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WO2016173947A1 - Procédé et dispositif de fabrication d'un capteur à ultrasons pour un véhicule automobile - Google Patents

Procédé et dispositif de fabrication d'un capteur à ultrasons pour un véhicule automobile Download PDF

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Publication number
WO2016173947A1
WO2016173947A1 PCT/EP2016/059042 EP2016059042W WO2016173947A1 WO 2016173947 A1 WO2016173947 A1 WO 2016173947A1 EP 2016059042 W EP2016059042 W EP 2016059042W WO 2016173947 A1 WO2016173947 A1 WO 2016173947A1
Authority
WO
WIPO (PCT)
Prior art keywords
adhesive
piezoelectric element
membrane
infrared radiation
ultrasonic sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2016/059042
Other languages
German (de)
English (en)
Inventor
Wolfgang Katzenberger
Lukas Berger
Markus Osterrieder
Ceren OEZAYDIN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Valeo Schalter und Sensoren GmbH
Original Assignee
Valeo Schalter und Sensoren GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valeo Schalter und Sensoren GmbH filed Critical Valeo Schalter und Sensoren GmbH
Publication of WO2016173947A1 publication Critical patent/WO2016173947A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K9/00—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers
    • G10K9/12—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated
    • G10K9/122—Devices in which sound is produced by vibrating a diaphragm or analogous element, e.g. fog horns, vehicle hooters or buzzers electrically operated using piezoelectric driving means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
    • H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives

Definitions

  • the present invention relates to a method for producing an ultrasonic sensor for a motor vehicle by providing a membrane for emitting and / or receiving an ultrasonic signal, providing a piezoelectric element for exciting the membrane and / or generating an electrical signal due to the received ultrasonic signal and connecting the piezoelectric element and the membrane by means of an adhesive.
  • the present invention also relates to an apparatus for manufacturing an ultrasonic sensor for a motor vehicle.
  • Ultrasonic sensors are already state of the art. They are usually used in the so-called parking aid system to help the driver maneuver
  • the ultrasonic sensors measure the distances between the motor vehicle on the one hand and the obstacles located in its surroundings on the other hand.
  • an ultrasound is emitted, which then reflects on the obstacle in the vicinity of the motor vehicle and returns to the ultrasound sensor, in the form of an echo. This ultrasound is received using the membrane.
  • To send out the ultrasound is the
  • the excitation of the membrane can be particularly effective using the piezoelectric element and vice versa
  • the electrical signal can be generated very precisely by the piezoelectric element
  • the piezoelectric element is usually using a
  • Adhesive bonded to the membrane Adhesive bonded to the membrane.
  • Piezoceramic components on a carrier body in which in a first step, a transportable in a production machine tape is produced, which has a printed with adhesive surfaces base film. Next, the tape is provided with a cover sheet. In a further method step, the cover film is removed for joining the piezoceramic component with the adhesive surface and the piezoceramic component is pressed in each case on the adhesive surface. It can thereby be achieved that the final strength of the arrangement can already be achieved by a simple pressing.
  • DE 10 201 1 120 391 A1 discloses an ultrasonic sensor for a
  • the adhesive is a cold curing anaerobic adhesive, which preferably hardens under exclusion of air.
  • the adhesive is additionally a UV-curing adhesive. So it can be used a total of a dual-curing adhesive, which cures both alone under exclusion of air as well as alone under UV radiation.
  • a method for producing an ultrasonic transducer for use in a fluid medium is described in DE 10 2008 055 1 16 A1.
  • at least one piezoelectric transducer element is connected directly or indirectly with at least one matching body to favor a vibration coupling between the piezoelectric transducer element and the fluid medium.
  • the piezoelectric transducer element and the matching body can be connected to each other by means of a bond.
  • the adhesive may be, for example, a UV-curing adhesive, which is optionally fully cured under the influence of heat.
  • Ultrasonic transducer for use in a fluid medium known.
  • Ultrasonic transducer has an intermediate element between an electromechanical transducer element and a matching body.
  • the intermediate element is adhered to the electromechanical transducer using a photocuring adhesive.
  • the photochemical curing can be additionally supported by a thermal action, for example by infrared radiation.
  • the excitation light penetrates the intermediate element at least partially.
  • Intermediate element can be made of glass or crystal.
  • Ultrasonic sensor or the type mentioned can be made faster and cheaper. This object is achieved by a method, by a device and by an ultrasonic sensor having the features according to the respective independent claims.
  • Advantageous embodiments of the invention are the subject of the dependent claims, the description and the figures.
  • An inventive method is used to produce an ultrasonic sensor for a motor vehicle.
  • the method includes providing a membrane for emitting and / or receiving an ultrasonic signal.
  • the method comprises providing a piezoelement for exciting the membrane and / or generating an electrical signal on the basis of the received ultrasound signal.
  • the method comprises connecting the piezoelectric element and the membrane by means of a
  • Adhesive Finally, the method includes providing infrared radiation by means of an infrared radiation source for curing the adhesive.
  • the membrane of the ultrasonic sensor may be made of aluminum, for example.
  • the membrane may in particular be designed pot-shaped and have a membrane bottom and a membrane wall.
  • the piezoelectric element may in particular comprise a piezoelectric material.
  • the piezoelectric element may comprise a piezoelectric ceramic on which a metallization for electrical
  • the piezoelectric element is adhesively bonded to the membrane by means of the adhesive.
  • an electrical voltage can be applied to the piezoelectric element. This causes the piezoelectric element and the mechanically mechanically coupled to the piezoelectric element membrane to be excited to mechanical vibrations.
  • the voltage generated by the piezoelectric element can be measured as a function of time.
  • the piezoelectric element is excited to mechanical vibrations. These mechanical vibrations cause an electrical voltage to be tapped at the piezoelectric element.
  • the adhesive can be applied in liquid form to a rear side of the membrane bottom on an inner side of the membrane. Then that can
  • Piezo element are arranged on the adhesive.
  • infrared radiation is provided by means of an infrared radiation source.
  • the infrared radiation is provided in particular by means of the infrared light source or by means of an infrared radiator such that it impinges from outside on the membrane bottom or on a front side of the membrane base.
