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WO2017183708A1 - Procédé de détection de vibration, capteur de vibration, dispositif de détection de vibration, programme de détection de vibration et système de détection de vibration - Google Patents

Procédé de détection de vibration, capteur de vibration, dispositif de détection de vibration, programme de détection de vibration et système de détection de vibration Download PDF

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Publication number
WO2017183708A1
WO2017183708A1 PCT/JP2017/015977 JP2017015977W WO2017183708A1 WO 2017183708 A1 WO2017183708 A1 WO 2017183708A1 JP 2017015977 W JP2017015977 W JP 2017015977W WO 2017183708 A1 WO2017183708 A1 WO 2017183708A1
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WIPO (PCT)
Prior art keywords
vibration
surface portion
sensor
piezoelectric layer
input
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
PCT/JP2017/015977
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English (en)
Japanese (ja)
Inventor
米田　哲也
康 油谷
泰央 市川
佳郎 田實
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Valqua Industries Ltd
Kansai University
Nihon Valqua Kogyo KK
Original Assignee
Nippon Valqua Industries Ltd
Kansai University
Nihon Valqua Kogyo KK
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Application filed by Nippon Valqua Industries Ltd, Kansai University, Nihon Valqua Kogyo KK filed Critical Nippon Valqua Industries Ltd
Priority to JP2018513222A priority Critical patent/JP6764928B2/ja
Publication of WO2017183708A1 publication Critical patent/WO2017183708A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • the present invention relates to a sensor technology for detecting vibration from a vibrating body such as equipment or equipment that accompanies vibration.
  • vibrations In systems with vibrations such as mechanical systems and fluid systems, the operation state is monitored by vibrations.
  • a vibration sensor capable of converting vibrations into electrical signals and taking them out is used.
  • vibration sensors that detect abnormal vibrations require high sensitivity and stabilization of sensitivity.
  • the durability and detection capability of the vibration sensor may be reduced, the reliability of the vibration sensor may affect the vibration monitoring of the system, and the frequency of maintenance such as replacement may be low. There is a problem.
  • the vibration sensor may be slowly attached depending on the surface state such as curved surface or uneven surface, and the risk of dropout cannot be ignored, and the accuracy of vibration detection decreases in the installed state There is.
  • Patent Document 1 does not disclose or suggest the request, and does not disclose or suggest the configuration or the like for solving it.
  • an object of the present invention is to realize vibration detection that achieves high sensitivity and stable sensitivity while achieving miniaturization and weight reduction.
  • a vibration input surface portion and a vibration suppression surface portion are set in the piezoelectric layer, the vibration of the vibration body is input to the vibration input surface portion, and the vibration body Including a step of installing a vibration absorber that absorbs the vibration of the piezoelectric element to suppress vibrations entering the vibration suppressing surface portion and taking out a piezoelectric output from a single or a plurality of electrode pairs sandwiching the piezoelectric layer.
  • the vibration absorbing body is installed between the vibration suppressing surface portion facing the vibrating body and the vibrating body to absorb vibrations, and the vibration facing the back side with respect to the vibrating body.
  • a vibration transmission body may be installed between the input surface portion and the vibration body, and vibrations of the vibration body may be input to the vibration input surface portion through the vibration transmission body.
  • a vibration absorber is installed between the vibration suppressing surface portion with the back side facing the vibration body and the vibration body to absorb vibration, and the proximity to the vibration body is disposed. You may input the vibration of the said vibrating body into the said vibration input surface part.
  • a vibration input surface portion and a vibration suppression surface portion are set on the same surface of the piezoelectric layer, and a vibration transmitting body is installed on the vibration input surface portion.
  • a vibration absorber that inputs body vibrations and absorbs vibrations of the vibrating body is installed to suppress vibrations that enter the vibration suppressing surface portion.
  • a step of extracting a piezoelectric output from the plurality of electrode pairs In the vibration detection method, a space may be provided between the vibration absorber and the vibration transmission body.
  • the vibration sensor further includes a vibration transmitting body disposed between the vibration input surface portion and the vibration body, which is disposed toward the vibration body or disposed with a back side facing the vibration body, and the vibration You may input the vibration of the said vibration body to the said vibration input surface part through a transmission body.
  • the vibration absorber is disposed between the vibration suppression surface portion and the vibration body that is disposed toward the vibration body or is disposed with a back side facing the vibration body. Absorbs vibrations of the body and suppresses vibrations entering the vibration suppression surface portion.
  • the vibration input surface portion and the vibration suppression surface portion are set on the same surface, and the piezoelectric layer in which the vibration of the vibrating body is input to the vibration input surface portion;
  • a vibration transmitting body that is installed on the vibration input surface portion of the piezoelectric layer and transmits vibrations of the vibrating body; and vibration absorption that absorbs vibration of the vibrating body and suppresses vibration entering the vibration suppressing surface portion of the piezoelectric layer.
  • a space may be provided between the vibration absorber and the vibration transmission body.
  • the plurality of electrode pairs may be arranged on the X axis or the Y axis of the piezoelectric layer.
  • the electrode pair may be provided on one or both of the vibration input surface portion and the other surface portion.
  • the vibration sensor may further include a support member that supports the vibration sensor on the vibration body and transmits the vibration of the vibration body to the vibration input surface portion.
  • the support member may be flexible.
  • the electrode pair may include a single electrode or a plurality of common electrodes for a plurality of electrodes.
  • the piezoelectric layer receives vibration input in the X-axis direction, Y-axis direction, or Z-axis direction of the vibrating body, and the plurality of electrode pairs output piezoelectric outputs in the X-axis direction, Y-axis direction, or Z-axis direction.
  • Single or multiple electrode pairs may be provided.
  • the vibration sensor may further include a connector portion that is connected to the electrode pair and extracts the piezoelectric output.
  • the vibration sensor may further include a communication unit connected to the electrode pair and transmitting the piezoelectric output.
  • a single or a plurality of vibration sensors and signal processing connected to the vibration sensors by wire or wirelessly and analyzing components of the sensor outputs Means and a presentation means connected to the signal processing means by wire or wirelessly and presenting the output of the signal processing means.
  • a vibration detection program to be executed by a computer, which takes in sensor outputs of a single or a plurality of vibration sensors and uses the sensor outputs.
  • the computer realizes a function of analyzing the vibration of the vibrating body and presenting the analysis result.
  • a single or a plurality of vibration sensors, a device equipped with the vibration sensor, and a sensor output of the vibration sensor are received in a wired or wireless manner.
  • monitoring means for monitoring the operating state of the device are received in a wired or wireless manner.
  • vibration detection method vibration sensor, vibration detection device, vibration detection program, and vibration detection system of the present disclosure, the following effects can be obtained.
  • FIG. A is a cross-sectional view taken along the line VIA-VIA in FIG. 5, and B is an exploded perspective view showing a laminated state of a piezoelectric layer and an electrode pair.
  • FIG. 6 is a diagram illustrating a vibration sensor according to Embodiment 2.
  • FIG. It is sectional drawing which shows the vibration sensor wound around piping.
  • A is a figure which shows the vibration sensor which concerns on Example 3
  • B is a figure which shows the vibration sensor installed in the rotating disk.
  • A is a diagram showing a vibration sensor according to Example 4, and B is a diagram showing one form of vibration detection.
  • A is a diagram illustrating a vibration detection apparatus according to a fifth embodiment, and B is a diagram illustrating an information processing unit.
  • A is a figure which shows a vibration waveform
  • B is a figure which shows the frequency component of a detection vibration.
  • It is a figure which shows the vibration detection system which concerns on Example 6.
  • FIG. It is a figure which shows the vibration detection system which concerns on Example 7.
  • FIG. FIG. 10 is a diagram illustrating a vibration monitoring system according to an eighth embodiment.
  • FIG. 1 shows a vibration detection method and a vibration sensor according to an embodiment.
  • the vibration sensor 2 includes a piezoelectric layer 4.
  • a vibration input surface portion 6-1 is set on one surface
  • a vibration suppression surface portion 6-2 is set on the other surface.
  • a vibrating body 8 is provided as a detection target of the vibration sensor 2.
  • the vibration of the vibrating body 8 is input to the vibration input surface portion 6-1 as indicated by an arrow M.
  • a vibration absorber 10 is installed on the vibration suppression surface 6-2, and the vibration absorber 10 absorbs vibration.
  • the vibration absorber 10 may have a filter function that absorbs vibration of a specific frequency component.
  • the vibration input surface portion 6-1 side of the piezoelectric layer 4 vibrates in response to vibration, and the vibration suppressing surface portion 6-2 side is suppressed by the vibration absorber 10.
  • the piezoelectric layer 4 receives vibration stress and generates electric charges. This electric charge causes a potential difference, which is a piezoelectric output.
