WO2017185903A1 - Optical fiber preform loose mass deposition device and deposition method therefor - Google Patents
Optical fiber preform loose mass deposition device and deposition method therefor Download PDFInfo
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- WO2017185903A1 WO2017185903A1 PCT/CN2017/077198 CN2017077198W WO2017185903A1 WO 2017185903 A1 WO2017185903 A1 WO 2017185903A1 CN 2017077198 W CN2017077198 W CN 2017077198W WO 2017185903 A1 WO2017185903 A1 WO 2017185903A1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01406—Deposition reactors therefor
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01486—Means for supporting, rotating or translating the preforms being formed, e.g. lathes
- C03B37/01493—Deposition substrates, e.g. targets, mandrels, start rods or tubes
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/50—Multiple burner arrangements
- C03B2207/52—Linear array of like burners
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/62—Distance
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/60—Relationship between burner and deposit, e.g. position
- C03B2207/66—Relative motion
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/70—Control measures
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Definitions
- the invention belongs to the technical field of optical fiber preform manufacturing, and in particular relates to an optical fiber prefabricated loose body deposition device and a deposition method thereof.
- the OVD method for producing loose preforms of optical fiber preforms is generally a single set of torches for round-trip deposition.
- the number of deposition torches in this method is not more than three. If the number of burners is increased only in the original equipment, the single-group torch round-trip deposition method will increase the number of lamps.
- the length of the tapered portion of the preform loose body reduces the effective length of the fiber preform loose.
- a target rod with a target weight of 100 kg is mounted on the chuck 3 in the casing 1, and the flow rate of each burner is adjusted to an average CH 4 : 72 slpm; SiCl 4 : 42.7 g / min 02: 149 slpm, after the deposition is started, the torch is shifted.
- the motor 9 drives the burner 5 on the burner stage 6 to move, the rotary motor 8 drives the target rod to rotate, and the single set of 3 burners continuously moves back and forth to deposit SiO 2 onto the target rod to form the loose body 2.
- the sensor 4 records the loose body from time to time.
- the deposition weight is compared with the target weight. When the re-deposition weight reaches the apparent weight, the line gives an engineering end indication.
- the torch lifting motor 7 drives the stage to make the burner loose. The direction moves, and the deposition weight reaches the target weight and the project ends.
- An object of the present invention is to provide an optical fiber preformed loose body deposition apparatus and a deposition method thereof which improve production efficiency and deposition speed.
- the invention provides an optical fiber prefabricated loose body deposition device, which comprises: a box body, an R ⁇ C matrix distribution blower fixed in the box body, a blower translation motor and a torch translation stage connected to the R ⁇ C matrix distribution burner lamp, and deposition C target rods of C loose bodies, C lead rods correspondingly connected to the C target rods, C sensors connected to the C lead rods, and C rotating electric machines connected to the C lead rods a lifting stage for fixing the C rotating electric machines, and a lifting motor connected to the lifting stage; wherein R and C are both natural numbers; setting the R ⁇ C matrix distribution burners in the first direction and the first direction The vertical second direction matrix is arranged, the first burner is set in the first direction, the second burner is set in the second direction, and the first burner in the first direction has the C row.
- each row is provided with C second burners; the C target rods extend along the first direction and are located above the corresponding first burners And each target rod extends in the same direction as the first direction
- a blower lamp corresponds to the setting.
- the R ⁇ C matrix distribution burner is provided with a support plate for fixing the R ⁇ C burners, one end of each burner is fixed on the support plate, and the other end of each burner is fixed in the casing.
- the support plates are fixedly connected to the burner translation motor and the burner translation stage.
- each lead rod passes through the lifting stage and is connected to a corresponding sensor, and the other end of each lead rod is fixedly connected to the corresponding target rod.
- the invention also provides a method for depositing an optical fiber prefabricated loose body, comprising the following steps:
- the first step the R ⁇ C matrix distribution burner is fixed in the box;
- the third step C rods, sensors and rotating electric machines with target rods are mounted on the lifting platform;
- Step 5 During the deposition process, the sensor records the deposition weight of the corresponding loose body
- the method further comprises the following steps: Step 8: When the sensor measures the weight of the C loose bodies to reach the target weight, the deposition method automatically ends the knot.
- the method further comprises the following steps: the sensor performs the R ⁇ C matrix distribution of the flow rate of the blowtorch material according to the progress difference, and the adjustment mode is that the deposition of the raw material with a fast deposition is reduced, so that the C loose bodies simultaneously reach the target weight.
