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WO2015111458A1 - Coupleur à réseau - Google Patents

Coupleur à réseau Download PDF

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Publication number
WO2015111458A1
WO2015111458A1 PCT/JP2015/050596 JP2015050596W WO2015111458A1 WO 2015111458 A1 WO2015111458 A1 WO 2015111458A1 JP 2015050596 W JP2015050596 W JP 2015050596W WO 2015111458 A1 WO2015111458 A1 WO 2015111458A1
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WO
WIPO (PCT)
Prior art keywords
grating
dimensional
light
grating coupler
elements
Prior art date
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Ceased
Application number
PCT/JP2015/050596
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English (en)
Japanese (ja)
Inventor
徳島　正敏
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Photonics Electronics Technology Research Association
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Photonics Electronics Technology Research Association
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Priority to JP2015558801A priority Critical patent/JP6548581B2/ja
Publication of WO2015111458A1 publication Critical patent/WO2015111458A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide

Definitions

  • the present invention relates to a grating coupler.
  • a grating coupler is an optical input / output device that can be used for such a purpose.
  • the propagation light of an optical waveguide on a substrate is incident on an end face of an optical fiber close to the surface of the substrate, or vice versa. Can be incident on the optical waveguide.
  • FIG. 7A is a schematic cross-sectional view of a grating portion as an example of a grating coupler having a configuration for emitting guided light to the outside of the optical waveguide.
  • the structure and function of the grating coupler will be briefly described with reference to FIG. 7A.
  • the grating coupler shown in FIG. 7A has an action of receiving an optical signal through an optical waveguide and converting an optical axis by diffraction.
  • the cross-sectional structure illustrated in FIG. 7A includes a BOX (Buried Oxide) layer 702, a core layer 714 having a higher refractive index than that of the BOX layer 702, and an upper clad having an index of refraction comparable to that of the BOX layer 702. )
  • Layer 716 is laminated on the substrate 701 in this order, and the core layer 714 has a diffraction grating formed thereon. In this way, the grating coupler enables optical path conversion only by forming a diffraction grating on the core layer 714, for example.
  • a diffraction grating that is periodic in the propagation direction (z direction) of the guided light and has irregularities in the thickness direction (x direction) of the waveguide is formed.
  • a diffraction grating that is periodic in the propagation direction (z direction) of the guided light and has irregularities in the thickness direction (x direction) of the waveguide is formed.
  • part of the guided light is diffracted to generate radiated light.
  • ⁇ is the period of the diffraction grating
  • K 2 ⁇ / ⁇
  • q is a value corresponding to the order of the emitted light (0, ⁇ 1, ⁇ 2,).
  • the emission angle ⁇ can be arbitrarily designed according to the period ⁇ , width w, depth d, and thickness D of the optical waveguide shown in FIG. 7A.
  • An example of numerical ranges of the period ⁇ , the width w, the depth d, and the thickness D of the optical waveguide for light having a wavelength of 1.3 ⁇ m to 1.6 ⁇ m in vacuum is as follows.
  • ⁇ : 530 to 550 nm FF ( 1-w / ⁇ ): 0.3 to 0.6 d: 60 to 80 nm D: 180 to 220 nm
  • the grating coupler is basically based on a structure in which a diffraction grating is formed on the surface of the core.
  • the conventional most basic grating coupler has a one-dimensional grating (grating) in which irregularities are periodically arranged in the length direction of the waveguide, and the grating is linear in the transverse width direction of the waveguide. It is uniform. If the grating is uniform in the width direction of the waveguide, the structure in the width direction can be ignored and approximated to a two-dimensional structure in the length direction and the thickness direction. Therefore, when the radiated light from the grating coupler is obtained by numerical calculation, the calculation scale can be reduced, and as a result, there is an advantage that a grating coupler with good optical coupling efficiency can be designed in a short time.
  • Non-Patent Document 1 the overall structure of the optical input / output element combining the grating portion and the tapered waveguide was increased, It was difficult to incorporate into a high-density optical circuit with few gaps.
