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WO2015107618A1 - Method for manufacturing printed wiring board - Google Patents

Method for manufacturing printed wiring board Download PDF

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Publication number
WO2015107618A1
WO2015107618A1 PCT/JP2014/050433 JP2014050433W WO2015107618A1 WO 2015107618 A1 WO2015107618 A1 WO 2015107618A1 JP 2014050433 W JP2014050433 W JP 2014050433W WO 2015107618 A1 WO2015107618 A1 WO 2015107618A1
Authority
WO
WIPO (PCT)
Prior art keywords
resist mask
conductor layer
printed wiring
wiring board
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2014/050433
Other languages
French (fr)
Japanese (ja)
Inventor
秀吉 瀧井
典明 種子
高木 剛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meiko Electronics Co Ltd
Original Assignee
Meiko Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meiko Electronics Co Ltd filed Critical Meiko Electronics Co Ltd
Priority to PCT/JP2014/050433 priority Critical patent/WO2015107618A1/en
Priority to JP2014537389A priority patent/JPWO2015107618A1/en
Publication of WO2015107618A1 publication Critical patent/WO2015107618A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/188Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by direct electroplating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/007Manufacture or processing of a substrate for a printed circuit board supported by a temporary or sacrificial carrier
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0147Carriers and holders
    • H05K2203/0152Temporary metallic carrier, e.g. for transferring material