- the target weight of the loose bodies deposited on the C target rods does not differ by more than ⁇ 0.5%.
- the tank of the invention can deposit C loose bodies, and 3 ⁇ (C-1) servo motors can be used less than the conventional method, and the inner and outer isolation gases of the same row of the burners in the spray lamp matrix distribution can share one mass flowmeter. Therefore, 2 ⁇ R ⁇ (C-1) mass flowmeters can be saved; since a box body is simultaneously produced with loose C, the deposition atmosphere temperature in the tank can be increased by 20-30 ° C, thereby saving gas consumption; The matrix distribution method greatly improves the production efficiency of the equipment, and the deposition speed is RC times that of the single burner.
- FIG. 1 is a schematic structural view of a conventional single-group blower optical fiber prefabricated loose body deposition device
- FIG. 2 is a schematic structural view of a pre-fabricated loose body deposition device for a burner lamp matrix distribution optical fiber according to the present invention.
- the deposition apparatus comprises: a box body 10 , an R ⁇ C matrix distribution blower 20 fixed in the box 10 , a blower translation motor 30 connected to the R ⁇ C matrix distribution blower 20 and a blower translation load.
- the stage 40 and the C target rods 200, the C lead rods 60 connected to the C target rods 200, and the C sensors 70 connected to the C rods 60 are connected to the C rods 60.
- the lead rod 60 is fixed on the lifting platform 90;
- the sensor 70 is a weight sensor; one end of each lead rod 60 is worn
- the lifting platform 90 is fixedly connected to the corresponding sensor 70, and the other end of each of the guiding rods 60 is fixedly connected to the corresponding target rod 200.
- the R x C matrix distribution burner 20 continuously deposits SiO 2 onto the target rod 200 while forming C loose bodies 50.
- R ⁇ C matrix distribution burners Setting the R ⁇ C matrix distribution burners to be arranged in a first direction and a second direction matrix perpendicular to the first direction, and the first direction in the first direction is called a first burner 21, and is located in a second direction perpendicular to the first direction.
- the first burner 21 in the first direction has a total of C rows, each row is provided with R first burners 21; the second burner 22 in the second direction has a total of R rows, each row has C first Two burners 21.
- the lifting motor 100 drives the lifting platform 90, and the corresponding target rod 200 is pulled up and down by the lead rod 60.
- the three rotating electric machines 80 drive the target rod 200 to rotate at the same rotational speed, and the 12 ⁇ 3 matrix burner continuously deposits SiO 2 .
- a corresponding loose body 50 is formed on the target rod 200; during the deposition process, the sensor 70 records the deposition weight of the corresponding loose body 50 from time to time, and compares the PID adjustment to the flow rate of the array burner material to ensure the same progress of the loose body 50 deposition, with 3
- the matrix blower translation motor 30 drives the burner to translate the stage 40 to move the burner away from the loose direction, and the deposition weight reaches the target weight and the project ends.
- the optical fiber prefabricated loose body deposition method comprises the following steps:
- the first step the R x C matrix distribution burner 20 is fixed in the casing 10.
- the second step the C target rods 200 are respectively mounted on the corresponding lead rods 60 in the first direction.
- the third step C guides 60 with the target rod 200, the sensor 70, and the rotary electric machine 80 are mounted on the lift stage 90.
- the fourth step C rotating electric machine 80 drives the corresponding target rod 200 to rotate by the lead rod 60, and the R ⁇ C matrix distribution burner 20 continuously deposits SiO 2 onto the target rod 200 to form a corresponding loose body 50;
- Step 5 During the deposition process, the sensor 70 records the deposition weight of the corresponding loose body 50 from time to time.
- Step 6 As the outer diameter of the loose body 50 continues to increase, the burner translation motor 30 drives the R x C matrix distribution burner 20 through the burner translation stage 40 to keep away from the loose body 50, so that the distance from the burner to the deposition point remains substantially constant.
- Step 7 The sensor 70 performs on-line measurement of the deposition weight and compares the deposition progress of the C loose bodies 50, and performs PID adjustment of the raw material flow rate of the R ⁇ C matrix distribution blower 20 according to the progress difference, and the adjustment mode is a fast deposition of raw material supply. Reduce, and finally make the C loose bodies reach the target weight at the same time.
