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WO2017222313A1 - Capteur de type capacitif et son procédé de fabrication - Google Patents

Capteur de type capacitif et son procédé de fabrication Download PDF

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Publication number
WO2017222313A1
WO2017222313A1 PCT/KR2017/006556 KR2017006556W WO2017222313A1 WO 2017222313 A1 WO2017222313 A1 WO 2017222313A1 KR 2017006556 W KR2017006556 W KR 2017006556W WO 2017222313 A1 WO2017222313 A1 WO 2017222313A1
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WO
WIPO (PCT)
Prior art keywords
capacitance
carbon
type sensor
electrode
film
Prior art date
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Ceased
Application number
PCT/KR2017/006556
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English (en)
Korean (ko)
Inventor
장준연
최용식
나대석
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Korea Institute of Science and Technology KIST
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Korea Institute of Science and Technology KIST
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Priority claimed from KR1020170078699A external-priority patent/KR101922500B1/ko
Application filed by Korea Institute of Science and Technology KIST filed Critical Korea Institute of Science and Technology KIST
Publication of WO2017222313A1 publication Critical patent/WO2017222313A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/02—Electrets, i.e. having a permanently-polarised dielectric
    • H01G7/025—Electrets, i.e. having a permanently-polarised dielectric having an inorganic dielectric
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/08—Cooling; Ventilating
    • H01F27/10—Liquid cooling
    • H01F27/12—Oil cooling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/04—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture having a dielectric selected for the variation of its permittivity with applied temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/002—Details
    • H01G4/005—Electrodes
    • H01G4/008—Selection of materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)

Definitions

  • the present invention relates to a capacitance-type sensor and a method of manufacturing the same. More specifically, the present invention relates to a capacitance-type sensor capable of measuring a change in electrical characteristics or electrical characteristics of a measurement target using a combination of a carbon electrode film containing a carbon material and a substrate, and a method of manufacturing the same.
  • Insulating oil is used to maintain the insulation performance of high voltage equipment such as transformers, breakers and capacitors.
  • lubricating oil such as vehicle engine oil is used to reduce frictional force generated on the friction surface of the machine and disperse frictional heat.
  • Mineral oils such as insulating oil and lubricating oil, may gradually deteriorate during use, and when deterioration proceeds, sludge may be generated and insulation performance may be degraded. Degradation of insulating oil accounts for about 5% of the causes of transformer accidents and damages.A representative factor that degrades the characteristics of transformer insulating oil is: (1) When water in the air flows into the intake section, (2) (3) In case of using poor insulating oil, (4) Grounding, short circuit, constant overvoltage.
  • the change in dielectric constants of insulating oil and lubricating oil is due to various physical and chemical changes such as insulating oil and lubricating oil, and has an advantage of easily obtaining change information of insulating oil.
  • measuring devices using dielectric constants include bulky cylinders or parallel plate structures, which have problems in mass production and miniaturization.
  • the present invention has been made to solve the above problems of the prior art, a capacitance-type sensor and a method of manufacturing the same, which can measure a change in electrical characteristics or electrical characteristics of transformer insulation oil, vehicle engine oil, etc. with high sensitivity. To provide that purpose.
  • an object of the present invention is to provide a capacitance-type sensor excellent in durability and stability and a method of manufacturing the same, since the carbon electrode film does not directly contact the insulating oil.
  • an object of the present invention is to provide a capacitance-type sensor and a method of manufacturing the same, which have a fast response speed, excellent sensitivity and high reliability, and can be miniaturized.
  • a capacitance-type sensor the substrate; A carbon electrode film formed on the substrate and including a carbon material; An insulating film formed on the carbon electrode film; At least one electrode formed on at least a portion of the insulating film; And a sensing film covering at least a portion of the electrode and formed on the insulating film.
  • the carbon electrode layer may include at least one of graphene, carbon nanotubes, carbon fibers, artificial graphite, carbon black, and activated carbon. It may include.
  • the substrate may comprise silicon, glass or alumina.
  • the silicon may be silicon doped with an N-type or P-type.
  • a conductive layer may be further formed between the substrate and the carbon electrode film.
  • the capacitance value of the carbon electrode film may be a total of capacitances generated between each of the plurality of carbon particles included in the carbon electrode film.
  • the contact member of the substrate and the carbon electrode layer may function as a capacitor.
