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WO2016019949A1 - Interféromètre stable longue portée, en particulier pour spectroscopie à transformée de fourier par imagerie sans balayage d'objet - Google Patents

Interféromètre stable longue portée, en particulier pour spectroscopie à transformée de fourier par imagerie sans balayage d'objet Download PDF

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Publication number
WO2016019949A1
WO2016019949A1 PCT/DE2015/100328 DE2015100328W WO2016019949A1 WO 2016019949 A1 WO2016019949 A1 WO 2016019949A1 DE 2015100328 W DE2015100328 W DE 2015100328W WO 2016019949 A1 WO2016019949 A1 WO 2016019949A1
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WO
WIPO (PCT)
Prior art keywords
interferometer
retroreflectors
beam splitter
radiation
stable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2015/100328
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German (de)
English (en)
Inventor
Rainer Heintzmann
Walter Müller
Martin KIELHORN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Friedrich Schiller Universtaet Jena FSU
Institut fuer Physikalische Hochtechnologie eV
Original Assignee
Friedrich Schiller Universtaet Jena FSU
Institut fuer Physikalische Hochtechnologie eV
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Application filed by Friedrich Schiller Universtaet Jena FSU, Institut fuer Physikalische Hochtechnologie eV filed Critical Friedrich Schiller Universtaet Jena FSU
Publication of WO2016019949A1 publication Critical patent/WO2016019949A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light

Definitions

  • the invention relates to a stable interferometer with high etendue, in particular for imaging Fourier transform spectroscopy without object scanning.
  • Fourier transform spectroscopy is a method for investigating the spectral composition of electromagnetic radiation used in various natural and life sciences in the field of spectroscopic analysis.
  • a Fourier transform spectrometer consists of an interferometer, a light-sensitive detector and a computer with an algorithm for the reconstruction of the spectrum. For a spectral measurement to Helltechniksmess values are recorded at different optical path length differences between the arms of the interferometer with the photosensitive detector.
  • the reconstruction uses the Wiener-Chintschin theorem, which states that the spectral power density of a signal is the Fourier transform of the corresponding autocorrelation function.
  • Fourier transform spectroscopy can be applied to any type of radiation with wave properties. Practically, the applications cover the broad frequency band of electromagnetic waves from the far infrared to the ultraviolet. This method is superior to many other methods of light spectroscopy in terms of noise performance, flexibility, and spectral resolution combined with high bandwidth. Since an interferometer with at least one movable optical element is required for Fourier transformation spectroscopy, but optical path length differences down to the smallest wavelength fraction of the optical radiation used must be known, the highest demands are placed on the mechanical structure. In the past, many interferometers have been designed whose optical properties are stabilized by symmetries in the ray trajectories against mechanical change.
  • the Fourier transform approach is not only used in spectrometers that measure only one spectral composition of one optical radiation, but also in hyperspectral cameras, which simultaneously measure many thousand spectra in parallel. In order to be able to measure as many spectra simultaneously as possible, it is important that the optical information throughput through the interferometer used is very high.
  • a measure of the information throughput through an optical system is the etendue. This increases with the aperture of the system and the angle at which radiation from the system can be transmitted vignetting free. Since interferometers can usually be scaled at least theoretically, the maximum acceptance angle for divergent radiation is an important quality feature for a particular interferometer geometry.
  • the radiated path lengths between the inputs and the outputs of the interferometers are compared with those in a Michelson interferometer of the same input aperture and minimum length.
  • Such an imaging spectrometer can be used in various forms of spectroscopy and microscopy such as: IR, UV / VIS and Raman, for the spatially resolved measurement of chemical compositions and material properties. Further areas of application are in medical diagnostics, quality management, authenticity testing, astronomy and remote sensing.
  • a rotatably mounted Sagnac interferometer can be used without its own moving parts as an interferometer for Fourier transform spectroscopy (Jun Zhao, Richard L. McCreery: “Multichannel Fourier Transform Raman Spectroscopy: Combining the Advantages of CCDs with Interferometry ", Applied Spectroscopy, Vol. 50, Issue 9, 1996, 1209-1214).
