WO2016158114A1 - 着色感光性組成物、硬化膜、パターン形成方法、遮光膜付き赤外光カットフィルタ、固体撮像素子、画像表示装置および赤外線センサ - Google Patents
着色感光性組成物、硬化膜、パターン形成方法、遮光膜付き赤外光カットフィルタ、固体撮像素子、画像表示装置および赤外線センサ Download PDFInfo
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/40—Optical elements or arrangements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8053—Colour filters
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8057—Optical shielding
Definitions
- the present invention relates to a colored photosensitive composition, a cured film, a pattern forming method, an infrared light cut filter with a light shielding film, a solid-state imaging device, an image display device, and an infrared sensor.
- a color filter is an indispensable component for a solid-state imaging device and an image display device.
- noise may be generated due to reflection of visible light.
- it has also been attempted to suppress the generation of noise by providing a light-shielding film on a solid-state imaging device or an image display device.
- a colored composition layer is formed using a colored photosensitive composition containing a colorant, a polymerizable compound, a photopolymerization initiator, and an alkali-soluble resin, A method for forming a pattern by exposing and developing the colored composition layer is known.
- photopolymerization initiators oxime ester photopolymerization initiators containing fluorine atoms are known (see Patent Documents 1 to 3).
- Patent Documents 1 to 3 disclose oxime ester photopolymerization initiators containing fluorine atoms, while Patent Documents 1 to 3 contain oxime ester photopolymerization initiators containing fluorine atoms. There is no disclosure or suggestion of using a colored photosensitive composition to form a film having low transmittance with respect to light having a wavelength of 365 nm with good adhesion.
- an object of the present invention is to provide a colored photosensitive composition capable of forming a film having low transmittance with respect to light having a wavelength of 365 nm with good adhesion. Moreover, it is providing the cured film using a coloring photosensitive composition, the pattern formation method, the infrared-light cut filter with a light shielding film, a solid-state image sensor, an image display apparatus, and an infrared sensor.
- the present inventors have found that when a film having a thickness of 2.0 ⁇ m after drying is formed, the colored photosensitive composition having an optical density of 1.5 or more at a wavelength of 365 nm is obtained.
- the inventors have found that the above object can be achieved by including an oxime ester-based photopolymerization initiator containing a fluorine atom, and have completed the present invention. That is, the present invention is as follows.
- a colored photosensitive composition comprising an oxime ester-based photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, an alkali-soluble resin, and a colorant, A colored photosensitive composition having an optical density of 1.5 or more at a wavelength of 365 nm when a film having a thickness of 2.0 ⁇ m after drying is formed using the photosensitive composition.
- the oxime ester photopolymerization initiator containing a fluorine atom has an alkyl group having a fluorine atom.
- the colored photosensitive composition according to ⁇ 1> or ⁇ 2>, wherein the oxime ester-based photopolymerization initiator containing a fluorine atom includes a compound represented by the following formula (1a):
- a 1 and A 2 each independently represents an alkyl group, an acyl group, an aryl group or a heterocyclic group
- a 3 represents an alkyl group, an aryl group or a heterocyclic group
- a 1 to A 3 contain a fluorine atom.
- the colored photosensitive composition according to ⁇ 1> or ⁇ 2>, wherein the oxime ester-based photopolymerization initiator containing a fluorine atom includes a compound represented by the following formula (1):
- Ar 1 and Ar 2 each independently represent an aromatic hydrocarbon ring which may have a substituent
- R 1 represents an aryl group having a group containing a fluorine atom
- R 2 and R 3 each independently represents an alkyl group or an aryl group.
- the ratio of the minimum absorbance A in the wavelength range of 400 nm to less than 580 nm and the minimum absorbance B in the wavelength range of 580 nm to 750 nm of the colored photosensitive composition containing the organic pigment A / B is 0.3 to 3
- the ratio C / D between the minimum absorbance C in the wavelength range of 400 nm to 750 nm and the maximum absorbance D in the wavelength range of 1000 nm to 1300 nm is 5 or more.
- the colored photosensitive composition according to any one of ⁇ 1> to ⁇ 4>.
- the mass ratio of the oxime ester photopolymerization initiator containing an ⁇ -aminoketone photopolymerization initiator and containing a fluorine atom to the ⁇ -aminoketone photopolymerization initiator is 1: 1.5 to 1
- ⁇ 12> A cured film using the colored photosensitive composition according to any one of ⁇ 1> to ⁇ 11>.
- ⁇ 14> A step of forming a colored composition layer on a support using the colored photosensitive composition according to any one of ⁇ 1> to ⁇ 11>, a step of exposing the colored composition layer in a pattern, and an unexposed state
- the pattern formation method including the process of developing and removing a part and forming a colored pattern.
- a solid-state imaging device having the cured film according to ⁇ 12>.
- An image display device having the cured film according to ⁇ 12>.
- An infrared sensor having the cured film according to ⁇ 12>.
- a colored photosensitive composition capable of forming a film having low transmittance with respect to light having a wavelength of 365 nm with good adhesion.
- a cured film using a colored photosensitive composition, a pattern forming method, an infrared light cut filter with a light shielding film, a solid-state imaging device, an image display device, and an infrared sensor.
- the conceptual diagram of the cured film obtained using the coloring photosensitive composition containing the curable compound which has a fluorine atom and a curable functional group is represented. It is a schematic sectional drawing which shows the structure of an infrared sensor.
- the description which does not describe substitution and non-substitution includes what does not have a substituent and what has a substituent.
- the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
- light means actinic rays or radiation.
- Actinic light or “radiation” means, for example, an emission line spectrum of a mercury lamp, far ultraviolet rays represented by excimer laser, extreme ultraviolet rays (EUV light), X-rays, electron beams, and the like.
- exposure is not limited to exposure with an emission line spectrum of a mercury lamp, far ultraviolet rays represented by excimer laser, X-rays, EUV light, etc., but also particle beams such as electron beams and ion beams. Include drawing in exposure.
- a numerical range expressed using “to” means a range including numerical values described before and after “to” as a lower limit value and an upper limit value.
- the total solid content refers to the total mass of the components excluding the solvent from the total composition of the composition.
- “(meth) acrylate” represents both and / or acrylate and methacrylate
- “(meth) acryl” represents both and / or acrylic and “(meth) acrylic”.
- Allyl represents both and / or allyl and methallyl
- “(meth) acryloyl” represents both and / or acryloyl and methacryloyl.
- the term “process” is not limited to an independent process, and is included in the term if the intended action of the process is achieved even when it cannot be clearly distinguished from other processes. .
- a weight average molecular weight and a number average molecular weight are defined as a polystyrene conversion value by a gel permeation chromatograph (GPC) measurement.
- the colored photosensitive composition of the present invention (hereinafter also referred to as a colored composition) comprises an oxime ester photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, and an alkali-soluble resin.
- the coloring composition containing a coloring agent and having an optical density of 1.5 or more at a wavelength of 365 nm when a film having a dried film thickness of 2.0 ⁇ m is formed using the coloring composition. It is.
- a film having low transmittance with respect to light having a wavelength of 365 nm can be formed with good adhesion to a support or the like.
- the optical density at a wavelength of 365 nm of the film is preferably 1.5 or more. .8 or more is more preferable, and 2.1 or more is more preferable.
- the upper limit is not particularly limited, but can be 5.0 or less. As the optical density at a wavelength of 365 nm is higher, conventionally, it has been difficult to form a film having good adhesion to a support.
- the colored composition of the present invention is particularly suitable as a colored composition for i-line exposure.
- the optical density of the film is a value obtained by entering light with a wavelength of 365 nm and measuring the transmittance with a spectrometer UV4100 (trade name) manufactured by Hitachi High Technology.
- the coloring composition of this invention can be preferably used for manufacture of a color filter or a light shielding film.
- the color filter refers to a filter that transmits light in a specific wavelength region out of light having a wavelength in the visible light region and blocks light in a specific wavelength region, and light having a wavelength in the visible light region.
- a filter that blocks light having a wavelength in the visible light region and transmits light having a wavelength in the infrared region (infrared rays) is also referred to as an infrared transmission filter.
- the coloring composition of the present invention contains an organic pigment, and the coloring composition has a minimum absorbance A in the wavelength range of 400 nm to less than 580 nm and a minimum absorbance B in the wavelength range of 580 nm to 750 nm.
- a / B is 0.3 to 3
- the ratio C / D between the minimum absorbance C in the wavelength range of 400 nm to 750 nm and the maximum absorbance D in the wavelength range of 1000 nm to 1300 nm is If it is 5 or more, a cured film such as a color filter (infrared transmission filter) that blocks visible light (preferably 400 to 700 nm) and transmits infrared light (for example, light of 850 nm or more) may be formed. it can.
- This cured film has good adhesion to the support, and is excellent in sensitivity and rectangularity.
- the coloring composition of this invention contains the curable compound which has a fluorine atom and a curable functional group, adhesiveness with a support body is high, and a cured film with a low reflectance can be formed.
- the mechanism by which a cured film having a low reflectance can be formed is assumed to be as follows.
- a curable compound having a fluorine atom and a curable functional group (hereinafter also referred to as a fluorine-containing curable compound) has a low surface free energy, and is formed, for example, by coating a coloring composition on a support such as a substrate. In the coating film, the fluorine-containing curable compound tends to be present in the vicinity of the coating film surface on the side opposite to the support.
- the cured film 200 on the substrate 201 obtained by curing the coating film is formed from a colored layer (lower layer) 202 containing a colorant and a fluorine-containing curable compound. It has a two-layer structure with a coating layer (upper layer) 203. When such a two-layer structure is formed, the light reflected on the surface of the coating layer and the light reflected on the interface between the coating layer and the colored layer are canceled out by interference, thereby realizing low reflectivity. it is conceivable that.
- the curable functional group derived from the fluorinated curable compound due to the presence of the curable functional group derived from the fluorinated curable compound, undercutting is suppressed and chipping of the cured film is suppressed when producing a patterned cured film, and the linearity of the pattern is also reduced. Excellent. Further, in the embodiment containing a fluorine-containing curable compound, when a black pigment is further contained, it is excellent in light shielding properties and can form a cured film with low reflectance, so that the obtained cured film is particularly suitable as a light shielding film. It is.
- the colored composition of the present invention further contains an ⁇ -aminoketone photopolymerization initiator as a photopolymerization initiator, an oxime ester photopolymerization initiator containing a fluorine atom, and an ⁇ -aminoketone photopolymerization initiator.
- an ⁇ -aminoketone photopolymerization initiator as a photopolymerization initiator
- an oxime ester photopolymerization initiator containing a fluorine atom a fluorine atom
- an ⁇ -aminoketone photopolymerization initiator When the mass ratio is 1: 1.5 to 1:10, a cured film such as a color filter having excellent adhesion and rectangularity can be formed.
- the colored composition of the present invention further contains, as a photopolymerization initiator, an oxime photopolymerization initiator (other oxime photopolymerization initiator) other than an oxime ester photopolymerization initiator containing a fluorine atom.
- an oxime photopolymerization initiator other oxime photopolymerization initiator
- the colored composition of the present invention contains an oxime ester photopolymerization initiator containing a fluorine atom (hereinafter also referred to as a fluorine-containing oxime ester photopolymerization initiator).
- the fluorine-containing oxime ester photopolymerization initiator is preferably a compound having a maximum absorption wavelength in a wavelength region of 350 to 500 nm, more preferably a compound having an absorption wavelength in a wavelength region of 360 to 480 nm, and an absorbance at 365 nm.
- the fluorine-containing oxime ester photopolymerization initiator has a molar extinction coefficient at 365 nm of preferably from 1,000 to 300,000, more preferably from 2,000 to 300,000. Particularly preferred is 5,000 to 200,000.
- a known method can be used. For example, in a UV-visible spectrophotometer (Cary-5 spectrophotometer manufactured by Varian), an ethyl acetate solvent is used at a concentration of 0.01 g / L. It is preferable to measure.
- the fluorine-containing oxime ester photopolymerization initiator preferably has a group containing a fluorine atom.
- the group containing a fluorine atom is preferably an alkyl group having a fluorine atom (hereinafter also referred to as a fluorine-containing alkyl group) and / or a group containing an alkyl group having a fluorine atom (hereinafter also referred to as a fluorine-containing group).
- fluorine-containing group examples include —OR X11 , —SR X11 , —COR X11 , —COOR X11 , —OCOR X11 , —NR X11 R X12 , —NHCOR X11 , —CONR X11 R X12 , —NHCONR X11 R X12 , —NHCOOR At least one group selected from X11 , —SO 2 R X11 , —SO 2 OR X11 and —NHSO 2 R X11 is preferred.
- R X11 represents a fluorine-containing alkyl group
- R X12 represents a hydrogen atom, an alkyl group, a fluorine-containing alkyl group, an aryl group, or a heterocyclic group.
- the fluorine-containing group is more preferably —OR X11 .
- the group containing a fluorine atom is preferably a fluorine-containing alkyl group and / or —OR X11 .
- the group containing a fluorine atom preferably has a terminal structure represented by the following formula (1) or (2). * In the formula represents a connecting hand. * -CHF 2 (1) * -CF 3 (2)
- the total number of fluorine atoms in the compound is preferably 3 or more, more preferably 4 to 10.
- the alkyl group and fluorine-containing alkyl group preferably have 1 to 20, more preferably 1 to 15, still more preferably 1 to 10, and particularly preferably 1 to 4.
- the alkyl group and the fluorine-containing alkyl group may be linear, branched or cyclic, but are preferably linear or branched.
- the fluorine-containing alkyl group preferably has a fluorine atom substitution rate of 40 to 100%, more preferably 50 to 100%, and still more preferably 60 to 100%.
- the substitution rate of a fluorine atom means the ratio (%) of the number substituted by the fluorine atom among the number of all the hydrogen atoms which an alkyl group has.
- the carbon number of the aryl group is preferably 6 to 20, more preferably 6 to 15, and still more preferably 6 to 10.
- the aryl group may be a single ring or a condensed ring.
- the heterocyclic group is preferably a 5-membered ring or a 6-membered ring.
- the heterocyclic group may be a single ring or a condensed ring.
- the number of condensation is preferably 2 to 8, more preferably 2 to 6, still more preferably 3 to 5, and particularly preferably 3 to 4.
- the number of carbon atoms constituting the heterocyclic group is preferably 3 to 40, more preferably 3 to 30, and more preferably 3 to 20.
- the number of heteroatoms constituting the heterocyclic group is preferably 1 to 3.
- the hetero atom constituting the heterocyclic group is preferably a nitrogen atom, oxygen atom or sulfur atom, more preferably a nitrogen atom.
- examples of the fluorine-containing oxime ester photopolymerization initiator include compounds represented by the following formula (1a).
- a 1 and A 2 each independently represents an alkyl group, an acyl group, an aryl group or a heterocyclic group, and
- a 3 represents an alkyl group, an aryl group or a heterocyclic group;
- a 1 to A 3 contain a fluorine atom.
- a 1 represents an alkyl group, an acyl group, an aryl group or a heterocyclic group, preferably an aryl group or a heterocyclic group, and more preferably a heterocyclic group.
- the alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, still more preferably 1 to 10 carbon atoms, and particularly preferably 1 to 4 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the acyl group preferably has 2 to 20 carbon atoms, more preferably 2 to 15 carbon atoms. Examples of the acyl group include an acetyl group and a benzoyl group.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- the aryl group may be a single ring or a condensed ring.
- the heterocyclic group is preferably a 5-membered ring or a 6-membered ring.
- the heterocyclic group may be a single ring or a condensed ring.
- the number of condensation is preferably 2 to 8, more preferably 2 to 6, still more preferably 3 to 5, and particularly preferably 3 to 4.
- the number of carbon atoms constituting the heterocyclic group is preferably 3 to 40, more preferably 3 to 30, and more preferably 3 to 20.
- the number of heteroatoms constituting the heterocyclic group is preferably 1 to 3.
- the hetero atom constituting the heterocyclic group is preferably a nitrogen atom, oxygen atom or sulfur atom, more preferably a nitrogen atom.
- the above-described group represented by A 1 may be unsubstituted or may have a substituent.
- substituents include an alkyl group, aryl group, heterocyclic group, nitro group, cyano group, halogen atom, —OR X1 , —SR X1 , —COR X1 , —COOR X1 , —OCOR X1 , —NR X1 R X2 , —NHCOR X1 , —CONR X1 R X2 , —NHCONR X1 R X2 , —NHCOOR X1 , —SO 2 R X1 , —SO 2 OR X1 , —NHSO 2 R X1 and the like can be mentioned.
- R X1 and R X2 each independently represent a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group.
- the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and a fluorine atom is preferable.
- the number of carbon atoms of the alkyl group as a substituent and the alkyl group represented by R X1 and R X2 is preferably 1-20.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- part or all of the hydrogen atoms may be substituted with a halogen atom (preferably a fluorine atom).
- part or all of the hydrogen atoms may be substituted with the above substituents.
- the number of carbon atoms of the aryl group as a substituent and the aryl group represented by R X1 and R X2 is preferably 6 to 20, more preferably 6 to 15, and still more preferably 6 to 10.
- the aryl group may be a single ring or a condensed ring.
- part or all of the hydrogen atoms may be substituted with the above substituents.
- the heterocyclic group as a substituent and the heterocyclic group represented by R X1 and R X2 are preferably 5-membered or 6-membered rings.
- the heterocyclic group may be a single ring or a condensed ring.
- the number of carbon atoms constituting the heterocyclic group is preferably 3 to 30, more preferably 3 to 18, and more preferably 3 to 12.
- the number of heteroatoms constituting the heterocyclic group is preferably 1 to 3.
- the hetero atom constituting the heterocyclic group is preferably a nitrogen atom, an oxygen atom or a sulfur atom. In the hetero group, part or all of the hydrogen atoms may be substituted with the above substituents.
- a 2 represents an alkyl group, an acyl group, an aryl group or a heterocyclic group, preferably an alkyl group or an aryl group, and particularly preferably an aryl group.
- Alkyl group, an acyl group, an aryl group, and heterocyclic group has the same meaning and scope as described in A 1. These groups may be unsubstituted or may have a substituent. It preferably has a substituent. Examples of the substituent include those described for A 1 , and an alkyl group, —OR X1, and a halogen atom are preferable.
- R X1 represents a hydrogen atom, an alkyl group, an aryl group or a heterocyclic group, and is preferably an alkyl group. In the alkyl group as a substituent and the alkyl group represented by R X1 , part or all of the hydrogen atoms are preferably substituted with fluorine atoms.
- a 3 represents an alkyl group, an aryl group or a heterocyclic group, and is preferably an alkyl group or an aryl group. These groups may be unsubstituted or may have a substituent. Examples of the substituent include the substituents described for A 1 .
- the fluorine-containing oxime ester photopolymerization initiator is preferably a compound represented by the following formula (1).
- Ar 1 and Ar 2 each independently represent an aromatic hydrocarbon ring which may have a substituent
- R 1 represents an aryl group having a group containing a fluorine atom
- R 2 and R 3 each independently represents an alkyl group or an aryl group.
- Ar 1 and Ar 2 each independently represents an aromatic hydrocarbon ring which may have a substituent.
- the aromatic hydrocarbon ring may be a single ring or a condensed ring.
- the number of carbon atoms constituting the ring of the aromatic hydrocarbon ring is preferably 6 to 20, more preferably 6 to 15, and particularly preferably 6 to 10.
- the aromatic hydrocarbon ring is preferably a benzene ring or a naphthalene ring. Of these, at least one of Ar 1 and Ar 2 is preferably a benzene ring, and Ar 1 is more preferably a benzene ring.
- Ar 1 is preferably a benzene ring or a naphthalene ring, and more preferably a naphthalene ring.
- Ar 1 and Ar 2 may have include the substituents described for A 1 .
- Ar 1 is preferably unsubstituted.
- Ar 1 may be unsubstituted or may have a substituent.
- —COR X1 is preferable.
- R X1 is preferably an alkyl group, an aryl group or a heterocyclic group, more preferably an aryl group.
- the aryl group may have a substituent or may be unsubstituted.
- the substituent include an alkyl group having 1 to 10 carbon atoms.
- R 1 represents an aryl group having a group containing a fluorine atom.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- the aryl group may be a single ring or a condensed ring.
- the group containing a fluorine atom is preferably an alkyl group having a fluorine atom (fluorine-containing alkyl group) and / or a group containing an alkyl group having a fluorine atom (fluorine-containing group).
- the fluorine-containing group is -OR X11 , -SR X11 , -COR X11 , -COOR X11 , -OCOR X11 , -NR X11 R X12 , -NHCOR X11 , -CONR X11 R X12 , -NHCONR X11 R X12 , -NHCOOR X11 , —SO 2 R X11 , —SO 2 OR X11 and —NHSO 2 R X11 are preferred, and —OR X11 is more preferred.
- R X11 represents a fluorine-containing alkyl group
- R X12 represents a hydrogen atom, an alkyl group, a fluorine-containing alkyl group, an aryl group, or a heterocyclic group.
- the group containing a fluorine atom is preferably a fluorine-containing alkyl group and / or —OR X11 .
- the fluorine-containing alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, still more preferably 1 to 10 carbon atoms, and particularly preferably 1 to 4 carbon atoms.
- the fluorine-containing alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the fluorine-containing alkyl group preferably has a fluorine atom substitution rate of 40 to 100%, more preferably 50 to 100%, and still more preferably 60 to 100%.
- the alkyl group, aryl group and heterocyclic group represented by R X12 have the same meanings as described for the alkyl group, aryl group and heterocyclic group represented by R X1 and R X2 of A 1 .
- R 2 represents an alkyl group or an aryl group, and an alkyl group is preferable.
- the alkyl group and aryl group may be unsubstituted or may have a substituent. Examples of the substituent include the substituents described above for A 1 .
- the alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, still more preferably 1 to 10 carbon atoms, and particularly preferably 1 to 4 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- the aryl group may be a single ring or a condensed ring.
- R 3 represents an alkyl group or an aryl group, and is preferably an alkyl group.
- the alkyl group and aryl group may be unsubstituted or may have a substituent. Examples of the substituent include the substituents described above for A 1 .
- the alkyl group preferably has 1 to 20 carbon atoms, more preferably 1 to 15 carbon atoms, and still more preferably 1 to 10 carbon atoms.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the aryl group preferably has 6 to 20 carbon atoms, more preferably 6 to 15 carbon atoms, and still more preferably 6 to 10 carbon atoms.
- the aryl group may be a single ring or a condensed ring.
- the following compounds may be used as the fluorine-containing oxime ester photopolymerization initiator.
- a compound described in JP2010-262028A, a compound (C-3) described in JP2013-164471A, and the like can be used. This content is incorporated herein.
- the content of the fluorine-containing oxime ester photopolymerization initiator is preferably 0.1 to 50% by mass, more preferably 0.5 to 30% by mass, and still more preferably 1%, based on the total solid content of the colored composition. ⁇ 20% by weight. By setting it as this range, a pattern with good adhesion can be obtained.
- the colored composition of the present invention may contain only one type of fluorine-containing oxime ester photopolymerization initiator, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- the colored composition of the present invention can further contain an ⁇ -aminoketone photopolymerization initiator.
- an ⁇ -aminoketone photopolymerization initiator By including an ⁇ -aminoketone photopolymerization initiator, a pattern with good rectangularity can be formed.
- ⁇ -aminoketone photopolymerization initiator examples include compounds represented by the following formula (AK-1).
- Ar represents a phenyl group substituted with —SR 13 or —N (R 7E ) (R 8E ), and R 13 represents a hydrogen atom or an alkyl group.
- R 1D and R 2D each independently represents an alkyl group having 1 to 8 carbon atoms.
- R 1D and R 2D may be bonded to each other to form an alkylene group having 2 to 9 carbon atoms.
- the alkyl group represented by R 1D and R 2D may be linear, branched or cyclic, and is preferably linear or branched.
- the alkyl group represented by R 1D and R 2D may be unsubstituted or may have a substituent.
- substituents examples include an aryl group, a heterocyclic group, a nitro group, a cyano group, a halogen atom, —OR Y1 , —SR Y1 , —COR Y1 , —COOR Y1 , —OCOR Y1 , —NR Y1 R Y2 , —NHCOR Y1 , —CONR Y1 R Y2 , —NHCONR Y1 R Y2 , —NHCOOR Y1 , —SO 2 R Y1 , —SO 2 OR Y1 , —NHSO 2 R Y1, and the like.
- R Y1 and R Y2 each independently represent a hydrogen atom, an alkyl group, an aryl group, or a heterocyclic group.
- the substituent is preferably an aryl group.
- one of R 1D and R 2D is preferably an unsubstituted alkyl group, and the other is preferably an alkyl group substituted with an aryl group.
- the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
- the number of carbon atoms of the alkyl group represented by R Y1 and R Y2 is preferably 1-20.
- the alkyl group may be linear, branched or cyclic, but is preferably linear or branched.
- the number of carbon atoms of the aryl group as a substituent and the aryl group represented by R Y1 and R Y2 is preferably 6-20, more preferably 6-15, and still more preferably 6-10.
- the aryl group may be a single ring or a condensed ring. In the aryl group, part or all of the hydrogen atoms may be substituted with an alkyl group having 1 to 8 carbon atoms.
- the heterocyclic group represented by R Y1 and R Y2 is preferably a 5-membered ring or a 6-membered ring.
- the heterocyclic group may be a single ring or a condensed ring.
- the number of carbon atoms constituting the heterocyclic group is preferably 3 to 30, more preferably 3 to 18, and more preferably 3 to 12.
- the number of heteroatoms constituting the heterocyclic group is preferably 1 to 3.
- the hetero atom constituting the heterocyclic group is preferably a nitrogen atom, an oxygen atom or a sulfur atom.
- R 3D and R 4D each independently represent a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an alkoxy-substituted alkyl group having 2 to 4 carbon atoms, or an alkyl group having 3 to 5 carbon atoms. Represents an alkenyl group.
- R 3D and R 4D may combine with each other to form an alkylene group having 3 to 7 carbon atoms, and the alkylene group contains —O— or —N (R 12 ) — in the alkylene chain. It may be.
- R 12 represents an alkyl group having 1 to 4 carbon atoms.
- R 7E and R 8E are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an alkoxy-substituted alkyl group having 2 to 4 carbon atoms, or an alkyl group having 3 to 5 carbon atoms. Represents an alkenyl group.
- R 7E and R 8E may be bonded to each other to form an alkylene group having 3 to 7 carbon atoms, and the alkylene group contains —O— or —N (R 12 ) — in the alkylene chain. It may be.
- R 12 has the same meaning as described above.
- Examples of the compound represented by the formula (AK-1) include 2-methyl-1-phenyl-2-morpholinopropan-1-one, 2-methyl-1- [4- (hexyl) phenyl] -2 -Morpholinopropan-1-one, 2-ethyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1,2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -Butanone-1,2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone and the like.
- Examples of commercially available ⁇ -aminoketone photopolymerization initiators include Irgacure 907, Irgacure 369, and Irgacure 379 (trade names: all manufactured by BASF).
- the mass ratio of the fluorine-containing oxime ester photopolymerization initiator to the ⁇ -aminoketone photopolymerization initiator is 1: 1.5. Is preferably 1:10, more preferably 1: 1.5 to 1: 8, still more preferably 1: 1.5 to 1: 5, and particularly preferably 1: 1.5 to 1: 4.
- the content of the ⁇ -aminoketone photopolymerization initiator is preferably 0.1 to 10% by mass in the total solid content of the colored composition of the present invention.
- the lower limit is preferably 0.2% by mass or more, and more preferably 0.5% by mass or more.
- the upper limit is more preferably 8% by mass or less, and still more preferably 5% by mass or less. If the content of the ⁇ -aminoketone photopolymerization initiator is in the above range, a pattern having excellent rectangularity can be easily formed.
- the total amount of the fluorine-containing oxime ester photopolymerization initiator and the ⁇ -aminoketone photopolymerization initiator is preferably 50% by mass or more, and 75% by mass or more based on the total mass of the total photopolymerization initiator. Is more preferable, and 90% by mass or more is particularly preferable.
- the colored composition of the present invention may further contain a photopolymerization initiator (other photopolymerization initiator) other than the fluorine-containing oxime ester photopolymerization initiator and the ⁇ -aminoketone photopolymerization initiator.
- a photopolymerization initiator other photopolymerization initiator
- Examples of other photopolymerization initiators include halogenated hydrocarbon derivatives (for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.), acylphosphine compounds such as acylphosphine oxide, hexaarylbiimidazole, Examples include oxime compounds such as oxime derivatives, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, aminoacetophenone compounds, and hydroxyacetophenones. Examples of the halogenated hydrocarbon compound having a triazine skeleton include those described in Wakabayashi et al., Bull. Chem. Soc.
- compounds other than the fluorine-containing oxime ester photopolymerization initiator and the ⁇ -aminoketone photopolymerization initiator can be used.
- photopolymerization initiators are trihalomethyltriazine compounds, benzyldimethylketal compounds, ⁇ -hydroxyketone compounds, acylphosphine compounds, phosphine oxide compounds, metallocene compounds, oxime compounds, triallylimidazole dimers, from the viewpoint of exposure sensitivity.
- Preferred are compounds selected from the group consisting of onium compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and derivatives thereof, cyclopentadiene-benzene-iron complexes and salts thereof, halomethyloxadiazole compounds, and 3-aryl-substituted coumarin compounds. .
- a trihalomethyltriazine compound an acylphosphine compound, a phosphine oxide compound, an oxime compound, a triallylimidazole dimer, an onium compound, a benzophenone compound, an acetophenone compound, a trihalomethyltriazine compound, an oxime compound, a triallylimidazole dimer, Particularly preferred is at least one compound selected from the group consisting of benzophenone compounds.
- paragraphs 0265 to 0268 of JP2013-29760A can be referred to, and the contents thereof are incorporated in the present specification.
- hydroxyacetophenone compounds and acylphosphine compounds can also be suitably used. More specifically, acylphosphine initiators described in Japanese Patent No. 4225898 can also be used.
- hydroxyacetophenone-based initiator IRGACURE-184, DAROCUR-1173, IRGACURE-500, IRGACURE-2959, IRGACURE-127 (trade names: all manufactured by BASF) can be used.
- acylphosphine initiator commercially available products such as IRGACURE-819 and DAROCUR-TPO (trade names: both manufactured by BASF) can be used.
- An oxime compound is mentioned as another photoinitiator.
- Specific examples of the oxime compound include compounds described in JP-A No. 2001-233842, compounds described in JP-A No. 2000-80068, and compounds described in JP-A No. 2006-342166.
- oxime compound examples include, for example, 3-benzoyloxyiminobutan-2-one, 3-acetoxyiminobutan-2-one, 3-propionyloxyiminobutan-2-one, 2-acetoxyiminopentane-3 -One, 2-acetoxyimino-1-phenylpropan-1-one, 2-benzoyloxyimino-1-phenylpropan-1-one, 3- (4-toluenesulfonyloxy) iminobutan-2-one, and 2 -Ethoxycarbonyloxyimino-1-phenylpropan-1-one and the like.
- J.H. C. S. Perkin II (1979) pp. 1653-1660
- oxime compounds other than those described above compounds described in JP-A-2009-519904 in which an oxime is linked to the carbazole N-position, compounds described in US Pat. No. 7,626,957 in which a hetero substituent is introduced into the benzophenone moiety, Compounds described in Japanese Patent Application Laid-Open No. 2010-15025 and US Patent Publication No. 2009-292039, in which a nitro group is introduced into the dye moiety, ketoxime compounds described in International Patent Publication No. 2009-131189, a triazine skeleton and an oxime skeleton in the same molecule A compound described in US Pat. No.
- the oxime compound is preferably a compound represented by the following formula (OX-1).
- the oxime N—O bond may be an (E) oxime compound, a (Z) oxime compound, or a mixture of (E) and (Z) isomers. .
- R and B each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group.
- the monovalent substituent represented by R is preferably a monovalent nonmetallic atomic group.
- the monovalent nonmetallic atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group, and an arylthiocarbonyl group.
- these groups may have one or more substituents.
- the substituent mentioned above may be further substituted by another substituent.
- the substituent examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, and an aryl group.
- the monovalent substituent represented by B is preferably an aryl group, a heterocyclic group, an arylcarbonyl group, or a heterocyclic carbonyl group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents.
- the divalent organic group represented by A is preferably an alkylene group having 1 to 12 carbon atoms, a cycloalkylene group, or an alkynylene group. These groups may have one or more substituents. Examples of the substituent include the above-described substituents.
- R 1 and R 2 are each independently an alkyl group having 1 to 20 carbon atoms, an alicyclic hydrocarbon group having 4 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, or When an arylalkyl group having 7 to 30 carbon atoms is represented and R 1 and R 2 are phenyl groups, the phenyl groups may be bonded to each other to form a fluorene group, and R 3 and R 4 are each independently Represents a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms or a heterocyclic group having 4 to 20 carbon atoms, wherein X is a direct bond or carbonyl Indicates a group.
- R 1, R 2, R 3 and R 4 have the same meanings as R 1, R 2, R 3 and R 4 in Formula (1)
- R 5 is -R 6, -OR 6 , —SR 6 , —COR 6 , —CONR 6 R 6 , —NR 6 COR 6 , —OCOR 6 , —COOR 6 , —SCOR 6 , —OCSR 6 , —COSR 6 , —CSOR 6 , —CN
- halogen R 6 represents an alkyl group having 1 to 20 carbon atoms, an aryl group having 6 to 30 carbon atoms, an arylalkyl group having 7 to 30 carbon atoms or a heterocyclic group having 4 to 20 carbon atoms
- X represents a direct bond or a carbonyl group, and a represents an integer of 0 to 4.
- R 1 and R 2 are preferably each independently a methyl group, an ethyl group, an n-propyl group, an i-propyl group, a cyclohexyl group, or a phenyl group.
- R 3 is preferably a methyl group, an ethyl group, a phenyl group, a tolyl group or a xylyl group.
- R 4 is preferably an alkyl group having 1 to 6 carbon atoms or a phenyl group.
- R 5 is preferably a methyl group, an ethyl group, a phenyl group, a tolyl group or a naphthyl group.
- X is preferably a direct bond.
- Specific examples of the compounds represented by formula (1) and formula (2) include, for example, compounds described in paragraph numbers 0076 to 0079 of JP-A No. 2014-137466. This content is incorporated herein.
- the content of the other photopolymerization initiator may be 10 to 90% by mass or 10 to 80% by mass with respect to the mass of the total photopolymerization initiator contained in the coloring composition, It can also be 10 to 70% by mass. Moreover, it can also be less than 50 mass% with respect to the mass of all the photoinitiators contained in a coloring composition, can also be less than 25 mass%, and can also be less than 10 mass%. Moreover, it can also be set as the composition which does not contain other photoinitiators substantially.
- “Containing substantially no other photopolymerization initiator” means that the content of the other photopolymerization initiator is preferably 1% by mass or less, more preferably 0.1% by mass or less, based on the mass of the total photopolymerization initiator. Is more preferable, and it is still more preferable not to contain.
- the colored composition of the present invention has a configuration that does not substantially contain an oxime photopolymerization initiator other than the fluorine-containing oxime ester photopolymerization initiator (hereinafter also referred to as other oxime photopolymerization initiator). You can also.
- the content of the other oxime photopolymerization initiator is preferably 1% by mass or less based on the mass of the total photopolymerization initiator. 0.1 mass% or less is more preferable, and it is still more preferable not to contain.
- the other oxime photopolymerization initiator is an oxime compound that does not contain a fluorine atom, and examples thereof include the oxime compounds described in the above-described other photopolymerization initiator.
- the coloring composition of this invention can also be set as the structure which uses together a fluorine-containing oxime ester photoinitiator and another oxime photoinitiator. According to this aspect, it is easy to produce a cured film in which color loss is suppressed.
- the other oxime photopolymerization initiator includes a fluorine-containing oxime ester photopolymerization initiator and another oxime photopolymerization initiator.
- 30 to 300 parts by mass is preferable, more preferably 50 to 250 parts by mass, and still more preferably 70 to 200 parts by mass with respect to 100 parts by mass in total with the photopolymerization initiator. If it is this range, a sensitivity and adhesiveness are favorable, and also it is easy to manufacture the cured film by which color loss was suppressed.
- the coloring composition of the present invention contains a colorant.
- the colorant may be a pigment or a dye.
- the content of the coloring agent is preferably 1 to 80% by mass with respect to the total solid content of the coloring composition.
- the lower limit is preferably 5% by mass or more, more preferably 10% by mass or more, and still more preferably 20% by mass or more.
- the upper limit is preferably 75% by mass or less, and more preferably 70% by mass or less.
- Pigment examples include conventionally known various inorganic pigments or organic pigments.
- examples of the inorganic pigment include metal oxides such as iron, cobalt, aluminum, cadmium, lead, copper, titanium, magnesium, chromium, zinc, and antimony, and composite oxides of the above metals. The following can be mentioned as an organic pigment. However, the present invention is not limited to these.
- the organic pigment has a halogenated zinc phthalocyanine pigment (both the zinc halide phthalocyanine pigment A and the halogenated zinc phthalocyanine pigment A having an average number of halogen atoms in one molecule of phthalocyanine of 14 to 16 and an average number of bromine atoms of 12 or less.
- the halogenated zinc phthalocyanine pigment A is preferably a compound represented by the following general formula (A1).
- X 1 to X 16 each independently represent a halogen atom, a hydrogen atom, or a substituent.
- halogen atom examples include a chlorine atom, a bromine atom, a fluorine atom, and an iodine atom.
- substituent the description of paragraph numbers 0025 to 0027 of JP2013-209623A can be referred to, and the contents thereof are incorporated in the present specification.
- the average number of halogen atoms in one molecule of phthalocyanine is 14 to 16, and preferably 15 to 16.
- the average number of bromine atoms in one molecule of phthalocyanine is 0 to 12, preferably 1 to 8, more preferably 1 to 7, and still more preferably 2 to 7. If the average number of halogen atoms and the average number of bromine atoms are within the above ranges, the generation of needle crystals can be suppressed. Furthermore, a cured film such as a color filter having small luminance unevenness and excellent spectral characteristics can be manufactured.
- examples of the halogen atom other than the bromine atom include a chlorine atom, a fluorine atom, and an iodine atom. From the viewpoints of suppressing acicular foreign matter and luminance unevenness, a chlorine atom and a fluorine atom are preferable. Atoms are more preferred.
- the average number of halogen atoms and the average number of bromine atoms in one molecule of phthalocyanine can be calculated from mass analysis and halogen content analysis by flask combustion ion chromatography.
- organic pigments can be used alone or in various combinations in order to increase color purity.
- a black pigment can also be used as the pigment.
- the black pigment will be described in more detail.