  • the capacitance or permittivity of the substrate and the carbon electrode film may change.
  • the substrate may prevent the measurement material from directly contacting the carbon electrode film.
  • the electrodes are chromium (Cr), gold (Au), silver (Ag), aluminum (Al), platinum (Pt), molybdenum (Mo), copper (Cu), iron (Fe), tungsten (W), palladium ( Pd) may include at least one of cesium (Cs), lithium (Li), calcium (Ca), magnesium-aluminum (Mg-Al).
  • the electrode may be an interdigit electrode including a first electrode and a second electrode disposed to face each other.
  • the carbon electrode film may have a thickness of about 10 nm to about 5 ⁇ m.
  • the insulating layer may have a thickness of about 100 nm to about 500 nm.
  • the initial capacitance value of the capacitance-type sensor may be greater than at least 400 pF.
  • the capacitance-type sensor can determine the degree of contamination by measuring the capacitance value of the transformer insulating oil or vehicle engine oil.
  • a method of manufacturing a capacitance-type sensor (a) forming a carbon electrode film containing a carbon material on a substrate; (b) forming an insulating film on the carbon electrode film; (c) forming at least one electrode on at least a portion of the insulating film; And (d) forming a sensing film on the insulating film to cover at least a portion of the electrode.
  • the carbon electrode layer may include at least one of graphene, carbon nanotubes, carbon fibers, artificial graphite, carbon black, and activated carbon. It may include.
  • the carbon electrode film can be formed using a chemical vapor deposition method or an epitaxial growth method.
  • the present invention can provide a capacitance-type sensor excellent in durability and stability and a manufacturing method thereof since the carbon electrode film does not directly contact the insulating oil.
  • the present invention can provide a capacitance-type sensor and a method for manufacturing the same, which have a fast response speed, excellent sensitivity and high reliability, and can be miniaturized.
  • FIG. 1 is a schematic cross-sectional view showing the overall configuration of a capacitance-type sensor according to an embodiment of the present invention.
  • FIG. 2 is a diagram illustrating an electrode of a capacitance-type sensor according to an exemplary embodiment of the present invention.
  • 3 to 7 are views illustrating a process of manufacturing a capacitance-type sensor according to an embodiment of the present invention.
  • FIG. 8 is a view for explaining the principle of changing the electrical characteristics of the carbon electrode film according to an embodiment of the present invention.
  • FIG. 9 is a graph illustrating a change in capacitance value according to a distance of a vehicle engine oil according to an embodiment of the present invention.
  • FIG. 10 is a graph illustrating a change in a total acid number according to a distance of a vehicle engine oil according to an exemplary embodiment of the present invention.
  • the capacitance-type sensor (capacitive capacitance-type sensor, capacitive sensor; 10) will be described under the assumption that measuring electrical characteristics or changes in electrical characteristics of transformer insulating oil, vehicle engine oil, and the like.
  • the capacitance-type sensor 10 of the present invention within the scope of the purpose of measuring the electrical characteristics of transformer oil, vehicle engine oil, as well as other mineral oil, there is no limitation in the application field. Reveal it.
  • FIG. 1 is a schematic cross-sectional view showing the overall configuration of a capacitance-type sensor 10 according to an embodiment of the present invention.
  • the capacitance-type sensor 10 may include a substrate 100, a carbon electrode layer 200, an insulating layer 300, at least one electrode 400, and a sensing layer 500.
  • Substrate 100 may comprise glass or silicon. According to an embodiment, the substrate 100 may be implemented as an alumina substrate including alumina. When the substrate 100 is made of silicon, the silicon may be silicon doped with an N-type or P-type to have conductivity. In the case of N-type silicon, in order to make the best use of electrons contained in the substrate and in the case of P-type silicon, holes need to be highly doped.
  • a conductive layer may be further formed on the substrate 100 so as to have high conductivity.
  • the conductive film may be a conductor made of a metal material, and may conduct conductivity between the substrate 100 and the carbon electrode film 200.
  • the carbon electrode film 200 may be formed on the substrate 100.
  • the carbon electrode film 200 may include a carbon material.
  • the carbon electrode layer 200 may include a carbon material, such as graphene, carbon nanotubes, carbon fibers, artificial graphite, and carbon black. Black), and may include at least one of activated carbon.
