WO2018025587A1 - Heat transfer sheet - Google Patents
Heat transfer sheet Download PDFInfo
- Publication number
- WO2018025587A1 WO2018025587A1 PCT/JP2017/025048 JP2017025048W WO2018025587A1 WO 2018025587 A1 WO2018025587 A1 WO 2018025587A1 JP 2017025048 W JP2017025048 W JP 2017025048W WO 2018025587 A1 WO2018025587 A1 WO 2018025587A1
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- WO
- WIPO (PCT)
- Prior art keywords
- conductive sheet
- heat conductive
- resin
- heat
- carbon material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L101/00—Compositions of unspecified macromolecular compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
Definitions
- the present invention relates to a heat conductive sheet.
- a method of promoting heat dissipation by attaching a heat sink such as a metal heat sink, heat sink, heat sink or the like to a heat generator such as an electronic component is adopted.
- a radiator in order to efficiently transfer heat from the heating element to the radiator, the heating element and the heating element are connected via a sheet-like member (thermal conduction sheet) that exhibits good thermal conductivity.
- the radiator is in close contact.
- positioned between a heat generating body and a heat radiator is calculated
- the heat conductive sheet a sheet molded using a composite mixture in which a resin and a component exhibiting heat conductivity are usually used. Therefore, in recent years, many studies have been made on the components of the heat conductive sheet in order to improve the heat conductivity of the heat conductive sheet.
- Patent Document 1 a heat radiating sheet containing a specific rubber component and anisotropic graphite oriented in a certain direction (that is, “thermal conductive sheet”) has been proposed (for example, see Patent Document 1).
- Patent Document 1 is obtained by blending anisotropic graphite with a resin component containing a thermoplastic rubber component, a thermosetting rubber component, and a thermosetting rubber curing agent that can be cross-linked to the thermosetting rubber component.
- a heat-dissipating sheet manufactured using the above composition is disclosed.
- the prepared composition is sandwiched between two films and rolled to produce a primary sheet by orienting anisotropic graphite in a direction substantially parallel to the main surface of the rolled sheet.
- the primary sheet is rolled in a predetermined direction to obtain a molded body, and the molded body is sliced in a predetermined direction to manufacture a heat conductive sheet.
- an object of this invention is to provide the heat conductive sheet which is excellent in the heat conductivity of the thickness direction.
- the present inventors have intensively studied to achieve the above object. Then, the inventors newly found that the Mooney viscosity of the resin component contained in the heat conductive sheet greatly affects the heat conductivity of the heat conductive sheet, and completed the present invention.
- the present invention aims to advantageously solve the above-described problems, and the heat conductive sheet of the present invention includes a particulate carbon material and a pre-compound containing one kind of resin or a composite of plural kinds of resins.
- a plurality of heat conductive sheets are laminated in a direction transverse to the thickness direction of the heat conductive sheet, and the Mooney viscosity of all resin components made of the one kind of resin or a composite of plural kinds of resins is 90 (ML 1 +4 , 100 ° C.) or less.
- a heat conductive sheet having a predetermined structure in which the Mooney viscosity of all resin components is 90 (ML 1 + 4 , 100 ° C.) or less is excellent in heat conductivity in the thickness direction.
- the “Mooney viscosity (ML 1 + 4 , 100 ° C.)” can be measured at a temperature of 100 ° C. in accordance with JIS K6300.
- the heat conductive sheet of the present invention when the Mooney viscosity of all the resin components is X and the heat conductivity in the thickness direction of the heat conductive sheet is Y, the relational expression: Y> ( ⁇ 0.2X + 25) It is preferable to satisfy.
- a heat conductive sheet that satisfies the above specific relational expression is excellent in production efficiency because it is easy to select a resin to be used during production.
- the “thermal conductivity in the thickness direction” of the heat conductive sheet can be measured by the method described in Examples.
- the heat conductive sheet of the present invention preferably has an Asker C hardness of 45 or more.
- a heat conductive sheet having an Asker C hardness of 45 or more is excellent in handleability.
- the “Asker C hardness” can be measured at a temperature of 23 ° C. using a hardness meter in accordance with the Asker C method of the Japan Rubber Association Standard (SRIS).
- the content rate of the said particulate carbon material is 35 volume% or more in the heat conductive sheet of this invention.
- the heat conductive sheet containing 35% by volume or more of the particulate carbon material is further excellent in heat conductivity.
- the heat conductive sheet of the present invention can be used by directly adhering to the heating element, or can be used by being sandwiched between the heating element and the radiator when the radiator is attached to the heating element. At this time, a heat conductive sheet may be used individually by 1 sheet, and may use multiple sheets together.
- the heat conductive sheet of this invention can also comprise a heat radiating device with heat generating bodies and heat sinks, such as a heat sink, a heat sink, and a heat radiating fin.
- the heat conductive sheet of the present invention is formed by laminating a plurality of pre-heat conductive sheets in a direction transverse to the thickness direction of the heat conductive sheet.
- a heat conductive sheet obtained by laminating a plurality of pre-heat conductive sheets in a direction transverse to the thickness direction of the heat conductive sheet is excellent in heat conductivity in the thickness direction.
- the pre heat conductive sheet which comprises the heat conductive sheet of this invention contains a particulate carbon material and 1 type of resin as a total resin component, or the composite of multiple types of resin. When the pre heat conductive sheet does not contain the particulate carbon material, the heat conductivity of the heat conductive sheet becomes insufficient.
- the Mooney viscosity of all the resin components is 90 (ML1 + 4 , 100 degreeC) or less.
- Total resin component is a base material of the heat conductive sheet (hereinafter, also referred to as "matrix resin") if not Mooney viscosity 90 (ML 1 + 4, 100 °C) following resins, the thermal conductivity of the heat conducting sheet It cannot be raised sufficiently.
- the heat conductive sheet of this invention comprises the laminated structure of a pre heat conductive sheet, naturally the content component of a pre heat conductive sheet can be contained in a heat conductive sheet.
- the plurality of pre-heat conductive sheets are bonded directly or through a very thin adhesive layer preferably formed of a resin having the same composition as the base resin of the pre-heat conductive sheet or a double-sided tape. For this reason, all the components and ratios thereof contained in the “pre-heat conductive sheet constituting the heat conductive sheet of the present invention” also apply to the “heat conductive sheet of the present invention”.
- the particulate carbon material is not particularly limited.
- graphite such as artificial graphite, flaky graphite, exfoliated graphite, natural graphite, acid-treated graphite, expandable graphite, and expanded graphite; carbon black Can be used. These may be used individually by 1 type and may use 2 or more types together. Among them, it is preferable to use expanded graphite as the particulate carbon material. This is because if the expanded graphite is used, the thermal conductivity of the thermal conductive sheet can be improved.
- the expanded graphite that can be suitably used as the particulate carbon material is, for example, finely expanded after heat-treating expandable graphite obtained by chemically treating graphite such as scaly graphite with sulfuric acid or the like. Can be obtained.
- expanded graphite include EC1500, EC1000, EC500, EC300, EC100, and EC50 (all trade names) manufactured by Ito Graphite Industries Co., Ltd.
- the particle diameter of the particulate carbon material is preferably 100 ⁇ m or more, more preferably 150 ⁇ m or more, more preferably 300 ⁇ m or less, and more preferably 250 ⁇ m or less in terms of volume-based mode diameter. . If the particle diameter of the particulate carbon material is equal to or greater than the above lower limit, the particulate carbon materials are brought into contact with each other in the heat conductive sheet to form a good heat transfer path, so that the heat conductive sheet exhibits high thermal conductivity. Because it can.
- the heat conduction sheet is given higher flexibility and heat transfer from the heating element to the heat conduction sheet when in contact with the heating element is improved. Because you can.
- the aspect ratio (major axis / minor axis) of the particulate carbon material contained in the heat conductive sheet of the present invention is preferably 1 or more and 10 or less, and more preferably 1 or more and 5 or less.
- the “volume reference mode diameter” can be determined according to the method described in the examples of the present specification using a laser diffraction / scattering particle size distribution measuring apparatus.
- the “aspect ratio of the particulate carbon material” is determined by observing the particulate carbon material obtained by dissolving and removing the resin in the heat conductive sheet in a solvent with an SEM (scanning electron microscope). Measure the maximum diameter (major axis) and the particle diameter (minor axis) in the direction perpendicular to the maximum diameter and measure the average value of the ratio of major axis to minor axis (major axis / minor axis). Can be obtained by calculating.
- the content rate of the particulate carbon material in the heat conductive sheet of the present invention is preferably 35% by volume or more, more preferably 45% by volume or more, and further preferably 50% by volume or more. Usually, it is 70 volume% or less. If the content rate of the particulate carbon material in a heat conductive sheet is more than the said minimum, it will become easy to contact particulate carbon materials in a heat conductive sheet, and it will become easy to form a favorable heat-transfer path
- the content ratio of the particulate carbon material in the heat conductive sheet is within the above range, the composite particles are likely to be subjected to a force due to pressurization such as roll rolling. This is because the carbon material can be oriented better in the desired direction.
- the “content ratio (volume%)” can be obtained as a theoretical value according to the method described in the examples of the present specification.
- the heat conductive sheet of the present invention may optionally further contain a fibrous carbon material.
- the fibrous carbon material arbitrarily contained is not particularly limited, and for example, carbon nanotubes, vapor-grown carbon fibers, carbon fibers obtained by carbonizing organic fibers, and cut products thereof are used. Can do. These may be used individually by 1 type and may use 2 or more types together. And if fibrous carbon material is contained in the heat conductive sheet of this invention, while being able to further improve the heat conductivity of a heat conductive sheet, the powder-off of particulate carbon material can also be prevented.
- the fibrous carbon material it is preferable to use a fibrous carbon nanostructure such as a carbon nanotube, and it is more preferable to use a fibrous carbon nanostructure including a carbon nanotube. This is because if a fibrous carbon nanostructure such as a carbon nanotube is used, the thermal conductivity and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be further improved.
- the fibrous carbon nanostructure containing carbon nanotubes that can be suitably used as the fibrous carbon material may be composed only of carbon nanotubes (hereinafter sometimes referred to as “CNT”).
- CNT carbon nanotubes
- a mixture of CNT and a fibrous carbon nanostructure other than CNT may be used.
- the CNT in the fibrous carbon nanostructure is not particularly limited, and single-walled carbon nanotubes and / or multi-walled carbon nanotubes can be used. Nanotubes are preferable, and single-walled carbon nanotubes are more preferable. This is because the use of single-walled carbon nanotubes can further improve the thermal conductivity and strength of the heat-conducting sheet obtained using the heat-conducting sheet as compared with the case of using multi-walled carbon nanotubes.
- the fibrous carbon nanostructure containing CNT has a ratio (3 ⁇ / Av) of a value (3 ⁇ ) obtained by multiplying the standard deviation ( ⁇ ) of the diameter by 3 with respect to the average diameter (Av) is more than 0.20. It is preferable to use a carbon nanostructure of less than 0.60, more preferably a carbon nanostructure with 3 ⁇ / Av exceeding 0.25, and a carbon nanostructure with 3 ⁇ / Av exceeding 0.50. More preferably. If a fibrous carbon nanostructure containing CNTs with 3 ⁇ / Av of more than 0.20 and less than 0.60 is used, the heat conduction of the obtained heat conducting sheet can be obtained even if the amount of carbon nanostructure is small. This is because the properties and strength can be sufficiently increased.
- the thermal conductivity and flexibility of the thermal conductive sheet are suppressed by suppressing the hardness of the thermal conductive sheet from being excessively high (that is, the flexibility is lowered) by blending the fibrous carbon nanostructure containing CNT. This is because the two can be juxtaposed at a sufficiently high level.
- the “average diameter (Av) of the fibrous carbon nanostructure” and the “standard deviation of the diameter of the fibrous carbon nanostructure ( ⁇ : sample standard deviation)” are respectively measured using a transmission electron microscope. It can be determined by measuring the diameter (outer diameter) of 100 randomly selected fibrous carbon nanostructures.
- the average diameter (Av) and standard deviation ((sigma)) of the fibrous carbon nanostructure containing CNT are adjusted by changing the manufacturing method and manufacturing conditions of the fibrous carbon nanostructure containing CNT. Alternatively, it may be adjusted by combining a plurality of types of fibrous carbon nanostructures containing CNTs obtained by different production methods.
- the diameter measured as described above is plotted on the horizontal axis
- the frequency is plotted on the vertical axis
- a normal distribution is obtained when approximated by Gaussian. Things are usually used.
- the fibrous carbon nanostructure containing CNT has a peak of Radial Breathing Mode (RBM) when evaluated using Raman spectroscopy. Note that there is no RBM in the Raman spectrum of a fibrous carbon nanostructure composed of only three or more multi-walled carbon nanotubes.
- RBM Radial Breathing Mode
- the average diameter (Av) of the fibrous carbon nanostructure containing CNTs is preferably 0.5 nm or more, more preferably 1 nm or more, preferably 15 nm or less, and preferably 10 nm or less. More preferably it is. If the average diameter (Av) of the fibrous carbon nanostructure is 0.5 nm or more, the aggregation of the fibrous carbon nanostructure can be suppressed and the dispersibility of the carbon nanostructure can be increased. . Moreover, if the average diameter (Av) of the fibrous carbon nanostructure is 15 nm or less, the thermal conductivity and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be sufficiently increased.
- the BET specific surface area of the fibrous carbon nanostructure containing CNTs is preferably 600 m 2 / g or more, more preferably 800 m 2 / g or more, and 2500 m 2 / g or less. Preferably, it is 1200 m 2 / g or less. Furthermore, when the CNT in the fibrous carbon nanostructure is mainly opened, the BET specific surface area is preferably 1300 m 2 / g or more. If the BET specific surface area of the fibrous carbon nanostructure containing CNTs is 600 m 2 / g or more, the thermal conductivity and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be sufficiently increased. is there.
- the BET specific surface area of the fibrous carbon nanostructure containing CNT is 2500 m 2 / g or less, the aggregation of the fibrous carbon nanostructure is suppressed and the dispersibility of the CNT in the heat conductive sheet is increased. Because it can.
- the “BET specific surface area” refers to a nitrogen adsorption specific surface area measured using the BET method.
- the fibrous carbon nanostructure containing CNTs having the above-described properties can be obtained, for example, by supplying a raw material compound and a carrier gas onto a base material having a catalyst layer for producing carbon nanotubes on the surface thereof.
- CVD method phase growth method
- oxidizing agent catalyst activation material
- the fibrous carbon nanostructure containing CNT produced by the super-growth method may be composed only of SGCNT, and in addition to SGCNT, other carbon nanostructures such as non-cylindrical carbon nanostructures may be used. Carbon nanostructures may be included.
- the average fiber diameter of the fibrous carbon material which can be contained in a heat conductive sheet is preferably 1 nm or more, more preferably 3 nm or more, preferably 2 ⁇ m or less, and preferably 1 ⁇ m or less. More preferred. If the average fiber diameter of the fibrous carbon material is within the above range, the thermal conductivity, flexibility and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be juxtaposed at a sufficiently high level. .
- the aspect ratio of the fibrous carbon material preferably exceeds 10.
- the “average fiber diameter” refers to a fibrous carbon material obtained by dissolving and removing the resin in the heat conductive sheet in a solvent by SEM (scanning electron microscope) or TEM (transmission electron microscope). It can be obtained by observing, measuring the fiber diameter of any 50 fibrous carbon materials, and calculating the number average value of the measured fiber diameters. In particular, when the fiber diameter is small, it is preferable to observe the same cross section with a TEM (transmission electron microscope). Further, in the present invention, the “aspect ratio of the fibrous carbon material” refers to the observation of the fibrous carbon material obtained by dissolving and removing the resin in the heat conductive sheet with a TEM (transmission electron microscope), and an arbitrary 50 pieces.
- For the fibrous carbon material measure the maximum diameter (major axis) and the particle diameter (minor axis) in the direction orthogonal to the maximum diameter, and calculate the average value of the ratio of the major axis to the minor axis (major axis / minor axis). It can ask for.
- the base material resin constituting the heat conductive sheet of the present invention needs to be a resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less.
- a matrix resin is not particularly limited as long as it has a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and is a known type of resin or a plurality of types of resins that can be used for the production of heat conductive sheets. Resin composites can be used.
- the base material resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less can be an unvulcanized resin without particular limitation.
- unvulcanized means such a resin or resin composition regardless of whether or not a vulcanizing agent (crosslinking agent) is contained in the resin composition as a resin or resin material. It means a state where no cross-linking reaction is caused by heating or the like.
- the base material resin is preferably a resin having thermoplasticity.
- thermoplastic means a property of being softened by heating, becoming moldable, and solidifying by cooling.
- the resin when the resin is “thermoplastic”, the polymer structure of the solidified resin usually does not contain a crosslinked structure.
- resins may be broadly classified into “thermoplastic resins” and “thermosetting resins”. However, even a resin that can be generally classified as a “thermosetting resin” may not form a crosslinked structure in the polymer structure if it is solidified in the absence of a crosslinking agent.
- thermoplasticity As defined above, the resins having “thermoplasticity” as defined above are collectively referred to as “thermoplasticity”. It is referred to as “resin having”. And if "resin which has thermoplasticity” is mix
- the “resin having thermoplasticity” used as the base resin is solid at normal temperature and pressure. If the resin used as the base resin is solid at room temperature and normal pressure, the flexibility of the thermal conductive sheet is further improved in a high-temperature environment during use (during heat dissipation), and the thermal conductive sheet and the heating element are more The handling property of the heat conductive sheet can be improved in a normal temperature environment such as attachment while being in good contact.
- “normal temperature” refers to 23 ° C.
- “normal pressure” refers to 1 atm (absolute pressure).
- the base resin may be composed of one type of resin or a composite obtained by mixing two or more types of resins. When using a composite as a base material resin, each resin constituting the composite may be a solid resin or a liquid resin under normal temperature and normal pressure, but when a composite is formed, It is necessary for such a composite to become a solid at normal temperature and pressure.
- thermoplastic resin- Resin having thermoplasticity that is solid under normal temperature and normal pressure
- a thermoplastic resin that can be used as a base material resin and is solid under normal temperature and normal pressure includes poly (2-ethylhexyl acrylate), Copolymer of acrylic acid and 2-ethylhexyl acrylate, polymethacrylic acid or its ester, acrylic resin such as polyacrylic acid or its ester; silicone resin; fluororesin; polyethylene; polypropylene; ethylene-propylene copolymer; Polyvinyl chloride; Polyvinylidene chloride; Polyvinyl acetate; Ethylene-vinyl acetate copolymer; Polyvinyl alcohol; Polyacetal; Polyethylene terephthalate; Polybutylene terephthalate; Polyethylene naphthalate; Polystyrene; Polyacrylonitrile; Acryl-acrylonitrile copolymer; acrylonitrile-butadiene copolymer (nitrile)
- the “resin having thermoplasticity” used as a base material resin, which is solid at normal temperature and pressure is a fluororesin.
- the base resin is a fluororesin, the heat resistance, oil resistance, and chemical resistance of the heat conductive sheet can be improved.
- Specific examples include elastomers obtained by polymerizing fluorine-containing monomers, such as vinylidene fluoride fluororesins, tetrafluoroethylene-propylene fluororesins, tetrafluoroethylene-purple olovinyl ether fluororesins, and the like.
- polytetrafluoroethylene tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, tetrafluoroethylene-hexafluoropropylene copolymer, tetrafluoroethylene-ethylene copolymer, polyvinylidene fluoride, polychloro Trifluoroethylene, ethylene-chlorofluoroethylene copolymer, tetrafluoroethylene-perfluorodioxole copolymer, polyvinyl fluoride, tetrafluoroethylene-propylene copolymer, vinylidene fluoride-hexafluoropropylene copolymer, Vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer, acrylic modification of polytetrafluoroethylene, ester modification of polytetrafluoroethylene Epoxy-modified product of polytetrafluoroethylene and polytetrafluor
- polytetrafluoroethylene polytetrafluoroethylene modified acrylic, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, vinylidene fluoride-hexafluoropropylene copolymer, vinylidene fluoride -A hexafluoropropylene-tetrafluoroethylene copolymer is preferred.
- fluororesins having a thermoplastic property at room temperature and normal pressure include, for example, Daiel (registered trademark) G-300 series / G-700 series / G-7000 series (manufactured by Daikin Industries, Ltd.) Vinylidene fluoride-hexafluoropropylene binary copolymer), Daiel G-550 series / G-600 series (vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene terpolymer), Daiel G-800 series (Vinylidene fluoride-hexafluoropropylene binary copolymer), Daiel G-900 series (vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene terpolymer); KYNAR (registered trademark) manufactured by ALKEMA Series (bifluoride (Ridene-based fluororesin), KYNAR FLEX® series (
- Resin having liquid thermoplasticity under normal temperature and normal pressure As described above, the composite becomes solid under normal temperature and normal pressure, and is not solid under normal temperature and normal pressure as long as the effect of the present invention is not significantly impaired.
