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WO2016177370A1 - Système de mesure à compensation thermique et dispositif muni dudit système de mesure - Google Patents

Système de mesure à compensation thermique et dispositif muni dudit système de mesure Download PDF

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Publication number
WO2016177370A1
WO2016177370A1 PCT/DE2016/200204 DE2016200204W WO2016177370A1 WO 2016177370 A1 WO2016177370 A1 WO 2016177370A1 DE 2016200204 W DE2016200204 W DE 2016200204W WO 2016177370 A1 WO2016177370 A1 WO 2016177370A1
Authority
WO
WIPO (PCT)
Prior art keywords
measuring system
sensor
guide
measuring
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2016/200204
Other languages
German (de)
English (en)
Inventor
Gerhard Kirschner
Herbert FUELLMEIER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Messtechnik GmbH and Co KG
Original Assignee
Micro Epsilon Messtechnik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micro Epsilon Messtechnik GmbH and Co KG filed Critical Micro Epsilon Messtechnik GmbH and Co KG
Publication of WO2016177370A1 publication Critical patent/WO2016177370A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B1/00—Measuring instruments characterised by the selection of material therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Definitions

  • the invention relates to a Messsystenn with at least one contactless sensor which is along a guide, in particular a frame leg, a rail, a traverse or the like., Is movable relative to an object to be measured. Furthermore, the invention relates to a method which is used in a measuring system according to the invention.
  • the measuring system in question here finds its application in the measurement of the width of any objects, but also in the simultaneous measurement of width and thickness of any objects, wherein the objects are piece-shaped objects (eg sheets) or web-shaped objects ( eg bands).
  • the measurement is carried out regularly in a measuring gap with a measuring mechanism or measuring device attached to a machine frame, wherein the measuring device comprises at least one position sensor directed at the measuring object.
  • Devices with corresponding measuring systems and methods for using corresponding devices or measuring systems have been known for years in various embodiments from practice.
  • the width measurement of strip material by means of C- or O-frame-shaped measuring arrangements, wherein the measuring system comprises non-contact sensors.
  • the known systems bring a serious disadvantage with them, at least when they come at different temperatures or in the course of temperature used.
  • increasing temperature namely expands the frame leg or the traverse with the movable there sensors, thereby measuring errors.
  • width of the traverse thermal expansion is becoming increasingly important.
  • a reduction in temperature has the opposite effect, which also leads to measurement errors.
  • the thermal expansion also makes problems especially with incremental measuring systems, especially since there usually a steel carrier tape is used, which is magnetically encoded.
  • the code marks provided there are scanned magnetically or inductively. As the temperature increases, the band expands, increasing the distance of the code marks, resulting in a corresponding measurement error.
  • the present invention is therefore based on the object, a measuring system of the generic type to design and further develop that a precise determination of the width of a DUT is possible.
  • a thickness measurement should be possible simultaneously or in combination.
  • the generic measuring system is characterized in that for compensating thermal expansions of the measuring system, in particular the guide or a traverse or a code marks comprehensive carrier tape, a reference marks containing gauge, such as a ruler is arranged with the least possible thermal expansion parallel to the guide, wherein the reference marks are designed as geometrical, optical, electrical and / or magnetic marks, which are detectable according to their nature, wherein the positions of the reference marks can be determined via the at least one sensor of the measuring system or via a further sensor during a calibration drive.
  • a reference mark-containing gauge is provided, for example, a ruler.
  • the gauge has the lowest possible thermal expansion and is arranged parallel to the guide.
  • the reference marks are designed as geometric, optical, electrical and / or magnetic marks. They can be scanned or detected according to their nature by suitable sensor, wherein the position of the reference marks are determined via a sensor of the measuring system or via a further sensor during a calibration.
  • the measuring system according to the invention can be used quite generally in the context of the width measurement of piece-shaped objects, bands or webs, etc., also in the context of systems in which at the same time a Thickness measurement of the object or target takes place.
  • Essential is the temperature compensation in relation to the width measurement.
  • the width measurement may be combined with the thickness measurement, with one of at least two sensors involved in both measurements.
  • the measurement of width and thickness is thus combined in a single device, so that the least possible expenditure on equipment is required.