  • a grating coupler in which an arc-shaped grating is formed in a tapered waveguide having a large divergence angle has been devised as a new conventional technique (Patent Documents 1 and 2).
  • Patent Documents 1 and 2 When a tapered waveguide having a large divergence angle is used, the wavefront of propagating light spreads in an arc shape, unlike the case of using a long and gentle tapered waveguide.
  • the grating was also formed in an arc shape.
  • the maximum width of the grating portion is about 50 ⁇ m, and the combined length of the waveguide and the grating portion is also increased.
  • the overall structure including the grating portion and the tapered waveguide can be reduced in size (see FIG. 7C).
  • the grating has an arc shape
  • the grating is not uniform in the horizontal width direction of the waveguide, and two-dimensional approximation in numerical calculation cannot be performed.
  • a new problem has arisen that it takes a lot of time to adjust the detailed structure in search of good properties.
  • the grating coupler of the present invention has a special structure in which the entire structure for expressing the function as an optical input / output element has a particular relationship between a one-dimensional grating, a tapered waveguide, and an optical branching element. It is the structure combined with the group,
  • the embodiment is as follows generally. In the following, the names of “input end” and “output end” are assigned assuming that light input from the waveguide is output from the grating coupler to the substrate surface side, but the light propagation direction is opposite. It should be noted that the assignment of names is reversed.
  • the grating coupler includes a grating portion, a tapered waveguide portion, and an optical branching portion, and the grating portion is one grating element or a plurality of gratings arranged adjacently in parallel.
  • Each of the grating elements includes a one-dimensional grating, the one-dimensional gratings of the plurality of grating elements have periodicity in the same or substantially the same direction, and the tapered waveguide portion includes the grating element.
  • a plurality of tapered waveguides wherein the optical branching section has one input end and at least a plurality of output ends equal to the number of the tapered waveguides, and each of the grating elements includes a tapered waveguide.
  • One end of the wide side is connected to one or more in parallel, and each of the tapered waveguides is connected.
  • the narrow side of one end of the width of one of the plurality of output ends of the optical branching section is connected.
  • the operation of this basic mode is, for example, in the aspect of emitting light from the grating unit to the outside, the light incident on the input end of the optical branching unit is branched at the optical branching unit, and each branched light is transmitted from the optical branching unit. It is output from a plurality of output ends, is input to one or a plurality of grating elements via a tapered waveguide connected to each of the plurality of output ends, the optical path is changed by the grating elements, and is emitted to the outside. Is.
  • a plurality of parallel tapered waveguides are used in order to input light to a grating having the same width as a conventional one-dimensional periodic grating coupler or to adjacent gratings having the same width in total. Therefore, when compared with the conventional one-dimensional periodic grating coupler in which only one tapered waveguide is provided without providing an optical branching portion, each taper is inversely proportional to the number of branches, that is, the number of tapered waveguides. The waveguide is reduced.
  • the effect that the entire length of the grating coupler can be made shorter than the total length of a conventional grating coupler having a one-dimensional period if the length shortened with the reduction is larger than the length of the newly added optical branching portion.
  • the grating portion remains a one-dimensional grating, the ease of designing the light incident / exit characteristics is maintained. Needless to say, an aspect in which light is incident on the grating portion from the outside also has the same effect.
  • the grating coupler of the present invention in the basic form, among the one-dimensional gratings of all the grating elements, the grating elements adjacent to each other over the range of the length of the one-dimensional grating that is shortest in the direction having periodicity. In the meantime, each lattice position of the one-dimensional lattice is arranged in a direction orthogonal to the direction in which the one-dimensional lattice has periodicity.
  • the optical branching unit in each of the above embodiments is formed of a multimode interferometer.
  • the optical branching unit may be configured using a Y-branch or a directional coupler instead of the multimode interferometer.
  • the grating coupler of each of the above embodiments is configured to have an axis of line symmetry.