Definitions

  • the present invention relates to a method for manufacturing a printed wiring board using a transfer method.
  • the full additive method and the semi-additive method are methods of an additive method in which a circuit pattern of a printed wiring board is formed directly on an insulating substrate only by plating.
  • the specific process of forming a circuit pattern by the full additive method is as follows. For a sheet in which a catalyst-containing sheet is pasted on an insulating resin, a pattern for plating (that is, a permanent resist) is used. A mask or a permanent mask is formed, and a circuit pattern is formed in a portion where the resist does not exist by electroless copper plating.
  • the specific process of forming a circuit pattern by the semi-active method is a semi-active resist (removal) for a thin copper underlayer of several microns or less formed on an insulating resin.
  • a resist pattern is formed by resist, and a circuit pattern is formed by electrolytic copper plating. Then, the resist is removed and the exposed underlayer is removed.
  • the transfer method is a circuit pattern forming method in which a circuit pattern is formed on a support plate such as a stainless steel plate, and the circuit pattern is pressed and transferred to an insulating substrate different from the support plate.
  • a support plate such as a stainless steel plate
  • Patent Document 1 discloses a transfer method in which a circuit pattern is embedded in an insulating base material to form a substrate in order to smooth the substrate surface.
  • the above-described full additive method since the conductor which is a circuit pattern is formed by chemical copper plating, it takes time to deposit the conductor, so the processing cost increases and the manufacturing cost of the printed wiring board also increases. Become. Therefore, the above-described full additive method is not suitable for forming a relatively thick conductor, and is industrially applied to forming a relatively thin conductor.
  • the semi-additive method and the transfer method described above are not suitable for forming a relatively thick conductor as in the above-described full additive method, and are industrially applied to forming a relatively thin conductor.
  • the present invention has been made in view of such a problem, and an object of the present invention is to provide a printed wiring board manufacturing method capable of reducing costs even when circuit patterns having various thicknesses are formed. Is to provide.
  • the printed wiring board manufacturing method of the present invention includes a base forming step of forming a metal foil as a base on a support plate, a resist is applied on the metal foil, and a resist is formed by patterning.
  • a base forming step of forming a mask In a state in which a mask forming step of forming a mask, a conductive layer forming step of forming a conductive layer that fills at least the opening by applying electroplating to the opening of the resist mask, and the resist mask remaining, An attaching step of attaching an insulating base material to the formation surface side of the resist mask and the conductor layer; and a removing step of removing the support plate.
  • the cost can be reduced even when circuit patterns having various thicknesses are formed.
  • FIG. 1 to FIG. 6 are cross-sectional views in each manufacturing process of the manufacturing method of the printed wiring board 10 according to the present embodiment.
  • a metal foil 12 serving as a base is formed on a prepared support plate 11 by an electroplating process, a chemical plating process, or other general film forming process (base forming step).
  • the support plate 11 is formed of a conductive stainless steel plate (SUS plate) or the like as a transfer substrate.
  • the metal foil 12 is plating used as the foundation
  • a resist 13 is applied onto the metal foil 12, and the resist 13 at a predetermined position is removed by using an exposure developing device or the like (not shown), so that a desired opening 14 is formed.
  • a resist mask 15 provided is formed (mask forming step).
  • a general resist resin material such as a dry film is used for the resist 13, and its layer thickness is about 10 ⁇ m.
  • the conductor layer 16 is higher than the height of the resist mask 15 and the handle portion 16 a plated to the height of the resist mask 15 (that is, fills the opening 14). It is comprised from the umbrella part 16b which raised and plated (namely, it protruded from the opening part 14). That is, in the present embodiment, the conductor layer 16 that is the circuit pattern of the printed wiring board 10 is formed higher than the resist mask 15 in the cross-sectional view of FIG.
  • the umbrella thickness of the handle portion 16a and the umbrella portion 16b is adjusted to about 100 ⁇ m. Further, as shown in FIG. 3, a part (outer edge portion) of the umbrella portion 16 b which is a portion formed higher than the resist mask 15 extends and protrudes from the surface of the resist mask 15. Such a portion on the surface of the resist mask 15 is an outgrowth 16c.
  • the umbrella part 16b which is a part of the conductor layer 16 of the present embodiment includes the outgrowth 16c.
  • the outgrowth 16c is used as a wiring independent of other parts (for example, the handle part 16a) constituting the conductor layer 16. be able to.
  • the conductive circuit board 17 composed of the support plate 11, the metal foil 12, the resist mask 15 (resist 13), and the conductor layer 16 is formed through the base formation process, the mask formation process, and the conductor layer formation process described above. . That is, in the conductive circuit board 17 of this embodiment, the resist mask 15 remains without being removed. In other words, in this embodiment, a permanent resist is used as the resist 13, and the resist mask 15 functions as a permanent mask (permanent mask) in the conductive circuit board 17.
  • two conductive circuit boards 17 and one insulating base material 18 such as a prepreg are prepared, and press-contacted so that the insulating base material 18 is sandwiched between the two conductive circuit boards 17.
  • the insulating base material 18 is attached to the formation surface side of the resist mask 15 and the conductor layer 16 (attaching step), and the two conductive circuit boards 17 and one insulating base material 18 are formed.
  • a laminated body 19 is formed.
  • the two conductive circuit boards 17 are pressed so as to sandwich the insulating substrate 18, but the pattern is formed on one side.
  • one conductive circuit board 17 and the insulating base material 18 may be pressed and bonded together.
  • the resist mask 15 (resist 13) remains in the pasting process, so that the resist mask 15 remains. Compared with the case where it does not do, it becomes unnecessary to make the insulation base material 18 penetrate between the handle
  • the support plate 11 and the metal foil 12 are removed from the laminate 19 to expose the conductor layer 16 and the resist 13 (resist mask 15) (removal step). Thereby, the circuit pattern which consists of the conductor layer 16 is exposed on both surfaces, and formation of the printed wiring board 10 is completed.
  • the insulating substrate 18 can be made thinner, and the manufacturing cost of the printed wiring board 10 can be easily reduced. And if the layer thickness of the conductor layer 16 becomes thick (for example, 100 micrometers or more), such an effect will be show
  • the conductor deposition time can be shortened. That is, the manufacturing cost of the printed wiring board 10 itself can be further reduced by the conductor layer forming step described above.
  • FIGS. 7 to 12 are cross-sectional views in each manufacturing process of the method of manufacturing the printed wiring board 50 according to the present embodiment.
  • a metal foil 52 serving as a base is formed on a prepared support plate 51 by an electroplating process, a chemical plating process, or other general film forming process (base forming step).
  • the support plate 51 is formed of a conductive SUS plate or the like as a transfer substrate, as in the first embodiment.
  • the metal foil 52 is plating used as the foundation
  • a resist 53 is applied on the metal foil 52, and the resist 53 at a predetermined position is removed using an exposure developing device or the like (not shown) to form a desired opening 54.
  • a resist mask 55 provided is formed (mask forming step).
  • a general resist resin material such as a dry film is used for the resist 53, but its layer thickness is about 100 ⁇ m unlike the first embodiment.
  • electroplating is performed on the opening 54 of the resist mask 55 to form a conductor layer 56 so as to fill the opening 54 (conductor layer forming step).
  • the conductor layer 56 is formed only in the opening 54, and the layer thickness of the conductor layer 56 and the depth of the opening 54 (that is, the layer thickness of the resist mask 55). Are the same. That is, the conductor layer 56 is formed so that the conductor layer 56 and the resist mask 55 are flush with each other.
  • the electroplating process is performed instead of the chemical plating process, the time for forming the conductor layer 56 (that is, conductor deposition) is reduced, and the manufacturing cost of the printed wiring board 50 itself can be reduced. .
  • a conductive circuit board 57 composed of the support plate 51, the metal foil 52, the resist mask 55 (resist 53), and the conductor layer 56 is formed through the above-described base formation process, mask formation process, and conductor layer formation process. . That is, also in the conductive circuit board 57 of the present embodiment, the resist mask 55 remains without being removed as in the first embodiment, a permanent resist is used as the resist 53, and the resist mask 55 is a permanent mask (permanent mask). ).
  • two conductive circuit boards 57 and an insulating base material 58 such as one prepreg are prepared, and press-contacted so that the insulating base material 58 is sandwiched between the two conductive circuit boards 57.
  • the insulating base material 58 is attached to the formation surface side of the resist mask 55 and the conductor layer 56 (attaching step), and the two conductive circuit boards 57 and the one insulating base material 58 are formed.
  • a laminated body 59 is formed.
  • one conductive circuit plate 57 and the insulating base material 58 may be pressed and bonded together.
  • the insulating base material 58 is formed between the conductor layers 56 compared to the case where the resist mask 55 does not remain.
  • the amount of the insulating base material 58 can be reduced because there is no need to make it in between.
  • the conductor layer 56 does not protrude from the opening 54 of the resist mask 55, and the formation surface of the resist mask 55 and the conductor layer 56 of the conductive circuit board 57 is a flat surface having no unevenness. Therefore, it is not necessary to insert the insulating base material 58 between the umbrella portions 16b of the conductor layer 16 as in the first embodiment, and the amount of the insulating base material 58 can be further reduced. Thereby, the manufacturing cost of the printed wiring board 50 itself can be further reduced.
  • the support plate 51 is removed from the laminate 59 to expose the metal foil 52 (removal step). Thereafter, patterning is performed by known photolithography and etching so that the metal foil 52 has a desired shape, and the formation of the printed wiring board 50 on which a desired circuit pattern is formed is completed.
  • patterning is performed by known photolithography and etching so that the metal foil 52 has a desired shape, and the formation of the printed wiring board 50 on which a desired circuit pattern is formed is completed.
  • a circuit pattern formed only from the metal foil 52 and a circuit pattern formed from the metal foil 52 and the conductor layer 56 are formed on the printed wiring board 50.
  • a plurality of circuit patterns having different thicknesses can be easily formed on one substrate. Note that all of the metal foil 52 may be removed as in the first embodiment, and the removal process in the first embodiment may be the same as the removal process in the second embodiment.
  • the conductor layer 56 as a circuit pattern is transferred to the insulating base material 58 by the transfer method with the resist mask 55 remaining.
  • the insulating substrate 58 can be made thinner, and the manufacturing cost of the printed wiring board 50 can be easily reduced.
  • the thickness of the conductor layer 56 is increased (for example, 100 ⁇ m or more), such an effect is more remarkably exhibited.
  • Example 2 since the electroplating process is used for forming the conductor layer 56 in this example, not the chemical plating process, the conductor deposition time can be shortened. That is, the manufacturing cost of the printed wiring board 50 itself can be further reduced by the conductor layer forming step in the present embodiment described above.
  • a method for manufacturing a printed wiring board according to a first embodiment of the present invention includes: a base forming step of forming a metal foil as a base on a support plate; a resist mask on which a resist is applied and patterned on the metal foil; A mask forming step of forming a conductive layer, a conductive layer forming step of forming a conductive layer that fills at least the opening by electroplating the opening of the resist mask, and the resist mask remaining in the state, It has the sticking process which affixes an insulating base material to the formation surface side of a resist mask and the said conductor layer, and the removal process which removes the said support plate.
  • the manufacturing cost of the printed wiring board 50 can be easily reduced. Therefore, in the case of forming circuit patterns having various thicknesses including a circuit pattern having a relatively thick layer, the manufacturing cost can be reduced.
  • the method for manufacturing a printed wiring board according to the second embodiment of the present invention is a method for manufacturing a printed wiring board according to the first embodiment, wherein the thickness of the conductor layer is 100 ⁇ m or more in the conductor layer forming step.
  • the thickness of the conductor layer is 100 ⁇ m or more in the conductor layer forming step.
  • a method for manufacturing a printed wiring board according to a third embodiment of the present invention is a method for manufacturing a printed wiring board according to the first embodiment or the second embodiment, and the metal foil is patterned in the removing step.
  • the metal foil is patterned in the removing step.
  • a method for manufacturing a printed wiring board according to a fourth embodiment of the present invention is a method for manufacturing a printed wiring board according to any one of the first to third embodiments, wherein the resist mask is formed in the conductor layer forming step.
  • the conductor layer is composed of a handle portion plated to a height and an umbrella portion having an outgrowth that is raised and plated higher than the height of the resist mask and a part of which protrudes from the surface of the resist mask. When such an outgrowth is formed, the outgrowth can be used as a wiring independent of other parts constituting the conductor layer.
  • a method for manufacturing a printed wiring board according to a fourth embodiment of the present invention is a method for manufacturing a printed wiring board according to any of the first to third embodiments, wherein in the conductor layer forming step, Electroplating is performed up to the height of the resist mask so that the resist mask is flush with the resist mask.
  • Electroplating is performed up to the height of the resist mask so that the resist mask is flush with the resist mask.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A method for manufacturing a printed wiring board comprises: a base formation step for forming a metal foil (12) as a base on a support plate (11); a mask formation step for coating a resist (13) on the metal foil (12) and patterning the resist (13) so as to form a resist mask (15); a conducting layer formation step for electroplating apertures (14) in the resist mask (15) so as to form conducting layers (16) which at least fill the apertures (14); an application step for applying an insulating base material (18) on the side on which the resist mask (15) and the conducting layers (16) are formed, in a state in which the resist mask (15) remains; and a removal step for removing the support plate (11).