  • the vibration input surface 6-1 is provided with one electrode 12a of the electrode pair 12, and the vibration suppression surface 6-2 is provided with the other electrode 12b.
  • the piezoelectric layer 4 is sandwiched between electrodes 12 a and 12 b provided in the thickness direction of the piezoelectric layer 4.
  • the piezoelectric output generated in the piezoelectric layer 4 is extracted from the electrodes 12a and 12b, and a voltage having a level corresponding to the strength of the vibration input is generated between the electrodes 12a and 12b. This voltage is the sensor output.
  • the vibration sensor 2 includes the piezoelectric layer 4, the vibration absorber 10, and the electrode pair 12 as the sensor unit 14, or may include a stacked body thereof.
  • the vibration sensor 2 and the vibration detection method include variations depending on the presence / absence of the vibration transmitting body 16 (FIG. 2), the arrangement of the piezoelectric layer 4, and the arrangement of the electrode pair 12.
  • FIG. 2 shows the vibration sensor 2 in which the piezoelectric layer 4 is installed between the vibration absorber 10 and the vibration transmission body 16.
  • the vibration transmitting body 16 is means for transmitting the vibration of the vibrating body 8 to the vibration input surface portion 6-1 of the piezoelectric layer 4. Therefore, the vibration of the vibrating body 8 is input to the vibration input surface portion 6-1 of the piezoelectric layer 4 through the vibration transmitting body 16.
  • the piezoelectric layer 4 may be installed on the vibrating body 8 via the vibration absorbing body 10. That is, the vibration absorber 10 is interposed between the vibration suppressing surface portion 6-2 of the piezoelectric layer 4 and the vibrating body 8, and the vibration absorbing body 10 functions as a support member for the piezoelectric layer 4 with respect to the vibrating body 8, and also the vibrating body. 8 is absorbed, and the vibration of the vibration suppressing surface portion 6-2 is suppressed.
  • the vibration transmitting body 16 may be, for example, an arch shape straddling the sensor unit 14 or a dome shape surrounding the sensor unit 14.
  • the vibration transmitting body 16 is provided with a space 18, and the sensor unit 14 is installed in the space 18. That is, the vibration input surface portion 6-1 of the piezoelectric layer 4 is fixed to the vibration transmission body 16 and the vibration absorber 10 is fixed to the vibration body 8 in the space portion 18. Therefore, it functions as a support member that supports the sensor unit 14 with respect to the surface portion of the vibrating body 8.
  • the piezoelectric layer 4 is installed on the vibrating body 8 so that the vibration of the vibration suppressing surface portion 6-2 is suppressed by vibration absorption of the vibration absorbing body 10, and the vibration input surface portion 6-1 has a vibration from the vibrating body 8. Is entered.
  • the vibration input surface portion 6-1 and the vibration suppression surface portion 6-2 of the piezoelectric layer 4 exhibit different vibrations, and electric charges are generated by receiving the vibration stress.
  • sensor output can be obtained. it can.
  • FIG. 3 shows the vibration sensor 2 in which the piezoelectric layer 4 is installed between the vibration body 8 and the vibration absorber 10. If the vibration of the vibrating body 8 is directly input to the piezoelectric layer 4, the vibration transmitting body 16 can be omitted.
  • the vibration of the vibrating body 8 is input to the vibration input surface 6-1 by placing the piezoelectric layer 4 with the vibration input surface 6-1 facing the vibrating body 8. That is, the vibration of the vibrating body 8 is directly input without the vibration transmitting body 16 being interposed in the vibration input surface 6-1.
  • a vibration absorber 10 is installed between the vibration suppression surface portion 6-2 of the piezoelectric layer 4 and the vibration body 8.
  • the vibration absorber 10 is a support means for supporting the piezoelectric layer 4 on the vibration body 8 and absorbs vibration from the vibration body 8. For this reason, vibration can be suppressed by the vibration suppressing surface portion 6-2.
  • the vibration input surface portion 6-1 and the vibration suppression surface portion 6-2 exhibit different vibrations, and electric charges are generated by receiving the vibration stress, and as described above, the sensor output can be obtained. .
  • the vibration input surface portion 6-1 is set on one surface and the vibration suppression surface portion 6-2 is set on the other surface, but the present invention is not limited to this. Both the vibration input surface portion 6-1 and the vibration suppression surface portion 6-2 may be set on one surface of the piezoelectric layer 4.
  • FIG. 4 shows a case where the vibration input surface portion 6-1 and the vibration suppression surface portion 6-2 are provided on one surface of the piezoelectric layer 4.
  • a vibration input surface portion 6-1 and a vibration suppression surface portion 6-2 are set on one surface of the piezoelectric layer 4.
  • a vibration transmission body 16 is installed between the vibration input surface section 6-1 and the vibration body 8, and a vibration absorber 10 is installed between the vibration suppression surface section 6-2 and the vibration body 8.
  • An electrode 12a is installed on the vibration input surface 6-1 and an electrode 12b is installed on the vibration suppression surface 6-2.
  • a space 18 is set between the vibration absorber 10 and the vibration transmission body 16 to insulate them from each other.
  • the vibration absorber 10 and the vibration transmission body 16 also function as a support means for the piezoelectric layer 4, and thereby the piezoelectric layer 4 is maintained in parallel to the vibration body 8.
  • the vibration of the vibrating body 8 is input to the vibration input surface portion 6-1 through the vibration transmitting body 16, and the vibration is suppressed by the vibration absorbing body 10 in the vibration suppressing surface portion 6-2.
  • the vibration input surface portion 6-1 and the vibration suppression surface portion 6-2 exhibit different vibrations, and electric charges are generated by receiving the vibration stress, and as described above, the sensor output can be obtained. .
  • the materials and manufacturing methods of the piezoelectric layer 4, the vibration absorber 10, the electrode pair 12, the vibration transmission body 16, etc. of the vibration sensor 2 will be described below.
  • the piezoelectric layer 4 may be a piezoelectric functional layer of a single member or a laminate of a plurality of members.
  • the piezoelectric layer 4 may be formed by laminating a double-side smoothing layer, a protective layer, an insulating layer, or the like, or may be a monomorph, a bimorph, or a laminated type.
  • the piezoelectric layer 4 may be an organic piezoelectric layer such as a sheet made of a piezoelectric resin or a porous resin sheet, or may be an inorganic piezoelectric material layer such as quartz, barium titanate, or lead zirconate titanate.
  • the form such as the shape and size of the piezoelectric layer 4 only needs to be able to detect vibration of the vibrating body 8, and includes a form in which the vibration input surface portion 6-1 is parallel to the surface of the vibrating body 8.
  • the piezoelectric layer 4 has a piezoelectric constant d33 of preferably 20 ⁇ 10 ⁇ 12 [C / N] or more, more preferably 100 ⁇ 10 ⁇ , in order to achieve a superior vibration detection function by vibration detection in the thickness direction.
  • a piezoelectric material of 12 [C / N] or more may be used.
  • a porous resin sheet may be used for the piezoelectric layer 4.
  • This porous resin sheet has the following characteristics.
  • the porous resin sheet is preferably a sheet made of, for example, an organic material that can retain electric charge.
  • This porous resin sheet includes a nonwoven fabric or woven fabric made of fiber, a sheet-like foam made of an organic polymer, a stretched porous membrane made of an organic polymer, a matrix resin and charge-induced hollow particles (the surface of the hollow particles). And a phase separation agent dispersed in an organic polymer is removed by using an extractant such as supercritical carbon dioxide and empty.
  • seat etc. which are formed by the method of forming a hole are contained. From the viewpoint of maintaining durability and deformation performance, a nonwoven fabric or a woven fabric using a polymer fiber is preferable.
  • the porous resin sheet may contain one or more inorganic fillers. Thereby, the charge retention amount is high, and excellent piezoelectric characteristics can be obtained. If an inorganic filler is used, a sheet having a high piezoelectricity can be obtained.
  • Inorganic fillers include titanium oxide, aluminum oxide, barium titanate, lead zirconate titanate, zirconium oxide, cerium oxide, nickel oxide, tin oxide and the like.
  • the thickness of the porous resin sheet may be, for example, 10 [ ⁇ m] to 1 [mm], and more preferably 50 [ ⁇ m] to 500 [ ⁇ m].
  • the porosity is preferably 60% or more, more preferably 75% or more, and further preferably 80 to 99%. This porosity is (True density of resin-Apparent density of porous resin sheet) x 100 / True density of resin (1) Is required.
  • the apparent density may be a value calculated using the weight of the porous resin sheet and the apparent volume.