- Various known black pigments can be used as the black pigment.
- carbon black, titanium black, titanium oxide, iron oxide, manganese oxide, graphite and the like are preferable from the viewpoint of realizing a high optical density with a small amount, and in particular, at least one of carbon black and titanium black is included.
- titanium black is particularly preferable. More specifically, C.I. I. Pigment Black 1 and other organic pigments C.I. I. Inorganic pigments such as CI Pigment Black 7 can also be used.
- the black pigment preferably contains titanium black.
- Titanium black is black particles containing titanium atoms. Preferred are low-order titanium oxide and titanium oxynitride.
- the surface of titanium black particles can be modified as necessary for the purpose of improving dispersibility and suppressing aggregation. It can be coated with silicon oxide, titanium oxide, germanium oxide, aluminum oxide, magnesium oxide, or zirconium oxide, and treatment with a water-repellent substance as disclosed in JP-A-2007-302836 is also possible. Is possible.
- the titanium black is typically titanium black particles, and it is preferable that both the primary particle size and the average primary particle size of each particle are small. Specifically, the average primary particle size is preferably in the range of 10 nm to 45 nm.
- the particle diameter that is, the particle diameter is a diameter of a circle having an area equal to the projected area of the outer surface of the particle.
- the projected area of the particles can be obtained by measuring the area obtained by photographing with an electron micrograph and correcting the photographing magnification.
- the specific surface area of titanium black is not particularly limited, but the value measured by the BET (Brunauer, Emmett, Teller) method is used in order that the water repellency after the surface treatment of titanium black with a water repellent becomes a predetermined performance. It is preferably 5 m 2 / g or more and 150 m 2 / g or less, and more preferably 20 m 2 / g or more and 120 m 2 / g or less.
- Examples of commercially available titanium black include titanium black 10S, 12S, 13R, 13M, 13M-C, 13R, 13R-N, 13M-T (trade name: manufactured by Mitsubishi Materials Corporation), Tilack D (trade name: manufactured by Ako Kasei Co., Ltd.) and the like.
- titanium black is contained as a dispersion in the composition, and the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion is 0.05 or more in terms of mass. Is preferable, 0.05 to 0.5 is more preferable, and 0.07 to 0.4 is still more preferable.
- the to-be-dispersed bodies include both those in which titanium black is in the state of primary particles and those in the state of aggregates (secondary particles). In order to change the Si / Ti of the object to be dispersed (for example, 0.05 or more), the following means can be used.
- a dispersion is obtained by dispersing titanium oxide and silica particles using a disperser, and the dispersion is subjected to reduction treatment at a high temperature (for example, 850 to 1000 ° C.), whereby titanium black particles are mainly formed.
- a dispersed material containing Si and Ti as components can be obtained.
- the reduction treatment can also be performed in an atmosphere of a reducing gas such as ammonia.
- titanium oxide include TTO-51N (trade name: manufactured by Ishihara Sangyo).
- Examples of commercially available silica particles include AEROSIL (registered trademark) 90, 130, 150, 200, 255, 300, 380 (trade name: manufactured by Evonik).
- a dispersing agent may be used for the dispersion of titanium oxide and silica particles.
- the dispersant include those described in the section of the dispersant described later.
- the dispersion may be performed in a solvent.
- the solvent include water and organic solvents. What is demonstrated in the column of the organic solvent mentioned later is mentioned. Titanium black whose Si / Ti is adjusted to 0.05 or more, for example, is produced by the method described in paragraph numbers [0005] and paragraph numbers [0016] to [0021] of Japanese Patent Application Laid-Open No. 2008-266045, for example. can do.
- the composition containing this dispersion by adjusting the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion containing titanium black and Si atoms to a suitable range (for example, 0.05 or more).
- a suitable range for example, 0.05 or more.
- a residue contains the component derived from compositions, such as a titanium black particle and a resin component. The reason why the residue is reduced is not yet clear, but the above-mentioned dispersed material tends to have a small particle size (for example, a particle size of 30 nm or less).
- the adsorptivity of the entire film with the underlying layer is reduced, and this is presumed to contribute to the improvement of the development removal property of the uncured composition (particularly titanium black) in the formation of the light-shielding film.
- titanium black is excellent in light-shielding property for light in a wide wavelength range from ultraviolet light to infrared light. Therefore, the above-described dispersion containing titanium black and Si atoms (preferably Si / Ti is in terms of mass)
- the light-shielding film formed by using a material having a thickness of 0.05 or more exhibits excellent light-shielding properties.
- the content ratio (Si / Ti) of Si atoms to Ti atoms in the dispersion is, for example, the method (1-1) or the method (1-2) described in paragraph 0033 of JP2013-249417A ). Whether the content ratio (Si / Ti) of Si atoms and Ti atoms in the dispersion is 0.05 or more with respect to the dispersion to be contained in the light-shielding film obtained by curing the composition Is determined using the method (2) described in paragraph 0035 of JP2013-249417A.
- the above-described titanium black can be used.
- complex oxides such as Cu, Fe, Mn, V, Ni, cobalt oxide, iron oxide, carbon black, aniline
- silica for the purpose of adjusting the light shielding property, other colorants (such as organic pigments and dyes) may be used in combination with titanium black as long as the effects of the present invention are not impaired. Good.
- materials used for introducing Si atoms into the dispersion will be described.
- a Si-containing material such as silica may be used.
- silica that can be used include precipitated silica, fumed silica, colloidal silica, and synthetic silica. These may be appropriately selected and used.
- fine particle type silica examples include silica described in paragraph 0039 of JP2013-249417A, and the contents thereof are incorporated in the present specification.
- ⁇ Dye Examples of the dye include, for example, JP-A No. 64-90403, JP-A No. 64-91102, JP-A No. 1-94301, JP-A No. 6-11614, No. 2592207, and US Pat. No. 4,808,501.
- dye currently disclosed by 194828 gazette etc. can be used.
- pyrazole azo compounds When classified as chemical structure, pyrazole azo compounds, pyromethene compounds, anilinoazo compounds, triphenylmethane compounds, anthraquinone compounds, benzylidene compounds, oxonol compounds, pyrazolotriazole azo compounds, pyridone azo compounds, cyanine compounds, phenothiazine compounds, pyrrolopyrazole azomethine compounds, etc. Can be used.
- a dye multimer may be used as the dye. Examples of the dye multimer include compounds described in JP2011-213925A and JP2013-041097A.
- a colorant having an absorption maximum in the wavelength range of 800 to 900 nm can be used as the colorant.
- colorants having such spectral characteristics include pyrrolopyrrole compounds, copper compounds, cyanine compounds, phthalocyanine compounds, iminium compounds, thiol complex compounds, transition metal oxide compounds, squarylium compounds, naphthalocyanine compounds, and quaterylenes. Compounds, dithiol metal complex compounds, croconium compounds and the like.
- the phthalocyanine compound, naphthalocyanine compound, iminium compound, cyanine compound, squalium compound and croconium compound the compounds disclosed in paragraphs 0010 to 0081 of JP-A No.
- 2010-1111750 may be used. Incorporated.
- the cyanine compound for example, “functional pigment, Shin Okawara / Ken Matsuoka / Keijiro Kitao / Kensuke Hirashima, Kodansha Scientific”, the contents of which are incorporated herein.
- the colorant having an absorption maximum in the wavelength range of 800 to 900 nm is preferably a pyrrolopyrrole compound.
- the pyrrolopyrrole compound may be a pigment or a dye, but a pigment is preferred because it is easy to obtain a colored composition capable of forming a film having excellent heat resistance.
- a compound represented by the following general formula (1) is preferable.
- R 1a and R 1b each independently represents an alkyl group, an aryl group or a heteroaryl group
- R 2 and R 3 each independently represent a hydrogen atom or a substituent
- R 2 and R 3 may be bonded to each other to form a ring
- R 4 represents a hydrogen atom, an alkyl group, an aryl group, a heteroaryl group, a substituted boron Represents a metal atom
- R 4 may be a covalent bond or a coordinate bond with one or more selected from R 1a , R 1b and R 3 .
- the alkyl group represented by R 1a or R 1b is preferably an alkyl group having 1 to 30 carbon atoms, more preferably 1 to 20 carbon atoms, and particularly preferably 1 to 10 carbon atoms. Examples thereof include methyl, ethyl, iso-propyl, tert-butyl, n-octyl, n-decyl, n-hexadecyl, cyclopropyl, cyclopentyl, cyclohexyl and the like.
- the aryl group represented by R 1a or R 1b is preferably an aryl group having 6 to 30 carbon atoms, more preferably 6 to 20 carbon atoms, particularly preferably 6 to 12 carbon atoms, such as phenyl, o- Examples include methylphenyl, p-methylphenyl, biphenyl, naphthyl, anthranyl, phenanthryl and the like.
- the heteroaryl group represented by R 1a or R 1b is preferably a heteroaryl group having 1 to 30 carbon atoms, more preferably 1 to 12 carbon atoms. Examples of the hetero atom include a nitrogen atom, an oxygen atom, and a sulfur atom.
- heteroaryl group examples include imidazolyl, pyridyl, quinolyl, furyl, thienyl, benzoxazolyl, benzimidazolyl, benzthiazolyl, naphthothiazolyl, benzoxazolyl, m-carbazolyl, azepinyl and the like.
- R 1a and R 1b in the general formula (1) may be the same as or different from each other.
- R 2 and R 3 each independently represents a hydrogen atom or a substituent, and at least one is an electron-withdrawing group. R 2 and R 3 may combine to form a ring. Examples of the substituent include those described in JP-A 2009-263614, paragraphs 0020 to 0022. The above contents are incorporated in the present specification.
- the electron-withdrawing group represented by R 2 or R 3 preferably represents an electron-withdrawing group having a Hammett ⁇ p value (sigma para value) of 0.2 or more.
- Hammett's substituent constant ⁇ value will be described.
- Hammett's rule is a method described in 1935 by L. E. in order to quantitatively discuss the effect of substituents on the reaction or equilibrium of benzene derivatives.
- P. A rule of thumb proposed by Hammett which is widely accepted today.
- Substituent constants determined by Hammett's rule include ⁇ p value and ⁇ m value, and these values can be found in many general books. For example, J. et al. A. Dean, “Lange's Handbook of Chemistry”, 12th edition, 1979 (Mc Graw-Hill) and “Areas of Chemistry”, No. 122, pages 96-103, 1979 (Nankodo), Chem. Rev. 1991, 91, 165-195.
- a substituent having a Hammett ⁇ p value of 0.2 or more can be exemplified as an electron withdrawing group.
- the ⁇ p value is preferably 0.25 or more, more preferably 0.3 or more, and particularly preferably 0.35 or more.
- the upper limit is not particularly limited, but is preferably 0.80 or less.
- cyano group (0.66), carboxyl group (—COOH: 0.45), alkoxycarbonyl group (—COOMe: 0.45), aryloxycarbonyl group (—COOPh: 0.44), carbamoyl.
- a group (—CONH 2 : 0.36), an alkylcarbonyl group (—COMe: 0.50), an arylcarbonyl group (—COPh: 0.43), an alkylsulfonyl group (—SO 2 Me: 0.72), or And arylsulfonyl group (—SO 2 Ph: 0.68).
- Me represents a methyl group
- Ph represents a phenyl group.
- the values in parentheses are the ⁇ p values of typical substituents in Chem. Rev. 1991, Vol. 91, pp. 165-195.
- R 2 and R 3 are combined to form a ring, it is preferable to form a 5- to 7-membered ring (preferably a 5- to 6-membered ring).
- the ring formed is preferably a merocyanine dye usually used as an acidic nucleus, and specific examples thereof can be referred to paragraph No. 0026 of JP-A-2009-263614, the contents of which are incorporated herein.
- ⁇ p value of R 2 and R 3 is regarded as a partial structure of each ring R 2 and R 3 are substituted, ring formation In this case, the ⁇ p value is defined.
- R 2 and R 3 are each substituted with a benzoyl group.
- the ring formed by combining R 2 and R 3 is preferably a 1,3-dicarbonyl nucleus, a pyrazolinone nucleus, a 2,4,6-triketohexahydropyrimidine nucleus (including a thioketone body), 2- Thio-2,4-thiazolidinedione nucleus, 2-thio-2,4-oxazolidinedione nucleus, 2-thio-2,5-thiazolidinedione nucleus, 2,4-thiazolidinedione nucleus, 2,4-imidazolidinedione nucleus 2-thio-2,4-imidazolidinedione nucleus, 2-imidazolin-5-one nucleus, 3,5-pyrazolidinedione nucleus, benzothiophen-3-one nucleus, or indanone nucleus, more preferably 1,3-dicarbonyl nucleus, 2,4,6-triketohexahydropyrimidine nucleus (
- R 3 is particularly preferably a heterocycle.
- Two R 2 in the general formula (1) may be the same as or different from each other, and two R 3 may be the same as or different from each other.
- the alkyl group, aryl group, and heteroaryl group represented by R 4 have the same meanings as the substituents described for R 1a and R 1b , and the preferred ranges are also the same.
- the substituent of the substituted boron represented by R 4 has the same meaning as the substituent described above for R 2 and R 3 , and is preferably an alkyl group, an aryl group, or a heteroaryl group.
- the metal atom represented by R 4 is preferably a transition metal, magnesium, aluminum, calcium, barium, zinc, or tin, and more preferably aluminum, zinc, tin, vanadium, iron, cobalt, nickel, copper Palladium, iridium, or platinum, particularly preferably aluminum, zinc, vanadium, iron, copper, palladium, iridium, or platinum.
- R 4 may be covalently bonded or coordinated to one or more selected from R 1a , R 1b and R 3 .
- Two R 4 in the general formula (1) may be the same as or different from each other.
- the coloring composition of the present invention contains a polymerizable compound having an ethylenically unsaturated bond.
- the polymerizable compound is preferably a compound having one or more groups having an ethylenically unsaturated bond, more preferably a compound having two or more, and even more preferably three or more.
- the upper limit is preferably 15 or less, and more preferably 6 or less.
- the group having an ethylenically unsaturated bond include a vinyl group, a (meth) allyl group, and a (meth) acryloyl group.
- the polymerizable compound may be in any chemical form such as, for example, a monomer, a prepolymer (ie, a dimer, a trimer) and an oligomer, or a mixture thereof and a multimer thereof.
- the polymerizable compound is preferably a monomer.
- the molecular weight of the polymerizable compound is preferably 100 to 3000, and more preferably 250 to 1500.
- the polymerizable compound is preferably a 3 to 15 functional (meth) acrylate compound, more preferably a 3 to 6 functional (meth) acrylate compound.
- Examples of monomers and prepolymers include unsaturated carboxylic acids (eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.), their esters, amides, and multimers thereof.
- unsaturated carboxylic acids eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid, etc.
- esters of unsaturated carboxylic acids and aliphatic polyhydric alcohol compounds amides of unsaturated carboxylic acids and aliphatic polyvalent amine compounds, and multimers thereof.
- a dehydration condensation reaction product with a functional carboxylic acid is also preferably used.
- Reaction products of unsaturated carboxylic acid esters or amides having electrophilic substituents such as isocyanate groups and epoxy groups with monofunctional or polyfunctional alcohols, amines and thiols, halogen groups and tosyloxy groups A reaction product of an unsaturated carboxylic acid ester or amide having a leaving substituent such as monofunctional or polyfunctional alcohols, amines or thiols is also suitable.
- the polymerizable compound is also preferably a compound having at least one group having an ethylenically unsaturated bond and having a boiling point of 100 ° C. or higher under normal pressure.
- compounds described in paragraph 0227 of JP 2013-29760 A and paragraphs 0254 to 0257 of JP 2008-292970 A can be referred to, the contents of which are incorporated herein.
- the polymerizable compounds are dipentaerythritol triacrylate (KAYARAD D-330 as a commercial product; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol tetraacrylate (KAYARAD D-320 as a commercial product; manufactured by Nippon Kayaku Co., Ltd.).
- Dipentaerythritol penta (meth) acrylate (as a commercial product, KAYARAD D-310; manufactured by Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (as a commercial product, manufactured as KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd.)
- A-DPH-12E (manufactured by Shin-Nakamura Chemical Co., Ltd.) and structures in which these (meth) acryloyl groups are mediated by ethylene glycol and propylene glycol residues (for example, SR454, SR499, commercially available from Sartomer) preferable.
- These oligomer types can also be used.
- NK ester A-TMMT penentaerythritol tetraacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.
- KAYARAD RP-1040 manufactured by Nippon Kayaku Co., Ltd.
- Preferred embodiments of the polymerizable compound are shown below.
- the polymerizable compound may have an acid group such as a carboxyl group, a sulfonic acid group, or a phosphoric acid group.
- an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid is preferable, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound.
- a polymerizable compound having a group is more preferable, and in this ester, the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol. Examples of commercially available products include Aronix TO-2349, M-305, M-510, and M-520 manufactured by Toagosei Co., Ltd.
- the preferred acid value of the polymerizable compound having an acid group is 0.1 to 40 mgKOH / g, particularly preferably 5 to 30 mgKOH / g. If the acid value of the polymerizable compound is 0.1 mgKOH / g or more, the development and dissolution characteristics are good, and if it is 40 mgKOH / g or less, it is advantageous in production and handling. Furthermore, the photopolymerization performance is good and the curability is excellent.
- a compound having a structure derived from a cyclic ester is also a preferred embodiment.
- the cyclic ester include caprolactone and valerolactone, and caprolactone is particularly preferable.
- the compound having a structure derived from caprolactone is not particularly limited as long as it has a structure derived from caprolactone in the molecule.
- R 1 represents a hydrogen atom or a methyl group
- m represents a number of 1 or 2
- “*” represents a bond
- R 1 represents a hydrogen atom or a methyl group
- “*” represents a bond
- polymerizable compound a compound represented by the following general formula (Z-4) or (Z-5) can also be used.
- each E independently represents — ((CH 2 ) y CH 2 O) — or — ((CH 2 ) y CH (CH 3 ) O).
- — Each independently represents an integer of 0 to 10
- each X independently represents a (meth) acryloyl group, a hydrogen atom, or a carboxyl group.
- the total of (meth) acryloyl groups is 3 or 4
- each m independently represents an integer of 0 to 10
- the total of each m is an integer of 0 to 40 .
- the total number of (meth) acryloyl groups is 5 or 6
- each n independently represents an integer of 0 to 10
- the total of each n is an integer of 0 to 60 .
- m is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each m is preferably an integer of 2 to 40, more preferably an integer of 2 to 16, and particularly preferably an integer of 4 to 8.
- n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12.
- — ((CH 2 ) y CH 2 O) — or — ((CH 2 ) y CH (CH 3 ) O) — represents oxygen
- a form in which the end on the atom side is bonded to X is preferred.
- the compounds represented by formula (Z-4) or formula (Z-5) may be used alone or in combination of two or more.
- a form in which all six Xs are acryloyl groups in the general formula (Z-5), a compound in which all six Xs are acryloyl groups, Among these, an embodiment in which at least one is a mixture with a compound having a hydrogen atom is preferable. With such a configuration, the developability can be further improved.
- the total content of the compound represented by the general formula (Z-4) or (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more.
- the compound represented by the general formula (Z-4) or (Z-5) is a conventionally known process, which is a ring-opening addition of ethylene oxide or propylene oxide to pentaerythritol or dipentaerythritol. It can be synthesized from a step of bonding a ring-opening skeleton by reaction and a step of introducing a (meth) acryloyl group by reacting, for example, (meth) acryloyl chloride with a terminal hydroxyl group of the ring-opening skeleton. Each step is a well-known step, and a person skilled in the art can easily synthesize a compound represented by the general formula (Z-4) or (Z-5).
- a pentaerythritol derivative and / or a dipentaerythritol derivative are more preferable.
- Specific examples include compounds represented by the following formulas (a) to (f) (hereinafter also referred to as “exemplary compounds (a) to (f)”).
- exemplary compounds (a), (f) b), (e) and (f) are preferred.
- Examples of commercially available polymerizable compounds represented by general formula (Z-4) or general formula (Z-5) include SR-494, a tetrafunctional acrylate having four ethyleneoxy chains manufactured by Sartomer, Japan. Examples thereof include DPCA-60, which is a hexafunctional acrylate having six pentyleneoxy chains, and TPA-330, which is a trifunctional acrylate having three isobutyleneoxy chains.
- Examples of the polymerizable compound include urethane acrylates described in JP-B-48-41708, JP-A-51-37193, JP-B-2-32293, JP-B-2-16765, Urethane compounds having an ethylene oxide skeleton described in JP-B-58-49860, JP-B-56-17654, JP-B-62-39417, and JP-B-62-39418 are also suitable. Further, addition polymerizable compounds having an amino structure or a sulfide structure in the molecule described in JP-A-63-277653, JP-A-63-260909, and JP-A-1-105238 are used. Thus, a colored composition having an extremely excellent photosensitive speed can be obtained.
- urethane oligomers UAS-10, UAB-140 (Sanyo Kokusaku Pulp Co., Ltd.), UA-7200 (Shin Nakamura Chemical Co., Ltd.), DPHA-40H (Nippon Kayaku Co., Ltd.), UA-306H, UA- 306T, UA-306I, AH-600, T-600, AI-600 (manufactured by Kyoeisha) and the like.
- the content of the polymerizable compound is preferably 0.1 to 40% by mass with respect to the total solid content of the colored composition.
- the lower limit is more preferably 0.5% by mass or more, and further preferably 1% by mass or more.
- the upper limit is more preferably 30% by mass or less, and still more preferably 20% by mass or less.
- One type of polymerizable compound may be used alone, or two or more types may be used in combination. When using 2 or more types together, it is preferable that a total amount becomes the said range.
- the coloring composition of the present invention may contain a polyfunctional thiol compound having two or more mercapto groups in the molecule for the purpose of promoting the reaction of the polymerizable compound.
- the polyfunctional thiol compound is preferably a secondary alkanethiol, and particularly preferably a compound having a structure represented by the following general formula (T1).
- T1 In the formula (T1), n represents an integer of 2 to 4, and L represents a divalent to tetravalent linking group.
- the linking group L is preferably an aliphatic group having 2 to 12 carbon atoms, particularly preferably n is 2 and L is an alkylene group having 2 to 12 carbon atoms.
- Specific examples of the polyfunctional thiol compound include compounds represented by the following structural formulas (T2) to (T4), and a compound represented by the formula (T2) is particularly preferable. These polyfunctional thiols can be used alone or in combination.
- the content of the polyfunctional thiol compound is preferably 0.3 to 8.9% by mass with respect to the total solid content of the colored composition, 0.8 More preferred is ⁇ 6.4 mass%.
- Polyfunctional thiols may be added for the purpose of improving stability, odor, resolution, developability, adhesion and the like.
- the colored composition of the present invention preferably contains a compound having an epoxy group.
- a compound having two or more epoxy groups in one molecule is preferable.
- the number of epoxy groups is preferably 2 to 10, more preferably 2 to 5, and particularly preferably 3 in one molecule.
- the compound having an epoxy group a compound having a structure in which two benzene rings are connected by a hydrocarbon group can also be used.
- the hydrocarbon group is preferably an alkylene group having 1 to 6 carbon atoms.
- the epoxy group is connected via a connecting group.
- the linking group include an alkylene group, an arylene group, —O—, —NR ′ — (R ′ represents a hydrogen atom, an alkyl group which may have a substituent, or an aryl group which may have a substituent.
- R ′ represents a hydrogen atom, an alkyl group which may have a substituent, or an aryl group which may have a substituent.
- the compound having an epoxy group may be a low molecular weight compound (for example, a molecular weight of less than 2000, or a molecular weight of less than 1000), or a macromolecule (for example, a molecular weight of 1000 or more, in the case of a polymer, the weight average molecular weight is 1000 or more).
- the weight average molecular weight of the compound having an epoxy group is preferably 200 to 100,000, more preferably 500 to 50,000.
- Compounds having an epoxy group are described in paragraph numbers 0034 to 0036 of JP2013-011869A, paragraph numbers 0147 to 0156 of JP2014043556A, and paragraphs 0085 to 0092 of JP2014089408A.
- the prepared compounds can also be used. These contents are incorporated herein. Examples of commercially available products include “EHPE3150, manufactured by Daicel Corporation”, “EPICLON N660 (manufactured by DIC Corporation)”, and the like.
- the content of the compound having an epoxy group is preferably 0.1 to 40% by mass with respect to the total solid content of the colored composition.
- the lower limit is more preferably 0.5% by mass or more, and further preferably 1% by mass or more.
- the upper limit is more preferably 30% by mass or less, and still more preferably 20% by mass or less.
- the compound which has an epoxy group may be single 1 type, and may use 2 or more types together. When using 2 or more types together, it is preferable that a total amount becomes the said range.
- the coloring composition of the present invention includes at least one selected from the group consisting of a fluorine atom, a silicon atom, a linear alkyl group having 8 or more carbon atoms, and a branched alkyl group having 3 or more carbon atoms, and curable properties. It is also preferable to contain a curable compound having a functional group (hereinafter also referred to as curable compound A).
- the curable compound A is preferably a curable compound having a fluorine atom and a curable functional group. According to this aspect, it is easy to form a cured film having a low reflectance.
- hardenable compound A is a compound different from the polymeric compound mentioned above, the compound which has an epoxy group, and resin mentioned later.
- a compound having a fluorine atom and an ethylenically unsaturated bond is included in the curable compound A.
- a compound having a fluorine atom and an epoxy group is included in the curable compound A.
- the curable compound A may be a monomer or a polymer.
- the curable compound A is preferably a (meth) acrylate polymer, and more preferably a (meth) acrylate polymer having a fluorine atom.
- One preferred embodiment of the curable compound A is a compound having no benzene ring structure, and a compound having a fluorine atom and not having a benzene ring structure is preferable.
- a silane coupling agent described later is not included in the curable compound A.
- the curable compound A contains a fluorine atom
- the curable compound is selected from the group consisting of an alkylene group substituted with a fluorine atom, an alkyl group substituted with a fluorine atom, and an aryl group substituted with a fluorine atom. It is preferable to have at least one of the following.
- the alkylene group substituted with a fluorine atom is preferably a linear, branched or cyclic alkylene group in which at least one hydrogen atom is substituted with a fluorine atom.
- the alkyl group substituted with a fluorine atom is preferably a linear, branched or cyclic alkyl group in which at least one hydrogen atom is substituted with a fluorine atom.
- the number of carbon atoms in the alkylene group substituted with a fluorine atom and the alkyl group substituted with a fluorine atom is preferably 1-20, more preferably 1-10, and even more preferably 1-5. preferable.
- the aryl group substituted with a fluorine atom the aryl group is preferably directly substituted with a fluorine atom or substituted with a trifluoromethyl group.
- the alkylene group substituted with a fluorine atom, the alkyl group substituted with a fluorine atom, and the aryl group substituted with a fluorine atom may further have a substituent other than the fluorine atom.
- the alkyl group substituted with a fluorine atom and the aryl group substituted with a fluorine atom for example, paragraphs 0266 to 0272 of JP2011-100089A can be referred to, the contents of which are described in this specification. Incorporated.
- the curable compound A preferably includes a group X (a group (repeating unit) represented by the formula (X)) in which an “alkylene group substituted with a fluorine atom” and an “oxygen atom” are linked. More preferably, it contains an alkylene ether group.
- Formula (X)-(L A -O)- L A represents an alkylene group substituted with a fluorine atom.
- the number of carbon atoms in the alkylene group is preferably 1-20, more preferably 1-10, and even more preferably 1-5.
- the alkylene group substituted with the fluorine atom may contain an oxygen atom.
- the alkylene group substituted with a fluorine atom may be linear or branched.
- the perfluoroalkylene ether group intends that L A is a perfluoroalkylene group.
- the perfluoroalkylene group means a group in which all hydrogen atoms in the alkylene group are substituted with fluorine atoms.
- the group (repeating unit) represented by the formula (X) may be linked repeatedly, and the number of repeating units is not particularly limited, but is preferably 1 to 50 in terms of more excellent effects of the present invention. ⁇ 20 is more preferred. That is, a group represented by the formula (X-1) is preferable.
- Formula (X-1)-(L A -O) r- In formula (X-1), L A is as described above, r represents the number of repeating units, and the preferred range thereof is as described above.
- the plurality of - (L A -O) - L A medium may be different even in the same.
- the curable compound A contains a silicon atom
- the curable compound preferably has an alkylsilyl group, an arylsilyl group, or the following partial structure (S) (* represents a bonding site with another atom).
- Partial structure (S)
- the total number of carbon atoms in the alkyl chain of the alkylsilyl group is preferably 1-20, more preferably 1-10, and even more preferably 1-6. Alkylsilyl groups and trialkylsilyl groups are preferred. Examples of the aryl group in the arylsilyl group include a phenyl group.
- the cyclic structure may be formed including the partial structure (S).
- the partial structure (S) preferably employed in the present invention is preferably —Si (R) 2 —O—Si (R) 2 — (R is an alkyl group having 1 to 3 carbon atoms) or an alkoxysilyl group.
- paragraphs 0277 to 0279 of JP2011-100089A can be referred to, and the contents thereof are incorporated in this specification.
- the carbon number is preferably 8 to 30, and more preferably 12 to 20.
- the branched alkyl group preferably has 3 to 20 carbon atoms, and more preferably 5 to 15 carbon atoms.
- the branched alkyl group having 3 or more carbon atoms preferably has —CH (CH 3 ) 2 or —C (CH 3 ) 3 at the terminal.
- the curable compound A has one or more selected from the group consisting of a fluorine atom, a silicon atom, a linear alkyl group having 8 or more carbon atoms, and a branched alkyl group having 3 or more carbon atoms. What is necessary is just to have two or more. Further, the curable compound A has one or more combinations selected from the group consisting of a fluorine atom, a silicon atom, a linear alkyl group having 8 or more carbon atoms, and a branched alkyl group having 3 or more carbon atoms. It may be.
- the curable compound A has one or more curable functional groups and may have two or more curable functional groups. Only one type of curable functional group may be used, or two or more types may be used.
- the curable functional group may be a thermosetting functional group or a photocurable functional group.
- the curable functional group is (meth) acryloyloxy group, epoxy group, oxetanyl group, isocyanate group, hydroxyl group, amino group, carboxyl group, thiol group, alkoxysilyl group, methylol group, vinyl group, (meth) acrylamide group It is preferably at least one selected from the group consisting of styryl group and maleimide group, and at least one selected from the group consisting of (meth) acryloyloxy group, epoxy group and oxetanyl group Is more preferable.
- the amount of the ethylenically unsaturated group in the curable compound A is preferably 0.1 to 10.0 mol / g, and preferably 1.0 to 5.0 mol. / G is more preferable.
- curable compound A is a monomer, 1 selected from the group consisting of a fluorine atom, a silicon atom, a linear alkyl group having 8 or more carbon atoms, and a branched alkyl group having 3 or more carbon atoms in one molecule
- the number of groups of species or more is preferably 1-20, and more preferably 3-15.
- the number of curable functional groups in one molecule is not particularly limited, but is preferably 2 or more, more preferably 4 or more, from the viewpoint that the effect of the present invention is more excellent.
- the upper limit is not particularly limited, but is often 10 or less, more often 6 or less.
- the polymer has at least a repeating unit represented by the following formula (B1), a repeating unit represented by the following formula (B2), and a repeating unit represented by the formula (B3). It is preferable to have one.
- R 1 to R 11 each independently represents a hydrogen atom, an alkyl group, or a halogen atom.
- L 1 to L 4 each independently represents a single bond or a divalent linking group.
- X 1 represents a (meth) acryloyloxy group, an epoxy group, or an oxetanyl group
- X 2 represents an alkyl group substituted with a fluorine atom, an aryl group substituted with a fluorine atom, an alkylsilyl group, an arylsilyl group,
- a group including the partial structure (S), a straight-chain alkyl group having 8 or more carbon atoms, or a branched alkyl group having 3 or more carbon atoms is represented
- X 3 represents a repeating unit represented by the formula (X-1).
- R 1 to R 11 are preferably each independently a hydrogen atom or an alkyl group.
- R 1 to R 11 represent an alkyl group, an alkyl group having 1 to 3 carbon atoms is preferable.
- R 1 to R 11 represent a halogen atom, a fluorine atom is preferable.
- L 1 to L 4 represent a divalent linking group
- the divalent linking group includes an alkylene group which may be substituted with a halogen atom, and a halogen atom substituted.
- a group consisting of a combination with one kind of group is preferable, an alkylene group which may be substituted with a halogen atom having 2 to 10 carbon atoms, —CO 2 —, —O—, —CO—, —CONR 12 —, or A group consisting of a combination of these groups is more preferred.
- R 12 represents a hydrogen atom or a methyl group.
- repeating unit represented by the formula (B1) include the following, but the present invention is not limited thereto.
- repeating unit represented by the formula (B2) include the following, but the present invention is not limited thereto.
- X 1 represents a hydrogen atom, —CH 3 , —F or —CF 3, and more preferably a hydrogen atom or a methyl group.
- Me represents a methyl group.
- the repeating unit described in paragraph number 0073 of JP-A-2015-017244 is also exemplified. This content is incorporated herein.
- repeating unit represented by the formula (B3) include the following, but the present invention is not limited thereto.
- the content of the repeating unit represented by the formula (B1) is preferably 30 to 95 mol%, more preferably 45 to 90 mol%, based on all repeating units in the curable compound A. preferable.
- the content of the repeating unit represented by the formula (B1) is preferably 30 mol% or more, and more preferably 45 mol% or more with respect to all the repeating units in the curable compound A.
- the total content of the repeating unit represented by the formula (B2) and the repeating unit represented by the formula (B3) is 5 to 70 mol% with respect to all the repeating units in the curable compound A. Preferably, it is 10 to 60 mol%.
- the total content of the repeating unit represented by the formula (B2) and the repeating unit represented by the formula (B3) is preferably 5 mol% or more with respect to all the repeating units in the curable compound A, preferably 10 mol. % Or more is more preferable.
- the content of the repeating unit represented by Formula (B2) is 0 mol%.
- the content of the repeating unit represented by the formula (B3) is preferably in the above range.
- the curable compound A may have a repeating unit other than the repeating units represented by the above formulas (B1) to (B3).
- the content of other repeating units is preferably 10 mol% or less, more preferably 1 mol% or less, based on all repeating units in the curable compound A.
- the weight average molecular weight (Mw: polystyrene conversion) is preferably 5,000 to 100,000, and more preferably 7,000 to 50,000.
- the weight average molecular weight is preferably 5,000 or more, and more preferably 7,000 or more.
- the dispersity is preferably 1.80 to 3.00, more preferably 2.00 to 2.90. preferable.
- curable compound A Commercially available products of the curable compound A include, for example, a curable compound having a fluorine atom such as MegaFac RS-72-K, MegaFac RS-75, MegaFac RS-76-E, MegaFac RS manufactured by DIC.
- a curable compound having a fluorine atom such as MegaFac RS-72-K, MegaFac RS-75, MegaFac RS-76-E, MegaFac RS manufactured by DIC.
- BYK-UV 3500 BYK-UV 3530, BYK-UV3570, BYK-UV3570 manufactured by BYK, TEGO Rad 2010, TEGO Rad 2011 manufactured by EVONIK
- TEGO Rad 2100 TEGO Rad 2200N
- TEGO Rad 2250 TEGO Rad 2300
- TEGO Rad 2500 TEGO Rad 2600, TEGO Rad 2650, TEGO Rad 2700, etc.
- the curable compound A is preferably capable of forming a film having a refractive index of 1.1 to 1.5 at a wavelength of 550 nm with the curable compound alone. That is, the refractive index at a wavelength of 550 nm of a film formed only from the curable compound A is preferably 1.1 to 1.5.
- the preferable range of the refractive index is preferably 1.2 to 1.5, more preferably 1.3 to 1.5 in terms of low reflectivity of the light shielding film.
- the content of the curable compound A is preferably 0.1 to 20% by mass, more preferably 0.5 to 15% by mass, and 1.0 to 10% by mass with respect to the total solid content in the coloring composition. Further preferred.
- the coloring composition may contain the curable compound A alone or in combination of two or more. When a coloring composition contains 2 or more types of sclerosing
- the colored composition of the present invention preferably contains a resin.
- the resin is blended, for example, for the purpose of dispersing the colorant in the composition or the use of a binder.
- a resin mainly used for dispersing a colorant is also referred to as a dispersant.
- a dispersant such use of the resin is merely an example, and the resin can be used for other purposes.
- the weight average molecular weight (Mw) of the resin is preferably 2,000 to 2,000,000.
- the upper limit is preferably 1,000,000 or less, and more preferably 500,000 or less.
- the lower limit is preferably 3,000 or more, and more preferably 5,000 or more.
- the resin content is preferably 10 to 80% by mass, more preferably 20 to 60% by mass, based on the total solid content of the colored composition.
- the composition of the present invention may contain only one type of resin or two or more types of resins. When two or more types are included, the total amount is preferably within the above range.
- the coloring composition of the present invention contains an alkali-soluble resin as a resin. By containing an alkali-soluble resin, developability and pattern formability are improved.
- the alkali-soluble resin can also be used as a dispersant or a binder.
- the molecular weight of the alkali-soluble resin is not particularly defined, but the weight average molecular weight (Mw) is preferably 5000 to 100,000.
- the number average molecular weight (Mn) is preferably 1000 to 20,000.
- the alkali-soluble resin may be a linear organic polymer, and has at least one alkali-soluble polymer in a molecule (preferably a molecule having an acrylic copolymer or a styrene copolymer as a main chain). It can be suitably selected from alkali-soluble resins having groups to promote.
- the alkali-soluble resin is preferably a polyhydroxystyrene resin, a polysiloxane resin, an acrylic resin, an acrylamide resin, or an acrylic / acrylamide copolymer resin from the viewpoint of heat resistance.
- Acrylic resins, acrylamide resins, and acrylic / acrylamide copolymer resins are preferred.
- Examples of the group that promotes alkali solubility include a carboxyl group, a phosphoric acid group, a sulfonic acid group, and a phenolic hydroxyl group. What can be developed is preferable, and (meth) acrylic acid is particularly preferable. These acid groups may be used alone or in combination of two or more.
- a known radical polymerization method can be applied.
- Polymerization conditions such as temperature, pressure, type and amount of radical initiator, type of solvent, etc. when producing an alkali-soluble resin by radical polymerization can be easily set by those skilled in the art, and the conditions are determined experimentally. It can also be done.
- the alkali-soluble resin a polymer having a carboxylic acid in the side chain is preferable, and a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, a crotonic acid copolymer, a maleic acid copolymer, and a partial esterification are used.
- a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, a crotonic acid copolymer, a maleic acid copolymer, and a partial esterification are used.
