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WO2017170744A1 - Élément optique, structure périodique, procédé de fabrication d'élément optique et procédé de fabrication de structure périodique - Google Patents

Élément optique, structure périodique, procédé de fabrication d'élément optique et procédé de fabrication de structure périodique Download PDF

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Publication number
WO2017170744A1
WO2017170744A1 PCT/JP2017/013021 JP2017013021W WO2017170744A1 WO 2017170744 A1 WO2017170744 A1 WO 2017170744A1 JP 2017013021 W JP2017013021 W JP 2017013021W WO 2017170744 A1 WO2017170744 A1 WO 2017170744A1
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WO
WIPO (PCT)
Prior art keywords
curable resin
surface layer
optical element
thickness
wall surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2017/013021
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English (en)
Japanese (ja)
Inventor
祐一 宮崎
文宣 三神
世津子 赤井
英範 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2017062321A external-priority patent/JP6780560B2/ja
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Publication of WO2017170744A1 publication Critical patent/WO2017170744A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/09—Multifaceted or polygonal mirrors, e.g. polygonal scanning mirrors; Fresnel mirrors

Definitions

  • the present invention can be applied to an optical element having reflectors arranged in a matrix and a periodic structure having a similar structure.
  • Patent Documents 1 and 2 and Non-Patent Document 1 disclose a configuration in which an image is displayed in the air using an optical element in which reflectors are arranged in a matrix.
  • Patent Documents 1 and 2 disclose optical elements in which the reflector is formed by convex portions and concave portions each having a quadrangular prism shape.
  • this reflector is formed by a pair of reflecting surfaces that intersect (orthogonally) so as to form an angle of 90 degrees.
  • the reflector reflects incident light in the incident direction in the in-plane direction of the plane orthogonal to the pair of reflecting surfaces, whereas in the vertical direction of the plane, the reflector reflects the incident light at a reflection angle corresponding to the incident angle.
  • the optical element a large number of reflectors are manufactured and arranged in a matrix.
  • the optical element reflects and collects the emitted light emitted from various object points in various directions, and forms image points corresponding to the object points in the space.
  • this optical element forms a large number of image points corresponding to a large number of object points on a space corresponding to each object point, and displays an image in the air.
  • Such an image display in the air can be applied in various ways.
  • An element having such a reflector can also be used when measuring changes over time such as the concentration of various solutions as disclosed in Patent Documents 3 to 5, for example. Therefore, in the future, devices having such a structure can be applied to various fields.
  • JP 2008-158114 A Special table 2012-163702 gazette JP 2006-337351 A JP 2011-057819 A Japanese Patent Laying-Open No. 2005-077396
  • the present invention has been made in view of such a situation, and an object of the present invention is to enable mass production with high accuracy and simple, with respect to an optical element in which reflectors are arranged in a matrix and a periodic structure having a similar structure.
  • the present inventor has intensively studied to solve the above-mentioned problems, and prepared an uneven surface layer by forming treatment, and provided a foundation with a certain thickness on the uneven surface layer, and changed the shape at the time of curing. This led to the idea of reducing the amount of light and completed the present invention.
  • the present invention provides the following.
  • a base material An uneven surface layer formed by a cured product of a curable resin formed on the substrate, In the uneven surface layer, concave portions having first and second wall surfaces orthogonal to each other are arranged in a matrix, An optical element comprising a cured product of the curable resin having a thickness of 19 ⁇ m or more and 150 ⁇ m or less at the bottom of the recess.
  • a concave / convex surface layer is formed using a curable resin by providing a cured product of a curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less at the bottom of the concave portion, the concave portion due to curing shrinkage.
  • the deterioration of the wall shape can be sufficiently reduced by the curable resin at the bottom.
  • it can be easily produced by applying the shaping process, and mass production can be performed with high accuracy.
  • the recess is Comprising third and fourth wall surfaces facing the first and second wall surfaces, respectively;
  • the mold for molding formed by arranging the convex portions by the quadrangular prism shape in a matrix is used.
  • the mold for molding having such a shape can be easily and highly accurately manufactured by repeatedly forming concave grooves intersecting at right angles by cutting, thereby further easily and highly accurately optical elements.
  • the concave portion has a tapered shape, it is possible to reduce the burden on the cutting tool when the molding die is manufactured. Moreover, mold release can also be improved and accuracy can be further improved.
  • the first and second wall surfaces are An optical element having an arithmetic average roughness Ra of 2 nm to 260 nm.
  • the depth of the recess is An optical element that is larger than the thickness of the cured product of the curable resin provided on the bottom.
  • the bottom is An optical element that is parallel to the surface of the substrate and has a flat planar shape.
  • the light from one object point can be accurately focused on one image point without causing an unnecessary diffusing action on the light transmitted through the bottom, and is provided for display.
  • the image quality can be improved.
  • the recess is The repetition pitch P is 40 ⁇ m or more and 400 ⁇ m or less,
  • the width W1 is 20 ⁇ m or more and 200 ⁇ m or less,
  • a base material An uneven surface layer formed by a cured product of a curable resin formed on the substrate, In the uneven surface layer, convex portions having first and second orthogonal wall surfaces are arranged in a matrix, An optical element provided with a cured product of the curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less between adjacent convex portions.