  • the polymer constituting the fiber preferably has a volume resistivity of 1.0 ⁇ 10 13 [ ⁇ ⁇ cm] or more, such as polyamide resin (6-nylon, 6,6-nylon, etc.), aromatic polyamide Resins (such as aramid), polyolefin resins (such as polyethylene and polypropylene), polyester resins (such as polyethylene terephthalate), polyacrylonitrile, phenolic resins, fluorine resins (such as polytetrafluoroethylene and polyvinylidene fluoride), imides Any of resin (polyimide, polyamideimide, bismaleimide, etc.) may be used.
  • polyamide resin (6-nylon, 6,6-nylon, etc.)
  • aromatic polyamide Resins such as aramid
  • polyolefin resins such as polyethylene and polypropylene
  • polyester resins such as polyethylene terephthalate
  • fluorine resins such as polytetrafluoroethylene and polyvinylidene fluoride
  • polystyrene resin polystyrene resin
  • PTFE polytetrafluoroethylene
  • PFA tetrafluoroethylene-perfluoroalkylpinyl ether copolymer
  • FEP tetrafluoroethylene-hexafluoropropylene copolymer
  • the continuous usable temperature is high and the glass transition point is not in the operating temperature range.
  • the continuous usable temperature of the polymer is preferably 50 [° C.] or higher, more preferably 100 [° C.] or higher, and further preferably 200 [° C.]. [° C.] or more.
  • moisture resistance those exhibiting hydrophobicity are preferred.
  • a polyolefin resin or a fluorine resin may be used as the polymer having these characteristics. If a polyolefin-based resin or a fluorine-based resin is used, vibration detection is possible without causing deterioration in piezoelectric characteristics even in vibration detection at temperatures below 100 [° C.] or temperatures exceeding 100 [° C.]. PTFE is preferred for the fluororesin.
  • PTFE has excellent heat resistance, vibration detection capability and durability, can realize the vibration sensor 2 that can detect the vibration of the high-temperature vibrating body 8, and can maintain the vibration detection performance and structure under high temperature and high pressure environment It is.
  • the average fiber diameter of the fiber is preferably 0.05 to 50 [ ⁇ m], more preferably 0.1 to 20 [ ⁇ m], still more preferably 0.3 to 5 [ ⁇ m]. If the average fiber diameter is within this range, a nonwoven fabric or woven fabric exhibiting high flexibility can be obtained. If the fiber surface area is increased, a sufficient space can be formed to hold the charge, and the fiber distribution uniformity can be increased even when the nonwoven fabric or woven fabric is formed thin.
  • the average fiber diameter of the fiber can be adjusted by selecting the fiber formation conditions. For example, according to the electrospinning method, the average fiber diameter of the obtained fiber is reduced by reducing the humidity, reducing the nozzle diameter, increasing the applied voltage, or increasing the voltage density during electrospinning. Tend.
  • the average fiber diameter is determined by observing a fiber (group) to be measured with a scanning electron microscope (SEM) scissors and randomly, for example, 20 pieces of SEM images observed at a magnification of 10,000 times. This is the average value obtained by selecting the fibers and measuring the fiber diameters (major diameters).
  • SEM scanning electron microscope
  • the fiber diameter variation coefficient of the fiber is preferably 0.7 or less, more preferably 0.01 to 0.5 from the value calculated by the following formula. If this fiber diameter variation coefficient is within a predetermined range, the fiber diameter of the fiber becomes uniform, and the nonwoven fabric or woven fabric obtained from this fiber has a higher porosity and a high charge retention porous resin sheet. From the viewpoint of obtaining
  • Fiber diameter variation coefficient standard deviation / average fiber diameter (2)
  • the “standard deviation” is the standard deviation of the fiber diameters of the 20 fibers described above.
  • the fiber length of the fiber is preferably 0.1 to 1000 [mm], more preferably 0.5 to 100 [mm], and still more preferably 1 to 50 [mm].
  • the fiber may be produced by, for example, an electrospinning method, a melt spinning method, a melt electrospinning method, a spunbond method (melt blow method), a wet method, or a spunlace method.
  • the fiber obtained by the electrospinning method has a small fiber diameter.
  • a porous resin sheet having a high porosity, a high specific surface area, and high piezoelectricity can be obtained.
  • a spinning solution containing a polymer and, if necessary, a solvent is used.
  • a polymer may be used individually by 1 type and may use 2 or more types.
  • the ratio of the polymer contained in the spinning solution may be, for example, 5 to 100 [wt%], preferably 5 to 80 [wt%], more preferably 10 to 70 [wt%].
  • the solvent is not limited as long as it can dissolve or disperse the polymer.
  • the solvent include water, dimethylacetamide, dimethylformamide, tetrahydrofuran, methylpyrrolidone, xylene, acetone, chloroform, ethylbenzene, cyclohexane, benzene, sulfolane, methanol, ethanol, phenol, pyridine, propylene carbonate, acetonitrile, trichloroethane, hexafluoroisopropanol, Any of diethyl ether may be used. These solvents may be used alone or in a combination of two or more.
  • the solvent contained in the spinning solution may be, for example, 0 to 90 [wt%], preferably 10 to 90 [wt%], more preferably 20 to 80 [wt%].
  • the spinning solution may contain additives such as an inorganic filler other than a polymer, a surfactant, a dispersant, a charge adjusting agent, a functional particle, an adhesive, a viscosity adjusting agent, and a fiber forming agent.
  • An additive may be used individually by 1 type and 2 or more types may be sufficient as it.
  • the solubility of the polymer in the solvent is low, for example, when the polymer is PTFE and the solvent is water, one or more fiber forming agents are used to keep the polymer in a fiber shape during spinning. It is preferable to contain.
  • a polymer having high solubility in a solvent is preferable.
  • the fiber forming agent include polyethylene oxide, polyethylene glycol, dextran, alginic acid, chitosan, starch, polyvinyl pyrrolidone, polyacrylic acid, polymethacrylic acid, polyacrylamide, cellulose, and polyvinyl alcohol.
  • the amount of the fiber-forming agent used may be, for example, 0.1 to 15% by weight, preferably 1 to 10% by weight in the spinning solution, although it depends on the viscosity of the solvent and the solubility in the solvent.
  • the spinning solution may be produced by mixing a polymer, a solvent, and if necessary, an additive by a known method. If the polymer is PTFE, the spinning solution contains PTFE in an amount of 30 to 70 [wt%], preferably 35 to 60 [wt%], and a fiber forming agent in an amount of 0.1 to 10 [wt%], preferably 1 to A spinning solution containing 7% by weight and a total of 100% by weight of solvent is preferred.
  • the applied voltage at the time of electrospinning is preferably 1 to 100 [kV], more preferably 5 to 50 [kV], and still more preferably 10 to 40 [kV].
  • the tip diameter (outer diameter) of the spinning nozzle used for electrospinning is preferably 0.1 to 2.0 [mm], more preferably 0.2 to 1.6 [mm].
  • the applied voltage is preferably 10 to 50 [kV], more preferably 10 to 40 [kV].
  • the tip diameter (outer diameter) of the spinning nozzle is preferably 0.3 to 1.6 [mm].
  • an electrospinning method may be used to simultaneously perform a step of producing fibers and a step of collecting fibers into a sheet to form a nonwoven fabric, or a step of producing fibers. Then, the process of accumulating the said fiber in a sheet form by a wet method and forming a nonwoven fabric may be performed.
  • a method may be used in which an aqueous dispersion containing fibers is used, and the fibers are deposited (accumulated) on a mesh and formed into a sheet (paper making).
  • the amount of fiber used in this wet method is preferably 0.1 to 10 [wt%], more preferably 0.1 to 5 [wt%] based on the total amount of the aqueous dispersion. If the fiber is used within this range, water can be efficiently used in the process of depositing the fiber, and the fiber is well dispersed and a uniform wet nonwoven fabric can be obtained.
  • the aqueous dispersion is composed of a dispersing agent or an oil agent composed of a cationic, anionic or nonionic surfactant, an antifoaming agent or the like for suppressing the generation of bubbles, respectively. Seeds or two or more may be added.
  • the method for manufacturing a woven fabric using fibers may include a fiber manufacturing step and a woven fabric forming step of weaving the fibers obtained in this step into a sheet.
  • a known weaving method may be used as a method for weaving the fiber into a sheet. Examples of the weaving method include water jet loom, air jet loom, and rapier room.
  • the non-woven fabric or woven fabric may be heat-treated usually under conditions of 200 to 390 [° C.] and 30 to 300 [min]. By performing this heat treatment, the solvent, fiber forming agent, etc. remaining on the nonwoven fabric or woven fabric can be removed.
  • a method for producing a nonwoven fabric As an example of a method for producing a nonwoven fabric, a case in which a production process of fibers made of PTFE by an electrospinning method is included is illustrated.
  • a method for producing a nonwoven fabric made of PTFE fiber a known production method can be adopted, and examples thereof include a method described in JP-T-2012-515850.