  • Murty proposes a Michelson interferometer with a triple mirror (MVRK Murty, "Modification of Michelson Interferometer Using Only One Cube-Corner Prism", Journal of the Optical Society of America; Vol. 50, Iss. 1, Jan. 1960, 83).
  • MVRK Murty "Modification of Michelson Interferometer Using Only One Cube-Corner Prism", Journal of the Optical Society of America; Vol. 50, Iss. 1, Jan. 1960, 83.
  • the additional folded beam path makes the radiation path length in the interferometer at least 3.9 times longer than in a traditional Michelson interferometer, which severely limits the acceptance angle for radiation and thus reduces the number of simultaneously independently measurable spectra for hyperspectral imaging ,
  • the use of the half-aperture triple mirror also results in a complicated and almost irreversible mixing of polarization states of the back-reflected radiation, so that unpolarized light, as mentioned above, does not remain completely subject to interference.
  • the invention has for its object to provide a universally applicable, compact and robust interferometer, with which arbitrarily polarized light can be brought as little loss and with large divergence angle to the interference.
  • an interferometer in which a first beam splitter element for beam splitting a interferometer input radiation is coupled in two interferometer partial radiations on the output side with two retroreflectors in which outputs of the retroreflectors are connected to a second beam splitter element for combining the interferometer partial radiations and the two retroreflectors are arranged at an angle to one another, with at least one of the retroreflectors having substantially no area facing the other retroreflector and meaningless for the retroreflector function in order to shorten the radiation path lengths.
  • the proposed constructional change of the retroreflectors by separating the area meaningless for the retroreflector function can further reduce the radiation path lengths of the interferometer partial radiations by bringing the retroreflectors closer together Also the use of this form already specially prepared retroreflectors is conceivable. Then you save yourself the separation or modification of an available retroreflector.
  • the interferometer is structurally robust against tilts thereof, because the retroreflectors ensure that incident and outgoing beams are always parallel.
  • the optical path length difference between the two interferometer partial radiations must be variable over a long distance, which is essentially due to the Magnification of the distance of a retroreflector to the beam splitter elements can be effected.
  • the inventive design of the interferometer and the associated short radiation path lengths ensure that the acceptance angle for divergent radiation is very large, making it possible to use the interferometer also for hyperspectral imaging. That is, it is possible to spatially resolve an object by Fourier transform spectroscopy without rasterization. This represents a very great advantage over the previous methods, since, on the one hand, less time is required and, on the other hand, the requirements for stability, scanning and, if necessary, great expense in evaluating the rasterized information are eliminated.
  • the theoretical radiation path length in the interferometer is only about 3.1 times longer than in a traditional Michelson interferometer.
  • the present interferometer also offers several inputs and outputs.
  • the availability of both interferometer outputs is advantageous because one can use the total radiation intensity of the interference radiation for the evaluation and thus the signal to noise ratio can be improved.
  • the interference information can be separated from the possibly variable input intensity.
  • the second output carries the interference information complementarily, but at the same time scales positively with the intensity of the input radiation, a distinction becomes possible.
  • the potential availability of two inputs may be particularly advantageous if you want to send a reference beam path through the interferometer at the same time to possibly act during the actual measurement process regulating the construction of the interferometer.
  • FIG. 1 Stable interferometer consisting of two retroreflectors, of which one is structurally reduced, and two beam splitter elements (FIG. 1a: perspective view, FIG. 1b: top view of a close arrangement)
  • Fig. 2 Representation of the six sectors of a retroreflector with leadership of one of the demfefeometer partial radiations
  • Fig. 3 Stable interferometer consisting of two structurally reduced
  • Fig. 4 Stable interferometer consisting of two structurally reduced
  • FIG. 4 a perspective view
  • FIG. 4 b top view of a close arrangement
  • FIG. 5 Stable interferometer with imaging optics (schematic diagram)
  • Fig. 6 Stable interferometer with a light layer illumination for a
  • Fig. 7 Stable interferometer with means for measuring the optical
  • Path length difference between the two interferometer partial radiations by an additional reference radiation (block scarf image)
  • Fig. 8 Representation of the six sectors of a retroreflector with the possibility of
  • Exemplary embodiment 1 (see Fig. 1): Structure:
  • first beam splitter element 1 with two interferometer accesses 2, 3 serving as input, two retroreflectors 4, 5 and a second beam splitter element 6 with two further interferometer accesses 7, 8 serving as output.
