[go: up one dir, main page]

WO2018016010A1 - Spectroscopic unit and spectroscopic device - Google Patents

Spectroscopic unit and spectroscopic device Download PDF

Info

Publication number
WO2018016010A1
WO2018016010A1 PCT/JP2016/071185 JP2016071185W WO2018016010A1 WO 2018016010 A1 WO2018016010 A1 WO 2018016010A1 JP 2016071185 W JP2016071185 W JP 2016071185W WO 2018016010 A1 WO2018016010 A1 WO 2018016010A1
Authority
WO
WIPO (PCT)
Prior art keywords
unit
filter
signal
spectroscopic
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2016/071185
Other languages
French (fr)
Japanese (ja)
Inventor
卓二 堀江
正法 三井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to PCT/JP2016/071185 priority Critical patent/WO2018016010A1/en
Publication of WO2018016010A1 publication Critical patent/WO2018016010A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters

Definitions

  • the present invention relates to a spectroscopic unit and a spectroscopic device that split incident light.
  • Patent Document 1 discloses a first filter (linear variable filter) in which a transmission wavelength of transmitted light continuously changes from a first wavelength to a second wavelength longer than the first wavelength along a predetermined direction, a light source, The intensity of the light from the light source is adjusted for each wavelength so that the intensity of the transmitted light that is disposed between the first filter and the first filter is substantially the same in the section from the first wavelength to the second wavelength.
  • a spectroscopic measurement device including a second filter (flattening filter) is described.
  • the present invention has been made in view of the above, and an object of the present invention is to provide a spectroscopic unit and a spectroscopic device capable of accurately measuring spectral sensitivity even for light having greatly different intensities according to wavelengths. To do.
  • the spectroscopic unit includes a flat plate-like first filter whose transmission center wavelength of light continuously changes along a preset direction, Is a flat plate-like second filter in which the transmission center wavelength continuously changes along a preset direction, and at least a part of the continuously changing transmission center wavelength is the transmission center wavelength of the first filter.
  • the first filter is arranged on the projection plane in which the direction of change of the transmission center wavelength is orthogonal to the thickness direction.
  • a second filter that intersects with the direction of change of the transmission center wavelength.
  • the spectroscopic unit according to the present invention is provided on a side closer to a position where light enters than the first and second filters along the thickness direction, and diffuses and uniformizes the incident light.
  • a diffusion optical system is further provided.
  • the spectroscopic unit according to the present invention is characterized in that, in the above-described invention, an intersection angle between the change direction of the transmission center wavelength of the first filter and the change direction of the transmission center wavelength of the second filter is variable.
  • the spectroscopic device includes the spectroscopic unit described above, an image pickup unit that generates an image pickup signal by picking up light transmitted through the spectroscopic unit, a pixel position and transmission characteristics with respect to the image pickup signal, And a calculation unit that performs a calculation based on the above correspondence.
  • the calculation unit includes an image analysis unit that extracts a signal of a predetermined pixel from the imaging signal, and a signal of each pixel extracted by the image analysis unit. And a spectrum calculation unit that calculates a spectrum of the imaging signal based on a transmission wavelength band corresponding to the position of each pixel.
  • the image analysis unit passes through the centers of the first and second filters on the projection plane, and the transmission wavelength bands of the first and second filters match.
  • a pixel signal corresponding to a point on a straight line passing through the position when the position is projected onto the projection plane is extracted.
  • the image analysis unit outputs the saturated signal value when the extracted pixel signal has a saturated signal value, and outputs the saturated signal.
  • a pixel located in the vicinity of the target pixel and corresponding on the projection plane is replaced with an unsaturated signal value output by a pixel not located on the straight line.
  • the image analysis unit performs correction to match the bandwidth of the unsaturated signal with the bandwidth of a signal output by a pixel corresponding to a point located on the straight line.
  • the spectrum calculation unit calculates the spectrum using the unsaturated signal value after correction.
  • the spectroscopic device is the spectroscopic device according to the above-described invention, wherein one of the first and second filters is passed through a center of the first and second filters and around a central axis orthogonal to the straight line.
  • a filter drive unit that rotationally drives the image by an angle; and a control unit that controls the filter drive unit, wherein the image analysis unit has a direction perpendicular to the straight line in pixels that form a transmission pattern by the imaging signal.
  • the maximum value of the signal value of the edge pixel located at the edge of the edge is calculated and compared with a reference value.When the maximum value is larger than the reference value as a result of the comparison by the image analysis unit, the control unit, One of the first and second filters is rotated by the filter driving unit by the predetermined angle.
  • the present invention it is possible to accurately measure the spectral sensitivity even for light having greatly different intensities depending on the wavelength.
  • FIG. 1 is a block diagram showing the configuration of the spectroscopic device according to Embodiment 1 of the present invention.
  • FIG. 2 is a diagram schematically illustrating the characteristics of the linear variable filter included in the spectroscopic device according to Embodiment 1 of the present invention.
  • FIG. 3 is a diagram schematically illustrating the light transmittance at typical positions of the linear variable filter provided in the spectroscopic device according to Embodiment 1 of the present invention.
  • FIG. 4 is a diagram schematically showing the configuration of the filter unit provided in the spectroscopic device according to Embodiment 1 of the present invention.
  • FIG. 5 is a diagram schematically showing a spectrum of light transmitted at the point P shown in FIG. FIG.
  • FIG. 6 is a diagram schematically showing a spectrum of light transmitted at the point Q shown in FIG.
  • FIG. 7 is a diagram schematically showing a spectrum of light transmitted at the point R shown in FIG.
  • FIG. 8 is a block diagram showing a configuration of a microscope system that is a spectroscopic device according to Embodiment 2 of the present invention.
  • FIG. 9 is a diagram showing a configuration of a diffusion optical system provided in the spectroscopic unit according to Embodiment 2 of the present invention.
  • FIG. 10 is a diagram for explaining the operation when fluorescence observation is performed using a microscope system that is a spectroscopic device according to Embodiment 2 of the present invention.
  • FIG. 11 is a diagram for explaining the outline of the spectrum calculated by the spectrum calculation unit when the stained specimen is observed in the bright field in the modification of the second embodiment of the present invention.
  • FIG. 12 is a block diagram showing a configuration of an imaging apparatus that is a spectroscopic apparatus according to Embodiment 3 of the present invention.
  • FIG. 13 is a block diagram showing a configuration of a spectroscopic device according to Embodiment 4 of the present invention.
  • FIG. 14 is a flowchart showing an outline of the intersection angle determination process performed by the spectroscopic device according to Embodiment 4 of the present invention.
  • FIG. 12 is a block diagram showing a configuration of an imaging apparatus that is a spectroscopic apparatus according to Embodiment 3 of the present invention.
  • FIG. 13 is a block diagram showing a configuration of a spectroscopic device according to Embodiment 4 of the present invention.
  • FIG. 14 is a flowchart showing an outline of the intersection angle determination process performed by the spectr
  • FIG. 15 is a diagram schematically illustrating an example of distribution of pixel signal values in a transmission pattern acquired when the spectroscopic device according to Embodiment 4 of the present invention has an intersection angle of two linear variable filters of 90 °. is there.
  • FIG. 16 is a diagram schematically illustrating a distribution example of pixel signal values in a transmission pattern acquired when the spectroscopic device according to Embodiment 4 of the present invention has an acute angle between two linear variable filters. is there.
  • FIG. 1 is a block diagram showing the configuration of the spectroscopic device according to Embodiment 1 of the present invention.
  • the spectroscopic device 1 shown in the figure is a device that detects the spectral characteristics of a light source.
  • the spectroscopic device 1 performs an operation on a spectroscopic unit 2 that is a spectroscopic unit, an image capturing unit 3 that captures an image of light imaged by the spectroscopic unit 2 and generates an image signal, and an imaging signal generated by the image capturing unit 3.
  • a storage unit 7 and a control unit 8 that controls the overall operation of the spectroscopic device 1 are provided.
  • the spectroscopic unit 2 includes a filter unit 21 and an imaging optical system 22.
  • the filter unit 21 includes flat linear variable filters (hereinafter referred to as LVF) 23 and 24 in which the transmission center wavelength of light continuously changes along a preset direction in a manner in which the thickness direction is aligned. It is lined up along the thickness direction.
  • the LVF 23 and the LVF 24 are projection planes orthogonal to the thickness direction, and the direction of change of the center wavelength (hereinafter referred to as the transmission center wavelength) that passes through each LVF intersects.
  • the LVF 23 and the LVF 24 have the same square main surface, and are arranged so that their centers coincide with each other along the thickness direction. In the first embodiment, it is assumed that the LVF 23 and the LVF 24 have the same light transmission characteristics.
  • the LVF 23 and the LVF 24 do not have to have the same characteristics of transmitting light, and it is sufficient that at least a part of each transmission wavelength band is common. Further, the LVF 23 and the VFE 24 may be arranged so as to be in contact with each other in the thickness direction, or may be arranged apart from each other. However, in the case where they are arranged apart from each other, no other component is provided between the LVF 23 and the LVF 24.
  • One of the LVF 23 and the LVF 24 is a first filter, and the other is a second filter.
  • FIG. 2 is a diagram schematically illustrating the characteristics of the LVF 23, and is a diagram illustrating a relationship between a position in the filter and a transmission center wavelength having the highest transmittance at the position.
  • the four vertical lines described in the LVF 23 are virtual lines connecting positions where the transmitted wavelength bands are the same. Therefore, the four vertical lines are orthogonal to the direction in which the transmission center wavelength changes, that is, the x-axis direction in FIG.
  • FIG. 3 is a diagram schematically showing the light transmittance at typical positions of the LVF 23.
  • the spectrum of transmitted light at each position of the LVF 23 has substantially uniform transmittance at the transmission center wavelength and substantially uniform bandwidth.
  • FIG. 4 is a diagram schematically illustrating the configuration of the filter unit 21, and is a diagram schematically illustrating the positional relationship between the LVF 23 and the LVF 24 when viewed on the projection plane orthogonal to the thickness directions of the LVF 23 and the LVF 24.
  • FIG. 4 as with the vertical line in FIG. 2, a virtual straight line connecting positions where the transmitted wavelength bands are the same is shown.
  • the centers of the LVF 23 and the LVF 24 are made coincident with each other, and the LVF 24 is rotated by an angle ⁇ counterclockwise with respect to the central axis of each LVF relative to the LVF 23 and perpendicular to the paper surface.
  • this angle ⁇ is referred to as a crossing angle.
  • the crossing angle ⁇ can be set arbitrarily.
  • intersection angle ⁇ it is also possible to change the intersection angle ⁇ manually or automatically.
  • the crossing angle ⁇ is 90 °
  • the same transmission characteristics overlap on the diagonal lines of the LVFs 23 and 24.
  • the filter unit 21 can realize the most combinations of transmission characteristics in 0 ° ⁇ ⁇ 90 °.
  • the intersection angle ⁇ is 90 °
  • the amount of transmitted light in the narrow band is small and the signal level is low.
  • a point P shown in FIG. 4 is a point that is the center of the LVF 23 and the LVF 24 and both of the transmission center wavelengths are ⁇ P.
  • a point Q shown in FIG. 4 is a point where the transmission center wavelength of the LVF 23 is ⁇ P , while the transmission center wavelength of the LVF 24 is ⁇ Q ( ⁇ P ).
  • the point R shown in FIG. 4 is that the transmission center wavelength of the LVF 23 is ⁇ P , while the transmission center wavelength of the LVF 24 is ⁇ R ( ⁇ Q ).
  • the transmission characteristics at each position of the filter unit 21 are the products in the common wavelength region of the transmission characteristics of the LVF 23 and the transmission characteristics of the LVF 24.
  • FIG. 5 is a diagram schematically showing a spectrum of light transmitted at the point P shown in FIG.
  • the spectrum S P shown in FIG. 5 has a transmission center wavelength of ⁇ P , and the transmission obtained by the product of the spectrum S 1P that gives the transmission characteristic at the point P of the LVF 23 and the spectrum S 2P that gives the transmission characteristic at the point P of the LVF 24. It is a characteristic. In this case, the spectrum S 1P and the spectrum S 2P match.
  • Transmission wavelength band [Delta] [lambda] PP of the spectrum S P is substantially the same spectrum S 1P, the transmission wavelength band of the S 2P.
  • a straight line L1 passing through the point P is a set of points where the transmission center wavelengths of the LVF 23 and the LVF 24 are equal. Spectrum of the transmitted light at each point on the straight line L1, while the transmission wavelength band are different from each other, have the same transmittance distribution and the spectrum S P shown in FIG.
  • FIG. 6 is a diagram schematically showing a spectrum of light transmitted at the point Q shown in FIG.
  • the spectrum S Q shown in FIG. 6 is a transmission characteristic obtained by the product of the spectrum S 1Q that gives the transmission characteristic at the point Q of the LVF 23 and the spectrum S 2Q that gives the transmission characteristic at the point Q of the LVF 24.
  • the transmission center wavelength of the spectrum S Q is ( ⁇ P + ⁇ Q ) / 2, and the transmission wavelength band ⁇ PQ is narrower than the transmission wavelength band ⁇ PP of the spectrum S P shown in FIG.
  • the transmittance at the transmission center wavelength ( ⁇ P + ⁇ Q ) / 2 is smaller than the transmittance at the transmission center wavelength ⁇ P of the spectrum S P.
  • a straight line L2 passing through the point Q is a set of points where the difference between the transmission center wavelengths of the LVF 23 and the LVF 24 is ⁇ P ⁇ Q.
  • the spectrum of the transmitted light at each point on the straight line L2 has the same transmittance distribution as the spectrum S Q shown in FIG.
  • FIG. 7 is a diagram schematically showing a spectrum of light passing at the point R shown in FIG.
  • the spectrum S R shown in FIG. 7 is a transmission characteristic obtained by the product of the spectrum S 1R that gives the transmission characteristic at the point R of the LVF 23 and the spectrum S 2R that gives the transmission characteristic at the point R of the LVF 24.
  • the transmission center wavelength of the spectrum S R is ( ⁇ P + ⁇ R ) / 2, and the transmission wavelength band ⁇ PR is narrower than the transmission wavelength band ⁇ PQ shown in FIG. Further, the transmittance at the transmission center wavelength ( ⁇ P + ⁇ R ) / 2 is smaller than the transmittance at the transmission center wavelength ⁇ Q of the spectrum S Q.
  • a straight line L3 passing through the point R is a set of points where the difference between the transmission center wavelengths of the LVF 23 and the LVF 24 is ⁇ P ⁇ R.
  • the transmittance and the transmission wavelength band at the transmission center wavelength become smaller as the absolute value of the difference between the transmission center wavelength of the LVF 23 and the transmission center wavelength of the LVF 24 at the same point increases. For this reason, the farther the distance from the straight line L1 shown in FIG. 4, the narrower the transmission wavelength band and the smaller the transmitted light amount. Note that the transmittance of the filter unit 21 as a whole is zero at a position where the transmission wavelength band of the LVF 23 and the transmission wavelength band of the LVF 24 do not overlap. Transmission characteristics including information related to the spectrum of transmitted light at each position of the filter unit 21 are stored in advance in the filter information storage unit 71 of the storage unit 7.
  • the filter unit 21 having the configuration described above, it is possible to obtain transmitted light having a different spectrum depending on the incident position of light, and to realize various transmission characteristics on the same plane. Further, even when the transmission wavelength band at each point of one LVF is wide, transmitted light having a narrow transmission wavelength band can be obtained by superimposing the two LVFs. By providing such a filter unit 21, even when the light source 9 emits light including bright lines and having greatly different intensities for each wavelength, the signal intensity of each wavelength is made uniform by selectively using transmitted light. Can be.
  • the imaging unit 3 images the light that has passed through the filter unit 21 and has been imaged by the imaging optical system 22.
  • the imaging unit 3 includes an imaging element 31 that generates and outputs an imaging signal by photoelectrically converting the imaged light.
  • the image pickup device 31 is configured using an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor).
  • the image sensor 31 captures an image indicating the transmission pattern of the filter unit 21 and generates an image signal corresponding to the image.
  • the calculation unit 4 includes an image analysis unit 41 that analyzes the imaging signal output from the imaging unit 3 and a spectrum calculation unit 42 that calculates the spectrum of the imaging signal based on the analysis result of the image analysis unit 41.
  • the image analysis unit 41 refers to the filter information stored in the filter information storage unit 71 of the storage unit 7 and the sensitivity information of the image sensor 31 stored in the sensitivity information storage unit 72 of the storage unit 7, and the imaging generated by the imaging unit 3 A signal of a predetermined pixel is extracted from the signal.
  • the image analysis unit 41 passes the center of the LVF 23 and the LVF 24 (point P in FIG. 4) on the projection plane orthogonal to the thickness direction of the LVF 23 and the LVF 24, and sets the position where the transmission wavelength bands of the LVF 23 and the LVF 24 coincide with each other.
  • a signal of a pixel corresponding to a point on a straight line passing through the position when projected onto is extracted.
  • this straight line is referred to as a center line.
  • the straight line L1 is the center line.
  • the image analysis unit 41 When the signal extracted by the image analysis unit 41 has a saturated signal value, the image analysis unit 41 is a pixel located in the vicinity of a pixel (saturated pixel) that outputs a saturated signal value. The signal value of the saturated pixel is replaced with the unsaturated signal value output by the pixel whose corresponding point on the projection plane is not located on the center line. At this time, the image analysis unit 41 searches in order from the pixel with the shortest distance from the saturated pixel, and replaces the signal value of the saturated pixel with the unsaturated signal value found first. The unsaturated signal has a narrower band than the pixel signal extracted first by the image analysis unit 41. Therefore, the image analysis unit 41 performs correction to match the bandwidth of the replaced signal with the bandwidth of the pixel signal to be extracted first. Even after the signal value is replaced, the position of the pixel that output the signal is the position before the replacement.
  • the filter information storage unit 71 individually stores information regarding the transmission characteristics of the LVFs 23 and 24, and the image analysis unit 41 calculates the characteristics for each pixel in accordance with the intersection angle between the LVF 23 and the LVF 24. Also good.
  • the spectrum calculation unit 42 calculates the spectrum of the imaging signal based on the transmission characteristics such as the transmission wavelength band according to the signal of each pixel extracted by the image analysis unit 41 and the position of each pixel.
  • the spectrum calculation unit 42 refers to various information such as the transmission center wavelength of the spectrum at each position of the filter unit 21 stored in the storage unit 7, the filter characteristics of the filter unit 21, and the sensitivity characteristics of the imaging unit 3. The relative intensity for each is calculated, and the spectrum indicating the spectral sensitivity is calculated and output.
  • the arithmetic unit 4 is configured using a general-purpose processor such as a CPU (Central Processing Unit) or a dedicated integrated circuit that executes a specific function such as an ASIC (Application Specific Integrated Circuit) or FPGA (Field Programmable Gate Array). Various arithmetic processes are executed by reading various programs stored in the storage unit 7.
  • a general-purpose processor such as a CPU (Central Processing Unit) or a dedicated integrated circuit that executes a specific function such as an ASIC (Application Specific Integrated Circuit) or FPGA (Field Programmable Gate Array).
  • ASIC Application Specific Integrated Circuit
  • FPGA Field Programmable Gate Array
  • the input unit 5 includes an input device such as a keyboard, various buttons, and various switches, and a pointing device such as a mouse and a touch panel provided on the display screen of the display unit 6. The input of the corresponding signal is received and input to the control unit 8.
  • an input device such as a keyboard, various buttons, and various switches
  • a pointing device such as a mouse and a touch panel provided on the display screen of the display unit 6. The input of the corresponding signal is received and input to the control unit 8.
  • the display unit 6 is configured by using a display panel made of liquid crystal, organic EL (Electro Luminescence), or the like, and displays various types of information including a calculation result by the spectrum calculation unit 42.
  • the storage unit 7 stores a filter information storage unit 71 that stores information about the LVFs 23 and 24, a sensitivity information storage unit 72 that stores sensitivity information of the image sensor 31, and spectral information of the light source 9 calculated by the spectroscopic device 1. And a spectrum information storage unit 73.
  • the filter information storage unit 71 stores transmission characteristics including a spectrum of transmitted light at each position in the filter unit 21.
  • the filter information storage unit 71 stores the transmission characteristics at each position according to the value of the intersection angle.
  • the storage unit 7 also stores an imaging signal acquired by the imaging unit 3, a plurality of programs and various setting information respectively executed by the calculation unit 4 and the control unit 8.
  • the program may be written and stored in a computer-readable recording medium. Writing of the program to the storage unit 7 or the recording medium may be performed when the computer or the recording medium is shipped as a product, or may be performed by downloading via a communication network.
  • the storage unit 7 includes a volatile memory such as a RAM (Random Access Memory) and a nonvolatile memory such as a ROM (Read Only Memory). Note that the storage unit 7 may be configured using a computer-readable recording medium such as a memory card that can be externally mounted.
  • a volatile memory such as a RAM (Random Access Memory)
  • a nonvolatile memory such as a ROM (Read Only Memory).
  • the storage unit 7 may be configured using a computer-readable recording medium such as a memory card that can be externally mounted.
  • the control unit 8 is configured using a general-purpose processor such as a CPU or a dedicated integrated circuit that executes a specific function such as an ASIC or FPGA. Note that the control unit 8 and the calculation unit 4 can be configured by the same general-purpose processor or integrated circuit.
  • the white plate 10 having a uniform diffuse reflection surface is irradiated with light emitted from the light source 9, and the white plate 10
  • the light having a spatially uniform spectrum is incident on the spectroscopic device 1.
  • the imaging unit 3 captures the transmitted light and generates an imaging signal.
  • An image pickup signal in an appropriate region is extracted from the image pickup signal, and the spectrum (spectral sensitivity characteristic) of the light source 9 is calculated.