  • graphene or carbon nanotubes are sp 2 carbon atoms in two dimensions It is a material having a thickness of one layer of atoms in a honeycomb-like arrangement by bonding, and is not only physically and chemically stable but also has a high sensitivity capacitance-type sensor 10 by using an edge structure of nanoribbons. There is an advantage to manufacture.
  • the carbon electrode film 200 since the sensitivity of the capacitance-type sensor 10 may vary according to the area of the carbon electrode film 200 formed on the substrate 100, the carbon electrode film 200 may be a part of the substrate 100. It may be formed only on the phase.
  • the carbon electrode film 200 may be implemented using chemical vapor deposition (CVD) or epitaxial growth.
  • CVD chemical vapor deposition
  • carbon materials in the carbon electrode film 200 may be regularly arranged, and a uniform film may be formed, so that the carbon electrode film 200 may have high capacitance.
  • the present invention is not limited thereto, and in order to form the carbon electrode film 200 including graphene, a mechanical peeling method, a chemical peeling method, a printing method, or the like may be used, and in order to form a carbon nanotube, Arc-Discharge, Laser Vaporization, Plasma Enhanced CVD, Thermal CVD, Vapor Phase Growth, etc. may be used.
  • the carbon electrode layer 200 including the carbon material may be in contact with the substrate 100 to improve electrical characteristics of the electrostatic capacitance-type sensor 10.
  • the electrical property may be Electric Capacity, Permittivity, or Dielectric Constant, also referred to as Capacitance.
  • the contact between the substrate 100 and the carbon electrode film 200 may function as a capacitor having a high initial capacitance, thereby improving electrical characteristics of the capacitance-type sensor 10.
  • the carbon electrode film 200 When the carbon electrode film 200 is formed by using chemical vapor deposition or epitaxial growth, the carbon electrode film 200 may be formed to a thickness of 10 nm to 5 ⁇ m. The thinner the thickness of the carbon electrode film 200 can improve the sensitivity of the sensor, it is possible to easily control the film thickness through the above method, there is an advantage that can be uniformly formed in a thin thickness.
  • the insulating film 300 may be formed on the carbon electrode film 200 including the carbon material.
  • the insulating layer 300 may include an inorganic insulating material, such as an oxide or nitride, or an organic insulating material.
  • Inorganic insulating material is Si 3 N 4, SiON, SiO 2, ZnO, AlN, MgF 2, In 2 O 3, CeO 2, and the like, La 2 O 3, thermal deposition (Thermal Evaporation), electron beam evaporation (E-Beam Evaporation, Sputtering, Thermal CVD, Plasma CVD, Light CVD, MO-CVD, Laser CVD, Low Pressure CVD (LPCVD), Ultra-high vacuum CVD (UHVCVD), Direct liquid injection CVD (DLICVD), AACVD (AACVD) Aerosol-assisted CVD), Microwave Plasma CVD (MPCVD), Plasma Enhanced CVD (PECVD), and Atomic Layer CVD (ALCVD).
  • Si 3 N 4 SiON, SiO 2, ZnO, Al
  • Organic insulating materials include PC (Poly Carbonate), PES (Polyether Sulfone), PET (Polyethylene Terephthalate), PI (Polyimide), Teflon, etc., spin coating, spray coating, electrostatic spray coating ( It can be formed using Electro Spray Coating), Electrospinning, Sol-Gel method, etc.
  • the thickness of the insulating film 300 when the insulating film 300 is thicker than 500 nm, the initial capacitance value of the capacitance-type sensor 10 may be lowered and the sensitivity may be reduced.
  • the insulating film 300 when the thickness of the insulating film 300 is less than 100 nm, the insulating film 300 does not sufficiently cover the carbon electrode film 200, and thus the electrode 400 formed on the insulating film 300 and the carbon electrode film 200 are connected. Thus, it can operate as a sensor that measures resistance, rather than a sensor that can measure permittivity using a dielectric. Therefore, the insulating film 300 is preferably formed to a thickness of 100nm to 500nm. However, the scope of the present invention is not limited by the thickness of the insulating film 300.
  • the present invention is characterized in that the carbon electrode film 200 containing a carbon material is interposed between the substrate 100 and the insulating film 300. That is, the carbon electrode film 200 is not disposed to be exposed to the outside of the capacitance-type sensor 10, but may be interposed between various layers constituting the capacitance-type sensor 10.
