[go: up one dir, main page]

WO2018092946A1 - Interrupteur optique atomique faisant appel à un actionneur à flexion piézoélectrique - Google Patents

Interrupteur optique atomique faisant appel à un actionneur à flexion piézoélectrique Download PDF

Info

Publication number
WO2018092946A1
WO2018092946A1 PCT/KR2016/013321 KR2016013321W WO2018092946A1 WO 2018092946 A1 WO2018092946 A1 WO 2018092946A1 KR 2016013321 W KR2016013321 W KR 2016013321W WO 2018092946 A1 WO2018092946 A1 WO 2018092946A1
Authority
WO
WIPO (PCT)
Prior art keywords
lever
bending
flag
atomic beam
piezo actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2016/013321
Other languages
English (en)
Korean (ko)
Inventor
박창용
유대혁
이원규
허명선
김휘동
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Research Institute of Standards and Science
Original Assignee
Korea Research Institute of Standards and Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Research Institute of Standards and Science filed Critical Korea Research Institute of Standards and Science
Priority to PCT/KR2016/013321 priority Critical patent/WO2018092946A1/fr
Publication of WO2018092946A1 publication Critical patent/WO2018092946A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1123—Q-switching
    • H01S3/121—Q-switching using intracavity mechanical devices
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic-beam generation, e.g. resonant beam generation