  • This production method includes a step of providing a spinning solution containing PTFE, a fiber forming agent, and a solvent and having a viscosity of at least 50,000 [cP], and spinning the spinning solution from a nozzle to form a fiber by electrostatic traction.
  • a step of collecting the fibers on a collector e.g., a take-up spool
  • a collector e.g., a take-up spool
  • firing the precursor to remove the solvent and fiber-forming agent to form a nonwoven fabric made of PTFE fibers. Steps are included.
  • the basis weight of the nonwoven fabric and the woven fabric is preferably 100 [g / m2] or less, more preferably 0.1 to 50 [g / m2], and still more preferably 0.1 to 20 [g / m2].
  • the basis weight tends to increase by increasing the spinning time and increasing the number of spinning nozzles.
  • Nonwoven fabrics and woven fabrics have fibers accumulated or woven in sheet form.
  • Such a non-woven fabric and a woven fabric may be either a single layer or two or more layers having different materials and fiber diameters.
  • the porous resin sheet is preferably subjected to polarization treatment. If the polarization treatment is performed, electric charge can be injected into the sheet, and the electric charge is concentrated in the pores in the porous resin sheet to induce polarization. In the internally polarized sheet, the charge can be taken out from the front and back surfaces of the sheet by a compressive load applied in the thickness direction of the sheet. That is, such charges cause charge transfer to the external load (electric circuit), and an electromotive force is obtained. This causes a potential difference, that is, a voltage.
  • polarization treatment method a known method may be used.
  • a corona discharge treatment may be used in addition to a DC voltage or AC voltage application treatment.
  • a high voltage power source and an electrode device may be used.
  • the discharge conditions are appropriately selected according to the material and thickness of the porous resin sheet.
  • the preferred treatment condition is a voltage of ⁇ 0.1 to ⁇ 100 [kV]. More preferably, it is -1 to -20 [kV], the current is 0.1 to 100 [mA], more preferably 1 to 80 [mA], and the distance between the electrodes is 0.1 to 100 [cm], more preferably
  • the applied voltage may be 1 to 10 [cm], and the applied voltage may be 0.01 to 10.0 [MV / m], more preferably 0.5 to 2.0 [MV / m].
  • the porous resin sheet itself may be polarized.
  • the piezoelectric layer is a laminate of, for example, a porous resin sheet and an insulating layer, the laminate is formed. After that, it is preferable to perform polarization treatment after the insulating layers are stacked.
  • the layer laminated on the porous resin sheet plays a role of preventing the electric charge held in the porous resin sheet by the polarization treatment from being attenuated by being electrically connected to the external environment. This contributes to high sensitivity of vibration detection. Moreover, it exists in the tendency which can form the new interface which can hold
  • the vibrating body 8 may include a machine, a ground, a building, a vehicle, a ship, an aircraft, and the like including piping, rotating system parts, and the like.
  • the piping may include, for example, water piping, gas piping, petrochemical plant piping, heat exchanger piping, fuel piping, hydraulic / pneumatic piping, chemical solution piping, food plant piping, and the like.
  • the rotating system component may include a pump, a compressor, a motor, an engine, a bearing, a turbine, a wheel, or the like that generates vibration due to a rotating operation.
  • the vibration sensor 2 is applied to pipe vibration detection, abnormal vibration due to leakage of fluid in the pipe can be detected. If the vibration sensor 2 is applied to the detection of the rotational vibration of the rotating system component, the rotation abnormality can be detected from the vibration.
  • the surface material of the vibrating body 8 may be any of metal, ceramics, rubber, resin, metal material, inorganic material, polymer material, and the like.
  • the surface state of the vibrating body 8 may be any of a flat surface, a curved surface such as a cylinder or a sphere, and an uneven surface.
  • the vibration absorber 10 is installed on the vibration suppression surface portion 6-2 side of the piezoelectric layer 4 to absorb vibrations that enter the vibration suppression surface portion 6-2 from the vibration body 8, and vibration on the vibration suppression surface portion 6-2 side. It is a means for suppressing the vibration and may be formed of a vibration-proof material.
  • the vibration transmissibility of the vibration absorber 10 is preferably 1 or less, and more preferably 0.5 or less.
  • the vibration transmissibility is, for example, a value measured by an acceleration sensor for the vibration of the vibration body 8 with the vibration absorber 10 interposed therebetween, and a value measured for the vibration of the vibration body 8 by the acceleration sensor without the vibration absorption body 10 interposed. Is V2, the ratio V1 / V2 is obtained.
  • the loss coefficient of the vibration absorber is preferably 0.2 or more, more preferably 0.3 or more, as a value according to JIS K 7244-1.
  • the vibration absorber 10 is, for example, an acrylic, urethane, or silicon-based gel, a natural rubber, a synthetic rubber such as butyl rubber or silicone rubber, an elastomer, polypropylene, polyethylene, polycarbonate, a resin foam, a synthetic fiber, Any of woven fabrics and nonwoven fabrics made of fiber materials such as semi-synthetic fibers, regenerated fibers, and natural fibers may be used.
  • a gel is preferable. Silicon-based gels are preferable for vibration measurement near 100 [° C.] or higher than 100 [° C.].
  • the vibration absorber 10 is one of vibration absorbing materials such as a layer made of gel, a layer made of natural rubber, a layer made of synthetic rubber, a layer made of elastomer, a resin foam, a woven fabric or a non-woven fabric made of a fiber material. Further, a mixed layer or a synthetic layer containing two or more selected from these vibration absorbing materials may be used.
  • the thickness of the vibration absorber 10 may be appropriately selected depending on the application, and may be such that vibrations entering the piezoelectric layer 4 from the vibration body 8 can be absorbed, but preferably 0.01 to 10 [mm]. In order to obtain a light and small vibration sensor 2, if the thickness of the vibration absorber 10 is 0.1 to 2 [mm], a vibration absorbing function can be obtained.
  • the electrode pair 12 includes at least a pair of electrodes 12a and 12b.
  • Each electrode 12a, 12b may be an electrode layer.
  • the constituent material of the electrode layer may be any of metal (alloy), metal oxide metal sulfide, conductive carbide, conductive polymer, and combinations thereof.
  • metals alloys
  • metal oxides metal oxides
  • metal sulfides lithium, beryllium, magnesium, calcium, strontium, barium, boron, aluminum, gallium, indium, antimony, tin, silver, gold, copper, nickel, palladium, platinum , Chromium, molybdenum tungsten, manganese, cobalt, alloys thereof, oxides thereof, composite oxides thereof, sulfides thereof, indium tin oxide (ITO), zinc oxide (ZnO), silver, etc. are suitable It is.
  • the conductive carbide includes carbon black, graphite, activated carbon, carbon fiber, single wall carbon nanotube (SWCNT), double wall carbon nanotube (DWCNT), multi-wall carbon nanotube (MWCNT), carbon nanosheet (graphene sheet), and the like.
  • Examples of the conductive polymer include poly (ethylene-3,4-dioxythiophene), polyaniline derivatives, polypyrrole derivatives, and the like.
  • the piezoelectric layer 4 is sputtered on the front and back surfaces of the piezoelectric layer 4 subjected to polarization treatment to form an electrode layer having a thickness of about 0.5 [ ⁇ m], and the electrodes 12a and 12b are formed using this electrode layer. Formed.
  • the electrode 12a is an electrode layer on the vibration input surface portion 6-1
  • the electrode 12b is an electrode layer on the vibration suppression surface portion 6-2.
  • the vibration transmission body 16 is installed between the vibration input surface portion 6-1 of the piezoelectric layer 4 and the vibration body 8, and inputs the vibration of the vibration body 8 to the vibration input surface portion 6-1. That is, as long as a vibration transmission function is obtained between the vibration body 8 and the vibration input surface portion 6-1 of the piezoelectric layer 4, the vibration transmission body 16 is not limited in size and shape. As shown in FIG. 2, the vibration transmission body 16 may include a space 18, but may be in close contact with the piezoelectric layer 4 and the vibration absorber 8.
  • the vibration transmitting body 16 may hold the vibration input surface portion 6-1 of the piezoelectric layer 4 and the surface of the vibrating body 8 in parallel or substantially in parallel. As a result, the vibration of the vibrating body 8 can be input to the vibration input surface 6-1 and the vibration detection sensitivity can be improved.
  • the vibration transmitting body 16 may be made of a material that can efficiently transmit the vibration to the vibration input surface portion 6-1 of the piezoelectric layer 4 without attenuating the vibration of the vibrating body 8.
  • the impedance ratio Z1 / Z2 is preferably 0.2 to 5.0, more preferably 0. It is desirable that the material be in the range of 4 to 3.0, more preferably 0.7 to 1.3.
  • the material of the vibration transmitting body 16 is preferably a material with low vibration damping, that is, a material having high rigidity, and more preferably the same as the surface material of the vibrating body 8.
