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WO2016027797A1 - Dispositif de mesure de matériau à l'aide d'imagerie fantôme - Google Patents

Dispositif de mesure de matériau à l'aide d'imagerie fantôme Download PDF

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Publication number
WO2016027797A1
WO2016027797A1 PCT/JP2015/073097 JP2015073097W WO2016027797A1 WO 2016027797 A1 WO2016027797 A1 WO 2016027797A1 JP 2015073097 W JP2015073097 W JP 2015073097W WO 2016027797 A1 WO2016027797 A1 WO 2016027797A1
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Prior art keywords
light
measured
polarization
pattern
irradiation
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English (en)
Japanese (ja)
Inventor
水谷　康弘
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University of Tokushima NUC
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University of Tokushima NUC
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties

Definitions

  • the present invention relates to a substance measuring apparatus using ghost imaging.
  • Ellipsometry is a method for measuring the thickness of a thin film using the polarization of light. Specifically, in ellipsometry, light emitted from a light source is incident on a measurement object through a polarizer, and the transmitted light or reflected light is received by a detector through the analyzer. Since the polarization state of transmitted light and reflected light changes from incident light depending on the physical property of the measurement object, the physical property of the measurement object can be measured by calculating the amount of change in the polarization state.
  • ellipsometry In the case of ellipsometry, incident light can be irradiated only to a narrow area limited to be measured. In other words, ellipsometry can only measure points. For this reason, in the case of a measurement object having a certain size, in order to measure the physical properties of the entire measurement object using ellipsometry, the entire measurement object must be scanned. For this reason, ellipsometry has a problem that it takes a long time to measure the entire measurement object even if the measurement time at each point can be shortened using PEM.
  • ghost imaging as a method for measuring the physical properties of a measurement object two-dimensionally.
  • ghost imaging illuminates an object (measurement target) multiple times with a spatially modulated light intensity distribution, detects scattered light from the object with a point detector, and then images from the intensity correlation between the illumination light and the detected light It is a technique to do.
  • Non-Patent Document 1 Non-Patent Document 1
  • Non-Patent Document 1 light emitted from a laser is illuminated on a diffuser plate, and circularly polarized light having a random light intensity distribution is generated using a polarizer and a wave plate.
  • the circularly polarized light is illuminated onto the measurement object, the reflected light is separated into P-polarized light and S-polarized light by a polarization beam splitter, and the light intensity of each polarized light is measured using a point detector.
  • the circularly polarized light (that is, the illumination light of the measurement object) is branched before illuminating the measurement object, and is acquired by the CCD camera.
  • Non-Patent Document 1 correlation calculation between circularly polarized light and reflected light obtained by a CCD camera is performed 100,000 times, and then the sum and difference of the intensity of each polarized light are calculated to obtain an image for each polarization (ghost image). Is reproduced. And it succeeded in identifying a stone and a metal in a ghost image using the stone and the metal embedded in the tree as a measuring object.
  • Non-Patent Document 1 if ghost imaging and polarization measurement can be combined, there is a possibility that the thickness of the thin film can be measured two-dimensionally. However, with the technique of Non-Patent Document 1, it is impossible to perform measurement using PEM, so it is difficult to measure the thickness of the thin film with high accuracy like ellipsometry. In addition, since the technique of Non-Patent Document 1 cannot measure the amplitude ratio ⁇ and the phase difference ⁇ , a ghost image of P-polarized light and S-polarized light can be formed. Cannot be grasped. Therefore, with the technique of Non-Patent Document 1, it is substantially difficult to measure the physical properties of the entire measurement object, such as ellipsometry.
  • an object of the present invention is to provide a substance measuring apparatus using ghost imaging capable of spatially measuring the structure, defects, optical characteristics, and the like inside an object to be measured.
  • a substance measuring apparatus using ghost imaging a light irradiation means for irradiating the object to be measured with irradiation light having a spatial intensity distribution, and light transmitted through the object to be measured or the object to be measured. Based on information on light detected by the detection means and information on irradiation light irradiated on the object to be measured, a property of the object to be measured is estimated.
  • a light source that emits light having a spatial intensity distribution, and periodically modulates the polarization state of the light emitted by the light source to form the irradiation light.
