showing the statistical distribution of the values of un-normalized ⁇ ⁇ , according to an embodiment
  • FIG. 14 is a data plot showing results of the rubber band method for processing scan data, according to an embodiment.
  • FIG. 15a is a graph showing topography data from forward scan, according to an embodiment;
  • FIG. 15b is a graph showing topography data from backward scan, according to an embodiment
  • FIG. 15c is a graph showing atomic resolution raw data from forward scan, according to an embodiment
  • FIG. 15d is a graph showing atomic resolution raw data from backward scan, according to an embodiment
  • FIG. 16a is a graph showing processed atomic resolution image of the sample from the fast scan data in FIG. 15c and FIG. 15d, after background removal, registration and image restoration steps, according to an embodiment
  • FIG. 16b is a graph showing a ranking map of the post-processed image in FIG. 16a, at the final atomic resolution image, according to an embodiment.
  • the inventors have recognized and appreciated techniques that may be used to acquire accurate scanning images.
  • a scanning probe tip is moved across a scan area of a sample surface to acquire a scanning microscope image.
  • the tip movement may comprise forward movement and backward movement along a series of scan lines that correspond to lines of pixels in a scanning probe microscope image.
  • scan rate and accuracy can be inversely related.
  • data captured during a scan may comprise artifacts.
  • a probe tip may oscillate closer and farther away from the sample surface during movement along a scan line.
  • data acquired during the scan may comprise oscillation artifacts even though such feature is absent from the sample surface.
  • the inventors have recognized and appreciated that, because the probe tip covers essentially the same scan area twice, once during forward tip movements and once during backward tip movements, the redundancy between the data acquired during forward tip movement and backward tip movement may be utilized to reduce the effects of oscillation without increasing time to make measurements.
  • measurements made along the forward and backward portions of each scan path may be combined to produce a single scanning probe microscope image that accurately represent a characteristic of the sample surface inside the scan area.
  • an artifact may be present in a portion of a forward scan but absent from a corresponding backward scan along a similar area.
  • portions of a backward scan may give rise to artifacts in the data acquired while the forward scan is a better representation of the actual sample surface.
  • the selective processing involves determining, based on the characteristics of the forward and backward portions of a scan, a weighting for each location of each portion, such that the selective processing may be achieved by forming a weighted combination of the values measured at corresponding location of the forward and backward portions of a scan.
  • processing based on data acquired during forward and backward tip movement may be performed during the scanning process such that a processed scanning probe microscope image may be produced in real-time.
  • processing may be performed off line, in any suitable computer processing equipment configured to receive the scan data.
  • a scanning probe microscope system such as system 100 in FIG. 1 may be used to form a scanning probe microscope image 10a that corresponds to a scan area 10 of a sample surface.
  • the scanning probe microscope system 100 includes a scanning probe tip 30 that is controlled by scan controller 70 to measure a characteristic of the sample surface in scan area 10 adjacent the scanning probe tip 30.
  • Scan controller 70 controls the motion of the scanning probe tip 30 to move along a plurality of scan paths such as scan path 40 on the sample surface.
  • a scan path 40 may originate from a point 42 along one side of the scan area 10, proceed in the +x direction (see FIG. 1) towards a second point 46 along an opposite side of the scan area 10, before turning back to proceed in the -x direction.
  • a plurality of scan paths may be provided such that the scanning probe tip 30 is moved to cover the entire surface of the sample inside scan area 10.
  • Each scan path such as scan path 40 comprises a first scan path portion 44 along +x or a forward scan, and a second scan path portion 48 along -x or a backward scan.
  • the scan controller 70 outputs scan traces corresponding to each of the forward scan and backward scan in the plurality of scan paths.
  • the forward scan and backward scan portions of a scan path are substantially parallel and aligned to within the separation of two adjacent scan traces.
  • the separation between the forward scan and backward scan may be adequate if it is within a suitable multiple or fraction of the spacing between adjacent scan paths, such as 2x or 0.5x.
  • the forward scan and backward scan are substantially overlapping.