  • the Infrared radiation generates thermal energy through which the adhesive
  • the energy can be transferred without contact by the infrared radiation, wherein the energy is converted into heat only with the absorption in the adhesive to be heated.
  • the use of infrared radiation to generate heat has the advantage over shorter manufacturing processes, for example using continuous furnaces
  • Process times can be achieved. This allows, for example, that the adhesive can be cured within a process time of a few minutes. When using furnaces usually process times of a few hours can be achieved. Thus, the production of the ultrasonic sensor can be done faster and thus cheaper. In addition, it requires no intermediate element, which is formed for example of glass or a crystal to connect the piezoelectric element with the membrane.
  • the use of infrared radiation also has the advantage that only a local heating takes place. Furthermore, the infrared radiation can be provided over short distances and also a precise controllability can be made possible. The infrared radiation is also not harmful to health. In addition, the infrared light source can be provided inexpensively.
  • the piezoelectric element and the membrane are connected by means of a dual-curing adhesive.
  • the adhesive can be cured by means of two different curing mechanisms.
  • the adhesive may include, for example, an acrylate. This is particularly suitable in the production of ultrasonic sensors in which areas of the adhesive are sealed off from irradiation by means of a radiation source.
  • the adhesive is additionally irradiated with ultraviolet radiation by means of a light source.
  • a light source for example, a corresponding UV light source can be used here.
  • ultraviolet radiation may be radiated to at least a predetermined area of the adhesive.
  • the adhesive in addition to infrared radiation, the adhesive can also be irradiated with ultraviolet radiation and thus cured by means of different curing mechanisms.
  • a first region of the adhesive which is located outside a gap between the piezoelectric element and the membrane, cured by means of the ultraviolet radiation.
  • the intermediate region between the membrane and the piezoelectric element is the area or proportion of the adhesive which is covered or shaded by the piezoelectric element.
  • This area of different first area of the adhesive which is outside the intermediate area or an edge area, can be cured by means of the ultraviolet radiation.
  • a second region of the adhesive which is located in the intermediate space between the piezoelectric element and the membrane, is cured without contact by means of the infrared radiation.
  • the second region or the second portion of the adhesive, which is located in the intermediate region is through the
  • Adhesive can now be cured by the action of infrared radiation.
  • the curing of the second region of the adhesive by means of the infrared radiation preferably takes place after the curing of the first region of the adhesive by means of the ultraviolet radiation.
  • the adhesive in the second area can be cured reliably.
  • the membrane and the piezoelectric element that are provided are opaque to the ultraviolet radiation. This means that the second area of the adhesive can not be cured by means of the ultraviolet radiation. Thus, as already explained, the infrared radiation with which this second region can be cured is used. Thus, a reliable bond between the membrane and the piezoelectric element can be provided.
  • the thermal energy provided by the infrared radiation source during curing of the adhesive is preferably controlled.
  • Radiation sensor in particular a pyrometer, can with a
  • Infrared radiation source provided radiation energy or thermal energy are detected. Depending on the detected thermal energy, the radiant power provided by the infrared radiation source can then be adjusted. It can also be provided that the radiation provided with the infrared radiation source is regulated by means of a corresponding control loop. Thus, it can be guaranteed that the curing process of the adhesive takes place reliably.
  • At least one electrical connection element is soldered to the piezoelectric element.
  • two electrical connection elements can be soldered to the piezoelectric element.
  • the piezoelectric element can be subjected to an electrical voltage.
  • the electrical voltage generated by the piezoelectric element can be tapped off via the electrical connection elements.
  • the predetermined cooling time can be selected so that the piezoelectric element after expiration of the predetermined cooling time has approximately room temperature.
  • a device according to the invention serves to produce an ultrasonic sensor for a motor vehicle.
  • the device according to the invention is for performing a
  • the device may in particular comprise an infrared light source.
  • the device may include multiple manufacturing devices.
  • the adhesive can be applied to the membrane and then the piezoelectric element are applied to the adhesive.
  • the first region of the adhesive can be irradiated by means of the ultraviolet radiation.
  • An inventive ultrasonic sensor for a motor vehicle is produced according to a method according to the invention or by means of a device according to the invention.
  • Embodiments and their advantages apply correspondingly to the device according to the invention and to the ultrasonic sensor according to the invention.
