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WO2018008310A1 - Appareil de décharge de plasma et machine de nettoyage à l'air - Google Patents

Appareil de décharge de plasma et machine de nettoyage à l'air Download PDF

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Publication number
WO2018008310A1
WO2018008310A1 PCT/JP2017/020671 JP2017020671W WO2018008310A1 WO 2018008310 A1 WO2018008310 A1 WO 2018008310A1 JP 2017020671 W JP2017020671 W JP 2017020671W WO 2018008310 A1 WO2018008310 A1 WO 2018008310A1
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Prior art keywords
pulse
voltage
generation circuit
circuit
voltage pulse
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PCT/JP2017/020671
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English (en)
Japanese (ja)
Inventor
林　雅則
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Panasonic Intellectual Property Management Co Ltd
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Panasonic Intellectual Property Management Co Ltd
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Priority to JP2018525980A priority Critical patent/JP6555562B2/ja
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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L9/00—Disinfection, sterilisation or deodorisation of air
    • A61L9/16—Disinfection, sterilisation or deodorisation of air using physical phenomena
    • A61L9/22—Ionisation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges

Definitions

  • the present invention relates to a plasma discharge device and an air cleaner that generate discharge in the air.
  • the conventional method has a problem that it takes several hours to decompose pollen and the like.
  • the present invention has been made to solve such a problem, and an object of the present invention is to provide a plasma discharge device and an air purifier that extinguish organic substances in the air in a very short time.
  • an aspect of the plasma discharge apparatus includes a discharge unit having an electrode pair insulated from each other by air, and a pulse generation circuit that generates a voltage pulse to be applied to the electrode pair.
  • the voltage pulse includes a high voltage pulse for starting discharge between the electrode pair, and a low voltage pulse applied to the electrode pair following the high voltage pulse and having a voltage value lower than the high voltage pulse
  • the pulse generation circuit includes a limiting circuit that limits an output current and an output voltage that are output when the low voltage pulse is applied to the electrode pair.
  • an aspect of the plasma discharge apparatus includes a discharge unit having a plurality of electrode pairs and a pulse generator that generates voltage pulses sequentially applied to each of the plurality of electrode pairs.
  • the voltage pulse includes a high voltage pulse for starting discharge between each electrode pair of the plurality of electrode pairs, and a low voltage value applied following the high voltage pulse and having a voltage value lower than that of the high voltage pulse.
  • Each of the plurality of electrode pairs is insulated from each other by air, and the pulse generation circuit outputs an output current and an output when the low voltage pulse is applied to each of the plurality of electrode pairs.
  • a limiting circuit for limiting the voltage
  • an aspect of the air cleaner according to the present invention includes the plasma discharge device and extinguishes organic substances in the air.
  • the present invention it is possible to provide a plasma discharge device and an air purifier that extinguish organic substances in the air in a very short time.
  • FIG. 1 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus according to the first embodiment.
  • FIG. 2 is a circuit diagram showing a detailed configuration of the plasma discharge apparatus according to the first embodiment.
  • FIG. 3 is a graph showing a pulse waveform of a voltage pulse generated in the pulse generation circuit according to the first embodiment.
  • FIG. 4A is a graph illustrating an example of a waveform of a voltage pulse applied between an electrode pair when no organic substance is present between the electrode pair of the plasma discharge apparatus according to Embodiment 1.
  • FIG. 4B is a graph showing an example of a waveform of a voltage pulse applied between the electrode pair when an organic substance is present between the electrode pair of the plasma discharge device according to the first exemplary embodiment.
  • FIG. 1 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus according to the first embodiment.
  • FIG. 2 is a circuit diagram showing a detailed configuration of the plasma discharge apparatus according to the first embodiment.
  • FIG. 3 is a graph showing a pulse wave
  • FIG. 5 is a graph showing the relationship between the current and voltage applied between the electrode pair and the discharge state.
  • FIG. 6 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus according to the second embodiment.
  • FIG. 7 is a circuit diagram showing a detailed configuration of the plasma discharge apparatus according to the second embodiment.
  • FIG. 8 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus according to the third embodiment.
  • FIG. 9 is a circuit diagram showing a detailed configuration of the plasma discharge apparatus according to the third embodiment.
  • FIG. 10 is a graph showing a pulse waveform of a voltage pulse generated in the pulse generation circuit according to the third embodiment.
  • FIG. 11 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus according to the fourth embodiment.
  • FIG. 12 is a circuit diagram showing a detailed configuration of the plasma discharge apparatus according to the fourth embodiment.
  • FIG. 13 is an external view of an air cleaner according to a modification.
  • FIG. 14 is an external view of an air conditioner according to
  • FIG. 1 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus 100 according to the first embodiment.
  • the plasma discharge apparatus 100 includes a discharge unit 6 and a pulse generation circuit 2.
  • the discharge part 6 has an electrode pair 60 insulated from each other by air 68.
  • the electrode pair 60 includes a first electrode 61 and a second electrode 62.
  • the first electrode 61 and the second electrode 62 are insulated by air 68.
  • the output voltage of the pulse generation circuit 2 is applied to the first electrode 61, and the second electrode 62 is grounded.
  • the pressure of the air 68 that insulates the electrode pair 60 is atmospheric pressure.
  • the pulse generation circuit 2 is a circuit that generates a voltage pulse to be applied to the electrode pair 60.