- a resin having thermoplasticity that is liquid at room temperature and normal pressure may be used in combination with a resin having thermoplasticity.
- the resin having liquid thermoplasticity under normal temperature and normal pressure include acrylic resins, epoxy resins, silicone resins, and fluororesins other than the resin corresponding to the resin of (1) above. These may be used individually by 1 type and may use 2 or more types together.
- the viscosity of the resin having liquid thermoplasticity under normal temperature and normal pressure is not particularly limited, but the viscosity at 105 ° C. from the viewpoint of good kneadability, fluidity, crosslinking reactivity, and excellent moldability, 500 mPa ⁇ s to 30,000 mPa ⁇ s is preferable, and 550 mPa ⁇ s to 25,000 mPa ⁇ s is more preferable.
- the heat conductive sheet may contain other resins than the above-described resins.
- Other resins that can be generally classified as thermosetting resins such as natural rubber; butadiene rubber; isoprene rubber; hydrogenated nitrile rubber; chloroprene rubber; ethylene propylene rubber; chlorinated polyethylene; Polyethylene, butyl rubber, halogenated butyl rubber, polyisobutylene rubber, epoxy resin, polyimide resin, bismaleimide resin, benzocyclobutene resin, phenol resin, unsaturated polyester, diallyl phthalate resin, polyimide silicone resin, polyurethane, thermosetting polyphenylene ether; And thermosetting modified polyphenylene ether. These may be used individually by 1 type and may use 2 or more types together.
- the base resin must have a Mooney viscosity (ML 1 + 4 , 100 ° C.) of 90 (ML 1 + 4 , 100 ° C.) or less, and 65 (ML 1 + 4 , 100 ° C.) or less. More preferably, it is 36 (ML 1 + 4 , 100 ° C.) or less. Usually, it is 3 (ML 1 + 4 , 100 ° C.) or more. If the Mooney viscosity of the base resin contained in the heat conductive sheet is not more than the above upper limit, the heat conductivity of the heat conductive sheet can be increased.
- the Mooney viscosity of the base resin contained in the heat conductive sheet is prepared by dissolving the heat conductive sheet in a solvent capable of dissolving the base resin and then isolating the base resin to prepare a Mooney viscosity measurement sample.
- the obtained sample can be obtained by measuring (ML 1 + 4 , 100 ° C.) according to JIS-K6300.
- the Mooney viscosity value obtained in this way is, in principle, substantially the same as the Mooney viscosity value of the base resin at the material stage.
- the content rate of all the resin components in the heat conductive sheet of this invention is preferable that it is 65 volume% or less with the whole volume of a heat conductive sheet being 100 volume%, and it is more preferable that it is 55 volume% or less. , 50% by volume or less is more preferable, and usually 30% by volume or more. If the content rate of all the resin components in a heat conductive sheet is below the said upper limit, high heat conductivity can be exhibited with a heat conductive sheet. Moreover, if the content ratio of all resin components in the heat conductive sheet is equal to or higher than the above lower limit value, the heat conductive sheet is given high flexibility, and heat transfer from the heat generator to the heat conductive sheet when in contact with the heat generator is achieved. Can be better.
- the heat conductive sheet of the present invention can be blended with known additives that can be used for producing the heat conductive sheet.
- Additives that can be blended in the heat conductive sheet are not particularly limited, for example, plasticizers such as fatty acid esters; flame retardants such as red phosphorus flame retardants and phosphate ester flame retardants; fluorine oil ( Additives that serve as both plasticizers and flame retardants, such as Daikin Industries Ltd.'s demnam series; toughness improvers such as urethane acrylate; moisture absorbents such as calcium oxide and magnesium oxide; silane coupling agents, titanium couplings Agents, adhesive improvers such as acid anhydrides; wettability improvers such as nonionic surfactants and fluorosurfactants; ion trapping agents such as inorganic ion exchangers, and the like.
- the heat conductive sheet of the present invention preferably has an Asker C hardness of 45 or more, more preferably 55 or more, and preferably over 60. This is because if the Asker C hardness is equal to or higher than the lower limit, the handling properties of the heat conductive sheet can be improved.
- the value of Asker C hardness of a heat conductive sheet can be adjusted by selecting the content rate of the particulate carbon material mix
- the heat conductive sheet tends to be hard.
- the hardness of the heat conductive sheet is the interfacial resistance between the heat conductive sheet and another member (heat generating body or heat radiating body) to which the heat conductive sheet is attached (hereinafter referred to as “interfacial resistance between members”).
- Asker C hardness has been used as an indicator of hardness.
- various ways to improve the thermal conductivity of the thermal conductive sheet have been studied by balancing so that the Asker C hardness is not excessively increased. I came.
- the present inventors examined again, it became clear that there is no correlation between the Asker C hardness of the heat conductive sheet and the interfacial resistance between members.
- the present inventors have newly found that the interfacial resistance between members can be advantageously suppressed by blending a base material resin having a Mooney viscosity of a predetermined value or less.
- the heat conductive sheet containing the base material resin having a Mooney viscosity of a predetermined value or less has a moderate value of Asker C hardness, and has a higher heat than previously assumed in relation to Asker C hardness. It became clear that it had conductivity.
- the thermal conductivity of the heat conductive sheet is preferably 19 W / m ⁇ K or more, more preferably 25 W / m ⁇ K or more, and further preferably 35 W / m ⁇ K or more. preferable. This is because if the thermal conductivity of the heat conductive sheet is equal to or higher than the lower limit, for example, when the heat conductive sheet and the heating element are used in close contact, heat can be efficiently dissipated from the heating element.
- the heat conductive sheet of the present invention preferably has a Mooney viscosity (ML 1 + 4 , 100 ° C.) of 50 (ML 1 + 4 , 100 ° C.) or less, and 30 (ML 1 + 4 , 100 ° C.) or less. More preferably, it is usually 2 (ML 1 + 4 , 100 ° C.) or more. If the Mooney viscosity of the heat conductive sheet is less than or equal to the above upper limit, when the heat conductive sheet is used under high temperature conditions, the heat conductive sheet and a member to which the heat conductive sheet such as a heating element or a heat radiator is attached It is considered that the heat radiation efficiency can be improved by improving the adhesion of the material.
- the heat conductive sheet of the present invention is formed by laminating a plurality of pre-heat conductive sheets containing the above-mentioned particulate carbon material, resin component, and optional additives in a direction transverse to the thickness direction. It has a structure. Furthermore, in the pre-heat conductive sheet, the particulate carbon material is preferably oriented along the surface direction of the pre-heat conductive sheet (in a direction transverse to the thickness direction of the pre-heat conductive sheet). This is because if the particulate carbon material is oriented along the surface direction of the pre-heat conductive sheet, the thermal conductivity in the thickness direction of the heat conductive sheet can be increased.
- the evidence that “the heat conductive sheet was obtained by laminating and slicing a plurality of pre-heat conductive sheets in the plane direction” is, for example, a method of microscopically observing a cross section in the thickness direction of the heat conductive sheet, A comprehensive determination can be made by using a method for determining whether or not there is anisotropy in thermal conductivity.
- the thickness of a heat conductive sheet is not specifically limited, For example, it may be 0.05 mm or more and 10 mm or less. In general, if the thickness of the heat conductive sheet is too thick, the heat resistance of the heat conductive sheet increases and the thermal conductivity decreases, and if the thickness of the heat conductive sheet is too small, the thermal conductivity of the heat conductive sheet is sufficient. This is because it cannot be used.
- a plurality of heat conductive sheets having a certain thickness stacked in the thickness direction and integrated by standing for a predetermined time can be used as the heat conductive sheet.
- the thermal conductivity of a thick (thickness x) thermal conductive sheet obtained by laminating a plurality of thin thermal conductive sheets in the thickness direction is substantially the same as that of a single thermal conductive sheet having the same thickness (thickness x). It is thought to have an equivalent thermal conductivity.
- the manufacturing method for manufacturing the heat conductive sheet of the present invention is not particularly limited, and a manufacturing method that can be used at the time of manufacturing a heat conductive sheet in which a plurality of pre-heat conductive sheets are laminated in the plane direction is adopted. be able to.
- a production method for example, a step of preparing a composite mixture containing a particulate carbon material and a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less;
- the manufacturing method including the process of obtaining a sheet
- a composite mixture containing the particulate carbon material and the resin is prepared.
- the particulate carbon material, the base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and any fibrous carbon material are not particularly limited.
- / or a composite mixture may be prepared by combining with additives in a known manner.
- the composite mixture may be prepared by purchasing a commercially available composite mixture containing a particulate carbon material and a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less. .
- the following methods (I) to (III) can be used.
- a composite mixture is obtained by mixing and kneading a particulate carbon material, a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and any fibrous carbon material and / or additive. .
- the particulate carbon material used in the step of preparing the composite mixture, the base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or lower, the optional fibrous carbon material and / or the additive include the above-mentioned heat
- the content ratio can be the same.
- the mixing and kneading method is not particularly limited, and can be performed using a known mixing apparatus such as a kneader, roll, Henschel mixer, Hobart mixer or the like. And mixing and kneading
- mixing time can be made into 5 hours or more and 6 hours or less, for example. Moreover, mixing and kneading
- mixing temperature can be made into 5 to 150 degreeC, for example.
- mixing and kneading may be performed in the presence of a solvent such as ethyl acetate.
- the solvent is removed prior to crushing / pulverizing the composite mixture described later. It is preferable.
- the removal of the solvent may be performed by a known drying method, or may be performed while arbitrarily defoaming the composite mixture. For example, if defoaming is performed using vacuum defoaming, the solvent can be removed simultaneously with defoaming.
- the resulting composite mixture includes a particulate carbon material and a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and optionally further includes a fibrous carbon material and an additive.
- the composite mixture is usually a lump having a diameter of about 1 mm to 200 mm.
- a pulverization step of pulverizing the composite mixing cylinder into particles may be performed.
- the obtained composite mixture is pulverized by an arbitrary method to obtain composite particles.
- the obtained composite mixture may be pulverized and then classified by any method to obtain composite particles.
- the pulverization of the composite mixture can be performed by a known method without particular limitation as long as the obtained composite particles are a powder fluid rather than a lump of the composite mixture. Prior to pulverization, pulverization or the like for loosening the lump may be performed.
- the complex mixture can be pulverized / pulverized using, for example, a known pulverization / pulverization machine utilizing a shearing action or an attrition action or an agitated known pulverization / pulverization machine.
- Examples of the known crushing / pulverizing machine include a hammer crusher, a cutter mill, a hammer mill, a bead mill, a vibration mill, a meteor ball mill, a sand mill, a ball mill, a roll mill, a three-roll mill, a jet mill, and a high-speed rotary pulverizer. , A fine pulverizer, a pulverizing and sizing machine, and a nano jet mizer.
- the conditions such as the type of the crushing / pulverizing machine, energy during crushing / crushing, and time are appropriately selected according to the state of the aggregate of the composite mixture, the desired powder fluid state such as the particle size of the composite particles, Adjust it.
- the composite mixture is not particularly limited and is preferably pulverized to a particle size of less than 1000 ⁇ m by sieve classification.
- Step of obtaining a pre-heat conductive sheet In the step of obtaining the pre-heat conductive sheet, the composite mixture or composite particles obtained in the previous step are pressed by an arbitrary method and formed into a sheet shape.
- the method for pressurizing the pre-heat conductive sheet is not particularly limited as long as it is a molding method in which pressure is applied.
- the pre-heat conductive sheet can be formed into a sheet shape by using a known forming method such as press forming, rolling forming or extrusion forming. Especially, it is preferable to shape
- a protective film it does not specifically limit, The polyethylene terephthalate (PET) film etc. which performed the sandblast process can be used.
- the roll temperature can be 5 ° C. or more and 150 ° C.
- the thickness of a pre heat conductive sheet is not specifically limited, For example, it can be 0.05 mm or more and 2 mm or less. Further, from the viewpoint of improving the thermal conductivity of the heat conductive sheet by increasing the heat conductivity of the pre heat conductive sheet, the thickness of the pre heat conductive sheet is not more than 5000 times the average particle diameter of the particulate carbon material. Is preferred.
- Step of obtaining a laminate In the step of obtaining a laminate, a plurality of the pre-heat conductive sheets obtained in the previous step are laminated in the thickness direction of the pre-heat conductive sheet, or the pre-heat conductive sheet obtained in the previous step is folded or wound. Thereby, a laminated body is formed.
- stacking of a pre heat conductive sheet is not specifically limited, You may carry out using a lamination apparatus, and may carry out manually.
- formation of the laminated body by folding of a pre heat conductive sheet is not specifically limited, It can carry out by folding a heat conductive primary sheet by fixed width using a folder.
- the formation of the laminate by winding the pre-heat conductive sheet is not particularly limited, and by rolling the pre-heat conductive sheet around an axis parallel to the short direction or the long direction of the pre-heat conductive sheet. It can be carried out.
- the adhesive force between the surfaces of the pre-heat conductive sheets is sufficiently obtained by the pressure when the pre-heat conductive sheets are laminated and the pressure when folding or winding.
- the laminate may be formed in a state where the surface of the pre-heat conductive sheet is slightly dissolved with a solvent. Then, the laminate may be formed in a state where an adhesive is applied to the surface of the pre-heat conductive sheet or in a state where an adhesive layer is provided on the surface of the pre-heat conductive sheet.
- dissolving the surface of a pre heat conductive sheet it is not specifically limited, The known solvent which can melt
- coated to the surface of a pre heat conductive sheet A commercially available adhesive agent and adhesive resin can be used.
- the adhesive it is preferable to use a resin having the same composition as the resin component contained in the pre-heat conductive sheet.
- coated to the surface of a pre heat conductive sheet can be 10 micrometers or more and 1000 micrometers or less, for example.
- the adhesive layer provided on the surface of the pre-heat conductive sheet is not particularly limited, and a double-sided tape or the like can be used.
- the obtained laminate is pressed at a pressure of 0.05 MPa or more and 1.0 MPa or less in the stacking direction at 20 ° C. or more and 150 ° C. or less for 1 minute or more and 30 minutes or less It is preferable to press.
- the particulate carbon material and any fibrous carbon material are oriented in a direction substantially orthogonal to the laminating direction.
- the laminated body obtained in the above-described step is sliced at an angle of 45 ° or less with respect to the laminating direction to obtain a heat conductive sheet composed of sliced pieces of the laminated body.
- the method for slicing the laminate is not particularly limited, and examples thereof include a multi-blade method, a laser processing method, a water jet method, and a knife processing method. Especially, the knife processing method is preferable at the point which makes the thickness of a heat conductive sheet uniform.
- the cutting tool for slicing the laminate is not particularly limited, and includes a slice member (for example, a sharp blade) having a smooth board surface having a slit and a blade portion protruding from the slit portion. Canna and slicer) can be used.
- the angle at which the laminate is sliced is preferably 30 ° or less with respect to the stacking direction, and more preferably 15 ° or less with respect to the stacking direction. Preferably, it is approximately 0 ° with respect to the stacking direction (that is, the direction along the stacking direction).
- the temperature of the laminate during slicing is preferably ⁇ 20 ° C. or more and 40 ° C. or less, and more preferably 10 ° C. or more and 30 ° C. or less.
- the laminated body to be sliced is preferably sliced while applying a pressure in a direction perpendicular to the lamination direction, and a pressure of 0.1 MPa to 0.5 MPa in the direction perpendicular to the lamination direction. It is more preferable to slice while loading.
- the heat conductive sheet obtained according to the manufacturing method as described above is formed through a step of obtaining a laminate and a slicing step, the particulate carbon material and any fibrous carbon material are in the thickness direction of the heat conductive sheet. It is presumed that they are oriented. Therefore, for example, the heat generated from the heat generating element can be efficiently dissipated in the thickness direction of the heat conductive sheet by satisfactorily adhering the heat generating element and the heat conductive sheet.
- the heat conductive sheet obtained according to the manufacturing method of this invention is excellent in heat conductivity, and is generally excellent also in intensity
- various devices and devices are not particularly limited, and are electronic devices such as servers, server personal computers, desktop personal computers, etc .; portable electronic devices such as notebook personal computers, electronic dictionaries, PDAs, mobile phones, and portable music players.
- Liquid crystal display including backlight), plasma display, LED, organic EL, inorganic EL, liquid crystal projector, display device such as clock; ink jet printer (ink head), electrophotographic device (developing device, fixing device, heat roller, Image forming apparatuses such as heat belts; semiconductor-related components such as semiconductor elements, semiconductor packages, semiconductor encapsulating cases, semiconductor die bonding, CPUs, memories, power transistors, power transistor cases; rigid wiring boards, flexible wiring boards, ceramic wirings Board, bi Wiring boards such as doup-up wiring boards and multilayer boards (wiring boards include printed wiring boards); manufacturing equipment such as vacuum processing equipment, semiconductor manufacturing equipment, display equipment manufacturing equipment; heat insulating materials, vacuum heat insulating materials, radiation heat insulating materials Thermal insulation equipment for materials, etc .; DVD (optical pickup,
- Mooney viscosity The Mooney viscosity of the base material resin used for the production of the heat conductive sheet is cut out from the base material resin and cut according to JIS-K6300 using a Mooney viscometer (manufactured by Shimadzu Corporation, “MOONEY VISCOMETER SMV-202”) (ML 1 +4 , 100 ° C.). A similar section was cut out from the obtained heat conductive sheet and measured in the same manner.
- ⁇ Content ratio of particulate carbon material> The theoretical value in the volume fraction was used for the content ratio of the particulate carbon material in the heat conductive sheet. Specifically, for each component of the particulate carbon material, the resin, and any fibrous carbon material and additive contained in the heat conductive sheet, the volume (from the density (g / cm 3 ) and the blending amount (g) ( cm 3 ) was calculated, and the content ratio of the particulate carbon material in the heat conductive sheet was determined as a volume fraction (volume%).
- ⁇ Volume-based mode diameter of particulate carbon material in heat conductive sheet 1 g of the heat conductive sheet was placed in a methyl ethyl ketone solvent, and the resin component was dissolved to obtain a suspension in which the particulate carbon material was separated and dispersed. Next, using the obtained suspension as a sample, the particle size of the particulate carbon material contained in the suspension is measured using a laser diffraction / scattering particle size distribution measuring apparatus (Horiba, Model “LA960”). Was measured. Then, the particle diameter at the maximum value of the particle diameter distribution curve with the obtained particle diameter as the horizontal axis and the volume of the particulate carbon material as the vertical axis was determined as the volume standard mode diameter ( ⁇ m).
- ⁇ Asker C hardness of heat conductive sheet> In accordance with the Asker C method of the Japan Rubber Association Standard (SRIS), the hardness was measured at a temperature of 23 ° C. using a hardness meter (trade name “ASKER CL-150LJ” manufactured by Kobunshi Keiki Co., Ltd.). Specifically, six heat conductive sheet test pieces prepared to have a size of width 30 mm ⁇ length 60 mm ⁇ thickness 1.0 mm were stacked and left in a temperature-controlled room maintained at 23 ° C. for 48 hours or more. Asker C hardness was measured using a sample. Then, the height of the damper was adjusted so that the pointer was 95 to 98, and the hardness 20 seconds after the sample and the damper collided was measured five times, and the average value was taken as the Asker C hardness of the sample. .
- SRIS Japan Rubber Association Standard
- thermal conductivity of thermal conductive sheet In calculating the thermal conductivity of the thermal conductive sheet, first, the thermal resistance value was measured using a resin material thermal resistance tester (trade name “C47108” manufactured by Hitachi Technology & Service Co., Ltd.). In the measurement, the heat conductive sheet was cut into a 1 cm square and used as a measurement sample. Then, the thermal resistance value R of the measurement sample under the conditions of a test temperature of 50 ° C. and a pressure of 0.50 MPa was measured. It shows that it is excellent in thermal conductivity, and is excellent in the thermal radiation characteristic when it interposes between a heat generating body and a heat radiator as a heat resistance value R, and is set as a heat radiating device.
- a resin material thermal resistance tester trade name “C47108” manufactured by Hitachi Technology & Service Co., Ltd.
- thermal conductivity [W / m ⁇ K] thickness d [m] of thermal conductive sheet / thermal resistance value R [m 2 ⁇ K / W] (I)
- Example 1 Preparation of fibrous carbon nanostructure containing CNT> According to the description of WO 2006/011655, fibrous carbon nanostructures containing SGCNTs were obtained by the super-growth method.
- the obtained fibrous carbon nanostructure had a BET specific surface area of 800 m 2 / g.