  • the calculation result of the light source 9 spectrum is displayed on the display unit 6.
  • the direction of change of the transmission center wavelength in the two flat plate-like LVFs intersects at the projection plane orthogonal to the thickness direction. Therefore, it is possible to transmit light with different transmission characteristics, and it is possible to accurately measure the spectral sensitivity even for light having greatly different intensities according to wavelengths.
  • the spectral sensitivity characteristic can be accurately obtained even when the incident light has a component such as a bright line.
  • the flattening filter has no effect unless it reflects the characteristics of the light source to be flattened. It is not suitable for applications that detect spectral sensitivity characteristics.
  • the first embodiment is suitable for detecting the spectral sensitivity characteristics of various light sources since no flattening filter is used.
  • FIG. 8 is a block diagram showing a configuration of a microscope system that is a spectroscopic device according to Embodiment 2 of the present invention.
  • a microscope system 100 shown in FIG. 1 includes a microscope apparatus 101, a control apparatus 102, an input apparatus 103, and a display apparatus 104.
  • the input device 103 and the display device 104 have the same functions as the input unit 5 and the display unit 6 described in the first embodiment, respectively.
  • components having the same functions as those described in the first embodiment will be described with the same reference numerals as those in the first embodiment.
  • the microscope apparatus 101 includes a stage 111, an objective optical system 112, an imaging optical system 113, a microscope imaging unit 114, an epi-illumination light source 115, an epi-illumination optical system 116, a fluorescent cube 117, a transmission illumination light source 118, a transmission illumination optical system 119, And an apparatus for observing a specimen SMP placed on a stage 111, having a mirror 120.
  • the objective optical system 112 is arranged to face the surface on which the specimen SMP of the stage 111 is placed.
  • the objective optical system 112 includes a plurality of interchangeable objective lenses, and the magnification can be changed.
  • the light that has passed through the objective optical system 112 is imaged by the imaging optical system 113 and enters the microscope imaging unit 114.
  • the imaging optical system 113 is configured by using a plurality of lenses, and the zoom magnification can be changed.
  • the microscope imaging unit 114 includes an imaging element that photoelectrically converts received light to generate an image signal.
  • the microscope imaging unit 114 outputs the generated image signal to the control device 102. Note that a configuration may be adopted in which light is further branched on the observation optical path between the objective optical system 112 and the imaging optical system 113, and an eyepiece is provided on the branched optical path so that the user can directly observe.
  • the epi-illumination optical system 116 includes various optical members (filter unit, shutter, field stop, aperture stop, etc.) that collect the epi-illumination light emitted from the epi-illumination light source 115 and guide it to the observation optical path.
  • the transmission illumination optical system 119 includes various optical members (collector lens, filter unit, field stop, shutter, aperture stop, etc.) that collect the transmission illumination light emitted from the transmission illumination light source 118 and guide it to the mirror 120. The light that has passed through the transmission illumination optical system 119 is reflected by the mirror 120 and then propagates along the observation optical path.
  • the fluorescent cube 117 includes an excitation filter 117a that selectively transmits light (excitation light) in a specific wavelength band out of the light emitted from the incident illumination light source 115 and passed through the incident illumination optical system 116, and the excitation filter 117a.
  • a dichroic mirror 117b that reflects the selected excitation light and transmits the fluorescence generated by the sample SMP, and an absorption filter 117c that selectively transmits only the fluorescence of light incident from the direction of the sample SMP are formed in a cube shape. Combined.
  • the fluorescent cube 117 is inserted into the observation optical path when performing fluorescence observation. On the other hand, when performing bright field observation, the fluorescent cube 117 is retracted from the observation optical path.
  • the microscope apparatus 101 further includes a spectroscopic unit 2A, an imaging unit 3A, and a mirror 121 that reflects light from the sample SMP and guides it to the spectroscopic unit 2A.
  • the mirror 121 is detachably provided on the observation optical path between the fluorescent cube 117 and the imaging optical system 113.
  • the mechanism for inserting and removing the mirror 121 with respect to the observation optical path may be manual or electric.
  • FIG. 8 shows a state where the mirror 121 is inserted.
  • the mirror 121 reflects the light that has passed through the objective optical system 112 while being inserted in the observation optical path, and causes the light to enter the spectroscopic unit 2A.
  • the spectroscopic unit 2A which is a spectroscopic unit according to the second embodiment, includes an imaging optical system 25, a diffusion optical system 26, a filter unit 21, and an imaging optical system 22 in order from the light incident side.
  • FIG. 9 is a diagram showing a configuration of the diffusion optical system 26.
  • the diffusion optical system 26 is an optical system that diffuses incident light to make it uniform.
  • the diffusion optical system 26 includes a field stop 261 disposed at a position where an image formed by the imaging optical system 25 is formed, a diffusion plate 262 that diffuses a light beam that has passed through the field stop 261, and a diffused light beam. And a light beam homogenizing optical element 263 for homogenizing.
  • the diffusion plate 262 is configured using, for example, a material obtained by processing one side of flat glass into a sand surface, or a material in which a light diffusing substance is dispersed in the glass.
  • the light beam homogenizing optical element 263 is made of a light-transmitting member formed using glass, plastic, or the like, and emits light while reflecting at least part of the light beam incident from the incident surface 263a one or more times by the side surface 263b. The light is guided to 263c and emitted.
  • the beam homogenizing optical element 263 has a shape whose width increases from the incident side to the emission side, and the area of the emission surface 263c is larger than the area of the incident surface 263a. Further, the side surface 263b of the light beam homogenizing optical element 263 has a curved surface whose inclination angle gradually decreases from the incident surface 263a to the exit surface 263c.
  • the side surface 263b does not need to be a curved surface, and may be configured by a flat surface.
  • the cross section perpendicular to the optical axis of the light beam homogenizing optical element 263 may be rectangular or circular, and the incident surface 263a may be circular, while the output surface 263c may be rectangular.
  • the diffusing optical system 26 having the above configuration can ensure the measurement accuracy of the spectrum by making the illuminance distribution of the light beam irradiated to the image sensor 31 uniform.
  • a more detailed configuration of the diffusion optical system 26 is disclosed in, for example, Japanese Patent Application Laid-Open No. 2013-29322.
  • the imaging unit 3 ⁇ / b> A includes the imaging element 31 similarly to the imaging unit 3, generates an imaging signal corresponding to an image indicating the transmission pattern of the filter unit 21, and outputs the imaging signal to the control device 102.
  • the mirror 121, the spectroscopic unit 2A, and the imaging unit 3A have been described as single components, but these may be configured as one unit. Further, the spectroscopic unit 2A and the imaging unit 3A may be configured as one unit.
  • the control device 102 includes a calculation unit 4A, a storage unit 7A, and a control unit 8A.
  • the calculation unit 4A includes an image analysis unit 41 and a spectrum calculation unit 42.
  • the spectrum calculation unit 42 calculates the number of fluorescent spectra, that is, the number of fluorescent components, from the peak position of the narrowband signal included in the imaging signal, and the position of the pixel that outputs the narrowband signal and the transmission wavelength band.
  • the fluorescence spectrum is calculated on the basis of the correspondence.
  • the calculation unit 4A performs image processing including optical black subtraction processing, white balance adjustment processing, color matrix calculation processing, ⁇ correction processing, color reproduction processing, and edge enhancement processing on the image signal generated by the microscope imaging unit 114. Do.
  • FIG. 10 is a diagram for explaining the operation when fluorescence observation is performed using the microscope system 100.
  • the microscope apparatus 101 turns on the epi-illumination light source 115 and inserts the fluorescent cube 117 on the observation optical path, while turning off the power of the transmission illumination light source 118.
  • the absorption filter 117c of the fluorescent cube 117 is a filter that transmits a fluorescent component in the green (G) wavelength band
  • the sample SMP emits fluorescence of two spectra S1 and S2 shown in FIG.
  • Such a phenomenon can occur, for example, when at least two fluorescent substances exist in the specimen SMP and the wavelengths of the two fluorescent substances are close to each other. In this case, an image including the components of the microscope imaging unit 114 and the two spectra S1 and S2 is captured. As a result, the microscope system 100 cannot detect only the fluorescence (either one of the spectra S1 and S2) that is originally desired to be detected from the image captured by the microscope imaging unit 114.
  • the microscope imaging unit 114 before the microscope imaging unit 114 performs imaging, the mirror 121 is inserted into the observation optical path, and the light emitted from the sample SMP using the spectroscopic unit 2A and the imaging unit 3A. Measure the spectrum of. As a result of the measurement, when the presence of two fluorescent components close to each other in wavelength band is detected as in the spectra S1 and S2 shown in FIG. 10, the user separates the two fluorescent components and extracts only the desired fluorescent component. The absorption filter 117c can be replaced. As a result, the microscope imaging unit 114 can capture a fluorescent image showing only a desired fluorescent component.
  • the calculated spectral data may be used when adjusting the white balance (WB) of the image captured by the microscope imaging unit 114.
  • WB white balance
  • the second embodiment it is possible to acquire an observation image including only a desired fluorescent component using an appropriate absorption filter by measuring in advance the fluorescence emitted from the specimen.
  • the epi-illumination light source 115 is turned off, the fluorescent cube 117 is retracted from the observation optical path, and the transmitted illumination light source 118 is turned on.
  • examples of staining of a specimen for bright field observation include non-fluorescent staining such as hematoxylin and eosin staining (HE staining) using two pigments of hematoxylin and eosin, and Papanicolaou staining (Pap staining). .
  • FIG. 11 is a diagram for explaining an outline of a spectrum calculated by the spectrum calculation unit 42 from an imaging signal transmitted by the spectroscopic unit 2A and generated by the imaging unit 3A when the stained specimen is observed in the bright field in the microscope apparatus 101. It is. Of the three curves C, C1, and C2 shown in FIG. 11, the curve C represents a spectrum that serves as a reference when performing the color homogenization process. On the other hand, the curves C1 and C2 show spectra calculated when different facilities or engineers create specimens with the same staining. As shown in FIG. 11, a dyed specimen may have different dye characteristics for each dyeing, for each facility, and for each engineer.
  • the imaging unit 3A captures the light separated using the spectroscopic unit 2A and calculates the spectrum for each stained specimen, it is possible to accurately estimate the difference (characteristic change) from the reference spectrum. it can. As a result, it is possible to improve the accuracy of the color homogenization process when the microscope imaging unit 114 images a stained specimen for bright field observation.
  • the spectrum of the entire stained specimen is calculated using a narrow-band transmission spectrum, so that the transmission wavelength band is wide and the transmission wavelength band between bands is the same as that measured by a conventional multiband sensor (Triton).
  • the spectrum can be calculated with high accuracy compared to the method with many overlaps.
  • FIG. 12 is a block diagram showing a configuration of an imaging apparatus that is a spectroscopic apparatus according to Embodiment 3 of the present invention.
  • An imaging apparatus 200 shown in the figure includes a main body 201 and a spectroscopic unit 2B that can be attached to and detached from the main body 201. Also in the third embodiment, components having the same functions as those described in the first embodiment will be described with the same reference numerals as those in the first embodiment.
  • the spectroscopic unit 2B which is a spectroscopic unit according to the third embodiment includes an objective optical system 27, an imaging optical system 25, a diffusion optical system 26, a filter unit 21 and a filter unit 21 in order from the front side (light incident side) facing the subject.
  • An imaging optical system 22 is included.
  • the spectroscopic unit 2 ⁇ / b> B diffuses the light collected from the dotted area and enters the filter unit 21.
  • the spectroscopic unit 2B corresponds to a configuration in which an objective optical system is added to the spectroscopic unit 2A described in the second embodiment.
  • the spectroscopic unit 2B is attached to the main body unit 201 instead of the lens unit for normal photographing.
  • the main body unit 201 includes an imaging unit 3B, a calculation unit 4B, an input unit 5B, a display unit 6B, a storage unit 7B, and a control unit 8B.
  • the imaging unit 3B includes an imaging element 31.
  • the imaging element 31 generates an imaging signal corresponding to an image indicating the transmission pattern of the filter unit 21 of the spectroscopic unit 2B.
  • the calculation unit 4B includes an image analysis unit 41 and a spectrum calculation unit 42.
  • the calculation unit 4B also has a function of performing various image processing on the image pickup signal generated by the image pickup unit 3B.
  • the calculation unit 4B like the calculation unit 4A described in the second embodiment, performs optical black subtraction processing, white balance adjustment processing, color matrix calculation processing, ⁇ correction processing, color reproduction on an image signal. Image processing including processing and edge enhancement processing is performed.
  • the storage unit 7B includes a filter information storage unit 71, a sensitivity information storage unit 72, and a spectrum information storage unit 73.
  • the storage unit 7B stores data of an image captured by the imaging unit 3B and subjected to image processing by the calculation unit 4B.
  • the calculated spectral data is used when adjusting the white balance of the image captured by the imaging unit 3B, so that even when a light source such as a bright line is captured, white The balance can be adjusted with high accuracy.
  • the spectroscopic device according to the third embodiment can be realized by installing the spectroscopic unit 2B in the main body of a normal imaging device and downloading software for realizing the function of the arithmetic unit 4B. Highly accurate spectral sensitivity can be measured easily.
  • the imaging device 200 When the imaging device 200 is applied as an inspection device such as a coating plate color or a light source spectrum, the reference transmission pattern obtained by the calculation unit 4B based on the characteristics of the filter unit 21 and the transmission in the image captured by the imaging unit 3B. Inspection and determination may be performed by matching the pattern.
  • FIG. 13 is a block diagram illustrating a configuration of the spectroscopic device according to the fourth embodiment.
  • the spectroscopic device 1A shown in the figure includes a filter driving unit 11 that rotates the LVF 24 around a central axis parallel to the thickness direction in addition to the same configuration as the spectroscopic device 1 described in the first embodiment.
  • the filter driving unit 11 is configured by using, for example, an actuator that rotates the LVF 24. By rotating the LVF 24 under the control of the control unit 8, the filter driving unit 11 on the projection plane described in the first embodiment with reference to FIG. The intersection angle with the LVF 23 is changed.
  • the image analysis unit 41 of the calculation unit 4 extracts and extracts all the signal values of the edge pixels located at the edge in the direction perpendicular to the center line on the projection plane among the pixels that form the transmission pattern with the imaging signal.
  • the maximum value of the signal value of the edge pixel is calculated, and this maximum value is compared with a predetermined reference value.
  • the reference value is preferably set so that the number of pixels equal to or greater than the reference value is maximized with respect to the determined exposure condition.
  • Such a reference value can be set to about 10% of the saturation signal value of the pixel, for example.
  • the reference value can be set to a value that exceeds the noise level.
  • the filter drive unit 11 controls the LVF 24 by a predetermined angle under the control of the control unit 8 when the maximum value of the signal value of the edge pixel is equal to or less than the reference value.
  • the predetermined angle is, for example, about 0.1 ° to 30 °, and more preferably about 1 ° to 5 °.
  • FIG. 14 is a flowchart showing an outline of the intersection angle determination process performed by the spectroscopic apparatus 1A.
  • the filter drive unit 11 rotationally drives the LVF 24 so that the intersection angle between the LVF 23 and the LVF 24 is 90 ° (step S1).
  • the image analysis unit 41 acquires an imaging signal from the imaging unit 3 (step S2), and among the pixels forming the transmission pattern, the signal value of the edge pixel positioned at the edge in the direction perpendicular to the center line is obtained. All are extracted (step S3).
  • the image analysis unit 41 calculates the maximum signal value of the extracted edge pixels (step S4).
  • the image analysis unit 41 determines whether or not the calculated maximum value is equal to or less than a predetermined reference value (step S5).
  • the control unit 8 outputs a control signal to the filter driving unit 11, and causes the filter driving unit 11 to rotationally drive the LVF 24 by a predetermined angle.
  • Step S6 the filter drive unit 11 rotates the LVF 24 clockwise by a predetermined angle on the projection plane shown in FIG.
  • step S7: Yes When the crossing angle ⁇ after the rotation in step S6 is 0 ° or less (step S7: Yes), the control unit 8 outputs a control signal to the filter driving unit 11 to drive the LVF 24 in rotation and is preset.
  • the intersection angle ⁇ 0 is set (step S8).
  • the intersection angle ⁇ 0 is 1 °, for example, but this is only an example.
  • step S7: No when the crossing angle ⁇ after the rotation in step S6 is larger than 0 ° (step S7: No), the spectroscopic device 1A returns to step S2.
  • step S5 when the maximum value is larger than the reference value (step S5: No), the spectroscopic device 1A ends the process. Thereby, the intersection angle of LVF23 and LVF24 is determined.
  • FIG. 15 is a diagram schematically showing an example of pixel signal value distribution in the transmission pattern acquired from the light of the specific light source 9 by the spectroscopic device 1A when the crossing angle between the LVF 23 and the LVF 24 is 90 °.
  • FIG. 15 shows an example of the distribution of signal values when viewed from the incident side of the spectroscopic device 1A.
  • the transmissive pixel region B where the transmissive pattern exists has a symmetrical shape with respect to the center line M.
  • the signal value of the pixel passing through the center line M is the highest, and the signal value decreases as the distance from the center line M increases. ing.
  • the difference in signal value is schematically represented by a pattern.
  • the signal values of the edge pixels located at the edge in the direction perpendicular to the center line M of the partial pixel region Bm are all the same (shown in black).
  • the signal value of the edge pixel is assumed to the reference value.
  • the maximum signal value of the edge pixel calculated by the image analysis unit 41 in step S4 is equal to the reference value. Therefore, the image analysis unit 41 determines that the maximum value is equal to or less than the reference value (step S5: Yes), and the filter driving unit 11 rotationally drives the LVF 24 by a predetermined angle (step S6).
  • the spectroscopic device 1A returns to step S2 to acquire an imaging signal.
  • FIG. 16 schematically illustrates an example of pixel signal value distribution in the transmission pattern obtained from the light of the same light source 9 as that in FIG. 15 when the crossing angle between the LVF 23 and the LVF 24 is an acute angle ( ⁇ 90 °).
  • FIG. 16 is a diagram schematically illustrating an example of signal value distribution when a transmission pattern of light from the same light source 9 as in FIG. 15 is acquired. Also in FIG. 16, similarly to FIG. 15, an example of the distribution of signal values when viewed from the incident side of the spectroscopic device 1A is shown.
  • the transmissive pixel region B ′ shown in FIG. 16 has a symmetric shape with respect to the center line M ′ as in the case shown in FIG. 15.
  • the signal value of the pixel passing through the center line M ′ is the highest, and the signal value increases as the distance from the center line M ′ increases. It is low.
  • the transmissive pixel region B ' is wider than the transmissive pixel region B shown in FIG. 15, and the number of extracted pixels is large.
  • the signal value of the edge pixel is larger than the reference value (displayed by a mesh line). Therefore, in the case shown in FIG. 16, the maximum value of the signal value of the edge pixel calculated by the image analysis unit 41 in step S4 is larger than the reference value. Therefore, the image analysis unit 41 determines that the maximum value is larger than the reference value (step S5: No). In this case, the spectroscopic device 1A ends the intersection angle determination process between the LVF 23 and the LVF 24.
  • the initial value of the crossing angle ⁇ may be set to 0 °, and the crossing angle may be gradually increased, or the crossing angle may be increased or decreased according to a predetermined rule starting from a preset initial value. Good.
  • the fourth embodiment by optimizing the crossing angle, the number of candidates for replacing a pixel having a saturated signal value with another pixel increases. Therefore, the accuracy when reducing noise is further increased. Can be improved.
  • a mechanism for manually rotating the LVF 24 by the operator may be provided instead of providing the filter driving unit 11, a mechanism for manually rotating the LVF 24 by the operator.
  • the filter driving unit 11 may rotate the LVF 23, or both the LVF 23 and the LVF 24 may be rotated.
  • the filter driving unit described in the fourth embodiment may be added so that the intersection angle of the two LVFs on the projection plane can be changed.
  • an optimal intersection angle may be determined using the signal value for each pixel of the imaging signal.
  • the shape and thickness of the surfaces of the two LVFs do not have to be the same.
  • the shape of the LVF that is rotationally driven may be relatively small or the thickness may be thin.
  • the number of LVFs constituting the filter unit is not necessarily two, and the filter unit may be configured using a plurality of LVFs.
  • the thickness direction of the plurality of LVFs may be aligned, and the plurality of LVFs may be arranged side by side along the thickness direction.
  • two adjacent LVFs may be arranged in contact with each other, or may be arranged apart from each other. In the latter case, no other component is provided between two adjacent LVFs.
  • the present invention can include various embodiments not described herein, and various design changes can be made within the scope of the technical idea specified by the claims. It is.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The spectroscopic unit according to the present invention is provided with: a planar first filter in which the transmission center wavelength of light continuously varies along a pre-set direction; and a planar second filter in which the transmission center wavelength of light continuously varies along a pre-set direction, at least a portion of the continuously varying transmission center wavelength being in common with the transmission center wavelength of the first filter, the second filter being arranged along the thickness direction thereof in a condition in which the thickness direction thereof is aligned with that of the first filter, and the direction of variation of the transmission center wavelength of the second filter intersecting with the direction of variation of the transmission center wavelength of the first filter at a projection surface orthogonal to the thickness direction.