  • the gap between adjacent convex portions is determined.
  • the deterioration of the convex wall surface due to curing shrinkage can be sufficiently reduced by the curable resin.
  • it can be easily produced by applying the shaping process, and mass production can be performed with high accuracy.
  • (9) a base material; An uneven surface layer formed by a cured product of a curable resin formed on the substrate, In the uneven surface layer, recesses having adjacent first and second wall surfaces are arranged in a matrix, A periodic structure having a cured product of the curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less at the bottom of the recess.
  • the concave / convex surface layer is formed by a forming process using a curable resin and the concave portions are arranged in a matrix to form the concave / convex surface layer, the concave shape due to curing shrinkage is formed. Can be sufficiently reduced. As a result, the periodic structure can be easily produced, and the periodic structure can be mass-produced with high accuracy.
  • (10) a base material; An uneven surface layer formed by a cured product of a curable resin formed on the substrate, In the uneven surface layer, convex portions having adjacent first and second wall surfaces are arranged in a matrix, A periodic structure provided with a cured product of the curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less between the adjacent convex portions.
  • the concavo-convex surface layer is produced using a curable resin and the concavo-convex surface layer is formed by arranging the concavo-convex surface layer in a matrix, the convex wall surface shape due to curing shrinkage is formed. Can be sufficiently reduced. As a result, the periodic structure can be easily produced, and the periodic structure can be mass-produced with high accuracy.
  • (11) it can be easily mass-produced by being able to be produced using a curable resin.
  • a curable resin to the bottom of the recess so as to produce a cured product of the curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less, it is possible to sufficiently reduce the deterioration of the recess wall shape due to curing shrinkage. Can be mass-produced with high accuracy.
  • (12) since it can be produced using a curable resin, it can be easily mass-produced.
  • the curable resin by coating the curable resin with a thickness that produces a cured product of a curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less between the convex portions, the deterioration of the convex wall surface shape due to curing shrinkage can be sufficiently reduced. Can be mass-produced with high accuracy.
  • a method for producing a periodic structure in which a concave and convex surface layer formed by arranging concave portions having adjacent first and second wall surfaces in a matrix is formed on a base material A coating step of coating the base material with a coating solution of a curable resin; The substrate for which the coating liquid of the curable resin is applied is pressed against a molding die having a surface shape corresponding to the surface shape of the uneven surface layer to cure the curable resin, A curing step for producing an uneven surface layer having a surface shape corresponding to the surface shape of the mold for the mold, A peeling step of peeling the uneven surface layer integrally with the base material,
  • the manufacturing method of the periodic structure which coats the coating liquid of the said curable resin by the thickness which produces the hardened
  • (14) it can be easily mass-produced by using a curable resin. Also, by applying a curable resin with a thickness that produces a cured product of a curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less between the convex portions, the deterioration of the concave wall surface shape due to curing shrinkage can be sufficiently reduced. Can be mass-produced with high accuracy.
  • an optical element in which reflectors are arranged in a matrix and a periodic structure having a similar structure can be easily mass-produced with high accuracy.
  • FIG. 7 is a diagram for explaining a byte used in the process of FIG. 6. It is a flowchart which shows the manufacturing process of the optical element of FIG. It is a characteristic curve figure which shows the evaluation result of the wall surface of an optical element. It is a figure which shows the optical element which concerns on 2nd Embodiment.
  • FIG. 1A is a schematic diagram illustrating the image display apparatus according to the first embodiment.
  • the image display device 1 displays a desired image in a space.
  • the image display device 1 is provided with an image display panel 2 such as a liquid crystal display panel, and an image for display in space is displayed on the panel surface of the image display panel 2.
  • an optical element 3 is disposed between the image display panel 2 and an area used for spatial display of an image.
  • the image display device 1 forms an image point Q corresponding to the object point O on the panel surface of the image display panel 2 in the space by the optical element 3, thereby displaying a desired image in the space. As shown in FIG.
  • the image producing means for producing an image for display is not limited to the case of producing a two-dimensional image by applying the image display panel 2, and various configurations can be widely applied. You may apply the image formation means of a three-dimensional image.
  • the arrangement of the optical element 3 is not limited to the configuration shown in FIG. 1, and various configurations can be widely applied, and also widely applied when used in combination with a sensing means such as an imaging means. can do.
  • the optical element 3 has a reflector 6 formed by a pair of orthogonal reflecting surfaces RA and RB as schematically shown in FIG. 1B when the surface is viewed from the vertical direction, and the reflector 6 is small. A large number are arranged in a matrix. More specifically, the pair of reflection surfaces RA and RB are arranged so as to intersect at an intersection angle ⁇ of 90 degrees.
  • the reflector 6 is set so that a straight line intersecting the reflection surfaces RA and RB is substantially parallel to a straight line connecting the object point O and the image point Q, and further, the reflected light from the image display panel 2 is reflected on the reflection surface RA. Or it arrange
  • the image display apparatus in the in-plane direction shown in FIG. 1, the emitted light L emitted from a number of object points O in various directions by the number of reflectors 6 is reflected and condensed in the incident direction, An image point Q corresponding to each object point O is formed in the space, and an image is displayed in the air.
