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WO2015181846A1 - Échangeur thermique et dispositif de traitement de gaz d'échappement utilisant ledit échangeur thermique - Google Patents

Échangeur thermique et dispositif de traitement de gaz d'échappement utilisant ledit échangeur thermique Download PDF

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Publication number
WO2015181846A1
WO2015181846A1 PCT/JP2014/002768 JP2014002768W WO2015181846A1 WO 2015181846 A1 WO2015181846 A1 WO 2015181846A1 JP 2014002768 W JP2014002768 W JP 2014002768W WO 2015181846 A1 WO2015181846 A1 WO 2015181846A1
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WO
WIPO (PCT)
Prior art keywords
heat
exhaust gas
heat exchanger
receiving fluid
fluid passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2014/002768
Other languages
English (en)
Japanese (ja)
Inventor
今村　啓志
塚田　勉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanken Techno Co Ltd
Original Assignee
Kanken Techno Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanken Techno Co Ltd filed Critical Kanken Techno Co Ltd
Priority to PCT/JP2014/002768 priority Critical patent/WO2015181846A1/fr
Priority to KR1020167033092A priority patent/KR102262643B1/ko
Priority to PCT/JP2015/002599 priority patent/WO2015182094A1/fr
Priority to CN201580029176.2A priority patent/CN106471325B/zh
Priority to JP2016523134A priority patent/JP6336059B2/ja
Priority to TW104116830A priority patent/TW201616078A/zh
Publication of WO2015181846A1 publication Critical patent/WO2015181846A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/08—Arrangements of devices for treating smoke or fumes of heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/022—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of two or more media in heat-exchange relationship being helically coiled, the coils having a cylindrical configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2217/00—Intercepting solids
    • F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E20/00—Combustion technologies with mitigation potential
    • Y02E20/30—Technologies for a more efficient combustion or heat usage