- Step 8 When the sensor 70 measures the weight of the corresponding loose body to reach the target weight, the deposition method automatically ends.
- the target weight difference of the loose bodies deposited on the C target rods does not exceed ⁇ 0.5%.
- the tank of the invention can deposit C loose bodies, and 3 ⁇ (C-1) servo motors can be used less than the conventional method, and the inner and outer isolation gases of the same row of the burners in the spray lamp matrix distribution can share one mass flowmeter. Therefore, 2 ⁇ R ⁇ (C-1) mass flow meters can be saved. Since a box can produce C loose at the same time, it can make the sink in the box The atmosphere temperature is 20 to 30 ° C, which can save gas consumption.
- the torch matrix distribution method greatly improves the production efficiency of the device, and the deposition speed is RC times that of the single burner.
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Abstract
Description
本发明属于光纤预制棒制造技术领域,尤其涉及一种光纤预制松散体沉积装置及其沉积方法。The invention belongs to the technical field of optical fiber preform manufacturing, and in particular relates to an optical fiber prefabricated loose body deposition device and a deposition method thereof.
现有光纤预制棒制造方法,第一步:多采用轴向气相沉积法(VAD)生产芯棒,第二步:采用外部气相沉积法(OVD)生产外包层,通过这两步法生产光纤预制棒。众所周知,光纤预制的成本70%由包层部分决定,OVD方法生产成本和生产效率对光纤预制棒的成本有很大的影响。Existing optical fiber preform manufacturing method, the first step: the use of axial vapor deposition (VAD) to produce mandrel, the second step: the use of external vapor deposition (OVD) to produce the outer cladding, through these two methods to produce optical fiber prefabrication Baton. As we all know, 70% of the cost of fiber prefabrication is determined by the cladding part. The production cost and production efficiency of the OVD method have a great influence on the cost of the optical fiber preform.
目前OVD方法生产光纤预制棒松散体的工艺,一般是单组喷灯往返沉积,这种方法沉积喷灯数量不超过3个,如果仅在原有设备增加喷灯个数,单组喷灯往返沉积法会增加光纤预制棒松散体锥形部分长度减少了光纤预制棒松散的有效长度。At present, the OVD method for producing loose preforms of optical fiber preforms is generally a single set of torches for round-trip deposition. The number of deposition torches in this method is not more than three. If the number of burners is increased only in the original equipment, the single-group torch round-trip deposition method will increase the number of lamps. The length of the tapered portion of the preform loose body reduces the effective length of the fiber preform loose.
图1为现有单组喷灯光纤预制松散体沉积装置的结构示意图,本沉积状包括:箱体1、位于箱体1内的松散体2、固定该松散体2的卡盘3、与卡盘3连接的传感器4、位于箱体1的3个喷灯5、固定喷灯5的喷灯载台6、固定该喷灯载台6的喷灯升降电机7、固定松散体1的旋转电机8、以及喷灯平移驱动电机9。1 is a schematic structural view of a conventional single-group blower optical fiber prefabricated loose body deposition apparatus. The deposit includes: a casing 1, a loose body located in the casing 1, a
将1根目标重量均100kg的靶棒安装在箱体1内卡盘3上,每个喷灯流量调整为平均CH4:72slpm;SiCl4:42.7g/min 02:149slpm,沉积启动后,喷灯平移电机9驱动喷灯载台6上的喷灯5移动,旋转电机8驱动靶棒旋转,单组3喷灯不断往返移动将SiO2沉积到靶棒上形成松散体2,沉积过程中传感器4时时记录松散体的沉积重量并和目标重量进行比较,重沉积重量达到目示重量时线给出工程结束指示,随着松散体2的外径的不断增加,喷灯升降电机7驱动载台使喷灯向远离松散的方向移动,沉积重量达到目标重量后工程结束。A target rod with a target weight of 100 kg is mounted on the
经测量松散体的沉积主要参数为,如下表1:The main parameters of the sedimentation measured by loose bulk are as follows:
表1Table 1
现在技术降低生产成本提高生产效率的空间无法通过增加喷灯来完成。 The space in which technology now reduces production costs and increases production efficiency cannot be accomplished by adding blowtorches.
发明内容Summary of the invention
本发明的目的在于提供一种提高生产效率和沉积速度的光纤预制松散体沉积装置及其沉积方法。SUMMARY OF THE INVENTION An object of the present invention is to provide an optical fiber preformed loose body deposition apparatus and a deposition method thereof which improve production efficiency and deposition speed.
