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WO2016059980A1 - Liquid epoxy resin composition - Google Patents

Liquid epoxy resin composition Download PDF

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Publication number
WO2016059980A1
WO2016059980A1 PCT/JP2015/078065 JP2015078065W WO2016059980A1 WO 2016059980 A1 WO2016059980 A1 WO 2016059980A1 JP 2015078065 W JP2015078065 W JP 2015078065W WO 2016059980 A1 WO2016059980 A1 WO 2016059980A1
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Prior art keywords
epoxy resin
resin composition
liquid
liquid epoxy
component
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PCT/JP2015/078065
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French (fr)
Japanese (ja)
Inventor
敏行 佐藤
洋希 本間
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Namics Corp
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Namics Corp
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/40Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the curing agents used
    • C08G59/42Polycarboxylic acids; Anhydrides, halides or low molecular weight esters thereof
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/16Nitrogen-containing compounds
    • C08K5/34Heterocyclic compounds having nitrogen in the ring
    • C08K5/3442Heterocyclic compounds having nitrogen in the ring having two nitrogen atoms in the ring
    • C08K5/3445Five-membered rings
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08KUse of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00Use of organic ingredients
    • C08K5/54Silicon-containing compounds
    • C08K5/541Silicon-containing compounds containing oxygen
    • C08K5/5415Silicon-containing compounds containing oxygen containing at least one Si—O bond
    • C08K5/5419Silicon-containing compounds containing oxygen containing at least one Si—O bond containing at least one Si—C bond
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L51/00Compositions of graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers
    • C08L51/04Compositions of graft polymers in which the grafted component is obtained by reactions only involving carbon-to-carbon unsaturated bonds; Compositions of derivatives of such polymers grafted on to rubbers
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Definitions