Definitions

  • the present invention mainly relates to a heat exchanger suitable for an exhaust gas thermal decomposition process and an exhaust gas treatment apparatus using the heat exchanger.
  • the heat exchanger has at least two flow paths that are divided from each other by a heat transfer plate, and allows a low-temperature heat receiving fluid (gas or liquid, the same applies hereinafter) to flow through one flow path, while the other.
  • the heat transfer (heat transfer) is performed between the heat-dissipating fluid and the heat-receiving fluid by passing a high-temperature heat-dissipating fluid through the channel.
  • a heat exchanger is used in various industrial processes that use heat.
  • a heat exchanger is provided in an exhaust gas abatement apparatus, and the abatement processing section of the exhaust gas abatement apparatus.
  • the temperature of the gas discharged from the abatement processing section can be reduced, and the cooling burden of the exhaust gas can be reduced.
  • the temperature of the inert gas introduced into the piping leading to the abatement processing section can be increased, generation and adhesion of solid substances due to the temperature decrease of the exhaust gas in the piping can be suppressed. . For this reason, installation of the heater in the said piping can be made unnecessary, and cost reduction can be aimed at.
  • a heat exchanger used in a conventional device of this type generally has a flow path of a radiating fluid or a flow path of the radiating fluid in order to secure a contact area between the radiating fluid and the heat receiving fluid (in other words, “heat transfer area”).
  • One of the flow paths of the heat receiving fluid is configured to meander, and the other is configured to distribute to a plurality of thin tubes arranged in parallel.
  • a main object of the present invention is to provide a high-efficiency heat exchanger that can secure a sufficient heat transfer area in spite of being compact and can easily perform internal cleaning and maintenance. is there.
  • the further subject of this invention is providing the waste gas processing apparatus which can perform the efficient thermal decomposition (detoxification) process of a large volume waste gas using such a heat exchanger.
  • the heat exchanger 10 is configured as follows. That is, a double-pipe main body casing 16 composed of an outer tube 12 and an inner tube 14 and an internal space formed between the outer tube 12 and the inner tube 14 are connected to a heat receiving fluid passage 18 and a radiating fluid passage.
  • the heat transfer plate 22 is divided into flow paths 20.
  • the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. Is done.
  • the present invention has the following effects, for example.
  • the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. It is possible to maximize the contact area between the low-temperature side heat receiving fluid and the high-temperature side radiating fluid that are in contact with each other, that is, the heat transfer area. Further, the heat receiving fluid passage 18 and the radiating fluid passage 20 are not meandering (that is, those having a sharp corner portion where the passage is reversed), but the outer periphery of the inner tube 14 is spiral.
  • the heat-receiving fluid and the heat-dissipating fluid always flow at a high speed in the substantially identical shape of the flow path without branching, the dust or the like hardly accumulates in the flow path. Even if the liquid accumulates, it can be washed out relatively easily by simply flowing an internal cleaning fluid such as cleaning water or cleaning air.
  • the main body casing 16 is erected so that the axis thereof is directed in the vertical direction, and at the lower end portion of the main body casing 16, the heat receiving fluid inlet 18 a connected to the heat receiving fluid passage 18 and the radiating fluid passage 20 are provided.
  • a continuous heat dissipation fluid outlet 20 b is opened, and a heat receiving fluid outlet 18 b connected to the heat receiving fluid flow path 18 and a heat dissipation fluid inlet 20 a connected to the heat dissipation fluid flow path 20 are opened at the upper end portion of the main body casing 16.
  • the heat-dissipating fluid and the heat-receiving fluid that are in contact with each other via the heat transfer plate 22 are countercurrent, the heat exchange efficiency is further improved, and the apparatus can be made compact.
  • the above internal cleaning fluid is simply supplied to each of the heat receiving fluid outlet 18b and the radiating fluid inlet 20a provided at the upper end portion of the main casing 16, and thereafter the internal cleaning fluid flows down according to gravity or the like. The inside of the heat exchanger 10 can be easily cleaned.
  • a head box that divides a space communicating with the heat receiving fluid outlet 18b and the radiating fluid inlet 20a at the upper portion of the main body casing 16. 24, and the heat receiving fluid outlet 18b and the radiating fluid inlet 20a are connected to the upper end surface of the main casing 16 through inclined surfaces 26b and 26c having the same top portion 26a, and the fluid applied to the top portion 26a is connected to the heat receiving fluid outlet 18b.
  • a guide member 26 that guides to the radiating fluid inlet 20a.