  • the voltage pulse generated by the pulse generation circuit 2 includes a high voltage pulse that starts discharge between the electrode pair 60, a low voltage pulse that is applied to the electrode pair 60 following the high voltage pulse, and has a voltage value lower than that of the high voltage pulse. including.
  • the pulse generation circuit 2 includes a limiting circuit 40 that limits an output current and an output voltage that are output when a low voltage pulse is applied to the electrode pair 60.
  • the pulse generation circuit 2 further includes a first generation circuit 10, a second generation circuit 20, and a multiplexing circuit 30.
  • the first generation circuit 10 is a circuit that generates a first pulse corresponding to the high voltage pulse.
  • the second generation circuit 20 is a circuit that generates a second pulse corresponding to the low voltage pulse and having a pulse width larger than that of the first pulse.
  • the multiplexing circuit 30 is a circuit that combines the first pulse and the second pulse and outputs the voltage pulse.
  • FIG. 2 is a circuit diagram showing a detailed configuration of the plasma discharge apparatus 100 according to the present embodiment.
  • the plasma discharge apparatus 100 includes a control circuit 50 that controls the first generation circuit 10 and the second generation circuit 20.
  • the limiting circuit 40 is a resistance element.
  • the resistance value of the resistance element that constitutes the limiting circuit 40 may be appropriately designed based on the value of the output voltage output from the second generation circuit 20 or the like. In the present embodiment, the resistance value of the resistance element is about 2 k ⁇ to 3 k ⁇ .
  • the multiplexing circuit 30 is a transformer including a first coil 31 and a second coil 32.
  • the turn ratio of each coil constituting the multiplexing circuit 30 may be set as appropriate based on the value of the output voltage output from each of the first generation circuit 10 and the second generation circuit 20. In the present embodiment, the turns ratio of the first coil 31 and the second coil 32 is 1:15.
  • the first generation circuit 10 includes a first DC power supply 15, a first capacitor 16, and a first switching element 11. In the present embodiment, the first generation circuit 10 outputs a first pulse to the first coil 31 of the multiplexing circuit 30.
  • the first DC power supply 15 is a power supply circuit that outputs a DC voltage.
  • the value of the DC voltage output from the first DC power supply 15 may be set as appropriate based on the characteristics of the multiplexing circuit 30 and the like. In the present embodiment, the first DC power supply 15 outputs a DC voltage of 1 kV.
  • the first capacitor 16 is an element for suppressing the oscillation of the output voltage of the first generation circuit 10 and is connected in parallel to the first DC power supply 15.
  • the capacity of the first capacitor 16 may be set as appropriate according to the characteristics of the first coil 31 and the like.
  • the first switching element 11 is an element for outputting only a part of the DC voltage output from the first DC power supply 15 from the first generation circuit 10.
  • the first switching element 11 is a switching transistor whose switching between conduction and non-conduction is controlled by the control circuit 50.
  • a MOSFET Metal-Oxide Semiconductor Field-Effect Transistor
  • the first switching element 11 is connected in series to the first coil 31.
  • a circuit composed of the first coil 31 and the first switching element 11 is connected in parallel to the first DC power supply 15.
  • the second generation circuit 20 includes a second DC power supply 25, a second capacitor 26, four second switching elements 21 to 24, a transformer 27, and diodes 28 and 29.
  • the second DC power supply 25 is a power supply circuit that outputs a DC voltage.
  • the value of the DC voltage output from the second DC power supply 25 may be set as appropriate based on the characteristics of the transformer 27 and the like. In the present embodiment, the second DC power supply 25 outputs a DC voltage of 100V.
  • the second capacitor 26 is an element that forms an LC resonance circuit together with the transformer 27, and is connected in series to the primary coil 271 of the transformer 27.
  • the capacity of the second capacitor 26 may be set as appropriate according to the characteristics of the transformer 27 and the like.
  • the transformer 27 is an element that includes a primary side coil 271 and a secondary side coil 272, transforms the voltage input to the primary side coil 271 with a predetermined transformation ratio, and outputs the transformed voltage to the secondary side coil 272.
  • the transformation ratio of the transformer 27 may be set as appropriate based on the voltage input to the primary coil 271 and the like. In the present embodiment, the transformation ratio (the number of turns of the primary side coil / the number of turns of the secondary side coil) is about 1/10.
  • the second switching elements 21 to 24 are elements constituting a full bridge type inverter circuit.
  • the second switching elements 21 and 22 are connected in series, and the second switching elements 23 and 24 are connected in series. Further, the second switching elements 21 and 22 and the second switching elements 23 and 24 are connected in parallel.
  • a second capacitor 26 and a transformer 27 are provided between a node to which the second switching element 21 and the second switching element 22 are connected and a node to which the second switching element 23 and the second switching element 24 are connected.
  • An LC resonant circuit is connected.
  • the second switching elements 21 to 24 are switching transistors whose switching between conduction and non-conduction is controlled by the control circuit 50.
  • MOSFETs can be used as shown in FIG.
  • the diodes 28 and 29 are rectifying elements for converting the AC voltage output from the transformer 27 into a DC voltage.
  • the cathode of a diode 29 is connected to the anode of the diode 28, and the secondary coil 272 of the transformer 27 is connected in parallel to the diode 29.
  • the output voltage of the second generation circuit 20 is output from the cathode of the diode 28 and the anode of the diode 29.
  • the output voltage of the second generation circuit 20 is applied to a series circuit including the limiting circuit 40, the multiplexing circuit 30, and the discharge unit 6.
