WO2018058842A1 - Scheduling method and device for production line apparatus - Google Patents

Abstract

Disclosed is a scheduling method for a production line apparatus, wherein the production line apparatus comprises one or more functional modules, the functional modules have corresponding task sequences, and the task sequences comprise one or more tasks. The method comprises: respectively calculating, with respect to the task sequence of each of the functional modules, a waiting time required for performing each of the tasks in each of the task sequences (101); determining a task having the shortest waiting time currently as a target task (102); performing the target task (103); and after deleting the target task from the task sequences, returning to the step of respectively calculating a waiting time required for performing each of the tasks in each of the task sequences with respect to the task sequence of each of the functional modules (104). The method divides a production line apparatus into a plurality of independent functional modules, and always performs the task having the shortest waiting time first with respect to each of the functional modules, thus guaranteeing to minimize an overall waiting time for each of the functional modules of the production line apparatus during the scheduling process, thereby increasing the scheduling efficiency.

Description

Method and device for scheduling production line equipment Technical field

The invention relates to the technical field of process control, in particular to a scheduling method of a production line device and a scheduling device of a production line device.

Background technique

The cluster scheduling problem refers to a class in which the semiconductor manufacturing industry needs to use multiple transmission platforms at the same time and mount multiple process chambers, which leads to a more complicated transmission path and scheduling method of wafers in process production. problem. In recent years, with the rapid development of manufacturing technology in the semiconductor industry, the production capacity of equipment has become higher and higher in the production process. For the production line equipment of different production processes, how to design efficient and reliable scheduling algorithms is of great significance and effect for improving the production capacity of production line equipment.

The production line equipment scheduling algorithm is a kind of complicated NP combinatorial optimization problem. In the process of actual solution, there is no mature polynomial algorithm and optimization theory can learn from and quote, but only some specific optimization methods can be used to solve the problem according to the specific problem. .

Therefore, a technical problem that needs to be solved urgently by those skilled in the art is to provide a scheduling method for complex scheduling requirements and increase the productivity of production line equipment.

Summary of the invention

The technical problem to be solved by the present invention is to provide a scheduling method for a production line device to optimize the complex scheduling requirements and increase the production capacity of the production line equipment.

Correspondingly, the present invention also provides a scheduling device for a production line device to ensure the implementation and application of the above method.

In order to solve the above problems, the present invention discloses a scheduling method for a production line device, wherein The production line device includes one or more function modules, the function module has a corresponding task sequence, and the task sequence includes one or more tasks, and the method includes:

Calculating the waiting time required to execute each of the tasks in each task sequence for each task sequence of the function module;

Determine the task with the shortest waiting time as the target task;

Performing the target task;

After deleting the target task from the task sequence, returning the task sequence for each functional module, respectively calculating the waiting time required to execute each of the tasks in each task sequence.

Preferably, after the step of deleting the target task from the task sequence, the method further includes:

Add a new task to the task sequence.

Preferably, the step of adding a new task in the task sequence includes:

Obtain new tasks;

Determining whether the number of currently existing tasks in the task sequence reaches a corresponding preset number;

If not, adding the new task to the task sequence;

If so, the addition of the new task in the task sequence is stopped.

Preferably, the function module has a corresponding state, and the state includes: an idle state, a busy state, and an unavailable state;

The step of adding the new task in the task sequence includes:

Adding the new task to the task sequence if the function module is in an idle state;

If the function module is in a busy state or an unavailable state, then stopping adding the new task in the task sequence.

Preferably, the waiting time is determined by:

Obtaining that the function module enters an idle state for a first time;

Obtaining the time required to complete the adjustment actions required for each of the tasks is the second time;

Obtaining the time required to complete the predecessor tasks of the respective tasks is the third time;

The first time, the second time, and the third time are totaled as the current waiting time.

Preferably, the corresponding preset numbers of the task sequences of the respective functional modules are the same.

Preferably, the functional module comprises an atmospheric manipulator, and the tasks of the atmospheric manipulator include:

The silicon wafer is taken out from the crystal box and sent to the positioning calibration device. The silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette.

Preferably, the function module comprises a locking container, and the tasks of the locking container include:

Inflate to atmosphere, pump to vacuum, wafer transfer or incoming.

Preferably, the functional module comprises a vacuum manipulator, and the tasks of the vacuum manipulator include:

Passing the silicon wafer in the locked container into the process chamber of the first process, transferring the silicon wafer in the process chamber of the first process to the process chamber of the second process, and in the process chamber of the second process The wafer is introduced into the lock container.