- the average diameter (Av) was 3.3 nm
- the sample standard deviation ( ⁇ ) of the diameter was The value (3 ⁇ ) multiplied by 3 was 1.9 nm, and the ratio (3 ⁇ / Av) was 0.58.
- the obtained fibrous carbon nanostructure was mainly composed of single-walled CNT (also referred to as “SGCNT”).
- Step of obtaining composite particles Next, the composite mixture obtained above is put into a pulverizer (manufactured by Sansho Industry Co., Ltd., product name “hammer crusher HN34S”) and pulverized for 60 seconds, whereby particulate carbon material, base resin, fibrous form Composite particles containing a carbon material and a flame retardant were obtained.
- a pulverizer manufactured by Sansho Industry Co., Ltd., product name “hammer crusher HN34S”
- pulverized for 60 seconds whereby particulate carbon material, base resin, fibrous form Composite particles containing a carbon material and a flame retardant were obtained.
- Step of obtaining pre-heat conductive sheet Subsequently, 5 g of the composite particles obtained above were sandwiched between sandblasted PET films (protective film) having a thickness of 50 ⁇ m, a roll gap of 550 ⁇ m, a roll temperature of 50 ° C., a roll linear pressure of 50 kg / cm, and a roll speed of 1 m / A pre-heat conductive sheet having a thickness of 0.5 mm was obtained by rolling under the condition of minutes.
- the pre-heat conductive sheet obtained above is cut into a length of 6 cm, a width of 6 cm, and a thickness of 0.5 mm, and 120 sheets are laminated in the thickness direction via a double-sided tape as an adhesive layer, and a laminate having a thickness of about 6 cm.
- a two-blade blade having a blade angle of 22 ° with a front blade angle of 0.11 mm was used.
- About the obtained heat conductive sheet, Mooney viscosity, volume standard mode diameter of particulate carbon material, Asker C hardness, and heat conductivity were measured by the above-mentioned method. The results are shown in Table 1.
- Example 2 In the step of preparing the composite mixture, the matrix resin is made of a thermoplastic fluororesin that is solid at room temperature and normal pressure, which is different from that in Example 1 (trade name “A-100”, manufactured by Kemers, Mooney viscosity: 30.2 ML 1.
- a heat conductive sheet was produced in the same manner as in Example 1 except that the temperature was changed to +4 , 100 ° C.
- Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
- Example 3 In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 100 parts. Also, the resin was changed to a thermoplastic fluororesin that was solid at room temperature and normal pressure (product name “A-100”, product name “A-100”, Mooney viscosity: 30.2 ML 1 + 4 , 100 ° C.) different from Example 1. A heat conductive sheet was produced in the same manner as in Example 1 except that. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
- the base resin is made of a thermoplastic fluororesin that is solid at room temperature and normal pressure, which is different from that in Example 1 (Daikin Industries, trade name “DAI_EL (registered trademark) G-704BP”, (Mooney viscosity: 62.4 ML 1 + 4 , 100 ° C.)
- DAI_EL registered trademark
- G-704BP Mooney viscosity: 62.4 ML 1 + 4 , 100 ° C.
- Example 5 In the step of preparing the composite mixture, the base resin is made of a thermoplastic fluororesin that is solid at room temperature and atmospheric pressure, which is different from that in Example 1 (Daikin Industries, trade name “DAI_EL® G-912”), A heat conductive sheet was produced in the same manner as in Example 1 except that the Mooney viscosity was changed to 87.6 ML 1 + 4 , 100 ° C. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
- Example 6 In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 160 parts.
- the base resin was changed to a solid thermoplastic silicone resin (trade name “KE-931-U”, Mooney viscosity: 18.0 ML 1 + 4 , 100 ° C., manufactured by Shin-Etsu Chemical Co., Ltd.) at room temperature and normal pressure.
- a heat conductive sheet was produced in the same manner as in Example 1 except that. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
- Example 7 In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 220 parts.
- the base resin is made into a solid thermoplastic nitrile rubber (manufactured by Zeon Corporation, trade name “Nipol (registered trademark) DN3335”, Mooney viscosity: 35.0 ML 1 + 4 , 100 ° C.) under normal temperature and normal pressure.
- a heat conductive sheet was produced in the same manner as in Example 1 except for the change. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
- Example 8 In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 210 parts. Other than changing the base resin to a thermoplastic acrylic resin (manufactured by Nippon Zeon Co., Ltd., trade name “AR-12”, Mooney viscosity: 33.0 ML 1 + 4 , 100 ° C.) under normal temperature and normal pressure. Produced a heat conductive sheet in the same manner as in Example 1. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
- Example 9 In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 70 parts.
- the base resin is a thermoplastic fluororesin that is solid at room temperature and atmospheric pressure, which is different from that in Example 1 (manufactured by Chemers, trade name “A-100”, Mooney viscosity: 30.2 ML 1 + 4 , 100 ° C.).
- a heat conductive sheet was produced in the same manner as in Example 1 except that the above was changed.
- Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
- a heat conductive sheet obtained by laminating a plurality of pre-heat conductive sheets containing a particulate carbon material and a resin component having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less in a direction transverse to the thickness direction. Is excellent in the thermal conductivity in the thickness direction.
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Abstract
Description
本発明は、熱伝導シートに関する。 The present invention relates to a heat conductive sheet.
近年、プラズマディスプレイパネル(PDP)や集積回路(IC)チップ等の電子部品は、高性能化に伴って発熱量が増大している。その結果、電子部品を用いた電子機器では、電子部品の温度上昇による機能障害対策を講じる必要が生じている。 In recent years, electronic parts such as a plasma display panel (PDP) and an integrated circuit (IC) chip have increased in calorific value as performance is improved. As a result, in electronic devices using electronic components, it is necessary to take measures against functional failures due to temperature rise of the electronic components.
電子部品の温度上昇による機能障害対策としては、一般に、電子部品等の発熱体に対し、金属製のヒートシンク、放熱板、放熱フィン等の放熱体を取り付けることによって、放熱を促進させる方法が採られている。また、放熱体を使用する際には、発熱体から放熱体へと熱を効率的に伝えるために、良好な熱伝導性を発揮するシート状の部材(熱伝導シート)を介して発熱体と放熱体とを密着させている。そして、発熱体と放熱体との間に配設される熱伝導シートには、厚み方向の熱伝導率が高いことが求められている。 As countermeasures against functional failures due to temperature rise of electronic components, generally, a method of promoting heat dissipation by attaching a heat sink such as a metal heat sink, heat sink, heat sink or the like to a heat generator such as an electronic component is adopted. ing. In addition, when using a radiator, in order to efficiently transfer heat from the heating element to the radiator, the heating element and the heating element are connected via a sheet-like member (thermal conduction sheet) that exhibits good thermal conductivity. The radiator is in close contact. And the heat conductive sheet arrange | positioned between a heat generating body and a heat radiator is calculated | required that the heat conductivity of the thickness direction is high.
ここで、熱伝導シートとしては、通常、樹脂と、熱伝導性を発揮する成分などとが混合された、複合混合物を用いて成形したシートが用いられている。そこで、近年では、熱伝導シートの熱伝導率を向上すべく、熱伝導シートの構成成分について多くの検討がなされてきた。 Here, as the heat conductive sheet, a sheet molded using a composite mixture in which a resin and a component exhibiting heat conductivity are usually used. Therefore, in recent years, many studies have been made on the components of the heat conductive sheet in order to improve the heat conductivity of the heat conductive sheet.
具体的には、従来、特定のゴム成分及び一定方向に配向させた異方性黒鉛を含む放熱シート(すなわち、「熱伝導シート」)が提案されてきた(例えば、特許文献1参照)。特許文献1では、熱可塑性ゴム成分、熱硬化性ゴム成分と、該熱硬化性ゴム成分に架橋可能な熱硬化型ゴム硬化剤と、を含む樹脂成分に、異方性黒鉛を配合して得た組成物を用いて製造した放熱シートが開示されている。熱伝導シートの製造に当たり、まず、調製した組成物を2枚のフィルム間に挟んで圧延して異方性黒鉛を圧延シートの主面に対して略平行な方向に配向して一次シートを作成していた。そして、かかる一次シートを所定方向に捲き回して成形体を得て、当該成形体を所定方向にスライスして熱伝導シートを製造していた。 Specifically, conventionally, a heat radiating sheet containing a specific rubber component and anisotropic graphite oriented in a certain direction (that is, “thermal conductive sheet”) has been proposed (for example, see Patent Document 1). Patent Document 1 is obtained by blending anisotropic graphite with a resin component containing a thermoplastic rubber component, a thermosetting rubber component, and a thermosetting rubber curing agent that can be cross-linked to the thermosetting rubber component. A heat-dissipating sheet manufactured using the above composition is disclosed. In manufacturing a heat conductive sheet, first, the prepared composition is sandwiched between two films and rolled to produce a primary sheet by orienting anisotropic graphite in a direction substantially parallel to the main surface of the rolled sheet. Was. Then, the primary sheet is rolled in a predetermined direction to obtain a molded body, and the molded body is sliced in a predetermined direction to manufacture a heat conductive sheet.
しかし、特許文献1の熱伝導シートは、熱伝導性を向上するという点において改善の余地があった。
そこで、本発明は、厚み方向の熱伝導性に優れる熱伝導シートを提供することを目的とする。
However, the thermal conductive sheet of Patent Document 1 has room for improvement in terms of improving thermal conductivity.
Then, an object of this invention is to provide the heat conductive sheet which is excellent in the heat conductivity of the thickness direction.
本発明者らは、上記目的を達成するために鋭意検討を行った。そして、本発明者らは、熱伝導シートに含有される樹脂成分のムーニー粘度が、熱伝導シートの熱伝導性に大きく影響することを新たに見出し、本発明を完成させた。 The present inventors have intensively studied to achieve the above object. Then, the inventors newly found that the Mooney viscosity of the resin component contained in the heat conductive sheet greatly affects the heat conductivity of the heat conductive sheet, and completed the present invention.
即ち、この発明は、上記課題を有利に解決することを目的とするものであり、本発明の熱伝導シートは、粒子状炭素材料、及び一種の樹脂又は複数種の樹脂の複合物を含むプレ熱伝導シートが、前記熱伝導シートの厚み方向に対して横断方向に複数層積層されてなり、前記一種の樹脂又は複数種の樹脂の複合物よりなる全樹脂成分のムーニー粘度が90(ML1+4、100℃)以下である、ことを特徴とする。全樹脂成分のムーニー粘度が90(ML1+4、100℃)以下である、所定構造の熱伝導シートは、厚み方向の熱伝導性に優れる。
なお、本明細書において、「ムーニー粘度(ML1+4、100℃)」は、JIS K6300に準拠して温度100℃で測定することができる。
That is, the present invention aims to advantageously solve the above-described problems, and the heat conductive sheet of the present invention includes a particulate carbon material and a pre-compound containing one kind of resin or a composite of plural kinds of resins. A plurality of heat conductive sheets are laminated in a direction transverse to the thickness direction of the heat conductive sheet, and the Mooney viscosity of all resin components made of the one kind of resin or a composite of plural kinds of resins is 90 (ML 1 +4 , 100 ° C.) or less. A heat conductive sheet having a predetermined structure in which the Mooney viscosity of all resin components is 90 (ML 1 + 4 , 100 ° C.) or less is excellent in heat conductivity in the thickness direction.
In the present specification, the “Mooney viscosity (ML 1 + 4 , 100 ° C.)” can be measured at a temperature of 100 ° C. in accordance with JIS K6300.
ここで、本発明の熱伝導シートは、前記全樹脂成分のムーニー粘度をX、前記熱伝導シートの厚み方向の熱伝導率をYとした場合に、関係式:Y>(-0.2X+25)を満たすことが好ましい。上記特定の関係式を満たすような熱伝導シートは、製造時に用いる樹脂の選択が容易であるため、製造効率に優れる。
なお、本明細書において、熱伝導シートの「厚み方向の熱伝導率」は、実施例に記載の方法により測定することができる。
Here, in the heat conductive sheet of the present invention, when the Mooney viscosity of all the resin components is X and the heat conductivity in the thickness direction of the heat conductive sheet is Y, the relational expression: Y> (− 0.2X + 25) It is preferable to satisfy. A heat conductive sheet that satisfies the above specific relational expression is excellent in production efficiency because it is easy to select a resin to be used during production.
In the present specification, the “thermal conductivity in the thickness direction” of the heat conductive sheet can be measured by the method described in Examples.
また、本発明の熱伝導シートは、アスカーC硬度が45以上であることが好ましい。熱伝導シートのアスカーC硬度が45以上である熱伝導シートは、取扱性に優れる。
ここで、「アスカーC硬度」は、日本ゴム協会規格(SRIS)のアスカーC法に準拠し、硬度計を用いて温度23℃で測定することができる。
The heat conductive sheet of the present invention preferably has an Asker C hardness of 45 or more. A heat conductive sheet having an Asker C hardness of 45 or more is excellent in handleability.
Here, the “Asker C hardness” can be measured at a temperature of 23 ° C. using a hardness meter in accordance with the Asker C method of the Japan Rubber Association Standard (SRIS).
そして、本発明の熱伝導シートは、前記粒子状炭素材料の含有割合が35体積%以上であることが好ましい。粒子状炭素材料を35体積%以上含有する熱伝導シートは、熱伝導性に一層優れる。 And it is preferable that the content rate of the said particulate carbon material is 35 volume% or more in the heat conductive sheet of this invention. The heat conductive sheet containing 35% by volume or more of the particulate carbon material is further excellent in heat conductivity.
本発明によれば、厚み方向の熱伝導性に優れる熱伝導シートを提供することができる。 According to the present invention, it is possible to provide a heat conductive sheet having excellent heat conductivity in the thickness direction.
以下、本発明をその実施形態に基づき詳細に例示説明する。
本発明の熱伝導シートは、発熱体に対して直接接着させて使用することもできるし、発熱体に放熱体を取り付ける際に発熱体と放熱体との間に挟み込んで使用することもできる。このとき、熱伝導シートは、1枚を単独で使用してもよく、複数枚を併用してもよい。加えて、本発明の熱伝導シートは、発熱体と、ヒートシンク、放熱板、放熱フィン等の放熱体と共に放熱装置を構成することもできる。
Hereinafter, the present invention will be described in detail based on the embodiments.
The heat conductive sheet of the present invention can be used by directly adhering to the heating element, or can be used by being sandwiched between the heating element and the radiator when the radiator is attached to the heating element. At this time, a heat conductive sheet may be used individually by 1 sheet, and may use multiple sheets together. In addition, the heat conductive sheet of this invention can also comprise a heat radiating device with heat generating bodies and heat sinks, such as a heat sink, a heat sink, and a heat radiating fin.
(熱伝導シート)
本発明の熱伝導シートは、プレ熱伝導シートが熱伝導シートの厚み方向に対して横断方向に複数層積層されてなる。プレ熱伝導シートが熱伝導シートの厚み方向に対して横断方向に複数層積層されてなる熱伝導シートは、厚み方向の熱伝導率に優れる。さらに、本発明の熱伝導シートを構成するプレ熱伝導シートは、粒子状炭素材料と、全樹脂成分としての一種の樹脂又は複数種の樹脂の複合物とを含む。プレ熱伝導シートが粒子状炭素材料を含有しない場合には、熱伝導シートの熱伝導率が不十分となる。また、プレ熱伝導シートが樹脂成分を含有しない場合には、柔軟性が不十分となる。そして、本発明の熱伝導シートにおいて、全樹脂成分のムーニー粘度は、90(ML1+4、100℃)以下である。熱伝導シートの母材である全樹脂成分(以下、「母材樹脂」とも称する)がムーニー粘度90(ML1+4、100℃)以下の樹脂でなければ、熱伝導シートの熱伝導性を十分に高めることができない。
なお、本発明の熱伝導シートは、プレ熱伝導シートの積層構造を含んでなるため、プレ熱伝導シートの含有成分は、当然、全て熱伝導シートに含まれうる。また、複数のプレ熱伝導シート同士は直接、或いは、好ましくはプレ熱伝導シートの母材樹脂と同一組成の樹脂又は両面テープ等により形成されるごく薄い接着層を介して接着される。このため、「本発明の熱伝導シートを構成するプレ熱伝導シート」が含有する成分及びその比率は、全て「本発明の熱伝導シート」についても当てはまる。
(Heat conduction sheet)
The heat conductive sheet of the present invention is formed by laminating a plurality of pre-heat conductive sheets in a direction transverse to the thickness direction of the heat conductive sheet. A heat conductive sheet obtained by laminating a plurality of pre-heat conductive sheets in a direction transverse to the thickness direction of the heat conductive sheet is excellent in heat conductivity in the thickness direction. Furthermore, the pre heat conductive sheet which comprises the heat conductive sheet of this invention contains a particulate carbon material and 1 type of resin as a total resin component, or the composite of multiple types of resin. When the pre heat conductive sheet does not contain the particulate carbon material, the heat conductivity of the heat conductive sheet becomes insufficient. Moreover, when a pre heat conductive sheet does not contain a resin component, a softness | flexibility becomes inadequate. And in the heat conductive sheet of this invention, the Mooney viscosity of all the resin components is 90 (ML1 + 4 , 100 degreeC) or less. Total resin component is a base material of the heat conductive sheet (hereinafter, also referred to as "matrix resin") if not Mooney viscosity 90 (ML 1 + 4, 100 ℃) following resins, the thermal conductivity of the heat conducting sheet It cannot be raised sufficiently.
In addition, since the heat conductive sheet of this invention comprises the laminated structure of a pre heat conductive sheet, naturally the content component of a pre heat conductive sheet can be contained in a heat conductive sheet. Further, the plurality of pre-heat conductive sheets are bonded directly or through a very thin adhesive layer preferably formed of a resin having the same composition as the base resin of the pre-heat conductive sheet or a double-sided tape. For this reason, all the components and ratios thereof contained in the “pre-heat conductive sheet constituting the heat conductive sheet of the present invention” also apply to the “heat conductive sheet of the present invention”.
<組成>
[粒子状炭素材料]
ここで、粒子状炭素材料としては、特に限定されることなく、例えば、人造黒鉛、鱗片状黒鉛、薄片化黒鉛、天然黒鉛、酸処理黒鉛、膨張性黒鉛、膨張化黒鉛などの黒鉛;カーボンブラック;などを用いることができる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
中でも、粒子状炭素材料としては、膨張化黒鉛を用いることが好ましい。膨張化黒鉛を使用すれば、熱伝導シートの熱伝導性を向上させることができるからである。
<Composition>
[Particulate carbon material]
Here, the particulate carbon material is not particularly limited. For example, graphite such as artificial graphite, flaky graphite, exfoliated graphite, natural graphite, acid-treated graphite, expandable graphite, and expanded graphite; carbon black Can be used. These may be used individually by 1 type and may use 2 or more types together.
Among them, it is preferable to use expanded graphite as the particulate carbon material. This is because if the expanded graphite is used, the thermal conductivity of the thermal conductive sheet can be improved.
-膨張化黒鉛-
ここで、粒子状炭素材料として好適に使用し得る膨張化黒鉛は、例えば、鱗片状黒鉛などの黒鉛を硫酸などで化学処理して得た膨張性黒鉛を、熱処理して膨張させた後、微細化することにより得ることができる。そして、膨張化黒鉛としては、例えば、伊藤黒鉛工業株式会社製のEC1500、EC1000、EC500、EC300、EC100、EC50(いずれも商品名)等が挙げられる。
-Expanded graphite-
Here, the expanded graphite that can be suitably used as the particulate carbon material is, for example, finely expanded after heat-treating expandable graphite obtained by chemically treating graphite such as scaly graphite with sulfuric acid or the like. Can be obtained. Examples of expanded graphite include EC1500, EC1000, EC500, EC300, EC100, and EC50 (all trade names) manufactured by Ito Graphite Industries Co., Ltd.
-粒子状炭素材料の性状-
ここで、粒子状炭素材料の粒子径は、体積基準モード径で100μm以上であることが好ましく、150μm以上であることがより好ましく、300μm以下であることが好ましく、250μm以下であることがより好ましい。粒子状炭素材料の粒子径が上記下限以上であれば、熱伝導シート中で粒子状炭素材料同士が接触して良好な伝熱パスを形成するため、熱伝導シートにより高い熱伝導性を発揮させることができるからである。また、粒子状炭素材料の粒子径が上記上限以下であれば、熱伝導シートにより高い柔軟性を与え、発熱体と接した際の発熱体から熱伝導シートへの伝熱をより良好にすることができるからである。
また、本発明の熱伝導シートに含まれている粒子状炭素材料のアスペクト比(長径/短径)は、1以上10以下であることが好ましく、1以上5以下であることがより好ましい。
-Properties of particulate carbon materials-
Here, the particle diameter of the particulate carbon material is preferably 100 μm or more, more preferably 150 μm or more, more preferably 300 μm or less, and more preferably 250 μm or less in terms of volume-based mode diameter. . If the particle diameter of the particulate carbon material is equal to or greater than the above lower limit, the particulate carbon materials are brought into contact with each other in the heat conductive sheet to form a good heat transfer path, so that the heat conductive sheet exhibits high thermal conductivity. Because it can. Also, if the particle size of the particulate carbon material is less than or equal to the above upper limit, the heat conduction sheet is given higher flexibility and heat transfer from the heating element to the heat conduction sheet when in contact with the heating element is improved. Because you can.