- examples thereof include maleic acid copolymers, alkali-soluble phenol resins such as novolak resins, acidic cellulose derivatives having a carboxyl group in the side chain, and polymers having a hydroxyl group added with an acid anhydride.
- a copolymer of (meth) acrylic acid and another monomer copolymerizable therewith is suitable as the alkali-soluble resin.
- examples of other monomers copolymerizable with (meth) acrylic acid include alkyl (meth) acrylates, aryl (meth) acrylates, and vinyl compounds.
- alkyl (meth) acrylate and aryl (meth) acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, pentyl (meth) acrylate,
- vinyl compounds such as hexyl (meth) acrylate, octyl (meth) acrylate, phenyl (meth) acrylate, benzyl (meth) acrylate, tolyl (meth) acrylate, naphthyl (meth) acrylate, cyclohexyl (meth) acrylate, styrene, ⁇ -methylstyrene, vinyltoluene, glycidyl methacrylate, acrylonitrile, vinyl acetate, N-vinylpyrrolidone, tetrahydrofurfury
- an alkali-soluble resin having a polymerizable group may be used.
- the polymerizable group include a (meth) allyl group and a (meth) acryloyl group.
- the alkali-soluble resin having a polymerizable group an alkali-soluble resin containing a polymerizable group in a side chain is useful.
- the alkali-soluble resin containing a polymerizable group include: Dial NR series (manufactured by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (manufactured by COOH-containing polyurethane acrylic oligomer.
- Cyclomer P series for example, ACA230AA
- Plaxel CF200 series all manufactured by Daicel Corporation
- Ebecryl 3800 manufactured by Daicel UCB Corporation
- Acrycure-RD- And F8 manufactured by Nippon Shokubai Co., Ltd.
- Alkali-soluble resins include benzyl (meth) acrylate / (meth) acrylic acid copolymer, benzyl (meth) acrylate / (meth) acrylic acid / 2-hydroxyethyl (meth) acrylate copolymer, benzyl (meth) acrylate / Multi-component copolymers composed of (meth) acrylic acid / other monomers can be preferably used.
- the alkali-soluble resin is a monomer containing a compound represented by the following general formula (ED1) and / or a compound represented by the following general formula (ED2) (hereinafter, these compounds may be referred to as “ether dimers”). It is also preferable to include a polymer (a) obtained by polymerizing the components.
- R 1 and R 2 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
- R represents a hydrogen atom or an organic group having 1 to 30 carbon atoms.
- the description in JP 2010-168539 A can be referred to.
- the hydrocarbon group having 1 to 25 carbon atoms which may have a substituent represented by R 1 and R 2 is not particularly limited, and examples thereof include methyl, ethyl, n Linear or branched alkyl groups such as -propyl, isopropyl, n-butyl, isobutyl, tert-butyl, tert-amyl, stearyl, lauryl, 2-ethylhexyl; aryl groups such as phenyl; cyclohexyl, tert-butylcyclohexyl Alicyclic groups such as dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl and 2-methyl-2-adamantyl; alkyl groups substituted with alkoxy such as 1-methoxyethyl and 1-ethoxyethyl; benzyl An alkyl group substituted with an aryl group such as;
- ether dimer for example, paragraph 0317 of JP2013-29760A can be referred to, and the contents thereof are incorporated in the present specification. Only one type of ether dimer may be used, or two or more types may be used.
- the structure derived from the compound represented by the general formula (ED) may be copolymerized with other monomers.
- the alkali-soluble resin may contain a structural unit derived from a compound represented by the following formula (X).
- R 1 represents a hydrogen atom or a methyl group
- R 2 represents an alkylene group having 2 to 10 carbon atoms
- R 3 represents a hydrogen atom or a benzene ring that may contain a benzene ring.
- n represents an integer of 1 to 15.
- the alkylene group of R 2 preferably has 2 to 3 carbon atoms.
- the alkyl group of R 3 has 1 to 20 carbon atoms, more preferably 1 to 10, and the alkyl group of R 3 may contain a benzene ring.
- Examples of the alkyl group containing a benzene ring represented by R 3 include a benzyl group and a 2-phenyl (iso) propyl group.
- alkali-soluble resin examples include the following.
- the description from JP2012-208494A paragraphs 0558 to 0571 can be referred to, and the contents thereof are described in the present specification. Incorporated.
- the copolymer (B) described in paragraph Nos. 0029 to 0063 described in JP 2012-32767 A and the alkali-soluble resin used in Examples, paragraph Nos. 0088 to 2020 of JP 2012-208474 A The binder resin described in 0098 and the binder resin used in Examples, the binder resin described in Paragraph Nos.
- the acid value of the alkali-soluble resin is preferably 30 to 500 mgKOH / g.
- the lower limit is more preferably 50 mgKOH / g or more, and still more preferably 70 mgKOH / g or more.
- the upper limit is more preferably 400 mgKOH / g or less, further preferably 200 mgKOH / g or less, particularly preferably 150 mgKOH / g or less, and even more preferably 120 mgKOH / g or less.
- the content of the alkali-soluble resin is preferably 0.1 to 20% by mass with respect to the total solid content of the coloring composition.
- the lower limit is preferably 0.5% by mass or more, more preferably 1% by mass or more, further preferably 2% by mass or more, and particularly preferably 3% by mass or more.
- an upper limit 12 mass% or less is more preferable, and 10 mass% or less is still more preferable.
- the coloring composition of the present invention may contain only one type of alkali-soluble resin, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- the coloring composition of the present invention can contain a dispersant as a resin.
- the dispersant preferably contains one or more selected from acidic resins, basic resins and amphoteric resins.
- the acidic resin means a resin having an acid group and having an acid value of 5 mgKOH / g or more and an amine value of less than 5 mgKOH / g.
- the acidic resin preferably does not have a basic group.
- an acid group which acidic resin has a carboxyl group, a phosphoric acid group, a sulfonic acid group, a phenolic hydroxyl group etc. are mentioned, for example, A carboxyl group is preferable.
- the acidic resin any of a block copolymer, a random copolymer, and a graft copolymer can be used.
- the acid value of the acidic resin is preferably 5 to 200 mgKOH / g, more preferably 10 to 150 mgKOH / g, and further preferably 50 to 150 mgKOH / g.
- the basic resin means a resin having a basic group and having an amine value of 5 mgKOH / g or more and an acid value of less than 5 mgKOH / g.
- the basic resin preferably does not have an acid group.
- an amino group is preferable.
- the basic resin any of a block copolymer, a random copolymer, and a graft copolymer can be used.
- the amine value of the basic resin is preferably 5 to 200 mgKOH / g, more preferably 5 to 150 mgKOH / g, and still more preferably 5 to 100 mgKOH / g.
- the amphoteric resin means a resin having an acid group and a basic group and having an acid value of 5 mgKOH / g or more and an amine value of 5 mgKOH / g or more.
- the acid group include those described above, and a carboxyl group is preferable.
- the basic group an amino group is preferable.
- the amphoteric resin any of a block copolymer, a random copolymer, and a graft copolymer can be used.
- the amphoteric resin preferably has an acid value of 5 mgKOH / g or more and an amine value of 5 mgKOH / g or more.
- the acid value is preferably from 5 to 200 mgKOH / g, more preferably from 10 to 200 mgKOH / g, still more preferably from 30 to 200 mgKOH / g, particularly preferably from 30 to 180 mgKOH / g.
- the amine value is preferably 5 to 200 mgKOH / g, more preferably 10 to 150 mgKOH / g, and particularly preferably 10 to 130 mgKOH / g.
- the basic resin is preferably 10 to 150 parts by mass and the amphoteric resin is 30 to 170 parts by mass with respect to 100 parts by mass of the acidic resin.
- the basic resin is more preferably 30 to 130 parts by mass, and still more preferably 50 to 110 parts by mass.
- the amphoteric resin is more preferably 50 to 150 parts by mass, and still more preferably 90 to 150 parts by mass. According to this aspect, the above-described effect can be obtained more effectively.
- the acidic resin is preferably contained in an amount of 1 to 30% by mass, more preferably 1 to 20% by mass, based on the total solid content of the colored composition.
- the basic resin is preferably contained in an amount of 1 to 30% by mass, more preferably 1 to 20% by mass, based on the total solid content of the colored composition.
- the amphoteric resin is preferably contained in an amount of 1 to 30% by mass, more preferably 1 to 20% by mass, based on the total solid content of the colored composition.
- the resin is also available as a commercial product.
- examples of such resins include “DA-7301” manufactured by Kashiwagi Kasei Co., Ltd., “Disperbyk-101 (polyamidoamine phosphate)” manufactured by BYK Chemie, and 107 (carboxylic acid ester).
- Acrybase FFS-6752, Acrybase FFS-187, Acrycure-RD-F8, and Cyclomer P can be used.
- Commercially available amphoteric resins include, for example, DISPERBYK-130, DISPERBYK-140, DISPERBYK-142, DISPERBYK-145, DISPERBYK-180, DISPERBYK-187, DISPERBYK-191, DISPERBYK-2001, DISPERB manufactured by BYK Chemie. 2010, DISPERBYK-2012, DISPERBYK-2025, BYK-9006, Ajisper PB821, Azisper PB822, Azisper PB881 manufactured by Ajinomoto Fine Techno Co., and the like.
- the resin used as the dispersant preferably contains a repeating unit having an acid group.
- the repeating unit having an acid group can be constituted using a monomer having an acid group. Examples of the monomer derived from the acid group include a vinyl monomer having a carboxyl group, a vinyl monomer having a sulfonic acid group, and a vinyl monomer having a phosphoric acid group.
- vinyl monomer having a carboxyl group examples include (meth) acrylic acid, vinyl benzoic acid, maleic acid, maleic acid monoalkyl ester, fumaric acid, itaconic acid, crotonic acid, cinnamic acid, and acrylic acid dimer.
- an addition reaction product of a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate and a cyclic anhydride such as maleic anhydride, phthalic anhydride, succinic anhydride, cyclohexanedicarboxylic anhydride, ⁇ -carboxy- Polycaprolactone mono (meth) acrylate can also be used.
- anhydride containing monomers such as maleic anhydride, itaconic anhydride, and citraconic anhydride, as a precursor of a carboxyl group.
- a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate and a cyclic group such as maleic anhydride, phthalic anhydride, succinic anhydride, and cyclohexanedicarboxylic anhydride.
- An addition reaction product with an anhydride is preferred.
- the vinyl monomer having a sulfonic acid group include 2-acrylamido-2-methylpropanesulfonic acid.
- Examples of the vinyl monomer having a phosphoric acid group include phosphoric acid mono (2-acryloyloxyethyl ester), phosphoric acid mono (1-methyl-2-acryloyloxyethyl ester), and the like.
- the repeating unit having an acid group the description in paragraph numbers 0067 to 0069 of JP-A-2008-165059 can be referred to, and the contents thereof are included in the present specification.
- the resin used as the dispersant is also preferably a graft copolymer. Since the graft copolymer has an affinity for the solvent by the graft chain, it is excellent in the dispersibility of the colorant and the dispersion stability after aging. In addition, since the composition has an affinity for a polymerizable compound or an alkali-soluble resin due to the presence of the graft chain, a residue can be hardly generated by alkali development.
- the graft copolymer means a resin having a graft chain. The graft chain means from the base of the main chain of the polymer to the end of the group branched from the main chain.
- the graft copolymer is preferably a resin having a graft chain in which the number of atoms excluding hydrogen atoms is in the range of 40 to 10,000. Further, the number of atoms excluding hydrogen atoms per graft chain is preferably 40 to 10,000, more preferably 50 to 2000, and still more preferably 60 to 500.
- Examples of the main chain structure of the graft copolymer include (meth) acrylic resin, polyester resin, polyurethane resin, polyurea resin, polyamide resin, and polyether resin. Of these, a (meth) acrylic resin is preferable.
- the graft chain of the graft copolymer is a graft chain having poly (meth) acrylic, polyester, or polyether in order to improve the interaction between the graft site and the solvent and thereby increase dispersibility. Is preferable, and a graft chain having polyester or polyether is more preferable.
- the graft copolymer preferably contains a repeating unit having a graft chain in a range of 2 to 90% by mass, and in a range of 5 to 30% by mass, based on the total mass of the graft copolymer. Is more preferable. When the content of the repeating unit having a graft chain is within this range, the dispersibility of the colorant is good.
- Macromonomer AA-6 manufactured by Toa Gosei Co., Ltd. (polymethacrylate having a methacryloyl group at its end group) Acid-6), AS-6 (polystyrene whose terminal group is a methacryloyl group), AN-6S (a copolymer of styrene and acrylonitrile whose terminal group is a methacryloyl group), AB-6 (polyester whose terminal group is a methacryloyl group) Butyl acrylate), PLACEL FM5 manufactured by Daicel Corporation (2-hydroxyethyl methacrylate with 5 molar equivalents of ⁇ -caprolactone), FA10L (2-hydroxyethyl acrylate with 10 molar equivalents of ⁇ -caprolactone), And polyester-based mac described in JP-A-2-272009
- an oligoimine graft copolymer containing a nitrogen atom in at least one of the main chain and the side chain can also be preferably used as the graft copolymer.
- the oligoimine-based graft copolymer has a repeating unit having a partial structure X having a functional group of pK a of 14 or less, and a side chain containing an oligomer chain or a polymer chain Y having 40 to 10,000 atoms, And the resin which has a basic nitrogen atom in at least one of a principal chain and a side chain is preferable.
- the basic nitrogen atom is not particularly limited as long as it is a basic nitrogen atom.
- the oligoimine-based graft copolymer preferably contains a structure having a nitrogen atom having a base strength of pK b of 14 or less, and more preferably contains a structure having a nitrogen atom of pK b of 10 or less.
- the base strength pK b in the present invention means a pK b at a water temperature 25 ° C., is one of the index for quantitatively indicating the strength of the base, is synonymous with basicity constants.
- a base strength pK b, the acid strength pK a below, a relationship of pK b 14-pK a.
- the oligoimine graft copolymer is selected from a poly (lower alkylene imine) repeat unit, a polyallylamine repeat unit, a polydiallylamine repeat unit, a metaxylenediamine-epichlorohydrin polycondensate repeat unit, and a polyvinylamine repeat unit.
- At least one repeating unit having a basic nitrogen atom the repeating unit (i) having a partial structure X bonded to the basic nitrogen atom and having a functional group of pK a of 14 or less, and an atom It is particularly preferred to have a side chain (ii) containing several 40 to 10,000 oligomer chains or polymer chains Y.
- Examples of the oligoimine-based graft copolymer include a repeating unit represented by the following general formula (I-1) and a resin containing a repeating unit represented by the general formula (I-2).
- R 1 and R 2 each independently represents a hydrogen atom, a halogen atom or an alkyl group, a represents each independently an integer of 1 to 5, * Represents a connecting part between repeating units, X represents a group having a functional group of pK a 14 or less, and Y represents an oligomer chain or polymer chain having 40 to 10,000 atoms.
- the oligoimine-based graft copolymer preferably further contains a repeating unit represented by the general formula (I-3). According to this aspect, the dispersibility stability of the pigment body is further improved.
- R 1 , R 2 and a have the same meanings as R 1, R 2, and a in the general formula (I-1).
- Y ′ represents an oligomer chain or polymer chain having an anion group and having 40 to 10,000 atoms.
- the repeating unit represented by formula (I-3) is reacted by adding an oligomer or polymer having a group that reacts with an amine to form a salt to a resin having a primary or secondary amino group in the main chain. Can be formed.
- R 1 and R 2 are preferably hydrogen atoms.
- a is preferably 2 from the viewpoint of raw material availability.
- the oligoimine-based graft copolymer contains primary or tertiary amino groups in addition to the repeating units represented by general formula (I-1), general formula (I-2) and general formula (I-3).
- Lower alkyleneimine may be contained as a repeating unit.
- the group shown by X, Y, or Y ' may couple
- the repeating unit represented by formula (I-1) is preferably contained in an amount of 1 to 80 mol%, and most preferably 3 to 50 mol%, based on all repeating units contained in the oligoimine-based graft copolymer. preferable.
- the repeating unit represented by the general formula (I-2) is preferably contained in an amount of 10 to 90 mol%, and preferably 30 to 70 mol% in all repeating units contained in the oligoimine-based graft copolymer. Is most preferred.
- the content ratio [(I-1) :( I-2)] of the repeating unit (I-1) and the repeating unit (I-2) is 10 in molar ratio.
- the range is preferably 1: 1 to 1: 100, and more preferably 1: 1 to 1:10.
- the repeating unit represented by the general formula (I-3) used in combination optionally has a partial structure containing an oligomer chain or polymer chain Y ′ having 40 to 10,000 atoms in the main chain nitrogen atom. From the viewpoint of the effect, it is preferable that 0.5 to 20 mol% is contained in all repeating units contained in the oligoimine-based graft copolymer, and 1 to 10 mol% is contained. Most preferably. In addition, it can confirm that the polymer chain Y 'has ionically bonded by infrared spectroscopy or base titration.
- the partial structure X has a functional group having a pKa of 14 or less at a water temperature of 25 ° C.
- pK a has the definition described in Chemical Handbook (II) (4th revised edition, 1993, edited by The Chemical Society of Japan, Maruzen Co., Ltd.).
- PK a 14 following functional group as long as the physical properties satisfying this condition are not particularly limited, such as its structure, pK a known functional groups include those which satisfy the above range, in particular A functional group having a pK a of 12 or less is preferred, and a functional group having a pK a of 11 or less is most preferred.
- partial structure X examples include, for example, a carboxylic acid group (pK a : about 3 to 5), a sulfonic acid group (pK a : about ⁇ 3 to ⁇ 2), —COCH 2 CO— (pK a : 8 to About 10), —COCH 2 CN (pK a : about 8 to 11), —CONHCO—, phenolic hydroxyl group, —R F CH 2 OH or — (R F ) 2 CHOH (R F represents a perfluoroalkyl group).
- pK a about 9 to 11
- sulfonamide group pK a : about 9 to 11
- carboxylic acid group pK a : about 3 to 5
- sulfonic acid group pK a : about ⁇ 3 to -COCH 2 CO- (pK a : about 8 to 10).
- the partial structure X is preferably bonded directly to the basic nitrogen atom.
- the basic nitrogen atom and the partial structure X may be linked in a form that forms not only a covalent bond but also an ionic bond to form a salt.
- the partial structure X those having a structure represented by the following general formula (V-1), general formula (V-2) or general formula (V-3) are particularly preferable.
- U represents a single bond or a divalent linking group.
- d and e each independently represents 0 or 1;
- Q represents an acyl group or an alkoxycarbonyl group.
- Examples of the divalent linking group represented by U include an alkylene group which may have an oxygen atom, an arylene group, an alkyleneoxy group and the like, and in particular, an alkylene group having 1 to 30 carbon atoms or a carbon number of 6
- An arylene group having 20 to 20 carbon atoms is preferable, and an alkylene group having 1 to 20 carbon atoms or an arylene group having 6 to 15 carbon atoms is most preferable.
- d is preferably 1, and e is preferably 0.
- Q represents an acyl group or an alkoxycarbonyl group.
- the acyl group in Q an acyl group having 1 to 30 carbon atoms is preferable, and an acetyl group is particularly preferable.
- the alkoxycarbonyl group in Q Q is preferable from the viewpoint of ease of production of an acetyl group and availability of a raw material (precursor X ′ of X).
- oligomer chain or polymer chain Y having 40 to 10,000 atoms examples include known polymer chains such as polyester, polyamide, polyimide, poly (meth) acrylate and the like that can be connected to the main chain portion of the oligoimine-based graft copolymer. Can be mentioned.
- the binding site with the oligoimine-based graft copolymer in Y is preferably the end of Y.
- Y is preferably bonded to a basic nitrogen atom.
- the bonding mode between the basic nitrogen atom and Y is a covalent bond, an ionic bond, or a mixture of a covalent bond and an ionic bond.
- Y is preferably ionically bonded to a basic nitrogen atom as an amide bond or carboxylate.
- the number of atoms of the oligomer chain or polymer chain Y is preferably 50 to 5,000, more preferably 60 to 3,000, from the viewpoint of dispersibility, dispersion stability, and developability.
- the number average molecular weight of Y can be measured by the polystyrene conversion value by GPC method.
- the number average molecular weight of Y is particularly preferably 1,000 to 50,000, and most preferably 1,000 to 30,000 from the viewpoints of dispersibility, dispersion stability, and developability. It is preferable that two or more side chain structures represented by Y are connected to the main chain in one molecule of resin, and most preferably five or more are connected.
- the description of paragraph numbers 0086 to 0098 of JP2013-064979A can be referred to, and these contents are incorporated in this specification.
- the oligoimine-based graft copolymer described above can be synthesized by the method described in paragraph numbers 0110 to 0117 of JP2013-064979A. Specific examples of the above-described oligoimine-based graft copolymer include the following. In addition, resins described in paragraph numbers 0099 to 0109 and 0119 to 0124 of JP2013-064979A can be cited, and the contents thereof are incorporated in this specification.
- a copolymer containing a repeating unit represented by any of the following formulas (1) to (4) can also be used as the graft copolymer.
- This graft copolymer can be particularly preferably used as a dispersant for a black pigment.
- W 1 , W 2 , W 3 , and W 4 each independently represent an oxygen atom or NH.
- W 1 , W 2 , W 3 , and W 4 are preferably oxygen atoms.
- X 1 , X 2 , X 3 , X 4 , and X 5 each independently represent a hydrogen atom or a monovalent organic group.
- X 1 , X 2 , X 3 , X 4 , and X 5 are each independently preferably a hydrogen atom or an alkyl group having 1 to 12 carbon atoms from the viewpoint of synthesis constraints. Further, a hydrogen atom or a methyl group is more preferable, and a methyl group is particularly preferable.
- Y 1 , Y 2 , Y 3 , and Y 4 each independently represent a divalent linking group, and the linking group is not particularly limited in structure.
- Specific examples of the divalent linking group represented by Y 1 , Y 2 , Y 3 , and Y 4 include the following (Y-1) to (Y-21) linking groups. .
- a and B represent binding sites with the left end group and the right end group in Formulas (1) to (4), respectively.
- Z 1 , Z 2 , Z 3 , and Z 4 each independently represent a monovalent organic group.
- the structure of the organic group is not particularly limited, and specific examples include an alkyl group, a hydroxyl group, an alkoxy group, an aryloxy group, a heteroaryloxy group, an alkylthioether group, an arylthioether group, a heteroarylthioether group, and an amino group. Is mentioned.
- the organic group represented by Z 1 , Z 2 , Z 3 , and Z 4 those having a steric repulsion effect are particularly preferable from the viewpoint of improving dispersibility, and each independently has 5 to 24 carbon atoms.
- a branched alkyl group having 5 to 24 carbon atoms, a cyclic alkyl group having 5 to 24 carbon atoms, or an alkoxy group having 5 to 24 carbon atoms is particularly preferable.
- the alkyl group contained in the alkoxy group may be linear, branched or cyclic.
- n, m, p, and q are each independently an integer of 1 to 500.
- j and k each independently represent an integer of 2 to 8.
- J and k in the formulas (1) and (2) are preferably integers of 4 to 6 and most preferably 5 from the viewpoints of dispersion stability and developability.
- R 3 represents a branched or straight chain alkylene group, preferably an alkylene group having 1 to 10 carbon atoms, and more preferably an alkylene group having 2 or 3 carbon atoms. When p is 2 to 500, a plurality of R 3 may be the same or different.
- R 4 represents a hydrogen atom or a monovalent organic group, and the monovalent organic group is not particularly limited in terms of structure.
- R 4 is preferably a hydrogen atom, an alkyl group, an aryl group, or a heteroaryl group, more preferably a hydrogen atom or an alkyl group.
- the alkyl group is preferably a linear alkyl group having 1 to 20 carbon atoms, a branched alkyl group having 3 to 20 carbon atoms, or a cyclic alkyl group having 5 to 20 carbon atoms, A linear alkyl group having 1 to 20 carbon atoms is more preferable, and a linear alkyl group having 1 to 6 carbon atoms is particularly preferable.
- a plurality of X 5 and R 4 present in the graft copolymer may be the same or different from each other.
- the repeating unit represented by the formula (1) is more preferably a repeating unit represented by the following formula (1A) from the viewpoints of dispersion stability and developability.
- the repeating unit represented by the formula (2) is more preferably a repeating unit represented by the following formula (2A) from the viewpoint of dispersion stability and developability.
- repeating unit represented by the formula (3) is more preferably a repeating unit represented by the following formula (3A) or formula (3B) from the viewpoint of dispersion stability and developability.
- X 1, Y 1, Z 1 and n are as defined X 1, Y 1, Z 1 and n in Formula (1), and preferred ranges are also the same.
- (2A) X 2, Y 2, Z 2 and m are as defined X 2, Y 2, Z 2 and m in the formula (2), and preferred ranges are also the same.
- (3A) or (3B) X 3, Y 3, Z 3 and p are as defined X 3, Y 3, Z 3 and p in formula (3), and preferred ranges are also the same.
- the graft copolymer described above preferably has a hydrophobic repeating unit in addition to the repeating units represented by the above formulas (1) to (4).
- the hydrophobic repeating unit is a repeating unit having no acid group (for example, carboxylic acid group, sulfonic acid group, phosphoric acid group, phenolic hydroxyl group, etc.).
- the hydrophobic repeating unit is preferably a repeating unit derived from (corresponding to) a compound (monomer) having a ClogP value of 1.2 or more, more preferably derived from a compound having a ClogP value of 1.2 to 8. It is a repeating unit.
- ClogP values can be obtained from Daylight Chemical Information System, Inc. It is a value calculated by the program “CLOGP” available from This program provides the value of “computation logP” calculated by Hansch, Leo's fragment approach (see below). The fragment approach is based on the chemical structure of a compound, which divides the chemical structure into substructures (fragments) and estimates the logP value of the compound by summing the logP contributions assigned to that fragment. Details thereof are described in the following documents. In the present invention, the ClogP value calculated by the program CLOGP v4.82 is used. A. J. et al. Leo, Comprehensive Medicinal Chemistry, Vol. 4, C.I. Hansch, P.A. G. Sammunens, J. et al. B.
- logP means the common logarithm of the partition coefficient P (Partition Coefficient), and quantitatively determines how an organic compound is distributed in the equilibrium of a two-phase system of oil (generally 1-octanol) and water. It is a physical property value expressed as a numerical value, and is represented by the following formula.
- logP log (Coil / Cwater)
- Coil represents the molar concentration of the compound in the oil phase
- Cwater represents the molar concentration of the compound in the aqueous phase.
- the graft copolymer preferably has one or more repeating units selected from repeating units derived from monomers represented by the following general formulas (i) to (iii) as hydrophobic repeating units.
- R 1 , R 2 , and R 3 are each independently a hydrogen atom, a halogen atom (for example, fluorine, chlorine, bromine, etc.), or 1 to 6 carbon atoms.
- An alkyl group (for example, a methyl group, an ethyl group, a propyl group, etc.).
- R 1 , R 2 , and R 3 are more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and most preferably a hydrogen atom or a methyl group.
- R 2 and R 3 are particularly preferably a hydrogen atom.
- X represents an oxygen atom (—O—) or an imino group (—NH—), and is preferably an oxygen atom.
- L is a single bond or a divalent linking group.
- a divalent aliphatic group for example, alkylene group, substituted alkylene group, alkenylene group, substituted alkenylene group, alkynylene group, substituted alkynylene group
- divalent aromatic group for example, arylene group
- Substituted arylene group divalent heterocyclic group, oxygen atom (—O—), sulfur atom (—S—), imino group (—NH—), substituted imino group (—NR 31 —, where R 31 Are aliphatic groups, aromatic groups or heterocyclic groups), carbonyl groups (—CO—), or combinations thereof.
- L is preferably a single bond, an alkylene group or a divalent linking group containing an oxyalkylene structure.
- the oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure.
- L may contain a polyoxyalkylene structure containing two or more oxyalkylene structures.
- the polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure.
- the polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n —, and n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
- Z is an aliphatic group (eg, alkyl group, substituted alkyl group, unsaturated alkyl group, substituted unsaturated alkyl group), aromatic group (eg, arylene group, substituted arylene group), heterocyclic group, oxygen atom ( —O—), sulfur atom (—S—), imino group (—NH—), substituted imino group (—NR 31 —, where R 31 is an aliphatic group, aromatic group or heterocyclic group), carbonyl group (—CO—) or a combination thereof.
- aliphatic group eg, alkyl group, substituted alkyl group, unsaturated alkyl group, substituted unsaturated alkyl group
- aromatic group eg, arylene group, substituted arylene group
- heterocyclic group oxygen atom ( —O—), sulfur atom (—S—), imino group (—NH—), substituted imino group (—NR 31 —, where R 31 is an aliphatic group, aromatic
- the aliphatic group may have a cyclic structure or a branched structure.
- the number of carbon atoms in the aliphatic group is preferably 1-20, more preferably 1-15, still more preferably 1-10.
- the aliphatic group further includes a ring assembly hydrocarbon group and a bridged cyclic hydrocarbon group. Examples of the ring assembly hydrocarbon group include a bicyclohexyl group, a perhydronaphthalenyl group, a biphenyl group, and 4-cyclohexyl. A phenyl group and the like are included.
- bridged cyclic hydrocarbon ring for example, bicyclic such as pinane, bornane, norpinane, norbornane, bicyclooctane ring (bicyclo [2.2.2] octane ring, bicyclo [3.2.1] octane ring, etc.) Hydrocarbon ring, homobredan, adamantane, tricyclo [5.2.1.0 2,6 ] decane, tricyclo [4.3.1.1 2,5 ] undecane ring and other tricyclic hydrocarbon rings, tetracyclo [4 4.0.1, 2,5 .
- bicyclic such as pinane, bornane, norpinane, norbornane, bicyclooctane ring (bicyclo [2.2.2] octane ring, bicyclo [3.2.1] octane ring, etc.)
- Hydrocarbon ring homobredan, adamantane, tricyclo [5.2.1.0 2,6 ] decane
- the bridged cyclic hydrocarbon ring includes a condensed cyclic hydrocarbon ring such as perhydronaphthalene (decalin), perhydroanthracene, perhydrophenanthrene, perhydroacenaphthene, perhydrofluorene, perhydroindene, perhydroindene.
- a condensed ring formed by condensing a plurality of 5- to 8-membered cycloalkane rings such as a phenalene ring is also included.
- the aliphatic group is preferably a saturated aliphatic group rather than an unsaturated aliphatic group. Further, the aliphatic group may have a substituent. Examples of the substituent include a halogen atom, an aromatic group, and a heterocyclic group. However, the aliphatic group does not have an acid group as a substituent.
- the number of carbon atoms in the aromatic group is preferably 6 to 20, more preferably 6 to 15, and still more preferably 6 to 10.
- the aromatic group may have a substituent. Examples of the substituent include a halogen atom, an aliphatic group, an aromatic group, and a heterocyclic group. However, the aromatic group does not have an acid group as a substituent.
- the heterocyclic group preferably has a 5-membered or 6-membered ring as the heterocycle. Another heterocyclic ring, an aliphatic ring or an aromatic ring may be condensed with the heterocyclic ring. Moreover, the heterocyclic group may have a substituent. Examples of substituents include halogen atoms, hydroxy groups, oxo groups ( ⁇ O), thioxo groups ( ⁇ S), imino groups ( ⁇ NH), substituted imino groups ( ⁇ N—R 32 , where R 32 represents a fatty acid Aromatic group, aromatic group or heterocyclic group), aliphatic group, aromatic group and heterocyclic group. However, the heterocyclic group does not have an acid group as a substituent.
- R 4 , R 5 , and R 6 are each independently a hydrogen atom, a halogen atom (eg, fluorine, chlorine, bromine, etc.), or an alkyl group having 1 to 6 carbon atoms ( For example, it represents a methyl group, an ethyl group, a propyl group, etc.), Z, or -LZ.
- L and Z are as defined above.
- R 4 , R 5 , and R 6 are preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and more preferably a hydrogen atom.
- the monomer represented by the general formula (i) is a divalent linking group in which R 1 , R 2 , and R 3 are a hydrogen atom or a methyl group, and L is a single bond or an alkylene group or an oxyalkylene structure.
- a compound in which X is an oxygen atom or imino group and Z is an aliphatic group, heterocyclic group or aromatic group is preferred.
- the monomer represented by the general formula (ii) is a compound in which R 1 is a hydrogen atom or a methyl group, L is an alkylene group, and Z is an aliphatic group, a heterocyclic group or an aromatic group. preferable.
- the monomer represented by the general formula (iii) is preferably a compound in which R 4 , R 5 , and R 6 are a hydrogen atom or a methyl group, and Z is an aliphatic group, a heterocyclic group, or an aromatic group. .
- Examples of typical compounds represented by formulas (i) to (iii) include radically polymerizable compounds selected from acrylic acid esters, methacrylic acid esters, styrenes, and the like.
- the compounds represented by formulas (i) to (iii) the compounds described in paragraphs 0089 to 0093 of JP2013-249417A can be referred to, and the contents thereof are incorporated in the present specification. .
- the hydrophobic repeating unit is preferably contained in the range of 10 to 90% by mass, and in the range of 20 to 80% by mass, based on the total mass of the graft copolymer, in terms of mass. Is more preferable. When the content is in the above range, sufficient pattern formation can be obtained.
- the graft copolymer described above preferably includes a repeating unit having a functional group capable of interacting with a colorant or the like.
- the acid group examples include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, and a phenolic hydroxyl group, and preferably at least one of a carboxylic acid group, a sulfonic acid group, and a phosphoric acid group.
- carboxylic acid groups that have good adsorption power to colorants such as black pigments and that are highly dispersible.
- the graft copolymer may have one or more repeating units having an acid group.
- the graft copolymer may or may not contain a repeating unit having an acid group. However, when it is contained, the content of the repeating unit having an acid group is expressed in terms of mass in the total mass of the graft copolymer. On the other hand, it is preferably 5 to 80% by mass, more preferably 10 to 60% by mass.
- the basic group examples include a primary amino group, a secondary amino group, a tertiary amino group, a heterocyclic ring containing an N atom, an amide group, and the like. It is a tertiary amino group having good strength and high dispersibility.
- the graft copolymer can have one or more of these basic groups.
- the graft copolymer may or may not contain a repeating unit having a basic group. However, when it is contained, the content of the repeating unit having a basic group is the total amount of the graft copolymer in terms of mass. Preferably, the content is 0.01 to 50% by mass, more preferably 0.01 to 30% by mass from the viewpoint of inhibiting developability inhibition.
- Examples of the coordinating group and reactive functional group include acetylacetoxy group, trialkoxysilyl group, isocyanate group, acid anhydride, acid chloride and the like. Particularly preferred is an acetylacetoxy group that has a good adsorptive power to the colorant and a high dispersibility.
- the graft copolymer may have one or more of these groups.
- the graft copolymer may or may not contain a repeating unit having a coordinating group or a repeating unit having a reactive functional group, but when it is contained, the content of these repeating units is In terms of mass, it is preferably 10 to 80% by mass, and more preferably 20 to 60% by mass, from the viewpoint of inhibiting developability inhibition, with respect to the total mass of the graft copolymer.
- the graft copolymer has a functional group capable of forming an interaction with the colorant in addition to the graft chain, there is no particular limitation on how these functional groups are introduced. It is preferable to have one or more repeating units selected from repeating units derived from monomers represented by the following general formulas (iv) to (vi).
- R 11 , R 12 , and R 13 are each independently a hydrogen atom, a halogen atom (eg, a fluorine atom, a chlorine atom, a bromine atom, etc.), or a carbon atom. It represents an alkyl group having 1 to 6 numbers (for example, methyl group, ethyl group, propyl group, etc.).
- R 11 , R 12 and R 13 are more preferably each independently a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, most preferably Are each independently a hydrogen atom or a methyl group.
- R 12 and R 13 are each particularly preferably a hydrogen atom.
- X 1 in the general formula (iv) represents an oxygen atom (—O—) or an imino group (—NH—), and is preferably an oxygen atom.
- Y in the general formula (v) represents a methine group or a nitrogen atom.
- L 1 in the general formulas (iv) to (v) represents a single bond or a divalent linking group.
- the divalent linking group include a divalent aliphatic group (for example, an alkylene group, a substituted alkylene group, an alkenylene group, a substituted alkenylene group, an alkynylene group, and a substituted alkynylene group), a divalent aromatic group (for example, , Arylene group and substituted arylene group), divalent heterocyclic group, oxygen atom (—O—), sulfur atom (—S—), imino group (—NH—), substituted imino bond (—NR 31 ′ —
- R 31 ′ includes an aliphatic group, an aromatic group or a heterocyclic group), a carbonyl bond (—CO—), or a combination thereof.
- L 1 is preferably a single bond, an alkylene group or a divalent linking group containing an oxyalkylene structure.
- the oxyalkylene structure is more preferably an oxyethylene structure or an oxypropylene structure.
- L may contain a polyoxyalkylene structure containing two or more oxyalkylene structures.
- the polyoxyalkylene structure is preferably a polyoxyethylene structure or a polyoxypropylene structure.
- the polyoxyethylene structure is represented by — (OCH 2 CH 2 ) n —, and n is preferably an integer of 2 or more, and more preferably an integer of 2 to 10.
- Z 1 represents a functional group capable of forming an interaction with the colorant in addition to the graft chain, and is preferably a carboxylic acid group or a tertiary amino group. A carboxylic acid group is more preferable.
- R 14 , R 15 , and R 16 are each independently a hydrogen atom, a halogen atom (eg, fluorine, chlorine, bromine, etc.), or an alkyl group having 1 to 6 carbon atoms (eg, , methyl group, ethyl group, propyl group, etc.), - represents a Z 1, or -L 1 -Z 1.
- L 1 and Z 1 are the same meaning as L 1 and Z 1 in the above, it is the preferable examples.
- R 14 , R 15 and R 16 are each independently preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, more preferably a hydrogen atom.
- the monomer represented by the general formula (iv) is a divalent linking group in which R 11 , R 12 , and R 13 are each independently a hydrogen atom or a methyl group, and L 1 is an alkylene group or an oxyalkylene structure.
- a compound in which X is an oxygen atom or imino group and Z is a carboxylic acid group is preferable.
- the monomer represented by the general formula (v) is a compound in which R 11 is a hydrogen atom or a methyl group, L 1 is an alkylene group, Z 1 is a carboxylic acid group, and Y is a methine group. Is preferred.
- R 14 , R 15 , and R 16 are each independently a hydrogen atom or a methyl group, L is a single bond or an alkylene group, and Z is a carboxylic acid group. Is preferred.
- graft copolymer examples include the following. Reference can also be made to the polymer compounds described in paragraphs 0127 to 0129 of JP2013-249417A, the contents of which are incorporated herein.
- the coloring composition of the present invention may contain a pigment derivative.
