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WO2017008092A1 - Filtre métallique - Google Patents

Filtre métallique Download PDF

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Publication number
WO2017008092A1
WO2017008092A1 PCT/AT2016/000072 AT2016000072W WO2017008092A1 WO 2017008092 A1 WO2017008092 A1 WO 2017008092A1 AT 2016000072 W AT2016000072 W AT 2016000072W WO 2017008092 A1 WO2017008092 A1 WO 2017008092A1
Authority
WO
WIPO (PCT)
Prior art keywords
filter
region
area
particle size
filter according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/AT2016/000072
Other languages
German (de)
English (en)
Inventor
Christian Löffler
Bernhard MAYR-SCHMÖLZER
Ingmar Wesemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plansee SE
Original Assignee
Plansee SE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plansee SE filed Critical Plansee SE
Publication of WO2017008092A1 publication Critical patent/WO2017008092A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22C—FOUNDRY MOULDING
    • B22C9/00—Moulds or cores; Moulding processes
    • B22C9/08—Features with respect to supply of molten metal, e.g. ingates, circular gates, skim gates
    • B22C9/086—Filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D24/00—Filters comprising loose filtering material, i.e. filtering material without any binder between the individual particles or fibres thereof
    • B01D24/02—Filters comprising loose filtering material, i.e. filtering material without any binder between the individual particles or fibres thereof with the filter bed stationary during the filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D25/00—Filters formed by clamping together several filtering elements or parts of such elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition

Definitions

  • the invention relates to a filter that at least partially
  • Powder particles is formed, the at least 50 at% molybdenum (Mo) or
  • Tungsten included.
  • the invention relates to a method for
  • Metal or molten salts often need to be cleaned prior to processing by pouring or spraying insoluble contaminants.
  • impurities may consist of unmelted or undissolved particles having a higher melting point than the melt, but may also be other solid constituents such as oxides or carbides from constituents of the melt. These insoluble particles then lead to unwanted inclusions in the solidified component. In the case of splashing of the melt, the solid components may cause clogging of the nozzle.
  • a common method for the purification of melts is filtration. For this, the melt is passed through a filter, are retained on the solid components from a certain size. Particles containing the
  • Ceramic filters offer the advantage of excellent chemical stability over most molten metals (eg aluminum or magnesium melts).
  • ceramic filters also offer temperatures close to
  • the most common filter ceramic is alumina, but other oxides, nitrides and carbides can be used.
  • the melt may also be in a closed
  • the filter is at least partially, preferably completely off
  • the filter preferably has> 70 At% Mo or W, in particular> 90 At% Mo or W.
  • the highest corrosion resistance can be achieved if the Mo or W content is> 95 at%, in particular> 99 at%.
  • Mo-W alloys in the entire concentration range are suitable in
  • Mo-W alloys have excellent resistance to zinc melting.
  • Preferred alloying elements for Mo or W are rhenium (Re), tantalum (Ta), niobium (Nb), chromium (Cr), zirconium (Zr), hafnium (Hf), titanium (Ti) or
  • Rare earth metals are pure W, W - 0.1 to 3% by mass rare earth oxide, pure Mo, Mo - titanium (Ti) - zirconium (Zr) - C (common name: TZM), Mo - hafnium (Hf) - C (common name: MHC), Mo - 0.1 to 3 Ma% rare earth oxide, Mo to 48 Ma% Re and W to 26Ma% Re.
  • TZM moly tylium
  • MHC moly stable rare earth oxide
  • La 2 0 3 is to strike out.
  • Pure-W or Rein-Mo are to be understood as meaning the metals of the usual technical purity.
  • the filter has at least two different regions A and B.
  • the regions A and B differ in their average particle size, the particle size in the region A being smaller than in the region B.
  • the particle size is in accordance with conventional methods in cross-section (Cu-infiltrated) based on (instead Grain boundary uses particle boundary) to ASTM E112-13.
  • the average particle size is preferably smaller by at least 25%, in particular by at least 50%, particularly preferably by at least 70%, than in the region B.
  • the particle size in the range A is preferably 0.1 to 10 ⁇ m and in the range B 0.2 to 30 ⁇ m.
  • the area B has the function of a permeable support body. The filtration of the molten metal takes place in the area A.
  • the filters according to the invention have an improved filter effect compared with the prior art and in particular also a higher heat resistance and mechanical stability, in particular at high use temperatures.
  • the filters according to the invention are furthermore free of macroscopic oxides which would cause a worse wetting behavior. Therefore, the behavior in the starter injection compared to the prior art filter is significantly improved.
  • Another advantage of the present solution is that the filters according to the invention can be joined in a simple manner integrally with other components. The joining can be done by common methods such as electron beam welding, laser welding or resistance welding. This can be dispensed with solder materials or activator materials. This also unwanted reactions of the filter material are excluded with the molten metal
  • the area A and the area B are connected to one another in a material-locking manner.
  • Cohesive connections are all compounds in which the
  • connection partners are held together by atomic or molecular forces.
  • the cohesive connection between the region A and B is realized by a sintering process.
  • the particles of the filter are preferably at least partially cohesively by a
  • connection zone between the Particles are also called sinter neck.
  • Particle size in the area A is denoted by Y. From Figure 1 b it can be seen how the molten metal penetrates through the open-pore network of channels through the filter, wherein the area A takes over the filter function and the area B the carrier function.
  • the filter preferably has a porosity in the range A of 10 to 30% and in the range B of 15 to 80%.
  • the determination of the porosity is carried out by mercury porosimetry.
  • the filter of the invention is characterized by a very good resistance to a variety of molten metal.
  • molten metal aluminum, lead, cesium, gallium, gold, potassium, copper, lithium, magnesium, sodium, mercury, bismuth, tin and rare earth metals can be filtered.
  • the maximum temperature at which sufficient resistance is still present can be taken from Table 1.
  • the filter is suitable for filtering tin melts in an EUV plant.
  • EUV Extreme Ultra Violet
  • EUV Extreme Ultra Violet
  • the EUV radiation is released when generating a plasma.
  • the plasma is generated, for example, by focusing laser radiation.
  • Tin is used as the medium because of the higher conversion efficiency.
  • the tin melt is filtered to ensure a corresponding purity.
  • the filter according to the invention is not only suitable for molten metals, but it can also be used to filter other liquids, especially at higher operating temperatures advantageous.
  • the method for producing the filter comprises a pressing step for the preparation of the region B and the application of a suspension for the preparation of the region A.
  • the powder used for the region B preferably has a particle size of 0.2 to 30 ⁇ m.
  • the particle size is measured according to Fisher (FSSS ... Fisher Sub-Sieve Sizer).
  • FSSS Fisher Sub-Sieve Sizer
  • For the suspension for the application of the area A powder with particle size FSSS is preferably used from 0.1 to 10 ⁇ .
  • the filter blank is a
  • the temperature for the heat treatment depends on the material used and the particle size. In the lower temperature range are Materials with low liquidus temperature or fine powder sintered.
  • Coarse powder or materials with a high liquidus temperature are sintered in the upper part of the previously specified temperature range. Since the particle size of the region A differs from the particle size of the region B, it is advantageous to subject the region B to a separate heat treatment even before the suspension is applied. For the preferred particle size range of the range B of 0.2 to 30 ⁇ the preferred heat treatment temperature is 1 .100 ° C to 2,000 ° C. For fine-grained powders, in turn, the lower and for coarse-grained powder the upper area is used.
  • the powder consolidation of the region B is preferably carried out by compacting the powder in a die or
  • Figure 1 a, b show the schematic structure of the open-pored
  • Figure 2 shows the porous structure of region B.
  • the filter element was produced by a two-stage process.
  • W powder having an average particle size (FSSS) of 6 ⁇ m was pressed into a base body by die pressing. Thereafter, the so-called green body (pressed body) in reducing
  • Atmosphere hydrogen with a dew point ⁇ -20 ° C sintered at a temperature of 1800 ° C.
  • the sintered body was brought into the desired shape of the later filter.
  • a second step were on the porous body over a
  • Suspension process W particles deposited.
  • the component was immersed in a tungsten suspension and dried.
  • the mean particle size FSSS of the tungsten powder in the suspension was 0.75 ⁇ m.
  • a subsequent heat treatment at a temperature of 1600 ° C in one
  • the filter thus prepared was used to filter an aluminum (melt temperature: 700 ° C) and a tin melt (melt temperature: 300 ° C).
  • the filter was characterized by an excellent filtering effect, high mechanical stability and corrosion resistance.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Filtering Materials (AREA)
  • Manufacture And Refinement Of Metals (AREA)

Abstract

L'invention concerne un filtre constitué, au moins par endroits, de particules pulvérulentes contenant au moins 50 % en pourcentage atomique de molybdène ou de Wolfram. Le filtre présente au moins une zone A et une zone B, la taille moyenne des particules pulvérulentes de la zone A étant inférieure à celle de la zone B. Le filtre se distingue par une excellente action filtrante et stabilité mécanique, et est notamment adapté au filtrage de métaux en fusion.
PCT/AT2016/000072 2015-07-10 2016-06-29 Filtre métallique Ceased WO2017008092A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATGM207/2015U AT14884U1 (de) 2015-07-10 2015-07-10 Metallfilter
ATGM207/2015 2015-07-10