Preferably, the functional module comprises a process chamber, and the tasks of the process chamber include:

Open the chamber valve, perform the wafer process, and close the chamber valve.

Meanwhile, the present invention also discloses a scheduling device for a production line device, wherein the production line device includes one or more functional modules, the functional module has a corresponding task sequence, and the task sequence includes one or more tasks. The device includes:

a waiting time calculation module, configured to separately calculate a waiting time required to execute each of the tasks in each task sequence for a task sequence of each function module;

a target task determining module, configured to determine that the task with the shortest waiting time is the target task;

An execution module, configured to execute the target task;

The calling module is configured to invoke the waiting time calculation module after deleting the target task from the task sequence.

Preferably, the method further includes:

a task adding module, configured to add a new task to the task sequence after deleting the target task from the task sequence;

The calling module is configured to invoke the waiting time calculation module after the task adding module deletes the target task from the task sequence.

Preferably, the task adding module includes:

The new task gets a sub-module for obtaining a new task;

a determining sub-module, configured to determine whether the number of currently existing tasks in the task sequence reaches a corresponding preset number;

Adding a sub-module, if the number of currently existing tasks in the task sequence does not reach a preset number, adding the new task to the task sequence;

The stopping submodule is configured to stop adding the new task in the task sequence if the number of currently existing tasks in the task sequence reaches a preset number.

Preferably, the function module has a corresponding state, and the state includes: an idle state, a busy state, and an unavailable state;

The adding submodule includes:

Adding a unit, if the function module is in an idle state, adding the new task to the task sequence;

And stopping the unit, if the function module is in a busy state or an unavailable state, stopping adding the new task in the task sequence.

Preferably, the waiting time is determined by the following module:

a first time acquiring module, configured to acquire a time when the function module enters an idle state as a first time;

a second time acquiring module, configured to acquire a time required for completing the adjustment action required for each task as a second time;

a third time acquiring module, configured to acquire a time required to complete the predecessor of each task as a third time;

And a totaling module, configured to total the first time, the second time, and the third time as the current waiting time.

Preferably, the corresponding preset numbers of the task sequences of the respective functional modules are the same.

Preferably, the functional module comprises an atmospheric manipulator, and the tasks of the atmospheric manipulator include:

The silicon wafer is taken out from the crystal box and sent to the positioning calibration device. The silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette.

Preferably, the function module comprises a locking container, and the tasks of the locking container include:

Inflate to atmosphere, pump to vacuum, wafer transfer or incoming.

Preferably, the functional module comprises a vacuum manipulator, and the tasks of the vacuum manipulator include:

Passing the silicon wafer in the locked container into the process chamber of the first process, transferring the silicon wafer in the process chamber of the first process to the process chamber of the second process, and in the process chamber of the second process The wafer is introduced into the lock container.

Preferably, the functional module comprises a process chamber, and the tasks of the process chamber include:

Open the chamber valve, perform the wafer process, and close the chamber valve.

Compared with the prior art, the present invention includes the following advantages:

The invention divides the production line equipment into a plurality of independent functional modules, and analyzes tasks to be performed in the task sequence of each module. For each functional module, the task with the shortest waiting time is always executed first. This ensures that the total waiting time of each functional module of the production line equipment is as small as possible during the scheduling process, thereby improving the scheduling efficiency and increasing the production capacity of the production line equipment.

DRAWINGS

1 is a flow chart showing the steps of Embodiment 1 of a scheduling method for a production line device according to the present invention;

2 is a flow chart showing the steps of Embodiment 2 of a scheduling method of a production line device according to the present invention;

3 is a block diagram showing the structure of a first embodiment of a scheduling apparatus for a production line apparatus according to the present invention.

detailed description

The present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.

For some scheduling problems where the computational scale is relatively small and the scheduling requirements are not very complicated, it can be solved by traditional heuristic methods or mathematical programming methods.