  • each of the heat receiving fluid passage 18 and the heat radiating fluid passage 20 is automatically applied to each of the heat receiving fluid passage 18 and the heat radiating fluid passage 20 simply by injecting and supplying a fluid for cleaning the inside of the heat exchanger such as washing water toward the top portion 26a of the guide member 26.
  • a fluid for internal cleaning it is possible to supply a fluid for internal cleaning.
  • the exhaust gas treatment apparatus is an apparatus that uses the heat exchanger 10 described above.
  • the exhaust gas treatment apparatus is configured as follows. That is, a reaction tower 32 comprising the heat exchanger 10 and a heating means 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10, and a reaction tower At least one of a wet inlet scrubber 34 for washing the exhaust gas E to be treated introduced into the liquid 32 and a wet outlet scrubber 36 for washing the exhaust gas E after the thermal decomposition in the reaction tower 32 is provided.
  • An exhaust gas treatment apparatus is an apparatus that uses the heat exchanger 10 described above.
  • the exhaust gas treatment apparatus is configured as follows. That is, a reaction tower 32 including the heat exchanger 10 and a heating unit 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10 is provided.
  • a reaction tower 32 including the heat exchanger 10 and a heating unit 30 for heating the exhaust gas E to be treated that has flowed through the heat receiving fluid passage 18 of the heat exchanger 10 is provided.
  • the heat receiving fluid passage 18 near the heat receiving fluid inlet 18a and the heat radiating fluid passage 20 near the radiating fluid outlet 20b is washed with the exhaust gas E.
  • a spray nozzle 40 is provided.
  • a high-efficiency heat exchanger that can secure a sufficient heat transfer area despite being compact, and that can easily perform internal cleaning and maintenance, and such a heat exchanger are provided. It is possible to provide an exhaust gas treatment apparatus that can perform efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas.
  • FIG. 1 shows an outline of an exhaust gas treatment apparatus 11A equipped with a heat exchanger 10 of the present invention.
  • This exhaust gas treatment apparatus 11A is an apparatus for detoxifying exhaust gas E containing monosilane (SiH 4 ), chlorine-based gas, PFCs (perfluoro compounds), etc. discharged from a semiconductor manufacturing apparatus (not shown).
  • the exhaust gas treatment device 11A is configured by installing an inlet scrubber 34, a reaction tower 32, and an outlet scrubber 36 in this order along the treatment flow of the exhaust gas E, and further adding an exhaust fan 42, a water tank 44, and the like.
  • the relatively thick line arrow indicates the one before pyrolysis
  • the relatively thin line arrow indicates the one after pyrolysis. (The same applies to FIGS. 2 and 3 described later).
  • the inlet scrubber 34 absorbs dust, water-soluble gas, and the like contained in the exhaust gas E discharged from the semiconductor manufacturing apparatus (not shown) with the cleaning water and cleans and removes it from the exhaust gas E.
  • the inlet scrubber main body 34a The spray nozzle 34b is disposed inside the scrubber body 34a and sprays pre-pyrolysis cleaning water PW on the exhaust gas E before being supplied to the reaction tower 32 to clean it.
  • pre-pyrolysis washing water PW water or an aqueous solution to which a chemical solution such as alkali or acid such as ammonia or NaOH is added is used depending on the purpose.
  • the top portion of the inlet scrubber 34 is connected to a semiconductor manufacturing apparatus (not shown) via an inlet duct 46, and various exhaust gases E discharged in the semiconductor manufacturing process pass through the inlet duct 46 and reach the top portion of the inlet scrubber 34.
  • symbol 34c in FIG. 1 is a filler for accelerating
  • the inlet scrubber 34 and the water tank 44 are provided separately, and both are connected by a flush gas supply pipe 48 and a drain pipe 50 branched from the flush gas supply pipe 48. For this reason, the waste water from the inlet scrubber 34 is sent to the shower water recovery tank 44a (described later) provided in the water tank 44 through the flush gas supply pipe 48 and the drain pipe 50. Further, the water tank side end 50a of the drain pipe 50 is sealed by being disposed at a position lower than the water surface of the shower water recovery tank 44a.
  • the spray nozzle 34 b and the shower water recovery tank 44 a are connected via a pipe 52, and a pump 54 is attached in the middle of the pipe 52.
  • the pump 54 supplies the pre-pyrolysis cleaning water PW stored in the shower water recovery tank 44a to the spray nozzle 34b.
  • the inlet scrubber 34 may be erected on the shower water recovery tank 44a, and the inside of the inlet scrubber 34 and the inside of the water tank 44 may directly communicate with each other.
  • the reaction tower 32 is a device for thermally decomposing the exhaust gas E, and has a heat exchanger 10 and a heating means 30.
  • the heat exchanger 10 has a double-pipe structure main body casing 16 composed of an outer tube 12 and an inner tube 14 formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes Co., Ltd.). It is made of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes), and the internal space formed between the outer tube 12 and the inner tube 14 is divided into a heat receiving fluid passage 18 and a radiating fluid passage 20. And the heat transfer plate 22 to be configured.
