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WO2016011352A1 - Procédés et appareil pour le dépôt d'une couche de cobalt à l'aide d'un réacteur de dépôt discontinu à carrousel - Google Patents

Procédés et appareil pour le dépôt d'une couche de cobalt à l'aide d'un réacteur de dépôt discontinu à carrousel Download PDF

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Publication number
WO2016011352A1
WO2016011352A1 PCT/US2015/040909 US2015040909W WO2016011352A1 WO 2016011352 A1 WO2016011352 A1 WO 2016011352A1 US 2015040909 W US2015040909 W US 2015040909W WO 2016011352 A1 WO2016011352 A1 WO 2016011352A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
cobalt
substrates
processing position
processing
Prior art date
Application number
PCT/US2015/040909
Other languages
English (en)
Inventor
Mayur Trivedi
Original Assignee
Applied Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials, Inc. filed Critical Applied Materials, Inc.
Priority to CN201580036757.9A priority Critical patent/CN106471153B/zh
Priority to KR1020177004381A priority patent/KR20170029622A/ko
Publication of WO2016011352A1 publication Critical patent/WO2016011352A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/16—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metal carbonyl compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles
    • C23C16/45565—Shower nozzles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C23C16/463—Cooling of the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment

Definitions

  • the inventor has provided improved methods and apparatus for depositing a cobalt layer in features formed on a substrate.
  • a substrate processing chamber includes: a chamber body having a processing volume; a rotatable substrate support disposed within the chamber body, wherein the substrate support is configured to rotate one or more substrates arranged in a planar array between a first processing position and a second processing position, wherein the first processing position and the second processing position are independently thermally controlled; a showerhead disposed opposite the rotatable substrate support configured to expose the one or more substrates at the first processing position to a cobalt containing precursor; and a heat source disposed within the substrate support configured to heat the one or more substrates at the second processing position.
  • Figure 1 is a flow diagram of a method 100 for depositing cobalt in accordance with some embodiments of the present disclosure. The method 100 is described below with respect to the stages of filling a feature with cobalt as depicted in Figures 2A-2B.
  • Figure 4 depicts a top view of the substrate support 308 having one or more substrates disposed thereon.
  • the substrate support 308 may support between 2 and 6 substrates.
  • Figure 4 depicts a substrate support having four substrates 200A, 200B, 200C, and 200D arranged in a planar array with two substrates 200A, 200C at first processing positions 402A and 402B and two substrates 200B, 200D at second processing positions 404A and 404B.
  • the substrate support provides support for a plurality of single substrates in a planar array with each single substrate being in a separate processing position.
  • the opening 220 may be any suitable opening such as a via, trench, dual damascene structure, or the like.
  • the feature 204 may have a height to width aspect ratio of about 3:1 to about 15:1 .
  • the opening 220 may be formed by etching the one or more substrates 200 using any suitable etch process.
  • the opening 220 is defined by one or more sidewalls 206 and a bottom 208.
  • the first layer 212 may include a barrier material deposited atop the oxide layer.
  • an oxide layer is not present and the barrier material may be the first layer 212 formed atop the first surface 202, the bottom 208 and sidewalls 206 of the feature 204.
  • the barrier material may serve a similar purpose as the oxide material discussed above.
  • the barrier material may include at least one of titanium (Ti), tantalum (Ta), and oxides or nitrides of Ti, Ta, or the like.
  • the barrier material may be deposited by any suitable methods, such as by CVD or PVD.
  • the substrate having a cobalt layer deposited thereon is rotated to a second processing position.
  • substrates 200A, 200C having a cobalt layer deposited thereon are rotated to the second processing position 404, while substrates 200B, 200D rotate to the first processing position 402 to have a cobalt layer deposited thereon as described above at 104.
  • the substrate support may comprise two heaters creating two heating zones, a center or inner heating zone and an edge or outer heating zone wherein the temperature of each zone is independently controllable.
  • the one or more substrates 200 may be heated by a lamp head, which is disposed in a position relative to the substrate support 308 suitable to heat the one or more substrates 200.
  • the lamp head generates radiation which is directed to the top surface of the one or more substrates 200.
  • the lamp head may be configured to heat the bottom surface of the one or more substrates 200, for example, such as by being disposed below the substrate support, or by directing the radiation to the bottom surface of the one or more substrates 200.
  • the lamps may be divided into multiple zones.
  • the thermal control device 510 includes both heating and cooling capabilities provided by combinations of the above described embodiments.
  • heating may be provided by the heater 504 ⁇ e.g., resistive heating elements or heating lamps) and cooling may be provided by the heat exchanger 506 ⁇ e.g., cooling channels to flow a coolant).
  • the temperature of individual substrates disposed on the substrate support can be advantageously simultaneously processed at different temperatures on the same substrate support.
  • a plurality of substrates can be simultaneously supported and their temperatures rapidly increased and decreased repeatedly as the substrate support rotates between processing positions to provide the temperatures used for deposition and anneal processes without removing the substrates from the substrate support until the processes are completed and a film (e.g., a cobalt film) is deposited to a predetermined final thickness.
  • a film e.g., a cobalt film
  • 104-108 may be repeated until the opening is filled with a cobalt material or until the deposited cobalt layer has a reached a final thickness, for example any thickness suitable for a semiconductor manufacturing process.
  • the opening 204 may be filled above the level of the upper surface of the substrate and/or deposited material, for example from the cobalt material, may remain on the upper surface of the one or more substrates 200.
  • the substrate support 308 may include an RF bias electrode 340.
  • the RF bias electrode 340 may be coupled to one or more bias power sources (one bias power source 338 shown) through one or more respective matching networks (matching network 336 shown).
  • the one or more bias power sources may be capable of producing up to 1200 W or RF energy at a frequency of about 2 MHz to about 60 MHz, such as at about 2 MHz, or about 13.56 MHz, or about 60 Mhz.
  • two bias power sources may be provided for coupling RF power through respective matching networks to the RF bias electrode 340 at respective frequencies of about 2 MHz and about 13.56 MHz.
  • the at least one bias power source may provide either continuous or pulsed power.
  • the bias power source alternatively may be a DC or pulsed DC source.
  • the one or more substrates 200 may enter the process chamber 302 via an opening 312 in a wall of the process chamber 302.
  • the opening 312 may be selectively sealed via a slit valve 318, or other mechanism for selectively providing access to the interior of the chamber through the opening 312.
  • the substrate support 308 may be coupled to a lift mechanism 334 that may control the position of the substrate support 308 between a lower position (as shown) suitable for transferring substrates into and out of the chamber via the opening 312 and a selectable upper position suitable for processing.
  • the process position may be selected to maximize process uniformity for a particular process.
  • the substrate support 308 When in at least one of the elevated processing positions, the substrate support 308 may be disposed above the opening 312 to provide a symmetrical processing region.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)