The heuristic algorithm is proposed relative to the optimization algorithm. The optimization algorithm of a problem refers to the optimal solution for each instance of the problem. The traditional heuristic algorithm mainly adopts some common local optimization ideas. The calculation process of the algorithm is relatively simple, and the implementability (software programming implementation) is relatively strong. The basic idea of applying the traditional heuristic algorithm to solve the cluster scheduling problem is: Some local optimization ideas, such as greedy algorithm and tabu search, are applied in the scheduling process to ensure that certain stages or certain scheduling modules in the scheduling process can save time to maximize the efficiency of the scheduling system. To achieve the purpose of solving the problem. This algorithm is an intuitive or forbidden-based algorithm that gives a feasible solution for each instance of the combinatorial optimization problem to be solved at an acceptable cost (calculating only time and space). The feasible solution and the optimal solution The degree of deviation cannot be predicted in advance. Therefore, the scheduling path designed by this method is not necessarily optimal, and may be only a better solution or a feasible solution, or even a solution with poor performance. Moreover, this method is only for the scheduling problem with relatively small calculation scale. For the scheduling problem with complex scheduling requirements and large calculation scale, this method is difficult to apply.

The basic idea of the mathematical programming method is to transform the cluster scheduling problem into common graph theory problems or mathematical programming problems, and then use the existing algorithm theory (Petri net, integer programming, etc.) to establish a mathematical programming model for scheduling problems (target Functions and constraints), then use traditional mathematical programming methods (genetic algorithms, neural networks, etc.) or other mathematical tools to solve the model to achieve the purpose of solving the problem. The basic idea of using mathematical programming methods to solve scheduling problems is: The cluster scheduling problem is transformed into a common graph theory problem or mathematical programming problem, and then the existing algorithm theory such as Petri net model, integer programming, etc. is used to establish the mathematical programming model of the scheduling problem (including the objective function and constraints), and then adopt The traditional mathematical programming method and other mathematical tools to solve the model to get the optimal solution of the problem. Compared with the traditional heuristic algorithm, the mathematical programming method generally obtains the optimal solution of the problem, but this method also has obvious limitations: the mathematical programming method generally needs to establish a very complicated mathematical model, and the solution process of the model It is very complicated and difficult to implement by software programming. It can only be solved offline by means of software tools, which also makes the method poorly implementable and difficult to use. On the other hand, mathematical programming methods can only solve the scheduling requirements. Simple problem, this method is also difficult to use for scheduling complex problems.

Aiming at some shortcomings of existing scheduling algorithm design methods in practical applications, the present invention adopts a dynamic programming based method to design a scheduling algorithm for semiconductor production line equipment.

One of the core concepts of the present invention is to decompose the scheduling transmission system of the device into independent functional modules, and analyze the sequence of tasks to be executed by each module in a certain time range in the future. For each module, under the constraint condition, always Perform tasks that require the shortest waiting time.

1 is a flow chart showing the steps of Embodiment 1 of a scheduling method for a production line device according to the present invention, wherein the production line device includes one or more functional modules, and the functional modules have corresponding task sequences, The task sequence includes one or more tasks, and the method may specifically include the following steps:

Step 101: Calculate, for each task sequence of the function module, a waiting time required to execute each of the tasks in each task sequence;

The production line equipment may be a semiconductor process equipment such as a HardMask process equipment, an Etch equipment, or a Physical Vapor Deposition equipment.

The production line equipment can be divided into multiple functional independent functional modules, each of which has The corresponding task sequence, the task sequence includes the tasks to be executed by the module. For example, in a hard mask process device, the functional module includes an atmospheric manipulator, and tasks to be performed in the task sequence of the atmospheric manipulator may include: removing the silicon wafer from the crystal cell to the positioning calibration device, and calibrating the silicon wafer with the calibration device. The incoming lock container is taken out, and the silicon wafer is taken out from the lock container and returned to the crystal cassette.

For production line equipment, optimizing the task scheduling algorithm for each functional module is a key factor in increasing equipment capacity. The invention is based on the idea of dynamic programming. In the working process of the production line equipment, each functional module always prioritizes the task that requires the shortest waiting time.

Step 102: Determine that the task with the shortest waiting time is the target task;

In the task sequence of the function module, the waiting time of each task is calculated, and the task with the shortest waiting time is used as the target task to be executed first.

Step 103: Perform the target task.

Step 104: After deleting the target task from the task sequence, return the task sequence for each functional module, and separately calculate the waiting time required to execute each of the tasks in each task sequence.

After the function module starts to execute the target task, the executed target task is deleted in the task sequence of the function module, and then the waiting time of each task in the task sequence is recalculated, and the task with the shortest waiting time is taken as the target task.

The invention divides the production line equipment into a plurality of independent functional modules, and analyzes tasks to be performed in the task sequence of each module. For each functional module, the task with the shortest waiting time is always executed first. This ensures that the total waiting time of each functional module of the production line equipment is as small as possible during the scheduling process, thereby improving the scheduling efficiency and increasing the production capacity of the production line equipment.