  • the reflected light is directed toward the image point Q with a certain extent.
  • the optical element 3 is provided with an uneven surface layer 8 having a fine uneven surface on a base material 7.
  • the concavo-convex surface layer 8 is formed of a cured product of a curable resin by being manufactured by a molding process using a curable resin. More specifically, it is formed of a cured product of an ultraviolet curable resin.
  • the concave / convex surface layer 8 is formed by arranging the concave portions 9 having the first and second wall surfaces K1 and K2 corresponding to the reflective surfaces RA and RB in a matrix by using a molding die for the molding process. It is formed by the surface shape which becomes.
  • a periodic structure 10 having a periodic structure of a basic shape corresponding to the reflector 6 is formed by the base material 7 and the uneven surface layer 8.
  • the optical element 3 is formed by arranging the periodic structure 10 on a transparent support as necessary.
  • the reflecting surfaces RA and RB are formed by the concave portions 9 related to the periodic structure 10, and the reflector 6 is manufactured.
  • the recess 9 is formed in a quadrangular prism shape.
  • FIG. 3A is a plan view of the recess 9 as viewed from the opening side (upper side in FIG. 2), and FIGS. 3B and 3C are a CC line and a DD line, respectively. It is sectional drawing of the recessed part 9 cut out and shown by.
  • the periodic structure 10 has an angle formed by the adjacent first and second wall surfaces K1 and K2 when the concave portion 9 is formed in a quadrangular prism shape and the cross-section is taken by a plane parallel to the surface of the base material 7.
  • ⁇ is formed by the intersection angle ⁇ of the reflection surfaces RA and RB.
  • the reflection surfaces RA and RB are formed by the wall surfaces K1 and K2.
  • the optical element 3 reflects the incident light with a large number of reflectors 6 to produce the image point Q, and this intersection angle ⁇ determines the accuracy of the optical path to the image point Q corresponding to the object point O.
  • the angle of 90 degrees is ensured with high accuracy, the light emitted from the object point O can be condensed at one point, and as a result, the resolution and luminance can be improved. Accordingly, it is desirable to set the crossing angle ⁇ to 90 degrees as much as possible.
  • the two adjacent wall surfaces having an intersecting angle ⁇ within 90 ° ⁇ 1 Is preferably within 90 ° ⁇ 1 °, and more preferably the crossing angle ⁇ is within 90 ° ⁇ 0.5 °.
  • the orthogonal angle between the reflecting surfaces RA and RB is preferably within 90 ° ⁇ 1, but more preferably within 90 ° ⁇ 0.5 °.
  • the reflective surfaces RA and RB are formed by disposing metal thin films on the adjacent first and second wall surfaces K1 and K2 forming the crossing angle ⁇ in the periodic structure 10 by vapor deposition or the like.
  • the first and second wall surfaces K1 and K2 may be used as the reflection surfaces RA and RB without providing the metal thin film as necessary.
  • the optical element 3 it is only necessary to arrange a large number of reflectors 6 to produce an image point Q corresponding to the object point O.
  • the reflector 6 has only a pair of orthogonal reflecting surfaces RA and RB. That's fine.
  • the cross-sectional shape cut out by the plane parallel to the base material 7 is an arc shape.
  • a certain curved surface may be used, and the cross-sectional shape may be a flat surface that is a straight line connecting the tips of the reflecting surfaces RA and RB.
  • the concave portion 9 can be applied with a quadrangular prism shape, a quadrangular pyramid shape, a quadrangular pyramid shape, and the like. Furthermore, a polygonal columnar shape, a cone shape, and a frustum shape in which a wall surface excluding the reflecting surfaces RA and RB is a polyhedral wall surface having three or more surfaces can be applied.
  • the concave portion 9 is formed in a quadrangular prism shape, so that a pair of wall surfaces K3 and K4 similar to the pair of wall surfaces K1 and K2 related to the reflection surfaces RA and RB are formed on the reflection surface RA, It is formed in the concave portion 9 on the side facing the RB.
  • the shaping die used for preparation of the optical element 3 can be produced simply so that it may mention later.
  • the concave portion 9 having a quadrangular prism shape is formed in this way, and the concave portions 9 are repeatedly arranged at a constant pitch in the extending direction of the wall surfaces K1, K2, K3, and K4. In this manufacturing process, the mold can be easily and accurately manufactured.
  • the first and second wall surfaces K1, K2 are produced with an arithmetic average roughness Ra of 2 nm to 260 nm, preferably 20 nm to 200 nm, more preferably 50 nm to 150 nm.
  • arithmetic mean roughness Ra is based on JISB0601 (1994) here.
  • the first and second wall surfaces K1, K2 may be configured to satisfy only the upper limit value of the arithmetic average roughness Ra. Further, when the arithmetic average roughness Ra of the first and second wall surfaces K1 and K2 is larger than 260 nm, the light reflected by the reflection surfaces RA and RB (first and second wall surfaces K1 and K2) is diffused, It is not preferable because light from one object point cannot be accurately focused on one image point, and image quality deteriorates such as image blurring or image whitening.