  • the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. Is done.
  • the outer tube 12 and the inner tube 14 forming the main body casing 16 may have any shape such as a circular tube or a rectangular tube.
  • the shapes of the outer tube 12 and the inner tube 14 of the main body casing 16 are rectangular, the following operations and effects can be achieved. That is, the turbulent flow is caused by the heat receiving fluid and the heat radiating fluid flowing through the heat receiving fluid flow channel 18 and the heat radiating fluid flow channel 20 abutting substantially perpendicular to the wall surface at the corner portion. And since turbulent flow occurs in this way, the heat transfer effect (heat transfer rate) increases several times, the heat exchange efficiency of the entire heat exchanger can be increased, and dust etc. adhere to the wall surface of the flow path Can be suppressed.
  • the main body casing 16 is erected so that the axis thereof faces the vertical direction, and the lower end portion of the main body casing 16, more specifically, the lower end outer peripheral surface of the outer tube 12.
  • a heat receiving fluid inlet 18 a connected to the heat receiving fluid passage 18 and a radiating fluid outlet 20 b connected to the radiating fluid passage 20 are opened.
  • the downstream end of the flush gas supply pipe 48 is connected to the heat receiving fluid inlet 18a, and the exhaust gas E thermally decomposed in the reaction tower 32 is supplied to the water tank 44 to the radiating fluid outlet 20b.
  • a cracked gas supply pipe 56 is connected.
  • the opening position of the heat receiving fluid inlet 18a and the heat radiating fluid outlet 20b is not limited to the above position as long as the heat receiving fluid inlet 18a and the radiating fluid outlet 20b are provided at the lower end portion of the main body casing 16. A lower end surface may be sufficient.
  • a heat receiving fluid outlet 18 b connected to the heat receiving fluid passage 18 and a radiating fluid inlet 20 a connected to the radiating fluid passage 20 will be established.
  • the heat exchanger 10 of this embodiment it is comprised so that a thermal radiation fluid and a heat receiving fluid may become countercurrent.
  • the opening positions are not limited to the above positions. It may be the upper end surface.
  • the high temperature side is the upper part and the low temperature side is the lower part, making it ideal as an energy-saving device with low heat dissipation and high heat exchange efficiency. It has become the arrangement.
  • a head box 24 that is formed of a metal material such as stainless steel or Hastelloy (registered trademark of Haynes) and that divides a space that communicates the heat receiving fluid outlet 18b and the radiating fluid inlet 20a is attached to the upper portion of the main casing 16.
  • a metal or ceramic guide member 26 that connects the heat receiving fluid outlet 18b and the radiating fluid inlet 20a is mounted on the upper end surface of the main casing 16 through inclined surfaces 26b and 26c having a common top portion 26a.
  • a spray nozzle 28 is attached at a position directly above the top portion 26a of the guide member 26 in the head box 24, and sprayed from the spray nozzle 28 toward the top portion 26a of the guide member 26 when necessary.
  • the shower water SW which is a fluid for cleaning the heat exchanger, is guided by the inclined surfaces 26b and 26c of the guide member 26 and supplied to the heat receiving fluid outlet 18b and the radiating fluid inlet 20a. Further, as shown in FIG. 2, the bottom of the head box 24 is provided with an inclination for guiding the shower water SW and the like to the heat receiving fluid outlet 18b and the radiating fluid inlet 20a.
  • the main body casing 16 and the head box 24 are exposed. However, in order to further improve the heat utilization rate of the heat exchanger 10, a head is used.
  • the arrangement of the flow path and the temperature distribution of the entire heat exchanger 10 has an ideal arrangement in which the high temperature side is the upper part and the low temperature side is the lower part. If a heat insulating material is pasted on the outer surface and the upper part of the outer peripheral surface of the outer tube 12 in the main body casing 16, the heat utilization efficiency can be sufficiently improved.
  • the heating means 30 is a heat source for thermally decomposing the exhaust gas E.
  • the heating means 30 is made of ceramic such as alumina, or inside a protective tube made of metal such as Hastelloy (registered trademark of Haynes) or stainless steel, ceramic such as SiC, nichrome wire, or Kanthal (Sandvik AB An electric heater equipped with a heating resistor made of a metal wire such as a company registered trademark) wire is used.
  • a plurality of heating means 30 are installed in the vicinity of the flow path of the exhaust gas E in the head box 24, specifically, inside the guide member 26 and inside the inner wall of the head box 24 facing the guide member 26. Yes.
  • the electric heating heater as the heating means 30 is provided with a power supply terminal at the rear end thereof, and a power supply device is connected to the power supply terminal via a lead wire.