Description

分光ユニットおよび分光装置Spectroscopic unit and spectroscopic device

 本発明は、入射した光を分光する分光ユニットおよび分光装置に関する。 The present invention relates to a spectroscopic unit and a spectroscopic device that split incident light.

 従来、所定方向に沿って透過波長が異なるように形成された波長選択フィルタ(リニアバリアブルフィルタ)を用いた分光測定装置が知られている。例えば、特許文献1には、透過光の透過波長が所定方向に沿って第1波長から第1波長より長い第2波長まで連続的に変化する第1フィルタ(リニアバリアブルフィルタ)と、光源と第1フィルタとの間に配置され、第1フィルタを透過する透過光の強度が第1波長から第2波長までの区間において略同一となるように、光源からの光の強度を波長ごとに調節する第2フィルタ(フラット化フィルタ)と、を備えた分光測定装置が記載されている。 Conventionally, a spectroscopic measurement device using a wavelength selection filter (linear variable filter) formed so that transmission wavelengths are different along a predetermined direction is known. For example, Patent Document 1 discloses a first filter (linear variable filter) in which a transmission wavelength of transmitted light continuously changes from a first wavelength to a second wavelength longer than the first wavelength along a predetermined direction, a light source, The intensity of the light from the light source is adjusted for each wavelength so that the intensity of the transmitted light that is disposed between the first filter and the first filter is substantially the same in the section from the first wavelength to the second wavelength. A spectroscopic measurement device including a second filter (flattening filter) is described.

特開2013-253807号公報JP 2013-253807 A

 上記特許文献1に記載の技術において、フラット化フィルタは、輝線を含む光のように、波長に応じて強度が大きく異なる光を透過する場合に、十分なフラット特性を得ることが難しい。十分なフラット特性を得られない状況下では、波長選択フィルタを透過する光の強度が波長により異なってしまうため、強度が弱い波長帯における信号ノイズが大きくなり、分光感度を正確に測定することができない。 In the technique described in Patent Document 1, it is difficult for the flattening filter to obtain sufficient flat characteristics when transmitting light having greatly different intensities depending on the wavelength, such as light including bright lines. Under conditions where sufficient flat characteristics cannot be obtained, the intensity of the light transmitted through the wavelength selection filter varies depending on the wavelength, so that signal noise in a wavelength band with a weak intensity increases and spectral sensitivity can be measured accurately. Can not.

 本発明は、上記に鑑みてなされたものであって、波長に応じて強度が大きく異なる光に対しても分光感度を正確に測定することができる分光ユニットおよび分光装置を提供することを目的とする。 The present invention has been made in view of the above, and an object of the present invention is to provide a spectroscopic unit and a spectroscopic device capable of accurately measuring spectral sensitivity even for light having greatly different intensities according to wavelengths. To do.

 上述した課題を解決し、目的を達成するために、本発明に係る分光ユニットは、光の透過中心波長が予め設定された方向に沿って連続的に変化する平板状の第1フィルタと、光の透過中心波長が予め設定された方向に沿って連続的に変化する平板状の第2フィルタであって、該連続的に変化する透過中心波長の少なくとも一部が前記第1フィルタの透過中心波長と共通であり、前記第1フィルタと厚さ方向が揃った態様で該厚さ方向に沿って並んでおり、透過中心波長の変化方向が前記厚さ方向と直交する投影面で前記第1フィルタの透過中心波長の変化方向と交差する第2フィルタと、備えたことを特徴とする。 In order to solve the above-described problems and achieve the object, the spectroscopic unit according to the present invention includes a flat plate-like first filter whose transmission center wavelength of light continuously changes along a preset direction, Is a flat plate-like second filter in which the transmission center wavelength continuously changes along a preset direction, and at least a part of the continuously changing transmission center wavelength is the transmission center wavelength of the first filter. The first filter is arranged on the projection plane in which the direction of change of the transmission center wavelength is orthogonal to the thickness direction. And a second filter that intersects with the direction of change of the transmission center wavelength.

 本発明に係る分光ユニットは、上記発明において、前記厚さ方向に沿って前記第1および第2フィルタよりも光が入射する位置に近い側に設けられ、入射した光を拡散して均一化する拡散光学系をさらに備えたことを特徴とする。 In the above invention, the spectroscopic unit according to the present invention is provided on a side closer to a position where light enters than the first and second filters along the thickness direction, and diffuses and uniformizes the incident light. A diffusion optical system is further provided.

 本発明に係る分光ユニットは、上記発明において、前記第1フィルタの透過中心波長の変化方向と前記第2フィルタの透過中心波長の変化方向との前記投影面における交差角度は可変であることを特徴とする。 The spectroscopic unit according to the present invention is characterized in that, in the above-described invention, an intersection angle between the change direction of the transmission center wavelength of the first filter and the change direction of the transmission center wavelength of the second filter is variable. And

 本発明に係る分光装置は、上記に記載の分光ユニットと、前記分光ユニットを透過した光を撮像することによって撮像信号を生成する撮像部と、前記撮像信号に対して画素の位置と透過特性との対応に基づいた演算を行う演算部と、を備えたことを特徴とする。 The spectroscopic device according to the present invention includes the spectroscopic unit described above, an image pickup unit that generates an image pickup signal by picking up light transmitted through the spectroscopic unit, a pixel position and transmission characteristics with respect to the image pickup signal, And a calculation unit that performs a calculation based on the above correspondence.

 本発明に係る分光装置は、上記発明において、前記演算部は、前記演算部は、前記撮像信号から所定の画素の信号を抽出する画像解析部と、前記画像解析部が抽出した各画素の信号および各画素の位置に応じた透過波長帯域に基づいて前記撮像信号のスペクトルを算出するスペクトル算出部と、を有することを特徴とする。 In the spectroscopic device according to the present invention, in the above invention, the calculation unit includes an image analysis unit that extracts a signal of a predetermined pixel from the imaging signal, and a signal of each pixel extracted by the image analysis unit. And a spectrum calculation unit that calculates a spectrum of the imaging signal based on a transmission wavelength band corresponding to the position of each pixel.

 本発明に係る分光装置は、上記発明において、前記画像解析部は、前記投影面における前記第1および第2フィルタの中心を通過するとともに、前記第1および第2フィルタの透過波長帯域が一致する位置を前記投影面に投影したときの位置を通過する直線上の点に対応する画素の信号を抽出することを特徴とする。 In the spectroscopic device according to the present invention as set forth in the invention described above, the image analysis unit passes through the centers of the first and second filters on the projection plane, and the transmission wavelength bands of the first and second filters match. A pixel signal corresponding to a point on a straight line passing through the position when the position is projected onto the projection plane is extracted.

 本発明に係る分光装置は、上記発明において、前記画像解析部は、抽出した画素の信号の中に飽和した信号値を有するものがある場合、該飽和した信号値を、該飽和した信号を出力する画素の近傍に位置する画素であって前記投影面上で対応する点が前記直線上に位置しない画素が出力する不飽和の信号値に置換することを特徴とする。 In the spectroscopic device according to the present invention, in the above invention, the image analysis unit outputs the saturated signal value when the extracted pixel signal has a saturated signal value, and outputs the saturated signal. A pixel located in the vicinity of the target pixel and corresponding on the projection plane is replaced with an unsaturated signal value output by a pixel not located on the straight line.

 本発明に係る分光装置は、上記発明において、前記画像解析部は、前記不飽和の信号の帯域幅を前記直線上に位置する点に対応する画素が出力する信号の帯域幅と一致させる補正を行い、前記スペクトル算出部は、補正後の前記不飽和の信号値を用いて前記スペクトルを算出することを特徴とする。 In the spectroscopic device according to the present invention as set forth in the invention described above, the image analysis unit performs correction to match the bandwidth of the unsaturated signal with the bandwidth of a signal output by a pixel corresponding to a point located on the straight line. And the spectrum calculation unit calculates the spectrum using the unsaturated signal value after correction.

 本発明に係る分光装置は、上記発明において、前記第1および第2フィルタのいずれか一方を、前記第1および第2フィルタの中心を通過するとともに前記直線と直交する中心軸の周りに所定の角度だけ回転駆動するフィルタ駆動部と、前記フィルタ駆動部を制御する制御部と、をさらに備え、前記画像解析部は、前記撮像信号で透過パターンを形成する画素の中で前記直線と垂直な方向の縁端に位置する縁端画素の信号値の最大値を算出して基準値と比較し、前記制御部は、前記画像解析部が比較した結果、前記最大値が前記基準値より大きい場合、前記フィルタ駆動部に前記第1および第2フィルタのいずれか一方を前記所定の角度だけ回転駆動させることを特徴とする。 The spectroscopic device according to the present invention is the spectroscopic device according to the above-described invention, wherein one of the first and second filters is passed through a center of the first and second filters and around a central axis orthogonal to the straight line. A filter drive unit that rotationally drives the image by an angle; and a control unit that controls the filter drive unit, wherein the image analysis unit has a direction perpendicular to the straight line in pixels that form a transmission pattern by the imaging signal. The maximum value of the signal value of the edge pixel located at the edge of the edge is calculated and compared with a reference value.When the maximum value is larger than the reference value as a result of the comparison by the image analysis unit, the control unit, One of the first and second filters is rotated by the filter driving unit by the predetermined angle.

 本発明によれば、波長に応じて強度が大きく異なる光に対しても分光感度を正確に測定することができる。 According to the present invention, it is possible to accurately measure the spectral sensitivity even for light having greatly different intensities depending on the wavelength.

図1は、本発明の実施の形態1に係る分光装置の構成を示すブロック図である。FIG. 1 is a block diagram showing the configuration of the spectroscopic device according to Embodiment 1 of the present invention. 図2は、本発明の実施の形態1に係る分光装置が備えるリニアバリアブルフィルタの特性を模式的に示す図である。FIG. 2 is a diagram schematically illustrating the characteristics of the linear variable filter included in the spectroscopic device according to Embodiment 1 of the present invention. 図3は、本発明の実施の形態1に係る分光装置が備えるリニアバリアブルフィルタの代表的な位置における光の透過率を模式的に示す図である。FIG. 3 is a diagram schematically illustrating the light transmittance at typical positions of the linear variable filter provided in the spectroscopic device according to Embodiment 1 of the present invention. 図4は、本発明の実施の形態1に係る分光装置が備えるフィルタ部の構成を模式的に示す図である。FIG. 4 is a diagram schematically showing the configuration of the filter unit provided in the spectroscopic device according to Embodiment 1 of the present invention. 図5は、図4に示す点Pにおいて透過する光のスペクトルを模式的に示す図である。FIG. 5 is a diagram schematically showing a spectrum of light transmitted at the point P shown in FIG. 図6は、図4に示す点Qにおいて透過する光のスペクトルを模式的に示す図である。FIG. 6 is a diagram schematically showing a spectrum of light transmitted at the point Q shown in FIG. 図7は、図4に示す点Rにおいて透過する光のスペクトルを模式的に示す図である。FIG. 7 is a diagram schematically showing a spectrum of light transmitted at the point R shown in FIG. 図8は、本発明の実施の形態2に係る分光装置である顕微鏡システムの構成を示すブロック図である。FIG. 8 is a block diagram showing a configuration of a microscope system that is a spectroscopic device according to Embodiment 2 of the present invention. 図9は、本発明の実施の形態2に係る分光ユニットが備える拡散光学系の構成を示す図である。FIG. 9 is a diagram showing a configuration of a diffusion optical system provided in the spectroscopic unit according to Embodiment 2 of the present invention. 図10は、本発明の実施の形態2に係る分光装置である顕微鏡システムを用いて蛍光観察を行う場合の作用を説明するための図である。FIG. 10 is a diagram for explaining the operation when fluorescence observation is performed using a microscope system that is a spectroscopic device according to Embodiment 2 of the present invention. 図11は、本発明の実施の形態2の変形例において、染色した標本を明視野観察した場合にスペクトル算出部が算出したスペクトルの概要を説明する図である。FIG. 11 is a diagram for explaining the outline of the spectrum calculated by the spectrum calculation unit when the stained specimen is observed in the bright field in the modification of the second embodiment of the present invention. 図12は、本発明の実施の形態3に係る分光装置である撮像装置の構成を示すブロック図である。FIG. 12 is a block diagram showing a configuration of an imaging apparatus that is a spectroscopic apparatus according to Embodiment 3 of the present invention. 図13は、本発明の実施の形態4に係る分光装置の構成を示すブロック図である。FIG. 13 is a block diagram showing a configuration of a spectroscopic device according to Embodiment 4 of the present invention. 図14は、本発明の実施の形態4に係る分光装置が行う交差角度決定処理の概要を示すフローチャートである。FIG. 14 is a flowchart showing an outline of the intersection angle determination process performed by the spectroscopic device according to Embodiment 4 of the present invention. 図15は、本発明の実施の形態4に係る分光装置が、2つのリニアバリアブルフィルタの交差角度が90°の場合に取得した透過パターンにおける画素の信号値の分布例を模式的に示す図である。FIG. 15 is a diagram schematically illustrating an example of distribution of pixel signal values in a transmission pattern acquired when the spectroscopic device according to Embodiment 4 of the present invention has an intersection angle of two linear variable filters of 90 °. is there. 図16は、本発明の実施の形態4に係る分光装置が、2つのリニアバリアブルフィルタの交差角度が鋭角である場合に取得した透過パターンにおける画素の信号値の分布例を模式的に示す図である。FIG. 16 is a diagram schematically illustrating a distribution example of pixel signal values in a transmission pattern acquired when the spectroscopic device according to Embodiment 4 of the present invention has an acute angle between two linear variable filters. is there.