  • a material with low vibration damping that is, a material having high rigidity
  • An impedance matching layer may be interposed between the vibration transmission body 16 and the vibration body 8 so that the acoustic impedances of the both may be matched. Thereby, the vibration of the vibrating body 8 can be efficiently transmitted to the vibration input surface portion 6-1 of the piezoelectric layer 4, and the sensitivity of vibration detection can be increased.
  • the vibration transmitting body 16 is preferably maintained in close contact with the vibrating body 8, and may be fixed by any of adhesive fixing, magnetic fixing, mechanical fixing, or a combination thereof. Thereby, the vibration of the vibrating body 8 is transmitted to the vibration transmitting body 16 and can be input to the vibration input surface portion 6-1 of the piezoelectric layer 4.
  • the vibration sensor 2 capable of detecting 1 to 20 [kHz]) can be configured.
  • the vibration sensor 2 can be formed as thin as about 0.15 [mm], can correspond to the vibrating body 8 having various shapes, and can detect vibration.
  • the piezoelectric layer 4 is exposed to a high temperature and high humidity environment (for example, 200 [h] at a temperature of 200 [° C.], a temperature of 85 [° C.] and a humidity of 85 [° C. %] RH / 200 [h]), the piezoelectric performance can be maintained.
  • a high temperature and high humidity environment for example, 200 [h] at a temperature of 200 [° C.], a temperature of 85 [° C.] and a humidity of 85 [° C. %] RH / 200 [h]
  • the piezoelectric layer 4 does not have pyroelectricity and does not generate noise due to temperature change. Therefore, no temperature correction is required for the contact with the heat source as the vibrating body 8, and it has excellent chemical resistance and weather resistance. .
  • the piezoelectric layer 4 can be formed in an arbitrary size and shape from 5 [mm] square to 300 [mm] square, and the shape can be formed not only in a square or a rectangle, but also in an arbitrary shape such as a band shape or a round shape, The surface distribution of the detected vibration can also be detected.
  • the electrode pair 12 has a high degree of freedom in designing the shape of the electrode pair 12 such as being formed in an arbitrary electrode pattern in combination with the vibration input surface portion 6-1 of the piezoelectric layer 4, and the electrodes 12a and 12b of the electrode pair 12 vibrate. Can be measured.
  • the vibration sensor 2 can be made of a material having high environmental resistance such as heat resistance, and the influence of the vibration body 8 and its installation environment is low, and vibration detection with high reliability can be performed.
  • the piezoelectric layer 4, the vibration absorber 10, and the vibration transmission body 16 have flexibility, and these laminated bodies are also flexible and can be bent, and shape followability to the vibration body 8 can be obtained. Since the vibration sensor 2 can be installed in close contact with the vibrating body 8, the sensitivity of vibration detection is increased, and stable detection sensitivity can be obtained.
  • the sensitivity of vibration detection of the piezoelectric layer 4 is high, and vibration detection necessary for vibration monitoring can be performed from the vibration body 8 even with the vibration input surface portion 6-1 having a small area.
  • the vibration sensor 2 can be reduced in size and weight, it can be installed in any place, such as a narrow part on the vibration body 8 side, and the vibration sensor 2 will not drop off even when subjected to vibration. , Stable vibration detection can be performed.
  • FIG. 5 shows the vibration sensor according to the first embodiment.
  • This vibration sensor 2 is an example in which the vibration sensor 2 of FIG. 2 is embodied.
  • the vibration sensor 2 includes a sensor body 20, a lead 22, and a connector 24.
  • the sensor body 20 is provided with a sensor unit 14.
  • the lead portion 22 is formed to be narrower than the width of the sensor main body portion 20, and the electrode pair 12 is drawn out.
  • the cover member 26 that integrally covers the sensor main body 20 and the lead 22 is an example of the vibration transmission body 16 described above.
  • a metallic film such as an aluminum vapor-deposited insulating film may be used. If a metallic film is used, an electromagnetic shielding function can be obtained together with a vibration transmission function.
  • a connector portion 24 is attached to an end portion of the lead portion 22, and the connector portion 24 includes a connector housing 27 and a plurality of connector terminals 28 a and 28 b.
  • the connector part 24 can be inserted into and removed from the connector part of the external circuit, can connect the external circuit to the electrodes 12a and 12b through the connector terminals 28a and 28b, and can supply sensor output to the external circuit.
  • FIG. 6A shows a cross section taken along line VIA-VIA in FIG.
  • the vibration sensor 2 is provided with a base member 30.
  • the base member 30 includes a base material layer 30-1, an adhesive layer 30-2, and a release layer 30-3.
  • the base material layer 30-1 is a support member for supporting the sensor unit 14 and the cover member 26 and the vibration transmitting body 16, and has electromagnetic shielding properties in addition to flexibility required for the support member.
  • the adhesive layer 30-2 is an attaching / detaching means for detachably fixing the vibration sensor 2 to the vibrating body 8, and has an adhesive force.
  • a silicon-based adhesive layer may be used for the adhesive layer 30-2. In the silicon-based adhesive layer, heat resistance at a continuous use temperature of 180 [° C.] is obtained.
  • the release layer 30-3 is a protective layer for the adhesive layer 30-2, and the adhesive layer 30-2 can be exposed if it is peeled off as necessary.
  • an aluminum tape having an adhesive layer and release paper may be used as a flexible metal tape.
  • the vibration absorber 10 is installed on the base member 30.
  • the vibration absorber 10 is formed of a vibration isolating material such as ⁇ GEL, for example, a rectangular parallelepiped. ⁇ GEL has heat resistance at a continuous use temperature of 100 [° C.].
  • the vibration absorber 10 is fixed to the upper surface of the base material layer 30-1 of the base member 30 with an adhesive 32-1.
  • an acrylic adhesive can be used as the adhesive 32-1. With this acrylic adhesive material, heat resistance at a continuous use temperature of 150 [° C.] is obtained.
  • a piezoelectric sheet 34 is installed on the upper surface of the vibration absorber 10.
  • the piezoelectric sheet 34 is an example of the piezoelectric layer 4 described above, and the upper surface side is set to the vibration input surface portion 6-1 and the lower surface side is set to the vibration suppression surface portion 6-2.
  • the piezoelectric sheet 34 is, for example, a laminated body having a three-layer structure of a PFA layer, a PTEE nonwoven fabric, and a PFA layer, and is stabilized by a thermal annealing treatment at 100 [° C.], for example, 40 hours.
  • the vibration input surface 6-1 is provided with an electrode 12a
  • the vibration suppression surface 6-2 is provided with an electrode 12b.
  • a conductor such as a highly conductive metal foil is used, and for example, an aluminum foil is used.
  • Aluminum foil has a thermal stability with a melting point of about 316 [° C.].
  • the electrodes 12a and 12b are electrically insulated by an insulating material 36.
  • an insulating sheet is used as the insulating material 36.
  • This insulating sheet may be formed of polyimide, for example.
  • the cover member 26 described above is installed on the exposed surfaces of the vibration absorber 10, the piezoelectric sheet 34, the electrodes 12a and 12b, and the base member 30, and the cover member 26 is fixed by an adhesive 32-2.
  • an aluminum-deposited PET film may be used as the cover member 26 as a metal film.
  • Aluminum vapor-deposited PET film has a shielding function as well as heat resistance at a continuous use temperature of 105 [° C.].
  • an acrylic adhesive can be used as the adhesive 32-2.
  • the thickness of the piezoelectric sheet 34 is t1
  • the thickness of the vibration absorber 10 is t2
  • FIG. 6B shows an example of the piezoelectric sheet 34, the electrodes 12a and 12b, and the insulating material 36.
  • the piezoelectric sheet 34 is formed in a square shape, for example.
  • the electrode 12a is provided with an electrode main body 12a-1 facing the vibration input surface 6-1.
  • the electrode main body 12a-1 is provided with a lead-out portion 12a-2.
  • the electrode 12b has a shape similar to that of the electrode 12a, and is provided with an electrode main body portion 12b-1 facing the vibration suppressing surface portion 6-2.
  • the electrode main body portion 12b-1 is provided with a lead-out portion 12b-2. It is done.
  • An insulating material 36 is installed between the electrodes 12a and 12b. Accordingly, the insulating body 36 insulates between the electrode main body portions 12a-1 and 12b-1 and between the lead portions 12a-2 and 12b-2.
  • the peeling layer 30-3 is peeled off from the adhesive layer 30-2 and exposed, and the vibration sensor 2 is fixed to the vibrating body 8 by the adhesive layer 30-2. Vibration detection can be performed by integrating them.
  • the vibration of the vibrating body 8 is transmitted to and input to the vibration input surface portion 6-1 of the piezoelectric sheet 34 using the base member 30 and the cover member 26 as the vibration transmitting body 16.