- the pigment derivative is preferably a compound having a structure in which a part of an organic pigment is substituted with an acidic group, a basic group or a phthalimidomethyl group.
- a pigment derivative having an acidic group or a basic group is preferable.
- Particularly preferred are pigment derivatives having a basic group.
- the combination of the resin (dispersant) and the pigment derivative described above is preferably a combination in which the dispersant is an acidic dispersant and the pigment derivative has a basic group.
- organic pigment for constituting the pigment derivative examples include diketopyrrolopyrrole pigments, azo pigments, phthalocyanine pigments, anthraquinone pigments, quinacridone pigments, dioxazine pigments, perinone pigments, perylene pigments, thioindigo pigments , Isoindoline pigments, isoindolinone pigments, quinophthalone pigments, selenium pigments, metal complex pigments, and the like.
- a sulfonic acid group a carboxylic acid group, and its salt
- a carboxylic acid group and a sulfonic acid group are more preferable
- a sulfonic acid group is especially preferable.
- the basic group possessed by the pigment derivative is preferably an amino group, particularly preferably a tertiary amino group.
- the content of the pigment derivative is preferably 1 to 30% by mass, and more preferably 3 to 20% by mass with respect to the mass of the pigment. Only one pigment derivative may be used, or two or more pigment derivatives may be used in combination.
- the coloring composition of the present invention may contain an organic solvent.
- the organic solvent is basically not particularly limited as long as it satisfies the solubility of each component and the applicability of the coloring composition. Are preferably selected.
- organic solvents examples include esters such as ethyl acetate, n-butyl acetate, isobutyl acetate, cyclohexyl acetate, amyl formate, isoamyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, and ethyl lactate.
- Oxyacetic acid alkyl esters eg, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (eg, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate)
- 3-oxypropion Acid alkyl esters eg, methyl 3-oxypropionate, ethyl 3-oxypropionate, etc.
- D 2-oxypropionic acid alkyl esters eg, methyl 2-oxypropionate, ethyl 2-oxypropionate, propyl 2-oxypropionate, etc.
- ethers include diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cellosolve a
- the organic solvent preferably has a peroxide content of 0.8 mmol / L or less, and more preferably contains substantially no peroxide.
- the content of the organic solvent in the colored composition is preferably such that the total solid concentration of the colored composition is 5% to 80% by mass, and more preferably 5 to 60% by mass, from the viewpoint of applicability. 10 to 50% by mass is particularly preferable.
- the coloring composition of the present invention may contain only one type of organic solvent or two or more types of organic solvents. When two or more types are included, the total amount is preferably within the above range.
- Polymerization inhibitors include hydroquinone, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, t-butylcatechol, benzoquinone, 4,4′-thiobis (3-methyl-6-t-butylphenol), 2,2′-methylenebis (4-methyl-6-t-butylphenol), N-nitrosophenylhydroxyamine primary cerium salt and the like.
- the content of the polymerization inhibitor is preferably 0.01 to 5% by mass with respect to the mass of the coloring composition.
- the coloring composition of the present invention may contain only one type of polymerization inhibitor, or may contain two or more types. When two or more types are included, the total amount is preferably within the above range.
- surfactant Various surfactants may be added to the colored composition of the present invention from the viewpoint of further improving coatability.
- various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, and a silicone-based surfactant can be used.
- the liquid properties (particularly fluidity) when prepared as a coating liquid are further improved. That is, in the case of forming a film using a coloring composition containing a fluorosurfactant, the wettability to the coated surface is improved by reducing the interfacial tension between the coated surface and the coating liquid, The coating property to the coated surface is improved. For this reason, even when a thin film of about several ⁇ m is formed with a small amount of liquid, it is effective in that it is possible to more suitably form a film having a uniform thickness with small thickness unevenness.
- the fluorine content in the fluorosurfactant is preferably 3 to 40% by mass, more preferably 5 to 30% by mass, and particularly preferably 7 to 25% by mass.
- a fluorine-based surfactant having a fluorine content within this range is effective in terms of uniformity of coating film thickness and liquid-saving properties, and has good solubility in a colored composition.
- fluorosurfactant examples include Megafac F171, F172, F173, F176, F176, F177, F141, F142, F143, F144, R30, F437, F475, F479, F482, F554, F780, F780, F781 (above DIC Corporation), Florard FC430, FC431, FC171 (above, Sumitomo 3M Limited), Surflon S-382, SC-101, Same SC-103, Same SC-104, Same SC-105, Same SC1068, Same SC-381, Same SC-383, Same S393, Same KH-40 (manufactured by Asahi Glass Co., Ltd.), PF636, PF656, PF6320 PF6520, PF7002 (manufactured by OMNOVA), and the like.
- a block polymer can also be used as the fluorosurfactant, and specific examples thereof include compounds described in JP-A-2011-89090.
- the fluorine-based surfactant has a repeating unit derived from a (meth) acrylate compound having a fluorine atom and 2 or more (preferably 5 or more) alkyleneoxy groups (preferably ethyleneoxy group or propyleneoxy group) (meth).
- a fluorine-containing polymer compound containing a repeating unit derived from an acrylate compound can also be preferably used, and the following compounds are also exemplified as the fluorine-based surfactant used in the present invention.
- the weight average molecular weight of the above compound is preferably 3,000 to 50,000, for example, 14,000.
- nonionic surfactant examples include glycerol, trimethylolpropane, trimethylolethane, and ethoxylates and propoxylates thereof (for example, glycerol propoxylate, glycerol ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene Stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octylphenyl ether, polyoxyethylene nonylphenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62 manufactured by BASF, 10R5, 17R2, 25R2, Tetronic 304, 701, 704, 901, 904, 150R1) Solsperse 20000 (Lubrizol Japan Co., Ltd.), and the like.
- cationic surfactant examples include phthalocyanine derivatives (trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 (manufactured by Kyoeisha Chemical Co., Ltd.), W001 (manufactured by Yusho Co., Ltd.) and the like.
- phthalocyanine derivatives trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.
- organosiloxane polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
- (meth) acrylic acid ( Co) polymer polyflow no. 75, no. 90, no. 95 manufactured by Kyoeisha Chemical Co., Ltd.
- W001 manufactured by Yusho Co., Ltd.
- anionic surfactants include W004, W005, W017 (manufactured by Yusho Co., Ltd.) and the like.
- silicone surfactant examples include “Toray Silicone DC3PA”, “Toray Silicone SH7PA”, “Tore Silicone DC11PA”, “Tore Silicone SH21PA”, “Tore Silicone SH28PA”, “Toray Silicone” manufactured by Toray Dow Corning Co., Ltd.
- the content of the surfactant is preferably 0.001 to 2.0% by mass, more preferably 0.001%, based on the total mass of the coloring composition. 005 to 1.0% by mass.
- the coloring composition of the present invention may contain only one type of surfactant or two or more types of surfactant. When two or more types are included, the total amount is preferably within the above range.
- the colored composition of the present invention may contain a silane coupling agent for the purpose of improving substrate adhesion.
- a silane coupling agent is a compound having a hydrolyzable group and other functional groups in the molecule.
- a hydrolyzable group such as an alkoxy group is bonded to a silicon atom.
- the hydrolyzable group refers to a substituent that is directly bonded to a silicon atom and can form a siloxane bond by a hydrolysis reaction and / or a condensation reaction.
- Examples of the hydrolyzable group include a halogen atom, an alkoxy group, an acyloxy group, and an alkenyloxy group.
- the number of carbon atoms is preferably 6 or less, and more preferably 4 or less.
- an alkoxy group having 4 or less carbon atoms or an alkenyloxy group having 4 or less carbon atoms is preferable.
- the silane coupling agent preferably does not contain a fluorine atom and a silicon atom (except for a silicon atom to which a hydrolyzable group is bonded). However, it does not include an alkylene group substituted with a silicon atom, a linear alkyl group having 8 or more carbon atoms, or a branched alkyl group having 3 or more carbon atoms. desirable.
- the silane coupling agent is a compound different from the polymerizable compound and the curable compound described above. That is, a compound having a hydrolyzable group and other functional group in the molecule is a silane coupling agent.
- the silane coupling agent preferably has a group represented by the following formula (Z). * Represents a bonding position.
- R z1 represents an alkyl group
- R z2 represents a hydrolyzable group
- m represents an integer of 1 to 3.
- the alkyl group represented by R z1 preferably has 1 to 5 carbon atoms, and more preferably 1 to 3 carbon atoms.
- the definition of the hydrolyzable group represented by R z2 is as described above.
- the silane coupling agent preferably has a curable functional group.
- the curable functional group includes (meth) acryloyloxy group, epoxy group, oxetanyl group, isocyanate group, hydroxyl group, amino group, carboxyl group, thiol group, alkoxysilyl group, methylol group, vinyl group, (meth) acrylamide.
- the curable functional group may be directly bonded to the silicon atom, or may be bonded to the silicon atom via a linking group.
- the molecular weight of the silane coupling agent is not particularly limited, and is preferably from 100 to 1,000 from the viewpoint of handleability, preferably from 270 or more, and more preferably from 270 to 1000, from the viewpoint of more excellent effects of the present invention.
- silane coupling agent is a silane coupling agent X represented by the formula (W).
- R z1 represents an alkyl group
- R z2 represents a hydrolyzable group
- R z3 represents a curable functional group
- Lz represents a single bond or a divalent linking group
- m is an integer of 1 to 3.
- the definition of the alkyl group represented by R z1 is as described above.
- the definition of the hydrolyzable group represented by R z2 is as described above.
- the definition of the curable functional group represented by R z3 is as described above, and the preferred range is also as described above.
- Lz represents a single bond or a divalent linking group.
- the divalent linking group include an alkylene group, an arylene group, —NR 12 —, —CONR 12 —, —CO—, —CO 2 —, —SO 2 NR 12 —, —O—, —S—, —SO. 2- or a combination thereof.
- the alkylene group preferably has 1 to 20 carbon atoms.
- the alkylene group may be linear or branched.
- the alkylene group and the arylene group may be unsubstituted or may have a substituent. Examples of the substituent include a halogen atom and a hydroxyl group.
- Lz is at least one selected from the group consisting of an alkylene group having 2 to 10 carbon atoms and an arylene group having 6 to 12 carbon atoms, or these groups and —NR 12 —, —CONR 12 —, —CO—. , —CO 2 —, —SO 2 NR 12 —, —O—, —S—, and a group consisting of a combination with at least one group selected from the group consisting of —SO 2 — are preferred.
- a group consisting of ⁇ 10 alkylene groups, —CO 2 —, —O—, —CO—, —CONR 12 —, or a combination of these groups is more preferred.
- R 12 represents a hydrogen atom or a methyl group.
- m represents 1 to 3, preferably 2 to 3, and more preferably 3.
- N- ⁇ -aminoethyl- ⁇ -aminopropyl-methyldimethoxysilane (trade name KBM-602 manufactured by Shin-Etsu Chemical Co., Ltd.), N- ⁇ -aminoethyl- ⁇ -aminopropyl-trimethoxy Silane (trade name KBM-603 manufactured by Shin-Etsu Chemical Co., Ltd.), N- ⁇ -aminoethyl- ⁇ -aminopropyl-triethoxysilane (trade name KBE-602 manufactured by Shin-Etsu Chemical Co., Ltd.), ⁇ -aminopropyl-trimethoxysilane (Trade name KBM-903 manufactured by Shin-Etsu Chemical Co., Ltd.), ⁇ -aminopropyl-triethoxysilane (trade name KBE-903 manufactured by Shin-Etsu Chemical Co., Ltd.), 3-methacryloxypropyltrimethoxysilane (trade name KBM-602 manufactured by Shin
- a preferred embodiment of the silane coupling agent includes a silane coupling agent Y having at least a silicon atom, a nitrogen atom, and a curable functional group in the molecule, and having a hydrolyzable group bonded to the silicon atom.
- the silane coupling agent Y only needs to have at least one silicon atom in the molecule, and the silicon atom can be bonded to the following atoms and substituents. They may be the same atom, substituent or different.
- Atoms and substituents that can be bonded are a hydrogen atom, a halogen atom, a hydroxyl group, an alkyl group having 1 to 20 carbon atoms, an alkenyl group, an alkynyl group, an aryl group, an alkyl group and / or an aryl group, a silyl group Group, an alkoxy group having 1 to 20 carbon atoms, an aryloxy group, and the like.
- substituents further include amino groups, halogen atoms, sulfonamide groups, which can be substituted with silyl groups, alkenyl groups, alkynyl groups, aryl groups, alkoxy groups, aryloxy groups, thioalkoxy groups, alkyl groups and / or aryl groups, It may be substituted with an alkoxycarbonyl group, an amide group, a urea group, an ammonium group, an alkylammonium group, a carboxyl group, a salt thereof, a sulfo group, or a salt thereof.
- at least one hydrolyzable group is bonded to the silicon atom.
- the definition of the hydrolyzable group is as described above.
- the silane coupling agent Y may contain a group represented by the formula (Z).
- the silane coupling agent Y has at least one nitrogen atom in the molecule, and the nitrogen atom is preferably present in the form of a secondary amino group or a tertiary amino group, that is, the nitrogen atom is used as a substituent. It preferably has at least one organic group.
- the amino group structure may exist in the molecule in the form of a partial structure of a nitrogen-containing heterocycle, or may exist as a substituted amino group such as aniline.
- examples of the organic group include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, or a combination thereof.
- substituents may further have a substituent
- substituents that can be introduced include a silyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, a thioalkoxy group, an amino group, a halogen atom, and a sulfonamide.
- the nitrogen atom is couple
- Preferred examples of the organic linking group include the above-described nitrogen atom and a substituent that can be introduced into the organic group bonded thereto.
- the definition of the curable functional group contained in the silane coupling agent Y is as described above, and the preferred range is also as described above.
- the silane coupling agent Y only needs to have at least one curable functional group in one molecule, but it is also possible to adopt an embodiment having two or more curable functional groups, sensitivity, stability. From this viewpoint, it is preferable to have 2 to 20 curable functional groups, more preferably 4 to 15, and most preferably 6 to 10 curable functional groups in the molecule.
- Examples of the silane coupling agent Y include compounds represented by the following formula (Y).
- R y1 represents an alkyl group
- R y2 represents a hydrolyzable group
- R y3 represents a curable functional group
- LN represents a (n + 1) -valent linking group having a nitrogen atom
- m represents an integer of 1 to 3
- n represents an integer of 1 or more.
- R y1 , R y2 , R y3 and m in the formula (Y) are synonymous with R z1 , R z2 , R z3 and m in the formula (W), and preferred ranges are also the same.
- N in the formula (Y) represents an integer of 1 or more.
- the upper limit is preferably 20 or less, more preferably 15 or less, and still more preferably 10 or less.
- the lower limit is preferably 2 or more, more preferably 4 or more, and still more preferably 6 or more.
- n can be 1.
- LN in the formula (Y) represents a group having a nitrogen atom.
- the group having a nitrogen atom is at least one selected from the following formulas (LN-1) to (LN-4), or the following formulas (LN-1) to (LN-4), and —CO—, —CO 2 -, - O -, - S- and -SO 2 - groups, which consist of a combination of at least one selected from the like.
- the alkylene group may be linear or branched.
- the alkylene group and the arylene group may be unsubstituted or may have a substituent. Examples of the substituent include a halogen atom and a hydroxyl group.
- * represents a connecting hand.
- silane coupling agent Y examples include the following compounds.
- Et represents an ethyl group.
- compounds described in JP-A-2009-288703, paragraphs 0018 to 0036 are mentioned, and the contents thereof are incorporated in the present specification.
- the molecular weights of the silane coupling agent X and the silane coupling agent Y are not particularly limited, but include the above-described ranges (preferably 270 or more).
- the content of the silane coupling agent is preferably from 0.1 to 10% by mass, more preferably from 0.5 to 8% by mass, and more preferably from 1.0 to 6%, based on the total solid content in the colored composition of the present invention. More preferred is mass%.
- a silane coupling agent may be used individually by 1 type, and may use 2 or more types together. When using 2 or more types together, it is preferable that a total amount is the said range.
- additives for example, fillers, adhesion promoters, antioxidants, ultraviolet absorbers, anti-aggregation agents, and the like can be blended with the colored composition of the present invention as necessary.
- these additives include those described in JP-A No. 2004-295116, paragraphs 0155 to 0156, the contents of which are incorporated herein.
- the coloring composition of the present invention may contain a sensitizer and a light stabilizer described in paragraph 0078 of JP-A No. 2004-295116 and a thermal polymerization inhibitor described in paragraph 0081 of the same publication.
- the colored composition may contain a metal element, but from the viewpoint of suppressing the occurrence of defects, the content of Group 2 elements (calcium, magnesium, etc.) in the colored composition is 50 ppm or less. It is preferable to control to 0.01 to 10 ppm.
- the total amount of the inorganic metal salt in the coloring composition is preferably 100 ppm or less, and more preferably controlled to 0.5 to 50 ppm.
- the total amount of monochlorobenzene and methyl tert-butyl ether is preferably 2 ppm or less, more preferably 1 ppm or less, based on the total mass of the colored composition. More preferably, it is substantially free of monochlorobenzene and methyl tert-butyl ether. By setting it as such a structure, it can be set as the coloring composition excellent in safety
- a preferred embodiment (first embodiment) of the colored composition of the present invention comprises an oxime ester photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, an alkali-soluble resin, and coloring.
- a composition comprising an agent,
- the ratio A / B between the minimum absorbance A in the wavelength range of 400 nm to less than 580 nm and the minimum absorbance B in the wavelength range of 580 nm to 750 nm of the colored composition containing the organic pigment is 0.3 to 3
- the ratio C / D between the minimum absorbance C in the wavelength range of 400 nm to 750 nm and the maximum absorbance D in the wavelength range of 1000 nm to 1300 nm is 5 or more.
- the absorbance A ⁇ at a certain wavelength ⁇ is defined by the following equation (1).
- a ⁇ ⁇ log (T ⁇ ) (1)
- a ⁇ is the absorbance at wavelength ⁇
- T ⁇ is the transmittance at wavelength ⁇ .
- the absorbance value may be a value measured in the state of a solution, or may be a value in a film formed using a colored composition.
- a colored composition is applied onto a glass substrate by a method such as spin coating so that the film thickness after drying becomes a predetermined film thickness, and then a hot plate at 100 ° C. for 120 seconds. It is preferable to use a membrane prepared by drying with The film thickness of the film can be measured by using a stylus type surface shape measuring instrument (DEKTAK150 manufactured by ULVAC) for the substrate having the film.
- DEKTAK150 stylus type surface shape measuring instrument manufactured by ULVAC
- the absorbance can be measured using a conventionally known spectrophotometer.
- Absorbance measurement conditions are not particularly limited, but in a condition where the minimum absorbance A in the wavelength range of 400 nm to less than 580 nm is adjusted to 0.1 to 3.0, in the wavelength range of 580 nm to 750 nm. It is preferable to measure the minimum absorbance B, the minimum absorbance C in the wavelength range from 400 nm to 750 nm, and the maximum absorbance D in the wavelength range from 1000 nm to 1300 nm. By measuring the absorbance under such conditions, the measurement error can be further reduced.
- the method for adjusting the minimum absorbance A in the wavelength range of 400 nm or more and less than 580 nm to be 0.1 to 3.0 there is no particular limitation on the method for adjusting the minimum absorbance A in the wavelength range of 400 nm or more and less than 580 nm to be 0.1 to 3.0.
- a method of adjusting the optical path length of the sample cell can be mentioned.
- the method etc. which adjust a film thickness are mentioned.
- a method for measuring the spectral characteristics, film thickness, etc. of the film formed from the colored composition of the present invention is shown below.
- the colored composition of the present invention is applied onto a glass substrate by a method such as spin coating so that the film thickness after drying becomes the above-mentioned predetermined film thickness, and dried on a hot plate at 100 ° C. for 120 seconds.
- the film thickness of the film is measured using a stylus type surface shape measuring instrument (DEKTAK150 manufactured by ULVAC) for the dried substrate having the film.
- the transmittance of the dried substrate having this film is measured in the wavelength range of 300 to 1300 nm using a spectrophotometer of an ultraviolet-visible near-infrared spectrophotometer (U-4100 manufactured by Hitachi High-Technologies Corporation).
- the mass ratio of the red pigment to the total pigment is 0.2 or more and 0.5 or less.
- the mass ratio of yellow pigment to all pigments is 0.1 or more and 0.2 or less
- the mass ratio of blue pigment to all pigments is 0.25 or more and 0.55 or less
- the purple pigment to all pigments is preferably 0.05 or more and 0.15 or less
- the mass ratio of red pigment to all pigments is 0.3 or more and 0.4 or less
- the mass ratio of yellow pigment to all pigments is 0.1.
- the mass ratio of blue pigment to all pigments is 0.3 or more and 0.4 or less, and the mass ratio of purple pigment to all pigments is 0.05 or more and 0.15 or less. Is more preferable.
- the maximum transmittance in the wavelength range of 400 to 700 nm is 20% or less, and in the wavelength range of 900 to 1300 nm.
- a film having a spectral characteristic with a minimum value of 80% or more can be suitably formed.
- At least one first colorant having an absorption maximum in the wavelength range of 800 to 900 nm and a second colorant having an absorption maximum in the wavelength range of 400 to 700 nm At least one first colorant having an absorption maximum in the wavelength range of 800 to 900 nm and a second colorant having an absorption maximum in the wavelength range of 400 to 700 nm.
- the first colorant the above-described pyrrolopyrrole compound is preferable.
- the second colorant preferably contains two or more pigments selected from a red pigment, a yellow pigment, a blue pigment, and a purple pigment, and includes a red pigment, a yellow pigment, a blue pigment, and a purple pigment. It is more preferable to contain. Preferred examples include C.I. as a red pigment. I. Pigment Red 254 and C.I. I. Pigment Yellow 139 and C.I. I. Pigment Blue 15: 6 and C.I. I. Pigment Violet 23 is preferably contained. When the second colorant is a combination of a red pigment, a yellow pigment, a blue pigment, and a violet pigment, the mass ratio of the red pigment to the total amount of the second colorant is 0.1 to 0.4.
- the mass ratio of the yellow pigment to the total amount of the second colorant is 0.1 to 0.4, and the mass ratio of the blue pigment to the total amount of the second colorant is 0.20 to 0.60,
- the mass ratio of the violet pigment to the total amount of the second colorant is preferably 0.01 to 0.30.
- the mass ratio of the red pigment to the total amount of the second colorant is 0.1 to 0.3, and the mass ratio of the yellow pigment to the total amount of the second colorant is 0.1 to 0.3. More preferably, the mass ratio of the violet pigment to the total amount of the second colorant is 0.3 to 0.5, and the mass ratio of the violet pigment to the total amount of the second colorant is 0.05 to 0.25.
- the first colorant is preferably contained in an amount of 10 to 200 parts by mass with respect to 100 parts by mass of the second colorant.
- the content of the first colorant is preferably 0 to 60% by mass, more preferably 10 to 40% by mass, based on the total solid content of the colored composition.
- the content of the second colorant is preferably 10 to 60% by mass, more preferably 30 to 50% by mass, based on the total solid content of the colored composition.
- the total amount of the first colorant and the second colorant is preferably 1 to 80% by mass, more preferably 20 to 70% by mass, based on the total solid content of the color composition, More preferably, it is 30 to 70% by mass.
- a preferred embodiment (second embodiment) of the colored composition of the present invention includes an oxime ester photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, an alkali-soluble resin, and coloring. And a curable compound having a fluorine atom and a curable functional group.
- a colored composition By using such a colored composition, a cured film having excellent adhesion to the support and low reflectance can be formed.
- a black pigment is preferably 20 to 80% by mass, more preferably 30 to 70% by mass, and further preferably 35 to 60% by mass with respect to the total solid content in the coloring composition. .
- a preferred embodiment (third embodiment) of the colored composition of the present invention comprises an oxime ester photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, an alkali-soluble resin, and coloring.
- a preferred embodiment (fourth embodiment) of the colored composition of the present invention is an oxime ester photopolymerization initiator containing a fluorine atom, a polymerizable compound having an ethylenically unsaturated double bond, an alkali-soluble resin, and coloring.
- the composition further comprises an oxime photopolymerization initiator (other oxime photopolymerization initiator) other than the fluorine-containing oxime ester photopolymerization initiator.
- the coloring composition of the present invention can be prepared by mixing the aforementioned components.
- the components constituting the colored composition may be blended together, or may be blended sequentially after each component is dissolved and dispersed in a solvent.
- the composition may be prepared by dissolving and dispersing all the components in a solvent at the same time. If necessary, each component may be appropriately used as two or more solutions / dispersions at the time of use (at the time of application). These may be mixed to prepare a composition.
- the colored composition of the present invention is preferably filtered with a filter for the purpose of removing foreign substances or reducing defects.
- any filter can be used without particular limitation as long as it has been conventionally used for filtration.
- fluorine resins such as polytetrafluoroethylene (PTFE), polyamide resins such as nylon-6 and nylon-6,6, polyolefin resins such as polyethylene and polypropylene (PP) (including high density and ultra high molecular weight), etc.
- PTFE polytetrafluoroethylene
- polyamide resins such as nylon-6 and nylon-6,6, polyolefin resins such as polyethylene and polypropylene (PP) (including high density and ultra high molecular weight)
- PP polypropylene
- the pore size of the filter is suitably about 0.01 to 7.0 ⁇ m, preferably about 0.01 to 3.0 ⁇ m, more preferably about 0.05 to 0.5 ⁇ m. By setting it as this range, it becomes possible to remove reliably the fine foreign material which inhibits preparation of the uniform and smooth coloring composition in a post process.
- the filtering by the first filter may be performed only once or may be performed twice or more.
- the pore diameter here can refer to the nominal value of the filter manufacturer.
- a commercially available filter for example, selected from various filters provided by Nippon Pole Co., Ltd. (DFA4201NXEY, etc.), Advantech Toyo Co., Ltd., Japan Integris Co., Ltd. (formerly Nihon Microlith Co., Ltd.) can do.
- the second filter a filter formed of the same material as the first filter described above can be used.
- the filtering by the first filter may be performed only with the dispersion, and the second filtering may be performed after mixing other components.
- the cured film of the present invention is formed using the colored composition of the present invention.
- the cured film of the present invention can be preferably used as a color filter or a light shielding film.
- the color filter can be suitably used for a solid-state imaging device such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor), and is particularly suitable for a high-resolution CCD or CMOS that exceeds 1 million pixels. It is.
- the color filter can be used by being disposed, for example, between a light receiving portion of each pixel constituting a CCD or CMOS and a microlens for collecting light.
- the color filter can be preferably used for an organic electroluminescence (organic EL) element.
- organic EL element a white organic EL element is preferable.
- the organic EL element preferably has a tandem structure.
- JP 2003-45676 A supervised by Akiyoshi Mikami, “Frontier of Organic EL Technology Development-High Brightness, High Precision, Long Life, Know-how Collection”, Technical Information Association, 326-328 pages, 2008, etc.
- Examples of the tandem structure of the organic EL element include a structure in which an organic EL layer is provided between a lower electrode having light reflectivity and an upper electrode having light transmittance on one surface of a substrate.
- the lower electrode is preferably made of a material having a sufficient reflectance in the visible light wavelength region.
- the organic EL layer preferably includes a plurality of light emitting layers and has a stacked structure (tandem structure) in which the plurality of light emitting layers are stacked.
- the organic EL layer may include a red light emitting layer, a green light emitting layer, and a blue light emitting layer in the plurality of light emitting layers. And it is preferable that they have a some light emission auxiliary layer for light-emitting a light emitting layer together with a some light emitting layer.
- the organic EL layer can have, for example, a stacked structure in which light emitting layers and light emitting auxiliary layers are alternately stacked.
- an organic EL element having an organic EL layer having such a structure can emit white light.
- the spectrum of white light emitted from the organic EL element preferably has a strong maximum emission peak in the blue region (430 nm to 485 nm), the green region (530 nm to 580 nm), and the yellow region (580 nm to 620 nm).
- those having a maximum emission peak in the red region (650 nm to 700 nm) are more preferable.
- the film thickness of the colored pattern (colored pixel) in the color filter is preferably 2.0 ⁇ m or less, more preferably 1.0 ⁇ m or less, and even more preferably 0.7 ⁇ m or less.
- the lower limit can be, for example, 0.1 ⁇ m or more, and can also be 0.2 ⁇ m or more.
- the size (pattern width) of the colored pattern (colored pixel) is preferably 2.5 ⁇ m or less, more preferably 2.0 ⁇ m or less, and particularly preferably 1.7 ⁇ m or less.
- the lower limit can be, for example, 0.1 ⁇ m or more, and can also be 0.2 ⁇ m or more.
- the light shielding film is formed and used on various members in an image display device or a sensor module (for example, an infrared light cut filter, an outer peripheral portion of a solid-state imaging device, an outer peripheral portion of a wafer level lens, a rear surface of a solid-state imaging device, etc.). it can. Moreover, it is good also as an infrared light cut filter with a light shielding film by forming a light shielding film in at least one part on the surface of an infrared light cut filter.
- the thickness of the light shielding film is not particularly limited, but is preferably 0.2 to 25 ⁇ m, and more preferably 1.0 to 10 ⁇ m.
- the above thickness is an average thickness, and is a value obtained by measuring the thicknesses of any five or more points of the light shielding film and arithmetically averaging them.
- the reflectance of the light shielding film is preferably 10% or less, more preferably 8% or less, further preferably 6% or less, and particularly preferably 4% or less.
- the reflectance of the light shielding film is a value obtained by making the light of 400 to 700 nm incident on the light shielding film at an incident angle of 5 ° and measuring the reflectance with a spectrometer UV4100 (trade name) manufactured by Hitachi High Technology.
- the pattern forming method of the present invention includes a step of forming a colored composition layer on a support using the colored composition of the present invention, a step of exposing the colored composition in a pattern, and an unexposed state of the colored composition. It can be manufactured through a process of developing and removing the exposed portion to form a colored pattern. Furthermore, you may provide the process (prebaking process) of baking a coloring composition layer, and the process (post-baking process) of baking the formed colored pattern as needed. Details of each step will be described below.
- Step of Forming Colored Composition Layer In the step of forming the colored composition layer, the colored composition layer is formed on the support using the colored composition of the present invention.
- the support examples include transparent substrates such as glass, silicon, polycarbonate, polyester, aromatic polyamide, polyamideimide, and polyimide.
- a thin film transistor for driving the organic EL element may be formed on these transparent substrates.
- a solid-state imaging device substrate in which a solid-state imaging device (light receiving device) such as a CCD (charge coupled device) or a CMOS (complementary metal oxide semiconductor) is provided on the substrate can be used.
- various methods such as slit coating, ink jet method, spin coating, cast coating, roll coating, screen printing method and the like can be used.
- the colored composition layer formed on the support is preferably heated (pre-baked).
- the heating is preferably performed at 120 ° C. or less, more preferably 50 to 120 ° C., further preferably 80 to 110 ° C., and particularly preferably 90 to 105 ° C.
- the heating time is preferably 10 seconds to 300 seconds, more preferably 40 to 250 seconds, and further preferably 80 to 220 seconds. Heating can be performed with a hot plate, oven, or the like.
- the colored composition layer formed on the support is exposed in a pattern (exposure process).
- pattern exposure can be performed by exposing the colored composition layer formed on the support using a mask having a predetermined mask pattern using an exposure apparatus such as a stepper. Thereby, an exposed part can be hardened.
- radiation (light) that can be used for exposure ultraviolet rays such as g-line and i-line are preferable (particularly preferably i-line).
- Irradiation dose (exposure dose) for example, preferably 30 ⁇ 1500mJ / cm 2, more preferably 50 ⁇ 1000mJ / cm 2, and most preferably 50 ⁇ 500mJ / cm 2.
- the above range is preferable from the viewpoint of achieving both low energy production and stable manufacturability.
- the oxygen concentration at the time of exposure can be appropriately selected.
- the exposure may be performed in a low oxygen atmosphere (for example, 15% by volume, 5% by volume, substantially oxygen-free) having an oxygen concentration of 19% by volume or less.
- the exposure may be performed in a high oxygen atmosphere (for example, 22% by volume, 30% by volume, 50% by volume) in which the oxygen concentration exceeds 21% by volume.
- the illuminance of the exposure energy can be set as appropriate, and is usually selected from the range of 1000 W / m 2 to 100,000 W / m 2 (eg, 5000 W / m 2 , 15000 W / m 2 , 35000 W / m 2 ). Can do.
- Oxygen concentration and exposure illuminance may appropriately combined conditions, for example, illuminance 10000 W / m 2 at an oxygen concentration of 10 vol%, oxygen concentration 25% by volume can be, eg illuminance 25000W / m 2.
- the thickness of the cured film is preferably 1.0 ⁇ m or less, more preferably 0.1 to 0.9 ⁇ m, and further preferably 0.2 to 0.8 ⁇ m. By setting the film thickness to 1.0 ⁇ m or less, high resolution and high adhesion can be easily obtained.
- the unexposed portion is developed and removed to form a colored pattern.
- the development removal of the unexposed portion can be performed using a developer.
- the coloring composition layer of the unexposed part in an exposure process elutes in a developing solution, and only the photocured part remains.
- the developer an organic alkali developer that does not damage the underlying solid-state imaging device or circuit is desirable.
- the temperature of the developer is preferably 20 to 30 ° C., for example.
- the development time is preferably 20 to 180 seconds.
- alkaline agent used in the developer examples include ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide.
- organic alkaline compounds such as choline, pyrrole, piperidine, 1,8-diazabicyclo- [5,4,0] -7-undecene.
- the inorganic alkali for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogen carbonate, sodium oxalate, sodium metasuccinate and the like are preferable.
- a surfactant may be used for the developer. Examples of the surfactant include the surfactant described in the above-described coloring composition, and a nonionic surfactant is preferable.
- clean (rinse) with a pure water after image development.
- Post-baking is a heat treatment after development for accelerating curing, and the heating temperature is preferably 100 to 240 ° C., for example.
- an organic electroluminescence (organic EL) element is used as the light source of the image display device, or when the photoelectric conversion film of the image sensor is made of an organic material, it is 50 to 120 ° C. (more preferably 80 to 100 ° C.). More preferably, the heat treatment (post-bake) is preferably performed at 80 to 90 ° C.
- the post-baking treatment can be carried out continuously or batchwise using a heating means such as a hot plate, a convection oven (hot air circulation dryer) or a high-frequency heater so that the film after development is in the above condition. it can.
- the exposure step in the exposure step, light having a wavelength of more than 350 nm and not more than 380 nm (preferably, exposure is performed with light having a wavelength of 355 to 370 nm, particularly preferably i-line, and the colored composition layer after the development step is further irradiated with light having a wavelength of 254 to 350 nm (preferably light having a wavelength of 254 nm). It is also preferable to perform exposure.
- the difference between the wavelength of light used in the exposure before the development step and the wavelength of light used in the exposure after the development step is preferably 200 nm or less, and more preferably 100 to 150 nm or less. .
- the irradiation amount (exposure amount) of light having a wavelength of more than 350 nm and not more than 380 nm and the oxygen concentration at the time of exposure can be performed under the conditions described in the exposure step described above.
- the reaction rate of the polymerizable compound in the exposure before the development step is preferably 30 to 60%. By setting such a reaction rate, the polymerizable compound can be appropriately cured.
- the reaction rate of the compound having a polymerizable compound refers to the ratio of reacted unsaturated double bonds in all unsaturated double bonds of the polymerizable compound.
- the irradiation amount of light of wavelength 254 ⁇ 300 nm is preferably 30mJ / cm 2 ⁇ 4000mJ / cm 2, 50mJ / cm 2 ⁇ 3500mJ / cm 2 is more preferable.
- the reaction rate of the polymerizable compound in the exposure after the development step is preferably 60 to 90%. By setting it as such a reaction rate, the hardening state of the coloring composition layer after exposure can be made more favorable.
- post-baking may be performed after exposure after the development step.
- an organic EL element is used as a light source of an image display device, or a photoelectric conversion film of an image sensor is organic.
- the solid-state imaging device of the present invention includes the above-described cured film (color filter, light shielding film, etc.) of the present invention.
- the configuration of the solid-state imaging device of the present invention is not particularly limited as long as it includes the cured film of the present invention and functions as a solid-state imaging device, and examples thereof include the following configurations.
- the support On the support, it has “a plurality of photodiodes” and “a transfer electrode made of polysilicon, etc.” that constitute a light receiving area of a solid-state image sensor (CCD image sensor, CMOS image sensor, etc.). On these photodiodes and transfer electrodes, there is a light-shielding film that is open only at the light receiving portion of the photodiode.
- a device protection film made of silicon nitride or the like is formed on the light shielding film so as to cover the entire surface of the light shielding film and the photodiode light receiving portion.
- a color filter is provided on the device protective film. Furthermore, it may have a condensing means (for example, a microlens, etc., the same shall apply hereinafter) on the device protective film and under the color filter (on the side close to the support). You may have.
- the cured film (color filter, light-shielding film, etc.) of the present invention can be used for image display devices such as liquid crystal display devices and organic electroluminescence display devices.
- display devices For the definition of display devices and details of each display device, refer to, for example, “Electronic Display Device (Akio Sasaki, Kogyo Kenkyukai, 1990)”, “Display Device (Junsho Ibuki, Industrial Books Co., Ltd.) Issued in the first year).
- the liquid crystal display device is described, for example, in “Next-generation liquid crystal display technology (edited by Tatsuo Uchida, Industrial Research Co., Ltd., published in 1994)”.
- the liquid crystal display device to which the present invention can be applied is not particularly limited, and can be applied to, for example, various types of liquid crystal display devices described in the “next generation liquid crystal display technology”.
- the color filter in the present invention may be used for a color TFT (Thin Film Transistor) type liquid crystal display device.
- the color TFT liquid crystal display device is described in, for example, “Color TFT liquid crystal display (issued in 1996 by Kyoritsu Publishing Co., Ltd.)”.
- the present invention relates to a liquid crystal display device with a wide viewing angle, such as a horizontal electric field driving method such as IPS (In Plane Switching), a pixel division method such as MVA (Multi-domain Vertical Alignment), a STN (Super-Twist Nematic).
- the color filter in the present invention can be used for a bright and high-definition COA (Color-filter On Array) system.
- COA Color-filter On Array
- the required characteristics for the color filter require the required characteristics for the interlayer insulating film, that is, the low dielectric constant and the resistance to the peeling liquid, in addition to the normal required characteristics as described above. Sometimes. Since the color filter of the present invention is excellent in light resistance and the like, a COA type liquid crystal display device having high resolution and excellent long-term durability can be provided.
- a resin film may be provided on the color filter layer.