Definitions

  • the present invention relates to an atomic beam shutter using a bending piezo actuator, and more particularly, is a bending without good magnetic field, good suitability in ultra high vacuum (UHV), low mechanical vibration, long life, fast response
  • An atomic beam shutter using a piezo actuator is a bending without good magnetic field, good suitability in ultra high vacuum (UHV), low mechanical vibration, long life, fast response
  • An atomic beam shutter using a piezo actuator is a bending without good magnetic field, good suitability in ultra high vacuum (UHV), low mechanical vibration, long life, fast response
  • Atomic beams are widely used as the source of atoms in numerous atomic physics experiments, such as Doppler-free spectroscopy or laser cooling and magneto-optical capture for ultra cold atoms.
  • the success of these experiments is often greatly influenced by the high speed treatment of atomic flux and the timely prevention of unwanted effects resulting from hot ovens.
  • the atomic beam system is equipped with a shutter system for beam shuttering.
  • the basic requirement of a shutter system is to be able to completely mechanically block energy sources such as laser beams, atomic beams, and the like, and therefore, of course, the shutter system includes a physical blocking structure and a driving device for moving it.
  • a drive device a step motor, a servo motor, a solenoid coil, a pneumatic device and the like are generally used, but these have the advantage of good practicality and reliability.
  • a laser including a slide element coupled to a support by a roller bearing which is disclosed in US Patent No.
  • Beam diverting shutter for a laser beam serves as a shutter. Beam turning shutters for beams, and beam shutters for turning on / off pulse lasers by opening and closing in front of the laser oscillator disclosed in Japanese Patent Laid-Open No. 1993-777777 (" Pulse Laser Processing Machine ", October 26, 1993). .
  • the disadvantage is that unwanted magnetic fields are generated, and the moving parts are relatively heavy, which limits the shutter response time due to the mechanical vibration of the high speed operating apparatus. There is also a problem that occurs.
  • the atomic clock is essential in all fields that require accurate time such as GPS, mobile phone, and broadcasting. Time is measured using the oscillation frequency of the cesium atom, which has been cooled to near cryogenic temperatures. However, there are factors that distort the accurate measurement of these frequencies, and various studies have been conducted to further increase the accuracy of the atomic clock.
  • Ytterbium (ytterbium) light grid clock optical lattice clock
  • ytterbium light grid clock optical lattice clock
  • the ytterbium optical lattice clock can reduce the error level to about one hundredth of that of the atomic clock using cesium atoms.
  • a shutter is also used in the ytterbium optical lattice clock.
  • a driving device such as a stepper motor or a servo motor
  • the uncertainty is further improved due to problems such as an unwanted magnetic field or mechanical vibration.
  • UHV ultra high vacuum
  • UHV ultra high vacuum
  • the present invention has been made to solve the problems of the prior art as described above, the object of the present invention is configured to be opened and closed using a bending piezo actuator, there is no influence of a magnetic field, ultra-high vacuum (UHV ) Provides an atom beam shutter with good suitability in a), low mechanical vibration, long life and fast response.
  • UHV ultra-high vacuum
  • the atomic beam shutter 100 using the bending piezo actuator of the present invention for achieving the object as described above the base 111 is fixedly supported and receives power from the outside, one end is fixed to the base 111
  • a bending piezo actuator (110) comprising a bending arm (112) extending in the first direction and bent in accordance with the application of power so that the other end is moved in a second direction perpendicular to the first direction;
  • a lever 120 having one end connected to the other end of the bending piezo actuator 110 and rotatably provided around a fixedly supported lever shaft 125;
  • a flag 130 having one end connected to the other end of the lever 120 and extending in the first direction so that the other end moves in the second direction according to the rotation of the lever 120;
  • shuttering of the atomic beam traveling in the third direction by the other end of the flag 130 may be performed.
  • the bending arm 112 extends in the first direction and has a flat shape in a first direction-third direction plane, and the flag 130 extends in the first direction and the first direction-second direction. It may be formed in a flat plate shape.
  • the lever 120, the lever shaft 125 is connected to the center, the body 121A to which one end of the flag 130 is fixedly connected to the other side, is formed at the other end of the body 121A
  • the other end of the bending arm 112 may include a groove portion 122A inserted and connected.
  • At least one groove portion 122A may be formed, and when the plurality of groove portions 122A are formed, the groove portions 122A may be arranged in parallel in the second direction.
  • the lever 120, the lever shaft 125 is connected to the center, one side end of the flag 130 is fixedly connected to the other side of the flag body 121B, the one side of the bending arm 112 It may include a bending arm side body 122B to which the other end is fixedly connected, the flag side body 121B, and a connection part 123B connecting the bending arm side body 122B.
  • the lever 120, the width of the connecting portion 123B is formed relatively smaller than the width of the flag side body 121B and the bending arm side body 122B, the connection portion 123B serves as an elastic hinge It can be formed to be.