  • the grating section includes three or more grating elements, and the width of a direction perpendicular to the direction in which the one-dimensional grating has periodicity is 2
  • the width of a direction perpendicular to the direction in which the one-dimensional grating has periodicity is 2
  • the width of one grating element is made half of the width of another grating element, the light intensity can be increased by a factor of only the radiated light from that grating element.
  • the light intensity distribution in the width direction of the grating portion that is, the shape of the mode field can be adjusted more finely. Therefore, for example, even when there are a plurality of types of optical fibers that are optical coupling partners and their mode fields are different, it is possible to perform an optimization design in the width direction in accordance with each mode field. .
  • each of the above embodiments includes a plurality of grating elements having different distances from the connection position with the tapered waveguide to the start position of the grating.
  • the number of grating elements is particularly one in the above-described four embodiments.
  • the structure of the grating portion optimized for the conventional grating coupler having one one-dimensional grating can be used as it is, and it is significantly shorter despite a short design time.
  • a grating coupler can be manufactured.
  • At least one of the period of the one-dimensional grating of each grating element included in the grating portion, the depth of the unevenness, the layer structure, and the refractive index of the medium is It is configured to be modulated in a direction having periodicity.
  • a grating coupler that is small in size and can be easily designed in accordance with the mode field to which the optical coupling is performed.
  • FIG. 1 is a schematic plan view showing the configuration of an embodiment of the grating coupler of the present invention.
  • FIG. 2 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • FIG. 3 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • FIG. 4 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • FIG. 5 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • FIG. 6 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • FIG. 7A is a schematic cross-sectional view illustrating an exemplary configuration of a grating coupler.
  • FIG. 7B is a schematic plan view of a grating coupler having a one-dimensional period.
  • FIG. 7C is a schematic plan view of a grating coupler in which an arcuate grating is formed in a tapered waveguide having a large divergence angle.
  • each embodiment of the grating coupler of the present invention will be described with reference to the drawings.
  • the technical scope of the present invention is not limited by these embodiments, and should be interpreted based on the description of the claims.
  • the “structure” of each part of the grating coupler is a “core structure”, and it goes without saying that the cladding surrounds the periphery.
  • a mode in which light is emitted from the grating unit to the outside will be mainly described.
  • a mode in which light is incident on the grating unit from the outside can also be realized with the same configuration.
  • FIG. 1 is a schematic plan view showing the configuration of an embodiment of the grating coupler of the present invention.
  • the grating coupler of the present embodiment forms a grating section 100 with one grating element 10 and a tapered waveguide section 200 composed of two tapered waveguides 20 and 21 arranged in parallel.
  • An optical branching unit 300 including one optical branching element 30 is provided, which is formed on a semiconductor substrate (not shown) (for example, a silicon substrate).
  • the optical branching element 30 receives light from the input end via the optical waveguide 40 and branches and outputs the light to the tapered waveguides 20 and 21 from the two output ends.
  • the optical branching element 30 is composed of, for example, a 1-input 2-output multimode interferometer (MMI) having a core made of Si and a clad made of a silicon oxide film.
  • MMI 1-input 2-output multimode interferometer
  • a multimode interferometer has a self-convergence effect that is periodically reproduced in the process of propagation of a light field at the incident end through the multimode interference waveguide, and is dependent on the width of the multimode interference waveguide.
  • One or more converging fields can be obtained at a specific distance from the determined input end.
  • the length of the optical branching element 30 from the input end to the output end may be set within about 15 ⁇ m, although it is necessary to make the length more than the specific distance.
  • Each of the tapered waveguides 20 and 21 is a planar optical waveguide having a function of guiding light along the substrate surface, and its narrow end is connected to the output end of the optical branching element 30. The wide end is connected to the grating element 10.
  • the lengths of the tapered waveguides 20 and 21 in this embodiment can be suppressed to about half of the length of the tapered waveguide of the conventional one-dimensional period grating coupler, respectively. If the length of the tapered waveguide is about 300 ⁇ m, it can be shortened to about 150 ⁇ m.
  • the tapered shape of the tapered waveguides 20 and 21 is not limited to a linear tapered shape, but includes a curved tapered shape such as a quadratic curve or a semi-elliptical shape.
  • the optical branching section and the tapered waveguide section can be configured as a buried optical waveguide having a cross-sectional structure as shown in FIG.
  • the grating element 10 included in the grating portion is a one-dimensional diffraction grating composed of periodic grooves having a predetermined interval and depth, and has a function of emitting light propagating through the tapered waveguides 20 and 21 to the outside. It is what you have.
  • the functions and the like are as outlined in FIG. 7A in the [Background Art] column.
  • the one-dimensional lattice does not need to be uniform, and may have an apodized structure in which, for example, the period and the groove depth gradually change.
  • the length of the grating element 10 is substantially the same as the length of the grating portion of the conventional one-dimensional period grating coupler. If the length of the grating portion of the conventional one-dimensional period grating coupler is about 30 ⁇ m, the length is about 30 ⁇ m. It will be about. Therefore, when compared with the above assumed numerical values, the length of the conventional one-dimensional period grating coupler is about 330 ⁇ m, whereas the length of the grating coupler of this embodiment is the length of the optical branching element 30. Even if this is added, the total length can be reduced to about 195 ⁇ m, and the overall length can be greatly reduced as compared with a conventional grating coupler having a one-dimensional period.
  • the grating coupler of this embodiment.
  • the structure By making the structure symmetric with respect to the symmetry axis, it is possible to guarantee that the light branched by the optical branching portion passes through the tapered waveguide portion with the same phase and is input to the grating portion with the same phase. .
  • the light incident on the grating portion further acts on the grating with the same phase relationship, and is finally diffracted and emitted with the same phase.
  • an optically symmetric operation similar to the conventional structure can be obtained.
  • the method for obtaining such a symmetrical operation is not limited to making the structure of the grating coupler symmetrical. Since the light emitted from the grating portion only needs to have the same phase, for example, as a result of passing through the branching portion and the taper portion, the phases of the plurality of lights incident on the grating portion are different by an integral multiple of 2 ⁇ .
  • the grating coupler may be formed asymmetrically. Specifically, as long as the phase of the radiated light is symmetric, the lengths of the two output waveguides of the optical branching element 30 may be made different, or the lengths of the tapered waveguides 20 and 21 may be made different. .
  • the mode field of the external optical waveguide that is optically coupled to the grating coupler is asymmetric, or if the optical coupling angle forms a finite angle with the axis of the emitted light, the emitted light from the grating coupler It should also be noted that the phase may be intentionally asymmetric.
  • FIG. 2 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • the optical branching unit 300 has a two-stage configuration of two branching elements (consisting of three optical branching elements 30 to 32), and four output ends of the optical branching unit 300 are provided.
  • the taper waveguide section 200 including four taper waveguides (22 to 25) is provided.
  • a 1-input 2-output branch element is combined to form a 1-input 4-output branch.
  • a 1-input 4-output MMI may be used.
  • the configuration and function of the grating element 10, the tapered waveguides 22 to 25, the optical branching elements 30 to 32, the optical waveguide 40, and the line symmetry axis 50 in FIG. 2 are the same as described in the embodiment in FIG. This also applies to the embodiments from FIG.
  • the length of the tapered waveguides 22 to 25 can be about half the length of the tapered waveguides 20 and 21 of FIG.
  • the length of the grating coupler can be suppressed to about 135 ⁇ m. Therefore, the length of the grating coupler can be further shortened compared with the embodiment of FIG.
  • the length of the taper waveguide is further halved.
  • the length can be shortened to 112.5 ⁇ m, for example. Even if the optical branching portion remains in a two-stage configuration, the length of the grating coupler can be reduced to about 100 ⁇ m by appropriately setting the lengths of the tapered waveguides 22 to 25 and the optical branching elements 30 to 32. is there. Of course, the length of the grating coupler can be made smaller than 100 ⁇ m by configuring the optical branching unit 300 in a three-stage configuration and setting the lengths of other portions as appropriate.
  • FIG. 3 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention. The difference from the embodiment of FIG. 2 is that two tapered waveguides (23 ′, 24 ′) with a narrower width are provided among the four tapered waveguides (22-25) constituting the tapered waveguide section 200. It is a point.
  • the intensity of light emitted from the tapered waveguide having a narrow width increases, so that the light intensity distribution in the width direction of the grating element 10 can be adjusted at least at the incident end of the grating section 100.
  • the intensity distribution of the emitted light can be adjusted to a desired shape. If the grating is uniform also in the waveguide direction, since most of the light is emitted near the incident end of the grating section 100, a practically sufficient effect can be obtained with this configuration. Note that the length of the grating coupler can be shortened as in the embodiment of FIG.
  • FIG. 4 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • the grating section 100 is composed of four grating elements 11 to 14 separated from each other.
  • each lattice position of the one-dimensional lattice is in a direction perpendicular to the direction in which the one-dimensional lattice has periodicity within a common range where the one-dimensional lattice exists.
  • the light intensity near the center tends to increase in the width direction of the one-dimensional grating.
  • the configuration as in the embodiment shown in FIG. 4 is adopted, the light intensity distribution in the lateral width direction can be more evenly adjusted, for example, by the grating elements 11 to 14 separated from each other.
  • the intensity distribution of emitted light can be adjusted to be more uniform. Since there is a gap between adjacent grating elements 11 to 14, there is a concern that the amount of light decreases at that portion and the intensity distribution of the emitted light is slightly affected, but the gap width between the grating elements is reduced. If narrowed appropriately, it can be prevented from causing a problem in practice. Note that the length of the grating coupler can be shortened as in the embodiment of FIG.
  • FIG. 5 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • a difference from the embodiment of FIG. 4 is that the four grating elements 11 to 14 separated from each other of the grating portion 100 have two different widths.
  • each lattice position of the one-dimensional lattice is in a direction perpendicular to the direction in which the one-dimensional lattice has periodicity within a common range where the one-dimensional lattice exists. It is the same as that of embodiment of FIG.
  • the light intensity distribution in the lateral width direction is achieved by the grating elements 11 to 14 separated from each other, together with the function and effect of the two tapered waveguides (23 ′, 24 ′) whose taper width is narrowed.
  • the light intensity distribution in the lateral width direction can be kept constant over the entire radiation region. it can.
  • the length of the grating coupler can be shortened as in the embodiment of FIG.
  • FIG. 6 is a schematic plan view showing the configuration of another embodiment of the grating coupler of the present invention.
  • each grating position of the one-dimensional grating is aligned in a direction orthogonal to the direction in which the one-dimensional grating has periodicity within the common range where the one-dimensional grating exists in the two grating elements 15 and 16. It is constituted as follows.
  • the length of the grating coupler can be shortened as in the embodiment of FIG.
  • the embodiment shown in FIG. 6 differs from the embodiment shown in FIG. 1 in two points.
  • the first difference is that the grating section 100 is composed of two grating elements 15 and 16 separated from each other. That is.
  • the spread of light in the lateral width direction can be adjusted by the grating elements 15 and 16 separated from each other, and the intensity distribution of the emitted light can be adjusted to a desired shape. Since there is a gap between adjacent grating elements 15 and 16, there is a concern that the amount of light decreases at that portion and the intensity distribution of emitted light is slightly affected. If narrowed appropriately, it can be prevented from causing a problem in practice.
  • the second difference between the embodiment of FIG. 6 and the embodiment of FIG. 1 is that the distance from the connection position with the tapered waveguide to the start position of the grating differs between the grating elements 15 and 16.
  • the difference in distance from the connection position of the grating elements 15 and the tapered waveguide of the 16 to the start position of the grating is (2n + 1) ⁇ / 4 (where n is an integer greater than or equal to 0 and ⁇ is the wavelength of light).