- the image display device of the present invention includes various members such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, and a viewing angle guarantee film.
- the color filter of the present invention can be applied to a liquid crystal display device composed of these known members.
- these components for example, “'94 Liquid Crystal Display Peripheral Materials / Chemicals Market (Kentaro Shima CMC 1994)”, “2003 Liquid Crystal Related Markets Current Status and Future Prospects (Volume 2)” Fuji Chimera Research Institute, Ltd., published in 2003) ”.
- backlighting SID meeting Digest 1380 (2005) (A. Konno et.al), Monthly Display December 2005, pages 18-24 (Yasuhiro Shima), pages 25-30 (Takaaki Yagi), etc. Are listed.
- the infrared sensor of the present invention includes the cured film of the present invention.
- the configuration of the infrared sensor of the present invention is not particularly limited as long as it is a configuration provided with the cured film of the present invention and functions as a solid-state imaging device, and examples thereof include the following configurations.
- a plurality of photodiodes and “a transfer electrode made of polysilicon, etc.” that constitute a light receiving area of a solid-state imaging device (CCD sensor, CMOS sensor, organic CMOS sensor, etc.).
- a light-shielding film made of tungsten or the like that is opened only in the light-receiving part of the photodiodes.
- a device protective film made of silicon nitride or the like is formed on the light shielding film so as to cover the entire surface of the light shielding film and the photodiode light receiving portion.
- the cured film of the present invention is provided on the device protective film.
- a condensing means for example, a microlens etc. The same shall apply hereinafter
- a condensing means for example, a microlens etc. The same shall apply hereinafter
- the infrared sensor 100 includes a solid-state image sensor 110.
- the imaging region provided on the solid-state imaging device 110 includes a near-infrared absorption filter 111 and a color filter 112.
- the near-infrared absorption filter 111 transmits light in the visible light region (for example, light having a wavelength of 400 to 700 nm) and light in the infrared region (for example, light having a wavelength of 800 to 1300 nm, preferably light having a wavelength of 900 to 1200 nm, More preferably, it is configured to shield light having a wavelength of 900 to 1000 nm.
- the color filter 112 is a color filter in which pixels that transmit and absorb light of a specific wavelength in the visible light region are formed.
- a color filter in which red, green, and blue pixels are formed is used.
- the color filter can be formed using the cured film of the present invention.
- a region 114 where the near-infrared absorption filter 111 is not formed is provided.
- a resin layer for example, a transparent resin layer
- a resin layer that can transmit light having a wavelength that has passed through the infrared transmission filter 113 is disposed.
- the near-infrared transmission filter 113 is a filter that has visible light shielding properties and transmits infrared rays having a specific wavelength.
- the near-infrared transmission filter 113 is composed of the cured film of the present invention having the above-described spectrum.
- a microlens 115 is disposed on the incident light hv side of the color filter 112 and the near-infrared transmission filter 113.
- a planarization layer 116 is formed so as to cover the microlens 115.
- the resin layer is disposed in the region 114, but the infrared transmission filter 113 may be formed in the region 114. That is, the infrared transmission filter 113 may be formed on the solid-state image sensor 110.
- the film thickness of the color filter 112 and the film thickness of the infrared transmission filter 113 are the same, but the film thickness of both may be different.
- the color filter 112 is provided on the incident light h ⁇ side from the near-infrared absorption filter 111, but the order of the near-infrared absorption filter 111 and the color filter 112 is changed,
- the near-infrared absorption filter 111 may be provided on the incident light h ⁇ side with respect to the color filter 112.
- the near-infrared absorption filter 111 and the color filter 112 are stacked adjacent to each other. However, both filters are not necessarily adjacent to each other, and another layer is provided between them. May be. According to this infrared sensor, since image information can be captured simultaneously, motion sensing or the like that recognizes a target whose motion is to be detected is possible. Furthermore, since distance information can be acquired, an image including three-dimensional information can be taken.
- Example 1 A mixed solution having the following composition was mixed for 2 hours using a zirconia bead having a diameter of 0.3 mm in a bead mill (high pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.)). Pigment dispersions 1 to 4 were prepared.
- Basic resin 1 (Product name Diperbyk162, manufactured by Big Chemie, amine value 13 mgKOH / g)
- Acidic resin 1 (Product name Diperbyk111, manufactured by Big Chemie, acid value 129 mgKOH / g)
- -Amphoteric resin 1 The following structure (The numerical value written together with each repeating unit represents content [mass ratio] of each repeating unit.
- the numerical value written together with the repeating part of a side chain shows the repeating number of a repeating part.
- (Acid value 32.3 mgKOH / g, amine value 45.0 mgKOH / g, Mw 9000)
- -Amphoteric resin 2 The following structure (The numerical value written together with each repeating unit represents content [mass ratio] of each repeating unit.
- the numerical value written together with the repeating part of a side chain shows the repeating number of a repeating part.
- Acid value 44.3 mgKOH / g, amine value 40.0 mgKOH / g, Mw 10400)
- Organic solvent 2 Cyclohexanone
- the obtained colored composition was applied to a 200 mm (8 inch) silicon wafer (substrate) previously sprayed with hexamethyldisilazane to form a coating film. Then, heat treatment (pre-baking) was performed for 150 seconds using a hot plate at 90 ° C. so that the dry film thickness of the coating film became 2.0 ⁇ m. Next, using an i-line stepper exposure apparatus FPA-3000i5 + (manufactured by Canon Inc.), exposure was performed through an Island pattern mask having a pattern of 3.0 ⁇ m square at a wavelength of 365 nm.
- the exposure conditions were various exposure doses of 50 to 1200 mJ / cm 2 , illuminance of 10000 W, and atmospheric conditions (oxygen concentration 21 volume%). Thereafter, the silicon wafer on which the exposed coating film is formed is placed on a horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics), and CD-2000 (Fuji Film Electronics). Paddle development was performed at 23 ° C. for 60 seconds using Materials Co., Ltd. In this way, a colored pattern (3.0 ⁇ m square pixel pattern) was formed on the silicon wafer with the undercoat layer.
- DW-30 type manufactured by Chemitronics
- CD-2000 Fluji Film Electronics
- the silicon wafer on which the colored pattern is formed is fixed to a horizontal rotary table by a vacuum chuck method, and pure water is sprayed from the nozzle above the rotation center while rotating the silicon wafer at a rotation speed of 50 rpm by a rotating device. And rinsed. Thereafter, the silicon wafer was spray-dried.
- the obtained silicon wafer was irradiated with ultraviolet light having an exposure amount of 10 J using a UV curing device UMA-802-HC552FFAL (USHIO INC.). As a result, a color filter (silicon wafer with a colored pattern) was obtained.
- the Examples were able to form a cured film having low adhesion sensitivity and excellent adhesion with low sensitivity. Furthermore, the examples were excellent in sensitivity, rectangularity, and stability over time. On the other hand, the comparative example had higher adhesion sensitivity than the examples, and it was difficult to form a cured film with good adhesion.
- Polymerizable compound 1 the following structure (a mixture in which the molar ratio of the left compound to the right compound is 7: 3)
- Polymerizable compound 3 the following structure
- Polymerizable compound 4 Carboxylic acid-containing polyfunctional acrylate (Aronix M-520) manufactured by Toagosei Co., Ltd.
- Polymerizable compound 5 the following structure Compound having epoxy group (epoxy compound): EHPE3150, manufactured by Daicel Co., Ltd.
- Organic solvent 2 cyclohexanone Good results can be obtained by using the pigment dispersion B-1 or B-2 of Test Example 3 below instead of the pigment dispersions 1, 2, 3, and 4 of Example 1-1. was gotten.
- Titanium Black A-1 120 g of titanium oxide having a BET specific surface area of 110 m 2 / g (“TTO-51N”, trade name: manufactured by Ishihara Sangyo) and 25 g of silica particles having a BET surface area of 300 m 2 / g (“AEROSIL (registered trademark) 300”, manufactured by Evonik) And 100 g of a dispersant (“Disperbyk 190” (trade name: manufactured by BYK Chemie) and 71 g of ion-exchange water and weighed at a revolution speed of 1360 rpm and a rotation speed of 1047 rpm using a KURABO MAZERSTAR KK-400W.
- TTO-51N trade name: manufactured by Ishihara Sangyo
- AEROSIL (registered trademark) 300 manufactured by Evonik
- the mixture solution was filled in a quartz container, heated to 920 ° C. in an oxygen atmosphere using a small rotary kiln (manufactured by Motoyama Co., Ltd.), and then treated with nitrogen. The atmosphere was replaced, and ammonia gas at 100 mL / min at the same temperature for 5 o'clock After completion, the recovered powder was pulverized in a mortar, and thus titanium powder (A-1) having a specific surface area of 85 m 2 / g and containing Si atoms was obtained. To be dispersed containing titanium black particles and Si atoms].
- TB Dispersion 1 Preparation of Titanium Black Dispersion (TB Dispersion 1)
- the component shown in the following composition 1 was mixed for 15 minutes using a stirrer (EUROSTAR manufactured by IKA) to obtain dispersion a.
- the obtained dispersion a was subjected to a dispersion treatment using the Ultra Apex Mill UAM015 manufactured by Kotobuki Industries Co., Ltd. under the following dispersion conditions.
- this was filtered using a nylon filter (manufactured by Nippon Pole Co., Ltd., DFA4201NXEY) having a pore diameter of 0.45 ⁇ m.
- TB dispersion 1 a titanium black dispersion (hereinafter referred to as TB dispersion 1) was obtained.
- composition 1 -Titanium black (A-1) obtained as described above-25 parts by mass-30 mass% solution of propylene glycol monomethyl ether acetate (PGMEA) in resin 1-25 parts by mass-PGMEA-50 Mass part / resin 1: The following structure. The synthesis was performed with reference to the description in JP2013-249417A. In the formula of resin 1, x was 43% by mass, y was 49% by mass, and z was 8% by mass. Moreover, the weight average molecular weight of the resin 1 was 30000, the acid value was 60 mgKOH / g, and the number of graft chain atoms (excluding hydrogen atoms) was 117.
- the raw materials shown in Table 2 below were mixed at the ratio shown in the following composition, and then filtered using a nylon filter having a pore diameter of 0.45 ⁇ m (manufactured by Nippon Pole Co., Ltd., DFA4201NXEY) to prepare a colored composition. did.
- the following Megafax RS-72-K contained an alkylene group having a fluorine atom and an acryloyloxy group. More specifically, MegaFac RS-72-K includes a repeating unit represented by the formula (B1-1) and a repeating unit represented by the formula (B3-1) as follows, The average molecular weight was 7400. Note that in formula (B3-1), X represents a perfluoromethylene group or a perfluoroethylene group, and r represents the number of repeating units.
- composition TB dispersion 1 63.9 parts by mass Alkali-soluble resin (specific resin 2 or 3 below) 10.24 parts by mass Photoinitiator 1.81 parts by mass Polymerizable compound ... 6.29 parts by mass ⁇
- Surfactant ⁇ 0.02 parts by mass ⁇
- Solvent cyclohexanone
- Curable compound (Megafac RS-72-K (DIC Corporation) Manufactured, solid content 30%, solvent: PGMEA)): 10.65 parts by mass Silane coupling agent (KBM-4803 (manufactured by Shin-Etsu Chemical Co., Ltd.)): 0.36 parts by mass
- the colored composition prepared above was applied to a 200 mm (8 inch) glass substrate EagleXG (manufactured by Corning) by spin coating, and then heat-treated (prebaked) for 120 seconds using an 80 ° C. hot plate.
- FPA-3000i5 + manufactured by Canon Inc.
- exposure was performed at an exposure dose of 200 mJ / cm 2 through a mask having a linear shape of 300 ⁇ m (width 300 ⁇ m, length 4 mm).
- AD-1200 Moikasa Co., Ltd.
- NCW-101 nonionic surfactant
- TMAH tetramethylammonium hydroxide
- the state of the light-shielding film after tape peeling was compared with the state of the light-shielding film before tape pulling, and evaluation was performed according to the following evaluation criteria. “2” or more is an allowable range.
- Linear 300 ⁇ m line width 3 ⁇ is less than 1 ⁇ m
- 2 Linear 300 ⁇ m line width 3 ⁇ is 1 ⁇ m or more and less than 5 ⁇ m
- 1 Linear 300 ⁇ m line width 3 ⁇ is 5 ⁇ m or more (adhesion evaluation) )
- the obtained colored composition was applied onto a glass wafer using a spin coater so that the film thickness after drying was 2.0 ⁇ m, and was heat-treated (prebaked) for 120 seconds using a 100 ° C. hot plate. .
- the exposure dose is 50 to 750 mJ / cm 2 to 50 mJ /
- the exposure was carried out by increasing by 2 cm 2 .
- the glass wafer on which the square pixel pattern was resolved was observed with an optical microscope and evaluated according to the following evaluation criteria.
- the examples were excellent in adhesion. Moreover, it was a cured film with a low reflectance. Furthermore, the evaluation of linearity and chipping was also good. On the other hand, the comparative example was inferior in adhesiveness.
- pigment dispersion B-2 A mixed solution having the following composition was mixed and dispersed for 3 hours using a zirconia bead having a diameter of 0.3 mm in a bead mill (high pressure disperser NANO-3000-10 with a pressure reducing mechanism (manufactured by Nippon BEE Co., Ltd.)). Thus, a pigment dispersion B-2 was prepared.
- Resin 1 (dispersant) (BYK-111 manufactured by BYK) ⁇ 2.0 parts by mass ⁇ Resin 2 (dispersant) ... 3. 3 parts by mass, cyclohexanone ... 31.2 parts by mass, propylene glycol methyl ether acetate ... 50 parts by mass
- Resin 2 is also an alkali-soluble resin.
- the obtained colored composition was applied on a glass substrate by spin coating so that the film thickness after post-baking was 1.0 ⁇ m. Next, the substrate was dried on a hot plate at 100 ° C. for 120 seconds, and then heat-treated (post-baked) for 300 seconds using a 200 ° C. hot plate. In this way, a colored layer was formed on the glass substrate.
- the absorbance of the glass substrate on which the colored layer was formed was measured using an ultraviolet-visible near-infrared spectrophotometer U-4100 (manufactured by Hitachi High-Tech).
- a minimum absorbance A in a wavelength range of 400 nm to 580 nm a minimum absorbance B in a wavelength range of 580 nm to 750 nm, a minimum absorbance C in a wavelength range of 400 nm to 750 nm, The absorbance maximum value D in the wavelength range of 1000 nm to 1300 nm was measured.
- the obtained colored composition was applied onto a silicon wafer using a spin coater so that the film thickness after drying was 2.0 ⁇ m, and was heat-treated (prebaked) for 120 seconds using a 100 ° C. hot plate. . In this way, a coating film was formed on the silicon wafer.
- an i-line stepper exposure apparatus FPA-3000i5 + manufactured by Canon Inc.
- exposure was performed at an optimum exposure amount using a photomask on which a 3.0 ⁇ m square pixel pattern was formed.
- the exposure amount was increased by 50 mJ / cm 2 up to 50 ⁇ 750mJ / cm 2 to expose the coated film was determined based on the exposure amount necessary for resolving the square pixel pattern.
- the silicon wafer on which the exposed coating film is formed is placed on a horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics), and CD-2060 (Fuji Film).
- Paddle development was performed at 23 ° C. for 60 seconds using Electronics Materials Co., Ltd. In this way, a colored pattern was formed on the silicon wafer.
- the silicon wafer on which the colored pattern was formed was rinsed with pure water and then spin-dried.
- heat treatment post-baking
- the obtained colored composition was applied onto a silicon wafer using a spin coater so that the film thickness after drying was 2.0 ⁇ m, and was heat-treated (prebaked) for 120 seconds using a 100 ° C. hot plate. .
- an i-line stepper exposure apparatus FPA-3000i5 + manufactured by Canon Inc.
- the exposure dose is 50 to 750 mJ / cm 2.
- the exposure was carried out by increasing by 50 mJ / cm 2 .
- the optimum exposure dose (mJ) for resolving the square pixel pattern was determined and used as the sensitivity.
- the Examples had a low adhesion sensitivity and could form a cured film having excellent adhesion with a small exposure amount.
- the sensitivity and rectangularity were also evaluated well.
- the color filter of the example was capable of transmitting infrared rays (particularly near infrared rays) with little noise derived from visible light components.
- the comparative example had higher adhesion sensitivity than the examples, and it was difficult to form a cured film with good adhesion.
- the alkali-soluble resins 1 and 2 polymerizable compounds 1, 3 to 5, photopolymerization initiators A1 to A3, 2, 3, 4, the silane coupling agent and the surfactant are the colored composition of Test Example 1.
- the same material was used.
- As the organic solvent 1, propylene glycol methyl ether acetate (PGMEA) was used.
- PGMEA propylene glycol methyl ether acetate
- the value of the compounding amount of the surfactant in the table is the value of the 1% by mass PGMEA solution.
- Green pigment-containing coloring composition (coating solution)
- each raw material was mixed and stirred so as to have the composition ratio (parts by mass) shown in Table 4 below to prepare a Green coloring composition.
- this coating film was heat-processed (prebaked) for 120 second using a 100 degreeC hotplate so that a dry film thickness might be set to 0.5 micrometer.
- an i-line stepper exposure apparatus FPA-3000i5 + manufactured by Canon Inc.
- exposure was performed through a Bayer pattern mask having a pattern of 1.1 ⁇ m square at a wavelength of 365 nm.
- the silicon wafer on which the exposed coating film is formed is placed on a horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics), and CD-2060 (Fuji Film). Paddle development was performed at 23 ° C. for 60 seconds using Electronics Materials Co., Ltd.
- a green colored pattern (1.1 ⁇ m ⁇ pattern) of 1.1 ⁇ m ⁇ 1.1 ⁇ m was formed on the silicon wafer.
- the silicon wafer on which the colored pattern is formed is fixed to a horizontal rotary table by a vacuum chuck method, and the silicon wafer is rotated at a rotational speed of 50 rpm by a rotating device, and pure water is sprayed from the jet nozzle from above the rotation center. Feeding and rinsing were followed by spin drying. Subsequently, it heat-processed for 300 second (post-baking) using the hotplate of 230 degreeC. In this way, a silicon wafer having colored pixels was obtained.
- ⁇ Sensitivity evaluation> A silicon wafer having colored pixels was observed with a magnification of 20000 times using an electron microscope for line width measurement S9260A (manufactured by Hitachi High-Technologies Corporation), and the dimensions of the pattern were measured. Sensitivity was evaluated according to the following evaluation criteria.
- B The difference between the pattern dimension and the mask dimension at an exposure amount of 100 mJ / cm 2 is more than ⁇ 0.040 ⁇ m and less than or equal to ⁇ 0.020 ⁇ m or less than or equal to 0.020 ⁇ m and less than 0.040 ⁇ m.
- C The difference between the pattern dimension and the mask dimension at an exposure amount of 100 mJ / cm 2 is more than ⁇ 0.060 ⁇ m and less than or equal to ⁇ 0.040 ⁇ m or less than or equal to 0.040 ⁇ m and less than 0.060 ⁇ m.
- D The difference between the pattern dimension and the mask dimension at an exposure amount of 100 mJ / cm 2 is more than ⁇ 0.100 ⁇ m and less than or equal to ⁇ 0.060 ⁇ m, or 0.060 ⁇ m or more and less than 0.100 ⁇ m.
- E The difference between the pattern dimension and the mask dimension at an exposure amount of 100 mJ / cm 2 is ⁇ 0.100 ⁇ m or less, or 0.100 ⁇ m or more.
- ⁇ Adhesion evaluation> A silicon wafer having colored pixels was observed at 50 times bright field using an optical microscope. The number of peeled 1.1 ⁇ m square patterns was measured and judged according to the following criteria. A: 1.1 ⁇ m ⁇ pattern peeling number is 0 B: 1.1 ⁇ m ⁇ pattern peeling number is 1 to 5 C: 1.1 ⁇ m ⁇ pattern peeling number is 6 to 10 D: 1.1 ⁇ m ⁇ pattern The number of peeling was 10 or more. E: All 1.1 ⁇ m square patterns were peeled off.
- the spectral transmittance (Spectrum 1) of this glass wafer was measured using MCPD-3000 (manufactured by Otsuka Electronics Co., Ltd.).
- MCPD-3000 manufactured by Otsuka Electronics Co., Ltd.