  • the control circuit 50 is a circuit that controls the first generation circuit 10 and the second generation circuit 20.
  • the control circuit 50 controls the pulse width of the first pulse output from the first generation circuit 10 and the output timing by controlling the switching timing of conduction and non-conduction of the first switching element 11. Further, the control circuit 50 controls the switching timing of each of the second switching elements 21 to 24 to turn on and off, whereby the voltage value of the second pulse output from the second generation circuit 20, the pulse width, and Control the output timing.
  • the control circuit 50 performs control so that the second pulse is applied to the multiplexing circuit 30 following the first pulse.
  • the control circuit 50 can be realized using, for example, an IC (Integrated Circuit) chip including a processor and a memory.
  • FIG. 3 is a graph showing a pulse waveform of a voltage pulse generated in the pulse generation circuit 2 according to the present embodiment.
  • Graphs (a), (b), and (c) in FIG. 3 respectively show a first pulse P1 output from the first generation circuit 10, a second pulse P2 output from the second generation circuit 20, and a pulse.
  • generation circuit 2 is shown.
  • the voltage pulse P0 output from the pulse generation circuit 2 is composed of a high voltage pulse PH and a low voltage pulse PL.
  • the first generation circuit 10 outputs a first pulse P1 corresponding to the high voltage pulse PH of the voltage pulse P0. Further, as shown in the graph (b) of FIG. 3, the second generation circuit 20 generates a second pulse P2 corresponding to the low voltage pulse PL of the voltage pulse P0 and having a pulse width larger than that of the first pulse P1. .
  • the pulse width T1 of the first pulse P1 is about 500 nsec
  • the pulse width T2 of the second pulse P2 is about 10 ⁇ sec.
  • the first pulse P1 is boosted in the multiplexing circuit 30 from a voltage value of about 1 kV to about 15 kV and combined with the second pulse P2.
  • the voltage pulse P 0 is generated and applied to the electrode pair 60 of the discharge unit 6.
  • the pulse width T0 and the repetition period TA of the voltage pulse P0 are not particularly limited, but are, for example, about 10 ⁇ sec and about 100 ⁇ sec, respectively. In this case, the repetition frequency of the voltage pulse P0 is about 10 kHz.
  • FIG. 4A is a graph showing an example of a waveform of a voltage pulse P0 applied between the electrode pair 60 when there is no organic substance between the electrode pair 60 of the plasma discharge apparatus 100 according to the present embodiment.
  • FIG. 4B is a graph showing an example of a waveform of a voltage pulse P0 applied between the electrode pair 60 when an organic substance is present between the electrode pair 60 of the plasma discharge apparatus 100 according to the present embodiment. Note that the graphs shown in FIGS. 4A and 4B are both graphs obtained by experiments.
  • FIG. 5 is a graph showing the relationship between the current and voltage applied between the electrode pair 60 and the discharge state.
  • a voltage pulse P0 composed of a high voltage pulse PH and a low voltage pulse PL is applied between the electrode pair 60 as shown in FIG. 4A.
  • the voltage value of the high voltage pulse PH is a voltage value equal to or higher than the dielectric breakdown voltage. In the present embodiment, the voltage value of the high voltage pulse PH exceeds 1 kV. Thereby, discharge is started between the electrode pair 60. Further, the low voltage pulse PL is applied between the electrode pair 60 following the high voltage pulse PH. Thereby, when there is no organic substance between the electrode pair 60, the discharge started by the high voltage pulse PH can be maintained relatively stably.
  • the voltage value of the low voltage pulse PL is about 500 V, and a current of about 60 mA flows between the electrode pair 60.
  • the voltage applied between the electrode pair 60 is determined by the resistance value between the electrode pair 60 and the resistance value of the resistance element constituting the limiting circuit 40.
  • the resistance value of the resistance element constituting the limiting circuit 40 is set so that the voltage applied between the electrode pair 60 is about 500V.
  • the current flowing between the electrode pair 60 is limited by the upper limit value of the output power of the second DC power supply 25 and the resistance value of the resistance element constituting the limiting circuit 40.
  • the upper limit value of the output power of the second DC power supply 25 is set to about 30W.
  • the state of discharge during the period in which the low voltage pulse PL is applied between the electrode pair 60 corresponds to the state A shown in FIG. That is, during this period, glow discharge is generated between the electrode pair 60 by applying the low voltage pulse PL.
  • the state of discharge generated between the electrode pair 60 is limited to a specific state by the limiting circuit 40.
  • the limiting circuit 40 is a resistance element
  • the relationship between the voltage value applied between the electrode pair 60 and the current value flowing between the electrode pair 60 is the relationship indicated by the one-dot chain line shown in FIG. Limited to
  • the relationship between the voltage and current between the electrode pair 60 during discharge is shown by the solid line in FIG.
  • the state of discharge between the electrode pair 60 is limited to one of the state A and the state B corresponding to the intersection of the one-dot chain line and the solid line in FIG.
  • the voltage applied between the electrode pair 60 is set to about 500 V, so that the discharge state is the state A shown in FIG. 5, that is, glow discharge. be able to. Therefore, low temperature plasma is generated between the electrode pair 60, temperature rise in the discharge part 6 is relatively suppressed, and damage to the electrode pair 60 is also suppressed.