  • FIG. 1 shows a schematic representation of a cross section through a membrane and a piezoelectric element of an ultrasonic sensor according to an embodiment of the invention
  • FIG. 2 is a schematic representation of the ultrasonic sensor
  • Fig. 3 shows a schematic representation of an apparatus for producing the
  • an ultrasonic sensor 1 is shown in a schematic representation, which has a membrane 2 and a piezoelectric element 3, that is, a piezoelectric element.
  • the membrane 2 may, for example, be arranged on a base 4, so that it is supported by the base 4.
  • the membrane 2 is made of aluminum and serves to emit ultrasonic waves. It can also serve to receive reflected ultrasonic waves.
  • the membrane 2 is excited to a mechanical vibration, namely by means of the piezoelectric element 3.
  • an electrical voltage is applied to the piezoelectric element 3, due to which the piezoelectric element 3 and thus the associated membrane are excited to vibrate.
  • the membrane 2 is excited by these ultrasonic waves, so that the piezoelectric element 3 comes into mechanical vibration and generates an electrical signal.
  • This electrical signal can then be evaluated in terms of distances, such as by means of a
  • the piezoelectric element 3 is arranged on a rear side 5 of the membrane 2 fittingly, namely mediated by an adhesive 6. This means that the piezoelectric element 3 is firmly connected by means of the adhesive 6 with the back 5 of the membrane 2, so that the piezoelectric element 3 together with the membrane 2 can swing.
  • the adhesive 6 has two different areas.
  • a first region 10 is located outside a gap between the membrane 2 and the piezoelectric element 3.
  • the first region 10 of the adhesive 6, which is not covered by the piezoelectric element 3, can - as explained in more detail below - cured by means of ultraviolet radiation or UV radiation become.
  • a second region 1 1 of the adhesive 6 is located in the intermediate space between the membrane 2 and the piezoelectric element 3. This second region 1 1 of the adhesive 6 is thus covered by the piezoelectric element.
  • the second region 1 1 of the adhesive 6 can - as explained in more detail below - means
  • the piezoelectric element 3 has the circular shape and is formed in the form of a thin plate.
  • the piezoelectric element 3 is therefore a circular disc which can be inserted into a sensor housing 7, as shown schematically in FIG. 2 by means of arrow representations 8.
  • the sensor housing 7 is formed for example of plastic. It can be provided that the
  • Sensor housing 7 is formed in one or more parts. It also has one
  • Computing device can be electrically coupled, for example via a communication bus of the motor vehicle.
  • FIG. 3 shows a schematic illustration of a device 12 for producing the ultrasound sensor 1.
  • the device 12 may have a plurality of manufacturing devices, not shown here, in which the ultrasonic sensor 1 is produced in succession. This is illustrated in the present case by the arrows 14.
  • the preparation can be done for example manually, semi-automatically or fully automated.
  • the ultrasonic sensors 1 individually or more of the ultrasonic sensors 1 in pallets can be processed simultaneously or sequentially.
  • the upper area of FIG. 3 describes the manufacture of the ultrasonic sensor 1 at a first production facility.
  • the ultrasonic sensor 1 is located on a first working surface 13.
  • the adhesive 6 is applied to the membrane 2 and then the piezoelectric element 3 is applied to the adhesive 6.
  • the ultrasonic sensor 1 is located on a second working surface 15.
  • the ultrasonic sensor is irradiated by means of a light source 16 or a UV light source with UV radiation.
  • the first region 10 of the adhesive 6 is irradiated with the UV radiation and thus cured.
  • the edge region of the adhesive 6 can be cured.
  • radiation in a wavelength range can be adapted to the adhesive 6, in particular to its thickness and / or to the amount of inhibitors in the adhesive 6.
  • a radiation intensity can be provided which corresponds to the desired cycle time, measured in watts per square meter.
  • Curing of the adhesive 6 or the first region 10 of the adhesive 6 can be adjusted over the exposure time.
  • the lower area of FIG. 3 describes a further step in the production of the ultrasonic sensor 1 by means of a production device.
  • the ultrasonic sensor 1 is arranged on a third work surface 16, which may be formed for example by a thin metal plate.
  • an infrared radiation source 18 is provided, by means of which infrared radiation can be provided.
  • infrared radiation source 18 may have a power in a range between 1 and 3 kilowatts and a maximum power density in a range between 5 and 30 watts per square centimeter, but may vary depending on the materials used, adhesive 6, and wall thicknesses. Thus, a spectral maximum can be in a range between 500 and 1000 nanometers.
  • the irradiation time during which the adhesive 6 or the second region 11 of the adhesive 6 is irradiated with infrared radiation may be, for example, 1 minute.
  • the infrared radiation provided with the infrared radiation source 18 can be monitored by means of a pyrometer 19. Depending on the measurement signals of the pyrometer 19, the radiant power provided with the infrared radiation source 18 can be controlled.
  • Ultrasonic sensor 1 for a predetermined cooling time which is, for example, 20 minutes, are cooled, so that the ultrasonic sensor 1 substantially
  • connection elements can be, for example, corresponding cables.
  • solder paste For soldering a corresponding solder paste can be used.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

