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WO2017188114A3 - エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 - Google Patents

エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 Download PDF

Info

Publication number
WO2017188114A3
WO2017188114A3 PCT/JP2017/015880 JP2017015880W WO2017188114A3 WO 2017188114 A3 WO2017188114 A3 WO 2017188114A3 JP 2017015880 W JP2017015880 W JP 2017015880W WO 2017188114 A3 WO2017188114 A3 WO 2017188114A3
Authority
WO
WIPO (PCT)
Prior art keywords
encoder
stage
robot
drive
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/015880
Other languages
English (en)
French (fr)
Other versions
WO2017188114A2 (ja
Inventor
康 大野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to CN201780016417.9A priority Critical patent/CN108713129B/zh
Publication of WO2017188114A2 publication Critical patent/WO2017188114A2/ja
Publication of WO2017188114A3 publication Critical patent/WO2017188114A3/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Manipulator (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

【課題】 【解決手段】所定方向に配列されたパターン１２を有するスケール１１と、パターン１２の情報を取得する取得部２０と、所定方向とは異なる方向におけるスケール１１又は取得部２０の一方の移動に対し、スケール１１又は取得部２０の他方を異なる方向に移動可能に支持する支持部４０と、を備える。
PCT/JP2017/015880 2016-04-25 2017-04-20 エンコーダ装置、駆動装置、ステージ装置、及びロボット装置 Ceased WO2017188114A2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201780016417.9A CN108713129B (zh) 2016-04-25 2017-04-20 编码器装置、驱动装置、载台装置及机械手装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016086723A JP6794654B2 (ja) 2016-04-25 2016-04-25 エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
JP2016-086723 2016-04-25

Publications (2)

Publication Number Publication Date
WO2017188114A2 WO2017188114A2 (ja) 2017-11-02
WO2017188114A3 true WO2017188114A3 (ja) 2017-12-21

Family

ID=60161405

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/015880 Ceased WO2017188114A2 (ja) 2016-04-25 2017-04-20 エンコーダ装置、駆動装置、ステージ装置、及びロボット装置

Country Status (3)

Country Link
JP (1) JP6794654B2 (ja)
CN (1) CN108713129B (ja)
WO (1) WO2017188114A2 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7098924B2 (ja) * 2017-12-19 2022-07-12 株式会社ニコン エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
KR101963893B1 (ko) * 2018-09-04 2019-04-01 엘아이지넥스원 주식회사 엔코더 자동 정렬장치 및 이의 제어 방법
CN112805536A (zh) * 2018-09-24 2021-05-14 株式会社尼康 编码器、驱动装置、机器人装置、控制系统及其控制方法
CN109737912B (zh) * 2019-03-21 2021-04-02 博奥生物集团有限公司 一种偏心检测方法和偏心检测装置
KR102478238B1 (ko) * 2021-01-22 2022-12-19 주식회사 푸른기술 협동로봇 관절의 엔코더 정렬장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003004483A (ja) * 2001-06-26 2003-01-08 Canon Inc 回転位置検出装置
JP2004104889A (ja) * 2002-09-09 2004-04-02 Yaskawa Electric Corp エンコーダの結合装置
WO2013146371A1 (ja) * 2012-03-30 2013-10-03 株式会社デンソーウェーブ エンコーダ、エンコーダの取り付け方法、トルク制限機構、駆動装置及びロボット装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20100091885A (ko) * 2007-12-11 2010-08-19 가부시키가이샤 니콘 이동체 장치, 노광 장치 및 패턴 형성 장치, 그리고 디바이스 제조 방법
CN202260867U (zh) * 2011-09-23 2012-05-30 北京动力源科技股份有限公司 一种电机主轴和编码器的连接装置
JP5374607B2 (ja) * 2012-03-28 2013-12-25 ファナック株式会社 オルダム継手とその製造方法及び該オルダム継手による軸の結合方法
JP5692147B2 (ja) * 2012-04-18 2015-04-01 株式会社安川電機 回転電機
JP2016003947A (ja) * 2014-06-17 2016-01-12 株式会社ニコン エンコーダ装置、駆動装置、ステージ装置、及びロボット装置
JP2016057215A (ja) * 2014-09-11 2016-04-21 株式会社ニコン エンコーダ、駆動装置、及びロボット装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003004483A (ja) * 2001-06-26 2003-01-08 Canon Inc 回転位置検出装置
JP2004104889A (ja) * 2002-09-09 2004-04-02 Yaskawa Electric Corp エンコーダの結合装置
WO2013146371A1 (ja) * 2012-03-30 2013-10-03 株式会社デンソーウェーブ エンコーダ、エンコーダの取り付け方法、トルク制限機構、駆動装置及びロボット装置

Also Published As

Publication number Publication date
CN108713129A (zh) 2018-10-26
WO2017188114A2 (ja) 2017-11-02
CN108713129B (zh) 2021-03-12
JP6794654B2 (ja) 2020-12-02
JP2017198456A (ja) 2017-11-02

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