  • scan controller 70 controls motion of probe tip 30 by controlling scan head 20 to move the position of probe tip 30.
  • Probe tip 30 may be coupled to scan head 20 via any suitable translational movement system known in the art.
  • scan head 20 may comprise piezoelectric elements that moves in predefined distances in response to signals from controller 70 along each one of the x-, y- and z- axis as shown in FIG. 1.
  • scan controller 70 receives data while probe tip 30 is moved along the scan paths and outputs the data as scan traces corresponding to the scan paths.
  • one or more processors 80 are provided to receive scan traces from the scan controller 70 and produce a scanning probe microscope image 12a of the scan area 10 based on the scan traces.
  • the scanning probe microscope image 12a may be stored, transmitted or further processed in any suitable way.
  • the scanning probe microscope image 12a may be presented to an operator 90 on a display.
  • the one or more processors 80 are configured to generate the scanning probe microscope image 12a from the scan traces by computing data representing lines of the scanning probe microscope image 12a from data in the scan paths based on scan traces corresponding to the forward scan 44 and the respective backward scan 48 in scan paths such as scan path 40 as shown in the example scanning probe microscope system 100 in FIG. 1.
  • the one or more processors 80 computes data representing lines of the scanning probe microscope image 12a by first aligning a common feature in the forward scan with a corresponding feature in the backward scan.
  • an object 12 comprises raised portions in the z-direction above the rest of the sample surface in scan area 10 and shows in both the scan trace for the forward scan as feature 44a and the scan trace for the backward scan as feature 48a.
  • a registration method may be performed to align the feature 44a in the forward scan trace and feature 48a in the backward scan trace such that the same feature appear in substantially the same location along the scan traces, based on the assumption that both features 44a and 48a correspond to the same object 12 on the sample surface.
  • alignment between corresponding features in the aligned forward and backward scan traces may mean the features are aligned within a predefined resolution, for example within a certain fraction of the distance represented by a pixel, such as 50% of a pixel.
  • other metrics may be used to determine alignment condition between corresponding features in the aligned forward and backward scan traces.
  • the aligned forward scan trace and aligned backward scan trace may be processed to produce data representing a line of the scanning probe microscope image.
  • a scan trace with a higher smoothness may be the scan trace with less artifacts and closer to representation of the actual characteristic of the sample surface.
  • the forward scan trace and backward scan trace may be combined using a respective weighting factor proportional to smoothness of the traces at each location along the scan path. In one example, a higher smoothness of the traces may correspond to a higher value of weighting factor assigned to the traces.
  • feature 12 of the sample surface may be a portion with a height difference and the scanning probe microscope image 10a may be a two dimensional height image showing height features 12a in the image.
  • the characteristic of the sample surface may be surface potential and the scanning microscope image 10a is a two dimensional potentiometry map showing potential feature 12a in the scan area.
  • the inventors have recognized that scanning probe microscope such as STM has rarely been considered a real-time method because of its slow scanning rate compared to most dynamic processes on a surface. This has severely limited its application to the study of most dynamic processes on surfaces such as surface diffusion, phase transitions, self-assembly phenomena, film growth and etching, chemical reactions, conformational changes of molecules. Raising the scan rate of scanning probes has been the objective of intense research efforts in the past decades, with most of the efforts focused on hardware improvements. On the other hand, researchers have also applied other techniques to utilize conventional, slow-scan STM to study dynamic processes.
  • Changes in the surface height z or in the density of states cause a change in the tunneling current.
  • the change in current with respect to position can be measured itself, or alternatively the height of the tip corresponding to a constant current can be measured.
  • the constant height mode feedback electronics adjust the height by a voltage to the piezoelectric height control mechanism.
  • the voltage and height are both held constant while the current changes to keep the junction voltage from changing.
  • the constant current mode is usually used in STM because surface features can easily exceed a pre-defined tip-sample separation (typically 4-7 A) and can crash the tip in a constant height mode.