 以下、添付図面を参照して、本発明を実施するための形態(以下、「実施の形態」という)を説明する。 DETAILED DESCRIPTION Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings.

(実施の形態1)
 図1は、本発明の実施の形態1に係る分光装置の構成を示すブロック図である。同図に示す分光装置1は、光源の分光特性を検出する装置である。分光装置1は、分光ユニットである分光部2と、分光部2によって結像された光を撮像して撮像信号を生成する撮像部3と、撮像部3が生成した撮像信号に対して演算を行う演算部4と、分光装置1を操作する指示信号を含む各種信号の入力を受け付ける入力部5と、光源の分光特性に関する情報を含む各種情報を表示する表示部6と、各種情報を記憶する記憶部7と、分光装置1の動作を統括して制御する制御部8とを備える。
(Embodiment 1)
FIG. 1 is a block diagram showing the configuration of the spectroscopic device according to Embodiment 1 of the present invention. The spectroscopic device 1 shown in the figure is a device that detects the spectral characteristics of a light source. The spectroscopic device 1 performs an operation on a spectroscopic unit 2 that is a spectroscopic unit, an image capturing unit 3 that captures an image of light imaged by the spectroscopic unit 2 and generates an image signal, and an imaging signal generated by the image capturing unit 3. An arithmetic unit 4 to perform, an input unit 5 that receives input of various signals including an instruction signal for operating the spectroscopic device 1, a display unit 6 that displays various types of information including information on the spectral characteristics of the light source, and various types of information are stored. A storage unit 7 and a control unit 8 that controls the overall operation of the spectroscopic device 1 are provided.

 分光部2は、フィルタ部21と、結像光学系22とを有する。フィルタ部21は、光の透過中心波長が予め設定された方向に沿って連続的に変化する平板状のリニアバリアブルフィルタ(以下、LVFという)23、24が、厚さ方向が揃った態様で該厚さ方向に沿って並んでいる。LVF23とLVF24とは、厚さ方向と直交する投影面で、各LVFを透過する中心波長(以下、透過中心波長という)の変化方向が交差している。LVF23とLVF24は、主面が同じ正方形状をなしており、厚さ方向に沿って互いの中心が一致するように配置されている。本実施の形態1において、LVF23とLVF24は、光を透過する特性が同じであるとする。なお、LVF23とLVF24は、光を透過する特性が同じでなくてもよく、各々の透過波長帯域の少なくとも一部が共通であればよい。また、LVF23とVFE24は、厚さ方向に接触した状態で重ねて配置してもよいし、離間して配置してもよい。ただし、離間して配置する場合には、LVF23とLVF24との間に別の構成要素は何も設けない。LVF23およびLVF24は、一方が第1フィルタであり、他方が第2フィルタである。 The spectroscopic unit 2 includes a filter unit 21 and an imaging optical system 22. The filter unit 21 includes flat linear variable filters (hereinafter referred to as LVF) 23 and 24 in which the transmission center wavelength of light continuously changes along a preset direction in a manner in which the thickness direction is aligned. It is lined up along the thickness direction. The LVF 23 and the LVF 24 are projection planes orthogonal to the thickness direction, and the direction of change of the center wavelength (hereinafter referred to as the transmission center wavelength) that passes through each LVF intersects. The LVF 23 and the LVF 24 have the same square main surface, and are arranged so that their centers coincide with each other along the thickness direction. In the first embodiment, it is assumed that the LVF 23 and the LVF 24 have the same light transmission characteristics. Note that the LVF 23 and the LVF 24 do not have to have the same characteristics of transmitting light, and it is sufficient that at least a part of each transmission wavelength band is common. Further, the LVF 23 and the VFE 24 may be arranged so as to be in contact with each other in the thickness direction, or may be arranged apart from each other. However, in the case where they are arranged apart from each other, no other component is provided between the LVF 23 and the LVF 24. One of the LVF 23 and the LVF 24 is a first filter, and the other is a second filter.

 図2は、LVF23の特性を模式的に示す図であり、フィルタ内の位置とその位置で最も透過率が高い透過中心波長との関係を示す図である。図2の左右方向で左から右に向かう方向であってLVF23の対向する2辺と平行な方向をx軸方向として、LVF23の左端の位置をx=0、右端の位置をx=xmaxとする。LVF23は、x軸方向の位置がx=0からx=xmaxに変化するつれて、各位置における透過中心波長λが連続的にかつ線形に増加する(図2の直線Lを参照)。例えば、左端x=0における透過中心波長λminは380nmであり、右端x=xmaxにおける透過中心波長λmaxは710nmである。図2では、x=xn(n=1~4;0<xn<xmax)における透過中心波長をλnとしている。なお、図2においてLVF23に記載された4本の縦線は、透過する波長帯域が同じである位置を結んだ仮想的な線である。したがって、4本の縦線は、透過中心波長が変化する方向すなわち図2のx軸方向と直交している。 FIG. 2 is a diagram schematically illustrating the characteristics of the LVF 23, and is a diagram illustrating a relationship between a position in the filter and a transmission center wavelength having the highest transmittance at the position. The left-right direction in FIG. 2 is a direction from left to right and parallel to two opposing sides of the LVF 23, and the left end position of the LVF 23 is x = 0 and the right end position is x = x max . To do. LVF23 the position of the x-axis direction is brought changes from x = 0 to x = x max, the transmission center wavelength λ at each position is increased continuously and linearly (see line L in FIG. 2). For example, the transmission center wavelength lambda min at the left end x = 0 is 380 nm, the transmission center wavelength lambda max at the right end x = x max is 710 nm. In FIG. 2, the transmission center wavelength at x = x n (n = 1 to 4; 0 <x n <x max ) is λ n . In FIG. 2, the four vertical lines described in the LVF 23 are virtual lines connecting positions where the transmitted wavelength bands are the same. Therefore, the four vertical lines are orthogonal to the direction in which the transmission center wavelength changes, that is, the x-axis direction in FIG.

 図3は、LVF23の代表的な位置における光の透過率を模式的に示す図である。図3では、x=0、xn(n=1~4)、xmaxをそれぞれ透過する光の透過率を模式的に示している。例えば、x=0を透過する光のスペクトルSminは、透過中心波長λminを有する。同様に、x=xnを透過する光のスペクトルSnは、透過中心波長λnを有し、x=xmaxを透過する光のスペクトルSmaxは、透過中心波長λmaxを有する。図3からも明らかなように、LVF23の各位置における透過光のスペクトルは、透過中心波長における透過率がほぼ均一であるとともに、帯域幅もほぼ均一である。 FIG. 3 is a diagram schematically showing the light transmittance at typical positions of the LVF 23. FIG. 3 schematically shows the transmittance of light passing through x = 0, x n (n = 1 to 4), and x max . For example, the spectrum S min of light that passes through x = 0 has a transmission center wavelength λ min . Similarly, the spectrum S n of the light transmitted through the x = x n has a transmission center wavelength lambda n, the spectrum S max of the light transmitted through the x = x max has a transmission center wavelength lambda max. As is clear from FIG. 3, the spectrum of transmitted light at each position of the LVF 23 has substantially uniform transmittance at the transmission center wavelength and substantially uniform bandwidth.

 図4は、フィルタ部21の構成を模式的に示す図であり、LVF23およびLVF24の厚さ方向と直交する投影面で見たときのLVF23とLVF24の位置関係を模式的に示す図である。なお、図4では、図2の縦線と同様に、透過する波長帯域が同じである位置を結んだ仮想的な直線を記載している。LVF23とLVF24の中心を一致させ、LVF24がLVF23に対して各LVFの中心軸であって紙面と直交する中心軸に対して反時計回りに角度θだけ回転した状態を示している。以下、この角度θのことを交差角度という。交差角度θは任意に設定することが可能である。また、交差角度θを手動または自動によって変更可能とすることも可能である。例えば、交差角度θが90°である場合、LVF23、24の対角線上において同一の透過特性が重なりあう。この場合、フィルタ部21は、0°<θ≦90°の中で最も多くの透過特性の組み合わせを実現することができる。その一方で、交差角度θが90°である場合には、狭帯域における透過光の光量は少なく、信号レベルが低くなる。 FIG. 4 is a diagram schematically illustrating the configuration of the filter unit 21, and is a diagram schematically illustrating the positional relationship between the LVF 23 and the LVF 24 when viewed on the projection plane orthogonal to the thickness directions of the LVF 23 and the LVF 24. In FIG. 4, as with the vertical line in FIG. 2, a virtual straight line connecting positions where the transmitted wavelength bands are the same is shown. The centers of the LVF 23 and the LVF 24 are made coincident with each other, and the LVF 24 is rotated by an angle θ counterclockwise with respect to the central axis of each LVF relative to the LVF 23 and perpendicular to the paper surface. Hereinafter, this angle θ is referred to as a crossing angle. The crossing angle θ can be set arbitrarily. It is also possible to change the intersection angle θ manually or automatically. For example, when the crossing angle θ is 90 °, the same transmission characteristics overlap on the diagonal lines of the LVFs 23 and 24. In this case, the filter unit 21 can realize the most combinations of transmission characteristics in 0 ° <θ ≦ 90 °. On the other hand, when the intersection angle θ is 90 °, the amount of transmitted light in the narrow band is small and the signal level is low.

 図4に示す点Pは、LVF23とLVF24の中心であって透過中心波長がともにλPである点である。図4に示す点Qは、LVF23の透過中心波長がλPである一方、LVF24の透過中心波長がλQ(<λP)である点である。図4に示す点Rは、LVF23の透過中心波長がλPである一方、LVF24の透過中心波長がλR(<λQ)である点である。 A point P shown in FIG. 4 is a point that is the center of the LVF 23 and the LVF 24 and both of the transmission center wavelengths are λ P. A point Q shown in FIG. 4 is a point where the transmission center wavelength of the LVF 23 is λ P , while the transmission center wavelength of the LVF 24 is λ Q (<λ P ). The point R shown in FIG. 4 is that the transmission center wavelength of the LVF 23 is λ P , while the transmission center wavelength of the LVF 24 is λ R (<λ Q ).

 フィルタ部21の各位置の透過特性は、LVF23の透過特性とLVF24の透過特性との共通波長領域における積となる。図5は、図4に示す点Pにおいて透過する光のスペクトルを模式的に示す図である。図5に示すスペクトルSPは透過中心波長がλPであり、LVF23の点Pにおける透過特性を与えるスペクトルS1Pと、LVF24の点Pにおける透過特性を与えるスペクトルS2Pとの積によって得られる透過特性である。この場合、スペクトルS1PとスペクトルS2Pは一致する。スペクトルSPの透過波長帯域ΔλPPは、スペクトルS1P、S2Pの透過波長帯域とほぼ同じである。図4において点Pを通過する直線L1は、LVF23とLVF24の透過中心波長が等しい点の集合である。直線L1上の各点における透過光のスペクトルは、透過波長帯域が互いに異なるものの、図5に示すスペクトルSPと同様の透過率分布を有する。 The transmission characteristics at each position of the filter unit 21 are the products in the common wavelength region of the transmission characteristics of the LVF 23 and the transmission characteristics of the LVF 24. FIG. 5 is a diagram schematically showing a spectrum of light transmitted at the point P shown in FIG. The spectrum S P shown in FIG. 5 has a transmission center wavelength of λ P , and the transmission obtained by the product of the spectrum S 1P that gives the transmission characteristic at the point P of the LVF 23 and the spectrum S 2P that gives the transmission characteristic at the point P of the LVF 24. It is a characteristic. In this case, the spectrum S 1P and the spectrum S 2P match. Transmission wavelength band [Delta] [lambda] PP of the spectrum S P is substantially the same spectrum S 1P, the transmission wavelength band of the S 2P. In FIG. 4, a straight line L1 passing through the point P is a set of points where the transmission center wavelengths of the LVF 23 and the LVF 24 are equal. Spectrum of the transmitted light at each point on the straight line L1, while the transmission wavelength band are different from each other, have the same transmittance distribution and the spectrum S P shown in FIG.

 図6は、図4に示す点Qにおいて透過する光のスペクトルを模式的に示す図である。図6に示すスペクトルSQは、LVF23の点Qにおける透過特性を与えるスペクトルS1Qと、LVF24の点Qにおける透過特性を与えるスペクトルS2Qとの積によって得られる透過特性である。スペクトルSQの透過中心波長は(λP+λQ)/2であり、透過波長帯域ΔλPQは図5に示すスペクトルSPの透過波長帯域ΔλPPよりも狭い。また、透過中心波長(λP+λQ)/2における透過率は、スペクトルSPの透過中心波長λPにおける透過率よりも小さい。図4において点Qを通過する直線L2は、LVF23とLVF24の透過中心波長の差がλP-λQである点の集合である。直線L2上の各点における透過光のスペクトルは、透過波長帯域が互いに異なるものの、図6に示すスペクトルSQと同様の透過率分布を有する。 FIG. 6 is a diagram schematically showing a spectrum of light transmitted at the point Q shown in FIG. The spectrum S Q shown in FIG. 6 is a transmission characteristic obtained by the product of the spectrum S 1Q that gives the transmission characteristic at the point Q of the LVF 23 and the spectrum S 2Q that gives the transmission characteristic at the point Q of the LVF 24. The transmission center wavelength of the spectrum S Q is (λ P + λ Q ) / 2, and the transmission wavelength band Δλ PQ is narrower than the transmission wavelength band Δλ PP of the spectrum S P shown in FIG. The transmittance at the transmission center wavelength (λ P + λ Q ) / 2 is smaller than the transmittance at the transmission center wavelength λ P of the spectrum S P. In FIG. 4, a straight line L2 passing through the point Q is a set of points where the difference between the transmission center wavelengths of the LVF 23 and the LVF 24 is λ P −λ Q. The spectrum of the transmitted light at each point on the straight line L2 has the same transmittance distribution as the spectrum S Q shown in FIG.

 図7は、図4に示す点Rにおいて通過する光のスペクトルを模式的に示す図である。図7に示すスペクトルSRは、LVF23の点Rにおける透過特性を与えるスペクトルS1Rと、LVF24の点Rにおける透過特性を与えるスペクトルS2Rとの積によって得られる透過特性である。スペクトルSRの透過中心波長は(λP+λR)/2であり、透過波長帯域ΔλPRは図6に示す透過波長帯域ΔλPQよりも狭い。また、透過中心波長(λP+λR)/2における透過率は、スペクトルSQの透過中心波長λQにおける透過率よりも小さい。図4において点Rを通過する直線L3は、LVF23とLVF24の透過中心波長の差がλP-λRである点の集合である。直線L3上の各点における透過光のスペクトルは、透過波長帯域が互いに異なるものの、図7に示すスペクトルSRと同様の透過率分布を有する。 FIG. 7 is a diagram schematically showing a spectrum of light passing at the point R shown in FIG. The spectrum S R shown in FIG. 7 is a transmission characteristic obtained by the product of the spectrum S 1R that gives the transmission characteristic at the point R of the LVF 23 and the spectrum S 2R that gives the transmission characteristic at the point R of the LVF 24. The transmission center wavelength of the spectrum S R is (λ P + λ R ) / 2, and the transmission wavelength band Δλ PR is narrower than the transmission wavelength band Δλ PQ shown in FIG. Further, the transmittance at the transmission center wavelength (λ P + λ R ) / 2 is smaller than the transmittance at the transmission center wavelength λ Q of the spectrum S Q. In FIG. 4, a straight line L3 passing through the point R is a set of points where the difference between the transmission center wavelengths of the LVF 23 and the LVF 24 is λ P −λ R. Spectrum of the transmitted light at each point on the straight line L3, although the transmission wavelength band are different from each other, have the same transmittance distribution and the spectrum S R shown in FIG.

 フィルタ部21においては、同じ点におけるLVF23の透過中心波長とLVF24の透過中心波長との差の絶対値が大きい位置ほど、透過中心波長における透過率および透過波長帯域は小さくなる。このため、図4に示す直線L1からの距離が遠い点ほど、透過波長帯域が狭くかつ透過光量が小さい。なお、LVF23の透過波長帯域とLVF24の透過波長帯域が重なりを有しない位置では、フィルタ部21全体としての透過率がゼロとなる。フィルタ部21の各位置における透過光のスペクトルに関する情報を含む透過特性は、記憶部7が有するフィルタ情報記憶部71に予め記憶されている。 In the filter unit 21, the transmittance and the transmission wavelength band at the transmission center wavelength become smaller as the absolute value of the difference between the transmission center wavelength of the LVF 23 and the transmission center wavelength of the LVF 24 at the same point increases. For this reason, the farther the distance from the straight line L1 shown in FIG. 4, the narrower the transmission wavelength band and the smaller the transmitted light amount. Note that the transmittance of the filter unit 21 as a whole is zero at a position where the transmission wavelength band of the LVF 23 and the transmission wavelength band of the LVF 24 do not overlap. Transmission characteristics including information related to the spectrum of transmitted light at each position of the filter unit 21 are stored in advance in the filter information storage unit 71 of the storage unit 7.

