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WO2016001090A3 - Optical manipulator, projection lens and projection exposure apparatus - Google Patents

Optical manipulator, projection lens and projection exposure apparatus Download PDF

Info

Publication number
WO2016001090A3
WO2016001090A3 PCT/EP2015/064551 EP2015064551W WO2016001090A3 WO 2016001090 A3 WO2016001090 A3 WO 2016001090A3 EP 2015064551 W EP2015064551 W EP 2015064551W WO 2016001090 A3 WO2016001090 A3 WO 2016001090A3
Authority
WO
WIPO (PCT)
Prior art keywords
projection
optical
exposure apparatus
projection lens
optical element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2015/064551
Other languages
French (fr)
Other versions
WO2016001090A2 (en
Inventor
Eric Eva
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to KR1020177002282A priority Critical patent/KR102421955B1/en
Priority to JP2016575134A priority patent/JP6545726B2/en
Publication of WO2016001090A2 publication Critical patent/WO2016001090A2/en
Publication of WO2016001090A3 publication Critical patent/WO2016001090A3/en
Priority to US15/395,460 priority patent/US10976667B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/7015—Details of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/16—Optical objectives specially designed for the purposes specified below for use in conjunction with image converters or intensifiers, or for use with projectors, e.g. objectives for projection TV
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0031—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration for scanning purposes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/002—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using materials containing microcapsules; Preparing or processing such materials, e.g. by pressure; Devices or apparatus specially designed therefor
    • G03F7/0022—Devices or apparatus
    • G03F7/0027—Devices or apparatus characterised by pressure means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G03F7/70266—Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70308—Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/7095—Materials, e.g. materials for housing, stage or other support having particular properties, e.g. weight, strength, conductivity, thermal expansion coefficient
    • G03F7/70958—Optical materials or coatings, e.g. with particular transmittance, reflectance or anti-reflection properties

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Public Health (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Surface Treatment Of Glass (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Glass Compositions (AREA)

Abstract

The invention relates to an optical manipulator (MAN), comprising: an optical element (OE), in particular composed of fused silica, and an actuating device (DR) for reversibly changing the surface form (SF) of the optical element (OE), wherein the actuating device (DR) has a plurality of actuators (AK) for mechanically acting on the optical element (OE) at a plurality of contact areas. The optical element (OE) at least at action regions in the region of the contact areas of the actuators (AK) is prestressed to an compressive stress of more than 1 MPa, preferably of more than 100 MPa, particularly preferably of more than 500 MPa. The invention also relates to a projection lens comprising at least one such optical manipulator (MAN), to a projection exposure apparatus comprising such a projection lens, and to a method for producing such an optical manipulator (MAN).
PCT/EP2015/064551 2014-07-01 2015-06-26 Optical manipulator, projection lens and projection exposure apparatus Ceased WO2016001090A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020177002282A KR102421955B1 (en) 2014-07-01 2015-06-26 Optical manipulator, projection lens and projection exposure apparatus
JP2016575134A JP6545726B2 (en) 2014-07-01 2015-06-26 Optical manipulator, projection lens and projection exposure apparatus
US15/395,460 US10976667B2 (en) 2014-07-01 2016-12-30 Optical manipulator, projection lens and projection exposure apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014212710.6A DE102014212710A1 (en) 2014-07-01 2014-07-01 Optical manipulator, projection lens and projection exposure system
DE102014212710.6 2014-07-01

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US15/395,460 Continuation US10976667B2 (en) 2014-07-01 2016-12-30 Optical manipulator, projection lens and projection exposure apparatus

Publications (2)

Publication Number Publication Date
WO2016001090A2 WO2016001090A2 (en) 2016-01-07
WO2016001090A3 true WO2016001090A3 (en) 2016-03-17

Family

ID=53491522

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2015/064551 Ceased WO2016001090A2 (en) 2014-07-01 2015-06-26 Optical manipulator, projection lens and projection exposure apparatus

Country Status (6)