  • the arithmetic average roughness Ra of the first and second wall surfaces K1 and K2 satisfy the above range. It should be noted that some stray light or the like is incident on the third and fourth wall surfaces K3 and K4 facing the first and second wall surfaces K1 and K2, and is diffused unnecessarily, and the transparency of the optical element 3 is reduced. In addition, since the image quality may be deteriorated, the arithmetic average roughness Ra preferably satisfies the above range.
  • the concave portion 9 is formed in a quadrangular prism shape in this way, and the pair of wall surfaces K3 and K4 facing the pair of wall surfaces K1 and K2 related to the reflection surfaces RA and RB are formed of a base material. 7 is formed in a tapered quadrangular prism shape that is inclined by an angle ⁇ toward the center direction of the recess 9 in the depth direction from the vertical plane L1 with respect to the surface 7.
  • the optical element 3 is configured so as to be easily and accurately manufactured by using a mold for molding described later. Moreover, it is comprised so that the peelability from this mold for shaping
  • the angle ⁇ is set to 1 degree or more and 45 degrees or less, but is preferably set to 5 degrees or more and 30 degrees or less, more preferably 10 degrees or more and 20 degrees or less. desirable.
  • FIGS. 2B and 2C are cross-sectional views of FIG. 2A cut along lines AA and BB, respectively. It is sectional drawing cut out and shown by the cut surface extended in each direction.
  • the recess 9 is formed with a square outer shape on the opening side.
  • the concave portion 9 is formed with a width W1 (a size of one side of the square shape related to the opening-side cross-sectional shape of the concave portion 9) of 20 ⁇ m to 200 ⁇ m, preferably 20 ⁇ m to 100 ⁇ m, more preferably 20 ⁇ m to 50 ⁇ m. It is formed.
  • the recesses 9 are formed such that the width W2 of the wall 12 between the recesses 9 is 20 ⁇ m or more and 200 ⁇ m or less, preferably 20 ⁇ m or more and 100 ⁇ m or less, and more preferably 20 ⁇ m or more and 50 ⁇ m or less.
  • the recess 9 is formed with a depth D1 of 20 ⁇ m or more and 600 ⁇ m or less, preferably 100 ⁇ m or more and 500 ⁇ m or less, more preferably 200 ⁇ m or more and 300 ⁇ m or less.
  • the pitch P is 40 ⁇ m or more and 400 ⁇ m or less, preferably 60 ⁇ m or more and 300 ⁇ m or less, more preferably 100 ⁇ m or more and 200 ⁇ m or less.
  • the wall 12 between the recesses 9 is formed on the surface of the base material 7 by the height according to the depth D1 larger than the width W2. Will be produced.
  • the wall surfaces K1 to K4 related to the recess 9 it was found that the production accuracy was significantly deteriorated. This deterioration in accuracy becomes more prominent as the aspect ratio is higher. Therefore, when the aspect ratio is 0.05 or more, 30 or less, preferably 2 or more and 20 or less, more preferably 5 or more and 10 or less, in this embodiment, an optical device whose accuracy is significantly deteriorated due to an increase in the aspect ratio. With respect to the element, manufacturing accuracy can be improved.
  • This deterioration in accuracy is considered to be due to hardening shrinkage of the shaping resin, and is manifested by a decrease in the smoothness (meandering) of the wall surfaces K1 to K4, and a roughening of the wall surfaces K1 to K4. It is considered that the crossing angle ⁇ also deteriorates due to the meandering of the wall surfaces K1 to K4.
  • the smoothness of the wall surfaces K1 to K4 decreases because the light from one object point O reflected by many reflectors 6 cannot be focused on one point, thereby reducing the resolution and brightness level of the image displayed in space.
  • the image quality is degraded.
  • the wall surfaces K1 to K4 are roughened, the light reflected by the reflector 6 cannot be collected at one point, so that the resolution and luminance level of the image displayed in the space are lowered and the image quality is deteriorated. I will let you.
  • the cured product of the curable resin used for the shaping process of the recess 9 remains on the bottom 13 of the recess 9 with a thickness D2 of 19 ⁇ m or more and 150 ⁇ m or less.
  • the wall surfaces K1 and K2 manufactured on the wall portion 12 having a high aspect ratio as described above, and the wall surfaces K1 and K2 that require surface accuracy are held so as to face the corresponding wall surfaces K3 and K4. If the cured product of the shaping resin remains in the bottom portion 13 of the recess 9 between the wall surfaces K1 and K3 and between the wall surfaces K2 and K4, the curable resin is cured in the shaping process.
  • the shaping resin on the bottom portion 13 alleviates deformation and roughening of the wall surfaces K1 to K4 due to curing shrinkage of the curable resin of the wall portion 12 related to the wall surfaces K1 to K4.
  • the accuracy of the reflective surfaces RA and RB can be improved, and the optical element 3 can be mass-produced with high accuracy.