 以上説明した構成を有するフィルタ部21によれば、光の入射位置に応じて異なるスペクトルを有する透過光を得ることができ、同一平面上で様々な透過特性を実現することができる。また、1つのLVFの各点における透過波長帯域が広い場合であっても、2つのLVFを重ね合わせることによって狭い透過波長帯域を有する透過光を得ることができる。このようなフィルタ部21を設けることにより、光源9が輝線を含み波長ごとの強度が大きく異なる光を発する場合であっても、透過光を選択的に使用することによって各波長の信号強度を均一にすることができる。 According to the filter unit 21 having the configuration described above, it is possible to obtain transmitted light having a different spectrum depending on the incident position of light, and to realize various transmission characteristics on the same plane. Further, even when the transmission wavelength band at each point of one LVF is wide, transmitted light having a narrow transmission wavelength band can be obtained by superimposing the two LVFs. By providing such a filter unit 21, even when the light source 9 emits light including bright lines and having greatly different intensities for each wavelength, the signal intensity of each wavelength is made uniform by selectively using transmitted light. Can be.

 撮像部3は、フィルタ部21を透過し、結像光学系22が結像した光を撮像する。撮像部3は、結像した光を光電変換することによって撮像信号を生成して出力する撮像素子31を有する。撮像素子31は、CCD(Charge Coupled Device)またはCMOS(Complementery Metal Oxide Semiconductor)等のイメージセンサを用いて構成される。撮像素子31は、フィルタ部21の透過パターンを示す画像を撮像し、該画像に対応する撮像信号を生成する。 The imaging unit 3 images the light that has passed through the filter unit 21 and has been imaged by the imaging optical system 22. The imaging unit 3 includes an imaging element 31 that generates and outputs an imaging signal by photoelectrically converting the imaged light. The image pickup device 31 is configured using an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). The image sensor 31 captures an image indicating the transmission pattern of the filter unit 21 and generates an image signal corresponding to the image.

 演算部4は、撮像部3が出力した撮像信号を解析する画像解析部41と、画像解析部41の解析結果に基づいて撮像信号のスペクトルを算出するスペクトル算出部42とを有する。 The calculation unit 4 includes an image analysis unit 41 that analyzes the imaging signal output from the imaging unit 3 and a spectrum calculation unit 42 that calculates the spectrum of the imaging signal based on the analysis result of the image analysis unit 41.

 画像解析部41は、記憶部7のフィルタ情報記憶部71が記憶するフィルタ情報および記憶部7の感度情報記憶部72が記憶する撮像素子31の感度情報を参照し、撮像部3が生成した撮像信号から所定の画素の信号を抽出する。画像解析部41は、LVF23およびLVF24の厚さ方向と直交する投影面におけるLVF23およびLVF24の中心(図4の点P)を通過するとともに、LVF23およびLVF24の透過波長帯域が一致する位置を投影面に投影したときの位置を通過する直線上の点に対応する画素の信号を抽出する。以下、この直線を中心線という。例えば、図4に示す場合、直線L1が中心線である。 The image analysis unit 41 refers to the filter information stored in the filter information storage unit 71 of the storage unit 7 and the sensitivity information of the image sensor 31 stored in the sensitivity information storage unit 72 of the storage unit 7, and the imaging generated by the imaging unit 3 A signal of a predetermined pixel is extracted from the signal. The image analysis unit 41 passes the center of the LVF 23 and the LVF 24 (point P in FIG. 4) on the projection plane orthogonal to the thickness direction of the LVF 23 and the LVF 24, and sets the position where the transmission wavelength bands of the LVF 23 and the LVF 24 coincide with each other. A signal of a pixel corresponding to a point on a straight line passing through the position when projected onto is extracted. Hereinafter, this straight line is referred to as a center line. For example, in the case shown in FIG. 4, the straight line L1 is the center line.

 画像解析部41が抽出した信号の中に飽和する信号値を有するものがあった場合、画像解析部41は、飽和する信号値を出力する画素(飽和画素)の近傍に位置する画素であって投影面上で対応する点が中心線上に位置しない画素が出力する不飽和の信号値により、飽和画素の信号値を置換する。このとき、画像解析部41は、飽和画素からの距離が最も近い画素から順に探索していき、最初に見つかった不飽和の信号値によって飽和画素の信号値を置換する。不飽和の信号は、画像解析部41が最初に抽出する画素の信号よりも狭帯域である。そこで、画像解析部41は、置換された信号の帯域幅を、最初に抽出する画素の信号の帯域幅と一致させる補正を行う。なお、信号値を置換させた後も、その信号を出力した画素の位置は置換前の位置とする。 When the signal extracted by the image analysis unit 41 has a saturated signal value, the image analysis unit 41 is a pixel located in the vicinity of a pixel (saturated pixel) that outputs a saturated signal value. The signal value of the saturated pixel is replaced with the unsaturated signal value output by the pixel whose corresponding point on the projection plane is not located on the center line. At this time, the image analysis unit 41 searches in order from the pixel with the shortest distance from the saturated pixel, and replaces the signal value of the saturated pixel with the unsaturated signal value found first. The unsaturated signal has a narrower band than the pixel signal extracted first by the image analysis unit 41. Therefore, the image analysis unit 41 performs correction to match the bandwidth of the replaced signal with the bandwidth of the pixel signal to be extracted first. Even after the signal value is replaced, the position of the pixel that output the signal is the position before the replacement.

 なお、フィルタ情報記憶部71が各LVF23、24の透過特性に関する情報を個別に記憶しておき、画像解析部41がLVF23とLVF24との交差角度に応じて画素ごとの特性を算出するようにしてもよい。 The filter information storage unit 71 individually stores information regarding the transmission characteristics of the LVFs 23 and 24, and the image analysis unit 41 calculates the characteristics for each pixel in accordance with the intersection angle between the LVF 23 and the LVF 24. Also good.

 スペクトル算出部42は、画像解析部41が抽出した各画素の信号および各画素の位置に応じた透過波長帯域等の透過特性に基づいて撮像信号のスペクトルを算出する。スペクトル算出部42は、記憶部7が記憶するフィルタ部21の各位置におけるスペクトルの透過中心波長、フィルタ部21のフィルタ特性、および撮像部3の感度特性等の各種情報を参照することにより、波長ごとの相対強度を算出し、分光感度を示すスペクトルを算出して出力する。 The spectrum calculation unit 42 calculates the spectrum of the imaging signal based on the transmission characteristics such as the transmission wavelength band according to the signal of each pixel extracted by the image analysis unit 41 and the position of each pixel. The spectrum calculation unit 42 refers to various information such as the transmission center wavelength of the spectrum at each position of the filter unit 21 stored in the storage unit 7, the filter characteristics of the filter unit 21, and the sensitivity characteristics of the imaging unit 3. The relative intensity for each is calculated, and the spectrum indicating the spectral sensitivity is calculated and output.

 演算部4は、例えばCPU(Central Processing Unit)等の汎用プロセッサまたはASIC(Application Specific Integrated Circuit)もしくはFPGA(Field Programmable Gate Array)等の特定の機能を実行する専用の集積回路等を用いて構成され、記憶部7が記憶する各種プログラムを読み込むことによって各種演算処理を実行する。 The arithmetic unit 4 is configured using a general-purpose processor such as a CPU (Central Processing Unit) or a dedicated integrated circuit that executes a specific function such as an ASIC (Application Specific Integrated Circuit) or FPGA (Field Programmable Gate Array). Various arithmetic processes are executed by reading various programs stored in the storage unit 7.

 入力部5は、キーボード、各種ボタン、各種スイッチ等の入力デバイスや、マウスや表示部6の表示画面上に設けられるタッチパネル等のポインティングデバイスを含み、これらのデバイスに対して外部からなされる操作に応じた信号の入力を受け付けて制御部8に入力する。 The input unit 5 includes an input device such as a keyboard, various buttons, and various switches, and a pointing device such as a mouse and a touch panel provided on the display screen of the display unit 6. The input of the corresponding signal is received and input to the control unit 8.

 表示部6は、液晶または有機EL(Electro Luminescence)等からなる表示パネルを用いて構成され、スペクトル算出部42による算出結果を含む各種情報を表示する。 The display unit 6 is configured by using a display panel made of liquid crystal, organic EL (Electro Luminescence), or the like, and displays various types of information including a calculation result by the spectrum calculation unit 42.

 記憶部7は、LVF23、24に関する情報を記憶するフィルタ情報記憶部71と、撮像素子31の感度情報を記憶する感度情報記憶部72と、分光装置1が算出した光源9のスペクトル情報を記憶するスペクトル情報記憶部73とを有する。 The storage unit 7 stores a filter information storage unit 71 that stores information about the LVFs 23 and 24, a sensitivity information storage unit 72 that stores sensitivity information of the image sensor 31, and spectral information of the light source 9 calculated by the spectroscopic device 1. And a spectrum information storage unit 73.

 フィルタ情報記憶部71は、フィルタ部21における各位置における透過光のスペクトルを含む透過特性を記憶する。LVF23とLVF24の交差角度を変更可能な場合、フィルタ情報記憶部71は、交差角度の値に応じた各位置の透過特性を記憶する。 The filter information storage unit 71 stores transmission characteristics including a spectrum of transmitted light at each position in the filter unit 21. When the intersection angle between the LVF 23 and the LVF 24 can be changed, the filter information storage unit 71 stores the transmission characteristics at each position according to the value of the intersection angle.

 記憶部7は、撮像部3が取得した撮像信号や、演算部4および制御部8がそれぞれ実行する複数のプログラムおよび各種設定情報も記憶する。なお、プログラムは、コンピュータ読み取り可能な記録媒体に書き込んで記憶させてもよい。プログラムの記憶部7または記録媒体への書き込みは、コンピュータまたは記録媒体を製品として出荷する際に行ってもよいし、通信ネットワークを介したダウンロードにより行ってもよい。 The storage unit 7 also stores an imaging signal acquired by the imaging unit 3, a plurality of programs and various setting information respectively executed by the calculation unit 4 and the control unit 8. The program may be written and stored in a computer-readable recording medium. Writing of the program to the storage unit 7 or the recording medium may be performed when the computer or the recording medium is shipped as a product, or may be performed by downloading via a communication network.

 記憶部7は、RAM(Random Access Memory)等の揮発性メモリおよびROM(Read Only Memory)等の不揮発性メモリを用いて構成される。なお、外部から装着可能なメモリカード等のコンピュータ読み取り可能な記録媒体を用いて記憶部7を構成してもよい。 The storage unit 7 includes a volatile memory such as a RAM (Random Access Memory) and a nonvolatile memory such as a ROM (Read Only Memory). Note that the storage unit 7 may be configured using a computer-readable recording medium such as a memory card that can be externally mounted.

 制御部8は、CPU等の汎用プロセッサまたはASICもしくはFPGA等の特定の機能を実行する専用の集積回路等を用いて構成される。なお、制御部8と演算部4を同じ汎用プロセッサまたは集積回路によって構成することも可能である。 The control unit 8 is configured using a general-purpose processor such as a CPU or a dedicated integrated circuit that executes a specific function such as an ASIC or FPGA. Note that the control unit 8 and the calculation unit 4 can be configured by the same general-purpose processor or integrated circuit.

 以上の構成を有する分光装置1を用いて所望の光源9の分光特性を検出する際には、光源9が発した光を、均等拡散反射面を有する白色板10に照射し、白色板10によって空間的に均一なスペクトルを有する光にして分光装置1へ入射する。分光装置1では、分光部2のフィルタ部21が光源9からの光を場所ごとに異なる透過特性で透過した後、撮像部3が透過光を撮像して撮像信号を生成し、演算部4がその撮像信号のうち適切な領域の撮像信号を抽出して光源9のスペクトル(分光感度の特性)を算出する。光源9スペクトルの算出結果は、表示部6に表示される。 When the spectral characteristic of the desired light source 9 is detected using the spectroscopic device 1 having the above configuration, the white plate 10 having a uniform diffuse reflection surface is irradiated with light emitted from the light source 9, and the white plate 10 The light having a spatially uniform spectrum is incident on the spectroscopic device 1. In the spectroscopic device 1, after the filter unit 21 of the spectroscopic unit 2 transmits the light from the light source 9 with different transmission characteristics for each location, the imaging unit 3 captures the transmitted light and generates an imaging signal. An image pickup signal in an appropriate region is extracted from the image pickup signal, and the spectrum (spectral sensitivity characteristic) of the light source 9 is calculated. The calculation result of the light source 9 spectrum is displayed on the display unit 6.

 以上説明した本発明の実施の形態1によれば、2つの平板状のLVFにおける透過中心波長の変化方向が、厚さ方向と直交する投影面で交差しているため、フィルタ部の入射位置ごとに異なる透過特性によって光を透過させることができ、波長に応じて強度が大きく異なる光に対しても分光感度を正確に測定することができる。 According to the first embodiment of the present invention described above, the direction of change of the transmission center wavelength in the two flat plate-like LVFs intersects at the projection plane orthogonal to the thickness direction. Therefore, it is possible to transmit light with different transmission characteristics, and it is possible to accurately measure the spectral sensitivity even for light having greatly different intensities according to wavelengths.

 また、本実施の形態1によれば、フィルタ部の入射位置ごとに異なる透過特性によって光を透過させた後、その透過光を撮像した撮像信号から抽出した信号の画素の位置と透過特性との対応に基づいて撮像信号のスペクトルを算出するため、入射した光が波長に応じて強度が大きく異なる光であっても、その分光感度の特性を正確に取得することができる。 Further, according to the first embodiment, after transmitting light with different transmission characteristics for each incident position of the filter unit, the position of the pixel of the signal extracted from the imaging signal obtained by imaging the transmitted light and the transmission characteristics Since the spectrum of the imaging signal is calculated based on the correspondence, even if the incident light is light having greatly different intensities depending on the wavelength, the characteristics of the spectral sensitivity can be accurately acquired.

 また、本実施の形態1によれば、投影面上で中心線上に位置する点に対応する画素が出力した信号値を用いてスペクトルを算出する際、信号値が飽和した画素がある場合、飽和した信号値を、該信号値を出力する飽和画素の近傍に位置する画素であって投影面上で対応する点が中心線に含まれない画素が出力する不飽和の狭帯域の信号値に置換してスペクトルを算出するため、入射した光が輝線のような成分を有する場合であっても分光感度の特性を正確に取得することができる。 Further, according to the first embodiment, when a spectrum is calculated using a signal value output from a pixel corresponding to a point located on the center line on the projection plane, if there is a pixel in which the signal value is saturated, Is replaced with an unsaturated narrow-band signal value that is output by a pixel that is located in the vicinity of a saturated pixel that outputs the signal value and that does not include a corresponding point on the projection plane as a center line. Thus, since the spectrum is calculated, the spectral sensitivity characteristic can be accurately obtained even when the incident light has a component such as a bright line.

 上述した特許文献1に記載の技術において、フラット化フィルタはフラット化の対象とする光源の特性を反映したものでなければ効果を発揮しないため、本実施の形態1のように、様々な光源の分光感度の特性を検出する用途には適さない。この点に関し、本実施の形態1は、フラット化フィルタを使用していないため、様々な光源の分光感度の特性を検出するのに好適である。 In the technique described in Patent Document 1 described above, the flattening filter has no effect unless it reflects the characteristics of the light source to be flattened. It is not suitable for applications that detect spectral sensitivity characteristics. In this regard, the first embodiment is suitable for detecting the spectral sensitivity characteristics of various light sources since no flattening filter is used.

 加えて、上述した特許文献1に記載の技術のようにLVFを1つだけ使用する場合、狭帯域の透過特性を実現することは技術的にも難しい。この点に関し、本実施の形態1では、2つのLVFの厚さ方向を揃えて、厚さ方向に沿って2つのLVFを並べて配置することにより、狭帯域の透過特性を容易に実現することができる。したがって、本実施の形態1によれば、狭帯域の信号値を利用することにより、急峻なピークを有するスペクトルを算出することも可能となる。 In addition, when only one LVF is used as in the technique described in Patent Document 1 described above, it is technically difficult to realize a narrow band transmission characteristic. In this regard, in the first embodiment, it is possible to easily realize a narrow band transmission characteristic by aligning the thickness direction of the two LVFs and arranging the two LVFs side by side along the thickness direction. it can. Therefore, according to the first embodiment, it is possible to calculate a spectrum having a steep peak by using a narrow band signal value.

(実施の形態2)
 図8は、本発明の実施の形態2に係る分光装置である顕微鏡システムの構成を示すブロック図である。同図に示す顕微鏡システム100は、顕微鏡装置101と、制御装置102と、入力装置103と、表示装置104とを備える。このうち、入力装置103および表示装置104は、実施の形態1で説明した入力部5および表示部6とそれぞれ同様の機能を有する。本実施の形態2において、実施の形態1で説明した構成要素と同様の機能を有する構成要素には、実施の形態1と同じ符号を付して説明する。
(Embodiment 2)
FIG. 8 is a block diagram showing a configuration of a microscope system that is a spectroscopic device according to Embodiment 2 of the present invention. A microscope system 100 shown in FIG. 1 includes a microscope apparatus 101, a control apparatus 102, an input apparatus 103, and a display apparatus 104. Among these, the input device 103 and the display device 104 have the same functions as the input unit 5 and the display unit 6 described in the first embodiment, respectively. In the second embodiment, components having the same functions as those described in the first embodiment will be described with the same reference numerals as those in the first embodiment.

 顕微鏡装置101は、ステージ111、対物光学系112、結像光学系113、顕微鏡撮像部114、落射照明光源115、落射照明光学系116、蛍光キューブ117、透過照明光源118、透過照明光学系119、およびミラー120を有し、ステージ111に載置された標本SMPを観察するための装置である。 The microscope apparatus 101 includes a stage 111, an objective optical system 112, an imaging optical system 113, a microscope imaging unit 114, an epi-illumination light source 115, an epi-illumination optical system 116, a fluorescent cube 117, a transmission illumination light source 118, a transmission illumination optical system 119, And an apparatus for observing a specimen SMP placed on a stage 111, having a mirror 120.