  • the present invention relates to a liquid epoxy resin composition, and more particularly to a liquid epoxy resin composition suitable for an underfill agent for a semiconductor element for chip-on-film package.
  • Flip chip bonding is used in semiconductor packages such as COF (Chip On Film) packages, which are mounting methods for semiconductor elements that can support higher density and higher output of semiconductor devices such as liquid crystal driver ICs. Yes.
  • COF Chip On Film
  • a semiconductor element and a substrate are joined by bumps, and a gap between the semiconductor element and the substrate is sealed with a liquid semiconductor sealing agent called an underfill material.
  • FIG. 1 is a schematic diagram for explaining the migration of copper wiring.
  • the migration starts with the anode 2, Cu is eluted by the reaction formula: Cu + (OH ⁇ ) ⁇ Cu (OH), and Cu (OH) moves on the substrate 1 in the direction of the solid arrow, that is, toward the cathode 3,
  • Cu is deposited on the substrate 1 in the direction of the broken line arrow, that is, in the direction of the anode 2 by the reaction formula: CuOH + H 3 O + ⁇ Cu + 2H 2 O.
  • copper wiring is sealed with an epoxy resin-based resin composition, but migration occurs due to OH ⁇ or H 3 O + derived from H 2 O absorbed in the epoxy resin. Furthermore, migration is dramatically accelerated if there are Cl 2 ⁇ ions in the atmosphere.
  • This Cl ⁇ ion is usually present as an impurity of the epoxy resin.
  • Cu (OH) may be Cu (OH) 2 or Cu (OH) + precisely, and in the case of Cu (OH) 2 , it moves to the cathode side due to the concentration difference. In the case of Cu (OH) + , it moves electrically.
  • Patent Document 1 An underfill agent containing a metal ion binder has been reported (Patent Document 1). This underfill agent suppresses migration by immobilizing metal ions eluted by an electrochemical reaction with a metal ion binder.
  • the properties of the underfill agent such as the underfill agent thickening during storage and the glass transition temperature of the underfill agent are reduced. There's a problem.
  • a metal ion binder is included in the underfill agent, there is a problem of deterioration in adhesion and heat resistance due to the addition of a material that is not incorporated into the polymer skeleton, and a halogen concentration that easily induces migration. There is also a problem that the material cost required for the processing for lowering becomes high.
  • COF mounting sealant As a chip-on-film (hereinafter referred to as COF) mounting sealant, it includes (A) an epoxy resin, (B) an acid anhydride-based curing agent, and (C) an imidazole-based and / or triazine-based curing accelerator.
  • the present invention can be used as a fine-pitch COF mounting sealant, and maintains high flow performance while suppressing peeling during cooling or reliability testing in the sealing process, thereby enabling high-temperature and high-humidity testing. It aims at providing the liquid epoxy resin composition which can suppress generation
  • the present invention relates to a liquid epoxy resin composition, a liquid semiconductor sealing material, and a semiconductor device that have solved the above problems by having the following configuration.
  • [1] containing (A) a liquid epoxy resin, (B) an acid anhydride curing agent, (C) an imidazole compound curing accelerator, and (D) an elastomer having a core-shell structure subjected to a masterbatch treatment,
  • the liquid epoxy resin composition wherein the component (D) is 1 to 10 parts by mass with respect to 100 parts by mass of the liquid epoxy resin composition.
  • a liquid semiconductor encapsulant comprising the liquid epoxy resin composition according to any one of [1] to [3].
  • a liquid encapsulant for a liquid crystal driver comprising the liquid semiconductor encapsulant according to [4] above.
  • the present invention [1] it can be used as a fine pitch COF mounting sealant, and suppresses peeling during cooling or reliability testing in the sealing process without deteriorating fluidity.
  • the liquid epoxy resin composition which can suppress the migration which generate
  • the liquid epoxy resin composition of the present invention comprises (A) a liquid epoxy resin, (B) an acid anhydride curing agent, (C) an imidazole compound curing accelerator, and (D) an elastomer having a core-shell structure subjected to a masterbatch treatment. Contains, The component (D) is 1 to 10 parts by mass with respect to 100 parts by mass of the liquid epoxy resin composition.
  • component (A) aminophenol type epoxy resin, liquid bisphenol A type epoxy resin, liquid bisphenol F type epoxy resin, liquid naphthalene type epoxy resin, liquid hydrogenated bisphenol type epoxy resin, liquid alicyclic epoxy resin, liquid alcohol
  • component (A) aminophenol type epoxy resin, liquid bisphenol A type epoxy resin, liquid bisphenol F type epoxy resin, liquid naphthalene type epoxy resin, liquid hydrogenated bisphenol type epoxy resin, liquid alicyclic epoxy resin, liquid alcohol
  • ether type epoxy resins liquid cycloaliphatic type epoxy resins, liquid fluorene type epoxy resins, and liquid siloxane-based epoxy resins.
  • a type epoxy resin is preferred.
  • the aminophenol type epoxy resin that can be contained in the component (A) suppresses the occurrence of migration of the liquid epoxy resin composition after curing by forming a resin skeleton having a high crosslinking density.
  • the aminophenol type epoxy resin is preferably represented by the formula (1):
  • the epoxy equivalent of the component (A) is preferably 80 to 250 g / eq from the viewpoint of adjusting the viscosity.
  • Commercially available products of component (A) include Daicel Chemical's bisphenol A type epoxy resin (product name: LX-01), Mitsubishi Chemical's aminophenol type epoxy resin (grade: JER630, JER630LSD), Nippon Steel Chemical's bisphenol A type.
  • Epoxy resin product name: YDF8170
  • Nippon Steel Chemicals bisphenol F type epoxy resin product name: YDF870GS
  • DIC naphthalene type epoxy resin product name: HP4032D
  • Shin-Etsu Chemical siloxane epoxy resin product name: TSL9906), etc.
  • a component may be individual or may use 2 or more types together.
  • Component (B) imparts good reactivity (curing speed) and appropriate viscosity imparting to the liquid epoxy resin composition.
  • component (B) methyltetrahydrophthalic anhydride, methylbutenyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyl hymic acid Examples include anhydrides, succinic anhydrides substituted with alkenyl groups, methyl nadic anhydrides, glutaric anhydrides, and the like, and methylbutenyl tetrahydrophthalic anhydride is preferred. Examples of commercially available products include acid anhydrides (grade: YH306, YH307) manufactured by Mitsubishi Chemical. (B) A component may be individual or may use 2 or more types together.
  • component (C) The component imparts an appropriate curing rate to the liquid epoxy resin composition.
  • examples of the component (C) include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, and the like.
  • Commercially available products of component (C) include 2-phenyl-4-methylimidazole (product name: 2P4MZ) manufactured by Shikoku Chemicals, 2,4-diamino-6- [2′-methylimidazolyl- (1 ′)] manufactured by Shikoku Chemicals -Ethyl-s-triazine (product name: 2MZA).
  • a component may be individual or may use 2 or more types together.
  • the component (D) imparts injectability to the liquid epoxy resin composition and suppresses peeling and migration of the liquid epoxy resin composition after curing.
  • the elastomer having a core-shell structure that is masterbatch-treated with the component (D) include core: polybutadiene, shell: acrylic copolymer, core: silicone resin, shell: acrylic copolymer, and the like, and a liquid epoxy resin composition Since the shrinkage stress of the liquid epoxy resin composition can be lowered due to the low elastic modulus in the use temperature range, a core: polybutadiene and a shell: acrylic copolymer are preferable.
  • Commercially available elastomers having a core-shell structure include Kaneka core-shell rubber (product name: MX-137) and Mitsubishi Rayon core-shell rubber (product name: W5500).
  • Masterbatch processing to an elastomer having a core-shell structure can be performed with a curing agent such as an epoxy resin or an acid anhydride, and an epoxy resin, particularly a bisphenol type epoxy resin is preferred from the viewpoint of storage stability and presence or absence of adverse effects on humidity.
  • a curing agent such as an epoxy resin or an acid anhydride
  • an epoxy resin particularly a bisphenol type epoxy resin is preferred from the viewpoint of storage stability and presence or absence of adverse effects on humidity.
  • the bisphenol type epoxy resin include bisphenol A type epoxy resin and bisphenol F type epoxy resin, and bisphenol F type epoxy resin is more preferable.
  • (D) Although a form is not specifically limited, (D) Component dispersibility, Workability
  • the average particle diameter is measured with a laser diffraction particle size distribution measuring apparatus (model number: LS13320) manufactured by BECKMAN COULTER.
  • the elastomer having a core-shell structure as the component (D) is preferably 20 to 40 parts by mass with respect to 100 parts by mass in total of the elastomer having the core-shell structure and the epoxy resin subjected to the masterbatch treatment.
  • a component may be individual or may use 2 or more types together.
  • the component (B) is preferably a ratio of 0.6 to 1.2 equivalents, more preferably 0.6 to 1.0 equivalents with respect to the component (A): 1 equivalent.
  • the equivalent of (A) component is an epoxy equivalent
  • the equivalent of (B) component is an acid anhydride equivalent. If it is 0.6 or more, the reactivity, the moisture resistance reliability in the high temperature and high humidity test of the liquid epoxy resin composition after curing, and the migration resistance are good, while if it is 1.2 or less, the viscosity is increased. The magnification does not become too high, and the generation of voids is suppressed.
  • Component (C) is preferably 0.05 to 5 parts by weight, more preferably 0.1 to 5 parts by weight, and still more preferably 0.3 to 3.0 parts by weight with respect to 100 parts by weight of component (A). Part contained. When it is 0.05 parts by mass or more, the reactivity is good, and when it is 5 parts by mass or less, the moisture resistance reliability is good, and the thickening ratio is stable.
  • (D) Component is 1 to 10 parts by mass with respect to 100 parts by mass of the liquid epoxy resin composition.
  • component (D) is less than 1 part by mass, the liquid epoxy resin composition after curing is peeled off and migration resistance is lowered.
  • (D) component exceeds 10 mass parts, the injectability of a liquid epoxy resin will fall.
  • the liquid epoxy resin composition further contains (E) a coupling agent.
  • a coupling agent As the component (E), 3-glycidoxypropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, vinyltrimethoxysilane, p-styryltrimethoxysilane, 3-methacryloxypropylmethyltrimethoxysilane, 3-acrylic Examples include loxypropyltrimethoxysilane, 3-ureidopropyltriethoxysilane, 3-mercaptopropyltrimethoxysilane, bis (triethoxysilylpropyl) tetrasulfide, and 3-isocyanatopropyltriethoxysilane. Trimethoxysilane and 3-aminopropyltrimethoxysilane are preferred. Examples of commercially available products include KBM403, KBE903, and KBE9103 manufactured by Shin-Etsu Chemical.
  • the component (E) is preferably contained in an amount of 0.05 to 5.0 parts by mass, more preferably 0.1 to 3.0 parts by mass with respect to 100 parts by mass of the component (A). Adhesion improves when it is 0.05 parts by mass or more, and the adhesive strength after the moisture resistance test of the liquid epoxy resin composition after curing becomes better, and when it is 5.0 parts by mass or less, the liquid resin composition Foaming of the product is suppressed.
  • a filler such as a silica filler, a leveling agent, an antifoaming agent, a decoloring agent, an antioxidant, a pigment, and a dye are added as necessary without departing from the object of the present invention.
  • Etc. can be mix
  • the viscosity of the liquid epoxy resin composition at a temperature of 25 ° C. is preferably 50 to 820 mPa ⁇ s from the viewpoint of injectability.
  • the viscosity is measured with an E-type viscometer (model number: TVE-22H) manufactured by Toki Sangyo Co., Ltd.
  • the liquid epoxy resin composition preferably has a viscosity increase rate after 24 hours of 150% or less, and preferably a viscosity increase rate after 48 hours of 300% or less.
  • the rate of increase in viscosity is measured by measuring the viscosity after storing the liquid epoxy resin composition at room temperature for 24 hours and 48 hours, [ ⁇ (viscosity after 24 or 48 hours) / (initial viscosity) ⁇ ⁇ 100]. Is a viscosity increase rate (unit:%).
  • the epoxy resin composition of the present invention is suitable as a sealant for semiconductor elements utilizing flip chip bonding, and is particularly suitable as a sealant for chip-on-film packages, especially a liquid sealant for liquid crystal drivers.
  • the liquid epoxy resin composition described above is manufactured by dispersing an elastomer having a core-shell structure in a bisphenol type epoxy resin, etc., forming the component (D) as a master batch, and then mixing the components (A) to (D). can do.
  • an elastomer having a core-shell structure (hereinafter referred to as a core-shell elastomer) is produced by emulsion polymerization in water.
  • a liquid epoxy resin composition has been produced by using a core-shell elastomer obtained by dehydrating a suspension containing a core-shell elastomer produced by emulsion polymerization in water as it is.
  • the core-shell elastomer obtained by this method aggregates in the liquid epoxy resin composition and is detected as a foreign substance.
  • a liquid sealant for a liquid crystal driver there is a filtering step using a fine mesh, and there is a problem that filtering cannot be performed if there are aggregates.
  • an epoxy resin is added to a suspension containing a core-shell elastomer prepared by emulsion polymerization in water, and the core-shell elastomer is coated with the epoxy resin and then dehydrated to prepare the component (D).
  • the core-shell elastomer is coated with the epoxy resin and then dehydrated to prepare the component (D).
  • a core-shell elastomer masterbatch can be obtained by substituting the water component with an epoxy resin from a core-shell elastomer-containing suspension prepared by emulsion polymerization.
  • an epoxy resin from a core-shell elastomer-containing suspension prepared by emulsion polymerization.
  • the core-shell elastomer is removed from the suspension by drying, aggregates are formed. Since it is difficult to disperse the aggregates in the primary particles in the epoxy resin, it is necessary to replace the aggregates with the liquid phase without taking them out of the suspension.
  • the liquid resin composition of the present invention is obtained, for example, by stirring, melting, mixing, and dispersing the components (A) to (D) and other additives simultaneously or separately, with heat treatment as necessary.
  • the mixing, stirring, dispersing and the like devices are not particularly limited, and a raikai machine equipped with a stirring and heating device, a three-roll mill, a ball mill, a planetary mixer, a bead mill and the like can be used. . Moreover, you may use combining these apparatuses suitably.
  • the liquid epoxy resin composition of the present invention is formed and applied at a desired position on the substrate by a dispenser, printing or the like.
  • the liquid epoxy resin composition is formed between a substrate such as a flexible wiring substrate and a semiconductor element so that at least a part thereof is in contact with the wiring of the substrate.
  • Curing of the liquid resin composition of the present invention is preferably carried out at 120 to 160 ° C. for 5 to 120 minutes. Particularly when cured within 200 seconds, productivity when used as a sealant for chip-on-film packages is improved. From the viewpoint of
  • a desired semiconductor element and substrate can be used, but a combination of a flip chip bonding semiconductor element and a substrate for COF package is preferable.
  • the liquid resin composition of the present invention is very suitable for a liquid semiconductor encapsulant, particularly a liquid encapsulant for a liquid crystal driver, and a liquid crystal driver sealed using this liquid semiconductor encapsulant, etc.
  • the semiconductor device having the flip-chip type semiconductor element has excellent migration resistance and high reliability because peeling in the reliability test is suppressed.
  • Example 1 to 11 and Comparative Examples 1 to 7 Liquid resin compositions (hereinafter referred to as “resin compositions”) were prepared with the formulations shown in Tables 1 and 2.
  • the components (A) to (D) were mixed in the formulations shown in Tables 1 and 2 for 5 minutes at room temperature using a planetary stirring deaerator. Since the mass ratio of the core-shell rubber (D) component to the bisphenol F-type epoxy resin was 1: 2, the component (A) bisphenol F-type epoxy resin was used in the master batch of the (D) component. Was subtracted and added.
  • Comparative Example 4 the core-shell rubber obtained by drying the core-shell rubber-containing water suspension was used in place of the component (D).
  • the master batch of the component (D ′) used in Comparative Example 6 was performed using three rolls. The mass ratio of the solid rubber and the mold epoxy resin as the component (D ′) was 1: 2.
  • the prepared resin composition is sandwiched between a glass plate coated with a release agent and cured into a 350 ⁇ m sheet at 60 ° C. for 60 minutes.
  • the flexural modulus is preferably 2.0 to 4.2 GPa. Tables 1 and 2 show the evaluation results of the flexural modulus.
  • FIG. 1 the schematic diagram explaining the evaluation method of the injectability of a resin composition is shown.
  • a test piece in which a 20 ⁇ m gap 40 was provided on the substrate 20 and the glass plate 30 was fixed instead of the semiconductor element was produced.
  • a glass substrate was used instead of the flexible substrate.
  • this test piece is placed on a hot plate set at 110 ° C., and as shown in FIG. 2 (B), the prepared resin composition 10 is applied to one end side of the glass plate 30, and FIG. ), The time until the gap 40 was filled with the resin composition 11 was measured.
  • the case where the gap 40 was satisfied within 90 seconds was determined as “good”, and the case where it exceeded 90 seconds was determined as “bad”.
  • Tables 1 and 2 show the injectability evaluation results.
  • FIG. 3 shows a photograph of a portion where there is no separation after curing
  • FIGS. 4 and 5 show photographs of a portion where separation occurs after curing. In FIG. 3, there was no separation, whereas in FIGS. 4 and 5, separation was confirmed at the location indicated by the arrow. Tables 1 and 2 show the evaluation results of peeling after curing.
  • FIG. 6 shows an enlarged photograph of the appearance of Example 3
  • FIG. 7 shows an enlarged photograph of the appearance of Comparative Example 4.
  • the pattern pitch in FIGS. 6 and 7 is 30 ⁇ m.
  • Example 3 shown in FIG. 6 the appearance was “ ⁇ ”.
  • Comparative Example 4 shown in FIG. 7 peeling (delamination) was observed in a portion surrounded by a white broken line in the photograph.
  • Tables 1 and 2 show the results of evaluation of appearance peeling.
  • the test method is as follows.
  • the prepared resin composition is applied in a thickness of 20 ⁇ m onto a polyimide tape substrate having tin wiring (0.2 ⁇ 0.05 ⁇ m) copper wiring (pattern width: 15 ⁇ m, line width: 15 ⁇ m, pattern pitch: 30 ⁇ m). And it processed at 150 degreeC for 30 minute (s), the sealing agent was hardened, and the test piece was produced.
  • an ion migration evaluation system manufactured by Espec Co., Ltd. was used to measure a change in resistance value when a voltage of DC 60 V was applied at 85 ° C./85% humidity, and the resistance value was 1.00 ⁇ .
  • the migration of the copper wiring was evaluated (unit: time) with the time point below 10 7 ⁇ as a threshold value. For those whose resistance value did not fall below the threshold, the test was terminated when 1000 hours were exceeded. Tables 1 and 2 show the migration resistance evaluation results.
  • Comparative Example 4 using a core-shell rubber without a masterbatch treatment
  • Comparative Example 5 using a solid rubber without a corebatch without a masterbatch treatment
  • a solid rubber subjected to a masterbatch treatment are used instead of the component (D).
  • Comparative Example 6 was poor in injectability and poor in appearance.
  • Comparative Example 7 using liquid rubber instead of the component (D) had a large amount of extracted Cl and poor migration characteristics.
  • the liquid resin composition of the present invention can be used as a fine pitch COF mounting sealant, and suppresses peeling during cooling in a sealing process or during a reliability test without deteriorating fluidity.
  • the occurrence of migration that occurs in the high-temperature and high-humidity test can be suppressed, and is particularly suitable for a flip-chip type semiconductor element, particularly a semiconductor device including a liquid crystal driver.