Country Link
US (1) US10976667B2 (en)
JP (1) JP6545726B2 (en)
KR (1) KR102421955B1 (en)
DE (1) DE102014212710A1 (en)
TW (1) TWI649587B (en)
WO (1) WO2016001090A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6754699B2 (en) * 2014-05-14 2020-09-16 カール・ツァイス・エスエムティー・ゲーエムベーハー Optimal placement of actuators and sensor points on optics
US11167375B2 (en) 2018-08-10 2021-11-09 The Research Foundation For The State University Of New York Additive manufacturing processes and additively manufactured products
DE102021201689A1 (en) * 2021-02-23 2022-08-25 Carl Zeiss Smt Gmbh Optical assembly, method for deforming an optical element and projection exposure system
DE102022208206A1 (en) * 2022-08-08 2024-02-08 Carl Zeiss Smt Gmbh Method for stabilizing an adhesive connection of an optical assembly

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007014587A1 (en) * 2007-03-23 2008-09-25 Carl Zeiss Smt Ag Birefringent delay plate arrangement for production of e.g. LCD, has force application bar exhibiting number of twists, where two twists neighboring in longitudinal direction of bar are oriented opposite to each other
US20080239503A1 (en) * 2005-07-25 2008-10-02 Carl Zeiss Smt Ag Projection objective of a microlithographic projection exposure apparatus
WO2013061905A1 (en) * 2011-10-27 2013-05-02 日本電気硝子株式会社 Optical element for light-concentrating solar power generation device, method for producing same, and light-concentrating solar power generation device
TW201404732A (en) * 2012-05-25 2014-02-01 Asahi Glass Co Ltd Chemically strengthened glass plate, cover glass, chemically strengthened glass with touch sensor, and display device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7593029B2 (en) * 2001-08-20 2009-09-22 Ricoh Company, Ltd. Optical scanning device and image forming apparatus using the same
JP2004134412A (en) * 2002-07-15 2004-04-30 Carl-Zeiss-Stiftung Spatial dispersion compensating optical system
KR20050035890A (en) 2002-08-23 2005-04-19 가부시키가이샤 니콘 Projection optical system and method for photolithography and exposure apparatus and method using same
EP1668421A2 (en) 2003-09-12 2006-06-14 Carl Zeiss SMT AG Illumination system for a microlithography projection exposure installation
US7265070B2 (en) 2003-11-26 2007-09-04 Corning Incorporated Synthetic silica glass optical material having high resistance to optically induced index change
DE102005054193B4 (en) * 2005-11-14 2009-08-13 Rodenstock Gmbh Stress measurement of coatings with a piezoactuator
DE102007010906A1 (en) 2007-03-05 2008-09-11 Seereal Technologies S.A. Imaging device for influencing incident light
NL2003470A (en) * 2008-10-07 2010-04-08 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
US8553207B2 (en) * 2008-12-31 2013-10-08 Asml Holdings N.V. Optically compensated unidirectional reticle bender
US8922750B2 (en) * 2009-11-20 2014-12-30 Corning Incorporated Magnification control for lithographic imaging system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080239503A1 (en) * 2005-07-25 2008-10-02 Carl Zeiss Smt Ag Projection objective of a microlithographic projection exposure apparatus
DE102007014587A1 (en) * 2007-03-23 2008-09-25 Carl Zeiss Smt Ag Birefringent delay plate arrangement for production of e.g. LCD, has force application bar exhibiting number of twists, where two twists neighboring in longitudinal direction of bar are oriented opposite to each other
WO2013061905A1 (en) * 2011-10-27 2013-05-02 日本電気硝子株式会社 Optical element for light-concentrating solar power generation device, method for producing same, and light-concentrating solar power generation device
US20140338748A1 (en) * 2011-10-27 2014-11-20 Nippon Electric Glass Co., Ltd. Optical element for light-concentrating solar power generation device, method for producing same, and light-concentrating solar power generation device
TW201404732A (en) * 2012-05-25 2014-02-01 Asahi Glass Co Ltd Chemically strengthened glass plate, cover glass, chemically strengthened glass with touch sensor, and display device
US20150147538A1 (en) * 2012-05-25 2015-05-28 Asahi Glass Company, Limited Chemically strengthened glass plate, cover glass, chemically strengthened glass with touch sensor, and display device

Also Published As

Publication number Publication date
TW201602635A (en) 2016-01-16
US10976667B2 (en) 2021-04-13
KR102421955B1 (en) 2022-07-18
JP6545726B2 (en) 2019-07-17
JP2017520795A (en) 2017-07-27
US20170108780A1 (en) 2017-04-20
WO2016001090A2 (en) 2016-01-07
KR20170024034A (en) 2017-03-06
TWI649587B (en) 2019-02-01
DE102014212710A1 (en) 2016-01-07

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