  • a piezoelectric output is obtained at the electrode pair 12 of the piezoelectric sheet 34. Therefore, the sensor output of the vibration sensor 2 can be taken out from the connector portion 24 and guided to an external circuit or the like.
  • FIG. 8 shows a vibration sensor according to the second embodiment.
  • the vibration sensor 2 according to the second embodiment includes a belt-like sensor main body 20.
  • the sensor body 20 is, for example, a laminated body having flexibility of the cover member 26 and the base member 30 described above. Since the sensor body 20 has flexibility, the vibration sensor 2 has a shape followability that can correspond to an arbitrary shape of a member to be attached such as the vibrating body 8.
  • the sensor body 20 is provided with a strip-shaped piezoelectric sheet 34.
  • the piezoelectric sheet 34 includes a plurality of electrode pairs 12-1, 12-2, 12-3, 12-4, and 12-5 as an example of pattern electrodes having an arbitrary electrode pattern.
  • Each of the electrode pairs 12-1, 12-2, 12-3, 12-4, and 12-5 is provided with the electrodes 12a and 12b described above.
  • Each of the electrodes 12 a and 12 b is connected to a connector portion 24 provided at the edge of the sensor main body portion 20.
  • the connector portion 24 has connector terminal pairs 28-1, 28-2, 28-3, 28-4 individually connected to the electrode pairs 12-1, 12-2, 12-3, 12-4, 12-5. , 28-5.
  • Each of the connector terminal pairs 28-1, 28-2, 28-3, 28-4, 28-5 includes a connector terminal 28a connected to the electrode 12a and a connector terminal 28b connected to the electrode 12b.
  • the internal structure of the sensor body 20 is the same as that of the first embodiment, the description thereof is omitted.
  • the sensor body 20 is provided with a buckle 38 and a plurality of locking holes 40 as fixing means.
  • the buckle 38 is provided with an engagement ring 38-1 and a locking claw 38-2.
  • the vibration sensor 2 Due to the flexibility of the heel sensor main body 20, the vibration sensor 2 can have shape followability, can be fixed following the form of the vibrating body 8, and the degree of freedom of fixation can be expanded.
  • the bag buckle 38 it can be attached and detached arbitrarily, and the deterioration of the fixing function can be prevented.
  • the sensor body 20 is wound around the pipe 42, and the end of the sensor body 20 is attached to the engagement ring 38-1 of the buckle 38.
  • the locking claw 38-2 can be locked in an arbitrary locking hole 40 and fixed. If the most suitable locking hole 40 is selected from the plurality of locking holes 40, the sensor main body 20 can be maintained at an appropriate tension, and the sensor main body 20 can be fixed to the pipe 42 in close contact.
  • vibrations can be individually detected with high accuracy and high sensitivity in the sensor main body 20, and each of the electrode pairs 12-1, 12-2, 12-3 can be detected. , 12-4, 12-5, the piezoelectric output can be taken out.
  • the electrode pairs 12-1, 12-2, 12-3, 12-4, and 12-5 arranged in the sensor main body 20 flow through the pipe 42 as shown in FIG.
  • the vibrations of the X axis and Y axis perpendicular to the flow direction 44 can be detected.
  • the angle ⁇ obtained by dividing the angle range of 180 degrees into four by the electrode pairs 12-1, 12-2, 12-3, 12-4, and 12-5 is 45 °, so 0 °, 45 ° , 90 °, 135 °, and 180 ° can be detected at the same time.
  • Sensor outputs obtained by this vibration detection can be individually taken out from the connector terminal pairs 28-1, 28-2, 28-3, 28-4, 28-5, and the respective sensor outputs can be compared.
  • a single piezoelectric sheet 34 is provided, and a plurality of electrode pairs 12-1, 12-2, 12-3, 12-4, 12-5 are provided by a single piezoelectric sheet 34.
  • the present invention is not limited to this.
  • a configuration in which a plurality of piezoelectric sheets 34 are provided and electrode pairs 12-1, 12-2, 12-3, 12-4, and 12-5 are individually installed to perform multipoint detection can be similarly applied at a large number of positions. Vibration can be detected at the same time.
  • This vibration sensor 2 can be easily fixed by winding around the measurement location, etc., and can handle multi-point measurement in the circumferential direction of pipes and irregular shapes of thin tubes, eliminating the need for dedicated studs at each observation point.
  • the convenience of vibration measurement is high and contributes to the construction of a rapid vibration measurement system.
  • the buckle 38 is provided as a fixing means for the belt-like vibration sensor 2, but an adhesive layer may be provided in place of the buckle 38 and adhered and fixed to the vibrating body 8. If the degree of adhesion is high, the detection sensitivity and detection accuracy of vibration detection can be increased.
  • a plurality of electrode pairs 12-1, 12-2, 12-3, 12-4, and 12-5 having the same shape are provided at regular intervals.
  • 1, 12-2, 12-3, 12-4, and 12-5 such as the shape of the piezoelectric sheet 34 and the arrangement of the electrode pairs 12-1, 12-2, 12-3, 12-4, and 12-5 It is possible to cope with arbitrary multipoint measurement and irregular measurement positions by using arbitrary piezoelectric sheets 34 and electrode pairs 12 such as different electrode shapes.
  • FIG. 10A shows the vibration sensor according to the third embodiment.
  • FIG. 10A shows the piezoelectric sheet 34 with the exterior member removed.
  • the vibration sensor 2 of the third embodiment is provided with a rectangular sensor body 20.
  • the sensor main body 20 may be a laminate having the flexibility of the cover member 26 and the base member 30 described above. Therefore, the vibration sensor 2 including the sensor main body 20 can be bent at an angle of 90 degrees or less.
  • the sensor body 20 is provided with a rectangular piezoelectric sheet 34.
  • the piezoelectric sheet 34 includes electrode pairs 12-1 and 12-2 as a plurality of electrode pairs.
  • Each of the electrode pairs 12-1 and 12-2 includes the electrodes 12a and 12b described above, and is connected to the connector portion 24.
  • the connector part 24 is provided at the edge of the area on the electrode pair 12-1 side of the sensor body 20.
  • the connector section 24 includes a plurality of connector terminal pairs 28-1 and 28-2 that are individually connected to the electrode pairs 12-1 and 12-2.
  • a bent portion 46 is set as a recommended bending position between the electrode pair 12-1 and 12-2.
  • the internal structure of the sensor body 20 is the same as that of the first embodiment, the description thereof is omitted.
  • the heel sensor main body 20 can be bent at a desired angle with the bent portion 46 and can detect vibrations on the two surfaces of the vibrating body 8.
  • the folded portion 46 can be bent by the sensor body 20 between the electrode pairs 12-1 and 12-2, the electrode pairs 12-1 and 12-2 are not deformed.
  • a detection area surface on the electrode pair 12-1 side is set on the peripheral surface portion 52 of the disk portion 50 rotated by the rotating shaft 48, and the electrode is formed by bending the electrode portion 12-1 at a right angle. If the detection area surface of the pair 12-2 is installed on the disk surface portion 54 of the disk 50, the detection area surface can be displaced by 90 degrees. In this example, vibration detection can be performed at two points in the X-axis direction and the Z-axis direction of the rotating disk.
  • FIG. 11A shows the vibration sensor 2 according to the fourth embodiment.
  • the sensor unit 14 the communication unit 56, the antenna 58, and the power supply unit 60 are provided in the sensor main body 20 described above. Since the internal configuration of the sensor unit 14 has already been described, the description thereof is omitted.
  • the sensor unit 14 may include the vibration transmission body 16 described above.
  • the communication unit 56 receives a piezoelectric output as a sensor output from the electrode pair 12 of the sensor unit 14 and generates a radio signal having a specific frequency.
  • This radio signal is, for example, a WiFi signal, and it is sufficient to oscillate a carrier signal having a constant frequency and modulate it with the power generation output.
  • a transmission signal of the communication unit 56 is transmitted from the antenna 58.
  • the power supply unit 60 includes, for example, a battery and supplies power to the communication unit 56.
  • a vibration sensor 2 As shown in FIG. 11B, it can be installed in a device 62 such as a pump to detect vibration, and the detection result can be transmitted as a wireless signal such as WiFi.
  • the wireless signal may be received by a dedicated communication device, or may be received by a personal computer (PC) 64 or a portable terminal 66 having a communication function, and detection information of the vibration sensor 2 may be received by the display 64 of the PC 64 or the portable terminal 66. It is possible to monitor and display the monitoring result.
  • PC personal computer
  • FIG. 12 shows a processing procedure of state monitoring processing using vibration detection. This processing procedure is an example of a processing procedure realized by the vibration detection program.