  • lever 120 and the flag 130 may be connected by bolting.
  • the flag 130 has a through hole 131 through which the lever shaft 125 penetrates and a guide 132 protruding to both sides along a second direction, and the lever shaft 125 is formed at one end thereof. Inserted into the through hole 131, the guide 132 is bent to surround the other end of the lever 120, the lever 120 and the flag 130 may be connected.
  • lever 120 may be made of Teflon.
  • a bending piezo actuator and a rotating arm connected thereto can be used to reduce the moment of inertia and to implement a shutter system having a lighter and simpler structure.
  • a conventional driving device including relatively heavy components such as a step motor, a servo motor, a solenoid coil, a pneumatic device, and the like is provided. Compared to other devices, excellent dynamic characteristics such as response speed, vibration and noise reduction can be obtained.
  • the influence of the magnetic field generation is much less than the conventional drive device, there is an effect that can greatly reduce the unwanted effect on the experimental results.
  • the introduction of a configuration that reduces the friction at the connection of the bending piezo actuator and the rotating arm prevents the problem of reduced life due to wear or damage in the moving parts, and consequently has a great effect to greatly increase the life.
  • the components of the device of the present invention have the advantage of being excellent in ultra high vacuum (UHV), and very suitable for use as an atomic beam shutter.
  • the shuttering operation is made of only a very small time difference of about 13.2ms, it was confirmed that the response speed is improved compared to the existing devices. In addition, it was confirmed that stable shuttering is possible so that the time difference deviation is about 0.02 ⁇ 0.03ms even after repeated long operation. In addition, it succeeded 2.6 x 10 7 times of normal operation without damage, and it was confirmed that the service life was greatly increased compared to the existing one, and it operated without problems even in the ultra-high vacuum environment of 10 -9 torr.
  • the atomic beam shutter using the bending piezo actuator according to the present invention has the advantage of no magnetic field, good suitability in ultra high vacuum (UHV), low mechanical vibration, long life, and quick response. Accordingly, as a specific example, the effect of improving the uncertainty of the ytterbium optical lattice clock using the atomic beam shutter to 10 -18 can be obtained.
  • 1 is an embodiment of a bending piezo actuator.
  • FIG. 2 is one embodiment of a commercialized product of a bending piezo actuator.
  • FIG. 3 is a schematic diagram of an atomic beam shutter of the present invention.
  • 5 is another embodiment of a lever of an atomic beam shutter of the present invention.
  • FIG. 6 illustrates the dynamic characteristics of the atomic beam shutter of the present invention.
  • atomic beam shutter 110 (of the present invention): bending piezo actuator
  • lever axis 130 flag
  • FIG. 1 shows a schematic diagram of one embodiment of a bending piezo actuator.
  • the bending piezo actuator is formed in a plate shape in which one end is supported by a clamp and extends in one direction, and when the power is applied through one end, the plate body is bent so that the other end is up and down. It is formed to be movable in the direction.
  • the bending piezo actuator can easily adjust the direction, degree, period, etc. of the bending by adjusting the direction, magnitude, period, etc. of the applied electric power.
  • 2 shows one embodiment of a commercialized product picture of such a bending piezo actuator.
  • Such bending piezo actuators have superior dynamic characteristics such as response speed, vibration and noise reduction compared to conventional driving devices including relatively heavy components such as step motors, servo motors, solenoid coils, and pneumatic devices. You can get it.
  • the atomic beam shutter it is necessary to minimize the influence of the unwanted magnetic field.
  • the bending piezo actuator there is no component generating a strong magnetic field as shown in the circuit diagram of FIG. 1.
  • a motor or a solenoid when a motor or a solenoid is used as a driving device, an undesirably strong magnetic field is inevitably generated, and such an unwanted magnetic field may cause an uncertainty of a device including an atomic beam shutter. do.
  • using a bending piezo actuator can solve this problem inherently.
  • the shutter device by applying the bending piezo actuator as described above to the atomic beam shutter, it must be configured so that effective shuttering can be made with a minimum simple structure to ensure excellent dynamic characteristics.
  • the atomic beam shutter of the present invention to be described below is designed in this respect.
  • the atomic beam shutter 100 of the present invention includes a bending piezo actuator 110, a lever 120, and a flag 130, such that the bending piezo actuator 110 is moved by the flag 130.
  • the other end of the flag 130 is moved so that the atomic beam shuttering is performed.
  • 4 and 5 illustrate various specific embodiments of the lever 120
  • FIG. 6 is a view for explaining the dynamic characteristics of the atomic beam shutter of the present invention. First, each part will be described in more detail with reference to FIG. 3.
  • the bending piezo actuator 110 includes a base 111 and a bending arm 112 as shown.
  • the base 111 is fixedly supported on the ground or the like to become a reference point of the bending piezo actuator 110, and receives power from the outside through the base 111.
  • one end is fixed to the base 111 and extends in the first direction and is bent in accordance with the application of power so that the other end moves in the second direction perpendicular to the first direction. It is formed to be.