  • the carbon electrode film containing graphene, carbon nanotubes, or the like is disposed at the outermost portion of the capacitance-type sensor, defects such as peeling or cracking of the carbon electrode film are likely to occur. This defect can result in lower overall capacitance. Looking more specifically as follows.
  • each graphene platen cannot be regularly arranged by graphene powder, which adversely affects the increase in capacitance. Can be crazy
  • the carbon electrode film 200 including the carbon material is deposited on the substrate 100 by chemical vapor deposition or epitaxial growth, graphene, carbon nanotubes, etc. are regularly Can be arranged.
  • the deposition, epitaxial growth, and the like do not need to perform a sintering process, the problem that the formed carbon electrode film 200 is lost can be solved.
  • the carbon electrode film 200 is disposed between the substrate 100 and the insulating film 300, so that the sintering process can be omitted, and thus the carbon electrode The problem that the film 200 is lost can be solved.
  • the carbon electrode film 200 may be protected by the conductive substrate 100 without direct contact between the insulating oil and the carbon electrode film 200.
  • the carbon electrode layer 200 may include a carbon material having no impurities and having a uniform and regular arrangement, the capacitance-type sensor 10 of the present invention may form a high capacitance.
  • the capacitance-type sensor 10 of the present invention may form a high capacitance.
  • At least one electrode 400 may be formed on the insulating film 300.
  • the electrode 400 may be implemented to have a predetermined pattern.
  • the electrode 400 includes an electric conductor such as chromium (Cr), gold (Au), silver (Ag) aluminum (Al), platinum (Pt), molybdenum (Mo), iron (Fe), and copper (Cu). ), Tungsten (W), palladium (Pd), cesium (Cs), lithium (Li), calcium (Ca), and may include at least one or more of a metal material such as magnesium-aluminum (Mg-Al).
  • a metal material such as magnesium-aluminum (Mg-Al).
  • the electrode 400 may be implemented as a transparent electrode including carbon such as indium tin oxide (ITO), indium zinc oxide (IZO), graphene or carbon nanotubes.
  • the electrode 400 is thermal evaporation, e-beam evaporation, sputtering, thermal CVD, plasma CVD, light CVD, MO-CVD, laser CVD, low pressure CVD, LPH, UHVCVD (Ultra-high vacuum CVD), Direct liquid injection CVD (DLICVD), Aerosol-assisted CVD (AACVD), Microwave Plasma CVD (MPCVD), Plasma Enhanced CVD (PECVD), Atomic Layer CVD (ALCVD). It can form using the Sol-Gel method, the printing method, etc.
  • the electrode 400 may be formed to a thickness of 100nm to 300nm.
  • a power source having a frequency of 60 Hz to 100 kHz may be applied to the electrode 400, but the present invention is not limited to the range of the frequency of the power source applied to the electrode 400.
  • the sensing film 500 is formed on the insulating film 300 on which at least one electrode 400 is formed. That is, the sensing film 500 is formed on a portion of the insulating film 300 on which the electrode 400 is not formed and on at least one electrode 400.
  • the sensing layer 500 may be formed of an oxide or nitride, such as the insulating layer 300, and may be formed to have a thickness of about 100 nm to about 1000 nm.
  • the material to be measured such as insulating oil
  • the material to be measured may be in contact with the surface of the sensing film 500, and the state of the material to be measured may be determined by measuring a change in capacitance of the carbon electrode film 200.
  • the material to be measured such as insulating oil
  • the state of the material to be measured may be determined by measuring a change in capacitance of the contact between the substrate 100 and the carbon electrode film 200. It may be.
  • the capacitance-type sensor 10 of the present invention may be implemented in a stack type.
  • a stacked capacitance-type sensor may be formed by repeatedly stacking the substrate 100, the carbon electrode layer 200, the insulating layer 300, the electrode 400, and the sensing layer 500, and in another example, the substrate ( A stacked capacitance-type sensor may be formed by repeatedly stacking the carbon electrode film 200, the insulating film 300, the electrode 400, and the sensing film 500 on the 100.
  • a capacitance-type sensor having a larger size but improved sensitivity can be realized.
  • the capacitance-type sensor 10 may improve the sensitivity and accuracy of the sensor by increasing the initial capacitance value of the sensor using the carbon electrode film 200 containing the carbon material, and improves the state of the measurement target material. You can judge.