 対物光学系112は、ステージ111の標本SMPを載置する面と対向して配置される。対物光学系112は、互いに交換可能な複数の対物レンズを含み、拡大倍率を変更可能である。対物光学系112を通過した光は結像光学系113によって結像され、顕微鏡撮像部114へ入射する。結像光学系113は複数のレンズを用いて構成され、ズーム倍率を変更可能である。顕微鏡撮像部114は、受光した光を光電変換して画像信号を生成する撮像素子を有する。顕微鏡撮像部114は、生成した画像信号を制御装置102へ出力する。なお、対物光学系112と結像光学系113との間の観察光路上で光をさらに分岐させ、分岐させた光路上に接眼レンズを設けてユーザが直接観察できる構成としてもよい。 The objective optical system 112 is arranged to face the surface on which the specimen SMP of the stage 111 is placed. The objective optical system 112 includes a plurality of interchangeable objective lenses, and the magnification can be changed. The light that has passed through the objective optical system 112 is imaged by the imaging optical system 113 and enters the microscope imaging unit 114. The imaging optical system 113 is configured by using a plurality of lenses, and the zoom magnification can be changed. The microscope imaging unit 114 includes an imaging element that photoelectrically converts received light to generate an image signal. The microscope imaging unit 114 outputs the generated image signal to the control device 102. Note that a configuration may be adopted in which light is further branched on the observation optical path between the objective optical system 112 and the imaging optical system 113, and an eyepiece is provided on the branched optical path so that the user can directly observe.

 落射照明光学系116は、落射照明光源115が出射した落射照明光を集光して観察光路へ導く種々の光学部材(フィルタユニット、シャッタ、視野絞り、開口絞り等)を含む。透過照明光学系119は、透過照明光源118が出射した透過照明光を集光し、ミラー120へ導く種々の光学部材(コレクタレンズ、フィルタユニット、視野絞り、シャッタ、開口絞り等)を含む。透過照明光学系119を通過した光は、ミラー120によって反射された後、観察光路上を伝播する。 The epi-illumination optical system 116 includes various optical members (filter unit, shutter, field stop, aperture stop, etc.) that collect the epi-illumination light emitted from the epi-illumination light source 115 and guide it to the observation optical path. The transmission illumination optical system 119 includes various optical members (collector lens, filter unit, field stop, shutter, aperture stop, etc.) that collect the transmission illumination light emitted from the transmission illumination light source 118 and guide it to the mirror 120. The light that has passed through the transmission illumination optical system 119 is reflected by the mirror 120 and then propagates along the observation optical path.

 蛍光キューブ117は、落射照明光源115が出射して落射照明光学系116を通過した光のうち、特定の波長帯域の光(励起光)を選択的に透過させる励起フィルタ117aと、励起フィルタ117aによって選択された励起光を反射するとともに、標本SMPが発生した蛍光を透過させるダイクロイックミラー117bと、標本SMPの方向から入射する光のうち蛍光のみを選択的に透過させる吸収フィルタ117cとをキューブ状に組み合わせてなる。蛍光キューブ117は蛍光観察を行う場合に観察光路上に挿入した状態となる。これに対して明視野観察を行う場合、蛍光キューブ117は観察光路から退避した状態となる。 The fluorescent cube 117 includes an excitation filter 117a that selectively transmits light (excitation light) in a specific wavelength band out of the light emitted from the incident illumination light source 115 and passed through the incident illumination optical system 116, and the excitation filter 117a. A dichroic mirror 117b that reflects the selected excitation light and transmits the fluorescence generated by the sample SMP, and an absorption filter 117c that selectively transmits only the fluorescence of light incident from the direction of the sample SMP are formed in a cube shape. Combined. The fluorescent cube 117 is inserted into the observation optical path when performing fluorescence observation. On the other hand, when performing bright field observation, the fluorescent cube 117 is retracted from the observation optical path.

 顕微鏡装置101は、さらに分光部2Aと、撮像部3Aと、標本SMPからの光を反射して分光部2Aに導くミラー121とを有する。ミラー121は、蛍光キューブ117と結像光学系113との間の観察光路上に挿抜自在に設けられる。ミラー121を観察光路に対して挿抜する機構は、手動でも電動でもよい。図8では、ミラー121が挿入された状態を示している。ミラー121は、観察光路に挿入された状態で、対物光学系112を通過した光を反射して分光部2Aへ入射させる。 The microscope apparatus 101 further includes a spectroscopic unit 2A, an imaging unit 3A, and a mirror 121 that reflects light from the sample SMP and guides it to the spectroscopic unit 2A. The mirror 121 is detachably provided on the observation optical path between the fluorescent cube 117 and the imaging optical system 113. The mechanism for inserting and removing the mirror 121 with respect to the observation optical path may be manual or electric. FIG. 8 shows a state where the mirror 121 is inserted. The mirror 121 reflects the light that has passed through the objective optical system 112 while being inserted in the observation optical path, and causes the light to enter the spectroscopic unit 2A.

 本実施の形態2に係る分光ユニットである分光部2Aは、光の入射側から順に結像光学系25、拡散光学系26、フィルタ部21および結像光学系22を有する。 The spectroscopic unit 2A, which is a spectroscopic unit according to the second embodiment, includes an imaging optical system 25, a diffusion optical system 26, a filter unit 21, and an imaging optical system 22 in order from the light incident side.

 図9は、拡散光学系26の構成を示す図である。拡散光学系26は、入射した光を拡散して均一化する光学系である。拡散光学系26は、結像光学系25によって結像される像が形成される位置に配置される視野絞り261と、視野絞り261を通過した光束を拡散する拡散板262と、拡散した光束を均一化する光束均一化光学素子263と、を含む。 FIG. 9 is a diagram showing a configuration of the diffusion optical system 26. The diffusion optical system 26 is an optical system that diffuses incident light to make it uniform. The diffusion optical system 26 includes a field stop 261 disposed at a position where an image formed by the imaging optical system 25 is formed, a diffusion plate 262 that diffuses a light beam that has passed through the field stop 261, and a diffused light beam. And a light beam homogenizing optical element 263 for homogenizing.

 拡散板262は、例えば、平板ガラスの片面を砂面に処理した材料や、ガラス内に光拡散物質を分散させた材料を用いて構成される。 The diffusion plate 262 is configured using, for example, a material obtained by processing one side of flat glass into a sand surface, or a material in which a light diffusing substance is dispersed in the glass.

 光束均一化光学素子263は、ガラスやプラスチック等を用いて形成された光透過性の部材からなり、入射面263aから入射した光束の少なくとも一部を側面263bで1または複数回反射させながら出射面263cに導光して出射させる。光束均一化光学素子263は、入射側から出射側へ向けて幅が広がった形状をなしており、出射面263cの面積は入射面263aの面積より大きい。また、光束均一化光学素子263の側面263bは、入射面263aから出射面263cにかけて、傾斜角度が次第に緩やかになる曲面をなす。なお、側面263bは曲面である必要はなく、平面によって構成してもよい。また、光束均一化光学素子263の光軸と直交する断面は、矩形でもよいし円形でもよいし、入射面263aが円形をなす一方、出射面263cが矩形をなしてもよい。 The light beam homogenizing optical element 263 is made of a light-transmitting member formed using glass, plastic, or the like, and emits light while reflecting at least part of the light beam incident from the incident surface 263a one or more times by the side surface 263b. The light is guided to 263c and emitted. The beam homogenizing optical element 263 has a shape whose width increases from the incident side to the emission side, and the area of the emission surface 263c is larger than the area of the incident surface 263a. Further, the side surface 263b of the light beam homogenizing optical element 263 has a curved surface whose inclination angle gradually decreases from the incident surface 263a to the exit surface 263c. Note that the side surface 263b does not need to be a curved surface, and may be configured by a flat surface. Further, the cross section perpendicular to the optical axis of the light beam homogenizing optical element 263 may be rectangular or circular, and the incident surface 263a may be circular, while the output surface 263c may be rectangular.

 以上の構成を有する拡散光学系26は、撮像素子31に照射される光束の照度分布を均一化することにより、スペクトルの測定精度を確保することができる。なお、拡散光学系26のより詳細な構成は、例えば特開2013-29322号公報に開示されている。 The diffusing optical system 26 having the above configuration can ensure the measurement accuracy of the spectrum by making the illuminance distribution of the light beam irradiated to the image sensor 31 uniform. A more detailed configuration of the diffusion optical system 26 is disclosed in, for example, Japanese Patent Application Laid-Open No. 2013-29322.

 撮像部3Aは、撮像部3と同様に撮像素子31を有し、フィルタ部21の透過パターンを示す画像に対応する撮像信号を生成して制御装置102へ出力する。 The imaging unit 3 </ b> A includes the imaging element 31 similarly to the imaging unit 3, generates an imaging signal corresponding to an image indicating the transmission pattern of the filter unit 21, and outputs the imaging signal to the control device 102.

 なお、以上の説明において、ミラー121、分光部2Aおよび撮像部3Aを単独の構成として説明したが、これらを一つのユニットとして構成してもよい。また、分光部2Aおよび撮像部3Aを一つのユニットとして構成してもよい。 In the above description, the mirror 121, the spectroscopic unit 2A, and the imaging unit 3A have been described as single components, but these may be configured as one unit. Further, the spectroscopic unit 2A and the imaging unit 3A may be configured as one unit.

 つぎに、制御装置102の構成を説明する。制御装置102は、演算部4Aと、記憶部7Aと、制御部8Aとを有する。 Next, the configuration of the control device 102 will be described. The control device 102 includes a calculation unit 4A, a storage unit 7A, and a control unit 8A.

 演算部4Aは、画像解析部41とスペクトル算出部42とを有する。スペクトル算出部42は、撮像信号に含まれる狭帯域の信号のピーク位置から蛍光のスペクトルの個数すなわち蛍光成分の個数を算出するとともに、その狭帯域の信号を出力する画素の位置と透過波長帯域との対応に基づいて蛍光のスペクトルを算出する。演算部4Aは、顕微鏡撮像部114が生成した画像信号に対して、オプティカルブラック減算処理、ホワイトバランス調整処理、カラーマトリクス演算処理、γ補正処理、色再現処理およびエッジ強調処理等を含む画像処理を行う。 The calculation unit 4A includes an image analysis unit 41 and a spectrum calculation unit 42. The spectrum calculation unit 42 calculates the number of fluorescent spectra, that is, the number of fluorescent components, from the peak position of the narrowband signal included in the imaging signal, and the position of the pixel that outputs the narrowband signal and the transmission wavelength band. The fluorescence spectrum is calculated on the basis of the correspondence. The calculation unit 4A performs image processing including optical black subtraction processing, white balance adjustment processing, color matrix calculation processing, γ correction processing, color reproduction processing, and edge enhancement processing on the image signal generated by the microscope imaging unit 114. Do.

 図10は、顕微鏡システム100を用いて蛍光観察を行う場合の作用を説明するための図である。顕微鏡システム100を用いて蛍光観察を行う場合、顕微鏡装置101では、落射照明光源115を点灯し、蛍光キューブ117を観察光路上に挿入する一方、透過照明光源118の電源をオフにする。この場合において、例えば、蛍光キューブ117の吸収フィルタ117cが緑色(G)の波長帯域の蛍光成分を透過するフィルタである場合、図10に示す感度曲線Gにおける波長帯域の光が透過する。この場合、標本SMPが図10に示す2つのスペクトルS1、S2の蛍光を発したとする。このような現象は、例えば標本SMPに少なくとも2つの蛍光物質が存在し、その2つの蛍光物質の波長が近接している場合に生じ得る。この場合、顕微鏡撮像部114、2つのスペクトルS1、S2の成分を含む画像を撮像することとなる。その結果、顕微鏡システム100では、顕微鏡撮像部114が撮像した画像から、本来検出したい蛍光(スペクトルS1、S2のいずれか一方)のみを検出することができない。 FIG. 10 is a diagram for explaining the operation when fluorescence observation is performed using the microscope system 100. When performing fluorescence observation using the microscope system 100, the microscope apparatus 101 turns on the epi-illumination light source 115 and inserts the fluorescent cube 117 on the observation optical path, while turning off the power of the transmission illumination light source 118. In this case, for example, when the absorption filter 117c of the fluorescent cube 117 is a filter that transmits a fluorescent component in the green (G) wavelength band, light in the wavelength band in the sensitivity curve G shown in FIG. 10 is transmitted. In this case, it is assumed that the sample SMP emits fluorescence of two spectra S1 and S2 shown in FIG. Such a phenomenon can occur, for example, when at least two fluorescent substances exist in the specimen SMP and the wavelengths of the two fluorescent substances are close to each other. In this case, an image including the components of the microscope imaging unit 114 and the two spectra S1 and S2 is captured. As a result, the microscope system 100 cannot detect only the fluorescence (either one of the spectra S1 and S2) that is originally desired to be detected from the image captured by the microscope imaging unit 114.

 この問題を解決するために、本実施の形態2では、顕微鏡撮像部114が撮像を行う前に、ミラー121を観察光路に挿入し、分光部2Aおよび撮像部3Aを用いて標本SMPが発する光のスペクトルを測定する。測定の結果、図10に示すスペクトルS1、S2のように、波長帯域が近接する2つの蛍光成分の存在を検出した場合、ユーザはこの2つの蛍光成分を分離して所望の蛍光成分のみを抽出することができる吸収フィルタ117cに交換する。これにより、顕微鏡撮像部114は所望の蛍光成分のみが写った蛍光画像を撮像することが可能となる。 In order to solve this problem, in the second embodiment, before the microscope imaging unit 114 performs imaging, the mirror 121 is inserted into the observation optical path, and the light emitted from the sample SMP using the spectroscopic unit 2A and the imaging unit 3A. Measure the spectrum of. As a result of the measurement, when the presence of two fluorescent components close to each other in wavelength band is detected as in the spectra S1 and S2 shown in FIG. 10, the user separates the two fluorescent components and extracts only the desired fluorescent component. The absorption filter 117c can be replaced. As a result, the microscope imaging unit 114 can capture a fluorescent image showing only a desired fluorescent component.

 なお、本実施の形態2において、算出されたスペクトルデータを顕微鏡撮像部114が撮影した画像のホワイトバランス(WB)の調整を行う際に利用してもよい。これにより、ホワイトバランスの調整を高精度に行うことができる。 In the second embodiment, the calculated spectral data may be used when adjusting the white balance (WB) of the image captured by the microscope imaging unit 114. Thereby, the white balance can be adjusted with high accuracy.

 以上説明した本発明の実施の形態2によれば、実施の形態1と同様、波長に応じて強度が大きく異なる光に対しても分光感度を正確に測定および取得することができ、狭帯域の信号値を利用することにより、急峻なピークを有するスペクトルを算出することもできる。 According to the second embodiment of the present invention described above, as in the first embodiment, it is possible to accurately measure and acquire the spectral sensitivity even for light having greatly different intensities depending on the wavelength. By using the signal value, a spectrum having a steep peak can be calculated.

 また、本実施の形態2によれば、標本が発する蛍光を予め測定することにより、適切な吸収フィルタを用いて所望の蛍光成分のみを含む観察画像を取得することが可能になる。 Further, according to the second embodiment, it is possible to acquire an observation image including only a desired fluorescent component using an appropriate absorption filter by measuring in advance the fluorescence emitted from the specimen.

(変形例)
 本実施の形態2の変形例では、顕微鏡システム100を用いて染色標本の明視野観察を行う。この場合、顕微鏡装置101では、落射照明光源115の電源をオフにし、蛍光キューブ117を観察光路から退避させるとともに、透過照明光源118を点灯する。ここで、明視野観察用の標本の染色としては、例えばヘマトキシリン及びエオシンの2つの色素を用いるヘマトキシリン・エオシン染色(HE染色)や、パパニコロウ染色(Pap染色)等の非蛍光染色を挙げることができる。
(Modification)
In the modification of the second embodiment, bright field observation of the stained specimen is performed using the microscope system 100. In this case, in the microscope apparatus 101, the epi-illumination light source 115 is turned off, the fluorescent cube 117 is retracted from the observation optical path, and the transmitted illumination light source 118 is turned on. Here, examples of staining of a specimen for bright field observation include non-fluorescent staining such as hematoxylin and eosin staining (HE staining) using two pigments of hematoxylin and eosin, and Papanicolaou staining (Pap staining). .

 図11は、顕微鏡装置101において、染色した標本を明視野観察した場合に、分光部2Aが透過して撮像部3Aが生成した撮像信号からスペクトル算出部42が算出したスペクトルの概要を説明する図である。図11に示す3本の曲線C、C1およびC2のうち、曲線Cは、色均質化処理を行う際の基準となるスペクトルを示している。これに対し、曲線C1およびC2は、異なる施設または技師が同じ染色による標本を作成したときに算出したスペクトルを示している。図11に示すように、染色標本は、染色ごと、施設ごと、技師ごとに色素の特性が異なることがある。 FIG. 11 is a diagram for explaining an outline of a spectrum calculated by the spectrum calculation unit 42 from an imaging signal transmitted by the spectroscopic unit 2A and generated by the imaging unit 3A when the stained specimen is observed in the bright field in the microscope apparatus 101. It is. Of the three curves C, C1, and C2 shown in FIG. 11, the curve C represents a spectrum that serves as a reference when performing the color homogenization process. On the other hand, the curves C1 and C2 show spectra calculated when different facilities or engineers create specimens with the same staining. As shown in FIG. 11, a dyed specimen may have different dye characteristics for each dyeing, for each facility, and for each engineer.

 本変形例では、分光部2Aを用いて分光した光を撮像部3Aが撮像して染色標本ごとのスペクトルを算出するため、基準となるスペクトルとの差(特性変化)を正確に推定することができる。その結果、顕微鏡撮像部114が明視野観察の染色標本を撮像した際の色均質化処理の精度を向上させることができる。 In this modification, since the imaging unit 3A captures the light separated using the spectroscopic unit 2A and calculates the spectrum for each stained specimen, it is possible to accurately estimate the difference (characteristic change) from the reference spectrum. it can. As a result, it is possible to improve the accuracy of the color homogenization process when the microscope imaging unit 114 images a stained specimen for bright field observation.

 特に、本変形例では、狭帯域の透過スペクトルを用いて染色標本全体のスペクトルを算出するため、従来の多バンドセンサ(トリトン)による測定のように、透過波長帯域が広くバンド間の透過波長帯域の重なりが多い手法と比較して、高精度でスペクトルを算出することができる。 In particular, in this modification, the spectrum of the entire stained specimen is calculated using a narrow-band transmission spectrum, so that the transmission wavelength band is wide and the transmission wavelength band between bands is the same as that measured by a conventional multiband sensor (Triton). The spectrum can be calculated with high accuracy compared to the method with many overlaps.