  • the light source has a function capable of emitting a plurality of pattern lights having different intensity distributions, and the calculation means includes the intensity distribution of the pattern lights and the pattern light. Is released
  • the polarization parameter of each part of the object to be measured is calculated based on the information on the information and the information on the intensity of the light detected by the detection means, and a ghost image of the object to be measured is formed based on the polarization parameter. It has a function.
  • the substance measuring apparatus using ghost imaging according to a second aspect of the present invention is the material measuring apparatus according to the first aspect, wherein the light source has a longer period during which one pattern light is emitted than a period in which the polarization of the irradiation light is modulated.
  • the substance measuring apparatus using ghost imaging according to the third invention is characterized in that, in the first or second invention, the plurality of pattern lights emitted from the light source are circulation patterns.
  • the substance measuring apparatus using ghost imaging according to a fourth aspect of the present invention is the first, second or third aspect, wherein the polarization adjusting unit converts the light emitted from the light source into linearly polarized light, and the polarized light.
  • a modulation unit that modulates the polarized light converted into linearly polarized light by the optical element into the irradiation light, and the detection means transmits light that is transmitted through the object to be measured or light that is reflected by the object to be measured. Is provided with a detector for converting the light into linearly polarized light.
  • a substance measuring apparatus using ghost imaging according to a fifth invention is characterized in that, in the fourth invention, the modulator is a photoelastic modulator.
  • the polarization parameter of each part of the measurement object can be obtained by the calculation means, a ghost image of the measurement object can be formed based on the polarization parameter. If such a ghost image is formed, it is possible to spatially grasp the structure, defects, optical characteristics, and the like inside the object to be measured based on the ghost image.
  • the second aspect of the present invention it is possible to grasp the fluctuation of the light transmitted through the object to be measured or the light reflected by the object to be measured when the polarization of each pattern fluctuates for one period. Then, since the direct current component in the signal detected by the detection means can be properly grasped, the polarization parameter can be appropriately calculated, and a ghost image can be formed with high accuracy.
  • the polarization parameter can be measured with high accuracy.
  • stable phase modulation can be realized, so that the polarization parameter can be measured stably and with high accuracy.
  • the phase difference angle can be measured with high accuracy, and the polarization can be changed at a high frequency, so that the measurement time can be shortened.
  • FIG. 6 is a diagram showing the results of Example 1.
  • FIG. 6 is a diagram showing the results of Example 2.
  • FIG. 6 is the figure which showed the result of Example 3.
  • FIG. 3 It is the figure which showed the result of Example 3.
  • the substance measuring apparatus using ghost imaging is an apparatus that can measure physical properties of a measurement target based on the polarization state of light irradiated on the measurement target, and relates to a spatial polarization state distribution. It is characterized in that information can be obtained.
  • the substance measuring apparatus using ghost imaging of the present invention is applied to, for example, imaging of a cell structure by a microscope, analysis of a fine structure, detection of a defect, measurement of a thin film thickness and a thin film optical property (for example, a refractive index). can do. It can also be used for inspection in semiconductor processes (nanoimprinting and shape measurement and defect detection in ordinary exposure methods) and detection of minute dust, and its application is not particularly limited.
  • the substance measuring apparatus 1 of this embodiment is demonstrated based on drawing. As shown in FIGS. 1 and 2, the substance measuring apparatus 1 according to the present embodiment includes a light irradiation means 10, a detection means 20, and a calculation means 30.
  • the measurement target M is disposed between the light irradiation means 10 and the detection means 20, and the measurement target M is irradiated from the light irradiation means 10 with the irradiation light SL.
  • the detecting means 20 detects the transmitted light TL.
  • a configuration may be employed in which the light to be measured M is irradiated with the irradiation light SL from the light irradiation means 10 and the detection means 20 detects the reflected light.
  • the method of detecting the transmitted light TL is suitable for an internal structure inspection or an internal defect inspection of a transparent plastic molded product or a lens.
  • the method of detecting the reflected light TL is suitable for nanoimprinting, surface inspection of semiconductor devices, and the like.
  • the light irradiation means 10 includes a light source 11, a polarizer 12, and a modulation unit 13.