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Abstract

The purpose of the present invention is to provide a liquid epoxy resin composition which is able to be used as a sealing agent for fine-pitch COF mounting, and which is capable of suppressing the occurrence of migration in a high-temperature high-humidity test by suppressing separation during a cooling process in a sealing step or during a reliability test without lowering the fluidity. A liquid epoxy resin composition which is characterized by containing (A) a liquid epoxy resin, (B) an acid anhydride curing agent, (C) an imidazole compound curing accelerator and (D) an elastomer having a core-shell structure, said elastomer having been subjected to master batch processing. This liquid epoxy resin composition is also characterized in that the component (D) is contained in an amount of 1-10 parts by mass per 100 parts by mass of the liquid epoxy resin composition.

Description

液状エポキシ樹脂組成物Liquid epoxy resin composition

 本発明は、液状エポキシ樹脂組成物に関し、特に、チップオンフィルムパッケージ用半導体素子のアンダーフィル剤に適した液状エポキシ樹脂組成物に関する。 The present invention relates to a liquid epoxy resin composition, and more particularly to a liquid epoxy resin composition suitable for an underfill agent for a semiconductor element for chip-on-film package.

 液晶ドライバIC等の半導体装置のさらなる配線等の高密度化、高出力化に対応可能な半導体素子の実装方式であるCOF(Chip On Film)パッケージ等の半導体パッケージで、フリップチップボンディングが利用されている。一般的に、フリップチップボンディングでは、半導体素子と基板をバンプで接合し、半導体素子と基板の間隙を、アンダーフィル材と呼ばれる液状半導体封止剤で封止する。 Flip chip bonding is used in semiconductor packages such as COF (Chip On Film) packages, which are mounting methods for semiconductor elements that can support higher density and higher output of semiconductor devices such as liquid crystal driver ICs. Yes. In general, in flip chip bonding, a semiconductor element and a substrate are joined by bumps, and a gap between the semiconductor element and the substrate is sealed with a liquid semiconductor sealing agent called an underfill material.

 近年、液晶ドライバICの高密度化、高出力化の要求に応えるため、液晶ドライバICを搭載する配線パターンのファインピッチ化が進んでいる。このファインピッチ化により、液晶ドライバICの動作温度が着々と上昇している。アンダーフィル剤で封止された半導体パッケージにおいて、例えば、温度85℃、湿度85%の高温高湿雰囲気で、配線間に電位差を与えると、配線間にマイグレーションが発生する。マイグレーションは、配線パターンの金属が、電気化学反応によって溶出し、配線間の抵抗値低下が生じる現象である。 In recent years, in order to meet the demand for higher density and higher output of liquid crystal driver ICs, fine pitches of wiring patterns on which liquid crystal driver ICs are mounted have been advanced. With this fine pitch, the operating temperature of the liquid crystal driver IC is steadily rising. In a semiconductor package sealed with an underfill agent, for example, when a potential difference is applied between wirings in a high-temperature and high-humidity atmosphere at a temperature of 85 ° C. and a humidity of 85%, migration occurs between the wirings. Migration is a phenomenon in which the metal of the wiring pattern is eluted by an electrochemical reaction, resulting in a decrease in resistance value between the wirings.

 また、従来、液晶ドライバICでは、半導体素子と、回路基板と電気的接合をするために、半導体素子や回路基板に金配線を使用し、これらの半導体素子と金配線を封止樹脂により、封止していた。近年では、半導体装置に対するコストダウンの要求も激しい上に、金価格が高騰しており、従来の金配線ではコストが高いため、銅配線による接合が検討されている。 Conventionally, in a liquid crystal driver IC, in order to electrically connect a semiconductor element and a circuit board, a gold wiring is used for the semiconductor element or the circuit board, and the semiconductor element and the gold wiring are sealed with a sealing resin. It stopped. In recent years, demand for cost reduction for semiconductor devices has been severe, and the price of gold has soared. Since the cost of conventional gold wiring is high, bonding by copper wiring has been studied.

 この銅配線は、金配線と比較して、腐食され易いため、銅配線間でのマイグレーションが危惧されている。マイグレーションは、銅配線の銅が、電気化学反応によって溶出し、抵抗値低下が生じる現象である。銅配線は、半導体装置作動時には、電極として作用する。図1に、銅配線のマイグレーションを説明する模式図を示す。マイグレーションは、まず陽極2で、反応式:Cu+(OH)→Cu(OH)によりCuが溶出し、基板1上を、Cu(OH)が実線矢印の向き、すなわち陰極3方向に移動し、陰極3では、基板1上で、反応式:CuOH+H→Cu+2HOによりCuが破線矢印向き、すなわち陽極2方向に析出する。通常、銅配線は、エポキシ樹脂系の樹脂組成物で封止されているが、エポキシ樹脂に吸水されたHO由来のOHやHにより、マイグレーションが発生する。さらに、雰囲気中にClイオンがあると、マイグレーションは飛躍的に加速される。このClイオンは、通常、エポキシ樹脂の不純物として存在する。マイグレーションが起きると、銅配線の陽極-陰極間の抵抗値が低くなり、マイグレーションが進行すると、陽極と陰極の短絡に至る。なお、Cu(OH)は、正確には、Cu(OH)の場合と、Cu(OH)の場合があり、Cu(OH)の場合には、その濃度差により陰極側に移動し、Cu(OH)の場合には、電気的に移動する。 Since this copper wiring is more easily corroded than gold wiring, there is a concern about migration between copper wiring. Migration is a phenomenon in which copper in a copper wiring is eluted by an electrochemical reaction, resulting in a decrease in resistance value. The copper wiring acts as an electrode when the semiconductor device operates. FIG. 1 is a schematic diagram for explaining the migration of copper wiring. The migration starts with the anode 2, Cu is eluted by the reaction formula: Cu + (OH ) → Cu (OH), and Cu (OH) moves on the substrate 1 in the direction of the solid arrow, that is, toward the cathode 3, In the cathode 3, Cu is deposited on the substrate 1 in the direction of the broken line arrow, that is, in the direction of the anode 2 by the reaction formula: CuOH + H 3 O + → Cu + 2H 2 O. Normally, copper wiring is sealed with an epoxy resin-based resin composition, but migration occurs due to OH or H 3 O + derived from H 2 O absorbed in the epoxy resin. Furthermore, migration is dramatically accelerated if there are Cl 2 ions in the atmosphere. This Cl ion is usually present as an impurity of the epoxy resin. When migration occurs, the resistance value between the anode and cathode of the copper wiring decreases, and when migration proceeds, the anode and cathode are short-circuited. In addition, Cu (OH) may be Cu (OH) 2 or Cu (OH) + precisely, and in the case of Cu (OH) 2 , it moves to the cathode side due to the concentration difference. In the case of Cu (OH) + , it moves electrically.

 このマイグレーションを抑制するために、金属イオン結合剤を含むアンダーフィル剤が報告されている(特許文献1)。このアンダーフィル剤は、電気化学反応によって溶出した金属イオンを、金属イオン結合剤で固定化することにより、マイグレーションの抑制を図っている。 In order to suppress this migration, an underfill agent containing a metal ion binder has been reported (Patent Document 1). This underfill agent suppresses migration by immobilizing metal ions eluted by an electrochemical reaction with a metal ion binder.

 しかしながら、アンダーフィル剤に金属イオン結合剤を含有させると、アンダーフィル剤が保存時に増粘する、アンダーフィル剤のガラス転移温度が低下する等のアンダーフィル剤としての特性が低下してしまう、という問題がある。また、アンダーフィル剤に金属イオン結合剤を含有させると、ポリマー骨格に組み込まれない材料を加えることによる、密着性や耐熱性の低下の問題があることに加え、マイグレーションを誘発しやすいハロゲン濃度を下げるための処理に必要な材料費が高額になる、という問題もある。 However, when a metal ion binder is contained in the underfill agent, the properties of the underfill agent such as the underfill agent thickening during storage and the glass transition temperature of the underfill agent are reduced. There's a problem. In addition, when a metal ion binder is included in the underfill agent, there is a problem of deterioration in adhesion and heat resistance due to the addition of a material that is not incorporated into the polymer skeleton, and a halogen concentration that easily induces migration. There is also a problem that the material cost required for the processing for lowering becomes high.