  • the constant current mode is slow, due to more time required by the piezoelectric movements to register the height change. The time to complete a measurement for each pixel position is about 2 msec (0.5 pixels per msec) for a typical equipment, and approaches 0.1 msec (10 pixels per msec) for a top-of-line setup.
  • the intensity fluctuation in the atomic resolution images degrades the image quality and impedes the registration and image restoration method that we will apply later. Because the image intensity varies strongly from one scan line to the next, but stays nearly constant over long segments within each line, this fluctuation can be treated as a background for each scan line. Therefore, according to an aspect of the present application, the first step in processing the atomic resolution images is to remove this background in a line-by-line manner.
  • the weight is to reduce the impact of noise in the data. It is a
  • An additional minor improvement to the background removal process is to remove the small remnant slope at the two edges by fitting a small part of the line at two ends to a linear background with slopes of same magnitude but opposite sign (so that the two lines meet at the same height in the middle) and removing this background from the corresponding halves of the line. This step makes the intensity somewhat more uniform across the whole line.
  • S max is determined by searching for the maximum correlation coefficient after image registration, a process that we will describe below.
  • registration follows a 2- step process: first, the images from forward scan and backward scan, represented by are aligned through global shiftings;
  • ICDIR inverse consistent deformable image registration
  • the second term aims at enforcing inverse consistency for the transformations u and v.
  • the inner loop will be terminated with fixed ⁇ when the mean of the cross correlation converges.
  • the returned value from the inner loop will be set as the initialized value for each outer loop.
  • the parameter ⁇ is doubled in each outer loop to safeguard smaller When is lower than ⁇ , the outer loop will be terminated.
  • the registration procedure consists of a
  • the improved approach is to treat the pair of data sets F a and B a as linearly correlated data, and find the constant c such that the regression coefficient is maximized,
  • Algorithm 2.2 The Constrained Adaptive and Iterative Filtering algorithm for approximately solving problem (2.2)
  • F(r, : ) represents the r-th row of the 2D matrix F and the operator min ⁇ -,- ⁇ and max ⁇ -,- ⁇ generate vectors of element-wise minimum or maximum value of the two input vectors respectively.
  • the operator * in 3(a)iii of ALG. 2.2 represents the discrete convolution operation.
  • the first three postprocessing steps described above on atomic resolution fast scan data may yield images that clearly show surface lattice structure.
  • images like most atomic resolution STM images, contain both the information of atomic positions as well as the topography of the surface. The latter tends to obstruct the visibility of atomic positions. If the topography information is discarded, then one can obtain a higher quality image containing only atomic positions. In this section we will describe such an algorithm.
  • the first part of this algorithm is to remove all large scale topography information while retaining the local height information that is needed to distinguish the atoms.
  • ⁇ the square consisting of nxn pixels centered at (x, y) and define a ranking function R(x, y) for S(x, y) on ⁇ , ⁇ as follows: If smallest one among all define
  • n is the number of pixels that covers more than 1 - 2 atomic distances.
  • the ranking map obtained this way is a ragged image.
  • the method of using the ranking map for feature enhancement can be viewed as the reverse of ranking based smoothing techniques such as median filtering.
  • the ranking map algorithm presented here is unique in that it does not merely use the ranking to help determine the image intensity as in the median filtering method.
  • the final image intensity is the ranking itself, and the original image is discarded once the ranking map is constructed.
  • the method consists of a data preprocessing procedure to reduce/eliminate noise and a numerical conductivity reconstruction.
  • the preprocessing procedure employs an inverse consistent image registration method to align the forward and backward scans of the same line for each image line followed by a total variation (TV) based image restoration method to obtain a (nearly) noise-free potential from the aligned scans.
  • the preprocessed potential is then used for numerical conductivity reconstruction, based on a TV model solved by accelerated Alternating Direction Method of Multiplier (A-ADMM).