  • the upper limit value of the thickness of the cured product at the bottom 13 is a limitation due to significant deterioration of productivity due to intense curling as the thickness increases, as will be described later. Thereby, when it is not necessary to consider the deterioration of productivity due to curling, it can be configured to satisfy only the lower limit value. Moreover, it is preferable that the depth D1 of the recessed part 9 is larger than the thickness D2 of the hardened
  • the optical element 3 can be mass-produced with high accuracy by the mold processing.
  • the thickness D2 of the cured product at the bottom 13 of the recess 9 is preferably 19 ⁇ m or more and 150 ⁇ m or less, more preferably 19 ⁇ m or more and 60 ⁇ m or less.
  • the thickness D2 is less than 19 ⁇ m, the appearance defect of the optical element 3 increases as will be described later, which is not suitable for use.
  • the thickness D2 is larger than 150 ⁇ m, as will be described later, curling or the like is likely to occur during the manufacturing process, and the degree of curling becomes stronger as the thickness increases, which is not suitable for mass production. Therefore, it is desirable that the thickness D2 satisfy the above range.
  • the bottom portion 13 of the concave portion 9 is formed by a plane parallel to the surface of the base material 7, and the thickness D2 of the cured product at the bottom portion 13 of the concave portion 9 is the above-described thickness at each portion in the in-plane direction.
  • the shape of the bottom portion 13 for example, by applying various shapes for the purpose of improving the releasability during the shaping process, for example, in the cross-sectional shape in FIGS. It may be set to a shape, a slanted slope shape, a downwardly convex triangular shape, a sawtooth shape, etc.
  • the thickness of the part where the distance between the surface of the base material 7 in each cross section is the smallest D2 is set to the above-mentioned thickness.
  • the bottom 13 of the recess 9 is parallel to the surface of the base material 7 and is flat (roughness) as shown in this embodiment, when importance is placed on improving the image quality of the image displayed by the optical element 3. Is small). Thereby, the light from one object point is not exerted on the light that passes through the bottom portion 13 and is reflected by the reflection surfaces RA and RB (first and second wall surfaces K1 and K2). Can be accurately focused on one image point, and deterioration in image quality such as blurring of an image displayed by the optical element 3 can be suppressed.
  • the concave / convex surface layer 8 in which the quadrangular prism-shaped concave portions 9 are arranged in a matrix is formed by a shaping process using a curable resin, compared to a case where the bottom portion 13 is not flat and flat.
  • various curable resins necessary for the shaping process can be applied to the uneven surface layer 8, for example, acrylic resin, polyester, epoxy resin, polyolefin, styrene resin, polyamide, polyimide, polyamide Imide, polyurethane, polyvinyl acetate, polyvinyl alcohol, polyvinyl butyral, polycarbonate, melamine resin, urea resin, alkyd resin, phenol resin, cellulose resin, diallyl phthalate resin, silicone resin, polyarylate resin, polyacetal resin, styrene-isoprene rubber, etc.
  • the photo-curable resin can be applied.
  • an ultraviolet curable resin as the resin forming the uneven surface layer 8.
  • an acrylic resin can be applied.
  • the base material 7 can be applied to this type of shaping process, and various film materials, plate materials, and the like that are transparent in a wavelength band used for image display can be applied. Thereby, the base material 7 can apply various transparent film materials, transparent sheet materials, and transparent plate materials used for the shaping process of this type of optical element.
  • polycarbonate, PET (polyester), or the like can be applied to the transparent film material or the transparent sheet material, and a glass plate material, a polycarbonate plate material, or the like can be applied to the transparent plate material.
  • FIG. 4 (A) is a diagram showing a molding die 20 used for manufacturing the periodic structure 10 of the optical element 3, and FIG. 4 (B) is a convex provided on the molding die 20. It is a perspective view which shows the part 21 in detail.
  • the molding die 20 is formed in a flat plate shape, and a convex portion 21 corresponding to the concave portion 9 is formed in a prismatic shape which is an inverted shape of the concave portion 9 on the molding processing surface 20A used for the molding processing. .
  • the convex part 21 is formed in a matrix shape with the pitch P and the base side width W1 in the extending direction of each side of the rectangle.
  • the convex portions 21 are formed by the wall surfaces L1 to L4 corresponding to the respective wall surfaces K1 to K4 of the concave portion 9, whereby the wall surface L1 and L2 corresponding to the wall surfaces K1 and K2 has an intersection angle ⁇ set to 90 degrees.
  • the wall surfaces L3 and L4 corresponding to the wall surfaces K3 and K4 are produced with high smoothness so as to be parallel to the vertical surface with respect to the surface of the molding die 20, and the vertical surfaces with respect to the surface of the molding die 20 are Is formed so as to be inclined by an angle ⁇ .
  • the top portion 23 of the convex portion 21 is formed by a flat surface corresponding to the bottom portion 13 of the concave portion 9.
  • the molding die 20 is manufactured by cutting the surface of a base material made of a metal material.
  • the mold for molding is suitable for this type of cutting and is formed of a metal material suitable for the mold for molding. More specifically, a processed layer made of copper, aluminum, or the like is provided on the surface of a base material made of stainless steel, steel, or the like, and a convex portion 21 is provided on this processed layer.