  • the light source 11 is capable of emitting pattern light having a spatial light intensity distribution.
  • Pattern light having a spatial light intensity distribution means light that is not uniform in intensity and forms portions with different intensities when the pattern light is irradiated onto a screen or the like to form a two-dimensional image. ing.
  • the light source 11 has a function of switching and emitting a plurality of pattern lights having different light intensity distributions.
  • the plurality of pattern lights may have different light intensity distributions, and the light intensity distribution of each pattern light is not particularly limited.
  • the plurality of pattern lights those in which the light intensity distribution changes randomly when the plurality of pattern lights are switched and irradiated onto the screen or the like can be adopted.
  • a light source 11 for example, a liquid crystal projector, a DLP type projector, or the like can be used, but it is not particularly limited as long as it has the functions described above.
  • the calculation means 30 can shorten the time for forming the ghost image of the polarization parameter.
  • the number of pattern lights is large. However, when the number of pattern lights increases, it takes time to measure. However, if the cyclic pattern light is used, the number of pattern lights to be used can be reduced, so that the measurement time can be shortened.
  • the spatial resolution of the ghost image that is, the spatial resolution of the measurement location of the measurement target M
  • the polarizer 12 and the modulation unit 13 are arranged in this order from the light source 11 toward the measurement target M between the light source 11 and the measurement target M.
  • the polarizer 12 converts light emitted from the light source 11, that is, pattern light, into linearly polarized light.
  • the polarizer 12 is disposed so that the direction of the transmission axis is 45 ° with respect to the transmission axis of the photoelastic modulator 13.
  • the modulator 13 modulates the polarization state of the polarized light converted by the polarizer 12 to form the irradiation light SL that irradiates the measurement target M. Specifically, linearly polarized light is periodically changed from linearly polarized light, and the polarization state of the irradiation light SL is changed in the order of linearly polarized light, elliptically polarized light, circularly polarized light, elliptically polarized light, and linearly polarized light. It is.
  • the modulator 13 is not particularly limited as long as it has a function as described above. For example, a photoelastic modulator (PEM) can be used.
  • PEM photoelastic modulator
  • a photoelastic modulator is composed of a transparent and high-quality optical crystal such as quartz and a piezoelectric element. When a periodic voltage is applied to the piezoelectric element, the piezoelectric element expands and contracts and stress is applied to the optical crystal. This causes birefringence due to photoelasticity. In the photoelastic modulator, since birefringence can be controlled by the applied voltage, stable phase modulation can be realized, so that the polarization parameter can be measured stably and with high accuracy.
  • the measurement target M is irradiated with the irradiation light SL whose polarization state is modulated by the photoelastic modulator, the intensity of the measurement light is modulated at the modulation frequency, so that the phase difference angle ⁇ of the measurement target M is small.
  • the phase difference angle ⁇ can be accurately measured.
  • a photoelastic modulator can change polarization
  • the polarizer 12 may not be provided when the linear polarization degree of the light source 11 is good, but it is preferable to provide the polarizer 12 in that the reliability of the measurement value can be increased.
  • the detection means 20 includes a light detection unit 21 and an analyzer 22.
  • the light detection unit 21 includes a light detector 21a that detects the transmitted light TL that has passed through the measurement target M, and a lens 21b that collects the transmitted light TL and supplies it to the light detector 21a.
  • the light detector 21a detects the intensity of the transmitted light TL collected by the lens 21b. That is, the photodetector 21a is configured to measure the light intensity that is the sum of the intensities of the transmitted light TL transmitted through the measurement target M.
  • the photodetector 21a is not particularly limited as long as it can measure the intensity of light.
  • a photomultiplier tube or a photodiode can be used as the photodetector 21a.
  • the lens 21b is capable of condensing all the transmitted light TL transmitted through the measurement target M and supplying it to the photodetector 21a.
  • this lens 21b a known condensing lens can be used.
  • a part of the transmission light TL transmitted through the measurement target M Only the transmitted light TL may be condensed on the photodetector 21a.
  • the transmitted light TL in an appropriate range is condensed on the photodetector 21a in accordance with the purpose of measurement, such as a part where there is a high possibility that an important part of the measurement target M or a defect exists. What should I do?