  • Both beam splitter elements 1, 6 are realized here by a respective non-polarizing beam splitter cube, which splits its input radiation as far as possible in a ratio of 1: 1 to its outputs through a spezieil coated beam-splitting surface 9 along a side surface diagonal.
  • the retroreflectors 4, 5 are triple mirrors made of glass. Corner mirrors are symmetrical mirror arrangements, each consisting of three pairs of orthogonally arranged, plane and reflecting surfaces (see Fig. 2 Sectors bounded by solid radii). By this arrangement, a triple mirror has six sectors (see Fig. 2 solid and dashed radii), which have the property of reflecting incident light largely independent of the angle of incidence, in parallel with an offset by the opposite sector. In this way, each triple mirror has six qualitatively different reflection paths with their own polarization transmission properties. The six paths of reflection differ in the order in which light beams touch the three reflective surfaces. In this first embodiment, only one of the six reflection paths is used by each triple mirror.
  • Both retroreflectors 4, 5 are arranged so that their front surfaces 13, 14 each extend substantially parallel to surfaces 15, 16 of the first beam splitter element 1, from which the split radiation exits.
  • this split radiation emerging from the first beam splitter element 1 is intended to enter the input sectors 10 of the retroreflectors 4, 5 enter and meet accordingly from the output sectors 12 to the second beam splitter element 6.
  • the second beam splitter element 6 is arranged spatially above the first, so that the beam-splitting surfaces 9 are arranged parallel to each other and as possible in a plane.
  • the retroreflector 4 was structurally reduced on the side facing the other retroreflector 5 by a part which is not part of the reflection path 11 used (see also Fig. 2, here the front view of the retroreflector 4 is shown, in which the gray area was cut off or not at all). As a result, both retroreflectors 4, 5 can be arranged particularly close to one another (cf., FIG. 1b).
  • Each of the four interferometer accesses 2, 3, 7, 8 can be used as input for radiation.
  • To one used as input interferometer access to one of the two beam splitter elements 1, 6 include two usable as an output interferometer accesses the other beam splitter element 6 and 1 respectively.
  • an input radiation 17 is split by the corresponding beam splitter element 1 into two interferometer partial radiations 18, 19, preferably in the ratio 1: 1. Both interferometer partial beams 18, 19 are reflected by an associated retroreflector 4, 5 and offset.
  • the second beam splitter element 6 combines both interferometer partial radiations into two output radiations 20. Respectively one output radiation has the interference information complementary to the other output radiation.
  • the interference at the outputs of the interferometer is secured against pure tilting of these retroreflectors 4, 5th
  • the path traversed by one of the two infra-interferometer partial radiations is referred to as an arm of the interferometer.
  • the geometry of the interferometer allows one arm of the interferometer to be only about 3.1 times as long as in a comparable Michelson interferometer.
  • the interference caused by the polychromatic radiation at at least one output of the interferometer at different optical path length differences between the arms of the interferometer with a radiation-sensitive detector are measured (for clarity, not explicitly shown ).
  • the change in the optical path length difference by a mechanical drive (only indicated by arrow), which can move at least one of the retroreflectors in particular orthogonal to the front surface, realized.
  • the acceptance angle and thus the optical information throughput can be increased by short paths and by highly refractive materials. Even if the total optical path length increases with the use of highly refractive materials, the radiation path length remains constant and a divergent radiation with smaller angles is guided by refraction. For this reason, glass-filled triple mirrors and cubes have been used as beam splitters in this application example. Moreover, the space between the optical elements can also be filled with highly refractive material, but it is often desirable to expose both interferometer partial radiations to the same dispersion.
  • the first beam splitter element should be used in accordance with its design-related preferred direction and the second beam splitter element exactly inverse to the first. This is particularly important in the third exemplary embodiment, in which the beam splitter elements are structurally combined.