  • A-ADMM Alternating Direction Method of Multiplier
  • the estimate of the grain boundary conductivity relies on the estimate of the grain boundary density (grain size) and the model of the resistor network formed by the grain boundaries. Other extraneous resistance sources such as phonon and impurity scattering must also be carefully excluded. Even in the best experiments, this method can only yield an average estimate of the grain boundary conductivity.
  • Scanning tunneling potentiometry has been recently employed to yield two-dimensional maps of the electrochemical potential on the surface of a material while an electric current is flowing along the surface.
  • the obvious approach using this technique for conductivity measurement of a grain boundary is to perform a scan along a line perpendicular to the boundary, and extract the local conductivity using the potential profile along the line. This method produces excellent result if the local current direction is exactly perpendicular to the grain boundary.
  • One way to ensure that is to make the measurement on a nanowire etched from a larger sample containing grain boundaries In general, however, this is not a feasible approach.
  • the method presented here covers both the noise removal procedure and the numerical conductivity reconstruction. It exploits the data redundancy in the forward and backward scans of the same sample to reduce/eliminate the noise.
  • This work represents a significant advance from a previous work that extracted the grain boundary resistance of graphene. Compared to the previous work, the current method is more robust, ensures convergence, and greatly reduces the effect of noise.
  • the minimization problem (B7) can be solved through the Alternating Direction Method of Multiplier (ADMM) by introducing auxiliary variables and Then the original problem is transformed to the following constraint
  • ALP-ADMM accelerated linearized and preconditioned ADMM
  • Algorithm 4.1 The ALP-ADMM algorithm for solving problem (B7) [199] choose with
  • Preprocessing is used in our proposed method of extracting conductivity profile. Firstly, to obtain a reliable ⁇ with the forward and backward scans of the same line, we need to perform image registration on them as they tend to not aligned well in practice. Secondly, the model (B8) involves the first and second order derivatives of ⁇ , hence the smoothness of ⁇ should be ensured in advance of the image restoration process.
  • the preprocessing of the data is divided into two key steps: 1. image registration of forward and backward scan restore the combined data from the
  • this combined potential may be noisy. A noisy can significantly degrade the quality of the two pre-processed potentials
  • Algorithm 4.2 The AD MM algorithm for solving problem (B28)
  • the ROF model reads as
  • ⁇ > 0 is a parameter.
  • the first term in the model serves as the data fidelity term while the second term is the total variation of image ⁇ .
  • image with redundant details e.g. noisy image
  • the undesirable details e.g. noise
  • Numerous algorithms were introduced to solve this problem. To keep a consistent approach in this work we adopt the ADMM algorithm for this task. It is sufficient for our purpose because the first term in Eq. (B28) is strongly convex and smooth so both accelerated and classic ADMM have the same convergence rate.
  • FIG. 8 we compare the average potential obtained from the raw data (panel a) against that obtained from the preprocessed data (panel b). The former clearly shows more noise and has a fuzzy edge at the grain boundary.
  • the preprocessed data yields a smoother potential with a sharper grain boundary.
  • FIG. 9 shows the difference between the forward and backward scans for the raw data (panel a) and the preprocessed data (panel b). The difference is significantly reduced by the preprocessing procedure.
  • a smart phone or other portable electronic device may include a camera, capable of capturing still or video images.
  • a computing device may include sensors such as a global positioning system (GPS) to sense location and inertial sensors such as a compass, an inclinometer and/o ran accelerometer.
  • GPS global positioning system
  • the operating system may include utilities to control these devices to capture data from them and make it available to applications executing on the computing device.
  • a computing device may include a network interface to implement a personal area network.
  • a network interface may operate in accordance with any suitable technology, including a Bluetooth, Zigbee or an 802.11 ad hoc mode, for example.
  • processors may be implemented as integrated circuits, with one or more processors in an integrated circuit component, including commercially available integrated circuit components known in the art by names such as CPU chips, GPU chips, microprocessor, microcontroller, or co-processor.
  • processors may be implemented in custom circuitry, such as an ASIC, or semicustom circuitry resulting from configuring a programmable logic device.
  • a processor may be a portion of a larger circuit or semiconductor device, whether commercially available, semi-custom or custom.
