WO2016085044A1 - Method for manufacturing multi-junction solar battery using compound thin film and multi-junction solar battery - Google Patents
Method for manufacturing multi-junction solar battery using compound thin film and multi-junction solar battery Download PDFInfo
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- WO2016085044A1 WO2016085044A1 PCT/KR2015/001701 KR2015001701W WO2016085044A1 WO 2016085044 A1 WO2016085044 A1 WO 2016085044A1 KR 2015001701 W KR2015001701 W KR 2015001701W WO 2016085044 A1 WO2016085044 A1 WO 2016085044A1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
- H10F10/142—Photovoltaic cells having only PN homojunction potential barriers comprising multiple PN homojunctions, e.g. tandem cells
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
- H10F10/142—Photovoltaic cells having only PN homojunction potential barriers comprising multiple PN homojunctions, e.g. tandem cells
- H10F10/1425—Inverted metamorphic multi-junction [IMM] photovoltaic cells
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/16—Photovoltaic cells having only PN heterojunction potential barriers
- H10F10/161—Photovoltaic cells having only PN heterojunction potential barriers comprising multiple PN heterojunctions, e.g. tandem cells
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/126—Active materials comprising only Group I-III-VI chalcopyrite materials, e.g. CuInSe2, CuGaSe2 or CuInGaSe2 [CIGS]
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a multi-junction solar cell and a method for manufacturing the same, and more particularly, to a multi-junction solar cell having a plurality of compound thin film solar cell cells and a method of manufacturing the same.
- the solar cell is a device that directly converts solar energy into electrical energy, and is expected to be an energy source capable of solving future energy problems due to its low pollution, infinite resources, and a semi-permanent lifetime.
- Solar cells are classified into various types according to materials used as light absorption layers, and at present, the most commonly used are silicon solar cells using silicon.
- silicon solar cells using silicon.
- Thin-film solar cells are manufactured with a thin thickness, so the materials are consumed less and the weight is lighter, so the application range is wide.
- CIGS Copper Indium Gallium Selenide
- CIGS Copper Indium Gallium Selenide
- Tandem solar cell refers to a multi-layered solar cell in which two single-cell CIGS solar cells are stacked.
- the lower cell is manufactured and then the upper cell is formed thereon, so that the lower cell already formed is damaged in the process of forming the upper cell, thereby making it difficult to obtain the expected energy conversion efficiency. There is.
- Patent Document 1 Republic of Korea Patent Publication 10-2010-0028729
- Patent Document 2 United States Patent Publication 2012-0204939
- the present invention has been made in view of the above-described problems of the prior art, and a purpose of the present invention is to provide a multi-junction solar cell and a method of manufacturing the same, in which the manufacturing process is simple and there is no problem of cell degradation.
- Multi-junction solar cell manufacturing method using a compound thin film for achieving the above object comprises the steps of forming a transparent electrode layer on the upper and lower surfaces of the substrate; Forming a light absorption layer on upper and lower surfaces of the substrate on which the transparent electrode layer is formed; Forming a buffer layer on an upper surface and a lower surface of the substrate on which the light absorption layer is formed; And forming a front electrode on a top surface of the substrate on which the buffer layer is formed and a back electrode on a bottom surface of the substrate.
- Multi-junction solar cell manufacturing method using a compound thin film of another form forming a transparent electrode layer on the upper and lower surfaces of the substrate; Forming a buffer layer on an upper surface and a lower surface of the substrate on which the transparent electrode layer is formed; Forming a light absorption layer on upper and lower surfaces of the substrate on which the buffer layer is formed; And forming a front electrode on an upper surface of the substrate on which the light absorption layer is formed and a rear electrode on a lower surface of the substrate.
- an upper upper cell and a lower lower cell are formed symmetrically with respect to the substrate, and an energy band gap of the light absorbing layer including the energy band gap of the light absorbing layer included in the lower cell is included in the upper cell. It is characterized by a narrower.
- the method may further include electrically connecting the upper cell and the lower cell, wherein the transparent electrode layer of the upper cell and the rear electrode of the lower cell are electrically connected or the front electrode of the upper cell and the transparent electrode layer of the lower cell are electrically connected.
- the electrical current must be connected electrically.
- the light absorbing layer is preferably one or more materials selected from CIGS, CdTe, CZTS, group III-V semiconductor and perovskite structure material, but is not limited thereto.
- the buffer layer may be simultaneously formed in the upper cell and the lower cell in the step of forming the buffer layer, and the transparent electrode layer may be simultaneously formed on both sides of the substrate in the step of forming the transparent electrode layer, thereby reducing the process.
- Another method of manufacturing a multi-junction solar cell using a compound thin film includes: forming a transparent electrode layer on an upper surface and a lower surface of a substrate; Forming a first buffer layer on only one of an upper surface and a lower surface of the substrate on which the transparent electrode layer is formed; Forming a light absorption layer on upper and lower surfaces of the substrate on which only the first buffer layer is formed; Forming a second buffer layer on an upper surface and a lower surface of the substrate on which the light absorption layer is formed, on which the first buffer layer is not formed; And forming a front electrode on an upper surface of the upper cell based on the substrate and forming a rear electrode on a lower surface of the lower cell, wherein the energy band gap of the light absorption layer included in the lower cell is included in the upper cell. It is characterized in that the narrower than the energy band gap of the light absorption layer.
- the present invention is characterized in that the upper side forms an upper cell and the lower side forms a lower cell centering on a substrate.