Referring to FIG. 2, a flow chart of the steps of Embodiment 2 of a scheduling method for a production line device according to the present invention is shown, wherein the production line device includes one or more functional modules, and the functional modules have corresponding task sequences, The task sequence includes one or more tasks, and the method is specifically To include the following steps:

Step 201: Calculate, for each task sequence of the function module, a waiting time required to execute each of the tasks in each task sequence;

In the present invention, a description will be given by taking a production line device as a hard mask device as an example.

Specifically, the functional modules of the hard mask device can be divided into: an atmospheric manipulator, a locking container, a vacuum manipulator, and a process chamber. Wherein, the process chamber may include a process chamber performing the first process and a process chamber performing the second process.

The specific process of the hard mask device can be: the atmospheric manipulator removes the silicon wafer from the Cassette and places it on the alignment calibration device (Aligner) for positioning calibration.

After the calibration is completed, the atmospheric manipulator removes the silicon wafer from the positioning calibration device and transfers it to the atmospherically locked locker (LoadLock). The atmospheric state, that is, the pressure of the locked container is equal to the atmospheric pressure.

After the locking container is placed in the silicon wafer, the atmospheric end door of the locking container is immediately closed, and then the locking container is evacuated to a vacuum state.

The vacuum robot in the transfer chamber takes out the silicon wafer in the lock container and feeds it into each process chamber for the process flow, at which time the lock container is in a vacuum state.

After the silicon wafer completes the relevant process in the process chamber, the vacuum manipulator takes the silicon wafer out and puts it into the lock container, and then the atmospheric manipulator takes out the silicon wafer in the lock container and puts it into the crystal box.

Immediately after the wafer is removed from the lock container, the vacuum end door of the lock container is closed, and then the lock container is inflated to the atmosphere.

Wherein, the tasks of the atmospheric manipulator may include:

1. Transfer the film from the crystal box to the positioning calibration device; 2. Pass the silicon wafer that has been calibrated by the positioning calibration device into the locking container; 3. Take the film from the locking container and return it to the crystal box.

The task of locking a container can include:

1. Inflated to the atmosphere; 2. Pumped to a vacuum state; 3. Silicon wafers are transmitted or introduced.

The tasks of a vacuum manipulator can include:

1. The silicon wafer in the locked container is introduced into the process chamber of the first process; 2. the silicon wafer in the process chamber of the first process is introduced into the process chamber of the second process; 3. the second process is The silicon wafer in the process chamber is introduced into the lock container.

The tasks of the process chamber can include:

1 open the chamber valve; 2, the process of executing the silicon wafer; 3, close the chamber valve. Among them, the process chambers of different processes perform corresponding process processes on the silicon wafer.

It should be understood by those skilled in the art that the division of the functional modules and the task setting of each functional module are merely examples of the present invention, and those skilled in the art may adopt other partitioning function modules, and set the tasks of the modules in other manners. There are no restrictions here.

Step 202: Determine that the task with the shortest waiting time is the target task;

The waiting time is the time from the current time to the start of the task.

In the present invention, the waiting time can be determined as follows:

1) obtaining the time when the function module enters an idle state as the first time;

2) obtaining the time required to complete the adjustment actions required for the respective tasks is the second time;

3) obtaining the time required to complete the predecessor tasks of the respective tasks is the third time;

4) The first time, the second time, and the third time are totaled as the current waiting time.

In the present invention, the waiting time may include: a time required for the function module to complete the current task execution, an adjustment time of the function module, and a waiting time of the predecessor task.

The idle state refers to a state in which the function module is not performing a task, and if the function module is performing a task, the function module is defined as being in a busy state. The first time is the time required for the function module to complete the currently executing task.

The adjustment action refers to the action required between the two tasks. In fact, any two tasks of each functional module are not necessarily continuously executable. After performing a task, you may need to perform certain adjustment actions before the function module can perform the next task.

The predecessor task refers to the task before the task in the process flow. The predecessor task of a task can be executed by the same function module or by other function modules.

Hereinafter, the time required for the adjustment operation will be further described by way of example.

For example, the tasks of the vacuum manipulator include: task 1, transporting the silicon wafer from the container A to the container B; task 2, transporting the wafer container B to the container C; task 3, transporting the silicon wafer from the container C to the container A.