  • One end of the lever 120 is connected to the other end of the bending piezo actuator 110 and is rotatably provided around the fixed lever shaft 125. That is, the lever 120 converts the second direction movement of the other end of the bending arm 112 into a rotational movement about the lever shaft 125, and the rotational movement is the flag 130 to be described below. Is delivered.
  • the flag 130 has one end connected to the other end of the lever 120 and extending in the first direction so that the other end moves in the second direction as the lever 120 rotates. More specifically, the transmission of motion is as follows. First, as power is applied through the base 111, the other end of the bending arm 112 moves up and down along a second direction. Since the other end of the bending arm 112 and one end of the lever 120 are connected, one end of the lever 120 is moved in the same direction as the other end of the bending arm 12.
  • the lever 120 is rotatable about the lever shaft 125, the other end of the lever 120 is moved in point symmetry with respect to one end of the lever 120, that is, the lever When one end of the 120 is upward, the other end of the lever 120 is moved downward.
  • the other end of the lever 120 is connected to one end of the flag 130, and the other end of the lever 120 moves up and down along a second direction, and thus, the flag ( The other end of 130 is also moved up and down along the second direction.
  • the third direction when the atomic beam travels in the third direction, the other end of the flag 130 moves up and down along the second direction as described above.
  • shuttering of the atomic beam traveling in the third direction by the other end of the flag 130 may be performed very easily.
  • the bending arm 112 may extend in a first direction and have a flat plate shape in a first direction to a third direction in view of the shape of the bending piezo actuator 110 itself.
  • the flag 130 extends in the first direction and has a flat plate shape on the first direction-second direction plane, so that the shuttering of the atomic beam traveling in the third direction can be easily performed.
  • the other end of the flag 130 is preferably formed to have a larger area than the rest of the elongated body as shown in Figure 3, so that the shuttering of the atomic beam can be made more effectively.
  • the extending body portion of the flag 130 is preferably made to reduce the weight of the flag 130 itself by forming a hole or the like, as shown in Figure 3 to improve the overall dynamic characteristics of the device.
  • the atomic beam shutter 100 of the present invention generates a movement using the bending piezo actuator 110, and the movement is transmitted to the movement of the flag 130 through the lever 120. Allow shuttering to occur. That is, in summary, the configuration of the atomic beam shutter 100 of the present invention is configured to extend the movement of the bending piezo actuator 110 to the flag 130.
  • the movement of the bending piezo actuator may be simplified by a movement in which one end of the bending arm is fixed to the base and the bending arm rotates around the fixing point. Accordingly, the other end of the bending arm moves in the vertical direction.
  • an extended arm (shown as an extended-arm in FIG. 6) is extended to the other end of the bending piezo actuator bending arm. It can be comprised in the form provided.
  • Fig. 6 shows a configuration corresponding to the atomic beam shutter of the present invention.
  • the other end of the bending piezo actuator bending arm is provided with a rotating arm composed of a lever and a flag (indicated by a rotating arm in FIG. 6).
  • the rotating shaft is formed at one end of the bending arm so that the other end of the bending arm moves up and down, and the other end of the bending arm is connected to one end of the rotating arm.
  • the rotary arm, the rotation axis is formed in a position biased toward one side of the rotary arm is to rotate the movement around it. Therefore, the other end of the rotating arm is transferred to the vertical direction of the other end of the bending arm is also moved up and down, but the direction is reversed.
  • the present invention introduces an optimal design form that can simplify the structure as much as possible while also improving the dynamic characteristics at the maximum.
  • the lever 120 will be described in more detail as follows.
  • the lever 120 is preferably made of Teflon.
  • the actual operating environment of the atomic beam shutter is an ultra-high vacuum environment, and Teflon has high environmental suitability because of low outgasing in such an environment.
  • Teflon since Teflon is flexible, there is an advantage in that it can respond well to deformation.
  • Teflon forms a very smooth surface, when the lever 120 is made of Teflon, the friction force generated in the movement of the lever 120 about the lever shaft 125 can be minimized. have.
  • lever 120 will be described. 4 and 5 show several embodiments of the lever of the atomic beam shutter of the present invention, respectively.
  • the atomic beam shutter 100 of the present invention rotates the lever 120 about the lever shaft 125 to transfer the movement of the bending arm 112 to the movement of the flag 130. With this configuration, the moment of inertia can be much reduced.
  • specific configurations of each of the various embodiments of the lever will be described in more detail.
  • lever 120 is connected to the center, the body 121A, one end of the flag 130 is fixedly connected to the other side, the body 121A It is formed at the other end of the, and the other end of the bending arm 112 is made to include a groove portion (122A) that is inserted and connected.
  • the other end of the bending arm 112 is inserted into and connected to the groove portion 122A.