 一方、チップオンフィルム(以下、COFという)実装用封止剤として、(A)エポキシ樹脂、(B)酸無水物系硬化剤並びに(C)イミダゾール系及び/又はトリアジン系硬化促進剤を含み、(A)成分と(B)成分と(C)成分の合計100重量部に対して、(C)成分が0.6~10重量部であるCOF実装用封止剤が報告されている(特許文献2)。 On the other hand, as a chip-on-film (hereinafter referred to as COF) mounting sealant, it includes (A) an epoxy resin, (B) an acid anhydride-based curing agent, and (C) an imidazole-based and / or triazine-based curing accelerator. A COF mounting sealant in which the component (C) is 0.6 to 10 parts by weight with respect to the total of 100 parts by weight of the component (A), the component (B), and the component (C) has been reported (patent) Reference 2).

 このCOF実装用封止剤は、硬化速度により、ボイドの発生が抑制され、かつフィルム基板との密着性が十分に得られ、その結果信頼性の高い半導体部品が得られるものであるが、近年のファインピッチ化(例えば、従来は50μmピッチであったのに対して、最近は30μmピッチが要求されている)に対しては、高温高湿試験後の剥離試験等での信頼性が、十分ではない。 In this COF mounting sealant, the generation of voids is suppressed by the curing speed, and sufficient adhesion to the film substrate is obtained, and as a result, a highly reliable semiconductor component can be obtained. For fine pitches (for example, 30 μm pitch is now required compared to 50 μm pitch in the past), reliability in peeling test after high temperature and high humidity test is sufficient is not.

特開2005-333085号公報JP-A-2005-333085 国際公開第2007/132827号International Publication No. 2007/132828

 本発明は、ファインピッチのCOF実装用封止剤として使用可能であり、流動性能を維持しつつ、封止工程での冷却時または信頼性試験時の剥離を抑制することにより、高温高湿試験で発生するマイグレーションの発生を抑制することができる液状エポキシ樹脂組成物を提供することを目的とする。 The present invention can be used as a fine-pitch COF mounting sealant, and maintains high flow performance while suppressing peeling during cooling or reliability testing in the sealing process, thereby enabling high-temperature and high-humidity testing. It aims at providing the liquid epoxy resin composition which can suppress generation | occurrence | production of the migration which generate | occur | produces by this.

 本発明は、以下の構成を有することによって上記問題を解決した液状エポキシ樹脂組成物、液状半導体封止材、および半導体装置に関する。
〔1〕(A)液状エポキシ樹脂、(B)酸無水物硬化剤、(C)イミダゾール化合物硬化促進剤、および(D)マスターバッチ処理されたコアシェル構造を持つエラストマーを含有し、
(D)成分が、液状エポキシ樹脂組成物100質量部に対して、1~10質量部であることを特徴とする、液状エポキシ樹脂組成物。
〔2〕(D)成分が、ビスフェノール型エポキシ樹脂でマスターバッチ処理されたコアシェル構造を持つエラストマーである、上記〔1〕記載の液状エポキシ樹脂組成物。
〔3〕さらに、(E)カップリング剤を含有する、上記〔1〕または〔2〕記載の液状エポキシ樹脂組成物。
〔4〕上記〔1〕~〔3〕のいずれか記載の液状エポキシ樹脂組成物を含む、液状半導体封止材。
〔5〕上記〔4〕記載の液状半導体封止材を含む、液晶ドライバ用液状封止材。
〔6〕上記〔4〕記載の液状半導体封止剤を用いて封止されたフリップチップ型半導体素子を有する、半導体装置。
〔7〕上記〔5〕記載の液晶ドライバ用液状封止材を用いて封止されたフリップチップ型半導体素子を有する、液晶ドライバ。
The present invention relates to a liquid epoxy resin composition, a liquid semiconductor sealing material, and a semiconductor device that have solved the above problems by having the following configuration.
[1] containing (A) a liquid epoxy resin, (B) an acid anhydride curing agent, (C) an imidazole compound curing accelerator, and (D) an elastomer having a core-shell structure subjected to a masterbatch treatment,
The liquid epoxy resin composition, wherein the component (D) is 1 to 10 parts by mass with respect to 100 parts by mass of the liquid epoxy resin composition.
[2] The liquid epoxy resin composition according to the above [1], wherein the component (D) is an elastomer having a core-shell structure masterbatch-treated with a bisphenol type epoxy resin.
[3] The liquid epoxy resin composition according to [1] or [2], further comprising (E) a coupling agent.
[4] A liquid semiconductor encapsulant comprising the liquid epoxy resin composition according to any one of [1] to [3].
[5] A liquid encapsulant for a liquid crystal driver comprising the liquid semiconductor encapsulant according to [4] above.
[6] A semiconductor device having a flip chip type semiconductor element encapsulated with the liquid semiconductor encapsulant described in [4].
[7] A liquid crystal driver having a flip chip type semiconductor element sealed using the liquid sealing material for a liquid crystal driver according to the above [5].

 本発明〔1〕によれば、ファインピッチのCOF実装用封止剤として使用可能であり、流動性能を低下させずに、封止工程での冷却時または信頼性試験時の剥離を抑制することにより、高温高湿試験で発生するマイグレーションを抑制することができる液状エポキシ樹脂組成物を提供することができる。 According to the present invention [1], it can be used as a fine pitch COF mounting sealant, and suppresses peeling during cooling or reliability testing in the sealing process without deteriorating fluidity. Thereby, the liquid epoxy resin composition which can suppress the migration which generate | occur | produces in a high temperature, high humidity test can be provided.

 本発明〔4〕によれば、高温高湿試験で発生するマイグレーションが抑制された高信頼性の半導体部品を製造可能な液状半導体封止材を容易に提供することができる。 According to the present invention [4], it is possible to easily provide a liquid semiconductor encapsulant capable of producing a highly reliable semiconductor component in which migration that occurs in a high-temperature and high-humidity test is suppressed.

 本発明〔6〕によれば、高温高湿試験で発生するマイグレーションが抑制された高信頼性の半導体部品を提供することができる。 According to the present invention [6], it is possible to provide a highly reliable semiconductor component in which migration that occurs in a high-temperature and high-humidity test is suppressed.

電極がCuである場合のマイグレーションを説明する模式図である。It is a mimetic diagram explaining migration in case an electrode is Cu. 樹脂組成物の注入性の評価方法を説明する模式図である。It is a schematic diagram explaining the evaluation method of the injectability of a resin composition. 硬化後に剥離がない箇所の写真である。It is a photograph of the part which does not peel after hardening. 硬化後に剥離が発生した箇所の写真である。It is the photograph of the location where peeling generate | occur | produced after hardening. 硬化後に剥離が発生した箇所の写真である。It is the photograph of the location where peeling generate | occur | produced after hardening. 実施例3の外観の拡大写真である。6 is an enlarged photograph of the appearance of Example 3. 比較例4の外観の拡大写真である。10 is an enlarged photograph of the appearance of Comparative Example 4.

〔液状エポキシ樹脂組成物〕
 本発明の液状エポキシ樹脂組成物は、(A)液状エポキシ樹脂、(B)酸無水物硬化剤、(C)イミダゾール化合物硬化促進剤、および(D)マスターバッチ処理されたコアシェル構造を持つエラストマーを含有し、
(D)成分が、液状エポキシ樹脂組成物100質量部に対して、1~10質量部であることを特徴とする。
[Liquid epoxy resin composition]
The liquid epoxy resin composition of the present invention comprises (A) a liquid epoxy resin, (B) an acid anhydride curing agent, (C) an imidazole compound curing accelerator, and (D) an elastomer having a core-shell structure subjected to a masterbatch treatment. Contains,
The component (D) is 1 to 10 parts by mass with respect to 100 parts by mass of the liquid epoxy resin composition.

 (A)成分としては、アミノフェノール型エポキシ樹脂、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂、液状ナフタレン型エポキシ樹脂、液状水添ビスフェノール型エポキシ樹脂、液状脂環式エポキシ樹脂、液状アルコールエーテル型エポキシ樹脂、液状環状脂肪族型エポキシ樹脂、液状フルオレン型エポキシ樹脂、液状シロキサン系エポキシ樹脂等が挙げられ、硬化後の液状エポキシ樹脂組成物のマイグレ-ション抑制、接着性、流動性の観点から、アミノフェノール型エポキシ樹脂が好ましく、液状エポキシ樹脂組成物の硬化性、接着性、硬化後の液状エポキシ樹脂組成物の耐熱性、耐久性の観点から、液状ビスフェノールA型エポキシ樹脂、液状ビスフェノールF型エポキシ樹脂が、好ましい。 As component (A), aminophenol type epoxy resin, liquid bisphenol A type epoxy resin, liquid bisphenol F type epoxy resin, liquid naphthalene type epoxy resin, liquid hydrogenated bisphenol type epoxy resin, liquid alicyclic epoxy resin, liquid alcohol Examples include ether type epoxy resins, liquid cycloaliphatic type epoxy resins, liquid fluorene type epoxy resins, and liquid siloxane-based epoxy resins. From the viewpoint of suppression of migration, adhesiveness, and fluidity of the liquid epoxy resin composition after curing. From the viewpoints of curability and adhesion of the liquid epoxy resin composition, heat resistance and durability of the liquid epoxy resin composition after curing, liquid bisphenol A epoxy resin and liquid bisphenol F are preferable. A type epoxy resin is preferred.

 (A)成分に含有され得るアミノフェノール型エポキシ樹脂は、架橋密度の高い樹脂骨格を形成することにより、硬化後の液状エポキシ樹脂組成物のマイグレーションの発生を抑制する。アミノフェノール型エポキシ樹脂は、好ましくは、式(1): The aminophenol type epoxy resin that can be contained in the component (A) suppresses the occurrence of migration of the liquid epoxy resin composition after curing by forming a resin skeleton having a high crosslinking density. The aminophenol type epoxy resin is preferably represented by the formula (1):

Figure JPOXMLDOC01-appb-C000001
Figure JPOXMLDOC01-appb-C000001

で表され、2個の官能基がオルト位またはパラ位にあるものがより好ましく、式(2): Wherein two functional groups are in the ortho-position or para-position, and the formula (2):

Figure JPOXMLDOC01-appb-C000002
Figure JPOXMLDOC01-appb-C000002

で表されるものが、硬化性、耐熱性、接着性、耐久性、耐マイグレーション性の観点から、特に好ましい。 Is particularly preferable from the viewpoints of curability, heat resistance, adhesiveness, durability, and migration resistance.

