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WO2017100965A1 - Alimentation électrique radiofréquence pour laser - Google Patents

Alimentation électrique radiofréquence pour laser Download PDF

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Publication number
WO2017100965A1
WO2017100965A1 PCT/CN2015/000904 CN2015000904W WO2017100965A1 WO 2017100965 A1 WO2017100965 A1 WO 2017100965A1 CN 2015000904 W CN2015000904 W CN 2015000904W WO 2017100965 A1 WO2017100965 A1 WO 2017100965A1
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WO
WIPO (PCT)
Prior art keywords
microstrip
power
synthesis
circuit
total
Prior art date
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Ceased
Application number
PCT/CN2015/000904
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English (en)
Chinese (zh)
Inventor
徐海军
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Individual
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Individual
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Application filed by Individual filed Critical Individual
Priority to PCT/CN2015/000904 priority Critical patent/WO2017100965A1/fr
Publication of WO2017100965A1 publication Critical patent/WO2017100965A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser

Definitions

  • the present invention relates to a radio frequency power supply for a laser, and more particularly to the field of lasers.
  • Gas lasers especially carbon dioxide gas lasers, use a radio frequency power source to generate a laser for the discharge of a gas in a laser.
  • the role of the RF power supply is to generate high-frequency excitation current.
  • the traditional RF power supply uses common heat sinks and structures. Generally, it is air-cooled or single-sided water-cooled. Therefore, high-power lasers are placed separately from the RF power supply. This requires multiple enclosures, increased in size, and increased in cost, and requires an RF cable to be connected between the laser and the RF power supply. This RF cable generates heat when operating at high power and generates additional Energy loss.
  • the internal RF power synthesizers of commonly used lasers generally use a magnetic ring transformer or a discrete inductor and capacitor to form a synthesizer.
  • a radio frequency power synthesizer is relatively bulky because it needs to be connected to an additional component on the composite circuit board.
  • the efficiency of the micro-band RF power synthesizer will be low, so it will generate heat and equipment that needs to be cooled.
  • the advantage of the microstrip circuit is that it does not require additional components, and it has high efficiency and low heat generation. Even if it is heated, it can be carried away by the circuit board to conduct heat to the underground heat sink, without the need for an air-cooled heat dissipation method. Summary of the invention
  • an object of the present invention is to provide an RF power supply system with high power density and small size and capable of being mounted into a laser.
  • a radio frequency power supply for a laser comprising a first power amplification module, a second power amplification module, a third power amplification module, a fourth power amplification module, a fifth power amplification module, a sixth power amplification module, and a first microstrip Power synthesis circuit, second microstrip power synthesis circuit, third power synthesis microstrip circuit, RF output matching circuit and water cooling radiator; wherein, the first power amplification module, the second power amplification module, the third power amplification module, Four power amplification modules, a fifth power amplification module, and a sixth power amplification module, the six modules simultaneously give an RF power current of 81.36 Mhz, which is transmitted to the first power synthesis microstrip circuit through the electrodes, and the third power synthesis microstrip a circuit, the first power synthesis microstrip circuit and the third power synthesis microstrip circuit, each of the signals output by the three power amplification modules are combined into one path, and outputted to an input end
  • a power synthesis microstrip circuit comprising: a first microstrip transmission portion; an RF current is input from three input terminals, and the RF current is finally aggregated and synthesized on the output end through the microstrip line; wherein the first microstrip transmission portion Is a width of 3. 2mm,
  • the 237mm copper-plated line is formed by connecting three straight lines of 69.6 mm long and two semicircles having a radius of 4.5 mm.
  • a power synthesis microstrip circuit comprising: a second microstrip transmission portion; an RF current is input from three input terminals, and the RF current is finally aggregated and synthesized on the output end through the microstrip line; wherein the second microstrip transmission portion It is a copper-clad line having a width of 3. 2 mm and a length of 186.3 mm, wherein four straight lines of 36 mm length are connected with three semi-circles having a radius of 4. 5 mm.
  • a power synthesis microstrip circuit comprising: a third microstrip transmission portion; an RF current is input from two input terminals, and the RF current is finally aggregated and synthesized on the output end through the microstrip line; wherein the third microstrip transmission portion It is a copper-clad line with a width of 4 mm and a length of 398 mm, in which nine straight lines of 34 faces are connected with eight semi-circles with a radius of 3.67 mm.