- Multi-junction solar cell using a compound thin film for achieving the above object the substrate; A first transparent electrode layer formed on an upper surface of the substrate and a second transparent electrode layer formed on a lower surface of the substrate; A first light absorbing layer formed on the first transparent electrode layer and a second light absorbing layer formed under the second transparent electrode layer; A first buffer layer formed over the first light absorbing layer and a second buffer layer formed under the second light absorbing layer; A front electrode formed on the first buffer layer; And a rear electrode formed under the second buffer layer, wherein the upper upper cell and the lower lower cell are symmetrically configured based on the substrate, and the energy band gap of the light absorption layer included in the lower cell is the upper cell. It is characterized in that the narrower than the energy bandgap of the light absorption layer included in.
- Multi-junction solar cell using another type of compound thin film, substrate A first transparent electrode layer formed on an upper surface of the substrate and a second transparent electrode layer formed on a lower surface of the substrate; A second buffer layer formed below the first transparent electrode layer and the first buffer layer formed on the first transparent electrode layer; A first light absorbing layer formed above the first buffer layer and a second light absorbing layer formed below the second buffer layer; A front electrode formed on the first light absorption layer; And a rear electrode formed below the second light absorbing layer, wherein the upper upper cell and the lower lower cell are symmetrically configured based on the substrate, and an energy band gap of the light absorbing layer included in the lower cell is upper than the upper electrode. It is characterized in that the narrower than the energy bandgap of the light absorption layer contained in the cell.
- the solar cell is manufactured by the above method and has a symmetrical shape with respect to the substrate, and may have a structure in which the first transparent electrode layer and the rear electrode are electrically connected or the second transparent electrode layer and the front electrode are electrically connected.
- the light absorption layer is made of CIGS material
- the rear electrode is made of metal reflective electrode.
- the upper cell and the lower cell are formed in the upper and lower centers around the substrate, respectively, without continuously stacking in one direction, so that in the case of manufacturing the lower cell and the upper cell sequentially in the past There is an effect of avoiding the problem that the light absorbing layer of the first cell is degraded by the heat generated in the manufacturing process of the cell to be manufactured and the damage occurring at the interface between the light absorbing layer and the buffer layer of the cell previously manufactured.
- the number of processes is reduced as compared to the case of manufacturing the upper cell and the lower cell, respectively, there is an effect that can prevent the problem occurring in the process of separately manufacturing the upper cell and the lower cell.
- 1 to 5 are schematic diagrams showing a method of manufacturing a multi-junction solar cell according to the present embodiment.
- FIG. 6 is a view showing the electrical connection of the multi-junction solar cell according to the present embodiment.
- FIG. 7 is a schematic diagram showing the structure of a multi-junction solar cell according to a second embodiment of the present invention.
- FIG. 8 is a view showing the electrical connection relationship of a multi-junction solar cell according to a second embodiment of the present invention.
- FIG. 9 is a schematic diagram showing the structure of a multi-junction solar cell according to a third embodiment of the present invention.
- FIG. 10 is a schematic diagram showing the structure of a multi-junction solar cell according to a fourth embodiment of the present invention.
- substrate 210 first transparent electrode layer
- first light absorbing layer 230 first buffer layer
- 1 to 5 are schematic diagrams showing a method of manufacturing a multi-junction solar cell according to the present embodiment.
- the first transparent electrode layer 210 and the second transparent electrode layer 310 are formed on the top and bottom surfaces of the substrate 100, respectively.
- the substrate 100 is positioned in the center of the multi-junction solar cell of the present embodiment, the light is transmitted through the upper cell to the lower cell, and the insulating material is preferably an electrically insulating material, but is not limited thereto.
- the first transparent electrode layer 210 and the second transparent electrode layer 310 is generally a TCO such as ITO, but is not limited thereto.
- the transparent electrode layer 210 and the second transparent electrode layer 310 may be made of a material through which electricity flows while transmitting light.
- the first transparent electrode layer 210 and the second transparent electrode layer 310 are sequentially or simultaneously formed on both surfaces of the substrate 100. The number of processes is reduced when the first transparent electrode layer 210 and the second transparent electrode layer 310 are formed at the same time.
- the first light absorbing layer 220 and the second light absorbing layer 320 are formed on the upper and lower surfaces of the first transparent electrode layer 210 and the second transparent electrode layer 310. At this time, it is preferable to simultaneously form the first light absorbing layer 220 and the second light absorbing layer 320, but it is also not necessary, and the first light absorbing layer 220 and the second light absorbing layer 320 may be sequentially formed. Do.
- the first light absorbing layer 220 and the second light absorbing layer 320 are light absorbing layers made of CIGS material, except that a light absorbing layer is formed on both sides of the substrate, thereby forming a conventional CIGS light absorbing layer. All methods can be applied. Specifically, both a non-vacuum method using a nanoparticle precursor or a solution precursor of a raw material and a vacuum method such as three-stage co-vacuum evaporation methods are possible.
- the energy band gaps of the first light absorbing layer 220 and the second light absorbing layer 320 are different from each other, and the energy band gap of the second light absorbing layer 320 constituting the lower cell constitutes the upper cell. It is configured to be narrower than the energy band gap of the one light absorption layer 220.
- CIGS is used as a material of the light absorption layer in the present embodiment, the present invention is not limited thereto.
- the first and second buffer layers 230 and 330 are formed on the upper and lower surfaces of the first and second light absorbing layers 220 and 320, respectively.
- the method of forming the first buffer layer 230 and the second buffer layer 330 is not particularly limited. Specifically, a CdS film is generally formed by a chemical bath deposition (CBD) process, a ZnS film or a ZnSe film may be formed by a CBD process, or an In x Se y film or a ZnIn x Se y film may be formed by an evaporation method. An In x Se y film or a ZnSe film may be formed by the step.
- the first buffer layer 230 and the second buffer layer 330 may be formed at the same time, or may be formed sequentially. The number of processes is reduced when the first buffer layer 230 and the second buffer layer 330 are simultaneously formed.
