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WO2015032619A1 - Transducteur de mesure de pression - Google Patents

Transducteur de mesure de pression Download PDF

Info

Publication number
WO2015032619A1
WO2015032619A1 PCT/EP2014/067715 EP2014067715W WO2015032619A1 WO 2015032619 A1 WO2015032619 A1 WO 2015032619A1 EP 2014067715 W EP2014067715 W EP 2014067715W WO 2015032619 A1 WO2015032619 A1 WO 2015032619A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
pressure sensor
sensor module
sensor
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2014/067715
Other languages
German (de)
English (en)
Inventor
Gilbert Alexander Erdler
Dominik Herzog
Thomas Himmelsbach
Markus Pfeiffer
Erich Schwabenland
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of WO2015032619A1 publication Critical patent/WO2015032619A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0645—Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0015—Fluidic connecting means using switching means

Definitions

  • the invention relates to a pressure transducer with a disk-shaped pressure sensor module, which has a pressure sensor on a disk-shaped sensor carrier, wherein the sensor carrier is firmly connected in the edge region with a pressure feed body, according to the preamble of claim 1.
  • a pressure transducer is already known.
  • a standard pressure sensor is provided there with a base and this is connected to the outer edge by welding with a Druckzu leadership body.
  • To increase the mechanical stability of the pressure sensor module is located on an intermediate filling of resin with its back to the bottom of a cap-like component. The bottom of the cap-like component thus supports the base.
  • the socket has lead wires in a spatial arrangement, as is common in so-called T08 sockets.
  • a low-pressure side connection pipe for realizing a channel for connecting the sensor rear side with atmospheric pressure is led out, as well as a filling pipe, which serves to fill a pressure supply channel in the pressure supply body with a silicone oil.
  • the opposite side of the pressure feed channel is closed by a separation membrane.
  • An insulating tube with its one end is pushed onto the low-pressure side connection tube.
  • the other end of the insulating tube is inserted into a substantially parallel to the pressure guide channel extending bore of the cap-like component, which leads via a lateral opening to the outside.
  • Hose for connecting the sensor back with the atmosphere surrounding the pressure transducer is arranged, DE 42 44 460 Cl.
  • the respective arrangement of the channel for connecting the sensor back with the atmosphere surrounding the pressure transducer which is an electronic circuit arrangement, which is located in a housing of the pressure transducer, in the event of pressure overload of the pressure sensor with accompanying mechanical breakthrough of the sensor membrane is protected from damage.
  • silicone can be used as tube material in standard pressure transmitters or in pressure transmitters with a pressure-resistant version of the transmitter housing polyether ether ketone (PEEK).
  • PEEK polyether ether ketone
  • the tubing must be bent and glued or welded in place if it is not already preformed.
  • unwanted mechanical stresses can occur in the bending process and the welding in the pressure sensor, on the other hand, these processes are associated with considerable effort during assembly.
  • automating assembly operations to reduce manufacturing costs and scrap rates is difficult.
  • the invention is therefore based on the object to provide a pressure transducer whose production is associated with a lower effort.
  • the invention has the advantage that, with particularly low assembly costs and high production reliability, protection of the electronic circuit arrangement in the housing of the pressure measuring Transformer can be achieved from damage caused by sensor breakage.
  • the assembly of a tube made of silicone or PEEK is no longer required and the number of components is thus reduced.
  • the reference pressure connection of the sensor rear side already takes place with the assembly of the pressure sensor module on the pressure feed body, so that it can be designated as a reference pressure connection integrated in the pressure sensor module.
  • Such a pressure sensor module is mounted as a prefabricated component on the Druckzuke- rungs emotionss. This process is easier to automate and reduces the risk of assembly errors.
  • the yield in the manufacturing process is improved and reduces the expense associated with the production. Manufacturing steps in assembly are required in smaller numbers and at the same time easier, faster and more reliable than previously feasible.
  • Hose which were associated with the risk of contamination of the pressure transmitter, such as silicone oil. Because of a possible silicone oil contamination especially in the pressure-resistant design of the pressure transmitter previously performed furnace and cleaning processes are no longer required in an advantageous manner.
  • pressure transmitters can be produced with comparatively low costs, in which, as in the pressure transducers known from DE 42 44 459 C1 or DE 42 44 460 C1, protection of the electronic circuitry of the pressure transducer against damage in the event of break-through Pressure sensor diaphragm is achieved in pressure overload, that a portion of the channel, which serves to connect the sensor back with the atmosphere surrounding the pressure transducer, substantially parallel to the pressure supply passage in the pressure-feeding body runs.