- FPA-3000i5 + manufactured by Canon Inc.
- the glass wafer on which the exposed coating film is formed is placed on a horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics), and CD-2060 (FUJIFILM Corporation). Paddle development was performed at 23 ° C. for 60 seconds using Electronics Materials Co., Ltd. In this way, a green colored pattern of about 2.0 cm ⁇ 2.0 cm was formed on the glass wafer.
- the glass wafer on which the colored pattern is formed is fixed to a horizontal rotary table by a vacuum chuck method, and the glass wafer is rotated at a rotation speed of 50 rpm by a rotating device, and pure water is ejected from the upper part of the rotation center from a jet nozzle. And rinsed, and then spin-dried.
- the spectral transmittance (spectrum 2) of the pattern after development was measured using MCPD-3000 in the same manner as for spectrum 1.
- Color loss was evaluated according to the following evaluation criteria.
- Examples 4-1 and 4-2 including a fluorine-based oxime ester photopolymerization initiator and an oxime-based photopolymerization initiator other than the fluorine-based oxime ester-based photopolymerization initiator had excellent sensitivity. . Further, development color loss was suppressed. On the other hand, the comparative example was inferior in adhesiveness compared with the Example.
- Green pigment dispersion Green pigment dispersion prepared by the above method.
- Photopolymerization initiators A1, 2, 2B Compounds having the following structure
- Polymerization inhibitor p-methoxyphenol ⁇
- Epoxy compound EHPE3150, manufactured by Daicel Corporation ⁇
- Surfactant 1 Pionine D-6315 (manufactured by Takemoto Yushi Co., Ltd., nonionic surfactant)
- CT-4000L manufactured by FUJIFILM Electronics Materials
- 8-inch (200 mm) silicon wafer (substrate) so that the film thickness after post-baking was 0.1 ⁇ m.
- CT-4000L Spin coating ⁇ No pre-bake ⁇ Post-bake (hot plate) 220 °C ⁇ 300 seconds
- the post-baking film thickness of the colored composition prepared in Example 1-4 is 0.5 ⁇ m on the transparent organic film layer of the silicon wafer on which the transparent organic film layer is formed. It apply
- an i-line (wavelength 365 nm) stepper exposure apparatus FPA-5510iZ manufactured by Canon Inc.
- exposure was performed under the following pattern exposure conditions through an Island pattern mask having a pattern of 3.0 ⁇ m square.
- the exposed silicon wafer on which the colored layer is formed is placed on a horizontal rotary table of a spin shower developing machine (DW-30 type, manufactured by Chemitronics), and CD-2060 (FUJIFILM Electronics). Paddle development was performed at 23 ° C. for 60 seconds using Materials Co., Ltd. In this way, a colored pattern was formed on the silicon wafer.
- the silicon wafer on which the colored pattern is formed is fixed to a horizontal rotary table by a vacuum chuck method, and pure water is sprayed from the jet nozzle from above the rotation center while rotating the silicon wafer at a rotation speed of 200 rpm by a rotating device. And rinsed for 30 seconds, and then spin-dried.
- the color filter was manufactured using a clean track ACT8 manufactured by Tokyo Electron.
- this apparatus is set so that the oxygen concentration in the apparatus chamber can be controlled.
- a measuring instrument capable of monitoring the oxygen concentration was set in the chamber with a line for introducing oxygen gas and dilution gas. The oxygen concentration in the room during exposure was constantly confirmed using this measuring instrument.
- the film thickness of the colored layer is an average value of 5 points in an 8 inch (200 mm) plane using an optical film thickness meter (Firmmetrics F50 (manufactured by Filmetrics)).
- the line width measurement after patterning was performed by observing with an electron microscope for line width measurement S9260A (manufactured by Hitachi High-Technologies Corporation). The average value of the five pixel measurement dimensions was used as the line width setting value.
- Sensitivity evaluation> The silicon wafer on which the Bayer pattern was formed was observed with a magnification of 20000 times using an electron microscope for line width measurement S9260A (manufactured by Hitachi High-Technologies Corporation), and the dimensions of the pattern were measured. Sensitivity was evaluated according to the following evaluation criteria.
- Infrared sensor 110 Solid-state image sensor 111: Near-infrared absorption filter 112: Color filter 113: Near-infrared transmission filter 114: Area
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Abstract
Description
固体撮像素子や画像表示装置は、可視光の反射によってノイズが発生する場合がある。そこで、固体撮像素子や画像表示装置に遮光膜を設けて、ノイズの発生の抑制を図ることも行われている。
光重合開始剤として、フッ素原子を含むオキシムエステル系光重合開始剤が知られている(特許文献1~3参照)。
なお、特許文献1~3には、フッ素原子を含むオキシムエステル系光重合開始剤が開示されているが、特許文献1~3には、フッ素原子を含むオキシムエステル系光重合開始剤を含有する着色感光性組成物を用いて、波長365nmの光に対する透過率が低い膜を密着性よく形成することについての開示や示唆はない。
<1> フッ素原子を含むオキシムエステル系光重合開始剤と、エチレン性不飽和二重結合を有する重合性化合物と、アルカリ可溶性樹脂と、着色剤とを含む着色感光性組成物であって、着色感光性組成物を用いて、乾燥後の膜厚が2.0μmの膜を製膜した際に、膜の波長365nmにおける光学濃度が1.5以上である着色感光性組成物。
<2> フッ素原子を含むオキシムエステル系光重合開始剤は、フッ素原子を有するアルキル基を有する、<1>に記載の着色感光性組成物。
<3> フッ素原子を含むオキシムエステル系光重合開始剤は、下式(1a)で表される化合物を含む、<1>または<2>に記載の着色感光性組成物;
一般式(1a)中、A1およびA2は、それぞれ独立に、アルキル基、アシル基、アリール基またはヘテロ環基を表し、A3は、アルキル基、アリール基またはヘテロ環基を表す;ただし、A1~A3の少なくとも1つは、フッ素原子を含む。
<4> フッ素原子を含むオキシムエステル系光重合開始剤が、下式(1)で表される化合物を含む、<1>または<2>に記載の着色感光性組成物;
式(1)において、Ar1およびAr2は、それぞれ独立に、置換基を有していてもよい芳香族炭化水素環を表し、
R1は、フッ素原子を含む基を有するアリール基を表し、
R2およびR3は、それぞれ独立に、アルキル基またはアリール基を表す。
<5> さらに、有機顔料を含み、かつ、着色感光性組成物の、波長400nm以上580nm未満の範囲における吸光度の最小値Aと、波長580nm以上750nm以下の範囲における吸光度の最小値Bとの比率A/Bが0.3~3であり、波長400nm以上750nm以下の範囲における吸光度の最小値Cと、波長1000nm以上1300nm以下の範囲における吸光度の最大値Dとの比率C/Dが5以上である、<1>~<4>のいずれかに記載の着色感光性組成物。
<6> さらに、フッ素原子および硬化性官能基を有する硬化性化合物を含む、<1>~<4>のいずれかに記載の着色感光性組成物。
<7> さらに、黒色顔料を含む、<6>に記載の着色感光性組成物。
<8> さらに、α-アミノケトン系光重合開始剤を含み、フッ素原子を含むオキシムエステル系光重合開始剤と、α-アミノケトン系光重合開始剤との質量比が、1:1.5~1:10である、<1>~<7>のいずれかに記載の着色感光性組成物。
<9> さらに、フッ素原子を含むオキシムエステル系光重合開始剤以外の、オキシム系光重合開始剤を含む、<1>~<8>のいずれかに記載の着色感光性組成物。
<10> 着色感光性組成物は、モノクロロベンゼンと、メチルtert-ブチルエーテルとの合計質量が、着色感光性組成物の全質量に対して2ppm以下である、<1>~<9>のいずれかに記載の着色感光性組成物。
<11> i線露光用である、<1>~<10>のいずれかに記載の着色感光性組成物。<12> <1>~<11>のいずれかに記載の着色感光性組成物を用いた硬化膜。
<13> 硬化膜が、カラーフィルタまたは遮光膜である、<12>に記載の硬化膜。
<14>
<1>~<11>のいずれかに記載の着色感光性組成物を用いて支持体上に着色組成物層を形成する工程と、着色成物層をパターン状に露光する工程と、未露光部を現像除去して着色パターンを形成する工程を含むパターン形成方法。
<15> 露光をi線で行う、<14>に記載のパターン形成方法。
<16> 赤外光カットフィルタと、赤外光カットフィルタの表面上の少なくとも一部に配置された、<7>に記載の着色感光性組成物より形成された硬化膜からなる遮光膜と、を有する、遮光膜付き赤外光カットフィルタ。
<17> <12>に記載の硬化膜を有する固体撮像素子。
<18> <12>に記載の硬化膜を有する画像表示装置。
<19> <12>に記載の硬化膜を有する赤外線センサ。
本明細書における基(原子団)の表記において、置換および無置換を記していない表記は、置換基を有さないものと共に置換基を有するものをも包含するものである。例えば、「アルキル基」とは、置換基を有さないアルキル基(無置換アルキル基)のみならず、置換基を有するアルキル基(置換アルキル基)をも包含するものである。
本明細書において光とは、活性光線または放射線を意味する。また、「活性光線」または「放射線」とは、例えば、水銀灯の輝線スペクトル、エキシマレーザーに代表される遠紫外線、極紫外線(EUV光)、X線、電子線等を意味する。
本明細書において「露光」とは、特に断らない限り、水銀灯の輝線スペクトル、エキシマレーザーに代表される遠紫外線、X線、EUV光などによる露光のみならず、電子線、イオンビーム等の粒子線による描画も露光に含める。
本明細書において「~」を用いて表される数値範囲は、「~」の前後に記載される数値を下限値および上限値として含む範囲を意味する。
本明細書において、全固形分とは、組成物の全組成から溶剤を除いた成分の総質量をいう。
本明細書において、「(メタ)アクリレート」は、アクリレートおよびメタクリレートの双方、または、いずれかを表し、「(メタ)アクリル」は、アクリルおよびメタクリルの双方、または、いずれかを表し、「(メタ)アリル」は、アリルおよびメタリルの双方、または、いずれかを表し、「(メタ)アクリロイル」は、アクリロイルおよびメタクリロイルの双方、または、いずれかを表す。
本明細書において「工程」との語は、独立した工程だけではなく、他の工程と明確に区別できない場合であってもその工程の所期の作用が達成されれば、本用語に含まれる。
本明細書において、重量平均分子量および数平均分子量は、ゲルパーミエーションクロマトグラフ(GPC)測定によるポリスチレン換算値として定義される。
本発明の着色感光性組成物(以下、着色組成物ともいう)は、フッ素原子を含むオキシムエステル系光重合開始剤と、エチレン性不飽和二重結合を有する重合性化合物と、アルカリ可溶性樹脂と、着色剤とを含み、この着色組成物を用いて、乾燥後の膜厚が2.0μmの膜を製膜した際に、膜の波長365nmにおける光学濃度が1.5以上となる着色組成物である。
本発明の着色組成物を用いることで、波長365nmの光に対する透過率が低い膜を、支持体などに対して密着性よく形成できる。上記効果が得られるメカニズムは不明であるが、着色組成物に、フッ素原子を含むオキシムエステル系光重合開始剤を含有させたことによるものであると推測している。
本発明の着色組成物において、着色組成物を用いて、乾燥後の膜厚が2.0μmの膜を製膜した際における、膜の波長365nmにおける光学濃度は、1.5以上が好ましく、1.8以上がより好ましく、2.1以上が更に好ましい。上限は、特に限定はないが、5.0以下とすることができる。波長365nmにおける光学濃度が高いほど、従来は、支持体に対する密着性の良い膜を形成することが困難であったが、本発明の着色組成物によれば、波長365nmにおける光学濃度が高い膜を、支持体に対して密着性よく形成できる。このため、上記光学濃度が高いほど、本発明の効果が顕著である。また、本発明の着色組成物は、i線露光用の着色組成物として特に好適である。
なお、光学濃度(OD)は吸収度合を対数で表示した値であって、下式で定義される値である。
OD(λ)=Log10[T(λ)/I(λ)]
λは波長を表し、T(λ)は波長λにおける透過光量を表し、I(λ)は波長λにおける入射光量を表す。
乾燥後の膜厚が2.0μmの膜を製膜した際における、膜の波長365nmにおける光学濃度を1.5以上とするには、例えば、波長365nmの光を吸収する着色剤を含有させたり、全固形分中の着色剤の含有量を適宜調整することなどにより達成できる。
なお、本発明において、膜の光学濃度は、波長365nmの光を入射し、その透過率を日立ハイテクノロジー製分光器UV4100(商品名)により測定した値である。
例えば、本発明の着色組成物が、有機顔料を含み、かつ、着色組成物の、波長400nm以上580nm未満の範囲における吸光度の最小値Aと、波長580nm以上750nm以下の範囲における吸光度の最小値Bとの比率A/Bが0.3~3であり、波長400nm以上750nm以下の範囲における吸光度の最小値Cと、波長1000nm以上1300nm以下の範囲における吸光度の最大値Dとの比率C/Dが5以上である場合は、可視光(好ましくは400~700nmの光)を遮光し、赤外線(例えば、850nm以上の光)を透過するカラーフィルタ(赤外線透過フィルタ)等の硬化膜を形成することができる。この硬化膜は、支持体との密着性が良好で、更には、感度および矩形性に優れている。
反射率の低い硬化膜を形成できるメカニズムとしては、次によるものと推測される。フッ素原子および硬化性官能基を有する硬化性化合物(以下、含フッ素硬化性化合物ともいう)は表面自由エネルギーが低いため、例えば、基板などの支持体上に着色組成物に塗布して形成される塗膜においては、支持体とは反対側の塗膜表面近傍に含フッ素硬化性化合物が濃縮して存在しやすい。結果として、図1に示すように、塗膜を硬化して得られる基板201上の硬化膜200は、着色剤を含む着色層(下側層)202と、含フッ素硬化性化合物から形成される被覆層(上側層)203との2層構造を有する。このような2層構造が形成されると、被覆層表面で反射される光と、被覆層と着色層との界面で反射される光とが干渉により打ち消されて、低反射性が実現されると考えられる。
また、含フッ素硬化性化合物由来の硬化性官能基の存在により、パターン状の硬化膜を作製の際に、アンダーカットが抑制され、硬化膜の欠けが抑制されると共に、パターンの直線性にも優れる。
また、含フッ素硬化性化合物を含む態様において、更に、黒色顔料を含む場合においては、遮光性に優れると共に、反射率の低い硬化膜を形成できるので、得られた硬化膜は特に遮光膜として好適である。
以下、本発明の各構成について詳細に説明する。
本発明の着色組成物は、フッ素原子を含むオキシムエステル系光重合開始剤(以下、含フッ素オキシムエステル系光重合開始剤ともいう)を含有する。
含フッ素オキシムエステル系光重合開始剤は、365nmにおけるモル吸光係数は、感度の観点から、1,000~300,000であることが好ましく、2,000~300,000であることがより好ましく、5,000~200,000であることが特に好ましい。
化合物のモル吸光係数は、公知の方法を用いることができるが、例えば、紫外可視分光光度計(Varian社製Cary-5 spectrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。
含フッ素基としては、-ORX11、-SRX11、-CORX11、-COORX11、-OCORX11、-NRX11RX12、-NHCORX11、-CONRX11RX12、-NHCONRX11RX12、-NHCOORX11、-SO2RX11、-SO2ORX11および-NHSO2RX11から選ばれる少なくとも1種の基が好ましい。RX11は、含フッ素アルキル基を表し、RX12は、水素原子、アルキル基、含フッ素アルキル基、アリール基またはヘテロ環基を表す。含フッ素基は、-ORX11がより好ましい。
フッ素原子を含む基は、含フッ素アルキル基、および/または、-ORX11が好ましい。
フッ素原子を含む基は、下式(1)または(2)で表される末端構造を有することが好ましい。式中の*は、連結手を表す。
*-CHF2 (1)
*-CF3 (2)
含フッ素アルキル基は、フッ素原子の置換率が、40~100%であることが好ましく、50~100%であることがより好ましく、60~100%であることがさらに好ましい。なお、フッ素原子の置換率とは、アルキル基が有する全水素原子の数のうち、フッ素原子に置換されている数の比率(%)をいう。
一般式(1a)中、A1およびA2は、それぞれ独立に、アルキル基、アシル基、アリール基またはヘテロ環基を表し、A3は、アルキル基、アリール基またはヘテロ環基を表す;ただし、A1~A3の少なくとも1つは、フッ素原子を含む。
アルキル基の炭素数は、1~20が好ましく、1~15がより好ましく、1~10が更に好ましく、1~4が特に好ましい。アルキル基は、直鎖、分岐、環状のいずれでもよいが、直鎖または分岐が好ましい。
アシル基の炭素数は、2~20が好ましく、2~15がより好ましい。アシル基としては、アセチル基、ベンゾイル基などが挙げられる。
アリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。
ヘテロ環基は、5員環または6員環が好ましい。ヘテロ環基は、単環であってもよく、縮合環であってもよい。縮合数は、2~8が好ましく、2~6がより好ましく、3~5が更に好ましく、3~4が特に好ましい。ヘテロ環基を構成する炭素原子の数は3~40が好ましく、3~30がより好ましく、3~20がより好ましい。ヘテロ環基を構成するヘテロ原子の数は1~3が好ましい。ヘテロ環基を構成するヘテロ原子は、窒素原子、酸素原子または硫黄原子が好ましく、窒素原子がより好ましい。
ハロゲン原子は、フッ素原子、塩素原子、臭素原子、ヨウ素原子などが挙げられ、フッ素原子が好ましい。
置換基としてのアルキル基、ならびに、RX1およびRX2が表すアルキル基の炭素数は、1~20が好ましい。アルキル基は、直鎖、分岐、環状のいずれでもよいが、直鎖または分岐が好ましい。アルキル基は、水素原子の一部または全部がハロゲン原子(好ましくは、フッ素原子)で置換されていてもよい。また、アルキル基は、水素原子の一部または全部が、上記置換基で置換されていてもよい。
置換基としてのアリール基、ならびに、RX1およびRX2が表すアリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。また、アリール基は、水素原子の一部または全部が、上記置換基で置換されていてもよい。
置換基としてのヘテロ環基、ならびに、RX1およびRX2が表すヘテロ環基は、5員環または6員環が好ましい。ヘテロ環基は、単環であってもよく、縮合環であってもよい。ヘテロ環基を構成する炭素原子の数は3~30が好ましく、3~18がより好ましく、3~12がより好ましい。ヘテロ環基を構成するヘテロ原子の数は1~3が好ましい。ヘテロ環基を構成するヘテロ原子は、窒素原子、酸素原子または硫黄原子が好ましい。また、ヘテロ基は、水素原子の一部または全部が、上記置換基で置換されていてもよい。
置換基としては、A1で説明した置換基が挙げられ、アルキル基、-ORX1およびハロゲン原子が好ましい。RX1は、水素原子、アルキル基、アリール基またはヘテロ環基を表し、アルキル基が好ましい。置換基としてのアルキル基および、RX1が表すアルキル基は、水素原子の一部または全部がフッ素原子で置換されていることが好ましい。
式(1)において、Ar1およびAr2は、それぞれ独立に、置換基を有していてもよい芳香族炭化水素環を表し、R1は、フッ素原子を含む基を有するアリール基を表し、R2およびR3は、それぞれ独立に、アルキル基またはアリール基を表す。
芳香族炭化水素環は、単環でもよく、縮合環であってもよい。芳香族炭化水素環の環を構成する炭素原子数は、6~20が好ましく、6~15がより好ましく、6~10が特に好ましい。芳香族炭化水素環は、ベンゼン環およびナフタレン環が好ましい。なかでも、Ar1およびAr2の少なくとも一方がベンゼン環であることが好ましく、Ar1がベンゼン環であることがより好ましい。Ar1は、ベンゼン環またはナフタレン環が好ましく、ナフタレン環がより好ましい。
Ar1およびAr2が有してもよい置換基としては、A1で説明した置換基が挙げられる。
Ar1は、無置換が好ましい。Ar1は、無置換であってもよく、置換基を有していてもよい。置換基としては、-CORX1が好ましい。RX1は、アルキル基、アリール基またはヘテロ環基が好ましく、アリール基がより好ましい。アリール基は置換基を有していてもよく、無置換であってもよい。置換基としては、炭素数1~10のアルキル基などが挙げられる。
アリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。
フッ素原子を含む基は、フッ素原子を有するアルキル基(含フッ素アルキル基)、および/または、フッ素原子を有するアルキル基を含む基(含フッ素基)が好ましい。
含フッ素基は、-ORX11、-SRX11、-CORX11、-COORX11、-OCORX11、-NRX11RX12、-NHCORX11、-CONRX11RX12、-NHCONRX11RX12、-NHCOORX11、-SO2RX11、-SO2ORX11および-NHSO2RX11から選ばれる少なくとも1種の基が好ましく、-ORX11がより好ましい。RX11は、含フッ素アルキル基を表し、RX12は、水素原子、アルキル基、含フッ素アルキル基、アリール基またはヘテロ環基を表す。
フッ素原子を含む基は、含フッ素アルキル基、および/または、-ORX11が好ましい。
含フッ素アルキル基は、フッ素原子の置換率が、40~100%であることが好ましく、50~100%であることがより好ましく、60~100%であることがさらに好ましい。
アルキル基の炭素数は、1~20が好ましく、1~15がより好ましく、1~10が更に好ましく、1~4が特に好ましい。アルキル基は、直鎖、分岐、環状のいずれでもよいが、直鎖または分岐が好ましい。
アリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。
アルキル基の炭素数は、1~20が好ましく、1~15がより好ましく、1~10が更に好ましい。アルキル基は、直鎖、分岐、環状のいずれでもよいが、直鎖または分岐が好ましい。
アリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。
本発明の着色組成物は、α-アミノケトン系光重合開始剤をさらに含むことができる。α-アミノケトン系光重合開始剤を含むことで、矩形性の良いパターンを形成することができる。
R1DおよびR2Dが表すアルキル基は、直鎖、分岐、環状のいずれでもよく、直鎖または分岐が好ましい。
R1DおよびR2Dが表すアルキル基は、無置換であってもよく、置換基を有していてもよい。置換基としては、アリール基、ヘテロ環基、ニトロ基、シアノ基、ハロゲン原子、-ORY1、-SRY1、-CORY1、-COORY1、-OCORY1、-NRY1RY2、-NHCORY1、-CONRY1RY2、-NHCONRY1RY2、-NHCOORY1、-SO2RY1、-SO2ORY1、-NHSO2RY1などが挙げられる。RY1およびRY2は、それぞれ独立に、水素原子、アルキル基、アリール基またはヘテロ環基を表す。置換基はアリール基が好ましい。特に、R1DおよびR2Dのいずれか一方が無置換のアルキル基で、他方は、アリール基で置換されたアルキル基が好ましい。
ハロゲン原子は、フッ素原子、塩素原子、臭素原子、ヨウ素原子などが挙げられる。
RY1およびRY2が表すアルキル基の炭素数は、1~20が好ましい。アルキル基は、直鎖、分岐、環状のいずれでもよいが、直鎖または分岐が好ましい。
置換基としてのアリール基およびRY1およびRY2が表すアリール基の炭素数は、6~20が好ましく、6~15がより好ましく、6~10が更に好ましい。アリール基は、単環であってもよく、縮合環であってもよい。また、アリール基は、水素原子の一部または全部が、炭素数1~8のアルキル基で置換されていてもよい。
RY1およびRY2が表すヘテロ環基は、5員環または6員環が好ましい。ヘテロ環基は、単環であってもよく、縮合環であってもよい。ヘテロ環基を構成する炭素原子の数は3~30が好ましく、3~18がより好ましく、3~12がより好ましい。ヘテロ環基を構成するヘテロ原子の数は1~3が好ましい。ヘテロ環基を構成するヘテロ原子は、窒素原子、酸素原子または硫黄原子が好ましい。
α-アミノケトン系光重合開始剤の市販品としては、Irgacure907、Irgacure369、及び、Irgacure379(商品名:いずれもBASF社製)などが挙げられる。
また、含フッ素オキシムエステル系光重合開始剤と、α-アミノケトン系光重合開始剤との合計量は、全光重合開始剤の全質量に対して、50質量%以上が好ましく、75質量%以上がより好ましく、90質量%以上が特に好ましい。
本発明の着色組成物は、含フッ素オキシムエステル系光重合開始剤、および、α-アミノケトン系光重合開始剤以外の光重合開始剤(他の光重合開始剤)をさらに含有することもできる。
他の光重合開始剤としては、例えば、ハロゲン化炭化水素誘導体(例えば、トリアジン骨格を有するもの、オキサジアゾール骨格を有するもの、など)、アシルホスフィンオキサイド等のアシルホスフィン化合物、ヘキサアリールビイミダゾール、オキシム誘導体等のオキシム化合物、有機過酸化物、チオ化合物、ケトン化合物、芳香族オニウム塩、ケトオキシムエーテル、アミノアセトフェノン化合物、ヒドロキシアセトフェノンなどが挙げられる。トリアジン骨格を有するハロゲン化炭化水素化合物としては、例えば、若林ら著、Bull.Chem.Soc.Japan,42、2924(1969)記載の化合物、英国特許1388492号明細書記載の化合物、特開昭53-133428号公報記載の化合物、独国特許3337024号明細書記載の化合物、F.C.SchaeferなどによるJ.Org.Chem.;29、1527(1964)記載の化合物、特開昭62-58241号公報記載の化合物、特開平5-281728号公報記載の化合物、特開平5-34920号公報記載化合物、米国特許第4212976号明細書に記載されている化合物などが挙げられる。これらのうち、含フッ素オキシムエステル系光重合開始剤、および、α-アミノケトン系光重合開始剤以外の化合物を使用できる。
光重合開始剤の具体例としては、例えば、特開2013-29760号公報の段落0265~0268を参酌することができ、この内容は本願明細書に組み込まれる。
ヒドロキシアセトフェノン系開始剤としては、IRGACURE-184、DAROCUR-1173、IRGACURE-500、IRGACURE-2959,IRGACURE-127(商品名:いずれもBASF社製)を用いることができる。
アシルホスフィン系開始剤としては、市販品であるIRGACURE-819やDAROCUR-TPO(商品名:いずれもBASF社製)を用いることができる。
オキシム化合物の具体例としては、特開2001-233842号公報記載の化合物、特開2000-80068号公報記載の化合物、特開2006-342166号公報記載の化合物を用いることができる。
オキシム化合物の具体例としては、例えば、3-ベンゾイロキシイミノブタン-2-オン、3-アセトキシイミノブタン-2-オン、3-プロピオニルオキシイミノブタン-2-オン、2-アセトキシイミノペンタン-3-オン、2-アセトキシイミノ-1-フェニルプロパン-1-オン、2-ベンゾイロキシイミノ-1-フェニルプロパン-1-オン、3-(4-トルエンスルホニルオキシ)イミノブタン-2-オン、及び2-エトキシカルボニルオキシイミノ-1-フェニルプロパン-1-オンなどが挙げられる。
また、J.C.S.Perkin II(1979年)pp.1653-1660、J.C.S.Perkin II(1979年)pp.156-162、Journal of Photopolymer Science and Technology(1995年)pp.202-232、特開2000-66385号公報記載の化合物、特開2000-80068号公報、特表2004-534797号公報、特開2006-342166号公報の各公報に記載の化合物等も挙げられる。
市販品ではIRGACURE-OXE01(BASF社製)、IRGACURE-OXE02(BASF社製)も好適に用いられる。また、TR-PBG-304(常州強力電子新材料有限公司社製)、アデカアークルズNCI-831およびアデカアークルズNCI-930(ADEKA社製)も用いることができる。
好ましくは、例えば、特開2013-29760号公報の段落0274~0275を参酌することができ、この内容は本願明細書に組み込まれる。
具体的には、オキシム化合物としては、下記式(OX-1)で表される化合物が好ましい。なお、オキシムのN-O結合が(E)体のオキシム化合物であっても、(Z)体のオキシム化合物であっても、(E)体と(Z)体との混合物であってもよい。
一般式(OX-1)中、Rで表される一価の置換基としては、一価の非金属原子団であることが好ましい。
一価の非金属原子団としては、アルキル基、アリール基、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、複素環基、アルキルチオカルボニル基、アリールチオカルボニル基等が挙げられる。また、これらの基は、1以上の置換基を有していてもよい。また、前述した置換基は、さらに他の置換基で置換されていてもよい。
置換基としてはハロゲン原子、アリールオキシ基、アルコキシカルボニル基またはアリールオキシカルボニル基、アシルオキシ基、アシル基、アルキル基、アリール基等が挙げられる。
一般式(OX-1)中、Bで表される一価の置換基としては、アリール基、複素環基、アリールカルボニル基、又は、複素環カルボニル基が好ましい。これらの基は1以上の置換基を有していてもよい。置換基としては、前述した置換基が例示できる。
一般式(OX-1)中、Aで表される二価の有機基としては、炭素数1~12のアルキレン基、シクロアルキレン基、アルキニレン基が好ましい。これらの基は1以上の置換基を有していてもよい。置換基としては、前述した置換基が例示できる。
式(1)及び式(2)で表される化合物の具体例としては、例えば、特開2014-137466号公報の段落番号0076~0079に記載された化合物が挙げられる。この内容は本明細書に組み込まれることとする。
また、本発明の着色組成物は、含フッ素オキシムエステル系光重合開始剤以外のオキシム系光重合開始剤(以下、他のオキシム系光重合開始剤ともいう)を実質的に含まない構成とすることもできる。他のオキシム系光重合開始剤を実質的に含有しないとは、例えば、他のオキシム系光重合開始剤の含有量が、全光重合開始剤の質量に対して、1質量%以下が好ましく、0.1質量%以下がより好ましく、含有しないことが一層好ましい。なお、他のオキシム系光重合開始剤とは、フッ素原子を含まないオキシム化合物であって、上述した他の光重合開始剤で説明したオキシム化合物が挙げられる。
また、本発明の着色組成物は、含フッ素オキシムエステル系光重合開始剤と、他のオキシム系光重合開始剤とを併用する構成とすることもできる。この態様によれば、色抜けが抑制された硬化膜を製造しやすい。含フッ素オキシムエステル系光重合開始剤と、他のオキシム系光重合開始剤とを併用する場合、他のオキシム系光重合開始剤は、含フッ素オキシムエステル系光重合開始剤と、他のオキシム系光重合開始剤との合計100質量部に対し、30~300質量部が好ましく、50~250質量部がより好ましく、70~200質量部が更に好ましい。この範囲であれば、感度および密着性が良好で、更には、色抜けが抑制された硬化膜を製造しやすい。
本発明の着色組成物は、着色剤を含有する。着色剤は、顔料であってもよく、染料であってもよい。
着色剤の含有量は、着色組成物の全固形分に対し1~80質量%が好ましい。下限は、5質量%以上が好ましく、10質量%以上がより好ましく、20質量%以上が更に好ましい。上限は、75質量%以下が好ましく、70質量%以下がより好ましい。
顔料としては、従来公知の種々の無機顔料又は有機顔料を挙げることができる。
無機顔料としては、鉄、コバルト、アルミニウム、カドミウム、鉛、銅、チタン、マグネシウム、クロム、亜鉛、アンチモン等の金属酸化物や、上記金属の複合酸化物を挙げることができる。
有機顔料として、以下のものを挙げることができる。但し本発明は、これらに限定されるものではない。
カラーインデックス(C.I.)ピグメントイエロー1,2,3,4,5,6,10,11,12,13,14,15,16,17,18,20,24,31,32,34,35,35:1,36,36:1,37,37:1,40,42,43,53,55,60,61,62,63,65,73,74,77,81,83,86,93,94,95,97,98,100,101,104,106,108,109,110,113,114,115,116,117,118,119,120,123,125,126,127,128,129,137,138,139,147,148,150,151,152,153,154,155,156,161,162,164,166,167,168,169,170,171,172,173,174,175,176,177,179,180,181,182,185,187,188,193,194,199,213,214等、
C.I.ピグメントオレンジ 2,5,13,16,17:1,31,34,36,38,43,46,48,49,51,52,55,59,60,61,62,64,71,73等、
C.I.ピグメントレッド 1,2,3,4,5,6,7,9,10,14,17,22,23,31,38,41,48:1,48:2,48:3,48:4,49,49:1,49:2,52:1,52:2,53:1,57:1,60:1,63:1,66,67,81:1,81:2,81:3,83,88,90,105,112,119,122,123,144,146,149,150,155,166,168,169,170,171,172,175,176,177,178,179,184,185,187,188,190,200,202,206,207,208,209,210,216,220,224,226,242,246,254,255,264,270,272,279
C.I.ピグメントグリーン 7,10,36,37,58,59
C.I.ピグメントバイオレット 1,19,23,27,32,37,42
C.I.ピグメントブルー 1,2,15,15:1,15:2,15:3,15:4,15:6,16,22,60,64,66,79,80
置換基としては、特開2013-209623号公報の段落番号0025~0027の記載を参照でき、を参酌することができ、これらの内容は本願明細書に組み込まれる。
ハロゲン化亜鉛フタロシアニン顔料Aは、フタロシアニン1分子中の臭素原子の平均個数が0~12個であり、1~8個が好ましく、1~7個がさらに好ましく、2~7個が一層好ましい。
ハロゲン原子の平均個数および臭素原子の平均個数が上記範囲であれば、針状結晶の発生を抑制できる。更には、輝度ムラの小さく、分光特性に優れたカラーフィルタ等の硬化膜を製造することもできる。
ハロゲン化亜鉛フタロシアニン顔料Aにおいて、臭素原子以外のハロゲン原子は、塩素原子、フッ素原子、沃素原子が挙げられ、針状異物の抑制、輝度ムラ等の観点から、塩素原子、フッ素原子が好ましく、塩素原子がより好ましい。
なお、ハロゲン化亜鉛フタロシアニン顔料Aにおける、フタロシアニン1分子中のハロゲン原子の平均個数および臭素原子の平均個数は、質量分析と、フラスコ燃焼イオンクロマトグラフによるハロゲン含有量分析から算出できる。
本発明では、顔料として黒色顔料を用いることもできる。以下、黒色顔料についてさらに詳しく説明する。
黒色顔料は、各種公知の黒色顔料を用いることができる。特に、少量で高い光学濃度を実現できる観点から、カーボンブラック、チタンブラック、酸化チタン、酸化鉄、酸化マンガン、グラファイト等が好ましく、なかでも、カーボンブラック、チタンブラックのうちの少なくとも1種を含むことが好ましく、特にチタンブラックが好ましい。
より具体的には、市販品である、C.I.ピグメントブラック 1等の有機顔料C.I.ピグメントブラック 7等の無機顔料も用いることができる。
チタンブラックとは、チタン原子を含有する黒色粒子である。好ましくは低次酸化チタンや酸窒化チタン等である。チタンブラック粒子は、分散性向上、凝集性抑制などの目的で必要に応じ、表面を修飾することが可能である。酸化珪素、酸化チタン、酸化ゲルマニウム、酸化アルミニウム、酸化マグネシウム、又は、酸化ジルコニウムで被覆することが可能であり、また、特開2007-302836号公報に表されるような撥水性物質での処理も可能である。
チタンブラックは、典型的には、チタンブラック粒子であり、個々の粒子の一次粒径及び平均一次粒径のいずれもが小さいものであることが好ましい。
具体的には、平均一次粒径で10nm~45nmの範囲のものが好ましい。なお、本発明における粒径、即ち、粒子直径とは、粒子の外表面の投影面積と等しい面積をもつ円の直径である。粒子の投影面積は、電子顕微鏡写真での撮影により得られた面積を測定し、撮影倍率を補正することにより得られる。
チタンブラックの市販品の例としては、チタンブラック10S、12S、13R、13M、13M-C、13R、13R-N、13M-T(商品名:三菱マテリアル(株)製)、ティラック(Tilack)D(商品名:赤穂化成(株)製)などが挙げられる。
この形態において、チタンブラックは、組成物中において被分散体として含有されるものであり、被分散体中のSi原子とTi原子との含有比(Si/Ti)が質量換算で0.05以上が好ましく、0.05~0.5がより好ましく、0.07~0.4がさらに好ましい。
ここで、上記被分散体は、チタンブラックが一次粒子の状態であるもの、凝集体(二次粒子)の状態であるものの双方を包含する。
被分散体のSi/Tiを変更する(例えば、0.05以上とする)ためには、以下のような手段を用いることができる。
先ず、酸化チタンとシリカ粒子とを分散機を用いて分散することにより分散物を得て、この分散物を高温(例えば、850~1000℃)にて還元処理することにより、チタンブラック粒子を主成分とし、SiとTiとを含有する被分散体を得ることができる。上記還元処理は、アンモニアなどの還元性ガスの雰囲気下で行うこともできる。
酸化チタンとしては、TTO-51N(商品名:石原産業製)などが挙げられる。
シリカ粒子の市販品としては、AEROSIL(登録商標)90、130、150、200、255、300、380(商品名:エボニック製)などが挙げられる。
酸化チタンとシリカ粒子との分散は、分散剤を用いてもよい。分散剤としては、後述する分散剤の欄で説明するものが挙げられる。
上記の分散は溶剤中で行ってもよい。溶剤としては、水、有機溶剤が挙げられる。後述する有機溶剤の欄で説明するものが挙げられる。
Si/Tiが、例えば、0.05以上等に調整されたチタンブラックは、例えば、特開2008-266045公報の段落番号〔0005〕及び段落番号〔0016〕~〔0021〕に記載の方法により作製することができる。
残渣物が低減される理由は未だ明確ではないが、上記のような被分散体は小粒径となる傾向があり(例えば、粒径が30nm以下)、更に、この被分散体のSi原子が含まれる成分が増すことにより、膜全体の下地との吸着性が低減され、これが、遮光膜の形成における未硬化の組成物(特に、チタンブラック)の現像除去性の向上に寄与すると推測している。
また、チタンブラックは、紫外光から赤外光までの広範囲に亘る波長領域の光に対する遮光性に優れることから、上記したチタンブラック及びSi原子を含む被分散体(好ましくはSi/Tiが質量換算で0.05以上であるもの)を用いて形成された遮光膜は優れた遮光性を発揮する。
なお、被分散体中のSi原子とTi原子との含有比(Si/Ti)は、例えば、特開2013-249417号公報の段落0033に記載の方法(1-1)又は方法(1-2)を用いて測定できる。
また、組成物を硬化して得られた遮光膜に含有される被分散体について、その被分散体中のSi原子とTi原子との含有比(Si/Ti)が0.05以上か否かを判断するには、特開2013-249417号公報の段落0035に記載の方法(2)を用いる。
また、この被分散体においては、チタンブラックと共に、分散性、着色性等を調整する目的で、Cu、Fe、Mn、V、Ni等の複合酸化物、酸化コバルト、酸化鉄、カーボンブラック、アニリンブラック等からなる黒色顔料を、1種又は2種以上を組み合わせて、被分散体として併用してもよい。
この場合、全被分散体中の50質量%以上をチタンブラックからなる被分散体が占めることが好ましい。
また、この被分散体においては、遮光性の調整等を目的として、本発明の効果を損なわない限りにおいて、チタンブラックと共に、他の着色剤(有機顔料や染料など)を所望により併用してもよい。
以下、被分散体にSi原子を導入する際に用いられる材料について述べる。被分散体にSi原子を導入する際には、シリカなどのSi含有物質を用いればよい。
用いうるシリカとしては、沈降シリカ、フュームドシリカ、コロイダルシリカ、合成シリカなどを挙げることができ、これらを適宜選択して使用すればよい。
更に、シリカ粒子の粒径が遮光膜を形成した際に膜厚よりも小さい粒径であると遮光性がより優れるため、シリカ粒子として微粒子タイプのシリカを用いることが好ましい。なお、微粒子タイプのシリカの例としては、例えば、特開2013-249417号公報の段落0039に記載のシリカが挙げられ、これらの内容は本明細書に組み込まれる。
染料としては、例えば特開昭64-90403号公報、特開昭64-91102号公報、特開平1-94301号公報、特開平6-11614号公報、特登2592207号、米国特許4808501号明細書、米国特許5667920号明細書、米国特許505950号明細書、米国特許5667920号明細書、特開平5-333207号公報、特開平6-35183号公報、特開平6-51115号公報、特開平6-194828号公報等に開示されている色素を使用できる。化学構造として区分すると、ピラゾールアゾ化合物、ピロメテン化合物、アニリノアゾ化合物、トリフェニルメタン化合物、アントラキノン化合物、ベンジリデン化合物、オキソノール化合物、ピラゾロトリアゾールアゾ化合物、ピリドンアゾ化合物、シアニン化合物、フェノチアジン化合物、ピロロピラゾールアゾメチン化合物等を使用できる。また、染料としては色素多量体を用いてもよい。色素多量体としては、特開2011-213925号公報、特開2013-041097号公報に記載されている化合物が挙げられる。