本发明提供一种光纤预制松散体沉积装置,其包括:箱体、固定该箱体内的R×C矩阵分布喷灯、与该R×C矩阵分布喷灯连接的喷灯平移电机和喷灯平移载台、沉积C个松散体的C根靶棒、与该C根靶棒对应连接的C个引杆、与该C个引杆对应连接的C个传感器、与该C个引杆对应连接的C个旋转电机、固定该C个旋转电机的升降载台、以及与该升降载台连接的升降电机;其中,R和C均为自然数;设定R×C矩阵分布喷灯位于第一方向和与该第一方向垂直的第二方向矩阵排列,设定位于第一方向的称为第一喷灯,设定位于与第二方向的称为第二喷灯;位于第一方向的第一喷灯具有C排,每排设有R个第一喷灯;位于第二方向的第二喷灯具有R排,每排设有C个第二喷灯;所述C根靶棒沿第一方向延伸设置且位于对应的第一喷灯的上方,且每个靶棒的延伸方向与第一方向的每排第一喷灯对应设置。The invention provides an optical fiber prefabricated loose body deposition device, which comprises: a box body, an R×C matrix distribution blower fixed in the box body, a blower translation motor and a torch translation stage connected to the R×C matrix distribution burner lamp, and deposition C target rods of C loose bodies, C lead rods correspondingly connected to the C target rods, C sensors connected to the C lead rods, and C rotating electric machines connected to the C lead rods a lifting stage for fixing the C rotating electric machines, and a lifting motor connected to the lifting stage; wherein R and C are both natural numbers; setting the R×C matrix distribution burners in the first direction and the first direction The vertical second direction matrix is arranged, the first burner is set in the first direction, the second burner is set in the second direction, and the first burner in the first direction has the C row. There are R first burners; the second burner in the second direction has R rows, and each row is provided with C second burners; the C target rods extend along the first direction and are located above the corresponding first burners And each target rod extends in the same direction as the first direction A blower lamp corresponds to the setting.
优选地,4≤R≤12,1≤C≤6,且R≥C。Preferably, 4≤R≤12, 1≤C≤6, and R≥C.
优选地,所述R×C矩阵分布喷灯设有固定该R×C个喷灯的支撑板,每个喷灯的一端固定在该支撑板上,每个喷灯的另一端固定在箱体内。Preferably, the R×C matrix distribution burner is provided with a support plate for fixing the R×C burners, one end of each burner is fixed on the support plate, and the other end of each burner is fixed in the casing.
优选地,所述支撑板均与所述喷灯平移电机和喷灯平移载台固定连接。Preferably, the support plates are fixedly connected to the burner translation motor and the burner translation stage.
优选地,每个引杆的一端穿过升降载台后连接对应的传感器,每个引杆的另一端固定连接对应的靶棒。Preferably, one end of each lead rod passes through the lifting stage and is connected to a corresponding sensor, and the other end of each lead rod is fixedly connected to the corresponding target rod.
本发明还提供一种光纤预制松散体沉积方法,包括如下步骤:The invention also provides a method for depositing an optical fiber prefabricated loose body, comprising the following steps:
第一步:R×C矩阵分布喷灯的固定在箱体内;The first step: the R×C matrix distribution burner is fixed in the box;
第二步:C根靶棒在第一方向上分别安装在对应的引杆上;The second step: the C target rods are respectively mounted on the corresponding lead rods in the first direction;
第三步:带有靶棒的C个引杆、传感器和旋转电机安装在升降载台上;The third step: C rods, sensors and rotating electric machines with target rods are mounted on the lifting platform;
第四步:C个旋转电机通过引杆驱动对应的靶棒旋转,R×C矩阵分布喷灯不断将SiO2沉积到靶棒上形成对应的松散体;The fourth step: C rotating electric machines drive the corresponding target rods to rotate by the lead rods, and the R×C matrix distribution burners continuously deposit SiO 2 onto the target rods to form corresponding loose bodies;
第五步:沉积过程中,传感器记录对应的松散体的沉积重量;Step 5: During the deposition process, the sensor records the deposition weight of the corresponding loose body;
第六步:随着松散体外径的不断增加,喷灯平移电机通过喷灯平移载台驱动R×C矩阵分布喷灯不断远离松散体,使喷灯到沉积点的距离基本保持恒定。 Step 6: As the outer diameter of the loose body increases, the blowtorch translation motor drives the R×C matrix distribution blower through the blower lamp to continuously move away from the loose body, so that the distance from the burner to the deposition point remains substantially constant.