The aspect ratio (major axis / minor axis) of the particulate carbon material contained in the heat conductive sheet of the present invention is preferably 1 or more and 10 or less, and more preferably 1 or more and 5 or less.
なお、本発明において「体積基準モード径」は、レーザー回折/散乱式粒子径分布測定装置を用いて、本明細書の実施例に記載した方法に従って求めることができる。
また、本発明において、「粒子状炭素材料のアスペクト比」は、熱伝導シート中の樹脂を溶媒中で溶解除去して得られる粒子状炭素材料をSEM(走査型電子顕微鏡)で観察し、任意の50個の粒子状炭素材料について、最大径(長径)と、最大径に直交する方向の粒子径(短径)とを測定し、長径と短径の比(長径/短径)の平均値を算出することにより求めることができる。
In the present invention, the “volume reference mode diameter” can be determined according to the method described in the examples of the present specification using a laser diffraction / scattering particle size distribution measuring apparatus.
In the present invention, the “aspect ratio of the particulate carbon material” is determined by observing the particulate carbon material obtained by dissolving and removing the resin in the heat conductive sheet in a solvent with an SEM (scanning electron microscope). Measure the maximum diameter (major axis) and the particle diameter (minor axis) in the direction perpendicular to the maximum diameter and measure the average value of the ratio of major axis to minor axis (major axis / minor axis). Can be obtained by calculating.
-粒子状炭素材料の含有割合-
そして、本発明の熱伝導シート中の粒子状炭素材料の含有割合は、35体積%以上であることが好ましく、45体積%以上であることがより好ましく、50体積%以上であることがさらに好ましく、通常、70体積%以下である。熱伝導シート中の粒子状炭素材料の含有割合が上記下限以上であれば、熱伝導シート中で粒子状炭素材料同士が接触しやすくなり、良好な伝熱パスを形成しやすくなる。その結果、熱伝導シートに、厚み方向におけるより高い熱伝導性を発揮させることができるからである。さらに、熱伝導シート中の粒子状炭素材料の含有割合が上記範囲内であれば、当該複合粒子がロール圧延等の加圧による力を受け易くなるため、結果として、熱伝導シート中で粒子状炭素材料を所望方向により良好に配向させることができるからである。
なお、本発明において、「含有割合(体積%)」は、本明細書の実施例に記載した方法に従って理論値として求めることができる。
-Content ratio of particulate carbon material-
And the content rate of the particulate carbon material in the heat conductive sheet of the present invention is preferably 35% by volume or more, more preferably 45% by volume or more, and further preferably 50% by volume or more. Usually, it is 70 volume% or less. If the content rate of the particulate carbon material in a heat conductive sheet is more than the said minimum, it will become easy to contact particulate carbon materials in a heat conductive sheet, and it will become easy to form a favorable heat-transfer path | pass. As a result, the heat conductive sheet can exhibit higher heat conductivity in the thickness direction. Furthermore, if the content ratio of the particulate carbon material in the heat conductive sheet is within the above range, the composite particles are likely to be subjected to a force due to pressurization such as roll rolling. This is because the carbon material can be oriented better in the desired direction.
In the present invention, the “content ratio (volume%)” can be obtained as a theoretical value according to the method described in the examples of the present specification.
[繊維状炭素材料]
本発明の熱伝導シートは、任意に繊維状炭素材料を更に含有してもよい。任意に含有される繊維状炭素材料としては、特に限定されることなく、例えば、カーボンナノチューブ、気相成長炭素繊維、有機繊維を炭化して得られる炭素繊維、及びそれらの切断物などを用いることができる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
そして、本発明の熱伝導シートに繊維状炭素材料を含有させれば、熱伝導シートの熱伝導性を更に向上させることができると共に、粒子状炭素材料の粉落ちを防止することもできる。なお、繊維状炭素材料を配合することで粒子状炭素材料の粉落ちを防止することができる理由は、明らかではないが、繊維状炭素材料が三次元網目構造を形成することにより、熱伝導性や強度を高めつつ粒子状炭素材料の脱離を防止しているためであると推察される。
[Fibrous carbon material]
The heat conductive sheet of the present invention may optionally further contain a fibrous carbon material. The fibrous carbon material arbitrarily contained is not particularly limited, and for example, carbon nanotubes, vapor-grown carbon fibers, carbon fibers obtained by carbonizing organic fibers, and cut products thereof are used. Can do. These may be used individually by 1 type and may use 2 or more types together.
And if fibrous carbon material is contained in the heat conductive sheet of this invention, while being able to further improve the heat conductivity of a heat conductive sheet, the powder-off of particulate carbon material can also be prevented. The reason why powder carbon material can be prevented from falling off by blending the fibrous carbon material is not clear, but the fibrous carbon material forms a three-dimensional network structure, so that the thermal conductivity This is presumably because the particulate carbon material is prevented from being detached while increasing the strength.
上述した中でも、繊維状炭素材料としては、カーボンナノチューブなどの繊維状の炭素ナノ構造体を用いることが好ましく、カーボンナノチューブを含む繊維状の炭素ナノ構造体を用いることがより好ましい。カーボンナノチューブなどの繊維状の炭素ナノ構造体を使用すれば、熱伝導シートを用いて得られる熱伝導シートの熱伝導性及び強度を更に向上させることができるからである。 Among the above, as the fibrous carbon material, it is preferable to use a fibrous carbon nanostructure such as a carbon nanotube, and it is more preferable to use a fibrous carbon nanostructure including a carbon nanotube. This is because if a fibrous carbon nanostructure such as a carbon nanotube is used, the thermal conductivity and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be further improved.
-カーボンナノチューブを含む繊維状の炭素ナノ構造体-
ここで、繊維状炭素材料として好適に使用し得る、カーボンナノチューブを含む繊維状の炭素ナノ構造体は、カーボンナノチューブ(以下、「CNT」と称することがある。)のみからなるものであってもよいし、CNTと、CNT以外の繊維状の炭素ナノ構造体との混合物であってもよい。
なお、繊維状の炭素ナノ構造体中のCNTとしては、特に限定されることなく、単層カーボンナノチューブ及び/または多層カーボンナノチューブを用いることができるが、CNTは、単層から5層までのカーボンナノチューブであることが好ましく、単層カーボンナノチューブであることがより好ましい。単層カーボンナノチューブを使用すれば、多層カーボンナノチューブを使用した場合と比較し、熱伝導シートを用いて得られる熱伝導シートの熱伝導性及び強度を更に向上させることができるからである。
-Fibrous carbon nanostructures containing carbon nanotubes-
Here, the fibrous carbon nanostructure containing carbon nanotubes that can be suitably used as the fibrous carbon material may be composed only of carbon nanotubes (hereinafter sometimes referred to as “CNT”). Alternatively, a mixture of CNT and a fibrous carbon nanostructure other than CNT may be used.
The CNT in the fibrous carbon nanostructure is not particularly limited, and single-walled carbon nanotubes and / or multi-walled carbon nanotubes can be used. Nanotubes are preferable, and single-walled carbon nanotubes are more preferable. This is because the use of single-walled carbon nanotubes can further improve the thermal conductivity and strength of the heat-conducting sheet obtained using the heat-conducting sheet as compared with the case of using multi-walled carbon nanotubes.
また、CNTを含む繊維状の炭素ナノ構造体としては、平均直径(Av)に対する、直径の標準偏差(σ)に3を乗じた値(3σ)の比(3σ/Av)が0.20超0.60未満の炭素ナノ構造体を用いることが好ましく、3σ/Avが0.25超の炭素ナノ構造体を用いることがより好ましく、3σ/Avが0.50超の炭素ナノ構造体を用いることが更に好ましい。3σ/Avが0.20超0.60未満のCNTを含む繊維状の炭素ナノ構造体を使用すれば、炭素ナノ構造体の配合量が少量であっても、得られる熱伝導シートの熱伝導性及び強度を十分に高めることができるからである。従って、CNTを含む繊維状の炭素ナノ構造体の配合により熱伝導シートの硬度が過度に高くなる(即ち、柔軟性が低下する)ことを抑制して、熱伝導シートの熱伝導性及び柔軟性を十分に高いレベルで並立させることができるからである。
なお、「繊維状の炭素ナノ構造体の平均直径(Av)」及び「繊維状の炭素ナノ構造体の直径の標準偏差(σ:標本標準偏差)」は、それぞれ、透過型電子顕微鏡を用いて無作為に選択した繊維状の炭素ナノ構造体100本の直径(外径)を測定して求めることができる。そして、CNTを含む繊維状の炭素ナノ構造体の平均直径(Av)及び標準偏差(σ)は、CNTを含む繊維状の炭素ナノ構造体の製造方法や製造条件を変更することにより調整してもよいし、異なる製法で得られたCNTを含む繊維状の炭素ナノ構造体を複数種類組み合わせることにより調整してもよい。
In addition, the fibrous carbon nanostructure containing CNT has a ratio (3σ / Av) of a value (3σ) obtained by multiplying the standard deviation (σ) of the diameter by 3 with respect to the average diameter (Av) is more than 0.20. It is preferable to use a carbon nanostructure of less than 0.60, more preferably a carbon nanostructure with 3σ / Av exceeding 0.25, and a carbon nanostructure with 3σ / Av exceeding 0.50. More preferably. If a fibrous carbon nanostructure containing CNTs with 3σ / Av of more than 0.20 and less than 0.60 is used, the heat conduction of the obtained heat conducting sheet can be obtained even if the amount of carbon nanostructure is small. This is because the properties and strength can be sufficiently increased. Therefore, the thermal conductivity and flexibility of the thermal conductive sheet are suppressed by suppressing the hardness of the thermal conductive sheet from being excessively high (that is, the flexibility is lowered) by blending the fibrous carbon nanostructure containing CNT. This is because the two can be juxtaposed at a sufficiently high level.
The “average diameter (Av) of the fibrous carbon nanostructure” and the “standard deviation of the diameter of the fibrous carbon nanostructure (σ: sample standard deviation)” are respectively measured using a transmission electron microscope. It can be determined by measuring the diameter (outer diameter) of 100 randomly selected fibrous carbon nanostructures. And the average diameter (Av) and standard deviation ((sigma)) of the fibrous carbon nanostructure containing CNT are adjusted by changing the manufacturing method and manufacturing conditions of the fibrous carbon nanostructure containing CNT. Alternatively, it may be adjusted by combining a plurality of types of fibrous carbon nanostructures containing CNTs obtained by different production methods.
そして、CNTを含む繊維状の炭素ナノ構造体としては、前述のようにして測定した直径を横軸に、その頻度を縦軸に取ってプロットし、ガウシアンで近似した際に、正規分布を取るものが通常使用される。 And as a fibrous carbon nanostructure containing CNT, the diameter measured as described above is plotted on the horizontal axis, the frequency is plotted on the vertical axis, and a normal distribution is obtained when approximated by Gaussian. Things are usually used.
更に、CNTを含む繊維状の炭素ナノ構造体は、ラマン分光法を用いて評価した際に、Radial Breathing Mode(RBM)のピークを有することが好ましい。なお、三層以上の多層カーボンナノチューブのみからなる繊維状の炭素ナノ構造体のラマンスペクトルには、RBMが存在しない。 Furthermore, it is preferable that the fibrous carbon nanostructure containing CNT has a peak of Radial Breathing Mode (RBM) when evaluated using Raman spectroscopy. Note that there is no RBM in the Raman spectrum of a fibrous carbon nanostructure composed of only three or more multi-walled carbon nanotubes.
また、CNTを含む繊維状の炭素ナノ構造体の平均直径(Av)は、0.5nm以上であることが好ましく、1nm以上であることが更に好ましく、15nm以下であることが好ましく、10nm以下であることが更に好ましい。繊維状の炭素ナノ構造体の平均直径(Av)が0.5nm以上であれば、繊維状の炭素ナノ構造体の凝集を抑制して炭素ナノ構造体の分散性を高めることができるからである。また、繊維状の炭素ナノ構造体の平均直径(Av)が15nm以下であれば、熱伝導シートを用いて得られる熱伝導シートの熱伝導性及び強度を十分に高めることができるからである。 The average diameter (Av) of the fibrous carbon nanostructure containing CNTs is preferably 0.5 nm or more, more preferably 1 nm or more, preferably 15 nm or less, and preferably 10 nm or less. More preferably it is. If the average diameter (Av) of the fibrous carbon nanostructure is 0.5 nm or more, the aggregation of the fibrous carbon nanostructure can be suppressed and the dispersibility of the carbon nanostructure can be increased. . Moreover, if the average diameter (Av) of the fibrous carbon nanostructure is 15 nm or less, the thermal conductivity and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be sufficiently increased.
更に、CNTを含む繊維状の炭素ナノ構造体のBET比表面積は、600m2/g以上であることが好ましく、800m2/g以上であることが更に好ましく、2500m2/g以下であることが好ましく、1200m2/g以下であることが更に好ましい。更に、繊維状の炭素ナノ構造体中のCNTが主として開口したものにあっては、BET比表面積が1300m2/g以上であることが好ましい。CNTを含む繊維状の炭素ナノ構造体のBET比表面積が600m2/g以上であれば、熱伝導シートを用いて得られる熱伝導シートの熱伝導性及び強度を十分に高めることができるからである。また、CNTを含む繊維状の炭素ナノ構造体のBET比表面積が2500m2/g以下であれば、繊維状の炭素ナノ構造体の凝集を抑制して熱伝導シート中のCNTの分散性を高めることができるからである。
なお、本発明において、「BET比表面積」とは、BET法を用いて測定した窒素吸着比表面積を指す。
Further, the BET specific surface area of the fibrous carbon nanostructure containing CNTs is preferably 600 m 2 / g or more, more preferably 800 m 2 / g or more, and 2500 m 2 / g or less. Preferably, it is 1200 m 2 / g or less. Furthermore, when the CNT in the fibrous carbon nanostructure is mainly opened, the BET specific surface area is preferably 1300 m 2 / g or more. If the BET specific surface area of the fibrous carbon nanostructure containing CNTs is 600 m 2 / g or more, the thermal conductivity and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be sufficiently increased. is there. Moreover, if the BET specific surface area of the fibrous carbon nanostructure containing CNT is 2500 m 2 / g or less, the aggregation of the fibrous carbon nanostructure is suppressed and the dispersibility of the CNT in the heat conductive sheet is increased. Because it can.
In the present invention, the “BET specific surface area” refers to a nitrogen adsorption specific surface area measured using the BET method.
そして、上述した性状を有するCNTを含む繊維状の炭素ナノ構造体は、例えば、カーボンナノチューブ製造用の触媒層を表面に有する基材上に、原料化合物及びキャリアガスを供給して、化学的気相成長法(CVD法)によりCNTを合成する際に、系内に微量の酸化剤(触媒賦活物質)を存在させることで、触媒層の触媒活性を飛躍的に向上させるという方法(スーパーグロース法;国際公開第2006/011655号参照)に準じて、効率的に製造することができる。なお、以下では、スーパーグロース法により得られるカーボンナノチューブを「SGCNT」と称することがある。 The fibrous carbon nanostructure containing CNTs having the above-described properties can be obtained, for example, by supplying a raw material compound and a carrier gas onto a base material having a catalyst layer for producing carbon nanotubes on the surface thereof. When synthesizing CNTs by the phase growth method (CVD method), a method of dramatically improving the catalytic activity of the catalyst layer by making a small amount of oxidizing agent (catalyst activation material) present in the system (super growth method) According to International Publication No. 2006/011655). Hereinafter, the carbon nanotube obtained by the super growth method may be referred to as “SGCNT”.
ここで、スーパーグロース法により製造したCNTを含む繊維状の炭素ナノ構造体は、SGCNTのみから構成されていてもよいし、SGCNTに加え、例えば、非円筒形状の炭素ナノ構造体等の他の炭素ナノ構造体が含まれていてもよい。 Here, the fibrous carbon nanostructure containing CNT produced by the super-growth method may be composed only of SGCNT, and in addition to SGCNT, other carbon nanostructures such as non-cylindrical carbon nanostructures may be used. Carbon nanostructures may be included.
-繊維状炭素材料の性状-
そして、熱伝導シートに含まれ得る繊維状炭素材料の平均繊維径は、1nm以上であることが好ましく、3nm以上であることがより好ましく、2μm以下であることが好ましく、1μm以下であることがより好ましい。繊維状炭素材料の平均繊維径が上記範囲内であれば、熱伝導シートを用いて得られる熱伝導シートの熱伝導性、柔軟性及び強度を十分に高いレベルで並立させることができるからである。
ここで、繊維状炭素材料のアスペクト比は、10を超えることが好ましい。
-Properties of fibrous carbon materials-
And the average fiber diameter of the fibrous carbon material which can be contained in a heat conductive sheet is preferably 1 nm or more, more preferably 3 nm or more, preferably 2 μm or less, and preferably 1 μm or less. More preferred. If the average fiber diameter of the fibrous carbon material is within the above range, the thermal conductivity, flexibility and strength of the thermal conductive sheet obtained using the thermal conductive sheet can be juxtaposed at a sufficiently high level. .
Here, the aspect ratio of the fibrous carbon material preferably exceeds 10.
なお、本発明において、「平均繊維径」は、熱伝導シート中の樹脂を溶媒中で溶解除去して得られる繊維状炭素材料をSEM(走査型電子顕微鏡)又はTEM(透過型電子顕微鏡)で観察し、任意の50個の繊維状炭素材料について繊維径を測定し、測定した繊維径の個数平均値を算出することにより求めることができる。特に、繊維径が小さい場合は、同様の断面をTEM(透過型電子顕微鏡)にて観察することが好適である。
また、本発明において「繊維状炭素材料のアスペクト比」は、熱伝導シート中の樹脂を溶解除去して得られる繊維状炭素材料をTEM(透過型電子顕微鏡)で観察し、任意の50個の繊維状炭素材料について、最大径(長径)と、最大径に直交する方向の粒子径(短径)とを測定し、長径と短径の比(長径/短径)の平均値を算出することにより求めることができる。
In the present invention, the “average fiber diameter” refers to a fibrous carbon material obtained by dissolving and removing the resin in the heat conductive sheet in a solvent by SEM (scanning electron microscope) or TEM (transmission electron microscope). It can be obtained by observing, measuring the fiber diameter of any 50 fibrous carbon materials, and calculating the number average value of the measured fiber diameters. In particular, when the fiber diameter is small, it is preferable to observe the same cross section with a TEM (transmission electron microscope).
Further, in the present invention, the “aspect ratio of the fibrous carbon material” refers to the observation of the fibrous carbon material obtained by dissolving and removing the resin in the heat conductive sheet with a TEM (transmission electron microscope), and an arbitrary 50 pieces. For the fibrous carbon material, measure the maximum diameter (major axis) and the particle diameter (minor axis) in the direction orthogonal to the maximum diameter, and calculate the average value of the ratio of the major axis to the minor axis (major axis / minor axis). It can ask for.
[樹脂]
ここで、本発明の熱伝導シートを構成する母材樹脂は、ムーニー粘度90(ML1+4、100℃)以下の樹脂である必要がある。そのような母材樹脂としては、ムーニー粘度90(ML1+4、100℃)以下である限りにおいて特に限定されることなく、熱伝導シート製造に使用され得る既知の一種の樹脂又は複数種の樹脂の複合物を用いることができる。また、特に限定されることなく、ムーニー粘度90(ML1+4、100℃)以下の母材樹脂は、未加硫の樹脂でありうる。なお、本明細書において、ゴム及びエラストマーは、「樹脂」に含まれるものとする。また、本明細書において、「未加硫」とは、樹脂又は樹脂の材料となる樹脂組成物中に加硫剤(架橋剤)が含有されているか否かにかかわらず、かかる樹脂又は樹脂組成物に対して加熱等により架橋反応を生じさせていない状態を意味する。
[resin]
Here, the base material resin constituting the heat conductive sheet of the present invention needs to be a resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less. Such a matrix resin is not particularly limited as long as it has a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and is a known type of resin or a plurality of types of resins that can be used for the production of heat conductive sheets. Resin composites can be used. In addition, the base material resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less can be an unvulcanized resin without particular limitation. In this specification, rubber and elastomer are included in “resin”. Further, in the present specification, “unvulcanized” means such a resin or resin composition regardless of whether or not a vulcanizing agent (crosslinking agent) is contained in the resin composition as a resin or resin material. It means a state where no cross-linking reaction is caused by heating or the like.