  • the heating means 30 can supply high-temperature heat capable of thermally decomposing the exhaust gas E, the mode is not limited to the above-mentioned electric heating heater, for example, a flame type burner or the like There may be.
  • the number of installed devices may be one instead of a plurality as described above.
  • the heating means 30 when an auxiliary combustion gas such as oxygen or air is required for the removal of the exhaust gas E, the gas is introduced into the reaction tower 32 from the heat receiving fluid inlet 18 a together with the exhaust gas E. Or may be supplied directly into the head box 24.
  • the outlet scrubber 36 is for cleaning and cooling the exhaust gas thermally decomposed in the reaction tower 32, and is a straight tubular scrubber erected on the upper surface of an outlet scrubber drainage recovery tank 44b (described later) constituting the water tank 44.
  • the outlet scrubber 36 has a spray nozzle 36 b and a water tank 44 (more specifically, an outlet scrubber drainage recovery tank 44 b) connected via a pipe 60 in the illustrated embodiment.
  • the cleaning water CW in the outlet scrubber drainage recovery tank 44b is pumped up to the spray nozzle 36b by a pump 62 attached in the middle of the pipe 60.
  • new chemicals such as fresh water are supplied as necessary.
  • symbol 64 in FIG. 1 is a cooling device which cools the washing water CW supplied to the spray nozzle 36b from the exit scrubber waste_water
  • the exhaust fan 42 is connected to the top outlet of the outlet scrubber 36.
  • the water tank 44 is a tank that stores the pre-pyrolysis cleaning water PW, the shower water SW, and the cleaning water CW, and the inside thereof is divided into a shower water recovery tank 44a and an outlet scrubber drainage recovery tank 44b by a partition member 66.
  • the partition member 66 is a plate material erected from the bottom surface in the water tank 44, and an opening 68 is provided between the upper end of the partition member 66 and the top surface in the water tank 48, as will be described later.
  • the exhaust gas E passes through the opening 68.
  • the shower water recovery tank 44a collects the pre-pyrolysis washing water PW sprayed from the inlet scrubber 34 and the shower water SW sprayed from the spray nozzle 28, and also to the inlet scrubber 34 and spray nozzle 28.
  • the outlet scrubber drainage recovery tank 44b collects new chemicals such as the washing water CW discharged from the spray nozzle 36b of the outlet scrubber 36 and fresh water supplied as needed, and the spray nozzle 36b of the outlet scrubber 36. It is a water tank which stores the water etc. which are supplied to water, ie, washing water CW.
  • the drain pipe 70 is disposed so that a predetermined amount or more of water does not accumulate.
  • the drain pipe 70 is a pipe for sending water or the like stored in the shower water recovery tank 44a to a waste water treatment apparatus (not shown). One end of the drain pipe 70 is connected to the waste water treatment apparatus and the other end is shower water. It is arranged at a predetermined height from the bottom surface of the collection tank 44a. Therefore, the water surface position of the shower water recovery tank 44 a is not higher than the position of the other end of the drain pipe 70.
  • the portion other than the inside of the head box 24 of the reaction tower 32 is caused by a corrosive component such as hydrofluoric acid contained in the exhaust gas E or generated by decomposing the exhaust gas E.
  • a corrosive component such as hydrofluoric acid contained in the exhaust gas E or generated by decomposing the exhaust gas E.
  • corrosion-resistant lining and coating are applied with vinyl chloride resin, polyethylene resin, unsaturated polyester resin, and fluororesin.
  • an operation switch (not shown) of the exhaust gas treatment device 11A is turned on to react.
  • the heating means 30 in the tower 32 is activated and heating in the head box 24 is started.
  • the exhaust fan 42 is activated, and the exhaust gas E to the exhaust gas treatment device 11A is activated.
  • the exhaust gas E passes through the inlet scrubber 34, the reactor 32, and the outlet scrubber 36 in this order, and the components to be removed in the exhaust gas E are removed.
  • the heat exchanger 10 is configured as described above, and therefore, the following effects are exhibited when the exhaust gas E is thermally decomposed. That is, the heat receiving fluid passage 18 and the radiating fluid passage 20 are adjacent to each other in the axial direction of the main casing 16 and are formed in a spiral shape over the entire axial direction of the main casing 16. It is possible to maximize the contact area between the heat receiving fluid and the heat radiating fluid that are in contact via the plate 22, that is, the heat transfer area.
  • the low-temperature heat-receiving fluid always comes into contact with the heat-dissipating fluid having a higher temperature, thereby improving heat exchange efficiency be able to.
  • the heat receiving fluid passage 18 and the radiating fluid passage 20 of the heat exchanger 10 have a shape that spirals around the outer periphery of the inner pipe 14, It is difficult for dust to accumulate in the road, and even if dust accumulates, it can be washed out relatively easily simply by flowing an internal cleaning fluid such as cleaning water or cleaning air.
