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WO2016117796A3 - Optical frequency and intensity modulation laser absorption spectroscopy apparatus, and optical frequency and intensity modulation laser absorption spectroscopy method - Google Patents

Optical frequency and intensity modulation laser absorption spectroscopy apparatus, and optical frequency and intensity modulation laser absorption spectroscopy method Download PDF

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Publication number
WO2016117796A3
WO2016117796A3 PCT/KR2015/010538 KR2015010538W WO2016117796A3 WO 2016117796 A3 WO2016117796 A3 WO 2016117796A3 KR 2015010538 W KR2015010538 W KR 2015010538W WO 2016117796 A3 WO2016117796 A3 WO 2016117796A3
Authority
WO
WIPO (PCT)
Prior art keywords
laser absorption
optical frequency
intensity modulation
frequency
absorption spectroscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2015/010538
Other languages
French (fr)
Korean (ko)
Other versions
WO2016117796A2 (en
Inventor
이재용
김재완
박정재
우제흔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Korea Research Institute of Standards and Science
Original Assignee
Korea Research Institute of Standards and Science
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Research Institute of Standards and Science filed Critical Korea Research Institute of Standards and Science
Publication of WO2016117796A2 publication Critical patent/WO2016117796A2/en
Publication of WO2016117796A3 publication Critical patent/WO2016117796A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J3/433—Modulation spectrometry; Derivative spectrometry
    • G01J3/4338—Frequency modulated spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/423—Spectral arrangements using lasers, e.g. tunable

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention provides an optical frequency and intensity modulation laser absorption spectroscopy apparatus, and an optical frequency and intensity modulation laser absorption spectroscopy method. The optical frequency and intensity modulation laser absorption spectroscopy apparatus comprises: a full-field light source for outputting a field-of-view beam of visible ray bandwidth; a frequency and intensity modulation spectroscopy processing unit for frequency-modulating the optical frequency of a laser beam into a modulation frequency (fm) and intensity-modulating the intensity of the laser beam into a modulation frequency (fm) to thus output a probe beam, converting, into an electrical signal, a laser absorption signal produced by means of resonance absorption by a measurement object which receives the probe beam, and extracting a first harmonic component and a second harmonic component of the modulation frequency (fm) from the converted laser absorption signal; a beam processing unit for providing the field-of-view beam and the probe beam to an objective lens; and an objective lens for providing the field-of-view beam to the measurement object in a full-field light, and focusing the probe beam on the focal point thereof to thus provide the probe beam at a measurement position of the measurement object.
PCT/KR2015/010538 2015-01-19 2015-10-06 Optical frequency and intensity modulation laser absorption spectroscopy apparatus, and optical frequency and intensity modulation laser absorption spectroscopy method Ceased WO2016117796A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020150008870A KR101632269B1 (en) 2015-01-19 2015-01-19 Frequency And Intensity Modulation Laser Absorption Spectroscopy Apparatus and The Measuring Method Of The Same
KR10-2015-0008870 2015-01-19

Publications (2)

Publication Number Publication Date
WO2016117796A2 WO2016117796A2 (en) 2016-07-28
WO2016117796A3 true WO2016117796A3 (en) 2017-05-18

Family

ID=56354017

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2015/010538 Ceased WO2016117796A2 (en) 2015-01-19 2015-10-06 Optical frequency and intensity modulation laser absorption spectroscopy apparatus, and optical frequency and intensity modulation laser absorption spectroscopy method

Country Status (2)

Country Link
KR (1) KR101632269B1 (en)
WO (1) WO2016117796A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102179039B1 (en) 2020-05-28 2020-11-16 이영수 Notebook type monitor apparatus
CN113533249A (en) * 2021-06-09 2021-10-22 山东师范大学 A N2O detection system and method based on open optical path and wavelength modulation
CN114324209A (en) * 2021-12-29 2022-04-12 杭州谱育科技发展有限公司 Fluid detection device and method based on absorption spectroscopy
CN115015113B (en) * 2022-05-05 2025-04-04 东南大学 Spectral gas parameter measurement method and device based on signal power spectrum analysis
CN118243630A (en) * 2022-12-15 2024-06-25 香港中文大学 Gas sensing device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07159325A (en) * 1993-12-09 1995-06-23 Kose Corp Measuring apparatus for singlet oxygen
JPH11258156A (en) * 1998-03-11 1999-09-24 Nippon Sanso Kk Gas spectrometer and spectrometer
JP2011007571A (en) * 2009-06-24 2011-01-13 Nippon Telegr & Teleph Corp <Ntt> Multi-wavelength simultaneous absorption spectroscopic device, and multi-wavelength simultaneous absorption spectroscopic method
KR20130040228A (en) * 2010-07-09 2013-04-23 케이-스페이스 어소시에이츠 인코포레이티드 Real-time temperature, optical band gap, film thickness, and surface roughness measurement for thin films applied to transparent substrates
KR20140075002A (en) * 2011-10-11 2014-06-18 케이엘에이-텐코 코포레이션 Optical metrology tool equipped with modulated illumination sources

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07159325A (en) * 1993-12-09 1995-06-23 Kose Corp Measuring apparatus for singlet oxygen
JPH11258156A (en) * 1998-03-11 1999-09-24 Nippon Sanso Kk Gas spectrometer and spectrometer
JP2011007571A (en) * 2009-06-24 2011-01-13 Nippon Telegr & Teleph Corp <Ntt> Multi-wavelength simultaneous absorption spectroscopic device, and multi-wavelength simultaneous absorption spectroscopic method
KR20130040228A (en) * 2010-07-09 2013-04-23 케이-스페이스 어소시에이츠 인코포레이티드 Real-time temperature, optical band gap, film thickness, and surface roughness measurement for thin films applied to transparent substrates
KR20140075002A (en) * 2011-10-11 2014-06-18 케이엘에이-텐코 코포레이션 Optical metrology tool equipped with modulated illumination sources

Also Published As

Publication number Publication date
KR101632269B1 (en) 2016-06-21
WO2016117796A2 (en) 2016-07-28

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