If the number of containers B is 2, when the vacuum robot performs task 1, the task 2 and task 3 in the task sequence can be selected. After the task 1 is completed, the vacuum robot is in the position of the container B. It can be considered that the vacuum robot can perform task 2 immediately at the position of the container B. That is, task 2 can be executed immediately following task 1.

If task 3 is to be performed, the vacuum manipulator needs to move to the position of container C before starting task 3. That is, the task 3 of the vacuum manipulator cannot be executed immediately after the task 1, and the task 3 can be started after the adjustment action is performed. It can be understood that this adjustment action increases the waiting time of task 3.

It should be noted that the adjustment action will be different depending on the task setting. In fact, each task consists of one or more actions, and adjustment actions can be added to the task as part of the task.

Hereinafter, the time required for the predecessor task will be further described by way of example.

For example, the tasks of the atmospheric manipulator include: task 1, taking the film from the crystal cassette to the positioning calibration device, task 2, transferring the silicon wafer that has been calibrated by the positioning calibration device into the locking container; task 3, taking the piece from the locking container Return to the crystal box.

According to the specific process flow of the hard mask device described above, the atmospheric manipulator task 1 is the first step in the process, that is, the task 1 has no predecessor task. The predecessor task of task 2 is task 1, and task 2 can be executed immediately following task 1.

Task 3 also needs to perform the related tasks of Process 1 and Process 2 in order to be executed. which is Task 3 needs to wait for the predecessor task to complete before it can be executed.

Step 203: Perform the target task.

Step 204: After deleting the target task from the task sequence, adding a new task to the task sequence;

In the present invention, the step of adding a new task in the task sequence may include:

Sub-step S11, obtaining a new task;

Obtain new tasks to be performed by the function module;

Sub-step S12, determining whether the number of currently existing tasks in the task sequence reaches a corresponding preset number;

Specifically, the task sequence of each function module is set in length; the length refers to the maximum number of tasks that the task sequence can set. For example, the atmospheric robot's task sequence length is 3, that is, up to 3 tasks can be set in the task sequence.

After obtaining a new task, if the number of existing tasks in the task sequence has reached the preset number, stop adding the new task to the task sequence. If the number of existing tasks in the task sequence does not reach the preset number, the new task is added to the task sequence.

In a preferred example of the invention, the corresponding preset number of task sequences of the respective functional modules is the same. That is, the preset number corresponding to each task sequence is the same. For example, the task sequence of each function module has a length of 3, that is, the number of tasks that can be set in the task sequence of each function module is 3.

Sub-step S13, if no, adding the new task to the task sequence;

Sub-step S14, if yes, stopping adding the new task to the task sequence.

Further, in the present invention, the function module has a corresponding state, and the state includes an idle state, a busy state, and an unavailable state.

The step of adding the new task in the task sequence includes:

Adding the new task to the task sequence if the function module is in an idle state;

If the function module is in a busy state or an unavailable state, then stopping adding the new task in the task sequence.

Each function module has three states: idle state, busy state, and unavailable state. The idle state means that the function module is not performing the task. A busy state means that the function module is performing a task. The unavailable state means that the function module cannot perform the task. For example, when a function module fails, the function module changes to an unavailable state.

During the scheduling of the production line equipment, the status of each functional module is updated in real time.

If the function module is in an idle state, a new task is added to the task sequence of the function module;

If the function module is busy or unavailable, stop adding new tasks to the task sequence of the function module.

New tasks are added only when the function module changes from a busy state to an idle state. That is, when the function module performs a task, a new task is added to the task sequence of the function module.

Step 205, returning the task sequence for each functional module, and separately calculating the waiting time required to execute each of the tasks in each task sequence.

Steps 201 through 205 are repeated until the scheduling is completed.

In the present invention, the hard mask device is divided into four functional modules: an atmospheric manipulator, a locking container, a vacuum manipulator, and a process chamber, and the task sequences of each functional module are set to the same length. During the scheduling process, the preferred execution task sequence of each function performs the task with the shortest waiting time, which ensures that the total waiting time of each functional module of the hard mask device is as small as possible during the scheduling process, thereby improving scheduling efficiency.

Hereinafter, the simulation results of the tasks of the functional modules according to the present invention will be described.

In the simulation experiment of hard mask equipment, the hard mask equipment is divided into four functional modules: atmospheric manipulator, locking container, vacuum manipulator and process chamber. The process chamber includes a process chamber that performs Process 1 and a process chamber that performs Process 2. The number of process chambers of Process 1 is 2, Process 2 The number of process chambers is 2, the number of locked containers is 1, and the number of positioning calibration devices is 1. Therefore, the set of hard mask devices can accommodate up to seven wafers at the same time. When the capacity of the crystal box is 25 pieces, the scheduling process of the hard mask device is to process 25 silicon wafers of one crystal box.