  • a guide member 26 is provided on the upper end surface of the main casing 16 of the upright heat exchanger 10, and shower water is provided at a position directly above the apex 26a of the guide member 26.
  • the shower water SW for cleaning the heat exchanger is simply sprayed and supplied toward the top portion 26a of the guide member 26, so that the heat receiving fluid outlet 18b and the radiating fluid inlet 20a are provided.
  • the shower water SW can be automatically supplied to each. Then, the shower water SW supplied to each of the heat receiving fluid outlet 18b and the radiating fluid inlet 20a flows down the inside of the heat exchanger 10 according to gravity or the like to wash away dust and the like accumulated in the heat exchanger 10.
  • said embodiment can be changed as follows.
  • the case where both the inlet scrubber 34 and the outlet scrubber 36 are provided has been shown, but either one of them may be provided depending on the type of exhaust gas E to be treated.
  • the exhaust gas treatment apparatus 11B of the second embodiment shown in FIG. 3 will be described.
  • the difference from the first embodiment described above is that the inlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 are omitted, and the spray nozzle 40 is disposed inside the lower side of the heat exchanger 10.
  • the same components are denoted by the same reference numerals as those in the first embodiment, and the description of the first embodiment is used in the description of the first embodiment. Replace.
  • each code when each part is indicated by a superordinate concept, it is indicated by only Arabic numerals without an alphabet branch number, and when it is necessary to distinguish each part (ie, when it is indicated by a subordinate concept)
  • the branch numbers are distinguished by adding Arabic numerals.
  • the spray nozzle 40 is for injecting the shower water SW to wash the exhaust gas E, and in the heat exchanger 10, the heat receiving fluid in the heat receiving fluid passage 18 near the heat receiving fluid inlet 18a and the heat radiating fluid in the vicinity of the heat radiating fluid outlet 20b.
  • a plurality of the flow paths 20 are installed.
  • the spray nozzle 40 ⁇ / b> A installed in the heat receiving fluid passage 18 near the heat receiving fluid inlet 18 a faces the flow of the exhaust gas E supplied from the heat receiving fluid inlet 18 a into the heat receiving fluid passage 18.
  • the shower water SW is sprayed in the direction to be performed, and the same function as the inlet scrubber 34 is exhibited.
  • the spray nozzle 40B installed in the heat dissipation fluid passage 20 near the heat dissipation fluid outlet 20b is parallel to the flow of the exhaust gas E toward the heat dissipation fluid outlet 20b in the heat dissipation fluid passage 20.
  • the shower water SW is sprayed and exhibits the same function as the outlet scrubber 36.
  • the water tank 72 is directly connected to the heat receiving fluid inlet 18a.
  • the water tank 72 is a tank that collects the spray water SW sprayed from the spray nozzle 40 ⁇ / b> A as drainage W, and its internal space is connected to a semiconductor manufacturing apparatus (not shown) via an inlet duct 46.
  • a water tank 74 is directly connected to the radiating fluid outlet 20b.
  • the water tank 74 is a tank that collects the spray water SW sprayed from the spray nozzle 40 ⁇ / b> B as drainage W, and its internal space is connected to the exhaust fan 42.
  • fresh water is supplied to the spray nozzle 40B, and the waste water W collected in the water tank 74 is pumped up by the pump 76 and supplied to the spray nozzle 40A.
  • the water supplied to each spray nozzle 40 is not limited to these modes. For example, all fresh water may be used, or all the waste water W collected in the water tank 72 and / or the water tank 74 may be used. You may make it use it.
  • the inlet scrubber 34 and the outlet scrubber 36 before and after the reaction tower 32 can be omitted, so that the exhaust gas treatment apparatus 11B can be made compact.
  • the exhaust gas treatment apparatus 11B of the second embodiment also includes the heat exchanger 10, so that efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas is possible.
  • the exhaust gas treatment apparatus 11B of the second embodiment also includes the heat exchanger 10, so that efficient thermal decomposition (detoxification) treatment of large-capacity exhaust gas is possible.
  • the rectangular tubular body casing 16 has a height of 1000 mm
  • the outer tube 12 has a horizontal cross-sectional shape of a rectangle having a side of 400 mm
  • the inner tube 14 has a horizontal cross-sectional shape of a rectangle having a side of 200 mm
  • the main body casing 16 has a height of 1000 mm.
  • said 2nd Embodiment can be changed as follows.
  • the case where the spray nozzle 40 is installed in both the heat receiving fluid passage 18 and the radiating fluid passage 20 is shown. You may make it install the spray nozzle 40 in one side.
  • the above-mentioned 1st and 2nd embodiment demonstrated the form applied to the waste gas removal apparatus 11A and 11B for removing the heat exchanger 10 from the semiconductor manufacturing apparatus, the said heat exchange
  • the use of the vessel 10 is not limited to this, and can be applied to any other device as long as heat exchange between fluids containing much dust and the like is required.