  • at least one groove portion 122A may be formed as shown, and the groove portion 122A may be formed.
  • it may also be arranged in parallel in the second direction as shown.
  • the vertical movement of the bending arm 112 is intact. It is transmitted by the vertical movement of the flag 130 without deflection.
  • the up or down movement of the bending arm 112 is transferred to the up and down movement of the flag 130.
  • the upward bias will occur.
  • Such a deflection can be adjusted according to a user's purpose. For example, the deflection may be adjusted to correct a deformation of the device shape due to wear or damage of the device during operation. That is, a plurality of groove portions 122A may be formed in consideration of these various possibilities.
  • the lever shaft 125 is connected to a center thereof, and a flag side body 121B at which one end of the flag 130 is fixedly connected to the other side thereof. It includes a bending arm side body 122B to which the other end of the bending arm 112 is fixedly connected, the flag side body 121B and a connecting portion 123B connecting the bending arm side body 122B.
  • the bending arm side body 122B may be formed as simple as possible to fit tightly to the end of the bending arm 112 as shown.
  • the width of the connecting portion 123B may be formed relatively smaller than the width of the flag side body 121B and the bending arm side body 122B.
  • the connecting portion 123B serves as an elastic hinge.
  • a flexible hinge refers to a hinge based on a flexure. The flexure structure is briefly described as follows. In a structure, when a part has a much smaller width than other parts around it, when a force is applied from outside, stress is concentrated at that part and deformation occurs. This structure is called a flexure structure.
  • connection portion 123B is formed in a shape that can serve as an elastic hinge.
  • the lever 120 and the flag 130 may be connected in various ways.
  • FIG. 4 an embodiment is shown in which the lever 120 and the flag 130 are connected by bolting.
  • the flag 130 has a form in which a through hole 131 through which the lever shaft 125 penetrates and a guide 132 protruding to both sides along a second direction are formed at one end thereof.
  • the lever shaft 125 is inserted into the through hole 131, and the guide 132 is bent to surround the other end of the lever 120, thereby between the lever 120 and the flag 130.
  • the connection is made. That is, the embodiment of Figure 5 is a connection is made by fitting as a result.
  • the bolted connection is shown in the embodiment of FIG. 4, and the fitting connection is shown in the embodiment of FIG. 5, but the present invention is not limited thereto, and a bolting connection may be introduced into the lever form of FIG. 5, and FIG.
  • Various modifications are possible, such as the introduction of a fitted connection in the lever form of 4.
  • FIG. 7 shows an actual experimental photograph of the atomic beam shutter of the present invention. As shown, the experiment was performed by shuttering the laser using the atomic beam shutter of the present invention, and in this experiment, the atomic beam shutter of the present invention. Was successful 2.6 x 10 7 times without breakage, and it was confirmed that the lifespan until breakage was significantly increased compared to the conventional one. 8 to 11 show the experimental results, and briefly explain each result as follows.
  • Figure 8 shows the magnitude and phase shift of the flag according to the operating frequency of the bending piezo actuator. As shown, it is confirmed that the maximum value occurs at about 50 Hz, that is, the resonance frequency is about 50 Hz. It is not quite suitable for use with laser shutters, but is fast enough to be very suitable for use with atomic beam shutters.
  • the trigger voltage and the operating voltage applied to the bending piezo actuator show almost similar signal waveforms, and the time delay between the operating voltage and the measured voltage is about 13.0 (2.9 + 10.1) to 13.3 (4.0 + 9.3) ms. That is, since the shuttering operation is made with only a very small time difference of about 13.2ms, it can be confirmed that the response speed is improved compared to the existing devices.
  • FIG. 12 illustrates an experimental apparatus for experimenting with shuttering performance of the atomic beam shutter of the present invention.
  • the experimental apparatus of FIG. 7 is an experiment using a laser instead of an atomic beam, which is slightly different from the actual environment in which the atomic beam shutter is introduced.
  • FIG. 12 is an experimental device that actually uses an atomic beam, and the atomic beam shutter operates in an ultra high vacuum (UHV) environment of about 10 to 9 torr.
  • UHV ultra high vacuum
  • FIG. 13 to 15 are experimental results obtained by the experimental apparatus of FIG. 12.
  • the shutter trigger signal is compared with the actual number of measured atoms.
  • FIG. 13 shows results for a relatively long time in units of thousands of ms
  • FIG. 14 shows results for a relatively short time in units of tens of ms during a shutter opening operation
  • FIG. Each of the results for a short time is shown.
  • the atomic beam can be turned on and off very effectively with only a time delay of about 20-30 ms against the change of the shuttering trigger signal.
  • the atomic beam shutter of the present invention operates without problems even in an ultra-high vacuum environment of 10 -9 torr.
  • the atomic beam shutter using the bending piezo actuator according to the present invention has the advantages of no magnetic field, good suitability in ultra high vacuum (UHV), low mechanical vibration, long life, and quick response. Accordingly, as a specific example, the effect of improving the uncertainty of the ytterbium optical lattice clock using the atomic beam shutter to 10 -18 can be obtained.