  • the sensor output can be obtained from the vibration sensor 2 at regular intervals or at regular time intervals.
  • the PC 64 or the portable terminal 66 and the vibration sensor 2 are connected wirelessly, and the sensor output is captured from the vibration sensor 2 (S101).
  • the PC 64 and the mobile terminal 66 perform a vibration analysis process using the sensor output (S102), and determine whether the vibration state is abnormal (S103). If there is no abnormality in the detected vibration (NO in S103), the state is displayed on the display 68 (S104), and the process returns to S101.
  • the communication unit 56 can perform automatic measurement and remote measurement of the vibration of the device 62 through a wireless signal, and avoid entering a dangerous place for vibration detection. It is possible to perform vibration detection and vibration monitoring with high convenience.
  • the vibration sensor 2 Since the vibration sensor 2 according to the fourth embodiment outputs the sensor output wirelessly, it is not necessary to take out the sensor output by wire, and it can be installed on a rotating body such as a rotating shaft or a rotating disk to detect vibration. .
  • FIG. 13A shows a vibration detection apparatus according to the fifth embodiment.
  • the vibration detection device 70 includes a vibration sensor 2, an information processing unit 72, and a monitor 74.
  • the vibration sensor 2 may be any vibration sensor 2 according to any one of the first to fourth embodiments.
  • the information processing unit 72 includes a connector 76 and is connected to the connector unit 24 on the vibration sensor 2 side using the connector 76.
  • the monitor 74 is an example of information presenting means, and presents the processing result of the information processing unit 72 as character information or graphic information.
  • the information processing unit 72 may be configured by a computer, and includes a processor 78, a memory unit 80, an input / output unit (I / O) 82, and the like as shown in FIG. 13B.
  • the information processing unit 72 may use the above-described PC 64.
  • the processor 78 executes a vibration detection program stored in the memory unit 80, and executes processes such as sensor output capture, vibration analysis, and vibration state determination.
  • the memory unit 80 may include a storage medium such as a ROM (Read-Only Memory) or a RAM (Random-Access Memory).
  • a database (DB) 84 that stores detected vibrations and comparison information is constructed.
  • the I / O 82 captures the sensor output of the vibration sensor 2, but includes a keyboard and a touch sensor, and may input necessary selection information using a dialog displayed on the monitor 74.
  • the information processing unit 72 can realize a sensor output capturing function, an analysis function, a state determination function, a display function, an alert function, and the like by executing the vibration detection program. That is, the processing procedure (FIG. 12) described above can be executed in the vibration detecting device 70 using the information processing unit 72, and a status display, an abnormality notification, etc. can be displayed on the monitor 74. An alarm device may be used for abnormality notification.
  • A1 is a detection waveform
  • A2 is a comparison waveform.
  • the comparison waveform A2 is assumed to be a normal waveform, for example, the disturbance of the detection waveform A1 indicates an abnormal state. What is necessary is just to judge whether it is normal or abnormal according to the level.
  • FIG. 14B shows the fast Fourier transform (FFT) analysis information of the vibration waveform with the frequency f [Hz] on the horizontal axis and the power on the vertical axis.
  • B1 is analysis information based on the detected vibration
  • B2 is comparison information.
  • the comparison information B2 is normal information, for example, the frequency distribution included in the analysis information B1 indicates an abnormal state. What is necessary is just to judge whether it is normal or abnormal according to the frequency component contained.
  • the sensor output is obtained by waveform analysis or frequency analysis by utilizing the characteristics of the vibration sensor 2 described in the embodiment or the first to fourth embodiments.
  • the vibration characteristics and abnormal phenomena can be monitored and judged.
  • FIG. 15 shows a vibration detection system according to the sixth embodiment.
  • This vibration detection system 86 includes a plurality of vibration sensors 2-1, 2-2,..., 2-N, and performs a plurality of vibration detections simultaneously.
  • the system 88 accompanied by vibrations of vehicles, ships, airplanes, and the like includes, for example, a plurality of devices 62 such as a diesel engine 90 and a turbine 92.
  • vibration sensors 2-1, 2-2,..., 2-N may be individually installed in each part necessary for detection.
  • the vibration detection system 86 includes a plurality of vibration sensors 2-1, 2-2,..., 2-N, a data accumulation unit 94, an information processing unit 96, and a monitor 98.
  • the data accumulation unit 94 is, for example, a data logger, and the information processing unit 96 may be configured by a computer.
  • the information processing unit 96 and the data accumulation unit 94 may be connected by wire or wireless to exchange data.
  • This information processing unit 96 may be configured for information processing shown in FIG. 13B, for example.
  • the monitor 98 is an example of information presentation means, and may be provided as an external device of the vibration detection system 86.
  • the sensor output of each vibration sensor 2-1, 2-2... 2-N is acquired by the data accumulation unit 94, and the accumulated data of this data accumulation unit 94 is input to the information processing unit 96.
  • the information processing unit 96 realizes a data capture function, a data analysis function, a vibration determination function, and the like by executing the vibration detection program described above, and causes the monitor 98 to present an analysis result and a determination result as an information presentation function.
  • the monitor 98 may display a vibration waveform, a frequency component, a normal state or an abnormal state, an alert, and the like.
  • the vibration detection system 86 includes a communication unit 100, and provides the processing result of the information processing unit 96 to an external device separately from the information presentation of the monitor 98, and provides analysis information and performs analysis or information presentation on the external device side. May be.
  • the sensor outputs of the plurality of vibration sensors 2-1, 2-2,..., 2-N are collected and the vibration phenomenon occurring in the system 88 is grasped.
  • the whole system 88 and the state of each part can be grasped, and the site where the abnormality has occurred can be easily identified.
  • FIG. 16 shows a vibration detection system according to the seventh embodiment.
  • a single device 62 includes a plurality of vibration sensors 2-1, 2-2,..., 2-N.
  • the same parts as those in FIG. 15 are denoted by the same reference numerals, and the description thereof is omitted.
  • the device 62 is provided with a pump 106 and a motor 108 on a common base 104.
  • the rotation output of the motor 108 is transmitted to the pump 106 through the rotating shaft 110, and the pump 106 includes a bearing portion 112, a pump function portion 114, and a piping portion 116.
  • a plurality of vibration sensors 2-1, 2-2,..., 2-N may be installed at locations where vibration is to be detected, and vibration detection of each part may be performed simultaneously.
  • the device 62 includes a mechanical system, a fluid system, a structural system, and the like, and if the entire vibration mode is grasped, it is possible to investigate the vibration source, to early detect abnormal vibration caused by a plurality of factors, and to take countermeasures. .
  • the vibration mode can be grasped. It is essential to do.
  • suppressing the induction of pipe vibration and abnormal vibration means removing the causes of pressure drop, turbulent flow, cavitation, water hammer, etc. that would occur due to resonance of the fluid in the pipe. .
  • the continuation of abnormal vibration leads to damage or failure of the equipment including the device 62, and causes cracks in the welded part of the pipe, fluid leakage from the flange and valve, breakage of small-diameter pipes such as drain pipes and pressure gauge pipes. It will be.
  • the plurality of vibration sensors 2-1, 2-2,... 2 -N are, for example, vertically or horizontally connected to the drive part, the fluid inflow / outflow part, the small diameter pipe weld What is necessary is just to install by winding.
  • vibration information collected at the same time is used, the deterioration state of the device 66 can be monitored or confirmed, analysis and diagnosis can be facilitated, and the convenience of being able to easily identify the failure location can be improved.
  • the collected vibration information can be accumulated by creating a database or a form, which can be used for sudden accident prediction and maintenance planning.
  • FIG. 17 shows a vibration monitoring system according to the eighth embodiment.
  • This vibration monitoring system 118 is an example of the vibration detection system of the present invention.
  • the vibration monitoring system 118 includes a vibration collection unit 120 and a vibration monitoring / analysis unit 122.
  • the vibration collection unit 120 is installed in a remote plant, vehicle, ship, aircraft, or other transport equipment, moving object, or the like.
  • the vibration collection unit 120 includes a vibration detection unit 124 and a vibration processing unit 126.
  • the vibration detector 124 includes a plurality of vibration sensors 2-1, 2-2,..., 2-N. In this example, each vibration sensor 2-1, 2-2,. Communication units 100-1, 100-2... 100-N are provided. If the vibration sensors 2-1, 2-2,..., 2-N are vibration sensors 2 according to the fourth embodiment (FIG. 11), the communication units 100-1, 100-2,. It is unnecessary.
  • the vibration processing unit 126 includes a first communication unit 128-1, a second communication unit 128-2, an information processing unit 130, a storage unit 132, and a monitor 134.
  • the first communication unit 128-1 is controlled by the information processing unit 130 and wirelessly connected to the communication units 100-1, 100-2,... 100-N, and vibration sensors 2-1, 2-2,. Get 2-N sensor output.