 (A)成分のエポキシ当量は、粘度調整の観点から、80~250g/eqが好ましい。(A)成分の市販品としては、ダイセル化学製ビスフェノールA型エポキシ樹脂(品名:LX-01)、三菱化学製アミノフェノール型エポキシ樹脂(グレード:JER630、JER630LSD)、新日鐵化学製ビスフェノールA型エポキシ樹脂(品名:YDF8170)、新日鐵化学製ビスフェノールF型エポキシ樹脂(品名:YDF870GS)、DIC製ナフタレン型エポキシ樹脂(品名:HP4032D)、信越化学製シロキサン系エポキシ樹脂(品名:TSL9906)等が挙げられる。(A)成分は、単独でも2種以上を併用してもよい。 The epoxy equivalent of the component (A) is preferably 80 to 250 g / eq from the viewpoint of adjusting the viscosity. Commercially available products of component (A) include Daicel Chemical's bisphenol A type epoxy resin (product name: LX-01), Mitsubishi Chemical's aminophenol type epoxy resin (grade: JER630, JER630LSD), Nippon Steel Chemical's bisphenol A type. Epoxy resin (product name: YDF8170), Nippon Steel Chemicals bisphenol F type epoxy resin (product name: YDF870GS), DIC naphthalene type epoxy resin (product name: HP4032D), Shin-Etsu Chemical siloxane epoxy resin (product name: TSL9906), etc. Can be mentioned. (A) A component may be individual or may use 2 or more types together.

 (B)成分は、液状エポキシ樹脂組成物に良好な反応性(硬化速度)、適度な粘性付与を付与する。(B)成分としては、メチルテトラヒドロフタル酸無水物、メチルブテニルテトラヒドロフタル酸無水物、メチルヘキサヒドロフタル酸無水物、アルキル化テトラヒドロフタル酸無水物、ヘキサヒドロフタル酸無水物、メチルハイミック酸無水物、アルケニル基で置換されたコハク酸無水物、メチルナジック酸無水物、グルタル酸無水物等が挙げられ、メチルブテニルテトラヒドロフタル酸無水物が好ましい。市販品としては、三菱化学製酸無水物(グレード:YH306、YH307)等が挙げられる。(B)成分は、単独でも2種以上を併用してもよい。 Component (B) imparts good reactivity (curing speed) and appropriate viscosity imparting to the liquid epoxy resin composition. As component (B), methyltetrahydrophthalic anhydride, methylbutenyltetrahydrophthalic anhydride, methylhexahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyl hymic acid Examples include anhydrides, succinic anhydrides substituted with alkenyl groups, methyl nadic anhydrides, glutaric anhydrides, and the like, and methylbutenyl tetrahydrophthalic anhydride is preferred. Examples of commercially available products include acid anhydrides (grade: YH306, YH307) manufactured by Mitsubishi Chemical. (B) A component may be individual or may use 2 or more types together.

 (C)成分は、液状エポキシ樹脂組成物に適切な硬化速度を付与する。(C)成分としては、2-メチルイミダゾール、2-ウンデシルイミダゾール、2-ヘプタデシルイミダゾール、2-エチル-4-メチルイミダゾール、2-フェニルイミダゾール、2-フェニル-4-メチルイミダゾール等が挙げられる。(C)成分の市販品としては、四国化成製2-フェニル-4-メチルイミダゾール(品名:2P4MZ)、四国化成製2,4-ジアミノ-6-[2’-メチルイミダゾリル-(1’)]-エチル-s-トリアジン(品名:2MZA)が挙げられる。(C)成分は、単独でも2種以上を併用してもよい。 (C) The component imparts an appropriate curing rate to the liquid epoxy resin composition. Examples of the component (C) include 2-methylimidazole, 2-undecylimidazole, 2-heptadecylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, and the like. . Commercially available products of component (C) include 2-phenyl-4-methylimidazole (product name: 2P4MZ) manufactured by Shikoku Chemicals, 2,4-diamino-6- [2′-methylimidazolyl- (1 ′)] manufactured by Shikoku Chemicals -Ethyl-s-triazine (product name: 2MZA). (C) A component may be individual or may use 2 or more types together.

 (D)成分は、液状エポキシ樹脂組成物に注入性を付与し、硬化後の液状エポキシ樹脂組成物の剥離やマイグレーションを抑制する。(D)成分でマスターバッチ処理されるコアシェル構造を持つエラストマーとしては、コア:ポリブタジエンでシェル:アクリル共重合体、コア:シリコーン樹脂でシェル:アクリル共重合体等が挙げられ、液状エポキシ樹脂組成物の使用温度領域内で低い弾性率により、液状エポキシ樹脂組成物の収縮応力を低下できるため、コア:ポリブタジエンでシェル:アクリル共重合体が、好ましい。市販品のコアシェル構造を持つエラストマーとしては、カネカ製コアシェルゴム(品名:MX-137)、三菱レイヨン製コアシェルゴム(品名:W5500)が挙げられる。 The component (D) imparts injectability to the liquid epoxy resin composition and suppresses peeling and migration of the liquid epoxy resin composition after curing. Examples of the elastomer having a core-shell structure that is masterbatch-treated with the component (D) include core: polybutadiene, shell: acrylic copolymer, core: silicone resin, shell: acrylic copolymer, and the like, and a liquid epoxy resin composition Since the shrinkage stress of the liquid epoxy resin composition can be lowered due to the low elastic modulus in the use temperature range, a core: polybutadiene and a shell: acrylic copolymer are preferable. Commercially available elastomers having a core-shell structure include Kaneka core-shell rubber (product name: MX-137) and Mitsubishi Rayon core-shell rubber (product name: W5500).

 コアシェル構造を持つエラストマーへのマスターバッチ処理は、エポキシ樹脂、酸無水物等の硬化剤で行うことができ、保存安定性、湿度に対する悪影響の有無の観点からエポキシ樹脂、特にビスフェノール型エポキシ樹脂が好ましい。ビスフェノール型エポキシ樹脂としては、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂が挙げられ、ビスフェノールF型エポキシ樹脂が、より好ましい。 Masterbatch processing to an elastomer having a core-shell structure can be performed with a curing agent such as an epoxy resin or an acid anhydride, and an epoxy resin, particularly a bisphenol type epoxy resin is preferred from the viewpoint of storage stability and presence or absence of adverse effects on humidity. . Examples of the bisphenol type epoxy resin include bisphenol A type epoxy resin and bisphenol F type epoxy resin, and bisphenol F type epoxy resin is more preferable.

 (D)成分は、形態は特に限定されないが、(D)成分の分散性、液状エポキシ樹脂組成物製造時の濾過工程で作業性、液状エポキシ樹脂組成物の注入性、硬化収縮応力減少の観点から、球状であり、かつ平均粒径が、0.01~10μmであると好ましく、0.01~1μmであると、より好ましい。ここで、平均粒径は、BECKMAN COULTER社製レーザー回折粒度分布測定装置(型番:LS13320)で測定する。 (D) Although a form is not specifically limited, (D) Component dispersibility, Workability | operativity in the filtration process at the time of liquid epoxy resin composition manufacture, injection | pouring property of a liquid epoxy resin composition, a viewpoint of hardening shrinkage stress reduction Therefore, it is spherical and the average particle diameter is preferably 0.01 to 10 μm, more preferably 0.01 to 1 μm. Here, the average particle diameter is measured with a laser diffraction particle size distribution measuring apparatus (model number: LS13320) manufactured by BECKMAN COULTER.

 (D)成分のコアシェル構造を持つエラストマーは、コアシェル構造を持つエラストマーとマスターバッチ処理するエポキシ樹脂との合計100質量部に対して、20~40質量部であると、好ましい。(D)成分は、単独でも2種以上を併用してもよい。 (E) The elastomer having a core-shell structure as the component (D) is preferably 20 to 40 parts by mass with respect to 100 parts by mass in total of the elastomer having the core-shell structure and the epoxy resin subjected to the masterbatch treatment. (D) A component may be individual or may use 2 or more types together.

 (B)成分は、(A)成分:1当量に対して、0.6~1.2当量の比率であると好ましく、0.6~1.0当量であると、より好ましい。(A)成分の当量はエポキシ当量であり、(B)成分の当量は酸無水物当量である。0.6以上であると、反応性、硬化後の液状エポキシ樹脂組成物の高温高湿試験での耐湿信頼性、耐マイグレーション性が良好であり、一方、1.2以下であると、増粘倍率が高くなり過ぎず、ボイドの発生が抑制される。 The component (B) is preferably a ratio of 0.6 to 1.2 equivalents, more preferably 0.6 to 1.0 equivalents with respect to the component (A): 1 equivalent. The equivalent of (A) component is an epoxy equivalent, and the equivalent of (B) component is an acid anhydride equivalent. If it is 0.6 or more, the reactivity, the moisture resistance reliability in the high temperature and high humidity test of the liquid epoxy resin composition after curing, and the migration resistance are good, while if it is 1.2 or less, the viscosity is increased. The magnification does not become too high, and the generation of voids is suppressed.

 (C)成分は、(A)成分:100質量部に対して、好ましくは0.05~5質量部、より好ましくは0.1~5質量部、さらに好ましくは0.3~3.0質量部含有される。0.05質量部以上であると、反応性が良好であり、5質量部以下であると、耐湿信頼性が良好あり、更に増粘倍率が安定である。 Component (C) is preferably 0.05 to 5 parts by weight, more preferably 0.1 to 5 parts by weight, and still more preferably 0.3 to 3.0 parts by weight with respect to 100 parts by weight of component (A). Part contained. When it is 0.05 parts by mass or more, the reactivity is good, and when it is 5 parts by mass or less, the moisture resistance reliability is good, and the thickening ratio is stable.