  • An output-matching microstrip circuit is characterized in that: the RF current is input to the matching end, and is outputted from the output end to the laser after being matched by the capacitor, wherein the fourth microstrip transmission portion is a width of 8 mm and a length of 51.5 mm. Copper lines, when the RF current passes, it plays a matching role.
  • Figure 1 is a schematic view showing the system connection of the present invention
  • FIG. 3 is a detailed wiring diagram of the power combining microstrip circuit 9 of the present invention.
  • FIG. 4 is a detailed wiring diagram of the power combining microstrip circuit 8 of the present invention.
  • FIG. 5 is a detailed wiring diagram of the output matching microstrip circuit 10 of the present invention.
  • Figure 6 is a detailed wiring diagram of the first total microstrip synthesis transmission section 29;
  • FIG. 7 is a detailed wiring diagram of the second total microstrip synthesis transmission section 30;
  • Figure 8 is a detailed wiring diagram of the third total microstrip synthesis transmission section 31;
  • Figure 9 is a detailed wiring diagram of the fourth total microstrip synthesis transmission section 32;
  • Figure 10 is a detailed wiring diagram of the fifth total microstrip synthesis transmission section 33;
  • Figure 11 is a detailed wiring diagram of the sixth total microstrip synthesis transmission section 34;
  • Figure 12 is a detailed wiring diagram of the seventh total microstrip synthesis transmission section 35;
  • FIG. 13 is a detailed wiring diagram of the eighth total microstrip synthesis transmission portion 36; detailed description:
  • the third amplification module 3, the fourth power amplification module 4, the fifth power amplification module 5, and the sixth power amplification module 6, the six modules simultaneously give an RF power current of 81.36 Mhz, which is transmitted to the first power synthesis micro through the electrodes.
  • the third power synthesis microstrip circuit 9 the first power synthesis microstrip circuit 7 and the third power synthesis microstrip circuit 9, each of the signals output by the three power amplification modules are combined into one way, and the output is sent to An input end of the second power synthesis microstrip circuit 8, the second power synthesis microstrip circuit 8 synthesizes two input power currents into one path and passes through the electrodes Microstrip matching circuit to the output 10, via the output matching output carbon dioxide laser to match the microstrip circuit.
  • the power synthesis microstrip circuit is shown in Figure 7.
  • the RF current is input from the input terminals 12, 13, 14 and the RF current is finally aggregated through the microstrip line to the output terminal 15.
  • the principle is that the RF current passes through a specific width and After the length of the microstrip is applied to the copper wire, it can be synthesized together, wherein the role of the microstrip is to match and reduce the loss.
  • the first microstrip transmission portion 25 is a copper-plated circuit having a width of 3.2 ram and a length of 237 mm, wherein three straight lines of 69.6 mm long are connected with two semicircles having a radius of 4. 5 mm.
  • the microstrip transmission part is a key part, so the design can reduce the volume and reduce the loss.
  • the principle is that RF current flows through these microstrip lines to maintain the same phase at the output and is evenly output to the output.
  • the power synthesis microstrip circuit 7 is composed of three total microstrip composite transmission sections, all of which are a microstrip copper wire having a width of 3.2 mm and a length of 557 mm, the difference being that the size of the circuit board is gone. The positions are different, and the connection order is different.
  • the first total microstrip synthesis transmission portion 29 and the second total microstrip synthesis transmission portion 30 are separated from the microstrip input end of the third total microstrip synthesis transmission portion 31. The outputs are connected together.
  • microstrip synthesis lines The design benefit of all microstrip synthesis lines is that the current can be averaged into one way and the phase of each line will not cancel each other out, no additional components are needed, and the efficiency is high and the heat is small, even if it is hot. It can also be carried away by the circuit board to conduct heat to the underground heat sink.
  • the power synthesis microstrip circuit is shown in FIG. 9.
  • the RF current is input from the input terminals 16, 17, 18, and the RF current is finally aggregated and synthesized on the output terminal 19 through the microstrip line, wherein the principle is that the RF current passes through a specific width and After the length of the microstrip is applied to the copper wire, it can be synthesized together, wherein the role of the microstrip is to match and reduce the loss.
  • the second microstrip transmission portion 26 is a copper-plated circuit having a width of 3.2 mm and a length of 186.3 inches, wherein four straight lines of 36 mm length are connected with three semicircles having a radius of 4. 5 mm.
  • the microstrip transmission parts are all key parts, and the design can reduce the volume and reduce the loss.
  • the principle is that RF current flows through these microstrip lines to maintain the same phase at the output and is evenly output to the output.
  • the power synthesis microstrip circuit 9 is composed of three total microstrip composite transmission sections, each of which is a microstrip copper wire having a width of 3.2 ram and a length of 557 mm, which is distinguished by the size of the circuit board. The positions are different, and the connection order is different.