さらに、母材樹脂は、熱可塑性を有する樹脂であることが好ましい。ここで、本明細書において、「熱可塑性」とは、加熱によって軟化し、成形可能な状態となり、さらに、冷却により固化する特性を意味する。さらに、樹脂が「熱可塑性」である場合、通常、固化状態の樹脂のポリマー構造内に架橋構造を含まない。ここで、一般的に、樹脂は、「熱可塑性樹脂」と、「熱硬化性樹脂」とに大別される場合がある。しかし、一般的に「熱硬化性樹脂」として分類されうる樹脂であっても、架橋剤の非存在下で固化すれば、ポリマー構造内に架橋構造が形成されない場合がある。よって、本明細書では、一般的に熱可塑性樹脂と分類されるか熱硬化性樹脂として分類されるかにかかわらず、上記定義したような「熱可塑性」を有する樹脂を総じて、「熱可塑性を有する樹脂」と称する。
そして、「熱可塑性を有する樹脂」を熱伝導シートに配合すれば、熱伝導シートと発熱体や放熱体等の部材との間の密着性を向上させることができる。「熱可塑性を有する樹脂」は、熱伝導シートの使用時(放熱時)の高温環境下で、熱伝導シートの柔軟性を高めることができるからである。
Furthermore, the base material resin is preferably a resin having thermoplasticity. Here, in the present specification, “thermoplastic” means a property of being softened by heating, becoming moldable, and solidifying by cooling. Further, when the resin is “thermoplastic”, the polymer structure of the solidified resin usually does not contain a crosslinked structure. Here, in general, resins may be broadly classified into “thermoplastic resins” and “thermosetting resins”. However, even a resin that can be generally classified as a “thermosetting resin” may not form a crosslinked structure in the polymer structure if it is solidified in the absence of a crosslinking agent. Therefore, in this specification, regardless of whether it is generally classified as a thermoplastic resin or a thermosetting resin, the resins having “thermoplasticity” as defined above are collectively referred to as “thermoplasticity”. It is referred to as “resin having”.
And if "resin which has thermoplasticity" is mix | blended with a heat conductive sheet, the adhesiveness between heat conductive sheets and members, such as a heat generating body and a heat radiator, can be improved. This is because the “resin having thermoplasticity” can enhance the flexibility of the heat conductive sheet in a high temperature environment when the heat conductive sheet is used (at the time of heat dissipation).
なお、母材樹脂として使用する「熱可塑性を有する樹脂」は、常温常圧下で固体である。母材樹脂として使用する樹脂が常温常圧下で固体であれば、使用時(放熱時)の高温環境下においては、熱伝導シートの柔軟性をより向上させ、熱伝導シートと発熱体とをより良好に密着させつつ、取り付け時などの常温環境下においては、熱伝導シートのハンドリング性を高めることができる。なお、本明細書において、「常温」とは23℃を指し、「常圧」とは、1atm(絶対圧)を指す。
また、上述した通り、母体樹脂は1種類の樹脂からなるものでもよいし、2種類以上の樹脂を混合して得られた複合物でもよい。母材樹脂として複合物を用いる場合には、複合物を構成する各樹脂は常温常圧下で固体の樹脂であっても、液体の樹脂であっても良いが、複合物を形成した場合に、かかる複合物が常温常圧下で固体となることが必要である。
The “resin having thermoplasticity” used as the base resin is solid at normal temperature and pressure. If the resin used as the base resin is solid at room temperature and normal pressure, the flexibility of the thermal conductive sheet is further improved in a high-temperature environment during use (during heat dissipation), and the thermal conductive sheet and the heating element are more The handling property of the heat conductive sheet can be improved in a normal temperature environment such as attachment while being in good contact. In this specification, “normal temperature” refers to 23 ° C., and “normal pressure” refers to 1 atm (absolute pressure).
Further, as described above, the base resin may be composed of one type of resin or a composite obtained by mixing two or more types of resins. When using a composite as a base material resin, each resin constituting the composite may be a solid resin or a liquid resin under normal temperature and normal pressure, but when a composite is formed, It is necessary for such a composite to become a solid at normal temperature and pressure.
-熱可塑性を有する樹脂-
(1)常温常圧下で固体の熱可塑性を有する樹脂
母材樹脂として使用されうる熱可塑性を有する樹脂であって、常温常圧下で固体である樹脂としては、ポリ(アクリル酸2-エチルヘキシル)、アクリル酸とアクリル酸2-エチルヘキシルとの共重合体、ポリメタクリル酸またはそのエステル、ポリアクリル酸またはそのエステルなどのアクリル樹脂;シリコーン樹脂;フッ素樹脂;ポリエチレン;ポリプロピレン;エチレン-プロピレン共重合体;ポリメチルペンテン;ポリ塩化ビニル;ポリ塩化ビニリデン;ポリ酢酸ビニル;エチレン-酢酸ビニル共重合体;ポリビニルアルコール;ポリアセタール;ポリエチレンテレフタレート;ポリブチレンテレフタレート;ポリエチレンナフタレート;ポリスチレン;ポリアクリロニトリル;スチレン-アクリロニトリル共重合体;アクリロニトリル-ブタジエン共重合体(ニトリルゴム);アクリロニトリル-ブタジエン-スチレン共重合体(ABS樹脂);スチレン-ブタジエンブロック共重合体またはその水素添加物;スチレン-イソプレンブロック共重合体またはその水素添加物;ポリフェニレンエーテル;変性ポリフェニレンエーテル;脂肪族ポリアミド類;芳香族ポリアミド類;ポリアミドイミド;ポリカーボネート;ポリフェニレンスルフィド;ポリサルホン;ポリエーテルサルホン;ポリエーテルニトリル;ポリエーテルケトン;ポリケトン;ポリウレタン;液晶ポリマー;アイオノマー等が挙げられる。これらは、1種を単独で使用してもよいし、2種以上を併用してもよい。
-Thermoplastic resin-
(1) Resin having thermoplasticity that is solid under normal temperature and normal pressure A thermoplastic resin that can be used as a base material resin and is solid under normal temperature and normal pressure includes poly (2-ethylhexyl acrylate), Copolymer of acrylic acid and 2-ethylhexyl acrylate, polymethacrylic acid or its ester, acrylic resin such as polyacrylic acid or its ester; silicone resin; fluororesin; polyethylene; polypropylene; ethylene-propylene copolymer; Polyvinyl chloride; Polyvinylidene chloride; Polyvinyl acetate; Ethylene-vinyl acetate copolymer; Polyvinyl alcohol; Polyacetal; Polyethylene terephthalate; Polybutylene terephthalate; Polyethylene naphthalate; Polystyrene; Polyacrylonitrile; Acryl-acrylonitrile copolymer; acrylonitrile-butadiene copolymer (nitrile rubber); acrylonitrile-butadiene-styrene copolymer (ABS resin); styrene-butadiene block copolymer or hydrogenated product thereof; styrene-isoprene block copolymer Polyphenylene ether; Modified polyphenylene ether; Aliphatic polyamides; Aromatic polyamides; Polyamideimide; Polycarbonate; Polyphenylene sulfide; Polysulfone; Polyethersulfone; Polyethernitrile; Polyetherketone; Polyketone; Liquid crystal polymer; ionomer and the like. These may be used individually by 1 type and may use 2 or more types together.
さらに、母材樹脂として使用する、常温常圧下で固体の「熱可塑性を有する樹脂」は、フッ素樹脂であることが好ましい。母材樹脂がフッ素樹脂であれば、熱伝導シートの耐熱性、耐油性、及び耐薬品性を向上させることができるからである。具体的には、フッ化ビニリデン系フッ素樹脂、テトラフルオロエチレン-プロピレン系フッ素樹脂、テトラフルオロエチレン-パープルオロビニルエーテル系フッ素樹脂等、フッ素含有モノマーを重合して得られるエラストマーなどが挙げられる。より具体的には、ポリテトラフルオロエチレン、テトラフルオロエチレン-パーフルオロアルキルビニルエーテル共重合体、テトラフルオロエチレン-ヘキサフルオロプロピレン共重合体、テトラフルオロエチレン-エチレン共重合体、ポリビニリデンフルオライド、ポリクロロトリフルオロエチレン、エチレン-クロロフルオロエチレン共重合体、テトラフルオロエチレン-パーフルオロジオキソール共重合体、ポリビニルフルオライド、テトラフルオロエチレン-プロピレン共重合体、ビニリデンフルオライド-ヘキサフルオロプロピレン共重合体、ビニリデンフルオライド-ヘキサフルオロプロピレン-テトラフルオロエチレン共重合体、ポリテトラフルオロエチレンのアクリル変性物、ポリテトラフルオロエチレンのエステル変性物、ポリテトラフルオロエチレンのエポキシ変性物及びポリテトラフルオロエチレンのシラン変性物等が挙げられる。これらの中でも、加工性の観点から、ポリテトラフルオロエチレン、ポリテトラフルオロエチレンのアクリル変性物、テトラフルオロエチレン-パーフルオロアルキルビニルエーテル共重合体、ビニリデンフルオライド-ヘキサフルオロプロピレン共重合体、ビニリデンフルオライド-ヘキサフルオロプロピレン-テトラフルオロエチレン共重合体が好ましい。 Furthermore, it is preferable that the “resin having thermoplasticity” used as a base material resin, which is solid at normal temperature and pressure, is a fluororesin. This is because if the base resin is a fluororesin, the heat resistance, oil resistance, and chemical resistance of the heat conductive sheet can be improved. Specific examples include elastomers obtained by polymerizing fluorine-containing monomers, such as vinylidene fluoride fluororesins, tetrafluoroethylene-propylene fluororesins, tetrafluoroethylene-purple olovinyl ether fluororesins, and the like. More specifically, polytetrafluoroethylene, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, tetrafluoroethylene-hexafluoropropylene copolymer, tetrafluoroethylene-ethylene copolymer, polyvinylidene fluoride, polychloro Trifluoroethylene, ethylene-chlorofluoroethylene copolymer, tetrafluoroethylene-perfluorodioxole copolymer, polyvinyl fluoride, tetrafluoroethylene-propylene copolymer, vinylidene fluoride-hexafluoropropylene copolymer, Vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene copolymer, acrylic modification of polytetrafluoroethylene, ester modification of polytetrafluoroethylene Epoxy-modified product of polytetrafluoroethylene and polytetrafluoroethylene silane modified product, and the like. Among these, from the viewpoint of processability, polytetrafluoroethylene, polytetrafluoroethylene modified acrylic, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer, vinylidene fluoride-hexafluoropropylene copolymer, vinylidene fluoride -A hexafluoropropylene-tetrafluoroethylene copolymer is preferred.
また、市販されている、常温常圧下で固体の熱可塑性を有するフッ素樹脂としては、例えば、ダイキン工業株式会社製のダイエル(登録商標)G-300シリーズ/G-700シリーズ/G-7000シリーズ(ビニリデンフルオライド-ヘキサフルオロプロピレン2元系共重合体)、ダイエルG-550シリーズ/G-600シリーズ(ビニリデンフルオライド-ヘキサフルオロプロピレン-テトラフルオロエチレン3元系共重合体)、ダイエルG-800シリーズ(ビニリデンフルオライド-ヘキサフルオロプロピレン2元系共重合体)、ダイエルG-900シリーズ(ビニリデンフルオライド-ヘキサフルオロプロピレン-テトラフルオロエチレン3元系共重合体);ALKEMA社製のKYNAR(登録商標)シリーズ(フッ化ビニリデン系フッ素樹脂)、KYNAR FLEX(登録商標)シリーズ(ビニリデンフロライド-ヘキサフルオロプロピレン-テトラフルオロエチレン3元系共重合体);ケマーズ社製のA-100(ビニリデンフルオライド-ヘキサフルオロプロピレン2元系共重合体);スリーエムジャパン社製のDyneon E?20575(登録商標)(ビニリデンフロライド‐ヘキサフルオロプロピレン2元系共重合体)などが挙げられる。 Also, commercially available fluororesins having a thermoplastic property at room temperature and normal pressure include, for example, Daiel (registered trademark) G-300 series / G-700 series / G-7000 series (manufactured by Daikin Industries, Ltd.) Vinylidene fluoride-hexafluoropropylene binary copolymer), Daiel G-550 series / G-600 series (vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene terpolymer), Daiel G-800 series (Vinylidene fluoride-hexafluoropropylene binary copolymer), Daiel G-900 series (vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene terpolymer); KYNAR (registered trademark) manufactured by ALKEMA Series (bifluoride (Ridene-based fluororesin), KYNAR FLEX® series (vinylidene fluoride-hexafluoropropylene-tetrafluoroethylene terpolymer); A-100 (vinylidene fluoride-hexafluoropropylene binary) manufactured by Chemers Copolymer); Dyneon E made by 3M Japan? 20575 (registered trademark) (vinylidene fluoride-hexafluoropropylene binary copolymer).
(2)常温常圧下で液体の熱可塑性を有する樹脂
また、上述したように、複合物が常温常圧下で固体となるとともに、本発明の効果を著しく損なわない限りにおいて、常温常圧下で固体の熱可塑性を有する樹脂に、常温常圧下で液体の熱可塑性を有する樹脂を組み合わせて用いることもできる。常温常圧下で液体の熱可塑性を有する樹脂としては、例えば、上記(1)の樹脂に該当する樹脂以外の、アクリル樹脂、エポキシ樹脂、シリコーン樹脂、及びフッ素樹脂などが挙げられる。これらは、1種を単独で使用してもよいし、2種以上を併用してもよい。
(2) Resin having liquid thermoplasticity under normal temperature and normal pressure As described above, the composite becomes solid under normal temperature and normal pressure, and is not solid under normal temperature and normal pressure as long as the effect of the present invention is not significantly impaired. A resin having thermoplasticity that is liquid at room temperature and normal pressure may be used in combination with a resin having thermoplasticity. Examples of the resin having liquid thermoplasticity under normal temperature and normal pressure include acrylic resins, epoxy resins, silicone resins, and fluororesins other than the resin corresponding to the resin of (1) above. These may be used individually by 1 type and may use 2 or more types together.
常温常圧下で液体の熱可塑性を有する樹脂の粘度は、特には限定されないが、混練性、流動性、架橋反応性が良好で、成形性にも優れるという点からは、105℃における粘度が、500mPa・s~30,000mPa・sであることが好ましく、550mPa・s~25,000mPa・sであることがより好ましい。 The viscosity of the resin having liquid thermoplasticity under normal temperature and normal pressure is not particularly limited, but the viscosity at 105 ° C. from the viewpoint of good kneadability, fluidity, crosslinking reactivity, and excellent moldability, 500 mPa · s to 30,000 mPa · s is preferable, and 550 mPa · s to 25,000 mPa · s is more preferable.
-その他の樹脂-
本発明の効果を著しく損なわない限りにおいて、熱伝導シートに、上述した樹脂以外のその他の樹脂を含有させても良い。
その他の樹脂としては、一般的に熱硬化性樹脂として分類されうる各種樹脂、例えば、天然ゴム;ブタジエンゴム;イソプレンゴム;水素化ニトリルゴム;クロロプレンゴム;エチレンプロピレンゴム;塩素化ポリエチレン;クロロスルホン化ポリエチレン;ブチルゴム;ハロゲン化ブチルゴム;ポリイソブチレンゴム;エポキシ樹脂;ポリイミド樹脂;ビスマレイミド樹脂;ベンゾシクロブテン樹脂;フェノール樹脂;不飽和ポリエステル;ジアリルフタレート樹脂;ポリイミドシリコーン樹脂;ポリウレタン;熱硬化型ポリフェニレンエーテル;熱硬化型変性ポリフェニレンエーテル;などが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。
-Other resins-
As long as the effects of the present invention are not significantly impaired, the heat conductive sheet may contain other resins than the above-described resins.
Other resins that can be generally classified as thermosetting resins, such as natural rubber; butadiene rubber; isoprene rubber; hydrogenated nitrile rubber; chloroprene rubber; ethylene propylene rubber; chlorinated polyethylene; Polyethylene, butyl rubber, halogenated butyl rubber, polyisobutylene rubber, epoxy resin, polyimide resin, bismaleimide resin, benzocyclobutene resin, phenol resin, unsaturated polyester, diallyl phthalate resin, polyimide silicone resin, polyurethane, thermosetting polyphenylene ether; And thermosetting modified polyphenylene ether. These may be used individually by 1 type and may use 2 or more types together.
-ムーニー粘度-
なお、母材樹脂は、ムーニー粘度(ML1+4、100℃)が、90(ML1+4、100℃)以下である必要があり、65(ML1+4、100℃)以下であることがより好ましく、36(ML1+4、100℃)以下であることがより好ましい。通常、3(ML1+4、100℃)以上である。熱伝導シートに含まれる母材樹脂のムーニー粘度が上記上限値以下であれば、熱伝導シートの熱伝導性を高めることが出来る。
なお、熱伝導シート中に含まれる母材樹脂のムーニー粘度は、熱伝導シートを、母材樹脂を溶解可能な溶剤に溶解した後に母材樹脂を単離してムーニー粘度測定用試料を調製し、得られた試料について、JIS-K6300に従い(ML1+4,100℃)を測定することで、取得することができる。また、このようにして取得したムーニー粘度の値は、原則として、材料段階の母材樹脂のムーニー粘度の値と略同一となる。
-Mooney viscosity-
The base resin must have a Mooney viscosity (ML 1 + 4 , 100 ° C.) of 90 (ML 1 + 4 , 100 ° C.) or less, and 65 (ML 1 + 4 , 100 ° C.) or less. More preferably, it is 36 (ML 1 + 4 , 100 ° C.) or less. Usually, it is 3 (ML 1 + 4 , 100 ° C.) or more. If the Mooney viscosity of the base resin contained in the heat conductive sheet is not more than the above upper limit, the heat conductivity of the heat conductive sheet can be increased.
The Mooney viscosity of the base resin contained in the heat conductive sheet is prepared by dissolving the heat conductive sheet in a solvent capable of dissolving the base resin and then isolating the base resin to prepare a Mooney viscosity measurement sample. The obtained sample can be obtained by measuring (ML 1 + 4 , 100 ° C.) according to JIS-K6300. In addition, the Mooney viscosity value obtained in this way is, in principle, substantially the same as the Mooney viscosity value of the base resin at the material stage.
-樹脂の含有割合-
そして、本発明の熱伝導シート中の全樹脂成分の含有割合は、熱伝導シートの全体積を100体積%として、65体積%以下であることが好ましく、55体積%以下であることがより好ましく、50体積%以下であることがより好ましく、通常、30体積%以上である。熱伝導シート中の全樹脂成分の含有割合が上記上限値以下であれば、熱伝導シートにより高い熱伝導性を発揮させることができる。また、熱伝導シート中の全樹脂成分の含有割合が上記下限値以上であれば、熱伝導シートにより高い柔軟性を与え、発熱体と接した際の発熱体から熱伝導シートへの伝熱をより良好にすることができる。
-Resin content-
And the content rate of all the resin components in the heat conductive sheet of this invention is preferable that it is 65 volume% or less with the whole volume of a heat conductive sheet being 100 volume%, and it is more preferable that it is 55 volume% or less. , 50% by volume or less is more preferable, and usually 30% by volume or more. If the content rate of all the resin components in a heat conductive sheet is below the said upper limit, high heat conductivity can be exhibited with a heat conductive sheet. Moreover, if the content ratio of all resin components in the heat conductive sheet is equal to or higher than the above lower limit value, the heat conductive sheet is given high flexibility, and heat transfer from the heat generator to the heat conductive sheet when in contact with the heat generator is achieved. Can be better.
[添加剤]
本発明の熱伝導シートには、必要に応じて、熱伝導シートの製造に使用され得る既知の添加剤を配合することができる。そして、熱伝導シートに配合し得る添加剤としては、特に限定されることなく、例えば、脂肪酸エステルなどの可塑剤;赤リン系難燃剤、リン酸エステル系難燃剤などの難燃剤;フッ素オイル(ダイキン工業株式会社製のデムナムシリーズ)のように可塑剤と難燃剤とを兼ねる添加剤;ウレタンアクリレートなどの靭性改良剤;酸化カルシウム、酸化マグネシウムなどの吸湿剤;シランカップリング剤、チタンカップリング剤、酸無水物などの接着力向上剤;ノニオン系界面活性剤、フッ素系界面活性剤などの濡れ性向上剤;無機イオン交換体などのイオントラップ剤;等が挙げられる。
[Additive]
If necessary, the heat conductive sheet of the present invention can be blended with known additives that can be used for producing the heat conductive sheet. Additives that can be blended in the heat conductive sheet are not particularly limited, for example, plasticizers such as fatty acid esters; flame retardants such as red phosphorus flame retardants and phosphate ester flame retardants; fluorine oil ( Additives that serve as both plasticizers and flame retardants, such as Daikin Industries Ltd.'s demnam series; toughness improvers such as urethane acrylate; moisture absorbents such as calcium oxide and magnesium oxide; silane coupling agents, titanium couplings Agents, adhesive improvers such as acid anhydrides; wettability improvers such as nonionic surfactants and fluorosurfactants; ion trapping agents such as inorganic ion exchangers, and the like.