In the simulation experiment, the functions of the function modules are numbered for convenience of description.

For example, the tasks of the atmospheric manipulator may include:

1. Transfer the film from the crystal box to the positioning calibration device;

2. Passing the silicon wafer that has been calibrated by the positioning calibration device into the locking container;

3. Take the piece from the lock container and return it to the crystal case.

The simulation results are:

Initial task sequence: (1,2,1,2,1,2,1,2,1,2,1,2,1,2)

Cyclic task sequence: (1, 2, 3) loop 18 times

End task sequence: (3,3,3,3,3,3,3)

In the simulation according to the method of the present invention, the simulation is performed with the idea that the function module preferentially executes the task with the shortest waiting time. The simulation result of the atmospheric manipulator's scheduling task for 25 silicon wafers in the crystal box is as follows: the atmospheric manipulator first executes the cycle of task 1 - task 2 for 7 times, after 7 cycles.

The cycle of task 1 - task 2 - task 3 is performed 18 times in succession. After 18 cycles, task 3 was performed 7 times in succession.

The above content is only an example of the present invention, and the simulation result of the task performed by the atmospheric manipulator is also changed according to the device parameters of the hard mask device set at the time of simulation. For example, the number of the same function module, the time the function module performs the task, etc., will affect the simulation results.

It should be noted that, for the method embodiments, for the sake of simple description, they are all expressed as a series of action combinations, but those skilled in the art should understand that the present invention is not limited by the described action sequence, because Invented, certain steps may be performed in other orders or simultaneously. Secondly, those skilled in the art should also know that the embodiments described in the specification are all preferred. For example, the actions involved are not necessarily required by the present invention.

Referring to FIG. 3, there is shown a structural block diagram of Embodiment 1 of a scheduling apparatus for a production line apparatus of the present invention, wherein the production line apparatus includes one or more functional modules, the functional modules having corresponding task sequences, the tasks The sequence includes one or more tasks, and the device may specifically include the following modules:

The waiting time calculation module 301 is configured to separately calculate a waiting time required to execute each of the tasks in each task sequence for a task sequence of each function module;

The target task determining module 302 is configured to determine that the task with the shortest waiting time is the target task;

An execution module 303, configured to execute the target task;

The calling module 304 is configured to invoke the waiting time calculation module after deleting the target task from the task sequence.

The invention divides the production line equipment into a plurality of independent functional modules, and analyzes tasks to be performed in the task sequence of each module. For each functional module, the task with the shortest waiting time is always executed first. This ensures that the total waiting time of each functional module of the production line equipment is as small as possible during the scheduling process, thereby improving the scheduling efficiency and increasing the production capacity of the production line equipment.

In the present invention, the device may further include:

a task adding module, configured to add a new task to the task sequence after deleting the target task from the task sequence;

The calling module is configured to invoke the waiting time calculation module after the task adding module deletes the target task from the task sequence.

In the present invention, the task adding module may include:

The new task gets a sub-module for obtaining a new task;

a determining sub-module, configured to determine whether the number of currently existing tasks in the task sequence reaches a corresponding preset number;

Adding a sub-module, if the number of currently existing tasks in the task sequence does not reach a preset number, adding the new task to the task sequence;

The stopping submodule is configured to stop adding the new task in the task sequence if the number of currently existing tasks in the task sequence reaches a preset number.

In the present invention, the function module has a corresponding state, and the state includes an idle state, a busy state, and an unavailable state.

In this case, the above added submodule may include:

Adding a unit, if the function module is in an idle state, adding the new task to the task sequence;

And stopping the unit, if the function module is in a busy state or an unavailable state, stopping adding the new task in the task sequence.

In the present invention, the waiting time can be determined by the following module:

a first time acquiring module, configured to acquire a time when the function module enters an idle state as a first time;

a second time acquiring module, configured to acquire a time required for completing the adjustment action required for each task as a second time;

a third time acquiring module, configured to acquire a time required to complete the predecessor of each task as a third time;

And a totaling module, configured to total the first time, the second time, and the third time as the current waiting time.

In the present invention, the corresponding preset numbers of the task sequences of the respective functional modules are the same.