  • the fourth total microstrip synthesis transmission unit 32 and the fifth total microstrip synthesis transmission unit 33 are separated from the microstrip input end of the sixth total microstrip synthesis transmission unit 34. The outputs are connected together.
  • microstrip synthesis lines The design benefit of all microstrip synthesis lines is that the current can be averaged into one way and the phase of each line will not cancel each other out, no additional components are needed, and the efficiency is high and the heat is small, even if it is hot. It can also be carried away by the circuit board to conduct heat to the underground heat sink.
  • the power synthesis microstrip circuit is shown in FIG. 8.
  • the RF current is input from the input terminals 20 and 21, and the RF current is finally aggregated and synthesized on the output terminal 22 through the microstrip line.
  • the principle is that the RF current passes through a specific width and length.
  • the third microstrip transmission portion 27 is a copper-clad line having a width of 4 mm and a length of 398 mm, wherein the three micro-band transmissions are formed by connecting nine straight lines of 34 mm length and eight semi-circles having a radius of 3.67 mm.
  • the parts are all key parts, so the design can reduce the volume and reduce the loss.
  • the principle is that RF current flows through these microstrip lines to maintain the same phase at the output and is evenly output to the output.
  • the power synthesis microstrip circuit 8 is composed of two total microstrip synthesis transmission sections, both of which are a microstrip copper wire with a width of 4 hidden and a length of 557 mra, the difference being the position of the board due to the size of the board. The difference is that the connection order is different.
  • the input of the seventh total microstrip synthesis transmission unit 35 is connected to the first total microstrip synthesis transmission unit 29 and the second total microstrip synthesis transmission unit 30 and the third total microstrip.
  • the microstrip output of the synthesis transmission section 31, and the microstrip input of the eighth total microstrip synthesis transmission section 36 is connected to the fourth total microstrip synthesis transmission section 32 and the fifth total microstrip synthesis transmission section 33 and the sixth total
  • the microstrip output end of the microstrip synthesis transmission section 34, the last seventh total microstrip synthesis transmission section 35 and the output end of the microstrip of the eighth total microstrip synthesis transmission section 36 are connected together, and the design of such a microstrip synthesis line.
  • the output matching microstrip circuit 10 the RF current is input from the 23 input to the matching terminal, and after being capacitively matched, the output is output from the output terminal 24 to the laser.
  • the fourth microstrip transmission portion 28 is a copper-clad line having a width of 8 mm and a length of 51.5 mm, which serves to match the radio frequency current.
  • the first total microstrip synthesis transmission portion 29 is a detailed wiring pattern, and the transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the line is composed of 10 straight lines and 6 radii. 5 ⁇ , 4 1/4 circle with a radius of 4. 5mm.
  • the second total microstrip synthesis transmission portion 30 is a detailed wiring pattern.
  • the transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the line is composed of 8 straight lines and 6 radii. 5mra semicircle, 3 1/4 circle with a radius of 4. 5mm.
  • the third total microstrip synthesis transmission portion 31 is a detailed wiring diagram, the transmission portion is a width of 3.2 mm, the total length of 557 5 ⁇ 1/4 ⁇
  • the microstrip copper wire which is composed of 11 straight lines and 9 radii of 4. 5mm semicircle, 2 1/4 circle with a radius of 4. 5mm.
  • the fourth total microstrip synthesis transmission portion 32 is a detailed wiring pattern, and the transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the ellipse is 11 straight lines and 9 radii are 4. 5 ⁇ , 2 1/4 circle with a radius of 4. 5mm.
  • the fifth total microstrip synthesis transmission portion 33 is a detailed wiring diagram, and the transmission portion is a microstrip copper wire having a width of 3.2 min and a total length of 557 mm, wherein the distance is 8 straight lines and 6 radii are 4. 5 ⁇ , 3 1/4 circle with a radius of 4. 5mm.
  • the sixth total microstrip synthesis transmission portion 34 is a detailed wiring diagram, and the transmission portion is a microstrip copper wire having a width of 3.2 mm and a total length of 557 mm, wherein the line is composed of 10 straight lines and 6 radii. 5mm semicircle, 4 1/4 circle with a radius of 4.5.
  • the seventh total microstrip synthesis transmission portion 35 is a detailed wiring diagram.
  • the transmission portion is a microstrip copper wire having a width of 4 mm and a total length of 557 mm, wherein the line is composed of 14 straight lines and 13 radii of 3.67 mm. , a 1/4 circle with a radius of 3.67mm.
  • the eighth total microstrip synthesis transmission portion 36 is a detailed wiring diagram, the transmission portion is a microstrip copper wire having a width of 4 cu., and a total length of 557 mm, which is composed of 14 straight lines and 6 radii of 3.67 ram. Semicircle, 9 1/4 circle with a radius of 3.67ram.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Microwave Amplifiers (AREA)