  • a voltage pulse P01 composed of a high voltage pulse PH1 and a low voltage pulse PL1 is applied between the electrode pair 60 as shown in FIG. 4B.
  • the voltage value of the high voltage pulse PH1 is a voltage value equal to or higher than the breakdown voltage shown in FIG. 5 as in the case where no organic substance such as pollen is present between the electrode pair 60. Thereby, discharge is started between the electrode pair 60. Further, the low voltage pulse PL1 is applied between the electrode pair 60 following the high voltage pulse PH1. Thereby, the discharge started by the high voltage pulse PH1 can be maintained.
  • the resistance value between the electrode pair 60 is reduced by the organic substance. For this reason, the voltage applied between the electrode pair 60 decreases, and the current flowing between the electrode pair 60 increases.
  • the voltage value of the low voltage pulse PL ⁇ b> 1 decreases to about 200 V, and a current of about 150 mA flows between the electrode pair 60.
  • the state of discharge during the period in which the low voltage pulse PL1 is applied between the electrode pair 60 corresponds to the state B shown in FIG. That is, arc discharge is generated between the electrode pair 60 during the period in which the low voltage pulse PL ⁇ b> 1 is applied between the electrode pair 60.
  • the organic matter existing between the electrode pair 60 is burned and extinguished by the thermal plasma generated by the arc discharge in an extremely short time of about 1 second or less, for example. That is, organic matter becomes carbon dioxide and water by being burned.
  • the state of the organic substance changes between the electrode pair 60 when the low voltage pulse PL1 is applied.
  • the voltage applied between the pair 60 is not stable.
  • the discharge state between the electrode pair 60 varies between the state A and the state B shown in FIG.
  • the discharge state between the electrode pair 60 becomes the state A shown in FIG. 5, that is, glow discharge, and the voltage pulse P0 as shown in FIG. To be applied.
  • organic substances such as pollen in the air 68 can be extinguished in a very short time.
  • the air 68 may be atmospheric pressure, air in the atmosphere can be directly introduced between the electrode pairs without adjusting the pressure. For this reason, organic substances, such as pollen in the air, can be easily extinguished.
  • the plasma discharge apparatus 100 includes the discharge unit 6 having the electrode pair 60 insulated from each other by the air 68, and the pulse generation circuit 2 that generates the voltage pulse P0 applied to the electrode pair 60.
  • the voltage pulse P0 is applied to the electrode pair 60 following the high voltage pulse PH, and the voltage pulse P0 has a voltage value lower than that of the high voltage pulse PH.
  • the pulse generation circuit 2 includes a limiting circuit 40 that limits an output current and an output voltage that are output when the low voltage pulse PL is applied to the electrode pair 60.
  • the discharge can be maintained by the low voltage pulse subsequently applied to the electrode pair 60.
  • glow discharge can be maintained between the electrode pair 60 by setting the voltage value of the low voltage pulse to a predetermined value.
  • the organic substance such as pollen in the air 68 enters the low temperature plasma generated by the glow discharge, thereby reducing the resistance between the electrode pair.
  • the current flowing between the electrode pair 60 increases, and the voltage between the electrode pair 60 decreases.
  • the discharge between the electrode pair 60 can be changed from the glow discharge to the arc discharge having a larger current amount.
  • organic substances such as pollen burn and disappear in a very short time.
  • organic substances such as pollen in the air can be burned and extinguished in a very short time.
  • the plasma discharge apparatus 100 includes the limiting circuit 40 that limits the output current and the output voltage that are output when a low voltage pulse is applied between the electrode pair 60, so Generation of a large current can be suppressed. Therefore, for example, even when an arc discharge occurs due to the organic matter entering between the electrode pair 60, after the organic matter disappears, the discharge between the electrode pair 60 can be changed from the arc discharge to, for example, a glow discharge. it can. For this reason, it can suppress that the electrode pair 60 is damaged by arc discharge, and can suppress the power consumption of the plasma discharge apparatus 100.
  • the pulse generation circuit 2 corresponds to the first generation circuit 10 that generates the first pulse P1 corresponding to the high voltage pulse PH, the low voltage pulse PL, A second generation circuit 20 that generates a second pulse P2 having a pulse width larger than one pulse P1, and a multiplexing circuit 30 that combines the first pulse P1 and the second pulse P2 and outputs a voltage pulse P0. You may prepare.
  • the pulse generation circuit 2 can be realized with a simplified configuration.
  • the pressure of the air 68 may be atmospheric pressure.
  • glow discharge may be generated between the electrode pair 60 by applying the low voltage pulse PL.
  • the temperature rise between the electrode pair 60 can be suppressed during discharge.
  • organic substances such as pollen
  • the organic substances can be burned and extinguished in an extremely short time by transitioning to arc discharge.
  • the arc discharge continues for a very short time, it is possible to suppress a temperature rise between the electrode pair 60 when an organic substance enters the discharge plasma.
  • the limiting circuit 40 may be a resistance element.
  • the limiting circuit 40 can be realized easily and inexpensively.
  • Embodiment 2 A plasma discharge apparatus according to Embodiment 2 will be described.
  • the plasma discharge apparatus according to the present embodiment is different from the plasma discharge apparatus 100 according to the first embodiment mainly in the configuration of the limiting circuit.
  • the plasma discharge apparatus according to the present embodiment will be described focusing on differences from the plasma discharge apparatus 100 according to the first embodiment.
  • FIG. 6 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus 200 according to the present embodiment.