  • the entire molding die 20 may be made of copper, aluminum or the like.
  • FIG. 5 is a flowchart showing a manufacturing process of the molding die 20.
  • FIG. 6 is a diagram for explaining each process in comparison with FIG.
  • an electrolytic composite polishing method using a combination of an electrolytic elution action and a rubbing action by abrasive grains. To make it super mirror surface.
  • the base material 22 is smoothed (FIG. 6A).
  • a one-dimensional cutting process using a cutting tool is repeated, so that a groove corresponding to the width W2 between the recesses 9 is obtained by a pitch corresponding to the manufacturing pitch P of the recesses 9.
  • a repetition of the fine groove 25 having a width is produced (FIG. 6B).
  • the cutting tool has a tip formed in a comb shape so that a plurality of fine grooves 25 can be formed simultaneously in parallel. This shortens the time required for the cutting process in this process.
  • a linear cutting process using a cutting tool is repeated to form a surface shape in which the convex portions 21 are arranged in a matrix to produce a mold for molding.
  • the cutting tool 24 is formed with a cross-sectional shape corresponding to the cross-sectional shape of the recess 9 as shown in FIG.
  • the cutting tool 24 can make a fine groove by cutting, and the cutting edge related to the cutting process can be widened at the base, thereby improving the strength of the cutting edge and reducing damage or the like. it can. Since the strength of the cutting tool can be improved in this manner, in this manufacturing process, the production efficiency of the molding die 20 can be improved and the productivity can be improved.
  • the mass productivity of the optical element 3 is improved. can do. Further, since the cutting tool can be made strong, the moving speed of the cutting tool can be increased, and the productivity can be improved.
  • the width W1 of the recess 9 is limited to about 20 ⁇ m, and when the width W1 is made smaller than this, the manufacturing accuracy of the wall surfaces L1 to L4 and the like tends to deteriorate. .
  • the shape and the like of the wall surfaces L1 to L4 are sufficiently reproducible and accurate. It is difficult to ensure, so that the mold can be manufactured with high accuracy in this embodiment as compared with these other fine processing techniques.
  • FIG. 8 is a flowchart showing the manufacturing process of the optical element 3.
  • the periodic structure 10 is manufactured and the optical element 3 is manufactured by executing the processing procedure shown in FIG. 8 by using the molding die 20 manufactured by the process shown in FIG. Make it.
  • the curable resin coating solution is applied to the surface of the base material 7 by applying the coating liquid of the curable resin to the base material 7 and drying it.
  • a curable resin coating liquid is applied to the bottom portion 13 of the concave portion 9 with a thickness for producing a cured product of the curable resin with a thickness of 19 ⁇ m or more and 150 ⁇ m or less by controlling the coating film thickness. .
  • the optical element 3 is produced with high accuracy.
  • the substrate 7 formed by forming the curable resin layer is pressed against the shaping mold 20 and pressed to be formed on the surface of the shaping mold 20.
  • the curable resin material is sufficiently pressed against the fine uneven shape, and the curable resin is cured by irradiation with ultraviolet rays in this state. Thereby, in this process, the uneven surface layer 8 is produced with a curable resin.
  • the uneven surface layer 8 is peeled off integrally from the base material 7 from the shaping mold 20, thereby producing the periodic structure 10.
  • the optical element can be produced by a shaping process using a shaping mold, so that mass production can be easily performed.
  • high accuracy can be secured by providing a cured product of a curable resin with a constant thickness on the bottom 13 of the recess 9.
  • the separation starts from the side of the vertical wall surfaces K1 and K2 related to the recess 9, and the separation of the opposing wall surfaces K3 and K4 is after the vertical wall surfaces K1 and K2. And peel.
  • peeling occurs in the direction indicated by the arrow F
  • FIGS. 2B and 2C the peeling occurs in the direction indicated by the arrows F1 and F2.
  • the molding metal for the wall surfaces K1 and K2 related to the vertical surface can be prevented from being damaged as compared with the case of peeling in the reverse direction, and the accuracy can be further improved.
  • Table 1 is a diagram showing the experimental results used for confirming the production accuracy of the wall surfaces K1 and K2.
  • the recess 9 in which the optical element 3 was manufactured with 230 mm ⁇ 180 mm had a width W1 of 100 ⁇ m, a depth D1 of 120 ⁇ mm, and a distance W2 between the recesses 9 of 20 ⁇ m.
  • the shaping mold 20 was 320 mm square, and an uneven surface with a reversed shape of the recess 9 was produced.
  • the curable resins according to Examples and Comparative Examples shown in Table 1 are ultraviolet curable resins, and for example, acrylic ultraviolet curable resins are applied.
  • the resin 2 is an acrylic ultraviolet curable resin that is considered to have a smaller curing shrinkage than the resin 1.
  • the appearance failure is evaluated by five steps by visually observing the opacity due to the roughening of the wall surfaces K1 and K2, and is “1” when almost no defects are recognized.
  • an extremely mild defect that does not cause a problem is present, it is set to “2”.