 (D)成分は、液状エポキシ樹脂組成物100質量部に対して、1~10質量部である。(D)成分が1質量部未満では、硬化後の液状エポキシ樹脂組成物に剥離の発生や耐マイグレーションの低下が起きる。一方、(D)成分が10質量部を超えると、液状エポキシ樹脂の注入性が低下する。 (D) Component is 1 to 10 parts by mass with respect to 100 parts by mass of the liquid epoxy resin composition. When the component (D) is less than 1 part by mass, the liquid epoxy resin composition after curing is peeled off and migration resistance is lowered. On the other hand, when (D) component exceeds 10 mass parts, the injectability of a liquid epoxy resin will fall.

 液状エポキシ樹脂組成物は、さらに、(E)カップリング剤を含有すると、密着性の観点から好ましい。(E)成分としては、3-グリシドキシプロピルトリメトキシシラン、3-アミノプロピルトリメトキシシラン、ビニルトリメトキシシラン、p-スチリルトリメトキシシラン、3-メタクリロキシプロピルメチルトリメトキシシラン、3-アクリロキシプロピルトリメトキシシラン、3-ウレイドプロピルトリエトキシシラン、3-メルカプトプロピルトリメトキシシラン、ビス(トリエトキシシリルプロピル)テトラスルフィド、3-イソシアネートプロピルトリエトキシシラン等が挙げられ、3-グリシドキシプロピルトリメトキシシラン、3-アミノプロピルトリメトキシシランが好ましい。市販品としては、信越化学工業製KBM403、KBE903、KBE9103等が挙げられる。 It is preferable from the viewpoint of adhesiveness that the liquid epoxy resin composition further contains (E) a coupling agent. As the component (E), 3-glycidoxypropyltrimethoxysilane, 3-aminopropyltrimethoxysilane, vinyltrimethoxysilane, p-styryltrimethoxysilane, 3-methacryloxypropylmethyltrimethoxysilane, 3-acrylic Examples include loxypropyltrimethoxysilane, 3-ureidopropyltriethoxysilane, 3-mercaptopropyltrimethoxysilane, bis (triethoxysilylpropyl) tetrasulfide, and 3-isocyanatopropyltriethoxysilane. Trimethoxysilane and 3-aminopropyltrimethoxysilane are preferred. Examples of commercially available products include KBM403, KBE903, and KBE9103 manufactured by Shin-Etsu Chemical.

 (E)成分は、(A)成分:100質量部に対して、好ましくは0.05~5.0質量部、より好ましくは0.1~3.0質量部含有される。0.05質量部以上であると、密着性が向上し、硬化後の液状エポキシ樹脂組成物の耐湿試験後の接着強度がより良好になり、5.0質量部以下であると、液状樹脂組成物の発泡が抑制される。 The component (E) is preferably contained in an amount of 0.05 to 5.0 parts by mass, more preferably 0.1 to 3.0 parts by mass with respect to 100 parts by mass of the component (A). Adhesion improves when it is 0.05 parts by mass or more, and the adhesive strength after the moisture resistance test of the liquid epoxy resin composition after curing becomes better, and when it is 5.0 parts by mass or less, the liquid resin composition Foaming of the product is suppressed.

 本発明の液状エポキシ樹脂組成物には、本発明の目的を損なわない範囲で、更に必要に応じ、シリカフィラー等のフィラー、レベリング剤、消泡剤、搖変剤、酸化防止剤、顔料、染料等の添加剤を配合することができる。 In the liquid epoxy resin composition of the present invention, a filler such as a silica filler, a leveling agent, an antifoaming agent, a decoloring agent, an antioxidant, a pigment, and a dye are added as necessary without departing from the object of the present invention. Etc. can be mix | blended.

 液状エポキシ樹脂組成物は、温度:25℃での粘度が50~820mPa・sであると、注入性の観点から好ましい。ここで、粘度は、東機産業社製E型粘度計(型番:TVE-22H)で測定する。 The viscosity of the liquid epoxy resin composition at a temperature of 25 ° C. is preferably 50 to 820 mPa · s from the viewpoint of injectability. Here, the viscosity is measured with an E-type viscometer (model number: TVE-22H) manufactured by Toki Sangyo Co., Ltd.

 また、液状エポキシ樹脂組成物は、24時間後の粘度上昇率が、150%以下であると好ましく、48時間後の粘度上昇率が、300%以下であると好ましい。ここで、粘度上昇率は、液状エポキシ樹脂組成物を24時間、48時間室温で保管した後の粘度を測定し、〔{(24または48時間後の粘度)/(初期粘度)}×100〕を粘度上昇率(単位:%)とする。 The liquid epoxy resin composition preferably has a viscosity increase rate after 24 hours of 150% or less, and preferably a viscosity increase rate after 48 hours of 300% or less. Here, the rate of increase in viscosity is measured by measuring the viscosity after storing the liquid epoxy resin composition at room temperature for 24 hours and 48 hours, [{(viscosity after 24 or 48 hours) / (initial viscosity)} × 100]. Is a viscosity increase rate (unit:%).

 本発明のエポキシ樹脂組成物は、フリップチップボンディングを利用する半導体素子の封止剤に適しており、特に、チップオンフィルムパッケージ用封止剤、中でも液晶ドライバ用液状封止材として適している。 The epoxy resin composition of the present invention is suitable as a sealant for semiconductor elements utilizing flip chip bonding, and is particularly suitable as a sealant for chip-on-film packages, especially a liquid sealant for liquid crystal drivers.

〔液状エポキシ樹脂組成物の製造方法〕
 上述の液状エポキシ樹脂組成物は、コアシェル構造を持つエラストマーを、ビスフェノール型エポキシ樹脂等に分散させ、マスターバッチとして(D)成分を形成した後、(A)~(D)成分を混合して製造することができる。
[Method for producing liquid epoxy resin composition]
The liquid epoxy resin composition described above is manufactured by dispersing an elastomer having a core-shell structure in a bisphenol type epoxy resin, etc., forming the component (D) as a master batch, and then mixing the components (A) to (D). can do.

 通常、コアシェル構造を持つエラストマー(以下、コアシェルエラストマーという)は、水中でのエマルジョン重合により作製される。従来は、水中でのエマルジョン重合により作製されたコアシェルエラストマー含有懸濁液を脱水処理して得られたコアシェルエラストマーをそのまま使用して、液状エポキシ樹脂組成物を製造していた。しかしながら、この方法で得られたコアシェルエラストマーは、液状エポキシ樹脂組成物中で凝集して異物として検出される。また、液晶ドライバ用液状封止剤の製造では、ファインメッシュによるフィルタリング工程があり、凝集物があるとフィルタリングができない等の問題がある。 Usually, an elastomer having a core-shell structure (hereinafter referred to as a core-shell elastomer) is produced by emulsion polymerization in water. Conventionally, a liquid epoxy resin composition has been produced by using a core-shell elastomer obtained by dehydrating a suspension containing a core-shell elastomer produced by emulsion polymerization in water as it is. However, the core-shell elastomer obtained by this method aggregates in the liquid epoxy resin composition and is detected as a foreign substance. Further, in the production of a liquid sealant for a liquid crystal driver, there is a filtering step using a fine mesh, and there is a problem that filtering cannot be performed if there are aggregates.

 このため、本発明では、水中でのエマルジョン重合により作製されたコアシェルエラストマー含有懸濁液にエポキシ樹脂を添加して、コアシェルエラストマーをエポキシ樹脂で被覆した後、脱水して、(D)成分を作製することにより、液状エポキシ樹脂組成物中でのコアシェルエラストマーの凝集を防ぐことが可能となる。 For this reason, in the present invention, an epoxy resin is added to a suspension containing a core-shell elastomer prepared by emulsion polymerization in water, and the core-shell elastomer is coated with the epoxy resin and then dehydrated to prepare the component (D). By doing so, it becomes possible to prevent aggregation of the core-shell elastomer in the liquid epoxy resin composition.

 コアシェルエラストマーのマスターバッチは、エマルジョン重合により作製されたコアシェルエラストマー含有懸濁液から、水成分をエポキシ樹脂に置換することで得ることができる。ここで、水成分を置換する際に、コアシェルエラストマーを乾燥によって懸濁液から取り出してしまうと、凝集物が形成される。この凝集物をエポキシ樹脂中で一次粒子に分散することは困難であるため、懸濁液から取り出さずに、液相で置換する必要がある。 A core-shell elastomer masterbatch can be obtained by substituting the water component with an epoxy resin from a core-shell elastomer-containing suspension prepared by emulsion polymerization. Here, when replacing the water component, if the core-shell elastomer is removed from the suspension by drying, aggregates are formed. Since it is difficult to disperse the aggregates in the primary particles in the epoxy resin, it is necessary to replace the aggregates with the liquid phase without taking them out of the suspension.

 本発明の液状樹脂組成物は、例えば、(A)成分~(D)成分およびその他添加剤等を同時にまたは別々に、必要により加熱処理を加えながら、撹拌、溶融、混合、分散させることにより得ることができる。これらの混合、撹拌、分散等の装置としては、特に限定されるものではないが、撹拌、加熱装置を備えたライカイ機、3本ロールミル、ボールミル、プラネタリーミキサー、ビーズミル等を使用することができる。また、これら装置を適宜組み合わせて使用してもよい。 The liquid resin composition of the present invention is obtained, for example, by stirring, melting, mixing, and dispersing the components (A) to (D) and other additives simultaneously or separately, with heat treatment as necessary. be able to. The mixing, stirring, dispersing and the like devices are not particularly limited, and a raikai machine equipped with a stirring and heating device, a three-roll mill, a ball mill, a planetary mixer, a bead mill and the like can be used. . Moreover, you may use combining these apparatuses suitably.