(実施の形態3)
 図12は、本発明の実施の形態3に係る分光装置である撮像装置の構成を示すブロック図である。同図に示す撮像装置200は、本体部201と、本体部201に着脱可能な分光部2Bとを備える。本実施の形態3においても、実施の形態1で説明した構成要素と同様の機能を有する構成要素には、実施の形態1と同じ符号を付して説明する。
(Embodiment 3)
FIG. 12 is a block diagram showing a configuration of an imaging apparatus that is a spectroscopic apparatus according to Embodiment 3 of the present invention. An imaging apparatus 200 shown in the figure includes a main body 201 and a spectroscopic unit 2B that can be attached to and detached from the main body 201. Also in the third embodiment, components having the same functions as those described in the first embodiment will be described with the same reference numerals as those in the first embodiment.

 本実施の形態3に係る分光ユニットである分光部2Bは、被写体と対向する前面側(光の入射側)から順に対物光学系27、結像光学系25、拡散光学系26、フィルタ部21および結像光学系22を有する。分光部2Bは、点状の領域から集光した光を拡散してフィルタ部21に入射する。この意味で、分光部2Bは、実施の形態2で説明した分光部2Aに対物光学系を加えた構成に相当している。分光部2Bは、通常撮影用のレンズユニットの代わりに本体部201に装着される。 The spectroscopic unit 2B which is a spectroscopic unit according to the third embodiment includes an objective optical system 27, an imaging optical system 25, a diffusion optical system 26, a filter unit 21 and a filter unit 21 in order from the front side (light incident side) facing the subject. An imaging optical system 22 is included. The spectroscopic unit 2 </ b> B diffuses the light collected from the dotted area and enters the filter unit 21. In this sense, the spectroscopic unit 2B corresponds to a configuration in which an objective optical system is added to the spectroscopic unit 2A described in the second embodiment. The spectroscopic unit 2B is attached to the main body unit 201 instead of the lens unit for normal photographing.

 本体部201は、撮像部3B、演算部4B、入力部5B、表示部6B、記憶部7B、および制御部8Bを有する。 The main body unit 201 includes an imaging unit 3B, a calculation unit 4B, an input unit 5B, a display unit 6B, a storage unit 7B, and a control unit 8B.

 撮像部3Bは、撮像素子31を有する。撮像素子31は、分光部2Bのフィルタ部21の透過パターンを示す画像に対応する撮像信号を生成する。 The imaging unit 3B includes an imaging element 31. The imaging element 31 generates an imaging signal corresponding to an image indicating the transmission pattern of the filter unit 21 of the spectroscopic unit 2B.

 演算部4Bは、画像解析部41とスペクトル算出部42とを有する。演算部4Bは、撮像部3Bが生成した撮像信号に対して各種画像処理を施す機能も有する。具体的には、演算部4Bは、実施の形態2で説明した演算部4Aと同様、画像信号に対して、オプティカルブラック減算処理、ホワイトバランス調整処理、カラーマトリクス演算処理、γ補正処理、色再現処理およびエッジ強調処理等を含む画像処理を行う。 The calculation unit 4B includes an image analysis unit 41 and a spectrum calculation unit 42. The calculation unit 4B also has a function of performing various image processing on the image pickup signal generated by the image pickup unit 3B. Specifically, the calculation unit 4B, like the calculation unit 4A described in the second embodiment, performs optical black subtraction processing, white balance adjustment processing, color matrix calculation processing, γ correction processing, color reproduction on an image signal. Image processing including processing and edge enhancement processing is performed.

 記憶部7Bは、フィルタ情報記憶部71、感度情報記憶部72およびスペクトル情報記憶部73を有する。また、記憶部7Bは、撮像部3Bが撮像し、演算部4Bによって画像処理が施された画像のデータを記憶する。 The storage unit 7B includes a filter information storage unit 71, a sensitivity information storage unit 72, and a spectrum information storage unit 73. In addition, the storage unit 7B stores data of an image captured by the imaging unit 3B and subjected to image processing by the calculation unit 4B.

 本実施の形態3において、算出されたスペクトルデータを撮像部3Bが撮影した画像のホワイトバランスの調整を行う際に利用することにより、輝線などのある光源などを撮影した場合であっても、ホワイトバランスの調整を高精度に行うことができる。 In the third embodiment, the calculated spectral data is used when adjusting the white balance of the image captured by the imaging unit 3B, so that even when a light source such as a bright line is captured, white The balance can be adjusted with high accuracy.

 以上説明した本発明の実施の形態3によれば、実施の形態1と同様、波長に応じて強度が大きく異なる光に対しても分光感度を正確に測定および取得することができ、狭帯域の信号値を利用することにより、急峻なピークを有するスペクトルを算出することもできる。 According to the third embodiment of the present invention described above, as in the first embodiment, it is possible to accurately measure and acquire spectral sensitivity even for light having greatly different intensities depending on the wavelength. By using the signal value, a spectrum having a steep peak can be calculated.

 また、本実施の形態3に係る分光装置は、通常の撮像装置の本体部に分光部2Bを装着させるとともに、演算部4Bの機能を実現させるためのソフトウェアをダウンロードすれば実現可能であるため、簡単に高精度な分光感度の測定を行うことができる。 In addition, the spectroscopic device according to the third embodiment can be realized by installing the spectroscopic unit 2B in the main body of a normal imaging device and downloading software for realizing the function of the arithmetic unit 4B. Highly accurate spectral sensitivity can be measured easily.

 なお、撮像装置200を塗板の色や光源のスペクトルなどの検査装置として適用する場合、演算部4Bがフィルタ部21の特性に基づいて得られる基準の透過パターンと撮像部3Bが撮像した画像における透過パターンとの間のマッチングをとることによって検査および判定を行うようにしてもよい。 When the imaging device 200 is applied as an inspection device such as a coating plate color or a light source spectrum, the reference transmission pattern obtained by the calculation unit 4B based on the characteristics of the filter unit 21 and the transmission in the image captured by the imaging unit 3B. Inspection and determination may be performed by matching the pattern.

(実施の形態4)
 本発明の実施の形態4は、2つのLVF23、24の交差角度を最適な角度に設定する機能を有する。図13は、本実施の形態4に係る分光装置の構成を示すブロック図である。同図に示す分光装置1Aは、実施の形態1で説明した分光装置1と同様の構成に加えて、LVF24を厚さ方向と平行な中心軸の周りに回転させるフィルタ駆動部11を有する。フィルタ駆動部11は、例えばLVF24を回転させるアクチュエータを用いて構成され、制御部8の制御のもとでLVF24を回転させることにより、実施の形態1で図4を参照して説明した投影面におけるLVF23との交差角度を変更する。
(Embodiment 4)
The fourth embodiment of the present invention has a function of setting the intersection angle between the two LVFs 23 and 24 to an optimum angle. FIG. 13 is a block diagram illustrating a configuration of the spectroscopic device according to the fourth embodiment. The spectroscopic device 1A shown in the figure includes a filter driving unit 11 that rotates the LVF 24 around a central axis parallel to the thickness direction in addition to the same configuration as the spectroscopic device 1 described in the first embodiment. The filter driving unit 11 is configured by using, for example, an actuator that rotates the LVF 24. By rotating the LVF 24 under the control of the control unit 8, the filter driving unit 11 on the projection plane described in the first embodiment with reference to FIG. The intersection angle with the LVF 23 is changed.

 演算部4の画像解析部41は、撮像信号で透過パターンを形成する画素の中で投影面において中心線と垂直な方向の縁端に位置する縁端画素の信号値をすべて抽出し、抽出した縁端画素の信号値の最大値を算出し、この最大値と所定の基準値とを比較する。ここで基準値は、決められた露光条件に対して基準値以上の画素が最大となるように設定するのが好ましい。このような基準値を、例えば画素の飽和信号値の10%程度に設定することができる。また、撮像信号のノイズレベルを考慮し、そのノイズレベルを上回るような値に基準値を設定することも可能である。 The image analysis unit 41 of the calculation unit 4 extracts and extracts all the signal values of the edge pixels located at the edge in the direction perpendicular to the center line on the projection plane among the pixels that form the transmission pattern with the imaging signal. The maximum value of the signal value of the edge pixel is calculated, and this maximum value is compared with a predetermined reference value. Here, the reference value is preferably set so that the number of pixels equal to or greater than the reference value is maximized with respect to the determined exposure condition. Such a reference value can be set to about 10% of the saturation signal value of the pixel, for example. In addition, considering the noise level of the imaging signal, the reference value can be set to a value that exceeds the noise level.

 フィルタ駆動部11は、画像解析部41の判定結果に基づいて、縁端画素の信号値の最大値が基準値以下である場合には、制御部8の制御のもとでLVF24を所定角度だけ回転駆動する。この所定角度は、例えば0.1°~30°程度であり、1°~5°程度であればより好ましい。 Based on the determination result of the image analysis unit 41, the filter drive unit 11 controls the LVF 24 by a predetermined angle under the control of the control unit 8 when the maximum value of the signal value of the edge pixel is equal to or less than the reference value. Rotation drive. The predetermined angle is, for example, about 0.1 ° to 30 °, and more preferably about 1 ° to 5 °.

 図14は、分光装置1Aが行う交差角度決定処理の概要を示すフローチャートである。まず、フィルタ駆動部11は、LVF23とLVF24の交差角度が90°となるようにLVF24を回転駆動する(ステップS1)。 FIG. 14 is a flowchart showing an outline of the intersection angle determination process performed by the spectroscopic apparatus 1A. First, the filter drive unit 11 rotationally drives the LVF 24 so that the intersection angle between the LVF 23 and the LVF 24 is 90 ° (step S1).

 続いて、画像解析部41は撮像部3から撮像信号を取得し(ステップS2)、透過パターンを形成する画素の中で中心線と垂直な方向の縁端に位置する縁端画素の信号値をすべて抽出する(ステップS3)。 Subsequently, the image analysis unit 41 acquires an imaging signal from the imaging unit 3 (step S2), and among the pixels forming the transmission pattern, the signal value of the edge pixel positioned at the edge in the direction perpendicular to the center line is obtained. All are extracted (step S3).

 この後、画像解析部41は、抽出した縁端画素の信号値の最大値を算出する(ステップS4)。 Thereafter, the image analysis unit 41 calculates the maximum signal value of the extracted edge pixels (step S4).

 続いて、画像解析部41は、算出した最大値が所定の基準値以下であるか否かを判定する(ステップS5)。判定の結果、最大値が基準値以下である場合(ステップS5:Yes)、制御部8はフィルタ駆動部11に対して制御信号を出力し、フィルタ駆動部11にLVF24を所定角度だけ回転駆動させる(ステップS6)。具体的には、フィルタ駆動部11は、図4に示す投影面上でLVF24を時計回りに所定角度だけ回転させる。 Subsequently, the image analysis unit 41 determines whether or not the calculated maximum value is equal to or less than a predetermined reference value (step S5). As a result of the determination, when the maximum value is equal to or less than the reference value (step S5: Yes), the control unit 8 outputs a control signal to the filter driving unit 11, and causes the filter driving unit 11 to rotationally drive the LVF 24 by a predetermined angle. (Step S6). Specifically, the filter drive unit 11 rotates the LVF 24 clockwise by a predetermined angle on the projection plane shown in FIG.

 ステップS6における回転の後の交差角度θが0°以下である場合(ステップS7:Yes)、制御部8は、フィルタ駆動部11に制御信号を出力し、LVF24を回転駆動させて予め設定された交差角度θ0とする(ステップS8)。この交差角度θ0は、例えば1°であるが、これは一例に過ぎない。一方、ステップS6における回転の後の交差角度θが0°より大きい場合(ステップS7:No)、分光装置1AはステップS2に戻る。 When the crossing angle θ after the rotation in step S6 is 0 ° or less (step S7: Yes), the control unit 8 outputs a control signal to the filter driving unit 11 to drive the LVF 24 in rotation and is preset. The intersection angle θ 0 is set (step S8). The intersection angle θ 0 is 1 °, for example, but this is only an example. On the other hand, when the crossing angle θ after the rotation in step S6 is larger than 0 ° (step S7: No), the spectroscopic device 1A returns to step S2.

 ステップS5において、最大値が基準値より大きい場合(ステップS5:No)、分光装置1Aは処理を終了する。これにより、LVF23とLVF24の交差角度が決定する。 In step S5, when the maximum value is larger than the reference value (step S5: No), the spectroscopic device 1A ends the process. Thereby, the intersection angle of LVF23 and LVF24 is determined.

 図15は、LVF23とLVF24の交差角度が90°である場合に、分光装置1Aが特定の光源9の光から取得した透過パターンにおける画素の信号値の分布例を模式的に示す図である。図15では、分光装置1Aの入射側から見たときの信号値の分布例を示している。図15に示す場合、透過パターンが存在する透過画素領域Bは、中心線Mに対して対称な形状をなしている。また、中心線Mと直交する方向に延びた部分画素領域Bm(m=1~5)は、中心線Mを通過する画素の信号値が最も高く、中心線Mから遠ざかるにつれて信号値が低くなっている。図15では、信号値の違いをパターンにより模式的に表現している。 FIG. 15 is a diagram schematically showing an example of pixel signal value distribution in the transmission pattern acquired from the light of the specific light source 9 by the spectroscopic device 1A when the crossing angle between the LVF 23 and the LVF 24 is 90 °. FIG. 15 shows an example of the distribution of signal values when viewed from the incident side of the spectroscopic device 1A. In the case illustrated in FIG. 15, the transmissive pixel region B where the transmissive pattern exists has a symmetrical shape with respect to the center line M. In the partial pixel region Bm (m = 1 to 5) extending in the direction orthogonal to the center line M, the signal value of the pixel passing through the center line M is the highest, and the signal value decreases as the distance from the center line M increases. ing. In FIG. 15, the difference in signal value is schematically represented by a pattern.

 図15に示す場合、部分画素領域Bmの中心線Mに垂直な方向の縁端に位置する縁端画素の信号値はすべて同じ(黒で記載)である。以下、この縁端画素の信号値が基準値に等しいものとする。このような信号を取得した場合、画像解析部41がステップS4で算出する縁端画素の信号値の最大値は基準値と等しい。したがって、画像解析部41は、最大値が基準値以下であると判定し(ステップS5:Yes)、フィルタ駆動部11はLVF24を所定角度だけ回転駆動する(ステップS6)。上述したように、LVF24の1回当たりの回転角度は0.1°~30°程度であるため、回転後の交差角度は0°以下とはならない。したがって、この後、分光装置1Aは、ステップS2に戻って撮像信号を取得する。 In the case shown in FIG. 15, the signal values of the edge pixels located at the edge in the direction perpendicular to the center line M of the partial pixel region Bm are all the same (shown in black). Hereinafter, it is assumed that the signal value of the edge pixel is equal to the reference value. When such a signal is acquired, the maximum signal value of the edge pixel calculated by the image analysis unit 41 in step S4 is equal to the reference value. Therefore, the image analysis unit 41 determines that the maximum value is equal to or less than the reference value (step S5: Yes), and the filter driving unit 11 rotationally drives the LVF 24 by a predetermined angle (step S6). As described above, since the rotation angle per rotation of the LVF 24 is about 0.1 ° to 30 °, the crossing angle after the rotation does not become 0 ° or less. Therefore, thereafter, the spectroscopic device 1A returns to step S2 to acquire an imaging signal.

 図16は、LVF23とLVF24の交差角度が鋭角(<90°)である場合に、分光装置1Aが図15と同じ光源9の光から取得した透過パターンにおける画素の信号値の分布例を模式的に示す図であり、図15と同じ光源9からの光の透過パターンを取得した場合の信号値の分布例を模式的に示す図である。図16においても、図15と同様に、分光装置1Aの入射側から見たときの信号値の分布例を示している。図16は、図15に示す状態(交差角度θ=90°の状態)からLVF24の回転を1または複数回行った後の状態を示している。 16 schematically illustrates an example of pixel signal value distribution in the transmission pattern obtained from the light of the same light source 9 as that in FIG. 15 when the crossing angle between the LVF 23 and the LVF 24 is an acute angle (<90 °). FIG. 16 is a diagram schematically illustrating an example of signal value distribution when a transmission pattern of light from the same light source 9 as in FIG. 15 is acquired. Also in FIG. 16, similarly to FIG. 15, an example of the distribution of signal values when viewed from the incident side of the spectroscopic device 1A is shown. FIG. 16 shows a state after the LVF 24 has been rotated one or more times from the state shown in FIG. 15 (intersection angle θ = 90 ° state).

 図16に示す透過画素領域B’は、図15に示す場合と同様に、中心線M’に対して対称な形状をなしている。中心線M’と垂直な方向に延びた部分画素領域Bm’(m=1~5)は、中心線M’を通過する画素の信号値が最も高く、中心線M’から遠ざかるにつれて信号値が低くなっている。透過画素領域B’は、図15に示す透過画素領域Bよりも広がっており、抽出された画素数が多い。5つの部分画素領域Bm’のうち、部分画素領域B3’では、縁端画素の信号値が基準値よりも大きい(網線で表示)。したがって、図16に示す場合、画像解析部41がステップS4で算出する縁端画素の信号値の最大値は基準値よりも大きくなる。したがって、画像解析部41は、最大値が基準値より大きいと判定する(ステップS5:No)。この場合、分光装置1Aは、LVF23とLVF24の交差角度決定処理を終了する。 The transmissive pixel region B ′ shown in FIG. 16 has a symmetric shape with respect to the center line M ′ as in the case shown in FIG. 15. In the partial pixel region Bm ′ (m = 1 to 5) extending in the direction perpendicular to the center line M ′, the signal value of the pixel passing through the center line M ′ is the highest, and the signal value increases as the distance from the center line M ′ increases. It is low. The transmissive pixel region B 'is wider than the transmissive pixel region B shown in FIG. 15, and the number of extracted pixels is large. Among the five partial pixel regions Bm ′, in the partial pixel region B3 ′, the signal value of the edge pixel is larger than the reference value (displayed by a mesh line). Therefore, in the case shown in FIG. 16, the maximum value of the signal value of the edge pixel calculated by the image analysis unit 41 in step S4 is larger than the reference value. Therefore, the image analysis unit 41 determines that the maximum value is larger than the reference value (step S5: No). In this case, the spectroscopic device 1A ends the intersection angle determination process between the LVF 23 and the LVF 24.