  • a product having the defect is generated, it is set to “3” when most products can be used.
  • the value is “4”, and when it is determined that most of the defective products are defective, the value is “5”.
  • curling is an evaluation of the degree of curling that occurs when the produced periodic structure is left untreated in five stages.
  • “1” is a case where almost no curling occurs, and “2”, “3”, and “4” are curled as compared to “1”, but there is no problem in use. It was classified into “2”, “3”, and “4” according to the size of the curl.
  • “4” is a case where defective products may occur at present, but it is considered that the generation of defective products can be prevented by improving the process and the like, and this indicates the upper limit value of the thickness D2 of the bottom portion 13. is there.
  • “5” is a case where care is required due to the large curl generated.
  • the curl is desirably evaluated to be close to “1”, and by managing the production process, an optical element can be sufficiently produced even when the curl is severe, and this is an auxiliary evaluation standard for the optical element. I can say that.
  • the thickness D2 of the cured product at the bottom portion 13 is 26 ⁇ m, 27 ⁇ m, and 37 ⁇ m, and the appearance defect seems to be due to the lack of the thickness D2 of the cured product at the bottom portion 13. However, it was confirmed that it was not to the extent corresponding to the appearance defect “4”. Further, in Examples 1 and 5 using the resin 2 whose curing shrinkage was smaller than that of the resin 1, the appearance defect was “1” regardless of the thickness D2 of the cured product at the bottom portion 13 and was good. According to the results in Table 1, Examples 1 to 8 include cases in which the appearance is good, but handling with regard to curling requires attention.
  • the practical range for the thickness D2 is 19 ⁇ m or more and 102 ⁇ m or less.
  • the optical characteristics are satisfactory, so that it can be practically used as the optical element 3 as long as it is handled with care. .
  • the center value of Examples 1 to 5 is determined to be 19 ⁇ m or more and 37 ⁇ m or less with respect to the thickness D2.
  • Examples 2 to 4 are examples in which the appearance defect and the curl are balanced particularly when the resin 1 is used.
  • the thickness D2 is a thickness when considering the yield and the like in consideration of the curl. It can be determined that the center value of the optimum range of D2 is 26 ⁇ m or more and 37 ⁇ m or less.
  • FIG. 9 is a graph of the measurement results in Table 1.
  • Reference sign LA indicates poor appearance (transparency), and reference sign LB indicates curl.
  • White and black square marks are measurement results of poor appearance and curl in Examples and Comparative Examples.
  • Table 2 is a chart subjected to the same confirmation with different ultraviolet curable resins.
  • the mold releasability is an evaluation of releasability from the mold for molding, and the force required for delamination was evaluated in 5 stages. “1” to “4” are cases where they have sufficient peelability and do not cause any problems in use. “1”, “2”, “3”, “ 4 ”. “5” is the case where the force required for peeling is large, the peeling needs attention, and is not suitable for mass production.
  • Example 5 improves external appearance defect and there are few curls compared with Example 4 which has the same thickness D2 using the resin 1.
  • FIG. 1 it was confirmed that sufficient mold releasability can be ensured even when the curing shrinkage is small.
  • Table 3 is a chart showing the thickness D2 of the cured product at the bottom 13 and the arithmetic average roughness Ra of the first and second wall surfaces K1, K2.
  • the concave portion 9 has a tapered shape, and the third and fourth wall surfaces K3 and K4 are inclined in the central direction of the concave portion 9 in the depth direction from the vertical plane with respect to the surface of the base material 7.
  • the release property is better than that of the first and second wall surfaces K1 and K2 having a vertical shape. Therefore, the arithmetic average roughness Ra of the third and fourth wall surfaces K3 and K4 is suppressed compared to the arithmetic average roughness Ra of the first and second wall surfaces K1 and K2. Furthermore, as shown in Example 7, when the thickness D2 of the cured product in the bottom portion 13 satisfies a preferable range, the arithmetic average roughness Ra of the third and fourth wall surfaces K3 and K4 is further suppressed. . Thereby, the external appearance, optical performance, etc. of the optical element 3 can be further improved.
  • the change in the recess wall shape due to curing shrinkage can be sufficiently reduced, Simple and highly accurate mass production is possible.
  • the forming mold is formed by arranging the convex portions due to the quadrangular prism shape in a matrix by forming the concave portions by the quadrangular prism shape having the third and fourth wall surfaces corresponding to the first and second wall surfaces.
  • the mold can be used for manufacturing, and thus the productivity can be improved by using a mold for molding with a simple configuration.
  • the first and second wall surfaces can be produced with an arithmetic average roughness Ra of 2 nm or more and 260 nm or less, and an image used for display can be improved in image quality. Also, the arithmetic average roughness Ra can be suppressed for the third and fourth wall surfaces, and the image used for display can be further improved in image quality.
  • the optical element can be sufficiently mass-produced easily.
  • the bottom portion of the concave portion has a thickness of 19 ⁇ m or more and 150 ⁇ m or less.
  • FIG. 10 is a diagram showing an optical element according to the second embodiment in comparison with FIG.