  • FIGS. 1 to 6 it is configured such that at least one of the period of the one-dimensional grating, the depth of the unevenness, the layer structure, and the refractive index of the medium of the grating unit 100 is modulated in a direction having periodicity.
  • nothing is connected to the side opposite to the input end of the grating unit 100.
  • a new tapered unit or optical multiplexing unit is used. (The same structure as that of the optical branching unit and operated in the opposite direction) may be connected, or bidirectional operation may be performed with such a structure.
  • the shape of the waveguide is not limited to the thin wire waveguide, but may be other forms such as a rib-type waveguide or a combination thereof.

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

Selon l'invention, de manière classique, il y a eu des problèmes se rapportant à une augmentation des dimensions structurelles des coupleurs à réseau unidimensionnel, et des problèmes se rapportant à une difficulté de conception des coupleurs à réseau bidirectionnel en forme d'arc. Un élément de dérivation de lumière (30) reçoit la lumière d'une extrémité d'entrée par l'intermédiaire d'un guide d'ondes optiques (40) et dérive et transmet cette lumière depuis deux extrémités de sortie vers des guides d'onde à raccord progressif (20, 21). Un élément de réseau (10) est un réseau de diffraction unidimensionnel et émet vers l'extérieur une lumière qui se propage dans les guides d'ondes à raccord progressif (20, 21). Par dérivation de la lumière, il est possible de réduire la longueur des guides d'ondes à raccord progressif à la moitié de la longueur de celle des coupleurs à réseau unidirectionnel et, même lorsqu'on ajoute la longueur de la section de dérivation de la lumière à la longueur des guides d'onde à raccord progressif, il est toujours possible de réduire les dimensions structurelles en réduisant de façon spectaculaire toute la longueur par comparaison avec la longueur des coupleurs à réseau unidirectionnel classiques.
PCT/JP2015/050596 2014-01-24 2015-01-13 Coupleur à réseau Ceased WO2015111458A1 (fr)

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US9920798B2 (en) 2014-05-09 2018-03-20 Kabushiki Kaisha Somic Ishikawa Braking device
WO2018112367A3 (fr) * 2016-12-16 2018-07-26 Quantum-Si Incorporated Coupleur optique et système de guide d'ondes
KR20180121107A (ko) * 2017-04-28 2018-11-07 인하대학교 산학협력단 광 조향 장치
CN109597162A (zh) * 2018-12-27 2019-04-09 华为技术有限公司 平面光波导、plc芯片、光束整形结构及wss
JP2020160048A (ja) * 2019-03-25 2020-10-01 旭化成エレクトロニクス株式会社 光学式濃度測定装置および光導波路
EP3612873A4 (fr) * 2017-04-19 2020-12-30 Luxtera, Inc. Procédé et système pour convertisseurs de modes pour coupleurs de réseaux
JP2021515188A (ja) * 2018-03-01 2021-06-17 エフ．ホフマン−ラ ロッシュ アーゲー 結合親和性の検出に使用するデバイス
US11137544B2 (en) 2012-07-09 2021-10-05 Luxtera Llc Method and system for grating couplers incorporating perturbed waveguides
CN114764164A (zh) * 2021-01-12 2022-07-19 格芯(美国)集成电路科技有限公司 光子芯片的后段工艺堆叠中的光学组件
JP2022538700A (ja) * 2019-06-28 2022-09-06 イルミナ ケンブリッジ リミテッド 線形導波路を用いたフローセル
WO2025032729A1 (fr) * 2023-08-08 2025-02-13 三菱電機株式会社 Élément optique à semi-conducteur et système de coupleur de réseau
US12259324B2 (en) 2016-06-01 2025-03-25 Quantum-Si Incorporated Photonic structures and integrated device for detecting and analyzing molecules
EP4607254A1 (fr) * 2024-02-26 2025-08-27 Honeywell International Inc. Réseau optique configuré pour émettre un faisceau optique ayant une section transversale prédéterminée et un motif d'intensité prédéterminée sur une telle section transversale

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