このような分光特性を有する着色剤としては、例えば、ピロロピロール化合物、銅化合物、シアニン化合物、フタロシアニン化合物、イミニウム化合物、チオール錯体系化合物、遷移金属酸化物系化合物、スクアリリウム化合物、ナフタロシアニン化合物、クオタリレン化合物、ジチオール金属錯体系化合物、クロコニウム化合物等が挙げられる。
フタロシアニン化合物、ナフタロシアニン化合物、イミニウム化合物、シアニン化合物、スクアリウム化合物及びクロコニウム化合物は、特開2010-111750号公報の段落0010~0081に開示の化合物を使用してもよく、この内容は本明細書に組み込まれる。シアニン化合物は、例えば、「機能性色素、大河原信/松岡賢/北尾悌次郎/平嶋恒亮・著、講談社サイエンティフィック」を参酌することができ、この内容は本願明細書に組み込まれる。
ピロロピロール化合物としては、下記一般式(1)で表される化合物が好ましい。
一般式(1)中、R1aおよびR1bは、それぞれ独立にアルキル基、アリール基またはヘテロアリール基を表し、R2およびR3は、それぞれ独立に水素原子または置換基を表し、R2およびR3の少なくとも一方は電子吸引性基であり、R2およびR3は互いに結合して環を形成しても良く、R4は、水素原子、アルキル基、アリール基、ヘテロアリール基、置換ホウ素、金属原子を表し、R4は、R1a、R1bおよびR3から選ばれる1以上と共有結合もしくは配位結合しても良い。
R1a又はR1bで表されるアリール基としては、好ましくは炭素数6~30、より好ましくは炭素数6~20、特に好ましくは炭素数6~12のアリール基であり、例えばフェニル、o-メチルフェニル、p-メチルフェニル、ビフェニル、ナフチル、アントラニル、フェナントリルなどが挙げられる。
R1a又はR1bで表されるヘテロアリール基としては、好ましくは炭素数1~30、より好ましくは炭素数1~12のヘテロアリール基である。ヘテロ原子としては、例えば窒素原子、酸素原子、硫黄原子が挙げられる。ヘテロアリール基としては、具体的には例えばイミダゾリル、ピリジル、キノリル、フリル、チエニル、ベンズオキサゾリル、ベンズイミダゾリル、ベンズチアゾリル、ナフトチアゾリル、ベンズオキサゾリル、m-カルバゾリル、アゼピニルなどが挙げられる。
一般式(1)中のR1a及びR1bは、互いに同一でも異なってもよい。
本発明においては、Hammettのσp値が0.2以上の置換基を電子求引性基として例示することができる。σp値として好ましくは0.25以上であり、より好ましくは0.3以上であり、特に好ましくは0.35以上である。上限は特に制限はないが、好ましくは0.80以下である。
一般式(1)中の2つのR2は、互いに同一でも異なってもよく、また、2つのR3は、互いに同一でも異なってもよい。
R4は、R1a、R1bおよびR3から選ばれる1以上と共有結合もしくは配位結合しても良い。
一般式(1)中の2つのR4は、互いに同一でも異なってもよい。
本発明の着色組成物は、エチレン性不飽和結合を有する重合性化合物を含有する。重合性化合物は、エチレン性不飽和結合を有する基を1個以上有する化合物が好ましく、2個以上有する化合物がより好ましく、3個以上有することがさらに好ましい。上限は、たとえば、15個以下が好ましく、6個以下がより好ましい。エチレン性不飽和結合を有する基としては、ビニル基、(メタ)アリル基、(メタ)アクリロイル基などが挙げられる。
重合性化合物の分子量は、100~3000が好ましく、250~1500がより好ましい。
重合性化合物は、3~15官能の(メタ)アクリレート化合物であることが好ましく、3~6官能の(メタ)アクリレート化合物であることがより好ましい。
モノマー及びプレポリマーの例としては、不飽和カルボン酸(例えば、アクリル酸、メタクリル酸、イタコン酸、クロトン酸、イソクロトン酸、マレイン酸など)やそのエステル類、アミド類、並びにこれらの多量体が挙げられ、好ましくは、不飽和カルボン酸と脂肪族多価アルコール化合物とのエステル、および不飽和カルボン酸と脂肪族多価アミン化合物とのアミド類、並びにこれらの多量体である。また、ヒドロキシル基、アミノ基、メルカプト基等の求核性置換基を有する不飽和カルボン酸エステル或いはアミド類と、単官能若しくは多官能イソシアネート類或いはエポキシ類との付加反応物や、単官能若しくは多官能のカルボン酸との脱水縮合反応物等も好適に使用される。また、イソシアネート基、エポキシ基等の親電子性置換基を有する不飽和カルボン酸エステル或いはアミド類と、単官能若しくは多官能のアルコール類、アミン類、チオール類との反応物、ハロゲン基やトシルオキシ基等の脱離性置換基を有する不飽和カルボン酸エステル或いはアミド類と、単官能若しくは多官能のアルコール類、アミン類、チオール類との反応物も好適である。また、上記の不飽和カルボン酸の代わりに、不飽和ホスホン酸、スチレン等のビニルベンゼン誘導体、ビニルエーテル、アリルエーテル等に置き換えた化合物群を使用することも可能である。
これらの具体的な化合物としては、特開2009-288705号公報の段落番号〔0095〕~〔0108〕に記載されている化合物を本発明においても好適に用いることができる。
以下に好ましい重合性化合物の態様を示す。
カプロラクトンに由来する構造を有する化合物としては、分子内にカプロラクトンに由来する構造を有する限り特に限定されるものではないが、例えば、トリメチロールエタン、ジトリメチロールエタン、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリペンタエリスリトール、グリセリン、ジグリセロール、トリメチロールメラミン等の多価アルコールと、(メタ)アクリル酸及びε-カプロラクトンをエステル化することにより得られる、ε-カプロラクトン変性多官能(メタ)アクリレートを挙げることができる。なかでも下記一般式(Z-1)で表されるカプロラクトンに由来する構造を有する化合物が好ましい。
一般式(Z-4)中、(メタ)アクリロイル基の合計は3個又は4個であり、mは各々独立に0~10の整数を表し、各mの合計は0~40の整数である。
一般式(Z-5)中、(メタ)アクリロイル基の合計は5個又は6個であり、nは各々独立に0~10の整数を表し、各nの合計は0~60の整数である。
また、各mの合計は、2~40の整数が好ましく、2~16の整数がより好ましく、4~8の整数が特に好ましい。
一般式(Z-5)中、nは、0~6の整数が好ましく、0~4の整数がより好ましい。
また、各nの合計は、3~60の整数が好ましく、3~24の整数がより好ましく、6~12の整数が特に好ましい。
また、一般式(Z-4)又は一般式(Z-5)中の-((CH2)yCH2O)-又は-((CH2)yCH(CH3)O)-は、酸素原子側の末端がXに結合する形態が好ましい。
具体的には、下記式(a)~(f)で表される化合物(以下、「例示化合物(a)~(f)」とも称する。)が挙げられ、中でも、例示化合物(a)、(b)、(e)、(f)が好ましい。
市販品としては、ウレタンオリゴマーUAS-10、UAB-140(山陽国策パルプ社製)、UA-7200(新中村化学社製)、DPHA-40H(日本化薬社製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600(共栄社製)などが挙げられる。
本発明の着色組成物は、重合性化合物の反応を促進させることなどを目的として、分子内に2個以上のメルカプト基を有する多官能チオール化合物を含んでいてもよい。多官能チオール化合物は、2級のアルカンチオール類であることが好ましく、特に下記一般式(T1)で表される構造を有する化合物であることが好ましい。
一般式(T1)
(式(T1)中、nは2~4の整数を表し、Lは2~4価の連結基を表す。)
本発明の着色組成物は、エポキシ基を有する化合物を含有することも好ましい。
エポキシ基を有する化合物としては、1分子内にエポキシ基を2つ以上有する化合物が好ましい。エポキシ基は、1分子内に2~10個が好ましく、2~5個がより好ましく、3個が特に好ましい。
また、エポキシ基は、連結基を介して連結していることが好ましい。連結基としては、アルキレン基、アリーレン基、-O-、-NR’-(R’は、水素原子、置換基を有していてもよいアルキル基または置換基を有していてもよいアリール基を表し、水素原子が好ましい)で表される構造、-SO2-、-CO-、-O-および-S-から選ばれる少なくとも一つを含む基が挙げられる。
エポキシ基を有する化合物は、特開2013-011869号公報の段落番号0034~0036、特開2014-043556号公報の段落番号0147~0156、特開2014-089408号公報の段落番号0085~0092に記載された化合物を用いることもできる。これらの内容は、本明細書に組み込まれることとする。
市販品としては、例えば、「EHPE3150、(株)ダイセル製」、「EPICLON N660(DIC(株)社製)」などが挙げられる。
本発明の着色組成物は、フッ素原子、珪素原子、炭素数8以上の直鎖アルキル基、及び、炭素数3以上の分鎖アルキル基からなる群から選択される1種以上、並びに、硬化性官能基を有する硬化性化合物(以下、硬化性化合物Aともいう)を含有することも好ましい。
硬化性化合物Aは、フッ素原子と硬化性官能基とを有する硬化性化合物であることが好ましい。この態様によれば、反射率の小さい硬化膜を形成しやすい。
なお、本発明において、硬化性化合物Aは、上述した重合性化合物、エポキシ基を有する化合物、および後述する樹脂とは異なる化合物である。本発明において、フッ素原子とエチレン性不飽和結合を有する化合物は、硬化性化合物Aに含まれることとする。また、フッ素原子と、エポキシ基と、を有する化合物は、硬化性化合物Aに含まれることとする。
硬化性化合物Aの好適態様の一つとしては、ベンゼン環構造を有しない化合物であることが挙げられ、フッ素原子を有し、かつ、ベンゼン環構造を有しない化合物が好ましい。
なお、後述するシランカップリング剤は、硬化性化合物Aには含まれない。
フッ素原子で置換されたアルキレン基は、少なくとも1つの水素原子がフッ素原子で置換された直鎖状、分岐状又は環状のアルキレン基であることが好ましい。
フッ素原子で置換されたアルキル基は、少なくとも1つの水素原子がフッ素原子で置換された直鎖状、分岐状又は環状のアルキル基であることが好ましい。
フッ素原子で置換されたアルキレン基及びフッ素原子で置換されたアルキル基中の炭素数は、1~20であることが好ましく、1~10であることがより好ましく、1~5であることがさらに好ましい。
フッ素原子で置換されたアリール基は、アリール基がフッ素原子で直接に置換されているか、トリフルオロメチル基で置換されていることが好ましい。
フッ素原子で置換されたアルキレン基、フッ素原子で置換されたアルキル基、及び、フッ素原子で置換されたアリール基は、フッ素原子以外の置換基をさらに有していてもよい。
フッ素原子で置換されたアルキル基及びフッ素原子で置換されたアリール基の例としては、例えば、特開2011-100089号公報の段落0266~0272を参酌することができ、この内容は本明細書に組み込まれる。
式(X) -(LA-O)-
上記LAは、フッ素原子で置換されたアルキレン基を表す。なお、アルキレン基中の炭素数は、1~20であることが好ましく、1~10であることがより好ましく、1~5であることがさらに好ましい。なお、上記フッ素原子で置換されたアルキレン基中には、酸素原子が含まれていてもよい。
また、フッ素原子で置換されたアルキレン基は直鎖状であっても、分岐状であってもよい。
パーフルオロアルキレンエーテル基とは、上記LAがパーフルオロアルキレン基であることを意図する。パーフルオロアルキレン基とは、アルキレン基中の水素原子がすべてフッ素原子で置換された基を意図する。
式(X)で表される基(繰り返し単位)は繰り返して連結していてもよく、その繰り返し単位数は特に制限されないが、本発明の効果がより優れる点で、1~50が好ましく、1~20がより好ましい。
つまり、式(X-1)で表される基であることが好ましい。
式(X-1) -(LA-O)r-
式(X-1)中、LAは上記の通りであり、rは繰り返し単位数を表し、その好適範囲は上述の通りである。
なお、複数の-(LA-O)-中のLAは同一であっても異なっていてもよい。
部分構造(S)
アリールシリル基におけるアリール基としては、例えば、フェニル基が挙げられる。
上記部分構造(S)を含む場合、部分構造(S)を含んで環状構造を形成していてもよい。本発明で好ましく採用される部分構造(S)としては、-Si(R)2-O-Si(R)2-(Rは炭素数1~3のアルキル基)、アルコキシシリル基が好ましい。部分構造(S)を含む構造の例としては、例えば、特開2011-100089号公報の段落0277~0279を参酌することができ、この内容は本明細書に組み込まれる。
硬化性化合物Aが炭素数3以上の分岐アルキル基を含んでいる場合、分岐アルキル基の炭素数は、3~20が好ましく、5~15がより好ましい。炭素数3以上の分岐アルキル基は、末端に-CH(CH3)2、-C(CH3)3を有することが好ましい。
硬化性官能基は、(メタ)アクリロイルオキシ基、エポキシ基、オキセタニル基、イソシアナート基、ヒドロキシル基、アミノ基、カルボキシル基、チオール基、アルコキシシリル基、メチロール基、ビニル基、(メタ)アクリルアミド基、スチリル基、及び、マレイミド基からなる群から選択される1種以上であることが好ましく、(メタ)アクリロイルオキシ基、エポキシ基、及びオキセタニル基からなる群から選択される1種以上であることがより好ましい。
なお、硬化性官能基としてエチレン性不飽和基が含まれる場合、硬化性化合物A中におけるエチレン性不飽和基の量は0.1~10.0mol/gが好ましく、1.0~5.0mol/gがより好ましい。
また、1分子中における、硬化性官能基の数は特に制限されないが、本発明の効果がより優れる点で、2つ以上が好ましく、4つ以上がより好ましい。上限は特に制限されないが、10つ以下の場合が多く、6つ以下の場合がより多い。
式(B1)~(B3)中、L1~L4が2価の連結基を表す場合、2価の連結基としては、ハロゲン原子が置換していてもよいアルキレン基、ハロゲン原子が置換していてもよいアリーレン基、-NR12-、-CONR12-、-CO-、-CO2-、SO2NR12-、-O-、-S-、-SO2-、又は、これらの組み合わせが挙げられる。なかでも、炭素数2~10のハロゲン原子が置換していてもよいアルキレン基及び炭素数6~12のハロゲン原子が置換していてもよいアリーレン基からなる群から選択される少なくとも1種、又は、これらの基と-NR12-、-CONR12-、-CO-、-CO2-、SO2NR12-、-O-、-S-、及びSO2-からなる群から選択される少なくとも1種の基との組み合わせからなる基が好ましく、炭素数2~10のハロゲン原子が置換していてもよいアルキレン基、-CO2-、-O-、-CO-、-CONR12-、又は、これらの基の組み合わせからなる基がより好ましい。ここで、上記R12は、水素原子又はメチル基を表す。
また、特開2015-017244号公報の段落番号0073に記載された繰り返し単位も挙げられる。この内容は、本明細書に組み込まれることとする。
上記式(B2)で表される繰り返し単位及び式(B3)で表される繰り返し単位の合計含有量は、硬化性化合物A中の全繰り返し単位に対して、5~70モル%であることが好ましく、10~60モル%であることがより好ましい。上記式(B2)で表される繰り返し単位及び式(B3)で表される繰り返し単位の合計含有量は、硬化性化合物A中の全繰り返し単位に対して、5モル%以上が好ましく、10モル%以上がより好ましい。
なお、式(B2)で表される繰り返し単位が含まれず、式(B3)で表される繰り返し単位が含まれる場合は、式(B2)で表される繰り返し単位の含有量は0モル%として、式(B3)で表される繰り返し単位の含有量が上記範囲であることが好ましい。
また、硬化性化合物Aがポリマーである場合、分散度(重量平均分子量/数平均分子量)は、1.80~3.00であることが好ましく、2.00~2.90であることがより好ましい。
上記屈折率の好適範囲としては、遮光膜の低反射性の点で、1.2~1.5であることが好ましく、1.3~1.5であることがより好ましい。
着色組成物は、硬化性化合物Aを1種単独で含んでいてもよく、2種以上を含んでいてもよい。着色組成物が硬化性化合物Aを2種以上含む場合は、その合計が上記範囲内であることが好ましい。
本発明の着色組成物は、樹脂を含むことが好ましい。樹脂は、例えば、着色剤を組成物中で分散させる用途又はバインダーの用途で配合される。なお、主に着色剤を分散させるために用いられる樹脂を分散剤ともいう。ただし、樹脂のこのような用途は一例であって、このような用途以外を目的で使用することもできる。
本発明の着色組成物は、樹脂としてアルカリ可溶性樹脂を含有する。アルカリ可溶性樹脂を含有することにより、現像性およびパターン形成性が向上する。なお、アルカリ可溶性樹脂は、分散剤やバインダーとして用いることもできる。
アルカリ可溶性樹脂としては、線状有機高分子重合体であってもよく、分子(好ましくは、アクリル系共重合体、スチレン系共重合体を主鎖とする分子)中に少なくとも1つのアルカリ可溶性を促進する基を有するアルカリ可溶性樹脂の中から適宜選択することができる。
アルカリ可溶性を促進する基(以下、酸基ともいう)としては、例えば、カルボキシル基、リン酸基、スルホン酸基、フェノール性ヒドロキシル基などが挙げられるが、有機溶剤に可溶で弱アルカリ水溶液により現像可能なものが好ましく、(メタ)アクリル酸が特に好ましいものとして挙げられる。これら酸基は、1種のみであってもよいし、2種以上であってもよい。
重合性基を含有するアルカリ可溶性樹脂としては、ダイヤナ-ルNRシリーズ(三菱レイヨン株式会社製)、Photomer6173(COOH含有 polyurethane acrylic oligomer.Diamond Shamrock Co.,Ltd.製)、ビスコートR-264、KSレジスト106(いずれも大阪有機化学工業株式会社製)、サイクロマーPシリーズ(例えば、ACA230AA)、プラクセル CF200シリーズ(いずれも(株)ダイセル製)、Ebecryl3800(ダイセルユーシービー株式会社製)、アクリキュア-RD-F8(日本触媒社製)などが挙げられる。
また、市販品としては、例えばFF-426(藤倉化成社製)などを用いることもできる。
一般式(ED2)中、Rは、水素原子または炭素数1~30の有機基を表す。一般式(ED2)の具体例としては、特開2010-168539号公報の記載を参酌できる。
式(X)において、R1は、水素原子またはメチル基を表し、R2は炭素数2~10のアルキレン基を表し、R3は、水素原子またはベンゼン環を含んでもよい炭素数1~20のアルキル基を表す。nは1~15の整数を表す。
さらに、特開2012-32767号公報に記載の段落番号0029~0063に記載の共重合体(B)および実施例で用いられているアルカリ可溶性樹脂、特開2012-208474号公報の段落番号0088~0098に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2012-137531号公報の段落番号0022~0032に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2013-024934号公報の段落番号0132~0143に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2011-242752号公報の段落番号0092~0098および実施例で用いられているバインダー樹脂、特開2012-032770号公報の段落番号0030~0072の記載のバインダー樹脂を用いることもできる。これらの内容は本願明細書に組み込まれる。
本発明の着色組成物は、樹脂として分散剤を含有することができる。
分散剤は、酸性樹脂、塩基性樹脂および両性樹脂から選ばれる1種以上を含むことが好ましい。
酸性樹脂が有する酸基としては、例えば、カルボキシル基、リン酸基、スルホン酸基、フェノール性ヒドロキシル基などが挙げられ、カルボキシル基が好ましい。
酸性樹脂は、ブロック共重合体、ランダム共重合体、グラフト共重合体のいずれでも用いることができる。
酸性樹脂の酸価は、5~200mgKOH/gが好ましく、10~150mgKOH/gがより好ましく、50~150mgKOH/gがさらに好ましい。
塩基性樹脂が有する塩基性基としては、アミノ基が好ましい。塩基性樹脂は、ブロック共重合体、ランダム共重合体、グラフト共重合体のいずれでも用いることができる。
塩基性樹脂のアミン価は、5~200mgKOH/gが好ましく、5~150mgKOH/gがより好ましく、5~100mgKOH/gがさらに好ましい。
両性樹脂は、酸価が5mgKOH/g以上で、アミン価が5mgKOH/g以上であることが好ましい。酸価は、5~200mgKOH/gが好ましく、10~200mgKOH/gがより好ましく、30~200mgKOH/gが更に好ましく、30~180mgKOH/gが特に好ましい。アミン価は、5~200mgKOH/gが好ましく、10~150mgKOH/gがより好ましく、10~130mgKOH/gが特に好ましい。
両性樹脂の酸価とアミン価の比率は、酸価:アミン価=1:3~3:1が好ましく、1:2~2:1がより好ましい。酸価とアミン価の比率が上記範囲であれば、着色剤の分散性と、現像性の両立をより効果的に達成することができる。
また、両性樹脂の市販品としては、例えば、ビックケミー社製のDISPERBYK-130、DISPERBYK-140、DISPERBYK-142、DISPERBYK-145、DISPERBYK-180、DISPERBYK-187、DISPERBYK-191、DISPERBYK-2001、DISPERBYK-2010、DISPERBYK-2012、DISPERBYK-2025、BYK-9076、味の素ファインテクノ社製のアジスパーPB821、アジスパーPB822、アジスパーPB881等が挙げられる。
酸基を有する繰り返し単位は、酸基を有するモノマーを用いて構成できる。酸基に由来するモノマーとしては、カルボキシル基を有するビニルモノマー、スルホン酸基を有するビニルモノマー、リン酸基を有するビニルモノマーなどが挙げられる。
カルボキシル基を有するビニルモノマーとしては、(メタ)アクリル酸、ビニル安息香酸、マレイン酸、マレイン酸モノアルキルエステル、フマル酸、イタコン酸、クロトン酸、桂皮酸、アクリル酸ダイマーなどが挙げられる。また、2-ヒドロキシエチル(メタ)アクリレートなどの水酸基を有するモノマーと無水マレイン酸、無水フタル酸、無水コハク酸、シクロヘキサンジカルボン酸無水物のような環状無水物との付加反応物、ω-カルボキシ-ポリカプロラクトンモノ(メタ)アクリレートなども利用できる。また、カルボキシル基の前駆体として無水マレイン酸、無水イタコン酸、無水シトラコン酸などの無水物含有モノマーを用いてもよい。なかでも、未露光部の現像除去性の観点から、2-ヒドロキシエチル(メタ)アクリレートなどの水酸基を有するモノマーと無水マレイン酸、無水フタル酸、無水コハク酸、シクロヘキサンジカルボン酸無水物のような環状無水物との付加反応物が好ましい。
スルホン酸基を有するビニルモノマーとしては、2-アクリルアミド-2-メチルプロパンスルホン酸などが挙げられる。
リン酸基を有するビニルモノマーとしては、リン酸モノ(2-アクリロイルオキシエチルエステル)、リン酸モノ(1-メチル-2-アクリロイルオキシエチルエステル)などが挙げられる。
また、酸基を有する繰り返し単位としては、特開2008-165059号公報の段落番号0067~0069の記載を参酌でき、この内容は本明細書に含まれることとする。
なお、本発明において、グラフト共重合体とは、グラフト鎖を有する樹脂を意味する。また、グラフト鎖とは、ポリマーの主鎖の根元から、主鎖から枝分かれしている基の末端までを示す。
また、グラフト鎖1本あたりの水素原子を除いた原子数は、40~10000が好ましく、50~2000がより好ましく、60~500が更に好ましい。
グラフト共重合体のグラフト鎖としては、グラフト部位と溶剤との相互作用性を向上させ、それにより分散性を高めるために、ポリ(メタ)アクリル、ポリエステル、又はポリエーテルを有するグラフト鎖であることが好ましく、ポリエステル又はポリエーテルを有するグラフト鎖であることがより好ましい。
グラフト共重合体は、グラフト鎖を有する繰り返し単位を、質量換算で、グラフト共重合体の総質量に対し2~90質量%の範囲で含むことが好ましく、5~30質量%の範囲で含むことがより好ましい。グラフト鎖を有する繰り返し単位の含有量が、この範囲内であると、着色剤の分散性が良好である。
オリゴイミン系グラフト共重合体としては、pKa14以下の官能基を有する部分構造Xを有する繰り返し単位と、原子数40~10,000のオリゴマー鎖又はポリマー鎖Yを含む側鎖とを有し、かつ主鎖及び側鎖の少なくとも一方に塩基性窒素原子を有する樹脂が好ましい。
ここで、塩基性窒素原子とは、塩基性を呈する窒素原子であれば特に制限はない。オリゴイミン系グラフト共重合体は、塩基強度pKb14以下の窒素原子を有する構造を含有することが好ましく、pKb10以下の窒素原子を有する構造を含有することがより好ましい。
本発明において塩基強度pKbとは、水温25℃でのpKbをいい、塩基の強さを定量的に表すための指標のひとつであり、塩基性度定数と同義である。塩基強度pKbと、後述の酸強度pKaとは、pKb=14-pKaの関係にある。
一般式(I-2)で表される繰り返し単位は、オリゴイミン系グラフト共重合体に含まれる全繰り返し単位中、10~90モル%含有されることが好ましく、30~70モル%含有されることが最も好ましい。
分散安定性及び親疎水性のバランスの観点からは、繰り返し単位(I-1)及び繰り返し単位(I-2)の含有比〔(I-1):(I-2)〕は、モル比で10:1~1:100の範囲であることが好ましく、1:1~1:10の範囲であることがより好ましい。
部分構造Xは、水温25℃でのpKaが14以下の官能基を有する。ここでいう「pKa」とは、化学便覧(II)(改訂4版、1993年、日本化学会編、丸善株式会社)に記載されている定義のものである。
「pKa14以下の官能基」は、物性がこの条件を満たすものであれば、その構造などは特に限定されず、公知の官能基でpKaが上記範囲を満たすものが挙げられるが、特にpKaが12以下である官能基が好ましく、pKaが11以下である官能基が最も好ましい。部分構造Xとして具体的には、例えば、カルボン酸基(pKa:3~5程度)、スルホン酸基(pKa:-3~-2程度)、-COCH2CO-(pKa:8~10程度)、-COCH2CN(pKa:8~11程度)、-CONHCO-、フェノール性水酸基、-RFCH2OH又は-(RF)2CHOH(RFはペルフルオロアルキル基を表す。pKa:9~11程度)、スルホンアミド基(pKa:9~11程度)等が挙げられ、特にカルボン酸基(pKa:3~5程度)、スルホン酸基(pKa:-3~-2程度)、-COCH2CO-(pKa:8~10程度)が好ましい。
部分構造Xとしては、特に、下記一般式(V-1)、一般式(V-2)又は一般式(V-3)で表される構造を有するものが好ましい。
原子数40~10,000のオリゴマー鎖又はポリマー鎖Yとしては、オリゴイミン系グラフト共重合体の主鎖部と連結できるポリエステル、ポリアミド、ポリイミド、ポリ(メタ)アクリル酸エステル等の公知のポリマー鎖が挙げられる。Yにおける、オリゴイミン系グラフト共重合体との結合部位は、Yの末端であることが好ましい。
Yは、塩基性窒素原子と結合していることが好ましい。塩基性窒素原子とYとの結合様式は、共有結合、イオン結合、又は、共有結合及びイオン結合の混合である。塩基性窒素原子とYとの結合様式の比率は、共有結合:イオン結合=100:0~0:100であることが好ましく、95:5~5:95がより好ましく、90:10~10:90が最も好ましい。Yは、塩基性窒素原子とアミド結合、又はカルボン酸塩としてイオン結合していることが好ましい。
Yの数平均分子量はGPC法によるポリスチレン換算値により測定することができる。Yの数平均分子量は、特に1,000~50,000が好ましく、1,000~30,000が分散性・分散安定性・現像性の観点から最も好ましい。
Yで示される側鎖構造は、主鎖に対し、樹脂1分子中に、2つ以上連結していることが好ましく、5つ以上連結していることが最も好ましい。
Yの詳細については、特開2013-064979号公報の段落番号0086~0098の記載を参酌でき、本明細書にはこれらの内容が組み込まれることとする。
上述したオリゴイミン系グラフト共重合体の具体例は、例えば、以下が挙げられる。また、特開2013-064979号公報の段落番号0099~0109、0119~0124に記載された樹脂が挙げられ、本明細書にはこれらの内容が組み込まれる。
式(1)~式(4)において、X1、X2、X3、X4、及びX5は、それぞれ独立に、水素原子又は1価の有機基を表す。X1、X2、X3、X4、及びX5としては、合成上の制約の観点からは、それぞれ独立に、水素原子又は炭素数1~12のアルキル基であることが好ましく、それぞれ独立に、水素原子又はメチル基であることがより好ましく、メチル基が特に好ましい。
また、式(1)及び式(2)において、j及びkは、それぞれ独立に、2~8の整数を表す。式(1)及び式(2)におけるj及びkは、分散安定性、現像性の観点から、4~6の整数が好ましく、5が最も好ましい。
式(4)中、R4は水素原子又は1価の有機基を表し、この1価の有機基としては特に構造上限定はされない。R4として好ましくは、水素原子、アルキル基、アリール基、及びヘテロアリール基が挙げられ、更に好ましくは、水素原子、又はアルキル基である。R4がアルキル基である場合、アルキル基としては、炭素数1~20の直鎖状アルキル基、炭素数3~20の分岐状アルキル基、又は炭素数5~20の環状アルキル基が好ましく、炭素数1~20の直鎖状アルキル基がより好ましく、炭素数1~6の直鎖状アルキル基が特に好ましい。式(4)において、qが2~500のとき、グラフト共重合体中に複数存在するX5及びR4は互いに同じであっても異なっていてもよい。
また、式(2)で表される繰り返し単位としては、分散安定性、現像性の観点から、下記式(2A)で表される繰り返し単位であることがより好ましい。
式(2A)中、X2、Y2、Z2及びmは、式(2)におけるX2、Y2、Z2及びmと同義であり、好ましい範囲も同様である。
式(3A)又は(3B)中、X3、Y3、Z3及びpは、式(3)におけるX3、Y3、Z3及びpと同義であり、好ましい範囲も同様である。
A. J. Leo, Comprehensive Medicinal Chemistry, Vol.4, C. Hansch, P. G. Sammnens, J. B. Taylor and C. A. Ramsden, Eds., p.295, Pergamon Press, 1990 C. Hansch & A. J. Leo. SUbstituent Constants For Correlation Analysis in Chemistry and Biology. John Wiley & Sons. A.J. Leo. Calculating logPoct from structure. Chem. Rev., 93, 1281-1306, 1993.
logP=log(Coil/Cwater)
式中、Coilは油相中の化合物のモル濃度を、Cwaterは水相中の化合物のモル濃度を表す。
logPの値が0をはさんでプラスに大きくなると油溶性が増し、マイナスで絶対値が大きくなると水溶性が増すことを意味し、有機化合物の水溶性と負の相関があり、有機化合物の親疎水性を見積るパラメータとして広く利用されている。
R1、R2、及びR3は、より好ましくは水素原子、又は炭素原子数が1~3のアルキル基であり、最も好ましくは、水素原子又はメチル基である。R2及びR3は、水素原子であることが特に好ましい。
Lは、単結合、アルキレン基又はオキシアルキレン構造を含む2価の連結基であることが好ましい。オキシアルキレン構造は、オキシエチレン構造又はオキシプロピレン構造であることがより好ましい。また、Lは、オキシアルキレン構造を2以上繰り返して含むポリオキシアルキレン構造を含んでいてもよい。ポリオキシアルキレン構造としては、ポリオキシエチレン構造又はポリオキシプロピレン構造が好ましい。ポリオキシエチレン構造は、-(OCH2CH2)n-で表され、nは、2以上の整数が好ましく、2~10の整数であることがより好ましい。
グラフト共重合体は、酸基を有する繰り返し単位を含有してもしなくてもよいが、含有する場合、酸基を有する繰り返し単位の含有量は、質量換算で、グラフト共重合体の総質量に対して、好ましくは5~80質量%が好ましく、より好ましくは、10~60質量%である。
グラフト共重合体は、塩基性基を有する繰り返し単位を含有してもしなくてもよいが、含有する場合、塩基性基を有する繰り返し単位の含有量は、質量換算で、グラフト共重合体の総質量に対して、好ましくは0.01~50質量%であり、より好ましくは、現像性阻害抑制という観点から、0.01~30質量%である。
グラフト共重合体は、配位性基を有する繰り返し単位、又は、反応性を有する官能基を有する繰り返し単位を含有してもしなくてもよいが、含有する場合、これらの繰り返し単位の含有量は、質量換算で、グラフト共重合体の総質量に対して、好ましくは10~80質量%であり、より好ましくは、現像性阻害抑制という観点から、20~60質量%である。
一般式(iv)~一般式(vi)中、R11、R12、及びR13は、より好ましくは、それぞれ独立に水素原子、又は炭素原子数が1~3のアルキル基であり、最も好ましくは、それぞれ独立に水素原子又はメチル基である。一般式(iv)中、R12及びR13は、それぞれ水素原子であることが特に好ましい。
一般式(v)中のYは、メチン基又は窒素原子を表す。
本発明の着色組成物は、顔料誘導体を含有してもよい。顔料誘導体は、有機顔料の一部分を、酸性基、塩基性基又はフタルイミドメチル基で置換した構造を有する化合物が好ましい。顔料誘導体としては、着色剤Aの分散性及び分散安定性の観点から、酸性基又は塩基性基を有する顔料誘導体が好ましい。特に好ましくは、塩基性基を有する顔料誘導体である。また、上述した樹脂(分散剤)と、顔料誘導体の組み合わせは、分散剤が酸性分散剤で、顔料誘導体が塩基性基を有する組み合わせが好ましい。
また、顔料誘導体が有する酸性基としては、スルホン酸基、カルボン酸基及びその塩が好ましく、カルボン酸基及びスルホン酸基がさらに好ましく、スルホン酸基が特に好ましい。顔料誘導体が有する塩基性基としては、アミノ基が好ましく、特に三級アミノ基が好ましい。
本発明の着色組成物は、有機溶剤を含有してもよい。
有機溶剤は、各成分の溶解性や着色組成物の塗布性を満足すれば基本的には特に制限はないが、重合性化合物、アルカリ可溶性樹脂等の溶解性、塗布性、安全性を考慮して選ばれることが好ましい。
本発明において、有機溶剤は、過酸化物の含有率が0.8mmol/L以下であることが好ましく、過酸化物を実質的に含まないことがより好ましい。
本発明の着色組成物は、有機溶剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物においては、着色組成物の製造中又は保存中において、重合性化合物の不要な熱重合を阻止するために、少量の重合禁止剤を添加することが望ましい。
重合禁止剤としては、ハイドロキノン、p-メトキシフェノール、ジ-t-ブチル-p-クレゾール、ピロガロール、t-ブチルカテコール、ベンゾキノン、4,4'-チオビス(3-メチル-6-t-ブチルフェノール)、2,2'-メチレンビス(4-メチル-6-t-ブチルフェノール)、N-ニトロソフェニルヒドロキシアミン第一セリウム塩等が挙げられる。
本発明の着色組成物が重合禁止剤を含有する場合、重合禁止剤の含有量は、着色組成物の質量に対して、0.01~5質量%が好ましい。
本発明の着色組成物は、重合禁止剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物には、塗布性をより向上させる観点から、各種の界面活性剤を添加してもよい。界面活性剤としては、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、シリコーン系界面活性剤などの各種界面活性剤を使用できる。
フッ素系界面活性剤は、フッ素原子を有する(メタ)アクリレート化合物に由来する繰り返し単位と、アルキレンオキシ基(好ましくはエチレンオキシ基、プロピレンオキシ基)を2以上(好ましくは5以上)有する(メタ)アクリレート化合物に由来する繰り返し単位と、を含む含フッ素高分子化合物も好ましく用いることができ、下記化合物も本発明で用いられるフッ素系界面活性剤として例示される。
上記の化合物の重量平均分子量は、好ましくは3,000~50,000であり、例えば、14,000である。
本発明の着色組成物は、界面活性剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物は、基板密着性を向上させる目的で、シランカップリング剤を含有させてもよい。
シランカップリング剤とは、分子中に加水分解性基とそれ以外の官能基を有する化合物である。なお、アルコキシ基等の加水分解性基は、珪素原子に結合している。
加水分解性基とは、珪素原子に直結し、加水分解反応及び/又は縮合反応によってシロキサン結合を生じ得る置換基をいう。加水分解性基としては、例えば、ハロゲン原子、アルコキシ基、アシルオキシ基、アルケニルオキシ基が挙げられる。加水分解性基が炭素原子を有する場合、その炭素数は6以下であることが好ましく、4以下であることがより好ましい。特に、炭素数4以下のアルコキシ基又は炭素数4以下のアルケニルオキシ基が好ましい。
また、シランカップリング剤は硬化膜の密着性を向上させるため、フッ素原子および珪素原子(ただし、加水分解性基が結合した珪素原子は除く)を含まないことが好ましく、フッ素原子、珪素原子(ただし、加水分解性基が結合した珪素原子は除く)、珪素原子で置換されたアルキレン基、炭素数8以上の直鎖アルキル基、及び、炭素数3以上の分鎖アルキル基は含まないことが望ましい。
なお、本発明において、シランカップリング剤は、上述した重合性化合物および硬化性化合物とは異なる化合物である。すなわち、分子中に加水分解性基とそれ以外の官能基を有する化合物はシランカップリング剤とする。
式(Z) *-Si(Rz1)3-m(Rz2)m
Rz1はアルキル基を表し、Rz2は加水分解性基を表し、mは1~3の整数を表す。Rz1が表すアルキル基の炭素数は、1~5が好ましく、1~3がより好ましい。Rz2が表す加水分解性基の定義は上述の通りである。
式(W) Rz3-Lz-Si(Rz1)3-m(Rz2)m
Rz1はアルキル基を表し、Rz2は加水分解性基を表し、Rz3は、硬化性官能基を表し、Lzは、単結合又は2価の連結基を表し、mは1~3の整数を表す。
Rz1が表すアルキル基の定義は上述の通りである。Rz2が表す加水分解性基の定義は上述の通りである。Rz3が表す硬化性官能基の定義は上述のとおりであり、好適範囲も上述の通りである。
Lzは、単結合又は2価の連結基を表す。2価の連結基としては、アルキレン基、アリーレン基、-NR12-、-CONR12-、-CO-、-CO2-、-SO2NR12-、-O-、-S-、-SO2-、又は、これらの組み合わせが挙げられる。
アルキレン基の炭素数は、1~20が好ましい。アルキレン基は、直鎖および分岐のいずれでもよい。アルキレン基およびアリーレン基は、無置換であってもよく、置換基を有していてもよい。置換基としては、ハロゲン原子、ヒドロキシル基が挙げられる。
Lzは、炭素数2~10のアルキレン基および炭素数6~12のアリーレン基からなる群から選択される少なくとも1種、又は、これらの基と-NR12-、-CONR12-、-CO-、-CO2-、-SO2NR12-、-O-、-S-、及び-SO2-からなる群から選択される少なくとも1種の基との組み合わせからなる基が好ましく、炭素数2~10のアルキレン基、-CO2-、-O-、-CO-、-CONR12-、又は、これらの基の組み合わせからなる基がより好ましい。ここで、上記R12は、水素原子又はメチル基を表す。
mは1~3を表し、2~3が好ましく、3がより好ましい。
シランカップリング剤Yは、分子内に少なくとも1つの珪素原子を有すればよく、珪素原子は、以下の原子、置換基と結合できる。それらは同じ原子、置換基であっても異なっていてもよい。結合しうる原子、置換基は、水素原子、ハロゲン原子、水酸基、炭素数1から20のアルキル基、アルケニル基、アルキニル基、アリール基、アルキル基及び/又はアリール基で置換可能なアミノ基、シリル基、炭素数1から20のアルコキシ基、アリーロキシ基などが挙げられる。これらの置換基はさらに、シリル基、アルケニル基、アルキニル基、アリール基、アルコキシ基、アリーロキシ基、チオアルコキシ基、アルキル基及び/又はアリール基で置換可能なアミノ基、ハロゲン原子、スルホンアミド基、アルコキシカルボニル基、アミド基、ウレア基、アンモニウム基、アルキルアンモニウム基、カルボキシル基、又はその塩、スルホ基、又はその塩などで置換されていてもよい。
なお、珪素原子には少なくとも一つの加水分解性基が結合している。加水分解性基の定義は、上述の通りである。
シランカップリング剤Yには、式(Z)で表される基が含まれていてもよい。
また、窒素原子は、任意の有機連結基を介して硬化性官能基と結合していることが好ましい。好ましい有機連結基としては、上述の窒素原子及びそれに結合する有機基に導入可能な置換基を挙げることができる。
シランカップリング剤Yには、硬化性官能基は一分子中に少なくとも一つ以上有していればよいが、硬化性官能基を2以上有する態様をとることも可能であり、感度、安定性の観点からは、硬化性官能基を2~20有することが好ましく、4~15有することがさらに好ましく、最も好ましくは分子内に硬化性官能基を6~10有する態様である。
式(Y) (Ry3)n-LN-Si(Ry1)3-m(Ry2)m
Ry1はアルキル基を表し、Ry2は加水分解性基を表し、Ry3は、硬化性官能基を表し、
LNは、窒素原子を有する(n+1)価の連結基を表し、
mは1~3の整数を表し、nは1以上の整数を表す。
式(Y)のRy1、Ry2、Ry3およびmは、式(W)のRz1、Rz2、Rz3およびmと同義であり、好ましい範囲も同様である。
式(Y)のnは、1以上の整数を表す。上限は、例えば、20以下が好ましく、15以下がより好ましく、10以下が更に好ましい。下限は、例えは、2以上が好ましく、4以上がより好ましく、6以上が更に好ましい。また、nは1とすることもできる。
式(Y)のLNは、窒素原子を有する基を表す。
窒素原子を有する基としては、下記式(LN-1)~(LN-4)から選ばれる少なくとも一種、または、下記式(LN-1)~(LN-4)と、-CO-、-CO2-、-O-、-S-および-SO2-から選ばれる少なくとも1種との組み合わせからなる基が挙げられる。アルキレン基は、直鎖および分岐のいずれでもよい。アルキレン基およびアリーレン基は、無置換であってもよく、置換基を有していてもよい。置換基としては、ハロゲン原子、ヒドロキシル基が挙げられる。
式中、*は、連結手を表す。
本発明の着色組成物には、必要に応じて、各種添加物、例えば、充填剤、密着促進剤、酸化防止剤、紫外線吸収剤、凝集防止剤等を配合することができる。これらの添加物としては、特開2004-295116号公報の段落0155~0156に記載のものを挙げることができ、これらの内容は本願明細書に組み込まれる。
本発明の着色組成物においては、特開2004-295116号公報の段落0078に記載の増感剤や光安定剤、同公報の段落0081に記載の熱重合防止剤を含有することができる。
なお、「モノクロロベンゼンとメチルtert-ブチルエーテルとを実質的に含有しない」とは、着色組成物の全質量に対して、モノクロロベンゼンと、メチルtert-ブチルエーテルとの合計量が、例えば、0.5ppm以下が好ましく、0.1ppm以下がより好ましく、含有しないことが一層好ましい。
<<第1の態様>>
本発明の着色組成物の好ましい態様(第1の態様)は、フッ素原子を含むオキシムエステル系光重合開始剤と、エチレン性不飽和二重結合を有する重合性化合物と、アルカリ可溶性樹脂と、着色剤とを含む組成物であって、
有機顔料を含み、着色組成物の、波長400nm以上580nm未満の範囲における吸光度の最小値Aと、波長580nm以上750nm以下の範囲における吸光度の最小値Bとの比率A/Bが0.3~3であり、波長400nm以上750nm以下の範囲における吸光度の最小値Cと、波長1000nm以上1300nm以下の範囲における吸光度の最大値Dとの比率C/Dが5以上となる着色組成物である。
この着色組成物を用いることで、波長400~700nmの範囲における透過率の最大値が20%以下であり、波長850~1300nmのある特定の範囲の最小値が80%以上の分光特性を有する膜を好適に形成できる。
Aλ=-log(Tλ) ・・・(1)
Aλは、波長λにおける吸光度であり、Tλは、波長λにおける透過率である。
本発明において、吸光度の値は、溶液の状態で測定した値であってもよく、着色組成物を用いて製膜した膜での値であってもよい。膜の状態で吸光度を測定する場合は、ガラス基板上にスピンコート等の方法により、乾燥後の膜厚が所定の膜厚となるように着色組成物を塗布し、100℃、120秒間ホットプレートで乾燥して調製した膜を用いることが好ましい。膜の膜厚は、膜を有する基板を、触針式表面形状測定器(ULVAC社製 DEKTAK150)を用いて測定することができる。
本発明の着色組成物を、ガラス基板上にスピンコート等の方法により、乾燥後の膜厚が前述した所定の膜厚となるように塗布し、100℃、120秒間ホットプレートで乾燥する。
膜の膜厚は、膜を有する乾燥後の基板を、触針式表面形状測定器(ULVAC社製 DEKTAK150)を用いて測定する。
この膜を有する乾燥後の基板を、紫外可視近赤外分光光度計(日立ハイテクノロジーズ社製 U-4100)の分光光度計を用いて、波長300~1300nmの範囲において透過率を測定する。
赤色顔料と、黄色顔料と、青色顔料と、紫色顔料とを上述のように組み合わせることで、波長400~700nmの範囲における透過率の最大値が20%以下であり、波長900~1300nmの範囲における最小値が80%以上の分光特性を有する膜を好適に形成できる。
第1の着色剤としては、上述したピロロピロール化合物が好ましい。
第2の着色剤としては、赤色顔料、黄色顔料、青色顔料、および、紫色顔料から選ばれる2種以上の顔料を含有することが好ましく、赤色顔料、黄色顔料、青色顔料、および、紫色顔料を含有することがより好ましい。好ましい具体例としては、赤色顔料としてのC.I.ピグメントレッド 254と、黄色顔料としてのC.I.ピグメントイエロー 139と、青色顔料としてのC.I.ピグメントブルー 15:6と、紫色顔料としてのC.I.ピグメントバイオレット 23とを含有することが好ましい。
第2の着色剤が、赤色顔料と、黄色顔料と、青色顔料と、紫色顔料とを組み合わせてなる場合、赤色顔料の、第2の着色剤全量に対する質量比が0.1~0.4であり、黄色顔料の、第2の着色剤全量に対する質量比が0.1~0.4であり、青色顔料の、第2の着色剤全量に対する質量比が0.20~0.60であり、紫色顔料の、第2の着色剤全量に対する質量比が0.01~0.30であることが好ましい。赤色顔料の、第2の着色剤全量に対する質量比が0.1~0.3であり、黄色顔料の、第2の着色剤全量に対する質量比が0.1~0.3であり、青色顔料の、第2の着色剤全量に対する質量比が0.3~0.5であり、紫色顔料の、第2の着色剤全量に対する質量比が0.05~0.25であることがより好ましい。
本発明の着色組成物において、第1の着色剤の含有量は、着色組成物の全固形分の0~60質量%であることが好ましく、10~40質量%であることがより好ましい。第2の着色剤の含有量は、着色組成物の全固形分の10~60質量%であることが好ましく、30~50質量%であることがより好ましい。第1の着色剤と第2の着色剤の合計量は、着色組成物の全固形分に対して、1~80質量%であることが好ましく、20~70質量%であることがより好ましく、30~70質量%であることが更に好ましい。
本発明の着色組成物の好ましい態様(第2の態様)は、フッ素原子を含むオキシムエステル系光重合開始剤と、エチレン性不飽和二重結合を有する重合性化合物と、アルカリ可溶性樹脂と、着色剤とを含む組成物であって、更に、フッ素原子および硬化性官能基を有する硬化性化合物を含むことである。