Description

プリント配線板の製造方法Method for manufacturing printed wiring board

 本発明は、転写法を用いたプリント配線板の製造方法に関する。 The present invention relates to a method for manufacturing a printed wiring board using a transfer method.

 プリント配線板の回路パターンの形成方法としては、フルアディティブ法、セミアディティブ法、及び転写法が従来から知れていた。フルアディティブ法及びセミアディティブ法とは、プリント配線板の回路パターンを絶縁基板に直接的に、めっきだけで形成するアディティブ法の一方式である。フルアディティブ法による回路パターンの形成の具体的な工程は、絶縁樹脂上に触媒入りのシートを貼り付けたものに対して、フルアディティブ用のレジスト(永久レジスト)によってめっき用のパターン(すなわち、永久マスク又はパーマネントマスク)を形成し、無電解銅めっきによって当該レジストが存在しない部分に回路パターンを形成する。これに対して、セミアティディブ法による回路パターンの形成の具体的な工程は、絶縁樹脂上に数ミクロン以下の薄い銅の下地層を形成したものに対して、セミアティディブ用のレジスト(リムーバルレジスト)によってめっき用のパターンを形成し、電気銅めっきによって回路パターンを形成した後、当該レジストの除去及び露出した下地層を除去する。 As a method for forming a circuit pattern of a printed wiring board, a full additive method, a semi-additive method, and a transfer method have been conventionally known. The full additive method and the semi-additive method are methods of an additive method in which a circuit pattern of a printed wiring board is formed directly on an insulating substrate only by plating. The specific process of forming a circuit pattern by the full additive method is as follows. For a sheet in which a catalyst-containing sheet is pasted on an insulating resin, a pattern for plating (that is, a permanent resist) is used. A mask or a permanent mask is formed, and a circuit pattern is formed in a portion where the resist does not exist by electroless copper plating. On the other hand, the specific process of forming a circuit pattern by the semi-active method is a semi-active resist (removal) for a thin copper underlayer of several microns or less formed on an insulating resin. A resist pattern is formed by resist, and a circuit pattern is formed by electrolytic copper plating. Then, the resist is removed and the exposed underlayer is removed.

 また、転写法とは、ステンレス板等の支持板上に回路パターンを形成し、当該支持板とは異なる絶縁基板に対して当該回路パターンを圧接して転写する回路パターンの形成方法である。例えば、基板表面を平滑にするために、回路パターンを絶縁基材に埋め込んで基板を形成する転写法が、特許文献1に開示されている。 Also, the transfer method is a circuit pattern forming method in which a circuit pattern is formed on a support plate such as a stainless steel plate, and the circuit pattern is pressed and transferred to an insulating substrate different from the support plate. For example, Patent Document 1 discloses a transfer method in which a circuit pattern is embedded in an insulating base material to form a substrate in order to smooth the substrate surface.

特開平5-37157号公報JP-A-5-37157

 しかしながら、上述したフルアディティブ法においては、回路パターンである導体を化学銅めっきによって形成するため、導体の析出に時間がかかることから加工費用が増加し、プリント配線板の製造コストも増加することになる。従って、上述したフルアディティブ法は、比較的に厚い導体形成には適しておらず、工業的には比較的に薄い導体形成に適用されている。 However, in the above-mentioned full additive method, since the conductor which is a circuit pattern is formed by chemical copper plating, it takes time to deposit the conductor, so the processing cost increases and the manufacturing cost of the printed wiring board also increases. Become. Therefore, the above-described full additive method is not suitable for forming a relatively thick conductor, and is industrially applied to forming a relatively thin conductor.

 また、上述したセミアディティブ法及び転写法においては、塗布したレジストを除去する必要があるため、回路パターンを積層して積層板を形成する際に、レジストが除去された部分である各層の回路パターン間を絶縁樹脂等で充填する必要があり、これによってプリント配線板の製造コストが増加することになる。従って、上述したセミアディティブ法及び転写法は、上述したフルアディティブ法と同様に、比較的に厚い導体形成には適しておらず、工業的には比較的に薄い導体形成に適用されている。 Further, in the above-described semi-additive method and transfer method, it is necessary to remove the applied resist, so when forming a laminated board by laminating circuit patterns, the circuit pattern of each layer, which is a portion where the resist has been removed The space needs to be filled with an insulating resin or the like, which increases the manufacturing cost of the printed wiring board. Therefore, the semi-additive method and the transfer method described above are not suitable for forming a relatively thick conductor as in the above-described full additive method, and are industrially applied to forming a relatively thin conductor.

 本発明はこのような課題に鑑みてなされたものであり、その目的とするところは、様々な厚みの回路パターンを形成する場合であってもコストを低減することができるプリント配線板の製造方法を提供することにある。 The present invention has been made in view of such a problem, and an object of the present invention is to provide a printed wiring board manufacturing method capable of reducing costs even when circuit patterns having various thicknesses are formed. Is to provide.