  • FIG. 2 is a diagram illustrating an electrode 400 of a capacitance-type sensor 10 according to an embodiment of the present invention.
  • At least one electrode 400 may include a first electrode 410 and a second electrode 420.
  • the first electrode 410 and the second electrode 420 may be implemented as a comb-shaped electrode (Interdigit Electrode).
  • the pattern of the first electrode 410 and the second electrode 420 implemented as a comb-shaped electrode may be described through the following embodiments.
  • the configuration and shape of the first electrode 410 and the second electrode 420 according to the present invention is not limited to the following embodiments, the first electrode 410 and the second electrode 420 are circular, It may be implemented as a comb-shaped electrode of a polygonal shape including a triangle, a square, and the like, and may be implemented as a straight, patterned electrode, etc., not comb-shaped, within the range of increasing the capacitance value.
  • the first electrode 410 extends from the first extension part 411 and the first extension part 411 in the first direction, for example, in the longitudinal direction (or the width direction) of the substrate 100, and the second electrode, for example, the substrate. It includes a plurality of first branches (413) protruding in the width direction (or the longitudinal direction) of the (100).
  • the second direction and the first direction may form a right angle with each other or may form a predetermined angle.
  • the first electrode 410 and the second electrode 420 may be implemented as a toothed comb-shaped electrode.
  • the second electrode 420 protrudes in a direction opposite to the second direction from the second extension part 421 and the second extension part 421 extending in the first direction or in a direction opposite to the first direction.
  • Branches 423 are included. Since the second direction is a direction toward the second electrode 420, the first branch parts 413 and the second branch parts 423 may be alternately disposed.
  • the width of the first electrode 410 and the width of the second electrode 420, in particular, the width of the first branch portions 413 and the width of the second branch portions 423 are 100 ⁇ m or less.
  • the distance between the 410 and the second electrode 420, in particular, the first branch portions 413 and the second branch portions 423 may be 100 ⁇ m or less. It is not limited to.
  • the sensitivity of the capacitance-type sensor 10 can be greatly improved.
  • 3 to 7 are views illustrating a process of manufacturing a capacitance-type sensor according to an embodiment of the present invention.
  • a substrate 100 is prepared to fabricate a capacitance-type sensor 10.
  • the silicon may be silicon doped with N-type or P-type.
  • N-type silicon electrons included in the substrate may be used.
  • a conductive film (not shown) may be further formed on the substrate 100.
  • the carbon electrode film 200 including the carbon material may be formed on the substrate 100 to have a thickness of 10 nm to 5 ⁇ m using chemical vapor deposition (CVD) or epitaxial growth. have.
  • the capacitance-type sensor 10 including the carbon electrode film 200 including the carbon material manufactured through the above process may have a high initial capacitance value, thereby ensuring the sensitivity and stability durability of the sensor. .
  • an insulating film 300 may be formed on the carbon electrode film 200.
  • the insulating film 300 is preferably formed to a thickness of 100nm to 500nm.
  • the insulating film 300 may be formed of an inorganic insulating material, such as an oxide or a nitride, or an organic insulating material using thermal vapor deposition, electron beam deposition, sputtering, which is a physical vapor deposition method, or by using a CVD method. Has been described above.
  • At least one electrode 400 (410, 420) is formed on the insulating layer 300.
  • a lithography process including a photoresist coating, exposure, and etching process may be performed.
  • a predetermined shape such as comb teeth
  • At least one electrode 400 having a pattern may be formed.
  • the sensing layer 500 may be formed on the insulating layer 300 on which at least one electrode 400 is formed.
  • the insulating film 500 which may be formed of nitride or oxide, may be formed to have a thickness of 100 nm to 1000 nm through PVD or CVD including evaporation deposition, sputtering, and the like.
  • the sensing layer 500 may be formed only on a portion of the insulating layer 300, and the portion may include at least a pattern of the first electrode 410, that is, the first extension part 411 and the first branch parts 413.
  • the pattern of the second electrode 420 that is, the portion in which the second extension part 421 and the second branch parts 423 are formed, is included.
  • FIG. 8 is a view for explaining the principle of changing the electrical characteristics of the carbon electrode film 200 according to an embodiment of the present invention.
  • the carbon electrode film 200 may include a carbon material in the form of a plurality of particles.