- the first light absorbing layer 220 and the second light absorbing layer 320 are first formed by the heat generated during the manufacturing process of the cell.
- the problem of deterioration of the light absorbing layer of the manufactured cell and damage occurring at the interface between the light absorbing layer and the buffer layer of the manufactured cell can be avoided.
- the number of processes is reduced compared to the case of manufacturing the upper and lower cells, respectively. Furthermore, there is an effect that can prevent a problem occurring in the process of separately manufacturing the upper cell and the lower cell bonding.
- the front electrode 240 and the rear electrode 340 are formed.
- the front electrode 240 is formed on the surface of the upper cell to the light incident to form a transparent electrode
- the rear electrode 340 is an electrode located on the lower surface of the lower cell metal material that can reflect the light To form a reflective electrode.
- the rear electrode 340 and the first transparent electrode layer 210 are electrically connected as shown in FIG. 5.
- the solar cell manufactured according to the present embodiment has a structure in which the upper cell and the lower cell have a symmetrical shape with respect to the substrate, and when the circuit diagram for the solar cell configuration is shown, as shown in FIG. It is an arranged form. Therefore, when the lower electrode of the upper cell and the upper electrode of the lower cell are electrically connected as in the conventional tandem solar cell, electricity does not flow, and the rear electrode 340 and the first transparent electrode layer 210 are electrically connected to each other. The electrode 240 and the second transparent electrode layer 310 must be electrically connected. Meanwhile, even in the 4-terminal structure in which the upper cell and the lower cell are individually connected without being connected in series, the direction of the current according to the structure of the solar cell should be considered.
- the second light absorption layer 320 is preferably thin. Specifically, the thickness of the second light absorption layer 320 is preferably 1 ⁇ m or less.
- this embodiment has been described for manufacturing a tandem solar cell having a basic structure, and various structures or processes may be added to increase the efficiency of the solar cell in a range that does not impair the technical features of the present invention.
- FIG. 7 is a schematic diagram showing the structure of a multi-junction solar cell according to a second embodiment of the present invention.
- the solar cell of FIG. 7 is the first solar cell of FIG. 5 in that the first buffer layer 230 and the second buffer layer 330 are first formed, and the first light absorption layer 220 and the second light absorption layer 320 are formed. There is a difference. Other parts except this are the same as the first solar cell, so a detailed description thereof will be omitted.
- the solar cell illustrated in FIG. 7 electrically connects the back electrode 340 and the first transparent electrode layer 210 or the front electrode 240.
- the second transparent electrode layer 310 must be electrically connected.
- the first light absorbing layer 220 is preferably thin. Specifically, the thickness of the first light absorption layer 220 is preferably 1 ⁇ m or less.
- FIGS. 9 and 10 are schematic diagrams showing the structure of a multi-junction solar cell manufactured according to the third and fourth embodiments.
- the illustrated embodiments are characterized in that after forming the first transparent electrode layer 210 and the second transparent electrode layer 310 on both surfaces of the substrate 100, the buffer layer is first formed on only one surface thereof.
- the first buffer layer 230 is first formed, the first light absorption layer 220 and the second light absorption layer 320 are formed, and the second buffer layer 330 is formed. It is done.
- the second buffer layer 330 is first formed, and then, the first light absorption layer 220 and the second light absorption layer 320 are formed, and the first buffer layer 230 is formed. .
- the first transparent electrode layer 210 and the second transparent electrode layer 310 are electrically connected to each other.
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Abstract
Description
본 발명은 다중접합 태양전지 및 그 제조 방법에 관한 것으로, 더욱 자세하게는 화합물 박막 태양전지 셀을 복수로 구비하는 다중접합 태양전지 및 그 제조 방법에 관한 것이다.The present invention relates to a multi-junction solar cell and a method for manufacturing the same, and more particularly, to a multi-junction solar cell having a plurality of compound thin film solar cell cells and a method of manufacturing the same.
최근 심각한 환경오염 문제와 화석 에너지 고갈로 차세대 청정에너지 개발에 대한 중요성이 증대되고 있다. 그 중에서도 태양전지는 태양 에너지를 직접 전기 에너지로 전환하는 장치로서, 공해가 적고, 자원이 무한적이며 반영구적인 수명이 있어 미래 에너지 문제를 해결할 수 있는 에너지원으로 기대되고 있다.Recently, the importance of developing the next generation of clean energy is increasing due to severe environmental pollution and depletion of fossil energy. Among them, the solar cell is a device that directly converts solar energy into electrical energy, and is expected to be an energy source capable of solving future energy problems due to its low pollution, infinite resources, and a semi-permanent lifetime.
태양전지는 광흡수층으로 사용되는 물질에 따라서 다양한 종류로 구분되며, 현재 가장 많이 사용되는 것은 실리콘을 이용한 실리콘 태양전지이다. 그러나 최근 실리콘의 공급부족으로 가격이 급등하면서 박막형 태양전지에 대한 관심이 증가하고 있다. 박막형 태양전지는 얇은 두께로 제작되므로 재료의 소모량이 적고, 무게가 가볍기 때문에 활용범위가 넓다. 이러한 박막형 태양전지의 재료로는 높은 광흡수 계수를 가지는 CIGS(Copper Indium Gallium Selenide)가 각광받고 있다. 이는 CIGS를 박막 태양전지의 제조에 사용함으로써 높은 변환효율을 얻을 수 있기 때문이다. Solar cells are classified into various types according to materials used as light absorption layers, and at present, the most commonly used are silicon solar cells using silicon. However, as prices have soared recently due to a shortage of silicon, interest in thin-film solar cells is increasing. Thin-film solar cells are manufactured with a thin thickness, so the materials are consumed less and the weight is lighter, so the application range is wide. As a material of such a thin-film solar cell, CIGS (Copper Indium Gallium Selenide) having a high light absorption coefficient has been in the spotlight. This is because high conversion efficiency can be obtained by using CIGS in the manufacture of thin film solar cells.