L'invention concerne un procédé de fabrication d'un capteur à ultrasons (1) pour un véhicule automobile par fourniture d'une membrane (2) pour émettre et/ou recevoir un signal ultrasonique, fourniture d'un élément piézoélectrique (3) pour exciter la membrane (2) et/ou pour générer un signal électrique sur la base du signal ultrasonique reçu, liaison de l'élément piézoélectrique (3) et de la membrane (5) au moyen d'un adhésif (6) et fourniture d'un rayonnement infrarouge au moyen d'une source de rayonnement infrarouge (18) pour durcir l'adhésif (6).
PCT/EP2016/059042 2015-04-28 2016-04-22 Procédé et dispositif de fabrication d'un capteur à ultrasons pour un véhicule automobile Ceased WO2016173947A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015106484.7 2015-04-28
DE102015106484.7A DE102015106484A1 (de) 2015-04-28 2015-04-28 Verfahren und Vorrichtung zum Herstellen eines Ultraschallsensors für ein Kraftfahrzeug

Publications (1)

Publication Number Publication Date
WO2016173947A1 true WO2016173947A1 (fr) 2016-11-03

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PCT/EP2016/059042 Ceased WO2016173947A1 (fr) 2015-04-28 2016-04-22 Procédé et dispositif de fabrication d'un capteur à ultrasons pour un véhicule automobile

Country Status (2)

Country Link
DE (1) DE102015106484A1 (fr)
WO (1) WO2016173947A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023102538A1 (de) 2023-02-02 2024-08-08 Valeo Schalter Und Sensoren Gmbh Herstellung eines Ultraschallsensors mit einem Dämpfungsmaterial
DE102023102541A1 (de) 2023-02-02 2024-08-08 Valeo Schalter Und Sensoren Gmbh Ultraschallsensor und Ultraschallsensorsystem für ein Kraftfahrzeug

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102018109319B4 (de) 2018-04-19 2022-09-22 Valeo Schalter Und Sensoren Gmbh Ultraschallsensor für ein Kraftfahrzeug, Kraftfahrzeug und Verfahren zum Herstellen eines Ultraschallsensors
FR3130825B1 (fr) * 2021-12-17 2024-10-04 Valeo Vision Composition de colle photodurcissable et procédé d’assemblage associé
DE102023129207A1 (de) 2023-10-24 2025-04-24 Valeo Schalter Und Sensoren Gmbh Verfahren zum Einstellen einer Resonanzfrequenz einer Membran einer Ultraschallsensoreinrichtung für ein Kraftfahrzeug sowie Ultraschallsensoreinrichtung

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JP2008149588A (ja) * 2006-12-18 2008-07-03 Ricoh Co Ltd 圧電アクチュエータ、液体吐出ヘッド、画像形成装置
US20100154560A1 (en) * 2008-12-23 2010-06-24 Roland Mueller Method for manufacturing an ultrasonic transducer
EP2246401A1 (fr) * 2009-04-30 2010-11-03 Valeo Schalter und Sensoren GmbH Procédé de collage de composants piézocéramiques et colle destinée à l'exécution du procédé
US20110141205A1 (en) * 2009-12-15 2011-06-16 Xerox Corporation Method of Removing Thermoset Polymer From Piezoelectric Transducers in a Print Head

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DE19538680C2 (de) * 1995-10-17 1998-10-08 Endress Hauser Gmbh Co Anordnung zur Überwachung eines vorbestimmten Füllstands einer Flüssigkeit in einem Behälter
DE102011120391A1 (de) 2011-12-06 2013-06-06 Valeo Schalter Und Sensoren Gmbh Ultraschallsensor für ein Kraftfahrzeug, Kraftfahrzeug und Verfahren zum Herstellen eines Ultraschallsensors
DE102012207871A1 (de) 2012-05-11 2013-11-14 Robert Bosch Gmbh Verfahren zur Herstellung eines Ultraschallwandlers zum Einsatz in einem fluiden Medium
DE102013211596A1 (de) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Verfahren zum elektrischen Kontaktieren einer Piezokeramik

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008149588A (ja) * 2006-12-18 2008-07-03 Ricoh Co Ltd 圧電アクチュエータ、液体吐出ヘッド、画像形成装置
US20100154560A1 (en) * 2008-12-23 2010-06-24 Roland Mueller Method for manufacturing an ultrasonic transducer
EP2246401A1 (fr) * 2009-04-30 2010-11-03 Valeo Schalter und Sensoren GmbH Procédé de collage de composants piézocéramiques et colle destinée à l'exécution du procédé
US20110141205A1 (en) * 2009-12-15 2011-06-16 Xerox Corporation Method of Removing Thermoset Polymer From Piezoelectric Transducers in a Print Head

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102023102538A1 (de) 2023-02-02 2024-08-08 Valeo Schalter Und Sensoren Gmbh Herstellung eines Ultraschallsensors mit einem Dämpfungsmaterial
DE102023102541A1 (de) 2023-02-02 2024-08-08 Valeo Schalter Und Sensoren Gmbh Ultraschallsensor und Ultraschallsensorsystem für ein Kraftfahrzeug

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