  • the carbon material is assumed to be graphene, and only two graphene particles 201 and 202 neighboring each other are shown.
  • the first graphene particles 201 and the second graphene particles 202 have a minute electric capacitance.
  • the first graphene particles 201 may be adjacent to a plurality of graphene particles other than the second graphene particles 202, and the electrical capacitance that may be obtained based on the first graphene particles 201 may be the first.
  • the capacitance of each of the plurality of graphene particles included in the carbon electrode film 200 may be considered, and the capacitance of the carbon electrode film 200 may be similar to that of each of the graphene particles. It can be the sum of all the capacities.
  • the carbon electrode film 200 includes a large number of carbon particles, a capacitance-type sensor 10 having a high initial capacitance value may be manufactured. That is, when the carbon electrode film 200 including the carbon material is not used, the initial capacitance value of only the electrode 400 itself is several to several tens of microseconds, and the sensitivity of the sensor is very low due to the low initial capacitance value. On the other hand, in the case of using the carbon electrode film 200 containing the carbon material, the initial capacitance value is a few hundred pF ⁇ several nF or more can improve the sensitivity of the sensor.
  • a measurement initial capacitance value of 400 pF or more is required.
  • the contact of the carbon electrode film 200 function as a capacitor having a high initial capacitance, thereby improving the sensitivity of the sensor.
  • the carbon electrode film 200 is formed on the conductive substrate 100 by chemical vapor deposition or epitaxial growth, so that the carbon material has a uniform and regular arrangement, and the carbon electrode film 200 is formed by the substrate 100. This protection can reduce the likelihood of occurrence of combined function, so that the initial measurement capacitance value can be formed to be higher than 400 pF.
  • the capacitance-type sensor 10 was manufactured according to the above-described manufacturing process.
  • the substrate 100 was an N-type silicon substrate, and the graphene electrode film 200 (carbon electrode film 200) was formed on the substrate 100 by chemical vapor deposition.
  • an SiO 2 insulating film 300 was formed on the graphene electrode film 200 to have a thickness of 2,000 ⁇ (200 nm).
  • the width of the first and second electrodes 410 and 420 on the insulating film 300 is 15 ⁇ m, and the distance between the first branch portions 413 and the second branch portions 423 is 15 ⁇ m.
  • An aluminum (Al) electrode 400 having a thickness of (300 nm) was formed.
  • a SiO 2 sensing film 500 was formed on the electrode 400.
  • the capacitance-type sensor 10 manufactured by the above process shows an initial capacitance value of 400 pF or more at room temperature and in the air, thereby reducing the influence of floating capacitance and measuring the degree of deterioration of insulating oil, lubricant, and the like. It was confirmed that the initial capacitance value. With this, the change in capacity value was measured using an engine oil sample according to the vehicle mileage, and the performance of the sensor was evaluated by comparing with the total acid number (TAN).
  • TAN total acid number
  • FIG. 9 is a graph illustrating a change in capacitance value according to a driving distance of vehicle engine oil according to an embodiment of the present invention
  • FIG. 10 is a view illustrating a vehicle engine oil according to an embodiment of the present invention. It is a graph showing a change in total acid number according to distance.
  • the computer value can be used as a standard to indicate the degree of contamination of transformer oil as well as vehicle engine oil.
  • a power of 1 kHz was applied to an engine oil of 80 ° C., and a change in electric capacity of the engine oil was measured.
  • the capacity values measured for each driving distance of 0km, 2000km, 4000km, 6000km, and 8000km were 511pF, 516pF, 520pF, 522pF, 524pF and the total change was about 13pF.
  • the capacity values measured for each driving distance of 0km, 2000km, 4000km, 6000km, and 8000km were 511pF, 516pF, 520pF, 522pF, 524pF and the total change was about 13pF.
  • the computer values (mg KOH / g) measured for each driving distance of 0 km, 2000 km, 4000 km, 6000 km, and 8000 km were 1.20, 2.25, 2.53, 2.85, and 3.34. The change was found to be about 2.14.
  • the capacitance-type sensor 10 of the present invention performs the measurement with an initial capacitance value of 400pF or more, and confirms that the degree of contamination of insulating oil, lubricating oil, etc. can be measured by replacing the change of the computer value as the capacitance value change.
  • an initial capacitance value 400pF or more
  • the capacitance-type sensor 10 has a high initial capacitance value, and has an advantage of having excellent sensitivity and high reliability. In addition, there is an advantage that the response speed is fast, can be miniaturized, and mass production at low cost.