  • the optical element 33 is formed by an uneven surface layer 38 in which convex portions 39 are arranged in a matrix instead of the concave portions 9.
  • the convex portion 39 is formed by a molding die having a surface shape formed by reversing the surface shape of the optical element 3 according to the first embodiment.
  • the first and second wall surfaces K1 and K2 that intersect with each other at an intersection angle of 90 degrees to form the reflecting surface are held so as to face the wall surfaces K1 and K2, respectively, in the lead direction on the surface of the base material 7
  • the convex portion 39 is formed by the wall surfaces K3 and K4 inclined obliquely.
  • an uneven surface layer having an inverted shape of the surface shape of the optical element 33 is formed by the first forming process using the forming mold 20, and the uneven surface layer is used.
  • a mold for production is produced.
  • the optical element 33 is produced by a molding process using the molding mold for production.
  • This embodiment has the same configuration as that of the first embodiment except that the configuration related to the surface shape due to the inverted shape is different. Thereby, in the molding process using the mold for production, a cured product of the curable resin is provided between the convex portions 39 with a thickness of 19 ⁇ m or more and 150 ⁇ m or less.
  • a cured product of a curable resin is produced at the bottom of the concave portion with a thickness of 19 ⁇ m or more and 150 ⁇ m or less, thereby producing a mold for production.
  • the original plate (mother plate) to be used for the production can be produced with high accuracy.
  • a periodic structure is produced in the same manner as in the first and second embodiments, and this periodic structure is applied to an element other than an optical element used for image display in space.
  • this periodic structure can be widely applied to periodic structures formed by arranging convex parts and concave parts in a matrix, such as biochips that detect optical reactions such as fluorescence and analyze a small amount of sample. Can do.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

L'objectif de l'invention est de permettre, en ce qui concerne un élément optique dans lequel des réflecteurs sont agencés en tant que matrice, et une structure périodique pourvue d'une structure similaire, la production de masse d'une manière simple et très précise. Cette invention concerne un substrat 7 et une couche de surface concavo-convexe 8 formée sur le substrat 7 à partir d'un produit durci d'une résine durcissable. Des évidements 9 pourvus d'une première et une deuxième surface de paroi K1, K2, qui sont mutuellement orthogonales, sont agencés sous la forme d'une matrice sur la couche de surface concavo-convexe 8. Le produit durci d'une résine durcissable est disposé au niveau de la partie inférieure 13 des évidements 9 à une épaisseur de 19 à 150 µm.
PCT/JP2017/013021 2016-03-31 2017-03-29 Élément optique, structure périodique, procédé de fabrication d'élément optique et procédé de fabrication de structure périodique Ceased WO2017170744A1 (fr)

Applications Claiming Priority (4)

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JP2016070149 2016-03-31
JP2016-070149 2016-03-31
JP2017062321A JP6780560B2 (ja) 2016-03-31 2017-03-28 光学素子、周期構造体
JP2017-062321 2017-03-28

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019139023A (ja) * 2018-02-08 2019-08-22 株式会社パリティ・イノベーションズ 光学素子及びそれを用いた映像表示装置

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Publication number Priority date Publication date Assignee Title
WO2007116639A1 (fr) * 2006-03-23 2007-10-18 National Institute Of Information And Communications Technology Element de traitement d'image et affichage
JP2008158114A (ja) * 2006-12-21 2008-07-10 National Institute Of Information & Communication Technology 光学システム
WO2009041646A1 (fr) * 2007-09-28 2009-04-02 Asahi Glass Company, Limited Composition photodurcissable, procédé de fabrication d'un corps à motif fin et dispositif optique
WO2011108469A1 (fr) * 2010-03-01 2011-09-09 シャープ株式会社 Elément de formation d'image réfléchissant et système optique
JP2014016576A (ja) * 2012-07-11 2014-01-30 Nitto Denko Corp マイクロミラーアレイおよびその製法
JP2014228674A (ja) * 2013-05-22 2014-12-08 セイコーエプソン株式会社 回折光学素子、回折光学素子の製造方法、及び電子機器

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Publication number Priority date Publication date Assignee Title
WO2007116639A1 (fr) * 2006-03-23 2007-10-18 National Institute Of Information And Communications Technology Element de traitement d'image et affichage
JP2008158114A (ja) * 2006-12-21 2008-07-10 National Institute Of Information & Communication Technology 光学システム
WO2009041646A1 (fr) * 2007-09-28 2009-04-02 Asahi Glass Company, Limited Composition photodurcissable, procédé de fabrication d'un corps à motif fin et dispositif optique
WO2011108469A1 (fr) * 2010-03-01 2011-09-09 シャープ株式会社 Elément de formation d'image réfléchissant et système optique
JP2014016576A (ja) * 2012-07-11 2014-01-30 Nitto Denko Corp マイクロミラーアレイおよびその製法
JP2014228674A (ja) * 2013-05-22 2014-12-08 セイコーエプソン株式会社 回折光学素子、回折光学素子の製造方法、及び電子機器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019139023A (ja) * 2018-02-08 2019-08-22 株式会社パリティ・イノベーションズ 光学素子及びそれを用いた映像表示装置

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