한편, CIGS 태양전지의 효율을 더욱더 높이기 위한 방안으로 제시되는 다중접합 구조의 탠덤(tandem) 태양전지에 대한 관심이 높아지고 있다. 탠덤(tandem) 구조의 태양전지는 단일 셀 CIGS 태양전지 두 개를 적층시킨 복층 구조의 태양전지를 말한다. 그러나 이러한 탠덤 구조의 태양전지의 경우 하부셀을 제조한 다음 상부셀을 그 위에 형성하게 되므로 상부셀을 형성하는 과정에서 이미 형성된 하부셀이 손상되는 문제가 발생하여 기대하는 에너지 변환효율을 얻기 어려운 문제가 있다.Meanwhile, interest in tandem solar cells having a multi-junction structure, which is proposed as a method for further increasing the efficiency of CIGS solar cells, is increasing. Tandem solar cell refers to a multi-layered solar cell in which two single-cell CIGS solar cells are stacked. However, in the case of such a tandem solar cell, the lower cell is manufactured and then the upper cell is formed thereon, so that the lower cell already formed is damaged in the process of forming the upper cell, thereby making it difficult to obtain the expected energy conversion efficiency. There is.
이런 문제를 해결하기 위하여, 상부셀과 하부셀을 별도로 제조한 뒤에 결합하는 기술이 개발되었으나, 제조 공정이 복잡하고 별도로 제조된 셀을 부착하는 과정에서 문제가 발생하고 있다.In order to solve this problem, a technique of manufacturing the upper cell and the lower cell and then combining them has been developed. However, the manufacturing process is complicated and a problem arises in the process of attaching a separately manufactured cell.
[선행기술문헌][Preceding technical literature]
[특허문헌][Patent Documents]
(특허문헌 1) 대한민국 공개특허 10-2010-0028729(Patent Document 1) Republic of Korea Patent Publication 10-2010-0028729
(특허문헌 2) 미국 공개특허 2012-0204939(Patent Document 2) United States Patent Publication 2012-0204939
본 발명은 전술한 종래 기술의 문제점을 해결하기 위한 것으로서 제조공정이 간단하면서 셀의 열화문제가 없는 다중접합 태양전지 및 그 제조방법을 제공하는데 그 목적이 있다.SUMMARY OF THE INVENTION The present invention has been made in view of the above-described problems of the prior art, and a purpose of the present invention is to provide a multi-junction solar cell and a method of manufacturing the same, in which the manufacturing process is simple and there is no problem of cell degradation.
상기한 목적을 달성하기 위한 화합물 박막을 이용한 다중접합 태양전지 제조 방법은, 기판의 상면과 하면에 투명전극층을 형성하는 단계; 상기 투명전극층이 형성된 기판의 상면과 하면에 광흡수층을 형성하는 단계; 상기 광흡수층이 형성된 기판의 상면과 하면에 버퍼층을 형성하는 단계; 및 상기 버퍼층이 형성된 기판의 상면에 전면전극을 형성하고 하면에 후면전극을 형성하는 단계;를 포함한다.Multi-junction solar cell manufacturing method using a compound thin film for achieving the above object comprises the steps of forming a transparent electrode layer on the upper and lower surfaces of the substrate; Forming a light absorption layer on upper and lower surfaces of the substrate on which the transparent electrode layer is formed; Forming a buffer layer on an upper surface and a lower surface of the substrate on which the light absorption layer is formed; And forming a front electrode on a top surface of the substrate on which the buffer layer is formed and a back electrode on a bottom surface of the substrate.
다른 형태의 화합물 박막을 이용한 다중접합 태양전지 제조 방법은, 기판의 상면과 하면에 투명전극층을 형성하는 단계; 상기 투명전극층이 형성된 기판의 상면과 하면에 버퍼층을 형성하는 단계; 상기 버퍼층이 형성된 기판의 상면과 하면에 광흡수층을 형성하는 단계; 및 상기 광흡수층이 형성된 기판의 상면에 전면전극을 형성하고 하면에 후면전극을 형성하는 단계;를 포함한다.Multi-junction solar cell manufacturing method using a compound thin film of another form, forming a transparent electrode layer on the upper and lower surfaces of the substrate; Forming a buffer layer on an upper surface and a lower surface of the substrate on which the transparent electrode layer is formed; Forming a light absorption layer on upper and lower surfaces of the substrate on which the buffer layer is formed; And forming a front electrode on an upper surface of the substrate on which the light absorption layer is formed and a rear electrode on a lower surface of the substrate.
이와 같이 제조된 태양전지는, 기판을 기준으로 위쪽의 상부셀과 아래쪽의 하부셀이 대칭으로 구성되고, 하부셀에 포함된 광흡수층의 에너지 밴드갭이 상부셀에 포함된 광흡수층의 에너지 밴드갭보다 좁은 것을 특징으로 한다.In the solar cell manufactured as described above, an upper upper cell and a lower lower cell are formed symmetrically with respect to the substrate, and an energy band gap of the light absorbing layer including the energy band gap of the light absorbing layer included in the lower cell is included in the upper cell. It is characterized by a narrower.
이때, 상부셀과 상기 하부셀을 전기적으로 연결하는 단계를 더 포함할 수 있으며, 이때 상부셀의 투명전극층과 하부셀의 후면전극을 전기적으로 연결하거나 상부셀의 전면전극과 하부셀의 투명전극층을 전기적으로 연결하여야 전류가 흐른다.In this case, the method may further include electrically connecting the upper cell and the lower cell, wherein the transparent electrode layer of the upper cell and the rear electrode of the lower cell are electrically connected or the front electrode of the upper cell and the transparent electrode layer of the lower cell are electrically connected. The electrical current must be connected electrically.