  • the retroreflectors In order to influence the polarization of the radiation in the interferometer little, it may be beneficial to provide the retroreflectors with an additional metal layer and not to use pure glass reflectors with total reflection.
  • the structure of the interferometer in Fig. 3 differs from the first embodiment (see Fig. 1) in that both retroreflectors 4, 5 were reduced by a part which is not part of the respectively used reflection path 11.
  • both retroreflectors 4, 5 were arranged particularly close together, as in the first embodiment, but additional space is created at two accesses 2, 7 of the interferometer, which can be used by other optical elements or makes it possible to use detectors or the like to position closer to the interferometer (see Fig. 4b).
  • beam paths can be shortened, whereby a greater acceptance angle is made possible compared to divergent radiation.
  • the structure of the interferometer in Fig. 4 differs from the second exemplary embodiment (see Fig. 3) in that both beam splitter elements 1, 6 are structurally combined.
  • the advantage here is that three degrees of freedom of placement of the beam splitter elements 1, 6 in the room, which otherwise would have to be adjusted consuming omitted. If the interferometer is used for the hyperspectral environment, this structural adjustment makes sense, since the reunited beams should run parallel.
  • an interferometer 21 for use in hyperspectral imaging (see Fig. 5), an interferometer 21 according to one of the previous embodiments is supplemented by an imaging optics 22 at one of the inputs and an imaging optics 23 at at least one of the outputs, so that a surface 24 to be measured is one Sample can be imaged sharply on a radiation-sensitive, spatially resolving detector 25 at one of the outputs.
  • the interferometer 21 is here in Uriertz beam path of the two imaging optics 22, 23. That is, each two parallel beams between the two imaging optics 22, 23 originate from the same point of the sample and also hit the same point of the detector 25.
  • an offset of beams in the interferometer does not destroy the interference, as long as they pass through sufficiently large imaging optics 22, 23.
  • the interference in the detector plane is thus also independent of displacement of the retroreflectors along their front surfaces 13, 14.
  • the device in FIG. 6 supplements, for the fourth exemplary embodiment, a light source 26 which illuminates a spatially extended sample 27 in such a way that substantially only areas 28 of the spatially extended sample 27 are illuminated, which through both imaging optics 22, 23 focus on the plane of the detector 25 are shown.
  • a light source 26 which illuminates a spatially extended sample 27 in such a way that substantially only areas 28 of the spatially extended sample 27 are illuminated, which through both imaging optics 22, 23 focus on the plane of the detector 25 are shown.
  • various methods u. a In this case, the illuminated area 28 of the spatially extended sample 27, which is to be spectrally resolved later, need not necessarily be completely illuminated at the same time.
  • methods are known in which a light layer is generated by one or more rapidly displaced in a plane rays.
  • the device in Fig. 7 corresponds to the fourth exemplary embodiment (see Fig. 5) consisting of the interferometer 21, an imaging optics 22 at one of the inputs, an imaging optics 23 at one of the outputs and the radiation-sensitive, Spatial resolution detector 25, wherein to the input radiation to be measured 17 an additional and distinguishable from this, coherent reference radiation 29 is guided in the interferometer 21.
  • the reference radiation 29 is guided through the interferometer 21 analogously to the input beam 17 to be measured (see FIG. That is, the reference radiation 29 impinges on the first beam splitter element 1, is thereby divided into interferometer reference partial radiations 30 which then strike the retrorefiectors 4, 5 (see Fig. 8), etc.
  • the interferometer reference partial radiations 30 do not necessarily pass through Since the reference radiation 29 can be a very parallel one, a small area of a retroreflector is sufficient for the reflection of the respective interferometer reference partial radiations 30. Therefore, this can also be done for this purpose the remainders of the greatly reduced sectors are used as long as it is ensured that both input and output of the interferometer reference partial radiations 30 are located within the retrorefiector (see Fig. 8). By measuring the interference 31 generated by this reference radiation 29 with sensors 32 on one or as in the figure both outputs 7, 8, a measure of the optical path length difference of the two interferometer arms can be derived.