 本発明の液状エポキシ樹脂組成物は、ディスペンサー、印刷等で基板の所望の位置に形成・塗布される。ここで、液状エポキシ樹脂組成物は、フレキシブル配線基板等の基板と半導体素子との間に、少なくとも一部が基板の配線上に接するように形成する。 The liquid epoxy resin composition of the present invention is formed and applied at a desired position on the substrate by a dispenser, printing or the like. Here, the liquid epoxy resin composition is formed between a substrate such as a flexible wiring substrate and a semiconductor element so that at least a part thereof is in contact with the wiring of the substrate.

 本発明の液状樹脂組成物の硬化は、120~160℃で、5~120分間行うことが好ましく、特に200秒以内で硬化させると、チップオンフィルムパッケージ用封止剤として用いるときの生産性向上の観点から好ましい。 Curing of the liquid resin composition of the present invention is preferably carried out at 120 to 160 ° C. for 5 to 120 minutes. Particularly when cured within 200 seconds, productivity when used as a sealant for chip-on-film packages is improved. From the viewpoint of

 なお、半導体素子、基板は、所望のものを使用することができるが、フリップチップボンディングの半導体素子とCOFパッケージ用基板の組合せが好ましい。 A desired semiconductor element and substrate can be used, but a combination of a flip chip bonding semiconductor element and a substrate for COF package is preferable.

 このように、本発明の液状樹脂組成物は、液状半導体封止剤、特に液晶ドライバ用液状封止材に非常に適しており、この液状半導体封止剤を用いて封止された液晶ドライバ等のフリップチップ型半導体素子を有する半導体装置は、耐マイグレーション性に優れ、信頼性試験での剥離が抑制されるので、高信頼性である。 Thus, the liquid resin composition of the present invention is very suitable for a liquid semiconductor encapsulant, particularly a liquid encapsulant for a liquid crystal driver, and a liquid crystal driver sealed using this liquid semiconductor encapsulant, etc. The semiconductor device having the flip-chip type semiconductor element has excellent migration resistance and high reliability because peeling in the reliability test is suppressed.

 本発明について、実施例により説明するが、本発明はこれらに限定されるものではない。なお、以下の実施例において、部、%はことわりのない限り、質量部、質量%を示す。 The present invention will be described with reference to examples, but the present invention is not limited thereto. In the following examples, parts and% represent parts by mass and mass% unless otherwise specified.

〔実施例1~11、比較例1~7〕
 表1、表2に示す配合で、液状樹脂組成物(以下、「樹脂組成物」という)を作製した。実施例1~11、比較例2~3では、(A)~(D)成分を、表1、表2に示す配合で、遊星式撹拌脱泡装置を用いて、室温で5分間混合した。(D)成分のコアシェルゴムとビスフェノールF型エポキシ樹脂の質量比は、1:2であったので、(A)成分のビスフェノールF型エポキシ樹脂は、(D)成分のマスターバッチ化で使用した分を差し引いて加えた。なお、比較例4では、コアシェルゴム含有水懸濁液を乾燥することにより得られたコアシェルゴムを(D)成分の代わりに用いた。また、比較例6で使用した(D’)成分のマスターバッチ化は、3本ロールを用いて行った。この(D’)成分の固形ゴムと型エポキシ樹脂の質量比は、1:2であった。
[Examples 1 to 11 and Comparative Examples 1 to 7]
Liquid resin compositions (hereinafter referred to as “resin compositions”) were prepared with the formulations shown in Tables 1 and 2. In Examples 1 to 11 and Comparative Examples 2 to 3, the components (A) to (D) were mixed in the formulations shown in Tables 1 and 2 for 5 minutes at room temperature using a planetary stirring deaerator. Since the mass ratio of the core-shell rubber (D) component to the bisphenol F-type epoxy resin was 1: 2, the component (A) bisphenol F-type epoxy resin was used in the master batch of the (D) component. Was subtracted and added. In Comparative Example 4, the core-shell rubber obtained by drying the core-shell rubber-containing water suspension was used in place of the component (D). In addition, the master batch of the component (D ′) used in Comparative Example 6 was performed using three rolls. The mass ratio of the solid rubber and the mold epoxy resin as the component (D ′) was 1: 2.

〔粘度の評価〕
 作製した直後(30分以内)の樹脂組成物の粘度(初期粘度、単位:mPa・s)を、東機産業社製E型粘度計(型番:TVE-22H)で測定した。表1、表2に、初期粘度の測定結果を示す。また、樹脂組成物を24時間、48時間室温で保管した後の粘度を測定し、〔{(24または48時間後の粘度)/(初期粘度)}×100〕を粘度上昇率(単位:%)とした。表1、表2に、結果を示す。
[Evaluation of viscosity]
The viscosity (initial viscosity, unit: mPa · s) of the resin composition immediately after production (within 30 minutes) was measured with an E-type viscometer (model number: TVE-22H) manufactured by Toki Sangyo Co., Ltd. Tables 1 and 2 show the measurement results of the initial viscosity. Further, the viscosity of the resin composition after being stored at room temperature for 24 hours and 48 hours is measured, and [{(viscosity after 24 or 48 hours) / (initial viscosity)} × 100] is a viscosity increase rate (unit:%). ). Tables 1 and 2 show the results.

〔曲げ弾性率の評価〕
 離型剤を塗布したガラス板とガラス板との間に、作製した樹脂組成物を挟み、150℃、60分で350μmのシート状に硬化させ、万能試験機((株)島津製作所製 AG-I)を用いて室温での曲げ弾性率を求めた。なお、n=3で測定し、平均値を用いた。また、試験片の膜厚及び幅は、5点測定し、平均値を計算値に用いた。曲げ弾性率は、好ましくは、2.0~4.2GPaである。表1、表2に、曲げ弾性率の評価結果を示す。
[Evaluation of flexural modulus]
The prepared resin composition is sandwiched between a glass plate coated with a release agent and cured into a 350 μm sheet at 60 ° C. for 60 minutes. A universal testing machine (AG-manufactured by Shimadzu Corporation AG- The flexural modulus at room temperature was determined using I). In addition, it measured by n = 3 and used the average value. The film thickness and width of the test piece were measured at five points, and the average value was used as the calculated value. The flexural modulus is preferably 2.0 to 4.2 GPa. Tables 1 and 2 show the evaluation results of the flexural modulus.

〔抽出Clイオン量の評価〕
 作製した樹脂組成物を150℃、60分で硬化させて得た試料を、5mm角程度に粉砕した。硬化塗膜:2.5gにイオン交換水25cmを加え、PCT試験槽(121℃±2℃/湿度100%/2atmの槽)中に20時間置いた後、室温まで冷却して得た抽出液を試験液とした。上記の手順で得られた抽出液のClイオン濃度を、イオンクロマトグラフを用いて測定した。表1、表2に、抽出Clイオン量の評価結果を示す。
[Evaluation of amount of extracted Cl ions]
A sample obtained by curing the produced resin composition at 150 ° C. for 60 minutes was pulverized to about 5 mm square. Cured coating: Extraction obtained by adding 25 cm 3 of ion-exchanged water to 2.5 g and placing in a PCT test tank (121 ° C. ± 2 ° C./humidity 100% / 2 atm bath) for 20 hours and then cooling to room temperature The solution was used as a test solution. The Cl ion concentration of the extract obtained by the above procedure was measured using an ion chromatograph. Tables 1 and 2 show the evaluation results of the extracted Cl ion amount.

〔注入性の評価〕
 図1に、樹脂組成物の注入性の評価方法を説明する模式図を示す。まず、図2(A)に示すように、基板20上に20μmのギャップ40を設けて、半導体素子の代わりにガラス板30を固定した試験片を作製した。但し、基板20としては、フレキシブル基板の代わりにガラス基板を使用した。次に、この試験片を110℃に設定したホットプレート上に置き、図2(B)に示すように、ガラス板30の一端側に、作製した樹脂組成物10を塗布し、図2(C)に示すように、ギャップ40が樹脂組成物11で満たされるまでの時間を測定し、90秒以下で満たされた場合を「良」、90秒を超えた場合を「悪」とした。表1、表2に、注入性の評価結果を示す。
[Evaluation of injectability]
In FIG. 1, the schematic diagram explaining the evaluation method of the injectability of a resin composition is shown. First, as shown in FIG. 2A, a test piece in which a 20 μm gap 40 was provided on the substrate 20 and the glass plate 30 was fixed instead of the semiconductor element was produced. However, as the substrate 20, a glass substrate was used instead of the flexible substrate. Next, this test piece is placed on a hot plate set at 110 ° C., and as shown in FIG. 2 (B), the prepared resin composition 10 is applied to one end side of the glass plate 30, and FIG. ), The time until the gap 40 was filled with the resin composition 11 was measured. The case where the gap 40 was satisfied within 90 seconds was determined as “good”, and the case where it exceeded 90 seconds was determined as “bad”. Tables 1 and 2 show the injectability evaluation results.

〔硬化後の剥離の評価〕
 硬化後の剥離は、TEG(30umピッチ、日立超LSI製)を使用して評価を行った。作製したアンダーフィルをディスペンサーでTEGに塗布し、150℃で5分間、温風乾燥機で硬化を行った。TEGが常温になるまで室温に放置し、室温になったTEGのフィルム側から、光学顕微鏡を用いて、倍率:200倍で観察を行った。バンプの間に剥離箇所があるかどうかを観察し、剥離箇所がない場合には「○」、ひとつでも剥離が確認された場合は「×」とした。図3に、硬化後に剥離がない箇所の写真を、図4と図5に、硬化後に剥離が発生した箇所の写真を示す。図3では、剥離がないのに対して、図4と図5では、矢印の箇所で剥離が確認された。表1、表2に、硬化後の剥離の評価結果を示す。
[Evaluation of peeling after curing]
Peeling after curing was evaluated using TEG (30 um pitch, manufactured by Hitachi VLSI). The produced underfill was applied to the TEG with a dispenser and cured with a hot air dryer at 150 ° C. for 5 minutes. The TEG was allowed to stand at room temperature until it reached room temperature, and was observed from the film side of the TEG at room temperature using an optical microscope at a magnification of 200 times. It was observed whether or not there was a peeled portion between the bumps. When there was no peeled portion, “◯” was indicated, and when even one peel was confirmed, “×” was indicated. FIG. 3 shows a photograph of a portion where there is no separation after curing, and FIGS. 4 and 5 show photographs of a portion where separation occurs after curing. In FIG. 3, there was no separation, whereas in FIGS. 4 and 5, separation was confirmed at the location indicated by the arrow. Tables 1 and 2 show the evaluation results of peeling after curing.

〔外観の評価」
 硬化後の剥離の評価を行った試料の外観の評価を、光学顕微鏡を用いて、倍率:200倍で行った。図6に、実施例3の外観の拡大写真を、図7に比較例4の外観の拡大写真を示す。図6、図7のパターンピッチは、30μmである。図6に示す実施例3では、外観が「○」であった。これに対して、図7に示す比較例4は、写真内の白の破線で囲んだ部分に剥離(デラミネーション)が観察された。表1、表2に、外観の剥離の評価結果を示す。
[Appearance evaluation]
Evaluation of the appearance of the sample on which the peeling after curing was evaluated was performed at 200 × magnification using an optical microscope. FIG. 6 shows an enlarged photograph of the appearance of Example 3, and FIG. 7 shows an enlarged photograph of the appearance of Comparative Example 4. The pattern pitch in FIGS. 6 and 7 is 30 μm. In Example 3 shown in FIG. 6, the appearance was “◯”. On the other hand, in Comparative Example 4 shown in FIG. 7, peeling (delamination) was observed in a portion surrounded by a white broken line in the photograph. Tables 1 and 2 show the results of evaluation of appearance peeling.

〔耐マイグレーション性の評価〕
 樹脂組成物の耐イオンマイグレーション性を評価するため、高温高湿バイアス試験(THB試験)を実施した。試験方法は、以下のとおりである。スズメッキ(0.2±0.05μm)された銅配線(パターン幅:15μm、線間幅:15μm、パターンピッチ:30μm)を持つポリイミドテープ基材上に、作製した樹脂組成物を20μm厚みで塗布し、150℃で30分間処理し、封止剤を硬化させて試験片を作製した。この試験片についてイオンマイグレーション評価システム(エスペック社製)を用いて、85℃/湿度85%の条件下で、DC60Vの電圧を印加したときの抵抗値の変化を測定、抵抗値が1.00×10Ωを下回った時点を閾値として、銅配線のマイグレーションを評価した(単位:時間)。抵抗値が閾値を下回らなかったものについては、1000時間を越えた時点で試験終了とした。表1、表2に、耐マイグレーション性の評価結果を示す。
[Evaluation of migration resistance]
In order to evaluate the ion migration resistance of the resin composition, a high temperature and high humidity bias test (THB test) was conducted. The test method is as follows. The prepared resin composition is applied in a thickness of 20 μm onto a polyimide tape substrate having tin wiring (0.2 ± 0.05 μm) copper wiring (pattern width: 15 μm, line width: 15 μm, pattern pitch: 30 μm). And it processed at 150 degreeC for 30 minute (s), the sealing agent was hardened, and the test piece was produced. With respect to this test piece, an ion migration evaluation system (manufactured by Espec Co., Ltd.) was used to measure a change in resistance value when a voltage of DC 60 V was applied at 85 ° C./85% humidity, and the resistance value was 1.00 ×. The migration of the copper wiring was evaluated (unit: time) with the time point below 10 7 Ω as a threshold value. For those whose resistance value did not fall below the threshold, the test was terminated when 1000 hours were exceeded. Tables 1 and 2 show the migration resistance evaluation results.

Figure JPOXMLDOC01-appb-T000003
Figure JPOXMLDOC01-appb-T000003

Figure JPOXMLDOC01-appb-T000004
Figure JPOXMLDOC01-appb-T000004

 表1、表2からわかるように、実施例1~11の全てで、粘度が所望値で、粘度上昇率が低く、曲げ弾性率が所望値で、抽出Cl量が低く、注入性が良好で、硬化後の剥離がなく、外観が問題なく、耐マイグレーション性が優れていた。これに対して、(D)成分を含まない比較例1と(D)成分が少な過ぎる比較例2は、硬化後に剥離が発生し、耐マイグレーション特性が悪かった。(D)成分が多過ぎる比較例3は、注入性が悪かった。また、(D)成分の代わりに、マスターバッチ処理をしないコアシェルゴムを使用した比較例4と、マスターバッチ処理をしないコアシェルでない固形ゴムを使用した比較例5と、マスターバッチ処理した固形ゴムを使用した比較例6は、注入性が悪く、外観も悪かった。(D)成分の代わりに、液状ゴムを使用した比較例7は、抽出Cl量が多く、マイグレーション特性が悪かった。 As can be seen from Tables 1 and 2, in all of Examples 1 to 11, the viscosity is the desired value, the rate of increase in viscosity is low, the flexural modulus is the desired value, the amount of extracted Cl is low, and the injectability is good. There was no peeling after curing, the appearance was satisfactory, and the migration resistance was excellent. On the other hand, Comparative Example 1 not containing the component (D) and Comparative Example 2 having too little component (D) had peeling after curing and poor migration resistance. Comparative Example 3 having too much component (D) had poor injectability. In addition, instead of the component (D), Comparative Example 4 using a core-shell rubber without a masterbatch treatment, Comparative Example 5 using a solid rubber without a corebatch without a masterbatch treatment, and a solid rubber subjected to a masterbatch treatment are used. Comparative Example 6 was poor in injectability and poor in appearance. Comparative Example 7 using liquid rubber instead of the component (D) had a large amount of extracted Cl and poor migration characteristics.

 本発明の液状樹脂組成物は、ファインピッチのCOF実装用封止剤として使用可能であり、流動性能を低下させずに、封止工程での冷却時または信頼性試験時での剥離を抑制することにより、高温高湿試験で発生するマイグレーションの発生を抑制することができ、特に、フリップチップ型半導体素子、中でも液晶ドライバを含む半導体装置に適している。 The liquid resin composition of the present invention can be used as a fine pitch COF mounting sealant, and suppresses peeling during cooling in a sealing process or during a reliability test without deteriorating fluidity. Thus, the occurrence of migration that occurs in the high-temperature and high-humidity test can be suppressed, and is particularly suitable for a flip-chip type semiconductor element, particularly a semiconductor device including a liquid crystal driver.

  1  基板
  2  陽極
  3  陰極
  10、11  液状樹脂組成物
  20  基板
  30  ガラス板
  40  ギャップ
DESCRIPTION OF SYMBOLS 1 Substrate 2 Anode 3 Cathode 10, 11 Liquid resin composition 20 Substrate 30 Glass plate 40 Gap

Claims (7)

 (A)液状エポキシ樹脂、(B)酸無水物硬化剤、(C)イミダゾール化合物硬化促進剤、および(D)マスターバッチ処理されたコアシェル構造を持つエラストマーを含有し、
(D)成分が、液状エポキシ樹脂組成物100質量部に対して、1~10質量部であることを特徴とする、液状エポキシ樹脂組成物。
(A) a liquid epoxy resin, (B) an acid anhydride curing agent, (C) an imidazole compound curing accelerator, and (D) a masterbatch-treated elastomer having a core-shell structure,
The liquid epoxy resin composition, wherein the component (D) is 1 to 10 parts by mass with respect to 100 parts by mass of the liquid epoxy resin composition.
 (D)成分が、ビスフェノール型エポキシ樹脂でマスターバッチ処理されたコアシェル構造を持つエラストマーである、請求項1記載の液状エポキシ樹脂組成物。 The liquid epoxy resin composition according to claim 1, wherein the component (D) is an elastomer having a core-shell structure that is masterbatch-treated with a bisphenol type epoxy resin.  さらに、(E)カップリング剤を含有する、請求項1または2記載の液状エポキシ樹脂組成物。 Furthermore, (E) Liquid epoxy resin composition of Claim 1 or 2 containing a coupling agent.  請求項1~3のいずれか1項記載の液状エポキシ樹脂組成物を含む、液状半導体封止材。 A liquid semiconductor encapsulant comprising the liquid epoxy resin composition according to any one of claims 1 to 3.  請求項4記載の液状半導体封止材を含む、液晶ドライバ用液状封止材。 A liquid encapsulant for a liquid crystal driver, comprising the liquid semiconductor encapsulant according to claim 4.  請求項4記載の液状半導体封止剤を用いて封止されたフリップチップ型半導体素子を有する、半導体装置。 A semiconductor device having a flip-chip type semiconductor element encapsulated with the liquid semiconductor encapsulant according to claim 4.  請求項5記載の液晶ドライバ用液状封止材を用いて封止されたフリップチップ型半導体素子を有する、液晶ドライバ。 A liquid crystal driver comprising a flip chip type semiconductor element sealed using the liquid sealing material for a liquid crystal driver according to claim 5.
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JP2002146160A (en) * 2000-11-17 2002-05-22 Shin Etsu Chem Co Ltd Liquid epoxy resin composition and semiconductor device
JP2003082064A (en) * 2001-06-28 2003-03-19 Harima Chem Inc Liquid epoxy resin composition for sealing filler
JP2013151642A (en) * 2011-12-27 2013-08-08 Hitachi Chemical Co Ltd Liquid resin composition for electronic component, method of producing the liquid resin composition, and electronic component device

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JP2002146160A (en) * 2000-11-17 2002-05-22 Shin Etsu Chem Co Ltd Liquid epoxy resin composition and semiconductor device
JP2003082064A (en) * 2001-06-28 2003-03-19 Harima Chem Inc Liquid epoxy resin composition for sealing filler
JP2013151642A (en) * 2011-12-27 2013-08-08 Hitachi Chemical Co Ltd Liquid resin composition for electronic component, method of producing the liquid resin composition, and electronic component device

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