优选地,还包括如下步骤:第七步:传感器对沉积重量进行在线测量并进行C个松散体的沉积进度进行比较。Preferably, the method further comprises the following steps: Step 7: The sensor performs on-line measurement of the deposition weight and compares the deposition progress of the C loose bodies.
优选地,还包括如下步骤:第八步:当传感器测量C个松散体的重量达到目标重量时,本沉积方法自动结束结。Preferably, the method further comprises the following steps: Step 8: When the sensor measures the weight of the C loose bodies to reach the target weight, the deposition method automatically ends the knot.
优选地,还包括如下步骤:传感器根据进度差进行R×C矩阵分布喷灯原料流量的调节,调节方式为沉积快的原料供应减少,使C个松散体同时达到目标重量。Preferably, the method further comprises the following steps: the sensor performs the R×C matrix distribution of the flow rate of the blowtorch material according to the progress difference, and the adjustment mode is that the deposition of the raw material with a fast deposition is reduced, so that the C loose bodies simultaneously reach the target weight.
优选地,C个靶棒上沉积的松散体的目标重量差别不超过±0.5%。Preferably, the target weight of the loose bodies deposited on the C target rods does not differ by more than ±0.5%.
本发明一个箱体可以沉积C个松散体,与传统方法相比,可少用3×(C-1)个伺服电机,喷灯矩阵分布中同一行的喷灯的内外隔离气体可以共用一个质量流量计,因此可以节约2×R×(C-1)个质量流量计;由于一个箱体同时生产C根松散,可以使箱体内的沉积气氛温度高20~30℃因此可以节约燃气用量;本发明喷灯矩阵分布法大大提高了设备的生产效率,沉积速度是单喷灯的RC倍。The tank of the invention can deposit C loose bodies, and 3×(C-1) servo motors can be used less than the conventional method, and the inner and outer isolation gases of the same row of the burners in the spray lamp matrix distribution can share one mass flowmeter. Therefore, 2×R×(C-1) mass flowmeters can be saved; since a box body is simultaneously produced with loose C, the deposition atmosphere temperature in the tank can be increased by 20-30 ° C, thereby saving gas consumption; The matrix distribution method greatly improves the production efficiency of the equipment, and the deposition speed is RC times that of the single burner.
图1为现有单组喷灯光纤预制松散体沉积装置的结构示意图;1 is a schematic structural view of a conventional single-group blower optical fiber prefabricated loose body deposition device;
图2为本发明喷灯矩阵分布光纤预制松散体沉积装置结构示意图。2 is a schematic structural view of a pre-fabricated loose body deposition device for a burner lamp matrix distribution optical fiber according to the present invention.
图号说明:Description of the figure:
10-箱体、20-R×C矩阵分布喷灯、21-R系列喷灯、22-C系列喷灯、30-喷灯平移电机、40-喷灯平移载台、50-松散体、60-引杆、70-传感器、80-旋转电机、90-升降载台、100升降电机、200-靶棒。10-Box, 20-R×C Matrix Distribution Blowtorch, 21-R Series Blowtorch, 22-C Series Blowtorch, 30-Blowing Lamp Translation Motor, 40-Blowing Lamp Translation Stage, 50-Loose Body, 60-Pole, 70 - Sensor, 80-rotary motor, 90-lifting platform, 100 lifting motor, 200-target bar.
本发明提供一种光纤预制松散体沉积装置,本沉积装置可用于SiCl4水解沉积生产光纤预制松散体或有机硅燃烧沉积生产光纤预制棒松散体。The invention provides an optical fiber prefabricated loose body deposition device, which can be used for producing an optical fiber preform loose body or a silicone combustion deposition to produce an optical fiber preform loose body by SiCl 4 hydrolysis deposition.