  • FIG. 7 is a circuit diagram showing a detailed configuration of plasma discharge apparatus 200 according to the present embodiment.
  • the plasma discharge apparatus 200 includes a discharge unit 6 and a pulse generation circuit 202.
  • the pulse generation circuit 202 includes a first generation circuit 10, a second generation circuit 20, a multiplexing circuit 30, and a limiting circuit 240.
  • the limiting circuit 240 is a circuit that controls the output voltage in accordance with the output current of the pulse generation circuit 202.
  • the current detection circuit 241 and the control circuit 250 shown in FIG. Prepare.
  • the current detection circuit 241 is a circuit that outputs a signal corresponding to the output current of the pulse generation circuit 202.
  • a Hall element can be used as the current detection circuit 241.
  • the control circuit 250 is a circuit that controls the first generation circuit 10 and the second generation circuit 20 similarly to the control circuit 50 according to the first embodiment. However, the control circuit 250 according to the present embodiment controls the output voltage of the second generation circuit 20 based on the signal from the current detection circuit 241.
  • the control circuit 250 controls the output voltage of the second generation circuit 20 by controlling the ratio (duty) of the conduction period of the second switching elements 21 to 24 of the second generation circuit 20, for example. More specifically, for example, the control circuit 250 controls the output voltage of the second generation circuit 20 so that the discharge state between the electrode pair 60 is one of the state A and the state B shown in FIG. Also good.
  • the control circuit 250 sets the output voltage value of the second generation circuit 20 to the state.
  • the second generation circuit 20 is controlled so as to be about the voltage value at A.
  • the control circuit 250 sets the output voltage value of the second generation circuit 20 to the voltage in the state B.
  • the second generation circuit 20 is controlled so as to be about the value.
  • limiting circuit 240 controls the output voltage according to the output current of pulse generation circuit 202.
  • the discharge state between the electrode pair 60 can be set to a desired state.
  • an organic substance enters the discharge plasma and the output current increases, it is possible to suppress an excessive current from continuously flowing between the electrode pair 60 by reducing the output voltage. Therefore, the electrode pair 60 can be prevented from being damaged, and the power consumption of the plasma discharge device 200 can be suppressed.
  • power consumption can be further reduced as compared with plasma discharge apparatus 100 according to the first embodiment.
  • Embodiment 3 A plasma discharge apparatus according to Embodiment 3 will be described.
  • the plasma discharge apparatus according to the present embodiment is different from plasma discharge apparatus 100 according to the first embodiment in that the discharge unit mainly includes a plurality of electrode pairs.
  • the plasma discharge apparatus according to the present embodiment will be described focusing on differences from the plasma discharge apparatus 100 according to the first embodiment.
  • FIG. 8 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus 300 according to the third embodiment.
  • the plasma discharge apparatus 300 includes a discharge unit 306 and a pulse generation circuit 302.
  • the discharge unit 306 has a plurality of electrode pairs 60a to 60d.
  • the discharge unit 306 has four electrode pairs 60a to 60d.
  • the electrode pairs 60a to 60d are composed of first electrodes 61a to 61d and second electrodes 62a to 62d, respectively.
  • Each of the electrode pairs 60 a to 60 d is insulated from each other by air 68. That is, the first electrodes 61a to 61d and the second electrodes 62a to 62d are insulated by the air 68, respectively.
  • the output voltage of the pulse generation circuit 302 is applied to the first electrodes 61a to 61d, and the second electrodes 62a to 62d are grounded.
  • the pressure of the air 68 that insulates each of the electrode pairs 60a to 60d is atmospheric pressure.
  • the pulse generation circuit 302 is a circuit that generates voltage pulses to be applied to the electrode pairs 60a to 60d.
  • the voltage pulse generated by the pulse generation circuit 302 is applied to the electrode pair 60a to 60d following the high voltage pulse for starting discharge between the electrode pairs 60a to 60d, and the high voltage pulse. And a low voltage pulse having a lower voltage value.
  • the pulse generation circuit 302 includes a limiting circuit 40 that limits an output current and an output voltage that are output when a low voltage pulse is applied to the electrode pairs 60a to 60d.
  • the pulse generation circuit 302 includes a voltage generation circuit 304 and a switching circuit 308.
  • the voltage generation circuit 304 includes the limiting circuit 40, the first generation circuit 10, the second generation circuit 20, and the multiplexing circuit 30 described above.
  • the first generation circuit 10 is a circuit that generates a pulsed first voltage corresponding to the high voltage pulse.
  • the second generation circuit 20 is a circuit that generates a second voltage that is a DC voltage corresponding to the low voltage pulse.
  • the multiplexing circuit 30 is a circuit that combines the first voltage and the second voltage and outputs a voltage wave.
  • the switching circuit 308 is a circuit that supplies the voltage pulse to each of the electrode pairs 60a to 60d by sequentially inputting the voltage wave from the multiplexing circuit 30 and outputting the voltage wave to the electrode pairs 60a to 60d.
  • the switching circuit 308 includes four switching elements 81a to 81d.
  • the voltage wave input to the switching circuit 308 is input to the switching elements 81a to 81d.
  • the switching elements 81a to 81d are connected to the electrode pairs 60a to 60d, respectively.
  • a voltage pulse is applied to the electrode pair connected to the switching elements 81a to 81d that are in the conductive state.
  • switching elements 81a to 81d for example, MOSFETs (Metal-Oxide Semiconductor Field-Effect Transistors) can be used.
