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WO2017103114A3 - Herstellung eines quarzglaskörpers in einem hängenden sintertiegel - Google Patents

Herstellung eines quarzglaskörpers in einem hängenden sintertiegel Download PDF

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Publication number
WO2017103114A3
WO2017103114A3 PCT/EP2016/081437 EP2016081437W WO2017103114A3 WO 2017103114 A3 WO2017103114 A3 WO 2017103114A3 EP 2016081437 W EP2016081437 W EP 2016081437W WO 2017103114 A3 WO2017103114 A3 WO 2017103114A3
Authority
WO
WIPO (PCT)
Prior art keywords
glass article
silica glass
production
silica
sintered crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2016/081437
Other languages
English (en)
French (fr)
Other versions
WO2017103114A2 (de
Inventor
Matthias OTTER
Walter Lehmann
Michael HÜNERMANN
Nils Christian NIELSEN
Nigel Robert WHIPPEY
Boris Gromann
Abdoul-Gafar KPEBANE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas GmbH and Co KG filed Critical Heraeus Quarzglas GmbH and Co KG
Priority to CN201680082182.9A priority Critical patent/CN108698895A/zh
Priority to EP16822145.5A priority patent/EP3390306A2/de
Priority to KR1020187020269A priority patent/KR20180095621A/ko
Priority to US16/062,382 priority patent/US20190092676A1/en
Priority to JP2018531077A priority patent/JP6927643B2/ja
Publication of WO2017103114A2 publication Critical patent/WO2017103114A2/de
Publication of WO2017103114A3 publication Critical patent/WO2017103114A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/06—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction
    • C03B19/066—Other methods of shaping glass by sintering, e.g. by cold isostatic pressing of powders and subsequent sintering, by hot pressing of powders, by sintering slurries or dispersions not undergoing a liquid phase reaction for the production of quartz or fused silica articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/04—Forming tubes or rods by drawing from stationary or rotating tools or from forming nozzles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1005—Forming solid beads
    • C03B19/106—Forming solid beads by chemical vapour deposition; by liquid phase reaction
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
    • C03B37/01211—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments by inserting one or more rods or tubes into a tube
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/06—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in pot furnaces
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C03C1/02—Pretreated ingredients
    • C03C1/022—Purification of silica sand or other minerals
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C03B2201/03—Impurity concentration specified
    • C03B2201/04—Hydroxyl ion (OH)
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
    • C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/08—Doped silica-based glasses containing boron or halide
    • C03C2201/11—Doped silica-based glasses containing boron or halide containing chlorine
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/20—Doped silica-based glasses containing non-metals other than boron or halide
    • C03C2201/26—Doped silica-based glasses containing non-metals other than boron or halide containing carbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2201/00—Glass compositions
    • C03C2201/06—Doped silica-based glasses
    • C03C2201/30—Doped silica-based glasses containing metals
    • C03C2201/32—Doped silica-based glasses containing metals containing aluminium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2203/00—Production processes
    • C03C2203/10—Melting processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2204/00—Glasses, glazes or enamels with special properties
    • C03C2204/04—Opaque glass, glaze or enamel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/412—Index profiling of optical fibres
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zum Herstellen eines Quarzglaskörpers beinhaltend die Verfahrensschritte i.) Bereitstellen eines Siliziumdioxidgranulats, ii.) Bilden einer Glasschmelze aus dem Siliziumdioxidgranulat in einem Ofen und iii.) Bilden eines Quarzglaskörpers aus zumindest einem Teil der Glasschmelze, wobei der Ofen einen hängenden Sintertiegel beinhaltet. Die Erfindung betrifft weiterhin einen Quarzglaskörper, der durch dieses Verfahren erhältlich ist. Weiterhin betrifft die Erfindung einen Lichtleiter, ein Leuchtmittel und einen Formkörper, die jeweils durch Weiterverarbeiten des Quarzglaskörpers erhältlich sind.
PCT/EP2016/081437 2015-12-18 2016-12-16 Herstellung eines quarzglaskörpers in einem hängenden sintertiegel Ceased WO2017103114A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201680082182.9A CN108698895A (zh) 2015-12-18 2016-12-16 在悬挂式烧结坩埚中制备石英玻璃体
EP16822145.5A EP3390306A2 (de) 2015-12-18 2016-12-16 Herstellung eines quarzglaskörpers in einem hängenden sintertiegel
KR1020187020269A KR20180095621A (ko) 2015-12-18 2016-12-16 행잉 소결 도가니에서 실리카 유리 제품의 제조
US16/062,382 US20190092676A1 (en) 2015-12-18 2016-12-16 Preparation of a quartz glass body in a hanging sinter crucible
JP2018531077A JP6927643B2 (ja) 2015-12-18 2016-12-16 吊り下げ式焼結坩堝内での石英ガラス体の調製