 上記目的を達成するため、本発明のプリント配線板の製造方法は、支持板上に下地となる金属箔を形成する下地形成工程と、前記金属箔上にレジストを塗布するとともにパターニングを施してレジストマスクを形成するマスク形成工程と、前記レジストマスクの開口部に電気めっき処理を施し、前記開口部を少なくとも充填する導体層を形成する導体層形成工程と、前記レジストマスクを残存させた状態で、前記レジストマスク及び前記導体層の形成面側に絶縁基材を貼り付ける貼り付け工程と、前記支持板を除去する除去工程と、を有する。 In order to achieve the above object, the printed wiring board manufacturing method of the present invention includes a base forming step of forming a metal foil as a base on a support plate, a resist is applied on the metal foil, and a resist is formed by patterning. In a state in which a mask forming step of forming a mask, a conductive layer forming step of forming a conductive layer that fills at least the opening by applying electroplating to the opening of the resist mask, and the resist mask remaining, An attaching step of attaching an insulating base material to the formation surface side of the resist mask and the conductor layer; and a removing step of removing the support plate.

 本発明に係るプリント配線板の製造方法においては、様々な厚みの回路パターンを形成する場合であってもコストを低減することができる。 In the method for manufacturing a printed wiring board according to the present invention, the cost can be reduced even when circuit patterns having various thicknesses are formed.

本発明の実施例1に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 1 of this invention. 本発明の実施例1に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 1 of this invention. 本発明の実施例1に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 1 of this invention. 本発明の実施例1に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 1 of this invention. 本発明の実施例1に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 1 of this invention. 本発明の実施例1に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 1 of this invention. 本発明の実施例2に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 2 of this invention. 本発明の実施例2に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 2 of this invention. 本発明の実施例2に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 2 of this invention. 本発明の実施例2に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 2 of this invention. 本発明の実施例2に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 2 of this invention. 本発明の実施例2に係るプリント配線板の製造方法の各製造工程における断面図である。It is sectional drawing in each manufacturing process of the manufacturing method of the printed wiring board which concerns on Example 2 of this invention.

 以下、図面を参照し、本発明の実施の形態について、各実施例に基づき詳細に説明する。なお、本発明は以下に説明する内容に限定されるものではなく、その要旨を変更しない範囲において任意に変更して実施することが可能である。また、各実施例の説明に用いる図面は、いずれも本発明によるプリント配線板及びその構成部材を模式的に示すものであって、理解を深めるべく部分的な強調、拡大、縮小、または省略などを行っており、プリント配線板及びその構成部材の縮尺や形状等を正確に表すものとはなっていない場合がある。更に、各実施例で用いる様々な数値は、いずれも一例を示すものであり、必要に応じて様々に変更することが可能である。 Hereinafter, embodiments of the present invention will be described in detail based on each example with reference to the drawings. In addition, this invention is not limited to the content demonstrated below, In the range which does not change the summary, it can change arbitrarily and can implement. In addition, the drawings used for describing each embodiment schematically show the printed wiring board and its constituent members according to the present invention, and are partially emphasized, enlarged, reduced, omitted, etc. to deepen understanding. In some cases, the printed circuit board and its constituent members are not accurately represented in scale, shape, or the like. Furthermore, the various numerical values used in each embodiment are merely examples, and can be variously changed as necessary.

<実施例1>
 以下において、本発明の実施例1に係るプリント配線板10の製造方法について、図1乃至図6を参照して詳細に説明する。ここで、図1乃至図6は、本実施例に係るプリント配線板10の製造方法の各製造工程における断面図である。
<Example 1>
Below, the manufacturing method of the printed wiring board 10 which concerns on Example 1 of this invention is demonstrated in detail with reference to FIG. 1 thru | or FIG. Here, FIG. 1 to FIG. 6 are cross-sectional views in each manufacturing process of the manufacturing method of the printed wiring board 10 according to the present embodiment.

 先ず、図1に示すように、電気めっき処理、化学めっき処理、又はその他の一般的な成膜処理より、準備した支持板11上に下地となる金属箔12を形成する(下地形成工程)。ここで、支持板11は、転写基材としての導電性のあるステンレス鋼材板(SUS板)等で形成されている。また、金属箔12は、後述する導体層の下地となるめっきであり、例えば電解銅めっきを約12μm施したものである。 First, as shown in FIG. 1, a metal foil 12 serving as a base is formed on a prepared support plate 11 by an electroplating process, a chemical plating process, or other general film forming process (base forming step). Here, the support plate 11 is formed of a conductive stainless steel plate (SUS plate) or the like as a transfer substrate. Moreover, the metal foil 12 is plating used as the foundation | substrate of the conductor layer mentioned later, for example, electrolytic copper plating is performed about 12 micrometers.

 次に、図2に示すように、金属箔12上にレジスト13を塗布し、露光現像装置等(図示せず)を用いて所定の位置のレジスト13を除去して、所望の開口部14を備えるレジストマスク15を形成する(マスク形成工程)。ここで、レジスト13には、ドライフィルム等の一般的なレジスト用の樹脂材料が用いられ、その層厚は約10μmである。このようなレジストマスク15が形成されることによって、開口部14において金属箔12が露出することになる。 Next, as shown in FIG. 2, a resist 13 is applied onto the metal foil 12, and the resist 13 at a predetermined position is removed by using an exposure developing device or the like (not shown), so that a desired opening 14 is formed. A resist mask 15 provided is formed (mask forming step). Here, a general resist resin material such as a dry film is used for the resist 13, and its layer thickness is about 10 μm. By forming such a resist mask 15, the metal foil 12 is exposed in the opening 14.