  • an analyzer 22 is provided between the light detection unit 21 and the measurement target M.
  • the analyzer 22 converts the transmitted light TL transmitted through the measurement target M into linearly polarized light.
  • the analyzer 22 is arranged so that the direction of the transmission axis is parallel to the transmission axis of the polarizer 12. For example, when the direction of the transmission axis of the polarizer 12 is 45 ° with respect to the polarization axis of the photoelastic modulator 13, the analyzer 22 also has the direction of the transmission axis of the photoelastic modulator 13. It is arrange
  • calculation means 30 As shown in FIG. 2, the calculation means 30 is electrically connected to the light source 11 of the light irradiation means 10, the modulation section 13, and the light detection section 21 of the detection means 20, and various information is received from the light source 11 and the like. It comes to be supplied.
  • the light source 11 is provided with a control unit that controls pattern light emitted from the light source 11, and information on the pattern light emitted from the light source 11 is supplied from the control unit.
  • the pattern light information includes the light intensity distribution of each pattern light, the time when each pattern light is emitted (emission timing, emission period, etc.), the wavelength of light emitted from the light source 11, and the like. Also, information such as the modulation frequency and phase of the modulation unit is supplied from the modulation unit 13.
  • the light detection unit 21 supplies information such as the detected light intensity and measurement timing, and the detected light wavelength.
  • the computing unit 30 includes a polarization parameter calculation unit 31, a physical property estimation unit 32, a ghost image formation unit 33, and a storage unit 34, so that each unit processes information from the light source 11 and the like. It has become.
  • the storage unit 34 has a function of storing information processed by each unit, information necessary for processing, and the like.
  • the polarization parameter calculation unit 31 is based on the information on the pattern light emitted from the light source 11 and the information on the light (detection light) detected by the light detection unit 21 of the detection unit 20. It has a function of calculating the polarization parameter at each position.
  • the polarization parameter calculation unit 31 has a function of obtaining a cross-correlation between the pattern light and the detection light at each position and each time of the measurement target M.
  • the cross correlation result is subjected to a Fourier transform such as FFT, and the result obtained by the Fourier transform is used to calculate the phase difference angle ⁇ and the amplitude ratio ⁇ , which are polarization parameters.
  • the polarization parameter calculation unit 31 calculates a cross-correlation function between the pattern light and the detection light at each position and time of the measurement target M.
  • phase difference angle ⁇ tan -1 (-0.432I 1f /0.519I 2f )
  • Amplitude ratio ⁇ 1 / 2sin -1 ((I 1f /1.038I dc ) 2 + (I 2f /0.864I dc ) 2 )
  • the cross-correlation function may be calculated for the Fourier-transformed data after performing the Fourier transform on the pattern light and the detection light, respectively.
  • the calculation speed is improved as compared with the case where the Fourier transform is performed on the cross correlation function.
  • the control system is simplified.
  • the physical property estimation unit 32 has a function of calculating the characteristics of each part of the measurement target M based on the polarization parameters (phase difference angle ⁇ and amplitude ratio ⁇ ) calculated by the polarization parameter calculation unit 31. Specifically, the physical property estimation unit 32 calculates the characteristics of each part of the measurement target M using the information stored in the storage unit 34 and the polarization parameter.
  • a polarization parameter that changes due to the fine shape of the object to be measured is stored in the storage unit 34 in advance. Then, if the measured polarization parameter is processed as follows using the relationship between the fine shape stored in the storage unit 34 and the polarization parameter, a ghost image (2) of the fine shape of the measurement object. Dimensional images).
  • the ghost image forming unit 33 includes each polarization parameter (phase difference angle ⁇ and amplitude ratio ⁇ ) obtained by the polarization parameter calculation unit 31, an ellipso parameter ⁇ , and an object to be measured obtained by the physical property estimation unit 32. It has a function of making the characteristic of M a two-dimensional image as a ghost image. That is, since each polarization parameter and the like are associated with the position of the measurement target M, the two-dimensional configuration is such that each position of the measurement target M has a color and brightness corresponding to the value of the polarization parameter and the like at each position.