광흡수층은 CIGS, CdTe, CZTS, III-V족 반도체 및 페로브스카이트 구조물질 중에서 선택된 하나 이상의 재질인 것이 바람직하나, 이를 한정하는 것은 아니다. The light absorbing layer is preferably one or more materials selected from CIGS, CdTe, CZTS, group III-V semiconductor and perovskite structure material, but is not limited thereto.
나아가, 광흡수층을 형성하는 단계에서 광흡수층을 상부셀과 하부셀에 동시에 형성하는 것이 바람직하다. 또한 버퍼층을 형성하는 단계에서 버퍼층을 상부셀과 하부셀에 동시에 형성할 수 있고, 투명전극층을 형성하는 단계에서도 기판의 양면에 투명전극층을 동시에 형성할 수 있으며, 이를 통하여 공정을 줄일 수 있다.Furthermore, in the step of forming the light absorption layer, it is preferable to simultaneously form the light absorption layer in the upper cell and the lower cell. In addition, the buffer layer may be simultaneously formed in the upper cell and the lower cell in the step of forming the buffer layer, and the transparent electrode layer may be simultaneously formed on both sides of the substrate in the step of forming the transparent electrode layer, thereby reducing the process.
또 다른 형태의 화합물 박막을 이용한 다중접합 태양전지 제조 방법은, 기판의 상면과 하면에 투명전극층을 형성하는 단계; 상기 투명전극층이 형성된 기판의 상면과 하면 중 한 곳에만 제1버퍼층을 형성하는 단계; 상기 제1버퍼층만 형성된 기판의 상면과 하면에 광흡수층을 형성하는 단계; 상기 광흡수층이 형성된 기판의 상면과 하면 중에 상기 제1버퍼층이 형성되지 않은 쪽에 제2버퍼층을 형성하는 단계; 및 상기 기판을 기준으로 위쪽의 상부셀 윗면에 전면전극을 형성하고 아래쪽의 하부셀 아랫면에 후면전극을 형성하는 단계;를 포함하며, 하부셀에 포함된 광흡수층의 에너지 밴드갭이 상부셀에 포함된 광흡수층의 에너지 밴드갭보다 좁은 것을 특징으로 한다.Another method of manufacturing a multi-junction solar cell using a compound thin film includes: forming a transparent electrode layer on an upper surface and a lower surface of a substrate; Forming a first buffer layer on only one of an upper surface and a lower surface of the substrate on which the transparent electrode layer is formed; Forming a light absorption layer on upper and lower surfaces of the substrate on which only the first buffer layer is formed; Forming a second buffer layer on an upper surface and a lower surface of the substrate on which the light absorption layer is formed, on which the first buffer layer is not formed; And forming a front electrode on an upper surface of the upper cell based on the substrate and forming a rear electrode on a lower surface of the lower cell, wherein the energy band gap of the light absorption layer included in the lower cell is included in the upper cell. It is characterized in that the narrower than the energy band gap of the light absorption layer.
종래에 다중접합 태양전지가 아래쪽에서 위쪽 또는 위쪽에서 아래쪽 방향으로 순차 형성하였던 것과 달리, 본 발명은 기판을 중심으로 위쪽은 상부셀을 형성하고 아래쪽은 하부셀을 형성하는 것을 특징으로 한다.Unlike the conventional multi-junction solar cell formed sequentially from the bottom to the top or from the top to the bottom, the present invention is characterized in that the upper side forms an upper cell and the lower side forms a lower cell centering on a substrate.
상기한 목적을 달성하기 위한 화합물 박막을 이용한 다중접합 태양전지는, 기판; 상기 기판의 상면에 형성된 제1투명전극층과 하면에 형성된 제2투명전극층; 상기 제1투명전극층의 위에 형성된 제1광흡수층과 상기 제2투명전극층의 아래에 형성된 제2광흡수층; 상기 제1광흡수층의 위에 형성된 제1버퍼층과 상기 제2광흡수층의 아래에 형성된 제2버퍼층; 상기 제1버퍼층의 위에 형성된 전면전극; 및 상기 제2버퍼층의 아래에 형성된 후면전극;을 포함하여, 상기 기판을 기준으로 위쪽의 상부셀과 아래쪽의 하부셀이 대칭으로 구성되며, 하부셀에 포함된 광흡수층의 에너지 밴드갭이 상부셀에 포함된 광흡수층의 에너지 밴드갭보다 좁은 것을 특징으로 한다.Multi-junction solar cell using a compound thin film for achieving the above object, the substrate; A first transparent electrode layer formed on an upper surface of the substrate and a second transparent electrode layer formed on a lower surface of the substrate; A first light absorbing layer formed on the first transparent electrode layer and a second light absorbing layer formed under the second transparent electrode layer; A first buffer layer formed over the first light absorbing layer and a second buffer layer formed under the second light absorbing layer; A front electrode formed on the first buffer layer; And a rear electrode formed under the second buffer layer, wherein the upper upper cell and the lower lower cell are symmetrically configured based on the substrate, and the energy band gap of the light absorption layer included in the lower cell is the upper cell. It is characterized in that the narrower than the energy bandgap of the light absorption layer included in.