  • the switching elements 81a to 81d are controlled by signals from a drive circuit (not shown).
  • the drive circuit can be realized by using, for example, an IC (Integrated Circuit) chip including a processor and a memory.
  • FIG. 9 is a circuit diagram showing a detailed configuration of plasma discharge apparatus 300 according to the present embodiment.
  • the plasma discharge apparatus 300 includes a control circuit 350 that controls the first generation circuit 10 and the second generation circuit 20.
  • the limiting circuit 40 is a resistance element.
  • the resistance value of the resistance element that constitutes the limiting circuit 40 may be appropriately designed based on the value of the output voltage output from the second generation circuit 20 or the like. In the present embodiment, the resistance value of the resistance element is about 2 k ⁇ to 3 k ⁇ .
  • the multiplexing circuit 30 is a transformer including a first coil 31 and a second coil 32.
  • the turn ratio of each coil constituting the multiplexing circuit 30 may be set as appropriate based on the value of the output voltage output from each of the first generation circuit 10 and the second generation circuit 20. In the present embodiment, the turns ratio of the first coil 31 and the second coil 32 is 1:15.
  • the first generation circuit 10 and the second generation circuit 20 have the same configuration as the first generation circuit 10 and the second generation circuit 20 according to the first embodiment, respectively.
  • the output voltage of the second generation circuit 20 is applied to a series circuit including the limiting circuit 40, the multiplexing circuit 30, the switching circuit 308, and the discharging unit 306.
  • the control circuit 350 is a circuit that controls the first generation circuit 10 and the second generation circuit 20.
  • the control circuit 350 controls the pulse width of the first voltage output from the first generation circuit 10 and the output timing by controlling the switching timing of conduction and non-conduction of the first switching element 11.
  • the control circuit 350 controls the voltage value of the second voltage output from the second generation circuit 20 by controlling the switching timing of the conduction and non-conduction of each of the second switching elements 21 to 24.
  • the control circuit 350 controls the second switching elements 21 to 24 so that a DC voltage is output from the second generation circuit 20.
  • the control circuit 350 can be realized using, for example, an IC chip including a processor and a memory.
  • FIG. 10 is a graph showing a pulse waveform of a voltage pulse generated in the pulse generation circuit 302 according to the present embodiment.
  • Graphs (a) and (b) in FIG. 10 show waveforms of the first voltage V1 output from the first generation circuit 10 and the second voltage V2 output from the second generation circuit 20, respectively.
  • graphs (c1) to (c4) in FIG. 10 are graphs showing the relationship of the conduction state with respect to the time of the switching elements 81a to 81d, respectively.
  • Graphs (d1) to (d4) in FIG. 10 are graphs showing waveforms of the voltage pulse P0 applied to the electrode pairs 60a to 60d, respectively.
  • the voltage pulse P0 output from the pulse generation circuit 302 includes a high voltage pulse PH and a low voltage pulse PL.
  • the first generation circuit 10 outputs the first voltage V1 corresponding to the high voltage pulse PH of the voltage pulse P0.
  • the pulse width T1 of the first voltage V1 is about 500 nsec.
  • the second generation circuit 20 generates a second voltage V2 that is a DC voltage corresponding to the low voltage pulse PL of the voltage pulse P0.
  • the first voltage V1 is boosted in the multiplexing circuit 30 from a voltage value of about 1 kV to about 15 kV and is combined with the second voltage V2. As a result, a voltage wave is generated in the multiplexing circuit 30. In this way, the voltage generation circuit 304 generates a voltage wave and inputs it to the switching circuit 308.
  • the switching elements 81a to 81d are sequentially turned on.
  • the voltage pulse P0 as shown in the graphs (d1) to (d4) of FIG. 10 is applied to the electrode pairs 60a to 60d connected to the switching elements 81a to 81d, respectively.
  • the pulse width T0 of the voltage pulse P0 (that is, the conduction duration of each switching element) is not particularly limited, but is, for example, about 10 ⁇ sec. In this case, the repetition frequency of the voltage pulse P0 in each electrode pair is about 25 kHz.
  • the voltage pulse P0 can be generated in the pulse generation circuit 302 according to the present embodiment.
  • the second voltage V2 that is a DC voltage is used as the voltage corresponding to the low voltage pulse PL, and the second voltage V2 is pulsed in the switching circuit 308. For this reason, since it is not necessary to generate a pulse voltage in the second generation circuit 20, the configuration of the second generation circuit 20 can be simplified.
  • plasma discharge apparatus 300 also operates in the same manner as plasma discharge apparatus 100 according to Embodiment 1.
  • the organic matter existing between each pair of electrodes is burned and extinguished by an extremely short time of, for example, about 0.4 seconds or less by thermal plasma generated by arc discharge.
  • organic substances such as pollen in the air 68 can be extinguished in a very short time.
  • the air 68 may be atmospheric pressure, air in the atmosphere can be directly introduced between the electrode pairs without adjusting the pressure. For this reason, organic substances, such as pollen in the air, can be easily extinguished.
  • plasma discharge apparatus 300 generates discharge unit 306 having a plurality of electrode pairs 60a to 60d and voltage pulse P0 to be sequentially applied to each of the plurality of electrode pairs 60a to 60d.
  • a voltage generation circuit 302, and the voltage pulse P0 is applied subsequent to the high voltage pulse PH for starting discharge between each of the electrode pairs 60a to 60d and the high voltage pulse PH.