  • the processing of the measurement data and the underlying algorithms correspond to the methods used hitherto using non-contact sensors, so that it is possible to dispense with an explanation in this regard.
  • the sensors used for the actual measurement are designed as optical sensors, which may be laser sensors or laser profile sensors or laser scanners. With the laser profile sensors, the width of the object, for example, one or more adjacent / running bands, measured, each of the two sensors detects an edge of the tape to be measured. The laser line runs transversely to the edge of the strip.
  • the laser profile sensors are fastened in a further advantageous manner on sensor carriages which are seated on a guide or traversing unit. Accordingly, the laser profile sensors can be moved transversely to the tape direction according to the length of the crosshead.
  • two opposing sensors forming the measuring gap are provided, which are preferably mechanically coupled in their movement. Accordingly, they run synchronously.
  • the two sensors intended for thickness measurement move together along a traverse or the like, preferably on a carriage above and below the object up to the edge regions or edges of the object, over the object and up to the opposite edge region or to the edge and back.
  • the approach and determination of the edge coordinates of the object is used for width measurement and the driving over the object can be used for thickness measurement.
  • the measuring device comprises at least one third non-contact sensor, preferably also an optical sensor, in particular a laser sensor or a laser profile sensor or laser scanner, which is used together with the first sensor for width measurement.
  • the third sensor operates independently of the first two sensors and is preferably movable on a carriage with its own drive along one of the two traverses.
  • the third sensor runs on the same Traverse as the first sensor. It should be noted that the term "traverse" is to be understood as a linear guide.
  • the measuring system can be assigned to a C or O frame, wherein it is essential that the sensors can be moved along a traverse transversely to the conveying direction of the object.
  • the measuring device comprises a calibration standard to which reference measurements serving to calibrate the sensors / measuring system can be carried out.
  • a calibration standard to which reference measurements serving to calibrate the sensors / measuring system can be carried out.
  • FIG. 2 shows a schematic representation of an embodiment of a measuring system according to the invention with the basic provision of a device for compensating thermal expansions of the measuring device or the guide or traverse,
  • Fig. 3 is a schematic representation of an embodiment of a
  • FIG. 4 is a schematic representation of the device of FIG. 3, in a second step the calibration of the width (horizontal sensor distance),
  • Fig. 5 is a schematic representation of the device of Fig. 3, in a third step, the detection of the edges, that is, the measurement of the width and
  • FIG. 6 is a schematic representation of the apparatus of FIG. 3, in a fourth step the thickness measurement.
  • the width measurement can be made in strip material of different width, the sensors 1, 3 are mounted on sensor slides 4, 6, the on drive a traversing unit, whereby the sensors are movable transversely to the tape direction.
  • This sensor 2 is coupled to the sensor 1, so that the two sensors 1, 2 run synchronously.
  • the sensors 1 and 2 serve to measure the thickness in the measuring gap 10.
  • the distance wp of the two sensors 1, 3 is detected in practice by means of an incremental measuring system.
  • an offset where between the measured value of the sensors 1, 3 and the incrementally measured distance due to tolerances, etc. is to be taken into account, wherein the sign of the measured values from the middle of the line to the frame is negative and from the line center to the carrier positive.
  • the width WA of a target or object 1 1 is thus calculated by:
  • Figure 2 shows an embodiment of a measuring system according to the invention, according to which a special temperature compensation is provided. Since the distance w p of the two commonly provided sensors is regularly detected by means of an incremental measuring system, an offset is between where Measured value of the profile sensors and the incrementally measured distance due to tolerances, etc. to be considered. Here, a calibration is performed regularly. With regard to temperature-related measurement errors, it is important that the incremental measuring system is based on a steel carrier tape 15 which is magnetically coded. The code marks are scanned magnetically or inductively. As the temperature increases, the band expands, increasing the distance of the code marks, resulting in a corresponding measurement error. With increasing widths of the traverse or the carrier tape 15, the thermal expansion is becoming increasingly important.
  • a reduction in temperature has the opposite effect, which also leads to significant measurement errors.
  • It is a ruler 12 provided of a material with the least possible thermal expansion, for example made of carbon fiber reinforced plastic (CFRP) or glass-ceramic material (Zerodur®), the thermal expansion is negligible.