In the present invention, the functional module includes an atmospheric manipulator, and the tasks of the atmospheric manipulator include:

The silicon wafer is taken out from the crystal box and sent to the positioning calibration device. The silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette.

In the present invention, the functional module includes a locking container, and the tasks of the locking container include:

Inflate to atmosphere, pump to vacuum, wafer transfer or incoming.

In the present invention, the functional module includes a vacuum robot, and the tasks of the vacuum robot include:

Passing the silicon wafer in the locked container into the process chamber of the first process, transferring the silicon wafer in the process chamber of the first process to the process chamber of the second process, and in the process chamber of the second process The wafer is introduced into the lock container.

In the present invention, the functional module includes a process chamber, and the tasks of the process chamber include:

Open the chamber valve, perform the wafer process, and close the chamber valve.

For the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the description of the method embodiment.

The various embodiments in the present specification are described in a progressive manner, and each embodiment focuses on differences from other embodiments, and the same similar parts between the various embodiments can be referred to each other.

Those skilled in the art will appreciate that embodiments of the invention may be provided as a method, apparatus, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment, or a combination of software and hardware. Moreover, the invention can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) including computer usable program code.

The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, terminal devices (systems), and computer program products according to the present invention. It will be understood that each flow and/or block of the flowchart illustrations and/or FIG. These computer program instructions can be provided to a processor of a general purpose computer, a special purpose computer, an embedded processor or other programmable data processing terminal device to produce a machine The instructions executed by the processor of the computer or other programmable data processing terminal device generate means for implementing the functions specified in one or more blocks of the flow or in a flow or block of the flowchart.

The computer program instructions can also be stored in a computer readable memory that can direct a computer or other programmable data processing terminal device to operate in a particular manner, such that the instructions stored in the computer readable memory produce an article of manufacture comprising the instruction device. The instruction device implements the functions specified in one or more blocks of the flowchart or in a flow or block of the flowchart.

These computer program instructions can also be loaded onto a computer or other programmable data processing terminal device such that a series of operational steps are performed on the computer or other programmable terminal device to produce computer-implemented processing, such that the computer or other programmable terminal device The instructions executed above provide steps for implementing the functions specified in one or more blocks of the flowchart or in a block or blocks of the flowchart.

Although the preferred embodiment of the invention has been described, it will be apparent to those skilled in the < Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and the modifications and

Finally, it should also be noted that in this context, relational terms such as first and second are used merely to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply these entities. There is any such actual relationship or order between operations. Furthermore, the terms "comprises" or "comprising" or "comprising" or any other variations are intended to encompass a non-exclusive inclusion, such that a process, method, article, or terminal device that includes a plurality of elements includes not only those elements but also Other elements that are included, or include elements inherent to such a process, method, article, or terminal device. An element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article, or terminal device that comprises the element, without further limitation.

Scheduling method for a production line device and a production line device provided by the present invention The scheduling device is described in detail, and the principles and implementation manners of the present invention are described in the following. The description of the above embodiments is only used to help understand the method and core idea of the present invention. The present invention is not limited by the scope of the present invention, and the details of the present invention are not limited by the scope of the present invention.

Claims (20)