<性状>
[アスカーC硬度]
本発明の熱伝導シートは、アスカーC硬度が45以上であることが好ましく、55以上であることがより好ましく、60超であることが好ましい。アスカーC硬度が上記下限値以上であれば、熱伝導シートのハンドリング性を高めることができるからである。熱伝導シートのアスカーC硬度の値は、熱伝導シートに配合する粒子状炭素材の含有割合や、用いる樹脂成分を選択することで調節することができる。
従来、熱伝導シート自体の熱伝導率を高めるための一般的な方途として、粒子状炭素材等の熱伝導性材料の含有比率を高めるという手段が選択されてきた。熱伝導性材料の含有比率が高ければ、熱伝導シートが硬くなる傾向がある。ここで、従来は、熱伝導シートの硬度が、熱伝導シートと熱伝導シートが取り付けられた他の部材(発熱体や放熱体)との間の界面抵抗(以下、「部材間界面抵抗」とも称する)に影響するという前提の下に、硬度の指標としてアスカーC硬度が用いられてきた。そして、熱伝導シート自体の熱伝導率を高める一方で、アスカーC硬度が過剰に高くなることは抑制するようにバランスをとることで、熱伝導シートの熱伝導性を向上させる方途が種々検討されてきた。しかし、本発明者らが改めて検討したところ、熱伝導シートのアスカーC硬度と部材間界面抵抗との間には相関関係が無いことが明らかとなった。そして、更なる検討の結果、本発明者らは、ムーニー粘度が所定値以下である母材樹脂を配合することで、部材間界面抵抗も有利に抑制することができることを新たに見出した。更にまた、ムーニー粘度が所定値以下である母材樹脂を含有する熱伝導シートは、アスカーC硬度の値が適度であり、さらに、従来、アスカーC硬度との関係で想定されていたよりも高い熱伝導率を有していることが明らかとなった。
<Properties>
[Asker C hardness]
The heat conductive sheet of the present invention preferably has an Asker C hardness of 45 or more, more preferably 55 or more, and preferably over 60. This is because if the Asker C hardness is equal to or higher than the lower limit, the handling properties of the heat conductive sheet can be improved. The value of Asker C hardness of a heat conductive sheet can be adjusted by selecting the content rate of the particulate carbon material mix | blended with a heat conductive sheet, and the resin component to be used.
Conventionally, as a general method for increasing the thermal conductivity of the thermal conductive sheet itself, means for increasing the content ratio of the thermal conductive material such as the particulate carbon material has been selected. If the content ratio of the heat conductive material is high, the heat conductive sheet tends to be hard. Here, conventionally, the hardness of the heat conductive sheet is the interfacial resistance between the heat conductive sheet and another member (heat generating body or heat radiating body) to which the heat conductive sheet is attached (hereinafter referred to as “interfacial resistance between members”). Asker C hardness has been used as an indicator of hardness. And while increasing the thermal conductivity of the thermal conductive sheet itself, various ways to improve the thermal conductivity of the thermal conductive sheet have been studied by balancing so that the Asker C hardness is not excessively increased. I came. However, when the present inventors examined again, it became clear that there is no correlation between the Asker C hardness of the heat conductive sheet and the interfacial resistance between members. As a result of further studies, the present inventors have newly found that the interfacial resistance between members can be advantageously suppressed by blending a base material resin having a Mooney viscosity of a predetermined value or less. Furthermore, the heat conductive sheet containing the base material resin having a Mooney viscosity of a predetermined value or less has a moderate value of Asker C hardness, and has a higher heat than previously assumed in relation to Asker C hardness. It became clear that it had conductivity.
[熱伝導率]
本発明の熱伝導シートは、母材樹脂のムーニー粘度をX(ML1+4、100℃)、熱伝導シートの厚み方向の熱伝導率をYとした場合に、関係式:Y>(-2.6X+25)を満たすことが好ましく、関係式:Y>(-2.6X+42)を満たすことがより好ましく、関係式:Y>(-2.6X+120)を満たすことが更に好ましい。かかる関係式を指標として、熱伝導シートの目的とする熱伝導率から逆算して、母材樹脂として使用する樹脂材料を容易に選択することができ、熱伝導シートの製造効率を向上させることができる。また、反対に、使用予定の母材樹脂から、得られる熱伝導シートの熱伝導率を推定することができるため、熱伝導シートの設計効率を向上させることができる。
[Thermal conductivity]
In the heat conductive sheet of the present invention, when the Mooney viscosity of the base resin is X (ML 1 + 4 , 100 ° C.) and the heat conductivity in the thickness direction of the heat conductive sheet is Y, the relational expression: Y> (− 2.6X + 25) is preferable, relational expression: Y> (− 2.6X + 42) is more preferable, and relational expression: Y> (− 2.6X + 120) is more preferable. Using such a relational expression as an index, it is possible to easily select a resin material to be used as a base resin by calculating back from the target thermal conductivity of the thermal conductive sheet, and to improve the manufacturing efficiency of the thermal conductive sheet. it can. On the contrary, since the thermal conductivity of the obtained heat conductive sheet can be estimated from the base material resin to be used, the design efficiency of the heat conductive sheet can be improved.
より具体的には、熱伝導シートの熱伝導率は、19W/m・K以上であることが好ましく25W/m・K以上であることがより好ましく、35W/m・K以上であることが更に好ましい。熱伝導シートの熱伝導率が上記下限以上であれば、例えば、熱伝導シートと発熱体とを密着させて使用した場合、発熱体から熱を効率的に放散させることができるからである。 More specifically, the thermal conductivity of the heat conductive sheet is preferably 19 W / m · K or more, more preferably 25 W / m · K or more, and further preferably 35 W / m · K or more. preferable. This is because if the thermal conductivity of the heat conductive sheet is equal to or higher than the lower limit, for example, when the heat conductive sheet and the heating element are used in close contact, heat can be efficiently dissipated from the heating element.
[ムーニー粘度]
本発明の熱伝導シートは、ムーニー粘度(ML1+4、100℃)が、50(ML1+4、100℃)以下であることが好ましく、30(ML1+4、100℃)以下であることがより好ましく、通常、2(ML1+4、100℃)以上である。熱伝導シートのムーニー粘度が上記上限値以下であれば、高温条件下で熱伝導シートを使用した場合に、熱伝導シートと発熱体や放熱体等の熱伝導シートが取り付けられた部材との間の密着性を向上させて、放熱効率を高めることができると考えられる。
[Mooney viscosity]
The heat conductive sheet of the present invention preferably has a Mooney viscosity (ML 1 + 4 , 100 ° C.) of 50 (ML 1 + 4 , 100 ° C.) or less, and 30 (ML 1 + 4 , 100 ° C.) or less. More preferably, it is usually 2 (ML 1 + 4 , 100 ° C.) or more. If the Mooney viscosity of the heat conductive sheet is less than or equal to the above upper limit, when the heat conductive sheet is used under high temperature conditions, the heat conductive sheet and a member to which the heat conductive sheet such as a heating element or a heat radiator is attached It is considered that the heat radiation efficiency can be improved by improving the adhesion of the material.
[構造]
また、本発明の熱伝導シートは、上述した粒子状炭素材料及び樹脂成分、並びに任意の添加剤等を含んでなるプレ熱伝導シートが、厚み方向に対して横断方向に複数層積層されてなる構造を有する。さらに、プレ熱伝導シート内において、粒子状炭素材料はプレ熱伝導シートの面方向に沿って(プレ熱伝導シートの厚み方向に対して横断方向に)配向していることが好ましい。粒子状炭素材料がプレ熱伝導シートの面方向に沿って配向していれば、熱伝導シートの厚み方向の熱伝導率を高めることができるからである。そして、「熱伝導シートがプレ熱伝導シートを面方向に複数枚積層してスライスして得られた」という証拠は、例えば、熱伝導シートの厚み方向断面を顕微鏡観察する方法や、平面方向の熱伝導性に異方性があるか否かを判定する方法を使い、総合的に判断することが出来る。
[Construction]
The heat conductive sheet of the present invention is formed by laminating a plurality of pre-heat conductive sheets containing the above-mentioned particulate carbon material, resin component, and optional additives in a direction transverse to the thickness direction. It has a structure. Furthermore, in the pre-heat conductive sheet, the particulate carbon material is preferably oriented along the surface direction of the pre-heat conductive sheet (in a direction transverse to the thickness direction of the pre-heat conductive sheet). This is because if the particulate carbon material is oriented along the surface direction of the pre-heat conductive sheet, the thermal conductivity in the thickness direction of the heat conductive sheet can be increased. And the evidence that “the heat conductive sheet was obtained by laminating and slicing a plurality of pre-heat conductive sheets in the plane direction” is, for example, a method of microscopically observing a cross section in the thickness direction of the heat conductive sheet, A comprehensive determination can be made by using a method for determining whether or not there is anisotropy in thermal conductivity.
[厚み]
熱伝導シートの厚みは、特に限定されることなく、例えば、0.05mm以上10mm以下でありうる。一般に、熱伝導シートの厚みが厚すぎれば熱伝導シートの熱抵抗が高まるため熱伝導性が低下し、また、熱伝導シートの厚みを小さくし過ぎると熱伝導シートが有する熱伝導率を十分に活用することができなくなるからである。
[Thickness]
The thickness of a heat conductive sheet is not specifically limited, For example, it may be 0.05 mm or more and 10 mm or less. In general, if the thickness of the heat conductive sheet is too thick, the heat resistance of the heat conductive sheet increases and the thermal conductivity decreases, and if the thickness of the heat conductive sheet is too small, the thermal conductivity of the heat conductive sheet is sufficient. This is because it cannot be used.
さらに、ある厚みの熱伝導シートを厚み方向に複数枚重ね合わせて、所定の時間静置することによって一体化させたものを、熱伝導シートとして使用することもできる。このようにして得られた熱伝導シート内では、粒子状炭素材料及び任意の繊維状炭素材料が熱伝導シートの厚み方向に配向したままであると推察される。よって、複数枚の薄手の熱伝導シートを厚み方向に積層させて得た厚手(厚みx)の熱伝導シートの熱伝導性は、同じ厚さ(厚みx)の一枚の熱伝導シートと略同等の熱伝導率を有すると考えられる。このため、様々な厚みの熱伝導シートを準備することなく、所定の厚みの(薄手の)熱伝導シートを複数枚準備することで、熱伝導シートを適用したい箇所の厚みに応じた厚みの熱伝導シートを得ることができる。 Furthermore, a plurality of heat conductive sheets having a certain thickness stacked in the thickness direction and integrated by standing for a predetermined time can be used as the heat conductive sheet. In the heat conductive sheet thus obtained, it is presumed that the particulate carbon material and any fibrous carbon material remain oriented in the thickness direction of the heat conductive sheet. Therefore, the thermal conductivity of a thick (thickness x) thermal conductive sheet obtained by laminating a plurality of thin thermal conductive sheets in the thickness direction is substantially the same as that of a single thermal conductive sheet having the same thickness (thickness x). It is thought to have an equivalent thermal conductivity. For this reason, by preparing a plurality of (thin) heat conductive sheets of a predetermined thickness without preparing heat conductive sheets of various thicknesses, heat having a thickness corresponding to the thickness of the location where the heat conductive sheet is to be applied is prepared. A conductive sheet can be obtained.
(熱伝導シートの製造方法)
本発明の熱伝導シートを製造するための製造方法は、特に限定されることなく、プレ熱伝導シートが面方向に複数枚積層されてなる熱伝導シートの製造時に利用可能な製造方法を採用することができる。かかる製造方法としては、例えば、粒子状炭素材料及びムーニー粘度90(ML1+4、100℃)以下の母材樹脂を含有する複合混合物を準備する工程と、複合粒子を加圧してプレ熱伝導シートを得る工程と、プレ熱伝導シートの積層体を得る工程と、スライス工程とを含む製造方法が挙げられる。
(Method for producing heat conductive sheet)
The manufacturing method for manufacturing the heat conductive sheet of the present invention is not particularly limited, and a manufacturing method that can be used at the time of manufacturing a heat conductive sheet in which a plurality of pre-heat conductive sheets are laminated in the plane direction is adopted. be able to. As such a production method, for example, a step of preparing a composite mixture containing a particulate carbon material and a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less; The manufacturing method including the process of obtaining a sheet | seat, the process of obtaining the laminated body of a pre heat conductive sheet, and a slicing process is mentioned.
<複合混合物を準備する工程>
複合混合物を準備する工程では、粒子状炭素材料及び樹脂を含有する複合混合物を準備する。具体的には、複合混合物を準備する工程では、特に制限されることなく、粒子状炭素材料及びムーニー粘度90(ML1+4、100℃)以下の母材樹脂と、任意の繊維状炭素材料及び/または添加剤とを、既知の手法で複合化することにより複合混合物を準備してもよい。また、複合混合物を準備する工程では、粒子状炭素材料及びムーニー粘度90(ML1+4、100℃)以下の母材樹脂を含有する市販品の複合混合物を購入することにより準備してもよい。上記複合化することにより複合混合物を準備する場合には、より具体的には、例えば、以下の(I)~(III)の方法を用いることができる。
(I)粒子状炭素材料と、ムーニー粘度90(ML1+4、100℃)以下の母材樹脂と、任意の繊維状炭素材料及び/または添加剤とを混合、混練して複合混合物を得る。
(II)粒子状炭素材料と、ムーニー粘度90(ML1+4、100℃)以下の母材樹脂と、任意の繊維状炭素材料及び/または添加剤とを含む分散液を乾燥造粒して複合混合物を得る。
(III)粒子状炭素材料及び任意の繊維状炭素材料にムーニー粘度90(ML1+4、100℃)以下の母材樹脂などを噴霧して複合混合物を得る。
中でも、作業の容易性の観点から(I)の方法を用いることが望ましい。
なお、複合混合物を準備する工程で用いる粒子状炭素材料、ムーニー粘度90(ML1+4、100℃)以下の母材樹脂、任意の繊維状炭素材料及び/または添加剤としては、上述の熱伝導シートが含み得る粒子状炭素材料、ムーニー粘度90(ML1+4、100℃)以下の母材樹脂、任意の繊維状炭素材料及び/または添加剤と同じ成分を用いることができ、好適な含有割合も同様とすることができる。
<Step of preparing a composite mixture>
In the step of preparing the composite mixture, a composite mixture containing the particulate carbon material and the resin is prepared. Specifically, in the step of preparing the composite mixture, the particulate carbon material, the base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and any fibrous carbon material are not particularly limited. And / or a composite mixture may be prepared by combining with additives in a known manner. Moreover, in the step of preparing the composite mixture, the composite mixture may be prepared by purchasing a commercially available composite mixture containing a particulate carbon material and a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less. . In the case of preparing a composite mixture by combining the above, more specifically, for example, the following methods (I) to (III) can be used.
(I) A composite mixture is obtained by mixing and kneading a particulate carbon material, a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and any fibrous carbon material and / or additive. .
(II) Dry granulating a dispersion containing a particulate carbon material, a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and any fibrous carbon material and / or additive. A composite mixture is obtained.
(III) A base material resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less is sprayed on the particulate carbon material and any fibrous carbon material to obtain a composite mixture.
Among these, it is desirable to use the method (I) from the viewpoint of ease of work.
The particulate carbon material used in the step of preparing the composite mixture, the base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or lower, the optional fibrous carbon material and / or the additive include the above-mentioned heat The same components as the particulate carbon material that the conductive sheet can contain, the base resin with Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and any fibrous carbon material and / or additive can be used. The content ratio can be the same.
[混合、混練方法]
混合、混練方法としては、特に限定されることなく、ニーダー、ロール、ヘンシェルミキサー、ホバートミキサー等の既知の混合装置を用いて行うことができる。そして、混合、混練時間は、例えば5分以上6時間以下とすることができる。また、混合、混練温度は、例えば5℃以上150℃以下とすることができる。
ここで、混合、混練は、酢酸エチル等の溶媒の存在下で行ってもよいが、混合、混練時に溶媒を用いる場合には、後述する複合混合物の解砕/粉砕に先立って溶媒を除去することが好ましい。溶媒の除去は既知の乾燥方法にて行ってもよく、複合混合物を任意に脱泡しながら行ってもよい。例えば、真空脱泡を用いて脱泡を行えば、脱泡時に溶媒の除去も同時に行うことができる。
[Mixing and kneading method]
The mixing and kneading method is not particularly limited, and can be performed using a known mixing apparatus such as a kneader, roll, Henschel mixer, Hobart mixer or the like. And mixing and kneading | mixing time can be made into 5 hours or more and 6 hours or less, for example. Moreover, mixing and kneading | mixing temperature can be made into 5 to 150 degreeC, for example.
Here, mixing and kneading may be performed in the presence of a solvent such as ethyl acetate. However, when a solvent is used during mixing and kneading, the solvent is removed prior to crushing / pulverizing the composite mixture described later. It is preferable. The removal of the solvent may be performed by a known drying method, or may be performed while arbitrarily defoaming the composite mixture. For example, if defoaming is performed using vacuum defoaming, the solvent can be removed simultaneously with defoaming.
[複合混合物]
そして、得られる複合混合物は粒子状炭素材料及びムーニー粘度90(ML1+4、100℃)以下の母材樹脂を含み、任意に繊維状炭素材料及び添加剤を更に含む。また、複合混合物は、通常、直径1mm~200mm程度の塊状体である。
[Composite mixture]
The resulting composite mixture includes a particulate carbon material and a base resin having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less, and optionally further includes a fibrous carbon material and an additive. The composite mixture is usually a lump having a diameter of about 1 mm to 200 mm.
任意で、複合混合筒を粒子状に粉砕する粉砕工程を実施しても良い。この場合、粉砕工程では、得られた複合混合物を任意の方法で粉砕して複合粒子を得る。また、複合粒子を得る工程では、得られた複合混合物を粉砕した後に任意の方法で分級を行って複合粒子を得てもよい。 Optionally, a pulverization step of pulverizing the composite mixing cylinder into particles may be performed. In this case, in the pulverization step, the obtained composite mixture is pulverized by an arbitrary method to obtain composite particles. In the step of obtaining composite particles, the obtained composite mixture may be pulverized and then classified by any method to obtain composite particles.
複合混合物の粉砕は、得られる複合粒子が複合混合物の塊状体よりも粉流体となっていれば特に限定されることなく、既知の方法で行うことができる。また、粉砕に先立ち、塊状体をほぐす解砕などを行っても良い。そして、複合混合物の解砕/粉砕は、例えば、せん断作用や摩砕作用を利用した既知の解砕/粉砕機または撹拌式の既知の解砕/粉砕機等を用いて行うことができる。上述した既知の解砕/粉砕機としては、例えば、ハンマークラッシャー、カッターミル、ハンマーミル、ビーズミル、振動ミル、流星型ボールミル、サンドミル、ボールミル、ロールミル、三本ロールミル、ジェットミル、高速回転式粉砕機、微粉砕機・解砕整粒機、ナノジェットマイザー等を挙げることができる。
これらの解砕/粉砕機の種類、解砕/粉砕に際してのエネルギー、時間などの条件は、複合混合物の塊状体の状態、複合粒子の粒子径などの所望の粉流体状態に合わせて適宜選択、調整すればよい。
The pulverization of the composite mixture can be performed by a known method without particular limitation as long as the obtained composite particles are a powder fluid rather than a lump of the composite mixture. Prior to pulverization, pulverization or the like for loosening the lump may be performed. The complex mixture can be pulverized / pulverized using, for example, a known pulverization / pulverization machine utilizing a shearing action or an attrition action or an agitated known pulverization / pulverization machine. Examples of the known crushing / pulverizing machine include a hammer crusher, a cutter mill, a hammer mill, a bead mill, a vibration mill, a meteor ball mill, a sand mill, a ball mill, a roll mill, a three-roll mill, a jet mill, and a high-speed rotary pulverizer. , A fine pulverizer, a pulverizing and sizing machine, and a nano jet mizer.
The conditions such as the type of the crushing / pulverizing machine, energy during crushing / crushing, and time are appropriately selected according to the state of the aggregate of the composite mixture, the desired powder fluid state such as the particle size of the composite particles, Adjust it.