  • the pressure sensor module on a disk-shaped sensor carrier made of high-strength steel and it is for connecting the sensor back to the outlet opening of the portion of the
  • this method allows the secure welding of high-strength steels or Kovar alloys, which are advantageous as material for the disk-shaped sensor carrier can be used. This allows a smaller thickness of the sensor carrier and a shorter line feedthrough, which also reduces the manufacturing cost of the pressure transducer.
  • FIG. 2 shows a perspective view of the top side of a pressure transmitter
  • Figure 3 is a perspective view of the bottom of the
  • a pressure sensor module 1 is arranged in a pot-shaped recess 2 of a pressure feed body 3.
  • the pressure feed body 3 has a pressure feed channel 4, which is widened in its upper part 5.
  • a stopper 6, for example made of stealite is pressed, which can form a flame arresting safe route together with the channel 4 due to its properties and dimensions.
  • the channel 4 is filled with a diaphragm seal, for example a silicone oil, through a filling tube 7, which was closed after the filling process.
  • the one, lower side of a membrane of a pressure sensor 8 is surrounded by the pressure transmitter located in the channel 4, so that the pressure introduced from a process side via a separating membrane 9 is transmitted to the sensor 8.
  • the upper side of the membrane of the pressure sensor 8 is designed as a low-pressure or reference pressure side via a disk-shaped sensor carrier.
  • ger ger 10 attached opening 11, a pipe 12, a channel 13 and a side outlet opening 14 through connected to the atmosphere surrounding the pressure transducer.
  • a filter 15 is arranged in the channel 13.
  • the pressure sensor module 1 is an electronic circuit arrangement for evaluating the signals of the pressure sensor 8 with the purpose of calculating a pressure value, which is used for example in a process engineering plant as a process variable for process control.
  • Electronic circuitry and housing of the pressure transducer are of no significance to the understanding of the invention and therefore not shown in the drawings. They may, for example, be designed as described in the already mentioned DE 42 44 460 C1.
  • the supply of the signals from the pressure sensor 8 to the electronic circuit arrangement takes place in a known manner via bonding wires, line bushings 16 and a multi-core ribbon cable 17, not shown.
  • the arrangement of the cable bushings 16 corresponds to that of a conventional T08 socket, wherein one is replaced by the filling tube 7 ,
  • the sensor carrier 10 forms a low-tension mechanical base for the glued and / or soldered pressure sensor 8.
  • the sensor carrier 10 is made of a high-strength steel or a Kovar alloy and can be made comparatively thin as a disk-shaped plate. Its stability is hardly affected by the pressure-tight cable bushings 16 for the electrical signals and by the filling and reference pressure ports.
  • the sensor carrier 10 may be firmly connected to the bottom of the cup-shaped recess 2 of the pressure feed body 3 in a sealing and pressure-resistant manner, for example by laser or capacitor discharge welding. In this case, a capacitor discharge welding is preferably used, since this offers the advantages explained above for the pressure transducer. So that temperature fluctuations of the transmitter do not lead to additional mechanical stresses in the sensor carrier 10, this is Tube 12 is preferably made of a VACON alloy with a defined thermal expansion coefficient.
  • a pressure sensor module 1 shown in FIGS. 2 and 3 is provided as a prefabricated component during the assembly process, in which the tube 12 is already welded with its two ends before the pressure sensor module 1 is welded to the pressure feed body 3.
  • no further assembly step is required for attaching a separate reference pressure hose and gluing the ends thereof, as was previously the case, so that the new pressure transmitter, as already explained in detail above, is associated with a significantly lower production cost.
  • the channel for connecting the rear side of the pressure sensor 8 with the atmosphere surrounding the pressure transmitter points outwards past the electronic circuit arrangement, it is ensured that no process medium penetrates into the housing interior due to overload due to overload.
  • connection between the back of the pressure sensor 8 and the substantially parallel to the pressure supply channel 4 extending channel - section 13 is produced with the correct position welding of the pressure sensor module 1 in Druckzu outs stresses 3, since the pressure sensor module 1 with its disk surface a Outlet opening 18 of the extending in the pressure feed body 3 section 13 of the atmosphere communication channel, as shown in Figure 1.
  • the pressure sensor module 1 whose upper side is shown in FIG. 2 and its underside in FIG. 3, consists essentially of the sensor carrier 10, which is made of high-strength steel, seven pressure-tight electrical cable bushings 16, a pressure-tight feedthrough with the filling tube 7 and It is prefabricated as a component, so that the manufacturing steps during assembly significantly reduced and the risk of assembly errors due to an automated assembly are significantly reduced.
  • the pressure sensor module 1 shown can be used in both a standard measuring cell and a pressure-resistant design, so that the number of variants is reduced, which also has a favorable effect on the production cost.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