A scheduling method for a production line device, characterized in that the production line device comprises one or more functional modules, the functional module has a corresponding task sequence, and the task sequence includes one or more tasks, the method include: Calculating the waiting time required to execute each of the tasks in each task sequence for each task sequence of the function module; Determine the task with the shortest waiting time as the target task; Performing the target task; After deleting the target task from the task sequence, returning the task sequence for each functional module, respectively calculating the waiting time required to execute each of the tasks in each task sequence. The method for scheduling a production line device according to claim 1, wherein after the step of deleting the target task from the task sequence, the method further comprises: Add a new task to the task sequence. The method for scheduling a production line device according to claim 2, wherein the step of adding a new task to the task sequence comprises: Obtain new tasks; Determining whether the number of currently existing tasks in the task sequence reaches a corresponding preset number; If not, adding the new task to the task sequence; If so, the addition of the new task in the task sequence is stopped. The method for scheduling a production line device according to claim 2, wherein the function module has a corresponding state, and the state includes: an idle state, a busy state, and an unavailable state; The step of adding the new task in the task sequence includes: Adding the new task to the task sequence if the function module is in an idle state; If the function module is in a busy state or an unavailable state, then stopping adding the new task in the task sequence. The scheduling method of a production line device according to claim 4, wherein the waiting time is determined by: Obtaining that the function module enters an idle state for a first time; Obtaining the time required to complete the adjustment actions required for each of the tasks is the second time; Obtaining the time required to complete the predecessor tasks of the respective tasks is the third time; The first time, the second time, and the third time are totaled as the current waiting time. The scheduling method of the production line device according to claim 3, wherein the corresponding preset number of the task sequences of the respective functional modules is the same. The method according to claim 1, wherein the functional module comprises an atmospheric manipulator, and the tasks of the atmospheric manipulator include: The silicon wafer is taken out from the crystal box and sent to the positioning calibration device. The silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette. The method for scheduling a production line device according to claim 1, wherein the function module comprises a lock container, and the task of the lock container comprises: Inflate to atmosphere, pump to vacuum, wafer transfer or incoming. The method for scheduling a production line device according to claim 1, wherein the function module comprises a vacuum manipulator, and the tasks of the vacuum manipulator include: Passing the silicon wafer in the locked container into the process chamber of the first process, and the process chamber of the first process The silicon wafer is introduced into the process chamber of the second process, and the silicon wafer in the process chamber of the second process is introduced into the lock container. The method for scheduling a production line device according to claim 1, wherein the functional module comprises a process chamber, and the tasks of the process chamber include: Open the chamber valve, perform the wafer process, and close the chamber valve. A scheduling device for a production line device, characterized in that the production line device comprises one or more functional modules, the functional module having a corresponding task sequence, the task sequence comprising one or more tasks, the device include: a waiting time calculation module, configured to separately calculate a waiting time required to execute each of the tasks in each task sequence for a task sequence of each function module; a target task determining module, configured to determine that the task with the shortest waiting time is the target task; An execution module, configured to execute the target task; The calling module is configured to invoke the waiting time calculation module after deleting the target task from the task sequence. The scheduling device of the production line device according to claim 11, further comprising: a task adding module, configured to add a new task to the task sequence after deleting the target task from the task sequence; The calling module is configured to invoke the waiting time calculation module after the task adding module deletes the target task from the task sequence. The scheduling device of the production line device according to claim 12, wherein the task adding module comprises: The new task gets a sub-module for obtaining a new task; a determining sub-module, configured to determine whether the number of currently existing tasks in the task sequence reaches a corresponding preset number; Adding a sub-module, if the number of currently existing tasks in the task sequence does not reach a preset number, adding the new task to the task sequence; The stopping submodule is configured to stop adding the new task in the task sequence if the number of currently existing tasks in the task sequence reaches a preset number. The scheduling device of the production line device according to claim 12, wherein the function module has a corresponding state, and the state includes: an idle state, a busy state, and an unavailable state; The task adding module includes: Adding a unit, if the function module is in an idle state, adding the new task to the task sequence; And stopping the unit, if the function module is in a busy state or an unavailable state, stopping adding the new task in the task sequence. A scheduling apparatus for a production line apparatus according to claim 14, wherein said waiting time is determined by the following module: a first time acquiring module, configured to acquire a time when the function module enters an idle state as a first time; a second time acquiring module, configured to acquire a time required for completing the adjustment action required for each task as a second time; a third time acquiring module, configured to acquire a time required to complete a predecessor task of each task as a third time; And a totaling module, configured to total the first time, the second time, and the third time as the current waiting time. The scheduling device of the production line device according to claim 13, wherein the corresponding preset number of the task sequences of the respective functional modules is the same. The scheduling device of the production line apparatus according to claim 11, wherein the function module comprises an atmospheric manipulator, and the tasks of the atmospheric manipulator include: The silicon wafer is taken out from the crystal box and sent to the positioning calibration device. The silicon wafer that has been calibrated by the positioning calibration device is introduced into the locking container, and the silicon wafer is taken out from the locking container and returned to the crystal cassette. The scheduling device of the production line device according to claim 11, wherein the function module comprises a locking container, and the task of the locking container comprises: Inflate to atmosphere, pump to vacuum, wafer transfer or incoming. The scheduling device of the production line apparatus according to claim 11, wherein the function module comprises a vacuum manipulator, and the tasks of the vacuum manipulator include: Passing the silicon wafer in the locked container into the process chamber of the first process, transferring the silicon wafer in the process chamber of the first process to the process chamber of the second process, and in the process chamber of the second process The wafer is introduced into the lock container. The scheduling device of the production line apparatus according to claim 11, wherein the function module comprises a process chamber, and the tasks of the process chamber include: Open the chamber valve, perform the wafer process, and close the chamber valve.

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