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Particle Accelerators (AREA)

Abstract

La présente invention vise à fournir un interrupteur optique atomique configuré de façon à être ouvert et fermé à l'aide d'un actionneur à flexion piézoélectrique, ce qui permet à l'interrupteur optique atomique de ne pas être affecté par un champ magnétique, de générer peu de vibrations mécaniques, de présenter une bonne compatibilité dans un ultravide (UHV) ainsi qu'une longue durée de vie, et de faire preuve d'une réponse rapide.
PCT/KR2016/013321 2016-11-18 2016-11-18 Interrupteur optique atomique faisant appel à un actionneur à flexion piézoélectrique Ceased WO2018092946A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/KR2016/013321 WO2018092946A1 (fr) 2016-11-18 2016-11-18 Interrupteur optique atomique faisant appel à un actionneur à flexion piézoélectrique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2016/013321 WO2018092946A1 (fr) 2016-11-18 2016-11-18 Interrupteur optique atomique faisant appel à un actionneur à flexion piézoélectrique

Publications (1)

Publication Number Publication Date
WO2018092946A1 true WO2018092946A1 (fr) 2018-05-24

Family

ID=62145158

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2016/013321 Ceased WO2018092946A1 (fr) 2016-11-18 2016-11-18 Interrupteur optique atomique faisant appel à un actionneur à flexion piézoélectrique

Country Status (1)

Country Link
WO (1) WO2018092946A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024061214A1 (fr) * 2022-09-20 2024-03-28 河南皓泽电子股份有限公司 Obturateur à commande piézoélectrique, module de lentille et dispositif photographique

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4850697A (en) * 1988-03-16 1989-07-25 Dynatech Electro-Optics Corporation Resonant piezoelectric chopper for infrared radiation
JPH05225938A (ja) * 1992-02-07 1993-09-03 Jeol Ltd 電子顕微鏡
JPH0734230A (ja) * 1993-06-28 1995-02-03 Nec Corp シャッター機構
JP2007207645A (ja) * 2006-02-03 2007-08-16 Jeol Ltd 荷電粒子線のシャッタ装置
JP2008311136A (ja) * 2007-06-15 2008-12-25 Jeol Ltd 電子顕微鏡のシャッタ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4850697A (en) * 1988-03-16 1989-07-25 Dynatech Electro-Optics Corporation Resonant piezoelectric chopper for infrared radiation
JPH05225938A (ja) * 1992-02-07 1993-09-03 Jeol Ltd 電子顕微鏡
JPH0734230A (ja) * 1993-06-28 1995-02-03 Nec Corp シャッター機構
JP2007207645A (ja) * 2006-02-03 2007-08-16 Jeol Ltd 荷電粒子線のシャッタ装置
JP2008311136A (ja) * 2007-06-15 2008-12-25 Jeol Ltd 電子顕微鏡のシャッタ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024061214A1 (fr) * 2022-09-20 2024-03-28 河南皓泽电子股份有限公司 Obturateur à commande piézoélectrique, module de lentille et dispositif photographique

Similar Documents

Publication Publication Date Title
EP0486787B1 (fr) Dispositif de positionnement du type à parallélogramme multi-barres
CN109716209A (zh) 使用多稳态状态以增强图像的分辨率的光学设备
EP2565451A2 (fr) Mécanisme d'actionnement et mécanisme d'obturation
WO2017052075A1 (fr) Moteur à application d'aimants permanents
WO2018092946A1 (fr) Interrupteur optique atomique faisant appel à un actionneur à flexion piézoélectrique
JPH0651172A (ja) 宇宙航行体搭載用光学系の撮像素子位置調整装置
EP1652285B1 (fr) Verrou magnetique bistable
US6831380B2 (en) Low inertia latching microactuator
JP2018155845A (ja) シャッタ装置、およびシャッタ装置の制御方法
EP0381983A2 (fr) Dispositif de balayage à vitesse constante
KR101636434B1 (ko) 부품의 성능 테스트용 어셈블리
JP5091941B2 (ja) 双安定磁気ラッチ組立体
JPH0570947A (ja) 蒸着装置
EP1658520B1 (fr) Ensemble commutateur a force de ressort non lineaire
US6937121B2 (en) Magnetic actuator
JPS6082072A (ja) ステツピングモ−タ
JPH0652787A (ja) 保護開閉器具のトリップ装置
US4339190A (en) Electromagnetically driven focal plane shutter
KR102230423B1 (ko) 진공 안정 메커니즘 구동 암
KR20060045207A (ko) 카메라용 조리개장치
CN116651723B (zh) 振动产生装置、减振装置以及电子设备
US11467395B2 (en) High-reliability ultra-fast mechanical shutter
KR20140097533A (ko) 자기발전기 및 자기발전방법
JPS6044838B2 (ja) 回転微動機構
JPS6049890B2 (ja) 分割露光用回転シャッタ

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16921583

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16921583

Country of ref document: EP

Kind code of ref document: A1