  • Each of the plurality of electrode pairs 60a to 60d is insulated from each other by air 68, and the pulse generation circuit 302 transmits the low voltage pulse PL to the plurality of electrode pairs 60a to 60d. It has a limiting circuit 40 that limits the output current and the output voltage that are output when applied to each.
  • the insulation by the air 68 between each electrode pair is broken by the high voltage pulse, and then the discharge can be maintained by the low voltage pulse applied to the electrode pairs 60a to 60d.
  • glow discharge can be maintained between each electrode pair by setting the voltage value of the low voltage pulse to a predetermined value.
  • the organic substance such as pollen in the air 68 enters the low temperature plasma generated by the glow discharge, thereby reducing the resistance between the electrode pair.
  • the current flowing between the electrode pairs increases, and the voltage between the electrode pairs decreases.
  • the discharge between each electrode pair can be transitioned from glow discharge to arc discharge with a larger amount of current.
  • organic substances such as pollen burn and disappear in a very short time.
  • organic substances such as pollen in the air can be burned and extinguished in a very short time.
  • the plasma discharge apparatus 300 since the plasma discharge apparatus 300 according to the present embodiment includes the limiting circuit 40 that limits the output current and the output voltage that are output when a low voltage pulse is applied between each electrode pair, the plasma discharge apparatus 300 is excessively large between each electrode pair. Generation of a large current can be suppressed. Therefore, for example, even when an arc discharge occurs due to an organic substance entering between each electrode pair, after the organic substance disappears, the discharge between each electrode pair can be changed from an arc discharge to, for example, a glow discharge. it can. Therefore, it is possible to suppress the electrode pairs 60a to 60d from being damaged by the arc discharge, and to suppress the power consumption of the plasma discharge device 300.
  • the plasma discharge apparatus 300 since the plasma discharge apparatus 300 according to the present embodiment includes a plurality of electrode pairs 60a to 60d, organic substances in a larger volume of air 68 can be extinguished in a short time.
  • the pulse generation circuit 302 corresponds to the first generation circuit 10 that generates the pulsed first voltage V1 corresponding to the high voltage pulse PH and the low voltage pulse PL.
  • a second generation circuit 20 that generates a second voltage V2 that is a direct-current voltage
  • a combination circuit 30 that combines the first voltage V1 and the second voltage V2 and outputs a voltage wave, and the voltage wave is input
  • a switching circuit 308 that supplies voltage pulses P0 to each of the electrode pairs 60a to 60d by sequentially outputting voltage waves to the electrode pairs 60a to 60d may be provided.
  • the pulse generation circuit 302 can be realized with a simplified configuration.
  • the pressure of the air 68 may be atmospheric pressure.
  • glow discharge may be generated by applying the low voltage pulse PL in the electrode pairs 60a to 60d.
  • the limiting circuit 40 may be a resistance element.
  • the limiting circuit 40 can be realized easily and inexpensively.
  • Embodiment 4 A plasma discharge apparatus according to Embodiment 4 will be described.
  • the plasma discharge apparatus according to the present embodiment is different from the plasma discharge apparatus 300 according to the third embodiment mainly in the configuration of the limiting circuit.
  • the plasma discharge apparatus according to the present embodiment will be described focusing on differences from the plasma discharge apparatus 300 according to the third embodiment.
  • FIG. 11 is a block diagram showing an outline of the overall configuration of the plasma discharge apparatus 400 according to the present embodiment.
  • FIG. 12 is a circuit diagram showing a detailed configuration of plasma discharge apparatus 400 according to the present embodiment.
  • the plasma discharge apparatus 400 includes a discharge unit 6 and a pulse generation circuit 402.
  • the pulse generation circuit 402 includes a voltage generation circuit 404 and a switching circuit 8.
  • the voltage generation circuit 404 includes a first generation circuit 10, a second generation circuit 20, a multiplexing circuit 30, and a limiting circuit 240.
  • the limiting circuit 240 is a circuit that controls the output voltage in accordance with the output current of the pulse generation circuit 402.
  • the current detection circuit 241 is a circuit that outputs a signal corresponding to the output current of the pulse generation circuit 402.
  • a Hall element can be used as the current detection circuit 241.
  • the control circuit 450 is a circuit that controls the first generation circuit 10 and the second generation circuit 20 similarly to the control circuit 350 according to the third embodiment. However, the control circuit 450 according to the present embodiment controls the output voltage of the second generation circuit 20 based on the signal from the current detection circuit 241. For example, the control circuit 450 controls the output voltage of the second generation circuit 20 by controlling the ratio (duty) of the conduction period of the second switching elements 21 to 24 of the second generation circuit 20. More specifically, for example, the control circuit 450 controls the output voltage of the second generation circuit 20 so that the discharge state between each electrode pair is one of the state A and the state B shown in FIG. Also good.
  • the control circuit 450 determines that the output voltage value of the second generation circuit 20 is in the state.
  • the second generation circuit 20 is controlled so as to be about the voltage value at A.
  • the control circuit 450 determines that the output voltage value of the second generation circuit 20 is the voltage in the state B.
  • the second generation circuit 20 is controlled so as to be about the value.
  • limiting circuit 240 controls the output voltage according to the output current of pulse generation circuit 402.
  • the discharge state between each electrode pair can be set to a desired state.