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15201122.7 2015-12-18
EP15201122 2015-12-18

Publications (2)

Publication Number Publication Date
WO2017103114A2 WO2017103114A2 (de) 2017-06-22
WO2017103114A3 true WO2017103114A3 (de) 2017-11-23

Family

ID=54850390

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/081437 Ceased WO2017103114A2 (de) 2015-12-18 2016-12-16 Herstellung eines quarzglaskörpers in einem hängenden sintertiegel

Country Status (7)

Country Link
US (1) US20190092676A1 (de)
EP (1) EP3390306A2 (de)
JP (1) JP6927643B2 (de)
KR (1) KR20180095621A (de)
CN (1) CN108698895A (de)
TW (1) TWI794148B (de)
WO (1) WO2017103114A2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017103131A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Verringern des erdalkalimetallgehalts von siliziumdioxidgranulat durch behandlung von kohlenstoffdotiertem siliziumdioxidgranulat bei hoher temperatur
JP6940235B2 (ja) 2015-12-18 2021-09-22 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 高融点金属の溶融坩堝内での石英ガラス体の調製
KR20180095619A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 실리카 유리 제조 동안 규소 함량의 증가
CN108698883A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 石英玻璃制备中的二氧化硅的喷雾造粒
CN108698894A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在多腔式烘箱中制备石英玻璃体
KR20180094087A (ko) 2015-12-18 2018-08-22 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 실리카 과립으로부터 실리카 유리 제품의 제조
WO2017103153A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt
TWI733723B (zh) 2015-12-18 2021-07-21 德商何瑞斯廓格拉斯公司 不透明石英玻璃體的製備
EP3390303B1 (de) 2015-12-18 2024-02-07 Heraeus Quarzglas GmbH & Co. KG Herstellung von quarzglaskörpern mit taupunktkontrolle im schmelzofen
CN109153593A (zh) 2015-12-18 2019-01-04 贺利氏石英玻璃有限两合公司 合成石英玻璃粉粒的制备
JP6719505B2 (ja) * 2018-06-21 2020-07-08 古河電気工業株式会社 光ファイバの製造方法及び光ファイバ母材の製造方法
CN110156301B (zh) * 2019-06-21 2023-10-20 连云港福东正佑照明电器有限公司 一种石英管生产用连熔装置及生产方法
CN113354263B (zh) * 2021-07-03 2022-08-26 神光光学集团有限公司 一种生产合成石英玻璃的方法及设备
JP7771721B2 (ja) * 2021-12-20 2025-11-18 株式会社島津製作所 カラムオーブン及びガスクロマトグラフ
CN115124225A (zh) * 2022-07-12 2022-09-30 上海强华实业股份有限公司 一种石英器件的处理方法

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4650511A (en) * 1984-06-04 1987-03-17 Shin-Etsu Chemical Co., Ltd. Method for the preparation of a dehydrated quartz glass material for light transmission
EP0711736A1 (de) * 1994-10-14 1996-05-15 Tosoh Corporation Hochreines transparentes Quarzglas und Verfahren zu seiner Herstellung
US6136736A (en) * 1993-06-01 2000-10-24 General Electric Company Doped silica glass
EP1088789A2 (de) * 1999-09-28 2001-04-04 Heraeus Quarzglas GmbH & Co. KG Poröse Granulate aus Siliciumdioxid, deren Herstellungsverfahren und deren Verwendung bei einem Verfahren zur Herstellung von Quarzglas
WO2001046077A1 (de) * 1999-12-22 2001-06-28 Heraeus Quarzglas Gmbh & Co. Kg Quarzglastiegel und verfahren für seine herstellung
US20040118155A1 (en) * 2002-12-20 2004-06-24 Brown John T Method of making ultra-dry, Cl-free and F-doped high purity fused silica
WO2005054139A1 (de) * 2003-12-08 2005-06-16 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung von laseraktivem quarzglas und verwendung desselben
DE102004038602B3 (de) * 2004-08-07 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben
US20060055300A1 (en) * 2004-09-10 2006-03-16 Alan Janos Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation
US20060183623A1 (en) * 2003-12-17 2006-08-17 Asahi Glass Company Limited Synthetic quartz glass for optical member and its production method
US20090208760A1 (en) * 2008-01-30 2009-08-20 Asahi Glass Company, Limited Energy-transmitting or ultraviolet light-transmitting optical fiber preform and production process thereof
DE102008033945A1 (de) * 2008-07-19 2010-01-21 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von mit Stickstoff dotiertem Quarzglas sowie zur Durchführung des Verfahrens geeignete Quarzglaskörnung