 次に、図3に示すように、レジストマスク15の開口部14に電気めっき処理を施し、開口部14を少なくとも充填するように導体層16を形成する(導体層形成工程)。本実施例においては、図3に示すように、導体層16は、レジストマスク15の高さまでめっきされた(すなわち、開口部14を充填する)柄部16aと、レジストマスク15の高さよりも高く盛り上げてめっきされた(すなわち、開口部14からはみ出した)傘部16bとから構成されている。すなわち、本実施例においては、プリント配線板10の回路パターンとなる導体層16は、図3の断面図において、レジストマスク15よりも高く形成されており、導体層16のもっと厚い部分の層厚(柄部16a及び傘部16bの層厚)が約100μmに調整されている。また、図3に示すように、レジストマスク15よりも高く形成された部分である傘部16bにおいて、その一部(外縁部分)がレジストマスク15の表面にはみ出して広がっている。このようなレジストマスク15の表面上に盛られた部分がアウトグロース16cである。換言すれば、本実施例の導体層16の一部である傘部16bは、アウトグロース16cを備えている。このように、導体層16の傘部16bがアウトグロース16cを備える場合には、導体層16を構成する他の部分(例えば、柄部16a)とは独立した配線としてかかるアウトグロース16cを利用することができる。 Next, as shown in FIG. 3, electroplating is performed on the opening 14 of the resist mask 15 to form a conductor layer 16 so as to fill at least the opening 14 (conductor layer forming step). In the present embodiment, as shown in FIG. 3, the conductor layer 16 is higher than the height of the resist mask 15 and the handle portion 16 a plated to the height of the resist mask 15 (that is, fills the opening 14). It is comprised from the umbrella part 16b which raised and plated (namely, it protruded from the opening part 14). That is, in the present embodiment, the conductor layer 16 that is the circuit pattern of the printed wiring board 10 is formed higher than the resist mask 15 in the cross-sectional view of FIG. (Layer thickness of the handle portion 16a and the umbrella portion 16b) is adjusted to about 100 μm. Further, as shown in FIG. 3, a part (outer edge portion) of the umbrella portion 16 b which is a portion formed higher than the resist mask 15 extends and protrudes from the surface of the resist mask 15. Such a portion on the surface of the resist mask 15 is an outgrowth 16c. In other words, the umbrella part 16b which is a part of the conductor layer 16 of the present embodiment includes the outgrowth 16c. Thus, when the umbrella part 16b of the conductor layer 16 includes the outgrowth 16c, the outgrowth 16c is used as a wiring independent of other parts (for example, the handle part 16a) constituting the conductor layer 16. be able to.

 上述した下地形成工程、マスク形成工程、及び導体層形成工程を経て、支持板11、金属箔12、レジストマスク15(レジスト13)、及び導体層16から構成される導電回路板17が形成される。すなわち、本実施例の導電回路板17においては、レジストマスク15が除去されることなく残存している。換言すれば、本実施例においては、レジスト13として永久レジストを用い、導電回路板17において、レジストマスク15が永久マスク(パーマネントマスク)として機能することになる。 The conductive circuit board 17 composed of the support plate 11, the metal foil 12, the resist mask 15 (resist 13), and the conductor layer 16 is formed through the base formation process, the mask formation process, and the conductor layer formation process described above. . That is, in the conductive circuit board 17 of this embodiment, the resist mask 15 remains without being removed. In other words, in this embodiment, a permanent resist is used as the resist 13, and the resist mask 15 functions as a permanent mask (permanent mask) in the conductive circuit board 17.

 次に、図4に示すように、2つの導電回路板17と1つのプリプレグ等の絶縁基材18とを準備し、2つの導電回路板17によって絶縁基材18を挟むようにして圧接する。これにより、図5に示すように、レジストマスク15及び導体層16の形成面側に絶縁基材18が貼り付けられ(貼り付け工程)、2つの導電回路板17と1つの絶縁基材18が積層された積層体19が形成される。なお、本実施例においては、プリント配線板10の両面にパターンが形成された両面板を形成するため、2つの導電回路板17によって絶縁基材18を挟むように圧接したが、片面にパターンが形成された片面板を形成する場合には1つの導電回路板17と絶縁基材18と圧接して貼り合わせれば良い。 Next, as shown in FIG. 4, two conductive circuit boards 17 and one insulating base material 18 such as a prepreg are prepared, and press-contacted so that the insulating base material 18 is sandwiched between the two conductive circuit boards 17. As a result, as shown in FIG. 5, the insulating base material 18 is attached to the formation surface side of the resist mask 15 and the conductor layer 16 (attaching step), and the two conductive circuit boards 17 and one insulating base material 18 are formed. A laminated body 19 is formed. In this embodiment, in order to form a double-sided board having a pattern formed on both sides of the printed wiring board 10, the two conductive circuit boards 17 are pressed so as to sandwich the insulating substrate 18, but the pattern is formed on one side. In the case of forming the formed single-sided plate, one conductive circuit board 17 and the insulating base material 18 may be pressed and bonded together.

 本実施例においては、導体層16がレジストマスク15の開口部14から突出しているものの、上記貼り付け工程の際にレジストマスク15(レジスト13)が残存しているため、かかるレジストマスク15が残存しない場合と比較して、絶縁基材18を導体層16の柄部16a同士の間に入り込ませる必要がなくなり、絶縁基材18の量を低減することができる。これにより、プリント配線板10自体の製造コストの低減を図ることができる。 In this embodiment, although the conductor layer 16 protrudes from the opening 14 of the resist mask 15, the resist mask 15 (resist 13) remains in the pasting process, so that the resist mask 15 remains. Compared with the case where it does not do, it becomes unnecessary to make the insulation base material 18 penetrate between the handle | pattern parts 16a of the conductor layer 16, and the quantity of the insulation base material 18 can be reduced. Thereby, the manufacturing cost of the printed wiring board 10 itself can be reduced.

 次に、図6に示すように、積層体19から支持板11及び金属箔12を除去して導体層16及びレジスト13(レジストマスク15)を露出させる(除去工程)。これにより、両面に導体層16からなる回路パターンが露出し、プリント配線板10の形成が完了する。 Next, as shown in FIG. 6, the support plate 11 and the metal foil 12 are removed from the laminate 19 to expose the conductor layer 16 and the resist 13 (resist mask 15) (removal step). Thereby, the circuit pattern which consists of the conductor layer 16 is exposed on both surfaces, and formation of the printed wiring board 10 is completed.

 以上のように、本実施例にかかるプリント配線板10の製造方法においては、レジストマスク15を残存させた状態で、転写法により回路パターンである導体層16を絶縁基材18に転写するため、レジストマスク15を除去する場合と比較して絶縁基材18を薄くすることができ、プリント配線板10の製造コストの低減を容易に図ることができる。そして、導体層16の層厚が厚くなれば(例えば、100μm以上)、このような効果がより顕著に奏されることになる。 As described above, in the method of manufacturing the printed wiring board 10 according to this example, in order to transfer the conductor layer 16 as a circuit pattern to the insulating base material 18 by the transfer method with the resist mask 15 remaining, Compared to the case where the resist mask 15 is removed, the insulating substrate 18 can be made thinner, and the manufacturing cost of the printed wiring board 10 can be easily reduced. And if the layer thickness of the conductor layer 16 becomes thick (for example, 100 micrometers or more), such an effect will be show | played more notably.