  • Reference marks 13 are embedded in the ruler. The marks 13 can be detected with a further sensor 14 which is arranged on the sensor carriage 4 and / or 6 of the traversing unit 7.
  • the calibration of the distance of the reference marks could also be carried out in the laboratory by measuring and storing the distance of the reference marks on the ruler with an independent measuring device (distance sensor, scale, etc.) under known ambient conditions (room temperature TO).
  • the position of the reference marks 13 at certain intervals for example, at time t, measured. If the length of the carrier strip or the guide changes, for example due to temperature expansion, then the position value of the marker 13 changes at the time t, and the extension of the guide can be measured by changing the difference between two marker positions Mp, and ⁇ , + ⁇ . Taking into account the extent of the tape measure
  • Aw (t) (M Pi (t0) -M) - ⁇ M m -M holds for the width at time t
  • W A W p + W 0 ⁇ ( W M l + W M l ⁇ (Decisive is a clever combination of marker 13 and another sensor 14.
  • the mark 13 must be easily detected by the sensor It is possible to use almost any geometrical, optical, magnetic or electrical markers 13. Furthermore, it is necessary for the position of the mark 13 to be determined with sufficient accuracy, which is why sensors which measure almost point-wise, for example optical ones, are particularly advantageous sensors.
  • Figures 3 to 6 show the basic structure of a generic device for width and thickness measurement, which is influenced by the thermal expansion of the frame parts.
  • a band 1 1 is provided as an object or target.
  • the measuring device shown in FIGS. 2 to 6 comprises a first sensor 1, an opposing second sensor 2 and a third sensor 3 independent of the first sensor 1 and the second sensor 2 in the movement.
  • the sensors 1, 2 and 3 are concerned These are optical sensors, more precisely laser profile sensors or laser scanners.
  • the two opposing sensors 1 and 2 are mechanically coupled in their movement, thus move synchronously.
  • the third sensor 3 moves independently thereof.
  • the sensors 1 and 3 are each associated with a carriage 4, 5.
  • the third sensor 3 is associated with a carriage 6.
  • the slides 4, 5 and 6 with the attached sensors 1, 2 and 3 run along a guide or traverse 7, 8, wherein the sensors 1 and 3 along the upper cross member 7 and the sensor 2 along the lower cross member 8 is movable ,
  • the trusses 7, 8 are part of a frame not shown in the figures.
  • An integral part of the device is a calibration standard 9, which serves both to calibrate the sensor arrangement with respect to the thickness measurement and with respect to the width measurement or the determination of the edges.
  • the measurement object runs, which is a singular band 1 1.
  • the direction of movement of the belt 1 1 is directed into the image plane.
  • the sensors 1, 2 and 3 or the slides 4, 5 and 6 move transversely to the direction of movement of the belt 1 1.
  • Figure 3 shows in a first step, the thickness calibration based on the calibration standard 9, wherein the first sensor 1 and the second sensor. 2 measure in a known manner against each other and wherein the calibration standard 9 between the two mutually assigned sensors 1, 2 is located.
  • the third sensor 3 has no function in the first step.
  • FIG. 4 shows in the second step the width calibration, the first sensor 1 and / or the second sensor 2 detecting the left edge of the calibration standard 9 and the third sensor 3 detecting the right edge of the calibration standard 9.
  • the width of the band 1 1 is measured, wherein the first and second sensors 1, 2 coupled in the movement detect the left edge of the band 1 1 and the third sensor 3 the right edge of the band 1 1.
  • the first sensor 1 and the second sensor 2 (sensor pair 1, 2) move transversely to the direction of movement of the belt 1 1 along the width of the belt 1 1 to the right to measure the thickness of the belt 1 1 across the entire width
  • Step four is shown in FIG. Only after the sensor pair 1, 2 has returned to the left starting position, the width can be measured again according to step 3 of FIG 5.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un système de mesure muni d'au moins un capteur fonctionnant sans contact qui peut se déplacer par rapport à un objet à mesurer le long d'un guide, en particulier d'un montant de cadre, d'un rail, d'une traverse ou similaire. Selon l'invention, pour la compensation des dilatations thermiques du système de mesure, en particulier du guide, un gabarit portant des marques de référence, par exemple une règle, présentant la dilatation thermique la plus faible possible, est agencé parallèlement au guide. Les marques de référence sont réalisées sous la forme de marques géométriques, optiques, électriques et/ou magnétiques qui peuvent être détectées selon leur nature, et les positions des marques de référence peuvent être déterminées pendant un parcours d'étalonnage par l'intermédiaire du ou des capteurs du système de mesure ou par l'intermédiaire d'un autre capteur.
PCT/DE2016/200204 2015-05-05 2016-05-03 Système de mesure à compensation thermique et dispositif muni dudit système de mesure Ceased WO2016177370A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015208324.1 2015-05-05
DE102015208324 2015-05-05