  • some commercially available microprocessors have multiple cores such that one or a subset of those cores may constitute a processor.
  • a processor may be implemented using circuitry in any suitable format.
  • a computer may be embodied in any of a number of forms, such as a rack-mounted computer, a desktop computer, a laptop computer, or a tablet computer. Additionally, a computer may be embedded in a device not generally regarded as a computer but with suitable processing capabilities, including a Personal Digital Assistant (PDA), a smart phone or any other suitable portable or fixed electronic device.
  • PDA Personal Digital Assistant
  • a computer may have one or more input and output devices. These devices can be used, among other things, to present a user interface. Examples of output devices that can be used to provide a user interface include printers or display screens for visual presentation of output and speakers or other sound generating devices for audible presentation of output. Examples of input devices that can be used for a user interface include keyboards, and pointing devices, such as mice, touch pads, and digitizing tablets. As another example, a computer may receive input information through speech recognition or in other audible format. In the embodiment illustrated, the input/output devices are illustrated as physically separate from the computing device. In some embodiments, however, the input and/or output devices may be physically integrated into the same unit as the processor or other elements of the computing device.
  • Such computers may be interconnected by one or more networks in any suitable form, including as a local area network or a wide area network, such as an enterprise network or the Internet.
  • networks may be based on any suitable technology and may operate according to any suitable protocol and may include wireless networks, wired networks or fiber optic networks.
  • the various methods or processes outlined herein may be coded as software that is executable on one or more processors that employ any one of a variety of operating systems or platforms. Additionally, such software may be written using any of a number of suitable programming languages and/or programming or scripting tools, and also may be compiled as executable machine language code or intermediate code that is executed on a framework or virtual machine.
  • the invention may be embodied as a computer readable storage medium (or multiple computer readable media) (e.g., a computer memory, one or more floppy discs, compact discs (CD), optical discs, digital video disks (DVD), magnetic tapes, flash memories, circuit configurations in Field Programmable Gate Arrays or other semiconductor devices, or other tangible computer storage medium) encoded with one or more programs that, when executed on one or more computers or other processors, perform methods that implement the various embodiments of the invention discussed above.
  • a computer readable storage medium may retain information for a sufficient time to provide computer-executable instructions in a non-transitory form.
  • Such a computer readable storage medium or media can be transportable, such that the program or programs stored thereon can be loaded onto one or more different computers or other processors to implement various aspects of the present invention as discussed above.
  • the term "computer-readable storage medium” encompasses only a computer-readable medium that can be considered to be a manufacture (i.e., article of manufacture) or a machine.
  • the invention may be embodied as a computer readable medium other than a computer-readable storage medium, such as a propagating signal.
  • code means any type of computer code or set of computer-executable instructions that can be employed to program a computer or other processor to implement various aspects of the present invention as discussed above. Additionally, it should be appreciated that according to one aspect of this embodiment, one or more computer programs that when executed perform methods of the present invention need not reside on a single computer or processor, but may be distributed in a modular fashion amongst a number of different computers or processors to implement various aspects of the present invention.
  • Computer-executable instructions may be in many forms, such as program modules, executed by one or more computers or other devices.
  • program modules include routines, programs, objects, components, data structures, etc. that perform particular tasks or implement particular abstract data types.
  • functionality of the program modules may be combined or distributed as desired in various embodiments.
  • data structures may be stored in computer-readable media in any suitable form.
  • data structures may be shown to have fields that are related through location in the data structure. Such relationships may likewise be achieved by assigning storage for the fields with locations in a computer-readable medium that conveys relationship between the fields.
  • any suitable mechanism may be used to establish a relationship between information in fields of a data structure, including through the use of pointers, tags or other mechanisms that establish relationship between data elements.
  • the invention may be embodied as a method, of which an example has been provided.
  • the acts performed as part of the method may be ordered in any suitable way. Accordingly, embodiments may be constructed in which acts are performed in an order different than illustrated, which may include performing some acts simultaneously, even though shown as sequential acts in illustrative embodiments.