L'invention concerne un transducteur de mesure de pression compostant un module de détection de pression (1) en forme de disque qui présente un capteur de pression (8) et un support de capteur (10) en forme de disque. Un canal d'amenée de pression (4) et une section (13) d'un canal de raccordement à l'atmosphère (11, 12, 13, 14) s'étendent sensiblement parallèlement l'un à l'autre dans un corps d'amenée de pression (3). L'invention vise à réduire la complexité de la fabrication. A cet effet, le module de détection de pression (1) est préfabriqué sous la forme d'un élément qui, au moment de son soudage dans un évidement (2) en forme de pot du corps d'amenée de pression (3), porte déjà un tuyau (12) de raccordement du côté arrière du capteur de pression (8) à la section (13) du canal de raccordement à l'atmosphère. La section (13) du canal de raccordement à l'atmosphère est ainsi déjà reliée au côté arrière du capteur par le module de détection de pression (1) et le montage ultérieur d'un flexible de raccordement séparé n'est avantageusement plus nécessaire. Les étapes de montage peuvent en outre être facilement automatisées, et le risque d'erreurs de montage est réduit.
PCT/EP2014/067715 2013-09-03 2014-08-20 Transducteur de mesure de pression Ceased WO2015032619A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013217477.2A DE102013217477A1 (de) 2013-09-03 2013-09-03 Druckmessumformer
DE102013217477.2 2013-09-03

Publications (1)

Publication Number Publication Date
WO2015032619A1 true WO2015032619A1 (fr) 2015-03-12

Family

ID=51485566

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/067715 Ceased WO2015032619A1 (fr) 2013-09-03 2014-08-20 Transducteur de mesure de pression

Country Status (2)

Country Link
DE (1) DE102013217477A1 (fr)
WO (1) WO2015032619A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019130571A1 (de) * 2019-11-13 2021-05-20 Endress+Hauser SE+Co. KG Drucksensor zur Bestimmung des Drucks eines Prozessmediums

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3315266A1 (de) * 1983-04-27 1984-10-31 Fuji Electric Co., Ltd., Kawasaki, Kanagawa Halbleiter-drucksensor
WO1996006338A2 (fr) * 1994-08-22 1996-02-29 The Foxboro Company Transmetteur de pression differentielle
DE10316033A1 (de) * 2003-04-07 2004-10-21 Endress + Hauser Gmbh + Co. Kg Relativdruckmeßumformer

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4244459C1 (de) 1992-12-23 1994-05-11 Siemens Ag Druckmeßumformer
DE4244460C1 (de) 1992-12-23 1994-04-14 Siemens Ag Druckmeßumformer
EP1128172B1 (fr) * 2000-02-22 2011-04-06 Endress + Hauser GmbH + Co. KG Capteur de pression
DE10134586A1 (de) * 2001-07-17 2003-02-06 Siemens Ag Sensoreinrichtung zum Erfassen einer Dehnungsbeanspruchung
DE102009001133A1 (de) * 2009-02-25 2010-08-26 Endress + Hauser Gmbh + Co. Kg Drucksensor mit Halbleiterdruckmesswandler

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3315266A1 (de) * 1983-04-27 1984-10-31 Fuji Electric Co., Ltd., Kawasaki, Kanagawa Halbleiter-drucksensor
WO1996006338A2 (fr) * 1994-08-22 1996-02-29 The Foxboro Company Transmetteur de pression differentielle
DE10316033A1 (de) * 2003-04-07 2004-10-21 Endress + Hauser Gmbh + Co. Kg Relativdruckmeßumformer

Also Published As

Publication number Publication date
DE102013217477A1 (de) 2015-03-05

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