Publications (1)

Publication Number Publication Date
WO2016177370A1 true WO2016177370A1 (fr) 2016-11-10

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DE (1) DE102016207656A1 (fr)
WO (1) WO2016177370A1 (fr)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111486810B (zh) * 2020-05-22 2025-06-06 山西慧达澳星科技有限公司 一种实时在线检测输送带厚度的装置及检测方法
CN111692976B (zh) * 2020-06-08 2022-09-09 中国科学院合肥物质科学研究院 一种温度形变自补偿的数显长度基准装置

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3001980A1 (de) * 1980-01-21 1981-07-23 Thomas Josef Heimbach GmbH & Co, 5160 Düren Vorrichtung zur kontrolle der beschaffenheit breiter bahnen
DE3543852A1 (de) 1985-12-12 1987-06-19 Elmeg Fotoelektrische einrichtung zur erfassung der lage einer bandkante
DE3900928C1 (fr) 1989-01-14 1990-06-21 Erhardt + Leimer Gmbh, 8900 Augsburg, De
US4950079A (en) * 1987-03-06 1990-08-21 Renishaw Plc Combined scale and interferometer
DE4134371A1 (de) * 1991-10-17 1993-04-22 Zeiss Carl Fa Verfahren zur messung der effektiven momentanposition eines von einem schlitten getragenen tastelementes bzw. werkzeugs
DE4126921C2 (de) 1991-08-14 1996-01-18 Elmeg Vorrichtung zur induktiven Messung der Lage eines Metallbandes
WO1998014751A1 (fr) 1995-03-31 1998-04-09 Micro-Epsilon Messtechnik Gmbh & Co. Kg Capteur pour mesurer sans contact l'epaisseur de feuilles
DE10013786A1 (de) * 2000-03-20 2001-10-11 Christoph Keller Verfahren zum Messen von unterschiedlichen Parametern wie Länge, Dicke, Breite und/oder Planheit zumindest einer Platte
DE102006024761A1 (de) 2006-05-27 2007-11-29 Sms Demag Ag Vorrichtung zum Messen der Breite und/oder der Bandlage eines Metallbandes oder einer Bramme
US20120105866A1 (en) * 2009-07-03 2012-05-03 Leica Geosystems Ag Coordinate measuring machine (cmm) and method of compensating errors in a cmm

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3001980A1 (de) * 1980-01-21 1981-07-23 Thomas Josef Heimbach GmbH & Co, 5160 Düren Vorrichtung zur kontrolle der beschaffenheit breiter bahnen
DE3543852A1 (de) 1985-12-12 1987-06-19 Elmeg Fotoelektrische einrichtung zur erfassung der lage einer bandkante
US4950079A (en) * 1987-03-06 1990-08-21 Renishaw Plc Combined scale and interferometer
DE3900928C1 (fr) 1989-01-14 1990-06-21 Erhardt + Leimer Gmbh, 8900 Augsburg, De
DE4126921C2 (de) 1991-08-14 1996-01-18 Elmeg Vorrichtung zur induktiven Messung der Lage eines Metallbandes
DE4134371A1 (de) * 1991-10-17 1993-04-22 Zeiss Carl Fa Verfahren zur messung der effektiven momentanposition eines von einem schlitten getragenen tastelementes bzw. werkzeugs
WO1998014751A1 (fr) 1995-03-31 1998-04-09 Micro-Epsilon Messtechnik Gmbh & Co. Kg Capteur pour mesurer sans contact l'epaisseur de feuilles
DE10013786A1 (de) * 2000-03-20 2001-10-11 Christoph Keller Verfahren zum Messen von unterschiedlichen Parametern wie Länge, Dicke, Breite und/oder Planheit zumindest einer Platte
DE102006024761A1 (de) 2006-05-27 2007-11-29 Sms Demag Ag Vorrichtung zum Messen der Breite und/oder der Bandlage eines Metallbandes oder einer Bramme
US20120105866A1 (en) * 2009-07-03 2012-05-03 Leica Geosystems Ag Coordinate measuring machine (cmm) and method of compensating errors in a cmm

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