 また、本実施例における導体層16の形成には化学めっき処理ではなく、電気めっき処理が用いられているため、導体の析出時間を短縮することができる。すなわち、上述した導体層形成工程により、プリント配線板10自体の製造コストをより一層低減することができる。 In addition, since the electroplating process is used instead of the chemical plating process for forming the conductor layer 16 in this embodiment, the conductor deposition time can be shortened. That is, the manufacturing cost of the printed wiring board 10 itself can be further reduced by the conductor layer forming step described above.

<実施例2>
 以下において、本発明の実施例2に係るプリント配線板50の製造方法について、図7乃至図12を参照して詳細に説明する。ここで、図7乃至図12は、本実施例に係るプリント配線板50の製造方法の各製造工程における断面図である。
<Example 2>
Below, the manufacturing method of the printed wiring board 50 which concerns on Example 2 of this invention is demonstrated in detail with reference to FIG. 7 thru | or FIG. Here, FIGS. 7 to 12 are cross-sectional views in each manufacturing process of the method of manufacturing the printed wiring board 50 according to the present embodiment.

 先ず、図7に示すように、電気めっき処理、化学めっき処理、又はその他の一般的な成膜処理より、準備した支持板51上に下地となる金属箔52を形成する(下地形成工程)。ここで、支持板51は、実施例1と同様に転写基材としての導電性のあるSUS板等で形成されている。また、金属箔52は、後述する導体層の下地となるめっきであり、例えば電解銅めっきを約12μm施したものである。 First, as shown in FIG. 7, a metal foil 52 serving as a base is formed on a prepared support plate 51 by an electroplating process, a chemical plating process, or other general film forming process (base forming step). Here, the support plate 51 is formed of a conductive SUS plate or the like as a transfer substrate, as in the first embodiment. Moreover, the metal foil 52 is plating used as the foundation | substrate of the conductor layer mentioned later, for example, electrolytic copper plating is performed about 12 micrometers.

 次に、図8に示すように、金属箔52上にレジスト53を塗布し、露光現像装置等(図示せず)を用いて所定の位置のレジスト53を除去して、所望の開口部54を備えるレジストマスク55を形成する(マスク形成工程)。ここで、レジスト53には、実施例1と同様にドライフィルム等の一般的なレジスト用の樹脂材料が用いられるものの、その層厚は実施例1とは異なり、約100μmである。このようなレジストマスク55が形成されることによって、開口部54において金属箔52が露出することになる。 Next, as shown in FIG. 8, a resist 53 is applied on the metal foil 52, and the resist 53 at a predetermined position is removed using an exposure developing device or the like (not shown) to form a desired opening 54. A resist mask 55 provided is formed (mask forming step). Here, as in the first embodiment, a general resist resin material such as a dry film is used for the resist 53, but its layer thickness is about 100 μm unlike the first embodiment. By forming such a resist mask 55, the metal foil 52 is exposed in the opening 54.

 次に、図9に示すように、レジストマスク55の開口部54に電気めっき処理を施し、開口部54を充填するように導体層56を形成する(導体層形成工程)。本実施例においては、図9に示すように、導体層56は開口部54のみに形成されており、導体層56の層厚と開口部54の深さ(すなわち、レジストマスク55の層厚)は同一となっている。すなわち、導体層56とレジストマスク55とが面一になるように、導体層56が形成されている。本実施例においては、化学めっき処理ではなく電気めっき処理を施すため、導体層56の形成(すなわち、導体析出)の時間が削減され、プリント配線板50自体の製造コストの低減を図ることができる。 Next, as shown in FIG. 9, electroplating is performed on the opening 54 of the resist mask 55 to form a conductor layer 56 so as to fill the opening 54 (conductor layer forming step). In this embodiment, as shown in FIG. 9, the conductor layer 56 is formed only in the opening 54, and the layer thickness of the conductor layer 56 and the depth of the opening 54 (that is, the layer thickness of the resist mask 55). Are the same. That is, the conductor layer 56 is formed so that the conductor layer 56 and the resist mask 55 are flush with each other. In this embodiment, since the electroplating process is performed instead of the chemical plating process, the time for forming the conductor layer 56 (that is, conductor deposition) is reduced, and the manufacturing cost of the printed wiring board 50 itself can be reduced. .

 上述した下地形成工程、マスク形成工程、及び導体層形成工程を経て、支持板51、金属箔52、レジストマスク55(レジスト53)、及び導体層56から構成される導電回路板57が形成される。すなわち、本実施例の導電回路板57においても、実施例1と同様に、レジストマスク55が除去されることなく残存し、レジスト53として永久レジストが用いられ、レジストマスク55が永久マスク(パーマネントマスク)として機能することになる。 A conductive circuit board 57 composed of the support plate 51, the metal foil 52, the resist mask 55 (resist 53), and the conductor layer 56 is formed through the above-described base formation process, mask formation process, and conductor layer formation process. . That is, also in the conductive circuit board 57 of the present embodiment, the resist mask 55 remains without being removed as in the first embodiment, a permanent resist is used as the resist 53, and the resist mask 55 is a permanent mask (permanent mask). ).

 次に、図10に示すように、2つの導電回路板57と1つのプリプレグ等の絶縁基材58とを準備し、2つの導電回路板57によって絶縁基材58を挟むようにして圧接する。これにより、図11に示すように、レジストマスク55及び導体層56の形成面側に絶縁基材58が貼り付けられ(貼り付け工程)、2つの導電回路板57と1つの絶縁基材58が積層された積層体59が形成される。なお、実施例1に説明したように、片面にパターンが形成された片面板を形成する場合には1つの導電回路板57と絶縁基材58と圧接して貼り合わせれば良い。 Next, as shown in FIG. 10, two conductive circuit boards 57 and an insulating base material 58 such as one prepreg are prepared, and press-contacted so that the insulating base material 58 is sandwiched between the two conductive circuit boards 57. As a result, as shown in FIG. 11, the insulating base material 58 is attached to the formation surface side of the resist mask 55 and the conductor layer 56 (attaching step), and the two conductive circuit boards 57 and the one insulating base material 58 are formed. A laminated body 59 is formed. As described in the first embodiment, when a single-sided plate having a pattern formed on one side is formed, one conductive circuit plate 57 and the insulating base material 58 may be pressed and bonded together.