请参阅图1所示,本沉积装置包括:箱体10、固定该箱体10内的R×C矩阵分布喷灯20、与该R×C矩阵分布喷灯20连接的喷灯平移电机30和喷灯平移载台40、C根靶棒200、与该C根靶棒200对应连接的C个引杆60、与该C个引杆60对应连接的C个传感器70、与该C个引杆60对应连接的C个旋转电机80、固定该C个旋转电机80的升降载台90、以及与该升降载台90连接的升降电机100。其中,4≤R≤12,1≤C≤6,R≥C;引杆60固定在升降载台90上;传感器70为重量传感器;每个引杆60的一端穿
过升降载台90,该端固定连接对应的传感器70,每个引杆60的另一端固定连接对应的靶棒200。Referring to FIG. 1 , the deposition apparatus comprises: a
通过本光纤预制松散体沉积装置,R×C矩阵分布喷灯20不断将SiO2沉积到靶棒200上,同时形成C个松散体50。With the present optical fiber prefabricated loose bulk deposition apparatus, the R x C
设定R×C矩阵分布喷灯位于第一方向和与该第一方向垂直的第二方向矩阵排列,位于第一方向的称为第一喷灯21、位于与第一方向垂直的第二方向的称为第二喷灯22,即:第一方向的第一喷灯21共有C排,每排设有R个第一喷灯21;第二方向的第二喷灯22共有R排,每排设有C个第二喷灯21。Setting the R×C matrix distribution burners to be arranged in a first direction and a second direction matrix perpendicular to the first direction, and the first direction in the first direction is called a
其中,R×C矩阵分布喷灯20设有固定该R×C个喷灯的支撑板23,每个喷灯的一端固定在该支撑板23上,每个喷灯的另一端固定在箱体10内。其中,支撑板23均与喷灯平移电机30和喷灯平移载台40固定连接,以使本R×C矩阵分布喷灯20与喷灯平移电机30和喷灯平移载台40固定连接。The R×C
在本实施例中,第一方向每排的第一喷灯21有12个,第二方向每排的第二喷灯22有3个,即:R×C矩阵分布喷灯20采用12×3即36个喷灯矩阵分布。每个喷灯流量调整为平均CH4:40slpm;OMCTS:17g/min 02:100slpm;N2:15slpm。In this embodiment, there are 12
每个靶棒200沿第一方向延伸设置且位于对应第一喷灯21的上方,且每个靶棒200的延伸方向与第一方向的每排第一喷灯对应设置。Each
在本发明中,设置有C根靶棒200,即设置三根靶棒200。In the present invention,
将3根目标重量均100kg的靶棒200分别安装在对应的引杆60上。Three
沉积启动后,升降电机100驱动升降载台90,通过引杆60牵引对应的靶棒200上下移动,三个旋转电机80以相同转速驱动靶棒200旋转,12×3矩阵喷灯不断将SiO2沉积到靶棒200上形成对应的松散体50;沉积过程中,传感器70时时记录对应的松散体50的沉积重量,并进行比较PID调节对阵列喷灯原料流量确保松散体50沉积进度相同,随着3根松散体50的外径的不断增加,矩阵喷灯平移电机30驱动喷灯平移载台40使喷灯向远离松散的方向移动,沉积重量达目标重量后工程结束。After the deposition is started, the lifting
本光纤预制松散体沉积方法,其包括如下步骤:The optical fiber prefabricated loose body deposition method comprises the following steps:
第一步:R×C矩阵分布喷灯20的固定在箱体10内。The first step: the R x C
第二步:C根靶棒200在第一方向上分别安装在对应的引杆60上。
The second step: the
第三步:带有靶棒200的C个引杆60、传感器70和旋转电机80安装在升降载台90上。The third step: C guides 60 with the
第四步:C个旋转电机80通过引杆60驱动对应的靶棒200旋转,R×C矩阵分布喷灯20不断将SiO2沉积到靶棒200上形成对应的松散体50;The fourth step: C rotating
第五步:沉积过程中,传感器70时时记录对应的松散体50的沉积重量。Step 5: During the deposition process, the
第六步:随着松散体50外径的不断增加,喷灯平移电机30通过喷灯平移载台40驱动R×C矩阵分布喷灯20不断远离松散体50,使喷灯到沉积点的距离基本保持恒定。Step 6: As the outer diameter of the
第七步:传感器70对沉积重量进行在线测量并进行C个松散体50的沉积进度进行比较,根据进度差进行R×C矩阵分布喷灯20原料流量的PID调节,调节方式为沉积快的原料供应减少,最终使C个松散体同时达到目标重量。Step 7: The
第八步:当传感器70测量对应的松散体的重量达到目标重量时,本沉积方法自动结束。Step 8: When the
C个靶棒上沉积的松散体的目标重量差别不超过±0.5%。The target weight difference of the loose bodies deposited on the C target rods does not exceed ±0.5%.