ここで、複合混合物は、特に制限されることなく、ふるい分級で1000μm未満の粒子径にまで粉砕されることが好ましい。 Here, the composite mixture is not particularly limited and is preferably pulverized to a particle size of less than 1000 μm by sieve classification.
<プレ熱伝導シートを得る工程>
プレ熱伝導シートを得る工程では、前工程で得られた複合混合物又は複合粒子を任意の方法で加圧してシート状に成形する。
<Step of obtaining a pre-heat conductive sheet>
In the step of obtaining the pre-heat conductive sheet, the composite mixture or composite particles obtained in the previous step are pressed by an arbitrary method and formed into a sheet shape.
[加圧方法]
プレ熱伝導シートの加圧方法は、圧力が負荷される成形方法であれば特に限定されない。プレ熱伝導シートは、例えば、プレス成形、圧延成形または押し出し成形などの既知の成形方法を用いてシート状に成形することができる。中でも、熱伝導シートは、圧延成形によりシート状に成形することが好ましく、保護フィルムに挟んだ状態でロール間を通過させてシート状に成形することがより好ましい。なお、保護フィルムとしては、特に限定されることなく、サンドブラスト処理を施したポリエチレンテレフタレート(PET)フィルム等を用いることができる。また、ロール温度は5℃以上150℃とすることができる。
[Pressurization method]
The method for pressurizing the pre-heat conductive sheet is not particularly limited as long as it is a molding method in which pressure is applied. The pre-heat conductive sheet can be formed into a sheet shape by using a known forming method such as press forming, rolling forming or extrusion forming. Especially, it is preferable to shape | mold a heat conductive sheet in a sheet form by rolling, and it is more preferable to pass between rolls in the state pinched | interposed into the protective film, and to shape | mold into a sheet form. In addition, as a protective film, it does not specifically limit, The polyethylene terephthalate (PET) film etc. which performed the sandblast process can be used. The roll temperature can be 5 ° C. or more and 150 ° C.
なお、プレ熱伝導シートの厚みは、特に限定されることなく、例えば、0.05mm以上2mm以下とすることができる。また、プレ熱伝導シートの熱伝導性を高めて熱伝導シートの熱伝導性を向上させる観点からは、プレ熱伝導シートの厚みは、粒子状炭素材料の平均粒子径の5000倍以下であることが好ましい。 In addition, the thickness of a pre heat conductive sheet is not specifically limited, For example, it can be 0.05 mm or more and 2 mm or less. Further, from the viewpoint of improving the thermal conductivity of the heat conductive sheet by increasing the heat conductivity of the pre heat conductive sheet, the thickness of the pre heat conductive sheet is not more than 5000 times the average particle diameter of the particulate carbon material. Is preferred.
<積層体を得る工程>
積層体を得る工程では、前工程で得たプレ熱伝導シートを、プレ熱伝導シートの厚み方向に複数枚積層して、或いは、前工程で得たプレ熱伝導シートを折畳または捲回することにより、積層体を形成する。
<Step of obtaining a laminate>
In the step of obtaining a laminate, a plurality of the pre-heat conductive sheets obtained in the previous step are laminated in the thickness direction of the pre-heat conductive sheet, or the pre-heat conductive sheet obtained in the previous step is folded or wound. Thereby, a laminated body is formed.
[積層方法]
プレ熱伝導シートの積層による積層体の形成は、特に限定されることなく、積層装置を用いて行ってもよく、手作業にて行ってもよい。また、プレ熱伝導シートの折畳による積層体の形成は、特に限定されることなく、折畳機を用いて熱伝導一次シートを一定幅で折り畳むことにより行うことができる。さらに、プレ熱伝導シートの捲回による積層体の形成は、特に限定されることなく、プレ熱伝導シートの短手方向または長手方向に平行な軸の回りにプレ熱伝導シートを捲き回すことにより行うことができる。
[Lamination method]
Formation of the laminated body by lamination | stacking of a pre heat conductive sheet is not specifically limited, You may carry out using a lamination apparatus, and may carry out manually. Moreover, formation of the laminated body by folding of a pre heat conductive sheet is not specifically limited, It can carry out by folding a heat conductive primary sheet by fixed width using a folder. Further, the formation of the laminate by winding the pre-heat conductive sheet is not particularly limited, and by rolling the pre-heat conductive sheet around an axis parallel to the short direction or the long direction of the pre-heat conductive sheet. It can be carried out.
ここで、通常、積層体を得る工程において、プレ熱伝導シートの表面同士の接着力は、プレ熱伝導シートを積層する際の圧力や折畳または捲回する際の圧力により充分に得られる。しかし、接着力が不足する場合や、積層体の層間剥離を十分に抑制する必要がある場合には、プレ熱伝導シートの表面を溶剤で若干溶解させた状態で積層体を形成してもよいし、プレ熱伝導シートの表面に接着剤を塗布した状態またはプレ熱伝導シートの表面に接着層を設けた状態で積層体を形成してもよい。 Here, usually, in the step of obtaining the laminate, the adhesive force between the surfaces of the pre-heat conductive sheets is sufficiently obtained by the pressure when the pre-heat conductive sheets are laminated and the pressure when folding or winding. However, when the adhesive strength is insufficient or when it is necessary to sufficiently suppress delamination of the laminate, the laminate may be formed in a state where the surface of the pre-heat conductive sheet is slightly dissolved with a solvent. Then, the laminate may be formed in a state where an adhesive is applied to the surface of the pre-heat conductive sheet or in a state where an adhesive layer is provided on the surface of the pre-heat conductive sheet.
なお、プレ熱伝導シートの表面を溶解させる際に用いる溶剤としては、特に限定されることなく、プレ熱伝導シート中に含まれている樹脂成分を溶解可能な既知の溶剤を用いることができる。 In addition, as a solvent used when melt | dissolving the surface of a pre heat conductive sheet, it is not specifically limited, The known solvent which can melt | dissolve the resin component contained in the pre heat conductive sheet can be used.
また、プレ熱伝導シートの表面に塗布する接着剤としては、特に限定されることなく、市販の接着剤や粘着性の樹脂を用いることができる。中でも、接着剤としては、プレ熱伝導シート中に含まれている樹脂成分と同じ組成の樹脂を用いることが好ましい。そして、プレ熱伝導シートの表面に塗布する接着剤の厚みは、例えば、10μm以上1000μm以下とすることができる。
更に、プレ熱伝導シートの表面に設ける接着層としては、特に限定されることなく、両面テープなどを用いることができる。
Moreover, it does not specifically limit as an adhesive agent apply | coated to the surface of a pre heat conductive sheet, A commercially available adhesive agent and adhesive resin can be used. Among these, as the adhesive, it is preferable to use a resin having the same composition as the resin component contained in the pre-heat conductive sheet. And the thickness of the adhesive agent apply | coated to the surface of a pre heat conductive sheet can be 10 micrometers or more and 1000 micrometers or less, for example.
Furthermore, the adhesive layer provided on the surface of the pre-heat conductive sheet is not particularly limited, and a double-sided tape or the like can be used.
なお、層間剥離を抑制する観点からは、得られた積層体は、積層方向に0.05MPa以上1.0MPa以下の圧力で押し付けながら、20℃以上150℃以下で1分以上30分以下の間プレスすることが好ましい。 In addition, from the viewpoint of suppressing delamination, the obtained laminate is pressed at a pressure of 0.05 MPa or more and 1.0 MPa or less in the stacking direction at 20 ° C. or more and 150 ° C. or less for 1 minute or more and 30 minutes or less It is preferable to press.
なお、プレ熱伝導シートを積層、折畳または捲回して得られる積層体では、粒子状炭素材料及び任意の繊維状炭素材料が積層方向に略直交する方向に配向していると推察される。 In addition, in the laminated body obtained by laminating, folding, or winding the pre-heat conductive sheet, it is assumed that the particulate carbon material and any fibrous carbon material are oriented in a direction substantially orthogonal to the laminating direction.
<スライス工程>
また、スライス工程では、上述の工程で得られた積層体を、積層方向に対して45°以下の角度でスライスすることにより、積層体のスライス片よりなる熱伝導シートを得る。
<Slicing process>
In the slicing step, the laminated body obtained in the above-described step is sliced at an angle of 45 ° or less with respect to the laminating direction to obtain a heat conductive sheet composed of sliced pieces of the laminated body.
[スライス方法]
積層体をスライスする方法としては、特に限定されることなく、例えば、マルチブレード法、レーザー加工法、ウォータージェット法、ナイフ加工法等が挙げられる。中でも、熱伝導シートの厚みを均一にし易い点で、ナイフ加工法が好ましい。また、積層体をスライスする際の切断具としては、特に限定されることなく、スリットを有する平滑な盤面と、このスリット部より突出した刃部とを有するスライス部材(例えば、鋭利な刃を備えたカンナやスライサー)を用いることができる。
[Slicing method]
The method for slicing the laminate is not particularly limited, and examples thereof include a multi-blade method, a laser processing method, a water jet method, and a knife processing method. Especially, the knife processing method is preferable at the point which makes the thickness of a heat conductive sheet uniform. The cutting tool for slicing the laminate is not particularly limited, and includes a slice member (for example, a sharp blade) having a smooth board surface having a slit and a blade portion protruding from the slit portion. Canna and slicer) can be used.
なお、熱伝導シートの熱伝導性を高める観点からは、積層体をスライスする角度は、積層方向に対して30°以下であることが好ましく、積層方向に対して15°以下であることがより好ましく、積層方向に対して略0°である(即ち、積層方向に沿う方向である)ことが好ましい。 In addition, from the viewpoint of increasing the thermal conductivity of the heat conductive sheet, the angle at which the laminate is sliced is preferably 30 ° or less with respect to the stacking direction, and more preferably 15 ° or less with respect to the stacking direction. Preferably, it is approximately 0 ° with respect to the stacking direction (that is, the direction along the stacking direction).
また、積層体を容易にスライスする観点からは、スライスする際の積層体の温度は-20℃以上40℃以下とすることが好ましく、10℃以上30℃以下とすることがより好ましい。更に、同様の理由により、スライスする積層体は、積層方向とは垂直な方向に圧力を負荷しながらスライスすることが好ましく、積層方向とは垂直な方向に0.1MPa以上0.5MPa以下の圧力を負荷しながらスライスすることがより好ましい。 Further, from the viewpoint of easily slicing the laminate, the temperature of the laminate during slicing is preferably −20 ° C. or more and 40 ° C. or less, and more preferably 10 ° C. or more and 30 ° C. or less. Furthermore, for the same reason, the laminated body to be sliced is preferably sliced while applying a pressure in a direction perpendicular to the lamination direction, and a pressure of 0.1 MPa to 0.5 MPa in the direction perpendicular to the lamination direction. It is more preferable to slice while loading.
そして、上述したような製造方法に従って得られる熱伝導シートは、積層体を得る工程及びスライス工程を経て成形されているため、粒子状炭素材料及び任意の繊維状炭素材料が熱伝導シートの厚み方向に配向していると推察される。従って、例えば、発熱体と熱伝導シートとを良好に密着させることにより、発熱体から生じた熱を熱伝導シートの厚み方向へと効率的に放散させることができる。 And since the heat conductive sheet obtained according to the manufacturing method as described above is formed through a step of obtaining a laminate and a slicing step, the particulate carbon material and any fibrous carbon material are in the thickness direction of the heat conductive sheet. It is presumed that they are oriented. Therefore, for example, the heat generated from the heat generating element can be efficiently dissipated in the thickness direction of the heat conductive sheet by satisfactorily adhering the heat generating element and the heat conductive sheet.
(熱伝導シートの用途)
そして、本発明の製造方法に従って得られる熱伝導シートは熱伝導性に優れ、通常、強度及び導電性にも優れている。従って、当該熱伝導シートは、例えば、各種機器及び装置などにおいて使用される放熱材料、放熱部品、冷却部品、温度調節部品、電磁波シールド部材、電磁波吸収部材、被圧着物を加熱圧着する場合に被圧着物と加熱圧着装置との間に介在させる熱圧着用ゴムシートとして好適である。
ここで、各種機器及び装置などとしては、特に限定されることなく、サーバー、サーバー用パソコン、デスクトップパソコン等の電子機器;ノートパソコン、電子辞書、PDA、携帯電話、ポータブル音楽プレイヤー等の携帯電子機器;液晶ディスプレイ(バックライトを含む)、プラズマディスプレイ、LED、有機EL、無機EL、液晶プロジェクタ、時計等の表示機器;インクジェットプリンタ(インクヘッド)、電子写真装置(現像装置、定着装置、ヒートローラ、ヒートベルト)等の画像形成装置;半導体素子、半導体パッケージ、半導体封止ケース、半導体ダイボンディング、CPU、メモリ、パワートランジスタ、パワートランジスタケース等の半導体関連部品;リジッド配線板、フレキシブル配線板、セラミック配線板、ビルドアップ配線板、多層基板等の配線基板(配線板にはプリント配線板なども含まれる);真空処理装置、半導体製造装置、表示機器製造装置等の製造装置;断熱材、真空断熱材、輻射断熱材等の断熱装置;DVD(光ピックアップ、レーザー発生装置、レーザー受光装置)、ハードディスクドライブ等のデータ記録機器;カメラ、ビデオカメラ、デジタルカメラ、デジタルビデオカメラ、顕微鏡、CCD等の画像記録装置;充電装置、リチウムイオン電池、燃料電池等のバッテリー機器等が挙げられる。
(Use of heat conduction sheet)
And the heat conductive sheet obtained according to the manufacturing method of this invention is excellent in heat conductivity, and is generally excellent also in intensity | strength and electroconductivity. Therefore, for example, the heat conductive sheet is applied when heat-pressing heat-dissipating materials, heat-dissipating parts, cooling parts, temperature-adjusting parts, electromagnetic wave shielding members, electromagnetic wave absorbing members, and objects to be bonded used in various devices and devices. It is suitable as a thermocompression-bonding rubber sheet interposed between the press-bonded product and the thermocompression bonding apparatus.
Here, various devices and devices are not particularly limited, and are electronic devices such as servers, server personal computers, desktop personal computers, etc .; portable electronic devices such as notebook personal computers, electronic dictionaries, PDAs, mobile phones, and portable music players. Liquid crystal display (including backlight), plasma display, LED, organic EL, inorganic EL, liquid crystal projector, display device such as clock; ink jet printer (ink head), electrophotographic device (developing device, fixing device, heat roller, Image forming apparatuses such as heat belts; semiconductor-related components such as semiconductor elements, semiconductor packages, semiconductor encapsulating cases, semiconductor die bonding, CPUs, memories, power transistors, power transistor cases; rigid wiring boards, flexible wiring boards, ceramic wirings Board, bi Wiring boards such as doup-up wiring boards and multilayer boards (wiring boards include printed wiring boards); manufacturing equipment such as vacuum processing equipment, semiconductor manufacturing equipment, display equipment manufacturing equipment; heat insulating materials, vacuum heat insulating materials, radiation heat insulating materials Thermal insulation equipment for materials, etc .; DVD (optical pickup, laser generator, laser receiver), data recording equipment such as hard disk drive, etc .; Camera, video camera, digital camera, digital video camera, microscope, CCD, etc. image recording equipment; Examples thereof include battery devices such as devices, lithium ion batteries, and fuel cells.
以下、本発明について実施例に基づき具体的に説明するが、本発明はこれら実施例に限定されるものではない。なお、以下の説明において、量を表す「部」は、特に断らない限り、質量基準である。
そして、実施例及び比較例において、母材樹脂のムーニー粘度及び熱伝導シートのムーニー粘度;熱伝導シート中の粒子状炭素材料の含有割合及び体積基準モード径;熱伝導シートのアスカーC硬度;熱伝導シートの熱伝導率;は、それぞれ以下の方法を使用して測定、算出した。
EXAMPLES Hereinafter, although this invention is demonstrated concretely based on an Example, this invention is not limited to these Examples. In the following description, “parts” representing amounts are based on mass unless otherwise specified.
In Examples and Comparative Examples, the Mooney viscosity of the base resin and the Mooney viscosity of the heat conductive sheet; the content of the particulate carbon material in the heat conductive sheet and the volume standard mode diameter; the Asker C hardness of the heat conductive sheet; The thermal conductivity of the conductive sheet was measured and calculated using the following methods.
<ムーニー粘度>
熱伝導シートの製造に用いる母材樹脂のムーニー粘度は、母材樹脂から切片を切り出し、ムーニー粘度計(島津製作所製、「MOONEY VISCOMETER SMV-202」)を用いて、JIS-K6300に従い(ML1+4,100℃)を測定した。
得られた熱伝導シートについても同様の切片を切り出し、同様にして測定した。
<Mooney viscosity>
The Mooney viscosity of the base material resin used for the production of the heat conductive sheet is cut out from the base material resin and cut according to JIS-K6300 using a Mooney viscometer (manufactured by Shimadzu Corporation, “MOONEY VISCOMETER SMV-202”) (ML 1 +4 , 100 ° C.).
A similar section was cut out from the obtained heat conductive sheet and measured in the same manner.
<粒子状炭素材料の含有割合>
熱伝導シート中の粒子状炭素材料の含有割合には、体積分率での理論値を用いた。具体的には、熱伝導シートに含まれる粒子状炭素材料、樹脂、並びに任意の繊維状炭素材料及び添加剤の各成分について、密度(g/cm3)と配合量(g)とから体積(cm3)を算出し、熱伝導シート中の粒子状炭素材料の含有割合を体積分率(体積%)で求めた。
<Content ratio of particulate carbon material>
The theoretical value in the volume fraction was used for the content ratio of the particulate carbon material in the heat conductive sheet. Specifically, for each component of the particulate carbon material, the resin, and any fibrous carbon material and additive contained in the heat conductive sheet, the volume (from the density (g / cm 3 ) and the blending amount (g) ( cm 3 ) was calculated, and the content ratio of the particulate carbon material in the heat conductive sheet was determined as a volume fraction (volume%).
<熱伝導シート中の粒子状炭素材料の体積基準モード径>
熱伝導シート1gをメチルエチルケトン溶媒中に入れ、樹脂成分を溶解することにより、粒子状炭素材料を分離分散させた懸濁液を得た。次に、得られた懸濁液を試料とし、レーザー回折/散乱式粒子径分布測定装置(堀場製作所製、型式「LA960」)を用いて、懸濁液に含まれる粒子状炭素材料の粒子径を測定した。そして、得られた粒子径を横軸とし、粒子状炭素材料の体積を縦軸とした粒子径分布曲線の極大値における粒子径を体積基準モード径(μm)として求めた。
<Volume-based mode diameter of particulate carbon material in heat conductive sheet>
1 g of the heat conductive sheet was placed in a methyl ethyl ketone solvent, and the resin component was dissolved to obtain a suspension in which the particulate carbon material was separated and dispersed. Next, using the obtained suspension as a sample, the particle size of the particulate carbon material contained in the suspension is measured using a laser diffraction / scattering particle size distribution measuring apparatus (Horiba, Model “LA960”). Was measured. Then, the particle diameter at the maximum value of the particle diameter distribution curve with the obtained particle diameter as the horizontal axis and the volume of the particulate carbon material as the vertical axis was determined as the volume standard mode diameter (μm).
<熱伝導シートのアスカーC硬度>
日本ゴム協会規格(SRIS)のアスカーC法に準拠し、硬度計(高分子計器社製、商品名「ASKER CL-150LJ」を使用して温度23℃で測定した。
具体的には、幅30mm×長さ60mm×厚さ1.0mmの大きさに調製した熱伝導シートの試験片を6枚重ね合わせ、23℃で保たれた恒温室に48時間以上静置したものを試料としてアスカーC硬度を測定した。そして、指針が95~98となるようにダンパー高さを調整し、試料とダンパーとが衝突してから20秒後の硬度を5回測定して、その平均値を試料のアスカーC硬度とした。
<Asker C hardness of heat conductive sheet>
In accordance with the Asker C method of the Japan Rubber Association Standard (SRIS), the hardness was measured at a temperature of 23 ° C. using a hardness meter (trade name “ASKER CL-150LJ” manufactured by Kobunshi Keiki Co., Ltd.).
Specifically, six heat conductive sheet test pieces prepared to have a size of width 30 mm × length 60 mm × thickness 1.0 mm were stacked and left in a temperature-controlled room maintained at 23 ° C. for 48 hours or more. Asker C hardness was measured using a sample. Then, the height of the damper was adjusted so that the pointer was 95 to 98, and the hardness 20 seconds after the sample and the damper collided was measured five times, and the average value was taken as the Asker C hardness of the sample. .