다른 형태의 화합물 박막을 이용한 다중접합 태양전지는, 기판; 상기 기판의 상면에 형성된 제1투명전극층과 하면에 형성된 제2투명전극층; 상기 제1투명전극층의 위에 형성된 제1버퍼층과 상기 제2투명전극층의 아래에 형성된 제2버퍼층; 상기 제1버퍼층의 위에 형성된 제1광흡수층과 상기 제2버퍼층의 아래에 형성된 제2광흡수층; 상기 제1광흡수층의 위에 형성된 전면전극; 및 상기 제2광흡수층의 아래에 형성된 후면전극;을 포함하여, 상기 기판을 기준으로 위쪽의 상부셀과 아래쪽의 하부셀이 대칭으로 구성되며, 하부셀에 포함된 광흡수층의 에너지 밴드갭이 상부셀에 포함된 광흡수층의 에너지 밴드갭보다 좁은 것을 특징으로 한다.Multi-junction solar cell using another type of compound thin film, substrate; A first transparent electrode layer formed on an upper surface of the substrate and a second transparent electrode layer formed on a lower surface of the substrate; A second buffer layer formed below the first transparent electrode layer and the first buffer layer formed on the first transparent electrode layer; A first light absorbing layer formed above the first buffer layer and a second light absorbing layer formed below the second buffer layer; A front electrode formed on the first light absorption layer; And a rear electrode formed below the second light absorbing layer, wherein the upper upper cell and the lower lower cell are symmetrically configured based on the substrate, and an energy band gap of the light absorbing layer included in the lower cell is upper than the upper electrode. It is characterized in that the narrower than the energy bandgap of the light absorption layer contained in the cell.
이러한 태양전지는 상기한 방법에 의해서 제조되어 기판을 기준으로 대칭 형태이며, 제1투명전극층과 후면전극이 전기적으로 연결되거나 제2투명전극층과 전면전극이 전기적으로 연결된 구조일 수 있다.The solar cell is manufactured by the above method and has a symmetrical shape with respect to the substrate, and may have a structure in which the first transparent electrode layer and the rear electrode are electrically connected or the second transparent electrode layer and the front electrode are electrically connected.
광흡수층은 CIGS 재질인 것이 바람직하며, 후면전극은 금속재질의 반사형 전극인 것이 좋다.Preferably, the light absorption layer is made of CIGS material, and the rear electrode is made of metal reflective electrode.
상술한 바와 같이 구성된 본 발명은, 상부셀과 하부셀을 한쪽 방향으로 계속하여 적층하지 않고 기판을 중심으로 위쪽과 아래쪽으로 각각 형성함으로써, 종래에 하부셀과 상부셀을 순차적으로 제조하는 경우에 나중에 제조되는 셀의 제조과정에서 발생하는 열에 의하여 먼저 제조된 셀의 광흡수층이 열화되는 문제 및 먼저 제조된 셀의 광흡수층과 버퍼층의 계면에서 발생하는 손상을 피할 수 있는 효과가 있다.The present invention configured as described above, the upper cell and the lower cell are formed in the upper and lower centers around the substrate, respectively, without continuously stacking in one direction, so that in the case of manufacturing the lower cell and the upper cell sequentially in the past There is an effect of avoiding the problem that the light absorbing layer of the first cell is degraded by the heat generated in the manufacturing process of the cell to be manufactured and the damage occurring at the interface between the light absorbing layer and the buffer layer of the cell previously manufactured.
또한, 상부셀과 하부셀을 각각 제조하는 경우에 비하여 공정 수가 줄어들며, 상부셀과 하부셀을 별도로 제조하여 접합하는 과정에서 발생하는 문제를 방지할 수 있는 효과가 있다.In addition, the number of processes is reduced as compared to the case of manufacturing the upper cell and the lower cell, respectively, there is an effect that can prevent the problem occurring in the process of separately manufacturing the upper cell and the lower cell.
도 1 내지 도 5는 본 실시예에 따른 다중접합 태양전지의 제조방법을 나타내는 모식도이다.1 to 5 are schematic diagrams showing a method of manufacturing a multi-junction solar cell according to the present embodiment.
도 6은 본 실시예에 따른 다중접합 태양전지의 전기적 연결 관계를 나타내는 도면이다.6 is a view showing the electrical connection of the multi-junction solar cell according to the present embodiment.
도 7은 본 발명의 두 번째 실시예에 따른 다중접합 태양전지의 구조를 나타내는 모식도이다.7 is a schematic diagram showing the structure of a multi-junction solar cell according to a second embodiment of the present invention.
도 8은 본 발명의 두 번째 실시예에 따른 다중접합 태양전지의 전기적 연결 관계를 나타내는 도면이다.8 is a view showing the electrical connection relationship of a multi-junction solar cell according to a second embodiment of the present invention.
도 9는 본 발명의 세 번째 실시예에 따른 다중접합 태양전지의 구조를 나타내는 모식도이다.9 is a schematic diagram showing the structure of a multi-junction solar cell according to a third embodiment of the present invention.
도 10은 본 발명의 네 번째 실시예에 따른 다중접합 태양전지의 구조를 나타내는 모식도이다.10 is a schematic diagram showing the structure of a multi-junction solar cell according to a fourth embodiment of the present invention.
[부호의 설명][Description of the code]
100: 기판 210: 제1투명전극층100: substrate 210: first transparent electrode layer
220: 제1광흡수층 230: 제1버퍼층220: first light absorbing layer 230: first buffer layer
240: 전면전극 310: 제2투명전극층240: front electrode 310: second transparent electrode layer
320: 제2광흡수층 330: 제2버퍼층320: second light absorbing layer 330: second buffer layer
340: 후면전극340: rear electrode
첨부된 도면을 참조하여 본 발명에 따른 실시예를 상세히 설명한다. With reference to the accompanying drawings will be described embodiments of the present invention;
도 1 내지 도 5는 본 실시예에 따른 다중접합 태양전지의 제조방법을 나타내는 모식도이다.1 to 5 are schematic diagrams showing a method of manufacturing a multi-junction solar cell according to the present embodiment.