このような着色組成物を用いることで、支持体との密着性に優れ、かつ、反射率の低い硬化膜を形成できる。
また、この態様においては、着色剤として黒色顔料を含むものを用いることが好ましい。第2の態様の着色組成物に黒色顔料を含有させることで、遮光膜としての性能に優れた硬化膜を形成しやすい。
第2の態様において、黒色顔料の含有量は、着色組成物中の全固形分に対して、20~80質量%が好ましく、30~70質量%がより好ましく、35~60質量%がさらに好ましい。
本発明の着色組成物の好ましい態様(第3の態様)は、フッ素原子を含むオキシムエステル系光重合開始剤と、エチレン性不飽和二重結合を有する重合性化合物と、アルカリ可溶性樹脂と、着色剤とを含む組成物であって、さらに、α-アミノケトン系光重合開始剤を含み、フッ素原子を含むオキシムエステル系光重合開始剤と、α-アミノケトン系光重合開始剤との質量比が、1:1.5~1:10であることである。
このような着色組成物を用いることで、支持体との密着性に優れつつ、更には、矩形性に優れた硬化膜を形成することができる。
本発明の着色組成物の好ましい態様(第4の態様)は、フッ素原子を含むオキシムエステル系光重合開始剤と、エチレン性不飽和二重結合を有する重合性化合物と、アルカリ可溶性樹脂と、着色剤とを含む組成物であって、さらに、含フッ素オキシムエステル系光重合開始剤以外のオキシム系光重合開始剤(他のオキシム系光重合開始剤)を含む態様である。このような着色組成物を用いることで、感度および密着性が良好で、更には、色抜けが抑制された硬化膜を製造しやすい。
本発明の着色組成物は、前述の成分を混合して調製できる。
着色組成物の調製に際しては、着色組成物を構成する各成分を一括配合してもよいし、各成分を溶剤に溶解・分散した後に逐次配合してもよい。また、配合する際の投入順序や作業条件は特に制約を受けない。例えば、全成分を同時に溶剤に溶解・分散して組成物を調製してもよいし、必要に応じては、各成分を適宜2つ以上の溶液・分散液として、使用時(塗布時)にこれらを混合して組成物として調製してもよい。
本発明の着色組成物は、異物の除去や欠陥の低減などの目的で、フィルタでろ過することが好ましい。フィルタとしては、従来からろ過用途等に用いられているものであれば特に限定されることなく用いることができる。例えば、ポリテトラフルオロエチレン(PTFE)等のフッ素樹脂、ナイロン-6、ナイロン-6,6等のポリアミド系樹脂、ポリエチレン、ポリプロピレン(PP)等のポリオレフィン樹脂(高密度、超高分子量を含む)等によるフィルタが挙げられる。これら素材の中でもポリプロピレン(高密度ポリプロピレンを含む)が好ましい。
フィルタの孔径は、0.01~7.0μm程度が適しており、好ましくは0.01~3.0μm程度、さらに好ましくは0.05~0.5μm程度である。この範囲とすることにより、後工程において均一及び平滑な着色組成物の調製を阻害する、微細な異物を確実に除去することが可能となる。
また、上述した範囲内で異なる孔径の第1のフィルタを組み合わせてもよい。ここでの孔径は、フィルタメーカーの公称値を参照することができる。市販のフィルタとしては、例えば、日本ポール株式会社(DFA4201NXEYなど)、アドバンテック東洋株式会社、日本インテグリス株式会社(旧日本マイクロリス株式会社)又は株式会社キッツマイクロフィルタ等が提供する各種フィルタの中から選択することができる。
第2のフィルタは、上述した第1のフィルタと同様の材料等で形成されたものを使用することができる。
例えば、第1のフィルタでのフィルタリングは、分散液のみで行い、他の成分を混合した後で、第2のフィルタリングを行ってもよい。
次に、本発明の硬化膜およびパターン形成方法について説明する。
また、着色パターン(着色画素)のサイズ(パターン幅)としては、2.5μm以下が好ましく、2.0μm以下がより好ましく、1.7μm以下が特に好ましい。下限は、例えば0.1μm以上とすることができ、0.2μm以上とすることもできる。
また、赤外光カットフィルタの表面上の少なくとも一部に、遮光膜を形成して、遮光膜付き赤外光カットフィルタとしてもよい。
遮光膜の厚みは特に制限されないが、0.2~25μmが好ましく、1.0~10μmがより好ましい。上記厚みは平均厚みであり、遮光膜の任意の5点以上の厚みを測定し、それらを算術平均した値である。
遮光膜の反射率は、10%以下が好ましく、8%以下がより好ましく、6%以下がさらに好ましく、4%以下が特に好ましい。なお、遮光膜の反射率は、遮光膜に、入射角度5°で400~700nmの光を入射し、その反射率を日立ハイテクノロジー製分光器UV4100(商品名)により測定した値である。
次に、本発明のパターン形成方法について説明する。
本発明のパターン形成方法は、本発明の着色組成物を用いて支持体上に着色組成物層を形成する工程と、この着色組成物をパターン状に露光する工程と、この着色組成物の未露光部を現像除去して着色パターンを形成する工程とを経て製造することができる。さらに、必要に応じて、着色組成物層をベークする工程(プリベーク工程)、および、形成された着色パターンをベークする工程(ポストベーク工程)を設けてもよい。以下、各工程について詳細を述べる。
着色組成物層を形成する工程では、本発明の着色組成物を用いて、支持体上に着色組成物層を形成する。
また、基板上にCCD(電荷結合素子)やCMOS(相補性金属酸化膜半導体)等の固体撮像素子(受光素子)が設けられた固体撮像素子用基板を用いることができる。
加熱時間は、10秒~300秒が好ましく、40~250秒がより好ましく、80~220秒がさらに好ましい。加熱は、ホットプレート、オーブン等で行うことができる。
次に、支持体上に形成した着色組成物層を、パターン状に露光する(露光工程)。例えば、支持体上に形成した着色組成物層に対し、ステッパー等の露光装置を用いて、所定のマスクパターンを有するマスクを介して露光することで、パターン露光することができる。これにより、露光部分を硬化することができる。
露光に際して用いることができる放射線(光)としては、g線、i線等の紫外線が好ましく(特に好ましくはi線)用いられる。照射量(露光量)は、例えば、30~1500mJ/cm2が好ましく、50~1000mJ/cm2がより好ましく、50~500mJ/cm2が最も好ましい。低エネルギーでの製造と、安定製造性の両立の観点で上記範囲が好ましい。
露光時における酸素濃度については適宜選択することができ、例えば酸素濃度が19体積%以下の低酸素雰囲気下(例えば、15体積%、5体積%、実質的に無酸素)で露光してもよく、酸素濃度が21体積%を超える高酸素雰囲気下(例えば、22体積%、30体積%、50体積%)で露光してもよい。また、露光エネルギーの照度は適宜設定することが可能であり、通常1000W/m2~100000W/m2(例えば、5000W/m2、15000W/m2、35000W/m2)の範囲から選択することができる。酸素濃度と露光照度は適宜条件を組み合わせてよく、例えば、酸素濃度10体積%で照度10000W/m2、酸素濃度25体積%で照度25000W/m2などとすることができる。
次に、未露光部を現像除去して着色パターンを形成する。未露光部の現像除去は、現像液を用いて行うことができる。これにより、露光工程における未露光部の着色組成物層が現像液に溶出し、光硬化した部分だけが残る。
現像液としては、下地の固体撮像素子や回路などにダメージを起さない、有機アルカリ現像液が望ましい。
現像液の温度は、例えば、20~30℃が好ましい。現像時間は、20~180秒が好ましい。
また、現像液には無機アルカリを用いてもよい。無機アルカリとしては、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸水素ナトリウム、硅酸ナトリウム、メタ硅酸ナトリウムなどが好ましい。
また、現像液には、界面活性剤を用いてもよい。界面活性剤の例としては、上述した着色組成物で説明した界面活性剤が挙げられ、ノニオン系界面活性剤が好ましい。
なお、このようなアルカリ性水溶液からなる現像液を使用した場合には、一般に現像後純水で洗浄(リンス)することが好ましい。
ポストベークは、硬化を促進するための現像後の加熱処理であり、加熱温度は、例えば100~240℃が好ましい。また、画像表示装置の発光光源として有機エレクトロルミネッセンス(有機EL)素子を用いた場合や、イメージセンサーの光電変換膜を有機素材で構成した場合は、50~120℃(より好ましくは80~100℃、さらに好ましくは80~90℃)で加熱処理(ポストベーク)を行うことが好ましい。
ポストベーク処理は、現像後の膜を、上記条件になるようにホットプレートやコンベクションオーブン(熱風循環式乾燥機)、高周波加熱機等の加熱手段を用いて、連続式あるいはバッチ式で行うことができる。
また、上述した現像工程前の露光で用いられる光の波長と、現像工程後の露光で用いられる光の波長の差は、200nm以下であることが好ましく、100~150nm以下であることがより好ましい。
現像工程前および現像工程後の2段階で着色組成物層を露光することにより、最初の露光で着色組成物を適度に硬化させることができ、次の露光で着色組成物全体をほぼ硬化させることができる。結果として、210℃程度のポストベークのない低温条件でも、着色組成物の硬化性を向上させることができ、カラーフィルタの耐溶剤性を良好にすることができる。また、他色との混色を抑制することもできる。
また、現像工程前の露光での重合性化合物の反応率は、30~60%であることが好ましい。このような反応率にすることにより重合性化合物を適度に硬化させた状態にすることができる。ここで、重合性化合物を有する化合物の反応率とは、重合性化合物が有する全不飽和二重結合中の反応した不飽和二重結合割合をいう。
また、現像工程後の露光での重合性化合物の反応率は、60~90%であることが好ましい。このような反応率にすることにより、露光後の着色組成物層の硬化状態をより良好にすることができる。
本発明の固体撮像素子は、上述した本発明の硬化膜(カラーフィルタ、遮光膜など)を備える。本発明の固体撮像素子の構成としては、本発明の硬化膜を備え、固体撮像素子として機能する構成であれば特に限定はないが、例えば、以下のような構成が挙げられる。
本発明の硬化膜(カラーフィルタ、遮光膜など)は、液晶表示装置や有機エレクトロルミネッセンス表示装置などの、画像表示装置に用いることができる。
また、本発明におけるカラーフィルタは、明るく高精細なCOA(Color-filter On Array)方式にも供することが可能である。COA方式の液晶表示装置にあっては、カラーフィルタに対する要求特性は、前述のような通常の要求特性に加えて、層間絶縁膜に対する要求特性、すなわち低誘電率および剥離液耐性が必要とされることがある。本発明のカラーフィルタは、耐光性などに優れるので、解像度が高く長期耐久性に優れたCOA方式の液晶表示装置を提供することができる。なお、低誘電率の要求特性を満足するためには、カラーフィルタ層の上に樹脂被膜を設けてもよい。
これらの画像表示方式については、例えば、「EL、PDP、LCDディスプレイ-技術と市場の最新動向-(東レリサーチセンター調査研究部門 2001年発行)」の43ページなどに記載されている。
バックライトに関しては、SID meeting Digest 1380(2005)(A.Konno et.al)や、月刊ディスプレイ 2005年12月号の18~24ページ(島 康裕)、同25~30ページ(八木隆明)などに記載されている。
本発明の赤外線センサは、本発明の硬化膜を備える。本発明の赤外線センサの構成としては、本発明の硬化膜を備えた構成であり、固体撮像素子として機能する構成であれば特に限定はないが、例えば、以下のような構成が挙げられる。
更に、デバイス保護層上であって本発明の硬化膜の下(基板に近い側)に集光手段(例えば、マイクロレンズ等。以下同じ)を有してもよいし、本発明の硬化膜上に集光手段を有してもよい。
赤外線センサ100は、固体撮像素子110を有する。
固体撮像素子110上に設けられている撮像領域は、近赤外線吸収フィルタ111とカラーフィルタ112とを有する。
近赤外線吸収フィルタ111は、可視光領域の光(例えば、波長400~700nmの光)を透過し、赤外領域の光(例えば、波長800~1300nmの光、好ましくは波長900~1200nmの光、更に好ましくは波長900~1000nmの光)を遮蔽するもので構成されている。
カラーフィルタ112は、可視光領域における特定波長の光を透過及び吸収する画素が形成されたカラーフィルタであって、例えば、赤色、緑色、青色の画素が形成されたカラーフィルタなどが用いられる。カラーフィルタは、本発明の硬化膜を用いて形成することができる。
近赤外線透過フィルタ113と固体撮像素子110との間には、近赤外線吸収フィルタ111が形成されていない領域114が設けられている。領域114には、赤外線透過フィルタ113を透過した波長の光が透過可能な樹脂層(例えば、透明樹脂層など)が配置されている。
近赤外線透過フィルタ113は、可視光遮蔽性を有し、かつ、特定波長の赤外線を透過させるフィルタである。近赤外線透過フィルタ113は、上述した分光を有する本発明の硬化膜で構成されている。
カラーフィルタ112および近赤外線透過フィルタ113の入射光hν側には、マイクロレンズ115が配置されている。マイクロレンズ115を覆うように平坦化層116が形成されている。
図2に示す実施形態では、領域114に樹脂層が配置されているが、領域114に赤外線透過フィルタ113を形成してもよい。すなわち、固体撮像素子110上に、赤外線透過フィルタ113を形成してもよい。
また、図2に示す実施形態では、カラーフィルタ112の膜厚と、赤外線透過フィルタ113の膜厚が同一であるが、両者の膜厚は異なっていてもよい。
また、図2に示す実施形態では、カラーフィルタ112が、近赤外線吸収フィルタ111よりも入射光hν側に設けられているが、近赤外線吸収フィルタ111と、カラーフィルタ112との順序を入れ替えて、近赤外線吸収フィルタ111を、カラーフィルタ112よりも入射光hν側に設けてもよい。
また、図2に示す実施形態では、近赤外線吸収フィルタ111とカラーフィルタ112は隣接して積層しているが、両フィルタは必ずしも隣接している必要はなく、間に他の層が設けられていても良い。
この赤外線センサによれば、画像情報を同時に取り込むことができるため、動きを検知する対象を認識したモーションセンシングなどが可能である。更には、距離情報を取得できるため、3次元情報を含んだ画像の撮影等も可能である。
膜の光学濃度は、波長365nmの光を入射し、その透過率を日立ハイテクノロジー製分光器UV4100(商品名)により測定した。
(重量平均分子量の測定)
以下の条件で重量平均分子量(Mw)を測定した。
カラムの種類:TSKgel Super AWM―H(東ソー(株)製、6.0mmID(内径)×15.0cm)
展開溶媒:10mmol/L リチウムブロミドNMP(N-メチルピロリジノン)溶液カラム温度:25℃流量(サンプル注入量):0.6mL/min装置名:HLC-8220(東ソー(株)製)
検量線ベース樹脂:ポリスチレン樹脂
下記組成の混合液を、0.3mm径のジルコニアビーズを使用して、ビーズミル(減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製))で、2時間、混合して、顔料分散液1~4を調製した。
・C.I.ピグメントグリーン58 ・・・3.5部
・塩基性樹脂1 ・・・2.1部
・有機溶剤1 ・・・22.75部
・C.I.ピグメントグリーン36 ・・・3.9部
・C.I.ピグメントイエロー150 ・・・0.6部
・C.I.ピグメントイエロー185 ・・・0.2部
・C.I.ピグメントイエロー138スルホン化物 ・・・0.5部
・両性樹脂1 ・・・1.6部
・樹脂A1 ・・・1.6部
・有機溶剤1 ・・・25.0部
・C.I.ピグメントイエロー150 ・・・1.6部
・酸性樹脂1 ・・・1.2部
・有機溶剤1 ・・・9.2部
・有機溶剤2 ・・・1.6部
・C.I.ピグメントイエロー139 ・・・2.1部
・樹脂A1 ・・・0.4部
・両性樹脂2 ・・・0.4部
・有機溶剤1 ・・・13.5部
特開2012-173356号公報の段落0304~0307に記載の方法で合成した。樹脂A1は、アルカリ可溶性樹脂でもある。
・塩基性樹脂1:(製品名Diperbyk162、ビックケミー製、アミン価13mgKOH/g)
・酸性樹脂1:(製品名Diperbyk111、ビックケミー製、酸価129mgKOH/g)
・両性樹脂1:下記構造(各繰り返し単位に併記した数値は、各繰り返し単位の含有量〔質量比〕を表す。側鎖の繰り返し部位に併記される数値は、繰り返し部位の繰り返し数を示す。酸価32.3mgKOH/g、アミン価45.0mgKOH/g、Mw=9000)
・両性樹脂2:下記構造(各繰り返し単位に併記した数値は、各繰り返し単位の含有量〔質量比〕を表す。側鎖の繰り返し部位に併記される数値は、繰り返し部位の繰り返し数を示す。酸価44.3mgKOH/g、アミン価40.0mgKOH/g、Mw=10400)
・有機溶剤1:プロピレングリコールメチルエーテルアセテート
・有機溶剤2:シクロヘキサノン
下記の表1に示す原料を、表1に示す割合(質量部)で混合および攪拌した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)社製、DFA4201NXEY)でろ過して、着色組成物を調製した。
得られた着色組成物を、あらかじめヘキサメチルジシラザンを噴霧した200mm(8インチ)シリコンウエハ(基板)に塗布し、塗布膜を形成した。そして、この塗布膜の乾燥膜厚が2.0μmになるように、90℃のホットプレートを用いて150秒間加熱処理(プリベーク)を行なった。
次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して、365nmの波長で、パターンが3.0μm四方のIslandパターンマスクを通して露光した。露光条件は、50~1200mJ/cm2の種々の露光量、照度10000W、大気条件(酸素濃度21体積%)とした。
その後、露光された塗布膜が形成されているシリコンウエハをスピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2000(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像した。このようにして、下塗り層付シリコンウエハに、着色パターン(3.0μm角の正方形ピクセルパターン)を形成した。
着色パターンが形成されたシリコンウエハを、真空チャック方式で水平回転テーブルに固定し、このシリコンウエハを回転装置によって回転数50rpmで回転させつつ、その回転中心の上方より純水を噴出ノズルからシャワー状に供給してリンス処理した。その後、このシリコンウエハをスプレー乾燥した。
得られたシリコンウエハに、UVキュア装置UMA-802-HC552FFAL(ウシオ電機株式会社製)を使用して露光量10Jの紫外光を照射した。
以上により、カラーフィルタ(着色パターン付シリコンウエハ)を得た。
上記着色パターン(3.0μm角の正方形ピクセルパターン)を解像する最適露光量(mJ)を決定し、これを感度とした。
(密着感度の評価)
上記感度を評価したシリコンウエハを光学顕微鏡で観察し、3.0μm角の正方形ピクセルパターンが全く剥れない最低露光量(mJ)を決定し、これを密着感度とした。
(矩形性の評価)
上記感度を評価したシリコンウエハの断面を走査型電子顕微鏡で観察し、最適露光量で形成した3.0μm角の正方形ピクセルパターン側壁の、シリコンウエハ表面に対する角度を測定し、以下の評価基準で評価した。 「3」:側壁の角度が80°以上~100°未満
「2」:側壁の角度が70°以上80°未満、もしくは100°以上110°未満
「1」:側壁の角度が70°未満、もしくは110°以上
(経時安定性の評価)
得られた着色組成物を室温(25℃)で1ヶ月間保管した。室温1ヶ月間保管前後の着色組成物を用いて、上記カラーフィルタを作製した。露光量は、室温1ヶ月間保管前における最適露光量とした。作製したカラーフィルタのピクセル線幅の差を測定し、以下の評価基準で経時安定性を評価した。
「3」:室温1ヶ月間保管前後でピクセル線幅の変動は0.10μm未満
「2」:室温1ヶ月間保管前後でピクセル線幅の変動は0.10μm以上0.15μm未満
「1」:室温1ヶ月間保管前後でピクセル線幅の変動は0.15μm以上
一方、比較例は、実施例に比べて密着感度が大きく、密着性の良い硬化膜を形成し難かった。
・アルカリ可溶性樹脂1:下記構造(各繰り返し単位に併記した数値は、各繰り返し単位の含有量〔質量比〕を表す。Mw=11,000)
・アルカリ可溶性樹脂2:下記構造(各繰り返し単位に併記した数値は、各繰り返し単位の含有量〔質量比〕を表す。Mw=14,000)
・重合性化合物1:下記構造(左側化合物と右側化合物とのモル比が7:3の混合物)
・重合性化合物3:下記構造
・重合性化合物4: 東亞合成株式会社製のカルボン酸含有多官能アクリレート(アロニックスM-520)
・重合性化合物5:下記構造
・エポキシ基を有する化合物(エポキシ化合物):EHPE3150、(株)ダイセル製
・光重合開始剤A1~A3、2、2B、3、3B、4:下記構造
・重合禁止剤:p-メトキシフェノール
・シランカップリング剤:下記構造
・界面活性剤:下記混合物(Mw=14000)
・有機溶剤2:シクロヘキサノン
実施例1-1の顔料分散液1、2、3、4の代わりに、以下の試験例3の顔料分散液B-1またはB-2を使用しても良好な結果が得られた。
[チタンブラックA-1の作製]
BET比表面積110m2/gの酸化チタン(「TTO-51N」商品名:石原産業製)を120g、BET表面積300m2/gのシリカ粒子(「AEROSIL(登録商標)300」、エボニック製)を25g、及び、分散剤(「Disperbyk190」(商品名:ビックケミー社製)を100g、イオン電気交換水を71g秤量し、KURABO製MAZERSTAR KK-400Wを使用して、公転回転数1360rpm、自転回転数1047rpmにて30分間処理することにより、均一な混合物水溶液を得た。この混合物水溶液を石英容器に充填し、小型ロータリーキルン(株式会社モトヤマ製)を用いて酸素雰囲気中で920℃に加熱した後、窒素で雰囲気を置換し、同温度でアンモニアガスを100mL/minで5時間流すことにより窒化還元処理した。終了後、回収した粉末を乳鉢で粉砕した。このようにして、粉末状でありSi原子を含む、比表面積85m2/gのチタンブラック(A-1)〔チタンブラック粒子及びSi原子を含む被分散体〕を得た。
下記組成1に示す成分を、攪拌機(IKA社製EUROSTAR)を使用して、15分間混合し、分散物aを得た。
得られた分散物aを、寿工業(株)製のウルトラアペックスミルUAM015を使用して、下記分散条件にて分散処理した。次いで、これを孔径0.45μmのナイロン製フィルタ(日本ポール(株)社製、DFA4201NXEY)を用いてろ過した。このようにして、チタンブラック分散物(以下、TB分散液1と表記する。)を得た。
・上記のようにして得られたチタンブラック(A-1)・・・25質量部
・樹脂1のプロピレングリコールモノメチルエーテルアセテート(PGMEA)30質量%溶液・・・25質量部
・PGMEA・・・50質量部
・樹脂1:下記構造。特開2013-249417号公報の記載を参照して合成した。なお、樹脂1の式中、xは43質量%、yは49質量%、zは8質量%であった。また、樹脂1の重量平均分子量は30000であり、酸価は60mgKOH/gであり、グラフト鎖の原子数(水素原子を除く)は117であった。
・ビーズ径:直径0.05mm
・ビーズ充填率:75体積%
・ミル周速:8m/sec
・分散処理する混合液量:500g
・循環流量(ポンプ供給量):13kg/hour
・処理液温度:25~30℃
・冷却水:水道水
・ビーズミル環状通路内容積:0.15L
・パス回数:90パス
下記の表2に示す原料を、下記組成に示す割合で混合した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)社製、DFA4201NXEY)を用いてろ過して、着色組成物を調製した。
以下のメガファックRS-72-Kには、フッ素原子を有するアルキレン基、及び、アクリロイルオキシ基が含まれていた。より具体的には、メガファックRS-72-Kは、以下のように、式(B1-1)で表される繰り返し単位及び式(B3-1)で表される繰り返し単位が含まれ、重量平均分子量は7400であった。なお、式(B3-1)中、Xは、パーフルオロメチレン基またはパーフルオロエチレン基を表し、rは繰り返し単位数を表す。
・TB分散液1・・・63.9質量部
・アルカリ可溶性樹脂(下記特定樹脂2または3)・・・10.24質量部
・光重合開始剤・・・1.81質量部
・重合性化合物・・・6.29質量部
・界面活性剤・・・0.02質量部
・溶剤(シクロヘキサノン)・・・4.66質量部
・硬化性化合物(メガファックRS-72-K(DIC(株)製、固形分30%、溶剤:PGMEA)):10.65質量部
・シランカップリング剤(KBM-4803(信越化学工業(株)製):0.36質量部
・重合性化合物1、4、光重合開始剤および界面活性剤は、試験例1の着色組成物と同じ材料を用いた。
・重合性化合物6:下記構造
・特定樹脂2:下記構造。特開2010-106268号公報の段落0338~0340の製造方法に従い、合成した。なお、以下の式中、xは90質量%、zは10質量%であった。また、特定樹脂2の重量平均分子量は40000であり、酸価は100mgKOH/gであり、グラフト鎖の原子数(水素原子を除く)は117であった。
・特定樹脂3:下記構造(Mw=24000)
上記で作製した着色組成物を200mm(8インチ)ガラス基板EagleXG(コーニング社製)にスピンコート法により塗布した後、80℃のホットプレートを用いて120秒間加熱処理(プリベーク)した。次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して、線形300μm(幅300μm、長さ4mm)を有するマスクを介して、200mJ/cm2の露光量で露光した。次いで、AD-1200(ミカサ(株)製)を使用して、和光純薬社製界面活性剤NCW-101(ノニオン系界面活性剤)を0.3質量%及びテトラメチルアンモニウムヒドロキシド(TMAH)を0.01質量%含む水溶液により、パドルで40秒現像した。次いで、クリーンオーブンCLH-21CDH(光洋サーモ(株)製)を用いて150℃で1時間加熱処理(ポストベーク)した。このようにして、膜厚が2μmの遮光膜(幅300μm、長さ4mm)を形成した。
形成した遮光膜に、入射角度5°で400~700nmの光を入射し、その反射率を日立ハイテクノロジー製分光器UV4100(商品名)により測定した。
(欠け評価)
形成した線形300μm(幅300μm、長さ4mm)の遮光膜に、CT-18(ニチバン(株)製)を強く圧着させ、テープの端を45度の角度で一気に引き剥がした。光学顕微鏡MT-3600LW(FLOVEL社製)を使用して、テープ剥離(テーププル)後の遮光膜の状態とテーププル前の遮光膜の状態とを比較し、以下の評価基準で評価した。「2」以上が許容範囲である。
「3」:ガラス基板上に300μm線形遮光膜のパターンエッジの破壊が確認されない
「2」:ガラス基板上に300μm線形遮光膜のパターンエッジの破壊が5箇所以下である
「1」:ガラス基板上に300μm線形遮光膜のパターンエッジの破壊が6箇所以上である
(直線性の評価)
光学顕微鏡MT‐3600LW(FLOVEL社製)を使用して、形成した線形300μmの遮光膜の線幅を255点測定した。測定した線幅の3σを算出し、以下の評価基準で評価した。「2」以上が許容範囲である。
「3」:線形300μmの線幅の3σが1μm未満
「2」:線形300μmの線幅の3σが1μm以上、5μm未満
「1」:線形300μmの線幅の3σが5μm以上
(密着性の評価)
得られた着色組成物を、ガラスウエハ上に、乾燥後の膜厚が2.0μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)した。
次いで、100μm角の正方形ピクセルパターンが形成されるフォトマスクを用いて、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して、露光量を50~750mJ/cm2まで50mJ/cm2ずつ上昇させて露光した。上記正方形ピクセルパターンを解像させたガラスウエハを光学顕微鏡で観察し、以下の評価基準で評価した。
「3」:露光量50mJ/cm2でパターン剥れなし
「2」:露光量50mJ/cm2でパターン剥れあり、露光量100mJ/cm2でパターン剥れなし
「1」:露光量100mJ/cm2でパターン剥れあり
(矩形性の評価)
上記密着性を評価したガラスウエハの断面を走査型電子顕微鏡で観察した。露光量200mJ/cm2の場合における上記正方形ピクセルパターン側壁のガラスウエハ表面に対する角度を測定し、以下の評価基準で評価した。
「3」:側壁の角度が80°以上~100°未満
「2」:側壁の角度が70°以上80°未満、もしくは100°以上110°未満
「1」:側壁の角度が70°未満、もしくは110°以上
一方、比較例は、密着性が劣っていた。
〔顔料分散液B-1の調製〕
下記組成の混合液を、0.3mm径のジルコニアビーズを使用して、ビーズミル(減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製))で、3時間、混合、分散して、顔料分散液B-1を調製した。
(組成)
・赤色顔料(C.I.ピグメントレッド254)及び黄色顔料(C.I.ピグメントイエロー139)からなる混合顔料(C.I.ピグメントレッド254:C.I.ピグメントイエロー139=4:1(質量比))・・・11.8質量部
・樹脂1(分散剤)(BYK社製 BYK-111)・・・9.1質量部
・プロピレングリコールメチルエーテルアセテート・・・79.1質量部
下記組成の混合液を、0.3mm径のジルコニアビーズを使用して、ビーズミル(減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製))で、3時間、混合、分散して、顔料分散液B-2を調製した。
(組成)
・青色顔料(C.I.ピグメントブルー15:6)及び紫色顔料(C.I.ピグメントバイオレット23)からなる混合顔料(C.I.ピグメントブルー15:6:C.I.ピグメントバイオレット23=9:4(質量比))・・・12.6質量部
・樹脂1(分散剤)(BYK社製 BYK-111)・・・2.0質量部
・樹脂2(分散剤)・・・3.3質量部
・シクロヘキサノン・・・31.2質量部
・プロピレングリコールメチルエーテルアセテート・・・50質量部
下記の表3に示す原料を、表3に示す割合(質量部)で混合および攪拌した後、孔径0.45μmのナイロン製フィルタ(日本ポール(株)社製、DFA4201NXEY)でろ過して、着色組成物を調製した。
得られた着色組成物をガラス基板上に、ポストベーク後の膜厚が1.0μmとなるようにスピンコートにより塗布した。次いで、100℃、120秒間ホットプレートで乾燥し、その後、さらに、200℃のホットプレートを用いて300秒間加熱処理(ポストベーク)を行った。このようにして、ガラス基板に着色層を形成した。
着色層を形成したガラス基板について、紫外可視近赤外分光光度計U-4100(日立ハイテク製)を用いて吸光度を測定した。具体的には、波長400nm以上580nm未満の範囲における吸光度の最小値Aと、波長580nm以上750nm以下の範囲における吸光度の最小値Bと、波長400nm以上750nm以下の範囲における吸光度の最小値Cと、波長1000nm以上1300nm以下の範囲における吸光度の最大値Dとをそれぞれ測定した。
得られた着色組成物を、シリコンウエハ上に、乾燥後の膜厚が2.0μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)した。このようにして、シリコンウエハに塗布膜を形成した。
次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して、3.0μm角の正方形ピクセルパターンが形成されるフォトマスクを用いて、最適露光量で露光した。最適露光量は、露光量を50~750mJ/cm2まで50mJ/cm2ずつ上昇させて塗布膜を露光し、上記正方形ピクセルパターンを解像する露光量に基づいて決定した。
その後、露光された塗布膜が形成されているシリコンウエハを、スピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2060(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像した。このようにして、シリコンウエハ上に着色パターンを形成した。
着色パターンが形成されたシリコンウエハを純水でリンス処理し、その後スピン乾燥した。
さらに、200℃のホットプレートを用いて300秒間加熱処理(ポストベーク)し、カラーフィルタ(着色パターン付シリコンウエハ)を得た。
得られた着色組成物を、シリコンウエハ上に、乾燥後の膜厚が2.0μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)した。
次いで、3.0μm角の正方形ピクセルパターンが形成されるフォトマスクを用いて、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して、露光量を50~750mJ/cm2まで50mJ/cm2ずつ上昇させて露光した。上記正方形ピクセルパターンを解像する最適露光量(mJ)を決定し、これを感度とした。
(密着感度の評価)
上記感度を評価したシリコンウエハを光学顕微鏡で観察し、最適露光量で形成した3.0μm角の正方形ピクセルパターンが全く剥れない最低露光量(mJ)を決定し、これを密着感度とした。
(矩形性の評価)
上記感度を評価したシリコンウエハの断面を走査型電子顕微鏡で観察し、最適露光量で形成した3.0μm角の正方形ピクセルパターン側壁の、シリコンウエハ表面に対する角度を測定し、以下の評価基準で評価した。
「3」:側壁の角度が80°以上~100°未満
「2」:側壁の角度が70°以上80°未満、もしくは100°以上110°未満
「1」:側壁の角度が70°未満、もしくは110°以上
一方、比較例は、実施例に比べて密着感度が大きく、密着性の良い硬化膜を形成し難かった。
(Green顔料分散液の調製)
C.I.ピグメントグリーン58 7.55質量部と、C.I.ピグメントイエロー185 1.89質量部と、顔料誘導体A 0.94質量部と、樹脂(分散剤A) 3.7質量部と、PGMEA 65.7質量部とからなる混合液を、ビーズミルにより15時間混合・分散して、Green顔料分散液を調製した。
・顔料誘導体A:以下に示す構造
・分散剤A:以下に示す構造(各繰り返し単位に併記した数値は、各繰り返し単位の含有量〔質量比〕を表す。側鎖の繰り返し部位に併記される数値は、繰り返し部位の繰り返し数を示す。酸価=50mgKOH/g、Mw=24000)
上記のGreen顔料分散液を用い、下記表4に記載の組成比(質量部)となるように各原料を混合、撹拌してGreen着色組成物を調製した。
200mm(8inch)シリコンウエハをオーブンにて、200℃で30分加熱処理した。次いで、このシリコンウエハ上に、CT-4000L(富士フイルムエレクトロニクスマテリアルズ(株)製)をポストベーク後の膜厚が0.1μmになるように塗布し、更に220℃のホットプレートで5分間加熱乾燥させて、下塗り層を形成した。このようにして、下塗り層付シリコンウエハを得た。
各着色組成物を、下塗り層付シリコンウエハの下塗り層上に塗布し、着色組成物層(塗布膜)を形成した。そして、この塗布膜を、乾燥膜厚が0.5μmになるように、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)した。
次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して、365nmの波長で、パターンが1.1μm四方のBayerパターンマスクを通して露光した。
その後、露光された塗布膜が形成されているシリコンウエハを、スピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2060(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像した。このようにして、シリコンウエハに1.1μm×1.1μmのGreenの着色パターン(1.1μm□パターン)を形成した。
着色パターンが形成されたシリコンウエハを真空チャック方式で水平回転テーブルに固定し、このシリコンウエハを回転装置によって回転数50rpmで回転させつつ、その回転中心の上方より純水を噴出ノズルからシャワー状に供給してリンス処理し、その後、スピン乾燥した。次いで、230℃のホットプレートを用いて300秒間加熱処理(ポストベーク)した。このようにして、着色画素を有するシリコンウエハを得た。
着色画素を有するシリコンウエハを、線幅測定用電子顕微鏡S9260A(日立ハイテクノロジーズ社製)を用いて20000倍に拡大して観察し、パターンの寸法を測定した。以下の評価基準で、感度を評価した。
A:露光量100mJ/cm2でのパターン寸法とマスク寸法との差が、-0.020μmを超え0.020μm未満である。
B:露光量100mJ/cm2でのパターン寸法とマスク寸法との差が、-0.040μmを超え-0.020μm以下、または、0.020μm以上0.040μm未満である。
C:露光量100mJ/cm2でのパターン寸法とマスク寸法との差が、-0.060μmを超え-0.040μm以下、または、0.040μm以上0.060μm未満である。
D:露光量100mJ/cm2でのパターン寸法とマスク寸法との差が、-0.100μmを超え-0.060μm以下、または、0.060μm以上0.100μm未満である。
E:露光量100mJ/cm2でのパターン寸法とマスク寸法との差が、-0.100μm以下、または、0.100μm以上である。
着色画素を有するシリコンウエハを、光学式顕微鏡を用いて明視野50倍にて観察した。1.1μm□パターンの剥がれ個数を計測し、以下の基準で判断した。
A:1.1μm□パターンの剥がれ個数が0個
B:1.1μm□パターンの剥がれ個数が1~5個
C:1.1μm□パターンの剥がれ個数が6~10個
D:1.1μm□パターンの剥がれ個数が10個以上
E:1.1μm□パターンの全て剥がれた。
200mm(8inch)ガラスウエハをオーブンにて、200℃で30分加熱処理した。次いで、このガラスウエハ上に、CT-4000L(富士フイルムエレクトロニクスマテリアルズ(株)製)をポストベーク後の膜厚が0.1μmになるように塗布し、更に220℃のホットプレート上で5分間加熱乾燥させて下塗り層を形成した。このようにして、下塗り層付ガラスウエハを得た。
各着色組成物を、下塗り層付ガラスウエハの下塗り層上に塗布し、着色組成物層(塗布膜)を形成した。そして、この塗布膜の乾燥膜厚が0.5μmになるように、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)した。次いで、このガラスウエハの分光透過率(分光1)を、MCPD-3000(大塚電子(株)製)を用いて測定した。
次いで、i線ステッパー露光装置FPA-3000i5+(Canon(株)製)を使用して、365nmの波長で、マスクレス(オープンフレーム)の状態にて500mJ/cm2の露光量にて露光した。
その後、露光された塗布膜が形成されているガラスウエハを、スピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2060(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像した。このようにして、ガラスウエハに約2.0cm×2.0cmのGreenの着色パターンを形成した。
着色パターンが形成されたガラスウエハを、真空チャック方式で水平回転テーブルに固定し、このガラスウエハを回転装置によって回転数50rpmで回転させつつ、その回転中心の上方より純水を噴出ノズルからシャワー状に供給してリンス処理を行ない、その後、スピン乾燥した。次いで、分光1と同様にMCPD-3000を用いて、現像後のパターンの分光透過率(分光2)を測定した。
以下の評価基準で、色抜けを評価した。
A:波長450nmにおける分光1と分光2の透過率の差(ΔT%)が1.0%未満である。
B:波長450nmにおける分光1と分光2の透過率の差(ΔT%)が1.0%以上、2.5%未満である。
C:波長450nmにおける分光1と分光2の透過率の差(ΔT%)が2.5%以上、4.0%未満である。
D:波長450nmにおける分光1と分光2の透過率の差(ΔT%)が4.0%以上、5.5%未満である。
E:波長450nmにおける分光1と分光2の透過率の差(ΔT%)が5.5%以上である。
一方、比較例は、実施例に比べて密着性が劣っていた。
・Green顔料分散液:上記の方法で調製したGreen顔料分散液。
・光重合開始剤A1、2、2B:下記構造の化合物
・重合性化合物:NKエステルA-TMMT(ペンタエリスリトールテトラアクリレート、新中村化学(株)製)
・アルカリ可溶性バインダー:ACA230AA((株)ダイセル製)、Mw=14000、酸価=37mgKOH/g)
・重合禁止剤:p-メトキシフェノール
・エポキシ化合物:EHPE3150、(株)ダイセル製
・界面活性剤1:パイオニンD-6315(竹本油脂社製、ノニオン系界面活性剤)
・界面活性剤2:下記混合物(Mw=14000)の0.2質量PGMEA溶液
・溶剤:PGMEA
〔カラーフィルタの作製〕
8インチ(200mm)シリコンウエハ(基板)上に、透明有機膜層(CT-4000L:富士フイルムエレクトロニクスマテリアルズ社製)を、ポストベーク後の膜厚が0.1μmになるように形成した。
[CT-4000L形成条件]
・スピンコート
・プリベークなし
・ポストベーク(ホットプレート) 220℃×300秒
次いで、i線(波長365nm)ステッパー露光装置FPA-5510iZ(Canon(株)製)を使用して、パターンが3.0μm四方のIslandパターンマスクを通して、下記のパターン露光条件で露光した。
その後、露光された着色層が形成されているシリコンウエハをスピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2060(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像した。このようにして、シリコンウエハに着色パターンを形成した。
着色パターンが形成されたシリコンウエハを、真空チャック方式で水平回転テーブルに固定し、このシリコンウエハを回転装置によって回転数200rpmで回転させつつ、その回転中心の上方より純水を噴出ノズルからシャワー状に供給して30秒間リンス処理し、その後、スピン乾燥した。次いで、220℃のホットプレートを用いて300秒間加熱処理(ポストベーク)した。このようにして、カラーフィルタ画素部の幅が1.0μmのベイヤーパターンを形成し、カラーフィルタを得た。
(パターン露光条件)
パターン露光条件は以下のとおりである。
・照明条件:NA3/σ=0.57/0.40
・露光照度(W/m2):下表5参照
・露光エネルギー:30mJから10mJステップで露光振りを実施して、オプティマム露光エネルギー(Eopt)を検査した。なお、オプティマム露光エネルギーとは、マスク設計値を基板上で再現できる露光エネルギーの条件のことである。
・酸素濃度(体積%):下表5参照(21%が大気条件)
上記のカラーフィルタの作製は、東京エレクトロン社製のクリーントラックACT8を使用して行った。また、この装置は、装置室内の酸素濃度が制御できるように設定されていた。具体的には、酸素ガスおよび希釈ガスを投入するラインを備え、チャンバー内には、酸素濃度をモニタできる計測器が設定されていた。露光中の室内の酸素濃度を常時この計測器を用いて確認した。
パターニング後の線幅測定は、線幅測定用電子顕微鏡S9260A(日立ハイテクノロジーズ社製)により観察して行った。5点の画素測定寸法の平均値を線幅の設定値とした。
ベイヤーパターンを形成したシリコンウエハを、線幅測定用電子顕微鏡S9260A(日立ハイテクノロジーズ社製)を用いて20000倍に拡大して観察し、パターンの寸法を測定した。以下の評価基準で、感度を評価した。
A:Eoptが50mJ/cm2以上500mJ/cm2未満である。エネルギー量と安定製造性の観点から最適である。
B:Eoptが500mJ/cm2以上1000mJ/cm2未満である。評価「A」より多くのエネルギーが必要であるが、実用上は問題ない。
C:Eoptが1000mJ/cm2以上である。Eoptが大きく、実用性がやや劣る。
L:Eoptが50mJ/cm2未満である。尤度が小さく、安定製造性がやや劣る。
110:固体撮像素子
111:近赤外線吸収フィルタ
112:カラ-フィルタ
113:近赤外線透過フィルタ
114:領域
115:マイクロレンズ
116:平坦化層
200:硬化膜
201:基板
202:着色層
203:被覆層
Claims (19)
- フッ素原子を含むオキシムエステル系光重合開始剤と、
エチレン性不飽和二重結合を有する重合性化合物と、
アルカリ可溶性樹脂と、
着色剤と、
を含む着色感光性組成物であって、
前記着色感光性組成物を用いて、乾燥後の膜厚が2.0μmの膜を製膜した際に、前記膜の波長365nmにおける光学濃度が1.5以上である着色感光性組成物。 - 前記フッ素原子を含むオキシムエステル系光重合開始剤は、フッ素原子を有するアルキル基、および、フッ素原子を有するアルキル基を含む基から選ばれる少なくとも1種を有する、請求項1に記載の着色感光性組成物。
- さらに、有機顔料を含み、
前記着色感光性組成物の、波長400nm以上580nm未満の範囲における吸光度の最小値Aと、波長580nm以上750nm以下の範囲における吸光度の最小値Bとの比率A/Bが0.3~3であり、
波長400nm以上750nm以下の範囲における吸光度の最小値Cと、波長1000nm以上1300nm以下の範囲における吸光度の最大値Dとの比率C/Dが5以上である、請求項1~4のいずれか1項に記載の着色感光性組成物。 - さらに、フッ素原子および硬化性官能基を有する硬化性化合物を含む、請求項1~4のいずれか1項に記載の着色感光性組成物。
- さらに、黒色顔料を含む、請求項6に記載の着色感光性組成物。
- さらに、α-アミノケトン系光重合開始剤を含み、
前記フッ素原子を含むオキシムエステル系光重合開始剤と、前記α-アミノケトン系光重合開始剤との質量比が、1:1.5~1:10である、請求項1~7のいずれか1項に記載の着色感光性組成物。 - さらに、前記フッ素原子を含むオキシムエステル系光重合開始剤以外の、オキシム系光重合開始剤を含む、請求項1~8のいずれか1項に記載の着色感光性組成物。
- モノクロロベンゼンと、メチルtert-ブチルエーテルとの合計質量が、前記着色感光性組成物の全質量に対して2ppm以下である、請求項1~9のいずれか1項に記載の着色感光性組成物。
- i線露光用である、請求項1~10のいずれか1項に記載の着色感光性組成物。
- 請求項1~11のいずれか1項に記載の着色感光性組成物を用いた硬化膜。
- カラーフィルタまたは遮光膜である、請求項12に記載の硬化膜。
- 請求項1~11のいずれか1項に記載の着色感光性組成物を用いて支持体上に着色組成物層を形成する工程と、
前記着色組成物層をパターン状に露光する工程と、
前記着色組成物層の未露光部を現像除去して着色パターンを形成する工程を含むパターン形成方法。 - 前記露光をi線で行う、請求項14に記載のパターン形成方法。
- 赤外光カットフィルタと、
前記赤外光カットフィルタの表面上の少なくとも一部に配置された、請求項7に記載の着色感光性組成物を硬化して形成された遮光膜と、
を有する、遮光膜付き赤外光カットフィルタ。 - 請求項12に記載の硬化膜を有する固体撮像素子。
- 請求項12に記載の硬化膜を有する画像表示装置。
- 請求項12に記載の硬化膜を有する赤外線センサ。
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| KR1020237018710A KR102663421B1 (ko) | 2015-03-30 | 2016-02-25 | 착색 감광성 조성물 및 경화막 |
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