  • an organic substance enters into the discharge plasma and the output current increases, it is possible to suppress an excessive current from continuously flowing between each electrode pair by reducing the output voltage. Therefore, damage to the electrode pairs 60a to 60d can be suppressed, and power consumption of the plasma discharge device 400 can be suppressed. Further, in the present embodiment, since it is not necessary to use a resistance element in limiting circuit 240, power consumption can be further reduced as compared with plasma discharge apparatus 300 according to Embodiment 3.
  • FIG. 13 is an external view of an air cleaner according to this modification.
  • the air cleaner shown in FIG. 13 includes, for example, the plasma discharge device according to each of the above embodiments inside, and extinguishes organic substances in the air 68.
  • the maintenance work of the filter can be reduced.
  • FIG. 14 is an external view of an air conditioner according to this modification.
  • the air conditioner shown in FIG. 14 includes, for example, the plasma discharge device according to each of the above embodiments inside, and extinguishes organic substances in the air 68.
  • the output voltage of the second generation circuit 20 may be controlled by controlling the output voltage of the second DC power supply 25 of the second generation circuit 20.
  • a second generation circuit configured only with a DC power supply may be used. Thereby, the configuration of the plasma discharge apparatus can be further simplified.
  • control circuit may be configured by dedicated hardware, or may be realized by executing a software program suitable for the control circuit.
  • the control circuit may be realized by a program execution unit such as a CPU or a processor reading and executing a software program recorded on a recording medium such as a hard disk or a memory.
  • Pulse generation circuit 6 306 Discharge unit 10 First generation circuit 20 Second generation circuit 30 Multiplexing circuit 40, 240 Limiting circuit 60, 60a, 60b, 60c, 60d Electrode pair 68 Air 100, 200 , 300, 400 Plasma discharge device 308 Switching circuit P0, P01 Voltage pulse PH, PH1 High voltage pulse PL, PL1 Low voltage pulse P1 First pulse P2 Second pulse V1 First voltage V2 Second voltage

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Abstract

L'invention porte sur un appareil de décharge de plasma (100) qui comporte : une unité de décharge (6) qui a une paire d'électrodes (60) isolées l'une de l'autre par de l'air (68) ; et un circuit de génération d'impulsion (2) qui génère des impulsions de tension (P0) appliquées à la paire d'électrodes (60), les impulsions de tension (P0) comprenant : une impulsion haute tension (PH) qui commence à se décharger entre les électrodes ; et une impulsion basse tension (PL) qui présente une valeur de tension inférieure à celle de l'impulsion haute tension (PH) et qui est appliquée à la paire d'électrodes (60) suite à l'impulsion haute tension (PH), et le circuit de génération d'impulsion (2) comporte un circuit de limitation (40) qui limite un courant de sortie et une tension de sortie à sortir lorsque l'impulsion basse tension (PL) est appliquée à la paire d'électrodes (60).
PCT/JP2017/020671 2016-07-08 2017-06-02 Appareil de décharge de plasma et machine de nettoyage à l'air Ceased WO2018008310A1 (fr)

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FR3088926A1 (fr) 2018-11-23 2020-05-29 Commissariat A L' Energie Atomique Et Aux Energies Alternatives Système de purification et/ou de désinfection d’eau comprenant des moyens de création et de maintien de vortex, comprenant un dispositif phonique en amont du vortex et un dispositif de balayage photonique en aval du vortex
KR20210040404A (ko) * 2018-07-27 2021-04-13 이글 하버 테크놀로지스, 인코포레이티드 나노초 펄서의 펄스 발생
US12230477B2 (en) 2018-07-27 2025-02-18 Eagle Harbor Technologies, Inc. Nanosecond pulser ADC system
US12348228B2 (en) 2022-06-29 2025-07-01 EHT Ventures LLC Bipolar high voltage pulser
US12354832B2 (en) 2022-09-29 2025-07-08 Eagle Harbor Technologies, Inc. High voltage plasma control
US12437967B2 (en) 2020-07-09 2025-10-07 Eagle Harbor Technologies, Inc. Ion current droop compensation

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KR20210040404A (ko) * 2018-07-27 2021-04-13 이글 하버 테크놀로지스, 인코포레이티드 나노초 펄서의 펄스 발생
JP2021524658A (ja) * 2018-07-27 2021-09-13 イーグル ハーバー テクノロジーズ, インク.Eagle Harbor Technologies, Inc. ナノ秒パルサーパルス発生
KR102579260B1 (ko) * 2018-07-27 2023-09-18 이글 하버 테크놀로지스, 인코포레이티드 나노초 펄서의 펄스 발생
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US12230477B2 (en) 2018-07-27 2025-02-18 Eagle Harbor Technologies, Inc. Nanosecond pulser ADC system
FR3088926A1 (fr) 2018-11-23 2020-05-29 Commissariat A L' Energie Atomique Et Aux Energies Alternatives Système de purification et/ou de désinfection d’eau comprenant des moyens de création et de maintien de vortex, comprenant un dispositif phonique en amont du vortex et un dispositif de balayage photonique en aval du vortex
US12437967B2 (en) 2020-07-09 2025-10-07 Eagle Harbor Technologies, Inc. Ion current droop compensation
US12348228B2 (en) 2022-06-29 2025-07-01 EHT Ventures LLC Bipolar high voltage pulser
US12354832B2 (en) 2022-09-29 2025-07-08 Eagle Harbor Technologies, Inc. High voltage plasma control

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