Abstract

La présente invention concerne une alimentation électrique radiofréquence pour un laser, comprenant un premier module d'amplification de puissance (1), un deuxième module d'amplification de puissance (2), un troisième module d'amplification de puissance (3), un quatrième module d'amplification de puissance (4), un cinquième module d'amplification de puissance (5), un sixième module d'amplification de puissance (6), un premier circuit de synthèse de puissance à microruban (7), un deuxième circuit de synthèse de puissance à microruban (8), un troisième circuit de synthèse de puissance à microruban (9), un circuit d'adaptation de sortie radiofréquence (10) et un dispositif de dissipation de chaleur refroidi par eau (11). Les six modules d'amplification de puissance fournissent simultanément 81,36 MHz de courant de puissance radiofréquence qui est synthétisé en un courant au moyen des trois circuits de synthèse de puissance à microruban, qui est ensuite transporté au circuit à microruban d'adaptation de sortie au moyen d'électrodes et qui, après avoir été adapté par le circuit à microruban d'adaptation de sortie, est délivré en sortie à un laser au dioxyde de carbone.
PCT/CN2015/000904 2015-12-14 2015-12-14 Alimentation électrique radiofréquence pour laser Ceased WO2017100965A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/CN2015/000904 WO2017100965A1 (fr) 2015-12-14 2015-12-14 Alimentation électrique radiofréquence pour laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2015/000904 WO2017100965A1 (fr) 2015-12-14 2015-12-14 Alimentation électrique radiofréquence pour laser

Publications (1)

Publication Number Publication Date
WO2017100965A1 true WO2017100965A1 (fr) 2017-06-22

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WO (1) WO2017100965A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2932868Y (zh) * 2006-07-12 2007-08-08 毛金才 多路微带分配、多路微带合成功放组件
US20080204134A1 (en) * 2007-02-27 2008-08-28 Howard Knickerbocker Power combiner
CN201260151Y (zh) * 2008-09-19 2009-06-17 天津七六四通信导航技术有限公司 Dvor系统的RF功率放大器
US20100316084A1 (en) * 2009-06-10 2010-12-16 Coherent, Inc. Arrangement for rf power delivery to a gas discharge laser with cascaded transmission line sections
CN103797664A (zh) * 2011-08-23 2014-05-14 相干公司 用于平衡驱动co2气体放电激光器的组合rf电源的设备和方法
CN105449502A (zh) * 2015-12-14 2016-03-30 北京热刺激光技术有限责任公司 一种用于激光器的射频电源
CN205429411U (zh) * 2015-12-14 2016-08-03 北京热刺激光技术有限责任公司 一种用于激光器的射频电源

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2932868Y (zh) * 2006-07-12 2007-08-08 毛金才 多路微带分配、多路微带合成功放组件
US20080204134A1 (en) * 2007-02-27 2008-08-28 Howard Knickerbocker Power combiner
CN201260151Y (zh) * 2008-09-19 2009-06-17 天津七六四通信导航技术有限公司 Dvor系统的RF功率放大器
US20100316084A1 (en) * 2009-06-10 2010-12-16 Coherent, Inc. Arrangement for rf power delivery to a gas discharge laser with cascaded transmission line sections
CN103797664A (zh) * 2011-08-23 2014-05-14 相干公司 用于平衡驱动co2气体放电激光器的组合rf电源的设备和方法
CN105449502A (zh) * 2015-12-14 2016-03-30 北京热刺激光技术有限责任公司 一种用于激光器的射频电源
CN205429411U (zh) * 2015-12-14 2016-08-03 北京热刺激光技术有限责任公司 一种用于激光器的射频电源

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