 なお、交差角度決定処理における交差角度の初期値はθ=90°でなくてもよい。例えば交差角度θの初期値を0°として、交差角度を徐々に大きくしていくようにしてもよいし、予め設定した初期値から開始して所定の規則にしたがって交差角度を増減させるようにもよい。 Note that the initial value of the crossing angle in the crossing angle determination process may not be θ = 90 °. For example, the initial value of the crossing angle θ may be set to 0 °, and the crossing angle may be gradually increased, or the crossing angle may be increased or decreased according to a predetermined rule starting from a preset initial value. Good.

 以上説明した本発明の実施の形態4によれば、実施の形態1と同様、波長に応じて強度が大きく異なる光に対しても分光感度を正確に測定および取得することができ、狭帯域の信号値を利用することにより、急峻なピークを有するスペクトルを算出することもできる。 According to the fourth embodiment of the present invention described above, as in the first embodiment, it is possible to accurately measure and acquire the spectral sensitivity even for light having greatly different intensities depending on the wavelength. By using the signal value, a spectrum having a steep peak can be calculated.

 また、本実施の形態4によれば、2つのLVFフィルタの一方を駆動させることによって最適な交差角度を設定することができるため、より高精度なスペクトルの算出を行うことができる。 Further, according to the fourth embodiment, since an optimum crossing angle can be set by driving one of the two LVF filters, a more accurate spectrum can be calculated.

 また、本実施の形態4によれば、交差角度を最適化することにより、飽和した信号値を有する画素を他の画素で置換する際の候補が増えるため、ノイズを低減する際の精度を一段と向上させることができる。 Further, according to the fourth embodiment, by optimizing the crossing angle, the number of candidates for replacing a pixel having a saturated signal value with another pixel increases. Therefore, the accuracy when reducing noise is further increased. Can be improved.

 なお、本実施の形態4において、フィルタ駆動部11を設ける代わりに、LVF24を操作者に手動で回転させる機構を設けてもよい。この場合には、操作者が手動で所定角度回転させることができる機構を設けるか、または操作者が交差角度の値を確認できるようなスケールを設けておくのが望ましい。 In the fourth embodiment, instead of providing the filter driving unit 11, a mechanism for manually rotating the LVF 24 by the operator may be provided. In this case, it is desirable to provide a mechanism that allows the operator to manually rotate the camera by a predetermined angle, or to provide a scale that allows the operator to check the value of the crossing angle.

 また、本実施の形態4において、フィルタ駆動部11がLVF23を回転駆動するようにしてもよいし、LVF23とLVF24をともに回転駆動するようにしてもよい。 In the fourth embodiment, the filter driving unit 11 may rotate the LVF 23, or both the LVF 23 and the LVF 24 may be rotated.

(その他の実施の形態)
 ここまで、本発明を実施するための形態を説明してきたが、本発明は上述した4つの実施の形態によってのみ限定されるべきものではない。例えば、実施の形態2、3において、実施の形態4で説明したフィルタ駆動部を追加し、2つのLVFの投影面上における交差角度を変更可能としてもよい。この場合には、実施の形態4と同様に、撮像信号の画素ごとの信号値を用いて最適な交差角度を決定すればよい。
(Other embodiments)
The embodiments for carrying out the present invention have been described so far, but the present invention should not be limited only by the above-described four embodiments. For example, in the second and third embodiments, the filter driving unit described in the fourth embodiment may be added so that the intersection angle of the two LVFs on the projection plane can be changed. In this case, as in the fourth embodiment, an optimal intersection angle may be determined using the signal value for each pixel of the imaging signal.

 また、2つのLVFの表面のなす形状や厚さは同じでなくてもよく、例えば回転駆動させる方のLVFの形状を相対的に小さくしたり厚さを薄くしたりしてもよい。 Also, the shape and thickness of the surfaces of the two LVFs do not have to be the same. For example, the shape of the LVF that is rotationally driven may be relatively small or the thickness may be thin.

 また、フィルタ部を構成するLVFは2つである必要はなく、複数のLVFを用いてフィルタ部を構成してもよい。この場合には、複数のLVFの厚さ方向を揃え、該厚さ方向に沿って複数のLVFを並べて配置すればよい。また、この場合にも隣接する2つのLVFを接触した状態で重ねて配置してもよいし、離間して配置してもよい。後者の場合には、隣接する2つのLVFの間に他の構成要素を何も設けない。 Further, the number of LVFs constituting the filter unit is not necessarily two, and the filter unit may be configured using a plurality of LVFs. In this case, the thickness direction of the plurality of LVFs may be aligned, and the plurality of LVFs may be arranged side by side along the thickness direction. Also in this case, two adjacent LVFs may be arranged in contact with each other, or may be arranged apart from each other. In the latter case, no other component is provided between two adjacent LVFs.

 このように、本発明は、ここでは記載していない様々な実施の形態を含みうるものであり、請求の範囲によって特定される技術的思想の範囲内で種々の設計変更等を行うことが可能である。 As described above, the present invention can include various embodiments not described herein, and various design changes can be made within the scope of the technical idea specified by the claims. It is.

 1、1A 分光装置
 2、2A、2B 分光部
 3、3A、3B 撮像部
 4、4A、4B 演算部
 5、5B 入力部
 6、6B 表示部
 7、7A、7B 記憶部
 8、8A、8B 制御部
 9 光源
 10 白色版
 11 フィルタ駆動部
 21 フィルタ部
 23、24 LVF
 25 結像光学系
 26 拡散光学系
 27 対物光学系
 31 撮像素子
 41 画像解析部
 42 スペクトル算出部
 71 フィルタ情報記憶部
 72 感度情報記憶部
 73 スペクトル情報記憶部
 100 顕微鏡システム
 101 顕微鏡装置
 102 制御装置
 103 入力装置
 104 表示装置
 120、121 ミラー
 200 撮像装置
 201 本体部
 261 視野絞り
 262 拡散板
 263 光束均一化光学素子
 B、B’ 透過画素領域
 B1~B5、B1’~B5’ 部分画素領域
 M、M’ 中心線
1, 1A Spectroscopic device 2, 2A, 2B Spectroscopic unit 3, 3A, 3B Imaging unit 4, 4A, 4B Calculation unit 5, 5B Input unit 6, 6B Display unit 7, 7A, 7B Storage unit 8, 8A, 8B Control unit 9 Light source 10 White plate 11 Filter drive unit 21 Filter unit 23, 24 LVF
25 imaging optical system 26 diffusion optical system 27 objective optical system 31 imaging device 41 image analysis unit 42 spectrum calculation unit 71 filter information storage unit 72 sensitivity information storage unit 73 spectrum information storage unit 100 microscope system 101 microscope device 102 control device 103 input Device 104 Display device 120, 121 Mirror 200 Imaging device 201 Main body portion 261 Field stop 262 Diffuser plate 263 Beam uniformizing optical element B, B ′ Transmission pixel region B1-B5, B1′-B5 ′ Partial pixel region M, M ′ center line

Claims (9)

 光の透過中心波長が予め設定された方向に沿って連続的に変化する平板状の第1フィルタと、
 光の透過中心波長が予め設定された方向に沿って連続的に変化する平板状の第2フィルタであって、該連続的に変化する透過中心波長の少なくとも一部が前記第1フィルタの透過中心波長と共通であり、前記第1フィルタと厚さ方向が揃った態様で該厚さ方向に沿って並んでおり、透過中心波長の変化方向が前記厚さ方向と直交する投影面で前記第1フィルタの透過中心波長の変化方向と交差する第2フィルタと、
 備えたことを特徴とする分光ユニット。
A flat plate-like first filter whose transmission center wavelength of light continuously changes along a preset direction;
A flat plate-like second filter in which the transmission center wavelength of light continuously changes along a preset direction, wherein at least part of the continuously changing transmission center wavelength is the transmission center of the first filter The first filter is a projection plane that is common to the wavelength and is arranged along the thickness direction in a manner in which the thickness direction is aligned with the first filter, and the change direction of the transmission center wavelength is orthogonal to the thickness direction. A second filter that intersects the direction of change of the transmission center wavelength of the filter;
Spectroscopic unit characterized by comprising.
 前記厚さ方向に沿って前記第1および第2フィルタよりも光が入射する位置に近い側に設けられ、入射した光を拡散して均一化する拡散光学系をさらに備えたことを特徴とする請求項1に記載の分光ユニット。 A diffusion optical system is provided on the side closer to the position where light enters than the first and second filters along the thickness direction, and diffuses and makes the incident light uniform. The spectroscopic unit according to claim 1.  前記第1フィルタの透過中心波長の変化方向と前記第2フィルタの透過中心波長の変化方向との前記投影面における交差角度は可変であることを特徴とする請求項1または2に記載の分光ユニット。 3. The spectroscopic unit according to claim 1, wherein an angle of intersection on the projection plane between a change direction of the transmission center wavelength of the first filter and a change direction of the transmission center wavelength of the second filter is variable. .  請求項1~3のいずれか一項に記載の分光ユニットと、
 前記分光ユニットを透過した光を撮像することによって撮像信号を生成する撮像部と、
 前記撮像信号に対して画素の位置と透過特性との対応に基づいた演算を行う演算部と、
 を備えたことを特徴とする分光装置。
The spectroscopic unit according to any one of claims 1 to 3,
An imaging unit that generates an imaging signal by imaging light transmitted through the spectroscopic unit;
A calculation unit that performs a calculation based on correspondence between a pixel position and transmission characteristics with respect to the imaging signal;
A spectroscopic device comprising:
 前記演算部は、
 前記撮像信号から所定の画素の信号を抽出する画像解析部と、
 前記画像解析部が抽出した各画素の信号および各画素の位置に応じた透過波長帯域に基づいて前記撮像信号のスペクトルを算出するスペクトル算出部と、
 を有することを特徴とする請求項4に記載の分光装置。
The computing unit is
An image analysis unit that extracts a signal of a predetermined pixel from the imaging signal;
A spectrum calculation unit that calculates a spectrum of the imaging signal based on a transmission wavelength band corresponding to the signal of each pixel extracted by the image analysis unit and the position of each pixel;
The spectroscopic device according to claim 4, comprising:
 前記画像解析部は、
 前記投影面における前記第1および第2フィルタの中心を通過するとともに、前記第1および第2フィルタの透過波長帯域が一致する位置を前記投影面に投影したときの位置を通過する直線上の点に対応する画素の信号を抽出することを特徴とする請求項5に記載の分光装置。
The image analysis unit
A point on a straight line that passes through the position when the projection wavelength plane is projected onto the projection plane while passing through the centers of the first and second filters on the projection plane. The spectroscopic device according to claim 5, wherein a signal of a pixel corresponding to is extracted.
 前記画像解析部は、
 抽出した画素の信号の中に飽和した信号値を有するものがある場合、該飽和した信号値を、該飽和した信号を出力する画素の近傍に位置する画素であって前記投影面上で対応する点が前記直線上に位置しない画素が出力する不飽和の信号値に置換することを特徴とする請求項6に記載の分光装置。
The image analysis unit
If there is a signal having a saturated signal value among the extracted pixel signals, the saturated signal value is a pixel located in the vicinity of the pixel that outputs the saturated signal and corresponds on the projection plane. 7. The spectroscopic apparatus according to claim 6, wherein a point is replaced with an unsaturated signal value output by a pixel whose position is not on the straight line.
 前記画像解析部は、
 前記不飽和の信号の帯域幅を前記直線上に位置する点に対応する画素が出力する信号の帯域幅と一致させる補正を行い、
 前記スペクトル算出部は、
 補正後の前記不飽和の信号値を用いて前記スペクトルを算出することを特徴とする請求項7に記載の分光装置。
The image analysis unit
Performing a correction to match the bandwidth of the unsaturated signal with the bandwidth of the signal output by the pixel corresponding to the point located on the straight line,
The spectrum calculation unit
The spectroscopic apparatus according to claim 7, wherein the spectrum is calculated using the unsaturated signal value after correction.
 前記第1および第2フィルタのいずれか一方を、前記第1および第2フィルタの中心を通過するとともに前記直線と直交する中心軸の周りに所定の角度だけ回転駆動するフィルタ駆動部と、
 前記フィルタ駆動部を制御する制御部と、
 をさらに備え、
 前記画像解析部は、
 前記撮像信号で透過パターンを形成する画素の中で前記直線と垂直な方向の縁端に位置する縁端画素の信号値の最大値を算出して基準値と比較し、
 前記制御部は、
 前記画像解析部が比較した結果、前記最大値が前記基準値より大きい場合、前記フィルタ駆動部に前記第1および第2フィルタのいずれか一方を前記所定の角度だけ回転駆動させることを特徴とする請求項6~8のいずれか一項に記載の分光装置。
A filter driving unit that drives one of the first and second filters by a predetermined angle around a central axis that passes through the centers of the first and second filters and is orthogonal to the straight line;
A control unit for controlling the filter driving unit;
Further comprising
The image analysis unit
The maximum value of the signal value of the edge pixel located at the edge in the direction perpendicular to the straight line among the pixels forming the transmission pattern by the imaging signal is compared with the reference value,
The controller is
If the maximum value is larger than the reference value as a result of the comparison by the image analysis unit, the filter driving unit causes either one of the first and second filters to be rotationally driven by the predetermined angle. The spectroscopic device according to any one of claims 6 to 8.
PCT/JP2016/071185 2016-07-19 2016-07-19 Spectroscopic unit and spectroscopic device Ceased WO2018016010A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2016/071185 WO2018016010A1 (en) 2016-07-19 2016-07-19 Spectroscopic unit and spectroscopic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2016/071185 WO2018016010A1 (en) 2016-07-19 2016-07-19 Spectroscopic unit and spectroscopic device

Publications (1)

Publication Number Publication Date
WO2018016010A1 true WO2018016010A1 (en) 2018-01-25

Family

ID=60992344

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/071185 Ceased WO2018016010A1 (en) 2016-07-19 2016-07-19 Spectroscopic unit and spectroscopic device

Country Status (1)

Country Link
WO (1) WO2018016010A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023032256A1 (en) * 2021-09-03 2023-03-09 ソニーセミコンダクタソリューションズ株式会社 Spectral sensitivity measurement device and spectral sensitivity measurement method

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5703357A (en) * 1993-09-27 1997-12-30 Shih; Ishiang Methods for wavelength discrimination of monochromatic light beams
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US20020140935A1 (en) * 1998-11-26 2002-10-03 Carter Christopher Frederick Versatile filter based spectrophotometer
US20040032584A1 (en) * 2002-08-15 2004-02-19 Tokuyuki Honda Optical channel monitoring device
JP2007527516A (en) * 2003-07-02 2007-09-27 ヴェリティー インストルメンツ,インコーポレイテッド Spectrometer dynamic range expansion apparatus and method based on charge coupled device
JP2011253078A (en) * 2010-06-03 2011-12-15 Nikon Corp Optical component and spectrophotometric apparatus
JP2013029322A (en) * 2011-07-26 2013-02-07 Olympus Corp Device for measuring wavelength distribution
WO2015087594A1 (en) * 2013-12-13 2015-06-18 コニカミノルタ株式会社 Spectroscopic unit and spectroscopic device using same

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5784507A (en) * 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US5703357A (en) * 1993-09-27 1997-12-30 Shih; Ishiang Methods for wavelength discrimination of monochromatic light beams
US20020140935A1 (en) * 1998-11-26 2002-10-03 Carter Christopher Frederick Versatile filter based spectrophotometer
US20040032584A1 (en) * 2002-08-15 2004-02-19 Tokuyuki Honda Optical channel monitoring device
JP2007527516A (en) * 2003-07-02 2007-09-27 ヴェリティー インストルメンツ,インコーポレイテッド Spectrometer dynamic range expansion apparatus and method based on charge coupled device
JP2011253078A (en) * 2010-06-03 2011-12-15 Nikon Corp Optical component and spectrophotometric apparatus
JP2013029322A (en) * 2011-07-26 2013-02-07 Olympus Corp Device for measuring wavelength distribution
WO2015087594A1 (en) * 2013-12-13 2015-06-18 コニカミノルタ株式会社 Spectroscopic unit and spectroscopic device using same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023032256A1 (en) * 2021-09-03 2023-03-09 ソニーセミコンダクタソリューションズ株式会社 Spectral sensitivity measurement device and spectral sensitivity measurement method

Similar Documents

Publication Publication Date Title
JP7424286B2 (en) Fluorescence observation device and fluorescence observation method
US11131840B2 (en) Microscope system and method for microscopic imaging
CN111095509B (en) Overlay metrology using multiple parameter configurations
US12130418B2 (en) Microscope system
KR20190128090A (en) Systems and Methods for Methodology with Layer-Specific Lighting Spectra
US20130258324A1 (en) Surface defect detecting apparatus and method of controlling the same
DE112012005960T5 (en) Software-defined microscope
US20230258918A1 (en) Digital microscope with artificial intelligence based imaging
WO2014125804A1 (en) Multispectral imaging device and multispectral imaging method
JP7370326B2 (en) Large field 3D spectroscopic microscopy
JP7197134B2 (en) Fluorometer and observation method
WO2021019597A1 (en) Nucleic acid analysis device and method
WO2018016010A1 (en) Spectroscopic unit and spectroscopic device
TW202426879A (en) Device and method for determining an image quality of at least one image for a subject
JP6430078B1 (en) MTF measuring apparatus and MTF measuring method
JP2021044694A (en) Fluorescence photography device
JP7669932B2 (en) Microscope device, spectrometer, and microscope system
CN105425376B (en) Digital microscope and its adjustment method
JP2023518448A (en) Fluorescence Microscopy and Methods for Imaging Objects
JP4844069B2 (en) In-pixel thickness measuring apparatus and measuring method
KR102729431B1 (en) An optical device capable of simultaneously measuring the angle and spectral emission of an object.
JP7458617B1 (en) Inspection lighting equipment, illumination optical system, and inspection system
WO2025054302A1 (en) Filter-based multispectral fluorescence microscope optimized for virtual staining
US10732129B2 (en) Apparatus for and method of performing inspection and metrology process
JP4500919B2 (en) Microscope device and object observation method

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16909485

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16909485

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP