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WO2016043436A1 - Solar cell substrate plating apparatus using both light-induced plating and forward bias plating - Google Patents

Solar cell substrate plating apparatus using both light-induced plating and forward bias plating Download PDF

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Publication number
WO2016043436A1
WO2016043436A1 PCT/KR2015/008479 KR2015008479W WO2016043436A1 WO 2016043436 A1 WO2016043436 A1 WO 2016043436A1 KR 2015008479 W KR2015008479 W KR 2015008479W WO 2016043436 A1 WO2016043436 A1 WO 2016043436A1
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WO
WIPO (PCT)
Prior art keywords
plating
substrate
solar cell
light
forward bias
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2015/008479
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French (fr)
Korean (ko)
Inventor
김판수
이덕행
정운석
임진규
정재윤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hojin Platech Co Ltd
Original Assignee
Hojin Platech Co Ltd
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Publication date
Application filed by Hojin Platech Co Ltd filed Critical Hojin Platech Co Ltd
Priority to CN201580012963.6A priority Critical patent/CN106103812B/en
Publication of WO2016043436A1 publication Critical patent/WO2016043436A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors
    • C25D7/123Semiconductors first coated with a seed layer or a conductive layer
    • C25D7/126Semiconductors first coated with a seed layer or a conductive layer for solar cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/002Cell separation, e.g. membranes, diaphragms
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/12Process control or regulation
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • C25D5/024Electroplating of selected surface areas using locally applied electromagnetic radiation, e.g. lasers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a plating apparatus for forming a circuit on a substrate in manufacturing a solar cell, and in particular, an embodiment in which light induced plating (LIP) and forward bias plating are performed in parallel. It relates to a plating apparatus for a battery substrate.
  • LIP light induced plating
  • the screen printing method is a printing method using silver paste, which is not only a problem of price competitiveness due to the price increase of silver (Ag), but also electrical conversion efficiency due to a decrease in electrical conductivity due to impurities such as binders and glass beads constituting the silver paste. Due to the limitations, recent methods using plating have been actively studied.
  • the inventors of the present invention have proposed a plating apparatus for performing both electroplating and light induction plating through the Republic of Korea Patent Publication No. 10-2013-0084373.
  • this patent document was a method of performing both electroplating and photo-induction plating on both sides of the substrate, there was a problem that the anode member for electroplating the light irradiated from the light source for the photo-induction plating. In short, a problem arises in that the amount of light received on the substrate surface cannot be uniformly maintained.
  • the patent document adopts a mechanical drive mechanism to solve such a problem.
  • the solution of the patent document was difficult to use when such a mechanism was not used and when one surface of the substrate was plated without performing double-side plating.
  • the inventors of the present invention have completed the present invention after a long research effort to solve and improve the problems of the above patent documents.
  • An object of the present invention is to provide a device capable of effectively performing both light induction plating and forward bias plating in one device in plating one surface of a single-sided light receiving solar cell substrate or a substrate of a double-sided light receiving solar cell.
  • another object of the present invention is to propose a solution that can fundamentally exclude the reduction of the electrical conversion efficiency that may be caused by plating on one surface of the substrate, the back surface unnecessary plating is immersed in the plating solution. Through this, it can be applied to large-capacity production facilities, thereby enhancing the economics of solar cells.
  • the present invention provides a plating apparatus for a solar cell substrate in parallel with the photo-induction plating and forward bias plating of the solar cell substrate to be plated, plating bath for receiving a plating solution;
  • a plurality of roller parts spaced apart at predetermined intervals so as to horizontally move the substrate while one surface of the substrate is immersed in the plating solution;
  • a first plating part disposed between the plurality of roller parts and configured to perform light induced plating by irradiating light toward the substrate while being sealed in the plating solution;
  • a second plating part for performing forward bias plating on the substrate through an anode member immersed in the plating solution and disposed under the first plating part. It provides a plating apparatus for a solar cell substrate in parallel.
  • the first plating unit a light source unit including a plurality of LEDs spaced at a predetermined interval along the horizontal movement direction of the substrate; It may include a light source receiving tube of a transparent material for sealing the light source.
  • the second plating part may further include: a negative electrode member connected to the positive electrode member and disposed above the first plating part; And an electricity supply unit disposed between the cathode member and the roller unit to transfer current from the cathode member to the substrate horizontally moving on the roller unit.
  • the conductive part may include a plurality of wires having an U-shaped end portion in contact with the substrate.
  • the energizing portion may be adjustable up and down height.
  • the present invention may further include a control unit connected to the first plating unit to control the supply of power to the light source unit, or connected to the second plating unit to control the flow of the current.
  • the plating bath is divided into an immersion region and a non-immersion region in which the roller part and the anode member are immersed in the plating liquid, and are formed at a boundary between the immersion region and the non-immersion region to adjust the height of the plating liquid in the immersion region. It may further include a height adjustment plate.
  • the height adjustment plate may be adjustable up and down height.
  • the present invention may further include a shielding film disposed between the first plating part and the second plating part and having a plurality of holes formed therein to control the drift generated on the substrate and the surface of the anode member.
  • the plating process can be selectively performed in one plating apparatus for LIP plating and FBP plating, a time and cost can be reduced in manufacturing a solar cell.
  • the reduction of the electrical conversion efficiency that can be caused by the plating-free back surface being immersed in the plating solution can be excluded at the source, further improving the economics of the solar cell substrate plating apparatus as a large capacity production facility. I can do it.
  • FIG. 1 is a schematic view showing a schematic configuration of a plating apparatus for a solar cell substrate performing a combination of light induction plating and forward bias plating according to an embodiment of the present invention.
  • Figure 2 is a front view showing a plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • Figure 3 is a view showing a plating apparatus for a solar cell substrate in parallel with the photo-induction plating and forward bias plating according to an embodiment of the present invention.
  • Figure 4 is a view showing a first plating portion of the plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • FIG. 5 is a view showing a current-carrying part of a plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating according to an embodiment of the present invention.
  • Figure 6 is a view showing a roller portion of a plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • FIG. 7 is a view showing a shielding film of a plating apparatus for a solar cell substrate performing both photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.
  • FIG. 1 is a schematic diagram showing a schematic configuration of a plating apparatus for a solar cell substrate in parallel with light induction plating and forward bias plating according to an embodiment of the present invention.
  • Figure 2 is a front view according to an embodiment of the present invention without the control,
  • Figure 3 is a side view thereof.
  • a plating apparatus for a solar cell substrate which performs photoinduction plating and forward bias plating includes light induced plating (LIP) and forward bias plating (Forward).
  • Bias Plating can be performed in parallel, and includes a plating bath 100, a plurality of roller parts 500, a first plating part 300, and a second plating part.
  • the present invention is to solve the conventional problem of the need to plate only one surface of the substrate and the amount of light (L) received on the substrate by the light source is covered by the anode member 110, a plurality of rollers 500 substrate It comprises a configuration for plating only one surface of the substrate while moving the horizontal.
  • the light source is located between the roller 500, and at the same time the anode member 110 is characterized in that it is disposed behind the light source.
  • the plating apparatus for a solar cell substrate which combines the photoinduction plating and the forward bias plating according to the present invention by plating only the end surface of the solar cell substrate, thereby reducing the electrical conversion efficiency that may be caused by immersing the back surface which was not required for plating in the plating solution.
  • the economic feasibility as a large-capacity production facility can be further improved.
  • the light source for photo-induction plating is between the substrate and the anode member 110, the light (L) irradiated from the light sources can be uniformly well transmitted to the surface of the substrate to be plated without disturbing other members.
  • the plating solution is accommodated in the plating bath 100, and the plurality of roller parts 500, the first plating part 300, and the anode member 110 of the second plating part are immersed in the plating solution.
  • the plurality of rollers 500 are spaced apart by a predetermined interval along the moving direction of the substrate. That is, the plurality of roller parts 500 are disposed spaced apart from each other by a predetermined interval, and the substrate is disposed above the roller parts. At this time, the plurality of rollers are rotated while being immersed in the plating liquid to horizontally move the substrate disposed thereon.
  • the plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating according to the present invention may further include a height adjusting plate 200 for adjusting the height of the plating liquid in the immersion region in the plating bath 100.
  • the plating bath 100 is divided into an immersion region and a non-immersion region. In the immersion area, the roller part 500, the anode member 110, and the first plating part 300 are immersed in the plating liquid.
  • the non-immersion area may exist outside the immersion area, and a height adjustment plate 200 may be formed at the boundary between the immersion area and the non-immersion area to adjust the height of the plating liquid in the immersion area.
  • the height adjustment plate 200 is formed to be movable in the vertical direction, and when the height adjustment plate 200 is lowered, the plating liquid in the immersion area is carried over to the non-immersion area by the height adjustment plate 200 so that the plating liquid in the immersion area. The height of can be lowered. In addition, when the height of the height adjustment plate 200 is increased, the height of the plating liquid in the immersion area is also formed to match the height of the height adjustment plate 200. At this time, the plating liquid is supplied from the outside to fill the plating tank 100.
  • the maximum height of the height adjustment plate 200 may be formed to be the same as the height of the top of the roller portion 500 or very little lower than this.
  • the height of the height adjustment plate 200 it is possible to adjust the level of the plating liquid in the plating bath (100). That is, if the level of the plating liquid is too high when the substrate is deposited on one surface, the plating liquid may spread to the upper portion of the substrate disposed on the roller part by completely depositing the roller 500, and if the level of the plating liquid is too low, the plating liquid This may not be evenly deposited on the substrate, this problem can be solved by using the height adjustment plate according to the present invention.
  • FIG. 4 is a view illustrating a first plating part 300 of a plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • the first plating unit 300 performs light induction plating by irradiating light L onto a substrate, and includes a light source unit having a rod-shaped light source unit including a plurality of LEDs 301 and a light source unit. It includes a receiving pipe (302). A plurality of LEDs 301 are disposed between the plurality of roller portions along the horizontal movement direction of the substrate, the light (L) from the plurality of LEDs 301 is irradiated to the substrate to perform a light induction plating on the substrate do.
  • the plurality of LEDs 301 should be sealed and disposed in the light source accommodating tube 302. That is, the light source unit is positioned in the light source receiving tube 302.
  • the light source accommodating part is preferably made of a transparent material.
  • a light source tube O-ring 303 may be installed at the opening and closing portion of the light source tube 302. At this time, the light source receiving tube O-ring 303 may prevent the inflow of plating chemicals by using a product having chemical resistance such as Viton, soft polypropylene, soft polyethylene, and rubber.
  • LED 301 lamps arranged side by side on the PCB.
  • these PCBs may be arranged at regular intervals in a horizontal direction forming 90 degrees with the lamp arrangement again in a state where the PCB is transparently sealed in the light source accommodating portion.
  • the light sources can be installed in a horizontal matrix in a sealed state, and as a result, a uniform light L can be irradiated onto the substrate.
  • the second plating part performs forward bias plating on the substrate through the anode member 110.
  • the second plating part includes a positive electrode member 110, a negative electrode member, a power supply part for supplying power, and an energization part 400.
  • the positive electrode member 110 is a place where the electric current supplied from the power supply part is immersed in the plating solution, and the oxidation reaction proceeds.
  • the current supplied from the power supply unit is transferred to the substrate through the positive electrode member 110 and the plating solution to proceed with plating of the substrate, and the current passing through the substrate follows the structure circulating to the power supply unit through the negative electrode member after passing through the conducting unit 400. do.
  • FIG. 5 is a diagram illustrating a current-carrying part 400 of a plating apparatus for a solar cell substrate which performs photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • the energization part 400 is disposed so that the end thereof is located between the roller part 500 and the roller part 500.
  • the conductive part 400 includes a plurality of wires, and the plurality of wires do not contact the roller part 500, but contact the horizontally moving substrate to transfer current from the cathode member to the substrate. At this time, the end of the wire in contact with the substrate may be formed in a U-shape.
  • the material of the wire is preferably formed to minimize the transfer resistance using a material such as stainless steel, Cu, carbon.
  • the energizing portion 400 may be formed to be adjustable up and down height. That is, when the height of the current conduction unit 400 is low, the wire end is immersed in the plating liquid, which causes contamination of the wire by the plating liquid, and thus, the contamination may be transferred to the rear surface of the substrate. In addition, if the height of the conduction portion is too high, there may be no electrical contact to the back. This problem can be solved by applying a height-adjustable structure.
  • FIG. 6 is a diagram illustrating a roller unit 500 of a plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • the roller buried ring 501 is applied to deposit only one surface of the substrate, and the solution buried in the o-ring contacts the lower part of the substrate to evenly distribute the viscosity of the plating solution. Only one side will be deposited.
  • the roller buoyling ring 501 is prevented from being damaged by the force pulling the substrate downward due to the viscosity of the solution.
  • the O-ring may be a product having chemical resistance such as viton, soft polypropylene, soft polyethylene, and soft rubber.
  • the roller unit 500 may be coupled to a driving unit 502 for rotating the roller unit 500 by receiving external power. The roller 500 is also rotated by the rotation of the driving unit 502.
  • FIG. 7 is a diagram illustrating a shielding film 140 of a plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating in accordance with an embodiment of the present invention.
  • a transparent shielding film 140 may be installed in the plating apparatus.
  • the transparent shielding film 140 is to ensure the uniformity of the metal film to be plated on the plated body. Due to the drift of the magnetic field generated during the plating process, a phenomenon in which current is concentrated at corners and edge portions may occur.
  • the shielding layer 140 may help prevent the current from partially passing through.
  • the shielding film 140 is manufactured using a transparent material such as poly carbonate, PVC, or acryl, and controls the drift generated from the surface of the solar cell substrate and the anode member 110 which are the plated bodies.
  • a plurality of holes 141 are formed in the shielding film 140 so that the plating solution rising from the bottom passes through the holes 141 to face the substrate. This helps to control the speed of the stirring solution to some extent.
  • substrate using this plating apparatus of this invention is demonstrated.
  • the LED 301 lamp light source which is located near the center of the plating bath 100 is turned on, and light (L) is irradiated toward the substrate to be plated, which is horizontally immersed in the upper part of the plating bath 100, to remove The plating may be performed or the LED 301 lamp light source may be turned off and the current may be supplied to perform forward bias plating.
  • a seed layer may be formed on the cross-section of the wafer, thereby improving the conductivity of the wafer surface.
  • the plating apparatus for a solar cell substrate simultaneously performing photoinduction plating and forward bias plating may further include a control unit.
  • the control unit may be coupled to the power supply unit of the first plating unit 300 and the power supply unit of the second plating unit, respectively, to control the power supply units of the first plating unit 300 and the second plating unit. That is, a control unit driven by a control solution in which a computer and a computer program are installed controls each power supply unit so as to operate the first plating unit 300 or the second plating unit in the plating bath 100 selectively or in parallel.
  • the control unit connected to the plating apparatus of the present invention may control to selectively perform the LIP plating, FBP plating process as described above, and may control the components of the plating apparatus so that LIP plating and FBP plating are performed in parallel.
  • the control unit to drive the feed rate, current, the intensity of the light (L), the temperature, etc. when the plating bath 100 operates within the design range.
  • the present invention it is possible to plate on both sides of the substrate without masking by one surface immersion on the plating bath 100.
  • the process can be easily configured as IN LINE.

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Abstract

The present invention relates to a solar cell substrate plating apparatus using both light-induced plating and forward bias plating of a unifacial light-receiving type solar cell substrate or a bifacial light-receiving type solar cell substrate, as an object to be plated, and provides a solar cell substrate plating apparatus using both using light-induced plating and forward bias plating, comprising: a plating bath for accommodating a plating solution; a plurality of roller units separately arranged at predetermined intervals so as to horizontally move the substrate in a state in which one surface of the substrate is dipped into the plating solution; a first plating unit arranged between the roller units, and performing the light-induced plating by emitting light toward the substrate in a sealed state in the plating solution; and a second plating unit dipped into the plating solution so as to perform the forward bias plating on the substrate through an anode member arranged at the bottom of the first plating unit.

Description

광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치 Plating Apparatus for Solar Cell Substrate which Combines Induction Plating and Forward Bias Plating

본 발명은 태양전지를 제조함에 있어서 기판에 회로를 형성하기 위한 도금 장치에 관한 것이며, 특히 광유도도금(Light Induced Plating: LIP) 및 순방향 바이어스 도금(Forward Bias Plating)을 병행하여 실시할 수 있는 태양전지 기판용 도금장치에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plating apparatus for forming a circuit on a substrate in manufacturing a solar cell, and in particular, an embodiment in which light induced plating (LIP) and forward bias plating are performed in parallel. It relates to a plating apparatus for a battery substrate.

태양전지를 제조하기 위해서는 기판에 회로를 형성해야 한다. 회로를 형성하는 기술은 종래의 스크린 프린팅(screen printing) 방식과 도금 방식으로 분류될 수 있다. 스크린 프린팅 방식은 은 페이스트를 이용한 인쇄 방식으로서 은(Ag)의 가격상승으로 인한 가격경쟁력의 문제뿐만 아니라, 은 페이스트를 구성하는 바인더 및 글라스 비드 등의 불순물에 따른 전기 전도도의 저하에 따른 전기 변환 효율의 한계로 인해서, 최근에는 도금을 이용한 공법들이 활발히 연구되고 있는 상황이다.In order to manufacture a solar cell, a circuit must be formed on a substrate. Techniques for forming circuits can be classified into conventional screen printing methods and plating methods. The screen printing method is a printing method using silver paste, which is not only a problem of price competitiveness due to the price increase of silver (Ag), but also electrical conversion efficiency due to a decrease in electrical conductivity due to impurities such as binders and glass beads constituting the silver paste. Due to the limitations, recent methods using plating have been actively studied.

기판에 씨드 레이어(seed layer)가 형성되어 있지 않은 경우에는 전기 도금이 어렵기 때문에, 전기 도금 공정을 위해서 기판에 전도층(conductive layer)을 미리 형성할 필요가 있다. 이를 위해서 광유도 도금(Light Induced Plating: LIP)를 이용한 도금 공정을 거친 다음에, 본격적인 전기도금을 하는 경우가 알려졌다. 하지만 이런 공정은 각각 별도의 장치에서 독립적으로 이루어지기 때문에 비용과 시간이 증가되는 요인이 됐다.If a seed layer is not formed on the substrate, electroplating is difficult. Therefore, it is necessary to form a conductive layer on the substrate in advance for the electroplating process. For this purpose, a plating process using light induced plating (LIP) is used, followed by full-fledged electroplating. However, these processes are costly and time consuming because each process is done independently.

본 발명의 발명가들은 대한민국 공개특허 제10-2013-0084373호를 통해서 전기도금과 광유도 도금을 병행하는 도금 장치를 제안한 바 있다. 그러나 이 특허문헌은 기판의 양면에 전기도금과 광유도 도금을 병행하는 방법이었으며, 광유도 도금을 위한 광원으로부터 조사되는 광을 전기도금용 양극부재가 가리는 문제가 있었다. 요컨대 기판 표면에 수광되는 빛의 양을 균일하게 유지할 수 없는 문제점이 발생되었다. 상기 특허문헌은 그와 같은 문제점을 해결하기 위하여 기계적 구동 메커니즘을 채택하였다. 그러나 그와 같은 메커니즘을 사용하지 않는 경우와 양면 도금을 실시하지 않고 기판의 일면을 도금하는 경우에는 상기 특허문헌의 솔루션은 이용하기 어려웠다는 한계가 있었다.The inventors of the present invention have proposed a plating apparatus for performing both electroplating and light induction plating through the Republic of Korea Patent Publication No. 10-2013-0084373. However, this patent document was a method of performing both electroplating and photo-induction plating on both sides of the substrate, there was a problem that the anode member for electroplating the light irradiated from the light source for the photo-induction plating. In short, a problem arises in that the amount of light received on the substrate surface cannot be uniformly maintained. The patent document adopts a mechanical drive mechanism to solve such a problem. However, there was a limitation that the solution of the patent document was difficult to use when such a mechanism was not used and when one surface of the substrate was plated without performing double-side plating.

본 발명의 발명가들은 위와 같은 특허문헌의 문제점을 해결하고 개선하기 위해서 오랫동안 연구노력한 끝에 본 발명을 완성하게 되었다. The inventors of the present invention have completed the present invention after a long research effort to solve and improve the problems of the above patent documents.

본 발명의 목적은 단면 수광형 태양전지 기판 또는 양면 수광형 태양전지의 기판의 일면을 도금함에 있어 광유도 도금과 순방향 바이어스 도금을 효과적으로 하나의 장치에서 병행하여 수행할 수 있는 장치에 관한 것이다. SUMMARY OF THE INVENTION An object of the present invention is to provide a device capable of effectively performing both light induction plating and forward bias plating in one device in plating one surface of a single-sided light receiving solar cell substrate or a substrate of a double-sided light receiving solar cell.

또한, 본 발명의 다른 목적은 기판의 일면을 도금함에 있어, 도금이 불필요한 이면이 도금용액에 침지됨으로써 발생할 수 있는 전기 변환 효율의 감소를 원천적으로 배제할 수 있는 솔루션을 제안함에 있다. 이를 통해서 대용량 생산설비로 적용될 수 있도록 함으로써 태양전지의 경제성을 한층 고양함에 있다.In addition, another object of the present invention is to propose a solution that can fundamentally exclude the reduction of the electrical conversion efficiency that may be caused by plating on one surface of the substrate, the back surface unnecessary plating is immersed in the plating solution. Through this, it can be applied to large-capacity production facilities, thereby enhancing the economics of solar cells.

한편, 본 발명의 명시되지 않은 또 다른 목적들은 하기의 상세한 설명 및 그 효과로부터 용이하게 추론할 수 있는 범위 내에서 추가적으로 고려될 것이다.On the other hand, other unspecified objects of the present invention will be further considered within the range that can be easily inferred from the following detailed description and effects.

위와 같은 목적을 달성하기 위하여, 본 발명은 피도금체인 태양전지 기판의 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치로서, 도금액을 수용하는 도금조; 상기 기판의 일면이 상기 도금액에 침지된 상태에서 상기 기판을 수평이동시킬 수 있도록 기설정간격으로 이격되어 배치되는 복수의 롤러부; 복수의 상기 롤러부 사이에 배치되고, 상기 도금액 안에서 밀봉된 상태로 상기 기판을 향하여 빛을 조사하여 광유도 도금(Light Induced Plating)을 실시하는 제1 도금부; 및 상기 도금액에 침지되어 상기 제1 도금부 하부에 배치되는 양극부재를 통하여 상기 기판에 순방향 바이어스 도금(Forward Bias Plating)을 실시하는 제2 도금부를 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치를 제공한다.In order to achieve the above object, the present invention provides a plating apparatus for a solar cell substrate in parallel with the photo-induction plating and forward bias plating of the solar cell substrate to be plated, plating bath for receiving a plating solution; A plurality of roller parts spaced apart at predetermined intervals so as to horizontally move the substrate while one surface of the substrate is immersed in the plating solution; A first plating part disposed between the plurality of roller parts and configured to perform light induced plating by irradiating light toward the substrate while being sealed in the plating solution; And a second plating part for performing forward bias plating on the substrate through an anode member immersed in the plating solution and disposed under the first plating part. It provides a plating apparatus for a solar cell substrate in parallel.

이때, 상기 제1 도금부는, 상기 기판의 수평이동방향을 따라 일정간격 이격되어 배치되는 복수의 LED를 포함하는 광원부; 상기 광원부를 밀봉하는 투명소재의 광원수용관을 포함할 수 있다.In this case, the first plating unit, a light source unit including a plurality of LEDs spaced at a predetermined interval along the horizontal movement direction of the substrate; It may include a light source receiving tube of a transparent material for sealing the light source.

또한, 상기 제2 도금부는, 상기 양극부재와 연결되고, 상기 제1 도금부 상부에 배치되는 음극부재; 및 상기 음극부재와 상기 롤러부 사이에 배치되어, 상기 롤러부 상을 수평이동하는 상기 기판에 상기 음극부재로부터의 전류를 전달하는 통전부를 더 포함할 수 있다.The second plating part may further include: a negative electrode member connected to the positive electrode member and disposed above the first plating part; And an electricity supply unit disposed between the cathode member and the roller unit to transfer current from the cathode member to the substrate horizontally moving on the roller unit.

바람직하게는 상기 통전부는, 상기 기판과 접촉하는 단부가 U자 형으로 형성되는 복수의 와이어(wire)를 포함할 수 있다.Preferably, the conductive part may include a plurality of wires having an U-shaped end portion in contact with the substrate.

이때, 상기 통전부는 상하 높이조절가능할 수 있다.At this time, the energizing portion may be adjustable up and down height.

또한, 본 발명은 상기 제1 도금부에 연결되어 상기 광원부의 전원의 공급을 제어하거나, 상기 제2 도금부에 연결되어 상기 전류의 흐름을 제어하는 제어부를 더 포함할 수 있다.In addition, the present invention may further include a control unit connected to the first plating unit to control the supply of power to the light source unit, or connected to the second plating unit to control the flow of the current.

상기 도금조는 상기 롤러부 및 상기 양극부재가상기 도금액에 침지된 침지영역과 비침지영역으로 나뉘어지고, 상기 침지영역과 상기 비침지영역의 경계에 형성되어 상기 침지영역 내의 상기 도금액의 높이를 조절하는 높이조절플레이트를 더 포함할 수 있다.The plating bath is divided into an immersion region and a non-immersion region in which the roller part and the anode member are immersed in the plating liquid, and are formed at a boundary between the immersion region and the non-immersion region to adjust the height of the plating liquid in the immersion region. It may further include a height adjustment plate.

이때, 상기 높이조절플레이트는 상하 높이조절가능할 수 있다.At this time, the height adjustment plate may be adjustable up and down height.

또한, 본 발명은 상기 제1 도금부와 상기 제2 도금부 사이에 배치되고, 복수의 홀이 형성되어, 상기 기판과 상기 양극부재 표면에서 발생하는 편류를 조절하는 차폐막을 더 포함할 수 있다.The present invention may further include a shielding film disposed between the first plating part and the second plating part and having a plurality of holes formed therein to control the drift generated on the substrate and the surface of the anode member.

본 발명에 따르면, LIP 방식의 도금과 FBP 방식의 도금을 선택적으로 하나의 도금장치에서 도금공정이 이루어질 수 있기 때문에 태양전지를 제조함에 있어서 시간과 비용을 절감할 수 있는 효과를 발휘할 수 있다.According to the present invention, since the plating process can be selectively performed in one plating apparatus for LIP plating and FBP plating, a time and cost can be reduced in manufacturing a solar cell.

더욱이 태양전지 기판의 단면을 도금함에 있어, 도금이 불필요한 이면이 도금용액에 침지됨으로써 발생할 수 있는 전기 변환 효율의 감소를 원천적으로 배제할 수 있으므로 대용량 생산설비로서의 태양전지 기판 도금장치의 경제성을 한층 개선할 수 있게 되었다. Furthermore, in plating the cross section of the solar cell substrate, the reduction of the electrical conversion efficiency that can be caused by the plating-free back surface being immersed in the plating solution can be excluded at the source, further improving the economics of the solar cell substrate plating apparatus as a large capacity production facility. I can do it.

본 발명의 명세서에서 구체적으로 언급되지 않은 효과라 하더라도, 본 발명의 기술적 특징에 의해 기대되는 잠정적인 효과는 본 발명의 명세서에 기재된 것과 같이 취급됨을 첨언한다.Although effects not specifically mentioned in the specification of the present invention, it is added that the potential effects expected by the technical features of the present invention are treated as described in the specification of the present invention.

도 1은 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 개략적인 구성을 나타낸 개략도.1 is a schematic view showing a schematic configuration of a plating apparatus for a solar cell substrate performing a combination of light induction plating and forward bias plating according to an embodiment of the present invention.

도 2는 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치를 정면에서 나타낸 도면.Figure 2 is a front view showing a plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.

도 3은 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치를 측면에서 나타낸 도면.Figure 3 is a view showing a plating apparatus for a solar cell substrate in parallel with the photo-induction plating and forward bias plating according to an embodiment of the present invention.

도 4는 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 제1 도금부를 나타낸 도면.Figure 4 is a view showing a first plating portion of the plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.

도 5는 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 통전부를 나타낸 도면.5 is a view showing a current-carrying part of a plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating according to an embodiment of the present invention.

도 6은 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 롤러부를 나타낸 도면.Figure 6 is a view showing a roller portion of a plating apparatus for a solar cell substrate in parallel performing photo-induction plating and forward bias plating in accordance with an embodiment of the present invention.

도 7은 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 차폐막을 나타낸 도면.FIG. 7 is a view showing a shielding film of a plating apparatus for a solar cell substrate performing both photo-induction plating and forward bias plating in accordance with an embodiment of the present invention. FIG.

이하, 본 발명을 설명함에 있어서 관련된 공지기능에 대하여 이 분야의 기술자에게 자명한 사항으로서 본 발명의 요지를 불필요하게 흐릴 수 있다고 판단되는 경우에는 그 상세한 설명을 생략한다. In the following description of the present invention, when it is determined that the subject matter of the present invention may be unnecessarily obscured by those skilled in the art with respect to known functions related thereto, the detailed description thereof will be omitted.

제1, 제2 등의 용어는 다양한 구성요소들을 설명하는데 사용될 수 있지만, 상기 구성요소들은 상기 용어들에 의해 한정되어서는 안 된다. 상기 용어들은 하나의 구성요소를 다른 구성요소로부터 구별하는 목적으로만 사용된다.Terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another.

본 출원에서 사용한 용어는 단지 특정한 실시예를 설명하기 위해 사용된 것으로, 본 발명을 한정하려는 의도가 아니다. 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다. 본 출원에서, "포함하다" 또는 "가지다" 등의 용어는 명세서상에 기재된 특징, 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, components, or a combination thereof.

이하, 본 발명에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 실시예를 첨부도면을 참조하여 상세히 설명하기로 하며, 첨부 도면을 참조하여 설명함에 있어, 동일하거나 대응하는 구성 요소는 동일한 도면번호를 부여하고 이에 대한 중복되는 설명은 생략하기로 한다.Hereinafter, an embodiment of a plating apparatus for a solar cell substrate in parallel with light induction plating and forward bias plating according to the present invention will be described in detail with reference to the accompanying drawings. Components are assigned the same reference numerals and redundant description thereof will be omitted.

도 1은 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 개략적인 구성을 나타낸 개략도이다. 도 2는 제어부가 제외된 본 발명의 일 실시예에 따른 정면도이며, 도 3은 이에 대한 측면도이다.1 is a schematic diagram showing a schematic configuration of a plating apparatus for a solar cell substrate in parallel with light induction plating and forward bias plating according to an embodiment of the present invention. Figure 2 is a front view according to an embodiment of the present invention without the control, Figure 3 is a side view thereof.

도 1 내지 도 3을 참조하면, 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치는 광유도도금(Light Induced Plating: LIP) 및 순방향 바이어스 도금(Forward Bias Plating)을 병행하여 실시할 수 있는 것으로서, 도금조(100), 복수의 롤러부(500), 제1 도금부(300) 및 제2 도금부를 포함한다. 본 발명은 기판의 일면만을 도금할 필요성과 광원이 양극부재(110)에 가려 기판에 수광되는 빛(L)의 양이 불균일했던 종래 문제를 해결하기 위한 것으로서, 복수개의 롤러부(500)가 기판을 수평이동시키면서 기판의 일면만을 도금하는 구성을 포함한다. 또한 광원이 롤러부(500) 사이에 위치하며, 동시에 양극부재(110)는 광원의 후방에 배치되는 것을 특징으로 한다.1 to 3, a plating apparatus for a solar cell substrate which performs photoinduction plating and forward bias plating according to an embodiment of the present invention includes light induced plating (LIP) and forward bias plating (Forward). Bias Plating) can be performed in parallel, and includes a plating bath 100, a plurality of roller parts 500, a first plating part 300, and a second plating part. The present invention is to solve the conventional problem of the need to plate only one surface of the substrate and the amount of light (L) received on the substrate by the light source is covered by the anode member 110, a plurality of rollers 500 substrate It comprises a configuration for plating only one surface of the substrate while moving the horizontal. In addition, the light source is located between the roller 500, and at the same time the anode member 110 is characterized in that it is disposed behind the light source.

본 발명에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치는 태양전지 기판의 단면만을 도금함으로써, 도금이 불필요했던 이면이 도금액에 침지됨으로써 발생할 수 있는 전기 변환 효율의 감소를 원천적으로 배제할 수 있어 대용량 생산설비로서의 경제성을 한층 개선할 수 있게 되었다. 또한, 광유도 도금을 위한 광원이 기판과 양극부재(110) 사이에 있게 됨으로써, 광원들로부터 조사되는 빛(L)이 다른 부재의 방해없이 피도금체인 기판 표면에 균일하게 잘 전달될 수 있다.The plating apparatus for a solar cell substrate which combines the photoinduction plating and the forward bias plating according to the present invention by plating only the end surface of the solar cell substrate, thereby reducing the electrical conversion efficiency that may be caused by immersing the back surface which was not required for plating in the plating solution. As a result, the economic feasibility as a large-capacity production facility can be further improved. In addition, since the light source for photo-induction plating is between the substrate and the anode member 110, the light (L) irradiated from the light sources can be uniformly well transmitted to the surface of the substrate to be plated without disturbing other members.

도금조(100)에는 도금액이 수용되고, 도금액에는 복수의 롤러부(500)와 제1 도금부(300) 및 제2 도금부의 양극부재(110)가 침지된다. 복수의 롤러부(500)는 기판의 이동방향을 따라 일정간격 이격되어 배치된다. 즉, 복수의 롤러부(500)는 일정 간격 이격되어 배치되고, 이러한 롤러부의 상부에 기판이 배치되게 된다. 이때 복수의 롤러부는 도금액에 침지된 상태로 회전하며 상부에 배치되는 기판을 수평이동시키게 된다. The plating solution is accommodated in the plating bath 100, and the plurality of roller parts 500, the first plating part 300, and the anode member 110 of the second plating part are immersed in the plating solution. The plurality of rollers 500 are spaced apart by a predetermined interval along the moving direction of the substrate. That is, the plurality of roller parts 500 are disposed spaced apart from each other by a predetermined interval, and the substrate is disposed above the roller parts. At this time, the plurality of rollers are rotated while being immersed in the plating liquid to horizontally move the substrate disposed thereon.

본 발명에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치는 도금조(100) 내 침지영역의 도금액의 높이를 조절하는 높이조절플레이트(200)를 더 포함할 수 있다. 도금조(100)는 침지영역과 비침지영역으로 나뉘어진다. 침지영역은 롤러부(500) 및 양극부재(110), 그리고 제1 도금부(300)가 도금액에 침지된다. 비침지영역은 침지영역의 외측에 존재하고, 침지영역과 비침지영역의 경계에는 침지영역 내의 도금액의 높이를 조절하는 높이조절플레이트(200)가 형성될 수 있다. 높이조절플레이트(200)가 상하 높이 방향으로 이동가능하도록 형성되어, 높이조절플레이트(200)가 낮아지면 침지영역내 도금액이 높이조절플레이트(200)를 타고 비침지영역으로 넘어감으로써 침지영역내 도금액의 높이가 낮아질 수 있다. 또한 높이조절플레이트(200)의 높이가 높아지면 침지영역내 도금액의 높이도 높이조절플레이트(200) 높이에 맞도록 형성된다. 이때 도금액은 외부로부터 공급되어 도금조(100)를 채우게 된다. 바람직하게는 높이조절플레이트(200)의 최대 높이는 롤러부(500)의 최상부의 높이와 같게 또는 이보다 아주 조금 낮게 형성될 수 있다. 이렇게 높이조절플레이트(200)의 높이를 조절하여 도금조(100) 내부의 도금액의 수위를 조절할 수 있다. 즉, 기판이 일면을 침적함에 있어 도금액의 수위가 너무 높으면, 롤러부(500)가 완전침적하여 롤러부 상부에 배치되는 기판의 상부까지 도금액이 번질 수 있고, 도금액의 수위가 너무 낮으면, 도금액이 기판에 고르게 침적되지 않을 수 있는데, 본 발명에 따른 높이조절플레이트를 이용하여 이러한 문제점을 해결할 수 있다.The plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating according to the present invention may further include a height adjusting plate 200 for adjusting the height of the plating liquid in the immersion region in the plating bath 100. The plating bath 100 is divided into an immersion region and a non-immersion region. In the immersion area, the roller part 500, the anode member 110, and the first plating part 300 are immersed in the plating liquid. The non-immersion area may exist outside the immersion area, and a height adjustment plate 200 may be formed at the boundary between the immersion area and the non-immersion area to adjust the height of the plating liquid in the immersion area. The height adjustment plate 200 is formed to be movable in the vertical direction, and when the height adjustment plate 200 is lowered, the plating liquid in the immersion area is carried over to the non-immersion area by the height adjustment plate 200 so that the plating liquid in the immersion area. The height of can be lowered. In addition, when the height of the height adjustment plate 200 is increased, the height of the plating liquid in the immersion area is also formed to match the height of the height adjustment plate 200. At this time, the plating liquid is supplied from the outside to fill the plating tank 100. Preferably the maximum height of the height adjustment plate 200 may be formed to be the same as the height of the top of the roller portion 500 or very little lower than this. Thus, by adjusting the height of the height adjustment plate 200 it is possible to adjust the level of the plating liquid in the plating bath (100). That is, if the level of the plating liquid is too high when the substrate is deposited on one surface, the plating liquid may spread to the upper portion of the substrate disposed on the roller part by completely depositing the roller 500, and if the level of the plating liquid is too low, the plating liquid This may not be evenly deposited on the substrate, this problem can be solved by using the height adjustment plate according to the present invention.

도 4는 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 제1 도금부(300)를 나타낸 도면이다. FIG. 4 is a view illustrating a first plating part 300 of a plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating in accordance with an embodiment of the present invention.

도 4를 참조하면, 제1 도금부(300)는 기판에 빛(L)을 조사하여 광유도 도금을 실시하는 것으로서, 복수의 LED(301)를 포함하는 막대형상의 광원부와 광원부를 수용하는 광원수용관(302)을 포함한다. 복수의 LED(301)는 기판의 수평이동방향을 따라 상기 복수의 롤러부 사이사이에 배치되고, 복수의 LED(301)로부터의 빛(L)은 기판에 조사되어 기판에 광유도 도금을 실시하게 된다. 이때 복수의 LED(301)를 포함하는 광원부를 도금액과 물리적으로 분리하기 위하여 복수의 LED(301)는 광원수용관(302)에 밀봉되어 배치되어야 한다. 즉, 광원수용관(302) 안에 광원부가 위치하게 된다. 또한, 광원부로부터의 빛(L)이 기판에 전달되기 위하여 광원수용부는 투명소재로 이루어지는 것이 바람직하다. Referring to FIG. 4, the first plating unit 300 performs light induction plating by irradiating light L onto a substrate, and includes a light source unit having a rod-shaped light source unit including a plurality of LEDs 301 and a light source unit. It includes a receiving pipe (302). A plurality of LEDs 301 are disposed between the plurality of roller portions along the horizontal movement direction of the substrate, the light (L) from the plurality of LEDs 301 is irradiated to the substrate to perform a light induction plating on the substrate do. In this case, in order to physically separate the light source unit including the plurality of LEDs 301 from the plating solution, the plurality of LEDs 301 should be sealed and disposed in the light source accommodating tube 302. That is, the light source unit is positioned in the light source receiving tube 302. In addition, in order to transmit the light L from the light source unit to the substrate, the light source accommodating part is preferably made of a transparent material.

빛(L)의 투과에 대한 영향을 최소화하기 위해서, 유리, 강화유리, Poly Carbonate, PVC, Acryl등의 투명소재를 사용하며 내약품성을 갖는 소재로 한다. 또한 광원수용관(302)의 길이방향의 한쪽 끝에는 LED(301) 램프의 고장 혹은 파손 시에 유지보수 및 교체를 위한 개폐 가능한 뚜껑이 설치될 수 있다. 또한 광원수용관(302) 안으로 도금 약품이 유입되는 것을 차단하기 위해서, 광원수용관(302)의 개폐 부분에 광원수용관오링(O-RING)(303) 이 설치될 수 있다. 이때의 광원수용관오링(303)은 바이톤(Viton), 연질 폴리프로필렌, 연질 폴리에틸렌, 연질 고무(Rubber) 등의 내약품성을 지닌 제품을 사용함으로써 도금약품의 유입을 방지할 수 있다. In order to minimize the effect on the transmission of light (L), transparent materials such as glass, tempered glass, Poly Carbonate, PVC, Acryl, etc. are used, and materials having chemical resistance are used. In addition, one end of the light source receiving tube 302 in the longitudinal direction may be provided with an openable lid for maintenance and replacement in the event of failure or breakage of the LED 301 lamp. In addition, in order to block the plating chemicals from flowing into the light source tube 302, a light source tube O-ring 303 may be installed at the opening and closing portion of the light source tube 302. At this time, the light source receiving tube O-ring 303 may prevent the inflow of plating chemicals by using a product having chemical resistance such as Viton, soft polypropylene, soft polyethylene, and rubber.

또한, 본 발명의 바람직한 실시예에 있어서, 다수의 광원들의 설치 및 관리를 편리하게 하기 위해서, PCB위에 LED(301) 램프를 나란히 배열하여 설치하는 것이 좋다. 그리고 이들 PCB가 광원수용부 내에 투명하게 밀봉된 상태에서 다시 램프 배열 방향과 90도를 이루는 수평방향으로 일정한 간격으로 배열될 수 있다. 요컨대 광원들은 밀봉된 상태에서 수평 행렬로 설치될 수 있고, 그 결과 기판에 균일한 빛(L)이 조사될 수 있다.In addition, in a preferred embodiment of the present invention, in order to facilitate the installation and management of a plurality of light sources, it is preferable to arrange LED 301 lamps arranged side by side on the PCB. In addition, these PCBs may be arranged at regular intervals in a horizontal direction forming 90 degrees with the lamp arrangement again in a state where the PCB is transparently sealed in the light source accommodating portion. In other words, the light sources can be installed in a horizontal matrix in a sealed state, and as a result, a uniform light L can be irradiated onto the substrate.

제2 도금부는 양극부재(110)를 통하여 기판에 순방향 바이어스 도금을 실시하는 것이다. 이러한 제2 도금부는 양극부재(110), 음극부재, 전원을 공급하는 전원부, 및 통전부(400)를 포함한다. 양극부재(110)는 도금액에 침지되어 전원부로부터 공급된 전류가 유출되는 곳으로서, 산화반응이 진행된다. 전원부에서 공급된 전류는 양극부재(110)와 도금액을 거쳐 기판에 전달되어 기판의 도금을 진행하게 되고, 기판을 거친 전류는 통전부(400)를 지나 음극부재를 거쳐 전원부로 순환하는 구조를 따르게 된다.The second plating part performs forward bias plating on the substrate through the anode member 110. The second plating part includes a positive electrode member 110, a negative electrode member, a power supply part for supplying power, and an energization part 400. The positive electrode member 110 is a place where the electric current supplied from the power supply part is immersed in the plating solution, and the oxidation reaction proceeds. The current supplied from the power supply unit is transferred to the substrate through the positive electrode member 110 and the plating solution to proceed with plating of the substrate, and the current passing through the substrate follows the structure circulating to the power supply unit through the negative electrode member after passing through the conducting unit 400. do.

도 5는 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 통전부(400)를 나타낸 도면이다. 도 2 및 도 5를 참조하면, 통전부(400)는 롤러부(500)와 롤러부(500) 사이에 그 끝단이 위치하도록 배치된다. 이러한 통전부(400)는 복수의 와이어를 포함하되, 복수의 와이어는 롤러부(500)와 접촉하지 않고, 수평이동하는 기판과 접촉하여 음극부재로부터의 전류를 기판에 전달하는 역할을 하게 된다. 이때 기판과 접촉하는 와이어의 단부는 U자형으로 형성될 수 있다. 와이어의 단부를 U자형으로 형성함으로써, 기판의 이송을 원활하게 보조하며, 기판에 스크래치(scratch) 등이 발생하는 것을 방지할 수 있다. 이때, 와이어의 재질은 바람직하게는 Stainless steel, Cu, 카본등의 소재를 사용하여 전가저항을 최소화 할 수 있도록 형성될 수 있다.FIG. 5 is a diagram illustrating a current-carrying part 400 of a plating apparatus for a solar cell substrate which performs photo-induction plating and forward bias plating in accordance with an embodiment of the present invention. 2 and 5, the energization part 400 is disposed so that the end thereof is located between the roller part 500 and the roller part 500. The conductive part 400 includes a plurality of wires, and the plurality of wires do not contact the roller part 500, but contact the horizontally moving substrate to transfer current from the cathode member to the substrate. At this time, the end of the wire in contact with the substrate may be formed in a U-shape. By forming the end of the wire in a U-shape, it is possible to smoothly assist the transfer of the substrate and to prevent scratches or the like from occurring on the substrate. At this time, the material of the wire is preferably formed to minimize the transfer resistance using a material such as stainless steel, Cu, carbon.

또한, 통전부(400)는 상하높이조절가능하도록 형성될 수 있다. 즉, 통전부(400)의 높이가 낮으면 와이어 끝단이 도금액에 침지되어 도금액에 의한 와이어의 오염이 발생하고 이로 인하여 기판의 후면에 오염이 전이될 수 있다. 또한 통전부의 높이가 지나치게 높으면 후면에 전기적 접촉이 안될 수 있다. 이러한 문제를 높낮이 조절 가능한 구조를 적용하여 해결할 수 있다.In addition, the energizing portion 400 may be formed to be adjustable up and down height. That is, when the height of the current conduction unit 400 is low, the wire end is immersed in the plating liquid, which causes contamination of the wire by the plating liquid, and thus, the contamination may be transferred to the rear surface of the substrate. In addition, if the height of the conduction portion is too high, there may be no electrical contact to the back. This problem can be solved by applying a height-adjustable structure.

도 6은 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 롤러부(500)를 나타낸 도면이다. 도 6을 참조하면, 본 발명에 따른 롤러부(500)는 롤러부오링(501)을 적용하여 기판의 일면만을 침적함에 있어 오링에 묻은 용액이 기판의 하부에 접촉하여 도금액의 점성으로 고르게 기판의 일면만을 침적하게 된다. 또한 롤러부오링(501)은 용액의 점성으로 기판을 하부로 당기는 힘에 의한 파손을 방지하게 된다. 이때의 오링은 바이톤(viton), 연질 폴리프로필렌, 연질 폴리에틸렌, 연질 고무 등의 내약품성을 지닌 제품이 사용될 수 있다. 또한, 도 6에 따르면, 롤러부(500)는 외부의 동력을 전달받아 롤러부(500)를 회전시키는 구동부(502)와 결합될 수 있다. 구동부(502)의 회전에 의하여 롤러부(500)도 함께 회전하게 된다. FIG. 6 is a diagram illustrating a roller unit 500 of a plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating in accordance with an embodiment of the present invention. Referring to FIG. 6, in the roller part 500 according to the present invention, the roller buried ring 501 is applied to deposit only one surface of the substrate, and the solution buried in the o-ring contacts the lower part of the substrate to evenly distribute the viscosity of the plating solution. Only one side will be deposited. In addition, the roller buoyling ring 501 is prevented from being damaged by the force pulling the substrate downward due to the viscosity of the solution. In this case, the O-ring may be a product having chemical resistance such as viton, soft polypropylene, soft polyethylene, and soft rubber. In addition, according to FIG. 6, the roller unit 500 may be coupled to a driving unit 502 for rotating the roller unit 500 by receiving external power. The roller 500 is also rotated by the rotation of the driving unit 502.

도 7은 본 발명의 일 실시예에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치의 차폐막(140)을 나타낸 도면이다. 도 7을 참조하면, 본 발명의 바람직한 일 실시예에 있어서 도금 장치의 내부에 투명 차폐막(140)이 설치될 수 있다. 투명 차폐막(140)은 피도금체에 도금되는 금속피막의 균일성을 확보하기 위함이다. 도금 공정 중에서 발생하는 자기장의 편류에 의해서 전류가 코너와 에지 부분들에 집중되는 현상이 발생될 수 있다. 차폐막(140)은 전류가 부분적으로 통과되지 못하도록 도와줄 수 있다. 이러한 차폐막(140)은 Poly Carbonate, PVC, Acryl 등의 투명소재를 사용하여 제작하며, 피도금체인 태양전지 기판과 양극부재(110) 표면에서 발생한 편류를 조절한다. 또한 이 차폐막(140)에는 다수의 홀(141)이 형성되어 있어서 아래에서 올라오는 도금용액이 이 홀(141)을 통과하여 기판을 향하게 된다. 이로써 교반되는 도금용액의 속도를 어느 정도 조절하는 데 도움을 준다.FIG. 7 is a diagram illustrating a shielding film 140 of a plating apparatus for a solar cell substrate which performs light induction plating and forward bias plating in accordance with an embodiment of the present invention. Referring to FIG. 7, in a preferred embodiment of the present invention, a transparent shielding film 140 may be installed in the plating apparatus. The transparent shielding film 140 is to ensure the uniformity of the metal film to be plated on the plated body. Due to the drift of the magnetic field generated during the plating process, a phenomenon in which current is concentrated at corners and edge portions may occur. The shielding layer 140 may help prevent the current from partially passing through. The shielding film 140 is manufactured using a transparent material such as poly carbonate, PVC, or acryl, and controls the drift generated from the surface of the solar cell substrate and the anode member 110 which are the plated bodies. In addition, a plurality of holes 141 are formed in the shielding film 140 so that the plating solution rising from the bottom passes through the holes 141 to face the substrate. This helps to control the speed of the stirring solution to some extent.

이하, 본 발명의 이러한 도금장치를 사용한 기판의 도금 방법에 대해서 설명한다. 태양전지용 기판에 대한 도금 공정에 있어서, 막의 균일한 도포성과, 우수한 층간 접착력을 얻기 위해 씨드 레이어(seed layer)를 기판 표면에 형성시키는 것이 좋다. 이를 위해서, 도금조(100)의 중앙 부근에 위치하는 LED(301) 램프 광원을 켜고, 도금조(100) 상부에 수평으로 단면 침지되어있는 피도금체인 기판을 향해 빛(L)을 조사하여 광유도 도금을 실시하거나 또는 LED(301) 램프 광원을 끄고, 전류를 공급하여 순방향 바이어스 도금을 실시할 수 있다. 이로써 웨이퍼의 단면에 씨드 레이어를 형성하여 웨이퍼 표면의 전기전도도(conductivity)를 개선해 줄 수 있다.Hereinafter, the plating method of the board | substrate using this plating apparatus of this invention is demonstrated. In the plating process for the solar cell substrate, it is preferable to form a seed layer on the surface of the substrate in order to obtain uniform coating properties and excellent interlayer adhesion. To this end, the LED 301 lamp light source which is located near the center of the plating bath 100 is turned on, and light (L) is irradiated toward the substrate to be plated, which is horizontally immersed in the upper part of the plating bath 100, to remove The plating may be performed or the LED 301 lamp light source may be turned off and the current may be supplied to perform forward bias plating. As a result, a seed layer may be formed on the cross-section of the wafer, thereby improving the conductivity of the wafer surface.

도 1을 참조하면, 본 발명에 따른 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치는 제어부를 더 포함한다. 제어부는 제1 도금부(300)의 전원부, 제2 도금부의 전원부와 각각 결합되어 제1 도금부(300) 및 제2 도금부의 전원부를 제어할 수 있다. 즉 컴퓨터와 컴퓨터 프로그램이 설치되는 제어솔류션에 의하여 구동하는 제어부가 도금조(100) 내의 제1 도금부(300) 또는 제2 도금부를 선택적으로 또는 병행으로 동작하도록 각각의 전원부를 제어하게 된다. Referring to FIG. 1, the plating apparatus for a solar cell substrate simultaneously performing photoinduction plating and forward bias plating may further include a control unit. The control unit may be coupled to the power supply unit of the first plating unit 300 and the power supply unit of the second plating unit, respectively, to control the power supply units of the first plating unit 300 and the second plating unit. That is, a control unit driven by a control solution in which a computer and a computer program are installed controls each power supply unit so as to operate the first plating unit 300 or the second plating unit in the plating bath 100 selectively or in parallel.

본 발명의 도금장치에 연결되어 있는 제어부는 위와 같이 LIP 도금, FBP 도금 공정이 선택적으로 이루어지도록 제어할 수 있으며, LIP 도금과 FBP 도금이 병행하여 실시되도록 도금장치의 구성요소를 제어 할 수도 있다. 특히 제어부는 도금조(100)가 동작할 때 이송속도, 전류, 빛(L)의 세기, 온도 등을 설계 범위 내에서 구동할 수 있도록 한다.The control unit connected to the plating apparatus of the present invention may control to selectively perform the LIP plating, FBP plating process as described above, and may control the components of the plating apparatus so that LIP plating and FBP plating are performed in parallel. In particular, the control unit to drive the feed rate, current, the intensity of the light (L), the temperature, etc. when the plating bath 100 operates within the design range.

한편, 본 발명에 따르면, 도금조(100) 상부에 일면 침지로, 기판의 양면에 마스킹(Masking) 처리 없이 도금하는 것이 가능해진다. 즉 종래의 장비에서 2회에 걸쳐 전면 마스킹 →후면도금 → 전면 마스킹 박리 → 후면 마스킹 → 전면 도금 → 후면 마스킹 박리의 공정을 거쳐 완성할 수 있는 제품을 마스킹 공정 없이 단순화 공정으로 생산하는 것이 가능하고 도금 공정을 IN LINE으로 구성이 용이 해진다.On the other hand, according to the present invention, it is possible to plate on both sides of the substrate without masking by one surface immersion on the plating bath 100. In other words, it is possible to produce products that can be completed through the process of front masking → back plating → front masking peeling → back masking → front plating → back masking peeling in a conventional process without a masking process and plating. The process can be easily configured as IN LINE.

또한, 본 발명의 보호범위가 이상에서 명시적으로 설명한 실시예의 기재와 표현에 제한되는 것은 아니다. 또한, 본 발명이 속하는 기술분야에서 자명한 변경이나 치환으로 말미암아 본 발명의 보호범위가 제한될 수도 없음을 첨언한다.In addition, the protection scope of the present invention is not limited to the description and expression of the embodiments explicitly described above. Further, it should be noted that the protection scope of the present invention may not be limited due to obvious changes or substitutions in the technical field to which the present invention belongs.

[부호의 설명][Description of the code]

L: 빛L: light

100: 도금조100: plating bath

110: 양극부재110: anode member

140: 차폐막140: shielding film

141: 홀141: hall

200: 높이조절플레이트200: height adjustment plate

300: 제1 도금부300: first plating part

301: LED301: LED

302: 광원수용관302: light source tube

303: 광원수용관오링303: light source tube o-ring

400: 통전부400: energizing part

500: 롤러부500: roller portion

501: 롤러부오링501: roller buckle

502: 구동부502: drive section

Claims (9)

피도금체인 태양전지 기판의 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치로서,Claims [1] A solar cell substrate plating apparatus which performs photo-induction plating and forward bias plating of a solar cell substrate to be plated. 도금액을 수용하는 도금조;A plating bath containing a plating solution; 상기 기판의 일면이 상기 도금액에 침지된 상태에서 상기 기판을 수평이동시킬 수 있도록 기설정간격으로 이격되어 배치되는 복수의 롤러부;A plurality of roller parts spaced apart at predetermined intervals so as to horizontally move the substrate while one surface of the substrate is immersed in the plating solution; 복수의 상기 롤러부 사이에 배치되고, 상기 도금액 안에서 밀봉된 상태로 상기 기판을 향하여 빛을 조사하여 광유도 도금(Light Induced Plating)을 실시하는 제1 도금부; 및A first plating part disposed between the plurality of roller parts and configured to perform light induced plating by irradiating light toward the substrate while being sealed in the plating solution; And 상기 도금액에 침지되어 상기 제1 도금부 하부에 배치되는 양극부재를 통하여 상기 기판에 순방향 바이어스 도금(Forward Bias Plating)을 실시하는 제2 도금부를 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.Light guide plating and forward bias plating comprising a second plating portion immersed in the plating solution to perform forward bias plating on the substrate through an anode member disposed below the first plating portion. Plating apparatus for solar cell substrates in parallel. 제1항에 있어서,The method of claim 1, 상기 제1 도금부는,The first plating portion, 상기 기판의 수평이동방향을 따라 일정간격 이격되어 배치되는 복수의 LED를 포함하는 광원부;A light source unit including a plurality of LEDs spaced at a predetermined interval along a horizontal movement direction of the substrate; 상기 광원부를 밀봉하는 투명소재의 광원수용관을 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.A plating apparatus for a solar cell substrate, comprising both light guide plating and forward bias plating, comprising a light source receiving tube of a transparent material for sealing the light source unit. 제1항에 있어서,The method of claim 1, 상기 제2 도금부는,The second plating portion, 상기 양극부재와 연결되고, 상기 제1 도금부 상부에 배치되는 음극부재; 및A cathode member connected to the anode member and disposed above the first plating part; And 상기 음극부재와 상기 롤러부 사이에 배치되어, 상기 롤러부 상을 수평이동하는 상기 기판에 상기 음극부재로부터의 전류를 전달하는 통전부를 더 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.Light conduction plating and forward bias plating is disposed between the negative electrode member and the roller portion, further comprising a conducting portion for transmitting a current from the negative electrode member to the substrate horizontally moving on the roller portion Plating apparatus for solar cell substrates in parallel. 제3항에 있어서,The method of claim 3, 상기 통전부는,The conducting unit, 상기 기판과 접촉하는 단부가 U자 형으로 형성되는 복수의 와이어(wire)를 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.And a plurality of wires having an end portion in contact with the substrate having a U-shape. 제4항에 있어서,The method of claim 4, wherein 상기 통전부는 상하 높이조절가능한 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.The conduction portion is a plating apparatus for a solar cell substrate in parallel with the light induction plating and forward bias plating, characterized in that the vertical height adjustable. 제1항에 있어서,The method of claim 1, 상기 제1 도금부에 연결되어 상기 광원부의 전원의 공급을 제어하거나,Connected to the first plating part to control supply of power to the light source part; 상기 제2 도금부에 연결되어 상기 전류의 흐름을 제어하는 제어부를 더 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.And a control part connected to the second plating part to control the flow of the current. 제1항에 있어서,The method of claim 1, 상기 도금조는 상기 롤러부 및 상기 양극부재가상기 도금액에 침지된 침지영역과 비침지영역으로 나뉘어지고, The plating bath is divided into an immersion region and a non-immersion region in which the roller portion and the anode member are immersed in the plating solution, 상기 침지영역과 상기 비침지영역의 경계에 형성되어 상기 침지영역 내의 상기 도금액의 높이를 조절하는 높이조절플레이트를 더 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.And a height adjusting plate formed at the boundary between the immersion region and the non-immersion region to adjust the height of the plating liquid in the immersion region. Device. 제7항에 있어서,The method of claim 7, wherein 상기 높이조절플레이트는 상하 높이조절가능한 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.The height adjustment plate is a plating apparatus for a solar cell substrate in parallel with the light induction plating and forward bias plating, characterized in that the height adjustable. 제1항에 있어서,The method of claim 1, 상기 제1 도금부와 상기 제2 도금부 사이에 배치되고, 복수의 홀이 형성되어, 상기 기판과 상기 양극부재 표면에서 발생하는 편류를 조절하는 차폐막을 더 포함하는 것을 특징으로 하는 광유도 도금 및 순방향 바이어스 도금을 병행하는 태양전지 기판용 도금장치.And a shielding film disposed between the first plating portion and the second plating portion, and having a plurality of holes formed therein to control the drift generated from the surface of the substrate and the anode member. Plating apparatus for solar cell substrates performing forward bias plating.
PCT/KR2015/008479 2014-09-16 2015-08-13 Solar cell substrate plating apparatus using both light-induced plating and forward bias plating Ceased WO2016043436A1 (en)

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