经测量松散体的沉积主要参数,如下表2:The main parameters of the deposition of loose bodies are measured, as shown in Table 2 below:
表2Table 2
本发明在不影响光纤预制棒松散体质量的前提下,通过喷灯以矩阵分布沉积,增加喷灯数量到R×C个(4≤R≤12,1≤C≤6),同时生产C根光纤预制棒松散体使沉积效率为单灯的RC倍,由于同一箱体生产多根松散体,设备投入节约了箱体和3C个电机,生产同规格松散体情况下可节约燃气,本设备可用于SiCl4水解沉积生产光纤预制松散体或有机硅燃烧沉积生产光纤预制棒松散体。The invention not only affects the mass of the optical fiber preform loose body, but also deposits the matrix by spray lamp, increases the number of blow lamps to R×C (4≤R≤12,1≤C≤6), and simultaneously produces C fiber preforms. The rod loose body makes the deposition efficiency RC times of the single lamp. Since the same box produces multiple loose bodies, the equipment is saved to save the box and 3C motors, and the gas can be saved under the condition of loose parts with the same specifications. The device can be used for SiCl. 4 Hydrolytic deposition to produce optical fiber preformed loose bodies or silicone combustion deposition to produce optical fiber preform loose bodies.
本发明一个箱体可以沉积C个松散体,与传统方法相比,可少用3×(C-1)个伺服电机,喷灯矩阵分布中同一行的喷灯的内外隔离气体可以共用一个质量流量计,因此可以节约2×R×(C-1)个质量流量计。由于一个箱体同时生产C根松散,可以使箱体内的沉 积气氛温度高20~30℃因此可以节约燃气用量。喷灯矩阵分布法大大提高了设备的生产效率,沉积速度是单喷灯的RC倍。The tank of the invention can deposit C loose bodies, and 3×(C-1) servo motors can be used less than the conventional method, and the inner and outer isolation gases of the same row of the burners in the spray lamp matrix distribution can share one mass flowmeter. Therefore, 2 × R × (C-1) mass flow meters can be saved. Since a box can produce C loose at the same time, it can make the sink in the box The atmosphere temperature is 20 to 30 ° C, which can save gas consumption. The torch matrix distribution method greatly improves the production efficiency of the device, and the deposition speed is RC times that of the single burner.
以上参照附图说明了本发明的优选实施例,本领域技术人员不脱离本发明的范围和实质,可以有多种变型方案实现本发明。举例而言,作为一个实施例的部分示出或描述的特征可用于另一实施例以得到又一实施例。以上仅为本发明较佳可行的实施例而已,并非因此局限本发明的权利范围,凡运用本发明说明书及附图内容所作的等效变化,均包含于本发明的权利范围之内。The preferred embodiments of the present invention have been described above with reference to the drawings, and the present invention can be implemented in various modifications without departing from the scope and spirit of the invention. For example, features illustrated or described as part of one embodiment can be used in another embodiment to yield a further embodiment. The above are only the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. The equivalents of the present invention and the accompanying drawings are included in the scope of the present invention.
以上详细描述了本发明的优选实施方式,但是本发明并不限于上述实施方式中的具体细节,在本发明的技术构思范围内,可以对本发明的技术方案进行多种等同变换,这些等同变换均属于本发明的保护范围。 The preferred embodiments of the present invention have been described in detail above, but the present invention is not limited to the specific details in the above embodiments, and various equivalent transformations may be made to the technical solutions of the present invention within the scope of the technical idea of the present invention. It belongs to the scope of protection of the present invention.
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| CN112521001A (en) * | 2020-12-23 | 2021-03-19 | 通鼎互联信息股份有限公司 | Control system and control method for effective deposition of outer cladding of optical fiber preform |
| CN113912282A (en) * | 2021-09-30 | 2022-01-11 | 富通集团(嘉善)通信技术有限公司 | Method for processing core rod, preform rod and optical fiber |
| CN116693183A (en) * | 2023-05-29 | 2023-09-05 | 武汉烽火锐拓科技有限公司 | Method for acquiring VAD guide rod offset trend, deposition method and deposition equipment |
| CN117985934A (en) * | 2023-12-21 | 2024-05-07 | 华能(泰安)光电科技有限公司 | A cladding deposition device for preparing optical fiber preform |
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