도 1에 도시된 것과 같이, 기판(100)의 상면과 하면 각각에 제1투명전극층(210)과 제2투명전극층(310)을 형성한다.As shown in FIG. 1, the first
기판(100)은 본 실시예의 다중접합 태양전지에서 가운데에 위치하므로, 상부셀을 투과한 빛이 하부셀로 진행할 수 있도록 투명재질이며, 전기적으로 절연재질이 바람직하나 이를 꼭 한정하는 것은 아니다. Since the
제1투명전극층(210)과 제2투명전극층(310)은 ITO와 같은 TCO인 것이 일반적이나, 이에 한정되지 않고 빛을 투과시키면서 전기가 흐르는 재질이면 가능하다.The first
제1투명전극층(210)과 제2투명전극층(310)은 기판(100)의 양면에 순차적으로 형성되거나 동시에 형성된다. 제1투명전극층(210)과 제2투명전극층(310)을 동시에 형성하는 경우에 공정 수가 줄어든다.The first
도 2에 도시된 것과 같이, 제1투명전극층(210)과 제2투명전극층(310)이 형성된 상면과 하면에 제1광흡수층(220)과 제2광흡수층(320)을 형성한다. 이때, 제1광흡수층(220)과 제2광흡수층(320)을 동시에 형성하는 것이 바람직하지만, 필수적인 것은 아니고 제1광흡수층(220)과 제2광흡수층(320)을 순차적으로 형성하는 것도 가능하다.As shown in FIG. 2, the first
본 실시예는 제1광흡수층(220)과 제2광흡수층(320)이 CIGS 재질의 광흡수층이며, 기판을 중심으로 양면에 광흡수층을 형성하는 것을 제외하고는 종래의 CIGS 광흡수층을 형성하는 모든 방법을 적용할 수 있다. 구체적으로 원료물질의 나노입자 전구체 또는 용액 전구체를 이용하는 비진공법과 3단계의 동시진공 증발법과 같은 진공법이 모두 가능하다. 다만, 제1광흡수층(220)과 제2광흡수층(320)의 에너지 밴드갭은 서로 다르게 구성하며, 하부셀을 구성하는 제2광흡수층(320)의 에너지 밴드갭이 상부셀을 구성하는 제1광흡수층(220)의 에너지 밴드갭보다 좁도록 구성한다. 한편, 본 실시예에서 광흡수층의 재질로서 CIGS를 사용하였으나, 이에 한정되는 것은 아니다.In the present embodiment, the first
도 3에 도시된 것과 같이, 제1광흡수층(220)과 제2광흡수층(320)이 형성된 상면과 하면에 제1버퍼층(230)과 제2버퍼층(330)을 형성한다.As shown in FIG. 3, the first and second buffer layers 230 and 330 are formed on the upper and lower surfaces of the first and second
제1버퍼층(230)과 제2버퍼층(330)을 형성하는 방법은 특별히 제한되지 않는다. 구체적으로 CBD(chemical bath deposition) 공정으로 CdS막을 형성하는 것이 일반적이며, CBD 공정으로 ZnS막 또는 ZnSe막을 형성하거나, 증발법으로 InxSey막 또는 ZnInxSey막을 형성할 수도 있으며, CVD 기반 공정으로 InxSey막 또는 ZnSe막을 형성할 수도 있다. 제1버퍼층(230)과 제2버퍼층(330)은 동시에 형성될 수도 있고, 순차적으로 형성될 수도 있다. 제1버퍼층(230)과 제2버퍼층(330)을 동시에 형성하는 경우에 공정 수가 줄어든다.The method of forming the
이와 같이, 제1광흡수층(220)과 제2광흡수층(320)을 동시에 형성함으로써, 종래에 하부셀과 상부셀을 순차적으로 제조하는 경우에 나중에 제조되는 셀의 제조과정에서 발생하는 열에 의하여 먼저 제조된 셀의 광흡수층이 열화되는 문제 및 먼저 제조된 셀의 광흡수층과 버퍼층의 계면에서 발생하는 손상을 피할 수 있다. 또한, 상부셀과 하부셀을 각각 제조하는 경우에 비하여 공정 수가 줄어든다. 나아가 상부셀과 하부셀을 별도로 제조하여 접합하는 과정에서 발생하는 문제를 방지할 수 있는 효과가 있다.As such, by simultaneously forming the first
다음으로 도 4에 도시된 것과 같이, 전면전극(240)과 후면전극(340)을 형성한다.Next, as shown in FIG. 4, the
이때, 전면전극(240)은 빛이 입사되는 상부셀의 표면에 위치하는 전극으로서 투명전극을 형성하며, 후면전극(340)은 하부셀의 아랫면에 위치하는 전극이므로 빛을 반사할 수 있는 금속 재질의 반사형전극을 형성한다.At this time, the
상부셀과 하부셀을 전기적으로 연결하기 위하여, 도 5에 도시된 것과 같이 후면전극(340)과 제1투명전극층(210)을 전기적으로 연결한다.In order to electrically connect the upper cell and the lower cell, the
본 실시예에 따라서 제조된 태양전지는 상부셀과 하부셀이 기판을 중심으로 대칭 형태를 나타내는 구조이며, 태양전지 구성을 위한 회로도 형태로 표시하면 도 6에 도시된 것과 같이 pn접합이 반대방향으로 배열된 형태이다. 따라서 종래의 탠덤 태양전지와 같이 상부셀의 아래쪽 전극과 하부셀의 위쪽 전극을 전기적으로 연결하는 경우에는 전기가 흐르지 못하며, 후면전극(340)과 제1투명전극층(210)을 전기적으로 연결하거나 전면전극(240)과 제2투명전극층(310)을 전기적으로 연결하여야 한다. 한편, 상부셀과 하부셀을 직렬연결하지 않고 개별적으로 연결하는 4단자 구조에서도 태양전지 셀의 구조에 따른 전류의 방향을 고려하여야 한다.The solar cell manufactured according to the present embodiment has a structure in which the upper cell and the lower cell have a symmetrical shape with respect to the substrate, and when the circuit diagram for the solar cell configuration is shown, as shown in FIG. It is an arranged form. Therefore, when the lower electrode of the upper cell and the upper electrode of the lower cell are electrically connected as in the conventional tandem solar cell, electricity does not flow, and the
또한, 본 실시예에 따라서 제조된 태양전지의 하부셀은 제2광흡수층과 제2버퍼층(330)의 접합면이 제2투명전극층(310)에서 상대적으로 먼 위치에 배치되기 때문에, 광전하의 포집 효율을 높이기 위해서는 제2광흡수층(320)이 얇은 것이 바람직하다. 구체적으로 제2광흡수층(320)의 두께는 1 ㎛이하인 것이 바람직하다.In addition, in the lower cell of the solar cell manufactured according to the present embodiment, since the junction surface of the second light absorbing layer and the
나아가 본 실시예는 기본적인 구조로 구성되는 탠덤 태양전지를 제조하는 것에 대하여 설명한 것이며, 본 발명의 기술적 특징을 해치지 않는 범위에서 태양전지의 효율을 높이기 위한 다양한 구조 또는 공정이 추가될 수 있다.Furthermore, this embodiment has been described for manufacturing a tandem solar cell having a basic structure, and various structures or processes may be added to increase the efficiency of the solar cell in a range that does not impair the technical features of the present invention.