 本実施例においては、上記貼り付け工程の際にレジストマスク55(レジスト53)が残存しているため、かかるレジストマスク55が残存しない場合と比較して、絶縁基材58を導体層56同士の間に入り込ませる必要がなくなり、絶縁基材58の量を低減することができる。更に、本実施例においては、導体層56がレジストマスク55の開口部54から突出することなく、導電回路板57のレジストマスク55及び導体層56の形成面が、凹凸の無い面一な平坦面となっているため、実施例1のような導体層16の傘部16b間にも絶縁基材58を入り込ませる必要がなくなり、絶縁基材58の量をより一層低減することができる。これにより、プリント配線板50自体の製造コストのより一層の低減を図ることができる。 In the present embodiment, since the resist mask 55 (resist 53) remains during the attaching step, the insulating base material 58 is formed between the conductor layers 56 compared to the case where the resist mask 55 does not remain. The amount of the insulating base material 58 can be reduced because there is no need to make it in between. Furthermore, in this embodiment, the conductor layer 56 does not protrude from the opening 54 of the resist mask 55, and the formation surface of the resist mask 55 and the conductor layer 56 of the conductive circuit board 57 is a flat surface having no unevenness. Therefore, it is not necessary to insert the insulating base material 58 between the umbrella portions 16b of the conductor layer 16 as in the first embodiment, and the amount of the insulating base material 58 can be further reduced. Thereby, the manufacturing cost of the printed wiring board 50 itself can be further reduced.

 次に、図11に示すように、積層体59から支持板51を除去して金属箔52を露出させる(除去工程)。その後、公知のフォトリソグラフィ及びエッチングにより、金属箔52が所望の形状となるようにパターニングを施し、所望の回路パターンが形成されたプリント配線板50の形成が完了する。このような金属箔52に対する加工処理を施すことにより、例えば、金属箔52のみから形成される回路パターンと、金属箔52及び導体層56からなる回路パターンとがプリント配線板50に形成されることになり、厚さの異なる複数の回路パターンが1つの基板に容易に形成することができる。なお、実施例1と同様に金属箔52を全て除去しても良く、実施例1における除去工程を実施例2の除去工程のようにしてもよい。 Next, as shown in FIG. 11, the support plate 51 is removed from the laminate 59 to expose the metal foil 52 (removal step). Thereafter, patterning is performed by known photolithography and etching so that the metal foil 52 has a desired shape, and the formation of the printed wiring board 50 on which a desired circuit pattern is formed is completed. By performing such processing on the metal foil 52, for example, a circuit pattern formed only from the metal foil 52 and a circuit pattern formed from the metal foil 52 and the conductor layer 56 are formed on the printed wiring board 50. Thus, a plurality of circuit patterns having different thicknesses can be easily formed on one substrate. Note that all of the metal foil 52 may be removed as in the first embodiment, and the removal process in the first embodiment may be the same as the removal process in the second embodiment.

 以上のように、本実施例にかかるプリント配線板50の製造方法においても、レジストマスク55を残存させた状態で、転写法により回路パターンである導体層56を絶縁基材58に転写するため、レジストマスク55を除去する場合と比較して絶縁基材58を薄くすることができ、プリント配線板50の製造コストの低減を容易に図ることができる。そして、実施例1と同様に、導体層56の層厚が厚くなれば(例えば、100μm以上)、このような効果がより顕著に奏されることになる。 As described above, also in the method for manufacturing the printed wiring board 50 according to the present embodiment, the conductor layer 56 as a circuit pattern is transferred to the insulating base material 58 by the transfer method with the resist mask 55 remaining. Compared with the case where the resist mask 55 is removed, the insulating substrate 58 can be made thinner, and the manufacturing cost of the printed wiring board 50 can be easily reduced. As in the first embodiment, when the thickness of the conductor layer 56 is increased (for example, 100 μm or more), such an effect is more remarkably exhibited.

 また、実施例1と同様に、本実施例における導体層56の形成には化学めっき処理ではなく、電気めっき処理が用いられているため、導体の析出時間を短縮することができる。すなわち、上述した本実施例における導体層形成工程により、プリント配線板50自体の製造コストをより一層低減することができる。 Further, similarly to Example 1, since the electroplating process is used for forming the conductor layer 56 in this example, not the chemical plating process, the conductor deposition time can be shortened. That is, the manufacturing cost of the printed wiring board 50 itself can be further reduced by the conductor layer forming step in the present embodiment described above.

<本発明の実施態様>
 本発明の第1実施態様に係るプリント配線板の製造方法は、支持板上に下地となる金属箔を形成する下地形成工程と、前記金属箔上にレジストを塗布するとともにパターニングを施してレジストマスクを形成するマスク形成工程と、前記レジストマスクの開口部に電気めっき処理を施し、前記開口部を少なくとも充填する導体層を形成する導体層形成工程と、前記レジストマスクを残存させた状態で、前記レジストマスク及び前記導体層の形成面側に絶縁基材を貼り付ける貼り付け工程と、前記支持板を除去する除去工程と、を有している。
<Embodiment of the present invention>
A method for manufacturing a printed wiring board according to a first embodiment of the present invention includes: a base forming step of forming a metal foil as a base on a support plate; a resist mask on which a resist is applied and patterned on the metal foil; A mask forming step of forming a conductive layer, a conductive layer forming step of forming a conductive layer that fills at least the opening by electroplating the opening of the resist mask, and the resist mask remaining in the state, It has the sticking process which affixes an insulating base material to the formation surface side of a resist mask and the said conductor layer, and the removal process which removes the said support plate.

 第1実施形態に係るプリント配線板の製造方法においては、レジストマスクを残存させた状態で、回路パターンである導体層を絶縁基材に転写するため、導体層同士の間に充填する絶縁基材の量を低減することができ、プリント配線板50の製造コストの低減を容易に図ることができる。従って、導体層の層厚が比較的に厚い回路パターンを含め、様々な厚みの回路パターンを形成する場合において、製造コストを低減することができる。 In the method for manufacturing a printed wiring board according to the first embodiment, in order to transfer a conductor layer as a circuit pattern to an insulating substrate with the resist mask remaining, the insulating substrate is filled between the conductor layers. Therefore, the manufacturing cost of the printed wiring board 50 can be easily reduced. Therefore, in the case of forming circuit patterns having various thicknesses including a circuit pattern having a relatively thick layer, the manufacturing cost can be reduced.

 本発明の第2実施態様に係るプリント配線板の製造方法は、第1実施形態に係るプリント配線板の製造方法であって、前記導体層形成工程において前記導体層の厚みを100μm以上とする。このように、100μm以上の比較的に厚い導体層を形成する場合には、上述した第1実施形態に係る効果がより顕著に奏されることになる。 The method for manufacturing a printed wiring board according to the second embodiment of the present invention is a method for manufacturing a printed wiring board according to the first embodiment, wherein the thickness of the conductor layer is 100 μm or more in the conductor layer forming step. Thus, when a relatively thick conductor layer of 100 μm or more is formed, the effects according to the first embodiment described above are more remarkably exhibited.