Publications (1)

Publication Number Publication Date
WO2017008092A1 true WO2017008092A1 (fr) 2017-01-19

Family

ID=56564994

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AT2016/000072 Ceased WO2017008092A1 (fr) 2015-07-10 2016-06-29 Filtre métallique

Country Status (3)

Country Link
AT (1) AT14884U1 (fr)
TW (1) TW201706033A (fr)
WO (1) WO2017008092A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114100529A (zh) * 2022-01-24 2022-03-01 中天捷晟(天津)新材料科技有限公司 一种干式氟化装置及制备氟化铽的方法
DE102022201617A1 (de) 2022-02-16 2023-08-17 Technische Universität Bergakademie Freiberg, Körperschaft des öffentlichen Rechts Filterelement für eine Strömungsberuhigung und/oder Reinigung einer beim Gießen erhaltenen Schmelze sowie ein Verfahren zur Herstellung eines Filterelements
WO2024170295A1 (fr) * 2023-02-17 2024-08-22 Asml Netherlands B.V. Système de stockage et de distribution de matériau cible pour une source de rayonnement ultraviolet extrême

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB901261A (en) * 1960-07-14 1962-07-18 Purolator Products Inc Sintered porous metal filter
US3508601A (en) * 1967-04-17 1970-04-28 American Metal Climax Inc Molybdenum screen for molten non-ferrous metal
US3565607A (en) 1967-11-08 1971-02-23 Nasa Method for removing oxygen impurities from cesium
US3598732A (en) * 1969-10-14 1971-08-10 American Metal Climax Inc Coated molybdenum mesh screen for ferrous metal casting molds
US4186100A (en) * 1976-12-13 1980-01-29 Mott Lambert H Inertial filter of the porous metal type
JPH10168505A (ja) 1996-12-10 1998-06-23 Tokyo Tungsten Co Ltd 低密度モリブデン焼結体及びその製造方法
WO2010148051A2 (fr) * 2009-06-18 2010-12-23 Entegris, Inc. Matériau poreux fritté comprenant des particules ayant différentes granulométries moyennes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1314284A (en) * 1970-11-30 1973-04-18 Du Pont Filter beds
JP2003511331A (ja) * 1999-10-05 2003-03-25 コーニング インコーポレイテッド 耐火性ｎｚｐ型構造体並びにその作成及び使用方法
DE10201357B4 (de) * 2002-01-16 2004-07-08 Aneziris, C.G., Prof. Dr.-Ing. habil. Verfahren zur Metall- und/oder Schlackenschmelzefiltration

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB901261A (en) * 1960-07-14 1962-07-18 Purolator Products Inc Sintered porous metal filter
US3508601A (en) * 1967-04-17 1970-04-28 American Metal Climax Inc Molybdenum screen for molten non-ferrous metal
US3565607A (en) 1967-11-08 1971-02-23 Nasa Method for removing oxygen impurities from cesium
US3598732A (en) * 1969-10-14 1971-08-10 American Metal Climax Inc Coated molybdenum mesh screen for ferrous metal casting molds
US4186100A (en) * 1976-12-13 1980-01-29 Mott Lambert H Inertial filter of the porous metal type
JPH10168505A (ja) 1996-12-10 1998-06-23 Tokyo Tungsten Co Ltd 低密度モリブデン焼結体及びその製造方法
WO2010148051A2 (fr) * 2009-06-18 2010-12-23 Entegris, Inc. Matériau poreux fritté comprenant des particules ayant différentes granulométries moyennes

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114100529A (zh) * 2022-01-24 2022-03-01 中天捷晟(天津)新材料科技有限公司 一种干式氟化装置及制备氟化铽的方法
DE102022201617A1 (de) 2022-02-16 2023-08-17 Technische Universität Bergakademie Freiberg, Körperschaft des öffentlichen Rechts Filterelement für eine Strömungsberuhigung und/oder Reinigung einer beim Gießen erhaltenen Schmelze sowie ein Verfahren zur Herstellung eines Filterelements
WO2023156367A1 (fr) 2022-02-16 2023-08-24 Technische Universität Bergakademie Freiberg Élément filtrant pour la stabilisation d'écoulement et/ou la purification d'une masse fondue obtenue lors de la coulée, et procédé de fabrication d'un élément filtrant
WO2024170295A1 (fr) * 2023-02-17 2024-08-22 Asml Netherlands B.V. Système de stockage et de distribution de matériau cible pour une source de rayonnement ultraviolet extrême

Also Published As

Publication number Publication date
TW201706033A (zh) 2017-02-16
AT14884U1 (de) 2016-08-15

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