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

La présente invention concerne un capteur de type capacitif et son procédé de fabrication. Un capteur de type capacitif (10) selon un mode de réalisation de la présente invention comprend : un substrat (100) ; un film d'électrode en carbone (200) formé sur le substrat (100) et comprenant un matériau carboné ; un film isolant (300) formé sur le film d'électrode en carbone (200) ; au moins une électrode (400) formée sur au moins une partie du film isolant (300) ; et un film de détection (500) recouvrant au moins une partie de l'électrode (400) et formé sur le film isolant (300).
PCT/KR2017/006556 2016-06-22 2017-06-22 Capteur de type capacitif et son procédé de fabrication Ceased WO2017222313A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR10-2016-0077843 2016-06-22
KR20160077843 2016-06-22
KR1020170078699A KR101922500B1 (ko) 2016-06-22 2017-06-21 커패시턴스-타입 센서 및 이의 제조 방법
KR10-2017-0078699 2017-06-21

Publications (1)

Publication Number Publication Date
WO2017222313A1 true WO2017222313A1 (fr) 2017-12-28

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WO (1) WO2017222313A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109799435A (zh) * 2019-03-05 2019-05-24 重庆大学 一种组合石墨烯膜片与微光纤干涉腔的局部放电传感器及基于此的检测方法
FR3116474A1 (fr) * 2020-11-20 2022-05-27 Faurecia Interieur Industrie Elément de garnissage comprenant un élément de chauffage en un matériau carbone
FR3116473A1 (fr) * 2020-11-20 2022-05-27 Faurecia Interieur Industrie Elément de garnissage comprenant un élément de chauffage et un capteur de proximité

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US20090091337A1 (en) * 2007-10-04 2009-04-09 Robinson Joshua A Carbon film composite, method of manufacturing a carbon film composite and sensor made therewith
JP5120453B2 (ja) * 2008-07-09 2013-01-16 日本電気株式会社 炭素電極、電気化学センサ、および炭素電極の製造方法
KR101359735B1 (ko) * 2011-01-21 2014-02-11 성균관대학교산학협력단 연장된 게이트 전극이 형성된 전계효과 트랜지스터형 신호변환기를 이용한 투명성 이온 감지 센서칩 및 이의 제조방법
CN104697661A (zh) * 2015-01-04 2015-06-10 东南大学 基于氧化石墨烯的三维集成电容式温湿度传感器及其制法
KR20160027873A (ko) * 2014-08-29 2016-03-10 고려대학교 산학협력단 용량형 센서 및 이의 제조 방법

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Publication number Priority date Publication date Assignee Title
US20090091337A1 (en) * 2007-10-04 2009-04-09 Robinson Joshua A Carbon film composite, method of manufacturing a carbon film composite and sensor made therewith
JP5120453B2 (ja) * 2008-07-09 2013-01-16 日本電気株式会社 炭素電極、電気化学センサ、および炭素電極の製造方法
KR101359735B1 (ko) * 2011-01-21 2014-02-11 성균관대학교산학협력단 연장된 게이트 전극이 형성된 전계효과 트랜지스터형 신호변환기를 이용한 투명성 이온 감지 센서칩 및 이의 제조방법
KR20160027873A (ko) * 2014-08-29 2016-03-10 고려대학교 산학협력단 용량형 센서 및 이의 제조 방법
CN104697661A (zh) * 2015-01-04 2015-06-10 东南大学 基于氧化石墨烯的三维集成电容式温湿度传感器及其制法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109799435A (zh) * 2019-03-05 2019-05-24 重庆大学 一种组合石墨烯膜片与微光纤干涉腔的局部放电传感器及基于此的检测方法
CN109799435B (zh) * 2019-03-05 2021-12-28 重庆大学 一种组合石墨烯膜片与微光纤干涉腔的局部放电传感器及基于此的检测方法
FR3116474A1 (fr) * 2020-11-20 2022-05-27 Faurecia Interieur Industrie Elément de garnissage comprenant un élément de chauffage en un matériau carbone
FR3116473A1 (fr) * 2020-11-20 2022-05-27 Faurecia Interieur Industrie Elément de garnissage comprenant un élément de chauffage et un capteur de proximité

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