 本発明の第3実施態様に係るプリント配線板の製造方法は、第1実施形態又は第2実施形態に係るプリント配線板の製造方法であって、前記除去工程において前記金属箔をパターニングする。このように金属箔に対する加工処理を施すことにより、厚さの異なる複数の回路パターンが1つの基板に容易に形成することができる。 A method for manufacturing a printed wiring board according to a third embodiment of the present invention is a method for manufacturing a printed wiring board according to the first embodiment or the second embodiment, and the metal foil is patterned in the removing step. Thus, by processing the metal foil, a plurality of circuit patterns having different thicknesses can be easily formed on one substrate.

 本発明の第4実施態様に係るプリント配線板の製造方法は、第1乃至第3実施形態のいずれかに係るプリント配線板の製造方法であって、前記導体層形成工程において、前記レジストマスクの高さまでめっきされた柄部と、前記レジストマスクの高さよりも高く盛り上げてめっきされ、一部が前記レジストマスクの表面にはみ出したアウトグロースを備える傘部と、から前記導体層を構成する。このようなアウトグロースを形成すると、導体層を構成する他の部分とは独立した配線として、当該アウトグロースを利用することができる。 A method for manufacturing a printed wiring board according to a fourth embodiment of the present invention is a method for manufacturing a printed wiring board according to any one of the first to third embodiments, wherein the resist mask is formed in the conductor layer forming step. The conductor layer is composed of a handle portion plated to a height and an umbrella portion having an outgrowth that is raised and plated higher than the height of the resist mask and a part of which protrudes from the surface of the resist mask. When such an outgrowth is formed, the outgrowth can be used as a wiring independent of other parts constituting the conductor layer.

 本発明の第4実施態様に係るプリント配線板の製造方法は、第1乃至第3実施形態のいずれかに係るプリント配線板の製造方法であって、前記導体層形成工程において、前記導体層と前記レジストマスクとが面一となるように、前記レジストマスクの高さまで電気めっき処理を施す。このように導体層とレジストマスクとを面一にすることで、絶縁基材と接触する面が凹凸の無い平坦な面となり、導体層の間に絶縁基材を入り込ませる必要がなくなり、絶縁基材の量をより一層低減することができる。これにより、プリント配線板自体の製造コストのより一層の低減を図ることができる。 A method for manufacturing a printed wiring board according to a fourth embodiment of the present invention is a method for manufacturing a printed wiring board according to any of the first to third embodiments, wherein in the conductor layer forming step, Electroplating is performed up to the height of the resist mask so that the resist mask is flush with the resist mask. By making the conductor layer and the resist mask flush with each other in this way, the surface in contact with the insulating base becomes a flat surface without unevenness, and it is not necessary to insert the insulating base between the conductor layers. The amount of material can be further reduced. Thereby, the further reduction of the manufacturing cost of printed wiring board itself can be aimed at.

 10  プリント配線板
 11  支持板
 12  金属箔
 13  レジスト
 14  開口部
 15  レジストマスク
 16  導体層
 16a  柄部
 16b  傘部
 16c  アウトグロース
 17  導電回路板
 18  絶縁基材
 19  積層体
 50  プリント配線板
 51  支持板
 52  金属箔
 53  レジスト
 54  開口部
 55  レジストマスク
 56  導体層
 57  導電回路板
 58  絶縁基材
 59  積層体
 
 
DESCRIPTION OF SYMBOLS 10 Printed wiring board 11 Support board 12 Metal foil 13 Resist 14 Opening part 15 Resist mask 16 Conductor layer 16a Handle part 16b Umbrella part 16c Outgrowth 17 Conductive circuit board 18 Insulating base material 19 Laminated body 50 Printed wiring board 51 Support board 52 Metal Foil 53 Resist 54 Opening 55 Resist Mask 56 Conductor Layer 57 Conductive Circuit Board 58 Insulating Base Material 59 Laminate

Claims (5)

 支持板上に下地となる金属箔を形成する下地形成工程と、
 前記金属箔上にレジストを塗布するとともにパターニングを施してレジストマスクを形成するマスク形成工程と、
 前記レジストマスクの開口部に電気めっき処理を施し、前記開口部を少なくとも充填する導体層を形成する導体層形成工程と、
 前記レジストマスクを残存させた状態で、前記レジストマスク及び前記導体層の形成面側に絶縁基材を貼り付ける貼り付け工程と、
 前記支持板を除去する除去工程と、を有するプリント配線板の製造方法。
A base formation step of forming a metal foil as a base on the support plate;
A mask forming step of applying a resist on the metal foil and patterning to form a resist mask;
Conductive plating is performed on the opening of the resist mask, and a conductor layer forming step of forming a conductor layer that fills at least the opening; and
In the state where the resist mask remains, an attaching step of attaching an insulating base material to the formation surface side of the resist mask and the conductor layer;
And a removing step of removing the support plate.
 前記導体層形成工程においては、前記導体層の厚みを100μm以上とする請求項1に記載のプリント配線板の製造方法。 The method for producing a printed wiring board according to claim 1, wherein in the conductor layer forming step, the thickness of the conductor layer is 100 μm or more.  前記除去工程においては、前記金属箔をパターニングするように前記金属箔を部分的に除去する請求項1又は2に記載のプリント配線板の製造方法。 The method for manufacturing a printed wiring board according to claim 1 or 2, wherein in the removing step, the metal foil is partially removed so as to pattern the metal foil.  前記導体層形成工程においては、前記レジストマスクの高さまでめっきされた柄部と、前記レジストマスクの高さよりも高く盛り上げてめっきされ、一部が前記レジストマスクの表面にはみ出したアウトグロースを備える傘部と、から前記導体層を構成する請求項1乃至3のいずれか1項に記載のプリント配線板の製造方法。 In the conductor layer forming step, a handle portion plated to the height of the resist mask, and an umbrella provided with an outgrowth that is raised and plated higher than the height of the resist mask, and a part of which protrudes from the surface of the resist mask. The method for manufacturing a printed wiring board according to any one of claims 1 to 3, wherein the conductor layer is configured from a portion.  前記導体層形成工程においては、前記導体層と前記レジストマスクとが面一となるように、前記レジストマスクの高さまで電気めっき処理を施す請求項1乃至3のいずれか1項に記載のプリント配線板の製造方法。 4. The printed wiring according to claim 1, wherein, in the conductor layer forming step, electroplating is performed up to a height of the resist mask so that the conductor layer and the resist mask are flush with each other. A manufacturing method of a board.
PCT/JP2014/050433 2014-01-14 2014-01-14 Method for manufacturing printed wiring board Ceased WO2015107618A1 (en)

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