  • the ghost image forming unit 33 has a function of forming an image. Then, since the distribution of the polarization parameter and the like of the measurement object M can be visualized, the polarization parameter and the like of the measurement object M can be grasped spatially.
  • the substance measuring apparatus 1 of the present embodiment if a plurality of pattern lights having a spatial light intensity distribution are emitted from the light source 11 of the light irradiation means 10 to irradiate the measurement target M, A ghost image of the measurement target M can be formed.
  • the irradiation light SL applied to the measurement target M is obtained by periodically modulating the polarization of the plurality of pattern lights emitted from the light source 11, so that the polarization parameters of each part of the measurement target M are grasped. it can. Then, based on the polarization parameter, it is possible to form a ghost image that two-dimensionally displays the structure, defects, optical characteristics, and the like of each part of the measurement target M. Therefore, the measurement target is based on the ghost image.
  • the internal structure, defects, optical characteristics, etc. can be grasped spatially.
  • the light source 11 emits the plurality of pattern lights so that the period during which one pattern light is emitted is longer than the period of modulating the polarization of the irradiation light SL by the modulation unit 13 that switches and emits the plurality of pattern lights. It is desirable to be controlled to switch and release. In this case, any pattern light always changes in the polarization for one period while the pattern light is emitted, so that the fluctuation of the light intensity of the detection light when the one-period polarization fluctuates can be grasped by all the pattern lights. .
  • the direct current component I dc included in the signal detected by the detection means 20 can be grasped appropriately. Therefore, since the polarization parameter can be calculated using the light intensity signal from which the DC component has been removed, the polarization parameter can be calculated appropriately, so that a ghost image can be formed with high accuracy.
  • the sample (object to be measured) used in the numerical simulation is (1) a sample having a fixed phase difference angle ⁇ 30 degrees and having an amplitude ratio ⁇ in FIG. 3B, and (2) a phase difference angle ⁇ in FIG. , A sample with an amplitude ratio ⁇ fixed at 30 degrees, (3) a sample of the phase difference angle in FIG. 3A and the amplitude ratio ⁇ in FIG. 3B.
  • a ghost image having a phase difference angle ⁇ and an amplitude ratio ⁇ was created when a random pattern light was irradiated.
  • the sample (object to be measured) used in the numerical simulation is the sample (3) of Example 1 (the sample having the phase difference angle in FIG. 3A and the amplitude ratio ⁇ in FIG. 3B).
  • This sample was irradiated with pattern light of a random pattern, and the number of times of illumination (that is, the number of pattern lights) was changed to create a ghost image with a phase difference angle ⁇ and an amplitude ratio ⁇ .
  • the apparatus of the present invention was configured, and it was confirmed that the spatial parameters of the surface of the measurement object can be measured.
  • a gold (Au) plate and a silicon (Si) plate were used as objects to be measured, and the region surrounded by a dotted line (about 35 mm ⁇ 18 mm) in FIG. Detected. Then, based on the detected information (light intensity) of the reflected light, a ghost image of the phase difference angle was formed.
  • random pattern light was used as the pattern light emitted from the light source.
  • the pattern light emitted from the light source was controlled by a program created by the control program labview.
  • the information of the reflected light detected by the photodetector was analyzed by a program created by the control program labview to form a phase difference ghost image.
  • the experimental conditions are as follows. Modulation frequency: 42.08 Hz
  • the number of samplings corresponds to the number of times the photodetector has measured the intensity of the reflected light, and the sampling period is a time interval for measuring the reflected light.
  • the number of times of irradiation corresponds to the number of irradiated pattern lights.
  • “Average number” is the number of times of averaging per pattern. In this case, since the number of times of illumination is 46000 times and the average number is 64 times, the total number of times of illumination is 46000 patterns ⁇ 64 times.
  • FIG. 7 shows a spatial image of the direct current component, the primary frequency component, and the secondary frequency component of the light intensity fluctuation of the detected reflected light.
  • FIG. 8 when a ghost image of the phase difference angle of the measurement target is formed using each component at each position of the measurement target, FIG. 8 is obtained.
  • the boundary between the Au portion and the Si portion could be clearly recognized, and that the difference in materials could be recognized using the apparatus of the present invention.