Abstract

L'invention concerne des procédés et un appareil pour le dépôt d'une couche de cobalt dans des éléments caractéristiques formés sur un substrat. Dans certains modes de réalisation, un procédé de dépôt d'une couche de cobalt sur un substrat comprend : (a) la disposition d'un substrat sur un support de substrat qui peut tourner entre deux positions de traitement ; (b) l'exposition du substrat à un précurseur contenant du cobalt au niveau d'une première position de traitement pour déposer une couche de cobalt sur le substrat ; (c) la rotation du substrat vers une seconde position de traitement ; et (d) le recuit du substrat au niveau de la seconde position de traitement pour éliminer des contaminants de la couche de cobalt.
PCT/US2015/040909 2014-07-17 2015-07-17 Procédés et appareil pour le dépôt d'une couche de cobalt à l'aide d'un réacteur de dépôt discontinu à carrousel WO2016011352A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201580036757.9A CN106471153B (zh) 2014-07-17 2015-07-17 使用转盘式批沉积反应器沉积钴层的方法和设备
KR1020177004381A KR20170029622A (ko) 2014-07-17 2015-07-17 캐러셀 배치 증착 반응기를 사용하여 코발트 층을 증착하기 위한 방법들 및 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462025875P 2014-07-17 2014-07-17
US62/025,875 2014-07-17

Publications (1)

Publication Number Publication Date
WO2016011352A1 true WO2016011352A1 (fr) 2016-01-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2015/040909 WO2016011352A1 (fr) 2014-07-17 2015-07-17 Procédés et appareil pour le dépôt d'une couche de cobalt à l'aide d'un réacteur de dépôt discontinu à carrousel

Country Status (4)

Country Link
US (2) US9869024B2 (fr)
KR (1) KR20170029622A (fr)
CN (1) CN106471153B (fr)
WO (1) WO2016011352A1 (fr)

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US10094023B2 (en) 2014-08-01 2018-10-09 Applied Materials, Inc. Methods and apparatus for chemical vapor deposition of a cobalt layer
US10157787B2 (en) * 2015-12-17 2018-12-18 Applied Materials, Inc. Method and apparatus for depositing cobalt in a feature
US10438847B2 (en) * 2016-05-13 2019-10-08 Lam Research Corporation Manganese barrier and adhesion layers for cobalt
US10600685B2 (en) 2016-11-27 2020-03-24 Applied Materials, Inc. Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film
CN109273373A (zh) * 2017-07-18 2019-01-25 联华电子股份有限公司 电连接电容插塞的硅化钴层的制作方法
CN109868460B (zh) * 2019-03-14 2021-10-15 嘉兴科民电子设备技术有限公司 一种薄膜生长系统及生长方法
US10961624B2 (en) * 2019-04-02 2021-03-30 Gelest Technologies, Inc. Process for pulsed thin film deposition
WO2020257141A1 (fr) * 2019-06-20 2020-12-24 Lam Research Corporation Utilisation de rotation pour corriger des non-uniformités azimutales dans le traitement de substrats semi-conducteurs
WO2023091629A2 (fr) * 2021-11-22 2023-05-25 Cvd Equipment Corporation Améliorations apportées à des systèmes de dépôt chimique en phase vapeur

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US20080063809A1 (en) * 2006-09-08 2008-03-13 Tokyo Electron Limited Thermal processing system for curing dielectric films
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Also Published As

Publication number Publication date
CN106471153B (zh) 2019-11-08
US9869024B2 (en) 2018-01-16
US20180135180A1 (en) 2018-05-17
KR20170029622A (ko) 2017-03-15
US20160017482A1 (en) 2016-01-21
CN106471153A (zh) 2017-03-01

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