<熱伝導シートの熱伝導率>
熱伝導シートの熱伝導率を算出するに当たり、まず、樹脂材料熱抵抗試験器(日立テクノロジーアンドサービス製、商品名「C47108」)を使用して、熱抵抗値を測定した。測定にあたり、熱伝導シートを1cm角に切り出して測定試料とした。そして、試験温度50℃、圧力0.50MPaの条件下における測定試料の熱抵抗値Rを測定した。熱抵抗値Rが小さい程、熱伝導性に優れ、発熱体と放熱体との間に介在させて放熱装置とする際の放熱特性に優れていることを示す。
そして、得られた熱抵抗値Rと加圧後の熱伝導シートの厚dみから、下式に従って、熱伝導率を算出した。
熱伝導率[W/m・K]=熱伝導シートの厚みd[m]/熱抵抗値R[m2・K/W]・・・(I)
<Thermal conductivity of thermal conductive sheet>
In calculating the thermal conductivity of the thermal conductive sheet, first, the thermal resistance value was measured using a resin material thermal resistance tester (trade name “C47108” manufactured by Hitachi Technology & Service Co., Ltd.). In the measurement, the heat conductive sheet was cut into a 1 cm square and used as a measurement sample. Then, the thermal resistance value R of the measurement sample under the conditions of a test temperature of 50 ° C. and a pressure of 0.50 MPa was measured. It shows that it is excellent in thermal conductivity, and is excellent in the thermal radiation characteristic when it interposes between a heat generating body and a heat radiator as a heat resistance value R, and is set as a heat radiating device.
And thermal conductivity was computed from the obtained thermal resistance value R and thickness d of the heat conductive sheet after pressurization according to the following formula.
Thermal conductivity [W / m · K] = thickness d [m] of thermal conductive sheet / thermal resistance value R [m 2 · K / W] (I)
(実施例1)
<CNTを含む繊維状の炭素ナノ構造体の調製>
国際公開第2006/011655号の記載に従って、スーパーグロース法によってSGCNTを含む繊維状の炭素ナノ構造体を得た。
得られた繊維状の炭素ナノ構造体はBET比表面積が800m2/gであった。また、透過型電子顕微鏡を用い、無作為に選択した100本の繊維状の炭素ナノ構造体の直径を測定した結果、平均直径(Av)が3.3nm、直径の標本標準偏差(σ)に3を乗じた値(3σ)が1.9nm、それらの比(3σ/Av)が0.58であった。また、得られた繊維状の炭素ナノ構造体は、主に単層CNT(「SGCNT」とも称する)により構成されていた。
Example 1
<Preparation of fibrous carbon nanostructure containing CNT>
According to the description of WO 2006/011655, fibrous carbon nanostructures containing SGCNTs were obtained by the super-growth method.
The obtained fibrous carbon nanostructure had a BET specific surface area of 800 m 2 / g. In addition, as a result of measuring the diameter of 100 randomly selected fibrous carbon nanostructures using a transmission electron microscope, the average diameter (Av) was 3.3 nm, and the sample standard deviation (σ) of the diameter was The value (3σ) multiplied by 3 was 1.9 nm, and the ratio (3σ / Av) was 0.58. Further, the obtained fibrous carbon nanostructure was mainly composed of single-walled CNT (also referred to as “SGCNT”).
<繊維状の炭素ナノ構造体の易分散性集合体の調製>
[分散液の調製]
繊維状炭素材料としての、上述で得られた繊維状の炭素ナノ構造体を400mg量り取り、溶媒としてのメチルエチルケトン2L中に混ぜ、ホモジナイザーにより2分間撹拌し、粗分散液を得た。次に、湿式ジェットミル(株式会社常光製、製品名「JN-20」)を使用し、得られた粗分散液を湿式ジェットミルの0.5mmの流路に100MPaの圧力で2サイクル通過させて、繊維状炭素ナノ構造体をメチルエチルケトンに分散させた。そして、固形分濃度0.20質量%の分散液を得た。
[溶媒の除去]
その後、上述で得られた分散液をキリヤマろ紙(No.5A)を用いて減圧ろ過し、シート状の易分散性集合体を得た。
<Preparation of an easily dispersible assembly of fibrous carbon nanostructures>
[Preparation of dispersion]
400 mg of the fibrous carbon nanostructure obtained above as a fibrous carbon material was weighed, mixed in 2 L of methyl ethyl ketone as a solvent, and stirred for 2 minutes with a homogenizer to obtain a crude dispersion. Next, using a wet jet mill (product name “JN-20”, manufactured by Joko Co., Ltd.), the obtained coarse dispersion was passed through a 0.5 mm flow path of the wet jet mill at a pressure of 100 MPa for two cycles. Then, the fibrous carbon nanostructure was dispersed in methyl ethyl ketone. And the dispersion liquid of solid content concentration 0.20 mass% was obtained.
[Removal of solvent]
Thereafter, the dispersion obtained above was filtered under reduced pressure using Kiriyama filter paper (No. 5A) to obtain a sheet-like easily dispersible aggregate.
<熱伝導シートの製造>
[複合混合物を準備する工程]
粒子状炭素材料としての膨張化黒鉛(伊藤黒鉛工業社製、商品名「EC-50」、平均粒子径:250μm)を130部と、繊維状炭素材料としての炭素ナノ構造体の易分散性集合体(表中、「SGCNT」と表記する)を0.1部と、全樹脂成分である母材樹脂としての常温常圧下で固体の熱可塑性フッ素樹脂(スリーエムジャパン社製、商品名「Dyneon(登録商標)E-20575」、ムーニー粘度:3.5ML1+4、100℃)を80部と、難燃剤としてのリン酸エステル(大八化学工業社製、商品名「PX-110」)を10部とを、ニーダー(井上製作所製)を用いて15分間撹拌しながら混合、混練することにより、粒子状炭素材料、母材樹脂、繊維状炭素材料及び難燃剤を含有する複合混合物を得た。
[複合粒子を得る工程]
次に、上述で得られた複合混合物を粉砕機(三庄インダストリー社製、製品名「ハンマークラッシャーHN34S」)に投入し、60秒間粉砕することにより、粒子状炭素材料、母材樹脂、繊維状炭素材料及び難燃剤を含有する複合粒子を得た。
[プレ熱伝導シートを得る工程]
続いて、上述で得られた複合粒子5gを、サンドブラスト処理を施した厚み50μmのPETフィルム(保護フィルム)で挟み、ロール間隙550μm、ロール温度50℃、ロール線圧50kg/cm、ロール速度1m/分の条件にて圧延成形することにより、厚み0.5mmのプレ熱伝導シートを得た。
[積層体を得る工程]
また、上述で得られたプレ熱伝導シートを縦6cm×横6cm×厚み0.5mmに裁断し、接着層である両面テープを介して厚み方向に120枚積層し、厚みが約6cmの積層体を得た。
[スライス工程]
そして、上記積層体の積層断面を、0.3MPaの圧力で押し付けながら、木工用スライサー(丸仲鐵工所製、商品名「超仕上げかんな盤スーパーメカS」)を用いて、積層方向に対して0度の角度でスライス(換言すれば、積層された熱伝導一次シートの主面の法線方向にスライス)し、縦6cm×横6cm×厚み150μmの熱伝導シートを得た。ここで、木工用スライサーのナイフは、2枚の片刃が、切刃の反対側同士で接触し、表刃の刃先の最先端が裏刃の刃先の最先端よりも0.5mm高くスリット部からの突出長さ0.11mmに配置され、表刃の刃角22°である2枚刃のものを用いた。
得られた熱伝導シートについて、ムーニー粘度、粒子状炭素材料の体積基準モード径、アスカーC硬度、及び熱伝導率を上述の方法にて測定した。結果を表1に示す。
<Manufacture of heat conductive sheet>
[Step of preparing a composite mixture]
130 parts of expanded graphite as a particulate carbon material (trade name “EC-50”, average particle diameter: 250 μm, manufactured by Ito Graphite Industries Co., Ltd.) and an easily dispersible assembly of carbon nanostructures as a fibrous carbon material 0.1 parts of the body (indicated in the table as “SGCNT”), a thermoplastic fluororesin that is solid under normal temperature and normal pressure as a base resin that is a resin component (manufactured by 3M Japan, trade name “Dyneon ( (Registered trademark) E-20575 ", Mooney viscosity: 3.5ML 1 + 4 , 100 ° C) 80 parts, and phosphoric acid ester as a flame retardant (trade name" PX-110 "manufactured by Daihachi Chemical Industry Co., Ltd.) By mixing and kneading 10 parts with a kneader (manufactured by Inoue Seisakusho) for 15 minutes, a composite mixture containing a particulate carbon material, a base resin, a fibrous carbon material, and a flame retardant was obtained. .
[Step of obtaining composite particles]
Next, the composite mixture obtained above is put into a pulverizer (manufactured by Sansho Industry Co., Ltd., product name “hammer crusher HN34S”) and pulverized for 60 seconds, whereby particulate carbon material, base resin, fibrous form Composite particles containing a carbon material and a flame retardant were obtained.
[Step of obtaining pre-heat conductive sheet]
Subsequently, 5 g of the composite particles obtained above were sandwiched between sandblasted PET films (protective film) having a thickness of 50 μm, a roll gap of 550 μm, a roll temperature of 50 ° C., a roll linear pressure of 50 kg / cm, and a roll speed of 1 m / A pre-heat conductive sheet having a thickness of 0.5 mm was obtained by rolling under the condition of minutes.
[Step of obtaining laminated body]
Further, the pre-heat conductive sheet obtained above is cut into a length of 6 cm, a width of 6 cm, and a thickness of 0.5 mm, and 120 sheets are laminated in the thickness direction via a double-sided tape as an adhesive layer, and a laminate having a thickness of about 6 cm. Got.
[Slicing process]
Then, while pressing the laminated section of the laminate at a pressure of 0.3 MPa, using a woodworking slicer (manufactured by Marunaka Steel Works, trade name “Super-finished plane super mechanism S”) with respect to the lamination direction Then, it was sliced at an angle of 0 ° (in other words, sliced in the normal direction of the main surface of the laminated heat conductive primary sheet) to obtain a heat conductive sheet 6 cm long × 6 cm wide × 150 μm thick. Here, the knife of the woodworking slicer has two single blades in contact with each other on the opposite sides of the cutting blade, and the leading edge of the front edge is 0.5 mm higher than the leading edge of the back edge. A two-blade blade having a blade angle of 22 ° with a front blade angle of 0.11 mm was used.
About the obtained heat conductive sheet, Mooney viscosity, volume standard mode diameter of particulate carbon material, Asker C hardness, and heat conductivity were measured by the above-mentioned method. The results are shown in Table 1.
(実施例2)
複合混合物を準備する工程において、母材樹脂を、実施例1とは異なる種類の常温常圧下で固体の熱可塑性フッ素樹脂(ケマーズ製、商品名「A‐100」、ムーニー粘度:30.2ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
(Example 2)
In the step of preparing the composite mixture, the matrix resin is made of a thermoplastic fluororesin that is solid at room temperature and normal pressure, which is different from that in Example 1 (trade name “A-100”, manufactured by Kemers, Mooney viscosity: 30.2 ML 1. A heat conductive sheet was produced in the same manner as in Example 1 except that the temperature was changed to +4 , 100 ° C. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
(実施例3)
複合混合物を準備する工程において、粒子状炭素材料としての膨張化黒鉛の配合量を100部に変更した。また、樹脂を、実施例1とは異なる種類の常温常圧下で固体の熱可塑性フッ素樹脂(ケマーズ製、商品名「A‐100」、ムーニー粘度:30.2ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
(Example 3)
In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 100 parts. Also, the resin was changed to a thermoplastic fluororesin that was solid at room temperature and normal pressure (product name “A-100”, product name “A-100”, Mooney viscosity: 30.2 ML 1 + 4 , 100 ° C.) different from Example 1. A heat conductive sheet was produced in the same manner as in Example 1 except that. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
(実施例4)
複合混合物を準備する工程において、母材樹脂を、実施例1とは異なる種類の常温常圧下で固体の熱可塑性フッ素樹脂(ダイキン工業社製、商品名「DAI_EL(登録商標)G-704BP」、ムーニー粘度:62.4ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
(Example 4)
In the step of preparing the composite mixture, the base resin is made of a thermoplastic fluororesin that is solid at room temperature and normal pressure, which is different from that in Example 1 (Daikin Industries, trade name “DAI_EL (registered trademark) G-704BP”, (Mooney viscosity: 62.4 ML 1 + 4 , 100 ° C.) A heat conductive sheet was produced in the same manner as in Example 1 except that the viscosity was changed to 100). Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
(実施例5)
複合混合物を準備する工程において、母材樹脂を、実施例1とは異なる種類の常温常圧下で固体の熱可塑性フッ素樹脂(ダイキン工業社製、商品名「DAI_EL(登録商標)G-912」、ムーニー粘度:87.6ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
(Example 5)
In the step of preparing the composite mixture, the base resin is made of a thermoplastic fluororesin that is solid at room temperature and atmospheric pressure, which is different from that in Example 1 (Daikin Industries, trade name “DAI_EL® G-912”), A heat conductive sheet was produced in the same manner as in Example 1 except that the Mooney viscosity was changed to 87.6 ML 1 + 4 , 100 ° C. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
(実施例6)
複合混合物を準備する工程において、粒子状炭素材料としての膨張化黒鉛の配合量を160部に変更した。また、母材樹脂を、常温常圧下で固体の熱可塑性のシリコーン樹脂(信越化学工業製、商品名「KE-931-U」、ムーニー粘度:18.0 ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
(Example 6)
In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 160 parts. The base resin was changed to a solid thermoplastic silicone resin (trade name “KE-931-U”, Mooney viscosity: 18.0 ML 1 + 4 , 100 ° C., manufactured by Shin-Etsu Chemical Co., Ltd.) at room temperature and normal pressure. A heat conductive sheet was produced in the same manner as in Example 1 except that. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
(実施例7)
複合混合物を準備する工程において、粒子状炭素材料としての膨張化黒鉛の配合量を220部に変更した。また、母材樹脂を、常温常圧下で固体の熱可塑性のニトリルゴム(日本ゼオン社製、商品名「Nipol(登録商標) DN3335」、ムーニー粘度:35.0 ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
(Example 7)
In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 220 parts. In addition, the base resin is made into a solid thermoplastic nitrile rubber (manufactured by Zeon Corporation, trade name “Nipol (registered trademark) DN3335”, Mooney viscosity: 35.0 ML 1 + 4 , 100 ° C.) under normal temperature and normal pressure. A heat conductive sheet was produced in the same manner as in Example 1 except for the change. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
(実施例8)
複合混合物を準備する工程において、粒子状炭素材料としての膨張化黒鉛の配合量を210部に変更した。また、母材樹脂を、常温常圧下で固体の熱可塑性のアクリル樹脂(日本ゼオン社製、商品名「AR-12」、ムーニー粘度:33.0 ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
(Example 8)
In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 210 parts. Other than changing the base resin to a thermoplastic acrylic resin (manufactured by Nippon Zeon Co., Ltd., trade name “AR-12”, Mooney viscosity: 33.0 ML 1 + 4 , 100 ° C.) under normal temperature and normal pressure. Produced a heat conductive sheet in the same manner as in Example 1. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
(実施例9)
複合混合物を準備する工程において、粒子状炭素材料としての膨張化黒鉛の配合量を70部に変更した。また、母材樹脂を、実施例1とは異なる種類の常温常圧下で固体の熱可塑性フッ素樹脂(ケマーズ製、商品名「A‐100」、ムーニー粘度:30.2ML1+4、100℃)に変更した以外は実施例1と同様にして、熱伝導シートを製造した。そして、実施例1と同様の各種測定を行った。結果を表1に示す。
Example 9
In the step of preparing the composite mixture, the amount of expanded graphite as the particulate carbon material was changed to 70 parts. In addition, the base resin is a thermoplastic fluororesin that is solid at room temperature and atmospheric pressure, which is different from that in Example 1 (manufactured by Chemers, trade name “A-100”, Mooney viscosity: 30.2 ML 1 + 4 , 100 ° C.). A heat conductive sheet was produced in the same manner as in Example 1 except that the above was changed. Various measurements similar to those in Example 1 were performed. The results are shown in Table 1.
表1より、粒子状炭素材料とムーニー粘度90(ML1+4、100℃)以下の樹脂成分とを含むプレ熱伝導シートが厚み方向に対して横断方向に複数層積層されてなる熱伝導シートは、厚み方向の熱伝導率に優れていることが分かる。 From Table 1, a heat conductive sheet obtained by laminating a plurality of pre-heat conductive sheets containing a particulate carbon material and a resin component having a Mooney viscosity of 90 (ML 1 + 4 , 100 ° C.) or less in a direction transverse to the thickness direction. Is excellent in the thermal conductivity in the thickness direction.
本発明によれば、厚み方向の熱伝導性に優れる熱伝導シートを提供することができる。 According to the present invention, it is possible to provide a heat conductive sheet having excellent heat conductivity in the thickness direction.
Claims (4)
粒子状炭素材料、及び一種の樹脂又は複数種の樹脂の複合物を含むプレ熱伝導シートが、前記熱伝導シートの厚み方向に対して横断方向に複数層積層されてなり、前記一種の樹脂又は複数種の樹脂の複合物よりなる全樹脂成分のムーニー粘度が90(ML1+4、100℃)以下である、熱伝導シート。 A heat conductive sheet,
A pre-heat conductive sheet containing a particulate carbon material and a kind of resin or a composite of a plurality of resins is laminated in a plurality of layers in a transverse direction with respect to the thickness direction of the heat conduction sheet, and the kind of resin or The heat conductive sheet whose Mooney viscosity of all the resin components which consist of a composite of multiple types of resin is 90 (ML1 + 4 , 100 degreeC) or less.
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| JP2018531801A JPWO2018025587A1 (en) | 2016-08-03 | 2017-07-07 | Thermal conduction sheet |
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| JP2016-152991 | 2016-08-03 | ||
| JP2016152991 | 2016-08-03 |
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| JP (1) | JPWO2018025587A1 (en) |
| TW (1) | TWI799384B (en) |
| WO (1) | WO2018025587A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019171987A1 (en) * | 2018-03-07 | 2019-09-12 | 日本ゼオン株式会社 | Conductive structure, composite body, method for producing conductive structure, and method for producing composite body |
| JP2020055893A (en) * | 2018-09-28 | 2020-04-09 | 日本ゼオン株式会社 | Thermal conductive sheet and method for manufacturing the same |
| JP2022542444A (en) * | 2019-07-30 | 2022-10-03 | リー,ヨンジュン | thermal interface material |
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| WO2009142290A1 (en) * | 2008-05-23 | 2009-11-26 | 日立化成工業株式会社 | Heat radiation sheet and heat radiation device |
| WO2011158565A1 (en) * | 2010-06-17 | 2011-12-22 | 日立化成工業株式会社 | Heat transfer sheet, manufacturing method for heat transfer sheet, and heat radiation device |
| JP2014209537A (en) * | 2013-03-29 | 2014-11-06 | 積水化学工業株式会社 | Thermally conducting foam sheet for electronic device |
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| TW591068B (en) * | 2001-08-06 | 2004-06-11 | Showa Denko Kk | Conductive curable resin composition |
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- 2017-07-07 WO PCT/JP2017/025048 patent/WO2018025587A1/en not_active Ceased
- 2017-07-26 TW TW106124997A patent/TWI799384B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009142290A1 (en) * | 2008-05-23 | 2009-11-26 | 日立化成工業株式会社 | Heat radiation sheet and heat radiation device |
| WO2011158565A1 (en) * | 2010-06-17 | 2011-12-22 | 日立化成工業株式会社 | Heat transfer sheet, manufacturing method for heat transfer sheet, and heat radiation device |
| JP2014209537A (en) * | 2013-03-29 | 2014-11-06 | 積水化学工業株式会社 | Thermally conducting foam sheet for electronic device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019171987A1 (en) * | 2018-03-07 | 2019-09-12 | 日本ゼオン株式会社 | Conductive structure, composite body, method for producing conductive structure, and method for producing composite body |
| JP2020055893A (en) * | 2018-09-28 | 2020-04-09 | 日本ゼオン株式会社 | Thermal conductive sheet and method for manufacturing the same |
| JP7234560B2 (en) | 2018-09-28 | 2023-03-08 | 日本ゼオン株式会社 | Heat-conducting sheet and manufacturing method thereof |
| JP2022542444A (en) * | 2019-07-30 | 2022-10-03 | リー,ヨンジュン | thermal interface material |
| JP7611895B2 (en) | 2019-07-30 | 2025-01-10 | ヘンケル・アクチェンゲゼルシャフト・ウント・コムパニー・コマンディットゲゼルシャフト・アウフ・アクチェン | Thermal Interface Materials |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201835182A (en) | 2018-10-01 |
| TWI799384B (en) | 2023-04-21 |
| JPWO2018025587A1 (en) | 2019-05-30 |
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