도 7은 본 발명의 두 번째 실시예에 따른 다중접합 태양전지의 구조를 나타내는 모식도이다.7 is a schematic diagram showing the structure of a multi-junction solar cell according to a second embodiment of the present invention.
도 7의 태양전지는 제1버퍼층(230)과 제2버퍼층(330)을 먼저 형성하고 제1광흡수층(220)과 제2광흡수층(320)을 형성하는 점에서 도 5의 첫 번째 태양전지와 차이가 있다. 이를 제외한 다른 부분은 첫 번째 태양전지와 동일하므로 자세한 설명은 생략한다. The solar cell of FIG. 7 is the first solar cell of FIG. 5 in that the
한편, 도 7에 도시된 태양전지는 도 8에 도시된 것과 같이 pn접합이 반대방향으로 배열된 형태이므로, 후면전극(340)과 제1투명전극층(210)을 전기적으로 연결하거나 전면전극(240)과 제2투명전극층(310)을 전기적으로 연결하여야 한다.Meanwhile, since the pn junction is arranged in the opposite direction as shown in FIG. 8, the solar cell illustrated in FIG. 7 electrically connects the
다만, 도 7의 실시예에 따라서 제조된 태양전지의 상부셀은 제1광흡수층과 제1버퍼층(230)의 접합면이 제1투명전극층(210)에서 상대적으로 먼 위치에 배치되기 때문에, 광전하의 포집 효율을 높이기 위해서는 제1광흡수층(220)이 얇은 것이 바람직하다. 구체적으로 제1광흡수층(220)의 두께가 1 ㎛ 이하인 것이 바람직하다.However, in the upper cell of the solar cell manufactured according to the embodiment of FIG. 7, since the junction surface of the first light absorbing layer and the
도 9와 도 10은 세 번째 및 네 번째 실시예에 따라 제조된 다중접합 태양전지의 구조를 나타내는 모식도이다.9 and 10 are schematic diagrams showing the structure of a multi-junction solar cell manufactured according to the third and fourth embodiments.
도시된 실시예들은 기판(100)의 양면에 제1투명전극층(210)과 제2투명전극층(310)을 형성한 뒤에, 한쪽 면에만 버퍼층을 먼저 형성하는 것을 특징으로 한다.The illustrated embodiments are characterized in that after forming the first
구체적으로 도 9의 태양전지는 제1버퍼층(230)만을 먼저 형성한 뒤에, 제1광흡수층(220)과 제2광흡수층(320)을 형성하고, 제2버퍼층(330)을 형성한 것을 특징으로 한다. 도 10의 태양전지는 제2버퍼층(330)만을 먼저 형성한 뒤에, 제1광흡수층(220)과 제2광흡수층(320)을 형성하고, 제1버퍼층(230)을 형성한 것을 특징으로 한다. Specifically, in the solar cell of FIG. 9, only the
이러한 순서로 제조된 태양전지는 pn-pn 또는 np-np 순서로 배열되어있기 때문에, 제1투명전극층(210)과 제2투명전극층(310)을 전기적으로 연결한다.Since the solar cells manufactured in this order are arranged in the order of pn-pn or np-np, the first
이상 본 발명을 바람직한 실시예를 통하여 설명하였는데, 상술한 실시예는 본 발명의 기술적 사상을 예시적으로 설명한 것에 불과하며, 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 다양한 변화가 가능함은 이 분야에서 통상의 지식을 가진 자라면 이해할 수 있을 것이다. 따라서 본 발명의 보호범위는 특정 실시예가 아니라 특허청구범위에 기재된 사항에 의해 해석되어야 하며, 그와 동등한 범위 내에 있는 모든 기술적 사상도 본 발명의 권리범위에 포함되는 것으로 해석되어야 할 것이다.While the present invention has been described through the preferred embodiments, the above-described embodiments are merely illustrative of the technical idea of the present invention, and various changes may be made without departing from the technical idea of the present invention. Those of ordinary skill will understand. Therefore, the protection scope of the present invention should be interpreted not by the specific embodiments, but by the matters described in the claims, and all technical ideas within the equivalent scope should be interpreted as being included in the scope of the present invention.
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