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DE19962451C1 (de) * 1999-12-22 2001-08-30 Heraeus Quarzglas Verfahren für die Herstellung von opakem Quarzglas und für die Durchführung des Verfahrens geeignetes Si0¶2¶-Granulat
DE10019693B4 (de) * 2000-04-20 2006-01-19 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Bauteils aus opakem, synthetischen Quarzglas, nach dem Verfahren hergestelltes Quarzglasrohr, sowie Verwendung desselben
JP2003192331A (ja) * 2001-12-26 2003-07-09 Shin Etsu Chem Co Ltd 親水性シリカ微粉末及びその製造方法
DE102004006017B4 (de) * 2003-12-08 2006-08-03 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von laseraktivem Quarzglas und Verwendung desselben
DE102008061871B4 (de) * 2008-12-15 2012-10-31 Heraeus Quarzglas Gmbh & Co. Kg Schmelztiegel für den Einsatz in einem Tiegelziehverfahren für Quarzglas
JP5894409B2 (ja) * 2011-10-24 2016-03-30 長州産業株式会社 タングステン製品の製造方法
JP6220051B2 (ja) * 2014-03-12 2017-10-25 株式会社アライドマテリアル 坩堝およびそれを用いた単結晶サファイアの製造方法

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4650511A (en) * 1984-06-04 1987-03-17 Shin-Etsu Chemical Co., Ltd. Method for the preparation of a dehydrated quartz glass material for light transmission
US6136736A (en) * 1993-06-01 2000-10-24 General Electric Company Doped silica glass
EP0711736A1 (de) * 1994-10-14 1996-05-15 Tosoh Corporation Hochreines transparentes Quarzglas und Verfahren zu seiner Herstellung
EP1088789A2 (de) * 1999-09-28 2001-04-04 Heraeus Quarzglas GmbH & Co. KG Poröse Granulate aus Siliciumdioxid, deren Herstellungsverfahren und deren Verwendung bei einem Verfahren zur Herstellung von Quarzglas
WO2001046077A1 (de) * 1999-12-22 2001-06-28 Heraeus Quarzglas Gmbh & Co. Kg Quarzglastiegel und verfahren für seine herstellung
US20040118155A1 (en) * 2002-12-20 2004-06-24 Brown John T Method of making ultra-dry, Cl-free and F-doped high purity fused silica
WO2005054139A1 (de) * 2003-12-08 2005-06-16 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung von laseraktivem quarzglas und verwendung desselben
US20060183623A1 (en) * 2003-12-17 2006-08-17 Asahi Glass Company Limited Synthetic quartz glass for optical member and its production method
DE102004038602B3 (de) * 2004-08-07 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben
US20060055300A1 (en) * 2004-09-10 2006-03-16 Alan Janos Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation
US20090208760A1 (en) * 2008-01-30 2009-08-20 Asahi Glass Company, Limited Energy-transmitting or ultraviolet light-transmitting optical fiber preform and production process thereof
DE102008033945A1 (de) * 2008-07-19 2010-01-21 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung von mit Stickstoff dotiertem Quarzglas sowie zur Durchführung des Verfahrens geeignete Quarzglaskörnung

Also Published As

Publication number Publication date
WO2017103114A2 (de) 2017-06-22
KR20180095621A (ko) 2018-08-27
US20190092676A1 (en) 2019-03-28
EP3390306A2 (de) 2018-10-24
JP6927643B2 (ja) 2021-09-01
JP2019503962A (ja) 2019-02-14
CN108698895A (zh) 2018-10-23
TWI794148B (zh) 2023-03-01
TW201736288A (zh) 2017-10-16

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