  • a difference in the phase difference angle can be confirmed depending on the position, and a difference in surface properties can be detected in each region.
  • the substance measuring apparatus using ghost imaging of the present invention is suitable for photographing a cell structure with a microscope, detecting a defect of a fine structure, and measuring a thin film thickness and a thin film optical property.

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Abstract

Le problème décrit par la présente invention vise à fournir un dispositif pour mesurer un matériau à l'aide d'imagerie fantôme, qui peut mesurer les propriétés optiques d'un matériau en deux dimensions. La solution selon l'invention porte sur un dispositif pour mesurer un matériau, qui comprend : un moyen de rayonnement de lumière (10) ; un moyen de détection (20) pour détecter la lumière transmise à travers un sujet à mesurer M ou la lumière réfléchie par le sujet à mesurer M ; et un moyen de calcul (30) pour estimer les propriétés du sujet à mesurer M sur la base d'informations sur la lumière détectée par le moyen de détection (20) et d'informations sur la lumière de rayonnement SL à laquelle le sujet à mesurer M est exposé. Le moyen de rayonnement de lumière (10) comprend : une source de lumière (11) ; et une partie d'ajustement de polarisation (12) pour moduler périodiquement l'état polarisé de la lumière émise par la source de lumière (11) pour former la lumière de rayonnement SL. La source de lumière (11) a une fonction pour émettre une pluralité de lumières de motif ayant différentes distributions d'intensité. Le moyen de calcul (30) a une fonction pour former une image fantôme du sujet à mesurer M sur la base d'informations concernant les distributions d'intensité des lumières de motif et un instant où les lumières de motif sont émises, et d'informations concernant l'intensité de la lumière détectée par le moyen de détection.
PCT/JP2015/073097 2014-08-19 2015-08-18 Dispositif de mesure de matériau à l'aide d'imagerie fantôme Ceased WO2016027797A1 (fr)

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CN106248351A (zh) * 2016-08-24 2016-12-21 中国科学院西安光学精密机械研究所 一种光学系统鬼像测量装置及其测量方法
CN106725319A (zh) * 2016-12-12 2017-05-31 四川大学 一种光通过散射介质聚焦的单元裂解调制方法
CN107831144A (zh) * 2017-10-20 2018-03-23 上海理工大学 基于压缩感知时间关联成像的滤光片透过率检测方法
CN110230995A (zh) * 2019-05-10 2019-09-13 首都师范大学 一种基于鬼成像的感兴趣区域成像装置
JP2020518359A (ja) * 2017-05-05 2020-06-25 ザ・ユニバーシティ・コート・オブ・ザ・ユニバーシティ・オブ・エディンバラＴｈｅ Ｕｎｉｖｅｒｓｉｔｙ Ｃｏｕｒｔ ｏｆ ｔｈｅ Ｕｎｉｖｅｒｓｉｔｙ ｏｆ Ｅｄｉｎｂｕｒｇｈ 光学システムと方法
WO2020186394A1 (fr) * 2019-03-15 2020-09-24 中国科学院微电子研究所 Procédé et dispositif d'imagerie
WO2020218282A1 (fr) * 2019-04-22 2020-10-29 株式会社小糸製作所 Dispositif d'imagerie, phare de véhicule, automobile et procédé d'imagerie
JPWO2021079810A1 (fr) * 2019-10-23 2021-04-29
JP2021185384A (ja) * 2016-08-15 2021-12-09 国立大学法人大阪大学 電磁波位相振幅生成装置、電磁波位相振幅生成方法及び電磁波位相振幅生成プログラム
JP2022146636A (ja) * 2021-03-22 2022-10-05 株式会社東芝 光学装置、光学検査方法及び光学検査プログラム
US20250234096A1 (en) * 2022-03-15 2025-07-17 Panasonic Intellectual Property Management Co., Ltd. Optical apparatus
WO2025150474A1 (fr) * 2024-01-09 2025-07-17 浜松ホトニクス株式会社 Dispositif d'acquisition d'image et procédé d'acquisition d'image

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JPWO2021079810A1 (fr) * 2019-10-23 2021-04-29
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