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  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Treating Waste Gases (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)

Abstract

L'invention concerne un échangeur thermique, avec lequel une zone de transfert thermique suffisante peut être garantie et dont l'intérieur peut facilement être nettoyé et entretenu. L'invention concerne également un dispositif de traitement de gaz d'échappement qui utilise ledit échangeur thermique. L'échangeur thermique (10) est conçu avec : un boîtier (16) de corps principal ayant une structure à double tuyau comprenant un tuyau externe (12) et un tuyau interne (14) ; et des plaques (22) de transfert thermique qui divisent l'espace intérieur formé entre le tuyau externe (12) et le tuyau interne (14) en un trajet (18) d'écoulement de fluide recevant de la chaleur et un trajet (20) d'écoulement de fluide rayonnant de la chaleur. En outre, le trajet (18) d'écoulement de fluide recevant de la chaleur et le trajet (20) d'écoulement de fluide rayonnant de la chaleur sont formés de manière à être adjacents l'un à l'autre dans la direction axiale du boîtier (16) de corps principal et de manière à avoir une forme hélicoïdale sur la totalité du boîtier (16) de corps principal dans la direction axiale.
PCT/JP2014/002768 2014-05-26 2014-05-26 Échangeur thermique et dispositif de traitement de gaz d'échappement utilisant ledit échangeur thermique Ceased WO2015181846A1 (fr)

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PCT/JP2014/002768 WO2015181846A1 (fr) 2014-05-26 2014-05-26 Échangeur thermique et dispositif de traitement de gaz d'échappement utilisant ledit échangeur thermique
KR1020167033092A KR102262643B1 (ko) 2014-05-26 2015-05-22 열 교환기 및 상기 열 교환기를 사용한 배기 가스 처리 장치
PCT/JP2015/002599 WO2015182094A1 (fr) 2014-05-26 2015-05-22 Échangeur thermique et dispositif de traitement de gaz d'échappement utilisant ledit échangeur thermique
CN201580029176.2A CN106471325B (zh) 2014-05-26 2015-05-22 热交换器以及利用该热交换器的排气处理装置
JP2016523134A JP6336059B2 (ja) 2014-05-26 2015-05-22 熱交換器及び該熱交換器を用いた排ガス処理装置
TW104116830A TW201616078A (zh) 2014-05-26 2015-05-26 熱交換器及使用該熱交換器之排氣處理裝置

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PCT/JP2014/002768 WO2015181846A1 (fr) 2014-05-26 2014-05-26 Échangeur thermique et dispositif de traitement de gaz d'échappement utilisant ledit échangeur thermique

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WO2021141482A1 (fr) * 2020-01-10 2021-07-15 Hernandez Olvera Ciro Alfredo Dispositif de capture d'émissions contenant de la graisse
JP2022006813A (ja) * 2020-06-25 2022-01-13 株式会社エーアイテック 熱交換器
US11788801B2 (en) * 2017-10-13 2023-10-17 Volvo Truck Corporation Heat exchanger and an additive manufacturing method for manufacturing a heat exchanger

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CN108686612A (zh) * 2018-08-02 2018-10-23 汤铁 管式逆流换热反应器
KR20230025435A (ko) * 2020-07-07 2023-02-21 칸켄 테크노 가부시키가이샤 가스 처리로 및 이것을 사용한 배기 가스 처리 장치
KR102489504B1 (ko) * 2021-07-19 2023-01-17 한밭대학교 산학협력단 연기 및 냄새 제거 효율이 향상된 실내용 로스팅 장치

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US11788801B2 (en) * 2017-10-13 2023-10-17 Volvo Truck Corporation Heat exchanger and an additive manufacturing method for manufacturing a heat exchanger
WO2021141482A1 (fr) * 2020-01-10 2021-07-15 Hernandez Olvera Ciro Alfredo Dispositif de capture d'émissions contenant de la graisse
US20230034971A1 (en) * 2020-01-10 2023-02-02 Ciro Alfredo Hernandez Olvera Device for Capturing Oily Emissions
JP2022006813A (ja) * 2020-06-25 2022-01-13 株式会社エーアイテック 熱交換器

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TW201616078A (zh) 2016-05-01
KR20170012265A (ko) 2017-02-02
CN106471325A (zh) 2017-03-01
JPWO2015182094A1 (ja) 2017-04-20
WO2015182094A1 (fr) 2015-12-03
CN106471325B (zh) 2019-02-15
KR102262643B1 (ko) 2021-06-10

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