  • a reference to "A and/or B", when used in conjunction with open-ended language such as “comprising” can refer, in one embodiment, to A only (optionally including elements other than B); in another embodiment, to B only (optionally including elements other than A); in yet another embodiment, to both A and B (optionally including other elements); etc.
  • the phrase "at least one,” in reference to a list of one or more elements, should be understood to mean at least one element selected from any one or more of the elements in the list of elements, but not necessarily including at least one of each and every element specifically listed within the list of elements and not excluding any combinations of elements in the list of elements.
  • This definition also allows that elements may optionally be present other than the elements specifically identified within the list of elements to which the phrase "at least one" refers, whether related or unrelated to those elements specifically identified.
  • At least one of A and B can refer, in one embodiment, to at least one, optionally including more than one, A, with no B present (and optionally including elements other than B); in another embodiment, to at least one, optionally including more than one, B, with no A present (and optionally including elements other than A); in yet another embodiment, to at least one, optionally including more than one, A, and at least one, optionally including more than one, B (and optionally including other elements); etc.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

L'invention concerne un système de microscope à sonde de balayage et un procédé de fonctionnement de celui-ci pour produire des images de microscope à sonde de balayage à des vitesses de balayage rapides et réduire des artéfacts d'oscillation. Dans certains modes de réalisation, un procédé d'alignement d'image cohérent inverse est utilisé pour aligner des traces de balayage avant et arrière pour chaque ligne de l'image de microscope à balayage. Dans certains modes de réalisation, les traces de balayage avant et arrière alignées sont combinées à l'aide d'un facteur de pondération favorisant la trace de balayage ayant une plus grande régularité. Dans certains modes de réalisation, l'image de microscope à sonde de balayage est une carte de potentiométrie et un procédé est fourni pour extraire une carte de conductivité de la carte de potentiométrie.
PCT/US2017/041740 2016-07-12 2017-07-12 Procédé de correction d'erreur dans la microscopie à sonde de balayage Ceased WO2018031174A2 (fr)

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NL2025569B1 (en) * 2020-05-12 2021-11-25 Nearfield Instr B V Method of monitoring at least one of an overlay or an alignment between layers of a semiconductor substrate, scanning probe microscopy system and computer program.
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JPH1048224A (ja) 1996-08-08 1998-02-20 Olympus Optical Co Ltd 走査型プローブ顕微鏡
JP2002107283A (ja) * 2000-03-28 2002-04-10 Seiko Instruments Inc 走査型プローブ顕微鏡
RU2169954C1 (ru) * 2000-07-27 2001-06-27 Государственное унитарное предприятие Государственный научный центр РФ Институт теоретической и экспериментальной физики Способ и устройство контроля и исследования поверхности внутри ядерных и термоядерных установок
WO2006019130A1 (fr) * 2004-08-18 2006-02-23 Hitachi Kenki Fine Tech Co., Ltd Procédé de contrôle de balayage de sonde et dispositif de contrôle de balayage de sonde pour microscope à sonde de balayage
US7513142B2 (en) * 2005-08-12 2009-04-07 Veeco Instruments Inc. Tracking qualification and self-optimizing probe microscope and method
US7770439B2 (en) * 2006-10-17 2010-08-10 Veeco Instruments Inc. Method and apparatus of scanning a sample using a scanning probe microscope
KR101536788B1 (ko) * 2007-09-12 2015-07-14 브루커 나노, 인코퍼레이션. 자동 스캐닝 탐침 이미지화 방법 및 장치
US8074291B2 (en) * 2010-01-29 2011-12-06 Agilent Technologies, Inc. Harmonic correcting controller for a scanning probe microscope
GB201006364D0 (en) * 2010-04-16 2010-06-02 Univ Warwick Intermittent control scanning electrochemical microscopy
US9093249B2 (en) * 2013-09-12 2015-07-28 Sandia Corporation Sparse sampling and reconstruction for electron and scanning probe microscope imaging

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