  • the compact representation of the interferometer 21 in the drawing does not exclude that in the interferometer arms, so the beam path between the S trahlteilerettin, more optical components can be introduced, as these z. B. are necessary for the recovery of a full quadrature signal.
  • this embodiment For use as a Fourier transform spectrometer, this embodiment comprises means 33 for recording the secondary information of the reference radiation 29 and the radiation 17 to be measured and a drive 34 operating in synchronism with this device for varying the optical path length difference of the two interferometer arms.
  • the additionally recorded interference information of the reference radiation can be used to take into account the exact optical path length differences for each interference information of the input radiation 17 to be measured.
  • an algorithm for non-equidistant Fourier transformation can be used.
  • the device in FIG. 9 is equipped with a control device 35, which evaluates the interferometer information of the reference radiation measured by the sensors 32 and controls a drive 34 such that the optical path length difference of the two interferometers -Axme is stabilized.
  • a control device 35 evaluates the interferometer information of the reference radiation measured by the sensors 32 and controls a drive 34 such that the optical path length difference of the two interferometers -Axme is stabilized.
  • the observance of a defined optical path length difference is ensured even during the entire period of a measurement of the interferometer formation of the input radiation 17 to be measured.
  • a regulation is advantageous. Path length changes during a measurement, which have led to a reduction of the interference contrast in the previous exemplary embodiment, can now still be corrected.
  • the algorithmic effort is reduced in the evaluation.
  • This embodiment is so well stabilized against all degrees of freedom of the mechanical change within the interferometer 21 that it is possible to measure interferences with adjustable optical path length difference even over long periods, which is just the case in applications in which only low light intensities are available, such as Raman spectroscopy or Raman imaging, is important.
  • the reflectors of the interferometer are tilt-invariant, since retroreflectors 4, 5 are used.
  • the observed interference of the two interferometer partial beams 18, 19 in the detector plane is largely invariant against displacement of the retroreflectors 4, 5 along their front surfaces 13, 14, since these in the infinite beam path of the two imaging optics 22, 23 at the input and the output of the interferometer 21 are located.
  • the remaining degree of freedom of the retroreflectors 4, 5, which influences the optical path length difference of the two interferometer partial radiations 18, 19, is stabilized by the control device 35.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

L'invention vise à réaliser un interféromètre à utilisation universelle, compact et robuste permettant de faire interférer une lumière à polarisation quelconque, avec le moins de pertes possible et avec un grand angle de divergence. L'invention propose à cet effet un interféromètre, dans lequel un premier séparateur de faisceau (1) servant à séparer un faisceau incident (17) d'interféromètre en deux faisceaux partiels (18, 19) d'interféromètre est couplé côté sortie à deux rétroréflecteurs (4, 5), des sorties (12) des rétroréflecteurs (4, 5) sont reliées à un deuxième élément séparateur de faisceau (6) afin de réunir les faisceaux partiels (18, 19) d'interféromètre, les deux rétroréflecteurs (4, 5) étant disposés de manière adjacente selon un angle donné l'un par rapport à l'autre. Afin de réduire les longueurs de cheminement des faisceaux, au moins un des rétroréflecteurs (4, 5) ne comporte sensiblement aucune zone tournée vers l'autre rétroréflecteur (4, 5) et sans signification pour la fonction rétroréfléchissante.
PCT/DE2015/100328 2014-08-05 2015-08-04 Interféromètre stable longue portée, en particulier pour spectroscopie à transformée de fourier par imagerie sans balayage d'objet Ceased WO2016019949A1 (fr)

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DE102014011668.9 2014-08-05
DE102014011668.9A DE102014011668A1 (de) 2014-08-05 2014-08-05 Stabiles Interferometer mit hoher Étendue, insbesondere für bildgebende Fourier-Transformations-Spektroskopie ohne Objektabrasterung

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CN114187229B (zh) * 2021-06-28 2024-06-28 兰州大学 一种针对几何匹配误差引起的不确定性进行定量估计的方法
CN113406788B (zh) * 2021-07-26 2025-01-14 长沙安视康医疗科技有限公司 一种光程改变装置及光学干涉系统

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