  • the information processing unit 130 is configured by a computer, executes a vibration collection program stored in the storage unit 132, collects sensor outputs of the vibration sensors 2-1, 2-2,..., 2-N, and stores a DB 136 in the storage unit 132. To store.
  • the information processing unit 130 collects sensor outputs of the vibration sensors 2-1, 2-2,..., 2-N, performs local vibration determination, displays the result on the monitor 134, and uses the monitor 134. Vibration monitoring is possible.
  • the vibration information collected by the information processing unit 130 is notified from the second communication unit 128-2 to the vibration monitoring / analysis unit 122 through the public line network 138.
  • the vibration monitoring / analyzing unit 122 is installed on the management center side while the vibration collecting unit 120 is local, and monitors a transportation device such as a plant, a vehicle, a ship, and an aircraft at the management center. Vibration analysis can be performed and the result can be fed back to the information processing unit 130.
  • the vibration monitoring / analysis unit 122 includes a communication unit 140, an information processing unit 142, a storage unit 144, and a monitor 146.
  • the communication unit 140 is wirelessly connected to the second communication unit 128-2 of the vibration collection unit 120 through the public network 138 under the control of the information processing unit 142, and acquires vibration information from the vibration collection unit 120.
  • the information processing unit 142 stores the vibration information acquired from the vibration collecting unit 120 in the DB 148 in the storage unit 144, and monitors and analyzes the vibration information.
  • the processing result is displayed on the monitor 146 and presented, and the analysis result and the determination result are notified from the communication unit 140 to the vibration collecting unit 120.
  • vibration information is collected by vibration measurement in vehicles, ships, airplanes, buildings, plants, etc., and the operating state of the equipment is monitored, the operating state is viewed, performance analysis, combustion diagnosis Etc. can be viewed.
  • the management center can view vibration information at remote locations, monitor operation status and performance judgment results, and provide more detailed information. Analysis and determination are performed, the result is notified to the information processing unit 130 on the vibration collecting unit 120 side, and control of the devices on the vibration detecting unit 124 side can be supported.
  • the vibration sensor 2 of the embodiment includes the space portion 18, the space portion 18 may be removed or the vibration absorber 10 or the vibration transmission body 16 may be filled.
  • the vibration sensor 2 is used for vibration detection from the device 62, but it may be used for detection of ground or crust vibration or biological vibration.
  • the vibration absorber 10 is not limited to simple vibration absorption, but may be configured as an absorber having an absorption function of a specific frequency band or a specific frequency.
  • a vibration sensor can be realized using a piezoelectric layer such as a piezoelectric sheet that has high vibration detection sensitivity and stable sensitivity, and vibration detection of a device with vibration can be performed with high accuracy.
  • the vibration detection information can be used for equipment maintenance.
  • Vibration sensor 4 Piezoelectric layer 6-1 Vibration input surface 6-2 Vibration suppression surface 8 Vibration body 10 Vibration absorber 12, 12-1, 12-2, 12-3, 12-4, 12-5 Electrode pair 12a, 12b Electrode 12a-1, 12b-1 Electrode body part 12a-2, 12b-2 Drawer part 14 Sensor unit 16 Vibration transmitting body 18 Space part 20 Sensor body part 22 Lead part 24 Connector part SU Sensor unit 26 Cover member 27 Connector housing Body 28 Terminal pair 28a, 28b Connector terminal 30 Base member 30-1 Base material layer 30-2 Adhesive layer 30-3 Release layer 32-1 Adhesive material 32-2 Adhesive material 34 Piezoelectric sheet 36 Insulating material 38 Buckle 38-2 Stopper 38-1 Locking ring 40 Locking hole 42 Piping 44 Fluid 46 Bending part 48 Rotating shaft 50 Disk part 52 Peripheral surface part 54 Panel part 56 Communication part 58 Antenna 60 Power supply part 62 Equipment 64 PC 66 Mobile Terminal 68 Display 70 Vibration Detection Device 72 Information Processing Unit 74 Monitor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)

Abstract

Dans le procédé de détection de vibration, le capteur de vibration, le dispositif de détection de vibration, le programme de détection de vibration et le système de détection de vibration selon la présente invention : une partie de surface d'entrée de vibration et une partie de surface de suppression de vibration sont établies sur une couche piézoélectrique ; des vibrations d'un corps vibrant sont introduites dans la partie de surface d'entrée de vibration ; un corps d'absorption de vibration qui absorbe les vibrations du corps vibrant est installé pour supprimer les vibrations entrant dans la partie de surface de suppression de vibration ; et une sortie piézoélectrique est extraite d'une ou une pluralité de paires d'électrodes prenant en sandwich la couche piézoélectrique. De cette manière, il est possible d'obtenir une réduction supplémentaire de la taille et du poids, et d'effectuer une détection de vibration avec une sensibilité élevée et stable. En outre, un degré de liberté élevé d'installation sur un corps vibrant est obtenu, une détection de vibration stable peut être effectuée sans être affectée par une surface de détection de vibration du corps vibrant, et la fiabilité de détection de vibration peut être améliorée.
PCT/JP2017/015977 2016-04-22 2017-04-21 Procédé de détection de vibration, capteur de vibration, dispositif de détection de vibration, programme de détection de vibration et système de détection de vibration Ceased WO2017183708A1 (fr)

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CN111141381A (zh) * 2020-01-17 2020-05-12 西安探管者探测技术有限公司 压电振动传感器及拾音器
WO2020179731A1 (fr) * 2019-03-05 2020-09-10 株式会社バルカー Capteur de vibration
JPWO2020246233A1 (fr) * 2019-06-06 2020-12-10
US11255717B2 (en) 2019-05-31 2022-02-22 Kabushiki Kaisha Toshiba Vibration detecting arrangement for reducing resonant noise
US20220055457A1 (en) * 2020-08-20 2022-02-24 Denso International America, Inc. Olfaction sensor preservation systems and methods
JP2022065606A (ja) * 2020-10-15 2022-04-27 旭化成エンジニアリング株式会社 信号検出システム
CN115128296A (zh) * 2022-05-17 2022-09-30 广西大学 海洋环境监测设备
CN116429364A (zh) * 2023-06-13 2023-07-14 成都实时技术股份有限公司 用于信息处理板的试验震动设备
JP2023547713A (ja) * 2020-11-05 2023-11-13 上海艾為電子技術股▲ふん▼有限公司 振動装置及びその局所振動調整方法、電子機器
CN117484271A (zh) * 2023-11-28 2024-02-02 江苏集萃精密制造研究院有限公司 一种轻量化自动进给钻削装置及其控制方法
WO2025016610A1 (fr) * 2023-07-19 2025-01-23 Vega Grieshaber Kg Capteur de vibrations à couche de protection et procédé de fabrication d'un capteur de vibrations

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Publication number Priority date Publication date Assignee Title
WO2020179731A1 (fr) * 2019-03-05 2020-09-10 株式会社バルカー Capteur de vibration
US11255717B2 (en) 2019-05-31 2022-02-22 Kabushiki Kaisha Toshiba Vibration detecting arrangement for reducing resonant noise
JPWO2020246233A1 (fr) * 2019-06-06 2020-12-10
JP7644003B2 (ja) 2019-06-06 2025-03-11 株式会社 資生堂 測定装置、測定方法及び制御装置
CN111141381A (zh) * 2020-01-17 2020-05-12 西安探管者探测技术有限公司 压电振动传感器及拾音器
US11760170B2 (en) * 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US20220055457A1 (en) * 2020-08-20 2022-02-24 Denso International America, Inc. Olfaction sensor preservation systems and methods
JP2022065606A (ja) * 2020-10-15 2022-04-27 旭化成エンジニアリング株式会社 信号検出システム
JP7664732B2 (ja) 2020-10-15 2025-04-18 旭化成エンジニアリング株式会社 信号検出システム
JP2023547713A (ja) * 2020-11-05 2023-11-13 上海艾為電子技術股▲ふん▼有限公司 振動装置及びその局所振動調整方法、電子機器
CN115128296A (zh) * 2022-05-17 2022-09-30 广西大学 海洋环境监测设备
CN116429364A (zh) * 2023-06-13 2023-07-14 成都实时技术股份有限公司 用于信息处理板的试验震动设备
CN116429364B (zh) * 2023-06-13 2023-08-29 成都实时技术股份有限公司 用于信息处理板的试验震动设备
WO2025016610A1 (fr) * 2023-07-19 2025-01-23 Vega Grieshaber Kg Capteur de vibrations à couche de protection et procédé de fabrication d'un capteur de vibrations
CN117484271A (zh) * 2023-11-28 2024-02-02 江苏集萃精密制造研究院有限公司 一种轻量化自动进给钻削装置及其控制方法

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